ATE305058T1 - Kappa- und gamma-a1203 mehrfachbeschichtung hergestellt durch chemische gasphasenabscheidung bei niedrigen temperaturen - Google Patents

Kappa- und gamma-a1203 mehrfachbeschichtung hergestellt durch chemische gasphasenabscheidung bei niedrigen temperaturen

Info

Publication number
ATE305058T1
ATE305058T1 AT02445036T AT02445036T ATE305058T1 AT E305058 T1 ATE305058 T1 AT E305058T1 AT 02445036 T AT02445036 T AT 02445036T AT 02445036 T AT02445036 T AT 02445036T AT E305058 T1 ATE305058 T1 AT E305058T1
Authority
AT
Austria
Prior art keywords
kappa
gamma
vapor deposition
chemical vapor
low temperatures
Prior art date
Application number
AT02445036T
Other languages
English (en)
Inventor
Sakari Ruppi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of ATE305058T1 publication Critical patent/ATE305058T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00Cutters, for shaping
    • Y10T407/26Cutters, for shaping comprising cutting edge bonded to tool shank
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00Cutters, for shaping
    • Y10T407/27Cutters, for shaping comprising tool of specific chemical composition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
AT02445036T 2001-03-27 2002-03-15 Kappa- und gamma-a1203 mehrfachbeschichtung hergestellt durch chemische gasphasenabscheidung bei niedrigen temperaturen ATE305058T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/817,025 US6689450B2 (en) 2001-03-27 2001-03-27 Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature

Publications (1)

Publication Number Publication Date
ATE305058T1 true ATE305058T1 (de) 2005-10-15

Family

ID=25222196

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02445036T ATE305058T1 (de) 2001-03-27 2002-03-15 Kappa- und gamma-a1203 mehrfachbeschichtung hergestellt durch chemische gasphasenabscheidung bei niedrigen temperaturen

Country Status (6)

Country Link
US (1) US6689450B2 (de)
EP (1) EP1245700B1 (de)
JP (1) JP2002363750A (de)
AT (1) ATE305058T1 (de)
DE (1) DE60206207T2 (de)
ES (1) ES2250608T3 (de)

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US8080312B2 (en) 2006-06-22 2011-12-20 Kennametal Inc. CVD coating scheme including alumina and/or titanium-containing materials and method of making the same
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CN107557755B (zh) * 2016-07-01 2020-05-01 山特维克知识产权股份有限公司 具有{0 0 1}织构化κ-Al2O3层的CVD涂层切削工具
WO2018234296A1 (en) 2017-06-20 2018-12-27 Sandvik Intellectual Property Ab COATED CUTTING TOOL
RU2737938C1 (ru) * 2020-03-18 2020-12-07 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный индустриальный университет" ФГБОУ ВО "СибГИУ" Способ нанесения биоинертных гафниевых покрытий, модифицированных ионами азота, на титановые имплантаты
RU2737912C1 (ru) * 2020-03-18 2020-12-04 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет", ФГБОУ ВО "СибГИУ" Способ нанесения биоинертных танталовых покрытий, модифицированных ионами азота, на титановые имплантаты
CN113512716A (zh) * 2021-03-26 2021-10-19 四川大学 一种修复基体的碳氮化钛/氧化铝复合涂层的制备方法
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Also Published As

Publication number Publication date
EP1245700A1 (de) 2002-10-02
US20020176755A1 (en) 2002-11-28
ES2250608T3 (es) 2006-04-16
EP1245700B1 (de) 2005-09-21
US6689450B2 (en) 2004-02-10
DE60206207D1 (de) 2006-02-02
JP2002363750A (ja) 2002-12-18
DE60206207T2 (de) 2006-05-04

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