JPWO2007018028A1 - Thin glass laminate and method for manufacturing display device using thin glass laminate - Google Patents

Thin glass laminate and method for manufacturing display device using thin glass laminate Download PDF

Info

Publication number
JPWO2007018028A1
JPWO2007018028A1 JP2007529473A JP2007529473A JPWO2007018028A1 JP WO2007018028 A1 JPWO2007018028 A1 JP WO2007018028A1 JP 2007529473 A JP2007529473 A JP 2007529473A JP 2007529473 A JP2007529473 A JP 2007529473A JP WO2007018028 A1 JPWO2007018028 A1 JP WO2007018028A1
Authority
JP
Japan
Prior art keywords
glass substrate
thin glass
silicone
resin layer
silicone resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007529473A
Other languages
Japanese (ja)
Other versions
JP5200538B2 (en
Inventor
樋口 俊彦
俊彦 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2007529473A priority Critical patent/JP5200538B2/en
Publication of JPWO2007018028A1 publication Critical patent/JPWO2007018028A1/en
Application granted granted Critical
Publication of JP5200538B2 publication Critical patent/JP5200538B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10036Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10798Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing silicone
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00Layered products comprising a layer of natural or synthetic rubber
    • B32B25/20Layered products comprising a layer of natural or synthetic rubber comprising silicone rubber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/283Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polysiloxanes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133302Rigid substrates, e.g. inorganic substrates
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • B32B2307/306Resistant to heat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/748Releasability
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2319/00Synthetic rubber
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K2323/00Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
    • C09K2323/05Bonding or intermediate layer characterised by chemical composition, e.g. sealant or spacer
    • C09K2323/053Organic silicon compound, e.g. organosilicon
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168Gripping and pulling work apart during delaminating
    • Y10T156/1189Gripping and pulling work apart during delaminating with shearing during delaminating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19Delaminating means
    • Y10T156/1961Severing delaminating means [e.g., chisel, etc.]
    • Y10T156/1967Cutting delaminating means
    • Y10T156/1972Shearing delaminating means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31652Of asbestos
    • Y10T428/31663As siloxane, silicone or silane

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

薄板ガラス基板と支持ガラス基板を気泡の混入や異物による凸状欠陥の発生を抑制し、薄板ガラス基板と支持ガラス基板との分離が容易であり、かつ耐熱性に優れた薄板ガラス積層体、および該薄板ガラス積層体を用いた表示装置を製造する方法、ならびに該薄板ガラス積層体用の剥離紙用シリコーンを提供する。薄板ガラス基板と、支持ガラス基板と、を積層させてなる薄板ガラス積層体であって、前記薄板ガラス基板と、前記支持ガラス基板と、が易剥離性および非粘着性を有するシリコーン樹脂層を介して積層されていることを特徴とする薄板ガラス積層体。A thin glass substrate and a supporting glass substrate, which suppresses the occurrence of convex defects due to mixing of air bubbles and foreign matters, is easy to separate the thin glass substrate and the supporting glass substrate, and has excellent heat resistance, and A method for producing a display device using the thin glass laminate and a silicone for release paper for the thin glass laminate are provided. A thin glass laminate obtained by laminating a thin glass substrate and a supporting glass substrate, wherein the thin glass substrate and the supporting glass substrate are provided with an easily peelable and non-adhesive silicone resin layer. A thin glass laminate characterized by being laminated.

Description

本発明は、液晶表示体、有機EL表示体等の表示装置に用いられるガラス基板、より具体的には、薄板ガラス基板を用いて表示装置を製造する際に使用される該薄板ガラス基板と支持ガラス基板との積層体、およびそれを用いた表示装置の製造方法、ならびに該薄板ガラス積層体用の剥離紙用シリコーンに関する。   The present invention relates to a glass substrate used in a display device such as a liquid crystal display or an organic EL display, and more specifically, the thin glass substrate and support used in manufacturing a display device using a thin glass substrate. The present invention relates to a laminate with a glass substrate, a method for producing a display device using the laminate, and silicone for release paper for the thin glass laminate.

液晶表示装置(LCD)、有機EL表示装置(OLED)、特にモバイルや携帯電話等の携帯型表示装置の分野では、表示装置の軽量化、薄型化が重要な課題となっている。
この課題に対応するために、表示装置に用いるガラス基板の板厚をさらに薄くする検討が行われてきたが、ガラス基板の板厚を薄くすると、強度の低下が問題となり、撓み量も大きいためそのままでは現行の製造ラインに適用できない。
そこで、板厚の薄いガラス基板(以下、「薄板ガラス基板」とする。)の強度を補強し、併せて現行製造ラインに適用しうる板厚を確保するために、薄板ガラス基板を他の支持ガラス基板と貼り合わせて積層体(薄板ガラス積層体)とした状態で表示装置を製造するための所定の処理を実施し、該処理の終了後に薄板ガラス基板と支持ガラス基板とを分離することで表示装置を製造する方法が提案されている(特許文献1〜6参照)。
In the field of liquid crystal display devices (LCD), organic EL display devices (OLED), especially portable display devices such as mobile phones and mobile phones, weight reduction and thinning of display devices are important issues.
In order to cope with this problem, studies have been made to further reduce the thickness of the glass substrate used in the display device. However, if the thickness of the glass substrate is reduced, a decrease in strength becomes a problem and the amount of deflection is large. As it is, it cannot be applied to the current production line.
Therefore, in order to reinforce the strength of the thin glass substrate (hereinafter referred to as “thin glass substrate”) and to secure the plate thickness applicable to the current production line, the thin glass substrate is supported by other supports. By performing a predetermined process for manufacturing a display device in a state of being laminated with a glass substrate to form a laminate (thin glass laminate), and separating the thin glass substrate and the supporting glass substrate after the completion of the process A method of manufacturing a display device has been proposed (see Patent Documents 1 to 6).

これら表示装置を製造する方法において、薄板ガラス基板と支持ガラス基板と、を積層させて固定する方法としては、ガラス基板間に生じる静電吸着力や真空吸着力を用いて両者を固定する方法(例えば、特許文献1参照)、ガラス基板の両端をガラスフリットを用いて固定する方法(例えば、特許文献2参照)、周縁部の端面近傍にレーザ光を照射して2枚のガラス基板を融合させる方法(例えば特許文献3参照)、またはガラス基板間に再剥離性の粘着剤または粘着シートを全面にわたって配置し、その粘着力で両者を固定する方法(例えば、特許文献4〜6参照)等が提案されている。   In the method of manufacturing these display devices, as a method of laminating and fixing a thin glass substrate and a supporting glass substrate, a method of fixing both using electrostatic adsorption force or vacuum adsorption force generated between glass substrates ( For example, refer to Patent Document 1), a method of fixing both ends of a glass substrate using a glass frit (for example, refer to Patent Document 2), and irradiating a laser beam near the end face of the peripheral portion to fuse two glass substrates. A method (for example, see Patent Document 3), or a method in which a removable pressure-sensitive adhesive or pressure-sensitive adhesive sheet is disposed over the entire surface between glass substrates, and both are fixed by the adhesive force (for example, see Patent Documents 4 to 6). Proposed.

これらの方法は、製造される表示装置に悪影響するおそれのある潜在的な問題点を有していた。
すなわち、ガラス基板同士を静電吸着力や真空吸着力で固定して利用する方法、ガラス基板の両端をガラスフリットを用いて固定する方法、または周縁部の端面近傍にレーザ光を照射して2枚のガラス基板を融合させる方法では、ガラス基板同士を何らの中間層を介さず積層密着させる過程において気泡の混入や、塵介等の異物を介在とした凸状欠陥を避けることが困難であり、表面が平滑なガラス基板積層体を得ることは難しい。
ガラス基板間に再剥離性の粘着剤または粘着シートを全面にわたって配置する方法の場合は、ガラス同士を直接積層する場合と比べて気泡の混入を避けることは容易であり、また異物による凸状欠陥の発生も少ないと考えられる。しかしながら、薄板ガラス基板と支持ガラス基板とを分離することが困難になり、分離する際に薄板ガラス基板が破損するおそれがある。また分離後の薄板ガラス基板への粘着剤の残存も問題となる。さらに、表示装置の製造工程には、液晶表示装置の製造工程における絶縁膜や配向膜の焼成行程のように、高温での処理が必要となる工程を含んでいるため、粘着剤及び粘着シートには表示装置用としての耐熱性が要求されるが、耐熱性と再剥離性とを両立する方法は提案されていない。
These methods have potential problems that can adversely affect the display device being manufactured.
That is, a method in which glass substrates are fixed to each other with an electrostatic adsorption force or a vacuum adsorption force, a method in which both ends of the glass substrate are fixed with glass frit, or a laser beam is irradiated to the vicinity of the end surface of the peripheral portion. In the method of fusing together glass substrates, it is difficult to avoid the inclusion of bubbles and convex defects that include foreign matters such as dust in the process of laminating and adhering the glass substrates without any intermediate layer. It is difficult to obtain a glass substrate laminate having a smooth surface.
In the case of a method in which a removable adhesive or pressure sensitive adhesive sheet is placed over the entire surface between glass substrates, it is easier to avoid mixing of bubbles than in the case of directly laminating glass, and convex defects due to foreign matter. It is thought that there is little occurrence of. However, it becomes difficult to separate the thin glass substrate and the supporting glass substrate, and the thin glass substrate may be damaged during the separation. Further, the remaining adhesive on the thin glass substrate after separation also becomes a problem. Furthermore, since the manufacturing process of the display device includes a process that requires processing at a high temperature, such as the firing process of the insulating film and the alignment film in the manufacturing process of the liquid crystal display device, the adhesive and the adhesive sheet However, a method for achieving both heat resistance and removability has not been proposed.

特開2000−241804号公報JP 2000-241804 A 特開昭58−54316号公報JP 58-54316 A 特開2003−216068号公報JP 2003-2160868 A 特開平8−86993号公報Japanese Patent Laid-Open No. 8-86993 特開平9−105896号公報Japanese Patent Laid-Open No. 9-105896 特開2000−252342号公報JP 2000-252342 A

上記した従来技術の問題点を解決するため、本発明は、薄板ガラス基板と支持ガラス基板を気泡の混入や異物による凸状欠陥の発生を抑制し、薄板ガラス基板と支持ガラス基板との分離が容易であり、かつ耐熱性に優れた薄板ガラス積層体、および該薄板ガラス積層体を用いた表示装置を製造する方法、ならびに、該薄板ガラス積層体用の剥離紙用シリコーンを提供することを目的とする。   In order to solve the above-mentioned problems of the prior art, the present invention suppresses the occurrence of convex defects due to the mixing of bubbles and foreign matter between the thin glass substrate and the supporting glass substrate, and the separation of the thin glass substrate and the supporting glass substrate is achieved. An object of the present invention is to provide a thin glass laminate that is easy and excellent in heat resistance, a method for producing a display device using the thin glass laminate, and a release paper silicone for the thin glass laminate. And

上記の目的を達成するため、本発明は、薄板ガラス基板と、支持ガラス基板と、を積層させてなる薄板ガラス積層体であって、
前記薄板ガラス基板と、前記支持ガラス基板と、が易剥離性および非粘着性を有するシリコーン樹脂層を介して積層されていることを特徴とする薄板ガラス積層体を提供する。
前記易剥離性および非粘着性を有するシリコーン樹脂層は、さらに低シリコーン移行性を有することが好ましい。
In order to achieve the above object, the present invention is a thin glass laminate obtained by laminating a thin glass substrate and a supporting glass substrate,
Provided is a thin glass laminate in which the thin glass substrate and the supporting glass substrate are laminated via a silicone resin layer having easy peelability and non-adhesiveness.
The silicone resin layer having easy peelability and non-adhesiveness preferably further has low silicone migration.

また、前記易剥離性および非粘着性を有するシリコーン樹脂層は、剥離紙用シリコーンの硬化物からなる層であることが好ましい。
前記剥離紙用シリコーンの硬化物は、両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンと、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサンとの架橋反応物であることが好ましい。
Moreover, it is preferable that the said silicone resin layer which has easy peelability and non-adhesiveness is a layer which consists of a hardened | cured material of release paper silicone.
The cured product of the release paper silicone is a cross-linked reaction product of a linear polyorganosiloxane having vinyl groups at both ends and / or side chains and a methylhydrogen polysiloxane having a hydrosilyl group in the molecule. Preferably there is.

以下、本明細書において、薄板ガラス基板と、支持ガラス基板と、が易剥離性および非粘着性を有するシリコーン樹脂層を介して積層されている薄板ガラス積層体のことを「本発明の薄板ガラス積層体」という。
本発明の薄板ガラス積層体において、前記薄板ガラス基板の厚さが0.3mm未満であり、前記支持ガラス基板と前記易剥離性および非粘着性を有するシリコーン樹脂層との厚さの合計が0.5mm以上であることが好ましい。
本発明の薄板ガラス積層体において、前記支持ガラス基板の線膨張係数と、前記薄板ガラス基板の線膨張係数と、の差が15×10-7/℃以下であることが好ましい。
Hereinafter, in the present specification, a thin glass laminate in which a thin glass substrate and a supporting glass substrate are laminated via an easily peelable and non-adhesive silicone resin layer is referred to as “thin glass of the present invention. It is called “laminated body”.
In the thin glass laminate of the present invention, the thickness of the thin glass substrate is less than 0.3 mm, and the total thickness of the support glass substrate and the easily peelable and non-adhesive silicone resin layer is 0. It is preferably 5 mm or more.
In the thin glass laminate of the present invention, the difference between the linear expansion coefficient of the supporting glass substrate and the linear expansion coefficient of the thin glass substrate is preferably 15 × 10 −7 / ° C. or less.

また、本発明は、薄板ガラス基板を用いた表示装置の製造方法であって、
支持ガラス基板上に易剥離性および非粘着性を有するシリコーン樹脂層を形成する工程と、
前記支持ガラス基板の前記シリコーン樹脂層形成面に薄板ガラス基板を積層する工程と、
前記薄板ガラス基板上に表示装置を製造するための所定の処理を実施する工程と、
処理された前記薄板ガラス基板と前記支持ガラス基板とを分離する工程と、を含むことを特徴とする薄板ガラス積層体を用いた表示装置の製造方法(以下、「本発明の表示装置の製造方法」という。)を提供する。
Further, the present invention is a method for manufacturing a display device using a thin glass substrate,
Forming a silicone resin layer having easy peelability and non-adhesiveness on a supporting glass substrate;
Laminating a thin glass substrate on the silicone resin layer forming surface of the support glass substrate;
Performing a predetermined process for manufacturing a display device on the thin glass substrate;
Separating the processed thin glass substrate and the supporting glass substrate, and a method of manufacturing a display device using a thin glass laminate (hereinafter referred to as “display device manufacturing method of the present invention”). ").

本発明の表示装置の製造方法において、前記易剥離性および非粘着性を有するシリコーン樹脂層は、剥離紙用シリコーンの硬化物からなる層であることが好ましい。
前記剥離紙用シリコーンの硬化物は、両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンと、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサンとの架橋反応物であることが好ましい。
In the method for manufacturing a display device of the present invention, the silicone resin layer having easy peelability and non-adhesiveness is preferably a layer made of a cured product of silicone for release paper.
The cured product of the release paper silicone is a cross-linked reaction product of a linear polyorganosiloxane having vinyl groups at both ends and / or side chains and a methylhydrogen polysiloxane having a hydrosilyl group in the molecule. Preferably there is.

本発明の表示装置の製造方法において、支持ガラス基板上に易剥離性および非粘着性を有するシリコーン樹脂層を形成する工程は、前記支持ガラス基板上に剥離紙用シリコーンを塗工し、その後前記剥離紙用シリコーンを硬化させることを含むことが好ましい。
前記剥離紙用シリコーンは、非反応性シリコーンを実質的に含まないことが好ましい。
前記剥離紙用シリコーンは、両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサン、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサン、および白金系触媒を含むことが好ましい。
前記剥離紙用シリコーンの塗工は、ダイコート法、スピンコート法またはスクリーン印刷法を用いて実施することが好ましい。
前記剥離紙用シリコーンを50〜250℃の温度で加熱硬化させることが好ましい。
前記支持ガラス基板の前記シリコーン樹脂層形成面に薄板ガラス基板を積層する工程は、真空プレスまたは真空ラミネートを用いて実施することが好ましい。
また、本発明は、薄板ガラス基板と支持ガラス基板との積層に用いられる薄板ガラス積層体用の剥離紙用シリコーンを提供する。
In the method for producing a display device of the present invention, the step of forming a silicone resin layer having easy peelability and non-adhesiveness on a supporting glass substrate comprises applying release paper silicone on the supporting glass substrate, and thereafter It preferably includes curing the release paper silicone.
It is preferable that the release paper silicone is substantially free of non-reactive silicone.
The release paper silicone preferably contains a linear polyorganosiloxane having vinyl groups at both ends and / or side chains, a methylhydrogen polysiloxane having a hydrosilyl group in the molecule, and a platinum catalyst. .
The release paper silicone coating is preferably performed using a die coating method, a spin coating method, or a screen printing method.
The release paper silicone is preferably heat-cured at a temperature of 50 to 250 ° C.
The step of laminating the thin glass substrate on the surface of the support glass substrate on which the silicone resin layer is formed is preferably performed using a vacuum press or a vacuum laminate.
Moreover, this invention provides the silicone for release paper for thin glass laminated bodies used for lamination | stacking of a thin glass substrate and a support glass substrate.

