WO2024018758A1 - Dispositif de mesure de forme et procédé de mesure de forme - Google Patents

Dispositif de mesure de forme et procédé de mesure de forme Download PDF

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Publication number
WO2024018758A1
WO2024018758A1 PCT/JP2023/019832 JP2023019832W WO2024018758A1 WO 2024018758 A1 WO2024018758 A1 WO 2024018758A1 JP 2023019832 W JP2023019832 W JP 2023019832W WO 2024018758 A1 WO2024018758 A1 WO 2024018758A1
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Prior art keywords
measuring device
shape measuring
shape
measurement
articulated robot
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PCT/JP2023/019832
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English (en)
Japanese (ja)
Inventor
正浩 渡辺
達雄 針山
兼治 丸野
弘人 秋山
英彦 神藤
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株式会社日立ハイテク
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Publication of WO2024018758A1 publication Critical patent/WO2024018758A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object

Definitions

  • the present invention relates to a shape measuring device and a shape measuring method.
  • the present invention claims priority of the Japanese patent application number 2022-115246 filed on July 20, 2022, and for designated countries where incorporating by reference to documents is permitted, the contents described in that application are Incorporated into this application by reference.
  • Patent Document 1 discloses a technique in which a rotating rotor is attached to the tip of the Z axis of an XYZ stage of a three-dimensional coordinate measuring system, and a probe is attached at a position offset from the rotor axis by a radius R. discloses a technique for measuring the shape of an object by rotating a rotor to rotate a probe.
  • the present invention has been made in view of the above points, and when an articulated robot is adopted as a shape measuring device, it is possible to accurately measure the shape of an object without adding an additional drive shaft to the articulated robot.
  • the purpose is to measure.
  • the present application includes a plurality of means for solving at least part of the above problems, examples of which are as follows.
  • a shape measuring device includes an articulated robot having a plurality of drive axes, and a non-contact ranging sensor attached to the articulated robot.
  • the articulated robot scans the object with the measurement light emitted from the non-contact distance measurement sensor by driving only one predetermined axis among the plurality of drive axes.
  • an articulated robot when employed as a shape measuring device, it is possible to measure the shape of an object with high precision without adding an additional drive shaft to the articulated robot.
  • FIG. 1 is a schematic diagram showing an example of a shape measuring device according to a first embodiment of the present invention.
  • FIG. 2 is a schematic diagram showing a configuration example of a measurement probe.
  • FIG. 3 is a schematic diagram showing a modification of the measurement probe.
  • FIG. 4 is a schematic diagram showing another modification of the measurement probe.
  • FIG. 5 is a diagram for explaining a first example of a method for scanning a measurement probe and processing a measured profile.
  • FIG. 6 is a diagram for explaining a second example of a method for scanning a measurement probe and processing a measured profile.
  • FIG. 7 is a diagram showing a modification of the tip of the probe.
  • FIG. 1 is a schematic diagram showing an example of a shape measuring device according to a first embodiment of the present invention.
  • FIG. 2 is a schematic diagram showing a configuration example of a measurement probe.
  • FIG. 3 is a schematic diagram showing a modification of the measurement probe.
  • FIG. 4 is a schematic diagram showing another modification of
  • FIG. 8 is a diagram for explaining an example of a method for scanning a measurement probe and processing a measured profile corresponding to a modified example of the tip of the probe.
  • FIG. 9 is a schematic diagram showing an example of a shape measuring device according to the second embodiment of the present invention.
  • FIG. 10 is a diagram illustrating a configuration example of a shape measurement system including a shape measurement device.
  • FIG. 1 shows a configuration example of a shape measuring device 1001 according to the first embodiment of the present invention.
  • the shape measuring device 1001 includes an articulated robot 500, a measurement probe 160, and a sample stage 330.
  • the articulated robot 500 is, for example, a 6-axis vertical articulated robot having six drive axes A1 to A6.
  • the measurement probe 160 corresponds to the non-contact ranging sensor of the present invention.
