WO2023216354A1 - 一种用于石墨烯膜转移的粘结剂以及石墨烯薄膜的转移方法 - Google Patents
一种用于石墨烯膜转移的粘结剂以及石墨烯薄膜的转移方法 Download PDFInfo
- Publication number
- WO2023216354A1 WO2023216354A1 PCT/CN2022/098064 CN2022098064W WO2023216354A1 WO 2023216354 A1 WO2023216354 A1 WO 2023216354A1 CN 2022098064 W CN2022098064 W CN 2022098064W WO 2023216354 A1 WO2023216354 A1 WO 2023216354A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- graphene
- transfer
- substrate
- organic solvent
- solvent
- Prior art date
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 234
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 221
- 238000000034 method Methods 0.000 title claims abstract description 75
- 239000011230 binding agent Substances 0.000 title claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 197
- 239000003960 organic solvent Substances 0.000 claims abstract description 50
- 239000002184 metal Substances 0.000 claims description 73
- 229910052751 metal Inorganic materials 0.000 claims description 73
- 239000002904 solvent Substances 0.000 claims description 69
- 239000007788 liquid Substances 0.000 claims description 52
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 47
- 239000000853 adhesive Substances 0.000 claims description 38
- 230000001070 adhesive effect Effects 0.000 claims description 38
- 238000005530 etching Methods 0.000 claims description 37
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 33
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 30
- 238000003825 pressing Methods 0.000 claims description 28
- 230000008569 process Effects 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 23
- QPFMBZIOSGYJDE-UHFFFAOYSA-N 1,1,2,2-tetrachloroethane Chemical compound ClC(Cl)C(Cl)Cl QPFMBZIOSGYJDE-UHFFFAOYSA-N 0.000 claims description 22
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 21
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 claims description 20
- 239000011889 copper foil Substances 0.000 claims description 18
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 17
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 15
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 15
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 15
- -1 alicyclic hydrocarbon Chemical class 0.000 claims description 14
- 239000003208 petroleum Substances 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 claims description 11
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 claims description 11
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims description 11
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 11
- 150000008282 halocarbons Chemical class 0.000 claims description 11
- 229930195733 hydrocarbon Natural products 0.000 claims description 11
- BNIXVQGCZULYKV-UHFFFAOYSA-N pentachloroethane Chemical compound ClC(Cl)C(Cl)(Cl)Cl BNIXVQGCZULYKV-UHFFFAOYSA-N 0.000 claims description 11
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 claims description 10
- 239000004215 Carbon black (E152) Substances 0.000 claims description 10
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 claims description 10
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 claims description 10
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 claims description 10
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims description 10
- IEJIGPNLZYLLBP-UHFFFAOYSA-N dimethyl carbonate Chemical compound COC(=O)OC IEJIGPNLZYLLBP-UHFFFAOYSA-N 0.000 claims description 10