本発明の薄板ガラス積層体は、柔軟性を有するシリコーン樹脂層を介して薄板ガラス基板と支持ガラス基板とが積層されているため、積層時に気泡が混入しにくく、また気泡が混入した場合でも、ロールまたはプレス等を用いて圧着することにより、容易に該気泡を除去しうるという利点がある。特に、薄板ガラス基板と支持ガラス基板との積層を真空ラミネート法または真空プレス法を用いて実施した場合、気泡の混入が抑制され、密着性も良好である。また、薄板ガラス基板と支持ガラス基板との積層を真空ラミネート法または真空プレス法を用いて実施した場合、微少な気泡が残存した場合でも、加熱により気泡が成長することがなく、薄板ガラス基板の凸状欠陥につながりにくいという利点もある。
また、塵介等の異物が積層界面に混入した場合でも柔軟性を有するシリコーン樹脂層が変形することにより薄板ガラス積層体の凸状欠陥につながりにくいという利点も有する。
また、薄板ガラス基板と支持ガラス基板との間に介在させる層が耐熱性に優れたシリコーン樹脂層であるため、耐熱性も良好である。
In the thin glass laminate of the present invention, since the thin glass substrate and the supporting glass substrate are laminated through a flexible silicone resin layer, bubbles are hardly mixed at the time of lamination, and even when bubbles are mixed, There is an advantage that the bubbles can be easily removed by pressure bonding using a roll or a press. In particular, when the lamination of the thin glass substrate and the supporting glass substrate is performed using a vacuum laminating method or a vacuum pressing method, mixing of bubbles is suppressed and adhesion is also good. In addition, when laminating the thin glass substrate and the supporting glass substrate using the vacuum laminating method or the vacuum press method, even if minute bubbles remain, the bubbles do not grow by heating, and the thin glass substrate There is also an advantage that it is difficult to lead to a convex defect.
In addition, even when foreign matter such as dust is mixed into the laminated interface, there is an advantage that the flexible silicone resin layer is deformed and is not easily connected to the convex defect of the thin glass laminate.
Moreover, since the layer interposed between the thin glass substrate and the supporting glass substrate is a silicone resin layer having excellent heat resistance, the heat resistance is also good.

本発明の薄板ガラス積層体は、易剥離性および非粘着性を有するシリコーン樹脂層を介して薄板ガラス基板と支持ガラス基板とが積層されているため、薄板ガラス基板と支持ガラス基板とに容易に分離することが可能であり、ガラス基板同士を分離する際に、薄板ガラス基板が破損するおそれがない。なお、この特性は薄板ガラス積層体を大気中300℃の温度で1時間加熱した後でも同様に発揮される。したがって、加熱処理を伴う表示装置の製造工程における使用に好適である。   In the thin glass laminate of the present invention, since the thin glass substrate and the supporting glass substrate are laminated via a silicone resin layer having easy peelability and non-adhesiveness, the thin glass substrate and the supporting glass substrate can be easily provided. It is possible to separate the thin glass substrates from each other when the glass substrates are separated from each other. This property is also exhibited even after the thin glass laminate is heated in the atmosphere at a temperature of 300 ° C. for 1 hour. Therefore, it is suitable for use in a manufacturing process of a display device that involves heat treatment.

また、シリコーン樹脂層が低シリコーン移行性を有していれば、ガラス基板同士を分離した際に、シリコーン樹脂層中の成分が薄板ガラス基板に移行しにくい。したがって、分離後、シリコーン樹脂層が形成された支持ガラス基板は、他の薄板ガラス基板との積層に繰り返し使用することができる。また、分離後の薄板ガラス基板の表面にシリコーン樹脂層中の成分が移行しにくいため、薄板ガラス基板の表面に偏光板等を貼り付ける際に貼り付け不良等が生じるおそれがない。   Moreover, if the silicone resin layer has low silicone migration, the components in the silicone resin layer are unlikely to migrate to the thin glass substrate when the glass substrates are separated from each other. Therefore, after separation, the supporting glass substrate on which the silicone resin layer is formed can be used repeatedly for lamination with other thin glass substrates. In addition, since components in the silicone resin layer are unlikely to migrate to the surface of the thin glass substrate after separation, there is no possibility of poor attachment or the like when a polarizing plate or the like is attached to the surface of the thin glass substrate.

本発明の表示装置の製造方法は、本発明の薄板ガラス積層体を用いることにより、薄板ガラス基板のたわみの発生や、製造時における薄板ガラス基板の破損が防止されるので、製造される表示装置の歩留まりを向上することができる。
本発明の表示装置の製造方法において、支持ガラス基板のシリコーン樹脂層形成面に薄板ガラス基板を積層する工程を真空プレスまたは真空ラミネートを用いて実施した場合、該シリコーン樹脂層への気泡の混入を抑制することができる。この結果、真空下でITO等の透明電極を形成する工程において、シリコーン樹脂層に混入した気泡を起点とした欠陥の発生を抑制しうるという利点がある。
The display device manufacturing method of the present invention uses the thin glass laminate of the present invention to prevent deflection of the thin glass substrate and damage of the thin glass substrate during manufacturing. The yield can be improved.
In the method for manufacturing a display device of the present invention, when the step of laminating the thin glass substrate on the silicone resin layer forming surface of the support glass substrate is performed using a vacuum press or vacuum lamination, bubbles are mixed into the silicone resin layer. Can be suppressed. As a result, in the step of forming a transparent electrode such as ITO under vacuum, there is an advantage that the generation of defects starting from bubbles mixed in the silicone resin layer can be suppressed.

本発明の薄板ガラス積層体の断面模式図である。It is a cross-sectional schematic diagram of the thin glass laminated body of this invention. 本発明の剥離試験(1)を説明する薄板ガラス積層体の断面模式図である。It is a cross-sectional schematic diagram of the thin glass laminated body explaining the peeling test (1) of this invention. 本発明のせん断強度試験を説明する薄板ガラス積層体の断面模式図である。It is a cross-sectional schematic diagram of the thin glass laminated body explaining the shear strength test of this invention.

符号の説明Explanation of symbols

1、40:支持ガラス基板
2、50:薄板ガラス基板
3、60:樹脂層
10、A:薄板ガラス積層体
20、25、30:ポリカーボネート
DESCRIPTION OF SYMBOLS 1, 40: Support glass substrate 2, 50: Thin glass substrate 3, 60: Resin layer 10, A: Thin glass laminated body 20, 25, 30: Polycarbonate

以下、本発明の薄板ガラス積層体について説明する。
本発明の薄板ガラス積層体10は、図1に示すとおり、支持ガラス基板1と薄板ガラス基板2との間にシリコーン樹脂層3を有する構造となっている。
薄板ガラス基板は、LCD、OLEDといった表示装置用のガラス基板であり、0.3mm未満の厚さを有する。薄板ガラス基板の厚さは好ましくは0.2mm以下であり、より好ましくは0.1mm以下である。また、薄板ガラス基板の厚さは0.05mm以上であることが好ましい。
なお、本発明が対象とする表示装置は、主として携帯電話やPDAのようなモバイル端末に使用される小型の表示装置である。表示装置は、主としてLCDまたはOLEDであり、LCDとしては、TN型、STN型、FE型、TFT型、MIM型を含む。
Hereinafter, the thin glass laminated body of this invention is demonstrated.
The thin glass laminated body 10 of this invention has a structure which has the silicone resin layer 3 between the support glass substrate 1 and the thin glass substrate 2 as shown in FIG.
The thin glass substrate is a glass substrate for a display device such as an LCD or an OLED, and has a thickness of less than 0.3 mm. The thickness of the thin glass substrate is preferably 0.2 mm or less, and more preferably 0.1 mm or less. The thickness of the thin glass substrate is preferably 0.05 mm or more.
The display device targeted by the present invention is a small display device mainly used for mobile terminals such as mobile phones and PDAs. The display device is mainly an LCD or an OLED, and the LCD includes a TN type, an STN type, an FE type, a TFT type, and an MIM type.

熱収縮率、表面形状、耐薬品性等、薄板ガラス基板に要求される特性は、表示装置の種類により異なる。したがって、薄板ガラス基板は、アルカリガラス製であってもよい。但し、熱収縮率が少ないことから、薄板ガラス基板としては無アルカリガラスが好ましい。
本発明において、薄板ガラス基板は熱収縮率が少ないものが好ましい。ガラスの場合、熱膨張および熱収縮の指標として、JIS R3102(1995年)規定の線膨張係数が用いられる。薄板ガラス基板は、線膨張係数が50×10-7/℃以下であることが好ましく、より好ましくは45×10-7/℃以下であり、40×10-7/℃以下であることがさらに好ましく、30×10-7/℃以下であることがより一層好ましく、20×10-7/℃以下であることが最も好ましい。
Properties required for a thin glass substrate such as heat shrinkage, surface shape, chemical resistance, and the like vary depending on the type of display device. Therefore, the thin glass substrate may be made of alkali glass. However, alkali-free glass is preferred as the thin glass substrate because of its low thermal shrinkage.
In the present invention, the thin glass substrate preferably has a low thermal shrinkage rate. In the case of glass, a linear expansion coefficient defined in JIS R3102 (1995) is used as an index of thermal expansion and contraction. The thin glass substrate preferably has a linear expansion coefficient of 50 × 10 −7 / ° C. or lower, more preferably 45 × 10 −7 / ° C. or lower, and further 40 × 10 −7 / ° C. or lower. Preferably, it is more preferably 30 × 10 −7 / ° C. or less, and most preferably 20 × 10 −7 / ° C. or less.

支持ガラス基板は、薄板ガラス基板の強度を補強する目的で薄板ガラス基板と積層させるものであるため、薄板ガラス基板よりも厚いことが必要である。支持ガラス基板の厚さは、薄板ガラス基板との積層体が現行の製造ラインで流動させることができるような厚さであることが好ましい。例えば、現行の製造ラインが厚さ0.5mmの基板を流動させるように設計されたものであって、薄板ガラス基板の厚さが0.1mmである場合、支持ガラス基板の厚さは、易剥離性および非粘着性を有するシリコーン樹脂層の厚みと併せて0.4mmであることが好ましい。なお、上記したように、薄板ガラス基板の厚さは0.2mm以下であることが好ましい。現行の製造ラインは、厚さが0.7mmのガラス基板を流動させるように設計されているものが最も一般的である。このため、支持ガラス基板と易剥離性および非粘着性を有するシリコーン樹脂層との合計厚みは、0.5mm以上であることが好ましい。但し、製造ラインは、厚さ0.5mmまたは0.7mmのガラス基板を流動させるように設計されているものに限定されず、これら以外の厚さのガラス基板を流動させるように設計されている場合もある。例えば、厚さ0.5mm未満のガラス基板を流動させるように設計されている場合もあるし、厚さ0.7mm超のガラス基板を流動させるように設計されている場合もある。
後述する易剥離性および非粘着性を有するシリコーン樹脂層の厚みを考慮すると、支持ガラス基板の厚さは0.3〜0.8mmであることが好ましい。また、支持ガラス基板と易剥離性および非粘着性を有するシリコーン樹脂層との厚さの合計は0.5mm以上であることが好ましく、1.0mm以下であることが好ましい。
Since the supporting glass substrate is laminated with the thin glass substrate for the purpose of reinforcing the strength of the thin glass substrate, the supporting glass substrate needs to be thicker than the thin glass substrate. The thickness of the supporting glass substrate is preferably such that the laminate with the thin glass substrate can be flowed in the current production line. For example, when the current production line is designed to flow a substrate having a thickness of 0.5 mm and the thickness of the thin glass substrate is 0.1 mm, the thickness of the supporting glass substrate is easy. The thickness of the silicone resin layer having peelability and non-adhesiveness is preferably 0.4 mm. As described above, the thickness of the thin glass substrate is preferably 0.2 mm or less. The current production line is most commonly designed to flow a glass substrate having a thickness of 0.7 mm. For this reason, it is preferable that the total thickness of the supporting glass substrate and the easily peelable and non-adhesive silicone resin layer is 0.5 mm or more. However, the production line is not limited to those designed to flow a glass substrate having a thickness of 0.5 mm or 0.7 mm, and is designed to flow a glass substrate having a thickness other than these. In some cases. For example, it may be designed to flow a glass substrate having a thickness of less than 0.5 mm, or may be designed to flow a glass substrate having a thickness of more than 0.7 mm.
Considering the thickness of the silicone resin layer having easy peelability and non-adhesiveness described later, the thickness of the supporting glass substrate is preferably 0.3 to 0.8 mm. The total thickness of the supporting glass substrate and the easily peelable and non-adhesive silicone resin layer is preferably 0.5 mm or more, and more preferably 1.0 mm or less.

また、支持ガラス基板は、薄板ガラス基板の強度を補強するものなので、その材質は特に限定されず、アルカリガラス、無アルカリガラスのいずれであってもよい。但し、支持ガラス基板は、その線膨張係数が薄板ガラス基板の線膨張係数と実質的に同一であることが好ましい。支持ガラス基板の線膨張係数が薄板ガラス基板の線膨張係数よりも大きい場合には、表示装置の製造工程における加熱工程で、支持ガラス基板の膨張が薄板ガラス積層体によって抑えられるため、薄板ガラス積層体に反りが発生してしまい、逆に支持ガラス基板の線膨張係数が薄板ガラス基板の線膨張係数よりも小さい場合には、薄板ガラス基板の膨張により、薄板ガラス基板がシリコーン樹脂層から剥離してしまうという不都合が生じるからである。   Further, since the supporting glass substrate reinforces the strength of the thin glass substrate, the material thereof is not particularly limited and may be either alkali glass or non-alkali glass. However, it is preferable that the support glass substrate has substantially the same linear expansion coefficient as that of the thin glass substrate. When the linear expansion coefficient of the support glass substrate is larger than the linear expansion coefficient of the thin glass substrate, since the expansion of the support glass substrate is suppressed by the thin glass laminate in the heating process of the display device manufacturing process, the thin glass laminate If the body is warped and the linear expansion coefficient of the supporting glass substrate is smaller than the linear expansion coefficient of the thin glass substrate, the thin glass substrate peels off from the silicone resin layer due to the expansion of the thin glass substrate. This is because inconvenience occurs.

本発明において、線膨張係数が実質的に同一といった場合、薄板ガラス基板の線膨張係数と支持ガラス基板の線膨張係数と、が完全に一致することを意味するものではなく、両者には多少の差があってもよい。薄板ガラス基板と支持ガラス基板との線膨張係数の差は35×10-7/℃以下であることが好ましく、より好ましくは25×10-7/℃以下であり、さらに好ましくは15×10-7/℃以下である。In the present invention, when the linear expansion coefficient is substantially the same, it does not mean that the linear expansion coefficient of the thin glass substrate and the linear expansion coefficient of the supporting glass substrate completely match, There may be a difference. The difference in coefficient of linear expansion between the thin glass substrate and the supporting glass substrate is preferably 35 × 10 −7 / ° C. or less, more preferably 25 × 10 −7 / ° C. or less, and even more preferably 15 × 10 − 7 / ° C or less.

なお、支持ガラス基板は、薄板ガラス基板を補強するとともに、薄板ガラス積層体が製造ラインを移動する際には、薄板ガラス基板を保持する基台となるため、その大きさは薄板ガラス基板の大きさと等しいか、またはそれ以上であることが好ましい。   The supporting glass substrate reinforces the thin glass substrate and, when the thin glass laminate moves on the production line, serves as a base for holding the thin glass substrate, so the size thereof is the size of the thin glass substrate. Is preferably equal to or greater than.

本発明の薄板ガラス積層体を製造する場合、支持ガラス基板上に易剥離性および非粘着性を有するシリコーン樹脂層を形成し、その後、前記支持ガラス基板のシリコーン樹脂層形成面に薄板ガラス基板を積層させる。
易剥離性および非粘着性を有するシリコーン樹脂層とは、適度な柔軟性を有するシリコーン樹脂層であって、粘着剤のように粘着力によって薄板ガラス基板を固定するのではなく、非常に近接した、相対する固体分子間におけるファンデルワールス力に起因する力、すなわち、密着力によって薄板ガラス基板を固定するものを指す。易剥離性および非粘着性を有するシリコーン樹脂層の具体的な態様については後述する。
When producing the thin glass laminate of the present invention, a silicone resin layer having easy peelability and non-adhesiveness is formed on a supporting glass substrate, and then the thin glass substrate is formed on the silicone resin layer forming surface of the supporting glass substrate. Laminate.
The easily peelable and non-adhesive silicone resin layer is a silicone resin layer having appropriate flexibility, and is not very close to the thin glass substrate by adhesive force like an adhesive. In this case, the thin glass substrate is fixed by a force caused by van der Waals force between opposing solid molecules, that is, an adhesion force. Specific embodiments of the silicone resin layer having easy peelability and non-adhesiveness will be described later.

易剥離性および非粘着性を有するシリコーン樹脂層は、密着力により薄板ガラス基板を固定しているため、積層界面に平行に薄板ガラス基板と支持ガラス基板とをずらす力、すなわち、せん断力は高い値を示す。このため、表示装置の製造工程中に薄板ガラス基板が支持ガラス基板からずれることがない。したがって、ずれによって基板同士が離れてしまうおそれがない。なお、せん断力は、表示装置の製造工程中に薄板ガラス基板が支持ガラス基板からずれることがないという点で、後述するせん断強度試験において、ガラス基板が割れることなく支持ガラス基板がはがれるときの荷重が0.1kg重/cm以上、特に0.5kg重/cm以上、さらには1kg重/cm以上であることが好ましい。
一方、シリコーン樹脂層の有する易剥離性および非粘着性により、薄板ガラス基板を支持ガラス基板から垂直方向に引き離す力、すなわち、剥離力は著しく低い。このため、薄板ガラス基板上に表示装置を製造するための所定の処理を実施した後に、支持ガラス基板を薄板ガラス基板から容易に分離することが可能である。
なお、剥離力とは、支持ガラス基板を薄板ガラス基板から容易に分離することができる点で、後述する剥離試験(1)において、ガラス基板が割れることなく支持ガラス基板が剥離する荷重が2kg重/cm以下、特に1.5kg重/cm以下、さらに1kg重/cm以下、0.5kg重/cm以下であることが好ましい。樹脂板のようなロールトウロールが可能な柔軟性のある基板を支持基板として用いる場合は、90°剥離試験や180°剥離試験のような角度のある剥離試験により剥離力を評価すべきである。しかし、ある程度の剛性を有するガラス基板同士の剥離試験においては、剥離試験(1)(いわゆる0°剥離試験)のような試験方法で剥離力を評価することが必要となる。よって、剥離力を評価する場合でも、剥離試験(1)のような試験方法で、上記のような範囲にあることが好ましい。
シリコーン樹脂層は、耐熱性に優れているため、加熱処理後、例えば大気中300℃の温度で1時間加熱した後でも、せん断力は高いが、剥離力は著しく低いという上記した特性を発揮することができる。以下、本明細書において、加熱処理後、例えば大気中300℃の温度で1時間加熱した後のシリコーン樹脂層が、上記特性を有すること、すなわち、せん断力は高いが、剥離力は著しく低いことを「加熱処理後の剥離性に優れる」という。
The easily peelable and non-adhesive silicone resin layer fixes the thin glass substrate by adhesion, so the force to shift the thin glass substrate and the supporting glass substrate parallel to the lamination interface, that is, the shearing force is high. Indicates the value. For this reason, a thin glass substrate does not shift | deviate from a support glass substrate during the manufacturing process of a display apparatus. Therefore, there is no possibility that the substrates are separated from each other due to the deviation. The shear force is a load when the supporting glass substrate is peeled off without breaking the glass substrate in the shear strength test described later in that the thin glass substrate does not deviate from the supporting glass substrate during the manufacturing process of the display device. Is preferably 0.1 kg weight / cm 2 or more, more preferably 0.5 kg weight / cm 2 or more, and even more preferably 1 kg weight / cm 2 or more.
On the other hand, due to the easy peelability and non-adhesiveness of the silicone resin layer, the force for pulling the thin glass substrate away from the supporting glass substrate in the vertical direction, that is, the peel force is remarkably low. For this reason, it is possible to easily separate the supporting glass substrate from the thin glass substrate after performing a predetermined process for manufacturing the display device on the thin glass substrate.
The peeling force means that the supporting glass substrate can be easily separated from the thin glass substrate. In the peeling test (1) described later, the load at which the supporting glass substrate peels without breaking the glass substrate is 2 kg. / cm 2 or less, particularly 1.5kg weight / cm 2 or less, further 1kg weight / cm 2 or less, preferably 0.5kg weight / cm 2 or less. When a flexible substrate capable of roll-to-roll such as a resin plate is used as a support substrate, the peel force should be evaluated by an angle peel test such as a 90 ° peel test or a 180 ° peel test. . However, in a peel test between glass substrates having a certain degree of rigidity, it is necessary to evaluate the peel force by a test method such as a peel test (1) (so-called 0 ° peel test). Therefore, even when the peeling force is evaluated, it is preferable to be in the above range by a test method such as the peel test (1).
Since the silicone resin layer is excellent in heat resistance, after the heat treatment, for example, after heating for 1 hour at a temperature of 300 ° C. in the atmosphere, the above-mentioned characteristics are exhibited in that the shearing force is high but the peeling force is extremely low. be able to. Hereinafter, in the present specification, after the heat treatment, for example, the silicone resin layer after heating for 1 hour at a temperature of 300 ° C. in the atmosphere has the above characteristics, that is, the shearing force is high, but the peeling force is extremely low. Is said to be “excellent in peelability after heat treatment”.

