ATE310838T1 - Verwendung von perfluorketonen als reinigungs-, ätz- und dotierungsgase für gasphasenreaktoren - Google Patents

Verwendung von perfluorketonen als reinigungs-, ätz- und dotierungsgase für gasphasenreaktoren

Info

Publication number
ATE310838T1
ATE310838T1 AT02717614T AT02717614T ATE310838T1 AT E310838 T1 ATE310838 T1 AT E310838T1 AT 02717614 T AT02717614 T AT 02717614T AT 02717614 T AT02717614 T AT 02717614T AT E310838 T1 ATE310838 T1 AT E310838T1
Authority
AT
Austria
Prior art keywords
perfluoroketones
etching
dopping
gases
cleaning
Prior art date
Application number
AT02717614T
Other languages
German (de)
English (en)
Inventor
Susrut Kesari
Frederick E Behr
Michael G Costello
Richard M Flynn
Richard M Minday
John G Owens
Daniel R Vitcak
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of ATE310838T1 publication Critical patent/ATE310838T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/26—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials
    • H10P50/264—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means
    • H10P50/266—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AT02717614T 2001-04-24 2002-03-14 Verwendung von perfluorketonen als reinigungs-, ätz- und dotierungsgase für gasphasenreaktoren ATE310838T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/841,376 US6540930B2 (en) 2001-04-24 2001-04-24 Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases
PCT/US2002/007509 WO2002086192A1 (en) 2001-04-24 2002-03-14 Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases

Publications (1)

Publication Number Publication Date
ATE310838T1 true ATE310838T1 (de) 2005-12-15

Family

ID=25284710

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02717614T ATE310838T1 (de) 2001-04-24 2002-03-14 Verwendung von perfluorketonen als reinigungs-, ätz- und dotierungsgase für gasphasenreaktoren

Country Status (8)

Country Link
US (1) US6540930B2 (enExample)
EP (1) EP1383939B1 (enExample)
JP (1) JP2004536448A (enExample)
KR (1) KR20030092096A (enExample)
CN (1) CN1276124C (enExample)
AT (1) ATE310838T1 (enExample)
DE (1) DE60207544T2 (enExample)
WO (1) WO2002086192A1 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6837250B2 (en) * 2002-02-27 2005-01-04 Air Products And Chemicals, Inc. CVD chamber cleaning using mixed PFCs from capture/recycle
DE10255988A1 (de) * 2002-11-30 2004-06-17 Infineon Technologies Ag Verfahren zum Reinigen einer Prozesskammer
TWI230094B (en) * 2003-01-14 2005-04-01 Desiccant Technology Corp Method for exhaust treatment of perfluoro compounds
US20050011859A1 (en) * 2003-07-15 2005-01-20 Bing Ji Unsaturated oxygenated fluorocarbons for selective aniostropic etch applications
US20060093756A1 (en) * 2004-11-03 2006-05-04 Nagarajan Rajagopalan High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD films
US8791254B2 (en) * 2006-05-19 2014-07-29 3M Innovative Properties Company Cyclic hydrofluoroether compounds and processes for their preparation and use
US8193397B2 (en) * 2006-12-06 2012-06-05 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US20100263885A1 (en) * 2009-04-21 2010-10-21 3M Innovative Properties Company Protection systems and methods for electronic devices
BRPI0924862A2 (pt) 2009-06-12 2016-08-23 Abb Technology Ag meio de isolação dielétrica
DE202009009305U1 (de) 2009-06-17 2009-11-05 Ormazabal Gmbh Schalteinrichtung für Mittel-, Hoch- oder Höchstspannung mit einem Füllmedium
US9093388B2 (en) 2010-02-01 2015-07-28 Central Glass Company, Limited Dry etching agent and dry etching method using the same
JP5434970B2 (ja) 2010-07-12 2014-03-05 セントラル硝子株式会社 ドライエッチング剤
RU2460717C2 (ru) * 2010-12-06 2012-09-10 Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" Способ получения перфторэтилизопропилкетона в реакторе идеального вытеснения
WO2012080246A1 (en) * 2010-12-14 2012-06-21 Abb Technology Ag Dielectric insulation medium
BR112013014849A2 (pt) 2010-12-14 2016-10-18 Abb Research Ltd "meio de isolamento dielétrico, uso de um monoéter fluorídrico, uso do meio de isolamento dielétrico e aparelho para a geração, distribuição e uso de energia elétrica".
WO2012080269A1 (en) * 2010-12-16 2012-06-21 Abb Technology Ag Dielectric insulation medium
FR2975820B1 (fr) * 2011-05-24 2013-07-05 Schneider Electric Ind Sas Melange de decafluoro-2-methylbutan-3-one et d'un gaz vecteur comme milieu d'isolation electrique et/ou d'extinction des arcs electriques en moyenne tension
JP2013030531A (ja) 2011-07-27 2013-02-07 Central Glass Co Ltd ドライエッチング剤
JP5953681B2 (ja) * 2011-09-09 2016-07-20 イビデン株式会社 プリント配線板の製造方法
RU2494086C2 (ru) * 2011-10-10 2013-09-27 Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) Способ получения перфторэтилизопропилкетона
WO2013087700A1 (en) 2011-12-13 2013-06-20 Abb Technology Ag Sealed and gas insulated high voltage converter environment for offshore platforms
KR102275996B1 (ko) * 2013-03-28 2021-07-14 더 케무어스 컴퍼니 에프씨, 엘엘씨 하이드로플루오로올레핀 식각 가스 혼합물
TWI612182B (zh) 2013-09-09 2018-01-21 液態空氣喬治斯克勞帝方法研究開發股份有限公司 用蝕刻氣體蝕刻半導體結構的方法
JP2017022327A (ja) * 2015-07-15 2017-01-26 東京エレクトロン株式会社 自然酸化膜除去方法及び自然酸化膜除去装置
RU2701535C1 (ru) * 2016-02-26 2019-09-27 Синочем Ланьтянь Ко., Лтд Композиция, содержащая фторсодержащий кетон
CN106554262B (zh) * 2016-09-23 2022-05-20 天津市长芦化工新材料有限公司 全氟九碳酮及其应用
CN106542981B (zh) * 2016-09-23 2022-05-20 天津市长芦化工新材料有限公司 全氟九碳酮的制备方法
WO2018159368A1 (ja) 2017-02-28 2018-09-07 セントラル硝子株式会社 ドライエッチング剤、ドライエッチング方法及び半導体装置の製造方法
US12628589B2 (en) 2023-02-24 2026-05-12 L'Air Liquide, Societé´ Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Etching method using oxygen-containing hydrofluorocarbon
US12660540B2 (en) 2023-02-24 2026-06-16 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Etching method using oxygen-containing hydrofluorocarbon

