WO2023189539A1 - 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体及びその製造方法 - Google Patents

窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体及びその製造方法 Download PDF

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WO2023189539A1
WO2023189539A1 PCT/JP2023/009857 JP2023009857W WO2023189539A1 WO 2023189539 A1 WO2023189539 A1 WO 2023189539A1 JP 2023009857 W JP2023009857 W JP 2023009857W WO 2023189539 A1 WO2023189539 A1 WO 2023189539A1
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silicon nitride
powder
mass ratio
nitride powder
carbon
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French (fr)
Japanese (ja)
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祐三 中村
敏行 宮下
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Denka Co Ltd
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Denka Co Ltd
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Priority to CN202380029652.5A priority Critical patent/CN118922396A/zh
Priority to JP2023550660A priority patent/JP7437570B1/ja
Priority to US18/851,069 priority patent/US20250282688A1/en
Priority to EP23779558.8A priority patent/EP4477633A4/en
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Definitions

  • the present disclosure relates to a silicon nitride powder and a method for manufacturing the same, and a sintered silicon nitride body and a method for manufacturing the same.
  • Silicon nitride is a material with excellent strength, hardness, toughness, heat resistance, corrosion resistance, thermal shock resistance, etc. Therefore, silicon nitride sintered bodies are used in various industrial parts such as die casting machines and melting furnaces, and automobile parts. Furthermore, since silicon nitride sintered bodies have excellent mechanical properties at high temperatures, their use in gas turbine parts that require high-temperature strength and high-temperature creep properties is being considered.
  • Patent Document 1 proposes reducing the amount of oxygen and carbon by using silicon nitride powder obtained by imide decomposition in order to obtain a silicon nitride sintered body having high strength. Furthermore, in Patent Document 2, a silicon nitride sintered body having high bending strength is produced using silicon nitride powder having a ⁇ fraction of 30 to 100% and an oxygen content of less than 0.5% by weight. A technique has been proposed to obtain
  • Silicon nitride sintered bodies are used for various purposes due to their excellent strength, but if they are lightweight, they can contribute to improving the energy efficiency of vehicles, for example. Furthermore, a lightweight structural material not only facilitates installation but also improves the durability of the structure itself. Therefore, the present disclosure provides a silicon nitride sintered body that is low in manufacturing cost, has low density, and high strength, and a method for manufacturing the same. Furthermore, the present invention provides a silicon nitride powder and a method for manufacturing the same, which can manufacture a silicon nitride sintered body having low density and high strength at low manufacturing cost.
  • One aspect of the present disclosure is a silicon nitride powder containing silicon nitride and carbon, wherein the mass ratio Cp of carbon to the entire powder is 0.05% or more, and the mass of carbon contained in the surface portion of the powder to the entire powder.
  • a silicon nitride powder having a ratio Cs of 0.05% or less.
  • the silicon nitride powder can be manufactured using a low-cost manufacturing method because the mass ratio Cp of carbon to the entire powder is equal to or higher than a predetermined value. Furthermore, since the mass ratio Cs of carbon contained in the surface portion of the powder is below a predetermined value, the ⁇ phase of silicon nitride is likely to occur when the powder is used as a sintering raw material. Although the ⁇ phase of columnar crystals tends to be more difficult to densify than the ⁇ phase, it has higher strength than the ⁇ phase. Therefore, a silicon nitride sintered body having low density (for example, relative density: 95% or less) and high strength can be manufactured at low manufacturing cost.
  • the ratio of the mass ratio Cs to the mass ratio Ci of carbon contained inside the powder to the entire powder may be 0.6 or less. Since such silicon nitride powder contains less carbon in the surface portion of the powder, when used as a sintering raw material, ⁇ phase is more likely to be generated during liquid phase sintering. Further, the carbon inside the powder generates silicon carbide and is composited with silicon nitride. Due to these factors, a silicon nitride sintered body with lower density and higher strength can be obtained.
  • the mass ratio Os of oxygen contained in the surface portion of the powder and the mass ratio Cs of carbon contained in the surface portion of the powder to the entire powder may satisfy the following formula (I). Since such silicon nitride powder has a sufficiently large ratio of oxygen to carbon in the surface portion, it can promote liquid phase sintering when used as a sintering raw material. Therefore, grain boundary strength is improved, and a silicon nitride sintered body having sufficiently high strength can be obtained. Os/Cs ⁇ 10 (I)
  • the mass ratio Os of oxygen contained in the surface portion of the powder to the entire powder may be 0.9% or less.
  • Such silicon nitride powder when used as a sintering raw material, can suppress excessive densification and prevent the density of the silicon nitride sintered body from becoming too high.
  • the BET specific surface area of the silicon nitride powder may be 10 to 14 m 2 /g.
  • silicon nitride powder is used as a sintering raw material, sintering proceeds smoothly.
