WO2023228450A1 - 分光測定装置 - Google Patents

分光測定装置 Download PDF

Info

Publication number
WO2023228450A1
WO2023228450A1 PCT/JP2022/046725 JP2022046725W WO2023228450A1 WO 2023228450 A1 WO2023228450 A1 WO 2023228450A1 JP 2022046725 W JP2022046725 W JP 2022046725W WO 2023228450 A1 WO2023228450 A1 WO 2023228450A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
measured
photodetector
data
spectral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/046725
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
賢一 大塚
英樹 増岡
和也 井口
育男 荒田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP2024522897A priority Critical patent/JP7829031B2/ja
Priority to CN202280096432.XA priority patent/CN119256213A/zh
Priority to KR1020247033436A priority patent/KR20250016081A/ko
Priority to US18/855,082 priority patent/US20250244172A1/en
Priority to DE112022007307.1T priority patent/DE112022007307T5/de
Publication of WO2023228450A1 publication Critical patent/WO2023228450A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0278—Control or determination of height or angle information for sensors or receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating

Definitions

  • the present disclosure relates to a spectrometer.
  • a spectrometer comprising: a lens that guides the light to be measured incident from the reflection type diffraction grating to a reflection type diffraction grating, and forms a spectral image of the light to be measured separated by the reflection type diffraction grating in a light receiving area of a photodetector.
  • a Dyson optical system has the advantage of improved wavelength resolution when measuring light to be measured.
  • a spectrometer that employs the Dyson optical system has the disadvantage of easily generating stray light, and if no countermeasures are taken, the detection accuracy in measuring the light to be measured tends to decrease.
  • a stray light region region where stray light gathers
  • An object of the present disclosure is to provide a spectrometer that can suppress both a decrease in wavelength resolution and a decrease in detection accuracy in measuring light to be measured.
  • a spectrometer includes [1] "a light incidence section into which light to be measured is incident; a reflection type diffraction grating which spectrally spectra the measurement light incident from the light incidence section; a photodetector for detecting the light to be measured that has been spectrally separated by the grating; A lens that forms a spectral image of the light to be measured in a light receiving area of the photodetector, and an analysis unit that generates spectral data of the light to be measured, the light receiving area being parallel to the wavelength axis of the spectral image.
  • a first light-receiving region including a plurality of first light-detecting channels arranged in a direction perpendicular to the wavelength axis; a second light receiving region including a plurality of second light detection channels, and the photodetector detects the measured light by receiving the spectral image in the first light receiving region for a first exposure time.
  • a spectroscopic measuring device is arranged such that a stray light region where stray light generated in the optical path of the first light-receiving region is located in the first light-receiving region.
  • the light receiving region of the photodetector has a first light receiving region and a second light receiving region arranged in parallel in a direction perpendicular to the wavelength axis of the spectral image, and
  • the detector is arranged such that a stray light region where stray light generated in the optical path from the light incidence part to the photodetector gathers is located in the first light receiving region.
  • the photodetector outputs the first spectral data of the light to be measured by receiving the spectral image in the first light receiving area for the first exposure time, and also outputs the first spectral data of the light to be measured.
  • the second spectral data of the light to be measured is output by receiving a spectral image in the second light-receiving region with a second exposure time longer than the first exposure time, and the analysis section Then, spectrum data of the light to be measured is generated.
  • the wavelength band corresponding to the stray light region is offset from the wavelength band with high light intensity, and the first spectral data is used for the wavelength band with high light intensity.
  • the second spectrum data for a wavelength band where the light intensity is low, it is possible to suppress a decrease in detection accuracy in measuring the light to be measured.
  • the spectrometer described in [1] above it is possible to suppress both a decrease in wavelength resolution and a decrease in detection accuracy in measuring the light to be measured.
  • the analysis unit is configured to analyze data of a wavelength band that does not include a wavelength band corresponding to the stray light region among the first spectral data, and of the second spectral data.
  • the spectrometer may generate the spectrum data based on data of a wavelength band including the wavelength band corresponding to the stray light region.
  • stray light is detected in the wavelength band corresponding to the stray light region of the first spectrum data.
  • stray light is not detected in the wavelength band corresponding to the stray light region of the second spectrum data.
  • the data in the excluded wavelength band is complemented with the second spectrum data, thereby improving the measurement of the light to be measured. It is possible to further suppress a decrease in detection accuracy in measurement.
  • the spectrometer according to one aspect of the present disclosure is provided in [3] "The photodetector is offset to one side in the direction perpendicular to the wavelength axis with respect to the light incidence part," [1] ] or the spectrometer described in [2]. According to the spectrometer described in [3], the arrangement of the photodetector for positioning the stray light region in the first light receiving region can be easily and reliably realized.
