CN111111333A - Single crystal growing furnace dust removal filtration system - Google Patents
Single crystal growing furnace dust removal filtration system Download PDFInfo
- Publication number
- CN111111333A CN111111333A CN201911367050.2A CN201911367050A CN111111333A CN 111111333 A CN111111333 A CN 111111333A CN 201911367050 A CN201911367050 A CN 201911367050A CN 111111333 A CN111111333 A CN 111111333A
- Authority
- CN
- China
- Prior art keywords
- single crystal
- dust removal
- main body
- crystal furnace
- tank main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/90—Devices for taking out of action one or more units of multi-unit filters, e.g. for regeneration or maintenance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
- B01D46/0008—Two or more filter elements not fluidly connected positioned in the same housing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/48—Removing dust other than cleaning filters, e.g. by using collecting trays
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a single crystal furnace dust removal and filtration system which comprises a dust removal tank main body and a vacuum pump assembly, wherein the dust removal tank main body is communicated with a single crystal furnace, and a filtration unit is arranged in the dust removal tank main body to filter gas discharged by the single crystal furnace; the lower end of the dust removing tank main body is provided with a discharge port for discharging impurity particles; the vacuum pump assembly includes: the vacuum pump is arranged on the vacuum pumping pipeline; the vacuum pumping pipeline is communicated with the dust removal tank body, and the vacuum pump assembly is used for vacuumizing the inner cavity of the dust removal tank body when the single crystal furnace is used for pulling crystal and blowing air to the inner cavity of the dust removal tank body when the single crystal furnace is used for pulling crystal. This dust removal filtration system can discharge impurity particles such as the oxide of deposit in filter unit and jar body bottom effectively, prevents to block up the exhaust duct, improves the dust removal effect.
Description
Technical Field
The invention relates to the technical field of wafer manufacturing, in particular to a dust removal and filtration system of a single crystal furnace.
Background
During the growth of the single crystal, the requirement on vacuum is high, so that each single crystal furnace is provided with an independent vacuum pump for vacuumizing. Referring to fig. 1, fig. 1 is a schematic structural diagram of a conventional dust removal system for a single crystal furnace. The single crystal furnace dust removal system is simple in structure and comprises a dust removal tank main body 1 and a vacuum pump 5 which are communicated with each other, the bottom of the dust removal tank main body 1 is a material gathering area, and in the process of pulling a single crystal by the crystal pulling furnace 2, the vacuum pump 5 continuously extracts gas in the crystal pulling furnace 2 outwards and enables impurities such as the gas to be discharged from a discharge port 6.
However, most of the filtering units 3 in the existing single crystal furnace dust removal system are of a filtering pipe type, so that the permeability is weak, and the filtering area is small; on the other hand, in the initial preparation stage of the crystal pulling furnace 2, because the pressure inside the crystal pulling furnace 2 is lower than the pressure inside the dust removal tank body 1, a gas suck-back phenomenon easily occurs, so that the gas inside the dust removal tank body 1 enters the crystal pulling furnace 2, the influence on the cleanliness in the furnace after suck-back is very serious, especially in the charging and vacuumizing stage, if suck-back exists, polycrystalline silicon material in the crystal pulling furnace 2 cannot be used, and if not found, the single crystal rate and the single crystal quality of a generated crystal bar can be influenced due to excessive impurity content in the crystal pulling process. In addition, because impurity particles such as oxides generated by crystal pulling in the dust removing process can be accumulated at the bottom of the dust removing tank body 1, the impurity particles are difficult to remove after crystal pulling is finished, and the exhaust pipeline can be blocked, so that the dust removing effect is influenced.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a dust removal and filtration system of a single crystal furnace. The technical problem to be solved by the invention is realized by the following technical scheme:
the invention provides a single crystal furnace dust removal and filtration system, which comprises a dust removal tank main body and a vacuum pump assembly, wherein the dust removal tank main body is communicated with a single crystal furnace,
a filtering unit is arranged in the dust removing tank main body to filter gas discharged by the single crystal furnace; the lower end of the dust removing tank main body is provided with a discharge port for discharging impurity particles;
the vacuum pump assembly includes:
the vacuum pump is arranged on the vacuum pumping pipeline;
the vacuum pumping pipeline is communicated with the dust removal tank body, and the vacuum pump assembly is used for vacuumizing the inner cavity of the dust removal tank body when the single crystal furnace is used for pulling crystal and blowing air to the inner cavity of the dust removal tank body when the single crystal furnace is used for pulling crystal.