  • the uniformity of the microstructure of the silicon nitride sintered body can be improved. Therefore, variations in properties such as strength of the silicon nitride sintered body can be reduced.
  • the ⁇ rate (ratio of ⁇ phase) of the silicon nitride powder may be 94% or more.
  • Such silicon nitride powder is easy to sinter, and the strength is also easily improved due to the formation of the ⁇ phase. Therefore, the density of the silicon nitride sintered body can be maintained sufficiently low while the strength can be sufficiently increased.
  • One aspect of the present disclosure includes a step of molding a kneaded material containing silicon powder and an organic binder to obtain a molded object, and a step of heating the molded object at 900° C. or higher and lower than 1100° C. for 1 hour or more to degrease the molded object. a step of firing the compact in a mixed atmosphere containing nitrogen and at least one selected from the group consisting of hydrogen and ammonia to obtain a fired product containing silicon nitride and carbon; and a step of pulverizing the fired product.
  • a method for producing silicon nitride powder comprising:
  • silicon nitride powder is manufactured using a kneaded material containing silicon powder and an organic binder. Therefore, carbon derived from the organic binder remains in the silicon nitride powder.
  • the molded product of the kneaded product is degreased by heating at 900° C. or higher and lower than 1100° C. for 1 hour or more. Therefore, most of the organic binder is scattered, and the amount of carbon on the surface of the silicon particles can be reduced.
  • silicon nitride powder can be manufactured at low manufacturing cost. Further, when such silicon nitride powder is used as a sintering raw material, the carbon contained in the surface portion of the powder is sufficiently reduced, so that the ⁇ phase of silicon nitride is likely to be generated during sintering. Although the ⁇ phase of columnar crystals tends to be more difficult to densify than the ⁇ phase, it has higher strength than the ⁇ phase. Therefore, a silicon nitride sintered body having low density (for example, relative density: 95% or less) and high strength can be obtained at low manufacturing cost.
  • the silicon nitride powder has a mass ratio Cp of carbon to the entire powder of 0.05% or more, and a mass ratio Cs of carbon contained in the surface portion of the powder to the entire powder of 0.05% or less. It's good.
  • One aspect of the present disclosure provides a silicon nitride sintered body having a bending strength of 700 MPa or more and a ratio of bending strength to bulk density of 240 MPa ⁇ cm 3 /g or more.
  • a silicon nitride sintered body has low density and high strength. Therefore, it can be suitably used as a member of a vehicle or a structure, for example.
  • One aspect of the present disclosure provides a method for producing a silicon nitride sintered body, which includes a step of obtaining a silicon nitride sintered body using a sintering raw material containing any of the silicon nitride powders described above. Since this manufacturing method uses a sintering raw material containing any of the silicon nitride powders described above, it is possible to obtain a silicon nitride sintered body having low density but high strength.
  • silicon nitride sintered body having low manufacturing cost, low density, and high strength, and a method for manufacturing the same. It is possible to provide a silicon nitride powder and a method for manufacturing the same that can produce a silicon nitride sintered body with low density and high strength at low production cost.
  • the numerical range indicated by the symbol " ⁇ " includes a lower limit value and an upper limit value. That is, the numerical range indicated by "x to y” means greater than or equal to x and less than or equal to y. Numerical ranges in which the upper limit or lower limit of each numerical range in each embodiment is replaced with the numerical value of any example are also included in the present disclosure.
  • the present disclosure includes both cases in which one of the plurality of materials illustrated in parallel in each embodiment is included, and cases in which two or more of the plurality of materials are included in combination.
  • the silicon nitride powder (Si 3 N 4 powder) according to one embodiment is a silicon nitride powder containing silicon nitride and carbon, and the mass ratio Cp (total carbon amount) of carbon to the entire powder is 0.05% or more.
  • the mass ratio Cs of carbon contained in the surface portion of the powder to the entire powder is 0.05% or less.
  • Carbon contained in the silicon nitride powder may be contained alone, or may be contained as an organic compound such as that contained in an organic binder, for example. When it is contained as a compound such as an organic compound, the mass ratio of carbon is determined by converting the compound into carbon.
  • the silicon nitride powder has a carbon mass ratio Cp (total carbon content) of 0.05% or more, it can be manufactured without using the imide decomposition method, which is expensive to manufacture. It also has a high acceptable level of impurities in the raw materials. Therefore, it can be manufactured at low manufacturing cost.
  • the mass ratio Cp of carbon contained in the silicon nitride powder to the entire silicon nitride powder may exceed 0.05%, may be 0.07% or more, and may be 0.09% or more. This allows manufacturing costs to be further reduced. Further, when used as a sintering raw material, silicon carbide (SiC) is generated and silicon nitride and silicon carbide are combined, so that the high strength of the silicon nitride sintered body can be maintained.
  • SiC silicon carbide
  • the mass ratio Cp of carbon contained in the silicon nitride powder to the entire silicon nitride powder may be 0.16% or less, and may be 0.13% or less. This makes it easier to generate the ⁇ phase when used as a sintering raw material, making it possible to further improve the strength while maintaining the density of the silicon nitride sintered body at a low level.