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 claims description 10
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 claims description 10
- 229950011008 tetrachloroethylene Drugs 0.000 claims description 10
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 9
- 238000005229 chemical vapour deposition Methods 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 7
- 239000004033 plastic Substances 0.000 claims description 7
- 229920003023 plastic Polymers 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000005456 alcohol based solvent Substances 0.000 claims description 6
- 239000003759 ester based solvent Substances 0.000 claims description 6
- 239000005453 ketone based solvent Substances 0.000 claims description 6
- 150000002576 ketones Chemical class 0.000 claims description 6
- 238000010030 laminating Methods 0.000 claims description 6
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 claims description 5
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims description 5
- 229910000570 Cupronickel Inorganic materials 0.000 claims description 5
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims description 5
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 claims description 5
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- QQQCWVDPMPFUGF-ZDUSSCGKSA-N alpinetin Chemical compound C1([C@H]2OC=3C=C(O)C=C(C=3C(=O)C2)OC)=CC=CC=C1 QQQCWVDPMPFUGF-ZDUSSCGKSA-N 0.000 claims description 5
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims description 5
- 239000004210 ether based solvent Substances 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 claims description 5
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 claims description 5
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 claims description 5
- 239000008096 xylene Substances 0.000 claims description 5
- 238000009835 boiling Methods 0.000 claims description 4
- JBTWLSYIZRCDFO-UHFFFAOYSA-N ethyl methyl carbonate Chemical compound CCOC(=O)OC JBTWLSYIZRCDFO-UHFFFAOYSA-N 0.000 claims description 4
- 150000001336 alkenes Chemical class 0.000 claims description 3
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 2
- KRIOVPPHQSLHCZ-UHFFFAOYSA-N propiophenone Chemical compound CCC(=O)C1=CC=CC=C1 KRIOVPPHQSLHCZ-UHFFFAOYSA-N 0.000 claims description 2
- 230000007704 transition Effects 0.000 abstract description 15
- 239000003292 glue Substances 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000002360 preparation method Methods 0.000 abstract description 6
- 239000000243 solution Substances 0.000 description 22
- 235000012431 wafers Nutrition 0.000 description 11
- 238000002834 transmittance Methods 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 6
- 150000002170 ethers Chemical class 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- QCCDLTOVEPVEJK-UHFFFAOYSA-N phenylacetone Chemical compound CC(=O)CC1=CC=CC=C1 QCCDLTOVEPVEJK-UHFFFAOYSA-N 0.000 description 3
- 238000000016 photochemical curing Methods 0.000 description 3
- 230000001476 alcoholic effect Effects 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011978 dissolution method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/194—After-treatment
Definitions
- the aliphatic hydrocarbon solvent includes pentane and/or hexane
- the alcoholic solvent includes octanol and/or hexanol;