易剥離性および非粘着性を有するシリコーン樹脂層は、適度な柔軟性を有するため、積層時に気泡が混入しにくく、また気泡が混入した場合でも、ロールやプレス等を用いて圧着することにより、容易に該気泡を除去することができる。また、塵介等の異物が積層界面に混入した場合でも、柔軟性を有するシリコーン樹脂層が変形することにより薄板ガラス積層体の凸状欠陥にはなりにくい。   The easily peelable and non-adhesive silicone resin layer has moderate flexibility, so that it is difficult for bubbles to be mixed during lamination, and even when bubbles are mixed, it can be crimped using a roll or press, The bubbles can be easily removed. Further, even when foreign matter such as dust is mixed into the laminated interface, the silicone resin layer having flexibility is deformed, so that it is difficult to form a convex defect of the thin glass laminate.

易剥離性および非粘着性を有するシリコーン樹脂層は、剥離紙用シリコーンの硬化物であることが好ましい。剥離紙用シリコーンは、シリコーンの中でも、特に離型性にすぐれる直鎖状のジメチルポリシロキサンを分子内に含むシリコーンを主剤とする。剥離紙用シリコーンは、上記した主剤と、架橋剤と、を含み、触媒、光重合開始剤等を用いて硬化させることによって基材表面に固定する。剥離紙用シリコーンの硬化物(硬化塗膜)は、優れた離型性と適度な柔軟性を有している。
また、易剥離性および非粘着性を有するシリコーン樹脂層の表面エネルギーは、積層時に混入した気泡を除去しやすく、支持ガラス基板を薄板ガラス基板から容易に分離することができるという理由で、16〜21erg/cmであることが好ましい。
このような特性を有する剥離紙用シリコーンをシリコーン樹脂層として使用すれば、適度な柔軟性を有し、かつ易剥離性および非粘着性を有するシリコーン樹脂層が得られる。なお、樹脂層中に剥離紙用シリコーンを含有するかどうかは、IR(赤外分光)やその樹脂層の強度や粘着性から、ある程度推測することが可能である。
The silicone resin layer having easy peelability and non-adhesiveness is preferably a cured product of silicone for release paper. The silicone for release paper is mainly composed of silicone containing linear dimethylpolysiloxane with excellent releasability in the molecule. The silicone for release paper contains the above-mentioned main agent and a crosslinking agent, and is fixed to the substrate surface by curing using a catalyst, a photopolymerization initiator, or the like. A cured product (cured coating film) of silicone for release paper has excellent releasability and moderate flexibility.
Moreover, the surface energy of the silicone resin layer having easy peelability and non-adhesiveness is 16 to 16 because it is easy to remove air bubbles mixed during lamination and the support glass substrate can be easily separated from the thin glass substrate. It is preferably 21 erg / cm 2 .
If silicone for release paper having such characteristics is used as the silicone resin layer, a silicone resin layer having appropriate flexibility and having easy peeling and non-adhesiveness can be obtained. Whether or not the release layer contains silicone for release paper can be estimated to some extent from IR (infrared spectroscopy) and the strength and adhesiveness of the resin layer.

剥離紙用シリコーンは、その硬化機構により縮合反応型シリコーン、付加反応型シリコーン、紫外線硬化型シリコーン、電子線硬化型シリコーンに分類される。本発明では、これらのいずれも使用することができる。但し、これらの中でも硬化反応のし易さ、硬化皮膜を形成した際に易剥離性および非粘着性を有するシリコーン樹脂層を形成しやすく、硬化物の耐熱性が優れる観点から付加反応型シリコーンが最も好ましい。   The silicone for release paper is classified into a condensation reaction type silicone, an addition reaction type silicone, an ultraviolet ray curable type silicone, and an electron beam curable type silicone according to its curing mechanism. Any of these can be used in the present invention. However, among these, it is easy to form a curing reaction, it is easy to form a silicone resin layer having easy peelability and non-adhesiveness when a cured film is formed, and an addition reaction type silicone is used from the viewpoint of excellent heat resistance of a cured product. Most preferred.

付加反応型シリコーンは、両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンからなる主剤と、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサンからなる架橋剤とを含み、白金系触媒の存在下で加熱硬化反応させるものである。
両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンは、下記[化1]および[化2]で表される化合物である。[化1]式中のm,nは整数を表し、0であってもよい。mが0の場合、両末端にビニル基を有する直鎖状ポリオルガノシロキサンとなる。mが1以上の整数の場合、両末端及び側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンとなる。また、[化2]式中のmは2以上の整数、nは整数を表し、0であってもよい。この場合、側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンとなる。

Figure 2007018028
Figure 2007018028
分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサンは、下記式で表される化合物であり、式中のaは整数を表し、bは1以上の整数を表す。
Figure 2007018028
なお、メチルハイドロジェンポリシロキサンの末端のメチル基の一部は水素原子や水酸基であってもよい。
両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンからなる主剤と、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサンからなる架橋剤の混合比率においては、ハイドロシリル基とビニル基のモル比が1.3/1〜0.7/1となるように混合比率を調整することが好ましい。特には、1.2/1〜0.8/1となるように混合比率を調整することが好ましい。
ハイドロシリル基とビニル基のモル比が1.3/1を超える場合には、加熱処理後の剥離力が上昇し、剥離性が十分でない可能性がある。特にLCDなどを製造する場合には、加熱処理後に支持ガラス基板を剥離する場合が多く、加熱処理後の剥離性は大きな問題となる。又、ハイドロシリル基とビニル基のモル比が0.7/1未満である場合には、硬化物の架橋密度が低下するため、耐薬品性等に問題が生じる可能性がある。ハイドロシリル基とビニル基のモル比が1.3/1を超える場合に、加熱処理後の剥離力が上昇する原因は明らかではないが、加熱処理により、硬化物中の未反応のハイドロシリル基とガラス表面のシラノール基とのなんらかの反応が関与しているものと考えている。The addition reaction type silicone includes a main agent composed of a linear polyorganosiloxane having vinyl groups at both ends and / or side chains, and a cross-linking agent composed of a methylhydrogen polysiloxane having a hydrosilyl group in the molecule. The heat curing reaction is performed in the presence of a platinum-based catalyst.
The linear polyorganosiloxane having vinyl groups at both ends and / or side chains is a compound represented by the following [Chemical Formula 1] and [Chemical Formula 2]. [Chemical Formula 1] m and n in the formula represent an integer and may be 0. When m is 0, a linear polyorganosiloxane having vinyl groups at both ends is obtained. When m is an integer of 1 or more, it becomes a linear polyorganosiloxane having vinyl groups at both ends and side chains. In the formula [2], m represents an integer of 2 or more, n represents an integer, and may be 0. In this case, a linear polyorganosiloxane having a vinyl group in the side chain is obtained.
Figure 2007018028
Figure 2007018028
The methyl hydrogen polysiloxane having a hydrosilyl group in the molecule is a compound represented by the following formula, in which a represents an integer and b represents an integer of 1 or more.
Figure 2007018028
A part of the methyl group at the terminal of the methyl hydrogen polysiloxane may be a hydrogen atom or a hydroxyl group.
In the mixing ratio of the main agent composed of linear polyorganosiloxane having vinyl groups at both ends and / or side chains and the cross-linking agent composed of methylhydrogen polysiloxane having hydrosilyl groups in the molecule, hydrosilyl groups It is preferable to adjust the mixing ratio so that the molar ratio of vinyl group to 1.3 / 1 to 0.7 / 1. In particular, the mixing ratio is preferably adjusted to be 1.2 / 1 to 0.8 / 1.
When the molar ratio of the hydrosilyl group and the vinyl group exceeds 1.3 / 1, the peeling force after the heat treatment is increased, and the peelability may not be sufficient. In particular, when manufacturing an LCD or the like, the support glass substrate is often peeled after the heat treatment, and the peelability after the heat treatment becomes a big problem. Further, when the molar ratio of hydrosilyl group to vinyl group is less than 0.7 / 1, the crosslink density of the cured product is lowered, which may cause a problem in chemical resistance. When the molar ratio of hydrosilyl group to vinyl group exceeds 1.3 / 1, it is not clear why the peel strength after the heat treatment is increased, but the heat treatment causes unreacted hydrosilyl groups in the cured product. It is thought that some kind of reaction with the silanol group on the glass surface is involved.

加熱硬化反応に用いる触媒としては白金系触媒が好ましく用いられ、白金系触媒としては、公知のものを用いることができる。具体的には、塩化第一白金酸、塩化第二白金酸などの塩化白金酸、塩化白金酸のアルコール化合物、アルデヒド化合物あるいは塩化白金酸と各種オレフィンとの鎖塩などがあげられる。
白金系触媒は、剥離紙用シリコーン100質量部に対して、0.1〜20質量部使用することが好ましく、より好ましくは1〜10質量部である。
A platinum-based catalyst is preferably used as the catalyst used in the heat curing reaction, and a known catalyst can be used as the platinum-based catalyst. Specific examples include chloroplatinic acid such as chloroplatinic acid and dichloroplatinic acid, alcohol compounds of chloroplatinic acid, aldehyde compounds, or chain salts of chloroplatinic acid and various olefins.
The platinum-based catalyst is preferably used in an amount of 0.1 to 20 parts by mass, more preferably 1 to 10 parts by mass with respect to 100 parts by mass of the release paper silicone.

剥離紙用シリコーンは、形態的に、溶剤型、エマルジョン型、無溶剤型がありいずれの型も使用可能である。但し、生産性、安全性、環境特性の面で無溶剤型が好ましい。無溶剤型を使用した場合、硬化時、すなわち、加熱硬化、紫外線硬化または電子線硬化の際に発泡を生じる溶剤を含まないため、樹脂層中に気泡が残留しにくい。   There are three types of silicone for release paper: solvent type, emulsion type, and solventless type, and any type can be used. However, the solventless type is preferable in terms of productivity, safety, and environmental characteristics. When the solventless type is used, bubbles do not easily remain in the resin layer because it does not contain a solvent that causes foaming during curing, that is, heat curing, ultraviolet curing, or electron beam curing.

易剥離性および非粘着性を有するシリコーン樹脂層は、1種類の剥離紙用シリコーンのみで形成されていてもよいが、2種以上の剥離紙用シリコーンを用いて形成されていてもよい。2種以上の剥離紙用シリコーンを用いて形成されている場合、2種以上の剥離紙用シリコーンが互いに積層された多層構造のシリコーン樹脂層となっていてもよいし、1層中に2種以上の剥離紙用シリコーンを含んだ混合シリコーン樹脂層となっていてもよい。   The silicone resin layer having easy peelability and non-adhesiveness may be formed using only one type of release paper silicone, but may be formed using two or more types of release paper silicone. When it is formed using two or more types of release paper silicones, it may be a multi-layered silicone resin layer in which two or more types of release paper silicones are laminated together, or two types in one layer. It may be a mixed silicone resin layer containing the above release paper silicone.

易剥離性および非粘着性を有するシリコーン樹脂層は、ガラス基板同士を分離した際に、シリコーン樹脂層中の成分が薄板ガラス基板に移行しにくいこと、すなわち、低シリコーン移行性を有することが好ましい。
シリコーン樹脂層中の成分の移行しやすさは、該シリコーン樹脂層の残留接着率を指標として判断することができる。シリコーン樹脂層の残留接着率は、以下の方法で測定することができる。
残留接着率の測定方法
シリコーン樹脂層の表面に15mm幅の標準粘着テープ(セロテープCT405A−15(ニチバン株式会社製))を人の手の力で圧着し、70℃で20時間大気中で加熱する。20時間経過後、標準粘着テープをシリコーン樹脂層から剥がす。剥がした標準粘着テープを清浄なガラス基板(例えば、AN100(旭硝子株式会社製))表面に貼り合わせた後、180°剥離強度(300mm/min)を測定する(剥離強度(A))。
上記と同じ標準粘着テープを清浄なガラス基板(例えば、AN100)表面に人の手の力で圧着した後、常温大気中で20時間放置した。20時間経過後、標準粘着テープをガラス基板表面から剥がす。剥がした標準粘着テープをガラス基板(例えば、AN100)表面に貼り合わせた後、180°剥離強度(300mm/min)を測定する(剥離強度(B))。
残留接着率は下記式により求める。
残留接着率(%)=剥離強度(A)/剥離強度(B)×100
The easily peelable and non-adhesive silicone resin layer preferably has a low silicone migration property because when the glass substrates are separated from each other, the components in the silicone resin layer hardly migrate to the thin glass substrate. .
The ease of migration of the components in the silicone resin layer can be determined using the residual adhesion rate of the silicone resin layer as an index. The residual adhesion rate of the silicone resin layer can be measured by the following method.
Method for measuring residual adhesion rate A standard adhesive tape of 15 mm width (Cellotape CT405A-15 (manufactured by Nichiban Co., Ltd.)) is pressure-bonded to the surface of the silicone resin layer with the help of human hands, and heated in the atmosphere at 70 ° C. for 20 hours. . After 20 hours, the standard adhesive tape is peeled off from the silicone resin layer. After the peeled standard adhesive tape is bonded to the surface of a clean glass substrate (for example, AN100 (Asahi Glass Co., Ltd.)), 180 ° peel strength (300 mm / min) is measured (peel strength (A)).
The same standard adhesive tape as described above was pressure-bonded to the surface of a clean glass substrate (for example, AN100) with the help of human hands, and then allowed to stand in a room temperature atmosphere for 20 hours. After 20 hours, the standard adhesive tape is peeled off from the glass substrate surface. After the peeled standard adhesive tape is bonded to the surface of a glass substrate (for example, AN100), 180 ° peel strength (300 mm / min) is measured (peel strength (B)).
The residual adhesion rate is obtained by the following formula.
Residual adhesion rate (%) = peel strength (A) / peel strength (B) × 100

易剥離性および非粘着性を有するシリコーン樹脂層は、上記の測定方法により求めた残留接着率が95%以上であることが好ましく、98%以上であることがより好ましい。残留接着率が95%以上であれば、シリコーン樹脂層から薄板ガラス基板表面への樹脂層中の成分の移行が極めて低いと考えられる。そのため、ガラス基板同士を分離した後、シリコーン樹脂層が形成された支持ガラス基板は、他の薄板ガラス基板との積層に繰り返し使用することができる。また、分離後の薄板ガラス基板の表面にシリコーン樹脂層中の成分が移行しにくいため、薄板ガラス基板の表面に偏光板等を貼り付ける際に貼り付け不良等が生じるおそれがない。   The silicone resin layer having easy peelability and non-adhesiveness preferably has a residual adhesion ratio determined by the above-described measurement method of 95% or more, and more preferably 98% or more. If the residual adhesion rate is 95% or more, it is considered that the migration of components in the resin layer from the silicone resin layer to the surface of the thin glass substrate is extremely low. Therefore, after separating the glass substrates, the supporting glass substrate on which the silicone resin layer is formed can be repeatedly used for lamination with other thin glass substrates. In addition, since components in the silicone resin layer are unlikely to migrate to the surface of the thin glass substrate after separation, there is no possibility of poor attachment or the like when a polarizing plate or the like is attached to the surface of the thin glass substrate.

低シリコーン移行性を有するシリコーン樹脂層を得るためには、移行性の高い成分を含まない剥離紙用シリコーンを用いればよい。一般的な方法として、剥離紙用シリコーンを易剥離化するために、非反応性のシリコーンをブレンドする場合がある。この場合、非反応性シリコーンとして、直鎖ジメチルポリシロキサンで非常に高分子量のものか、フェニル基や高級アルキル基を導入し、硬化皮膜への相溶性を低くした比較的低分子量のものが用いられる。このような非反応性シリコーンは、移行性が高い成分であるため、本発明に使用する剥離紙用シリコーンは、非反応性のシリコーンの含有量が5質量%以下であることが好ましく、非反応性のシリコーンを実質的に含まないことがより好ましい。   In order to obtain a silicone resin layer having low silicone migration, a release paper silicone that does not contain a component having high migration may be used. As a general method, a non-reactive silicone may be blended in order to easily release the silicone for release paper. In this case, as the non-reactive silicone, a linear dimethylpolysiloxane having a very high molecular weight or a relatively low molecular weight in which a phenyl group or higher alkyl group is introduced to reduce the compatibility with the cured film is used. It is done. Since such a non-reactive silicone is a component having a high migration property, the release paper silicone used in the present invention preferably has a non-reactive silicone content of 5% by mass or less. It is more preferable that substantially no silicone is contained.

