DE602008002261D1 - Vorrichtung zur optischen Kohärenztomographie und nichtinterferometrischen Abbildung - Google Patents

Vorrichtung zur optischen Kohärenztomographie und nichtinterferometrischen Abbildung

Info

Publication number
DE602008002261D1
DE602008002261D1 DE602008002261T DE602008002261T DE602008002261D1 DE 602008002261 D1 DE602008002261 D1 DE 602008002261D1 DE 602008002261 T DE602008002261 T DE 602008002261T DE 602008002261 T DE602008002261 T DE 602008002261T DE 602008002261 D1 DE602008002261 D1 DE 602008002261D1
Authority
DE
Germany
Prior art keywords
imaging
optical coherence
coherence tomography
noninterferometric
interferometric imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008002261T
Other languages
English (en)
Inventor
Tomasz Bajraszewski
Maciej Szkulmowski
Pawel Dalasinski
Maciej Wojtkowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Ophthalmic Technologies Sp zoo
Original Assignee
Optopol Technology Sp zoo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optopol Technology Sp zoo filed Critical Optopol Technology Sp zoo
Publication of DE602008002261D1 publication Critical patent/DE602008002261D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/102—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for optical coherence tomography [OCT]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/12—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes
    • A61B3/1225—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes using coherent radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
    • G01B9/0203—With imaging systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Medical Informatics (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Radiology & Medical Imaging (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE602008002261T 2008-08-28 2008-08-28 Vorrichtung zur optischen Kohärenztomographie und nichtinterferometrischen Abbildung Active DE602008002261D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP08015180A EP2159535B1 (de) 2008-08-28 2008-08-28 Vorrichtung zur optischen Kohärenztomographie und nichtinterferometrischen Abbildung

Publications (1)

Publication Number Publication Date
DE602008002261D1 true DE602008002261D1 (de) 2010-09-30

Family

ID=40070732

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008002261T Active DE602008002261D1 (de) 2008-08-28 2008-08-28 Vorrichtung zur optischen Kohärenztomographie und nichtinterferometrischen Abbildung

Country Status (5)

Country Link
EP (1) EP2159535B1 (de)
AT (1) ATE478319T1 (de)
DE (1) DE602008002261D1 (de)
PL (1) PL2159535T3 (de)
WO (1) WO2010022915A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489722B (en) 2011-04-06 2017-01-18 Precitec Optronik Gmbh Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer
DE102011051146B3 (de) * 2011-06-17 2012-10-04 Precitec Optronik Gmbh Prüfverfahren zum Prüfen einer Verbindungsschicht zwischen waferförmigen Proben
DE102012111008B4 (de) 2012-11-15 2014-05-22 Precitec Optronik Gmbh Optisches Messverfahren und optische Messvorrichtung zum Erfassen einer Oberflächentopographie
JP6247752B2 (ja) 2013-06-17 2017-12-13 プレシテック オプトロニック ゲーエムベーハーＰｒｅｃｉｔｅｃ Ｏｐｔｒｏｎｉｋ ＧｍｂＨ 距離差を取得するための光学測定装置および光学測定方法
US10234265B2 (en) 2016-12-12 2019-03-19 Precitec Optronik Gmbh Distance measuring device and method for measuring distances
DE102017126310A1 (de) 2017-11-09 2019-05-09 Precitec Optronik Gmbh Abstandsmessvorrichtung
DE102018130901A1 (de) 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003105678A2 (en) * 2002-06-12 2003-12-24 Advanced Research And Technology Institute, Inc. Method and apparatus for improving both lateral and axial resolution in ophthalmoscopy
EP2345363A1 (de) 2006-05-01 2011-07-20 Physical Sciences, Inc. Hybrid System aud Spektraldomänekohärenztomographie und Laserophthalmoskop mit Zeilenabtastung

Also Published As

Publication number Publication date
WO2010022915A1 (en) 2010-03-04
PL2159535T3 (pl) 2011-03-31
ATE478319T1 (de) 2010-09-15
EP2159535A1 (de) 2010-03-03
EP2159535B1 (de) 2010-08-18

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