WO2023221286A1 - 晶圆盒 - Google Patents

晶圆盒 Download PDF

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Publication number
WO2023221286A1
WO2023221286A1 PCT/CN2022/107293 CN2022107293W WO2023221286A1 WO 2023221286 A1 WO2023221286 A1 WO 2023221286A1 CN 2022107293 W CN2022107293 W CN 2022107293W WO 2023221286 A1 WO2023221286 A1 WO 2023221286A1
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WO
WIPO (PCT)
Prior art keywords
door panel
plate
opening
panel body
side wall
Prior art date
Application number
PCT/CN2022/107293
Other languages
English (en)
French (fr)
Inventor
叶莹
王旭晨
祝佳辉
王文广
Original Assignee
上海果纳半导体技术有限公司
上海果纳半导体技术有限公司武汉分公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 上海果纳半导体技术有限公司, 上海果纳半导体技术有限公司武汉分公司 filed Critical 上海果纳半导体技术有限公司
Publication of WO2023221286A1 publication Critical patent/WO2023221286A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Definitions

  • the invention relates to the field of semiconductor processing technology, and in particular to a wafer box with a door opening and closing drive mechanism.
  • a wafer box is a sealed container used to store and transfer wafers. It includes a box with an opening and a door that can close the opening.
  • the wafer loader When picking up and placing wafers from the wafer box, it is necessary to open the door of the wafer box through the wafer loader, which requires a space for the movement and placement of the door inside the wafer loader, and the wafer loader needs to be placed inside the wafer loader.
  • the loader detects the position and orientation of the wafers in the wafer box, the detection sensor on the wafer loader needs to penetrate deep into the inside of the wafer box.
  • the wafer loader opens or closes the door, causing the wafer loader to The drive requires more actions and the stroke is more complex.
  • the purpose of the present invention is to provide a wafer box that reduces the space required for door movement and placement, and uses its own door panel opening and closing mechanism to realize automatic opening and closing of the wafer box, thereby simplifying The action stroke of the wafer loader is determined.
  • a wafer box which includes a box body, a door panel and a door panel opening and closing mechanism.
  • An opening is provided on one side of the box body, and the door panel can be closed driven by the door panel opening and closing mechanism. or to open an opening;
  • the box body includes an annular side plate located on its side.
  • the annular side plate is surrounded by the side plate body, the transition plate and the opening plate.
  • the circle where the cross section of the outer wall of the side plate body is located is eccentric to the circle where the cross section of the outer wall of the opening plate is located.
  • the door panel includes a door panel body that can move along the annular side panel, and the inner side wall of the door panel body is connected to the outer side of the opening panel. Wall shape matches.
  • one of the transition plates is in contact with the inner wall of the door panel body, and the other transition plate is pressed against the inner wall of the door panel body; and the The circle where the cross section of the inner side wall is located is concentric with the circle where the cross section of the outer side wall of the opening plate is located, and the axis of the door panel body where the outer side wall of the side panel body is located is the axis of rotation.
  • the door panel body (and opening plate) is usually designed to be concentric with the side panel body. This design will cause the door panel body to always transition to the side closer to the opening direction during the opening and closing process of the door panel body.
  • the plates are in contact and friction until the door panel body is fully opened; in the long run, not only particles are easily generated, but also the continuous friction during the opening and closing process will cause wear of the transition plate and the inner wall of the door panel body, resulting in the door panel body being unable to completely close the opening. Therefore, setting the door panel body (and opening plate) eccentrically to the side panel body can effectively reduce the friction between the door panel body and the transition plate, thereby reducing particle generation and improving sealing performance.
  • the inner wall of the door panel body and the outer wall of the opening panel are concentrically arranged and eccentrically arranged with the side panel body.
  • the door panel body rotates with the center of the circle where the side panel body is located, that is, the door panel body is eccentric. Rotating, at this time, the motion trajectory of the inner wall of the door panel body deviates from the circle where the outer wall of the opening plate is located. By adjusting the eccentric distance, the inner wall of the door panel body can exactly contact when the opening is closed.
  • the inner wall of the door panel body will be in line with the transition plate close to the opening direction.
  • the transition plate on the side first contacts and rubs and then gradually moves away).
  • the door panel body will only contact and rub with the transition plate on the side close to the opening direction when it is about to close, and the moment the door panel body is completely closed, , the door panel body slightly squeezes the transition plate on the side away from the opening direction, and just contacts the transition plate on the side close to the opening direction to improve the sealing effect.
  • This setting can effectively reduce the gap between the door panel body and the opening during the opening process.
  • the contact friction between the transition plates thereby reducing the increase in particles caused by continuous contact friction, can improve cleanliness to a certain extent.
  • one of the transition plates is in contact with the inner wall of the door panel body, and the other transition plate is pressed against the inner wall of the door panel body; and the The circle where the cross section of the inner wall is located is eccentric to the circle where the outer wall cross section of the opening plate is located; the axis of the door panel body where the inner wall of the door panel body is located is the axis of rotation.
  • the inner wall of the door panel body and the outer wall of the opening plate are eccentrically arranged, when the opening is closed, the inner wall of the door panel body can just touch the transition plate on the side close to the opening direction, and can be slightly squeezed on the side away from the opening direction. on the transition plate; when the opening is opened, the door panel body rotates with the center of the circle where the inner wall is located as the center of rotation. Since the inner wall of the door panel body and the outer wall of the opening panel are eccentrically arranged, that is, the movement trajectory of the inner wall of the door panel body is Deviating from the circle where the outer wall of the opening plate is located, when the door panel body first starts to rotate, the inner side wall of the door panel body can be instantly separated from the transition plates on both sides.
  • the inner side wall of the door panel body will not move. It will come into contact with the transition plate and side panel body, that is, during the entire process of opening the opening, a certain distance can be maintained between the door panel body and the transition plate and side panel body, thereby avoiding friction and reducing the generation of particles; similarly, in When the opening is closed, the inner side wall of the door panel body will gradually approach the transition plate on the side away from the opening direction, and the movement trajectory of the inner side wall of the door panel body will gradually approach the circle where the opening panel is located; when the inner side wall of the door panel body contacts the transition plate away from the opening direction When the transition plate is on one side, the door panel body can squeeze the transition plate on the side away from the opening direction. At this time, the transition plate on the side close to the opening direction can just fit on the inner side wall of the door panel body to form a seal.
  • the door panel also includes a drive connection plate located at the bottom of the box body.
  • the drive connection plate includes a drive connection piece with an arc-shaped structure.
  • the outer arc surface of the drive connection piece is connected to the door panel body, and the inner arc surface is provided with a drive connection lug.
  • the driving connection lug is rotatably set at the bottom of the box body and connected with the door panel opening and closing mechanism.
  • the rotation axis center line of the driving connecting lug coincides with the rotation axis center line of the door panel body to ensure concentric rotation of the driving connecting lug and the door panel body.
  • the door panel opening and closing mechanism includes a driving gear and a driven gear capable of meshing transmission.
  • the driving gear is installed at the bottom of the box body, and the driven gear is installed on the driving connection lug. Through the cooperation of the driving gear and the driven gear, the movement of the door panel along the box body is realized.
  • the door panel opening and closing mechanism also includes a micro-movement component.
  • the micro-movement component includes a raised block and a paddle used in conjunction.
  • the raised block is integrally provided on the outer wall of the driving connection lug; the paddle is coaxially provided on the driving gear. , and can push the raised block to move.
  • the paddle includes a paddle connection part fixed on the driving gear.
  • One side of the paddle connection part is integrally provided with a fan-shaped body in a fan-shaped structure; the protruding block is provided with abutment for the fan-shaped body to abut.
  • the arc surface can be tangent to the outer arc surface of the fan-shaped body by contacting the arc surface. And when the outer arc surface of the fan-shaped body is tangent to the abutting arc surface, the door panel is adjusted to a position where the opening is completely sealed.
  • the outer wall of the driving gear is composed of a toothed part and a toothless part, and when the paddle is fixed to the driving gear, the sector-shaped body faces the toothless part.
  • the sector-shaped body can be set between the two end points at the junction of the toothed part and the toothless part to ensure that the micro-moving assembly can be activated again after the toothed part of the driving gear and the driven gear are completely out of mesh.
  • the door panel In the initial state, the door panel completely closes the opening, the outer arc surface of the sector-shaped body is tangent to the abutting arc surface of the convex block, and the toothless part of the driving gear faces the driven gear; the driving gear rotates counterclockwise and drives the paddle to rotate synchronously. , the outer arc surface of the sector-shaped body moves away from the contact arc surface.
  • the door panel remains stationary; as the driving gear continues to rotate, the toothed portion of the driving gear begins to mesh with the driven gear, thereby driving the driven gear.
  • the gear rotates, and the door panel rotates and opens the opening (at this time, the raised block rotates with the door panel to the non-working area of the paddle); when the door panel begins to close from the open state, the driving gear rotates clockwise and drives the paddle to rotate synchronously. , the toothed part of the driving gear meshes with the driven gear in reverse, and drives the door panel (including the convex block) to move in the direction of closing the opening, until the toothless part of the driving gear rotates to the side facing the driven gear, so that the driving gear The gear and the driven gear are out of mesh.
  • the driven gear and the door panel stop rotating, and the convex block has rotated with the door panel into the working area of the paddle; as the driving gear continues to rotate, the paddle (side of the sector-shaped body) wall) can contact the abutting arc surface of the convex block and push the convex block to rotate, thereby driving the door panel to continue moving in the direction of closing the opening until the outer arc surface of the fan-shaped body and the abutting arc surface of the convex block At this time, the door panel has completely closed the opening, and the sector-shaped body can no longer push the raised block to rotate.
  • the radial size of the driving gear is smaller than the radial size of the driven gear. This avoids the problem that during the driving process of the door panel opening and closing mechanism, the toothless portion of the driving gear faces one side of the driven gear multiple times due to multiple rotations, causing the driven gear to frequently lose teeth.
  • the starting end of the toothed portion is provided with movable teeth that can expand and contract along the radial direction of the driving gear.
  • setting the starting end of the toothed part as a movable tooth can avoid the tooth top of the driving gear facing the tooth top of the driven gear, causing the driving gear to be in contact with the driven gear.
  • the gears squeeze against each other causing them to become stuck.
  • the driving gear there are spring grooves, limiting through holes, and movable tooth grooves in sequence along the radial direction where the starting end of the toothed portion is located.
