FR2860744B1 - Outils abrasifs presentant une disposition de grains abrasifs auto-evitante et leur procede de fabrication - Google Patents
Outils abrasifs presentant une disposition de grains abrasifs auto-evitante et leur procede de fabricationInfo
- Publication number
- FR2860744B1 FR2860744B1 FR0410640A FR0410640A FR2860744B1 FR 2860744 B1 FR2860744 B1 FR 2860744B1 FR 0410640 A FR0410640 A FR 0410640A FR 0410640 A FR0410640 A FR 0410640A FR 2860744 B1 FR2860744 B1 FR 2860744B1
- Authority
- FR
- France
- Prior art keywords
- abrasive
- switching
- self
- manufacturing
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000006061 abrasive grain Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
- Y10T428/24372—Particulate matter
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/683,486 US20050076577A1 (en) | 2003-10-10 | 2003-10-10 | Abrasive tools made with a self-avoiding abrasive grain array |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2860744A1 FR2860744A1 (fr) | 2005-04-15 |
FR2860744B1 true FR2860744B1 (fr) | 2006-01-13 |
Family
ID=34377597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0410640A Expired - Fee Related FR2860744B1 (fr) | 2003-10-10 | 2004-10-08 | Outils abrasifs presentant une disposition de grains abrasifs auto-evitante et leur procede de fabrication |
Country Status (25)
Country | Link |
---|---|
US (4) | US20050076577A1 (fr) |
JP (1) | JP4520465B2 (fr) |
KR (1) | KR100796184B1 (fr) |
CN (1) | CN1867428B (fr) |
AT (1) | AT502328B1 (fr) |
BE (1) | BE1016293A4 (fr) |
BR (1) | BRPI0415196A (fr) |
CA (1) | CA2540733C (fr) |
DE (1) | DE112004001912T5 (fr) |
ES (1) | ES2306591B1 (fr) |
FI (1) | FI20060341A (fr) |
FR (1) | FR2860744B1 (fr) |
GB (1) | GB2423491B (fr) |
HK (1) | HK1094176A1 (fr) |
HU (1) | HUP0600297A2 (fr) |
IL (1) | IL174805A (fr) |
IT (1) | ITMI20041858A1 (fr) |
MX (1) | MXPA06004041A (fr) |
MY (1) | MY136988A (fr) |
NL (1) | NL1027081C2 (fr) |
PL (1) | PL204960B1 (fr) |
RU (1) | RU2320472C2 (fr) |
SK (1) | SK50362006A3 (fr) |
TW (1) | TWI278928B (fr) |
WO (1) | WO2005039828A1 (fr) |
Families Citing this family (68)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9199357B2 (en) * | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US20060254154A1 (en) * | 2005-05-12 | 2006-11-16 | Wei Huang | Abrasive tool and method of making the same |
US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
US8678878B2 (en) | 2009-09-29 | 2014-03-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
US20070175765A1 (en) * | 2006-02-01 | 2007-08-02 | Kosta George | Method of fabricating monolayer abrasive tools |
EP2180978B1 (fr) * | 2006-03-03 | 2010-11-17 | Giovanni Giuseppe Ferronato Sandro | Système servant à indiquer la grosseur de grain d'un abrasif |
FI121654B (sv) | 2006-07-10 | 2011-02-28 | Kwh Mirka Ab Oy | Förfarande för tillverkning av en flexibel sliprondell och en flexibel sliprondell |
PL2079559T3 (pl) * | 2006-07-14 | 2013-03-29 | Saint Gobain Abrasives Inc | Artykuł ścierny bez podłoża |
US20080271384A1 (en) * | 2006-09-22 | 2008-11-06 | Saint-Gobain Ceramics & Plastics, Inc. | Conditioning tools and techniques for chemical mechanical planarization |
JP5121315B2 (ja) * | 2007-06-07 | 2013-01-16 | 豊田バンモップス株式会社 | 砥粒貼着装置、及び砥粒貼着プログラム |
FI20075533L (fi) * | 2007-07-10 | 2009-01-11 | Kwh Mirka Ab Oy | Hiomatuote ja menetelmä tämän valmistamiseksi |
