CN209243246U - A kind of vacuum system of single-crystal furnace - Google Patents
A kind of vacuum system of single-crystal furnace Download PDFInfo
- Publication number
- CN209243246U CN209243246U CN201822125418.1U CN201822125418U CN209243246U CN 209243246 U CN209243246 U CN 209243246U CN 201822125418 U CN201822125418 U CN 201822125418U CN 209243246 U CN209243246 U CN 209243246U
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- vacuum
- filter screen
- dedusting tank
- cleaner
- vacuum pump
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- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model relates to a kind of vacuum system of single-crystal furnace, it includes the vacuum pipe connecting with single crystal growing furnace, the ball valve being arranged on the vacuum pipe and charge valve, the cleaner connecting with the vacuum pipe and the vacuum pump connecting with the cleaner, the vacuum pipe is connect with the bottom of the cleaner, and the vacuum pump is connect with the top of the cleaner；The cleaner includes dedusting tank and the filter device that is arranged in the dedusting tank, the filter device includes the ash cellar that falls that the solenoid valve at the top of the dedusting tank, the filter screen being lifted in the dedusting tank by spring is arranged in and the dedusting tank lower part is arranged in, and Open Side Down for the filter screen；The vacuum pipe and vacuum pump pass through the following above and that bellows is connected to the filter screen respectively, and the vacuum pipe is connect by bellows with the ash cellar that falls.
Description
Technical field
The utility model relates to monocrystalline silicon preparation field more particularly to a kind of vacuum system of single-crystal furnace.
Background technique
Currently, the pumped vacuum systems of single crystal growing furnace is usually to use oil pump to vacuumize to realize in furnace body, but use oil pump
Often there is the problems such as oil leak, cleaning is hard and causes environmental pollution.The utility model devises a kind of vacuum system of single-crystal furnace,
Traditional oil pump is replaced using vacuum pump, have whole system not oil consumption, without water clock, the features such as to air and zero environmental.
In the vacuum system be also provided with cleaner simultaneously, in vacuum, can effective impurity screening, realize online clear
Ash reduces influence of the impurity to vacuum pump in furnace, extends the stream time of vacuum pump.Meanwhile the system uses pneumatically
Ball valve realizes that the folding between furnace body and vacuum pump, realization directly control furnace pressure with vacuum pump, reduces legacy system
The use of middle butterfly valve, reduces costs.This system also has charge valve, and ball valve is preferentially closed after single crystal growing furnace blowing out, vacuum pump
It turns off, can prevent the impurity suck-back in cleaner from polluting monocrystalline into furnace body in this way, after ball valve is closed, by opening charge valve
When being inflated normal pressure to be achieved to dedusting tank, openable residue-removing opening clears up cleaner impurity.
Utility model content
The technical problem to be solved by the utility model is to provide the good single crystal growing furnace of a kind of cleanliness without any pollution, filter effect is true
Empty set system.
To solve the above problems, technical solution adopted in the utility model is:
A kind of vacuum system of single-crystal furnace, key technology are: it include the vacuum pipe being connect with single crystal growing furnace, setting exist
It ball valve and charge valve on the vacuum pipe, the cleaner being connect with the vacuum pipe and is connect with the cleaner
Vacuum pump, the vacuum pipe connect with the bottom of the cleaner, the top of the vacuum pump and the cleaner
Connection；
The cleaner includes dedusting tank and the filter device that is arranged in the dedusting tank, and the filter device includes
The solenoid valve at the top of the dedusting tank, the filter screen being lifted in the dedusting tank by spring and setting is arranged in remove described
Dirt tank lower part falls ash cellar, and Open Side Down for the filter screen；The vacuum pipe passes through bellows with vacuum pump respectively and connects
In the following above and of the filter screen, the vacuum pipe is connect by bellows with the ash cellar that falls.
The filter screen top is arranged on upper filter screen flange as a further improvement of the utility model, lower part setting
On lower filter screen flange, the upper filter screen flange is connect with the spring.
Maintenance mouth and dust removal port, the maintenance are provided on the dedusting tank as a further improvement of the utility model,
It is mouthful corresponding with the filter screen, the dust removal port with described to fall ash cellar corresponding.
Traveling wheel is additionally provided on the dedusting tank as a further improvement of the utility model,.
The vacuum pump is dry-type spiral vacuum pump as a further improvement of the utility model,.
The ball valve is pneumatic ball valve as a further improvement of the utility model,.