  • the limiting through holes are movable with movable teeth connected to the springs. .
  • the moving direction of the movable tooth can be limited by the arrangement of the limiting through hole.
  • the tooth tip of the movable tooth retracts under force, and the movable gear rod moves along the limiting through hole in the direction of the spring groove, and drives the spring to compress. Until the tip of the movable tooth leaves the driven gear, at this time, the rebound force of the spring drives the movable tooth back to its original position.
  • the movable tooth includes a movable tooth bar, one end of the movable tooth bar extends into the spring groove, and the other end extends to the toothed portion and forms a tooth tip that can mesh with the driven gear.
  • the spring is arranged in the spring groove along the radial direction of the driving gear, one end of which is in contact with the spring groove, and the other end is in contact with the movable gear rod; when the spring is in its natural state, the gap between the movable gear rod and the spring groove is There is a gap between the groove bottoms to provide space for the retraction of the movable gear rod.
  • annular groove is provided on the side wall of the movable gear rod, and the spring is sleeved on the movable gear rod, with one end thereof in contact with the annular groove and the other end in contact with the spring groove.
  • the door panel also includes an upper driven plate fixed on the upper end of the door panel body.
  • the upper driven plate is rotationally connected to the top of the box body, and the rotation axis of the driven plate coincides with the rotation axis of the door panel body.
  • the cooperation between the upper driven plate and the driving connection plate can ensure that the forces on the upper and lower ends of the door panel body are balanced during the rotation of the door panel body, and the upper and lower ends of the door panel body are limited to improve the stability of the movement of the door panel body.
  • the top of the box body is also provided with a positioning plate fixedly connected to the upper driven plate, and a positioning boss is symmetrically provided on the side wall of the positioning plate to facilitate identification of the closed position of the door panel.
  • the positioning plate is movablely mounted on the top of the bearing installation shaft on the top plate, and its side is fixed to the upper driven plate through a plurality of screws.
  • the positioning plate can be set into a circular structure, and the radial size of the positioning plate can be set to be larger than the radial size of the outer side wall of the door panel body, so as to achieve full coverage of the door panel body.
  • the positioning bosses on the positioning plate can be aligned with the junction of the side plate body and the transition plate respectively; when the door panel rotates, the positioning plate can rotate synchronously along the bearing installation axis. Through the setting of the positioning plate and positioning boss, it can be visually observed whether the door panel completely closes the opening.
  • sealing strips that can abut against the inner wall of the door panel body are arranged around the opening.
  • the sealing performance when the opening is closed is further improved by the arrangement of the sealing strip, and the wear on the inner wall of the door panel body can be reduced through elastic extrusion, thereby increasing the service life of the door panel body to a certain extent.
  • the circle where the cross-section of the outer side wall of the door panel body is located is concentric with the circle where the cross-section of the outer side wall of the side panel body is located, so that during the rotation process of the door panel body, the distance between its outer side wall and the outer side wall of the side panel body is the same, effectively reducing During the opening and closing process of the door panel body, the space occupied by its outer side wall makes the overall space occupied by the wafer box more compact.
  • the circle where the cross-section of the outer wall of the door panel body is located is concentric with the circle where the cross-section of the inner wall of the door panel body is located, making the thickness of the door panel body uniform and effectively reducing the processing difficulty of the door panel body.
  • Figure 1 is a schematic structural diagram of a wafer box according to Embodiment 1 of the present invention.
  • Figure 2 is an exploded schematic diagram of the wafer box according to Embodiment 1 of the present invention.
  • Figure 3 is a schematic structural diagram of the wafer box after removing the positioning plate in Embodiment 1 of the present invention
  • Figure 4 is a schematic structural diagram of the box in Embodiment 1 of the present invention.
  • Figure 5 is a bottom view of the annular side plate in Embodiment 1 of the present invention.
  • Figure 6 is a schematic structural diagram of the door panel in Embodiment 1 of the present invention.
  • Figure 7 is a bottom view of the door panel in Embodiment 1 of the present invention.
  • Figure 8 is a schematic cross-sectional view of the door panel and annular side panel when the opening is closed in Embodiment 1 of the present invention.
  • Figure 9 is a schematic cross-sectional view of the door panel and annular side panel during the opening opening process in Embodiment 1 of the present invention.
  • Figure 10 is a schematic structural diagram of the cooperation between the driving gear and the driven gear when the opening is closed in Embodiment 1 of the present invention.
  • Figure 11 is a partial enlarged view of part A in Figure 10;
  • Figure 12 is a schematic structural diagram of the driving gear and the driven gear starting to mesh in Embodiment 1 of the present invention.
  • Figure 13 is a partial enlarged view of part B in Figure 12;
  • Figure 14 is a schematic structural diagram of the cooperation between the driving gear and the driven gear when the opening is opened in Embodiment 1 of the present invention
  • Figure 15 is a schematic structural diagram of the driving gear in Embodiment 1 of the present invention.
  • Figure 16 is a schematic structural diagram of the movable teeth in Embodiment 1 of the present invention.
  • Figure 17 is a bottom view of the door panel in Embodiment 3 of the present invention.
  • Figure 18 is a schematic cross-sectional view of the door panel and annular side panel when the opening is closed in Embodiment 2 of the present invention.
  • Figure 19 is a schematic cross-sectional view of the door panel and annular side panel during the opening opening process in Embodiment 2 of the present invention.
  • 1-box body 11-opening; 12-wafer storage rack; 13-top plate; 14-annular side plate; 141-side plate body; 142-transition plate; 143-opening plate; 15-bottom plate;
  • 2-Door panel 21-Door panel body; 22-Drive connection plate; 221-Drive connection piece; 222-Drive connection lug; 223-Bearing mounting hole; 23-Bearing; 24-Upper driven plate; 241-Upper connection piece; 242-upper connecting lug;
  • 3-door panel opening and closing mechanism 31-driving gear; 311-key socket; 312-with teeth; 313-without teeth; 32-driven gear; 33-convex block; 331-butting arc surface; 34 -pick; 341-pick connection part; 342-sector-shaped body; 35-movable teeth; 351-movable gear rod; 3511-annular groove; 352-tooth tip;
  • a wafer box of the present invention includes a box body 1, a door panel 2, and a door panel opening and closing mechanism 3. Among them, an opening 11 is provided on one side of the box body 1, and an opening 11 is provided inside the box body 1. There is a cavity, and a wafer storage rack 12 for storing wafers 4 is provided in the cavity; the door panel 2 is movably arranged on the outside of the box body 1, and can close or open the opening 11 driven by the door panel opening and closing mechanism 3.
  • the box body 1 has a hollow cylindrical structure, which includes an integrally formed top plate 13, annular side plates 14 and a bottom plate 15.
  • the annular side plate 14 consists of a side plate body 141, a transition The plate 142 and the opening plate 143 surround it.
  • two transition plates 142 are provided, respectively used to connect two ends of the side plate body 141 and two ends of the opening plate 143 .
  • the opening plate 143 is provided with an opening 11 for the wafer 4 to enter and exit, and both ends of the opening 11 extend to the edges of the two transition plates 142 respectively.
  • the side plate body 141 and the opening plate 143 both have arc-shaped structures.
  • Both ends of the inner wall of the opening plate 143 extend toward the transition plate 142 to enhance the strength of the opening plate 143.
  • the circle where the cross section of the outer wall of the opening plate 143 is located is eccentrically arranged with the circle where the cross section of the outer wall of the side plate body 141 is located.
  • the circle where the cross-section of the outer side wall of the side plate body 141 lies is located inside the circle where the cross-section of the outer side wall of the opening plate 143 lies.
  • r is the radius of the circle where the cross-section of the outer side wall of the side plate body 141 is located
  • R is the radius of the circle where the cross-section of the outer side wall of the opening plate 143 is located
  • e is the radius of the circle where the cross-section of the outer side wall of the opening plate 143 is located.
  • the distance between the center of the circle and the center of the circle where the outer wall cross-section of the side plate body 141 is located is referred to as the eccentric distance (ie, the distance between the two center centers).
  • the door panel 2 includes an integrally formed door panel body 21 and a driving connecting plate 22.
  • the driving connecting plate 22 is located below the box body 1 and is connected to the door panel opening and closing mechanism 3.
  • the door panel body 21 is located on the annular side panel. 14, which can move along the outer side wall of the annular side plate 14 to open or close the opening 11 on the opening plate 143 under the driving of the door panel opening and closing mechanism 3.
  • the door panel body 21 has an arc-shaped structure.
  • the inner side wall of the door panel body 21 matches the shape of the outer side wall of the opening plate 143 and is arranged concentrically.
  • the circle where the cross section is located is concentrically arranged, so that the inner side wall and the outer side wall of the door panel body 21 are eccentrically arranged, and the eccentric distance is the same as the eccentric distance between the outer side wall of the opening plate 143 and the outer side wall of the side panel body 141 .
  • M is the radius of the circle where the cross section of the outer side wall of the door panel body 21 is located.
  • the door panel body 21 takes the axis of the side panel body 141 as the rotation axis, and when the opening 11 is in a closed state, the door panel body 21 can abut against the transition plate 142 on one side. , and presses the transition plate 142 on the other side.
  • the counterclockwise direction in the figure is the direction in which the door panel body 21 opens the door.
  • the opening 11 is in a closed state. Since the inner wall of the door panel body 21 and the outer wall of the opening plate 143 are both in contact with the side panels,
  • the body 141 is arranged eccentrically (in Figure 8, the center of the inner wall of the door panel body 21 and the outer wall of the opening plate 143 are the same, and the center of the circle is located to the left of the center of the circle of the outer wall of the side panel body 141), and the door panel body 21 is based on the side panel body.
  • the center of the circle where 141 is located rotates, that is, the movement track of the inner wall of the door panel body 21 deviates from the circle where the outer wall of the opening plate 143 is located.
  • the door panel body 21 By adjusting the eccentric distance, when the opening 11 is in a closed state, the door panel body 21 The inner wall of the door panel can just abut the transition plate 142 on the right side, and can be slightly squeezed on the transition panel 142 on the left side; when the opening 11 is opened, as shown in Figure 9, the door panel body 21 rotates counterclockwise, and the door panel The inner wall of the body 21 begins to rotate along its corresponding motion trajectory.