  • the measurement probe 160 is fixed to a flange 502 provided at an end 501 of the arm L3 of the articulated robot 500.
  • the measurement probe 160 is moved by the articulated robot 500 to approach the target object T from various positions, various postures, and various directions, and emits measurement light from its tip to measure the target object T. Measure the shape.
  • the relative positional relationship of the sample stage 330 on which the object T is placed with the articulated robot 500 is fixed. If possible, it is desirable to mount the object T by pressing it against a predetermined position on the sample stage 330 so that the position of the object T on the sample stage 330 can be mounted with good reproducibility. In this case, the position of the object T can be accurately measured by measuring two or more alignment marks 340 formed on the sample stage 330 with the measurement probe 160. Alternatively, the position of the object T may be accurately measured by measuring the characteristic shape of the object T itself.
  • the positions of three surfaces surrounding the corner are measured using measurement light, and the positions and orientations of surfaces that are not perpendicular to each other are measured using measurement light at three or more points for each surface.
  • the positions of a plurality of holes on the object T may be measured using measurement light.
  • the CAD (Computer Aided Design) data of the object T acquired in advance will be used to automatically approach the arbitrary shape (plane, etc.) of the object T and locate the object.
  • the shape of the object T can be measured.
  • the measurement probe ejected from the measurement probe 160 should be used to prevent the probe tip 164 of the measurement probe 160 from accidentally colliding with the object T due to errors in CAD data, position errors of the articulated robot 500, etc.
  • Control is performed by switching the direction of light to the first direction 300a or the second direction 300b so that the distance to the object T does not become less than a predetermined threshold. This makes it possible to measure the three-dimensional shape of the object T.
  • FIG. 2 shows an example of the configuration of the measurement probe 160.
  • the measurement probe 160 is connected to the probe control device 200 via the connection cable 150.
  • the probe control device 200 outputs measurement light generated by a built-in distance measurement light source to the measurement probe 160 via the connection cable 150.
  • connection cable 150 includes an optical fiber that propagates the measurement light, and guides the measurement light to the measurement probe 160. Further, reflected light from the target object T is guided to the probe control device 200.
  • the measurement probe 160 irradiates the object T with the measurement light input from the probe control device 200 and outputs the reflected light from the object T to the probe control device 200.
  • the measurement probe 160 includes a lens system 161, a rotation mechanism 162, an optical path switching element 163, a probe tip 164, a polarization state control section 165, and a polarization state control section drive section 166.
  • the lens system 161 focuses the measurement light input from the probe control device 200 via the connection cable 150 and guides it to the polarization state control section 165.
  • the rotation mechanism 162 includes a motor and the like. The rotation mechanism 162 rotates the probe tip 164 around a rotation axis C parallel to the measurement light input from the lens system 161 under control from the probe control device 200.
  • the optical path switching element 163 is composed of, for example, a polarizing beam splitter.
  • the optical path switching element 163 has an optical path switching function, and allows the measurement light whose polarization state is controlled by the polarization state control unit 165 to travel in the same direction as the measurement light output from the lens system 161 according to the polarization direction.
  • the measurement light is selectively emitted toward a first direction 300a or a second direction 300b substantially orthogonal to the first direction 300a.
  • the measurement light emitted in the first direction 300a will be referred to as measurement light 300a
  • the measurement light emitted in the second direction 300b will be referred to as measurement light 300b.
  • the probe tip 164 locks the optical path switching element 163 and allows the light emitted from the optical path switching element 163 to pass therethrough.
  • the probe tip 164 has a cylindrical shape with an opening in the first direction 300a, and locks the optical path switching element 163 with at least a portion of the inner wall.
  • the probe tip 164 is rotated around the rotation axis C by the rotation mechanism 162. As the probe tip 164 rotates, the optical path switching element 163 to which the probe tip 164 locks also rotates.
  • the configuration of the probe tip 164 is not limited to the configuration example described above.
  • the optical path switching element 163 may be locked by one or more pillars, and the optical path switching element 163 may be rotated as the pillars are driven.
