WO2021129010A1 - 张网装置 - Google Patents

张网装置 Download PDF

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Publication number
WO2021129010A1
WO2021129010A1 PCT/CN2020/117924 CN2020117924W WO2021129010A1 WO 2021129010 A1 WO2021129010 A1 WO 2021129010A1 CN 2020117924 W CN2020117924 W CN 2020117924W WO 2021129010 A1 WO2021129010 A1 WO 2021129010A1
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WO
WIPO (PCT)
Prior art keywords
air
supporting tray
supporting
net
stretching device
Prior art date
Application number
PCT/CN2020/117924
Other languages
English (en)
French (fr)
Inventor
于上智
黄连根
Original Assignee
云谷（固安）科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 云谷（固安）科技有限公司 filed Critical 云谷（固安）科技有限公司
Publication of WO2021129010A1 publication Critical patent/WO2021129010A1/zh
Priority to US17/591,660 priority Critical patent/US20220158144A1/en

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition

Definitions

  • This application relates to the field of masks, and in particular to a net-stretching device.
  • OLED Organic Light Emitting Diode
  • an air float ball or air float hole is used to blow the mask frame to float the mask frame.
  • the method of blowing the mask frame with the air float ball or the air float hole has a higher requirement on the flatness of the mask frame.
  • the present application provides a netting device to reduce the requirements on the flatness of the mask frame.
  • the embodiment of the present application provides a net stretching device, which includes: a bearing frame having an installation surface; and a plurality of air flotation components arranged on the installation surface, each air flotation component includes: an air flotation base installed on the installation surface;
  • the tray is arranged on the side of the air floating base away from the installation surface, the supporting tray has a first surface facing the air floating base and a second surface opposite to the first surface, and the second surface can support the mask frame;
  • the air hole is set toward the first surface of the supporting tray to make the supporting tray float when blowing air; and a limiting component, which is connected between the air floating base and the supporting tray, and the limiting component can restrict the supporting tray in parallel to the installation The amount of displacement in the surface direction.
  • the net stretching device of the embodiment of the present application when the air holes are blown toward the first surface of the supporting tray, the supporting tray floats, and the second surface of the supporting tray can support the mask frame, thereby indirectly causing the mask frame to float .
  • the netting device of the embodiment of the present application uses gas to act on the tray to cause the mask frame to float, instead of the gas directly acting on the mask frame. Therefore, compared with the air flotation method using air flotation holes or air flotation balls, The flatness specification of the mask frame is lower, so that the cost of the mask frame can be reduced.
  • the air flotation assembly also includes a limiting component, which can limit the displacement of the supporting tray in a direction parallel to the installation surface, thereby further improving the stability of the air flotation assembly to the air flotation support of the mask frame.
  • the position-limiting component includes a plurality of support columns, and the support columns pass through the air-floating base and the supporting tray at the same time.
  • the supporting column can limit the displacement of the supporting pallet in the direction parallel to the mounting surface.
  • the supporting column can provide support for the supporting pallet to avoid The air flotation component is damaged, which provides certain protection for the air flotation component.
  • Fig. 1 is a perspective view of a net-stretching device provided by an embodiment of the present application
  • Figures 2a and 2b are perspective views of the air flotation component in the net-tensioning device provided by an embodiment of the present application.
  • 3a and 3b are three-dimensional exploded views of the air flotation component in the net-tensioning device provided by an embodiment of the present application;
  • Figure 4a is a cross-sectional view of the air floatation component in a non-floating state in a net-tensioning device provided by an embodiment of the present application;
  • 4b is a cross-sectional view of the air flotation component in the floating state of the net-tensioning device provided by an embodiment of the present application;
  • FIG. 5 is a test curve diagram of the change value of the pixel position accuracy of the net spreading device provided by an embodiment of the present application.
  • FIG. 6 is a test curve diagram of the extreme values of the floating heights of the four corners of the mask frame of the netting device provided by an embodiment of the present application;
  • Figures 7a and 7b are perspective views of the air flotation component in the net-tensioning device provided by an alternative embodiment of the present application.
  • FIG. 8 is a three-dimensional exploded view of an air floatation component in a net-tensioning device provided by an alternative embodiment of the present application.
