WO2025069337A1 - 銅銀合金製のシート材の製造方法およびプローブカードの電極用シートの製造方法 - Google Patents

銅銀合金製のシート材の製造方法およびプローブカードの電極用シートの製造方法 Download PDF

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Publication number
WO2025069337A1
WO2025069337A1 PCT/JP2023/035495 JP2023035495W WO2025069337A1 WO 2025069337 A1 WO2025069337 A1 WO 2025069337A1 JP 2023035495 W JP2023035495 W JP 2023035495W WO 2025069337 A1 WO2025069337 A1 WO 2025069337A1
Authority
WO
WIPO (PCT)
Prior art keywords
sheet material
silver alloy
copper
thickness
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2023/035495
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
勉 小泉
剛 大達
龍一 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SWCC Corp
Original Assignee
SWCC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SWCC Corp filed Critical SWCC Corp
Priority to JP2024561995A priority Critical patent/JP7709624B1/ja
Priority to CN202380036168.5A priority patent/CN120077158B/zh
Priority to PCT/JP2023/035495 priority patent/WO2025069337A1/ja
Priority to KR1020247036496A priority patent/KR102770394B1/ko
Priority to TW113136701A priority patent/TW202513825A/zh
Priority to US18/932,615 priority patent/US12305269B2/en
Publication of WO2025069337A1 publication Critical patent/WO2025069337A1/ja
Priority to JP2025113097A priority patent/JP7789257B2/ja
Anticipated expiration legal-status Critical
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/001—Continuous casting of metals, i.e. casting in indefinite lengths of specific alloys
    • B22D11/004—Copper alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/08—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells

Definitions

  • the present invention therefore aims to obtain a copper-silver alloy sheet with excellent hardness and an electrode sheet for a probe card.
  • a preferred embodiment of the present invention which has been made to solve the above problems, is a method for manufacturing a copper-silver alloy sheet material, which includes at least the steps of: (a) obtaining a base material having a thickness or diameter of 6 to 30 mm by continuous casting of a copper-silver alloy; (b) performing a rolling process on the base material at least once to obtain a sheet material having a thickness of 0.01 to 0.10 mm; and (c) performing an annealing process on the sheet material, wherein the sheet material that has undergone step (c) has a Vickers hardness of 280 HV or more.
  • Another aspect of the present invention is a method for manufacturing an electrode sheet for a probe card, which includes at least the steps of: (a) obtaining a base material having a thickness or diameter of 6 to 30 mm by continuous casting of a copper-silver alloy; (b) performing a rolling process on the base material at least once to obtain a sheet material having a thickness of 0.01 to 0.10 mm; and (c) performing an annealing process on the sheet material, and is characterized in that the electrode sheet made of the sheet material that has undergone (c) has a Vickers hardness of 280 HV or more.
  • the present invention makes it possible to obtain a copper-silver alloy sheet with excellent hardness and an electrode sheet for a probe card.
  • FIG. 2 is a flow chart showing steps of a method for manufacturing a copper-silver alloy sheet material according to the present invention.
  • the method for producing a copper-silver alloy sheet material according to the present invention mainly includes at least a substrate forming step, a sheet material forming step, and an annealing step. Each step will be described in detail below.
  • the base material forming step is a step for forming a base material of a predetermined shape made of a copper-silver alloy.
  • composition of the copper-silver alloy to be melted is not particularly limited, and can be appropriately designed according to the properties required for the intended use of the completed sheet material.
  • the sheet material obtained by the manufacturing method according to the present invention is used as an electrode sheet for a probe card, the following composition can be adopted from the viewpoint of obtaining high hardness.
  • a continuous casting method for forming the substrate involves extracting a long continuous casting by gradually pulling out the molten metal while it cools and solidifies in a mold.
  • the alloy constituent elements are easily dispersed uniformly, so that the solution treatment consisting of high-temperature heat treatment and rapid cooling steps can be omitted.
  • the continuous casting method makes it easy to control the structure of the base material during continuous casting (e.g., control of the crystal grain size in anticipation of the characteristics of the final shape of the sheet material, control of the precipitation layer to be left at the grain boundaries, etc.).
  • the crystal grain size that has been thinned in advance can be maintained until the final shape of the sheet material, thereby improving the hardness and strength of the sheet material. Furthermore, if the crystal grain size of the sheet material can be reduced by appropriately controlling the above-mentioned structure morphology, the generation of burrs can be suppressed when the sheet material is cut, and an improvement in yield can be expected.
  • cross-sectional shape of substrate is not particularly limited, and a circular shape, rectangular shape, etc. can be appropriately selected depending on the application of the completed sheet material.
  • the sheet material is to be used for busbar applications with a low aspect ratio (ratio of thickness to width) and a thickness of 0.5 mm or more, it is preferable for the cross-sectional shape of the substrate to be circular. This is because it is beneficial in terms of processing rectangular conductors for carrying large currents.
  • the processing limit is reached at a relatively thick stage, and cracks occur severely, especially at the edge part. This leads to an increase in the number of heat treatment steps, leading to an increase in manufacturing costs. In addition, it is thought that problems such as the difficulty of optimizing the heat treatment conditions increasing and reproducibility becoming difficult to obtain may occur, and this is to avoid these problems.
  • the casting speed of the substrate is not particularly limited, and can be appropriately designed depending on the properties required of the completed sheet material.
  • the casting speed is preferably set to 50 to 1000 mm/min, and more preferably 100 to 300 mm/min.
  • the sheet material forming step is a step for processing a base material to a predetermined thickness and forming it into a sheet-like member (sheet material).
  • This step includes at least a rolling treatment.
  • the number of times the rolling process is performed in this process is not particularly limited, and may be appropriately designed taking into account the thickness and characteristics of the base material that is the starting point of this process and the thickness and characteristics of the sheet material that is the destination of this process.
  • the heating time in this step is not particularly limited because the optimal time varies depending on the heating temperature described above. However, when the heating temperature is in the range of 200 to 500° C., it is preferably in the range of about 60 to 4,500 minutes.
  • the thickness of the sheet material after this step is not particularly limited, but when the sheet material is used for electrodes of a probe card, it is preferable that the thickness is 0.025 to 0.050 mm.
  • test specimens 3 and 4 and test specimens 6 to 10 were able to obtain the Vickers hardness (280 HV or more) and conductivity (38% IACS or more) required for electrode sheets of probe cards.

