ATE333443T1 - Verfahren zur behandlung keramischer substrate und dünnfilm-magnetkopf - Google Patents
Verfahren zur behandlung keramischer substrate und dünnfilm-magnetkopfInfo
- Publication number
- ATE333443T1 ATE333443T1 AT00930307T AT00930307T ATE333443T1 AT E333443 T1 ATE333443 T1 AT E333443T1 AT 00930307 T AT00930307 T AT 00930307T AT 00930307 T AT00930307 T AT 00930307T AT E333443 T1 ATE333443 T1 AT E333443T1
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- thin film
- film magnetic
- magnetic head
- ceramic substrates
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 7
- 238000000034 method Methods 0.000 title abstract 6
- 239000000919 ceramic Substances 0.000 title abstract 3
- 239000010409 thin film Substances 0.000 title abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052787 antimony Inorganic materials 0.000 abstract 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 150000002366 halogen compounds Chemical class 0.000 abstract 1
- 150000002367 halogens Chemical class 0.000 abstract 1
- 238000007654 immersion Methods 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 229910052756 noble gas Inorganic materials 0.000 abstract 1
- 150000002835 noble gases Chemical class 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/0027—Ion-implantation, ion-irradiation or ion-injection
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/40—Protective measures on heads, e.g. against excessive temperature
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/90—Electrical properties
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/10—Structure or manufacture of housings or shields for heads
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/10—Structure or manufacture of housings or shields for heads
- G11B5/102—Manufacture of housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Magnetic Heads (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/309,829 US6252741B1 (en) | 1999-05-11 | 1999-05-11 | Thin film magnetic recording head with treated ceramic substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE333443T1 true ATE333443T1 (de) | 2006-08-15 |
Family
ID=23199842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00930307T ATE333443T1 (de) | 1999-05-11 | 2000-05-01 | Verfahren zur behandlung keramischer substrate und dünnfilm-magnetkopf |
Country Status (8)
Country | Link |
---|---|
US (1) | US6252741B1 (de) |
EP (1) | EP1181261B1 (de) |
JP (1) | JP4947838B2 (de) |
AT (1) | ATE333443T1 (de) |
AU (1) | AU4815300A (de) |
DE (1) | DE60029438T2 (de) |
DK (1) | DK1181261T3 (de) |
WO (1) | WO2000068167A1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001011622A (ja) * | 1999-06-23 | 2001-01-16 | Sony Corp | 絶縁物の表面処理方法、プリンタヘッド及び記録媒体用基材 |
CN1158403C (zh) * | 1999-12-23 | 2004-07-21 | 西南交通大学 | 一种人工器官表面改性方法 |
US6747841B1 (en) | 2000-09-06 | 2004-06-08 | Seagate Technology Llc | Optimization of temperature dependent variations in shield and pole recession/protrusion through use of a composite overcoat layer |
US7123448B1 (en) * | 2000-10-13 | 2006-10-17 | Seagate Technology, Llc | Extended alumina basecoat advanced air bearing slider |
JP2002237008A (ja) * | 2001-02-08 | 2002-08-23 | Hitachi Ltd | 薄膜磁気ヘッド |
FR2821512B1 (fr) * | 2001-02-28 | 2003-05-30 | Thomson Multimedia Sa | Dispositifs de commande de fichiers audio et/ou video et dispositifs, procedes et produits d'emission correspondants |
US6813118B2 (en) | 2002-01-04 | 2004-11-02 | Seagate Technology Llc | Transducing head having improved studs and bond pads to reduce thermal deformation |
US6732421B2 (en) | 2002-03-22 | 2004-05-11 | Seagate Technology Llc | Method for producing magnetoresistive heads ion bombardment etch to stripe height |