  • Fig. 9a is a cross-sectional view of the air flotation component in a non-floating state in a net-tensioning device provided by an alternative embodiment of the present application;
  • Fig. 9b is a cross-sectional view of the air flotation component in the floating state of the net stretching device provided by an alternative embodiment of the present application.
  • OLED Organic Light Emitting Diode
  • OLED Organic Light Emitting Diode
  • FMM fine metal mask
  • the mask strip needs to be welded to the mask frame (Frame), and this process needs to be carried out on the netting device.
  • the embodiment of the application provides a net spreading device. The net spreading device of the embodiment of the application will be described in detail below with reference to the accompanying drawings.
  • FIG. 1 is a perspective view of a net spreading device according to an embodiment of the present application.
  • the net spreading device 1000 includes a supporting frame 100 and a plurality of air floating assemblies 200.
  • the supporting frame 100 has a mounting surface 100a.
  • a plurality of air flotation assemblies 200 are arranged on the mounting surface 100a.
  • FIGS 2a and 2b are perspective views of the air flotation component in the net stretching device provided by an embodiment of the present application.
  • Figures 3a and 3b are perspective exploded views of the air flotation component in the net stretching device provided by an embodiment of the present application.
  • Each air flotation assembly 200 includes an air flotation base 210, a supporting tray 220, an air hole 230 and a limiting component 240.
  • the air-floating base 210 is installed on the installation surface 100a.
  • the supporting tray 220 is disposed on the side of the air floating base 210 away from the installation surface 100 a.
  • the supporting tray 220 has a first surface S1 facing the air bearing base 210 and a second surface S2 disposed opposite to the first surface S1, and the second surface S2 can support the mask frame.
  • the air hole 230 is provided on the air floating base 210 and is set toward the first surface S1 of the supporting tray 220 to float the supporting tray 220 when air is blown.
  • the limiting component 240 is connected between the air-floating base 210 and the supporting tray 220, and the limiting component 240 can limit the displacement of the supporting tray 220 in a direction parallel to the installation surface 100a.
  • Figure 4a is a cross-sectional view of the air flotation component in a net-tensioning device provided in an embodiment of the present application in a non-floating state
  • Figure 4b is a cross-sectional view of the air flotation component in the net-tensioning device provided in an embodiment of the present application in a floating state Sectional view.
  • the net-stretching device 1000 of the embodiment of the present application when the air hole 230 blows toward the first surface S1 of the supporting tray 220, the supporting tray 220 floats, and the second surface S2 of the supporting tray 220 can support the mask frame, thereby indirectly Make the mask frame float.
  • the net-stretching device 1000 of the embodiment of the present application uses gas to act on the tray 220 to float the mask frame, instead of the gas directly acting on the mask frame, so it is compared with the air flotation method that uses air flotation holes or air flotation balls. , The flatness specification of the mask frame is lower, so that the cost of the mask frame can be reduced.
  • the use of the supporting tray 220 to directly contact the mask frame makes the air flotation support of the mask frame by the air flotation assembly 200 more stable and reliable, and improves the air flotation effect on the mask frame.
  • the air flotation assembly 200 further includes a limiting component 240, which can limit the displacement of the supporting tray 220 in the direction parallel to the mounting surface 100a, thereby further improving the air flotation The stability of the assembly 200 to the air-floating support of the mask frame.
  • the limiting member 240 includes a plurality of support posts 241.
  • Each supporting column 241 includes a first end portion 241a and a second end portion 241b opposite to each other.
  • the first end portion 241a penetrates through the air floating base 210, and the second end portion 241b penetrates through the supporting tray 220, for example, the second end portion 241b.
  • the portion 241 b passes through the first surface S1 of the supporting tray 220, and the supporting tray 220 is movable relative to the supporting column 241 along the axial direction of the supporting column 241.
  • the limiting member 240 includes a plurality of supporting columns 241, and the supporting columns 241 are simultaneously inserted through the air floating base 210 and the supporting tray 220.
  • the supporting column 241 can limit the displacement of the supporting tray 220 in the direction parallel to the mounting surface 100a.
  • the supporting column 241 can be The supporting tray 220 provides support to prevent damage to the air flotation assembly 200 and provide certain protection for the air flotation assembly 200.
  • the surface of the air-floating base 210 facing the supporting tray 220 is provided with a first limiting ring 250.