  • the probe tip portion 164 may be made of, for example, a transparent two-layer tube, and the inner tube may lock the optical path switching element 163 and rotate the optical path switching element 163.
  • the polarization state control unit 165 is composed of, for example, a wave plate or a liquid crystal element, and controls the polarization of the measurement light input from the lens system 161 under control from the probe control device 200 (FIG. 10). Specifically, the polarization state control unit 165 can change the polarization direction of the measurement light input from the lens system 161.
  • the polarization state control unit driving unit 166 rotationally drives the polarization state control unit 165 to change the polarization direction of the measurement light input from the lens system 161.
  • the measurement light input from the probe control device 200 via the connection cable 150 reaches the polarization state control section 165 via the lens system 161, and the polarization state control section 165 controls the polarization of the measurement light. and reaches the optical path switching element 163.
  • the measurement light 300a that has passed through the optical path switching element 163 according to the polarization direction reaches the object T through the opening of the probe tip 164.
  • the reflected light reflected or scattered by the target object T travels in the opposite direction to the path of the emitted measurement light 300a, that is, in the order of the optical path switching element 163, the polarization state control unit 165, the lens system 161, and the connection cable 150. and reaches the probe control device 200.
  • the probe control device 200 photoelectrically converts the reflected light that has arrived into an electrical signal, and calculates the distance to the target object T.
  • the photoelectric conversion of the reflected light is performed by the probe control device 200, but a photoelectric conversion means (not shown) is provided in the measurement probe 160 to convert the electrical signal corresponding to the reflected light. , may be output from the measurement probe 160 to the probe control device 200.
  • the polarization state control unit 165 controls the polarization to emit the measurement light 300a, and the measurement light 300a is emitted to the bottom of the hole 311. Depth can be measured.
  • the measurement light 300b emitted laterally from the optical path switching element 163 according to the polarization direction is transmitted through the opening on the side surface of the probe tip 164 or through the wall surface, and is irradiated onto the object T.
  • the reflected light reflected or scattered by the target object T travels backward along the path of the measurement light 300b and reaches the probe control device 200, and the distance to the target object T is calculated.
  • the shape of the side surface of the hole 311 can be measured, for example.
  • the optical path switching element 163 can be rotated along with the rotation of the probe tip 164, so in that case, the shape of the entire circumference of the side surface of the hole 311 can be measured. .
  • the measurement probe 160 can emit the measurement light 300a and the measurement light 300b by switching between them, but this is not necessarily suitable for three-dimensional shape measurement by scanning an articulated robot, which is the main purpose of the present invention. It is not essential to emit the measurement light 300b, and it is sufficient if the measurement light 300a can be emitted.
  • FIG. 3 shows a modification of the measurement probe 160 that emits only the measurement light 300a.
  • This modification is a so-called laser ranging sensor.
  • the rotation mechanism 162, optical path switching element 163, probe tip 164, polarization state control section 165, and polarization state control section driving section 166 are omitted from the configuration example of FIG.
  • FIG. 4 shows another modification of the measurement probe 160.
  • This modification is a so-called laser beam cutting sensor, and includes a lens system 190 that emits measurement light as a sheet-like beam 300c that spreads in a fan shape, and a light receiving section 191 that receives reflected light from the object T.
  • the lens system 190 emits the measurement light as a beam 300c to the object T
  • the light receiving unit 191 images the pattern of lines that shine when the object T is irradiated, and based on the imaging result, the beam 300c is The shape of the irradiated area is measured using the principle of triangulation.
  • a linear beam is emitted to the object T, and the object T is irradiated with light.
  • the measurement probe 160 may employ a displacement sensor that detects the position of one point with the light receiving section 191 and measures the distance of the one point using the triangulation principle.
  • ⁇ Three-dimensional shape measurement of target object T by shape measuring device 100 1 The following is an explanation of three-dimensional shape measurement of the target object T by the shape measuring device 1001 .
  • articulated robots achieve multi-degree-of-freedom motion by combining the movements of multiple rotation axes.
