WO2023279412A1 - 风刀及清洗设备 - Google Patents

风刀及清洗设备 Download PDF

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Publication number
WO2023279412A1
WO2023279412A1 PCT/CN2021/105746 CN2021105746W WO2023279412A1 WO 2023279412 A1 WO2023279412 A1 WO 2023279412A1 CN 2021105746 W CN2021105746 W CN 2021105746W WO 2023279412 A1 WO2023279412 A1 WO 2023279412A1
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WIPO (PCT)
Prior art keywords
air
airflow
air knife
cleaned
main structure
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PCT/CN2021/105746
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English (en)
French (fr)
Inventor
肖钦豪
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长鑫存储技术有限公司
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Publication date
Application filed by 长鑫存储技术有限公司 filed Critical 长鑫存储技术有限公司
Priority to US17/602,992 priority Critical patent/US20240050996A1/en
Publication of WO2023279412A1 publication Critical patent/WO2023279412A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities

Definitions

  • the present disclosure relates to but not limited to an air knife and cleaning equipment.
  • a pellicle is provided on the surface of the photomask to protect the cleanliness of the photomask and prevent particles or volatile gases from polluting the light. cover surface.
  • a photomask without a photomask protection film is easy to contaminate particles and form a distorted image on the wafer, affecting the quality of the wafer.
  • the photomask protection film is arranged on the surface of the photomask, so that the particles fall onto the photomask protection film, reducing the impact on the graphics on the photomask. Clean the surface of the photomask protective film later to keep it clean.
  • a needle-type air knife is used to clean the photomask protective film.
  • the needle-type air knife is composed of multiple needle tubes, and the needle tubes are easily skewed by external forces, making the angles of multiple needle tubes inconsistent. In the working state, the skewed needle tube makes the surface of the photomask protective film unevenly stressed, and the photomask protective film is easily damaged, which increases the cost of loss.
  • the first aspect of the present disclosure provides an air knife, which includes a main structure, and at least one through hole is opened on the main structure, and the through hole is used as an air flow channel, and the air inlet end of the air flow channel is connected with the gas supply The device is connected, and the airflow direction of the air outlet end of the airflow channel is at a preset angle relative to the object to be cleaned.
  • the second aspect of the present disclosure provides a cleaning device, the cleaning device includes the above-mentioned air knife and the object to be cleaned, the air flow in the air knife flows from the air outlet end of the air knife to the object to be cleaned surface.
  • the through-holes in the main structure are used as airflow channels, and the airflow channels have an embedded structure, so that the airflow direction of the air outlet end of the airflow channel and the object to be cleaned are always At a preset angle, the object to be cleaned will not be damaged due to uneven force, which improves the safety of use. And when the air flow reaches the object to be cleaned, the particles and other pollutants on the surface of the object to be cleaned will move under the influence of the air flow, thereby achieving the cleaning effect.
  • Fig. 1 is a schematic structural diagram of a cleaning device according to an exemplary embodiment.
  • Fig. 2 is a schematic longitudinal sectional view of the cleaning device shown in the exemplary embodiment shown in Fig. 1 .
  • Fig. 3 is a schematic longitudinal sectional view of a main structure shown in an exemplary embodiment of the present disclosure.
  • Fig. 4 is a schematic structural view of a cleaning device shown in an exemplary embodiment of the present disclosure
  • Fig. 5 is a schematic longitudinal sectional view of the cleaning device shown in the exemplary embodiment shown in Fig. 4 .
  • An exemplary embodiment of the present disclosure proposes an air knife.
  • the air knife includes a main structure, and at least one through hole is opened on the main structure.
  • the through hole serves as an air flow channel, and the air inlet end of the air flow channel communicates with the gas supply device.
  • the airflow direction of the air outlet end of the airflow channel is at a preset angle relative to the object to be cleaned.
  • the through-holes in the main body structure in the present disclosure are used as airflow channels, and the airflow channels are embedded structures, so that the airflow direction of the air outlet end of the airflow channel and the object to be cleaned are always at a preset angle, and the object to be cleaned will not Damage occurs due to uneven force, which improves the safety of use. And when the airflow reaches the object to be cleaned, the particles and other pollutants on the surface of the object to be cleaned will move under the influence of the airflow, thereby achieving the cleaning effect.
  • an air knife includes a main structure 1 made of stainless steel so that the main structure 1 has high strength and corrosion resistance, prolonging the service life of the air knife.
  • the main structure 1 is provided with a through-hole 11, and the through-hole 11 serves as an airflow channel for conveying airflow.
  • the air intake end 1111 of the air flow channel communicates with the gas supply device 2, and the gas supply device 2 inputs air flow into the air flow channel through the air intake end 1111 of the air flow channel, and the air flow flows in the air flow channel and is output by the air outlet end 1121 of the air flow channel.
  • the airflow is conveyed to the object 3 to be cleaned through the airflow channel, so as to blow off pollutants such as particles on the surface of the object 3 to be cleaned, and achieve a cleaning effect.
  • the air inlet end 1111 of the gas flow passage can communicate with the gas supply device 2 through the connecting branch pipe 12 , and the connecting branch pipe 12 is fixedly connected with the main structure 1 .