  • the first end portion 241a of the supporting column 241 penetrates through the first limiting ring 250 and cooperates with the inner circumferential surface of the first limiting ring 250, so that the supporting column 241 can be positioned on the inner circumferential surface of the first limiting ring 250.
  • the limited area can be moved with a certain amount of displacement, which prevents the support column 241 from deviating too much from the air-floating base 210 and improves the stability of the supporting tray 220 when it floats.
  • the radius of the inner peripheral surface of the first limiting ring 250 is 0.3 mm to 0.5 mm. In this embodiment, the radius of the inner circumferential surface of the first limiting ring 250 is, for example, 0.3 mm.
  • the first surface S1 of the supporting tray 220 is provided with a second limit ring 260, and the second end 241b of the support column 241 penetrates the second limit ring 260 and is connected to the second limit ring 260.
  • the inner peripheral surface of the 260 is matched, so that the support column 241 can move with a certain amount of displacement in the area defined by the inner peripheral surface of the second limit ring 260, so as to prevent the floating support tray 220 from deviating from the support column 241 and the air-floating base Too much 210 improves the stability of the supporting tray 220 when it floats.
  • the radius of the inner peripheral surface of the second limiting ring 260 is 0.3 mm to 0.5 mm. In this embodiment, the radius of the inner circumferential surface of the second limiting ring 260 is, for example, 0.3 mm.
  • the supporting tray 220 is cylindrical, and the shape of the air floating base 210 can be configured to match the shape of the supporting tray 220.
  • the plurality of support columns 241 are evenly distributed around the center axis of the support tray 220, so that the support of the support tray 220 by the support columns 241 is more uniform and stable.
  • the air hole 230 is provided on the surface of the air floatation base 210 facing the supporting tray 220, and is centrally arranged on the air floatation base 210.
  • the first surface S1 of the supporting tray 220 is provided with a plurality of vent grooves 221, and the orthographic projection of the vent 230 on the first surface S1 overlaps the plurality of vent grooves 221.
  • the first surface S1 of the supporting tray 220 is provided with four venting grooves 221, and the four venting grooves 221 are symmetrically arranged with the central axis of the supporting tray 220 as the center.
  • the netting device 1000 further includes a gas delivery component (not shown in the figure).
  • the gas delivery component communicates with the air hole 230 through a pipe, and the gas delivery component can deliver gas to the air hole 230.
  • the gas conveying component conveys gas to the air hole 230, and the air hole 230 blows air into the air groove 221 provided on the first surface S1 of the supporting tray 220, so that the supporting tray 220 floats, and the supporting tray 220
  • the second surface S2 is in contact with the mask frame, thereby driving the mask frame to float.
  • the net opening device 1000 may further include a blowing control component, which is electrically connected to the gas delivery component, and can control the gas flow rate and flow rate of the gas delivered to the air hole 230 by the gas delivery component.
  • a blowing control component which is electrically connected to the gas delivery component, and can control the gas flow rate and flow rate of the gas delivered to the air hole 230 by the gas delivery component.
  • FIG. 5 is a test curve diagram of the change value of the pixel position accuracy of the net spreading device provided by an embodiment of the present application.
  • the abscissa is the CF value in each group of tests, the unit is N (N), and the ordinate is the PPA change value in each group test (the PPA value after CF is applied and the PPA value after CF is released).
  • the unit is micrometer (um).
  • Fig. 6 is a test curve diagram of the extreme values of the floating height of the four corners of the mask frame of the screen stretching device provided in an embodiment of the present application.
  • the abscissa is the amount of air flotation in each group of tests, the unit is Pa (Pa), and the ordinate is the extreme value of the floating height of the mask frame in each group of tests (the floating height of the four corners of the mask frame) The difference between the maximum and minimum heights), in micrometers (um).
  • the net-stretching device 1000 of the embodiment of the present application is applied to an air floatation mask frame, the floating height difference of the mask frame is small, and the stability of the air floatation assembly is good.
  • the air hole 230 is provided in the air floating base 210. In other embodiments, the air hole 230 may also be provided in other positions.
  • Fig. 7a and Fig. 7b are perspective views of the air flotation component in the net stretching device provided by an alternative embodiment of the present application
  • Fig. 8 is a perspective exploded view of the air flotation component in the net stretching device provided by an alternative embodiment of the present application.
