AT502328A5 - Schleifwerkzeug mit einzelnen schleifhörnern - Google Patents

Schleifwerkzeug mit einzelnen schleifhörnern Download PDF

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Publication number
AT502328A5
AT502328A5 AT0937504A AT93752004A AT502328A5 AT 502328 A5 AT502328 A5 AT 502328A5 AT 0937504 A AT0937504 A AT 0937504A AT 93752004 A AT93752004 A AT 93752004A AT 502328 A5 AT502328 A5 AT 502328A5
Authority
AT
Austria
Prior art keywords
grinding
individual
heads
tool
grinding tool
Prior art date
Application number
AT0937504A
Other languages
English (en)
Other versions
AT502328B1 (de
AT502328A2 (de
Inventor
Richard W J Hall
Jens M Molter
Charles A Bateman
Original Assignee
Saint Gobain Abrasives Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Abrasives Inc filed Critical Saint Gobain Abrasives Inc
Publication of AT502328A2 publication Critical patent/AT502328A2/de
Publication of AT502328A5 publication Critical patent/AT502328A5/de
Application granted granted Critical
Publication of AT502328B1 publication Critical patent/AT502328B1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
AT0937504A 2003-10-10 2004-09-07 Schleifwerkzeug mit einzelnen schleifhörnern AT502328B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/683,486 US20050076577A1 (en) 2003-10-10 2003-10-10 Abrasive tools made with a self-avoiding abrasive grain array
PCT/US2004/028881 WO2005039828A1 (en) 2003-10-10 2004-09-07 Abrasive tools made with a self-avoiding abrasive grain array

Publications (3)

Publication Number Publication Date
AT502328A2 AT502328A2 (de) 2007-03-15
AT502328A5 true AT502328A5 (de) 2009-12-15
AT502328B1 AT502328B1 (de) 2010-03-15

Family

ID=34377597

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0937504A AT502328B1 (de) 2003-10-10 2004-09-07 Schleifwerkzeug mit einzelnen schleifhörnern

Country Status (25)

Country Link
US (4) US20050076577A1 (de)
JP (1) JP4520465B2 (de)
KR (1) KR100796184B1 (de)
CN (1) CN1867428B (de)
AT (1) AT502328B1 (de)
BE (1) BE1016293A4 (de)
BR (1) BRPI0415196A (de)
CA (1) CA2540733C (de)
DE (1) DE112004001912T5 (de)
ES (1) ES2306591B1 (de)
FI (1) FI20060341A (de)
FR (1) FR2860744B1 (de)
GB (1) GB2423491B (de)
HK (1) HK1094176A1 (de)
HU (1) HUP0600297A2 (de)
IL (1) IL174805A (de)
IT (1) ITMI20041858A1 (de)
MX (1) MXPA06004041A (de)
MY (1) MY136988A (de)
NL (1) NL1027081C2 (de)
PL (1) PL204960B1 (de)
RU (1) RU2320472C2 (de)
SK (1) SK50362006A3 (de)
TW (1) TWI278928B (de)
WO (1) WO2005039828A1 (de)

Families Citing this family (68)