  • the inner wall of the door panel body 21 is instantly separated from the transition plate 142 on the left side, and the inner wall of the door panel body 21 is gradually separated from the transition plate on the right side. Since the movement trajectory of the inner wall of the door panel body 21 intersects with the circle where the outer wall of the opening plate 143 is located near the transition plate 142 on the right side, when the door panel body first starts to rotate, the inner wall of the door panel body 21 is squeezed in On the transition plate 142 on the right side, when the inner wall of the door panel body 21 moves to the point where its motion trajectory gradually deviates from the circle where the outer wall of the opening plate 143 is located, the door panel body 21 will separate from the transition plate 142 on the right side, and thereafter.
  • the door panel body 21 (and the opening plate 143) and the side panel body 141 are arranged concentrically, during the opening and closing process of the door panel body 21, the door panel body 21 will always be in contact and friction with the transition plate 142 on the right side. , not only are particles easily generated, but also the wear of the transition plate 142 caused by long-term friction will cause the door panel body 21 to be unable to seal the opening 11 . Therefore, in this embodiment, setting the door panel body 21 (and the opening plate 143) eccentrically with the side panel body 141 can effectively reduce the friction between the door panel body 21 and the transition plate 142, thus reducing the generation of particles while improving sealing. performance.
  • the widths of the two transition plates 142 are different, and the transition plate 142 on the side close to the opening direction of the door panel body 21 is narrower. .
  • configuring the outer wall of the door panel body 21 to be concentric with the outer wall of the side panel body 141 can ensure that during the rotation of the door panel body 21, the distance between the outer wall of the door panel body 21 and the outer wall of the side panel body 141 is the same, effectively reducing During the opening and closing process of the door panel body 21, the space occupied by the outer side wall of the door panel body 21 makes the overall space occupied by the wafer box more compact.
  • sealing strips are also arranged around the opening 11 .
  • the driving connecting plate 22 includes a driving connecting piece 221 with an arc-shaped structure, and the outer arc surface and the inner arc surface of the driving connecting piece 221 are concentrically arranged.
  • the outer arc surface of the driving connecting piece 221 is integrally formed with the lower end of the door panel body 21, and the circle where the outer arc surface is located is located on the same axis as the circle where the outer side wall cross section of the door panel body 21 is located.
  • a driving connecting lug 222 for connecting the door panel opening and closing mechanism 3 is integrally provided on the inner arc surface of the driving connecting piece 221.
  • the driving connecting lug 222 has a cylindrical structure, with an axis located in the center of the outer wall of the door panel body 21.
  • the bearing mounting holes 223 are coaxially arranged.
  • a bearing 23 is installed in the bearing mounting hole 223 to reduce the rotational friction of the driving connection lug 222 , and the corresponding bearing mounting shaft of the bearing 23 is fixed on the bottom plate 15 at the bottom of the box body 1 .
  • Such an arrangement enables the driving connecting lug 222 to drive the door panel body 21 to perform a rotational movement with the axis of the outer wall of the side panel body 141 as the rotation axis, so as to ensure that when the door panel body 21 rotates, the distance between the door panel body 21 and the transition plate is reduced. 142 bumps.
  • the door panel opening and closing mechanism 3 includes a driving gear 31 and a driven gear 32 capable of meshing transmission.
  • the driving gear 31 is rotatably installed on the bottom plate 15 at the bottom of the box body 1, and is provided with a key slot 311 for driving by a driving source (the driving source is usually a driving device on the wafer loader).
  • the driven gear 32 is set on the corresponding bearing installation shaft of the bearing 23 and is coaxially fixed to the driving connecting lug 222 of the driving connecting piece 221 through screws. Through the cooperation between the driving gear 31 and the driven gear 32, the rotation of the driving connecting plate 22 is realized, thereby realizing the movement of the door panel body 21 along the annular side plate 14.
  • the door panel opening and closing mechanism 3 is added with a micro-movement component to cancel the meshing transmission between the driving gear 31 and the driven gear 32 when the door panel body 21 is about to close the opening 11 and use the micro-movement component instead.
  • the door panel body 21 completely closes the opening 11 .
  • the micro-movement assembly includes a raised block 33 and a paddle 34 that are used together.
  • the raised block 33 is integrally provided on the outer wall of the driving connection lug 222 and has an abutment on one side for the paddle 34 to abut. Arc surface 331.
  • the paddle 34 is coaxially arranged on the driving gear 31 and can rotate synchronously with the driving gear 31 . And when the driving gear 31 is installed on the bottom plate 15, the paddle 34 and the protruding block 33 are located at the same height.
  • the paddle 34 includes a paddle connection part 341 fixed on the driving gear 31.
  • One side of the paddle connection part 341 is integrally provided with a sector-shaped body 342 that has a sector-shaped structure and is coaxially arranged with the driving gear 31, and the sector-shaped body 342 is The outer arc surface can be tangent to the contact arc surface 331. And when the outer arc surface of the sector-shaped body 342 is tangent to the contact arc surface 331, the door panel 2 is adjusted to a position in which the opening 11 is completely closed.
  • the radius corresponding to the outer arc surface of the sector-shaped body 342 is the same as the radius corresponding to the contact arc surface 331 .
  • the driving gear 31 is set as a non-full-tooth gear, that is, the outer wall of the driving gear 31 is composed of a toothed portion 312 and a toothless portion 313, and the toothed portion 312 can mesh with the driven gear 32 , but the toothless portion 313 cannot mesh with the driven gear 32 .
  • the sector-shaped body 342 of the paddle 34 is directed toward the side without the toothed portion 313 , and the sector-shaped body 342 is located between the two end points of the boundary between the toothless portion 313 and the toothed portion 312 .
  • the door panel body 21 completely closes the opening 11, the outer arc surface of the sector body 342 is tangent to the abutting arc surface 331 of the protruding block 33, and the toothless portion of the driving gear 31 313 is aligned with the driven gear 32 (at this time, the driving gear 31 and the driven gear 32 are in a non-meshing state); the driving device of the wafer loader drives the driving gear 31 to rotate counterclockwise, and drives the paddle 34 to rotate synchronously, sector-shaped The outer arc surface of the body 342 moves in the direction away from the contact arc surface 331. At this time, the driven gear 32 does not move, and the door panel 2 and the protruding block remain stationary.
  • the toothed portion 312 of the driving gear 31 begins to align with the driven gear 32 and enters the meshing state with the driven gear 32, thereby driving the driven gear 32 to rotate synchronously, and the door panel 2 rotates accordingly and begins to open the opening. 11.
  • the raised block 33 rotates with the door panel 2 to the non-working area of the paddle 34 (see Figure 14); when the door panel 2 starts to close from the open state, the driving device of the wafer loader drives the driving gear 31 rotates clockwise, and the paddle 34 rotates accordingly.
  • the driven gear 32 can rotate accordingly, and the convex block 33 rotates accordingly. And drive the door panel 2 to move in the direction of closing the opening 11 until the toothless portion 313 of the driving gear 31 rotates to the side close to the driven gear 32, so that the driving gear 31 and the driven gear 32 are out of mesh. At this time, the driven gear 32.
  • the door panel 2 stops rotating, and the protruding block 33 has rotated with the door panel 2 into the working area of the paddle 34; as the driving gear 31 continues to rotate, the paddle 34 (the side wall of the sector-shaped body 342 and its outer arc surface) The junction) can contact the arc surface 331 of the protruding block 33 and push the protruding block 33 to rotate, thereby driving the door panel 2 to continue to move in the direction of closing the opening 11 until the outer arc surface of the fan-shaped body 342 and the protruding surface 342 are connected.
  • the contact arc surface 331 of the raised block 33 is tangent. At this time, the door panel 2 has completely closed the opening 11, and the sector-shaped body 342 can no longer push the raised block 33 to rotate.
  • the toothless portion 313 of the driving gear 31 faces the driven gear 32 multiple times due to multiple rotations, causing the driven gear 32 to frequently lose teeth, thereby causing power loss.
  • the radial size of the driving gear 31 is set to be smaller than the radial size of the driven gear 32 so that the opening and closing action of the opening 11 can be completed with a single rotation of the driving gear 31 .
  • the tooth top of the driving gear 312 is opposite to the tooth top of the driven gear 32, causing the driving gear 31 to be in contact with the driven gear 32. 32 are pressed against each other and cause jamming, the starting teeth of the toothed portion 312 can be set as movable teeth 35 that can expand and contract along the radial direction of the driving gear 31 .
  • the driving gear 31 is arranged sequentially along the radial direction where the starting end of the toothed portion 312 is located (the starting end refers to the end of the toothed portion 312 that first meshes with the driven gear 32 ).
  • the spring groove 51 and the movable tooth groove 52 are located on the side close to the axis of the driving gear 31.
  • the driving gear 31 between the spring groove 51 and the movable tooth groove 52 is also provided with a structure for connecting the spring groove 51 and the movable tooth groove 52.
  • the limiting through hole of the tooth slot 52 A movable tooth 35 that can expand and contract along the radial direction of the driving gear 31 under the action of the spring 53 is provided in the limiting through hole.
  • the movable tooth 35 includes a movable tooth bar 351 that is inserted into the limiting through hole. One end of the movable tooth bar 351 extends into the spring groove 51 and the other end extends to the toothed portion 312 . And a tooth tip 352 capable of meshing with the driven gear 32 is formed.
  • the spring 53 is arranged in the spring groove 51 along the radial direction of the driving gear 31. One end of the spring 53 is in contact with the bottom of the spring groove 51, and the other end is in contact with the movable tooth rod 351. When the spring 53 is in a natural state, the movable tooth There is a gap between the rod 351 and the bottom of the spring groove 51 .
  • an annular groove 3511 is opened on the side wall of the movable tooth bar 351 , the spring 53 is sleeved on the movable tooth bar 351 , and one end thereof abuts within the annular groove 3511 .
  • the moving direction of the movable tooth 35 can be limited by the setting of the limiting through hole, and the movement of the spring 53 can be guided by setting the spring 53 on the movable tooth bar 351 .
  • the tooth tip 352 of the movable tooth 35 is squeezed by the tooth tip of the driven gear 32 and is forced to retract, and the movable gear rod 351 follows. Move along the limiting through hole in the direction of the spring groove 51 and drive the spring 53 to compress until the tooth tip 352 of the movable tooth 35 breaks away from the driven gear 32 under the rotation of the driving gear 31. At this time, due to the resilience of the spring 53 The movable tooth 35 is driven to return to its original position, and the toothed portion 312 of the driving tooth 31 enters the meshing state with the driven gear.
  • an upper driven plate 24 located at the upper end of the top plate 13 is also provided at the upper end of the door panel 2, and the upper driven plate 24 is connected to the door panel 2 through a bearing assembly.