The beneficial effects of adopting the technical scheme are that
Single crystal growing furnace pumped vacuum systems described in the utility model is true take out to furnace body using dry-type spiral vacuum pump
Sky, have not oil consumption, without water clock, the characteristics of to air environment no pollution.Solenoid valve, upper filter screen method are provided on cleaner
Orchid, filter screen, maintenance mouth, lower filter screen flange, dust removal port, falls ash cellar etc. at spring, vacuum system after a period of work, electricity
Magnet valve moment is powered, and upper filter screen flange is picked up, and picks up rear solenoid valve power-off filter screen and falls, realizes vertical tremor, passed through
Strainer vertical tremor shakes off the impurity in filter screen and falls in ash cellar.Cleaner be mounted on the vacuum pipe of single crystal growing furnace with
It between vacuum pump, is attached with bellows, realizes online ash removal, reduce influence of the impurity to vacuum pump in furnace, extended true
The stream time of sky pump.This vacuum system realizes the folding between furnace body and vacuum pump using pneumatic ball valve, realizes direct
Furnace pressure is controlled with vacuum pump, the use of butterfly valve in legacy system is reduced, reduces costs.This system also has inflation
Valve, ball valve is preferentially closed after single crystal growing furnace blowing out, and vacuum pump turns off, and can prevent impurity suck-back in cleaner into furnace in this way
Body pollution monocrystalline can open charge valve and be inflated to dedusting tank after ball valve is closed, and when normal pressure to be achieved, can beat
Dust removal port clears up the impurity in dedusting tank.
Detailed description of the invention
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, it can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the structural schematic diagram of the utility model cleaner.
Wherein: 1 vacuum pipe, 2 ball valves, 3 charge valves, 4 vacuum pumps, 5 dedusting tanks, 6 solenoid valves, 7 springs, 8 filter screens, 9
Fall ash cellar, 10 bellowss, 11 upper filter screen flanges, 12 lower filter screen flanges, 13 maintenance mouths, 14 dust removal ports, 15 traveling wheels.
Specific embodiment
To keep the purpose of this utility model, technical solution and advantage clearer, in the following with reference to the drawings and specific embodiments
Clear, complete description is carried out to utility model.
A kind of vacuum system of single-crystal furnace as shown in Figs. 1-2 comprising the vacuum pipe 1 that connect with single crystal growing furnace, setting exist
Ball valve 2 and charge valve 3 on the vacuum pipe 1, the cleaner being connect with the vacuum pipe 1 and with the cleaner
The vacuum pump 4 of connection, the vacuum pipe 1 are connect with the bottom of the cleaner, the vacuum pump 4 and the cleaner
Top connection.In the utility model, the vacuum pump 4 is dry-type spiral vacuum pump, and the ball valve 2 is pneumatic ball valve.It uses
Dry-type spiral vacuum pump evacuates furnace body, have not oil consumption, without water clock, the characteristics of to air environment no pollution.
Ball valve 2 realizes that the folding between furnace body and vacuum pump 4, realization directly control furnace pressure with vacuum pump 4, reduces
The use of butterfly valve, reduces costs in legacy system.The ball valve 2 after single crystal growing furnace blowing out of charge valve 3 is preferentially closed, and vacuum pump 4 is again
It closes, can prevent the impurity suck-back in cleaner from polluting monocrystalline into furnace body in this way, after ball valve 2 is closed, inflation can be opened
Valve 3 is inflated dedusting tank 5, when normal pressure to be achieved, can beat dust removal port 14 and clear up the impurity in dedusting tank 5.
The cleaner includes dedusting tank 5 and the filter device that is arranged in the dedusting tank 5, the filter device packet
Include filter screen 8 and the setting that the solenoid valve 6 at 5 top of dedusting tank is set, is lifted in the dedusting tank 5 by spring 7
Ash cellar 9 is fallen in 5 lower part of dedusting tank, Open Side Down for the filter screen 8.The vacuum pipe 1 and vacuum pump 4 lead to respectively
The following above and that bellows 10 is connected to the filter screen 8 is crossed, the vacuum pipe 1 falls ash cellar with described by bellows 10
9 connections, vacuum pump 4 attract the trend of monocrystalline furnace gas to be entered by 5 lower part of dedusting tank, then pass through filter screen 8, filtered
Gas is using vacuum pump 4.
In the utility model, 8 top of filter screen is arranged on upper filter screen flange 11, and lower part is arranged in lower filter screen flange
On 12, the upper filter screen flange 11 is connect with the spring 7.Upper lower flange can effectively be kept away while effective fixed filter screen 8
Exempt from the wobble effects filter effect in the whole system course of work of filter screen 8.
Maintenance mouth 13 and dust removal port 14 are provided on the dedusting tank 5, the maintenance mouth 13 is opposite with the filter screen 8
Answer, the dust removal port 14 with described to fall ash cellar 9 corresponding.Maintenance mouth 13 is convenient to conserve filter screen 8,14 convenience of dust removal port
Impurity screening in dedusting tank 5 is cleared up.Furthermore it is additionally provided with traveling wheel 15 on the dedusting tank 5, facilitates dedusting tank 5
Movement.