  • the spectrometer according to one aspect of the present disclosure includes [4] “The stray light is generated by multiple reflection of a portion of the light to be measured within the lens,” the spectrometer according to any one of [1] to [3] above. It may also be a spectroscopic measuring device as described in one of the above. The dominant cause of the appearance of the stray light region is multiple reflection of a portion of the measured light within the lens. According to the spectrometer described in [4], by eliminating the influence of the stray light region, it is possible to further suppress a decrease in detection accuracy in measuring the light to be measured.
  • the spectrometry device further includes a mask member disposed between the lens and the photodetector and blocking the stray light, [1] to [4]
  • the spectrometer according to any one of the above may also be used. According to the spectrometer described in [5], the influence of the stray light region can be eliminated by blocking stray light from entering the photodetector. Therefore, it is possible to further suppress a decrease in detection accuracy in measuring the light to be measured.
  • the spectrometer according to one aspect of the present disclosure includes [6] "The lens has a surface facing the light incidence section and the photodetector, and a convex surface facing the reflection type diffraction grating.
  • the spectrometer according to any one of [1] to [5] above, which is a convex lens, may also be used.
  • the spectrometer described in [6] the light to be measured that has entered from the light incidence part is guided to the reflection type diffraction grating, and the spectral image of the light to be measured that has been separated by the reflection type diffraction grating is transmitted to the reflection type diffraction grating. It can be formed in the light receiving area of the detector.
  • a spectrometer that can suppress both a decrease in wavelength resolution and a decrease in detection accuracy in measuring light to be measured.
  • FIG. 1 is a diagram showing the configuration of a spectrometer according to an embodiment.
  • FIG. 2 is a diagram showing the configuration of the photodetector shown in FIG. 1.
  • FIG. 3 is a diagram showing first spectral data and second spectral data.
  • FIG. 4 is a diagram showing spectrum data of the light to be measured.
  • FIG. 5 is a diagram showing the configuration of a photodetector according to a first modification.
  • FIG. 6 is a diagram showing the configuration of a photodetector of a second modification and spectrum data of light to be measured.
  • the spectrometer 1 includes a light incidence section 2, a reflective diffraction grating 3, a photodetector 4, a lens 5, and an analysis section 6.
  • the spectrometer 1 is a device that generates spectral data of the light to be measured L1 by spectrally splitting the light to be measured L1.
  • the light incidence part 2, the reflective diffraction grating 3, and the lens 5 guide the light to be measured L1 to the light receiving area 40 of the photodetector 4, and optically detect the spectral image ⁇ of the light to be measured L1 along the wavelength axis A. It constitutes an optical system (so-called Dyson optical system) to be formed on the light receiving area 40 of the device 4.
  • the light to be measured L1 is separated by the reflection type diffraction grating 3 in a direction perpendicular to the direction in which the light to be measured L1 is incident.
  • the direction in which the light to be measured L1 is separated (that is, the direction parallel to the wavelength axis A) is referred to as the X-axis direction
  • the direction perpendicular to the X-axis direction is referred to as the Y-axis direction.
  • the direction perpendicular to this direction is called the Z-axis direction.
  • the light incidence section 2 is arranged so as to cause the measured light L1 to enter the spectrometer 1.
  • the light incidence section 2 adjusts the amount of incident light L1 to be measured.
  • the light incidence section 2 is, for example, a slit member.
  • the slit formed in the slit member has a rectangular opening with a short side in the X-axis direction and a long side in the Z-axis direction when viewed from the Y-axis direction. If the width of the short side is widened, the amount of incident light L1 to be measured increases, so that the analysis section 6 can obtain spectrum data with less noise but lower wavelength resolution.
  • the light incidence section 2 may be configured by, for example, a slit member and an optical fiber that transmits the measured light L1 to the slit member.
  • the light incidence section 2 may be configured by, for example, a slit member and a lens that collects the measured light L1 from outside the slit member.
  • the reflection type diffraction grating 3 faces the light incidence section 2 in the Y-axis direction.
  • the reflection type diffraction grating 3 separates the light to be measured L1 into a spectrum opposite to the direction in which the light to be measured L1 is incident.
  • the reflection type diffraction grating 3 is composed of a plurality of grating grooves (not shown).
  • the plurality of grating grooves are arranged along the X-axis direction, which is a direction perpendicular to the direction in which the light to be measured L1 is incident, and extend along the Z-axis direction, which is perpendicular to the direction in which they are arranged. There is.
  • the light to be measured L1 that has entered the reflection type diffraction grating 3 is separated according to wavelength along the X-axis direction, which is the direction in which the plurality of grating grooves are lined up.
  • the photodetector 4 faces the reflection type diffraction grating 3 in the Y-axis direction.
  • the photodetector 4 and the light incident section 2 are arranged at the same position in the Y-axis direction.