  • the top plate 13 is connected.
  • the structure of the upper driven plate 24 can refer to the structure of the driving connecting plate 22, which includes an upper connecting piece 241 with an arc-shaped structure, and the outer arc surface and the inner arc surface of the upper connecting piece 241 are concentrically arranged.
  • An upper connecting lug 242 is integrally provided on the inner arc surface of the upper connecting piece 241, and a bearing mounting hole is provided at the axis of the upper connecting lug 242 coaxially with the axis of the outer wall of the door panel body 21, so that the upper connecting lug 242 can
  • the connecting lug 242 coincides with the rotation axis of the driving connecting lug 222 .
  • the bearing assembly includes a bearing installation shaft that is passed through the bearing installation hole, and the lower end of the bearing installation shaft is fixed on the top plate 13, and a bearing is installed between the bearing installation shaft and the bearing installation hole.
  • the upper driven plate 24 corresponding to the driving connecting plate 22 can ensure that the forces on the upper and lower ends of the door panel body 21 are balanced during the rotation of the door panel 2, and can limit the upper and lower ends of the door panel body 21, further improving the door panel. 2. Rotational stability.
  • a positioning plate 6 is provided above the upper driven plate 24 to facilitate identification of the door panel closing position.
  • the positioning plate 6 is movably mounted on the top of the bearing installation shaft on the top plate 13. And its side is fixed with the upper driven plate 24 through a plurality of screws.
  • the positioning plate 6 is set into a circular structure, and the radial size of the positioning plate 6 is set to be larger than the radial size of the outer side wall of the door panel body 21 .
  • Positioning bosses 61 are also symmetrically provided on the side walls of the positioning plate 6. When the opening 11 is in a completely closed state, the positioning bosses 61 on the positioning plate 6 can be respectively aligned with the interface between the side plate body 141 and the transition plate 142. when the door panel 2 rotates, the positioning plate 6 can rotate synchronously along the bearing installation axis. Through the arrangement of the positioning plate 6 and the positioning boss 61, it can be visually observed whether the door panel 2 completely closes the opening 11.
  • the door panel body 21 completely closes the opening 11, the outer arc surface of the sector body 342 is tangent to the abutting arc surface 331 of the protruding block 33, and the toothless portion of the driving gear 31 313 is aligned with the driven gear 32 (at this time, the driving gear 31 and the driven gear 32 are in a non-meshing state);
  • the driving device of the wafer loader drives the driving gear 31 to rotate counterclockwise, and drives the paddle 34 to rotate synchronously, sector-shaped
  • the outer arc surface of the body 342 moves away from the contact arc surface 331.
  • the driven gear 32 does not move, and the door panel 2 and the protruding block remain stationary;
  • the starting end of the toothed portion 312 of the driving gear 31 begins to align with the driven gear 32, and the tooth tip 352 of the movable tooth 35 is affected by the force of the driven gear 32.
  • the top of the tooth is squeezed and forced to retract, and the movable tooth rod 351 then moves in the direction of the spring groove 51 along the limiting through hole, and drives the spring 53 to compress until the tooth tip of the movable tooth 35 is rotated by the driving gear 31. 352 disengages from the driven gear 32.
  • the resilient force of the spring 53 drives the movable tooth 35 to return, and the toothed portion 312 of the driving tooth 31 enters the meshing state with the driven gear, thereby driving the driven gear 32 to rotate synchronously, and the door panel 2 It then rotates and begins to open the opening 11.
  • the protruding block 33 rotates with the door panel 2 to the non-working area of the paddle 34 (see Figure 14);
  • the driving device of the wafer loader drives the driving gear 31 to rotate clockwise, and the paddle 34 rotates accordingly.
  • the driven gear 32 can rotate accordingly, and the convex block 33 rotates accordingly, and drives the door panel 2 to move in the direction of closing the opening 11, until the toothless portion 313 of the driving gear 31 rotates to a position close to the driven gear 32. side, so that the driving gear 31 and the driven gear 32 are out of mesh.
  • the driven gear 32 and the door panel 2 stop rotating, and the protruding block 33 has rotated with the door panel 2 into the working area of the paddle 34;
  • the paddle 34 (the junction between the side wall of the sector-shaped body 342 and its outer arc surface) can contact the contact arc surface 331 of the protruding block 33 and push the protruding block 33 to rotate. , and then drive the door panel 2 to continue to move in the direction of closing the opening 11, until the outer arc surface of the fan-shaped body 342 is tangent to the contact arc surface 331 of the protruding block 33. At this time, the door panel 2 has completely closed the opening 11, and the fan-shaped The body 342 can no longer push the protruding block 33 to rotate.
  • the difference between this embodiment and the first embodiment is that the thickness of the door panel body is different, and the rotation axis of the door panel body 21 is different.
  • the door panel body 21 has an arc-shaped structure.
  • the inner side wall of the door panel body 21 matches the shape of the outer side wall of the opening plate 143 and is arranged eccentrically.
  • the door panel body 21 can just abut the transition plate 142 on one side and squeeze the transition plate 142 on the other side. This arrangement makes the center positions of the circles where the cross sections of the door panel body 21, the opening plate 143, and the side panel body 141 are located are all different.
  • the axis of the door panel body 21 located on the inner wall of the door panel body 21 is the rotation axis.
  • the bearing mounting holes on the upper connecting lug 242 and the driving connecting lug 222 are coaxially arranged with the axis of the inner wall of the door panel body 21 to ensure that the rotation axis of the upper connecting lug 242 and the driving connecting lug 222 are in line with the axis of rotation.
  • the rotation axes of the door panel body 21 are the same.
  • the inner wall of the door panel body 21 can just contact the transition plate 142 on the right side, and can be slightly squeezed on the transition plate 142 on the left side; such as As shown in Figure 19, when the opening 11 is opened, the door panel body 21 rotates counterclockwise with the center of the circle where its inner side wall is located as the center of rotation. Since the inner side wall of the door panel body 21 and the outer side wall of the opening plate 143 are arranged eccentrically, the door panel body The motion trajectory of the inner side wall of door panel 21 deviates from the circle of the outer side wall of opening plate 143.
  • the inner side wall of door panel body 21 can instantly separate from the transition plates 142 on both sides, and then in opening 11 During the opening process, the inner wall of the door panel body 21 will not contact the transition plate 142 and the side panel body 141. That is, during the entire opening process of the opening 11, the door panel body 21, the transition plate 142, and the side panel body 141 can all be in contact with each other. Maintain a certain distance to avoid friction and reduce the generation of particles; similarly, when the opening 11 is closed, that is, when the door panel body 21 rotates clockwise, the left side of the inner wall of the door panel body 21 will gradually approach the left transition plate.
  • the movement trajectory of the inner wall of the door panel body 21 will gradually approach the circle where the opening plate 143 is located; when the inner wall of the door panel body 21 contacts the left transition plate 142, the door panel body 21 can squeeze the left transition plate 142 , at this time, the right side of the door panel body is just in contact with the transition plate 142 on the right side to form a seal.
  • the inner side wall of the door panel body 21 matches the shape of the outer side wall of the opening plate 143 , and the outer side wall of the door panel body 21 is concentrically arranged with its inner side wall, that is, the thickness of the door panel body 21 is uniform.
  • the outer wall of the door panel body and the inner wall of the door panel body are concentrically arranged so that the thickness of the door panel body is uniform, which can effectively reduce the processing difficulty of the door panel body.
  • the shape of the inner wall of the door panel body 21 plays a role in the opening and closing effect. Therefore, the shape of the outer wall of the door panel body 21 can be adjusted accordingly according to actual design requirements.