  • Part of the structure of the alternative embodiment is the same as the structure of the foregoing embodiment, and will not be described in detail here.
  • each air flotation assembly 200 includes an air flotation base 210, a supporting tray 220, an air hole 230 and a limiting component 240.
  • the limiting component 240 includes a plurality of supporting columns 241.
  • Each support column 241 includes a first end 241a and a second end 241b opposite to each other. The first end 241a passes through the air-floating base 210, and the second end 241b passes through the supporting tray 220, which supports the supporting tray 220 relatively.
  • the column 241 is movable in the axial direction of the supporting column 241.
  • the number of air holes 230 is multiple. Wherein, at least one air hole 230 is formed on the end surface of the second end portion 241b of each supporting column 241.
  • Figure 9a is a cross-sectional view of the air flotation component in the net-tensioning device provided by an alternative embodiment of the present application in a non-floating state
  • Figure 9b is the air flotation component floating in the net-tensioning device provided by an alternative embodiment of the present application A cross-sectional view of the state.
  • the limiting member 240 is a structure including a plurality of supporting columns 241, but in other embodiments, the structure of the limiting member 240 may not be limited to this.
  • the limiting member 240 includes a plurality of elastic members, wherein one end of each elastic member is connected to the air floating chassis, and the other end is connected to the supporting tray 220.
  • the elastic force of the plurality of elastic members can limit the relative position of the supporting tray 220 and the air floating base 210 to a certain range, thereby restricting the supporting tray 220 in parallel.
  • the amount of displacement in the direction of the mounting surface 100a improves the stability of the air flotation assembly 200 for the air flotation support of the mask frame.