WO2009023499A1 (fr) * | 2007-08-13 | 2009-02-19 | 3M Innovative Properties Company | Disque en stratifié abrasif revêtu et procédé de fabrication de celui-ci |
US8657652B2 (en) | 2007-08-23 | 2014-02-25 | Saint-Gobain Abrasives, Inc. | Optimized CMP conditioner design for next generation oxide/metal CMP |
CN101376234B (zh) * | 2007-08-28 | 2013-05-29 | 侯家祥 | 一种研磨工具磨料颗粒有序排列的方法 |
JP5171231B2 (ja) * | 2007-12-03 | 2013-03-27 | 豊田バンモップス株式会社 | 超砥粒のセッティング装置 |
JP5121423B2 (ja) * | 2007-12-03 | 2013-01-16 | 豊田バンモップス株式会社 | 超砥粒のセッティング方法 |
EP2234760B1 (fr) * | 2007-12-12 | 2013-06-05 | Saint-Gobain Abrasives, Inc. | Outil abrasif multifonction avec liant hybride |
SG192427A1 (en) | 2008-06-23 | 2013-08-30 | Saint Gobain Abrasives Inc | High porosity vitrified superabrasive products and method of preparation |
JP5065197B2 (ja) * | 2008-07-31 | 2012-10-31 | 株式会社ノリタケカンパニーリミテド | ビトリファイド砥石 |
US8342910B2 (en) | 2009-03-24 | 2013-01-01 | Saint-Gobain Abrasives, Inc. | Abrasive tool for use as a chemical mechanical planarization pad conditioner |
KR20120030048A (ko) * | 2009-04-17 | 2012-03-27 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 금속 입자 전달 용품, 금속 개질된 기판 및 이의 제조 및 이용 방법 |
SG176629A1 (en) * | 2009-06-02 | 2012-01-30 | Saint Gobain Abrasives Inc | Corrosion-resistant cmp conditioning tools and methods for making and using same |
US20110097977A1 (en) * | 2009-08-07 | 2011-04-28 | Abrasive Technology, Inc. | Multiple-sided cmp pad conditioning disk |
US9028948B2 (en) | 2009-08-14 | 2015-05-12 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body, and methods of forming thereof |
WO2011020105A2 (fr) | 2009-08-14 | 2011-02-17 | Saint-Gobain Abrasives, Inc. | Articles abrasifs comprenant des particules abrasives collées sur un corps allongé |
CN102612734A (zh) * | 2009-09-01 | 2012-07-25 | 圣戈班磨料磨具有限公司 | 化学机械抛光修整器 |
WO2011056680A2 (fr) | 2009-10-27 | 2011-05-12 | Saint-Gobain Abrasives, Inc. | Abrasif lié vitreux |
BR112012009809A2 (pt) | 2009-10-27 | 2016-11-22 | Saint Gobain Abrasifs Sa | produto superabrasivo, respectivo precursor e método de formação, produto de resina superabrasivo e método de retificação de uma pastilha no avesso |
JP2013514159A (ja) * | 2009-12-29 | 2013-04-25 | サンーゴバン アブレイシブズ,インコーポレイティド | 家庭用品表面の清掃方法 |
KR101832002B1 (ko) | 2010-03-03 | 2018-02-23 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 접합된 연마 휠 |
US20110306275A1 (en) * | 2010-06-13 | 2011-12-15 | Nicolson Matthew D | Component finishing tool |
DE102010038324B4 (de) * | 2010-07-23 | 2012-03-22 | Hilti Aktiengesellschaft | Vorrichtung zum Positionieren von Schneidpartikeln |
TWI453089B (zh) * | 2010-08-16 | 2014-09-21 | Saint Gobain Abrasives Inc | 對包含超級磨料材料的工件進行磨削之方法 |
TWI454342B (zh) | 2010-08-16 | 2014-10-01 | Saint Gobain Abrasives Inc | 用於對超級磨料工件進行磨削之磨料物品 |
TW201507812A (zh) | 2010-12-30 | 2015-03-01 | Saint Gobain Abrasives Inc | 磨料物品及形成方法 |
CA2827223C (fr) | 2011-02-16 | 2020-01-07 | 3M Innovative Properties Company | Article abrasif revetu ayant des particules abrasives ceramiques faconnees alignees en rotation et procede de fabrication |
CN102198641B (zh) * | 2011-05-12 | 2013-05-01 | 沈阳理工大学 | 叶序排布磨料端面超硬磨料砂轮及其生产方法 |
TWI487019B (en) | 2011-05-23 | 2015-06-01 | Cmp pad dresser having leveled tips and associated methods | |
TW201300199A (zh) * | 2011-06-30 | 2013-01-01 | Saint Gobain Abrasives Inc | 磨料物品及製造方法 |
