WO2023179648A1

WO2023179648A1 - Control system and method for energy-saving and continuous maintenance of vacuum pump

Info

Publication number: WO2023179648A1
Application number: PCT/CN2023/083039
Authority: WO
Inventors: 孙彬; 徐志群; 付明全; 王迎春; 马伟萍
Original assignee: 高景太阳能股份有限公司
Priority date: 2022-03-23
Filing date: 2023-03-22
Publication date: 2023-09-28
Also published as: CN114381796A; CN114381796B

Abstract

A control system and method for energy-saving and continuous maintenance of a vacuum pump. The system comprises a plurality of single crystal furnaces, a main vacuum system, a first centralized vacuum system and a second centralized vacuum system. A plurality of first vacuum pipelines are connected in parallel to be communicated with a vacuum pump pipeline of the main vacuum system, and each first vacuum pipeline is provided with a primary main ball valve corresponding to each single crystal furnace; a plurality of second vacuum pipelines are connected in parallel to be communicated with a vacuum pump pipeline of the first centralized vacuum system, and each second vacuum pipeline is provided with a first centralized vacuum ball valve; a plurality of third vacuum pipelines are connected in parallel to be communicated with a vacuum pump pipeline of the second centralized vacuum system, and each third vacuum pipeline is provided with a second centralized vacuum ball valve. Separate maintenance and cleaning can be performed at the same time while a furnace platform is in a continuous production condition at high-temperature vacuum, such that the vacuum pump is high in utilization rate and good in use effect, convenient maintenance is achieved, a good filtering effect is achieved, and convenient cleaning is achieved.

Description

An energy-saving and non-stop furnace maintenance vacuum pump control system and method thereof

Technical field

The invention relates to the technical field of photovoltaic equipment, and in particular to an energy-saving control system that can maintain a vacuum pump without stopping the furnace, and a control method using the system.

Background technique

Today, with the rapid development of photovoltaic technology, solar cells produced using silicon monocrystals can directly convert solar energy into light energy, marking the beginning of a green energy revolution. Single crystal growth furnace is a single crystal growth equipment. With the rapid development of photovoltaic technology, the industry has also developed rapidly. Single crystal growth requires to be carried out in vacuum and inert gas. The vacuum device should be able to ensure that the thermal vacuum degree in the furnace body reaches more than 5×1024mm mercury.

In the current production process, each single crystal furnace is equipped with a main vacuum pump and a Unicom centralized vacuum pump. From the start of production to the main filter tank oxide needs to be cleaned, the main evacuation pump is always in working condition, so that the single crystal The furnace is always under negative pressure (approximately 13 Torr); after drawing a crystal ingot and putting it out, a centralized vacuum pump needs to be involved in the re-investment (polysilicon) step. The furnace is always in a state of negative pressure or even vacuum and high temperature production.

During production, the filter tank, main vacuum pump, and furnace table all need maintenance. The filter tank needs to be cleaned every 400 hours. There are also cases where the vacuum pump is damaged, but every time it is cleaned and repaired, the high-temperature vacuum furnace table must be suspended. (It is estimated that it will take 16 hours from the monocrystalline furnace to shut down the power and restart the furnace. The characteristics of the quartz crucible is that it will be damaged after experiencing high temperatures.) Repair and cleaning can be carried out. During this period, it will cause the loss of production shutdown. At the same time, it will continue to operate for a certain period of time. , the single crystal stove also needs to be cleaned (oxide). Moreover, the current equipment is equipped with one vacuum pump for each furnace. The vacuum pump is idle most of the time. Equipping one vacuum pump for each furnace results in a waste of costs.

In addition, if inert gas is used as the protective atmosphere, there are gas inlet and outlet ports on the top and bottom of the furnace body. When growing single crystals, dust removal and filtration devices must be equipped after vacuuming and injecting inert gas into the vacuum device. The device comprehensively uses several dust removal mechanisms, including centrifugal force, inertial collision, contact retention, and Brownian diffusion, to collect single crystal dust into the dust chamber of the dust removal filter device. In the existing single crystal furnace dust removal and filtering device Most of the filter units at the bottom are filter tube types, which have weak permeability and small filter area, thus affecting the dust removal and filtration effects.