In one embodiment of the invention, the dust removing tank main body is communicated with the single crystal furnace through a connecting pipeline, and an explosion venting valve is arranged on the connecting pipeline.
In one embodiment of the invention, the filter unit is arranged at the upper part of the inner cavity of the dust removing tank main body, and the opening direction of the connecting part of the connecting pipeline and the dust removing tank main body faces the filter unit.
In one embodiment of the invention, a one-way check valve is further arranged on the connecting pipeline and used for preventing gas in the dust removing tank main body from entering the single crystal furnace.
In one embodiment of the invention, the evacuation line comprises a main line and a first and a second branch line communicating with the main line, wherein the vacuum pump is arranged on the main line.
In one embodiment of the invention, the first branch pipe is connected to the upper end side wall of the dust removing tank main body, and a first valve is arranged on the first branch pipe; the second branch pipe is connected to the side wall of the lower end of the dust removal tank body, and a second valve is arranged on the second branch pipe.
In one embodiment of the invention, the sidewall of the lower end of the dust-removing tank main body is provided with a blowing opening, and the second branch pipe is connected with the blowing opening along the direction tangential to the outer wall of the dust-removing tank main body.
In one embodiment of the invention, the inner cavity of the dust-removing tank main body is provided with a spiral flow guide plate, the spiral flow guide plate is fixed on the inner side wall of the dust-removing tank main body in a spiral winding manner, and the lower end of the spiral flow guide plate is arranged at the lower side of the air blowing opening.
In one embodiment of the present invention, the filter unit includes a plurality of panel type filter screens arranged in parallel in a vertical direction, each of the panel type filter screens being fixed to an inner side wall of the canister body.
In one embodiment of the invention, an exhaust pump is provided at the discharge port.
Compared with the prior art, the invention has the beneficial effects that:
1. the single crystal furnace dust removal and filtration system can vacuumize the dust removal tank body when the single crystal furnace is used for crystal pulling and blow air to the dust removal tank body when the single crystal furnace is used for crystal pulling, so that impurity particles such as oxides deposited at the bottoms of the filtration unit and the dust removal tank body are blown and blown away, the effect of mutual impact and crushing is achieved, the impurities such as the oxides can be conveniently and smoothly discharged, and the good dust removal effect is ensured.
2. According to the single crystal furnace dust removal filtering system, the explosion venting valve is arranged on the connecting pipeline between the dust removal tank main body and the crystal pulling furnace, and can be opened by gas in a reverse pushing manner when the internal pressure of the dust removal tank main body is too high or gas backflow occurs, so that damage to the internal part of the crystal pulling furnace and impurities such as oxides and the like can be prevented from flowing back to the crystal pulling furnace.
3. According to the single crystal furnace dedusting and filtering system, the spiral drainage plate is arranged in the dedusting tank main body, the lower end of the spiral drainage plate is arranged on the lower side of the air blowing opening, impurities such as oxides deposited at the bottom of the dedusting tank main body can be effectively blown away through spirally rising air flow, and the impurities such as the oxides can be conveniently discharged along with the air.
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Drawings
FIG. 1 is a schematic structural diagram of a dedusting system of a single crystal furnace in the prior art;
FIG. 2 is a schematic structural diagram of a single crystal furnace dust removal and filtration system provided by an embodiment of the invention;
FIG. 3 is a schematic cross-sectional view of a canister body showing the construction of a filter unit according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of an installation position of a vacuum line provided by an embodiment of the present invention;
FIG. 5 is a schematic view of an installation of a spiral flow guide plate according to an embodiment of the present invention;
FIG. 6 is a schematic cross-sectional view of a canister body showing the installation location of a second branch pipe according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of another single crystal furnace dedusting and filtering system provided by the embodiment of the invention.
The reference numerals are explained below:
1-a dust removal tank main body; 2-a single crystal furnace; 3-a filtration unit; 31-panel type filter screen; 4-vacuum pumping pipeline; 41-main pipeline; 42-a first branch pipe; 43-a second branch; 5-a vacuum pump; 6-a discharge port; 7-connecting a pipeline; 8-explosion venting valve; 9-one-way check valve; 10-a first valve; 11-a second valve; 12-air blowing port; 13-a helical drainage plate; 14-an exhaust pump; 15-impurity particles.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. The foregoing and other technical matters, features and effects of the present invention will be apparent from the following detailed description of the embodiments, which is to be read in connection with the accompanying drawings. The technical means and effects of the present invention adopted to achieve the predetermined purpose can be more deeply and specifically understood through the description of the specific embodiments, however, the attached drawings are provided for reference and description only and are not used for limiting the technical scheme of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or device that comprises a list of elements does not include only those elements but may include other elements not expressly listed. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of additional like elements in the article or device comprising the element. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships are changed accordingly.