EP2755803A4 (fr) | 2011-09-16 | 2015-12-30 | Saint Gobain Abrasives Inc | Article abrasif et procédé de formation |
JP5869680B2 (ja) | 2011-09-29 | 2016-02-24 | サンーゴバン アブレイシブズ,インコーポレイティド | バリア層を有する細長い基板本体に結合した研磨粒子を含む研磨物品及びその形成方法 |
US9266220B2 (en) | 2011-12-30 | 2016-02-23 | Saint-Gobain Abrasives, Inc. | Abrasive articles and method of forming same |
DE212012000041U1 (de) | 2011-12-31 | 2013-10-14 | Saint-Gobain Abrasifs S.A. | Schleifartikel, der eine ungleichförmige Verteilung von Öffnungen aufweist |
US9242342B2 (en) * | 2012-03-14 | 2016-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Manufacture and method of making the same |
CA2773197A1 (fr) * | 2012-03-27 | 2013-09-27 | Yundong Li | Outils electroplaques comportant des particules abrasives liees chimiquement et deliberement placees et leurs methodes de fabrication |
CN102717325B (zh) * | 2012-06-08 | 2014-06-11 | 浙江工业大学 | 一种基于非牛顿流体剪切增稠效应的超精密曲面抛光方法 |
TWI477343B (zh) | 2012-06-29 | 2015-03-21 | Saint Gobain Abrasives Inc | 研磨物品及形成方法 |
TW201402274A (zh) | 2012-06-29 | 2014-01-16 | Saint Gobain Abrasives Inc | 研磨物品及形成方法 |
TW201404527A (zh) | 2012-06-29 | 2014-02-01 | Saint Gobain Abrasives Inc | 研磨物品及形成方法 |
RU2614488C2 (ru) * | 2012-10-15 | 2017-03-28 | Сен-Гобен Абразивс, Инк. | Абразивные частицы, имеющие определенные формы, и способы формирования таких частиц |
TW201441355A (zh) | 2013-04-19 | 2014-11-01 | Saint Gobain Abrasives Inc | 研磨製品及其形成方法 |
TWI589404B (zh) * | 2013-06-28 | 2017-07-01 | 聖高拜磨料有限公司 | 基於向日葵圖案之經塗佈的研磨製品 |
EP3043961A4 (fr) * | 2013-09-13 | 2017-04-12 | Stora Enso Oyj | Procédé de formation de motif de grain sur une pierre meule |
TWI621505B (zh) | 2015-06-29 | 2018-04-21 | 聖高拜磨料有限公司 | 研磨物品及形成方法 |
US10513026B1 (en) | 2017-07-14 | 2019-12-24 | United States Of America As Represented By The Administrator Of Nasa | Surface grinding tool |
US20200156215A1 (en) * | 2017-07-31 | 2020-05-21 | 3M Innovative Properties Company | Placement of abrasive particles for achieving orientation independent scratches and minimizing observable manufacturing defects |
EP3661697A1 (fr) | 2017-07-31 | 2020-06-10 | 3M Innovative Properties Company | Tapis de sol à distribution abrasive variable |
DE102018109528A1 (de) * | 2018-04-20 | 2019-10-24 | Rhodius Schleifwerkzeuge Gmbh & Co. Kg | Abrasive Scheibe für handgeführte Werkzeugmaschinen mit unterschiedlichen Arbeitsbereichen |
CN112512749B (zh) | 2018-07-23 | 2022-11-04 | 圣戈班磨料磨具有限公司 | 磨料制品及其形成方法 |
WO2021161332A1 (fr) * | 2020-02-11 | 2021-08-19 | INDIAN INSTITUTE OF TECHNOLOGY MADRAS (IIT Madras) | Système et procédé de développement de meules brasées à couche unique par placement de grains dans un réseau prédéfini |
CN112518561B (zh) * | 2020-10-23 | 2022-04-22 | 湖南科技大学 | 光-剪切联合诱导增稠效应的光流变抛光方法及装置 |
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US36341A (en) * | 1862-09-02 | Joseph defossez | ||
US19794A (en) * | 1858-03-30 | Improvement in railroad-car couplings | ||
US26879A (en) * | 1860-01-24 | Lard-expresser | ||
US2194472A (en) * | 1935-12-30 | 1940-03-26 | Carborundum Co | Production of abrasive materials |
USRE26879E (en) | 1969-04-22 | 1970-05-19 | Process for making metal bonded diamond tools employing spherical pellets of metallic powder-coated diamond grits | |
JPS63251170A (ja) * | 1987-04-06 | 1988-10-18 | Mikurotetsuku Tsuuwan:Kk | 研削工具に適する研削面及びその形成方法 |