  • the plane connecting the connecting branch pipe 12 and the main structure 1 is the first surface 14 of the main structure 1, and the orthographic area of the connecting branch pipe 12 on the first surface 14 of the main structure 1 is larger than that of the through hole 11 on the first surface of the main structure 1.
  • the area of the orthographic projection on the surface 14 ensures that the connecting branch pipe 12 can cover the air inlet end 1111 of the airflow channel to avoid air leakage.
  • the airflow direction of the output of the air outlet 1121 of the airflow channel (refer to the Z-axis direction shown in Fig. 1 and Fig. 2 ) is at a preset angle relative to the object 3 to be cleaned, so that the surface force of the object 3 to be cleaned is uniform and controllable.
  • the object 3 forms protection to reduce production loss rate.
  • the preset angle can be 15°-25°
  • the airflow direction is set obliquely relative to the object 3 to be cleaned, so that the blowing force of the airflow is moderate, improving the safety of the object 3 to be cleaned during the cleaning process, and avoiding the appearance of the object 3 to be cleaned
  • the phenomenon of breakage, and blow off the particles and other pollutants on the surface of the object 3 to be cleaned so as to ensure the cleanliness of the object 3 to be cleaned.
  • the through-holes 11 opened on the main structure 1 are not limited to one of the above-mentioned ones, and may also be two or more. At least one through hole 11 may be opened on the main structure 1, and the number of the through holes 11 is affected by the size of the object 3 to be cleaned. In order to improve the cleaning effect and ensure that the surface of the object 3 to be cleaned can be blown, the number of through holes 11 can be multiple.
  • an air knife includes a main structure 1, and a plurality of through-holes 11 are opened on the main structure 1, so that the main structure 1 includes a plurality of airflow channels, along the In the first direction of the cleaning object 3 (refer to the Y-axis direction shown in FIG. 1 ), a plurality of airflow passages are arranged at intervals in sequence, so that each airflow passage corresponds to a different position of the object 3 to be cleaned.
  • the airflow at the air outlet end 1121 of the airflow channel can cover the entire surface of the object 3 to be cleaned, avoiding cleaning blind spots, and further improving the cleaning effect.
  • a plurality of air flow channels are located on the same plane, the plane where the multiple air flow channels are located is the first plane, the object 3 to be cleaned is located on the second plane, and the first plane where the multiple air flow channels are located is opposite to the second plane where the object 3 to be cleaned is located Inclined setting, so that there is a preset angle between the first plane and the second plane (with reference to the angle between the Z axis and the X axis shown in Figure 1 and Figure 2), the preset angle can be 15°-25°, To ensure the airflow pressure at the air outlet end 1121 of the airflow channel.
  • the air outlets 1121 of multiple airflow channels output airflow at the same time, and the airflow can take away pollutants such as particles on the surface of the object 3 to be cleaned to ensure the cleanliness of the object 3 to be cleaned.
  • the first plane is parallel to the airflow direction (refer to the Z-axis direction shown in FIG. 1 ), and the second plane is parallel to the surface of the object 3 to be cleaned.
  • each airflow channel is all communicated with the gas supply device 2, so that each airflow channel has an air flow, and the air flow flows out from the air outlet end 1121 of the air flow channel, so as to realize the cleaning of the object 3 to be cleaned.
  • each through-hole 11 is connected with a connecting branch pipe 12, and each connecting branch pipe 12 is connected to the connecting main pipe 13, which is connected to the gas supply device 2 by the connecting main pipe 13.
  • the supply device 2 realizes the air conveying.
  • the airflow channel proposed in the present disclosure has a cylindrical structure, and the airflow channel has a preset inner diameter, which is 0.75mm-1.25mm.
  • the air flow channel concentrates the air flow, controls the working air pressure in the air flow channel, and ensures the normal operation of the air knife.
  • the airflow channel with a preset inner diameter can increase the blowing force of the airflow, and ensure that when the airflow reaches the surface of the object 3 to be cleaned, it can take away pollutants such as particles, so as to achieve the effect of blowing off.
  • the preset air pressure in order to ensure the normal operation of the air knife, there is a preset air pressure in the air flow channel, and the preset air pressure is greater than 0.3Mpa. If there is sufficient pressure in the air flow channel, the force of the air flow output by the air outlet end 1121 of the air flow channel is sufficient. Take away the pollutants such as particles on the surface of the object 3 to be cleaned, so as to achieve the effect of blowing off.
  • the air flow channel is not limited to the above-mentioned cylindrical structure, and may also be a square column structure or the like.
  • the specific shape of the airflow channel can be adjusted according to actual needs.
  • an air knife includes a main structure 1 , and a through hole 11 is opened on the main structure 1 , and the through hole 11 serves as an air flow channel for conveying air flow.
  • the air intake end 1111 of the air flow channel communicates with the gas supply device 2, and the gas supply device 2 inputs air flow into the air flow channel through the air intake end 1111 of the air flow channel, and the air flow flows in the air flow channel and is output by the air outlet end 1121 of the air flow channel.
