AT514500A3 - Optische Messvorrichtung und optisches Messverfahren - Google Patents

Optische Messvorrichtung und optisches Messverfahren

Info

Publication number
AT514500A3
AT514500A3 ATA50423/2014A AT504232014A AT514500A3 AT 514500 A3 AT514500 A3 AT 514500A3 AT 504232014 A AT504232014 A AT 504232014A AT 514500 A3 AT514500 A3 AT 514500A3
Authority
AT
Austria
Prior art keywords
optical measuring
measuring device
measuring
edge region
directed
Prior art date
Application number
ATA50423/2014A
Other languages
English (en)
Other versions
AT514500B1 (de
AT514500A1 (de
Original Assignee
Precitec Optronik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Precitec Optronik Gmbh filed Critical Precitec Optronik Gmbh
Publication of AT514500A1 publication Critical patent/AT514500A1/de
Publication of AT514500A3 publication Critical patent/AT514500A3/de
Application granted granted Critical
Publication of AT514500B1 publication Critical patent/AT514500B1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Die Erfindung betrifft eine optische Messvorrichtung zur in-situ-Erfassung einer Abstandsdifferenz (6) zwischen einem Träger (8) und einem Randbereich (10) eines zu vermessenden Objekts (12). Die optische Messvorrichtung weist einen Messkopf (14) mit dualer Strahlführung (15) auf, die einen ersten Messstrahl (16) auf den Träger (8) und einen zweiten Messstrahl (18) auf den Randbereich (10) des zu vermessenden Objekts (12) richtet. Mittel zum Erfassen und Bilden von Reflexionsspektren des ersten auf den Träger (8) gerichteten Messstrahls (16) und des zweiten auf den Randbereich (10) des zu vermessenden Objekts (12) gerichteten Messstrahls (18) sind vorgesehen. Die Messvorrichtung weist ein mehrkanaliges Messgerät (34) mit einer Spektrometerzeile (72) auf. Eine Auswerteeinheit (32) für die Reflexionsspektren zum Erfassen der Stufenhöhe zwischen dem Träger (8) und dem Randbereich (10) des Objekts (12) steht mit einen Spektrometer (48) und einem Anzeigegerät (66) in Wirkverbindung.
ATA50423/2014A 2013-06-17 2014-06-17 Optische Messvorrichtung und optisches Messverfahren AT514500B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013010030 2013-06-17

Publications (3)

Publication Number Publication Date
AT514500A1 AT514500A1 (de) 2015-01-15
AT514500A3 true AT514500A3 (de) 2018-04-15
AT514500B1 AT514500B1 (de) 2018-06-15

Family

ID=51212896

Family Applications (1)

Application Number Title Priority Date Filing Date
ATA50423/2014A AT514500B1 (de) 2013-06-17 2014-06-17 Optische Messvorrichtung und optisches Messverfahren

Country Status (8)

Country Link
US (1) US9500471B2 (de)
JP (1) JP6247752B2 (de)
KR (1) KR101882591B1 (de)
CN (1) CN105324629B (de)
AT (1) AT514500B1 (de)
DE (1) DE102014008584B4 (de)
TW (1) TWI638131B (de)
WO (1) WO2014203161A1 (de)

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EP3222964B1 (de) * 2016-03-25 2020-01-15 Fogale Nanotech Chromatische konfokale vorrichtung und verfahren zur 2d/3d-inspektion eines objekts wie etwa eines wafers
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JP6829992B2 (ja) * 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
JP6768500B2 (ja) * 2016-12-28 2020-10-14 株式会社キーエンス 光走査高さ測定装置
JP6831700B2 (ja) * 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
EP3387919B1 (de) * 2017-04-12 2020-01-29 Sodim S.A.S. Verfahren und system zur bestimmung der fertigungsbahn von produkten der tabakverarbeitenden industrie, zigaretteninspektionsstation
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DE102017126310A1 (de) 2017-11-09 2019-05-09 Precitec Optronik Gmbh Abstandsmessvorrichtung
DE102018130901A1 (de) 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung
DE102019102873B4 (de) 2019-02-06 2022-01-20 Carl Mahr Holding Gmbh Sensorsystem und Verfahren zur Bestimmung von geometrischen Eigenschaften eines Messobjekts sowie Koordinatenmessgerät
CN110160450B (zh) * 2019-05-13 2020-12-25 天津大学 基于白光干涉光谱的大台阶高度的快速测量方法
DE102019114167A1 (de) * 2019-05-27 2020-12-03 Precitec Optronik Gmbh Optische Messvorrichtung und Verfahren
JP6875489B2 (ja) * 2019-11-06 2021-05-26 株式会社キーエンス 共焦点変位計
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JP2023012630A (ja) * 2021-07-14 2023-01-26 住友電気工業株式会社 光ファイバ、および光ファイバの製造方法
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AT514500A1 (de) 2015-01-15
US9500471B2 (en) 2016-11-22
TWI638131B (zh) 2018-10-11
JP2016521854A (ja) 2016-07-25
DE102014008584A1 (de) 2014-12-18
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US20140368830A1 (en) 2014-12-18
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