US4931069A (en) * | 1987-10-30 | 1990-06-05 | Wiand Ronald C | Abrasive tool with improved swarf clearance and method of making |
US5049165B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Composite material |
US4925457B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Method for making an abrasive tool |
US5014468A (en) * | 1989-05-05 | 1991-05-14 | Norton Company | Patterned coated abrasive for fine surface finishing |
US5152917B1 (en) | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
US5817204A (en) * | 1991-06-10 | 1998-10-06 | Ultimate Abrasive Systems, L.L.C. | Method for making patterned abrasive material |
US5472461A (en) * | 1994-01-21 | 1995-12-05 | Norton Company | Vitrified abrasive bodies |
US5492771A (en) * | 1994-09-07 | 1996-02-20 | Abrasive Technology, Inc. | Method of making monolayer abrasive tools |
TW383322B (en) * | 1994-11-02 | 2000-03-01 | Norton Co | An improved method for preparing mixtures for abrasive articles |
WO1996040474A1 (fr) * | 1995-06-07 | 1996-12-19 | Norton Company | Outil de coupe ayant une surface de coupe structuree |
JP3020443B2 (ja) * | 1996-03-01 | 2000-03-15 | 旭ダイヤモンド工業株式会社 | ツルーア及びその製造方法 |
US6371838B1 (en) | 1996-07-15 | 2002-04-16 | Speedfam-Ipec Corporation | Polishing pad conditioning device with cutting elements |
US5842912A (en) * | 1996-07-15 | 1998-12-01 | Speedfam Corporation | Apparatus for conditioning polishing pads utilizing brazed diamond technology |
US5863306A (en) * | 1997-01-07 | 1999-01-26 | Norton Company | Production of patterned abrasive surfaces |
US5833724A (en) * | 1997-01-07 | 1998-11-10 | Norton Company | Structured abrasives with adhered functional powders |
US6368198B1 (en) * | 1999-11-22 | 2002-04-09 | Kinik Company | Diamond grid CMP pad dresser |
TW394723B (en) | 1997-04-04 | 2000-06-21 | Sung Chien Min | Abrasive tools with patterned grit distribution and method of manufacture |
US7124753B2 (en) * | 1997-04-04 | 2006-10-24 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US6679243B2 (en) * | 1997-04-04 | 2004-01-20 | Chien-Min Sung | Brazed diamond tools and methods for making |
US6286498B1 (en) * | 1997-04-04 | 2001-09-11 | Chien-Min Sung | Metal bond diamond tools that contain uniform or patterned distribution of diamond grits and method of manufacture thereof |
US6537140B1 (en) * | 1997-05-14 | 2003-03-25 | Saint-Gobain Abrasives Technology Company | Patterned abrasive tools |
US6358133B1 (en) | 1998-02-06 | 2002-03-19 | 3M Innovative Properties Company | Grinding wheel |
US6159087A (en) * | 1998-02-11 | 2000-12-12 | Applied Materials, Inc. | End effector for pad conditioning |
US6123612A (en) * | 1998-04-15 | 2000-09-26 | 3M Innovative Properties Company | Corrosion resistant abrasive article and method of making |
US6158133A (en) * | 1998-12-23 | 2000-12-12 | Fiskars Inc. | Oval cutter |
FR2788457B1 (fr) | 1999-01-15 | 2001-02-16 | Saint Gobain Vitrage | Procede d'obtention d'un motif sur un substrat en materiau verrier |
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CA2288462A1 (fr) * | 1999-11-03 | 2001-05-03 | Patrick Renaud | Piece de liaison d'une pompe |
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US6096107A (en) * | 2000-01-03 | 2000-08-01 | Norton Company | Superabrasive products |
KR100360669B1 (ko) * | 2000-02-10 | 2002-11-18 | 이화다이아몬드공업 주식회사 | 연마드레싱용 공구 및 그의 제조방법 |
