ATE261100T1 - Heizbaugruppe für den ofen für die halbleiterherstellung - Google Patents

Heizbaugruppe für den ofen für die halbleiterherstellung

Info

Publication number
ATE261100T1
ATE261100T1 AT98908974T AT98908974T ATE261100T1 AT E261100 T1 ATE261100 T1 AT E261100T1 AT 98908974 T AT98908974 T AT 98908974T AT 98908974 T AT98908974 T AT 98908974T AT E261100 T1 ATE261100 T1 AT E261100T1
Authority
AT
Austria
Prior art keywords
furnace
manifold
processing
chamber
shields
Prior art date
Application number
AT98908974T
Other languages
English (en)
Inventor
Robert A Weaver
Kevin B Peck
William D Mcentire
Original Assignee
Semitool Inc
Mrl Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semitool Inc, Mrl Ind Inc filed Critical Semitool Inc
Application granted granted Critical
Publication of ATE261100T1 publication Critical patent/ATE261100T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/12—Heating of the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Electric Stoves And Ranges (AREA)
  • Resistance Heating (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Photovoltaic Devices (AREA)
  • Drying Of Semiconductors (AREA)
AT98908974T 1997-03-07 1998-03-05 Heizbaugruppe für den ofen für die halbleiterherstellung ATE261100T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/814,723 US5904478A (en) 1997-03-07 1997-03-07 Semiconductor processing furnace heating subassembly
PCT/US1998/004323 WO1998039610A1 (en) 1997-03-07 1998-03-05 Semiconductor processing furnace heating subassembly

Publications (1)

Publication Number Publication Date
ATE261100T1 true ATE261100T1 (de) 2004-03-15

Family

ID=25215833

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98908974T ATE261100T1 (de) 1997-03-07 1998-03-05 Heizbaugruppe für den ofen für die halbleiterherstellung

Country Status (8)

Country Link
US (1) US5904478A (de)
EP (1) EP1015831B1 (de)
JP (1) JP2001514799A (de)
KR (1) KR20000075991A (de)
AT (1) ATE261100T1 (de)
DE (1) DE69822173T2 (de)
TW (1) TW417139B (de)
WO (1) WO1998039610A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1111860A (ja) 1997-06-17 1999-01-19 Shinko Electric Co Ltd 天井搬送装置及び天井搬送車
US6375749B1 (en) 1999-07-14 2002-04-23 Seh America, Inc. Susceptorless semiconductor wafer support and reactor system for epitaxial layer growth
US6454852B2 (en) 1999-07-14 2002-09-24 Seh America, Inc. High efficiency silicon wafer optimized for advanced semiconductor devices
US6395085B2 (en) 1999-07-14 2002-05-28 Seh America, Inc. Purity silicon wafer for use in advanced semiconductor devices
US20020062792A1 (en) * 1999-07-14 2002-05-30 Seh America, Inc. Wafer support device and reactor system for epitaxial layer growth
US6632277B2 (en) 1999-07-14 2003-10-14 Seh America, Inc. Optimized silicon wafer gettering for advanced semiconductor devices
JP3912208B2 (ja) * 2002-02-28 2007-05-09 東京エレクトロン株式会社 熱処理装置
US20070243317A1 (en) * 2002-07-15 2007-10-18 Du Bois Dale R Thermal Processing System and Configurable Vertical Chamber
US7293986B2 (en) * 2003-05-06 2007-11-13 Mrl Industries, Inc. Vestibule assembly for a heat treatment furnace
US6889908B2 (en) * 2003-06-30 2005-05-10 International Business Machines Corporation Thermal analysis in a data processing system
DE502005011028D1 (de) * 2005-03-30 2011-04-14 Huettinger Elektronik Gmbh Vakuumplasmagenerator
US20070039938A1 (en) * 2005-08-19 2007-02-22 Peck Kevin B Fault tolerant element and combination with fault tolerant circuit
US7371998B2 (en) * 2006-07-05 2008-05-13 Semitool, Inc. Thermal wafer processor
EP2184574B1 (de) * 2007-08-06 2012-09-19 Teoss CO., LTD. Siliziumheizofen
JP4929199B2 (ja) * 2008-02-01 2012-05-09 株式会社日立国際電気 基板処理装置および半導体装置の製造方法
JP5960028B2 (ja) * 2012-10-31 2016-08-02 東京エレクトロン株式会社 熱処理装置
CN206332060U (zh) * 2016-10-28 2017-07-14 应用材料公司 热学腔室
US11725279B2 (en) 2017-02-08 2023-08-15 Picosun Oy Deposition or cleaning apparatus with movable structure

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191015A (ja) * 1985-02-20 1986-08-25 Hitachi Ltd 半導体の気相成長方法及びその装置
US4738618A (en) * 1987-05-14 1988-04-19 Semitherm Vertical thermal processor
KR970008334B1 (en) * 1988-02-24 1997-05-23 Tokyo Electron Sagami Kk Method and apparatus for heat treatment method
KR960012876B1 (ko) * 1988-06-16 1996-09-25 도오교오 에레구토론 사가미 가부시끼가이샤 열처리 장치
JP2913040B2 (ja) * 1988-08-26 1999-06-28 東京エレクトロン株式会社 トラップ装置
US5000682A (en) * 1990-01-22 1991-03-19 Semitherm Vertical thermal processor for semiconductor wafers
KR100251873B1 (ko) * 1993-01-21 2000-04-15 마쓰바 구니유키 종형 열처리 장치
US5556275A (en) * 1993-09-30 1996-09-17 Tokyo Electron Limited Heat treatment apparatus
JP3474258B2 (ja) * 1994-04-12 2003-12-08 東京エレクトロン株式会社 熱処理装置及び熱処理方法
JPH08186081A (ja) * 1994-12-29 1996-07-16 F T L:Kk 半導体装置の製造方法及び半導体装置の製造装置

Also Published As

Publication number Publication date
EP1015831A4 (de) 2002-07-31
DE69822173T2 (de) 2004-10-28
EP1015831A1 (de) 2000-07-05
WO1998039610A1 (en) 1998-09-11
TW417139B (en) 2001-01-01
JP2001514799A (ja) 2001-09-11
US5904478A (en) 1999-05-18
EP1015831B1 (de) 2004-03-03
DE69822173D1 (de) 2004-04-08
KR20000075991A (ko) 2000-12-26

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