  • An example of the range of the mass ratio Cp of carbon to the entire powder is 0.05% to 0.16%.
  • the mass ratio Cs of carbon contained in the surface portion of the silicon nitride powder to the entire silicon nitride powder is determined by dividing the mass of carbon contained in the surface portion of the silicon nitride powder by the mass of the entire silicon nitride powder.
  • the mass ratio Ci of carbon contained inside the silicon nitride powder to the entire silicon nitride powder is determined by dividing the mass of carbon contained inside the silicon nitride powder by the mass of the entire silicon nitride powder. Therefore, the following formula (II) holds for the mass ratios Cp, Cs, and Ci.
  • Cp [%] Cs [%] + Ci [%] (II)
  • the mass ratio Cs of carbon contained in the surface portion of the powder to the entire powder may be less than 0.05%, may be 0.04% or less, and may be 0.03% or less.
  • the mass ratio Ci of carbon contained inside the powder to the entire powder may be 0.05% to 0.15%, or 0.08% to 0.12%. With such a mass ratio Ci, the balance between the mass ratio Cp and the mass ratio Cs can be made sufficiently good.
  • the ratio of the mass ratio Cs to the mass ratio Ci (Cs/Ci) may be 0.6 or less, 0.5 or less, or 0.3 or less. Since such silicon nitride powder contains less carbon in the surface portion of the powder, when used as a sintering raw material, ⁇ phase is more likely to be generated during liquid phase sintering. Further, the carbon inside the powder generates silicon carbide and is composited with silicon nitride. Due to these factors, a silicon nitride sintered body with lower density and higher strength can be obtained.
  • the ratio (Cs/Ci) may be 0.05 or more from the viewpoint of further reducing manufacturing costs. An example of the numerical range of the ratio (Cs/Ci) is 0.05 to 0.6.
  • the mass ratios Cp, Cs, and Ci in this specification are determined by the following procedure.
  • the amount of carbon in silicon nitride powder can be analyzed using a carbon/sulfur analyzer.
  • a powder sample for measurement is heated from 20°C to 2000°C at a heating rate of 10°C/sec in an oxygen atmosphere.
  • the desorbed carbon combines with oxygen to become carbon monoxide or carbon dioxide.
  • silicon nitride decomposes at temperatures exceeding 1400°C all carbon on the surface and inside the powder becomes carbon monoxide or carbon dioxide.
  • the mass ratio Cp of carbon contained in the entire silicon nitride powder can be determined.
  • the mass ratio Cs of carbon contained in the surface portion of the powder to the entire powder is measured by heating in the air to a temperature at which silicon nitride does not decompose. Specifically, the temperature is raised from 20°C to 1000°C at a heating rate of 10°C/sec, and held at 1000°C for 15 minutes. In this case, only carbon contained in the surface portion of the silicon nitride powder combines with oxygen to become carbon monoxide or carbon dioxide. By detecting the carbon monoxide and carbon dioxide thus generated with an infrared detector, the mass ratio Cs of carbon contained in the surface portion of the silicon nitride powder can be determined.
  • the mass ratio Ci of carbon contained inside the powder to the entire powder can be calculated from the above formula (II) using the mass ratios Cp and Cs determined by the above procedure.
  • the carbon contained in the silicon nitride powder may originate from the silicon powder used as a raw material, or may originate from the organic binder used in the direct nitriding process. If the heating temperature or heating time during degreasing is increased, the mass ratio Cs of carbon contained in the surface portion can be reduced. In addition, in conjunction with this, the mass ratio Cp of carbon in the entire powder can also be reduced. On the other hand, if silicon powder with a low carbon content is used, the mass ratio Ci of carbon contained inside the powder can be reduced. Further, in accordance with this, the mass ratio Cp of carbon in the entire powder can also be reduced.
  • the mass ratio Os of oxygen contained in the surface portion of the powder to the entire silicon nitride powder may be 0.9% or less, 0.7% or less, or 0.5% or less. .
  • Such silicon nitride powder when used as a sintering raw material, can suppress excessive densification and prevent the density of the silicon nitride sintered body from becoming too high.
  • the mass ratio Os of oxygen contained in the surface portion of the powder to the entire silicon nitride powder may be 0.1% or more, 0.2% or more, or 0.3% or more.
  • Such silicon nitride powder is sufficiently densified by liquid phase sintering when used as a sintering raw material.
  • An example of the range of the mass ratio Os of oxygen contained in the surface portion of the powder is 0.1% to 0.9%.
  • the mass ratio Oi of oxygen contained inside the powder to the entire silicon nitride powder may be 0.7% or less, 0.6% or less, or 0.5% or less.
  • silicon nitride powder is used as a sintering raw material, a silicon nitride sintered body having sufficiently high thermal conductivity can be obtained.