- the ester solvent includes one or more of ethyl acetate, methyl acetate, dimethyl carbonate and butyl acetate;
- the pressing speed of the roller pressing is 0.1 ⁇ 2m/min
- the adhesive is preferably located between the graphene film and the target substrate.
- the target substrate preferably includes one or more of a plastic substrate, an ordinary glass substrate, a quartz substrate, a silicon wafer substrate, and a metal substrate, and is more preferably a plastic substrate, an ordinary glass substrate, a quartz substrate, a silicon wafer substrate, or Metal base.
- the aromatic hydrocarbon solvent preferably includes one or more of benzene, toluene, xylene and ethylbenzene, more preferably benzene, toluene, xylene or ethylbenzene.
- the alicyclic hydrocarbon solvent preferably includes one or more of cyclohexane, cyclohexanone and methylcyclohexane, more preferably cyclohexane, cyclohexanone or methylcyclohexane. alkyl.
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (10)
- 一种用于石墨烯膜转移的粘结剂,其特征在于,包括:可挥发性有机溶剂A 5~95重量份;可挥发性有机溶剂B 95~5重量份;所述可挥发性有机溶剂A包括卤代烃类溶剂、芳香烃类溶剂、脂肪烃类溶剂和脂环烃类溶剂中的一种或多种;所述可挥发性有机溶剂B包括醇类溶剂、酯类溶剂、醚类溶剂、酮类溶剂、苯酚和石油醚中的一种或多种。
- 根据权利要求1所述的粘结剂,其特征在于,所述可挥发性溶剂包括不溶于水和/或微溶于水的有机溶剂;所述石墨烯包括石墨烯层或石墨烯膜;所述转移具体为,将石墨烯膜从生长基底转移至目标基底;所述转移过程中,所述粘结剂位于石墨烯膜与目标基底之间。
- 根据权利要求2所述的粘结剂,其特征在于,所述生长基底包括金属基底;所述生长的方式包括化学气相沉积法;所述转移过程中,包括将石墨烯膜、粘结剂和目标基底进行压合的步骤;位于所述石墨烯膜与目标基底之间的粘结剂具体为有机溶剂液态膜。
- 根据权利要求1所述的粘结剂,其特征在于,所述金属基底包括铜箔、镍箔和铜镍合金中的一种或多种;所述目标基底包括塑料基底、普通玻璃基底、石英基底、硅片基底和金属基底一种或多种。
- 根据权利要求1所述的粘结剂,其特征在于,所述卤代烃类溶剂包括三氯甲烷、三氯乙烷、四氯乙烷、四氯乙烯和五氯乙烷中的一种或多种;所述芳香烃类溶剂包括苯、甲苯、二甲苯和乙苯中的一种或多种;所述脂肪烃类溶剂包括戊烷和/或己烷;所述脂环烃类溶剂包括环己烷、环己酮和甲基环己烷中的一种或多种。
- 根据权利要求1所述的粘结剂,其特征在于,所述醇类溶剂包括辛醇 和/或己醇;所述酯类溶剂包括乙酸乙酯、乙酸甲酯、碳酸二甲酯和乙酸丁酯中的一种或多种;所述醚类溶剂包括乙醚、正丙醚和苯甲醚中的一种或多种;所述酮类溶剂包括甲基异丁酮、苯丙酮和甲基乙基酮中的一种或多种。
- 根据权利要求1所述的粘结剂,其特征在于,所述可挥发性溶剂的沸点为50~250℃;所述可挥发性溶剂包括四氯乙烷、四氯乙烯、五氯乙烷、甲苯、戊烷、乙酸乙酯、碳酸二甲酯、甲基异丁酮、苯酚和石油醚中的一种或多种。
- 一种石墨烯膜的转移方法,其特征在于,包括以下步骤:1)在金属基底上生长石墨烯得到金属基底/石墨烯结构材料;2)将可挥发性有机溶剂粘结剂设置在上述步骤得到的金属基底/石墨烯结构材料中的石墨烯面与目标基底之间,经过压合后,得到金属基底/石墨烯/液膜/目标基底结构材料;所述可挥发性有机溶剂粘结剂包括权利要求1~7任意一项所述的用于石墨烯膜转移的粘结剂;3)将上述步骤的金属基底/石墨烯/液膜/目标基底结构材料,置于刻蚀液中,刻蚀去除金属基底后,得到石墨烯/液膜/目标基底结构;4)上述步骤得到的石墨烯/液膜/目标基底结构在刻蚀过程、从刻蚀液取出过程中和从刻蚀液中取出后中的一步或多步中,液膜挥发后,得到石墨烯/目标基底结构材料。
- 根据权利要求8所述的转移方法,其特征在于,所述设置的方式,包括将金属基底/石墨烯结构材料中的石墨烯面与目标基底置于可挥发性溶剂粘结剂中;所述压合的方式包括辊压压合和/或平板压合。
- 根据权利要求9所述的转移方法,其特征在于,所述压合的压力为0.01~1MPa;所述辊压压合的压合速度为0.1~2m/min;所述压合的时间为1~5s。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2217476.7A GB2622118A (en) | 2022-05-13 | 2022-06-10 | Binding agent for graphene film transfer and transfer method of graphene film |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210520375.5A CN117088362A (zh) | 2022-05-13 | 2022-05-13 | 一种用于石墨烯膜转移的粘结剂以及石墨烯薄膜的转移方法 |
CN202210520375.5 | 2022-05-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2023216354A1 true WO2023216354A1 (zh) | 2023-11-16 |
Family
ID=88729567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2022/098064 WO2023216354A1 (zh) | 2022-05-13 | 2022-06-10 | 一种用于石墨烯膜转移的粘结剂以及石墨烯薄膜的转移方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN117088362A (zh) |
WO (1) | WO2023216354A1 (zh) |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102616769A (zh) * | 2012-03-19 | 2012-08-01 | 浙江大学 | 一种直接转移石墨烯薄膜的方法 |
CN103342472A (zh) * | 2013-07-11 | 2013-10-09 | 常州二维碳素科技有限公司 | 一种转移石墨烯薄膜的方法 |
WO2015197217A1 (en) * | 2014-06-25 | 2015-12-30 | Instytut Technologii Materialow Elektronicznych | Method of transferring a graphene film |
CN105239061A (zh) * | 2015-09-25 | 2016-01-13 | 中国科学院宁波材料技术与工程研究所 | 一种石墨烯/金属复合薄膜及其制备方法 |
