WO2024202412A1 - Dispositif de traitement au plasma - Google Patents
Dispositif de traitement au plasma Download PDFInfo
- Publication number
- WO2024202412A1 WO2024202412A1 PCT/JP2024/001070 JP2024001070W WO2024202412A1 WO 2024202412 A1 WO2024202412 A1 WO 2024202412A1 JP 2024001070 W JP2024001070 W JP 2024001070W WO 2024202412 A1 WO2024202412 A1 WO 2024202412A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plasma
- water vapor
- gas
- plasma processing
- atmospheric pressure
- Prior art date
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 78
- 239000000463 material Substances 0.000 claims abstract description 14
- 229920005989 resin Polymers 0.000 claims abstract description 13
- 239000011347 resin Substances 0.000 claims abstract description 13
- 230000001678 irradiating effect Effects 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 13
- 238000004113 cell culture Methods 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims 2
- 230000000996 additive effect Effects 0.000 claims 2
- 238000003672 processing method Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 description 99
- 239000004020 conductor Substances 0.000 description 22
- 239000000498 cooling water Substances 0.000 description 15
- 238000001816 cooling Methods 0.000 description 9
- 239000004793 Polystyrene Substances 0.000 description 8
- 229920002223 polystyrene Polymers 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910021642 ultra pure water Inorganic materials 0.000 description 6
- 239000012498 ultrapure water Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 230000001464 adherent effect Effects 0.000 description 2
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- 229920001721 polyimide Polymers 0.000 description 2
- 229920005990 polystyrene resin Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000035755 proliferation Effects 0.000 description 2
- 239000003570 air Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
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- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
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- 230000005855 radiation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Images
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- Plasma Technology (AREA)
Abstract
La présente invention concerne un dispositif de traitement au plasma capable de commander la quantité de vapeur d'eau ajoutée à un gaz de fonctionnement et la distance d'irradiation et de commander largement la mouillabilité de la surface d'un matériau de résine qui est l'objet. Ce dispositif de traitement au plasma effectue un traitement au plasma par irradiation d'un objet (80) avec du plasma atmosphérique (99). Le dispositif de traitement au plasma comprend : un récipient de génération de bulles (64) pour ajouter de la vapeur d'eau à un gaz de fonctionnement ; un dispositif de mesure de point de rosée (31) pour ajuster la quantité de vapeur d'eau ajoutée au gaz de fonctionnement ; une unité de génération de plasma (90) pour générer un plasma à pression atmosphérique par application d'une puissance haute fréquence au gaz de fonctionnement dans lequel la quantité de vapeur d'eau ajoutée a été ajustée ; une unité de distribution de plasma (91) pour distribuer le plasma à pression atmosphérique vers l'objet ; et une unité d'ajustement de distance d'irradiation (400) pour ajuster la distance d'irradiation de plasma (L1) de l'unité de distribution de plasma à l'objet.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023059141 | 2023-03-31 | ||
| JP2023-059141 | 2023-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2024202412A1 true WO2024202412A1 (fr) | 2024-10-03 |
Family
ID=92904927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2024/001070 WO2024202412A1 (fr) | 2023-03-31 | 2024-01-17 | Dispositif de traitement au plasma |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO2024202412A1 (fr) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5247152A (en) * | 1991-02-25 | 1993-09-21 | Blankenship George D | Plasma torch with improved cooling |
| JP2003109794A (ja) * | 2001-09-28 | 2003-04-11 | Haiden Kenkyusho:Kk | プラズマ発生方法及びプラズマ発生装置 |
| JP2004165186A (ja) * | 2002-11-08 | 2004-06-10 | Matsushita Electric Works Ltd | 樹脂供給方法及び樹脂供給システム |
| JP2016513341A (ja) * | 2013-02-15 | 2016-05-12 | パイロジェネシス・カナダ・インコーポレーテッド | 高出力ｄｃ非転移蒸気プラズマトーチシステム |
| JP2021099922A (ja) * | 2019-12-20 | 2021-07-01 | Dic株式会社 | 脱色方法 |
-
2024
- 2024-01-17 WO PCT/JP2024/001070 patent/WO2024202412A1/fr unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5247152A (en) * | 1991-02-25 | 1993-09-21 | Blankenship George D | Plasma torch with improved cooling |
| JP2003109794A (ja) * | 2001-09-28 | 2003-04-11 | Haiden Kenkyusho:Kk | プラズマ発生方法及びプラズマ発生装置 |
| JP2004165186A (ja) * | 2002-11-08 | 2004-06-10 | Matsushita Electric Works Ltd | 樹脂供給方法及び樹脂供給システム |
| JP2016513341A (ja) * | 2013-02-15 | 2016-05-12 | パイロジェネシス・カナダ・インコーポレーテッド | 高出力ｄｃ非転移蒸気プラズマトーチシステム |
| JP2021099922A (ja) * | 2019-12-20 | 2021-07-01 | Dic株式会社 | 脱色方法 |
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