Example one
Referring to fig. 2, fig. 2 is a schematic structural diagram of a single crystal furnace dust removal filtering system according to an embodiment of the present invention. The single crystal furnace dust removal and filtration system comprises a dust removal tank main body 1 and a vacuum pump assembly, wherein the dust removal tank main body 1 is communicated with a single crystal furnace 2, and a filtration unit 3 is arranged in the dust removal tank main body 1; the vacuum pump assembly comprises a vacuum pumping pipeline 4 and a vacuum pump 5 arranged on the vacuum pumping pipeline 4, and the vacuum pumping pipeline 4 is communicated with the dust removal tank main body 1. The vacuum pump assembly is used for vacuumizing the inner cavity of the dust removal tank body 1 when the single crystal furnace 2 is used for pulling crystal so as to remove impurity gas in the single crystal furnace 2, and blowing air into the inner cavity of the dust removal tank body 1 when the single crystal furnace 2 finishes pulling crystal so as to clean the filtering unit 3 and impurity particles 15 such as oxide and the like deposited at the bottom of the dust removal tank body 1. The lower end of the canister body 1 is provided with a discharge port 6, and the discharge port 6 is used for discharging gas containing foreign particles such as oxides.
When the single crystal furnace 2 starts to work, the vacuum pump 5 is started, the vacuum pump 5 carries out vacuum pumping operation on the dust removal tank main body 1, impurity gas in the single crystal furnace 2 enters the dust removal tank main body 1 in a negative pressure state, the impurity particles 15 such as oxides are filtered through the filtering unit 3, and then the gas is discharged from the vacuum pumping pipeline 4; after the single crystal furnace 2 finishes working, the working mode of the vacuum pump 5 is changed, namely the vacuum pump 5 is controlled to blow air to the dust removing tank body 1, so that the impurity particles 15 such as oxides deposited on the filtering unit 3 and at the bottom of the dust removing tank body 1 are blown away by the air flow, and then the impurity particles 15 such as oxides are discharged from the discharge port 6 along with the air.
The dust removing tank main body 1 is communicated with the single crystal furnace 2 through a connecting pipeline 7, and impurity gas generated in the crystal pulling process in the single crystal furnace 2 enters the dust removing tank main body 1 in a negative pressure state. When the internal pressure of the dust removing tank body 1 is excessively high, the impurity gas in the dust removing tank body 1 may flow back to the crystal pulling furnace 2 in a reverse direction, thereby causing damage to the inside of the crystal pulling furnace or affecting the quality of the single crystal. For this reason, in the embodiment, the connecting pipeline 7 is provided with the explosion venting valve 8, and when the pressure inside the dust removing tank main body 1 is too high or backflow occurs, the explosion venting valve 8 can be pushed open by gas in a reverse direction, so that the impurity gas in the dust removing tank main body 1 is prevented from flowing back to the crystal pulling furnace 2 in a reverse direction, and the inside of the crystal pulling furnace is prevented from being damaged or the quality of a single crystal is prevented from being influenced. In addition, a one-way check valve 9 is arranged on the connecting pipeline 7, so that the impurity gas is further prevented from flowing to the single crystal furnace 2 from the dust removing tank body 1. The one-way check valve 9 is a one-way valve, that is, the one-way check valve 9 is opened to allow the gas to pass therethrough only when the gas flows from the single crystal furnace 2 to the dust tank main body 1, and the one-way check valve 9 is closed to prohibit the gas from passing therethrough when the gas flows from the dust tank main body 1 to the single crystal furnace 2. Through the cooperation of the explosion venting valve 8 and the one-way check valve 9, the impurity gas in the dust removal tank main body 1 can be prevented from reversely flowing back to the crystal pulling furnace 2, and the explosion caused by overlarge pressure in the dust removal tank main body 1 can be prevented.