  • the mass ratio Oi of oxygen contained inside the powder to the entire silicon nitride powder may be 0.1% or more, 0.2% or more, or 0.3% or more.
  • Such silicon nitride powder can be produced relatively easily.
  • An example of the range of the mass ratio Oi of oxygen contained inside the powder is 0.1% to 0.7%.
  • the mass ratio Op (total oxygen amount) of oxygen to the entire silicon nitride powder may be 0.3% to 1.6%, may be 0.5% to 1.3%, and may be 0.6% to It may be 1.1%.
  • Such silicon nitride powder is relatively easy to manufacture by direct nitriding, and the mass ratio Oi and mass ratio Os of oxygen contained inside and on the surface of the silicon nitride powder can be adjusted to the above-mentioned ranges. It has the advantage of being easy to use.
  • Oxygen in silicon nitride powder may be included as silicon dioxide (SiO 2 ). Each content of oxygen is determined by converting such an oxide into oxygen.
  • the mass ratio Os of oxygen contained in the surface portion of the silicon nitride powder can be adjusted by changing the conditions and time of surface treatment using hydrogen fluoride. For example, by increasing the time for such surface treatment, the mass ratio Os can be reduced. Additionally, the mass ratio Op of oxygen in the entire silicon nitride powder can also be reduced accordingly.
  • the mass ratio Oi of oxygen contained inside the silicon nitride powder can be adjusted, for example, by adjusting the oxygen content of the silicon powder used as a raw material for the direct nitriding method. For example, if silicon powder with a small oxygen content is used, the mass ratio Oi of oxygen contained inside the silicon nitride powder can be made small. Additionally, the mass ratio Op of oxygen in the entire silicon nitride powder can also be reduced accordingly.
  • the oxygen mass ratio Op (total oxygen amount) is determined by dividing the mass of oxygen contained in the entire silicon nitride powder by the mass of the silicon nitride powder.
  • the oxygen mass ratio Os is determined by dividing the mass of oxygen contained in the surface portion of the silicon nitride powder by the mass of the entire silicon nitride powder.
  • the oxygen mass ratio Oi is determined by dividing the mass of oxygen contained inside the silicon nitride powder by the mass of the entire silicon nitride powder. Therefore, the following formula (III) holds for the mass ratios Op, Os, and Oi.
  • Op[%] Os[%]+Oi[%] (III)
  • the mass ratios Op, Os, and Oi of oxygen in the silicon nitride powder are determined by the following procedure using an oxygen/nitrogen analyzer.
  • a sample for measurement is heated from 20°C to 2000°C at a heating rate of 8°C/sec in a helium gas atmosphere. Detects oxygen released as the temperature rises.
  • oxygen bonded to the surface of the silicon nitride powder is desorbed. By quantifying the amount of desorbed oxygen, the mass ratio Os of oxygen contained in the surface portion can be determined.
  • silicon nitride begins to decompose.
  • the start of decomposition of silicon nitride can be ascertained by the start of detection of nitrogen.
  • the oxygen inside the silicon nitride powder is eliminated.
  • the mass ratio Op of oxygen can be calculated from the above formula (III) and the mass ratios Os and Oi of oxygen determined by the above procedure.
  • FIG. 1 is an example of a chart obtained by oxygen/nitrogen analysis of silicon nitride.
  • Peak 1 is the peak of oxygen contained in the surface portion of the silicon nitride powder
  • peak 2 is the peak of oxygen contained inside the silicon nitride powder.
  • Peak 3 is a nitrogen peak.
  • Straight line 4 shows a temperature increase straight line. Peak 1 and peak 2 are separated by the temperature T 1 at which nitrogen begins to evolve.
  • Temperature T 1 is the temperature at which detection of peak 3 begins and is typically between 1350 and 1500°C.
  • the temperature at which peak 1 detection starts (the temperature at the left end of peak 1) is, for example, 600 to 1000°C.
  • the temperature at which detection of peak 2 ends is, for example, 1600 to 1800°C.
  • the mass ratio Oi of oxygen contained inside and the mass ratio Os of oxygen contained in the surface portion are determined based on the calibration curve. Further, the sum of the oxygen mass ratio Oi and the oxygen mass ratio Os is the oxygen mass ratio Op contained in the entire silicon nitride powder.
  • the ratio (Os/Cs) of the mass ratio Os of oxygen to the mass ratio Cs of carbon may satisfy the following formula (I).
  • silicon nitride powder has a sufficiently large ratio of oxygen to carbon in the surface portion, liquid phase sintering can be promoted when the silicon nitride powder is used as a sintering raw material. Therefore, the grain boundary strength of the silicon nitride sintered body is improved.
  • the ratio (Os/Cs) may be 15 or more, or 20 or more.
  • the ratio (Os/Cs) may be 70 or less, or may be 50 or less. Examples of ranges for the ratio (Os/Cs) are 10-70, or 15-70.
