AT394321B - Einrichtung zum verteilen eines heissen gasstromes sowie dreiwege-ventil - Google Patents

Einrichtung zum verteilen eines heissen gasstromes sowie dreiwege-ventil Download PDF

Info

Publication number
AT394321B
AT394321B AT0130587A AT130587A AT394321B AT 394321 B AT394321 B AT 394321B AT 0130587 A AT0130587 A AT 0130587A AT 130587 A AT130587 A AT 130587A AT 394321 B AT394321 B AT 394321B
Authority
AT
Austria
Prior art keywords
gas
valve
chamber
valve insert
hot gas
Prior art date
Application number
AT0130587A
Other languages
German (de)
English (en)
Other versions
ATA130587A (de
Original Assignee
Pfeiffer Vakuumtechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik
Publication of ATA130587A publication Critical patent/ATA130587A/de
Application granted granted Critical
Publication of AT394321B publication Critical patent/AT394321B/de

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
    • F27B17/0016Chamber type furnaces
    • F27B17/0083Chamber type furnaces with means for circulating the atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/04Circulating atmospheres by mechanical means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/877With flow control means for branched passages
    • Y10T137/87788With valve or movable deflector at junction
    • Y10T137/8782Rotary valve or deflector
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/877With flow control means for branched passages
    • Y10T137/87909Containing rotary valve

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Sliding Valves (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AT0130587A 1986-07-03 1987-05-21 Einrichtung zum verteilen eines heissen gasstromes sowie dreiwege-ventil AT394321B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863622339 DE3622339A1 (de) 1986-07-03 1986-07-03 Einrichtung zum verteilen eines heissen gasstromes

Publications (2)

Publication Number Publication Date
ATA130587A ATA130587A (de) 1991-09-15
AT394321B true AT394321B (de) 1992-03-10

Family

ID=6304306

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0130587A AT394321B (de) 1986-07-03 1987-05-21 Einrichtung zum verteilen eines heissen gasstromes sowie dreiwege-ventil

Country Status (9)

Country Link
US (1) US4818223A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS6325488A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AT (1) AT394321B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH673701A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3622339A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2601120B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2194027B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1205060B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL8701487A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1006922C2 (nl) * 1997-09-03 1999-03-04 Adriaan Cornelis Christiaan Hu Werkwijze voor het bakken van keramische produkten alsmede branderinrichting ten behoeve van de werkwijze.
ES2177362B1 (es) * 1999-05-26 2004-09-16 Ingener, Ingenieria Del Nervion, S.A.L. Horno de tratamiento con sistema de doble circulacion de gases.
DE19946679C2 (de) * 1999-09-29 2002-04-04 Knorr Bremse Systeme Vorrichtung zur Regelung eines Luftdruckes in Eisenbahnbremssystemen sowie Druckregelventil hierfür
JP4579157B2 (ja) * 2003-03-25 2010-11-10 東京エレクトロン株式会社 処理装置及び切り替え機構
GB0320837D0 (en) * 2003-09-05 2003-10-08 Gemco Furnaces Bv High uniform temperature pdp oven
JP5073696B2 (ja) * 2009-02-26 2012-11-14 東京エレクトロン株式会社 処理装置
KR101828427B1 (ko) * 2017-11-22 2018-03-29 주식회사 보야 파우더 프로텍팅 3웨이 밸브