  • the gas acts on the supporting tray 220 to cause the mask frame to float, instead of the gas directly acting on the mask frame, it is compared with the air floatation using air flotation holes or air flotation balls. In this way, the flatness specification of the mask frame is lower, so that the cost of the mask frame can be reduced.
  • the use of the supporting tray 220 to directly contact the mask frame makes the air flotation support of the mask frame by the air flotation assembly 200 more stable and reliable, and improves the air flotation effect on the mask frame.
  • the air flotation assembly 200 also includes a limiting component 240, which can limit the displacement of the supporting tray 220 in the direction parallel to the mounting surface 100a, thereby further improving the air flotation support of the air flotation assembly 200 to the mask frame. stability.

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  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
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Abstract

本申请公开了一种张网装置。张网装置包括：承载框架，具有安装面；以及多个气浮组件，设置于安装面，每个气浮组件包括：气浮底座，安装于安装面；承托盘，设置于气浮底座的背离安装面的一侧，承托盘具有朝向气浮底座的第一表面以及与第一表面相背设置的第二表面，第二表面能够承托掩膜板框架；气孔，气孔朝向承托盘的第一表面设置，以在吹气时使得承托盘浮起；以及限位部件，连接于气浮底座与承托盘之间，限位部件能够限制承托盘在平行于安装面方向上的可位移量。根据本申请实施例的张网装置，气浮组件对掩膜板框架的气浮支撑更加稳定可靠，提高对掩膜板框架的气浮效果。

Description

张网装置
相关申请的交叉引用
本申请要求2019年12月24日提交的、申请号为201911348992.6、发明名称为“张网装置”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及掩膜板领域，具体涉及一种张网装置。
背景技术
有机发光二极管(Organic Light Emitting Diode，OLED)显示面板因具有高画质、省电、机身薄及应用范围广等优点，而被广泛的应用于手机、电视、个人数字助理、数字相机、笔记本电脑、台式计算机等各种消费性电子产品，成为显示装置中的主流。
在OLED显示面板在生产过程中，需要将有机材料蒸镀在基板上，其中蒸镀工艺中通常需要用到精细金属掩膜板(Fine Metal Mask，FMM)。FMM在使用前，需要将掩膜条焊接在掩膜板框架上，该过程需要在张网装置上进行。
在现有的张网装置中，采用气浮球或气浮孔吹动掩膜板框架，以使掩膜板框架浮起。然而，采用气浮球或气浮孔吹动掩膜板框架的方式，对掩膜板框架的平坦度要求较高。
发明内容
本申请提供一种张网装置，降低对掩膜板框架的平坦度的要求。
本申请实施例提供一种张网装置，其包括：承载框架，具有安装面；以及多个气浮组件，设置于安装面，每个气浮组件包括：气浮底座，安装 于安装面；承托盘，设置于气浮底座的背离安装面的一侧，承托盘具有朝向气浮底座的第一表面以及与第一表面相背设置的第二表面，第二表面能够承托掩膜板框架；气孔，气孔朝向承托盘的第一表面设置，以在吹气时使得承托盘浮起；以及限位部件，连接于气浮底座与承托盘之间，限位部件能够限制承托盘在平行于安装面方向上的可位移量。
根据本申请实施例的张网装置，气孔朝向承托盘的第一表面吹气时使得承托盘浮起，承托盘的第二表面能够承托掩膜板框架，从而间接使得掩膜板框架浮起。本申请实施例的张网装置由于是气体作用于承托盘使得掩膜板框架浮起，而非气体直接对掩膜板框架作用，因此相对于采用气浮孔或气浮球的气浮方式，对掩膜板框架的平坦度规格要求更低，从而能够降低掩膜板框架的成本。此外，采用承托盘与掩膜板框架直接接触，使得气浮组件对掩膜板框架的气浮支撑更加稳定可靠，提高对掩膜板框架的气浮效果。气浮组件还包括限位部件，该限位部件能够限制承托盘在平行于安装面方向上的可位移量，从而进一步提高气浮组件对掩膜板框架气浮支撑的稳定性。
