WO2023179648A1 - Système de commande et procédé d'économie d'énergie et de maintenance continue de pompe à vide - Google Patents

Système de commande et procédé d'économie d'énergie et de maintenance continue de pompe à vide Download PDF

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Publication number
WO2023179648A1
WO2023179648A1 PCT/CN2023/083039 CN2023083039W WO2023179648A1 WO 2023179648 A1 WO2023179648 A1 WO 2023179648A1 CN 2023083039 W CN2023083039 W CN 2023083039W WO 2023179648 A1 WO2023179648 A1 WO 2023179648A1
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WIPO (PCT)
Prior art keywords
main
vacuum
centralized
vacuum pump
single crystal
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PCT/CN2023/083039
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English (en)
Chinese (zh)
Inventor
孙彬
徐志群
付明全
王迎春
马伟萍
Original Assignee
高景太阳能股份有限公司
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Publication of WO2023179648A1 publication Critical patent/WO2023179648A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier

Definitions

  • the invention relates to the technical field of photovoltaic equipment, and in particular to an energy-saving control system that can maintain a vacuum pump without stopping the furnace, and a control method using the system.
  • each single crystal furnace is equipped with a main vacuum pump and a Unicom centralized vacuum pump. From the start of production to the main filter tank oxide needs to be cleaned, the main evacuation pump is always in working condition, so that the single crystal
  • the furnace is always under negative pressure (approximately 13 Torr); after drawing a crystal ingot and putting it out, a centralized vacuum pump needs to be involved in the re-investment (polysilicon) step.
  • the furnace is always in a state of negative pressure or even vacuum and high temperature production.
  • the filter tank needs to be cleaned every 400 hours.
  • the vacuum pump is damaged, but every time it is cleaned and repaired, the high-temperature vacuum furnace table must be suspended. (It is estimated that it will take 16 hours from the monocrystalline furnace to shut down the power and restart the furnace. The characteristics of the quartz crucible is that it will be damaged after experiencing high temperatures.) Repair and cleaning can be carried out. During this period, it will cause the loss of production shutdown. At the same time, it will continue to operate for a certain period of time. , the single crystal stove also needs to be cleaned (oxide).
  • the current equipment is equipped with one vacuum pump for each furnace. The vacuum pump is idle most of the time. Equipping one vacuum pump for each furnace results in a waste of costs.
  • the object of the present invention is to provide an energy-saving control system and a method for maintaining a vacuum pump without stopping the furnace.
  • the system and method can perform individual maintenance at the same time while the furnace is in a high-temperature vacuum state and continues production. and cleaning, which can improve the utilization rate of the vacuum pump, ensure better use effect, easy maintenance, good filtration effect, and more convenient cleaning.
  • An energy-saving and non-stop furnace maintenance vacuum pump control system including: multiple single crystal furnaces, a main evacuation system, a first centralized evacuation system, and a second centralized evacuation system.
  • the first outlet of each single crystal furnace is connected There is a first vacuum pipeline, a plurality of the first vacuum pipelines are connected in parallel and connected to the vacuum pump pipeline of the main evacuation system, and each first vacuum pipeline is provided with a vacuum pump corresponding to each of the single crystal units.
  • the first-level main ball valve of the furnace is used to control the main evacuation system to extract the gas in the barrel of the single crystal furnace through the vacuum pump pipeline; the second outlet of each single crystal furnace is connected to a second vacuum pipeline.
  • the second vacuum pipelines are connected in parallel to communicate with the vacuum pump pipeline of the first centralized evacuation system, and each second vacuum pipeline is provided with a first centralized evacuation ball valve to control the first centralized evacuation.
  • the system extracts the gas in the single crystal furnace barrel through a vacuum pump pipeline; the third outlet of each single crystal furnace is connected to a third vacuum pipeline, and multiple third vacuum pipelines are connected in parallel and merged with the third vacuum pipeline.
  • the vacuum pump pipelines of the two centralized evacuation systems are connected, and each third vacuum pipeline is provided with a second centralized evacuation ball valve to control the second centralized evacuation system to extract the gas in the single crystal furnace barrel through the vacuum pump pipeline. gas.