本発明において、好適な剥離紙用シリコーンとしては、具体的には、KNS−320A,KS−847(いずれも信越シリコーン株式会社製)、TPR6700(GE東芝シリコーン株式会社製)、ビニルシリコーン「8500」(荒川化学工業株式会社製)とメチルハイドロジェンポリシロキサン「12031」(荒川化学工業株式会社製)との組み合わせ、ビニルシリコーン「11364」(荒川化学工業株式会社製)とメチルハイドロジェンポリシロキサン「12031」との組み合わせ、ビニルシリコーン「11365」とメチルハイドロジェンポリシロキサン「12031」との組み合わせ等が挙げられる。なお、KNS−320A、KS−847およびTPR6700は、すでに主剤と架橋剤を含んだシリコーンである。   In the present invention, preferable examples of silicone for release paper include KNS-320A, KS-847 (both manufactured by Shin-Etsu Silicone Co., Ltd.), TPR6700 (manufactured by GE Toshiba Silicone Co., Ltd.), vinyl silicone “8500”. (Arakawa Chemical Industries, Ltd.) and methyl hydrogen polysiloxane “12031” (Arakawa Chemical Industries, Ltd.), vinyl silicone “11364” (Arakawa Chemical Industries, Ltd.) and methyl hydrogen polysiloxane “12031” And a combination of vinyl silicone “11365” and methyl hydrogen polysiloxane “12031”. KNS-320A, KS-847, and TPR6700 are silicones that already contain a main agent and a crosslinking agent.

易剥離性および非粘着性を有するシリコーン樹脂層の厚みは、1〜100μmであることが好ましい。シリコーン樹脂層の厚みが1μmよりも薄い場合には、薄板ガラス基板とシリコーン樹脂層の密着が不十分になるおそれがある。又、異物が介在した場合にも薄板ガラス基板の凸状欠陥に繋がり易い。一方100μmを越える場合には、易剥離性および非粘着性を有するシリコーン樹脂層としての特性への寄与はもはや少なく、シリコーン樹脂の硬化に時間を要するため、経済的ではない。シリコーン樹脂層の厚みが5〜20μmであることがより好ましい。シリコーン樹脂層の厚みが5〜20μmであれば、幅広い厚みの薄板ガラス基板に対して、良好な密着性を発揮することができる。   The thickness of the easily peelable and non-adhesive silicone resin layer is preferably 1 to 100 μm. When the thickness of the silicone resin layer is less than 1 μm, the thin glass substrate and the silicone resin layer may not be sufficiently adhered. Further, even when foreign matter is present, it tends to lead to a convex defect of the thin glass substrate. On the other hand, if it exceeds 100 μm, the contribution to the properties as a silicone resin layer having easy peelability and non-adhesiveness is no longer significant, and it takes time to cure the silicone resin, which is not economical. The thickness of the silicone resin layer is more preferably 5 to 20 μm. If the thickness of a silicone resin layer is 5-20 micrometers, favorable adhesiveness can be exhibited with respect to the thin glass substrate of a wide thickness.

支持ガラス基板上に、易剥離性および非粘着性を有するシリコーン樹脂層を形成する方法は、特に限定されず、公知の方法から適宜選択することができる。シリコーン樹脂層に剥離紙用シリコーンを使用する場合、支持ガラス基板表面に剥離紙用シリコーンを塗工した後、薄板ガラスを積層する前に剥離紙用シリコーンを硬化させる。
剥離紙用シリコーンを塗工する方法としては、公知の方法を使用することができ、具体的には、例えば、スプレーコート法、ダイコート法、スピンコート法、ディップコート法、ロールコート法、バーコート法、スクリーン印刷法、グラビアコート法等が挙げられる。これらの塗工方法は、剥離紙用シリコーンの種類に応じて適宜選択することができる。
例えば、剥離紙用シリコーンが無溶剤型の場合、ダイコート法、スピンコート法、およびスクリーン印刷法が好適である。
剥離紙用シリコーンが無溶剤型の場合、その塗工量は1g/m2〜100g/m2であることが好ましく、より好ましくは、5g/m2〜20g/m2である。
The method for forming the easily peelable and non-adhesive silicone resin layer on the supporting glass substrate is not particularly limited, and can be appropriately selected from known methods. When silicone for release paper is used for the silicone resin layer, after the silicone for release paper is applied to the surface of the supporting glass substrate, the silicone for release paper is cured before laminating the thin glass.
As a method for coating the release paper silicone, known methods can be used. Specifically, for example, spray coating, die coating, spin coating, dip coating, roll coating, bar coating, and the like. Method, screen printing method, gravure coating method and the like. These coating methods can be appropriately selected according to the type of silicone for release paper.
For example, when the release paper silicone is a solventless type, a die coating method, a spin coating method, and a screen printing method are suitable.
When the silicone for release paper is a solventless type, its coating amount is preferably from 1g / m 2 ~100g / m 2 , more preferably 5g / m 2 ~20g / m 2 .

付加反応型シリコーンの場合には、上記したいずれかの方法により、主剤および架橋剤を含有する剥離紙用シリコーンと、触媒と、の混合物を支持ガラス基板上に塗工した後に加熱硬化させる。加熱硬化条件は、触媒の配合量によっても異なるが、例えば、剥離紙用シリコーン100質量部に対して、白金系触媒を2質量部配合した場合、大気中で50℃〜250℃、好ましくは100℃〜200℃で5〜60分間、好ましくは10〜30分間加熱硬化させる。
低シリコーン移行性を有するシリコーン樹脂層とするためには、シリコーン樹脂層中に未反応のシリコーン成分が残らないように、硬化反応をできるだけ進行させることが好ましい。上記した条件で加熱硬化させれば、シリコーン樹脂層中に未反応のシリコーン成分が残らないようにすることができる。上記した条件に比べて、加熱時間が長すぎたり、加熱温度が高すぎる場合には、シリコーン樹脂の酸化分解が同時に起こり、低分子量のシリコーン成分が生成するため、シリコーン移行性が高くなってしまう。
シリコーン樹脂層中に未反応のシリコーン成分が残らないように、硬化反応をできるだけ進行させることは、加熱処理後の剥離性を良好にするためにも好ましい。
In the case of an addition reaction type silicone, a mixture of a release paper silicone containing a main agent and a crosslinking agent and a catalyst is applied onto a supporting glass substrate by any of the methods described above, and then cured by heating. The heat curing conditions vary depending on the blending amount of the catalyst. For example, when 2 parts by mass of a platinum-based catalyst is blended with 100 parts by mass of the release paper silicone, it is 50 ° C. to 250 ° C., preferably 100 ° C. C. to 200.degree. C. for 5 to 60 minutes, preferably 10 to 30 minutes.
In order to obtain a silicone resin layer having low silicone migration, it is preferable to proceed the curing reaction as much as possible so that an unreacted silicone component does not remain in the silicone resin layer. If heat curing is performed under the above-described conditions, unreacted silicone components can be prevented from remaining in the silicone resin layer. Compared to the above conditions, if the heating time is too long or the heating temperature is too high, the silicone resin undergoes oxidative decomposition at the same time, and a low molecular weight silicone component is generated, resulting in high silicone migration. .
In order to improve the peelability after the heat treatment, it is preferable that the curing reaction proceeds as much as possible so that an unreacted silicone component does not remain in the silicone resin layer.

支持ガラス基板上に易剥離性および非粘着性を有するシリコーン樹脂層を形成した後、支持ガラス基板のシリコーン樹脂形成面に薄板ガラス基板を積層させる。シリコーン樹脂層に剥離紙用シリコーンを使用する場合、支持ガラス基板上に塗工した剥離紙用シリコーンを加熱硬化してシリコーン樹脂層を形成した後、支持ガラス基板のシリコーン樹脂形成面に薄板ガラス基板を積層させる。
剥離紙用シリコーンを加熱硬化させることによって、シリコーン樹脂硬化物が支持ガラスと化学的に結合する、また、アンカー効果によってシリコーン樹脂層が支持ガラスと結合する。これらの作用によって、シリコーン樹脂層が支持ガラス基板に固定されている。
一方、薄板ガラス基板は、非常に近接した、相対する固体分子間におけるファンデルワールス力に起因する力、すなわち、密着力によってシリコーン樹脂層に固定されるので、支持ガラス基板のシリコーン樹脂形成面に積層させた薄板ガラス基板を分離した際に、分離後の薄板ガラス基板の表面にシリコーン樹脂層中の成分が移行することが防止される。これらの効果は、支持ガラス基板にシリコーン樹脂層を形成した後に薄板ガラス基板を積層することで得られる。
つまり、剥離紙用シリコーンを用いることで、支持ガラス基板と、薄板ガラス基板と、を積層させた状態に保持することができるとともに、薄板ガラス基板を分離した際に、薄板ガラス基板の表面にシリコーン樹脂層の成分が移行することも防止することができ、結果的に本発明の目的を達成することが可能となる。
After forming the easily peelable and non-adhesive silicone resin layer on the supporting glass substrate, a thin glass substrate is laminated on the silicone resin forming surface of the supporting glass substrate. When silicone for release paper is used for the silicone resin layer, the release paper silicone coated on the support glass substrate is heated and cured to form a silicone resin layer, and then the thin glass substrate is formed on the silicone resin forming surface of the support glass substrate. Laminate.
By curing the silicone for release paper by heating, the cured silicone resin is chemically bonded to the supporting glass, and the silicone resin layer is bonded to the supporting glass by an anchor effect. By these actions, the silicone resin layer is fixed to the supporting glass substrate.
On the other hand, the thin glass substrate is fixed to the silicone resin layer by the force due to the van der Waals force between the solid molecules facing each other very close, that is, the adhesion force. When the laminated thin glass substrate is separated, the components in the silicone resin layer are prevented from transferring to the surface of the separated thin glass substrate. These effects can be obtained by laminating a thin glass substrate after forming a silicone resin layer on the supporting glass substrate.
In other words, by using the release paper silicone, the supporting glass substrate and the thin glass substrate can be held in a laminated state, and when the thin glass substrate is separated, the silicone is applied to the surface of the thin glass substrate. Migration of the components of the resin layer can also be prevented, and as a result, the object of the present invention can be achieved.

支持ガラス基板のシリコーン樹脂形成面に薄板ガラス基板を積層させる手順は公知の方法を用いて実施することができ、例えば、常圧環境下で、シリコーン樹脂形成面に薄板ガラス基板を積層させた後、ロールやプレスを用いて積層体を圧着させてもよい。ロールやプレスで圧着することにより、シリコーン樹脂層と薄板ガラス基板とが、より密着する。
また、ロールまたはプレスによる圧着により、シリコーン樹脂層中に混入している気泡が容易に除去される。
但し、気泡の混入の抑制や良好な密着の確保の観点から真空ラミネート法、真空プレス法の採用が好ましい。真空下で積層することにより、微少な気泡が残存した場合でも加熱により気泡が成長することがなく、薄板ガラス基板の凸状欠陥につながりにくいという利点もある。
The procedure for laminating the thin glass substrate on the silicone resin-formed surface of the supporting glass substrate can be carried out using a known method, for example, after laminating the thin glass substrate on the silicone resin-formed surface in a normal pressure environment. The laminate may be crimped using a roll or a press. By pressure bonding with a roll or a press, the silicone resin layer and the thin glass substrate are more closely attached.
Moreover, the air bubbles mixed in the silicone resin layer are easily removed by pressure bonding with a roll or a press.
However, it is preferable to employ a vacuum laminating method or a vacuum pressing method from the viewpoint of suppressing the mixing of bubbles and ensuring good adhesion. By laminating under vacuum, even if minute bubbles remain, there is an advantage that the bubbles do not grow by heating and are not easily connected to the convex defects of the thin glass substrate.

支持ガラス基板のシリコーン樹脂層形成面に薄板ガラス基板を積層させる際には、薄板ガラス基板の表面を十分に洗浄し、クリーン度の高い環境で積層することが必要である。
極微小な異物であれば、柔軟性を有するシリコーン樹脂層が変形することによりシリコーン樹脂層に吸収され積層後の薄板ガラス基板表面の平坦性に影響を与えることはないが、その量や大きさによっては積層後の薄板ガラス基板表面の凸状欠陥につながる可能性があるからである。
When laminating a thin glass substrate on the surface of the supporting glass substrate on which the silicone resin layer is formed, it is necessary to sufficiently clean the surface of the thin glass substrate and laminate in a clean environment.
If it is a very small foreign matter, the flexible silicone resin layer is deformed and absorbed by the silicone resin layer, and does not affect the flatness of the thin glass substrate surface after lamination, but the amount and size This is because there is a possibility that it may lead to a convex defect on the surface of the thin glass substrate after lamination.

次に本発明の表示装置の製造方法について説明する。本発明の表示装置の製造方法では、上記手順で本発明の薄板ガラス積層体を形成した後、積層体の薄板ガラス基板上に表示装置を製造するための所定の処理を実施する。本明細書において、表示装置を製造するための所定の処理と言った場合、LCDまたはOLEDといった表示装置を製造する際に、製造工程で実施される各種処理を広く含む。ここで実施される処理の具体例としては、LCDを製造する場合を例にとると、薄板ガラス基板上にアレイを形成する工程、前記薄板ガラス基板とは異なる薄板ガラス基板上にカラーフィルタを形成する工程、アレイが形成された薄板ガラス基板と、カラーフィルタが形成された薄板ガラス基板と、を貼合わせる工程(アレイ・カラーフィルタ貼合わせ工程)等の各種工程を含み、これらの工程で実施される処理として、具体的には例えば、純水洗浄、乾燥、成膜、レジスト塗布、露光、現像、エッチングおよびレジスト除去等が挙げられる。さらに、アレイ・カラーフィルタ貼合わせ工程を実施した後に行われる工程として、液晶注入工程および該処理の実施後に行われる注入口の封止工程があり、これらの工程で実施される処理も含む。但し、これらの処理を全て積層体の状態で実施する必要はない。例えば、強度および取り扱い性の点からは、アレイ・カラーフィルタ貼合わせ工程までを積層体の状態で実施した後、薄板ガラス基板と支持ガラス基板とを分離してから液晶注入処理を実施することが好ましい。   Next, a method for manufacturing the display device of the present invention will be described. In the manufacturing method of the display device of the present invention, after the thin glass laminate of the present invention is formed by the above procedure, a predetermined process for manufacturing the display device is performed on the thin glass substrate of the laminate. In this specification, the term “predetermined process for manufacturing a display device” includes a wide variety of processes performed in the manufacturing process when manufacturing a display device such as an LCD or an OLED. As a specific example of the processing performed here, in the case of manufacturing an LCD, for example, a process of forming an array on a thin glass substrate, a color filter is formed on a thin glass substrate different from the thin glass substrate And various processes such as a process of laminating a thin glass substrate on which an array is formed and a thin glass substrate on which a color filter is formed (array / color filter laminating process). Specific examples of the treatment include pure water cleaning, drying, film formation, resist coating, exposure, development, etching, and resist removal. Furthermore, as a process performed after implementing an array color filter bonding process, there exists a liquid-crystal injection | pouring process and the sealing process of the injection port performed after implementation of this process, The process performed by these processes is also included. However, it is not necessary to perform all of these processes in the state of a laminated body. For example, from the viewpoint of strength and handleability, it is possible to carry out the liquid crystal injection process after separating the thin glass substrate and the supporting glass substrate after performing the array / color filter bonding step in the state of a laminate. preferable.

なお、本発明の表示装置の製造方法において、アレイを形成するガラス基板およびカラーフィルタを形成するガラス基板の両方が薄板ガラス基板ではなくてもよい。例えば、アレイが形成された薄板ガラス基板と、カラーフィルタが形成された通常の厚みのガラス基板と、を貼合わせてもよく、またはアレイが形成された通常の厚みのガラス基板と、カラーフィルタが形成された薄板ガラス基板と、を貼合わせてもよい。これらの場合、セル化した後の表示素子としての総厚は厚くなるが、機械的強度を向上しうるという利点がある。ここでいう通常の厚みのガラス基板とは0.3mm以上の厚みのガラス基板を意味する。   In the method for manufacturing a display device of the present invention, both the glass substrate forming the array and the glass substrate forming the color filter may not be a thin glass substrate. For example, a thin glass substrate on which an array is formed and a glass substrate with a normal thickness on which a color filter is formed may be bonded together, or a glass substrate with a normal thickness on which an array is formed and a color filter. You may paste together the formed thin glass substrate. In these cases, the total thickness of the display element after being formed into cells becomes thick, but there is an advantage that the mechanical strength can be improved. The normal thickness glass substrate here means a glass substrate having a thickness of 0.3 mm or more.

また、OLEDを製造する場合を例にとると、薄板ガラス基板上に有機EL構造体を形成するための工程として、透明電極を形成する工程、ホール注入層・ホール輸送層・発光層・電子輸送層等を蒸着する工程、封止工程等の各種工程を含み、これらの工程で実施される処理として、具体的には例えば、成膜処理、蒸着処理、封止板の接着処理等が挙げられる。   Taking the case of manufacturing an OLED as an example, as a process for forming an organic EL structure on a thin glass substrate, a process of forming a transparent electrode, a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport Various processes such as a process for depositing layers and the like, a sealing process, and the like, and specific examples of the processes performed in these processes include a film forming process, a vapor deposition process, and a sealing plate bonding process. .

上記所定の処理を実施した後、薄板ガラス基板と支持ガラス基板とを分離する。分離は手剥離により実施しうるが、剃刀の刃等で端部に剥離のきっかけを与えたり、積層界面へのエアーの注入により、より容易に剥離することが可能となる。剥離した支持ガラス基板には易剥離性および非粘着性を有するシリコーン樹脂層が形成されたままの状態であるので、再度、別の薄板ガラス基板との積層に使用することも可能である。なお、シリコーン樹脂層が低シリコーン移行性を有していれば、分離後のシリコーン樹脂層が高い残留接着率を有しているので、シリコーン樹脂層が形成された支持ガラス基板は、他の薄板ガラス基板との積層に繰り返し使用することができる。   After performing the said predetermined process, a thin glass substrate and a support glass substrate are isolate | separated. Separation can be carried out by manual peeling, but it can be more easily peeled off by giving an edge to the edge with a razor blade or by injecting air into the lamination interface. Since the peeled supporting glass substrate is in a state in which a silicone resin layer having easy peelability and non-adhesiveness is still formed, it can be used again for lamination with another thin glass substrate. In addition, if the silicone resin layer has low silicone migration, the silicone resin layer after separation has a high residual adhesion rate. It can be used repeatedly for lamination with a glass substrate.

