FR2864059B1 - Microsoupape integree et procede de fabrication d'une telle microsoupape - Google Patents

Microsoupape integree et procede de fabrication d'une telle microsoupape

Info

Publication number
FR2864059B1
FR2864059B1 FR0453104A FR0453104A FR2864059B1 FR 2864059 B1 FR2864059 B1 FR 2864059B1 FR 0453104 A FR0453104 A FR 0453104A FR 0453104 A FR0453104 A FR 0453104A FR 2864059 B1 FR2864059 B1 FR 2864059B1
Authority
FR
France
Prior art keywords
microsoupape
integrated
manufacturing
integrated microsoupape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0453104A
Other languages
English (en)
Other versions
FR2864059A1 (fr
Inventor
Stefan Pinter
Tjalf Pirk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2864059A1 publication Critical patent/FR2864059A1/fr
Application granted granted Critical
Publication of FR2864059B1 publication Critical patent/FR2864059B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Fluid-Driven Valves (AREA)
  • Micromachines (AREA)
FR0453104A 2003-12-23 2004-12-21 Microsoupape integree et procede de fabrication d'une telle microsoupape Expired - Fee Related FR2864059B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10360654 2003-12-23
DE10360665 2003-12-23

Publications (2)

Publication Number Publication Date
FR2864059A1 FR2864059A1 (fr) 2005-06-24
FR2864059B1 true FR2864059B1 (fr) 2007-04-06

Family

ID=34635132

Family Applications (2)

Application Number Title Priority Date Filing Date
FR0453035A Pending FR2864229A1 (fr) 2003-12-23 2004-12-17 Capteur de flux integre et procede de fabrication
FR0453104A Expired - Fee Related FR2864059B1 (fr) 2003-12-23 2004-12-21 Microsoupape integree et procede de fabrication d'une telle microsoupape

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FR0453035A Pending FR2864229A1 (fr) 2003-12-23 2004-12-17 Capteur de flux integre et procede de fabrication

Country Status (3)

Country Link
US (1) US7299818B2 (fr)
DE (2) DE102004008009A1 (fr)
FR (2) FR2864229A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102515087A (zh) * 2011-12-01 2012-06-27 上海先进半导体制造股份有限公司 流量传感器的制造方法

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* Cited by examiner, † Cited by third party
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CN101384846A (zh) * 2006-02-13 2009-03-11 皇家飞利浦电子股份有限公司 用于分子诊断用途的微流体装置
US7871570B2 (en) * 2007-02-23 2011-01-18 Joseph Zhili Huang Fluidic array devices and systems, and related methods of use and manufacturing
CN104142694B (zh) * 2014-07-16 2016-06-29 北京控制工程研究所 一种多层孔板结构微流量控制装置
CN104950927B (zh) * 2015-05-08 2019-07-12 沈阳航空航天大学 一种基于调幅的流速比例调节装置
NL2014801B1 (en) * 2015-05-13 2017-01-27 Berkin Bv Fluid flow device, comprising a valve unit, as well as method of manufacturing the same.
IT201700091226A1 (it) * 2017-08-07 2019-02-07 St Microelectronics Srl Dispositivo mems comprendente una membrana ed un attuatore per controllare la curvatura della membrana e compensare deformazioni indesiderate della membrana
EP3724264B1 (fr) 2017-12-14 2024-09-04 Nutrition & Biosciences USA 4, Inc. Copolymères greffés d'alpha-1,3-glucane
US11794476B2 (en) 2018-05-11 2023-10-24 Matthews International Corporation Micro-valves for use in jetting assemblies
WO2019215672A1 (fr) 2018-05-11 2019-11-14 Matthews International Corporation Systèmes et procédés de commande du fonctionnement de micro-vannes destinées à être utilisées dans des ensembles d'éjection
CN116394655A (zh) 2018-05-11 2023-07-07 马修斯国际公司 用于密封喷射组件中使用的微型阀的系统和方法
US11639057B2 (en) 2018-05-11 2023-05-02 Matthews International Corporation Methods of fabricating micro-valves and jetting assemblies including such micro-valves
WO2019215669A1 (fr) 2018-05-11 2019-11-14 Matthews International Corporation Structures à électrodes pour micro-vannes destinées à être utilisées dans des ensembles de projection
CN111747376B (zh) * 2019-03-29 2023-06-30 研能科技股份有限公司 微流体致动器模块的制造方法
US11236846B1 (en) * 2019-07-11 2022-02-01 Facebook Technologies, Llc Fluidic control: using exhaust as a control mechanism

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
DE3914031C2 (de) * 1989-04-28 1993-10-28 Deutsche Aerospace Mikromechanischer Aktuator
US5244537A (en) * 1989-12-27 1993-09-14 Honeywell, Inc. Fabrication of an electronic microvalve apparatus
CH684209A5 (fr) * 1990-11-20 1994-07-29 Westonbridge Int Ltd Clapet intégré et micropompe comprenant un tel clapet.
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
DE4320326A1 (de) * 1993-06-18 1994-12-22 Siemens Ag Vorrichtung zur Messung einer radialen Gas- oder Flüssigkeitsströmung mit einer Wheatstone-Brücke von vier temperaturempfindlichen Widerständen
DE4400315C1 (de) * 1994-01-07 1995-01-12 Kernforschungsz Karlsruhe Verfahren zum stufenweisen Aufbau von Mikrostrukturkörpern und damit hergestellter Mikrostrukturkörper
DE4439222C2 (de) * 1994-11-03 1998-05-28 Bosch Gmbh Robert Massenflußsensor mit Druckkompensation
US5927325A (en) * 1996-10-25 1999-07-27 Inpod, Inc. Microelectromechanical machined array valve
DE19648730C2 (de) * 1996-11-25 1998-11-19 Fraunhofer Ges Forschung Piezoelektrisch betätigtes Mikroventil
US6116863A (en) * 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same
EP1076767B1 (fr) * 1998-05-08 2002-02-06 Infineon Technologies AG Microsoupape
US6032689A (en) * 1998-10-30 2000-03-07 Industrial Technology Research Institute Integrated flow controller module
US6526823B2 (en) * 1999-11-30 2003-03-04 California Institute Of Technology Microelectromechanical system sensor assembly
US6626417B2 (en) * 2001-02-23 2003-09-30 Becton, Dickinson And Company Microfluidic valve and microactuator for a microvalve
DE10210344A1 (de) * 2002-03-08 2003-10-02 Univ Bremen Verfahren zur Herstellung mikromechanischer Bauteile und nach dem Verfahren hergestellte Bauteile
US6869818B2 (en) * 2002-11-18 2005-03-22 Redwood Microsystems, Inc. Method for producing and testing a corrosion-resistant channel in a silicon device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102515087A (zh) * 2011-12-01 2012-06-27 上海先进半导体制造股份有限公司 流量传感器的制造方法

Also Published As

Publication number Publication date
FR2864059A1 (fr) 2005-06-24
DE102004008008B4 (de) 2016-02-04
US20050145279A1 (en) 2005-07-07
US7299818B2 (en) 2007-11-27
DE102004008009A1 (de) 2005-07-28
FR2864229A1 (fr) 2005-06-24
DE102004008008A1 (de) 2005-07-28

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120831