  • the airflow channel proposed by the present disclosure may include a first channel segment 111 and a second channel segment 112, the first channel segment 111 may be a straight segment, along the first direction of the object 3 to be cleaned (see the X axis shown in FIG. 3 ) extending and parallel to the plane of the object 3 to be cleaned.
  • One end of the first passage section 111 serves as an air inlet end 1111 of the airflow passage for inputting airflow.
  • the other end of the first channel section 111 communicates with one end of the second channel section 112, the second channel section 112 is an inclined section, and the second channel section 112 is inclined relative to the first channel section 111, so that the first channel section 111 and the second channel section
  • the included angle between the segments 112 is a preset included angle, and the preset included angle may be 155°-165°.
  • the other end of the second channel section 112 is used as an air outlet end 1121 of the air flow channel for outputting air flow.
  • the airflow enters the first channel section 111 through the air inlet end 1111 of the airflow channel, and enters the second channel section 112 from the first channel section 111 . After the flowing air flows through the straight section, it reaches the inclined section. Since the inner wall of the inclined section intercepts the airflow, the airflow is buffered to avoid excessive momentum of the airflow at the air outlet end 1121 of the airflow channel, ensuring that it is transported The air flow to the object 3 to be cleaned will not cause damage to the object 3 to be cleaned.
  • an air knife includes a main structure 1 , and a through hole 11 is opened on the main structure 1 , and the through hole 11 is used as an air flow channel for conveying air flow.
  • the air inlet end 1111 of the air flow channel communicates with the gas supply device 2.
  • the specific arrangement and structure of the air flow channel have been described in detail in the above embodiments, and will not be repeated here.
  • the air knife proposed in the present disclosure also includes an airflow adjustment unit 4 connected to the gas supply device 2 to adjust airflow parameters in the airflow channel.
  • the airflow regulating unit 4 includes a mass flow controller (Mass Flow Controller, referred to as MFC), and the mass flow controller may include components such as a circuit board, a sensor, a casing, a regulating valve, and the specific structure of the mass flow controller.
  • MFC Mass Flow Controller
  • the mass flow controller may include components such as a circuit board, a sensor, a casing, a regulating valve, and the specific structure of the mass flow controller.
  • the airflow parameters include but not limited to the flow rate of the airflow in the airflow channel, the flow rate of the airflow in the airflow channel, the working air pressure when the airflow in the airflow channel flows, the quality of the airflow in the airflow channel, and the like.
  • an air knife includes a main structure 1 and an installation part 5 , the main structure 1 is installed on the installation part 5 , and the main structure 1 and the installation part 5 may be an integral structure.
  • the installation part 5 is made of stainless steel to increase the rigidity of the installation part 5 and prolong the service life of the installation part 5 .
  • the installation part 5 is connected to the gas supply device 2 , and the main structure 1 is connected to the gas supply device 2 through the installation part 5 .
  • the main structure 1 is provided with a plurality of through-holes 11, and the through-holes 11 are used as airflow channels for conveying airflow.
  • the installation part 5 is provided with a gas chamber 511, and the inlet end 1111 of each airflow channel is communicated with the gas chamber 511, and the gas chamber 511 is communicated with the gas supply device 2, so that all airflow channels can pass through the gas chamber 511 It communicates with the gas supply device 2 .
  • the gas supply device 2 inputs airflow into the gas chamber 511. When the airflow in the gas chamber 511 is full, the airflow will enter different airflow channels from the gas chamber 511 to realize the delivery of the airflow.
  • the airflow output by the gas supply device 2 is converted by the gas chamber 511.
  • the airflow adjustment unit 4 can be controlled to continuously adjust the parameters, thereby ensuring that the airflow parameters entering the airflow channel are the target parameters . Due to the narrow and limited length of the airflow channel, after the airflow enters the airflow channel, it can quickly reach the air outlet 1121 of the airflow channel, which makes it difficult to control the airflow parameters and affects the cleaning effect.
  • the gas chamber 511 has enough space to accommodate the airflow. When the airflow is in the gas chamber 511, the input state of the airflow can be adjusted through the gas supply device 2 and the airflow adjustment unit 4 to adjust the output parameters of the airflow.
  • the installation part 5 proposed in the present disclosure includes an installation body 51 and an air intake pipe 52 , and a gas chamber 511 is disposed in the installation body 51 .
  • One end of the air inlet pipe 52 communicates with the gas supply device 2 , and the other end of the air inlet pipe 52 passes through the installation body 51 , so that the air inlet pipe 52 can communicate with the gas chamber 511 .
  • the installation body 51 is provided with an opening 512, and the opening 512 is arranged correspondingly to the air inlet end 1111 of the air flow channel, and the gas chamber 511 communicates with the air flow channel through the opening 512.
  • one, two or more intake pipes 52 may be provided.
  • the air intake pipe 52 communicates with the gas chamber 511 and is converted through the gas chamber 511 , so there is no need to install too many air intake pipes 52 .
  • the intake pipe 52 can be specifically adjusted according to actual needs.
  • the main structure 1 is in the shape of a cone
  • the first surface 14 of the main structure 1 is a wide surface
  • the first surface 14 is fixedly connected with the mounting body 51 .