  • the photodetector 4 is placed at a certain distance D from the light incidence section 2 in the Z-axis direction, on the side where the separated measurement light L1 is incident.
  • the photodetector 4 is offset with respect to the light incidence section 2 along the direction perpendicular to the wavelength axis A (Z-axis direction) toward the side where the separated measurement light L1 enters.
  • the photodetector 4 detects the light to be measured L1 separated by the reflection type diffraction grating 3.
  • the photodetector 4 is a CCD image sensor formed on a semiconductor substrate.
  • the CCD image sensor may be of an interline type, frame transfer type, or full frame transfer type.
  • the lens 5 is arranged between the light incidence section 2 and the photodetector 4, and the reflective diffraction grating 3 in the Y-axis direction.
  • the lens 5 guides the measurement light L1 that has entered from the light incidence section 2 to the reflection type diffraction grating 3, and transmits the spectral image ⁇ of the measurement measurement light L1 separated by the reflection type diffraction grating 3 to the photodetector 4. It is formed in the light receiving area 40.
  • the lens 5 is a convex lens having a surface 5a and a convex surface 5b opposite to the surface 5a. The surface 5a faces the light incidence section 2 and the photodetector 4.
  • the surface 5a is a flat surface, a concave surface, or a convex surface.
  • the convex surface 5b faces the reflection type diffraction grating 3, and is a surface curved in a convex manner on the opposite side to the surface 5a.
  • the analysis unit 6 generates spectrum data S3 of the light to be measured L1 based on the data acquired from the photodetector 4. The details of the analysis performed by the analysis unit 6 will be described later.
  • the analysis section 6 includes a storage section that stores data acquired from the photodetector 4, analysis results, and the like. Further, the analysis unit 6 may control the photodetector 4.
  • the analysis unit 6 may be a computer or a tablet terminal, which includes a processor such as a CPU (Central Processing Unit) and a storage medium such as a RAM (Random Access Memory) or a ROM (Read Only Memory). Further, the analysis unit 6 may be configured with a microcomputer or an FPGA (Field Programmable Gate Array).
  • the light to be measured L1 entering from the light incidence section 2 enters the surface 5a at a constant angle of incidence.
  • the measured light L1 incident on the surface 5a is refracted at the surface 5a according to the difference between the refractive index of air and the refractive index of the lens 5, travels inside the lens 5, and exits from the convex surface 5b.
  • the measured light L1 emitted from the convex surface 5b is refracted by the convex surface 5b according to the difference between the refractive index of the lens 5 and the refractive index of air, and is guided to the reflective diffraction grating 3 at the subsequent stage. .
  • the measured light L1 separated by the reflection type diffraction grating 3 enters the lens 5 again.
  • the separated light to be measured L1 enters the convex surface 5b at a constant angle of incidence.
  • the spectrally spectrally measured light L1 incident on the convex surface 5b is refracted by the convex surface 5b according to the difference between the refractive index of air and the refractive index of the lens 5, propagates inside the lens 5, and passes through the surface 5a. Emits from.
  • the spectrally measured light L1 emitted from the surface 5a is refracted by the surface 5a according to the difference between the refractive index of the lens 5 and the refractive index of air, and is imaged on the photodetector 4 in the subsequent stage, forming a spectral image.
  • ⁇ is formed on the light receiving area 40.
  • stray light may occur between the optical path from the light incidence section 2 to the photodetector 4.
  • stray light L2 may be generated due to multiple reflections of a portion of the measured light L1 within the lens 5.
  • a part of the measured light L1 incident from the light incidence part 2 or a part of the measured light L1 separated by the reflective diffraction grating 3 is multiple-reflected between the surface 5a and the convex surface 5b, and the surface 5a may be emitted as stray light L2.
  • the stray light L2 may appear as an unnatural peak in the spectrum data.
  • the photodetector 4 can prevent the stray light L2 from entering the photodetector 4 by increasing the distance D.
  • the distance D is set such that the area where the stray light L2 gathers (stray light area ⁇ ) is located in the first light receiving area 41 in the light receiving area 40 of the photodetector 4.
  • the light receiving area 40 of the photodetector 4 is divided into a first light receiving area 41 and a second light receiving area 42.
  • the first light receiving area 41 and the second light receiving area 42 are arranged in parallel along the Z-axis direction, which is a direction perpendicular to the wavelength axis A.
  • the photodetector 4 has a plurality of first photodetection channels 41a arranged along the X-axis direction, which is a direction parallel to the wavelength axis A, in the first light-receiving region 41.
  • the photodetector 4 has a plurality of second photodetection channels 42a arranged along the X-axis direction, which is a direction parallel to the wavelength axis A, in the second light-receiving region 42.
  • Each photodetection channel 42a, 42b is composed of a plurality of pixels arranged along the Z-axis direction.
  • the photodetector 4 receives the spectral image ⁇ in the first light receiving area 41 for the first exposure time, thereby transmitting the first spectral data S1 of the light to be measured L1 to each of the plurality of first light detection channels 41a. Output.
  • the photodetector 4 receives the spectral image ⁇ in the second light receiving region 42 for the second exposure time, thereby transmitting the second spectral data S2 of the light to be measured L1 to each of the plurality of second light detection channels 42a. Output each time.
  • the second exposure time is longer than the first exposure time.
  • the wavelength axis A extends in the X-axis direction, and images for each wavelength extend in the Z-axis direction.
  • the spectral image ⁇ has a vertically symmetrical shape with the boundary line between the first light-receiving region 41 and the second light-receiving region 42 as an axis of symmetry.
  • the output of the first spectrum data S1 will be explained in more detail.
  • charges generated and accumulated in a plurality of pixels included in each first light detection channel 41a are transferred to a first horizontal shift register (not shown).
  • the accumulated charges are added up for each first photodetection channel 41a in the first horizontal shift register (hereinafter, this operation will be referred to as "vertical transfer”).
  • the charges added up for each first photodetection channel 41a in the first horizontal shift register are sequentially read out from the first horizontal shift register (hereinafter, this operation will be referred to as "horizontal transfer”).
  • a voltage value corresponding to the amount of charge read out from the first horizontal shift register is output from a first amplifier (not shown), and the voltage value is AD converted by an AD converter into a digital value. In this way, the first spectrum data S1 is output.
  • the output of the second spectrum data S2 will be explained in more detail.
  • charges generated and accumulated in a plurality of pixels included in each second light detection channel 42a are transferred to a second horizontal shift register (not shown).
  • the accumulated charges are added up for each second photodetection channel 42a in the second horizontal shift register (vertical transfer).
  • the charges added up for each second photodetection channel 42a in the second horizontal shift register are sequentially read out from the second horizontal shift register (horizontal transfer).
  • a voltage value corresponding to the amount of charge read out from the second horizontal shift register is output from a second amplifier (not shown), and the voltage value is AD-converted by an AD converter into a digital value. In this way, the second spectrum data S2 is output.
  • the second exposure time in the second light receiving area 42 is longer than the first exposure time in the first light receiving area 41.
  • the exposure time of each area can be set using, for example, an electronic shutter.
  • the electronic shutter can be realized by using an anti-blooming gate (ABG).
  • a stray light region ⁇ formed by gathering the stray light L2 is located in the first light receiving region 41.
  • the distance D between the light incidence section 2 and the photodetector 4 in the Z-axis direction is set so that the stray light region ⁇ is located in the first light receiving region 41.
  • the distance D is set so that the stray light area ⁇ is not located in the second light receiving area 42. That is, the photodetector 4 is arranged so that the stray light region ⁇ , where the stray light L2 generated in the lens 5 gathers, is located in the first light receiving region 41 and not in the second light receiving region 42.
  • the stray light L2 is generated within the lens 5, the position of the stray light region ⁇ is adjusted by also adjusting the positional relationship between the lens 5 and the photodetector 4. Therefore, in the first spectrum data S1, stray light L2 is detected in the wavelength band ⁇ corresponding to the stray light region ⁇ . On the other hand, in the second spectrum data S2, stray light L2 is not detected in the wavelength band ⁇ corresponding to the stray light region ⁇ . In the example of FIG.
  • the stray light area ⁇ is an ellipse having a short axis in the Z-axis direction and a long axis in the X-axis direction, and the short axis is longer than the length of the first light receiving area 41 in the Z-axis direction. . Therefore, a part of the stray light region ⁇ is located in the first light receiving region 41.
  • the first spectrum data S1 is acquired in the first light receiving region 41 with a short exposure time.
  • the analysis unit 6 is able to acquire the light intensity in all wavelength bands without each pixel becoming saturated in all wavelength bands.
  • the second spectrum data S2 is acquired in the second light receiving region 42 with a long exposure time.
  • the second spectrum data S2 includes a wavelength band in which each pixel is saturated. Therefore, the analysis unit 6 cannot accurately obtain the light intensity in the wavelength band in which each pixel is saturated.
  • the first spectrum data S1 has noise superimposed in the wavelength band where the light intensity is low, and the S/N is poor.
  • the second spectral data S2 does not contain superimposed noise even in a wavelength band where the light intensity is low, and highly accurate data can be obtained.
  • stray light L2 is detected in the wavelength band ⁇ corresponding to the stray light region ⁇ .
  • the stray light L2 is detected as bump-like data in the first spectrum data S1.
  • the wavelength band ⁇ corresponding to the stray light region ⁇ is offset from the wavelength band where the light intensity is high.
  • the wavelength band ⁇ corresponding to the stray light region ⁇ is adjusted so as not to overlap a wavelength band with high light intensity.
  • the position of the stray light region ⁇ on the first light receiving region 41 is moved along the wavelength axis A.
  • the analysis unit 6 sets a threshold Th1, which is a higher light intensity than the light intensity of the stray light L2, in the first spectrum data S1.
  • the analysis unit 6 sets the portion equal to or greater than the threshold value Th1 as data S11, and the portion less than the threshold value Th1 as data S12.
  • the data S11 is data in a wavelength band that does not include the wavelength band ⁇ corresponding to the stray light region ⁇ among the first spectrum data S1.
  • the data S12 is data of a wavelength band including the wavelength band ⁇ corresponding to the stray light region ⁇ out of the first spectrum data S1. Therefore, the data in which the stray light L2 is detected is included in the data S12.
  • data of a wavelength band with low light intensity is included in data S12.
  • the analysis unit 6 sets a threshold Th2, which is a higher light intensity than the light intensity of the stray light L2, in the second spectrum data S2.
  • the analysis unit 6 sets the portion equal to or greater than the threshold Th2 as data S21, and the portion less than the threshold Th2 as data S22.
  • the data S21 is data in a wavelength band that does not include the wavelength band ⁇ corresponding to the stray light region ⁇ among the second spectrum data S2.
  • the data S22 is data of a wavelength band including the wavelength band ⁇ corresponding to the stray light region ⁇ among the second spectrum data S2.
  • the data of the wavelength band in which each pixel is saturated is included in the data S21.
  • the analysis unit 6 may set a portion exceeding the threshold Th1 as data S11, and may set a portion below the threshold Th1 as data S12. Further, in the second spectrum data S2, a portion exceeding the threshold Th2 may be set as data S21, and a portion below the threshold Th2 may be set as data S22.
  • the analysis unit 6 generates third spectral data (spectral data of the light to be measured L1) S3 based on the first spectral data S1 and the second spectral data S2. Specifically, the analysis unit 6 generates the third spectrum data S3 by connecting the data S11 and the data S22. The analysis unit 6 first excludes data S12 from the first spectrum data S1. Then, the analysis unit 6 cuts out the data S22 from the second spectrum data and connects it to the data S11 so that the data S22 complements the excluded data S12. Since the analysis unit 6 does not use the data S12 including the data in which the stray light L2 is detected in generating the third spectrum data S3, the data in which the stray light L2 is detected is excluded from the third spectrum data S3. Ru. Furthermore, the analysis unit 6 does not use the data S21 when generating the third spectrum data S3. Therefore, in the third spectrum data S3, the light intensity in all wavelength bands can be obtained without saturation of each pixel in all wavelength bands. [Action and effect]
  • the light-receiving region 40 of the photodetector 4 has a first light-receiving region 41 and a second light-receiving region 42 that are arranged in parallel in a direction perpendicular to the wavelength axis A of the spectral image ⁇ .
  • the detector 4 is arranged so that the stray light region ⁇ where the stray light L2 generated in the lens 5 gathers is located in the first light receiving region 41 and not in the second light receiving region 42. This reduces aberrations caused by the lens 5, compared to the case where the distance D between the light incidence section 2 and the photodetector 4 is increased so that the stray light area ⁇ is not located in the light receiving area 40 of the photodetector 4.
  • the photodetector 4 outputs the first spectral data S1 of the light to be measured L1 by receiving the spectral image ⁇ in the first light receiving area 41 for the first exposure time, and also outputs the first spectral data S1 of the light to be measured L1.
  • the second spectral data S2 of the light to be measured L1 is output, and the analysis unit 6 Spectral data S3 of the light to be measured L1 is generated based on the spectral data S2.
  • the wavelength band ⁇ corresponding to the stray light region ⁇ is offset from the wavelength band where the light intensity is high, and the first spectrum is set for the wavelength band where the light intensity is high.
  • the data S1 and using the second spectrum data S2 for the wavelength band where the light intensity is low it is possible to suppress a decrease in detection accuracy in measuring the light to be measured L1.
  • both a decrease in wavelength resolution and a decrease in detection accuracy can be suppressed in the measurement of the light to be measured L1.
  • the analysis unit 6 extracts data S11 of a wavelength band that does not include the wavelength band ⁇ corresponding to the stray light region ⁇ out of the first spectrum data S1, and data S11 corresponding to the stray light region ⁇ out of the second spectrum data S2.
  • Spectral data S3 is generated based on data S22 of a wavelength band including the wavelength band ⁇ .
  • stray light L2 is detected in the wavelength band ⁇ corresponding to the stray light region ⁇ in the first spectrum data S1.
  • stray light L2 is not detected in the wavelength band ⁇ corresponding to the stray light region ⁇ in the second spectrum data S2.
  • the influence of the stray light L2 is eliminated from the first spectrum data S1, and the data in the eliminated wavelength band is complemented with the data S22 of the second spectrum data S2, so that the measured light It is possible to further suppress a decrease in detection accuracy in the measurement of L1.
  • the photodetector 4 is offset from the light incidence section 2 to one side in the direction perpendicular to the wavelength axis A (the side on which the spectroscopic light L1 to be measured is incident). According to this, the arrangement of the photodetector 4 for positioning the stray light region ⁇ in the first light receiving region 41 can be easily and reliably realized.
  • the stray light L2 is generated in the lens 5, for example, due to multiple reflections of a part of the measured light L1 within the lens 5.
  • the dominant cause of the appearance of the stray light region ⁇ is multiple reflection of a portion of the measured light L1 within the lens 5. According to this, by eliminating the influence of the stray light region ⁇ , it is possible to further suppress a decrease in detection accuracy in measuring the light to be measured L1.
  • the lens 5 is a convex lens having a surface 5 a facing the light incidence section 2 and the photodetector 4 , and a convex surface 5 b facing the reflective diffraction grating 3 .
  • the light to be measured L1 incident from the light incidence part 2 is guided to the reflection type diffraction grating 3, and the spectral image ⁇ of the light to be measured L1 separated by the reflection type diffraction grating 3 is transmitted to the photodetector 4. It can be formed in the light receiving area 40 of.
  • the mask member 7 may be placed between the lens 5 and the photodetector 4. Also in this case, the photodetector 4 is arranged so that the stray light region ⁇ is located in the first light receiving region 41 and not in the second light receiving region 42. However, since the mask member 7 masks the stray light L2 from entering the first light receiving area 41, the stray light area ⁇ is not directly located in the first light receiving area 41. By arranging the mask member 7, the stray light L2 is not detected in the first spectrum data S1. According to this, by blocking the stray light L2 from entering the photodetector 4, the influence of the stray light L2 can be eliminated.
  • the mask member 7 is, for example, a light-shielding film.
  • the size of the outer edge of the mask member 7 when viewed from the Y-axis direction only needs to be larger than the size of the outer edge of the stray light region ⁇ .
  • the shape of the mask member 7 when viewed from the Y-axis direction is not limited to a rectangular shape, but may be a circular shape, an elliptical shape, or a triangular shape.
  • FIG. 6A is a diagram in which a mask member 7a for the purpose of correcting spectral sensitivity is placed on a light receiving area 40a that is not divided into a first light receiving area 41 and a second light receiving area 42.
  • the mask member 7a is designed based on the characteristics of the spectrum data shown in FIG. 6(b).
  • the spectrum data shown in FIG. 6(b) is data of the measured light L1 generated by the analysis section 6 when the mask member 7a is not disposed in the light receiving region 40a. In the spectrum data of FIG.
  • the light intensity is high in the central wavelength band (near 500 nm) of the light to be measured L1, and in the low wavelength band (near 200 nm to 300 nm) and high wavelength band (near 700 nm to 800 nm).
  • This data shows low light intensity.
  • the design concept of the mask member 7a is as follows. The design is such that the mask member 7a is not disposed in the low wavelength band (near 200 nm to 300 nm). The area of the mask member 7a gradually increases from the wavelength band of 300 nm onwards, and the area of the mask member 7a is designed to be the largest in the central wavelength band (near 500 nm).
  • the area of the mask member 7a is designed to gradually decrease from the central wavelength band (near 500 nm).
  • the mask member 7a is designed to match the position of the stray light region ⁇ .
  • FIG. 6(c) shows spectrum data of the measured light L1 generated by the analysis section 6 when the mask member 7a is placed in the light receiving area 40a.
  • the spectral data in FIG. 6(c) exhibits the same characteristics as the spectral data in FIG. 6(b) in the low wavelength band (around 200 nm to 300 nm). However, in the wavelength band after 300 nm, the light intensity becomes a constant value. This is because the spectral sensitivity is corrected by the mask member 7a in FIG. 6(a). Furthermore, the mask member 7a masks stray light L2 from entering the light receiving area 40a. As a result, stray light L2 is not detected in the spectrum data after sensitivity correction.
  • the mask member 7a has a structure divided into two parts, but as long as the above-mentioned design concept is followed, it may be in an integral shape or a structure divided into three or more parts. Good too.
  • the photodetector 4 may be a CMOS image sensor.
  • each pixel includes a photodiode (photoelectric conversion element) and an amplifier.
  • a photodiode stores electrons (photoelectrons) generated by photon input as electric charges.
  • the amplifier converts the charge accumulated in the photodiode into voltage and amplifies it.
  • the amplified voltage is transferred to the AD converter for each first photodetection channel 41a and every second photodetection channel 42a by switching the selection switch of each pixel.
  • the amplified voltage is converted into a digital value by an AD converter and output as first spectrum data S1 and second spectrum data S2.
  • the photodetector 4 may be a CCD-CMOS image sensor.
  • the photodetector 4 has a plurality of signal readout circuits corresponding to each first photodetection channel 41a and each second photodetection channel 42a.
  • Each signal readout circuit includes a transistor and a bonding pad for signal output.
  • a voltage corresponding to the amount of charge transferred from each first photodetection channel 41a and each second photodetection channel 42a is applied to the control terminal of the transistor.
  • a current having a magnitude corresponding to the voltage level is outputted from the output terminal of the transistor and taken out via the signal output bonding pad.
  • the extracted current is converted into a digital value by an AD converter and output as first spectrum data S1 and second spectrum data S2.
  • the stray light L2 is not limited to being generated in the lens 5, but may be generated in the optical path from the light incidence section 2 to the photodetector 4. For example, it may occur between the light incident part 2 and the lens 5, between the lens 5 and the reflective diffraction grating 3, or between the lens 5 and the photodetector 4.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PCT/JP2022/046725 2022-05-27 2022-12-19 分光測定装置 Ceased WO2023228450A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2024522897A JP7829031B2 (ja) 2022-05-27 2022-12-19 分光測定装置
CN202280096432.XA CN119256213A (zh) 2022-05-27 2022-12-19 分光测定装置
KR1020247033436A KR20250016081A (ko) 2022-05-27 2022-12-19 분광 측정 장치
US18/855,082 US20250244172A1 (en) 2022-05-27 2022-12-19 Spectrometry device
DE112022007307.1T DE112022007307T5 (de) 2022-05-27 2022-12-19 Spektrometrievorrichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022086930 2022-05-27
JP2022-086930 2022-05-27