KR20170013557A (ko) * | 2015-07-28 | 2017-02-07 | 주성엔지니어링(주) | 그래핀 전사기판 제조방법 |
CN107364851A (zh) * | 2016-11-28 | 2017-11-21 | 中国科学院金属研究所 | 一种松香树脂转移石墨烯的方法及石墨烯透明导电薄膜的制备与应用 |
CN108285142A (zh) * | 2018-03-15 | 2018-07-17 | 浙江大学 | 一种湿法转移石墨烯的方法 |
CN113023718A (zh) * | 2019-12-24 | 2021-06-25 | 北京大学 | 一种洁净转移制备高质量悬空二维材料支撑膜的方法 |
CN114180562A (zh) * | 2022-01-13 | 2022-03-15 | 重庆理工大学 | 一种石墨烯转移方法 |
CN114408905A (zh) * | 2022-01-28 | 2022-04-29 | 北京大学 | 一种自支撑二维材料可控制备及转移的方法 |
-
2022
- 2022-05-13 CN CN202210520375.5A patent/CN117088362A/zh active Pending
- 2022-06-10 WO PCT/CN2022/098064 patent/WO2023216354A1/zh active Application Filing
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102616769A (zh) * | 2012-03-19 | 2012-08-01 | 浙江大学 | 一种直接转移石墨烯薄膜的方法 |
CN103342472A (zh) * | 2013-07-11 | 2013-10-09 | 常州二维碳素科技有限公司 | 一种转移石墨烯薄膜的方法 |
WO2015197217A1 (en) * | 2014-06-25 | 2015-12-30 | Instytut Technologii Materialow Elektronicznych | Method of transferring a graphene film |
KR20170013557A (ko) * | 2015-07-28 | 2017-02-07 | 주성엔지니어링(주) | 그래핀 전사기판 제조방법 |
CN105239061A (zh) * | 2015-09-25 | 2016-01-13 | 中国科学院宁波材料技术与工程研究所 | 一种石墨烯/金属复合薄膜及其制备方法 |
CN107364851A (zh) * | 2016-11-28 | 2017-11-21 | 中国科学院金属研究所 | 一种松香树脂转移石墨烯的方法及石墨烯透明导电薄膜的制备与应用 |
CN108285142A (zh) * | 2018-03-15 | 2018-07-17 | 浙江大学 | 一种湿法转移石墨烯的方法 |
CN113023718A (zh) * | 2019-12-24 | 2021-06-25 | 北京大学 | 一种洁净转移制备高质量悬空二维材料支撑膜的方法 |
CN114180562A (zh) * | 2022-01-13 | 2022-03-15 | 重庆理工大学 | 一种石墨烯转移方法 |
CN114408905A (zh) * | 2022-01-28 | 2022-04-29 | 北京大学 | 一种自支撑二维材料可控制备及转移的方法 |
Also Published As
Publication number | Publication date |
---|---|
CN117088362A (zh) | 2023-11-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108249424B (zh) | 一种溴掺杂的高导电超薄石墨烯膜的制备方法 | |
CN102337513B (zh) | 石墨烯透明导电薄膜的制备方法 | |
CN102180439B (zh) | 一种表面集成石墨烯的碳微结构及其制备方法 | |
WO2019000642A1 (en) | PROCESS FOR THE PREPARATION OF A SOLAR CELL OF SOFT PERROVSKITE BY HORIZONTAL SOAKAGE | |
CN102659096A (zh) | 一种石墨烯分散液及其薄膜的制备方法 | |
CN102104087B (zh) | 一种柔性薄膜太阳能电池制备方法 | |
CN103833030A (zh) | 一种大面积转移cvd石墨烯膜的方法 | |
CN102719803A (zh) | 一种石墨烯透明薄膜的制备和转移方法 | |
WO2020042556A1 (zh) | 一种多支撑膜辅助的石墨烯电化学转移方法 | |
WO2014019387A1 (zh) | 一种以静电保护膜为媒介转移石墨烯薄膜的方法 | |
EP3245168B1 (en) | Transfer of monolayer graphene onto flexible glass substrates | |
CN106477570A (zh) | 小分子石蜡转移石墨烯的方法 | |
CN103922322A (zh) | 一种碳纳米管编织的石墨烯薄膜、制备方法及光伏应用 | |
CN108118303A (zh) | 一种薄膜及其制备方法 | |
CN107364851A (zh) | 一种松香树脂转移石墨烯的方法及石墨烯透明导电薄膜的制备与应用 | |
CN108684084B (zh) | 石墨烯加热膜的制备工艺 | |
CN104409177A (zh) | 一种稳定掺杂的大面积石墨烯透明导电膜规模化制备方法 | |
CN105000551A (zh) | 一种大面积石墨烯的无缝转移的方法 | |
CN106672956A (zh) | 一种规模化转移石墨烯的方法 | |
CN114180562B (zh) | 一种石墨烯转移方法 | |
CN103613094A (zh) | 一种同时制备石墨烯和多孔非晶碳薄膜的方法 | |
CN103258960A (zh) | 一种有机薄膜晶体管的制备方法 | |
WO2023216354A1 (zh) | 一种用于石墨烯膜转移的粘结剂以及石墨烯薄膜的转移方法 | |
CN106450007A (zh) | 一种基于碘化亚铜/钙钛矿体异质结的太阳能电池及制备方法 | |
CN104851515A (zh) | 一种导电薄膜的制备方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ENP | Entry into the national phase |
Ref document number: 202217476 Country of ref document: GB Kind code of ref document: A Free format text: PCT FILING DATE = 20220610 |
|
ENP | Entry into the national phase |
Ref document number: 2022574279 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 17928643 Country of ref document: US |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 22941302 Country of ref document: EP Kind code of ref document: A1 |