  • the articulated robot 500 (FIG. 1) realizes rotation and vertical movement of an arm L1, which corresponds to a human upper arm, using drive axes A1 and A2, which correspond to human shoulder joints.
  • the multi-joint robot 500 realizes bending and extension of an arm L2, which corresponds to a human forearm, using a drive shaft A3, which corresponds to a human elbow joint.
  • the articulated robot 500 realizes rotation of the arm L2 by the drive shaft A4.
  • the multi-joint robot 500 realizes bending and turning of the arm L3, which corresponds to a human hand, using drive axes A5 and A6, which correspond to human wrist joints.
  • a flange 502 is provided at the end 501 of the arm L3, and a measurement probe 160 is attached to the flange 502 to measure the distance to the object.
  • the articulated robot 500 can position and hold the measurement probe 160 attached to the flange 502 at any position and any posture.
  • errors in the angles of each drive shaft, errors in the distance between the axes, etc. are accumulated and appear, so a position error that usually exceeds 1 mm may occur.
  • the measurement probe 160 when the measurement probe 160 is attached to the flange 502 and the distance to the object T is measured by scanning the measurement probe 160 in a straight line while measuring the step shape on the surface of the object T, the measurement probe 160 is attached to the flange 502. Since the trajectory of 160 cannot maintain a straight line and meanderes, the error affects the measurement results. For example, the error in the trajectory during linear movement may be as small as about 0.2 mm, and as large as exceed 1 mm, depending on the accuracy of the articulated robot 500.
  • one of the drive axes A1 to A6 is selected as the drive axis to be driven when measuring the distance to the target object T, and the selected drive axis and the measurement light emitted from the probe tip 164 are
  • the measurement probe 160 is attached to the flange 502 so that the probe 300a is substantially parallel to the probe 300a. Note that other attachment members (fixing members) other than the flange 502 may be used as long as the measurement probe 160 can be fixed to the articulated robot 500 at a desired position and orientation.
  • the user selects one axis to be driven that can be substantially parallel to the perpendicular to the surface 310 of the object T to be measured or to the axis of the hole 311 to be measured.
  • the user may select a drive axis that is substantially parallel to the perpendicular to the surface scanned by the measurement light 300a. If there are multiple selectable drive shafts, it is desirable to select the drive shaft closest to the tip (in this case, drive shaft A6).
  • the probe tip 164 of the measurement probe 160 is placed parallel to the surface 310 on the object T, or the axis of the hole 311 is What is necessary is to scan along a reference plane 390 perpendicular to .
  • the posture of the articulated robot 500 may be adjusted by appropriately driving the other drive axes A1 to A5 so that the drive axis A6 to be driven is substantially orthogonal to the reference plane 390.
  • the distance between the drive shaft A6 and the measurement light 300a is R, then when the drive shaft A6 is rotated at an angular velocity V, the measurement light will be scanned in an arcuate trajectory at a circumferential velocity VR. .
  • the arc-shaped trajectory at this time rotates only the tip portion of the multi-joint robot 500, which has a small mass, so that vibrations can be suppressed. Furthermore, since only the drive shaft A6 among the six drive shafts A1 to A6 of the articulated robot 500 is moved, it is possible to prevent the trajectory from meandering due to accumulation of errors in each axis.
  • the vibration and meandering width of the scanning trajectory of the measurement light 300a can be suppressed to about 20 ⁇ m to 50 ⁇ m.
  • FIG. 5 is a diagram for explaining a first example of a method of scanning the measurement probe 160 and processing the measured profile.
  • the measurement light 300a from the probe tip 164 is scanned along the reference plane 390.
  • the drive shaft A6 As shown in the upper part of the figure, the measurement light 300a from the probe tip 164 is scanned along the reference plane 390.
  • it is necessary to The position and orientation of the drive shaft A6 are maintained by the remaining drive shafts A1 to A5 of the articulated robot 500 so that the axis of the hole 311 to be measured is located at an offset position.
  • the distance of the probe tip 164 with respect to the reference plane 390 is determined by the accuracy of only the drive axis A6 without being affected by these drive errors. It is possible to realize smooth arc-shaped scanning in which the circumferential velocity VR is constant without vertical fluctuations.