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Abstract

本发明公开了一种晶圆盒，包括盒体、门板及门板启闭机构，盒体的一侧设有开口，门板能在门板启闭机构的驱动下关闭或打开开口；盒体包括位于其侧面的环形侧板，环形侧板由侧板本体、过渡板及开口板围绕而成，侧板本体外侧壁横截面所在的圆与开口板外侧壁横截面所在的圆呈偏心设置，且侧板本体的外侧壁横截面所在的圆位于开口板的外侧壁横截面所在的圆的内部；门板包括能沿环形侧板移动的门板本体，门板本体的内侧壁与开口板的外侧壁形状匹配。本发明的晶圆盒减少了门体运动及放置所需的空间，而且利用自带的门体启闭机构简化了晶圆加载机的动作行程。

Description

晶圆盒 技术领域
本发明涉及半导体加工技术领域，尤其涉及一种自带门体启闭驱动机构的晶圆盒。
背景技术
晶圆盒是用来存放及转移晶圆的密封容器，其包括带开口的盒体及能封闭开口的门体。当从晶圆盒中取放晶圆时，需要通过晶圆加载机打开晶圆盒的门体，这就需要在晶圆加载机内部预留供门体运动和放置的空间，且在晶圆加载机对晶圆盒内的晶圆进行位姿检测时，晶圆加载机上的检测传感器需要深入到晶圆盒内部，再加之晶圆加载机对门体的开启或关闭动作，导致晶圆加载机驱动所需的动作较多，行程较为复杂。
发明内容
为克服上述缺点，本发明的目的在于提供一种晶圆盒，减少了门体运动及放置所需的空间，而且利用自带的门板启闭机构实现了晶圆盒的自动启闭，进而简化了晶圆加载机的动作行程。
为了达到以上目的，本发明采用的技术方案是：一种晶圆盒，包括盒体、门板及门板启闭机构，盒体的一侧设有开口，门板能在门板启闭机构的驱动下关闭或打开开口；
盒体包括位于其侧面的环形侧板，环形侧板由侧板本体、过渡板及开口板围绕而成，侧板本体外侧壁横截面所在的圆与开口板外侧壁横截面所在的圆呈偏心设置，且侧板本体的外侧壁横截面所在的圆位于开口板的外侧壁横截面所在的圆的内部；门板包括能沿环形侧板移动的门板本体，门板本体的内侧壁与开 口板的外侧壁形状匹配。
本发明的有益效果在于：
1、将侧板本体外侧壁横截面所在的圆与开口板外侧壁横截面所在的圆偏心设置，并使门板本体的内侧壁与开口板的外侧壁形状相匹配，使得门板本体在沿环形侧板移动至开口板处时，门板本体的内侧壁能与开口板外侧壁完全贴合，进而保证对开口板上的开口的关闭效果；在开门过程中，即当门板本体沿环形侧板移动至过渡板处时，通过偏心设置能有效减少门板本体的内侧壁与过渡板之间的接触摩擦，当门板本体移动至侧板本体处时，门板本体能与侧板本体之间保持一定的间距，进而降低了因门板本体与过渡板、侧板本体之间的接触摩擦所产生的粒子，提高洁净度；
2、将门板对开口的启闭动作设置为沿环形侧板外侧壁方向移动，能有效减少门板移动所占用的空间，进而节省将晶圆盒放置到晶圆加载机内所需的空间；
3、将门板、门板启闭机构直接集成在晶圆盒上，既保证了对开口的启闭，又能简化晶圆加载机的动作行程。
进一步来说，当开口处于关闭状态时，一个所述过渡板抵接在所述门板本体内侧壁上，另一个所述过渡板挤压在所述门板本体内侧壁上；且所述门板本体的内侧壁横截面所在的圆与所述开口板外侧壁横截面所在的圆呈同心设置，所述门板本体以所述侧板本体外侧壁所在的轴心线为旋转轴心线。
现有技术中，通常会将门板本体(及开口板)设计为与侧板本体同心设置，这种设计会导致在门板本体启闭的过程中，门板本体是始终与靠近开启方向一侧的过渡板进行接触摩擦的，直至门板本体完全打开；长此以往，不仅容易产生颗粒，而且因开合过程中的持续摩擦会造成过渡板及门板本体内侧壁的磨损，导致门板本体无法完全关闭开口。因此，将门板本体(及开口板)设置为与侧 板本体偏心是能够有效减少门板本体与过渡板之间的摩擦的，进而在降低颗粒产生的同时，提高密封性能的。
当开口处于关闭状态，由于门板本体内侧壁、开口板外侧壁同心设置，且均与侧板本体偏心设置，而门板本体又是以侧板本体所在的圆心进行旋转的，即门板本体是进行偏心旋转的，此时，门板本体内侧壁的运动轨迹与开口板的外侧壁所在的圆是偏离的，通过对偏心距离的调节，可使开口处于关闭状态时，门板本体的内侧壁能正好抵接到靠近开启方向一侧的过渡板上，并能轻微挤压在远离开启方向一侧的过渡板上；当打开开口时，门板本体的内侧壁沿其相应的运动轨迹开始转动，门板本体的内侧壁与远离开启方向一侧的过渡板(瞬间分离，而门板本体的内侧壁与靠近开启方向一侧的过渡板会先接触摩擦再逐渐分离(因为门板本体内侧壁与开口板外侧壁偏心一致，在门板本体以侧板本体的圆心进行旋转时，门板本体内侧壁的运动轨迹会与靠近开启方向一侧的过渡板有交叉，因此，在开门时，门板本体内侧壁是会与靠近开启方向一侧的过渡板先接触摩擦再逐渐远离的)。同样在关闭开口时，门板本体只会在快关闭时才会与靠近开启方向一侧的过渡板接触摩擦，并在门板本体完全关闭的一瞬间，门板本体对远离开启方向一侧的过渡板形成轻微挤压，并与靠近开启方向一侧的过渡板正好抵接，以提高密封效果。这样设置能够有效减少开口打开的过程中，门板本体与过渡板之间的接触摩擦，进而减少因持续接触摩擦导致的颗粒增多的现象，能在一定程度上提高洁净度。
进一步来说，当开口处于关闭状态时，一个所述过渡板抵接在所述门板本体内侧壁上，另一个所述过渡板挤压在所述门板本体内侧壁上；且所述门板本体的内侧壁横截面所在的圆与所述开口板外侧壁横截面所在的圆呈偏心设置；所述门板本体以所述门板本体内侧壁所在的轴心线为旋转轴心线。
由于门板本体内侧壁、开口板外侧壁偏心设置，开口处于关闭状态时，门板本体的内侧壁能正好抵接到靠近开启方向一侧的过渡板上，并能轻微挤压在远离开启方向一侧的过渡板上；当打开开口时，门板本体以其内侧壁所在的圆心为旋转中心进行旋转，由于门板本体的内侧壁与开口板的外侧壁呈偏心设置，即门板本体内侧壁的运动轨迹是与开口板的外侧壁所在的圆相偏离的，在门板本体刚开始转动时，门板本体内侧壁就能与两侧的过渡板瞬间分离，此后在开口打开的过程中，门板本体内侧壁都不会接触到过渡板及侧板本体，即在开口打开的整个过程中，门板本体与过渡板、侧板本体之间均能保持一定的间距，进而避免摩擦，减少了粒子的产生；同样，在开口关闭时，门板本体的内侧壁会逐渐贴近远离开启方向一侧的过渡板，且门板本体的内侧壁的运动轨迹会逐渐靠近开口板所在的圆；当门板本体的内侧壁接触到远离开启方向一侧的过渡板时，门板本体能对远离开启方向一侧的过渡板形成挤压，此时，靠近开启方向一侧的过渡板能正好贴合在门板本体的内侧壁上，以形成密封。
进一步来说，门板还包括位于盒体底部的驱动连接板，驱动连接板包括呈圆弧形结构的驱动连接片，驱动连接片的外弧面与门板本体连接，内弧面设有驱动连接耳，驱动连接耳转动设置在盒体底部，并与门板启闭机构连接。通过驱动连接板的设置实现了门板与门板启闭机构的连接，进而能利用门板启闭机构驱动门板移动。
进一步来说，驱动连接耳的旋转轴心线与所述门板本体的旋转轴心线重合，以保证驱动连接耳与门板本体的同心转动。
进一步来说，门板启闭机构包括能啮合传动的主动齿轮、从动齿轮，主动齿轮安装在盒体底部，从动齿轮安装在驱动连接耳上。通过主动齿轮、从动齿轮的配合实现了门板沿盒体的移动。
进一步来说，门板启闭机构还包括微移组件，微移组件包括配合使用的凸起块、拨片，凸起块一体设置在驱动连接耳的外壁上；拨片同轴设置在主动齿轮上，并能推动凸起块移动。
由于主动齿轮与从动齿轮的啮合传动，会有至少一个齿宽的误差，导致难以驱动门板移动至完全密封盒体开口位置。因此，通过增设的微移组件能在门板即将关闭开口时，取消主动齿轮与从动齿轮的啮合传动，并改用拨片、凸起块配合驱动门板完全关闭开口。
进一步来说，拨片包括固接在主动齿轮上的拨片连接部，拨片连接部的一侧一体设置有呈扇形结构的扇形本体；凸起块上设有供扇形本体抵接的抵接圆弧面，抵接圆弧面能与扇形本体的外弧面相切。且当扇形本体的外弧面与抵接圆弧面相切时，将门板调节至完全密封开口的位置。
进一步来说，主动齿轮的外壁由有齿部、无齿部组成，且当拨片固接到主动齿轮上时，扇形本体朝向无齿部一侧。实际设计时，可将扇形本体设置在有齿部与无齿部交界的两个端点之间，以保证主动齿轮的有齿部与从动齿轮彻底脱离啮合之后，微移组件再开始启用。
初始状态下，门板完全关闭开口，扇形本体的外弧面与凸起块的抵接圆弧面相切，主动齿轮的无齿部朝向从动齿轮；主动齿轮逆时针转动，并带动拨片同步转动，扇形本体的外弧面向远离抵接圆弧面的方向移动，此时，门板保持静止状态；随着主动齿轮的继续转动，主动齿轮的有齿部开始与从动齿轮啮合，进而带动从动齿轮转动，门板随之转动并打开开口(此时，凸起块随门板转动至拨片的非工作区域)；当门板自打开状态开始封闭时，主动齿轮顺时针转动，并带动拨片同步转动，主动齿轮的有齿部与从动齿轮反向啮合，并带动门板(包括凸起块)朝封闭开口的方向移动，直至主动齿轮的无齿部转动至朝向从动齿 轮的一侧，使得主动齿轮与从动齿轮脱离啮合，此时，从动齿轮、门板停止转动，而凸起块已经随门板转动至拨片的工作区域内；随着主动齿轮的继续转动，拨片(扇形本体的侧壁)能接触到凸起块的抵接圆弧面上并抵推凸起块转动，进而带动门板继续向封闭开口的方向移动，直至扇形本体的外弧面与凸起块的抵接圆弧面相切，此时，门板已经完全关闭开口，且扇形本体也无法再推动凸起块转动。且当对门板施加开门的力时，由于扇形本体的外弧面与凸起块的抵接圆弧面相切，凸起块的抵接圆弧面只会对扇形本体的外弧面形成沿径向方向上的力，因此，也无法驱动主动齿轮转动，而凸起块又由于被拨片顶住无法转动，进而保证门板密封状态的稳定性。
进一步来说，主动齿轮的径向尺寸小于从动齿轮的径向尺寸。进而避免在门板启闭机构驱动的过程中，主动齿轮的无齿部因多圈旋转导致的多次朝向从动齿轮的一侧，造成从动齿轮的频繁脱齿的问题。
