ATE390988T1 - In-situ-aktivierung eines dreidimensionalen festgelegten schleifkörpers - Google Patents

In-situ-aktivierung eines dreidimensionalen festgelegten schleifkörpers

Info

Publication number
ATE390988T1
ATE390988T1 AT04777083T AT04777083T ATE390988T1 AT E390988 T1 ATE390988 T1 AT E390988T1 AT 04777083 T AT04777083 T AT 04777083T AT 04777083 T AT04777083 T AT 04777083T AT E390988 T1 ATE390988 T1 AT E390988T1
Authority
AT
Austria
Prior art keywords
grinding body
fixed grinding
situ activation
dimensional fixed
abrasive article
Prior art date
Application number
AT04777083T
Other languages
English (en)
Inventor
John J Gagliardi
Christopher J Rueb
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of ATE390988T1 publication Critical patent/ATE390988T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
AT04777083T 2003-08-07 2004-06-24 In-situ-aktivierung eines dreidimensionalen festgelegten schleifkörpers ATE390988T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/636,792 US7160178B2 (en) 2003-08-07 2003-08-07 In situ activation of a three-dimensional fixed abrasive article

Publications (1)

Publication Number Publication Date
ATE390988T1 true ATE390988T1 (de) 2008-04-15

Family

ID=34116473

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04777083T ATE390988T1 (de) 2003-08-07 2004-06-24 In-situ-aktivierung eines dreidimensionalen festgelegten schleifkörpers

Country Status (10)

Country Link
US (1) US7160178B2 (de)
EP (1) EP1651386B1 (de)
JP (1) JP4634381B2 (de)
KR (1) KR101161883B1 (de)
CN (1) CN100519079C (de)
AT (1) ATE390988T1 (de)
DE (1) DE602004012864T2 (de)
MY (1) MY137233A (de)
TW (1) TWI327504B (de)
WO (1) WO2005016596A1 (de)

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US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9221154B2 (en) 1997-04-04 2015-12-29 Chien-Min Sung Diamond tools and methods for making the same
US9409280B2 (en) 1997-04-04 2016-08-09 Chien-Min Sung Brazed diamond tools and methods for making the same
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US20070060026A1 (en) * 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
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US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
US8622787B2 (en) * 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
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US20150017884A1 (en) * 2006-11-16 2015-01-15 Chien-Min Sung CMP Pad Dressers with Hybridized Abrasive Surface and Related Methods
JP5143020B2 (ja) * 2006-12-04 2013-02-13 パナソニック株式会社 封止材料及び実装構造体
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US20110159784A1 (en) * 2009-04-30 2011-06-30 First Principles LLC Abrasive article with array of gimballed abrasive members and method of use
US9221148B2 (en) 2009-04-30 2015-12-29 Rdc Holdings, Llc Method and apparatus for processing sliders for disk drives, and to various processing media for the same
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US20100330890A1 (en) * 2009-06-30 2010-12-30 Zine-Eddine Boutaghou Polishing pad with array of fluidized gimballed abrasive members
CN103221180A (zh) 2010-09-21 2013-07-24 铼钻科技股份有限公司 具有基本平坦颗粒尖端的超研磨工具及其相关方法
CN103329253B (zh) 2011-05-23 2016-03-30 宋健民 具有平坦化尖端的化学机械研磨垫修整器
US9067297B2 (en) * 2011-11-29 2015-06-30 Nexplanar Corporation Polishing pad with foundation layer and polishing surface layer
US9067298B2 (en) * 2011-11-29 2015-06-30 Nexplanar Corporation Polishing pad with grooved foundation layer and polishing surface layer
SG11201402224WA (en) * 2011-11-29 2014-09-26 Nexplanar Corp Polishing pad with foundation layer and polishing surface layer
US9597769B2 (en) 2012-06-04 2017-03-21 Nexplanar Corporation Polishing pad with polishing surface layer having an aperture or opening above a transparent foundation layer
US20190337119A1 (en) * 2016-12-21 2019-11-07 3M Innovative Properties Company Pad conditioner with spacer and wafer planarization system
US12043785B2 (en) 2017-07-11 2024-07-23 3M Innovative Properties Company Abrasive articles including conformable coatings and polishing system therefrom
CN111032285B (zh) 2017-08-25 2022-07-19 3M创新有限公司 表面突起抛光垫
SG11202108831UA (en) * 2019-02-13 2021-09-29 3M Innovative Properties Co Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof
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Also Published As

Publication number Publication date
WO2005016596A1 (en) 2005-02-24
CN1832829A (zh) 2006-09-13
KR20060118402A (ko) 2006-11-23
KR101161883B1 (ko) 2012-07-03
TW200524709A (en) 2005-08-01
CN100519079C (zh) 2009-07-29
JP4634381B2 (ja) 2011-02-16
DE602004012864D1 (de) 2008-05-15
TWI327504B (en) 2010-07-21
MY137233A (en) 2009-01-30
EP1651386B1 (de) 2008-04-02
EP1651386A1 (de) 2006-05-03
DE602004012864T2 (de) 2009-04-02
US20050032462A1 (en) 2005-02-10
US7160178B2 (en) 2007-01-09
JP2007501716A (ja) 2007-02-01

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