  • the main evacuation system includes N groups of main evacuation devices, and each group of the main evacuation devices includes a secondary main ball valve, a main filter tank, and a main vacuum pump that are sequentially arranged in the vacuum pump pipeline along the direction of air flow, wherein , N ⁇ 4, the number of single crystal furnaces is M, M ⁇ 11.
  • the first centralized evacuation system includes a first centralized evacuation filter tank and a first centralized evacuation pump that are sequentially arranged in the vacuum pump pipeline along the direction of air flow, and the first centralized evacuation filter tank is connected to multiple units. Between the single crystal furnace and the first centralized vacuum pump, the number of the first centralized vacuum pump and the first centralized vacuum filter tank is one.
  • the second centralized evacuation system includes sequentially arranged along the direction of air flow.
  • a second centralized vacuum filter tank and a second centralized vacuum pump are provided in the vacuum pump pipeline.
  • the second centralized vacuum filter tank is connected between multiple single crystal furnaces and the second centralized vacuum pump.
  • the second centralized vacuum pump The number of vacuum pumps and second centralized pumping filter tanks is 1.
  • a further solution is that the main evacuation system, the first centralized evacuation system, the second centralized evacuation system, the first-level main ball valve, the second-level main ball valve, the first centralized evacuation ball valve, and the second centralized evacuation ball valve are respectively controlled by a unified system.
  • the system signal is connected and automatically controlled to turn on or off.
  • the main filter tank, the first centralized suction filter tank, and the second centralized suction filter tank all include a filter tank main body, and the filter tank main body is connected to multiple single crystal furnaces, wherein, the A filter unit is provided inside the main body of the filter tank for filtering the gas emitted by the single crystal furnace; a discharge port for discharging impurity particles is provided at the lower end of the main body of the filter tank.
  • the vacuum pump pipeline of the main evacuation system is provided with a vacuum pressure sensor and an automatic release valve.
  • the vacuum pressure sensor is connected to the alarm output circuit of the single crystal furnace.
  • the alarm output circuit of the single crystal furnace issues an alarm and controls the operation of the automatic gas release valve.
  • a control method for a control system that saves energy and can maintain a vacuum pump without stopping the furnace is applied to the above-mentioned control system that saves energy and can maintain a vacuum pump without stopping the furnace.
  • the method includes: before operating, the main evacuation system and the third The vacuum pump pipelines of the first centralized evacuation system and the second centralized evacuation system are respectively connected to M single crystal furnaces, M ⁇ 11; the main evacuation system, the first centralized evacuation system, and the second centralized evacuation system are in working state in a switching manner.
  • the control system is working, the main vacuum pump of the main evacuation system starts to work, and the air in the single crystal furnace is evacuated through the vacuum pump pipeline.
  • the main vacuum pump stops working, and the single crystal furnace is in a high-temperature negative pressure state.
  • the negative pressure of the single crystal furnace is provided by the main vacuum pump of the N group of main evacuation devices.
  • the first centralized evacuation system and the second centralized evacuation system are in a closed state, N ⁇ 4; when the main filter tank or main vacuum pump needs to be cleaned or repaired separately, Close the secondary main ball valve corresponding to the main filter tank or main vacuum pump in the main evacuation system to perform separate cleaning or maintenance; when it is necessary to clean the oxides in the single crystal furnace, close the primary main ball valve of the first vacuum pipeline and The secondary main ball valve of the main evacuation system, since the pressure in the single crystal furnace is at normal pressure after cleaning, the second centralized vacuum pump of the second centralized evacuation system is activated at this time.
  • the switch to the main vacuum pump When the pressure in the single crystal furnace reaches 13Torr, the switch to the main vacuum pump; if one of the single crystal furnaces causes excessive accumulation of oxides and the furnace pressure rises, use the negative pressure of the second centralized vacuum pump to instantly clear the oxides out of the pipeline.
  • a further plan is to combine the main evacuation system, the first centralized evacuation system, and the second centralized evacuation system.