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  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Metal Rolling (AREA)
PCT/JP2023/035495 2023-09-28 2023-09-28 銅銀合金製のシート材の製造方法およびプローブカードの電極用シートの製造方法 Pending WO2025069337A1 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2024561995A JP7709624B1 (ja) 2023-09-28 2023-09-28 銅銀合金製のシート材の製造方法およびプローブカードの電極用シートの製造方法
CN202380036168.5A CN120077158B (zh) 2023-09-28 2023-09-28 铜银合金制的片材的制造方法和探针卡的电极用片的制造方法
PCT/JP2023/035495 WO2025069337A1 (ja) 2023-09-28 2023-09-28 銅銀合金製のシート材の製造方法およびプローブカードの電極用シートの製造方法
KR1020247036496A KR102770394B1 (ko) 2023-09-28 2023-09-28 구리은 합금제의 시트재의 제조 방법 및 프로브 카드의 전극용 시트의 제조 방법
TW113136701A TW202513825A (zh) 2023-09-28 2024-09-26 銅銀合金製之片材之製造方法及探針卡之電極用片之製造方法
US18/932,615 US12305269B2 (en) 2023-09-28 2024-10-31 Method of manufacturing sheet material made of copper-silver alloy and method of manufaturing sheet for electrode of probe card
JP2025113097A JP7789257B2 (ja) 2023-09-28 2025-07-03 銅銀合金製のシート材の製造方法およびプローブカードの電極用シートの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/035495 WO2025069337A1 (ja) 2023-09-28 2023-09-28 銅銀合金製のシート材の製造方法およびプローブカードの電極用シートの製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/932,615 Continuation US12305269B2 (en) 2023-09-28 2024-10-31 Method of manufacturing sheet material made of copper-silver alloy and method of manufaturing sheet for electrode of probe card

Publications (1)

Publication Number Publication Date
WO2025069337A1 true WO2025069337A1 (ja) 2025-04-03

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ID=94826211

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PCT/JP2023/035495 Pending WO2025069337A1 (ja) 2023-09-28 2023-09-28 銅銀合金製のシート材の製造方法およびプローブカードの電極用シートの製造方法

Country Status (6)

Country Link
US (1) US12305269B2 (https=)
JP (2) JP7709624B1 (https=)
KR (1) KR102770394B1 (https=)
CN (1) CN120077158B (https=)
TW (1) TW202513825A (https=)
WO (1) WO2025069337A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000282157A (ja) * 1999-01-29 2000-10-10 Furukawa Electric Co Ltd:The 箔導体
JP2019026921A (ja) * 2017-08-03 2019-02-21 株式会社徳力本店 電気・電子機器用Ｃｕ合金及びそれを用いたプローブピン

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4143086B2 (ja) 2005-12-20 2008-09-03 日立電線株式会社 極細銅合金線、極細銅合金撚線及びそれらの製造方法
JP6155923B2 (ja) * 2013-07-16 2017-07-05 住友電気工業株式会社 銅−銀合金線の製造方法
TWI873415B (zh) * 2017-08-10 2025-02-21 日商田中貴金屬工業股份有限公司 高強度與高導電性的銅合金板材及其製造方法
JP7213083B2 (ja) * 2018-11-05 2023-01-26 Ｄｏｗａメタルテック株式会社 銅合金板材およびその製造方法
CN111363948B (zh) 2020-04-24 2021-11-09 浙江大学 一种高强高导铜合金的高效短流程制备方法
CN114318046A (zh) * 2021-12-03 2022-04-12 中南大学 一种抗菌抑菌的合金型材及其制备方法和应用
CN114645153B (zh) * 2022-03-17 2023-01-24 东北大学 一种高强高导铜银合金丝及其制备方法
JP7322247B1 (ja) * 2022-06-07 2023-08-07 Ｓｗｃｃ株式会社 Ｃｕ－Ａｇ合金線およびその製造方法
US12148545B2 (en) * 2022-06-08 2024-11-19 Swcc Corporation Conductive wire for electrical properties testing and method for producing the same
CN116287846B (zh) * 2023-02-17 2026-02-24 宁波博威合金材料股份有限公司 一种高强高导铜银合金及其制备方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000282157A (ja) * 1999-01-29 2000-10-10 Furukawa Electric Co Ltd:The 箔導体
JP2019026921A (ja) * 2017-08-03 2019-02-21 株式会社徳力本店 電気・電子機器用Ｃｕ合金及びそれを用いたプローブピン

Also Published As

Publication number Publication date
CN120077158B (zh) 2026-01-23
TW202513825A (zh) 2025-04-01
US20250109470A1 (en) 2025-04-03
CN120077158A (zh) 2025-05-30
JP7789257B2 (ja) 2025-12-19
US12305269B2 (en) 2025-05-20
JP7709624B1 (ja) 2025-07-16
JPWO2025069337A1 (https=) 2025-04-03
KR102770394B1 (ko) 2025-02-21
JP2025134999A (ja) 2025-09-17

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