US6572446B1 (en) * | 2000-09-18 | 2003-06-03 | Applied Materials Inc. | Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane |
ES2245300T3 (es) | 2000-11-22 | 2006-01-01 | Listemann Ag Werkstoff- Und Warmebehandlungstechnik | Metodo para la fabricacion de herramientas abrasivas. |
JP3947355B2 (ja) * | 2000-12-15 | 2007-07-18 | 旭ダイヤモンド工業株式会社 | 砥粒工具及びその製造方法 |
US6575353B2 (en) * | 2001-02-20 | 2003-06-10 | 3M Innovative Properties Company | Reducing metals as a brazing flux |
JP4508514B2 (ja) * | 2001-03-02 | 2010-07-21 | 旭ダイヤモンド工業株式会社 | Cmpコンディショナ及びその製造方法 |
US6511713B2 (en) | 2001-04-02 | 2003-01-28 | Saint-Gobain Abrasives Technology Company | Production of patterned coated abrasive surfaces |
US6514302B2 (en) * | 2001-05-15 | 2003-02-04 | Saint-Gobain Abrasives, Inc. | Methods for producing granular molding materials for abrasive articles |
JP2003053665A (ja) | 2001-08-10 | 2003-02-26 | Mitsubishi Materials Corp | ドレッサー |
KR100428947B1 (ko) | 2001-09-28 | 2004-04-29 | 이화다이아몬드공업 주식회사 | 다이아몬드 공구 |
US7258708B2 (en) * | 2004-12-30 | 2007-08-21 | Chien-Min Sung | Chemical mechanical polishing pad dresser |
-
2003
- 2003-10-10 US US10/683,486 patent/US20050076577A1/en not_active Abandoned
-
2004
- 2004-09-07 RU RU2006111358/02A patent/RU2320472C2/ru not_active IP Right Cessation
- 2004-09-07 SK SK5036-2006A patent/SK50362006A3/sk unknown
- 2004-09-07 KR KR1020067006697A patent/KR100796184B1/ko not_active IP Right Cessation
- 2004-09-07 CA CA2540733A patent/CA2540733C/fr not_active Expired - Fee Related
- 2004-09-07 ES ES200650030A patent/ES2306591B1/es not_active Expired - Fee Related
- 2004-09-07 MX MXPA06004041A patent/MXPA06004041A/es active IP Right Grant
- 2004-09-07 WO PCT/US2004/028881 patent/WO2005039828A1/fr active IP Right Grant
- 2004-09-07 AT AT0937504A patent/AT502328B1/de not_active IP Right Cessation
- 2004-09-07 DE DE112004001912T patent/DE112004001912T5/de not_active Withdrawn
- 2004-09-07 GB GB0609169A patent/GB2423491B/en not_active Expired - Fee Related
- 2004-09-07 JP JP2006533886A patent/JP4520465B2/ja not_active Expired - Fee Related
- 2004-09-07 PL PL379550A patent/PL204960B1/pl unknown
- 2004-09-07 CN CN2004800296876A patent/CN1867428B/zh not_active Expired - Fee Related
- 2004-09-07 HU HU0600297A patent/HUP0600297A2/hu unknown
- 2004-09-07 BR BRPI0415196-8A patent/BRPI0415196A/pt not_active Application Discontinuation
- 2004-09-16 TW TW093128057A patent/TWI278928B/zh not_active IP Right Cessation
- 2004-09-21 NL NL1027081A patent/NL1027081C2/nl not_active IP Right Cessation
- 2004-09-29 IT IT001858A patent/ITMI20041858A1/it unknown
- 2004-10-07 BE BE2004/0493A patent/BE1016293A4/fr active
- 2004-10-07 MY MYPI20044108A patent/MY136988A/en unknown
- 2004-10-08 FR FR0410640A patent/FR2860744B1/fr not_active Expired - Fee Related
-
2005
- 2005-09-16 US US11/229,408 patent/US7507267B2/en not_active Expired - Fee Related
-
2006
- 2006-04-05 IL IL174805A patent/IL174805A/en not_active IP Right Cessation
- 2006-04-07 FI FI20060341A patent/FI20060341A/fi not_active IP Right Cessation
-
2007
- 2007-01-23 HK HK07100792.3A patent/HK1094176A1/xx not_active IP Right Cessation
-
2009
- 2009-02-18 US US12/372,879 patent/US7993419B2/en not_active Expired - Fee Related
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2011
- 2011-06-28 US US13/170,450 patent/US20110252710A1/en not_active Abandoned
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