薄板ガラス基板と、支持ガラス基板と、を分離した後、必要とされる所望の工程を経て、薄板ガラス基板を有する表示装置が得られる。ここで実施される工程としては、LCDの場合には、例えば所望の大きさのセルに分断する工程、液晶を注入しその後注入口を封止する工程、偏光板を貼付する工程、モジュール形成工程が挙げられる。OLEDの場合には、これらの工程に加えて、有機EL構造体が形成された薄板ガラス基板と、対向基板と、を組み立てる工程が含まれる。なお、所望の大きさのセルに分断する工程は、切断処理によって薄板ガラス基板の強度が低下せず、またカレットも出ないことから、レーザカッタによる切断が好ましい。   After separating the thin glass substrate and the supporting glass substrate, a display device having the thin glass substrate is obtained through a desired process. In the case of LCD, for example, the steps performed here are a step of dividing into cells of a desired size, a step of injecting liquid crystal and then sealing the injection port, a step of attaching a polarizing plate, a step of forming a module Is mentioned. In the case of an OLED, in addition to these steps, a step of assembling a thin glass substrate on which an organic EL structure is formed and a counter substrate is included. Note that the step of dividing into cells of a desired size is preferably cut by a laser cutter because the strength of the thin glass substrate is not lowered by the cutting process and no cullet is produced.

また、本発明は、支持ガラス基板と、薄板ガラス基板と、の積層に用いられる、上記した薄板ガラス積層体用の剥離紙用シリコーンも提供する。   The present invention also provides a release paper silicone for a thin glass laminate described above, which is used for laminating a supporting glass substrate and a thin glass substrate.

(実施例1)
縦400mm、横300mm、厚さ0.7mm、線膨張係数38×10-7/℃の支持ガラス基板(旭硝子株式会社製 AN100)を純水洗浄、UV洗浄等で清浄化した後、前記支持ガラス基板上に、無溶剤付加反応型剥離紙用シリコーン(信越シリコーン株式会社製 KNS−320A)100質量部と白金系触媒(信越シリコーン株式会社製 CAT−PL−56)2質量部の混合物をスピンコーターにて塗工し(塗工量10g/m2)、180℃にて30分間大気中で加熱硬化して膜厚16μmのシリコーン樹脂層を得た。
縦400mm、横300mm、厚さ0.1mm、線膨張係数38×10-7/℃の薄板ガラス基板(AN100)のシリコーン樹脂層と接触させる側の面を純水洗浄、UV洗浄等で清浄化した後、支持ガラスのシリコーン樹脂層形成面と、薄板ガラス基板とを、室温下真空プレスにて貼り合わせ、本発明の易剥離性および非粘着性を有するシリコーン樹脂層を有する薄板ガラス積層体(薄板ガラス積層体A)を得た。
薄板ガラス積層体Aにおいて、薄板ガラス基板は、シリコーン樹脂層と気泡を発生することなく密着しており、凸状欠点もなく平滑性も良好であった。
形成した薄板ガラス積層体Aを下記のとおり評価した。
(1)簡易剥離試験
薄板ガラス積層体Aを薄板ガラス基板が上側になるように設置し、支持ガラス基板を治具を用いて固定した。この状態で薄板ガラス基板の周辺部の一部を剃刀で支持ガラス基板から剥がし、更に手で薄板ガラス基板を支持ガラス基板から引き離したところ、容易に剥離することができた。
また、300℃1時間大気中で加熱処理した後の薄板ガラス積層体Aについても、上記剥離試験を実施したが、薄板ガラス基板を破壊することなく支持ガラス基板から剥離することができ、耐熱性も良好であった。
(2)剥離試験(1)(加熱前)
図2のような治具を用いて試験を実施した。
薄板ガラス積層体Aを縦50mm×横50mmの大きさに切断し、薄板ガラス積層体Aの両側のガラス(支持ガラス基板40および薄板ガラス基板50)表面に、縦50mm×横50mm×厚さ5mmのポリカーボネート20をエポキシ2液ガラス用接着剤で各々貼り合わせた。さらに、両方の貼り合わせたポリカーボネート20の表面に、縦50mm×横50mm×厚さ5mmのポリカーボネート25をそれぞれさらに垂直に貼り合わせた。ポリカーボネート25の貼り合わせた場所は、図2のとおり、縦方向はポリカーボネート20の最も端の位置に、横方向はポリカーボネート20の辺と平行な位置とした。
ポリカーボネート20および25を貼り合わせた薄板ガラス積層体Aを支持ガラス基板が下側になるように設置した。薄板ガラス基板側に貼り付けたポリカーボネート25を治具で固定し、支持ガラス基板側に貼り付けたポリカーボネート25を垂直下方に300mm/minの速度で引き離したところ、13.8kg重の荷重(0.55kg重/cm)がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板に割れ等は生じなかった。
(3)剥離試験(1)(加熱後)
剥離試験(1)(加熱前)における薄板ガラス積層体Aを用いる代わりに、積層後に300℃1時間大気中で加熱処理した後の薄板ガラス積層体Aを用いる以外は剥離試験(1)(加熱前)と同様にして、剥離試験(1)(加熱後)を実施した。45kg重の荷重(1.8kg重/cm)がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板には割れ等は生じなかった。
(4)せん断強度試験
図3のような治具を用いて試験を実施した。
薄板ガラス積層体Aを縦25mm×横25mmの大きさに切断し、薄板ガラス積層体Aの両側のガラス(支持ガラス基板40および薄板ガラス基板50)表面に、縦25mm×横50mm×厚さ3mmのポリカーボネート30をエポキシ2液ガラス用接着剤で貼り合わせた。貼り合わせる場所の面積は、図3のとおり、縦25mm×横25mmとした。また、貼り合わせる場所は、図3のとおり、支持ガラス基板の下面部分とポリカーボネート30の右半分の部分とし、薄板ガラス基板の上面部分とポリカーボネート30の左半分の部分とした。
薄板ガラス基板に貼り合わせたポリカーボネート30を治具で固定し、支持ガラス基板に貼り合わせたポリカーボネート30を引っ張り速度0.5mm/minで図3における横方向(ポリカーボネート30の長さ方向)へ引っ張った。13kg重(2.1kg重/cm)の荷重がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板には割れ等は生じなかった。なお、焼成後の薄板ガラス積層体Aも焼成前と同様の値であった。
(5)残留接着率測定
[0032]に記載した測定方法を用いて、薄板ガラス積層体Aのシリコーン樹脂層の残留接着率を測定したところ、残留接着率は106%であった。
Example 1
A support glass substrate (AN100 manufactured by Asahi Glass Co., Ltd.) having a length of 400 mm, a width of 300 mm, a thickness of 0.7 mm, and a linear expansion coefficient of 38 × 10 −7 / ° C. is cleaned by pure water cleaning, UV cleaning, etc. A spin coater was prepared by mixing a solvent-free addition reaction type release paper silicone (KNS-320A manufactured by Shin-Etsu Silicone Co., Ltd.) 100 parts by mass and a platinum catalyst (CAT-PL-56 manufactured by Shin-Etsu Silicone Co., Ltd.) 2 parts by mass on a substrate. (Coating amount: 10 g / m 2 ) and cured by heating at 180 ° C. for 30 minutes in the air to obtain a silicone resin layer having a film thickness of 16 μm.
Clean the surface of the thin glass substrate (AN100) with a length of 400 mm, width of 300 mm, thickness of 0.1 mm, and linear expansion coefficient of 38 × 10 −7 / ° C. with pure water cleaning, UV cleaning, etc. After that, the silicone resin layer-forming surface of the supporting glass and the thin glass substrate are bonded together by a vacuum press at room temperature, and the thin glass laminate having the silicone resin layer having easy peelability and non-adhesiveness of the present invention ( A thin glass laminate A) was obtained.
In the thin glass laminate A, the thin glass substrate was in close contact with the silicone resin layer without generating bubbles, had no convex defects, and had good smoothness.
The formed thin glass laminate A was evaluated as follows.
(1) Simple peeling test The thin glass laminated body A was installed so that the thin glass substrate might become an upper side, and the support glass substrate was fixed using the jig | tool. In this state, a part of the peripheral portion of the thin glass substrate was peeled off from the support glass substrate with a razor, and when the thin glass substrate was further separated from the support glass substrate by hand, the thin glass substrate could be easily peeled off.
Moreover, although the said peeling test was implemented also about the thin glass laminated body A after heat-processing in the air | atmosphere for 300 degreeC for 1 hour, it can peel from a support glass substrate, without destroying a thin glass substrate, and is heat resistant. Was also good.
(2) Peel test (1) (before heating)
The test was carried out using a jig as shown in FIG.
The thin glass laminate A is cut into a size of 50 mm long × 50 mm wide, and the glass (supporting glass substrate 40 and thin glass substrate 50) on both sides of the thin glass laminated body A is 50 mm long × 50 mm wide × 5 mm thick. The polycarbonates 20 were bonded together with an epoxy two-component glass adhesive. Further, polycarbonate 25 having a length of 50 mm, a width of 50 mm, and a thickness of 5 mm was further vertically bonded to the surfaces of both the bonded polycarbonates 20. As shown in FIG. 2, the location where the polycarbonate 25 is pasted is the position where the vertical direction is the end of the polycarbonate 20 and the horizontal direction is parallel to the side of the polycarbonate 20.
The thin glass laminate A in which the polycarbonates 20 and 25 were bonded together was placed so that the supporting glass substrate was on the lower side. When the polycarbonate 25 affixed to the thin glass substrate side is fixed with a jig, and the polycarbonate 25 affixed to the support glass substrate side is pulled vertically downward at a speed of 300 mm / min, a load of 13.8 kg (0. The supporting glass substrate peeled off when 55 kg weight / cm 2 ) was applied. No cracking or the like occurred in the supporting glass substrate or the thin glass substrate.
(3) Peel test (1) (after heating)
Peel test (1) (heating), except that the thin glass laminate A after the lamination was heated in the atmosphere at 300 ° C. for 1 hour instead of using the thin glass laminate A in the peel test (1) (before heating) The peel test (1) (after heating) was carried out in the same manner as before. The support glass substrate peeled off when a load of 45 kg weight (1.8 kg weight / cm 2 ) was applied. No cracks or the like occurred in the supporting glass substrate or the thin glass substrate.
(4) Shear strength test The test was implemented using the jig | tool like FIG.
The thin glass laminate A is cut into a size of 25 mm long × 25 mm wide, and the glass (supporting glass substrate 40 and thin glass substrate 50) on both sides of the thin glass laminated body A is 25 mm long × 50 mm wide × 3 mm thick. The polycarbonate 30 was bonded with an adhesive for epoxy two-component glass. As shown in FIG. 3, the area of the bonding location was 25 mm long × 25 mm wide. Further, as shown in FIG. 3, the pasting locations were the lower surface portion of the supporting glass substrate and the right half portion of the polycarbonate 30, and the upper surface portion of the thin glass substrate and the left half portion of the polycarbonate 30.
The polycarbonate 30 bonded to the thin glass substrate was fixed with a jig, and the polycarbonate 30 bonded to the supporting glass substrate was pulled in the lateral direction in FIG. 3 (the length direction of the polycarbonate 30) at a pulling speed of 0.5 mm / min. . The supporting glass substrate peeled off when a load of 13 kg weight (2.1 kg weight / cm 2 ) was applied. No cracks or the like occurred in the supporting glass substrate or the thin glass substrate. In addition, the thin glass laminated body A after baking was the same value as before baking.
(5) Residual adhesion rate measurement Using the measurement method described in [0032], the residual adhesion rate of the silicone resin layer of the thin glass laminate A was measured, and the residual adhesion rate was 106%.

(実施例2)
無溶剤付加反応型剥離紙用シリコーン(信越シリコーン株式会社製 KNS−320A)100質量部と白金系触媒(信越シリコーン株式会社製 CAT−PL−56)2質量部の混合物の代わりに、両末端にビニル基を有する直鎖状ポリオルガノシロキサン(荒川化学工業株式会社製 「8500」)、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサン(荒川化学工業株式会社製 「12031」)及び白金系触媒(荒川化学工業株式会社製 「CAT12070」)との混合物を使用した点以外は、実施例1と同様に処理して、本発明の薄板ガラス積層体(薄板ガラス積層体B)を得た。ここで、ハイドロシリル基とビニル基のモル比が1.5/1となるように、直鎖状ポリオルガノシロキサンとメチルハイドロジェンポリシロキサンとの混合比を調整した。白金系触媒は、直鎖状ポリオルガノシロキサンとメチルハイドロジェンポリシロキサンとの合計100質量部に対して5質量部添加した。
薄板ガラス積層体Bにおいて、薄板ガラス基板は、シリコーン樹脂層と気泡を発生することなく密着しており、凸状欠点もなく平滑性も良好であった。
形成した薄板ガラス積層体Bは下記のとおり評価した。
(1)簡易剥離試験
実施例1と同様に、薄板ガラス積層体Bを薄板ガラス基板が上側になるように設置し、支持ガラス基板を治具を用いて固定した。この状態で薄板ガラス基板の周辺部の一部を剃刀で支持ガラス基板から剥がし、更に手で薄板ガラス基板を支持ガラス基板から引き離したところ、容易に剥離することができた。
また、300℃1時間大気中で加熱処理した後の薄板ガラス積層体Bについても、上記剥離試験を実施したが、薄板ガラス基板を破壊することなく支持ガラス基板から剥離することができ、耐熱性も良好であった。
(2)剥離試験(1)(加熱前)
実施例1における薄板ガラス積層体Aを用いる代わりに、薄板ガラス積層体Bを用いる以外は実施例1の剥離試験(1)(加熱前)と同様にして、剥離試験(1)(加熱前)を実施した。9kg重の荷重(0.36kg重/cm)がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板に割れ等は生じなかった。
(3)剥離試験(1)(加熱後)
実施例1における薄板ガラス積層体Aを用いる代わりに、薄板ガラス積層体Bを用いる以外は実施例1の剥離試験(1)(加熱後)と同様にして、剥離試験(1)(加熱後)を実施した。15kg重の荷重(0.61kg重/cm)がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板に割れ等は生じなかった。
(4)せん断強度試験
実施例1における薄板ガラス積層体Aを用いる代わりに、薄板ガラス積層体Bを用いる以外は実施例1のせん断強度試験と同様にして、せん断強度試験を行った。9kg重の荷重(1.4kg重/cm)がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板に割れ等は生じなかった。なお、焼成後の薄板ガラス積層体Bも焼成前と同様の値であった。
(5)残留接着率測定
実施例1に記載した測定方法を用いて、薄板ガラス積層体Bのシリコーン樹脂層の残留接着率を測定したところ、残留接着率は108%であった。
(Example 2)
Instead of a mixture of 100 parts by mass of silicone for solvent-free addition reaction type release paper (KNS-320A manufactured by Shin-Etsu Silicone Co., Ltd.) and 2 parts by mass of platinum-based catalyst (CAT-PL-56 manufactured by Shin-Etsu Silicone Co., Ltd.), Linear polyorganosiloxane having a vinyl group (“8500” manufactured by Arakawa Chemical Industries, Ltd.), methyl hydrogen polysiloxane having a hydrosilyl group in the molecule (“12031” manufactured by Arakawa Chemical Industries, Ltd.), and a platinum-based catalyst (The thin glass laminated body B of this invention) was processed like Example 1 except the point which used the mixture with (Arakawa Chemical Industries Ltd. "CAT12070"). Here, the mixing ratio of the linear polyorganosiloxane and the methylhydrogen polysiloxane was adjusted so that the molar ratio of hydrosilyl group to vinyl group was 1.5 / 1. The platinum-based catalyst was added in an amount of 5 parts by mass with respect to a total of 100 parts by mass of the linear polyorganosiloxane and methyl hydrogen polysiloxane.
In the thin glass laminate B, the thin glass substrate was in close contact with the silicone resin layer without generating bubbles, and had no convex defects and good smoothness.
The formed thin glass laminate B was evaluated as follows.
(1) Simple peeling test As in Example 1, the thin glass laminate B was placed so that the thin glass substrate was on the upper side, and the supporting glass substrate was fixed using a jig. In this state, a part of the peripheral portion of the thin glass substrate was peeled off from the support glass substrate with a razor, and when the thin glass substrate was further separated from the support glass substrate by hand, the thin glass substrate could be easily peeled off.
Moreover, although the said peeling test was implemented also about the thin glass laminated body B after heat-processing in air | atmosphere for 1 hour at 300 degreeC, it can peel from a support glass substrate, without destroying a thin glass substrate, and is heat resistant. Was also good.
(2) Peel test (1) (before heating)
Peel test (1) (before heating) in the same manner as the peel test (1) (before heating) of Example 1 except that the thin glass laminate B is used instead of using the thin glass laminate A in Example 1. Carried out. When a load of 9 kg weight (0.36 kg weight / cm 2 ) was applied, the supporting glass substrate was peeled off. No cracking or the like occurred in the supporting glass substrate or the thin glass substrate.
(3) Peel test (1) (after heating)
Instead of using the thin glass laminate A in Example 1, the peel test (1) (after heating) was performed in the same manner as the peel test (1) (after heating) in Example 1 except that the thin glass laminate B was used. Carried out. The supporting glass substrate peeled off when a load of 15 kg weight (0.61 kg weight / cm 2 ) was applied. No cracking or the like occurred in the supporting glass substrate or the thin glass substrate.
(4) Shear strength test A shear strength test was performed in the same manner as the shear strength test of Example 1 except that the thin glass laminate B was used instead of the thin glass laminate A in Example 1. The supporting glass substrate peeled off when a 9 kg load (1.4 kg weight / cm 2 ) was applied. No cracking or the like occurred in the supporting glass substrate or the thin glass substrate. In addition, the thin glass laminated body B after baking was the same value as before baking.
(5) Residual adhesion rate measurement Using the measurement method described in Example 1, the residual adhesion rate of the silicone resin layer of the thin glass laminate B was measured, and the residual adhesion rate was 108%.