US6876526B2 (en) * | 2002-06-12 | 2005-04-05 | Seagate Technology Llc | Bilayer shared pole extension for reduced thermal pole tip protrusion |
US7082016B2 (en) | 2002-07-22 | 2006-07-25 | Seagate Technology Llc | Multilayer magnetic shields with compensated thermal protrusion |
US20040045671A1 (en) * | 2002-09-10 | 2004-03-11 | Ed Rejda | Selective etching device |
US6836389B2 (en) * | 2002-09-27 | 2004-12-28 | Seagate Technology Llc | Slider basecoat for thermal PTR reduction |
US7123447B2 (en) | 2003-06-16 | 2006-10-17 | Seagate Technology Llc | Patterned multi-material basecoat to reduce thermal protrusion |
US7741003B2 (en) * | 2004-03-30 | 2010-06-22 | Hitachi Global Storage Technologies Netherlands B.V. | Photoresist transfer pads |
US7403356B1 (en) * | 2004-04-29 | 2008-07-22 | Seagate Technology Llc | Disk drive including slider mover having low thermal coefficient of resistivity |
US7411264B2 (en) * | 2004-11-18 | 2008-08-12 | Seagate Technology Llc | Etch-stop layers for patterning block structures for reducing thermal protrusion |
US7684148B2 (en) * | 2006-06-16 | 2010-03-23 | International Business Machines Corporation | Magnetic head with a conductive underlayer above substrate |
JP2008065903A (ja) * | 2006-09-07 | 2008-03-21 | Hitachi Global Storage Technologies Netherlands Bv | ヘッドスライダ |
US8004795B2 (en) * | 2007-12-26 | 2011-08-23 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic head design having reduced susceptibility to electrostatic discharge from media surfaces |
US20090201722A1 (en) * | 2008-02-12 | 2009-08-13 | Kamesh Giridhar | Method including magnetic domain patterning using plasma ion implantation for mram fabrication |
US8551578B2 (en) * | 2008-02-12 | 2013-10-08 | Applied Materials, Inc. | Patterning of magnetic thin film using energized ions and thermal excitation |
US8535766B2 (en) | 2008-10-22 | 2013-09-17 | Applied Materials, Inc. | Patterning of magnetic thin film using energized ions |
US20090199768A1 (en) * | 2008-02-12 | 2009-08-13 | Steven Verhaverbeke | Magnetic domain patterning using plasma ion implantation |
US10699741B1 (en) | 2019-01-08 | 2020-06-30 | International Business Machines Corporation | Multi-channel magnetic recording head having compliantly encapsulated transducers |
TWI751661B (zh) * | 2019-09-03 | 2022-01-01 | 日商興亞玻璃股份有限公司 | 無機組合物和無機組合物的製造方法 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4853514A (en) | 1957-06-27 | 1989-08-01 | Lemelson Jerome H | Beam apparatus and method |
US5039836A (en) | 1957-06-27 | 1991-08-13 | Lemelson Jerome H | Radiation manufacturing apparatus and method |
US4831230B1 (en) | 1957-06-27 | 1996-10-29 | Bankers Trust Company | Surface shaping and finishing apparatus and method |
US5064989B1 (en) | 1957-06-27 | 1996-10-29 | Jerome H Lemelson | Surface shaping and finishing apparatus and method |
US5308241A (en) | 1957-06-27 | 1994-05-03 | Lemelson Jerome H | Surface shaping and finshing apparatus and method |
US5231259A (en) | 1957-06-27 | 1993-07-27 | Lemelson Jerome H | Radiation manufacturing apparatus |
US5170032A (en) | 1957-06-27 | 1992-12-08 | Lemelson Jerome H | Radiation manufacturing apparatus and amendment |
FR2479560A1 (fr) | 1980-03-31 | 1981-10-02 | Sciaky Intertechnique | Machine pour le travail de metaux par faisceau d'electrons |
US4575923A (en) | 1983-04-06 | 1986-03-18 | North American Philips Corporation | Method of manufacturing a high resistance layer having a low temperature coefficient of resistance and semiconductor device having such high resistance layer |