进一步来说，有齿部的起始端设有能沿主动齿轮径向伸缩的活动齿。在主动齿轮的有齿部与从动齿轮刚开始啮合时，将有齿部的起始端设置为活动齿能避免因主动齿轮的齿顶与从动齿轮的齿顶相对而造成主动齿轮与从动齿轮互相挤压导致卡死的现象。
进一步来说，在主动齿轮上，沿有齿部的起始端所在的径向上依次设有弹簧槽、限位通孔、活动齿槽，限位通孔内活动穿设有与弹簧连接的活动齿。通过限位通孔的设置能限定活动齿的移动方向。
当主动齿轮地有齿部的起始端与从动齿轮开始啮合时，活动齿的齿尖受力缩回，活动齿杆随之沿限位通孔向弹簧槽的方向移动，并带动弹簧压缩，直至，活动齿的齿尖离开从动齿轮，此时，由于弹簧的回弹力带动活动齿归位。
进一步来说，活动齿包括活动齿杆，活动齿杆的一端延伸进弹簧槽内，另 一端延伸至有齿部处并形成能与从动齿轮啮合的齿尖。
进一步来说，弹簧沿主动齿轮的径向布设在弹簧槽内，其一端抵接在弹簧槽内，另一端抵接在活动齿杆上；当弹簧处于自然状态时，活动齿杆与弹簧槽的槽底之间留有间隙，以为活动齿杆的回缩提供空间。
进一步来说，活动齿杆的侧壁上开设有环形凹槽，弹簧套设在活动齿杆上，且其一端抵接在环形凹槽内，另一端抵接在弹簧槽内。通过环形凹槽的设置既实现了弹簧与活动齿杆的限位连接，而且将弹簧套接在活动齿杆上，能利用活动齿杆对弹簧的移动进行限位，有效提高弹簧移动方向的稳定性。
进一步来说，门板还包括固接在门板本体上端的上从动板，上从动板与盒体顶部转动连接，且从动板的旋转轴心线与门板本体的旋转轴心线重合。通过上从动板与驱动连接板的配合能保证门板本体转动过程中上、下端受力相平衡，且对门板本体的上、下端进行限位，能提高门板本体移动的稳定性。
进一步来说，盒体顶部还设有与上从动板固接的定位板，定位板的侧壁上对称设置有便于识别门板封闭位置的定位凸台。
定位板活动套装在顶板上的轴承安装轴的顶部，且其侧面通过多个螺钉与上从动板固接。在实际设计时，可将定位板设置为圆形结构，且将定位板的径向尺寸设置为大于门板本体外侧壁的径向尺寸，以实现对门板本体的全覆盖。当开口处于完全关闭状态时，定位板上的定位凸台能分别对准侧板本体与过渡板的交界处；当门板转动时，定位板能沿着轴承安装轴作同步转动。通过定位板及定位凸台的设置能直观地观察出是否门板完全封闭住开口。
进一步来说，开口的四周均布设有能抵接到门板本体内侧壁上的密封条。通过密封条的设置进一步提高了开口关闭时的密封性，而且能通过弹性挤压减少对门板本体内侧壁的磨损，在一定程度上提高门板本体的使用寿命。
进一步来说，门板本体的外侧壁横截面所在的圆与侧板本体外侧壁横截面所在的圆同心设置，使得门板本体在转动过程中，其外侧壁与侧板本体外侧壁间距相同，有效减少门板本体开闭过程中，其外侧壁所占用的空间，使得晶圆盒整体占用空间更加紧凑。
进一步来说，门板本体的外侧壁横截面所在的圆与门板本体的内侧壁横截面所在的圆同心设置，使得门板本体的厚度均匀，有效降低门板本体的加工难度。
附图说明
图1为本发明实施例一的晶圆盒的结构示意图；
图2为本发明实施例一的晶圆盒的爆炸示意图；
图3为本发明实施例一中的晶圆盒去除定位板后的结构示意图；
图4为本发明实施例一中的盒体的结构示意图；
图5为本发明实施例一中的环形侧板的仰视图；
图6为本发明实施例一中的门板的结构示意图；
图7为本发明实施例一中的门板的仰视图；
图8为本发明实施例一中的开口关闭时门板与环形侧板的剖切示意图；
图9为本发明实施例一中的开口打开过程中的门板与环形侧板的剖切示意图；
图10为本发明实施例一中的开口关闭时主动齿轮、从动齿轮配合的结构示意图；
图11为图10中A部位的局部放大图；
图12为本发明实施例一中的主动齿轮、从动齿轮开始啮合时的结构示意图；
图13为图12中B部位的局部放大图；
图14为本发明实施例一中的开口打开时主动齿轮、从动齿轮配合的结构示意图；
图15为本发明实施例一中的主动齿轮的结构示意图；
图16为本发明实施例一中的活动齿的结构示意图；
图17为本发明实施例三中的门板的仰视图；
图18为本发明实施例二中的开口关闭时，门板与环形侧板的剖切示意图；
图19为本发明实施例二中的开口打开过程中的门板与环形侧板的剖切示意图。
图中：
1-盒体；11-开口；12-晶圆存放架；13-顶板；14-环形侧板；141-侧板本体；142-过渡板；143-开口板；15-底板；
2-门板；21-门板本体；22-驱动连接板；221-驱动连接片；222-驱动连接耳；223-轴承安装孔；23-轴承；24-上从动板；241-上连接片；242-上连接耳；
3-门板启闭机构；31-主动齿轮；311-钥匙插口；312-有齿部；313-无齿部；32-从动齿轮；33-凸起块；331-抵接圆弧面；34-拨片；341-拨片连接部；342-扇形本体；35-活动齿；351-活动齿杆；3511-环形凹槽；352-齿尖；
4-晶圆；
51-弹簧槽；52-活动齿槽；53-弹簧；
6-定位板；61-定位凸台。
具体实施方式
下面结合附图对本发明的较佳实施例进行详细阐述，以使本发明的优点和 特征能更易于被本领域技术人员理解，从而对本发明的保护范围做出更为清楚明确的界定。
实施例一
参见附图1-3所示，本发明的一种晶圆盒，包括盒体1、门板2、门板启闭机构3，其中，盒体1的一侧设有开口11，盒体1内设有容腔，容腔内设有用于存放晶圆4的晶圆存放架12；门板2活动设置在盒体1的外侧，并能在门板启闭机构3的驱动下关闭或打开开口11。
具体的，参见附图4-5所示，盒体1呈中空柱形结构，其包括一体成型的顶板13、环形侧板14及底板15，其中，环形侧板14由侧板本体141、过渡板142及开口板143围绕而成。其中，过渡板142设置有两块，分别用以将侧板本体141的两端与开口板143的两端连接起来。在开口板143上开设有供晶圆4进出的开口11，且开口11的两端分别延伸至两块过渡板142的边缘处。侧板本体141、开口板143均呈圆弧形结构。
开口板143的内侧壁两端分别向过渡板142方向延伸以增强开口板143的强度，开口板143的外侧壁横截面所在的圆与侧板本体141的外侧壁横截面所在的圆呈偏心设置，且侧板本体141的外侧壁横截面所在的圆位于开口板143的外侧壁横截面所在的圆的内部。如图5所示，r是侧板本体141的外侧壁横截面所在的圆的半径，R是开口板143的外侧壁横截面所在的圆的半径，e是开口板143外侧壁横截面所在的圆的圆心与侧板本体141的外侧壁横截面所在的圆的圆心之间的距离，下述简称偏心距离(即两个圆心之间的距离)。
参见附图6-7所述，门板2包括一体成型的门板本体21、驱动连接板22，驱动连接板22位于盒体1的下方并与门板启闭机构3连接，门板本体21位于环形侧板14的外侧，其能在门板启闭机构3的驱动下沿环形侧板14的外侧壁 移动以打开或关闭开口板143上的开口11。具体的，门板本体21呈圆弧形结构，门板本体21的内侧壁与开口板143的外侧壁形状相匹配且同心设置，门板本体21的外侧壁横截面所在的圆与侧板本体141外侧壁横截面所在的圆同心设置，以使门板本体21的内侧壁、外侧壁呈偏心设置，且偏心距离与开口板143的外侧壁、侧板本体141的外侧壁之间的偏心距离相同。图7中，M是门板本体21外侧壁横截面所在的圆的半径。
在本实施例中，门板本体21是以侧板本体141所在的轴心线为旋转轴心线的，且当开口11处于关闭状态时，门板本体21能抵接在一侧的过渡板142上，并对另一侧的过渡板142产生挤压。
参见附图8-9所示，图中的逆时针方向为门板本体21开门的方向，在图8中，开口11处于关闭状态，由于门板本体21内侧壁、开口板143外侧壁均与侧板本体141偏心设置(图8中，门板本体21内侧壁、开口板143外侧壁圆心相同，且其圆心位于侧板本体141外侧壁的圆心的左侧)，而门板本体21又是以侧板本体141所在的圆心进行旋转的，即门板本体21内侧壁的运动轨迹与开口板143的外侧壁所在的圆是偏离的，通过对偏心距离的调节，可使开口11处于关闭状态时，门板本体21的内侧壁能正好抵接到右侧的过渡板142上，并能轻微挤压在左侧的过渡板142上；当打开开口11时，如图9所述，门板本体21逆时针转动，门板本体21的内侧壁沿其相应的运动轨迹开始转动，门板本体21的内侧壁与左侧的过渡板142瞬间分离，而门板本体21的内侧壁与右侧的过渡板逐渐分离。由于门板本体21内侧壁的运动轨迹与开口板143外侧壁所在的圆在右侧的过渡板142附近是有交叉的，因此，在门板本体刚开始转动时，门板本体21内侧壁是挤压在右侧的过渡板142上的，当门板本体21内侧壁移动至其运动轨迹逐渐偏离开口板143外侧壁所在的圆时，门板本体21就会与右侧的 过渡板142分离开来，此后也不会再与过渡板142及侧板本体141接触摩擦，也就是说门板本体21与过渡板142及侧板本体141之间能保持一定的间距，进而大大降低了因开门过程中的持续摩擦导致的颗粒的增多，提高了洁净度；同样在关闭开口11时，门板本体21只会在快关闭时才会与右侧的过渡板142接触摩擦，在门板本体完全关闭的一瞬间，门板本体21会对左侧的过渡板142形成轻微挤压，并正好抵接到右侧的过渡板142上，以提高密封效果。
需要注意的是，若门板本体21(及开口板143)与侧板本体141同心设置，在门板本体21启闭的过程中，门板本体21是始终与右侧的过渡板142接触摩擦的，长此以往，不仅容易产生颗粒，而且因长期摩擦导致的过渡板142的磨损，会造成门板本体21无法密封开口11。因此，本实施例将门板本体21(及开口板143)设置为与侧板本体141偏心是能够有效减少门板本体21与过渡板142之间的摩擦的，进而在降低颗粒产生的同时，提高密封性能的。此外，本实施例中，为了实现偏心设置的侧板本体141与开口板143的衔接，两块过渡板142的宽度是不一样的，且靠近门板本体21打开方向一侧的过渡板142较窄。