(実施例3)
実施例2において、ハイドロシリル基とビニル基のモル比が、1.0/1となるように、直鎖状ポリオルガノシロキサンとメチルハイドロジェンポリシロキサンとの混合比を調整した以外は、実施例2と同様に処理して薄板ガラス積層体(薄板ガラス積層体C)を得た。
薄板ガラス積層体Cにおいて、薄板ガラス基板は、シリコーン樹脂層と気泡を発生することなく密着しており、凸状欠点もなく平滑性も良好であった。
形成した薄板ガラス積層体Cは下記のとおり評価した。
(1)簡易剥離試験
薄板ガラス積層体Cを薄板ガラス基板が上側になるように設置し、支持ガラス基板を治具を用いて固定した。この状態で薄板ガラス基板の周辺部の一部を剃刀で支持ガラス基板から剥がし、更に手で薄板ガラス基板を支持ガラス基板から引き離したところ、容易に剥離することができた。
また、300℃1時間大気中で加熱処理した後の薄板ガラス積層体Cについても、上記剥離試験を実施したが、薄板ガラス基板を破壊することなく支持ガラス基板から容易に剥離することができ、耐熱性も良好であった。
(2)剥離試験(1)(加熱前)
実施例1における薄板ガラス積層体Aを用いる代わりに、薄板ガラス積層体Cを用いる以外は実施例1の剥離試験(1)(加熱前)と同様にして、剥離試験(1)(加熱前)を実施した。12kg重の荷重(0.47kg重/cm)がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板に割れ等は生じなかった。
(3)剥離試験(1)(加熱後)
実施例1における薄板ガラス積層体Aを用いる代わりに、薄板ガラス積層体Cを用いる以外は実施例1の剥離試験(1)(加熱後)と同様にして、剥離試験(1)(加熱後)を実施した。12kg重の荷重(0.47kg重/cm)がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板に割れ等は生じなかった。
(4)せん断強度試験
実施例1における薄板ガラス積層体Aを用いる代わりに、薄板ガラス積層体Cを用いる以外は実施例1のせん断強度試験と同様にして、せん断強度試験を行った。12kg重の荷重(1.9kg重/cm)がかかったときに支持ガラス基板がはがれた。支持ガラス基板や薄板ガラス基板に割れ等は生じなかった。なお、焼成後の薄板ガラス積層体Cも焼成前と同様の値であった。
(5)残留接着率測定
実施例1に記載した測定方法を用いて、薄板ガラス積層体Cのシリコーン樹脂層の残留接着率を測定したところ、残留接着率は105%であった。
(実施例4)
無溶剤付加反応型剥離紙用シリコーン(信越シリコーン株式会社製 KNS−320A)の代わりに溶剤型付加反応型剥離紙用シリコーン(信越シリコーン株式会社製 KS−847)を、白金系触媒(信越シリコーン株式会社製 CAT−PL−56)の代わりに白金系触媒(信越シリコーン株式会社製 CAT−PL−50T)を使用した点以外は、実施例1と同様の手順を実施して本発明の薄板ガラス積層体(薄板ガラス積層体D)を得た。
薄板ガラス積層体Dにおいて、薄板ガラス基板は、シリコーン樹脂層と気泡を発生することなく密着しており、凸状欠点もなく平滑性も良好であった。
薄板ガラス積層体Dについて、簡易剥離試験を実施したところ、薄板ガラス基板を容易に剥離することができた。また、300℃1時間大気中で加熱処理した後の薄板ガラス積層体Dについても、簡易剥離試験を実施したが、薄板ガラス基板を容易に剥離することができ、耐熱性も良好であった。
実施例1と同様に、上記手順で形成されたシリコーン樹脂層の残留接着率を測定したところ、残留接着率は101%であった。
(Example 3)
In Example 2, except that the mixing ratio of linear polyorganosiloxane and methylhydrogenpolysiloxane was adjusted so that the molar ratio of hydrosilyl group to vinyl group was 1.0 / 1. In the same manner as in No. 2, a thin glass laminate (thin glass laminate C) was obtained.
In the thin glass laminate C, the thin glass substrate was in close contact with the silicone resin layer without generating bubbles, had no convex defects, and had good smoothness.
The formed thin glass laminate C was evaluated as follows.
(1) Simple peel test The thin glass laminate C was placed so that the thin glass substrate was on the upper side, and the support glass substrate was fixed using a jig. In this state, a part of the peripheral portion of the thin glass substrate was peeled off from the support glass substrate with a razor, and when the thin glass substrate was further separated from the support glass substrate by hand, the thin glass substrate could be easily peeled off.
In addition, for the thin glass laminate C after heat treatment in the atmosphere at 300 ° C. for 1 hour, the above peel test was carried out, but it can be easily peeled off from the supporting glass substrate without destroying the thin glass substrate, The heat resistance was also good.
(2) Peel test (1) (before heating)
Peel test (1) (before heating) in the same manner as the peel test (1) (before heating) of Example 1 except that the thin glass laminate C is used instead of using the thin glass laminate A in Example 1. Carried out. The supporting glass substrate peeled off when a load of 12 kg weight (0.47 kg weight / cm 2 ) was applied. No cracking or the like occurred in the supporting glass substrate or the thin glass substrate.
(3) Peel test (1) (after heating)
Peel test (1) (after heating) in the same manner as the peel test (1) (after heating) of Example 1 except that the thin glass laminate C is used instead of using the thin glass laminate A in Example 1. Carried out. The supporting glass substrate peeled off when a load of 12 kg weight (0.47 kg weight / cm 2 ) was applied. No cracking or the like occurred in the supporting glass substrate or the thin glass substrate.
(4) Shear strength test A shear strength test was conducted in the same manner as the shear strength test of Example 1 except that the thin glass laminate C was used instead of the thin glass laminate A in Example 1. The supporting glass substrate peeled off when a load of 12 kg weight (1.9 kg weight / cm 2 ) was applied. No cracking or the like occurred in the supporting glass substrate or the thin glass substrate. In addition, the thin glass laminated body C after baking was the same value as before baking.
(5) Residual adhesion rate measurement Using the measurement method described in Example 1, the residual adhesion rate of the silicone resin layer of the thin glass laminate C was measured, and the residual adhesion rate was 105%.
(Example 4)
Solvent-free addition reaction type release paper silicone (KNS-320A manufactured by Shin-Etsu Silicone Co., Ltd.) instead of solvent-free addition reaction type release paper silicone (KS-847 manufactured by Shin-Etsu Silicone Co., Ltd.) The thin glass laminate of the present invention was carried out in the same manner as in Example 1 except that a platinum catalyst (CAT-PL-50T manufactured by Shin-Etsu Silicone Co., Ltd.) was used instead of CAT-PL-56 manufactured by the company. A body (thin glass laminate D) was obtained.
In the thin glass laminate D, the thin glass substrate was in close contact with the silicone resin layer without generating bubbles, had no convex defects, and had good smoothness.
When the simple peeling test was implemented about the thin glass laminated body D, the thin glass substrate was able to be peeled easily. Moreover, although the simple peeling test was implemented also about the thin glass laminated body D after heat-processing in the air | atmosphere for 300 degreeC for 1 hour, the thin glass substrate could be peeled easily and heat resistance was also favorable.
As in Example 1, when the residual adhesion rate of the silicone resin layer formed by the above procedure was measured, the residual adhesion rate was 101%.

(実施例5)
本実施例では、実施例1で得た薄板ガラス積層体Aを用いてLCDを製造する。2枚の薄板ガラス積層体Aを準備して、1枚にはアレイ形成工程を実施して薄板ガラス基板の表面にアレイを形成する。残りの1枚にはカラーフィルタ形成工程を実施して薄板ガラス基板の表面にカラーフィルタを形成する。アレイが形成された薄板ガラス基板と、カラーフィルタが形成された薄板ガラス基板とを貼合わせた後、剃刀の刃で端部に剥離のきっかけを与え、支持ガラス基板を分離する。続いて、薄板ガラス基板をレーザーカッタを用いて切断し、縦51mm×横38mmの28個のセルに分断した後、液晶注入工程および注入口の封止工程を実施して液晶セルを形成する。形成された液晶セルに偏光板を貼付する工程を実施し、続いてモジュール形成工程を実施してLCDを得る。こうして得られるLCDは特性上問題は生じない。
(Example 5)
In this example, an LCD is manufactured using the thin glass laminate A obtained in Example 1. Two thin glass laminates A are prepared, and an array is formed on one sheet to form an array on the surface of the thin glass substrate. The remaining one sheet is subjected to a color filter forming step to form a color filter on the surface of the thin glass substrate. After laminating the thin glass substrate on which the array is formed and the thin glass substrate on which the color filter is formed, an edge is given to the end with a razor blade to separate the supporting glass substrate. Subsequently, the thin glass substrate is cut using a laser cutter and divided into 28 cells of 51 mm in length × 38 mm in width, and then a liquid crystal injection step and an injection port sealing step are performed to form a liquid crystal cell. A step of attaching a polarizing plate to the formed liquid crystal cell is performed, and then a module formation step is performed to obtain an LCD. The LCD obtained in this way does not have a problem in characteristics.

(実施例6)
本実施例では、実施例1で得られる薄板ガラス積層体Aと厚さ0.7mmの無アルカリガラス基板を用いてLCDを製造する。薄板ガラス積層体Aを準備して、カラーフィルタ形成工程を実施して薄板ガラス基板の表面にカラーフィルタを形成する。一方厚さ0.7mmの無アルカリガラス基板(旭硝子株式会社製 AN−100)にアレイ形成工程を実施して厚さ0.7mmの無アルカリガラス基板の表面にアレイを形成する。
カラーフィルタが形成された薄板ガラス基板積層体と、アレイが形成された厚さ0.7mmの無アルカリガラス基板とを貼合わせた後、剃刀の刃で端部に剥離のきっかけを与え、薄板ガラス積層体から支持ガラス基板を分離する。続いて、薄板ガラス基板−無アルカリガラス基板貼合体を縦51mm×横38mmの28個のセルに分断する。この際、薄板ガラス基板はレーザーカッタで切断する。一方、無アルカリガラス基板はレーザーカッタまたはスクライブ−ブレイク法を用いて切断する。
その後、液晶注入工程および注入口の封止工程を実施して液晶セルを形成する。形成された液晶セルに偏光板を貼付する工程を実施し、続いてモジュール形成工程を実施してLCDを得る。こうして得られるLCDは特性上問題は生じない。
(Example 6)
In this example, an LCD is manufactured using the thin glass laminate A obtained in Example 1 and a non-alkali glass substrate having a thickness of 0.7 mm. A thin glass laminate A is prepared, and a color filter forming step is performed to form a color filter on the surface of the thin glass substrate. On the other hand, an array formation process is performed on a non-alkali glass substrate (Asahi Glass Co., Ltd. AN-100) having a thickness of 0.7 mm to form an array on the surface of the non-alkali glass substrate having a thickness of 0.7 mm.
After laminating the thin glass substrate laminate on which the color filter is formed and the non-alkali glass substrate having a thickness of 0.7 mm on which the array is formed, the edge is peeled off at the end with a razor blade, and the thin glass A supporting glass substrate is separated from the laminate. Subsequently, the thin glass substrate-non-alkali glass substrate bonded body is divided into 28 cells measuring 51 mm long by 38 mm wide. At this time, the thin glass substrate is cut with a laser cutter. On the other hand, the alkali-free glass substrate is cut using a laser cutter or a scribe-break method.
Thereafter, a liquid crystal injection step and an injection port sealing step are performed to form a liquid crystal cell. A step of attaching a polarizing plate to the formed liquid crystal cell is performed, and then a module formation step is performed to obtain an LCD. The LCD obtained in this way does not have a problem in characteristics.

(実施例7)
本実施例では、実施例2で得た薄板ガラス積層体Bを用いてLCDを製造する。2枚の薄板ガラス積層体Bを準備して、1枚にはアレイ形成工程を実施して薄板ガラス基板の表面にアレイを形成する。残りの1枚にはカラーフィルタ形成工程を実施して薄板ガラス基板の表面にカラーフィルタを形成する。アレイが形成された薄板ガラス基板と、カラーフィルタが形成された薄板ガラス基板とを貼合わせた後、剃刀の刃で端部に剥離のきっかけを与え、支持ガラス基板を分離する。続いて、薄板ガラス基板をレーザーカッタを用いて切断し、縦51mm×横38mmの28個のセルに分断した後、液晶注入工程および注入口の封止工程を実施して液晶セルを形成する。形成された液晶セルに偏光板を貼付する工程を実施し、続いてモジュール形成工程を実施してLCDを得る。こうして得られるLCDは特性上問題は生じない。
(Example 7)
In this example, an LCD is manufactured using the thin glass laminate B obtained in Example 2. Two sheet glass laminates B are prepared, and an array is formed on one sheet to form an array on the surface of the sheet glass substrate. The remaining one sheet is subjected to a color filter forming step to form a color filter on the surface of the thin glass substrate. After laminating the thin glass substrate on which the array is formed and the thin glass substrate on which the color filter is formed, an edge is given to the end with a razor blade to separate the supporting glass substrate. Subsequently, the thin glass substrate is cut using a laser cutter and divided into 28 cells of 51 mm in length × 38 mm in width, and then a liquid crystal injection step and an injection port sealing step are performed to form a liquid crystal cell. A step of attaching a polarizing plate to the formed liquid crystal cell is performed, and then a module formation step is performed to obtain an LCD. The LCD obtained in this way does not have a problem in characteristics.

(実施例8)
本実施例では、実施例4で得た薄板ガラス積層体Dを用いてOLEDを製造する。透明電極を形成する工程、補助電極を形成する工程、ホール注入層・ホール輸送層・発光層・電子輸送層等を蒸着する工程、これらを封止する工程を実施して、薄板ガラス積層体Dの薄板ガラス基板上に有機EL構造体を形成する。次に、支持ガラス基板を分離する。続いて、薄板ガラス基板をレーザーカッタを用いて切断し、縦41mm×横30mmの40個のセルに分断した後、有機EL構造体が形成された薄板ガラス基板と対向基板とを組み立てて、モジュール形成工程を実施してOLEDを作製する。こうして得られるOLEDは特性上問題は生じない。
(Example 8)
In this example, an OLED is manufactured using the thin glass laminate D obtained in Example 4. A process for forming a transparent electrode, a process for forming an auxiliary electrode, a process for depositing a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and the like, and a process for sealing them are performed to obtain a thin glass laminate D An organic EL structure is formed on the thin glass substrate. Next, the supporting glass substrate is separated. Subsequently, the thin glass substrate is cut using a laser cutter and divided into 40 cells of 41 mm length × 30 mm width, and then the thin glass substrate on which the organic EL structure is formed and the counter substrate are assembled, and the module is assembled. A formation process is performed to produce an OLED. There is no problem in characteristics of the OLED obtained in this way.

(比較例1)
支持ガラス基板上に、シリコーンレジン(東レダウコーニング株式会社製 SH805)をスピンコーターにて塗工し、250℃にて1時間加熱硬化して膜厚16μmのシリコーン樹脂層を得たこと以外は、実施例1と同様の手順を実施して比較例の薄板ガラス積層体Eを得た。
薄板ガラス積層体Eにおいては、シリコーン樹脂層と支持ガラス基板とが十分密着せず、積層体を構成しなかった。
(Comparative Example 1)
Except that a silicone resin (SH805 manufactured by Toray Dow Corning Co., Ltd.) was applied on a support glass substrate with a spin coater and heat cured at 250 ° C. for 1 hour to obtain a silicone resin layer having a film thickness of 16 μm. The same procedure as in Example 1 was performed to obtain a thin glass laminate E of Comparative Example.
In the thin glass laminate E, the silicone resin layer and the supporting glass substrate were not sufficiently adhered, and the laminate was not constituted.

(比較例2)
支持ガラス基板上に、シリコーン粘着剤(GE東芝シリコーン株式会社製 YR3340)をスピンコーターにて塗工し、150℃にて10分間大気中で加熱硬化して膜厚16μmのシリコーン樹脂層を得た以外は、実施例1と同様の手順を実施して比較例の薄板ガラス積層体Fを得た。
薄板ガラス積層体Fにおいて、薄板ガラス基板は、シリコーン樹脂層と十分密着しており、平滑性も良好であったが、シリコーン樹脂層中に気泡の混入が見られ、混入した気泡は除去することができなかった。
薄板ガラス積層体Fについて、簡易剥離試験を実施したところ、薄板ガラス基板を剥離することが困難であった。
また、薄板ガラス積層体Fについて、実施例1と同様に剥離試験(1)(加熱前)、剥離試験(1)(加熱後)、せん断強度試験をおこなったところ、支持ガラス基板と薄板ガラス基板は剥離せず、ポリカーボネートとガラス基板との界面にて剥離が生じた。よって、支持ガラス基板と薄板ガラス基板とを剥離することができなかった。
(Comparative Example 2)
A silicone pressure-sensitive adhesive (YR3340 manufactured by GE Toshiba Silicone Co., Ltd.) was applied on a supporting glass substrate with a spin coater, and heat cured at 150 ° C. for 10 minutes in the air to obtain a silicone resin layer having a film thickness of 16 μm. Except for the above, the same procedure as in Example 1 was performed to obtain a thin glass laminate F of Comparative Example.
In the thin glass laminate F, the thin glass substrate was sufficiently adhered to the silicone resin layer and had good smoothness, but air bubbles were mixed in the silicone resin layer, and the mixed air bubbles were removed. I could not.
When the simple peeling test was implemented about the thin glass laminated body F, it was difficult to peel a thin glass substrate.
Moreover, about the thin glass laminated body F, when a peeling test (1) (before heating), a peeling test (1) (after heating), and a shear strength test were conducted like Example 1, a support glass substrate and a thin glass substrate were carried out. Was not peeled off, and peeling occurred at the interface between the polycarbonate and the glass substrate. Therefore, the supporting glass substrate and the thin glass substrate could not be peeled off.

本発明によって得られた薄板ガラス積層体は、各種表示装置のガラス基板として使用することができる。

なお、2005年8月9日に出願された日本特許出願2005−230434号の明細書、特許請求の範囲、図面及び要約書の全内容をここに引用し、本発明の明細書の開示として、取り入れるものである。
The thin glass laminate obtained by the present invention can be used as a glass substrate for various display devices.

It should be noted that the entire contents of the specification, claims, drawings and abstract of Japanese Patent Application No. 2005-230434 filed on August 9, 2005 are cited here as disclosure of the specification of the present invention. Incorporated.