Contents of the invention

In order to overcome the shortcomings of the prior art, the object of the present invention is to provide an energy-saving control system and a method for maintaining a vacuum pump without stopping the furnace. The system and method can perform individual maintenance at the same time while the furnace is in a high-temperature vacuum state and continues production. and cleaning, which can improve the utilization rate of the vacuum pump, ensure better use effect, easy maintenance, good filtration effect, and more convenient cleaning.

In order to solve the above problems, the technical solutions adopted by the present invention are as follows:

An energy-saving and non-stop furnace maintenance vacuum pump control system, including: multiple single crystal furnaces, a main evacuation system, a first centralized evacuation system, and a second centralized evacuation system. The first outlet of each single crystal furnace is connected There is a first vacuum pipeline, a plurality of the first vacuum pipelines are connected in parallel and connected to the vacuum pump pipeline of the main evacuation system, and each first vacuum pipeline is provided with a vacuum pump corresponding to each of the single crystal units. The first-level main ball valve of the furnace is used to control the main evacuation system to extract the gas in the barrel of the single crystal furnace through the vacuum pump pipeline; the second outlet of each single crystal furnace is connected to a second vacuum pipeline. The second vacuum pipelines are connected in parallel to communicate with the vacuum pump pipeline of the first centralized evacuation system, and each second vacuum pipeline is provided with a first centralized evacuation ball valve to control the first centralized evacuation. The system extracts the gas in the single crystal furnace barrel through a vacuum pump pipeline; the third outlet of each single crystal furnace is connected to a third vacuum pipeline, and multiple third vacuum pipelines are connected in parallel and merged with the third vacuum pipeline. The vacuum pump pipelines of the two centralized evacuation systems are connected, and each third vacuum pipeline is provided with a second centralized evacuation ball valve to control the second centralized evacuation system to extract the gas in the single crystal furnace barrel through the vacuum pump pipeline. gas.

A further solution is that the main evacuation system includes N groups of main evacuation devices, and each group of the main evacuation devices includes a secondary main ball valve, a main filter tank, and a main vacuum pump that are sequentially arranged in the vacuum pump pipeline along the direction of air flow, wherein , N≥4, the number of single crystal furnaces is M, M≥11.

A further solution is that the first centralized evacuation system includes a first centralized evacuation filter tank and a first centralized evacuation pump that are sequentially arranged in the vacuum pump pipeline along the direction of air flow, and the first centralized evacuation filter tank is connected to multiple units. Between the single crystal furnace and the first centralized vacuum pump, the number of the first centralized vacuum pump and the first centralized vacuum filter tank is one.

A further solution is that the second centralized evacuation system includes sequentially arranged along the direction of air flow. A second centralized vacuum filter tank and a second centralized vacuum pump are provided in the vacuum pump pipeline. The second centralized vacuum filter tank is connected between multiple single crystal furnaces and the second centralized vacuum pump. The second centralized vacuum pump The number of vacuum pumps and second centralized pumping filter tanks is 1.

A further solution is that the main evacuation system, the first centralized evacuation system, the second centralized evacuation system, the first-level main ball valve, the second-level main ball valve, the first centralized evacuation ball valve, and the second centralized evacuation ball valve are respectively controlled by a unified system. The system signal is connected and automatically controlled to turn on or off.

A further solution is that the main filter tank, the first centralized suction filter tank, and the second centralized suction filter tank all include a filter tank main body, and the filter tank main body is connected to multiple single crystal furnaces, wherein, the A filter unit is provided inside the main body of the filter tank for filtering the gas emitted by the single crystal furnace; a discharge port for discharging impurity particles is provided at the lower end of the main body of the filter tank.

A further solution is that the vacuum pump pipeline of the main evacuation system is provided with a vacuum pressure sensor and an automatic release valve. The vacuum pressure sensor is connected to the alarm output circuit of the single crystal furnace. When the pressure signal detected by the vacuum pressure sensor When the set high pressure threshold -95.0Kpa is exceeded, the alarm output circuit of the single crystal furnace issues an alarm and controls the operation of the automatic gas release valve.