  • the BET specific surface area of the silicon nitride powder may be 10-14 m 2 /g.
  • silicon nitride powder is used as a sintering raw material, sintering proceeds smoothly.
  • the uniformity of the microstructure of the silicon nitride sintered body can be improved. Therefore, variations in properties such as strength of the silicon nitride sintered body can be reduced.
  • the BET specific surface area of silicon nitride powder may be 11 to 13 m 2 /g.
  • the BET specific surface area in this specification is measured by the BET single point method using nitrogen gas in accordance with the method described in JIS Z 8830:2013 "Method for measuring the specific surface area of powder (solid) by gas adsorption". It is a value.
  • the BET specific surface area can be adjusted by changing the pulverizing conditions when pulverizing the fired product after nitriding.
  • the ⁇ rate of the silicon nitride powder may be 94% or more.
  • ⁇ phase is more likely to be formed. Therefore, the density of the silicon nitride sintered body can be maintained sufficiently low while the strength can be sufficiently increased.
  • the ⁇ rate of the silicon nitride powder may be 97% or less, or may be 96% or less.
  • the ⁇ rate of silicon nitride powder can be determined based on the diffraction line intensity of X-ray diffraction.
  • the ⁇ rate of silicon nitride powder can be adjusted by changing the heating conditions during nitriding. For example, if the heating temperature is increased, a ⁇ phase is generated and the ⁇ rate tends to be lowered.
  • the average particle diameter (D50, median diameter) of the silicon nitride powder may be 0.5 to 1.2 ⁇ m, or 0.6 to 0.9 ⁇ m.
  • the particle size distribution in this specification is measured according to the method described in JIS Z 8825:2013 "Particle size analysis - laser diffraction/scattering method". In the particle size distribution (cumulative distribution) where the horizontal axis is the particle size [ ⁇ m] on a logarithmic scale and the vertical axis is the frequency [volume %], particles when the integrated value from small particle sizes reaches 50% of the total The diameter is the above-mentioned average particle diameter (D50).
  • the particle size (D10) when the integrated value from small particle sizes reaches 10% of the total may be 0.1 to 0.45 ⁇ m.
  • the particle size (D90) when the integrated value from small particle sizes reaches 90% of the total may be 1.3 to 2.5 ⁇ m, and may be 1.5 to 2.0 ⁇ m.
  • the particle size (D100) when the integrated value from the small particle size reaches 100% of the whole may be 2.8 to 5.0 ⁇ m, and may be 3.2 to 4.5 ⁇ m. There may be.
  • the silicon nitride powder described above can be suitably used as a sintering raw material.
  • the silicon nitride powder may be used for silicon nitride sintered bodies, but is not limited thereto.
  • the content of silicon nitride in the silicon nitride powder may be 95% by mass or more, 98% by mass or more, or 99% by mass or more.
  • the content of silicon nitride in the silicon nitride powder can be measured, for example, by X-ray diffraction.
  • the silicon nitride sintered body has a bending strength of 700 MPa or more, and a ratio of bending strength to bulk density of 240 MPa ⁇ cm 3 /g or more.
  • the bending strength of the silicon nitride sintered body may be, for example, 700 to 900 MPa.
  • the bending strength in this specification is the three-point bending strength at room temperature, which is measured according to JIS R1601:2008.
  • the bulk density of the silicon nitride sintered body may be 3.1 g/cm 3 or less, or 3.0 g/cm 3 or less, from the viewpoint of making it lightweight. From the same viewpoint, the relative density of the silicon nitride sintered body may be 97% or less, or may be 95% or less. Further, the bulk density of the silicon nitride sintered body may be 2.8 g/cm 3 or more, or 2.9 g/cm 3 or more from the viewpoint of improving strength. From the same viewpoint, the relative density of the silicon nitride sintered body may be 88% or more, or 91% or more. An example of the range of the bulk density of the silicon nitride sintered body is 2.8 to 3.1 g/cm 3 . An example of the relative density range of the silicon nitride sintered body is 88 to 97%.
  • the bulk density of the silicon nitride sintered body in this specification is measured by the Archimedes method.
  • the relative density of the silicon nitride sintered body in this specification is the relative value of the above-mentioned bulk density with respect to the theoretical density of silicon nitride, 3.17 g/cm 3 .
  • the silicon nitride sintered body of this embodiment may contain components other than silicon nitride and carbon. Carbon may be included, for example as silicon carbide.
  • the silicon nitride sintered body of this embodiment has low density, light weight, and high strength. Therefore, it can be suitably used, for example, as a member of structures and vehicles.
  • a method for producing silicon nitride powder includes a molding step of molding a kneaded material containing silicon powder and an organic binder to obtain a molded body, and heating the molded body at a temperature of 900° C. or higher and lower than 1100° C. for 1 hour or more. a degreasing step in which the molded body is degreased; a firing step in which the molded body is fired in a mixed atmosphere containing nitrogen and at least one selected from the group consisting of hydrogen and ammonia to obtain a fired product containing silicon nitride and carbon; The method includes a pulverizing step of pulverizing the fired product.