在一些可选的实施例中，限位部件包括多个支撑柱，支撑柱同时穿设于气浮底座和承托盘。在承托盘浮起时，支撑柱能够限制承托盘在平行于安装面方向上的可位移量的同时，在承托盘未浮起或受到压力过大时，支撑柱能够为承托盘提供支撑，避免气浮组件损坏，为气浮组件提供一定的保护。
附图说明
图1是本申请一种实施例提供的张网装置的立体图；
图2a、图2b是本申请一种实施例提供的张网装置中气浮组件的立体图；
图3a、图3b是本申请一种实施例提供的张网装置中气浮组件的立体分解图；
图4a是本申请一种实施例提供的张网装置中气浮组件在非浮起状态的截面图；
图4b是本申请一种实施例提供的张网装置中气浮组件在浮起状态的截面图；
图5是本申请一种实施例提供的张网装置的像素位置精度变化值的测试曲线图；
图6是本申请一种实施例提供的张网装置的掩膜板框架四角的浮起高度的极值的测试曲线图；
图7a、图7b是本申请一种替代实施例提供的张网装置中气浮组件的立体图；
图8是本申请一种替代实施例提供的张网装置中气浮组件的立体分解图；
图9a是本申请一种替代实施例提供的张网装置中气浮组件在非浮起状态的截面图；
图9b是本申请一种替代实施例提供的张网装置中气浮组件在浮起状态的截面图。
具体实施方式
为了使本申请的目的、技术方案及优点更加清楚明白，以下结合附图及具体实施例，对本申请进行进一步详细描述。应理解，此处所描述的具体实施例仅被配置为解释本申请，并不被配置为限定本申请。对于本领域技术人员来说，本申请可以在不需要这些具体细节中的一些细节的情况下实施。
需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。
有机发光二极管(Organic Light Emitting Diode，OLED)显示面板在生产过程中，需要将有机材料蒸镀在基板上，其中蒸镀工艺中通常需要用到精细金属掩膜板(Fine Metal Mask，FMM)。FMM在使用前，需要将掩膜条焊接在掩膜板框架(Frame)上，该过程需要在张网装置上进行。本申请实施例提供一种张网装置，以下将结合附图对本申请实施例的张网 装置进行具体说明。
图1是本申请一种实施例提供的张网装置的立体图，张网装置1000包括承载框架100以及多个气浮组件200。承载框架100具有安装面100a。多个气浮组件200，设置于安装面100a。
图2a、图2b是本申请一种实施例提供的张网装置中气浮组件的立体图，图3a、图3b是本申请一种实施例提供的张网装置中气浮组件的立体分解图。每个气浮组件200包括气浮底座210、承托盘220、气孔230以及限位部件240。
气浮底座210安装于安装面100a。承托盘220设置于气浮底座210的背离安装面100a的一侧。承托盘220具有朝向气浮底座210的第一表面S1以及与第一表面S1相背设置的第二表面S2，第二表面S2能够承托掩膜板框架。气孔230设置在气浮底座210上并朝向承托盘220的第一表面S1设置，以在吹气时使得承托盘220浮起。限位部件240连接于气浮底座210与承托盘220之间，限位部件240能够限制承托盘220在平行于安装面100a方向上的可位移量。
图4a是本申请一种实施例提供的张网装置中气浮组件在非浮起状态的截面图，图4b是本申请一种实施例提供的张网装置中气浮组件在浮起状态的截面图。根据本申请实施例的张网装置1000，气孔230朝向承托盘220的第一表面S1吹气时使得承托盘220浮起，承托盘220的第二表面S2能够承托掩膜板框架，从而间接使得掩膜板框架浮起。
本申请实施例的张网装置1000由于是气体作用于承托盘220使得掩膜板框架浮起，而非气体直接对掩膜板框架作用，因此相对于采用气浮孔或气浮球的气浮方式，对掩膜板框架的平坦度规格要求更低，从而能够降低掩膜板框架的成本。
此外，采用承托盘220与掩膜板框架直接接触，使得气浮组件200对掩膜板框架的气浮支撑更加稳定可靠，提高对掩膜板框架的气浮效果。
根据本申请实施例的张网装置1000，气浮组件200还包括限位部件240，该限位部件240能够限制承托盘220在平行于安装面100a方向上的可位移量，从而进一步提高气浮组件200对掩膜板框架气浮支撑的稳定性。
在一些实施例中，限位部件240包括多个支撑柱241。每个支撑柱241包括相对的第一端部241a和第二端部241b，第一端部241a穿设于气浮底座210，第二端部241b穿设于承托盘220，例如，第二端部241b穿过承托盘220的第一表面S1，承托盘220相对支撑柱241沿支撑柱241的轴向可移动。
根据本申请实施例的张网装置1000，限位部件240包括多个支撑柱241，支撑柱241同时穿设于气浮底座210和承托盘220。在承托盘220浮起时，支撑柱241能够限制承托盘220在平行于安装面100a方向上的可位移量的同时，在承托盘220未浮起或受到压力过大时，支撑柱241能够为承托盘220提供支撑，避免气浮组件200损坏，为气浮组件200提供一定的保护。