在本实施例中，将门板本体21外侧壁设置为与侧板本体141外侧壁同心则能够使得门板本体21在转动过程中，门板本体21外侧壁与侧板本体141外侧壁间距相同，有效减少门板本体21开闭过程中，门板本体21的外侧壁所占用的空间，使得晶圆盒整体占用空间更加紧凑。
示例性地，为了提高开口11关闭时的密封性，在开口11四周还布设有密封条。
在一示例中，参见附图6所示，驱动连接板22包括呈圆弧形结构的驱动连接片221，且驱动连接片221的外弧面、内弧面同心设置。具体的，驱动连接片221的外弧面与门板本体21的下端部一体成型，且其外弧面所在的圆与门板本 体21的外侧壁横截面所在的圆位于同一轴心线上。在驱动连接片221的内弧面上一体设置有用于连接门板启闭机构3的驱动连接耳222，驱动连接耳222呈圆柱形结构，其中心处开设有与门板本体21外侧壁所在的轴心线同轴设置的轴承安装孔223。在轴承安装孔223内安装有用以降低驱动连接耳222转动摩擦的轴承23，且轴承23对应的轴承安装轴固接在盒体1底部的底板15上。这样设置使得驱动连接耳222能带动门板本体21做以侧板本体141外侧壁所在的轴心线为旋转轴心线的旋转运动，以保证在门板本体21转动时，减少门板本体21与过渡板142的碰擦。
在一示例中，参见附图10所示，门板启闭机构3包括能啮合传动的主动齿轮31、从动齿轮32。主动齿轮31可转动地安装在盒体1底部的底板15上，其上设有供驱动源(驱动源通常为晶圆加载机上的驱动装置)驱动的钥匙插口311。从动齿轮32套装在轴承23对应的轴承安装轴上，并通过螺钉同轴固接在驱动连接片221的驱动连接耳222上。通过主动齿轮31与从动齿轮32的配合实现了驱动连接板22的转动，进而实现了门板本体21沿环形侧板14的移动。
由于主动齿轮31与从动齿轮32的啮合传动，会有至少一个齿宽的误差，导致难以驱动门板本体21移动至完全关闭开口11的位置。因此，在一示例中，门板启闭机构3增设了微移组件，用以在门板本体21即将关闭开口11时，取消主动齿轮31与从动齿轮32的啮合传动，并改用微移组件驱动门板本体21完全关闭开口11。
具体的，微移组件包括配合使用的凸起块33、拨片34，其中，凸起块33一体设置在驱动连接耳222的外壁上，其一侧设有供拨片34抵接的抵接圆弧面331。拨片34同轴设置在主动齿轮31上，并能随主动齿轮31同步转动。且当主动齿轮31安装到底板15上时，拨片34与凸起块33位于同一高度。拨片34 包括固接在主动齿轮31上的拨片连接部341，拨片连接部341的一侧一体设置有呈扇形结构且与主动齿轮31同轴设置的扇形本体342，且扇形本体342的外弧面能与抵接圆弧面331相切。且当扇形本体342的外弧面与抵接圆弧面331相切时，将门板2调节至完全关闭开口11的位置。
在一示例中，扇形本体342的外弧面所对应的半径与抵接圆弧面331所对应的半径相同。
为了配合拨片34的动作，参见附图15所示，将主动齿轮31设置为非全齿的齿轮，即主动齿轮31的外壁上由有齿部312、无齿部313组成，且有齿部312能与从动齿轮32啮合，无齿部313不能与从动齿轮32啮合。安装时，将拨片34的扇形本体342朝向无齿部313的一侧，且使扇形本体342位于无齿部313与有齿部312交界的两个端点之间。
参见附图10-11所示，初始状态下，门板本体21完全关闭开口11，扇形本体342的外弧面与凸起块33的抵接圆弧面331相切，主动齿轮31的无齿部313对准从动齿轮32(此时，主动齿轮31与从动齿轮32处于不啮合的状态)；晶圆加载机的驱动装置驱动主动齿轮31逆时针转动，并带动拨片34同步转动，扇形本体342的外弧面向远离抵接圆弧面331的方向移动，此时，从动齿轮32不动，门板2、凸起块均保持静止状态；参见附图12-13所示，随着主动齿轮31的继续转动，主动齿轮31的有齿部312开始对准从动齿轮32，并与从动齿轮32进入啮合状态，进而带动从动齿轮32同步转动，门板2随之转动并开始打开开口11，此时，凸起块33随门板2转动至拨片34的非工作区域(参见附图14所示)；当门板2自打开状态开始关闭时，晶圆加载机的驱动装置驱动主动齿轮31顺时针转动，拨片34随之转动，此时，由于主动齿轮31的有齿部312与从动齿轮32处于啮合状态，从动齿轮32能随之转动，凸起块33随之转动，并带 动门板2朝关闭开口11的方向移动，直至主动齿轮31的无齿部313转动至靠近从动齿轮32的一侧，使得主动齿轮31与从动齿轮32脱离啮合，此时，从动齿轮32、门板2停止转动，而凸起块33已经随门板2转动至拨片34的工作区域内；随着主动齿轮31的继续转动，拨片34(扇形本体342的侧壁与其外弧面的交界处)能抵接到凸起块33的抵接圆弧面331上并推动凸起块33转动，进而带动门板2继续向封闭开口11的方向移动，直至扇形本体342的外弧面与凸起块33的抵接圆弧面331相切，此时，门板2已经完全关闭开口11，且扇形本体342也无法再推动凸起块33转动。且当对门板2施加开门的力时，由于扇形本体342的外弧面与凸起块33的抵接圆弧面331相切，凸起块33的抵接圆弧面331只会对扇形本体342的外弧面形成沿主动齿轮31径向方向上的力，因此，也无法驱动主动齿轮31转动，而凸起块33又由于被拨片34顶住无法转动，进而保证门板2对开口11完全关闭时的稳定性。
为了避免在门板启闭机构3驱动的过程中，主动齿轮31的无齿部313因多圈旋转导致的多次朝向从动齿轮32，造成从动齿轮32的频繁脱齿，进而导致动力损耗的问题，在一示例中，将主动齿轮31的径向尺寸设置为小于从动齿轮32的径向尺寸，并使开口11的启闭动作能在主动齿轮31的单圈转动下即可完成。
在一示例中，为了避免主动齿轮31的有齿部312与从动齿轮32刚开始啮合时，由于主动齿轮312的齿顶与从动齿轮32的齿顶相对而造成主动齿轮31与从动齿轮32互相挤压导致卡死的现象，可将有齿部312的起始齿设置为能沿主动齿轮31径向伸缩的活动齿35。
具体的，参见附图15所示，在主动齿轮31上，沿有齿部312的起始端(起始端是指有齿部312最先与从动齿轮32啮合的一端)所在的径向上依次设置弹簧槽51、活动齿槽52，且弹簧槽51位于靠近主动齿轮31轴心的一侧，位于弹 簧槽51、活动齿槽52之间的主动齿轮31上还设有用于连通弹簧槽51、活动齿槽52的限位通孔。限位通孔内设置能在弹簧53作用下沿主动齿轮31的径向伸缩的活动齿35。具体的，参见附图16所示，活动齿35包括穿设在限位通孔内的活动齿杆351，活动齿杆351的一端延伸进弹簧槽51内，另一端延伸至有齿部312处并形成能与从动齿轮32啮合的齿尖352。弹簧53沿主动齿轮31的径向布设在弹簧槽51内，其一端抵接在弹簧槽51的槽底处，另一端抵接在活动齿杆351上，当弹簧53处于自然状态时，活动齿杆351与弹簧槽51的槽底之间留有间隙。示例性地，在活动齿杆351的侧壁上开设有环形凹槽3511，弹簧53套设在活动齿杆351上，且其一端抵接在环形凹槽3511内。通过限位通孔的设置能限定活动齿35的移动方向，通过将弹簧53套设在活动齿杆351上能对弹簧53的移动进行导向。
当主动齿轮31的有齿部312的起始端与从动齿轮32开始啮合时，活动齿35的齿尖352受从动齿轮32的齿顶挤压而被迫缩回，活动齿杆351随之沿限位通孔向弹簧槽51的方向移动，并带动弹簧53压缩，直至在主动齿轮31的转动下，活动齿35的齿尖352脱离从动齿轮32，此时，由于弹簧53的回弹力带动活动齿35归位，主动齿31的有齿部312与从动齿轮进入啮合状态。
在一示例中，为了保证门板2移动的稳定性，参见附图3所示，在门板2的上端还设置有位于顶板13上端的上从动板24，且上从动板24通过轴承组件与顶板13连接。具体的，上从动板24的结构可参照驱动连接板22的结构，其包括呈圆弧形结构的上连接片241，且上连接片241的外弧面、内弧面同心设置。在上连接片241的内弧面上一体设置有上连接耳242，上连接耳242的轴心处开设有与门板本体21外侧壁所在的轴心线同轴设置的轴承安装孔，以使上连接耳242与驱动连接耳222的转动轴心线重合。轴承组件包括穿设在轴承安装孔上的 轴承安装轴，且轴承安装轴的下端固接在顶板13上，且轴承安装轴与轴承安装孔之间安装有轴承。当驱动连接板22在门板启闭机构3驱动下带动门板2转动时，上从动板24能沿着对应的轴承安装轴转动。通过与驱动连接板22对应设置的上从动板24能保证门板2转动过程中的门板本体21上、下端受力相平衡，且能对门板本体21的上、下端进行限位，进一步提高门板2转动的稳定性。
在一示例中，参见附图1-2所示，上从动板24的上方还设有便于识别门板关闭位置的定位板6，定位板6活动套装在顶板13上的轴承安装轴的顶部，且其侧面通过多个螺钉与上从动板24固接。将定位板6设置为圆形结构，且定位板6的径向尺寸设置为大于门板本体21外侧壁的径向尺寸。在定位板6的侧壁上还对称设置有定位凸台61，且当开口11处于完全关闭状态时，定位板6上的定位凸台61能分别对准侧板本体141与过渡板142的交界处；当门板2转动时，定位板6能沿着轴承安装轴作同步转动。通过定位板6及定位凸台61的设置能直观地观察出是否门板2完全封闭住开口11。
本实施例的工作过程如下：
参见附图10-11所示，初始状态下，门板本体21完全关闭开口11，扇形本体342的外弧面与凸起块33的抵接圆弧面331相切，主动齿轮31的无齿部313对准从动齿轮32(此时，主动齿轮31与从动齿轮32处于不啮合的状态)；晶圆加载机的驱动装置驱动主动齿轮31逆时针转动，并带动拨片34同步转动，扇形本体342的外弧面向远离抵接圆弧面331的方向移动，此时，从动齿轮32不动，门板2、凸起块均保持静止状态；