  • the vacuum pump pipelines of the system are respectively connected to M single crystal furnaces, which specifically include: N groups of main evacuation devices are provided, and the M single crystal furnaces are connected in parallel to the vacuum pump pipelines of the main evacuation system through M first vacuum pipelines.
  • the vacuum pump pipelines connected to M single crystal furnaces are divided into N shunt pipelines.
  • Each shunt pipeline is connected in turn to the secondary main ball valve, main filter tank, and main vacuum pump of each group of main evacuation devices; through M second vacuum pipelines,
  • the M single crystal furnaces are connected in parallel to the vacuum pump pipeline of the first centralized evacuation system, and the M single crystal furnaces are connected in parallel to the vacuum pump pipeline of the second centralized evacuation system through M third vacuum pipelines.
  • a further solution is to stop the main vacuum pump after reaching the required vacuum degree and detect whether other ball valves are open. If so, close the ball valve of the corresponding pipeline; if not, use the vacuum pressure sensor to detect whether the vacuum pump pipeline is open. Normal pressure; if it is not normal pressure, open the automatic bleed valve and re-test until it reaches normal pressure; then close the automatic bleed valve, the main vacuum pump starts to work, and the corresponding ball valve to work opens, starts to work, and detects Whether the vacuum degree can reach the specified requirements within the specified time, if so, close the corresponding valve, turn off the main vacuum pump, and end it; otherwise, deflate the pressure in the furnace to normal pressure, and return to the step of detecting whether the vacuum pump pipeline is normal pressure. until the specified requirements are met.
  • the present invention has the following beneficial effects:
  • the main vacuum pump can be repaired and the oxides in the filter tank can be cleaned without stopping the use of the single crystal furnace, thereby improving production efficiency.
  • the single crystal furnace can be repaired independently without affecting the use of other furnaces in the system, thereby improving production efficiency.
  • the number of main vacuum pumps can be reduced from the original 11 main vacuum pumps to the current 4.
  • the energy consumption is reduced by more than 50%, which can save costs, increase equipment utilization, and improve work efficiency and stability. Stronger, easier to maintain and more stable.
  • the filter element can be cleaned without disassembling the filter device.
  • the filter tank provided by the invention saves a lot of manpower and material resources, improves the utilization efficiency of the single crystal furnace, and facilitates cleaning of the filter element, which has the advantage of significant economic benefits.
  • the alarm output circuit of the single crystal furnace issues an alarm; when equipment failure causes abnormal pressure, an alarm can be made in time to prevent production losses caused by abnormal furnace pressure and eliminate furnace pressure. Potential safety hazards caused when the pressure is too high.
  • Figure 1 is a schematic diagram of an embodiment of a control system of the present invention that saves energy and can maintain a vacuum pump without stopping the furnace.
  • Figure 2 is a schematic structural diagram of the main filter tank, the first centralized suction filter tank, and the second centralized suction filter tank in the control system embodiment of the invention's energy-saving and non-stop furnace maintenance vacuum pump control system.
  • Each single crystal furnace Each first outlet of 100 is connected to a first vacuum pipeline.
  • Multiple first vacuum pipelines are connected in parallel and connected to the vacuum pump pipeline of the main evacuation system 10.
  • Each first vacuum pipeline is provided with a vacuum pipeline corresponding to each single crystal furnace.
  • 100's first-level main ball valve 51 to control the main evacuation system 10 to extract the gas in the barrel of the single crystal furnace 100 through the vacuum pump pipeline.
  • each single crystal furnace 100 is connected to a second vacuum pipeline, and multiple second vacuum pipelines are connected in parallel to communicate with the vacuum pump pipeline of the first centralized evacuation system 20, and each second vacuum pipeline
  • Each vacuum pipeline is provided with a first centralized evacuation ball valve 52 to control the first centralized evacuation system 20 to extract the gas in the barrel of the single crystal furnace 100 through the vacuum pump pipeline.
  • each single crystal furnace 100 is connected to a third vacuum pipeline, and multiple third vacuum pipelines are connected in parallel to communicate with the vacuum pump pipeline of the second centralized evacuation system 30, and each third vacuum pipeline
  • a second centralized evacuation ball valve 53 is provided on the vacuum pipeline to control the second centralized evacuation system 30 to extract the gas in the barrel of the single crystal furnace 100 through the vacuum pump pipeline.