在一些实施例中，气浮底座210的朝向承托盘220的表面设有第一限位环250。支撑柱241的第一端部241a穿设于第一限位环250内，并与第一限位环250的内周面配合，使得支撑柱241能够在第一限位环250的内周面所限定的区域能进行一定位移量的活动，避免支撑柱241偏离气浮底座210过多，提高承托盘220浮起时的稳定性。在一些实施例中，第一限位环250的内周面的半径为0.3毫米至0.5毫米。在本实施例中，第一限位环250的内周面的半径例如是0.3毫米。
在一些实施例中，承托盘220的第一表面S1设有第二限位环260，支撑柱241的第二端部241b穿设于第二限位环260内，并与第二限位环260的内周面配合，使得支撑柱241能够在第二限位环260的内周面所限定的区域能进行一定位移量的活动，避免浮起的承托盘220偏离支撑柱241以及气浮底座210过多，提高承托盘220浮起时的稳定性。在一些实施例中，第二限位环260的内周面的半径为0.3毫米至0.5毫米。在本实施例中，第二限位环260的内周面的半径例如是0.3毫米。
在一些实施例中，承托盘220呈圆柱状，气浮底座210的形状可以配置为与承托盘220的形状匹配。多个支撑柱241均匀分散于承托盘220的中心轴线的周边，使得多个支撑柱241对承托盘220支撑更加均匀稳定。
本实施例中，气孔230设置在气浮底座210的朝向承托盘220的表面 上，并在气浮底座210上居中设置。在一些实施例中，承托盘220的第一表面S1设有多个通气槽221，气孔230在第一表面S1上的正投影与多个通气槽221均交叠。本实施例中，承托盘220的第一表面S1设有四个通气槽221，四个通气槽221以承托盘220的中心轴线为中心对称设置。
在一些实施例中，张网装置1000还包括气体输送部件(图中未绘示)，气体输送部件通过管道与气孔230连通，气体输送部件能够向气孔230输送气体。
在需要将掩膜板框架吹起时，气体输送部件向气孔230输送气体，气孔230向承托盘220的第一表面S1设有的通气槽221吹气，使得承托盘220浮起，承托盘220的第二表面S2与掩膜板框架接触，从而带动掩膜板框架浮起。
在一些实施例中，张网装置1000还可以包括吹气控制部件，其与气体输送部件电连接，能够控制气体输送部件向气孔230输送气体的气体流量及流速。
在浮起状态下，分别对掩膜板框架施加四种不同的对抗力(Counter Force，CF)值，施加CF后对掩膜板的像素位置精度(Pixel Position Accuracy，PPA)数值进行量测。将CF释放后，再次在浮起状态下施加相同的CF值对掩膜板的PPA进行数值量测。
图5是本申请一种实施例提供的张网装置的像素位置精度变化值的测试曲线图。图5中，横坐标为各组测试中的CF值，单位为牛(N)，纵坐标为各组测试中的PPA变化值(施加CF后PPA值与CF释放后PPA值的变化量)，单位为微米(um)。根据图5，本申请实施例的张网装置1000应用于气浮掩膜板框架中时，在气浮状态下CF基本完全释放，摩擦力可忽略不计，气浮效果良好。
同一掩膜板框架在被施加不同气浮量情况下，分别测量掩膜板框架四角的浮起高度，计算最大值最小值之间的差值(极值)，可以反映张网装置的气浮稳定性情况。
图6是本申请一种实施例提供的张网装置的掩膜板框架四角的浮起高度的极值的测试曲线图。图6中，横坐标为各组测试中的气浮量，单位为 帕(Pa)，纵坐标为各组测试中的掩膜板框架的浮起高度极值(掩膜板框架四角的浮起高度额最大值与最小值之间的差值)，单位为微米(um)。根据图6，本申请实施例的张网装置1000应用于气浮掩膜板框架中时，掩膜板框架各处的浮起高度差异很小，气浮组件的稳定性较好。
在上述实施例中，气孔230设置于气浮底座210，在其它一些实施例中，气孔230也可以设置在其它位置。
图7a、图7b是本申请一种替代实施例提供的张网装置中气浮组件的立体图，图8是本申请一种替代实施例提供的张网装置中气浮组件的立体分解图。替代实施例的部分结构与前述实施例的结构相同，在此不再详述。
在替代实施例中，每个气浮组件200包括气浮底座210、承托盘220、气孔230以及限位部件240。其中，限位部件240包括多个支撑柱241。每个支撑柱241包括相对的第一端部241a和第二端部241b，第一端部241a穿设于气浮底座210，第二端部241b穿设于承托盘220，承托盘220相对支撑柱241沿支撑柱241的轴向可移动。
在替代实施例中，气孔230的数量为多个。其中，每个支撑柱241的第二端部241b的端面设有至少一个气孔230。
图9a是本申请一种替代实施例提供的张网装置中气浮组件在非浮起状态的截面图，图9b是本申请一种替代实施例提供的张网装置中气浮组件在浮起状态的截面图。在需要将掩膜板框架吹起时，气体输送部件向气孔230输送气体，气孔230向承托盘220的第一表面S1吹气，使得承托盘220浮起，承托盘220的第二表面S2与掩膜板框架接触，从而带动掩膜板框架浮起。