It is powered, upper filter screen flange 11 can be picked up when 6 moment of solenoid valve, pick up the rear power-off of solenoid valve 6 filter screen 8 and fall,
It realizes its vertical tremor, by 8 vertical tremor of filter screen, the impurity in filter screen 8 is shaken off and is fallen in ash cellar 9.Cleaner
It is mounted between the vacuum pipe 1 of single crystal growing furnace and vacuum pump 4, Lai Shixian online ash removal, shadow of the impurity to vacuum pump 4 in reduction furnace
It rings, extends the stream time of vacuum pump 4.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the utility model, rather than its limitations；
Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that:
It can still modify to technical solution documented by previous embodiment, or be equal to part of technical characteristic
Replacement；And these are modified or replaceed, the utility model embodiment technical solution that it does not separate the essence of the corresponding technical solution
Spirit and scope.
Claims (6)
1. a kind of vacuum system of single-crystal furnace, it is characterised in that: it includes the vacuum pipe (1) connecting with single crystal growing furnace, is arranged in institute
It states ball valve (2) and charge valve (3) on vacuum pipe (1), the cleaner connecting with the vacuum pipe (1) and is removed with described
The vacuum pump (4) of dirt equipment connection, the vacuum pipe (1) connect with the bottom of the cleaner, the vacuum pump (4) and
The top of the cleaner connects；
The cleaner includes the filter device of dedusting tank (5) and setting in the dedusting tank (5), the filter device packet
The filter screen for including the solenoid valve (6) being arranged at the top of the dedusting tank (5), being lifted on by spring (7) in the dedusting tank (5)
(8) and falling ash cellar (9) in the dedusting tank (5) lower part is set, Open Side Down for the filter screen (8)；The vacuum pipe
(1) and vacuum pump (4) passes through the following above and that bellows (10) are connected to the filter screen (8), the vacuum pipe respectively
(1) it is connect by bellows (10) with the ash cellar (9) that falls.
2. a kind of vacuum system of single-crystal furnace according to claim 1, it is characterised in that: filter screen (8) the top setting
On upper filter screen flange (11), lower part is arranged on lower filter screen flange (12), the upper filter screen flange (11) and the spring (7)
Connection.
3. a kind of vacuum system of single-crystal furnace according to claim 1 or 2, it is characterised in that: be arranged on the dedusting tank (5)
Have maintenance mouth (13) and dust removal port (14), the maintenance mouth (13) is corresponding with the filter screen (8), the dust removal port (14) with
It is described that fall ash cellar (9) corresponding.
4. a kind of vacuum system of single-crystal furnace according to claim 3, it is characterised in that: also set up on the dedusting tank (5)
There are traveling wheel (15).
5. a kind of according to claim 1,2 or 4 described in any item vacuum system of single-crystal furnace, it is characterised in that: the vacuum pump
It (4) is dry-type spiral vacuum pump.
6. a kind of according to claim 1,2 or 4 described in any item vacuum system of single-crystal furnace, it is characterised in that: the ball valve (2)
For pneumatic ball valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822125418.1U CN209243246U (en) | 2018-12-18 | 2018-12-18 | A kind of vacuum system of single-crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822125418.1U CN209243246U (en) | 2018-12-18 | 2018-12-18 | A kind of vacuum system of single-crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209243246U true CN209243246U (en) | 2019-08-13 |
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ID=67533403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822125418.1U Active CN209243246U (en) | 2018-12-18 | 2018-12-18 | A kind of vacuum system of single-crystal furnace |
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| Country | Link |
|---|---|
| CN (1) | CN209243246U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111111333A (en) * | 2019-12-26 | 2020-05-08 | 西安奕斯伟硅片技术有限公司 | Single crystal growing furnace dust removal filtration system |
| CN114381796A (en) * | 2022-03-23 | 2022-04-22 | 广东高景太阳能科技有限公司 | Energy-saving control system and method capable of maintaining vacuum pump without stopping furnace |
-
2018
- 2018-12-18 CN CN201822125418.1U patent/CN209243246U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111111333A (en) * | 2019-12-26 | 2020-05-08 | 西安奕斯伟硅片技术有限公司 | Single crystal growing furnace dust removal filtration system |
| CN114381796A (en) * | 2022-03-23 | 2022-04-22 | 广东高景太阳能科技有限公司 | Energy-saving control system and method capable of maintaining vacuum pump without stopping furnace |
| CN114381796B (en) * | 2022-03-23 | 2022-05-31 | 广东高景太阳能科技有限公司 | Energy-saving control system and method capable of maintaining vacuum pump without stopping furnace |
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| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230515 Address after: 214181 Standard Workshop 2, Runzhou Road, Wuxi Huishan Industrial Transformation Cluster District, Wuxi City, Jiangsu Province Patentee after: Jing'ao (Wuxi) Photovoltaic Technology Co.,Ltd. Address before: 055550 Jinglong third industrial park, Jinglong street, Ningjin County, Xingtai City, Hebei Province Patentee before: HEBEI JING-LONG SUN EQUIPMENT Co.,Ltd. |