  • the figure on the lower left side of the figure shows the profile 400 of the hole 311 measured in this way.
  • the measured profile 400 corresponds to an arcuate scanning trajectory 410
  • the horizontal axis x411 is the distance along the scanning trajectory 410.
  • What is originally desired to obtain is often a profile corresponding to a straight trajectory passing through the center of the hole 311, so in that case, conversion is performed.
  • the distance r410 of each point along the scanning trajectory 410 from the hole 311 is calculated, and the horizontal axis is converted from x to r.
  • the profile 400 corresponding to the arcuate scanning trajectory 410 can be converted into the profile 401 corresponding to the linear scanning trajectory.
  • the drive axis A6 is tilted with respect to the reference plane 390, and the distance between the scanned measurement probe 160 and the reference plane 390 is no longer constant. Sometimes I put it away. As a result, the measured profile becomes distorted, for example, as shown in profile 402 shown on the lower right side of the figure. For example, if the inclination of the drive shaft A6 with respect to the reference plane 390 is ⁇ , the distance to the reference plane 390 changes into an ellipse like a curved surface 390', and the ratio of the major axis to the minor axis of the ellipse is sin ⁇ becomes.
  • the profile 402 may be converted to the profile 400, and the profile 400 may be converted to the profile 401 based on the obtained elliptical curved surface 390'.
  • the drive shaft A6 closest to the distal end of the articulated robot 500 is selected as the drive shaft to be driven when scanning the measurement probe 160, but if the above conditions are satisfied, Other drive axes may also be selected.
  • the drive shaft A1 may be rotated instead of the drive shaft A6.
  • the scanning trajectory 410 can be made closer to a straight line.
  • the mass and moment of inertia of the rotating part are larger, so the vibration of the scanning trajectory becomes larger, so this method is not suitable for measurements on surfaces other than approximately horizontal surfaces.
  • the articulated robot 500 is a 6-axis vertical articulated robot, but a robot having seven or more redundant drive axes may be employed as the articulated robot 500.
  • the drive axes A1, A2, ... A7 are set in order from the root, the position and attitude of the drive shaft A7 can be adjusted to be approximately perpendicular to the reference plane 390 using the drive axes A1 to A6. It is desirable that the measurement light 300a be scanned by adjusting and rotating only the drive shaft A7.
  • the position and attitude of the drive shaft A6 may be adjusted to be approximately perpendicular to the reference plane 390 using the drive shafts A1 to A5, and the measurement light 300a may be scanned by rotating only the drive shaft A6, and the drive shaft may be driven.
  • the axis A7 may be used to adjust the direction of the measurement light 300a viewed from the drive axis A6.
  • the probe tip 164 is brought closer to the object T having a more complex shape, and the measurement light 300a is scanned. be able to. Further, by rotating the probe tip 164 and emitting the measurement light 300b, even more diverse scanning becomes possible.
  • FIG. 6 is a diagram for explaining a second example of a method of scanning the measurement probe 160 and processing the measured profile.
  • the step shape may not be detected even if it is scanned with the measurement light 300a parallel to the axis of the hole 311.
  • the second method is suitable for such cases.
  • the hole When measuring the right edge of the hole 311, as shown in the upper left side of the figure, the hole should be aligned so that the reference plane 390 that scans the measurement light against the flat surface 310 around the hole 311 is slightly raised to the right.
  • the measurement probe 160 is tilted slightly to the left with respect to the axis 311, and the measurement light 300a is scanned as shown on the left side in the middle of the figure. This makes it possible to obtain a profile 451 that reflects the shape of the right side of the hole 311 and does not reflect the shape of the left side of the hole 311, as shown on the lower left side of the figure.
  • the reference plane 390 for scanning the measurement light with respect to the flat surface 310 around the hole 311 should be tilted slightly upward to the left. Then, the measurement probe 160 is tilted slightly to the right with respect to the axis of the hole 311, and the measurement light 300a is scanned as shown in the middle right side of the figure. This makes it possible to obtain a profile 452 that reflects the shape of the left side of the hole 311 and does not reflect the shape of the right side of the hole 311, as shown on the lower right side of the figure.