  • the second surface 15 of the main structure 1 is a narrow surface facing the object 3 to be cleaned.
  • the main structure 1 is in the shape of a cone, gradually shrinking from a wide surface to a narrow surface, which reduces materials and reduces the manufacturing cost of the main structure 1 .
  • the lower side of the main structure 1 avoids the object 3 to be cleaned, so as to avoid mutual interference with the object 3 to be cleaned, collision and other phenomena, and further protect the object 3 to be cleaned.
  • the air outlet end 1121 of the airflow channel can be exposed on the upper side of the main structure 1, so as to check the air outlet state of the air outlet end 1121 of the airflow channel. If the air outlet end 1121 of the air flow channel is blocked, it can be repaired and cleaned in time to ensure that the air knife can work normally.
  • the disclosure also proposes a cleaning device, including the air knife in any of the above embodiments and the object to be cleaned, the airflow in the air knife flows from the air outlet end of the air knife to the surface of the object to be cleaned, so as to realize the cleaning of the object to be cleaned .
  • a cleaning device includes an air knife and an object 3 to be cleaned.
  • the air flow in the air knife flows from the air outlet 1121 of the air knife to the surface of the object 3 to be cleaned.
  • the object 3 to be cleaned includes a photomask 31 and a film body 32 .
  • the film body 32 is stacked on the photomask 31 .
  • a pattern is laid on the mask 31 (MASK), and the pattern is replicated on the wafer by photolithography technology to form the pattern required by the semiconductor.
  • the photomask 31 is easily contaminated with particles and other pollutants.
  • the pattern of the photomask 31 is copied on the wafer, a distorted image will be formed on the wafer, affecting the yield of the wafer.
  • the film body 32 is a photomask protection film, and the film body 32 is stacked on the surface of the photomask 31 to protect the cleanliness of the photomask 31 and prevent particles and other pollutants from polluting the photomask 31 to minimize the degree of influence.
  • the embedded structure airflow channel is used to jet out the airflow, and the airflow reaches the surface of the membrane body 32, and the particles and other pollutants on the surface of the membrane body 32 will move under the lateral wind force until they are separated from the surface of the membrane body 32 to achieve the blowing effect.