US4696829A (en) | 1984-05-29 | 1987-09-29 | Georgia Tech Research Corporation | Process for increasing the wear life of ceramic dies and parts |
JPS61209975A (ja) | 1985-03-14 | 1986-09-18 | 株式会社豊田中央研究所 | 炭化珪素セラミツクス体の強化方法 |
JP2568521B2 (ja) * | 1986-10-03 | 1997-01-08 | 松下電器産業株式会社 | 複合焼結体 |
US4863809A (en) | 1988-03-10 | 1989-09-05 | Magnetic Peripherals, Inc. | Surface treatment for sliders and carbon coated magnetic media |
US5075130A (en) | 1990-11-19 | 1991-12-24 | The United States Of America As Represented By The Secretary Of The Army | Surface modification of boron carbide to form pockets of solid lubricant |
US5269895A (en) * | 1991-05-21 | 1993-12-14 | North American Philips Corporation | Method of making composite structure with single domain magnetic element |
EP0592219B1 (de) * | 1992-10-09 | 2001-07-25 | Canon Kabushiki Kaisha | Magnetkopf für magnetooptische Aufzeichnung und magnetooptisches Aufzeichnungsgerät |
JPH07129943A (ja) * | 1993-11-05 | 1995-05-19 | Hitachi Ltd | 磁気ヘッドスライダ及びその製造方法 |
JPH07172960A (ja) * | 1993-12-16 | 1995-07-11 | Nissan Motor Co Ltd | 耐異物衝撃性に優れた窒化ケイ素質セラミック製タービン部材 |
JPH07187862A (ja) * | 1993-12-24 | 1995-07-25 | Nissin Electric Co Ltd | 硬質炭素含有膜で被覆された酸化物セラミック基体及びその製造方法 |
US5476691A (en) | 1994-01-21 | 1995-12-19 | International Business Machines, Inc. | Surface treatment of magnetic recording heads |
US5558718A (en) | 1994-04-08 | 1996-09-24 | The Regents, University Of California | Pulsed source ion implantation apparatus and method |
JPH08204249A (ja) * | 1995-01-20 | 1996-08-09 | Nippondenso Co Ltd | セラミックス表面処理方法 |
JPH08319184A (ja) * | 1995-05-22 | 1996-12-03 | Nippon Tungsten Co Ltd | イオン照射セラミック製ペン先 |
EP0798265A1 (de) * | 1996-03-05 | 1997-10-01 | KABUSHIKI KAISHA KOBE SEIKO SHO also known as Kobe Steel Ltd. | Einrichtung zur Erzeugung von Ozon |
JPH09274711A (ja) * | 1996-04-02 | 1997-10-21 | Hitachi Metals Ltd | 磁気抵抗効果型磁気ヘッドおよびその製造方法 |
CA2173424C (en) * | 1996-04-03 | 2000-05-16 | Robert Lloyd Hamilton | Apparatus for increasing hand drill pressure |
JPH09282607A (ja) * | 1996-04-05 | 1997-10-31 | Nec Corp | 保護膜を有する磁気ヘッドスライダおよびこれを用いた磁気ディスク装置 |
JPH09293211A (ja) * | 1996-04-26 | 1997-11-11 | Fujitsu Ltd | 磁気抵抗効果ヘッド及び磁気記録装置 |
US5986857A (en) * | 1997-02-13 | 1999-11-16 | Sanyo Electric Co., Ltd. | Thin film magnetic head including adhesion enhancing interlayers, and upper and lower gap insulative layers having different hydrogen contents and internal stress states |
US5866240A (en) * | 1997-03-06 | 1999-02-02 | Sarnoff Corporation | Thick ceramic on metal multilayer circuit board |
JP3576361B2 (ja) * | 1997-09-18 | 2004-10-13 | 富士通株式会社 | 磁気抵抗効果型ヘッド及び磁気記録再生装置 |
-
1999
- 1999-05-11 US US09/309,829 patent/US6252741B1/en not_active Expired - Lifetime
-
2000
- 2000-05-01 DE DE60029438T patent/DE60029438T2/de not_active Expired - Lifetime
- 2000-05-01 AU AU48153/00A patent/AU4815300A/en not_active Abandoned
- 2000-05-01 WO PCT/US2000/011945 patent/WO2000068167A1/en active IP Right Grant
- 2000-05-01 JP JP2000617148A patent/JP4947838B2/ja not_active Expired - Fee Related
- 2000-05-01 DK DK00930307T patent/DK1181261T3/da active
- 2000-05-01 EP EP00930307A patent/EP1181261B1/de not_active Expired - Lifetime
- 2000-05-01 AT AT00930307T patent/ATE333443T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP4947838B2 (ja) | 2012-06-06 |
EP1181261A1 (de) | 2002-02-27 |
DE60029438D1 (de) | 2006-08-31 |
AU4815300A (en) | 2000-11-21 |
EP1181261B1 (de) | 2006-07-19 |
JP2002544108A (ja) | 2002-12-24 |
DE60029438T2 (de) | 2006-11-23 |
DK1181261T3 (da) | 2006-11-13 |
WO2000068167A1 (en) | 2000-11-16 |
US6252741B1 (en) | 2001-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |