DE112022007307T5 - Spektrometrievorrichtung - Google Patents

Spektrometrievorrichtung Download PDF

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Publication number
DE112022007307T5
DE112022007307T5 DE112022007307.1T DE112022007307T DE112022007307T5 DE 112022007307 T5 DE112022007307 T5 DE 112022007307T5 DE 112022007307 T DE112022007307 T DE 112022007307T DE 112022007307 T5 DE112022007307 T5 DE 112022007307T5
Authority
DE
Germany
Prior art keywords
light
measured
spectral data
optical detector
scattered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112022007307.1T
Other languages
German (de)
English (en)
Inventor
Kenichi Ohtsuka
Hideki MASUOKA
Kazuya Iguchi
Ikuo Arata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of DE112022007307T5 publication Critical patent/DE112022007307T5/de
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0278—Control or determination of height or angle information for sensors or receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE112022007307.1T 2022-05-27 2022-12-19 Spektrometrievorrichtung Pending DE112022007307T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022086930 2022-05-27
JP2022-086930 2022-05-27
PCT/JP2022/046725 WO2023228450A1 (ja) 2022-05-27 2022-12-19 分光測定装置

Publications (1)

Publication Number Publication Date
DE112022007307T5 true DE112022007307T5 (de) 2025-03-20

Family

ID=88918861

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112022007307.1T Pending DE112022007307T5 (de) 2022-05-27 2022-12-19 Spektrometrievorrichtung

Country Status (6)

Country Link
US (1) US20250244172A1 (https=)
JP (1) JP7829031B2 (https=)
KR (1) KR20250016081A (https=)
CN (1) CN119256213A (https=)
DE (1) DE112022007307T5 (https=)
WO (1) WO2023228450A1 (https=)

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5657925A (en) * 1979-10-17 1981-05-20 Hitachi Ltd Multiwavelength spectrophotometer
JPS58178227A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd 多波長分光測光装置
JPH05231938A (ja) * 1991-02-07 1993-09-07 Res Dev Corp Of Japan 高感度多波長分光装置
US6538736B1 (en) * 1999-12-01 2003-03-25 Hach Company Concentric spectrometer with mitigation of internal specular reflections
JP4372314B2 (ja) * 2000-06-21 2009-11-25 大塚電子株式会社 スペクトル測定装置
JP4887989B2 (ja) * 2005-12-02 2012-02-29 ナノフォトン株式会社 光学顕微鏡及びスペクトル測定方法
US7609381B2 (en) 2008-03-20 2009-10-27 The Aerospace Corporation Compact, high-throughput spectrometer apparatus for hyperspectral remote sensing
JP5150939B2 (ja) * 2008-10-15 2013-02-27 大塚電子株式会社 光学特性測定装置および光学特性測定方法
DE102009043745A1 (de) * 2009-09-30 2011-04-07 Carl Zeiss Microlmaging Gmbh Spektraldetektor mit variabler Filterung durch räumliche Farbtrennung und Laser-Scanning- Mikroskop
JP5769453B2 (ja) * 2011-03-10 2015-08-26 大塚電子株式会社 分光特性測定方法および分光特性測定装置
JP5484537B2 (ja) * 2012-09-03 2014-05-07 大塚電子株式会社 分光特性測定装置および分光特性測定方法
JP6311267B2 (ja) * 2013-05-10 2018-04-18 株式会社リコー 分光特性取得装置、画像評価装置、画像形成装置
JP2015087144A (ja) * 2013-10-29 2015-05-07 セイコーエプソン株式会社 分光測定装置及び分光測定方法
US10060795B2 (en) * 2015-02-09 2018-08-28 Shimadzu Corporation Multichannel spectrophotometer and data processing method for multichannel spectrophotometer

Also Published As

Publication number Publication date
KR20250016081A (ko) 2025-02-03
JPWO2023228450A1 (https=) 2023-11-30
CN119256213A (zh) 2025-01-03
JP7829031B2 (ja) 2026-03-12
TW202405391A (zh) 2024-02-01
US20250244172A1 (en) 2025-07-31
WO2023228450A1 (ja) 2023-11-30

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