  • the main evacuation system 10 includes N groups of main evacuation devices.
  • Each group of main evacuation devices includes a secondary main ball valve 11, a main filter tank 12, and a main vacuum pump 13 that are sequentially arranged in the vacuum pump pipeline along the direction of air flow.
  • N ⁇ 4 the number of single crystal furnaces 100 is M, M ⁇ 11.
  • the first centralized evacuation system 20 includes a first centralized evacuation filter tank 21 and a first centralized evacuation pump 22 that are sequentially arranged in the vacuum pump pipeline along the direction of air flow.
  • the first centralized evacuation filter tank 21 is connected to multiple single crystal furnaces 100 and Between the first centralized vacuum pump 22, the number of the first centralized vacuum pump 22 and the first centralized vacuum filter tank 21 is one.
  • the second centralized evacuation system 30 includes a second centralized evacuation filter tank 31 and a second centralized evacuation pump 32 that are sequentially arranged in the vacuum pump pipeline along the direction of air flow.
  • the second centralized evacuation filter tank 31 is connected to multiple single crystal furnaces 100 and Between the second centralized vacuum pump 32, the number of the second centralized vacuum pump 32 and the second centralized vacuum filter tank 31 is one.
  • the main evacuation system 10 the first centralized evacuation system 20, the second centralized evacuation system 30, the first-level main ball valve 51, the second-level main ball valve 11, the first centralized evacuation ball valve 52, and the second centralized evacuation ball valve 53 They are connected to a unified control system signal and automatically controlled to turn on or off.
  • the vacuum pump pipeline of the main evacuation system 10 is provided with a vacuum pressure sensor (not shown) and an automatic gas release valve (not shown), and the vacuum pressure sensor is connected to the alarm output circuit of the single crystal furnace 100. Then, when the pressure signal detected by the vacuum pressure sensor exceeds the set high pressure threshold -95.0Kpa, the alarm output circuit of the single crystal furnace 100 issues an alarm and controls the operation of the automatic gas release valve.
  • the main filter tank 12, the first centralized suction filter tank 21, and the second centralized suction filter tank 31 all include a filter tank body 1, an upper cover 2, an air inlet 3, and an air outlet. 4. Cleaning port 5.
  • the main body of the filter tank 1 is connected to multiple single crystal furnaces 100.
  • the upper cover 2 is set on the top of the main body of the filter tank 1.
  • the cleaning port 5 is set on the upper cover 2.
  • the air inlet 3 and the air outlet 4 They are all arranged on the filter tank body 1.
  • a filter unit is provided inside the filter tank body 1 for filtering the gas emitted by the single crystal furnace 100; a discharge port 6 for discharging impurity particles is provided at the lower end of the filter tank body 1.
  • the air inlet 3 and the air outlet 4 are opened.
  • the exhaust gas enters from the air inlet 3, is filtered through the filter unit, and is finally discharged from the air outlet 4. It is closed when the filter unit needs to be cleaned.
  • the filter unit includes a filter element 8 and a honeycomb ultrafine fiber paper (not shown) fixed on the filter element 8.
  • the air inlet 3 of the present invention is connected to the exhaust port of the single crystal furnace 100, and the gas containing impurities passes through the filter element. 8 and the honeycomb ultrafine fiber paper are filtered and discharged from the air outlet 4 into the vacuum pump.
  • the honeycomb ultrafine fiber paper is fixed on the filter element 8 and can be opened through the upper cover 2 to facilitate the removal and cleaning of the honeycomb ultrafine fiber paper.
  • the present invention uses honeycomb-shaped ultrafine fiber paper as the filter medium, which can filter finer impurities.
  • the honeycomb structure greatly increases the air-passing area and improves the air-passing efficiency. It is of great significance to filter more and smaller impurities, reduce the amount of vacuum pump oil, extend the service life of the vacuum pump, and improve the vacuum degree within 100 degrees of the single crystal furnace.