  • the oxygen content of the silicon powder used in the molding step may be, for example, 0.2 to 0.4% by mass.
  • the carbon content of the silicon powder may be from 0.05 to 0.15% by weight.
  • the oxygen content and carbon content of silicon powder can be measured by infrared absorption method.
  • a pretreatment liquid containing hydrofluoric acid may be used to reduce the amount of oxygen bound to the silicon powder.
  • the pretreatment liquid may contain hydrofluoric acid or may be a mixed acid with an acid such as hydrochloric acid.
  • organic binders examples include urethane resin, vinyl butyral resin, vinyl alcohol resin, vinyl acetal resin, vinyl formal resin, polyimide resin, phenol resin, melamine resin, epoxy resin, coumaron/indene resin, acrylic resin, aromatic vinyl resin, and cellulose. and cellulose derivatives, waxes, and starches.
  • the blending amount of the organic binder may be, for example, 3 to 30 parts by mass, or 5 to 20 parts by mass, based on 100 parts by mass of silicon powder.
  • the kneaded material may contain a solvent.
  • the solvent include water, alcohols, ketones, esters, ethers, aromatic hydrocarbons, polybasic acids, and the like.
  • a molded article is produced by molding such a kneaded product using a conventional molding method. Examples of the molding method include extrusion molding and uniaxial press molding.
  • the bulk density of the molded product after drying may be 0.5 to 1.5 g/cm 3 or 0.8 to 1.2 g/cm 3 .
  • the molded body is heated in a heating furnace to decompose and/or volatilize and remove at least a portion of the organic binder contained in the molded body.
  • a drying step of heating to a temperature higher than the boiling point of the solvent may be performed before the degreasing step.
  • the molded body is heated at 900° C. or higher and lower than 1100° C. for 1 hour or more in an atmosphere containing hydrogen gas, for example.
  • the heating temperature in the degreasing step may be 950 to 1050°C.
  • the heating time in the degreasing step may be 2 hours or more, or 3 hours or more from the viewpoint of sufficiently reducing the organic binder in the molded body.
  • the heating time in the degreasing step may be 20 hours or less, or 10 hours or less, from the viewpoint of improving production process efficiency.
  • An example of the range of heating time in the degreasing step is 1 to 20 hours.
  • the atmosphere may be hydrogen gas or a mixed gas in which the concentration of hydrogen gas is 1.0 to 10.0% by volume. This volume ratio is a value under standard conditions (temperature 0° C., pressure 1 atm).
  • the degreased molded body is fired in a mixed atmosphere containing nitrogen and at least one selected from the group consisting of hydrogen and ammonia to obtain a fired product containing silicon nitride and carbon.
  • Carbon may be contained inside the silicon nitride particles, or may be attached or bonded as particles to the surface of the silicon nitride particles.
  • the total content of hydrogen and ammonia in the mixed atmosphere may be, for example, 10 to 40% by volume, based on the entire mixed atmosphere.
  • the firing temperature may be, for example, 1100 to 1450°C, or 1200 to 1400°C.
  • the firing time may be, for example, 30 to 100 hours.
  • the fired product obtained in the calcination step is dry-pulverized to obtain a pulverized product.
  • the pulverization process may be performed in multiple stages including coarse pulverization and fine pulverization to adjust the particle size distribution of the silicon nitride powder.
  • the milling step may include two steps: a ball milling step and a vibration milling step.
  • a classification step may be performed to adjust the particle size.
  • a post-treatment step may be performed to adjust the oxygen concentration.
  • the pulverized baked product may be dispersed in hydrofluoric acid for treatment. Thereafter, filtration and drying can be performed to obtain silicon nitride powder.
  • Silicon nitride powder can be produced by such a method.
  • This production method can produce silicon nitride powder at a lower production cost than the imide decomposition method.
  • the shape, composition, and properties of the silicon nitride powder obtained by this manufacturing method are as described in the embodiment of the silicon nitride powder. Therefore, the content explained in the embodiment of silicon nitride powder is also applied to the manufacturing method of this embodiment.
  • the mass ratio Cp of carbon to the entire powder of silicon nitride powder obtained by this manufacturing method may be 0.05% or more.
  • the mass ratio Cs of carbon contained in the surface portion of the silicon nitride powder to the entire silicon nitride powder may be 0.05% or less.
  • the above-mentioned manufacturing method is an example, and the method of manufacturing silicon nitride powder is not limited to the above-mentioned manufacturing method.
  • a method for manufacturing a silicon nitride sintered body includes a sintering step of shaping and firing a sintering raw material containing the above-mentioned silicon nitride powder.
  • the sintering raw material may contain an oxide sintering aid in addition to the silicon nitride powder.