  • FIG. 7 shows a modification of the probe tip 164.
  • This modification differs from the probe tip 164 in FIG. 2 in that the optical path switching element 163' that is locked at the tip thereof is tilted compared to the optical path switching element 163 in FIG.
  • Components other than the optical path switching element 163' are common to the components of the measurement probe 160 shown in FIG. 2, and are given the same reference numerals, so their explanation will be omitted.
  • the optical path switching element 163' is made of, for example, a polarizing beam splitter.
  • the optical path switching element 163' has an optical path switching function, and converts the measurement light whose polarization state has been controlled by the polarization state control unit 165 into a first direction that is the same traveling direction as the traveling direction of the measurement light output from the lens system 161.
  • the measurement light is emitted toward at least one of a third direction 300a' that is slightly inclined from the direction 300a, and a second direction 300b that is substantially orthogonal to the first direction 300a.
  • the measurement light in the third direction 300a' will be referred to as measurement light 300a'.
  • the inclination of the third direction 300a' with respect to the first direction 300a is, for example, 0.5 degrees or more and 10 degrees or less.
  • the direction of the measurement light 300a' can be adjusted by rotating the probe tip 164 while keeping the position of the measurement probe 160 fixed.
  • FIG. 8 is a diagram for explaining an example of a method for scanning the measurement probe 160 and processing the measured profile when the modified example is attached to the tip of the articulated robot 500.
  • the measurement probe 160 is moved so that the scanning reference plane 390 and the robot drive axis A6 are substantially perpendicular, and the rotation axis of the probe tip 164 and the axis of the hole 311 are substantially parallel. hold.
  • the rotation angle of the probe tip 164 is controlled so that the tip of the measurement light 300a' is tilted to the right in the drawing, as shown on the left side of the first row in the figure.
  • the drive shaft A6 is rotated to scan the measurement light 300a'.
  • a profile 461 in which the shape of the right side of the hole 311 is reflected and the shape of the left side is not reflected.
  • the rotation angle of the probe tip 164 is controlled so that the tip of the measurement light 300a' is tilted to the left in the drawing, as shown on the right side of the first row in the figure. Then, as shown on the right side of the second stage in the figure, the drive shaft A6 is rotated to scan. As a result, as shown on the right side of the third row in the same figure, it is possible to obtain a profile 462 in which the shape of the left side of the hole 311 is reflected and the shape of the right side is not reflected.
  • the two obtained profiles 461 and 462 are obliquely distorted by the amount that the measurement light 300a' is inclined from the perpendicular to the reference plane 390. Therefore, as shown in the fourth row of the figure, distortion is removed from the profiles 461 and 462, and the resulting profiles 461' and 462' are combined. This makes it possible to measure the shape of a narrow step inside the hole 311, a slightly overhanging shape (not shown), and the like.
  • FIG. 9 shows a configuration example of a shape measuring device 1002 according to a second embodiment of the present invention.
  • the shape measuring device 1002 replaces the articulated robot 500, which is a 6-axis vertical articulated robot in the shape measuring device 1001 (FIG. 1) of the first embodiment, with an articulated robot 500 that employs a SCARA robot. '.
  • Components of the shape measuring device 100 2 other than the articulated robot 500' are the same as those of the shape measuring device 100 1 (FIG. 1), so the same reference numerals are given and the description thereof will be omitted.
  • the articulated robot 500' has drive axes A1, A2, and A3 whose rotation axes are in the vertical direction. Furthermore, the articulated robot 500' has an elevating section 510 that moves the end section 501 up and down in the same axis direction (Z direction) as the drive shaft A3 at the tip. The articulated robot 500' determines the position of the end portion 501 on the XY plane by turning the drive shafts A1 and A2. Furthermore, the articulated robot 500' determines the Z coordinate of the end portion 501 by lifting and lowering the lifting section 510. Note that instead of or in addition to the elevating section 510, an elevating section that moves up and down in the same axial direction as the drive shaft A1 or the drive shaft A2 may be provided.