  • the present invention mainly includes the single crystal furnace 100, the first centralized evacuation ball valve 52, the first centralized evacuation filter tank 21, the first and second centralized vacuum pumps 32, the first-level main ball valve 51, and the second-level main ball valve 11 , the main filter tank 12, the main vacuum pump 13, the second centralized evacuation ball valve 53, the second centralized evacuation filter tank 31, etc., can keep the furnace in a high temperature vacuum state to continue production while maintaining separate maintenance and cleaning at the same time, which can improve the utilization of the vacuum pump efficiency, ensuring better use results, easy maintenance, good filtration effect, and easier cleaning.
  • This embodiment provides a control method for a control system that saves energy and can maintain a vacuum pump without stopping the furnace.
  • This method is applied to the above-mentioned control system that saves energy and can maintain a vacuum pump without stopping the furnace.
  • System the method includes;
  • the main evacuation system 10, the first centralized evacuation system 20, and the second centralized evacuation system 30 are in a working state in a switching manner.
  • the control system is working, the main vacuum pump 13 of the main evacuation system 10 starts to work, and the single crystal furnace is evacuated through the vacuum pump pipeline. 100 air, detecting that when the required vacuum degree is reached, the main vacuum pump 13 stops working, and the single crystal furnace 100 is in a high-temperature negative pressure state.
  • the negative pressure of all single crystal furnaces 100 is provided by the main vacuum pump 13 of the N group of main evacuation devices.
  • the first centralized evacuation system 20 and the second centralized evacuation system 30 are in a closed state, N ⁇ 4.
  • the single crystal furnace 100 when the system is working, the single crystal furnace 100 is in a high-temperature negative pressure state, and the negative pressure of all single crystal furnaces 100 is provided by 4 main vacuum pumps 13 (3 in use and 1 in standby, 3 vacuum pumps, the opening is 80%) Meet the technical requirements of furnace pressure 13Torr), the first and second centralized evacuation ball valves 53 are in a closed state, and the first and second centralized vacuum pumps 32 are in a resting state.
  • the first-level main ball valve 51 of the first vacuum pipeline and the second-level main ball valve 11 of the main evacuation system 10 are closed. Since the pressure in the single crystal furnace 100 is normal after cleaning, , at this time, the second centralized vacuum pump 32 of the second centralized evacuation system 30 is enabled. When the pressure in the single crystal furnace 100 reaches 13 Torr, the main vacuum pump 13 is switched. It can be seen that when the oxide in the single crystal furnace 100 needs to be cleaned, the first-level main ball valve 51 and the second-level main ball valve 11 are closed. After cleaning the single crystal furnace 100, it is in a normal pressure (the same atmospheric pressure as the outside world) state. At this time, the second-level main ball valve 51 is turned on. The second centralized evacuation pump switches to the main vacuum pump 13 when the furnace pressure reaches 13Torr.
  • the negative pressure of the second centralized vacuum pump 32 is used to instantly clean the oxides out of the pipeline.
  • the vacuum pump pipelines of the main evacuation system 10, the first centralized evacuation system 20, and the second centralized evacuation system 30 are respectively connected to M single crystal furnaces 100, which specifically includes: N sets of main evacuation devices are provided,
  • the M single crystal furnaces 100 are connected in parallel to the vacuum pump pipelines of the main evacuation system 10 through M first vacuum pipelines, and the vacuum pump pipelines connected to the M single crystal furnaces 100 are divided into N Split pipelines, each split pipeline is connected in turn to the secondary main ball valve 11, main filter tank 12, and main vacuum pump 13 of each group of main evacuation devices;
  • M single crystal furnaces 100 are connected in parallel through M second vacuum pipelines to the third
  • the vacuum pump pipeline of the centralized evacuation system 20 connects the M single crystal furnaces 100 in parallel to the vacuum pump pipeline of the second centralized evacuation system 30 through M third vacuum pipelines.