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
DE2521594C2 (de) 1975-05-15 1984-03-15 Hoechst Ag, 6230 Frankfurt Verfahren zur Herstellung perfluorierter Ketone
JPH082893B2 (ja) 1991-04-16 1996-01-17 信越化学工業株式会社 パーフルオロ環状ケトン及びその製造法
JPH06163476A (ja) 1992-11-18 1994-06-10 Sony Corp ドライエッチング方法
US5466877A (en) 1994-03-15 1995-11-14 Minnesota Mining And Manufacturing Company Process for converting perfluorinated esters to perfluorinated acyl fluorides and/or ketones
US5925611A (en) * 1995-01-20 1999-07-20 Minnesota Mining And Manufacturing Company Cleaning process and composition
JP2904723B2 (ja) 1995-04-21 1999-06-14 セントラル硝子株式会社 クリーニングガス
JPH1027781A (ja) 1996-07-10 1998-01-27 Daikin Ind Ltd エッチングガスおよびクリーニングガス
JP3141325B2 (ja) 1999-01-14 2001-03-05 工業技術院長 溶剤およびそれを用いる物品表面の清浄化方法
JP4666855B2 (ja) 1999-07-20 2011-04-06 スリーエム イノベイティブ プロパティズ カンパニー 消火組成物中でのフッ素化ケトンの使用法
US6394107B1 (en) * 2001-04-24 2002-05-28 3M Innovative Properties Company Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components

Also Published As

Publication number Publication date
DE60207544T2 (de) 2006-08-10
US20030019841A1 (en) 2003-01-30
DE60207544D1 (de) 2005-12-29
EP1383939B1 (en) 2005-11-23
US6540930B2 (en) 2003-04-01
KR20030092096A (ko) 2003-12-03
CN1276124C (zh) 2006-09-20
CN1505694A (zh) 2004-06-16
WO2002086192A1 (en) 2002-10-31
JP2004536448A (ja) 2004-12-02
EP1383939A1 (en) 2004-01-28

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