  • a measurement probe 160 is attached to a flange 502 provided at an end 501 of the articulated robot 500'. At this time, the probe is mounted so that the drive shaft A3 and the measurement light 300a emitted from the probe tip 164 are substantially parallel. In this case, the emission direction of the measurement light 300a is vertical. Therefore, this embodiment is suitable for measuring the shape of a horizontal surface of the object T, a hole opened in the horizontal surface, and the like.
  • the measurement light moves in an arcuate trajectory at a circumferential velocity VR.
  • the trajectory rotates only the tip portion of the multi-joint robot 500', which has a small mass, so that vibrations can be suppressed.
  • the drive axes A1 to A3 which are the drive mechanisms of the articulated robot 500', and the elevating section 510, only the drive shaft A3 is moved, so it is possible to prevent the trajectory from meandering due to accumulation of errors in each drive part. .
  • the same scanning as described above may be realized by rotating only the drive shaft A1 or only the drive shaft A2 among the drive mechanisms included in the articulated robot 500'.
  • the drive shaft A3 at the tip of the articulated robot 500' may be a fixed shaft that does not rotate.
  • the measurement light 300b is emitted from the probe tip 164, and only the lifting section 510 of the drive mechanism of the articulated robot 500' is moved to measure the depth profile of the hole 311. It is also possible. In this case, only one driving portion is required and highly accurate scanning of the measurement light is possible. Note that the direction of the measurement light 300b can be arbitrarily adjusted by the rotation angle of the probe tip 164 or the rotation of the drive shaft A3 of the articulated robot 500'. Moreover, in this case, it is also possible to measure the shape of the outer surface of the object T by vertically irradiating the outer surface of the object T with the measurement light 300b.
  • shape measuring device 100 when it is not necessary to distinguish the shape measuring devices 100 1 and 100 2 individually, they will be referred to as the shape measuring device 100.
  • FIG. 10 shows a configuration example of a measurement system including the shape measurement device 100.
  • the measurement system includes a shape measurement device 100, a manufacturing device 700, and a data processing device 701 that are connected via a network N such as a LAN (Local Area Network) or a WAN (Wide Area Network).
  • a network N such as a LAN (Local Area Network) or a WAN (Wide Area Network).
  • the shape measuring device 100 includes the above-mentioned measurement probe 160, probe control device 200, and articulated robot 500, as well as a robot control device 215, a display device 220, a shape data processing device 221, and an overall control device 225.
  • the overall control device 225 measures the 3D shape of the object T by causing the robot control device 215 to control the articulated robot 500 and the probe control device 200 to control the measurement probe 160.
  • the overall control device 225 outputs the position and orientation information of the articulated robot 500 obtained from the robot control device 215 and the 3D shape data obtained by the measurement probe 160 obtained from the probe control device 200 to the shape data processing device 221.
  • the shape data processing device 221 corresponds to the conversion section and correction section of the present invention.
  • the shape data processing device 221 synthesizes overall 3D shape data of the object T based on the position and orientation information of the articulated robot 500 and the 3D shape data from the measurement probe 160. That is, since the 3D shape data of the target object T obtained from the measurement probe 160 is relative data with respect to the position and orientation of the measurement probe 160 at the time of measurement, the shape data processing device 221 uses the position and orientation information of the articulated robot 500.
  • the overall 3D shape data of the object T is synthesized by calculating the position and orientation of the measurement probe 160 at the time of measurement, and converting the 3D shape data into a reference coordinate system.
  • the shape data processing device 221 analyzes the obtained overall 3D shape data of the object T or 3D shape data of individual narrow parts of the object T, and based on the design information of the object T. , calculate the error between the designed shape and the actual shape of the object T, calculate the dimensional information such as the depth, diameter, and pitch of the hole, and calculate the cylindricity, straightness, flatness, etc. Calculate geometric tolerance information.