Claims (23)

薄板ガラス基板と、支持ガラス基板と、を積層させてなる薄板ガラス積層体であって、 前記薄板ガラス基板と、前記支持ガラス基板と、が易剥離性および非粘着性を有するシリコーン樹脂層を介して積層されていることを特徴とする薄板ガラス積層体。   A thin glass laminate obtained by laminating a thin glass substrate and a supporting glass substrate, wherein the thin glass substrate and the supporting glass substrate are interposed through a silicone resin layer having easy peelability and non-adhesiveness. A thin glass laminate characterized by being laminated. 前記易剥離性および非粘着性を有するシリコーン樹脂層は、さらに低シリコーン移行性を有する請求項1に記載の薄板ガラス積層体。   The thin glass laminate according to claim 1, wherein the easily peelable and non-adhesive silicone resin layer further has low silicone migration. 前記易剥離性および非粘着性を有するシリコーン樹脂層は、剥離紙用シリコーンの硬化物からなる層である請求項1または2に記載の薄板ガラス積層体。   The thin glass laminate according to claim 1 or 2, wherein the easily peelable and non-adhesive silicone resin layer is a layer made of a cured product of silicone for release paper. 前記剥離紙用シリコーンの硬化物は、両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンと、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサンとの架橋反応物である請求項3に記載の薄板ガラス積層体。   The cured product of the release paper silicone is a cross-linked reaction product of a linear polyorganosiloxane having vinyl groups at both ends and / or side chains and a methylhydrogen polysiloxane having a hydrosilyl group in the molecule. A thin glass laminate according to claim 3. 前記直鎖状ポリオルガノシロキサンと、前記メチルハイドロジェンポリシロキサンとの混合比率においては、ハイドロシリル基とビニル基のモル比が1.3/1〜0.7/1となるように混合比率を調整する請求項4に記載の薄板ガラス積層体。   In the mixing ratio of the linear polyorganosiloxane and the methyl hydrogen polysiloxane, the mixing ratio is adjusted so that the molar ratio of hydrosilyl group to vinyl group is 1.3 / 1 to 0.7 / 1. The thin glass laminated body of Claim 4 to adjust. 前記薄板ガラス基板の厚さが0.3mm未満であり、前記支持ガラス基板と前記シリコーン樹脂層との厚さの合計が0.5mm以上である請求項1ないし5のいずれかに記載の薄板ガラス積層体。   The thin glass according to any one of claims 1 to 5, wherein a thickness of the thin glass substrate is less than 0.3 mm, and a total thickness of the supporting glass substrate and the silicone resin layer is 0.5 mm or more. Laminated body. 前記支持ガラス基板の線膨張係数と、前記薄板ガラス基板の線膨張係数と、の差が15×10-7/℃以下である請求項1ないし6のいずれかに記載の薄板ガラス積層体。The thin glass laminate according to any one of claims 1 to 6, wherein a difference between a linear expansion coefficient of the supporting glass substrate and a linear expansion coefficient of the thin glass substrate is 15 × 10 -7 / ° C or less. 前記シリコーン樹脂層の表面エネルギーが16〜21erg/cmである請求項1ないし7のいずれかに記載の薄板ガラス積層体。The thin glass laminate according to claim 1, wherein the silicone resin layer has a surface energy of 16 to 21 erg / cm 2 . 薄板ガラス基板と、支持ガラス基板と、を積層させてなる薄板ガラス積層体であって、 前記薄板ガラス基板と、前記支持ガラス基板と、がシリコーン樹脂層を介して積層されており、前記シリコーン樹脂層のせん断力が0.1kg重/cm以上であり、剥離力が2kg重/cm以下であることを特徴とする薄板ガラス積層体。A thin glass laminate formed by laminating a thin glass substrate and a supporting glass substrate, wherein the thin glass substrate and the supporting glass substrate are laminated via a silicone resin layer, and the silicone resin A thin glass laminate having a shearing force of 0.1 kg / cm 2 or more and a peeling force of 2 kg / cm 2 or less. 支持ガラス基板上に易剥離性および非粘着性を有するシリコーン樹脂層を形成する工程と、
前記支持ガラスの前記シリコーン樹脂層形成面に薄板ガラス基板を積層し、薄板ガラス積層体を形成する工程と、
前記薄板ガラス基板上に表示装置を製造するための所定の処理を実施する工程と、
処理された前記薄板ガラス基板と前記支持ガラス基板とを分離する工程と、を含むことを特徴とする薄板ガラス積層体を用いた表示装置の製造方法。
Forming a silicone resin layer having easy peelability and non-adhesiveness on a supporting glass substrate;
Laminating a thin glass substrate on the silicone resin layer forming surface of the support glass, and forming a thin glass laminate,
Performing a predetermined process for manufacturing a display device on the thin glass substrate;
And a step of separating the processed thin glass substrate and the supporting glass substrate. A method for manufacturing a display device using a thin glass laminate, comprising:
前記易剥離性および非粘着性を有するシリコーン樹脂層は、さらに低シリコーン移行性を有する請求項10に記載の薄板ガラス積層体を用いた表示装置の製造方法。   The method for producing a display device using the thin glass laminate according to claim 10, wherein the easily peelable and non-adhesive silicone resin layer further has low silicone migration. 支持ガラス基板上に剥離紙用シリコーンの硬化物からなるシリコーン樹脂層を形成する工程と、
前記支持ガラスの前記シリコーン樹脂層形成面に薄板ガラス基板を積層し、薄板ガラス積層体を形成する工程と、
前記薄板ガラス基板上に表示装置を製造するための所定の処理を実施する工程と、
処理された前記薄板ガラス基板と前記支持ガラス基板とを分離する工程と、を含む請求項10または11に記載の薄板ガラス積層体を用いた表示装置の製造方法。
Forming a silicone resin layer comprising a cured product of silicone for release paper on a supporting glass substrate;
Laminating a thin glass substrate on the silicone resin layer forming surface of the support glass, and forming a thin glass laminate,
Performing a predetermined process for manufacturing a display device on the thin glass substrate;
The manufacturing method of the display apparatus using the thin glass laminated body of Claim 10 or 11 including the process of isolate | separating the processed said thin glass substrate and the said support glass substrate.
支持ガラス基板上に剥離紙用シリコーンの硬化物からなるシリコーン樹脂層を形成する工程は、前記支持ガラス基板上に剥離紙用シリコーンを塗工し、その後前記剥離紙用シリコーンを硬化させることを含む請求項12に記載の薄板ガラス積層体を用いた表示装置の製造方法。   The step of forming a silicone resin layer composed of a cured product of silicone for release paper on a support glass substrate includes coating silicone for release paper on the support glass substrate and then curing the silicone for release paper. A method for manufacturing a display device using the thin glass laminate according to claim 12. 前記剥離紙用シリコーンは、両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサン、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサン、および白金系触媒を含む請求項12または13に記載の薄板ガラス積層体を用いた表示装置の製造方法。   The silicone for release paper includes linear polyorganosiloxane having vinyl groups at both ends and / or side chains, methylhydrogen polysiloxane having hydrosilyl groups in the molecule, and a platinum-based catalyst. Or the manufacturing method of the display apparatus using the thin glass laminated body of 13. 前記直鎖状ポリオルガノシロキサンと、前記メチルハイドロジェンポリシロキサンとの混合比率は、ハイドロシリル基とビニル基のモル比が1.3/1〜0.7/1となるように混合比率を調整する請求項14に記載の薄板ガラス積層体を用いた表示装置の製造方法。   The mixing ratio of the linear polyorganosiloxane and the methyl hydrogen polysiloxane is adjusted so that the molar ratio of hydrosilyl group to vinyl group is 1.3 / 1 to 0.7 / 1. The manufacturing method of the display apparatus using the thin glass laminated body of Claim 14. 前記剥離紙用シリコーンは、非反応性シリコーンの含有量が5質量%以下である請求項12ないし15のいずれかに記載の薄板ガラス積層体を用いた表示装置の製造方法。   The method for producing a display device using a thin glass laminate according to any one of claims 12 to 15, wherein the silicone for release paper has a content of non-reactive silicone of 5% by mass or less. 前記剥離紙用シリコーンの塗工は、ダイコート法、スピンコート法またはスクリーン印刷法を用いて実施する請求項12ないし16のいずれかに記載の薄板ガラス積層体を用いた表示装置の製造方法。   The method for producing a display device using a thin glass laminate according to any one of claims 12 to 16, wherein the silicone for release paper is applied using a die coating method, a spin coating method, or a screen printing method. 前記剥離紙用シリコーンを50〜250℃の温度で加熱硬化させる請求項12ないし17のいずれかに記載の薄板ガラス積層体を用いた表示装置の製造方法。   The manufacturing method of the display apparatus using the thin glass laminated body in any one of Claim 12 thru | or 17 which heat-hardens the said silicone for release paper at the temperature of 50-250 degreeC. 前記支持ガラス基板の前記シリコーン樹脂層形成面に薄板ガラス基板を積層し、薄板ガラス積層体を形成する工程は、真空プレスまたは真空ラミネートを用いて実施する請求項10ないし18のいずれかに記載の薄板ガラス積層体を用いた表示装置の製造方法。   19. The step of laminating a thin glass substrate on the silicone resin layer forming surface of the supporting glass substrate to form a thin glass laminate is performed using a vacuum press or a vacuum laminate. A method for manufacturing a display device using a thin glass laminate. 前記薄板ガラス基板の厚さが0.3mm未満であり、前記支持ガラス基板と前記シリコーン樹脂層との厚さの合計が0.5mm以上である請求項10ないし19のいずれかに記載の薄板ガラス積層体を用いた表示装置の製造方法。   20. The thin glass according to claim 10, wherein a thickness of the thin glass substrate is less than 0.3 mm, and a total thickness of the support glass substrate and the silicone resin layer is 0.5 mm or more. A method for manufacturing a display device using a laminate. 前記支持ガラス基板の線膨張係数と、前記薄板ガラス基板の線膨張係数と、の差が15×10-7/℃以下である請求項10ないし20のいずれかに記載の薄板ガラス積層体を用いた表示装置の製造方法。The difference between the linear expansion coefficient of the supporting glass substrate and the linear expansion coefficient of the thin glass substrate is 15 × 10 -7 / ° C or less, and the thin glass laminate according to any one of claims 10 to 20 is used. Manufacturing method of the display device. 両末端及び/又は側鎖中にビニル基を有する直鎖状ポリオルガノシロキサンからなる主剤と、分子内にハイドロシリル基を有するメチルハイドロジェンポリシロキサンからなる架橋剤とを含み、前記直鎖状ポリオルガノシロキサンと、メチルハイドロジェンポリシロキサンとの混合比率が、ハイドロシリル基とビニル基のモル比が1.3/1〜0.7/1となるように調整されていることを特徴とする薄板ガラス積層体用の剥離紙用シリコーン。   A linear polyorganosiloxane having a vinyl group at both ends and / or side chains, and a crosslinking agent comprising a methylhydrogenpolysiloxane having a hydrosilyl group in the molecule; A thin plate characterized in that the mixing ratio of organosiloxane and methylhydrogenpolysiloxane is adjusted so that the molar ratio of hydrosilyl group to vinyl group is 1.3 / 1 to 0.7 / 1 Silicone for release paper for glass laminates. 非反応性シリコーンの含有量が5質量%以下である請求項22に記載の薄板ガラス積層体用の剥離紙用シリコーン。   The silicone for release paper for thin glass laminates according to claim 22, wherein the content of non-reactive silicone is 5% by mass or less.
JP2007529473A 2005-08-09 2006-07-21 Thin glass laminate and method for manufacturing display device using thin glass laminate Active JP5200538B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007529473A JP5200538B2 (en) 2005-08-09 2006-07-21 Thin glass laminate and method for manufacturing display device using thin glass laminate

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005230434 2005-08-09
JP2005230434 2005-08-09
JP2007529473A JP5200538B2 (en) 2005-08-09 2006-07-21 Thin glass laminate and method for manufacturing display device using thin glass laminate
PCT/JP2006/314525 WO2007018028A1 (en) 2005-08-09 2006-07-21 Thin sheet glass laminate and method for manufacturing display using thin sheet glass laminate

Publications (2)

Publication Number Publication Date
JPWO2007018028A1 true JPWO2007018028A1 (en) 2009-02-19
JP5200538B2 JP5200538B2 (en) 2013-06-05

Family

ID=37727217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007529473A Active JP5200538B2 (en) 2005-08-09 2006-07-21 Thin glass laminate and method for manufacturing display device using thin glass laminate

Country Status (7)

Country Link
US (1) US8652643B2 (en)
EP (1) EP1914066B1 (en)
JP (1) JP5200538B2 (en)
KR (1) KR101285442B1 (en)
CN (1) CN101242951B (en)
TW (1) TWI411984B (en)
WO (1) WO2007018028A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012086527A (en) * 2010-10-22 2012-05-10 Asahi Glass Co Ltd Support, glass substrate laminate, panel for display device with support, organopolysiloxane composition, and method for manufacturing panel for display device

