DE602004012864D1 - In-situ-aktivierung eines dreidimensionalen festgelegten schleifkörpers - Google Patents

In-situ-aktivierung eines dreidimensionalen festgelegten schleifkörpers

Info

Publication number
DE602004012864D1
DE602004012864D1 DE602004012864T DE602004012864T DE602004012864D1 DE 602004012864 D1 DE602004012864 D1 DE 602004012864D1 DE 602004012864 T DE602004012864 T DE 602004012864T DE 602004012864 T DE602004012864 T DE 602004012864T DE 602004012864 D1 DE602004012864 D1 DE 602004012864D1
Authority
DE
Germany
Prior art keywords
grinding body
situ activation
dimensionally determined
determined grinding
abrasive article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004012864T
Other languages
English (en)
Other versions
DE602004012864T2 (de
Inventor
John Gagliardi
Christopher Rueb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of DE602004012864D1 publication Critical patent/DE602004012864D1/de
Application granted granted Critical
Publication of DE602004012864T2 publication Critical patent/DE602004012864T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE602004012864T 2003-08-07 2004-06-24 In-situ-aktivierung eines dreidimensionalen festgelegten schleifkörpers Active DE602004012864T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US636792 1991-01-02
US10/636,792 US7160178B2 (en) 2003-08-07 2003-08-07 In situ activation of a three-dimensional fixed abrasive article
PCT/US2004/020415 WO2005016596A1 (en) 2003-08-07 2004-06-24 In situ activation of a three-dimensional fixed abrasive article

Publications (2)

Publication Number Publication Date
DE602004012864D1 true DE602004012864D1 (de) 2008-05-15
DE602004012864T2 DE602004012864T2 (de) 2009-04-02

Family

ID=34116473

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004012864T Active DE602004012864T2 (de) 2003-08-07 2004-06-24 In-situ-aktivierung eines dreidimensionalen festgelegten schleifkörpers

Country Status (10)

Country Link
US (1) US7160178B2 (de)
EP (1) EP1651386B1 (de)
JP (1) JP4634381B2 (de)
KR (1) KR101161883B1 (de)
CN (1) CN100519079C (de)
AT (1) ATE390988T1 (de)
DE (1) DE602004012864T2 (de)
MY (1) MY137233A (de)
TW (1) TWI327504B (de)
WO (1) WO2005016596A1 (de)

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US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9463552B2 (en) 1997-04-04 2016-10-11 Chien-Min Sung Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods
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US7384436B2 (en) * 2004-08-24 2008-06-10 Chien-Min Sung Polycrystalline grits and associated methods
US20070060026A1 (en) * 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
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US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
US8398466B2 (en) * 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8622787B2 (en) * 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8974270B2 (en) 2011-05-23 2015-03-10 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
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US20150017884A1 (en) * 2006-11-16 2015-01-15 Chien-Min Sung CMP Pad Dressers with Hybridized Abrasive Surface and Related Methods
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US8591764B2 (en) * 2006-12-20 2013-11-26 3M Innovative Properties Company Chemical mechanical planarization composition, system, and method of use
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TW200940258A (en) * 2007-11-13 2009-10-01 Chien-Min Sung CMP pad dressers
US9011563B2 (en) 2007-12-06 2015-04-21 Chien-Min Sung Methods for orienting superabrasive particles on a surface and associated tools
CN101925441B (zh) * 2007-12-31 2013-08-14 3M创新有限公司 经等离子处理的磨料制品及其制造方法
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US20110104989A1 (en) * 2009-04-30 2011-05-05 First Principles LLC Dressing bar for embedding abrasive particles into substrates
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DE102009030297B3 (de) * 2009-06-24 2011-01-20 Siltronic Ag Verfahren zum Polieren einer Halbleiterscheibe
DE102009030294B4 (de) * 2009-06-24 2013-04-25 Siltronic Ag Verfahren zur Politur der Kante einer Halbleiterscheibe
US20100330890A1 (en) 2009-06-30 2010-12-30 Zine-Eddine Boutaghou Polishing pad with array of fluidized gimballed abrasive members
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US9067297B2 (en) * 2011-11-29 2015-06-30 Nexplanar Corporation Polishing pad with foundation layer and polishing surface layer
KR101819539B1 (ko) * 2011-11-29 2018-01-17 캐보트 마이크로일렉트로닉스 코포레이션 기초 레이어 및 연마면 레이어를 가진 연마 패드
US9067298B2 (en) * 2011-11-29 2015-06-30 Nexplanar Corporation Polishing pad with grooved foundation layer and polishing surface layer
US9597769B2 (en) 2012-06-04 2017-03-21 Nexplanar Corporation Polishing pad with polishing surface layer having an aperture or opening above a transparent foundation layer
WO2018116122A1 (en) * 2016-12-21 2018-06-28 3M Innovative Properties Company Pad conditioner with spacer and wafer planarization system
CN113439010A (zh) * 2019-02-13 2021-09-24 3M创新有限公司 具有精确成形特征部的磨料元件、用其制成的磨料制品及其制造方法
CN117083152A (zh) * 2021-03-03 2023-11-17 应用材料公司 电机转矩监测期间的压力信号以提供空间分辨率

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Also Published As

Publication number Publication date
MY137233A (en) 2009-01-30
KR20060118402A (ko) 2006-11-23
CN100519079C (zh) 2009-07-29
ATE390988T1 (de) 2008-04-15
EP1651386B1 (de) 2008-04-02
EP1651386A1 (de) 2006-05-03
CN1832829A (zh) 2006-09-13
US7160178B2 (en) 2007-01-09
JP4634381B2 (ja) 2011-02-16
KR101161883B1 (ko) 2012-07-03
TW200524709A (en) 2005-08-01
JP2007501716A (ja) 2007-02-01
US20050032462A1 (en) 2005-02-10
DE602004012864T2 (de) 2009-04-02
TWI327504B (en) 2010-07-21
WO2005016596A1 (en) 2005-02-24

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: RUEB, CHRISTOPHER J., SAINT PAUL, MINN., US

Inventor name: GAGLIARDI, JOHN J., SAINT PAUL, MINN., US

8364 No opposition during term of opposition