  • the oxide sintering aid include Y 2 O 3 , MgO, and Al 2 O 3 .
  • the content of the oxide sintering aid in the sintering raw material may be, for example, 3 to 10% by mass.
  • the sintering raw material described above is pressed at a molding pressure of, for example, 3.0 to 30 MPa to obtain a molded body.
  • the molded body may be produced by uniaxial pressing or by CIP. Alternatively, it may be fired while being shaped by hot pressing.
  • the molded body may be fired in an inert gas atmosphere such as nitrogen gas or argon gas.
  • the pressure during firing may be 0.7 to 1.5 MPa.
  • the firing temperature may be 1860-2100°C, or 1880-2000°C.
  • the firing time at the firing temperature may be 6 to 20 hours, or 8 to 16 hours.
  • the heating rate to the firing temperature may be, for example, 1.0 to 10.0° C./hour.
  • the silicon nitride sintered body thus obtained has high strength despite its low density because excessive densification is suppressed and ⁇ phase is easily generated.
  • the composition and properties of the silicon nitride sintered body obtained by this manufacturing method are as explained in the embodiment of the silicon nitride sintered body. Therefore, the content explained in the embodiment of the silicon nitride sintered body is also applied to the manufacturing method of this embodiment.
  • the above-mentioned manufacturing method is an example, and the method of manufacturing the silicon nitride sintered body is not limited to the above-mentioned manufacturing method.
  • the silicon nitride powder according to any one of [1] to [5], which has an ⁇ rate of 94% or more.
  • the silicon nitride powder has a mass ratio Cp of carbon to the entire powder of 0.05% or more, and a mass ratio Cs of carbon contained in the surface portion of the powder to the entire powder of 0.05% or less.
  • the bending strength is 700 MPa or more, A silicon nitride sintered body having a bending strength to bulk density ratio of 240 MPa ⁇ cm 3 /g or more.
  • [15] Contains the silicon nitride powder according to any one of [1] to [6] above, or the silicon nitride powder obtained by the manufacturing method according to any one of [8] to [13] above.
  • a method for producing a silicon nitride sintered body comprising a step of obtaining a silicon nitride sintered body using a sintering raw material.
  • Example 1 ⁇ Preparation of silicon nitride powder> A kneaded product was obtained by kneading silicon powder (oxygen content: 0.3% by mass, carbon content: 0.10% by mass), an organic binder (vinyl alcohol resin), and a solvent (water). The amount of organic binder added to 100 parts by mass of silicon powder was 10 parts by mass. Using this kneaded product, a molded body (bulk density: 1.0 g/cm 3 ) was produced by uniaxial pressure molding (molding pressure: 8 MPa). The obtained molded body was dried for 3 hours in a constant temperature bath at 150°C (drying step). After drying, the molded body was placed in an electric furnace and maintained at a temperature of 1000° C. for 2 hours in an atmosphere of hydrogen gas (degreasing step).
  • the molded body after degreasing was placed in another electric furnace and fired at 1400° C. for 60 hours to obtain a fired product containing silicon nitride.
  • a mixed gas of nitrogen gas and hydrogen gas (a mixed gas of N 2 and H 2 mixed at a volume ratio of 80%:20% in a standard state) was supplied as the atmosphere during firing.
  • the obtained baked product was coarsely ground and then dry ground in a ball mill.
  • the silicon nitride powder obtained by dry pulverization was classified using a classifier.
  • Coarse particles were removed from the silicon nitride powder by classification.
  • the mass ratio of the silicon nitride powder after classification was 80% based on the total mass of the silicon nitride powder before classification.
  • the silicon nitride powder after classification means the silicon nitride powder obtained by removing coarse particles.
  • the silicon nitride powder thus obtained was evaluated as follows.
  • the carbon mass ratio Cp of the silicon nitride powder was examined using a commercially available carbon/sulfur analyzer (manufactured by LECO, device name: IR412 type). As a measurement procedure, the sample was heated from 20°C to 2000°C at a heating rate of 10°C/sec in an oxygen atmosphere. The mass ratio Cp of carbon contained in the entire silicon nitride powder was determined by detecting carbon monoxide and carbon dioxide generated as the temperature rose with an infrared detector.
  • the mass ratio Cs of carbon contained in the surface portion of the silicon nitride powder was investigated.
  • the sample was heated from 20°C to 1000°C at a heating rate of 10°C/sec, and held at 1000°C for 15 minutes.
  • the mass ratio Cs of carbon contained in the surface portion of the silicon nitride powder was determined.
  • the mass ratio Ci of carbon contained inside the silicon nitride powder was determined by the above formula (II).
  • the carbon mass ratios Cp, Cs, and Ci were as shown in Table 1. Table 1 also shows the ratio of the mass ratio Cs to the mass ratio Ci.