在前述实施例中，限位部件240为包括多个支撑柱241的结构，然而在其它一些实施例中，限位部件240的结构可以不限于此。例如，在其它一些实施例中，限位部件240包括多个弹性件，其中每个弹性件的一端连接气浮底盘，另一端连接承托盘220。当气孔230向承托盘220吹气使得承托盘220浮起时，多个弹性件的弹性力能够将承托盘220与气浮底座210的相对位置限制在一定范围，从而能够限制承托盘220在平行于安装面100a方向上的可位移量，提高气浮组件200对掩膜板框架气浮支撑的稳定 性。
根据本申请实施例的张网装置1000，由于是气体作用于承托盘220使得掩膜板框架浮起，而非气体直接对掩膜板框架作用，相对于采用气浮孔或气浮球的气浮方式，对掩膜板框架的平坦度规格要求更低，从而能够降低掩膜板框架的成本。此外，采用承托盘220与掩膜板框架直接接触，使得气浮组件200对掩膜板框架的气浮支撑更加稳定可靠，提高对掩膜板框架的气浮效果。气浮组件200还包括限位部件240，该限位部件240能够限制承托盘220在平行于安装面100a方向上的可位移量，从而进一步提高气浮组件200对掩膜板框架气浮支撑的稳定性。
依照本申请如上文所述的实施例，这些实施例并没有详尽叙述所有的细节，也不限制该申请仅为所述的具体实施例。显然，根据以上描述，可作很多的修改和变化。本说明书选取并具体描述这些实施例，是为了更好地解释本申请的原理和实际应用，从而使所属技术领域技术人员能很好地利用本申请以及在本申请基础上的修改使用。本申请仅受权利要求书及其全部范围和等效物的限制。

Claims (15)

  1. 一种张网装置，包括：
    承载框架，具有安装面；以及
    多个气浮组件，设置于所述安装面，每个所述气浮组件包括：
    气浮底座，安装于所述安装面；
    承托盘，设置于所述气浮底座的背离所述安装面的一侧，所述承托盘具有朝向所述气浮底座的第一表面以及与所述第一表面相背设置的第二表面，所述第二表面能够承托掩膜板框架；
    气孔，所述气孔朝向所述承托盘的所述第一表面设置，以在吹气时使得所述承托盘浮起；以及
    限位部件，连接于所述气浮底座与所述承托盘之间，所述限位部件能够限制所述承托盘在平行于所述安装面方向上的可位移量。
  2. 根据权利要求1所述的张网装置，其中，所述限位部件包括多个支撑柱，每个所述支撑柱包括相对的第一端部和第二端部，所述第一端部穿设于所述气浮底座，所述第二端部穿设于所述承托盘，所述承托盘相对所述支撑柱沿所述支撑柱的轴向可移动。
  3. 根据权利要求2所述的张网装置，其中，所述气浮底座的朝向所述承托盘的表面设有第一限位环，所述支撑柱的所述第一端部穿设于所述第一限位环内，并与所述第一限位环的内周面配合。
  4. 根据权利要求3所述的张网装置，其中，所述第一限位环的内周面的半径为0.3毫米至0.5毫米。
  5. 根据权利要求2所述的张网装置，其中，所述承托盘的所述第一表面设有第二限位环，所述支撑柱的所述第二端部穿设于所述第二限位环内，并与所述第二限位环的内周面配合。
  6. 根据权利要求5所述的张网装置，其中，所述第二限位环的内周面的半径为0.3毫米至0.5毫米。
  7. 根据权利要求2所述的张网装置，其中，所述气孔的数量为多个，其中，每个所述支撑柱的所述第二端部的端面设有至少一个所述气孔。
  8. 根据权利要求1所述的张网装置，其中，所述气浮底座的形状配置为与所述承托盘的形状匹配。
  9. 根据权利要求2所述的张网装置，其中，所述承托盘呈圆柱状，所述多个支撑柱均匀分散于所述承托盘的中心轴线的周边。
  10. 根据权利要求1所述的张网装置，其中，所述气孔设置在所述气浮底座的朝向所述承托盘的表面上，并在所述气浮底座上居中设置。
  11. 根据权利要求1所述的张网装置，其中，所述承托盘的所述第一表面设有多个通气槽，所述气孔在所述第一表面上的正投影与多个所述通气槽均交叠。
  12. 根据权利要求11所述的张网装置，其中，所述承托盘的所述第一表面设有四个所述通气槽，四个所述通气槽以所述承托盘的中心轴线为中心对称设置。
  13. 根据权利要求1所述的张网装置，其中，所述限位部件包括多个弹性件，每个所述弹性件的一端连接所述气浮底盘，另一端连接所述承托盘。
  14. 根据权利要求1所述的张网装置，还包括：
    气体输送部件，通过管道与所述气孔连通，所述气体输送部件能够向所述气孔输送气体。
  15. 根据权利要求14所述的张网装置，还包括：
    吹气控制部件，与所述气体输送部件电连接，所述吹气控制部件被配置为控制所述气体输送部件向所述气孔输送气体的气体流量及流速。
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CN109158782A (zh) * 2018-08-31 2019-01-08 京东方科技集团股份有限公司 气浮控制系统、张网系统、气浮控制方法及存储介质
CN111009621A (zh) * 2019-12-24 2020-04-14 云谷（固安）科技有限公司 张网装置

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