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3091445A (en) * 1959-10-22 1963-05-28 Sunbeam Equip Combined furnace heater and circulator
US3459416A (en) * 1965-06-21 1969-08-05 Loftus Engineering Corp Industrial furnaces
GB1161603A (en) * 1965-12-30 1969-08-13 Nemo Heat Treat S Ltd Improvements relating to Heat Treatment Furnaces
US3837356A (en) * 1973-04-20 1974-09-24 Allis Chalmers High temperature valve
US3897671A (en) * 1973-08-31 1975-08-05 Comptex Apparatus and method for covering a load on a pallet
US4134427A (en) * 1975-11-17 1979-01-16 Joseph Vitner Flow splitter
US4131129A (en) * 1977-04-06 1978-12-26 Firestone Raymond A Device for controlling gas flow into vessels
US4162141A (en) * 1977-12-27 1979-07-24 West Clarence W Variable air flow oven
FR2417043A1 (fr) * 1978-02-10 1979-09-07 Queroy Sa Robinet melangeur utilisable notamment dans les installations sanitaires
DE2844843C2 (de) * 1978-10-14 1985-09-12 Ipsen Industries International Gmbh, 4190 Kleve Industrieofen zur Wärmebehandlung metallischer Werkstücke
US4235592A (en) * 1979-08-29 1980-11-25 Autoclave Engineers, Inc. Autoclave furnace with mechanical circulation
FR2469200A1 (fr) * 1979-11-13 1981-05-22 Fives Cail Babcock Dispositif d'homogeneisation pour produits liquides ou pateux
US4311166A (en) * 1980-06-20 1982-01-19 Curtiss-Wright Corporation Valve assembly for use with high temperature and high pressure fluids
US4403626A (en) * 1981-05-18 1983-09-13 Continental Disc Corporation Valve assembly
DE3301181A1 (de) * 1983-01-15 1984-07-19 Friedrich Grohe Armaturenfabrik Gmbh & Co, 5870 Hemer Eingriffmischventil
GB2136938B (en) * 1983-03-23 1986-06-18 Wild Barfield Limited Improvements in furnaces
US4596526A (en) * 1985-03-04 1986-06-24 Worthington Industries, Inc. Batch coil annealing furnace and method
EP0199838B1 (en) * 1985-04-30 1991-07-17 Asahi Glass Company Ltd. Butterfly valve for controlling high-temperature fluid

Also Published As

Publication number Publication date
ATA130587A (de) 1991-09-15
FR2601120B1 (fr) 1990-11-23
GB2194027A (en) 1988-02-24
JPS6325488A (ja) 1988-02-02
IT8720961A0 (it) 1987-06-19
FR2601120A1 (fr) 1988-01-08
GB2194027B (en) 1990-04-04
NL8701487A (nl) 1988-02-01
IT1205060B (it) 1989-03-10
DE3622339A1 (de) 1988-01-07
GB8715491D0 (en) 1987-08-05
CH673701A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-30
US4818223A (en) 1989-04-04

Similar Documents

Publication Publication Date Title
DE69230401T2 (de) Cvd-vorrichtung und verfahren mit primärström
DE69824227T2 (de) Wärmebehandlungsanlage
DE69007733T2 (de) Vorrichtung und verfahren zur behandlung eines flachen, scheibenförmigen substrates unter niedrigem druck.
DE69534965T2 (de) Abscheidungsverfahren
DE69613998T2 (de) Verfahren und vorrichtung zum heissisostatischen pressen von teilen
DE60032324T2 (de) Wafer-Behandlungsvorrichtung
AT394321B (de) Einrichtung zum verteilen eines heissen gasstromes sowie dreiwege-ventil
DE1408978B2 (de) Vorrichtung zur Durchführung von Wärmebehandlungen von zu offenen Spulen gewickelten Metallbändern bei gleichzeitiger Änderung der chemischen Zusammensetzung
DE2722065A1 (de) Ofen zum isostatischen warmpressen
DE69802456T2 (de) Beschichtungsstrasse für leitende Drähte
DE3627941A1 (de) Waermebehandlungsvorrichtung mit wirbelbettofen
DE112004002277T5 (de) Anlage zur raschen thermischen Bearbeitung
DE102016108845A1 (de) Gasinjektor für Reaktorbereiche
AT523871B1 (de) Konvektionsofen
WO2021072470A1 (de) Vorrichtung zur oberflächenbehandlung eines werkstückes in einer fertigungsstrasse
DE60125241T2 (de) Wärmebehandlungseinrichtung
WO2023138919A1 (de) Vorrichtung zur entbinderung und sinterung eines werkstücks
DE69126959T2 (de) Wasserdampfversorgungseinrichtung
CH659315A5 (de) Vakuumofen zum entwachsen und sintern von hartmetallen.
EP2192209A2 (de) Vorrichtung zur Reinigung oxidierter oder korrodierter Bauteile in Gegenwart eines halogenhaltigen Gasgemisches
DE2448714A1 (de) Verfahren zur behandlung von gegenstaenden unter vakuum mit gaszufuhr
DE19704533C2 (de) Verfahren zur Schichterzeugung auf einer Oberfläche
DE102008030677A1 (de) Verfahen und Vorrichtung zur Diffusionsbehandlung von Werkstücken
DE102007058053B4 (de) Diffusionsofen und Verfahren zur Erzeugung einer Gasströmung
DE102022106661A1 (de) Verfahren und Vorrichtung zum Plasmanitrieren und anschließendem Oxidieren einer Oberfläche eines Bauteils

Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
UEP Publication of translation of european patent specification