  • the airflow direction of the air outlet end 1121 of the airflow channel is at a preset angle relative to the surface of the membrane body 32, so that the strength of the airflow on the surface of the membrane body 32 is moderate, the force on the membrane body 32 is uniform, and the damage of the membrane body 32 is avoided, which increases the safety of use .
  • the through-holes in the main structure are used as airflow channels, and the airflow channels have an embedded structure, so that the airflow direction of the air outlet end of the airflow channel and the object to be cleaned are always At a preset angle, the object to be cleaned will not be damaged due to uneven force, which improves the safety of use. And when the air flow reaches the object to be cleaned, the particles and other pollutants on the surface of the object to be cleaned will move under the influence of the air flow, thereby achieving the cleaning effect.

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  • Cleaning In General (AREA)

Abstract

本公开是关于一种风刀及清洗设备，风刀包括主体结构，主体结构上开设有至少一个贯穿通孔，贯穿通孔作为气流通道，气流通道的进气端与气体供给装置连通，气流通道的出气端的气流方向相对待清洗物体呈预设角度。

Description

风刀及清洗设备
本公开要求在2021年07月05日提交中国专利局、申请号为202110758062.9、发明名称为“风刀及清洗设备”的中国专利申请的优先权，其全部内容通过引用结合在本公开中。
技术领域
本公开涉及但不限于一种风刀及清洗设备。
背景技术
随着半导体制造技术的不断发展，光罩的成本费用越来也高，光罩的表面设有光罩保护膜(pellicle)，以用于保护光罩的洁净，防止微粒子或者挥发性气体污染光罩表面。没有光罩保护膜保护的光罩，很容易污染上微粒，并形成一个失真的影像在晶圆上，影响晶片的品质。
光罩保护膜设置于光罩的表面，使得微粒掉落至光罩保护膜上，降低对光罩上的图形的影响。后期对光罩保护膜的表面进行清洁，使其保持洁净。
相关技术中，采用针式风刀对光罩保护膜进行清洁。针式风刀由多个针管组成，针管易受外力而产生歪斜，使多个针管的角度不一致。当工作状态下，歪斜的针管使得光罩保护膜的表面受力不均匀，光罩保护膜易受损，增加了损耗成本。
发明内容
以下是对本公开详细描述的主题的概述。本概述并非是为了限制权利要求的保护范围。
本公开的第一方面提供一种风刀，其包括主体结构，所述主体结构上开设有至少一个贯穿通孔，所述贯穿通孔作为气流通道，所述气流通道的进气端与气体供给装置连通，所述气流通道的出气端的气流方向相对待清洗物体呈预设角度。
本公开的第二方面提供一种清洗设备，所述清洗设备包括如上所述的风刀和待清洗物体，所述风刀内的气流由所述风刀的出气端流向所述待清洗物体的表面。
本公开实施例所提供的风刀及清洗设备中，主体结构内的贯穿通孔，用作气流通道，气流通道呈内嵌式结构，使得气流通道的出气端的气流方向与待清洗物体之间始终呈预设角度，待清洗物体不会因受力不均匀而发生破损，提升了使用的安全性。且当气流至待清洗物体时，待清洗物体表面的微粒等污染物，受气流影响，发生移动，进而达到清洁的效果。
在阅读并理解了附图和详细描述后，可以明白其他方面。
附图说明
此处的附图被并入说明书中并构成本说明书的一部分，示出了符合本发明的实施例，并与说明书一起用于解释本发明的原理。
图1是根据一示例性实施例示出的清洗设备的结构示意图。
图2是图1所示的示例性实施例示出的清洗设备的纵截面示意图。
图3是本公开一个示例性实施例示出的主体结构的纵截面示意图。
图4是本公开一个示例性实施例示出的清洗设备的结构示意图
图5是图4所示的示例性实施例示出的清洗设备的纵截面示意图。
附图标记：
1、主体结构；
11、贯穿通孔；111、第一通道段；1111、进气端；112、第二通道段；1121、出气端；
12、连接支管；13、连接主管；
14、第一面；15、第二面；
2、气体供给装置；
3、待清洗物体；31、光罩；32、膜体；
4、气流调节单元；
5、安装部；
51、安装体；511、气体腔室；512、开口；52、进气管道。
具体实施方式
为使本公开实施例的目的、技术方案和优点更加清楚，下面将结合本公开实施例中的附图，对公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本公开一部分实施例，而不是全部的实施例。基于本公开中的实施例，本领域技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本公开保护的范围。需要说明的是，在不冲突的情况下，本公开中的实施例及实施例中的特征可以相互任意组合。
本公开示例性的实施例中提出一种风刀，风刀包括主体结构，主体结构上开设有至少一个贯穿通孔，贯穿通孔作为气流通道，气流通道的进气端与气体供给装置连通，气流通道的出气端的气流方向相对待清洗物体呈预设角度。本公开中的主体结构内的贯穿通孔，用作气流通道，气流通道呈内嵌式结构，使得气流通道的出气端的气流方向与待清洗物体之间始终呈预设角度，待清洗物体不会因受力不均匀而发生破损，提升了使用的安全性。且当气流至待清洗物体时，待清洗物体表面的微粒等污染物，受气流影响，发生移动，进而达到清洁的效果。