A control method for a control system that saves energy and can maintain a vacuum pump without stopping the furnace. The method is applied to the above-mentioned control system that saves energy and can maintain a vacuum pump without stopping the furnace. The method includes: before operating, the main evacuation system and the third The vacuum pump pipelines of the first centralized evacuation system and the second centralized evacuation system are respectively connected to M single crystal furnaces, M≥11; the main evacuation system, the first centralized evacuation system, and the second centralized evacuation system are in working state in a switching manner. When the control system is working, the main vacuum pump of the main evacuation system starts to work, and the air in the single crystal furnace is evacuated through the vacuum pump pipeline. When it is detected that the required vacuum degree is reached, the main vacuum pump stops working, and the single crystal furnace is in a high-temperature negative pressure state. The negative pressure of the single crystal furnace is provided by the main vacuum pump of the N group of main evacuation devices. The first centralized evacuation system and the second centralized evacuation system are in a closed state, N≥4; when the main filter tank or main vacuum pump needs to be cleaned or repaired separately, Close the secondary main ball valve corresponding to the main filter tank or main vacuum pump in the main evacuation system to perform separate cleaning or maintenance; when it is necessary to clean the oxides in the single crystal furnace, close the primary main ball valve of the first vacuum pipeline and The secondary main ball valve of the main evacuation system, since the pressure in the single crystal furnace is at normal pressure after cleaning, the second centralized vacuum pump of the second centralized evacuation system is activated at this time. When the pressure in the single crystal furnace reaches 13Torr, the switch to the main vacuum pump; if one of the single crystal furnaces causes excessive accumulation of oxides and the furnace pressure rises, use the negative pressure of the second centralized vacuum pump to instantly clear the oxides out of the pipeline.

A further plan is to combine the main evacuation system, the first centralized evacuation system, and the second centralized evacuation system. The vacuum pump pipelines of the system are respectively connected to M single crystal furnaces, which specifically include: N groups of main evacuation devices are provided, and the M single crystal furnaces are connected in parallel to the vacuum pump pipelines of the main evacuation system through M first vacuum pipelines. The vacuum pump pipelines connected to M single crystal furnaces are divided into N shunt pipelines. Each shunt pipeline is connected in turn to the secondary main ball valve, main filter tank, and main vacuum pump of each group of main evacuation devices; through M second vacuum pipelines, The M single crystal furnaces are connected in parallel to the vacuum pump pipeline of the first centralized evacuation system, and the M single crystal furnaces are connected in parallel to the vacuum pump pipeline of the second centralized evacuation system through M third vacuum pipelines.

A further solution is to stop the main vacuum pump after reaching the required vacuum degree and detect whether other ball valves are open. If so, close the ball valve of the corresponding pipeline; if not, use the vacuum pressure sensor to detect whether the vacuum pump pipeline is open. Normal pressure; if it is not normal pressure, open the automatic bleed valve and re-test until it reaches normal pressure; then close the automatic bleed valve, the main vacuum pump starts to work, and the corresponding ball valve to work opens, starts to work, and detects Whether the vacuum degree can reach the specified requirements within the specified time, if so, close the corresponding valve, turn off the main vacuum pump, and end it; otherwise, deflate the pressure in the furnace to normal pressure, and return to the step of detecting whether the vacuum pump pipeline is normal pressure. until the specified requirements are met.

Therefore, compared with the prior art, the present invention has the following beneficial effects:

1. The main vacuum pump can be repaired and the oxides in the filter tank can be cleaned without stopping the use of the single crystal furnace, thereby improving production efficiency.

2. The single crystal furnace can be repaired independently without affecting the use of other furnaces in the system, thereby improving production efficiency.

3. The number of main vacuum pumps can be reduced from the original 11 main vacuum pumps to the current 4. The energy consumption is reduced by more than 50%, which can save costs, increase equipment utilization, and improve work efficiency and stability. Stronger, easier to maintain and more stable.

4. The filter element can be cleaned without disassembling the filter device. The filter tank provided by the invention saves a lot of manpower and material resources, improves the utilization efficiency of the single crystal furnace, and facilitates cleaning of the filter element, which has the advantage of significant economic benefits.

5. When the pressure signal detected by the vacuum pressure sensor exceeds the set high pressure threshold, the alarm output circuit of the single crystal furnace issues an alarm; when equipment failure causes abnormal pressure, an alarm can be made in time to prevent production losses caused by abnormal furnace pressure and eliminate furnace pressure. Potential safety hazards caused when the pressure is too high.

The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

Description of the drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the structures shown in these drawings without exerting creative efforts.

Figure 1 is a schematic diagram of an embodiment of a control system of the present invention that saves energy and can maintain a vacuum pump without stopping the furnace.