Publications (1)

Publication Number Publication Date
WO2023228450A1 true WO2023228450A1 (ja) 2023-11-30

Family

ID=88918861

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2022/046725 Ceased WO2023228450A1 (ja) 2022-05-27 2022-12-19 分光測定装置

Country Status (6)

Country Link
US (1) US20250244172A1 (https=)
JP (1) JP7829031B2 (https=)
KR (1) KR20250016081A (https=)
CN (1) CN119256213A (https=)
DE (1) DE112022007307T5 (https=)
WO (1) WO2023228450A1 (https=)

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5657925A (en) * 1979-10-17 1981-05-20 Hitachi Ltd Multiwavelength spectrophotometer
JPS58178227A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd 多波長分光測光装置
JPH05231938A (ja) * 1991-02-07 1993-09-07 Res Dev Corp Of Japan 高感度多波長分光装置
JP2002005741A (ja) * 2000-06-21 2002-01-09 Otsuka Denshi Co Ltd スペクトル測定装置
JP2003515733A (ja) * 1999-12-01 2003-05-07 ハッチ カンパニー 内部鏡面反射を軽減する同心分光計
JP2007179002A (ja) * 2005-12-02 2007-07-12 Nano Photon Kk 光学顕微鏡及びスペクトル測定方法
JP2010117343A (ja) * 2008-10-15 2010-05-27 Otsuka Denshi Co Ltd 光学特性測定装置および光学特性測定方法
JP2012189440A (ja) * 2011-03-10 2012-10-04 Otsuka Denshi Co Ltd 分光特性測定方法および分光特性測定装置
JP2013506162A (ja) * 2009-09-30 2013-02-21 カール ツァイス マイクロスコピー ゲーエムベーハー 空間的な色分離による可変フィルタリングを用いたスペクトル検出器又はレーザ走査顕微鏡
JP2014048232A (ja) * 2012-09-03 2014-03-17 Otsuka Denshi Co Ltd 分光特性測定装置および分光特性測定方法
JP2014238385A (ja) * 2013-05-10 2014-12-18 株式会社リコー 分光特性取得装置、画像評価装置、画像形成装置
JP2015087144A (ja) * 2013-10-29 2015-05-07 セイコーエプソン株式会社 分光測定装置及び分光測定方法
WO2016129033A1 (ja) * 2015-02-09 2016-08-18 株式会社島津製作所 マルチチャンネル分光光度計及びマルチチャンネル分光光度計用データ処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7609381B2 (en) 2008-03-20 2009-10-27 The Aerospace Corporation Compact, high-throughput spectrometer apparatus for hyperspectral remote sensing