  • the main vacuum pump 13 stops working and detects whether other ball valves are open. If so, close the ball valve of the corresponding pipeline; if not, use the vacuum pressure sensor to detect whether the vacuum pump pipeline is open. It is normal pressure. If it is not normal pressure, open the automatic bleed valve and recheck until it reaches normal pressure.
  • the main vacuum pump 13 starts to work.
  • the corresponding ball valve that needs to work is opened and starts to work. It is checked whether the vacuum degree can meet the specified requirements within the specified time. If so, the corresponding valve is closed, and the main vacuum pump 13 is closed. , end, otherwise deflate the pressure in the furnace to normal pressure and return to the step of detecting whether the vacuum pump pipeline is normal pressure until the specified requirements are met.
  • a vacuum pressure sensor and an automatic release valve sensing device are added.
  • the main vacuum pump 13 has just finished working and the pipeline of the main vacuum pump 13 is still under negative pressure.
  • the main vacuum pump The instantaneous opening of valve 13 will cause the main vacuum pump 13 pipeline to vibrate other furnaces.
  • the advantages of combining these two devices can avoid "melting" accidents caused by evacuation.
  • the present invention has the following beneficial effects:
  • the main vacuum pump 13 can be repaired and the oxides in the filter tank can be cleaned, thereby improving production efficiency.
  • the single crystal furnace 100 can be repaired independently without affecting the use of other furnaces in the system, thus improving production efficiency.
  • the number of main vacuum pumps 13 can be reduced from the original 11 main vacuum pumps 13 to the current 4.
  • the energy consumption is reduced by more than 50%, which can save costs, improve equipment utilization, and improve work efficiency. Strong stability, easy maintenance, and better stability.
  • the filter element 8 can be cleaned without disassembling the filter device.
  • the filter tank provided by the present invention saves a lot of time. It saves manpower and material resources, improves the utilization efficiency of the single crystal furnace 100, and facilitates cleaning of the filter element 8, which has the advantage of significant economic benefits.
  • the alarm output circuit of the single crystal furnace 100 sends an alarm; when equipment failure causes abnormal pressure, an alarm can be made in time to prevent production losses caused by abnormal furnace pressure and eliminate Safety hazards caused when the furnace pressure is too high.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

La présente invention concerne un système de commande et un procédé d'économie d'énergie et de maintenance continue d'une pompe à vide. Le système comprend une pluralité de fours à monocristaux, un système de vide principal, un premier système de vide centralisé et un deuxième système de vide centralisé. Une pluralité de premières canalisations sous vide sont raccordées en parallèle de façon à être en communication avec une canalisation de pompe à vide du système à vide principal, et chaque première canalisation sous vide est pourvue d'un clapet à bille principal primaire correspondant à chaque four à monocristaux ; une pluralité de deuxièmes canalisations sous vide sont raccordées en parallèle de façon à être en communication avec une canalisation de pompe à vide du premier système sous vide centralisé, et chaque deuxième canalisation sous vide est pourvue d'un premier clapet à bille sous vide centralisé ; une pluralité de troisièmes canalisations sous vide sont raccordées en parallèle de façon à être en communication avec une canalisation de pompe à vide du deuxième système sous vide centralisé, et chaque troisième canalisation sous vide est pourvue d'un deuxième clapet à bille sous vide centralisé. Une maintenance et un nettoyage séparés peuvent être effectués en même temps tandis qu'une plateforme de four est dans une condition de production continue à un vide à haute température, de sorte que la pompe à vide présente un taux d'utilisation élevé et un bon effet en cours d'utilisation, une maintenance pratique est obtenue, un bon effet de filtration est obtenu, et un nettoyage pratique est obtenu.
PCT/CN2023/083039 2022-03-23 2023-03-22 Système de commande et procédé d'économie d'énergie et de maintenance continue de pompe à vide WO2023179648A1 (fr)

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CN202210285721.6A CN114381796B (zh) 2022-03-23 2022-03-23 一种节能且可不停炉维护真空泵的控制系统及其方法
CN202210285721.6 2022-03-23

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CN114381796B (zh) * 2022-03-23 2022-05-31 广东高景太阳能科技有限公司 一种节能且可不停炉维护真空泵的控制系统及其方法

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