Figure 2 is a schematic structural diagram of the main filter tank, the first centralized suction filter tank, and the second centralized suction filter tank in the control system embodiment of the invention's energy-saving and non-stop furnace maintenance vacuum pump control system.

The realization of the purpose, functional features and advantages of the present invention will be further described with reference to the embodiments and the accompanying drawings.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present invention.

It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiment of the present invention are only used to explain the relationship between components in a specific posture (as shown in the drawings). Relative positional relationship, movement conditions, etc., if the specific posture changes, the directional indication will also change accordingly.

In addition, descriptions involving "first", "second", etc. in the present invention are for descriptive purposes only and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In addition, the technical solutions in various embodiments can be combined with each other, but it must be based on the realization by those of ordinary skill in the art. When the combination of technical solutions is contradictory or cannot be realized, it should be considered that such combination of technical solutions is not feasible. exists and is not within the protection scope required by the present invention.

An embodiment of a control system that saves energy and can maintain the vacuum pump without stopping the furnace:

Referring to Figure 1, an energy-saving control system that can maintain a vacuum pump without stopping the furnace includes: multiple single crystal furnaces 100, a main evacuation system 10, a first centralized evacuation system 20, and a second centralized evacuation system 30. Each single crystal furnace Each first outlet of 100 is connected to a first vacuum pipeline. Multiple first vacuum pipelines are connected in parallel and connected to the vacuum pump pipeline of the main evacuation system 10. Each first vacuum pipeline is provided with a vacuum pipeline corresponding to each single crystal furnace. 100's first-level main ball valve 51 to control the main evacuation system 10 to extract the gas in the barrel of the single crystal furnace 100 through the vacuum pump pipeline.

In this embodiment, the second outlet of each single crystal furnace 100 is connected to a second vacuum pipeline, and multiple second vacuum pipelines are connected in parallel to communicate with the vacuum pump pipeline of the first centralized evacuation system 20, and each second vacuum pipeline Each vacuum pipeline is provided with a first centralized evacuation ball valve 52 to control the first centralized evacuation system 20 to extract the gas in the barrel of the single crystal furnace 100 through the vacuum pump pipeline.

In this embodiment, the third outlet of each single crystal furnace 100 is connected to a third vacuum pipeline, and multiple third vacuum pipelines are connected in parallel to communicate with the vacuum pump pipeline of the second centralized evacuation system 30, and each third vacuum pipeline A second centralized evacuation ball valve 53 is provided on the vacuum pipeline to control the second centralized evacuation system 30 to extract the gas in the barrel of the single crystal furnace 100 through the vacuum pump pipeline.

In this embodiment, the main evacuation system 10 includes N groups of main evacuation devices. Each group of main evacuation devices includes a secondary main ball valve 11, a main filter tank 12, and a main vacuum pump 13 that are sequentially arranged in the vacuum pump pipeline along the direction of air flow. Among them, N≥4, the number of single crystal furnaces 100 is M, M≥11.

Among them, the first centralized evacuation system 20 includes a first centralized evacuation filter tank 21 and a first centralized evacuation pump 22 that are sequentially arranged in the vacuum pump pipeline along the direction of air flow. The first centralized evacuation filter tank 21 is connected to multiple single crystal furnaces 100 and Between the first centralized vacuum pump 22, the number of the first centralized vacuum pump 22 and the first centralized vacuum filter tank 21 is one.

The second centralized evacuation system 30 includes a second centralized evacuation filter tank 31 and a second centralized evacuation pump 32 that are sequentially arranged in the vacuum pump pipeline along the direction of air flow. The second centralized evacuation filter tank 31 is connected to multiple single crystal furnaces 100 and Between the second centralized vacuum pump 32, the number of the second centralized vacuum pump 32 and the second centralized vacuum filter tank 31 is one.

In this embodiment, the main evacuation system 10, the first centralized evacuation system 20, the second centralized evacuation system 30, the first-level main ball valve 51, the second-level main ball valve 11, the first centralized evacuation ball valve 52, and the second centralized evacuation ball valve 53 They are connected to a unified control system signal and automatically controlled to turn on or off.

Among them, the vacuum pump pipeline of the main evacuation system 10 is provided with a vacuum pressure sensor (not shown) and an automatic gas release valve (not shown), and the vacuum pressure sensor is connected to the alarm output circuit of the single crystal furnace 100. Then, when the pressure signal detected by the vacuum pressure sensor exceeds the set high pressure threshold -95.0Kpa, the alarm output circuit of the single crystal furnace 100 issues an alarm and controls the operation of the automatic gas release valve.