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5657925A (en) * 1979-10-17 1981-05-20 Hitachi Ltd Multiwavelength spectrophotometer
JPS58178227A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd 多波長分光測光装置
JPH05231938A (ja) * 1991-02-07 1993-09-07 Res Dev Corp Of Japan 高感度多波長分光装置
JP2003515733A (ja) * 1999-12-01 2003-05-07 ハッチ カンパニー 内部鏡面反射を軽減する同心分光計
JP2002005741A (ja) * 2000-06-21 2002-01-09 Otsuka Denshi Co Ltd スペクトル測定装置
JP2007179002A (ja) * 2005-12-02 2007-07-12 Nano Photon Kk 光学顕微鏡及びスペクトル測定方法
JP2010117343A (ja) * 2008-10-15 2010-05-27 Otsuka Denshi Co Ltd 光学特性測定装置および光学特性測定方法
JP2013506162A (ja) * 2009-09-30 2013-02-21 カール ツァイス マイクロスコピー ゲーエムベーハー 空間的な色分離による可変フィルタリングを用いたスペクトル検出器又はレーザ走査顕微鏡
JP2012189440A (ja) * 2011-03-10 2012-10-04 Otsuka Denshi Co Ltd 分光特性測定方法および分光特性測定装置
JP2014048232A (ja) * 2012-09-03 2014-03-17 Otsuka Denshi Co Ltd 分光特性測定装置および分光特性測定方法
JP2014238385A (ja) * 2013-05-10 2014-12-18 株式会社リコー 分光特性取得装置、画像評価装置、画像形成装置
JP2015087144A (ja) * 2013-10-29 2015-05-07 セイコーエプソン株式会社 分光測定装置及び分光測定方法
WO2016129033A1 (ja) * 2015-02-09 2016-08-18 株式会社島津製作所 マルチチャンネル分光光度計及びマルチチャンネル分光光度計用データ処理方法

Also Published As

Publication number Publication date
KR20250016081A (ko) 2025-02-03
JPWO2023228450A1 (https=) 2023-11-30
CN119256213A (zh) 2025-01-03
JP7829031B2 (ja) 2026-03-12
TW202405391A (zh) 2024-02-01
DE112022007307T5 (de) 2025-03-20
US20250244172A1 (en) 2025-07-31

Similar Documents

Publication Publication Date Title
JP6172982B2 (ja) 撮像装置及びカメラシステム
US12055437B2 (en) Spectrometer and imaging device
US12455192B2 (en) Solar reflection full-band hyperspectral imaging detection system
CN103221802A (zh) 分光光度计
US20020025164A1 (en) Solid-state imaging device and electronic camera and shading compensation method
US20120105847A1 (en) Spectrometric measurement system and method for compensating for veiling glare
KR101054017B1 (ko) 분광기의 보정방법
JP7829031B2 (ja) 分光測定装置
TWI917746B (zh) 分光測定裝置
RU2378704C2 (ru) Устройство для исследования документов
US20060125945A1 (en) Solid-state imaging device and electronic camera and shading compensaton method
US7576316B2 (en) Apparatus, microscope with an apparatus, and method for calibration of a photosensor chip
CN109997228A (zh) 摄像元件以及摄像装置
CN109141634B (zh) 红外探测器暗背景值计算方法、装置、设备、系统及介质
US20090173891A1 (en) Fluorescence detection system
JPS58178227A (ja) 多波長分光測光装置
TW201829991A (zh) 光譜測定裝置及光譜測定方法
KR102130418B1 (ko) 다소자 분광분석기
JP2015014732A (ja) 距離検出装置及び距離検出方法
KR20260040000A (ko) 광 검출 장치, 막두께 계측 장치, 반도체 프로세스 감시 장치 및 노이즈 검출 방법
KR20260048546A (ko) 광 검출 장치, 막두께 계측 장치, 반도체 프로세스 감시 장치 및 노이즈 검출 방법
KR20250115991A (ko) 막 두께 계측 장치 및 막 두께 계측 방법
US20240298893A1 (en) Examination apparatus
KR20250116042A (ko) 막 두께 계측 장치 및 막 두께 계측 방법
TW202430834A (zh) 膜厚計測裝置及膜厚計測方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22943849

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2024522897

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 18855082

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 202280096432.X

Country of ref document: CN

WWE Wipo information: entry into national phase

Ref document number: 112022007307

Country of ref document: DE

WWP Wipo information: published in national office

Ref document number: 202280096432.X

Country of ref document: CN

WWP Wipo information: published in national office

Ref document number: 1020247033436

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 112022007307

Country of ref document: DE

122 Ep: pct application non-entry in european phase

Ref document number: 22943849

Country of ref document: EP

Kind code of ref document: A1

WWP Wipo information: published in national office

Ref document number: 18855082

Country of ref document: US