  • the mass ratio Os of oxygen contained in the surface of the silicon nitride powder and the mass ratio Oi of oxygen contained inside were measured using an oxygen/nitrogen analyzer (manufactured by Horiba, Ltd., device name: EMGA-920). . Specifically, silicon nitride powder was heated from 20°C to 2000°C in a helium atmosphere at a heating rate of 8°C/sec, and the amount of oxygen was determined before nitrogen was detected. The ratio Os was determined. Furthermore, the oxygen mass ratio Oi was determined by quantifying the amount of oxygen after nitrogen began to be detected.
  • the oxygen mass ratio Os and the oxygen mass ratio Oi were summed to determine the oxygen mass ratio Op in the entire silicon nitride powder.
  • the oxygen mass ratios Op, Os, and Oi were as shown in Table 1.
  • Table 1 also shows the ratio of the mass ratio Os to the mass ratio Cs.
  • the ⁇ rate of silicon nitride powder was measured using the following procedure.
  • the silicon nitride powder was subjected to X-ray diffraction using CuK ⁇ rays using an X-ray diffraction device (manufactured by Rigaku, device name: Ultima IV).
  • the ⁇ phase is represented by the diffraction line intensity I a102 of the (102) plane and the diffraction line intensity I a210 of the (210) plane
  • the ⁇ phase is represented by the diffraction line intensity I b101 of the (101) plane and the diffraction line intensity I b101 of the (210) plane. It was represented by line intensity I b210 .
  • ⁇ rate (%) (I a102 +I a210 )/(I a102 +I a210 +I b101 +I b210 ) ⁇ 100
  • ⁇ Preparation of silicon nitride sintered body> The prepared silicon nitride powder, Y 2 O 3 powder with an average particle size of 1.5 ⁇ m, and Yb 2 O 3 powder with an average particle size of 1.2 ⁇ m were blended at a mass ratio of 90:5:5. . Methanol was added to the blended powder sample and wet mixed for 4 hours.
  • the mixed powder (sintering raw material) obtained by drying was uniaxially pressed at a pressure of 10 MPa, and then cold isostatically pressed (CIP) at a pressure of 25 MPa.
  • the obtained molded body was set in a carbon crucible together with a packing powder consisting of a mixed powder of silicon nitride powder and BN powder, and fired at a temperature of 1900°C for 10 hours in a nitrogen pressurized atmosphere of 1 MPa to obtain a silicon nitride sintered body. was manufactured.
  • Example 2 When preparing silicon nitride powder, silicon nitride powder and silicon nitride sintered body were prepared under the same conditions as in Example 1, except that the holding time in the degreasing step was set to 4 hours. Then, each measurement of the silicon nitride powder and the silicon nitride sintered body was performed in the same manner as in Example 1. The results were as shown in Tables 1, 2 and 3.
  • Example 3 When preparing silicon nitride powder, silicon nitride powder and silicon nitride sintered body were prepared under the same conditions as in Example 1, except that the holding time in the degreasing step was 6 hours. Then, each measurement of the silicon nitride powder and the silicon nitride sintered body was performed in the same manner as in Example 1. The results were as shown in Tables 1, 2 and 3.
  • the silicon nitride sintered bodies of Examples 1 to 3 had lower density and higher strength than Comparative Example 1, and the ratio of bending strength to bulk density was large.
  • silicon nitride sintered body having low manufacturing cost, low density, and high strength, and a method for manufacturing the same. It is possible to provide a silicon nitride powder and a method for manufacturing the same that can produce a silicon nitride sintered body with low density and high strength at low production cost.

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WO2025206127A1 (ja) * 2024-03-28 2025-10-02 Ｕｂｅ株式会社 結晶質窒化ケイ素粉末、窒化ケイ素質焼結体および窒化ケイ素質焼結体の製造方法
WO2025205632A1 (ja) * 2024-03-29 2025-10-02 デンカ株式会社 窒化ケイ素粉末、及びその製造方法
EP4628448A1 (en) * 2024-04-02 2025-10-08 Denka Company Limited Silicon nitride powder
EP4631911A1 (en) * 2024-04-02 2025-10-15 Denka Company Limited Silicon nitride powder
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WO2025206127A1 (ja) * 2024-03-28 2025-10-02 Ｕｂｅ株式会社 結晶質窒化ケイ素粉末、窒化ケイ素質焼結体および窒化ケイ素質焼結体の製造方法
WO2025205632A1 (ja) * 2024-03-29 2025-10-02 デンカ株式会社 窒化ケイ素粉末、及びその製造方法
EP4628448A1 (en) * 2024-04-02 2025-10-08 Denka Company Limited Silicon nitride powder
EP4631911A1 (en) * 2024-04-02 2025-10-15 Denka Company Limited Silicon nitride powder
WO2025258653A1 (ja) * 2024-06-13 2025-12-18 Ｕｂｅ株式会社 結晶質窒化ケイ素粉末、該粉末を含む窒化ケイ素焼結体、窒化ケイ素焼結体の製造方法、該焼結体を含む物品、および車両

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