In this embodiment, as shown in Figure 2, the main filter tank 12, the first centralized suction filter tank 21, and the second centralized suction filter tank 31 all include a filter tank body 1, an upper cover 2, an air inlet 3, and an air outlet. 4. Cleaning port 5. The main body of the filter tank 1 is connected to multiple single crystal furnaces 100. The upper cover 2 is set on the top of the main body of the filter tank 1. The cleaning port 5 is set on the upper cover 2. The air inlet 3 and the air outlet 4 They are all arranged on the filter tank body 1. A filter unit is provided inside the filter tank body 1 for filtering the gas emitted by the single crystal furnace 100; a discharge port 6 for discharging impurity particles is provided at the lower end of the filter tank body 1.

Specifically, when the filter tank provided by the present invention is used, the air inlet 3 and the air outlet 4 are opened. The exhaust gas enters from the air inlet 3, is filtered through the filter unit, and is finally discharged from the air outlet 4. It is closed when the filter unit needs to be cleaned. Open the air inlet 3 and air outlet 4, open the cleaning port 5, introduce gas at high speed, and spray the surface of the filter unit in the opposite direction. Open the discharge port 6, and the solid dust leaked from the surface of the filter unit will be naturally discharged from the discharge port 6.

Further, the filter unit includes a filter element 8 and a honeycomb ultrafine fiber paper (not shown) fixed on the filter element 8. The air inlet 3 of the present invention is connected to the exhaust port of the single crystal furnace 100, and the gas containing impurities passes through the filter element. 8 and the honeycomb ultrafine fiber paper are filtered and discharged from the air outlet 4 into the vacuum pump. The honeycomb ultrafine fiber paper is fixed on the filter element 8 and can be opened through the upper cover 2 to facilitate the removal and cleaning of the honeycomb ultrafine fiber paper. It can be seen that the present invention uses honeycomb-shaped ultrafine fiber paper as the filter medium, which can filter finer impurities. At the same time, the honeycomb structure greatly increases the air-passing area and improves the air-passing efficiency. It is of great significance to filter more and smaller impurities, reduce the amount of vacuum pump oil, extend the service life of the vacuum pump, and improve the vacuum degree within 100 degrees of the single crystal furnace.

To sum up, the present invention mainly includes the single crystal furnace 100, the first centralized evacuation ball valve 52, the first centralized evacuation filter tank 21, the first and second centralized vacuum pumps 32, the first-level main ball valve 51, and the second-level main ball valve 11 , the main filter tank 12, the main vacuum pump 13, the second centralized evacuation ball valve 53, the second centralized evacuation filter tank 31, etc., can keep the furnace in a high temperature vacuum state to continue production while maintaining separate maintenance and cleaning at the same time, which can improve the utilization of the vacuum pump efficiency, ensuring better use results, easy maintenance, good filtration effect, and easier cleaning.

An embodiment of a control method for a control system that saves energy and can maintain the vacuum pump without stopping the furnace:

This embodiment provides a control method for a control system that saves energy and can maintain a vacuum pump without stopping the furnace. This method is applied to the above-mentioned control system that saves energy and can maintain a vacuum pump without stopping the furnace. System, the method includes;

Before operation, connect the vacuum pump pipelines of the main evacuation system 10, the first centralized evacuation system 20, and the second centralized evacuation system 30 to M single crystal furnaces 100 respectively, M≥11.

The main evacuation system 10, the first centralized evacuation system 20, and the second centralized evacuation system 30 are in a working state in a switching manner. When the control system is working, the main vacuum pump 13 of the main evacuation system 10 starts to work, and the single crystal furnace is evacuated through the vacuum pump pipeline. 100 air, detecting that when the required vacuum degree is reached, the main vacuum pump 13 stops working, and the single crystal furnace 100 is in a high-temperature negative pressure state. The negative pressure of all single crystal furnaces 100 is provided by the main vacuum pump 13 of the N group of main evacuation devices. The first centralized evacuation system 20 and the second centralized evacuation system 30 are in a closed state, N≥4. It can be seen that when the system is working, the single crystal furnace 100 is in a high-temperature negative pressure state, and the negative pressure of all single crystal furnaces 100 is provided by 4 main vacuum pumps 13 (3 in use and 1 in standby, 3 vacuum pumps, the opening is 80%) Meet the technical requirements of furnace pressure 13Torr), the first and second centralized evacuation ball valves 53 are in a closed state, and the first and second centralized vacuum pumps 32 are in a resting state.

