DE60206207D1 - Kappa- und gamma-A1203-Mehrfachbeschichtung,hergestellt durch chemische Gasphasenabscheidung bei niedrigen Temperaturen - Google Patents

Kappa- und gamma-A1203-Mehrfachbeschichtung,hergestellt durch chemische Gasphasenabscheidung bei niedrigen Temperaturen

Info

Publication number
DE60206207D1
DE60206207D1 DE60206207T DE60206207T DE60206207D1 DE 60206207 D1 DE60206207 D1 DE 60206207D1 DE 60206207 T DE60206207 T DE 60206207T DE 60206207 T DE60206207 T DE 60206207T DE 60206207 D1 DE60206207 D1 DE 60206207D1
Authority
DE
Germany
Prior art keywords
kappa
gamma
vapor deposition
chemical vapor
low temperatures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60206207T
Other languages
English (en)
Other versions
DE60206207T2 (de
Inventor
Sakari Ruppi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seco Tools AB
Original Assignee
Seco Tools AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seco Tools AB filed Critical Seco Tools AB
Publication of DE60206207D1 publication Critical patent/DE60206207D1/de
Application granted granted Critical
Publication of DE60206207T2 publication Critical patent/DE60206207T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00Cutters, for shaping
    • Y10T407/26Cutters, for shaping comprising cutting edge bonded to tool shank
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00Cutters, for shaping
    • Y10T407/27Cutters, for shaping comprising tool of specific chemical composition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
DE60206207T 2001-03-27 2002-03-15 Kappa- und gamma-A1203-Mehrfachbeschichtung,hergestellt durch chemische Gasphasenabscheidung bei niedrigen Temperaturen Expired - Fee Related DE60206207T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/817,025 US6689450B2 (en) 2001-03-27 2001-03-27 Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature
US817025 2001-03-27

Publications (2)

Publication Number Publication Date
DE60206207D1 true DE60206207D1 (de) 2006-02-02
DE60206207T2 DE60206207T2 (de) 2006-05-04

Family

ID=25222196

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60206207T Expired - Fee Related DE60206207T2 (de) 2001-03-27 2002-03-15 Kappa- und gamma-A1203-Mehrfachbeschichtung,hergestellt durch chemische Gasphasenabscheidung bei niedrigen Temperaturen

Country Status (6)

Country Link
US (1) US6689450B2 (de)
EP (1) EP1245700B1 (de)
JP (1) JP2002363750A (de)
AT (1) ATE305058T1 (de)
DE (1) DE60206207T2 (de)
ES (1) ES2250608T3 (de)