如图1、图2所示，一种风刀，包括主体结构1，主体结构1由不锈钢材料制成，使其主体结构1具有强度高、耐腐蚀的特性，延长了风刀的使用寿命。
主体结构1上开设有贯穿通孔11，贯穿通孔11作为气流通道，用于输送气流。气流通道的进气端1111与气体供给装置2连通，气体供给装置2通过气流通道的进气端1111向气流通道内输入气流，气流在气流通道内流动，由气流通道的出气端1121输出。气流通过气流通道被输送至待清洗物体3，以便于吹除待清洗物体3表面的微粒等污染物，实现清洁的效果。
其中，气流通道的进气端1111可以通过连接支管12与气体供给装置2连通，连接支管12与主体结构1固定连接。连接支管12与主体结构1所连接的平面为主体结构1的第一面14，连接支管12在主体结构1的第一面14上的正投影面积大于贯穿通孔11在主体结构1的第一面14上的正投影面积，保证连接支管12能够罩住气流通道的进气端1111，避免漏气。
气流通道的出气端1121的输出的气流方向(参照图1、图2所示的Z轴 方向)相对待清洗物体3呈预设角度，使待清洗物体3的表面受力均匀可控，对待清洗物体3形成保护，降低生产损耗率。其中，预设角度可以是15°-25°，气流方向相对于待清洗物体3倾斜设置，使得气流的吹除力度适中，提升待清洗物体3清洁过程中的安全性，避免待清洗物体3出现破损的现象，且吹除待清洗物体3表面的微粒等污染物，保证待清洗物体3的洁净度。
需要说明的是，主体结构1上开设的贯穿通孔11不限于上述一个，也可以两个或者多个。主体结构1上可以开设有至少一个贯穿通孔11，贯穿通孔11的数量受待清洗物体3的尺寸影响。为了提升清洁效果，保证待清洗物体3的表面均可以被吹到，贯穿通孔11的数量可以是多个。
示例性地，如图1、图2所示，一种风刀，风刀包括主体结构1，主体结构1上开设有多个贯穿通孔11，使得主体结构1包括多个气流通道，沿待清洗物体3的第一方向(参照图1所示的Y轴方向)，多个气流通道依次间隔布设，使得每个气流通道均对应于待清洗物体3都不同位置。当风刀处于工作状态下，气流通道的的出气端1121的气流可以覆盖整个待清洗物体3的表面，避免出现清洁盲区，进一步提升了清洁效果。
其中，多个气流通道位于同一平面，多个气流通道所在的平面为第一平面，待清洗物体3位于第二平面，多个气流通道所在的第一平面相对待清洗物体3所在的第二平面倾斜设置，使得第一平面和第二平面之间具有预设角度(参照图1、图2所示的Z轴与X轴之间的夹角)，预设角度可以是15°-25°，以保证气流通道的出气端1121的气流压力。当风刀处于工作状态下，多个气流通道的出气端1121同时输出气流，气流能够带走待清洗物体3表面的微粒等污染物，保证待清洗物体3的清洁度。第一平面平行于气流方向(参照图1所示的Z轴方向)，第二平面平行于待清洗物体3的表面。
其中，每个气流通道的进气端1111均与气体供给装置2连通，使得每个气流通道内均有气流输送，气流由气流通道的出气端1121流出，实现对待清洗物体3的清洁。且为了实现每个贯穿通孔11均能够连接至气体供给装置2，每个贯穿通孔11均连接有一个连接支管12，每个连接支管12连接至连接主管13，由连接主管13连接至气体供给装置2，实现气流输送。
示例性地，如图1、图2所示，本公开提出的气流通道呈圆柱形结构，且气流通道具有预设内径，预设内径为0.75mm-1.25mm。气流通道使气流集 中化，控制气流通道内的工作气压，保证风刀的正常工作。同时，具有预设内径的气流通道，可以提升气流的吹除力度，保证气流到达待清洗物体3表面时，能够带走微粒等污染物，以达到吹除的效果。
其中，为了保证风刀的正常工作，气流通道内具有预设气压，预设气压大于0.3Mpa，气流通道内具有足够的压力，气流通道的出气端1121所输出的气流的力度才足够大，并带走待清洗物体3表面的微粒等污染物，以达到吹除的效果。
需要说明的是，气流通道不限于上述圆柱形结构，也可以是方柱形结构等。气流通道的具体形态可以以实际需要进行调整。
示例性地，如图1、图3所示，一种风刀，风刀包括主体结构1，主体结构1上开设有贯穿通孔11，贯穿通孔11作为气流通道，用于输送气流。气流通道的进气端1111与气体供给装置2连通，气体供给装置2通过气流通道的进气端1111向气流通道内输入气流，气流在气流通道内流动，由气流通道的出气端1121输出。
本公开提出的气流通道可以包括第一通道段111和第二通道段112，第一通道段111可以是平直段，沿待清洗物体3的第一方向(参见图3所示的X轴)延伸，且平行于待清洗物体3的平面。第一通道段111的一端作为气流通道的进气端1111，用于输入气流。第一通道段111的另一端与第二通道段112的一端连通，第二通道段112为倾斜段，第二通道段112相对第一通道段111倾斜，使得第一通道段111和第二通道段112之间的夹角呈预设夹角，预设夹角可以是155°-165°。第二通道段112的另一端作为气流通道的出气端1121，用于输出气流。
气流通过气流通道的进气端1111进入至第一通道段111，由第一通道段111进入至第二通道段112内。流动的气流流经平直段后，至倾斜段，由于倾斜段的内壁对气流有拦截的作用，使得气流得到缓冲，避免气流通道的出气端1121的气流出现冲力过大的情况，保证被输送至待清洗物体3的气流，不会给待清洗物体3造成损害。
示例性地，如图1所示，一种风刀，包括主体结构1，主体结构1上开设有贯穿通孔11，贯穿通孔11作为气流通道，用于输送气流。气流通道的进气端1111与气体供给装置2连通，气流通道的具体设置方式以及具体结构， 上述实施例中，已做详细说明，在此，不再重复赘述。
本公开提出的风刀还包括气流调节单元4，气流调节单元4与气体供给装置2连接，以调节气流通道内的气流参数。
其中，气流调节单元4包括质量流量控制器(Mass Flow Controller，简称MFC)，质量流量控制器可以包括电路板、传感器、机壳、调节阀等部件，质量流量控制器的具体结构，在此，不做具体陈述。
气流参数包括但不限于气流通道内气流的流速、气流通道内气流的流量、气流通道内气流流动时的工作气压、气流通道内气流的质量等。