When it is necessary to clean or repair the main filter tank 12 or the main vacuum pump 13 separately, close the secondary main ball valve 11 corresponding to the main filter tank 12 or the main vacuum pump 13 in the main evacuation system 10, and then separate cleaning or maintenance can be performed. It can be seen that when a separate main filter tank 12 needs to be cleaned (>95% of the oxidation on the stove is concentrated in the filter tank), the corresponding secondary main ball valve 11 can be closed, and the corresponding main filter tank 12 or main vacuum pump 13 can also be repaired separately. The rear main vacuum pump 13 and the main filter tank 12 are reserved for backup.

When it is necessary to clean the oxides in the single crystal furnace 100, the first-level main ball valve 51 of the first vacuum pipeline and the second-level main ball valve 11 of the main evacuation system 10 are closed. Since the pressure in the single crystal furnace 100 is normal after cleaning, , at this time, the second centralized vacuum pump 32 of the second centralized evacuation system 30 is enabled. When the pressure in the single crystal furnace 100 reaches 13 Torr, the main vacuum pump 13 is switched. It can be seen that when the oxide in the single crystal furnace 100 needs to be cleaned, the first-level main ball valve 51 and the second-level main ball valve 11 are closed. After cleaning the single crystal furnace 100, it is in a normal pressure (the same atmospheric pressure as the outside world) state. At this time, the second-level main ball valve 51 is turned on. The second centralized evacuation pump switches to the main vacuum pump 13 when the furnace pressure reaches 13Torr.

If the furnace pressure of one of the single crystal furnaces 100 rises due to excessive accumulation of oxides, the negative pressure of the second centralized vacuum pump 32 is used to instantly clean the oxides out of the pipeline.

In this embodiment, the vacuum pump pipelines of the main evacuation system 10, the first centralized evacuation system 20, and the second centralized evacuation system 30 are respectively connected to M single crystal furnaces 100, which specifically includes: N sets of main evacuation devices are provided, The M single crystal furnaces 100 are connected in parallel to the vacuum pump pipelines of the main evacuation system 10 through M first vacuum pipelines, and the vacuum pump pipelines connected to the M single crystal furnaces 100 are divided into N Split pipelines, each split pipeline is connected in turn to the secondary main ball valve 11, main filter tank 12, and main vacuum pump 13 of each group of main evacuation devices; M single crystal furnaces 100 are connected in parallel through M second vacuum pipelines to the third The vacuum pump pipeline of the centralized evacuation system 20 connects the M single crystal furnaces 100 in parallel to the vacuum pump pipeline of the second centralized evacuation system 30 through M third vacuum pipelines.

In this embodiment, after the required vacuum degree is reached, the main vacuum pump 13 stops working and detects whether other ball valves are open. If so, close the ball valve of the corresponding pipeline; if not, use the vacuum pressure sensor to detect whether the vacuum pump pipeline is open. It is normal pressure. If it is not normal pressure, open the automatic bleed valve and recheck until it reaches normal pressure.

Then, close the automatic air release valve, and the main vacuum pump 13 starts to work. The corresponding ball valve that needs to work is opened and starts to work. It is checked whether the vacuum degree can meet the specified requirements within the specified time. If so, the corresponding valve is closed, and the main vacuum pump 13 is closed. , end, otherwise deflate the pressure in the furnace to normal pressure and return to the step of detecting whether the vacuum pump pipeline is normal pressure until the specified requirements are met.

In terms of detection and control, a vacuum pressure sensor and an automatic release valve sensing device are added. The main vacuum pump 13 has just finished working and the pipeline of the main vacuum pump 13 is still under negative pressure. When vacuuming other furnaces again, the main vacuum pump The instantaneous opening of valve 13 will cause the main vacuum pump 13 pipeline to vibrate other furnaces. The advantages of combining these two devices can avoid "melting" accidents caused by evacuation.

Furthermore, in view of the fact that when other furnaces maintain equal diameters, an absolutely stable state is required to prevent "flow" accidents in the full melting zone. The improvement of this method is at the connection of each furnace body of the vacuum pump. "Stainless steel bellows" of appropriate diameter are added to them, and the "soft connection" method is used to mechanically minimize the impact of vibration.