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EP1323847A3 (de) 2001-12-28 2005-09-14 Seco Tools Ab Beschichteter Hartmetallkörper und Verfahren zu seiner Herstellung
CN100413998C (zh) * 2002-08-08 2008-08-27 株式会社神户制钢所 α型晶体结构为主体的氧化铝被膜相关技术
SE526603C3 (sv) * 2003-01-24 2005-11-16 Sandvik Intellectual Property Belagt hårdmetallskär
US7455918B2 (en) * 2004-03-12 2008-11-25 Kennametal Inc. Alumina coating, coated product and method of making the same
EP1609883B1 (de) 2004-06-24 2017-09-20 Sandvik Intellectual Property AB Beschichtetes Schneidwerkzeug
SE528108C2 (sv) * 2004-07-13 2006-09-05 Sandvik Intellectual Property Belagt hårdmetallskär, speciellt för svarvning av stål, samt sätt att tillverka detsamma
JP4728961B2 (ja) * 2004-07-29 2011-07-20 京セラ株式会社 切削工具
SE528430C2 (sv) * 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod att framställa detta
SE528432C2 (sv) * 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod för att framställa detta
DE102004063816B3 (de) * 2004-12-30 2006-05-18 Walter Ag Al2O3-Multilagenplatte
KR101165115B1 (ko) * 2005-04-07 2012-07-12 스미또모 덴꼬오 하드메탈 가부시끼가이샤 날끝 교환형 절삭팁
SE529015C2 (sv) * 2005-09-09 2007-04-10 Sandvik Intellectual Property PVD-belagt skärverktygsskär tillverkat av hårdmetall
ATE541068T1 (de) * 2005-09-09 2012-01-15 Sandvik Intellectual Property Pvd-beschichtetes schneidwerkzeug
US8080312B2 (en) * 2006-06-22 2011-12-20 Kennametal Inc. CVD coating scheme including alumina and/or titanium-containing materials and method of making the same
US8231312B2 (en) * 2006-08-31 2012-07-31 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool
IL182344A (en) * 2007-04-01 2011-07-31 Iscar Ltd Cutting with a ceramic coating
KR100920835B1 (ko) * 2007-12-20 2009-10-08 주식회사 하이닉스반도체 반도체 메모리 장치
EP2446988A1 (de) 2010-10-29 2012-05-02 Seco Tools AB Schneidwerkzeugeinsatz mit einer Alpha-Aluminid-Schicht enthaltend eine mit mehreren Komponenten Textur
JP5817932B2 (ja) * 2012-08-10 2015-11-18 株式会社タンガロイ 被覆工具
RU2502526C1 (ru) * 2012-11-28 2013-12-27 Федеральное государственное бюджетное учреждение науки Институт металлургии и материаловедения им. А.А. Байкова Российской академии наук (ИМЕТ РАН) Покрытие на имплант из титана и его сплавов и способ его приготовления
US9365925B2 (en) 2013-03-28 2016-06-14 Kennametal Inc. Multilayer structured coatings for cutting tools
JP6206288B2 (ja) * 2014-03-26 2017-10-04 三菱マテリアル株式会社 表面被覆切削工具
JP6206289B2 (ja) * 2014-03-26 2017-10-04 三菱マテリアル株式会社 表面被覆切削工具
EP3000913B1 (de) 2014-09-26 2020-07-29 Walter Ag Beschichteter Schneidwerkzeugeinsatz mit MT-CVD TiCN auf TiAI(C,N)
US9650712B2 (en) * 2014-12-08 2017-05-16 Kennametal Inc. Inter-anchored multilayer refractory coatings
US9890084B2 (en) 2015-10-01 2018-02-13 Kennametal Inc. Hybrid nanocomposite coatings and applications thereof
CN107557755B (zh) * 2016-07-01 2020-05-01 山特维克知识产权股份有限公司 具有{0 0 1}织构化κ-Al2O3层的CVD涂层切削工具
JP7265491B2 (ja) * 2017-06-20 2023-04-26 サンドビック インテレクチュアル プロパティー アクティエボラーグ コーティングされた切削工具
RU2737912C1 (ru) * 2020-03-18 2020-12-04 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет", ФГБОУ ВО "СибГИУ" Способ нанесения биоинертных танталовых покрытий, модифицированных ионами азота, на титановые имплантаты
RU2737938C1 (ru) * 2020-03-18 2020-12-07 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный индустриальный университет" ФГБОУ ВО "СибГИУ" Способ нанесения биоинертных гафниевых покрытий, модифицированных ионами азота, на титановые имплантаты
CN113512716A (zh) * 2021-03-26 2021-10-19 四川大学 一种修复基体的碳氮化钛/氧化铝复合涂层的制备方法
RU207683U1 (ru) * 2021-07-08 2021-11-11 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный индустриальный университет" (ФГБОУ ВО "СибГИУ") Внутрикостный зубной имплантат

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Also Published As

Publication number Publication date
ATE305058T1 (de) 2005-10-15
US6689450B2 (en) 2004-02-10
EP1245700A1 (de) 2002-10-02
ES2250608T3 (es) 2006-04-16
US20020176755A1 (en) 2002-11-28
EP1245700B1 (de) 2005-09-21
DE60206207T2 (de) 2006-05-04
JP2002363750A (ja) 2002-12-18

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Legal Events

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8339 Ceased/non-payment of the annual fee