示例性地，如图4、图5所示，一种风刀，包括主体结构1和安装部5，主体结构1安装于安装部5，主体结构1与安装部5可以是一体结构。安装部5由不锈钢材料制成，以提升安装部5的刚度，延长安装部5的使用寿命。安装部5与气体供给装置2连接，主体结构1通过安装部5与气体供给装置2连接。
其中，主体结构1上开设有多个贯穿通孔11，贯穿通孔11作为气流通道，用于输送气流。安装部5内设置有气体腔室511，每个气流通道的进气端1111均与气体腔室511连通，气体腔室511与气体供给装置2连通，使得所有气流通道均可以通过气体腔室511与气体供给装置2连通。气体供给装置2向气体腔室511内输入气流，当气体腔室511内的气流置满时，气流会由气体腔室511分别进入至不同的气流通道内，以实现气流的输送。
气体供给装置2输出的气流，由气体腔室511转换，气流进入至气体腔室511内时，可以控制气流调节单元4，并不断调节参数，进而保证进入至气流通道内的气流参数为目标参数。由于气流通道狭窄且长度有限，气流进入至气流通道内后，可以很快抵达气流通道的出气端1121，使得气流参数不好掌控，影响清洁效果。而气体腔室511具有足够的空间容纳气流，气流在气体腔室511内时，即可通过气体供给装置2和气流调节单元4，调节气流的输入状态，以调节气流的输出参数。
示例性地，如图4、图5所示，本公开提出的安装部5包括安装体51和进气管道52，气体腔室511设置于安装体51内。进气管道52的一端与气体供给装置2连通，进气管道52的另一端贯穿安装体51，使进气管道52可以与气体腔室511连通。安装体51开设有开口512，开口512与气流通道的进 气端1111对应设置，气体腔室511通过开口512与气流通道连通。
其中，进气管道52可以设置有一个、两个或者多个。但进气管道52与气体腔室511连通，经由气体腔室511转换，无需设置太多，减少进气管道52的设置。进气管道52具体可以根据实际需要，进行调整。
其中，主体结构1呈锥形状，主体结构1的第一面14为宽面，第一面14与安装体51固定连接。主体结构1的第二面15为窄面，朝向待清洗物体3。主体结构1呈锥形状，由宽面逐渐收缩变为窄面，减少物料，降低了主体结构1的制造成本。且主体结构1的下侧避让开待清洗物体3，避免与待清洗物体3相互干扰，发生碰撞等现象，进一步保护待清洗物体3。主体结构1的上侧可以显露出气流通道的出气端1121，以便于查看气流通道的出气端1121的出气状态。若是气流通道的出气端1121出现堵塞等现象，可以及时维修清理，保证风刀可以正常工作。
本公开还提出了一种清洗设备，包括上述任一实施例中的风刀和待清洗物体，风刀内的气流由风刀的出气端流向待清洗物体的表面，以实现待清洗物体的清洁。
如图4、图5所示，一种清洗设备，包括风刀和待清洗物体3，风刀内的气流由风刀的出气端1121流向待清洗物体3的表面。
待清洗物体3包括光罩31和膜体32，膜体32叠设于光罩31，风刀的出气端1121与膜体32对应设置。
其中，光罩31(MASK)上布设图形，以光蚀刻技术，将其图形复制于晶圆之上，以形成半导体所需要的图形。而光罩31很容易沾染微粒等污染物，当将光罩31的图形复制于晶圆时，会形成一个失真的影像在晶圆上，影响晶圆的良率。
其中，膜体32为光罩保护膜，膜体32叠设在光罩31的表面，用于保护光罩31的洁净，防止微粒等污染物污染光罩31，将影响程度降至最低。
膜体32与光罩31连接后，也需要对膜体32进行清洁，使其保持洁净。若是膜体32损坏，也会影响光罩31，致其损坏。利用内嵌式结构气流通道，喷射出气流，气流到达膜体32表面，膜体32表面的微粒等污染物受到侧向风力会发生移动，直至脱离膜体32的表面，实现吹除效果。且气流通道的出气端1121的气流方向相对膜体32表面呈预设角度，使得膜体32表面的气流 的力度适中，膜体32受力均匀，避免膜体32发生破损，增加了使用安全性。
本说明书中各实施例或实施方式采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分相互参见即可。
在本说明书的描述中，参考术语“实施例”、“示例性的实施例”、“一些实施方式”、“示意性实施方式”、“示例”等的描述意指结合实施方式或示例描述的具体特征、结构、材料或者特点包含于本公开的至少一个实施方式或示例中。
在本说明书中，对上述术语的示意性表述不一定指的是相同的实施方式或示例。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施方式或示例中以合适的方式结合。
在本公开的描述中，需要说明的是，术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本公开和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本公开的限制。
可以理解的是，本公开所使用的术语“第一”、“第二”等可在本公开中用于描述各种结构，但这些结构不受这些术语的限制。这些术语仅用于将第一个结构与另一个结构区分。
在一个或多个附图中，相同的元件采用类似的附图标记来表示。为了清楚起见，附图中的多个部分没有按比例绘制。此外，可能未示出某些公知的部分。为了简明起见，可以在一幅图中描述经过数个步骤后获得的结构。在下文中描述了本公开的许多特定的细节，例如器件的结构、材料、尺寸、处理工艺和技术，以便更清楚地理解本公开。但正如本领域技术人员能够理解的那样，可以不按照这些特定的细节来实现本公开。
最后应说明的是：以上各实施例仅用以说明本公开的技术方案，而非对其限制；尽管参照前述各实施例对本公开进行了详细的说明，本领域技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分或者全部技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。
工业实用性
本公开实施例所提供的风刀及清洗设备中，主体结构内的贯穿通孔，用作气流通道，气流通道呈内嵌式结构，使得气流通道的出气端的气流方向与待清洗物体之间始终呈预设角度，待清洗物体不会因受力不均匀而发生破损，提升了使用的安全性。且当气流至待清洗物体时，待清洗物体表面的微粒等污染物，受气流影响，发生移动，进而达到清洁的效果。

Claims (15)