1. Without stopping the use of the single crystal furnace 100, the main vacuum pump 13 can be repaired and the oxides in the filter tank can be cleaned, thereby improving production efficiency.

2. The single crystal furnace 100 can be repaired independently without affecting the use of other furnaces in the system, thus improving production efficiency.

3. The number of main vacuum pumps 13 can be reduced from the original 11 main vacuum pumps 13 to the current 4. The energy consumption is reduced by more than 50%, which can save costs, improve equipment utilization, and improve work efficiency. Strong stability, easy maintenance, and better stability.

4. The filter element 8 can be cleaned without disassembling the filter device. The filter tank provided by the present invention saves a lot of time. It saves manpower and material resources, improves the utilization efficiency of the single crystal furnace 100, and facilitates cleaning of the filter element 8, which has the advantage of significant economic benefits.

5. When the pressure signal detected by the vacuum pressure sensor exceeds the set high pressure threshold, the alarm output circuit of the single crystal furnace 100 sends an alarm; when equipment failure causes abnormal pressure, an alarm can be made in time to prevent production losses caused by abnormal furnace pressure and eliminate Safety hazards caused when the furnace pressure is too high.

The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantive changes and substitutions made by those skilled in the art on the basis of the present invention fall within the scope of the present invention. Scope of protection claimed.

Claims

An energy-saving and non-stop furnace maintenance vacuum pump control system, which is characterized by including:

Multiple single crystal furnaces, a main evacuation system, a first centralized evacuation system, and a second centralized evacuation system. The first outlet of each single crystal furnace is connected to a first vacuum pipeline, and multiple first vacuum pipelines The parallel connection is connected to the vacuum pump pipeline of the main evacuation system, and each first vacuum pipeline is provided with a first-level main ball valve corresponding to each of the single crystal furnaces to control the passage of the main evacuation system. The vacuum pump pipeline extracts the gas in the single crystal furnace barrel;

A second vacuum pipeline is connected to the second outlet of each single crystal furnace, and multiple second vacuum pipelines are connected in parallel to communicate with the vacuum pump pipeline of the first centralized evacuation system, and each of the second vacuum pipelines is connected to the second outlet of the single crystal furnace. Both vacuum pipelines are equipped with a first centralized evacuation ball valve to control the first centralized evacuation system to extract the gas in the single crystal furnace barrel through the vacuum pump pipeline;

Each of the third outlets of the single crystal furnace is connected to a third vacuum pipeline. A plurality of the third vacuum pipelines are connected in parallel and connected to the vacuum pump pipeline of the second centralized evacuation system, and each of the third vacuum pipelines is connected to the third outlet of the single crystal furnace. A second centralized evacuation ball valve is provided on the vacuum pipeline to control the second centralized evacuation system to extract the gas in the single crystal furnace barrel through the vacuum pump pipeline.
The control system according to claim 1, characterized in that:

The main evacuation system includes N groups of main evacuation devices. Each group of the main evacuation devices includes a secondary main ball valve, a main filter tank, and a main vacuum pump that are sequentially arranged in the vacuum pump pipeline along the direction of air flow, where N≥4, The number of single crystal furnaces is M, M≥11.
The control system according to claim 2, characterized in that:

The first centralized evacuation system includes a first centralized evacuation filter tank and a first centralized evacuation pump that are sequentially arranged in the vacuum pump pipeline along the direction of air flow. The first centralized evacuation filter tank is connected to multiple single crystal furnaces and all Between the first centralized vacuum pump, the number of the first centralized vacuum pump and the first centralized vacuum filter tank is one.
The control system according to claim 3, characterized in that:

The second centralized evacuation system includes a second centralized evacuation filter tank and a second centralized evacuation pump that are sequentially arranged in the vacuum pump pipeline along the direction of air flow. The second centralized evacuation filter tank is connected to multiple single crystal furnaces and all the vacuum pumps. Between the second centralized vacuum pump, the number of the second centralized vacuum pump and the second centralized vacuum filter tank is 1.
The control system according to any one of claims 1 to 4, characterized in that:

The main evacuation system, the first centralized evacuation system, the second centralized evacuation system, the first-level main ball valve, the second-level main ball valve, the first centralized evacuation ball valve, and the second centralized evacuation ball valve are respectively connected to a unified control system signal, which is Automatic control on or off.
The control system according to claim 4, characterized in that:

The main filter tank, the first centralized suction filter tank, and the second centralized suction filter tank all include a filter tank main body, and the filter tank main body is connected to multiple single crystal furnaces, wherein the filter tank main body is provided with a A filter unit is used to filter the gas emitted by the single crystal furnace; a discharge port for discharging impurity particles is provided at the lower end of the main body of the filter tank.
The control system according to any one of claims 1 to 4, characterized in that:

The vacuum pump pipeline of the main evacuation system is equipped with a vacuum pressure sensor and an automatic release valve. The vacuum pressure sensor is connected to the alarm output circuit of the single crystal furnace. When the pressure signal detected by the vacuum pressure sensor exceeds the set high pressure threshold -95.0Kpa, the alarm output circuit of the single crystal furnace issues an alarm and controls the operation of the automatic gas release valve.
A control method for a control system that saves energy and can maintain a vacuum pump without stopping the furnace. It is characterized in that the method is applied to control the control system of a vacuum pump that saves energy and can maintain a vacuum pump without stopping the furnace as described in any one of claims 1 to 7. , the method includes:

Before operation, connect the vacuum pump pipelines of the main evacuation system, the first centralized evacuation system, and the second centralized evacuation system to M single crystal furnaces respectively, M ≥ 11;

The main evacuation system, the first centralized evacuation system, and the second centralized evacuation system are in working state in a switching manner. When the control system is working, the main vacuum pump of the main evacuation system starts to work, and the air in the single crystal furnace is evacuated through the vacuum pump pipeline, and the air in the single crystal furnace is detected. When the required vacuum degree is reached, the main vacuum pump stops working, and the single crystal furnace is in a high-temperature negative pressure state. The negative pressure of all single crystal furnaces is provided by the main vacuum pumps of the N group of main evacuation devices, the first centralized evacuation system and the second centralized evacuation system. The system is in a closed state, N≥4;

When it is necessary to clean or repair the main filter tank or main vacuum pump separately, close the secondary main ball valve corresponding to the main filter tank or main vacuum pump in the main evacuation system, and then separate cleaning or maintenance can be carried out;

When it is necessary to clean the oxides in the single crystal furnace, close the first-level main ball valve of the first vacuum pipeline and the second-level main ball valve of the main evacuation system. Since the pressure in the furnace is normal after cleaning the single crystal furnace, the third-level main ball valve is activated at this time. The second centralized vacuum pump of the second centralized evacuation system switches to the main vacuum pump when the pressure in the single crystal furnace reaches 13Torr;

If one of the single crystal furnaces causes excessive accumulation of oxides and the furnace pressure rises, the negative pressure of the second centralized vacuum pump can be used to instantly clear the oxides out of the pipeline.
The method according to claim 8, characterized in that:

Connect the vacuum pump pipelines of the main evacuation system, the first centralized evacuation system, and the second centralized evacuation system to M single crystal furnaces respectively. Specifically, it includes: N groups of main evacuation devices are provided, and M units are connected through M first vacuum pipelines. The single crystal furnaces are connected in parallel to the vacuum pump pipelines connected to the main evacuation system. The vacuum pump pipelines connected to the M single crystal furnaces are divided into N branch pipes. Each branch pipe is connected in turn to the secondary main ball valve of each group of main evacuation devices. Main filter tank, main vacuum pump; M single crystal furnaces are connected in parallel to the vacuum pump pipeline of the first centralized evacuation system through M second vacuum lines, and M single crystal furnaces are connected in parallel to M third vacuum lines. The vacuum pump pipeline of the second centralized evacuation system.
The method according to claim 8, characterized in that:

After reaching the required vacuum degree, the main vacuum pump stops working and detects whether other ball valves are open. If so, close the ball valve of the corresponding pipeline; if not, use the vacuum pressure sensor to detect whether the vacuum pump pipeline is at normal pressure; if not, Pressure, open the automatic bleed valve, and recheck until normal pressure is reached;

Then, close the automatic air release valve, and the main vacuum pump starts to work. The corresponding ball valve that needs to work opens and starts to work. Check whether the vacuum degree can meet the specified requirements within the specified time. If so, close the corresponding valve, close the main vacuum pump, and end , otherwise deflate until the pressure in the furnace reaches normal pressure, and return to the step of detecting whether the vacuum pump pipeline is normal pressure until the specified requirements are met.