参见附图12-13所示，随着主动齿轮31的继续转动，主动齿轮31的有齿部312的起始端开始对准从动齿轮32，活动齿35的齿尖352受从动齿轮32的齿顶挤压而被迫缩回，活动齿杆351随之沿限位通孔向弹簧槽51的方向移动，并 带动弹簧53压缩，直至在主动齿轮31的转动下，活动齿35的齿尖352脱离从动齿轮32，此时，由于弹簧53的回弹力带动活动齿35归位，主动齿31的有齿部312与从动齿轮进入啮合状态，进而带动从动齿轮32同步转动，门板2随之转动并开始打开开口11，此时，凸起块33随门板2转动至拨片34的非工作区域(参见附图14所示)；
当门板2自打开状态开始关闭时，晶圆加载机的驱动装置驱动主动齿轮31顺时针转动，拨片34随之转动，此时，由于主动齿轮31的有齿部312与从动齿轮32处于啮合状态，从动齿轮32能随之转动，凸起块33随之转动，并带动门板2朝关闭开口11的方向移动，直至主动齿轮31的无齿部313转动至靠近从动齿轮32的一侧，使得主动齿轮31与从动齿轮32脱离啮合，此时，从动齿轮32、门板2停止转动，而凸起块33已经随门板2转动至拨片34的工作区域内；
随着主动齿轮31的继续转动，拨片34(扇形本体342的侧壁与其外弧面的交界处)能抵接到凸起块33的抵接圆弧面331上并推动凸起块33转动，进而带动门板2继续向封闭开口11的方向移动，直至扇形本体342的外弧面与凸起块33的抵接圆弧面331相切，此时，门板2已经完全关闭开口11，且扇形本体342也无法再推动凸起块33转动。且当对门板2施加开门的力时，由于扇形本体342的外弧面与凸起块33的抵接圆弧面331相切，凸起块33的抵接圆弧面331只会对扇形本体342的外弧面形成沿主动齿轮31径向方向上的力，因此，也无法驱动主动齿轮31转动，而凸起块33又由于被拨片34顶住无法转动，进而保证门板2对开口11完全关闭时的稳定性。
实施例二
本实施例与实施例一的区别在于：门板本体厚度不同，且门板本体21旋转 轴心线不同。
参见附图17-19所示，门板本体21呈圆弧形结构，门板本体21的内侧壁与开口板143外侧壁形状匹配且呈偏心设置，并使门板本体21贴合在开口板143上时，门板本体21能刚好抵接在一侧的过渡板142上，并对另一侧的过渡板142产生挤压。这样设置使得门板本体21、开口板143、侧板本体141横截面所在的圆的圆心位置均不相同。
在本实施例中，门板本体21以门板本体21内侧壁所在的轴心线为旋转轴心线。相应的，上连接耳242、驱动连接耳222上的轴承安装孔均与门板本体21内侧壁所在的轴心线同轴设置，以保证上连接耳242、驱动连接耳222的旋转轴心线与门板本体21的旋转轴心线相同。
具体的，如图18所示，当开口11处于关闭状态，门板本体21的内侧壁能正好抵接到右侧的过渡板142上，并能轻微挤压在左侧的过渡板142上；如图19所示，当打开开口11时，门板本体21以其内侧壁所在的圆心为旋转中心进行逆时针旋转，由于门板本体21的内侧壁与开口板143的外侧壁呈偏心设置，即门板本体21内侧壁的运动轨迹是与开口板143的外侧壁所在的圆相偏离的，在门板本体21刚开始转动时，门板本体21内侧壁就能与两侧过渡板142瞬间分离，此后在开口11打开的过程中，门板本体21内侧壁都不会接触到过渡板142及侧板本体141，即在开口11打开的整个过程中，门板本体21与过渡板142、侧板本体141之间均能保持一定的间距，进而避免摩擦，减少了粒子的产生；同样，在开口11关闭时，即门板本体21顺时针转动时，门板本体21的内侧壁的左侧会逐渐贴近左侧的过渡板，且门板本体21的内侧壁的运动轨迹会逐渐靠近开口板143所在的圆；当门板本体21的内侧壁接触到左侧过渡板142时，门板本体21能对左侧的过渡板142形成挤压，此时，门板本体的右侧正好与右侧 的过渡板142贴合，以形成密封。
在一些示例中，门板本体21的内侧壁与开口板143的外侧壁形状相匹配，且门板本体21的外侧壁与其内侧壁同心设置，即门板本体21的厚度是均匀的。通过门板本体外侧壁与其内侧壁同心设置以使门板本体的厚度是均匀的，能有效降低门板本体的加工难度。需要注意的是，对开口启闭效果起作用的是门板本体21内侧壁的形状，因此，门板本体21外侧壁的形状可根据实际设计需求进行相应的调整。
以上实施方式只为说明本发明的技术构思及特点，其目的在于让熟悉此项技术的人了解本发明的内容并加以实施，并不能以此限制本发明的保护范围，凡根据本发明精神实质所做的等效变化或修饰，都应涵盖在本发明的保护范围内。

Claims (20)

  1. 一种晶圆盒，其特征在于：包括盒体、门板及门板启闭机构，所述盒体的一侧设有开口，所述门板能在所述门板启闭机构的驱动下关闭或打开所述开口；
    所述盒体包括位于其侧面的环形侧板，所述环形侧板由侧板本体、过渡板及开口板围绕而成，其中，所述过渡板设置有两块，分别用以将所述侧板本体的两端与所述开口板的两端连接起来；所述侧板本体外侧壁横截面所在的圆与所述开口板外侧壁横截面所在的圆呈偏心设置，且所述侧板本体的外侧壁横截面所在的圆位于所述开口板的外侧壁横截面所在的圆的内部；所述门板包括能沿环形侧板移动的门板本体，所述门板本体的内侧壁与所述开口板的外侧壁形状匹配；且所述门板本体内侧壁的运动轨迹与所述开口板外侧壁所在的圆是偏心的。
  2. 根据权利要求1所述的晶圆盒，其特征在于，当开口处于关闭状态时，一个所述过渡板抵接在所述门板本体内侧壁上，另一个所述过渡板挤压在所述门板本体内侧壁上；且所述门板本体的内侧壁横截面所在的圆与所述开口板外侧壁横截面所在的圆呈同心设置，所述门板本体以所述侧板本体外侧壁所在的轴心线为旋转轴心线。
  3. 根据权利要求1所述的晶圆盒，其特征在于，当开口处于关闭状态时，一个所述过渡板抵接在所述门板本体内侧壁上，另一个所述过渡板挤压在所述门板本体内侧壁上；且所述门板本体的内侧壁横截面所在的圆与所述开口板外侧壁横截面所在的圆呈偏心设置；所述门板本体以所述门板本体内侧壁所在的轴心线为旋转轴心线。
  4. 根据权利要求1所述的晶圆盒，其特征在于，所述门板还包括位于所述盒体底部的驱动连接板，所述驱动连接板包括呈圆弧形结构的驱动连接片，所述 驱动连接片的外弧面与所述门板本体连接，内弧面设有驱动连接耳，所述驱动连接耳转动设置在所述盒体底部，并与所述门板启闭机构连接。
  5. 根据权利要求4所述的晶圆盒，其特征在于，所述驱动连接耳的旋转轴心线与所述门板本体的旋转轴心线重合。
  6. 根据权利要求5所述的晶圆盒，其特征在于，所述门板启闭机构包括能啮合传动的主动齿轮、从动齿轮，所述主动齿轮转动设置在所述盒体底部，所述从动齿轮固接在所述驱动连接耳上。
  7. 根据权利要求6所述的晶圆盒，其特征在于，所述门板启闭机构还包括微移组件，所述微移组件包括配合使用的凸起块、拨片，所述凸起块一体设置在所述驱动连接耳的外壁上；所述拨片同轴设置在所述主动齿轮上，并能推动所述凸起块移动。
  8. 根据权利要求7所述的晶圆盒，其特征在于，所述拨片包括固接在所述主动齿轮上的拨片连接部，所述拨片连接部的一侧一体设置有呈扇形结构的扇形本体；所述凸起块上设有供所述扇形本体抵接的抵接圆弧面，且所述抵接圆弧面能与所述扇形本体的外弧面相切。
  9. 根据权利要求8所述的晶圆盒，其特征在于，所述主动齿轮的外壁由有齿部、无齿部组成，且当所述拨片固接到所述主动齿轮上时，所述扇形本体朝向所述无齿部一侧。
  10. 根据权利要求9所述的晶圆盒，其特征在于，所述主动齿轮的径向尺寸小于所述从动齿轮的径向尺寸。
  11. 根据权利要求9所述的晶圆盒，其特征在于，所述有齿部的起始端设有能沿所述主动齿轮径向伸缩的活动齿。
  12. 根据权利要求11所述的晶圆盒，其特征在于，在所述主动齿轮上，沿所述有齿部的起始端所在的径向上依次设有弹簧槽、限位通孔、活动齿槽，所述限位通孔内活动穿设有与弹簧连接的所述活动齿。
  13. 根据权利要求12所述的晶圆盒，其特征在于，所述活动齿包括活动齿杆，所述活动齿杆的一端延伸进所述弹簧槽内，另一端延伸至所述有齿部处并形成能与所述从动齿轮啮合的齿尖。
  14. 根据权利要求13所述的晶圆盒，其特征在于，所述弹簧沿所述主动齿轮的径向布设在所述弹簧槽内，其一端抵接在所述弹簧槽内，另一端抵接在所述活动齿杆上；当所述弹簧处于自然状态时，所述活动齿杆与所述弹簧槽的槽底之间留有间隙。
  15. 根据权利要求13所述的晶圆盒，其特征在于，所述活动齿杆的侧壁上开设有环形凹槽，所述弹簧套设在所述活动齿杆上，且其一端抵接在所述环形凹槽内，另一端抵接在所述弹簧槽内。
  16. 根据权利要求15所述的晶圆盒，其特征在于，所述门板还包括固接在门板本体上端的上从动板，所述上从动板与所述盒体顶部转动连接，且所述从动板的旋转轴心线与所述门板本体的旋转轴心线重合。
  17. 根据权利要求16所述的晶圆盒，其特征在于，所述盒体顶部还设有与所述上从动板固接的定位板，所述定位板的侧壁上对称设置有便于识别所述门板封闭位置的定位凸台。
  18. 根据权利要求1所述的晶圆盒，其特征在于，所述开口的四周均布设有能抵接到所述门板本体内侧壁上的密封条。
  19. 根据权利要求1所述的晶圆盒，其特征在于，所述门板本体的外侧壁横截面所在的圆与所述侧板本体外侧壁横截面所在的圆同心设置。
  20. 根据权利要求1所述的晶圆盒，其特征在于，所述门板本体的外侧壁横截面所在的圆与所述门板本体的内侧壁横截面所在的圆同心设置。
PCT/CN2022/107293 2022-05-17 2022-07-22 晶圆盒 WO2023221286A1 (zh)

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