  1. 一种风刀，其中，所述风刀包括主体结构(1)，所述主体结构(1)上开设有至少一个贯穿通孔(11)，所述贯穿通孔(11)作为气流通道，所述气流通道的进气端(1111)设置为与气体供给装置(2)连通，所述气流通道的出气端(1121)的气流方向相对待清洗物体(3)呈预设角度。
  2. 根据权利要求1所述的风刀，其中，所述预设角度为15°-25°。
  3. 根据权利要求1所述的风刀，其中，所述主体结构(1)包括多个气流通道，所述多个气流通道所在的第一平面相对待清洗物体(3)所在的第二平面倾斜设置，使所述第一平面和所述第二平面之间具有所述预设角度。
  4. 根据权利要求1所述的风刀，其中，所述气流通道呈圆柱形结构。
  5. 根据权利要求4所述的风刀，其中，所述气流通道具有预设内径。
  6. 根据权利要求5所述的风刀，其中，所述预设内径为0.75mm-1.25mm。
  7. 根据权利要求1所述的风刀，其中，所述风刀还包括气流调节单元(4)，所述气流调节单元(4)设置为与气体供给装置(2)连接，以调节所述气流通道内的气流参数。
  8. 根据权利要求7所述的风刀，其中，所述气流调节单元(4)包括质量流量控制器。
  9. 根据权利要求1所述的风刀，其中，所述风刀还包括安装部(5)，所述主体结构(1)安装于所述安装部(5)，所述安装部(5)设置为与气体供给装置(2)连接；
    所述安装部(5)内设置有气体腔室(511)，所述气流通道的进气端(1111)通过所述气体腔室(511)与气体供给装置(2)连通。
  10. 根据权利要求9所述的风刀，其中，所述安装部(5)包括安装体(51)和至少一个进气管道(52)，所述气体腔室(511)设置于所述安装体(51)内；
    所述进气管道(52)的一端贯穿所述安装体(51)，使所述进气管道(52)设置为与所述气体腔室(511)连通，所述进气管道(52)的另一 端与气体供给装置(2)连通。
  11. 根据权利要求10所述的风刀，其中，所述主体结构(1)呈锥形状，所述主体结构(1)的第一面(14)设置为与所述安装体(51)固定连接，所述主体结构(1)的第二面(15)朝向待清洗物体(3)。
  12. 根据权利要求1所述的风刀，其中，所述气流通道内具有预设气压。
  13. 根据权利要求12所述的风刀，其中，所述预设气压大于0.3Mpa。
  14. 一种清洗设备，其中，包括如权利要求1的风刀和待清洗物体(3)，所述风刀内的气流由所述风刀的出气端(1121)流向所述待清洗物体(3)的表面。
  15. 根据权利要求14所述的清洗设备，其中，所述待清洗物体(3)包括光罩(31)和膜体(32)，所述膜体(32)叠设于所述光罩(31)，所述风刀的出气端(1121)与所述膜体(32)对应设置。
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203900023U (zh) * 2014-04-11 2014-10-29 珠海美路得企业发展有限公司 一种清洁风刀装置
CN104438218A (zh) * 2013-09-16 2015-03-25 鸿富锦精密工业（深圳）有限公司 除尘装置
CN204486386U (zh) * 2015-03-16 2015-07-22 海南汉能薄膜太阳能有限公司 一种除尘装置
CN207849979U (zh) * 2017-11-24 2018-09-11 昆山龙腾光电有限公司 一种风刀及风干设备
CN108534539A (zh) * 2018-05-14 2018-09-14 安徽宏实自动化装备有限公司 一种多孔式风刀装置
CN210399852U (zh) * 2018-12-20 2020-04-24 张家港康得新光电材料有限公司 一种风刀及干燥装置
KR20200056044A (ko) * 2018-11-14 2020-05-22 드림산업(주) 멀티 슬릿 에어나이프
CN112985043A (zh) * 2019-12-17 2021-06-18 亚智科技股份有限公司 风刀结构及其机构

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101937107B1 (ko) * 2018-09-11 2019-01-09 최경철 에어나이프
CN109373743B (zh) * 2018-10-31 2020-08-11 武汉华星光电技术有限公司 风刀及采用该风刀的干燥装置
CN210532970U (zh) * 2019-07-29 2020-05-15 福清市新富创机械有限公司 一种玻璃清洗干燥机用的主风刀及风刀组件
CN112346304A (zh) * 2019-08-07 2021-02-09 长鑫存储技术有限公司 一种光罩传送装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104438218A (zh) * 2013-09-16 2015-03-25 鸿富锦精密工业（深圳）有限公司 除尘装置
CN203900023U (zh) * 2014-04-11 2014-10-29 珠海美路得企业发展有限公司 一种清洁风刀装置
CN204486386U (zh) * 2015-03-16 2015-07-22 海南汉能薄膜太阳能有限公司 一种除尘装置
CN207849979U (zh) * 2017-11-24 2018-09-11 昆山龙腾光电有限公司 一种风刀及风干设备
CN108534539A (zh) * 2018-05-14 2018-09-14 安徽宏实自动化装备有限公司 一种多孔式风刀装置
KR20200056044A (ko) * 2018-11-14 2020-05-22 드림산업(주) 멀티 슬릿 에어나이프
CN210399852U (zh) * 2018-12-20 2020-04-24 张家港康得新光电材料有限公司 一种风刀及干燥装置
CN112985043A (zh) * 2019-12-17 2021-06-18 亚智科技股份有限公司 风刀结构及其机构

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