* Cited by examiner, † Cited by third party
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US9463552B2 (en) 1997-04-04 2016-10-11 Chien-Min Sung Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods
US9199357B2 (en) * 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9221154B2 (en) 1997-04-04 2015-12-29 Chien-Min Sung Diamond tools and methods for making the same
US9238207B2 (en) 1997-04-04 2016-01-19 Chien-Min Sung Brazed diamond tools and methods for making the same
US9409280B2 (en) 1997-04-04 2016-08-09 Chien-Min Sung Brazed diamond tools and methods for making the same
US20060254154A1 (en) * 2005-05-12 2006-11-16 Wei Huang Abrasive tool and method of making the same
US8974270B2 (en) 2011-05-23 2015-03-10 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US20070175765A1 (en) * 2006-02-01 2007-08-02 Kosta George Method of fabricating monolayer abrasive tools
WO2007117129A1 (en) * 2006-03-03 2007-10-18 Ferronato Sandro Giovanni Gius System for indicating the grade of an abrasive
FI121654B (sv) 2006-07-10 2011-02-28 Kwh Mirka Ab Oy Förfarande för tillverkning av en flexibel sliprondell och en flexibel sliprondell
US7963827B2 (en) * 2006-07-14 2011-06-21 Saint-Gobain Abrastives, Inc. Backingless abrasive article
US20080271384A1 (en) * 2006-09-22 2008-11-06 Saint-Gobain Ceramics & Plastics, Inc. Conditioning tools and techniques for chemical mechanical planarization
JP5121315B2 (ja) * 2007-06-07 2013-01-16 豊田バンモップス株式会社 砥粒貼着装置、及び砥粒貼着プログラム
FI20075533L (fi) * 2007-07-10 2009-01-11 Kwh Mirka Ab Oy Hiomatuote ja menetelmä tämän valmistamiseksi
JP5454798B2 (ja) * 2007-08-13 2014-03-26 スリーエム イノベイティブ プロパティズ カンパニー コーティングされた研磨材積層ディスク及びその作成方法
BRPI0814936A2 (pt) * 2007-08-23 2015-02-03 Saint Gobain Abrasives Inc Concepção otimizada de condidionador de cmp para cmp óxido/metal da próxima geração
CN101376234B (zh) * 2007-08-28 2013-05-29 侯家祥 一种研磨工具磨料颗粒有序排列的方法
JP5171231B2 (ja) * 2007-12-03 2013-03-27 豊田バンモップス株式会社 超砥粒のセッティング装置
JP5121423B2 (ja) * 2007-12-03 2013-01-16 豊田バンモップス株式会社 超砥粒のセッティング方法
CN101896316B (zh) * 2007-12-12 2015-04-29 圣戈班磨料磨具有限公司 具有混杂粘合剂的多功能研磨工具
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Also Published As

Publication number Publication date
PL379550A1 (pl) 2006-10-16
ITMI20041858A1 (it) 2004-12-29
MXPA06004041A (es) 2006-06-28
PL204960B1 (pl) 2010-02-26
CA2540733A1 (en) 2005-05-06
NL1027081C2 (nl) 2005-10-11
US20060010780A1 (en) 2006-01-19
NL1027081A1 (nl) 2005-04-12
US7993419B2 (en) 2011-08-09
BRPI0415196A (pt) 2006-12-05
GB0609169D0 (en) 2006-06-21
US20050076577A1 (en) 2005-04-14
WO2005039828A8 (en) 2006-05-11
SK50362006A3 (sk) 2006-09-07
FI20060341A (fi) 2006-04-07
CN1867428A (zh) 2006-11-22
TWI278928B (en) 2007-04-11
DE112004001912T5 (de) 2006-08-24
US20110252710A1 (en) 2011-10-20
CA2540733C (en) 2013-12-17
ES2306591A1 (es) 2008-11-01
TW200522188A (en) 2005-07-01
MY136988A (en) 2008-12-31
FR2860744B1 (fr) 2006-01-13
RU2320472C2 (ru) 2008-03-27
GB2423491B (en) 2008-04-16
HUP0600297A2 (en) 2007-07-30
US20090202781A1 (en) 2009-08-13
ES2306591B1 (es) 2009-10-02
IL174805A0 (en) 2006-08-20
US7507267B2 (en) 2009-03-24
IE20040623A1 (en) 2005-04-20
AT502328B1 (de) 2010-03-15
JP4520465B2 (ja) 2010-08-04
HK1094176A1 (en) 2007-03-23
CN1867428B (zh) 2012-01-11
BE1016293A4 (fr) 2006-07-04
GB2423491A (en) 2006-08-30
AT502328A2 (de) 2007-03-15
KR100796184B1 (ko) 2008-01-21
KR20060085656A (ko) 2006-07-27
JP2007508153A (ja) 2007-04-05
IL174805A (en) 2009-09-01
WO2005039828A1 (en) 2005-05-06
FR2860744A1 (fr) 2005-04-15
RU2006111358A (ru) 2007-11-27

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