Families Citing this family (129)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101437772B (en) * 2006-05-08 2011-09-07 旭硝子株式会社 Thin plate glass laminate, process for producing display device using thin plate glass laminate, and support glass substrate
JPWO2008007622A1 (en) * 2006-07-12 2009-12-10 旭硝子株式会社 Glass substrate with protective glass, display device manufacturing method using glass substrate with protective glass, and silicone for release paper
JP5532918B2 (en) * 2007-03-12 2014-06-25 旭硝子株式会社 Method for manufacturing display device using glass substrate with protective glass
JP2009186916A (en) * 2008-02-08 2009-08-20 Asahi Glass Co Ltd Method of manufacturing display device panel
JPWO2009128359A1 (en) 2008-04-17 2011-08-04 旭硝子株式会社 GLASS LAMINATE, PANEL FOR DISPLAY DEVICE WITH SUPPORT AND METHOD FOR PRODUCING THEM
JP5308718B2 (en) 2008-05-26 2013-10-09 浜松ホトニクス株式会社 Glass welding method
WO2009150976A1 (en) 2008-06-11 2009-12-17 浜松ホトニクス株式会社 Fusion-bonding process for glass
WO2009157282A1 (en) 2008-06-23 2009-12-30 浜松ホトニクス株式会社 Fusion-bonding process for glass
US8673163B2 (en) * 2008-06-27 2014-03-18 Apple Inc. Method for fabricating thin sheets of glass
KR101670098B1 (en) * 2008-10-23 2016-10-27 아사히 가라스 가부시키가이샤 Glass substrate laminated device and method for producing laminate glass substrate
TW201033000A (en) * 2009-01-09 2010-09-16 Asahi Glass Co Ltd Glass laminate and manufacturing method therefor
US9063605B2 (en) 2009-01-09 2015-06-23 Apple Inc. Thin glass processing using a carrier
US7918019B2 (en) * 2009-01-09 2011-04-05 Apple Inc. Method for fabricating thin touch sensor panels
JP5533671B2 (en) * 2009-02-05 2014-06-25 旭硝子株式会社 Laminated body with polarizer, display device panel with support, display device panel, display device, and methods for producing the same
JP5616907B2 (en) 2009-03-02 2014-10-29 アップル インコーポレイテッド Technology to strengthen the glass cover of portable electronic devices
KR20110131223A (en) * 2009-03-24 2011-12-06 아사히 가라스 가부시키가이샤 Manufacturing method for electronic device
US8697228B2 (en) 2009-05-06 2014-04-15 Corning Incorporated Carrier for glass substrates
JP5294077B2 (en) * 2009-06-12 2013-09-18 日本電気硝子株式会社 Substrate laminate and method for separating the substrate laminate
WO2011024690A1 (en) * 2009-08-27 2011-03-03 旭硝子株式会社 Multilayer structure with flexible base material and support, panel for use in electronic device provided with support and production method for panel for use in electronic device
JP5562597B2 (en) * 2009-08-28 2014-07-30 荒川化学工業株式会社 SUPPORT, GLASS SUBSTRATE LAMINATE, DISPLAY DEVICE PANEL WITH SUPPORT AND METHOD FOR PRODUCING DISPLAY DEVICE PANEL
CN102574371B (en) * 2009-10-20 2015-10-07 旭硝子株式会社 Glass laminate, the display unit panel being with supporting mass, display unit panel, display unit and their manufacture method
KR20120098640A (en) * 2009-10-20 2012-09-05 아사히 가라스 가부시키가이샤 Glass laminate, glass laminate manufacturing method, display panel manufacturing method, and display panel obtained by means of display panel manufacturing method
JP5481167B2 (en) * 2009-11-12 2014-04-23 浜松ホトニクス株式会社 Glass welding method
JP5535588B2 (en) 2009-11-25 2014-07-02 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
JP5481172B2 (en) 2009-11-25 2014-04-23 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
JP5535589B2 (en) 2009-11-25 2014-07-02 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
JP5481173B2 (en) 2009-11-25 2014-04-23 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
JP5567319B2 (en) 2009-11-25 2014-08-06 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
JP5535590B2 (en) 2009-11-25 2014-07-02 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
JP5466929B2 (en) 2009-11-25 2014-04-09 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
JP5525246B2 (en) 2009-11-25 2014-06-18 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
US9778685B2 (en) 2011-05-04 2017-10-03 Apple Inc. Housing for portable electronic device with reduced border region
JP5716678B2 (en) * 2010-01-25 2015-05-13 旭硝子株式会社 LAMINATE MANUFACTURING METHOD AND LAMINATE
JPWO2011111611A1 (en) * 2010-03-08 2013-06-27 旭硝子株式会社 Method for removing resin film and method for producing laminate
US20110265516A1 (en) * 2010-04-29 2011-11-03 Douglas Clippinger Allan Compositional control of fast relaxation in display glasses
JP5835214B2 (en) * 2010-05-11 2015-12-24 旭硝子株式会社 LAMINATE MANUFACTURING METHOD AND LAMINATE
US9213451B2 (en) 2010-06-04 2015-12-15 Apple Inc. Thin glass for touch panel sensors and methods therefor
US8824140B2 (en) 2010-09-17 2014-09-02 Apple Inc. Glass enclosure
US8950215B2 (en) 2010-10-06 2015-02-10 Apple Inc. Non-contact polishing techniques for reducing roughness on glass surfaces
KR20130140707A (en) * 2010-11-05 2013-12-24 아사히 가라스 가부시키가이샤 Laminate body, panel for use in display device with support board, panel for use in display device, and display device
US9725359B2 (en) 2011-03-16 2017-08-08 Apple Inc. Electronic device having selectively strengthened glass
US10781135B2 (en) 2011-03-16 2020-09-22 Apple Inc. Strengthening variable thickness glass
CN103492173B (en) * 2011-04-22 2015-05-20 旭硝子株式会社 Laminate, method for producing same, and use of same
US9128666B2 (en) 2011-05-04 2015-09-08 Apple Inc. Housing for portable electronic device with reduced border region
US20120280368A1 (en) * 2011-05-06 2012-11-08 Sean Matthew Garner Laminated structure for semiconductor devices
KR102043657B1 (en) 2011-05-13 2019-11-12 니폰 덴키 가라스 가부시키가이샤 Laminate, method for cutting laminate, method for processing laminate, and device and method for cutting brittle plate-like object
JP5904456B2 (en) * 2011-05-13 2016-04-13 日本電気硝子株式会社 Laminated body
KR101837202B1 (en) 2011-10-12 2018-04-20 엘지디스플레이 주식회사 Method of forming process substrate using thin glass substrate and method of fabricating flat display device using thereof
US9944554B2 (en) 2011-09-15 2018-04-17 Apple Inc. Perforated mother sheet for partial edge chemical strengthening and method therefor
US9516149B2 (en) 2011-09-29 2016-12-06 Apple Inc. Multi-layer transparent structures for electronic device housings
JP5796449B2 (en) * 2011-10-12 2015-10-21 旭硝子株式会社 Manufacturing method of electronic device, manufacturing method of carrier substrate with resin layer
JPWO2013054792A1 (en) * 2011-10-12 2015-03-30 旭硝子株式会社 Manufacturing method of electronic device with adhesive resin layer
CN103889712B (en) * 2011-10-18 2015-07-08 旭硝子株式会社 Laminate, method for producing laminate, and method for producing glass substrate having member for electronic devices attached thereto
US20130114219A1 (en) * 2011-11-08 2013-05-09 Sean Matthew Garner Opto-electronic frontplane substrate
KR20130078810A (en) * 2011-12-30 2013-07-10 엘아이지에이디피 주식회사 Substrate attaching method
KR101338019B1 (en) * 2012-01-09 2013-12-09 홍석우 Processing method of laminated plate for display
US10133156B2 (en) 2012-01-10 2018-11-20 Apple Inc. Fused opaque and clear glass for camera or display window
US8773848B2 (en) 2012-01-25 2014-07-08 Apple Inc. Fused glass device housings
US10543662B2 (en) 2012-02-08 2020-01-28 Corning Incorporated Device modified substrate article and methods for making
KR101935780B1 (en) * 2012-06-01 2019-01-07 엘지디스플레이 주식회사 Processing line for fabricating liquid crystal display device
WO2013179881A1 (en) * 2012-05-29 2013-12-05 旭硝子株式会社 Glass laminate and method for manufacturing electronic device
TWI458628B (en) * 2012-06-11 2014-11-01 Chunghwa Picture Tubes Ltd Glass adhesion apparatus
TWI669835B (en) 2012-07-05 2019-08-21 日商半導體能源研究所股份有限公司 Light-emitting device
KR102173801B1 (en) 2012-07-12 2020-11-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Display device and method for manufacturing display device
WO2014038326A1 (en) 2012-09-07 2014-03-13 旭硝子株式会社 Process for producing intermediate for interposer, and intermediate for interposer
US9946302B2 (en) * 2012-09-19 2018-04-17 Apple Inc. Exposed glass article with inner recessed area for portable electronic device housing
JP2015231668A (en) * 2012-09-27 2015-12-24 旭硝子株式会社 Glass laminate and method for producing the same, and supporting substrate having silicone resin layer and method for producing the same
JP2015232053A (en) * 2012-09-27 2015-12-24 旭硝子株式会社 Organopolysiloxane, crosslinked organopolysiloxane and composition for coating
KR20150073976A (en) * 2012-10-17 2015-07-01 아사히 가라스 가부시키가이샤 Glass laminate and manufacturing method therefor, and support base with silicone resin layer
JP5978912B2 (en) * 2012-10-18 2016-08-24 旭硝子株式会社 Manufacturing method of glass laminate and manufacturing method of electronic device
US20140127857A1 (en) * 2012-11-07 2014-05-08 Taiwan Semiconductor Manufacturing Company, Ltd. Carrier Wafers, Methods of Manufacture Thereof, and Packaging Methods
KR102044418B1 (en) * 2012-11-09 2019-11-13 엘지디스플레이 주식회사 Method of fabricating lightweight and thin liquid crystal display device
JP5408374B2 (en) * 2012-11-22 2014-02-05 旭硝子株式会社 ELECTRONIC DEVICE MEMBER, ELECTRONIC DEVICE MANUFACTURING METHOD, AND ELECTRONIC DEVICE MEMBER
JP2014104712A (en) * 2012-11-29 2014-06-09 Asahi Glass Co Ltd Electronic device manufacturing method and multilayered glass laminate
TWI492203B (en) * 2012-12-04 2015-07-11 Au Optronics Corp Method of manufacturing display panel and laminated structure
US10086584B2 (en) * 2012-12-13 2018-10-02 Corning Incorporated Glass articles and methods for controlled bonding of glass sheets with carriers
TWI617437B (en) 2012-12-13 2018-03-11 康寧公司 Facilitated processing for controlling bonding between sheet and carrier
US10014177B2 (en) * 2012-12-13 2018-07-03 Corning Incorporated Methods for processing electronic devices
US9340443B2 (en) * 2012-12-13 2016-05-17 Corning Incorporated Bulk annealing of glass sheets
JP6252490B2 (en) * 2012-12-28 2017-12-27 旭硝子株式会社 GLASS LAMINATE, PROCESS FOR PRODUCING THE SAME, AND SUPPORT SUBSTRATE WITH SILICONE RESIN LAYER
CN105555732A (en) 2013-02-07 2016-05-04 康宁股份有限公司 Apparatus and methods of forming flexible glass laminates using electrostatic pinning
TWI520850B (en) * 2013-03-15 2016-02-11 友達光電股份有限公司 An electronic device and fabricating method thereof
KR101432575B1 (en) 2013-03-29 2014-08-21 엘지디스플레이 주식회사 Method of fabricating lightweight and thin liquid crystal display device
US9459661B2 (en) 2013-06-19 2016-10-04 Apple Inc. Camouflaged openings in electronic device housings
CN103331983B (en) * 2013-06-24 2015-11-04 句容骏成电子有限公司 A kind of hot-press method
CN103345090B (en) * 2013-06-24 2016-04-06 句容骏成电子有限公司 A kind of tune cassette method
DE102013214426A1 (en) 2013-07-24 2015-01-29 Schott Ag Composite element and its use
DE102013214422A1 (en) * 2013-07-24 2015-01-29 Schott Ag Composite element and its use
US20150099110A1 (en) * 2013-10-07 2015-04-09 Corning Incorporated Glass articles and methods for controlled bonding of glass sheets with carriers
US10510576B2 (en) 2013-10-14 2019-12-17 Corning Incorporated Carrier-bonding methods and articles for semiconductor and interposer processing
KR20150056316A (en) 2013-11-15 2015-05-26 삼성디스플레이 주식회사 Manufacturing method of device substrate and display device manufatured by using the method
JP6136909B2 (en) * 2013-12-17 2017-05-31 旭硝子株式会社 Manufacturing method of support substrate with resin layer, manufacturing method of glass laminate, manufacturing method of electronic device
JP6136910B2 (en) * 2013-12-17 2017-05-31 旭硝子株式会社 Manufacturing method of glass laminate and manufacturing method of electronic device
JP6176591B2 (en) * 2013-12-25 2017-08-09 旭硝子株式会社 Packing method and packing body for substrate with adsorption layer and packing apparatus for substrate with adsorption layer
JPWO2015098888A1 (en) 2013-12-26 2017-03-23 旭硝子株式会社 Glass laminate and method for manufacturing electronic device
WO2015113023A1 (en) * 2014-01-27 2015-07-30 Corning Incorporated Treatment of a surface modification layer for controlled bonding of thin sheets with carriers
JP6770432B2 (en) 2014-01-27 2020-10-14 コーニング インコーポレイテッド Articles and methods for controlled binding of thin sheets to carriers
CN105980150B (en) * 2014-02-07 2018-01-30 旭硝子株式会社 Glass laminate
US9886062B2 (en) 2014-02-28 2018-02-06 Apple Inc. Exposed glass article with enhanced stiffness for portable electronic device housing
JP2017087417A (en) * 2014-03-26 2017-05-25 旭硝子株式会社 Glass laminate
SG11201608442TA (en) 2014-04-09 2016-11-29 Corning Inc Device modified substrate article and methods for making
CN106163798B (en) * 2014-04-10 2019-05-10 Agc株式会社 Glass laminate and its manufacturing method, the manufacturing method of electronic device
WO2015163134A1 (en) * 2014-04-25 2015-10-29 旭硝子株式会社 Glass laminate body, and method for manufacturing electronic device
JP6260441B2 (en) 2014-04-30 2018-01-17 旭硝子株式会社 Removal method of resin layer
TW201542386A (en) * 2014-05-02 2015-11-16 Au Optronics Corp Display panel and carrying device, and manufacturing method of the display panel
JP6361440B2 (en) * 2014-05-30 2018-07-25 Agc株式会社 Glass laminate, method for producing the same, and method for producing electronic device
JP5770890B2 (en) * 2014-06-11 2015-08-26 荒川化学工業株式会社 SUPPORT, GLASS SUBSTRATE LAMINATE, DISPLAY DEVICE PANEL WITH SUPPORT AND METHOD FOR PRODUCING DISPLAY DEVICE PANEL
JP2017528406A (en) 2014-08-20 2017-09-28 コーニング インコーポレイテッド Method of forming a molded glass article from a glass sheet
KR20170102239A (en) 2014-12-26 2017-09-08 아사히 가라스 가부시키가이샤 Glass laminate, method for producing electronic device, method for producing glass laminate, and glass plate package
CN104714324A (en) * 2015-03-18 2015-06-17 深圳市华星光电技术有限公司 Manufacturing technological method of liquid crystal display device
WO2016187186A1 (en) * 2015-05-19 2016-11-24 Corning Incorporated Articles and methods for bonding sheets with carriers
JP6063522B2 (en) * 2015-06-25 2017-01-18 荒川化学工業株式会社 SUPPORT, GLASS SUBSTRATE LAMINATE, DISPLAY DEVICE PANEL WITH SUPPORT AND METHOD FOR PRODUCING DISPLAY DEVICE PANEL
JP6488912B2 (en) * 2015-06-25 2019-03-27 Agc株式会社 Packing method for substrate with adsorption layer and packing apparatus for substrate with adsorption layer
CN117534339A (en) 2015-06-26 2024-02-09 康宁股份有限公司 Methods and articles comprising a sheet and a carrier
CN114538771A (en) 2015-07-03 2022-05-27 Agc株式会社 Carrier substrate, laminate, and method for manufacturing electronic device
WO2017035770A1 (en) * 2015-09-01 2017-03-09 Schott Glass Technologies (Suzhou) Co., Ltd. Method for producing a bonded glass article and a bonded glass article
JP6551151B2 (en) * 2015-10-27 2019-07-31 三菱ケミカル株式会社 Glass laminate, substrate for electronic device, and electronic device
JP6834983B2 (en) 2015-12-21 2021-02-24 Agc株式会社 Laminated board
TW201811970A (en) * 2016-05-16 2018-04-01 道康寧公司 Adhesive delamination layer including fluoroorganopolysiloxane
TWI767909B (en) * 2016-05-16 2022-06-21 美商道康寧公司 Adhesive delamination layer including at least one non-linear organopolysiloxane
TW202216444A (en) 2016-08-30 2022-05-01 美商康寧公司 Siloxane plasma polymers for sheet bonding
TWI810161B (en) 2016-08-31 2023-08-01 美商康寧公司 Articles of controllably bonded sheets and methods for making same
TWI808956B (en) 2016-12-28 2023-07-21 日商Agc股份有限公司 Laminate, supporting base material of agglomerated silicone resin layer, resin substrate of agglomerated silicone resin layer, and manufacturing method of electronic device
CN116330766A (en) 2016-12-28 2023-06-27 Agc株式会社 Laminate, support base material with silicone resin layer, resin substrate with silicone resin layer, and method for manufacturing electronic device
EP3645651B1 (en) 2017-10-19 2023-09-06 Dow Silicones Corporation A method for fabricating a flexible organic light emitting diode using a pressure sensitive adhesive composition
JP7431160B2 (en) 2017-12-15 2024-02-14 コーニング インコーポレイテッド Methods for processing substrates and manufacturing articles including bonded sheets
CN109239966A (en) * 2018-10-12 2019-01-18 京东方科技集团股份有限公司 The manufacturing method of display base plate, display panel, display device and display base plate
KR20230024273A (en) 2020-06-11 2023-02-20 에이지씨 가부시키가이샤 Method for manufacturing a laminate, a laminate provided with a member for electronic devices, and an electronic device
CN114335401A (en) * 2020-09-30 2022-04-12 咸阳虹微新型显示技术有限公司 OLED display panel preparation method, OLED display panel and OLED display

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854316A (en) 1981-09-25 1983-03-31 Sharp Corp Production for liquid crystal display device
JPS6013847A (en) * 1983-07-04 1985-01-24 Shin Etsu Chem Co Ltd Radiation-curable organopolysiloxane composition
JPS62215658A (en) * 1986-03-17 1987-09-22 Shin Etsu Chem Co Ltd Photo-setting organopolysiloxane composition
JPH07119363B2 (en) * 1988-12-19 1995-12-20 信越化学工業株式会社 Release paper composition
JP3263128B2 (en) * 1992-06-26 2002-03-04 ローム株式会社 Processing of thin glass
JP3081122B2 (en) * 1994-07-18 2000-08-28 シャープ株式会社 Jig for transporting substrate and method of manufacturing liquid crystal display element using the same
JP3203166B2 (en) * 1995-10-13 2001-08-27 シャープ株式会社 Jig for manufacturing liquid crystal display element and method for manufacturing liquid crystal display element using the same
JP3126646B2 (en) * 1995-12-22 2001-01-22 帝人株式会社 Release film
JPH1016421A (en) * 1996-07-08 1998-01-20 Kyodo Kumiai Purin Techno Waterless lithographic printing plate and its manufacture
US6107434A (en) * 1998-08-14 2000-08-22 General Electric Company Heat curable organopolysiloxane compositions
JP3202718B2 (en) 1999-02-23 2001-08-27 鹿児島日本電気株式会社 Display device manufacturing jig and display device manufacturing method using the same
JP2000252342A (en) 1999-03-01 2000-09-14 Seiko Epson Corp Method for transporting thin plate and manufacture of liquid crystal panel
JP2000250000A (en) * 1999-03-03 2000-09-14 Seiko Epson Corp Production of liquid crystal panel
JP3824474B2 (en) * 2000-07-19 2006-09-20 リンテック株式会社 In-line manufacturing method of biaxially stretched release film
JP4747420B2 (en) * 2001-02-09 2011-08-17 王子製紙株式会社 Release sheet and adhesive tape capable of thermal transfer recording
JP2003121609A (en) * 2001-10-11 2003-04-23 Hitachi Ltd Optical sheet and display device equipped with the same
JP2003216068A (en) 2002-01-28 2003-07-30 Matsushita Electric Ind Co Ltd Display device and substrate for display device, and method of manufacturing the same
JP4186502B2 (en) * 2002-04-22 2008-11-26 ソニー株式会社 Thin film device manufacturing method, thin film device, and display device
JP2004047975A (en) * 2002-05-17 2004-02-12 Semiconductor Energy Lab Co Ltd Method of transferring laminate and method of manufacturing semiconductor device
JP3724457B2 (en) * 2002-06-13 2005-12-07 日本板硝子株式会社 Glass spacer for electron beam excitation display
JP4273193B2 (en) * 2002-06-24 2009-06-03 フジコピアン株式会社 Double-sided adhesive sheet
DE20215401U1 (en) * 2002-10-07 2004-02-19 Schott Glas Composite of a thin substrate and a carrier substrate with releasable connecting means
JP2004186201A (en) * 2002-11-29 2004-07-02 Sekisui Chem Co Ltd Method of handling thin glass panel
JP4219739B2 (en) * 2003-06-09 2009-02-04 日東電工株式会社 Sheet for elastic pressing and method for manufacturing liquid crystal display panel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012086527A (en) * 2010-10-22 2012-05-10 Asahi Glass Co Ltd Support, glass substrate laminate, panel for display device with support, organopolysiloxane composition, and method for manufacturing panel for display device

Also Published As

Publication number Publication date
WO2007018028A1 (en) 2007-02-15
EP1914066A1 (en) 2008-04-23
EP1914066A4 (en) 2010-06-02
TW200715230A (en) 2007-04-16
US8652643B2 (en) 2014-02-18
CN101242951B (en) 2012-10-31
JP5200538B2 (en) 2013-06-05
KR20080036069A (en) 2008-04-24
TWI411984B (en) 2013-10-11
EP1914066B1 (en) 2016-09-07
KR101285442B1 (en) 2013-07-12
CN101242951A (en) 2008-08-13
US20080135175A1 (en) 2008-06-12

Similar Documents

Publication Publication Date Title
JP5200538B2 (en) Thin glass laminate and method for manufacturing display device using thin glass laminate
JP4930161B2 (en) Thin glass laminated body, display device manufacturing method using thin glass laminated body, and supporting glass substrate
JP5532918B2 (en) Method for manufacturing display device using glass substrate with protective glass
US8303754B2 (en) Glass substrate with protective glass, process for producing display device using glass substrate with protective glass, and silicone for release paper
JP5024087B2 (en) GLASS LAMINATE, PANEL FOR DISPLAY DEVICE WITH SUPPORT AND METHOD FOR PRODUCING THEM
US8157945B2 (en) Thin plate glass laminate, process for producing display device using thin plate glass laminate, and support glass substrate
WO2011024690A1 (en) Multilayer structure with flexible base material and support, panel for use in electronic device provided with support and production method for panel for use in electronic device
US20110026236A1 (en) Glass laminate, display panel with support, method for producing glass laminate and method for manufacturing display panel with support
WO2010079688A1 (en) Glass laminate and manufacturing method therefor
WO2011142280A1 (en) Process for producing laminate, and laminate
WO2010110087A1 (en) Manufacturing method for electronic device
WO2014103678A1 (en) Glass laminate, method for producing same, and supporting base with silicone resin layer
JP6194893B2 (en) GLASS LAMINATE, PROCESS FOR PRODUCING THE SAME, AND SUPPORT SUBSTRATE WITH SILICONE RESIN LAYER

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090611

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110906

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111104

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120327

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120528

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130115

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130128

R151 Written notification of patent or utility model registration

Ref document number: 5200538

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160222

Year of fee payment: 3

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250