  • the overall control device 225 causes the display device 220 to display the calculation results by the shape data processing device 221.
  • the overall control device 225 outputs the calculation results by the shape data processing device 221 to the data processing device 701 via the network N.
  • the data processing device 701 stores the calculation results by the shape data processing device 221 in the storage device 702. Then, the data processing device 701 analyzes the error of the object T based on the calculation results by the shape data processing device 221 stored in the storage device 702, and controls the manufacturing device 700 that processed the object T. Specifically, the data processing device 701 instructs the manufacturing device 700 to replace a tool, or to change machining conditions such as tool size correction amount, machining path, and machining speed. In addition, the data processing device 701 instructs the manufacturing device 700 to change the amount of finishing processing, and in the assembly process of assembling the objects T, takes into account shape errors between the objects T to be assembled. Specify the combination of objects T to be assembled.
  • the present invention is not limited to the embodiments described above, and various modifications are possible.
  • the embodiments described above have been described in detail to explain the present invention in an easy-to-understand manner, and the present invention is not necessarily limited to having all the configurations described. Further, it is possible to replace or add a part of the configuration of one embodiment to the configuration of another embodiment.
  • each of the above-mentioned configurations, functions, processing units, processing means, etc. may be partially or entirely realized by hardware, for example, by designing an integrated circuit.
  • each of the above configurations, functions, etc. may be realized by software by a processor interpreting and executing a program for realizing each function.
  • Information such as programs, tables, files, etc. that implement each function can be stored in a memory, a recording device such as a hard disk, an SSD, or a recording medium such as an IC card, an SD card, or a DVD.
  • the control lines and information lines are shown to be necessary for explanation purposes, and not all control lines and information lines are necessarily shown in the product. In reality, almost all components may be considered to be interconnected.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Lorsqu'un robot à articulations multiples est adopté dans ce dispositif de mesure de forme, la forme d'un objet cible est mesurée avec précision sans ajouter d'axe d'entraînement supplémentaire au robot à articulations multiples.　Le dispositif de mesure de forme comprend : un robot à articulations multiples ayant une pluralité d'axes d'entraînement ; et un capteur de distance sans contact fixé au robot à articulations multiples, le robot à articulations multiples entraînant un axe prédéterminé parmi la pluralité d'axes d'entraînement, balayant ainsi l'objet cible, avec une lumière de mesure émise par le capteur de distance sans contact.
PCT/JP2023/019832 2022-07-20 2023-05-29 Dispositif de mesure de forme et procédé de mesure de forme WO2024018758A1 (fr)

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JP2022115246A JP2024013286A (ja) 2022-07-20 2022-07-20 形状計測装置、及び形状計測方法
JP2022-115246 2022-07-20

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0285709A (ja) * 1988-09-22 1990-03-27 Hitachi Ltd 多関節ロボットを用いた物体計測方法と計測装置
JP2004157088A (ja) * 2002-11-08 2004-06-03 Isuzu Motors Ltd ねじ特性の測定方法および測定装置
JP2013246151A (ja) * 2012-05-29 2013-12-09 Jfe Steel Corp コイル形状測定装置及びコイル形状測定方法
JP2018169160A (ja) * 2015-08-31 2018-11-01 株式会社ニコン 表面形状測定装置
JP2020165667A (ja) * 2019-03-28 2020-10-08 株式会社東京精密 形状測定機及びその制御方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0285709A (ja) * 1988-09-22 1990-03-27 Hitachi Ltd 多関節ロボットを用いた物体計測方法と計測装置
JP2004157088A (ja) * 2002-11-08 2004-06-03 Isuzu Motors Ltd ねじ特性の測定方法および測定装置
JP2013246151A (ja) * 2012-05-29 2013-12-09 Jfe Steel Corp コイル形状測定装置及びコイル形状測定方法
JP2018169160A (ja) * 2015-08-31 2018-11-01 株式会社ニコン 表面形状測定装置
JP2020165667A (ja) * 2019-03-28 2020-10-08 株式会社東京精密 形状測定機及びその制御方法

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