Further, the filtering unit 3 is arranged at the upper part of the inner cavity of the dust removing tank main body 1, and the opening direction of the connecting part of the connecting pipeline 7 and the dust removing tank main body 1 faces the side part of the filtering unit 3, so that the impurity gas flowing from the single crystal furnace 2 to the dust removing tank main body 1 is directly sprayed to the filtering unit 3, the contact area and the contact time with the filtering unit 3 are increased, and the filtering effect is improved. Referring to fig. 3, fig. 3 is a schematic cross-sectional view of a main body of a dust removing tank showing a structure of a filter unit according to an embodiment of the present invention. The filtering units in the existing single crystal furnace dust removal system are mostly of a filter pipe type, the permeability is weak, and the filtering area is small. And the filter unit 3 of the present embodiment includes a plurality of panel type filter screens 31 arranged in parallel in the vertical direction, each of the panel type filter screens 31 being fixed to the inner side wall of the canister body 1. The panel type filter screen 31 has a large filtering area, good dust removal effect and strong gas permeability, and can not cause overlarge pressure inside the vacuum pump assembly, thereby avoiding the power overload of the pump set. In the present embodiment, the panel-type filter screen 31 is made of stainless steel material, and the mesh or aperture thereof can be selected according to actual needs, and is not limited herein.
Further, please refer to fig. 2 and fig. 4 together, and fig. 4 is a schematic diagram of an installation position of a vacuum pumping pipeline according to an embodiment of the present invention. The evacuation line 4 of the present embodiment includes a main line 41, and a first branch line 42 and a second branch line 43 communicating with the main line 41, wherein the vacuum pump 5 is provided on the main line 41. The first branch pipe 42 is connected to the upper end side wall of the dust removing tank main body 1, and a first valve 10 is arranged on the first branch pipe 42; the second branch pipe 43 is connected to the lower end side wall of the canister body 1, and the second valve 11 is provided on the second branch pipe 43. In the present embodiment, it is preferable that the first branch pipe 42 is connected to a side portion of the canister body 1 facing the filter unit 3 in an opening direction, so that the gas introduced from the second branch pipe 43 is directly sprayed to the filter unit 3, and the foreign particles 15 deposited on the filter unit 3 are purged and cleaned, thereby increasing a contact area and a contact time with the filter unit 3 and improving a filtering effect.
Specifically, when the single crystal furnace 2 is operated, the first valve 10 is opened and the second valve 11 is closed, the vacuum pump 5 is started, the vacuum pump 5 performs a vacuum pumping operation on the dust removing tank main body 1, and the impurity gas flowing from the single crystal furnace 2 to the dust removing tank main body 1 is filtered by the filter unit 3 and then discharged from the first branch pipe 42; when the crystal pulling process of the crystal pulling furnace 2 is finished, firstly, the first valve 10 is kept open and the second valve 11 is kept closed, the vacuum pump 5 is used for ventilating the dust removing tank body 1 through the first branch pipe 42, the introduced gas is used for purging impurity particles 15 deposited on the filtering unit 3, and the impurity particles 15 are purged to the bottom of the dust removing tank body 1 from the filtering unit 3; after the estimated filter unit 3 is purged, the first valve 10 is closed and the second valve 11 is opened, and the vacuum pump 5 blows air from the second branch pipe 43 toward the canister body 1, so that impurities such as oxides deposited on the bottom of the canister body 1 are blown off by the air flow and then discharged together with the air through the discharge port 6.
Further, please refer to fig. 5 and fig. 6, fig. 5 is a schematic view illustrating an installation of a spiral flow-guiding plate according to an embodiment of the present invention; FIG. 6 is a schematic cross-sectional view of a canister body showing the installation position of a second branch pipe according to an embodiment of the present invention. As shown in the figure, the sidewall of the lower end of the dust-removing tank body 1 is provided with an air blowing opening 12, and the second branch pipe 43 is connected with the air blowing opening 12 along the tangential direction of the outer wall of the dust-removing tank body 1. Further, a spiral drainage plate 13 is arranged in the dust removing tank body 1, the spiral drainage plate 13 is fixed on the inner side wall of the dust removing tank body 1 in a spiral winding mode, and the lower end of the spiral drainage plate 13 is arranged on the lower side of the air blowing opening 12. The spiral flow guide plate 13 is used to form a spirally rising air flow in the inner cavity of the canister body 1 when the vacuum pump 5 blows air from the second branch pipe 43 into the canister body 1.
Specifically, when the vacuum pump 5 blows air from the second branch pipe 43 to the dust removing tank body 1, since the second branch pipe 43 is connected to the air blowing port 12 along the tangential direction of the outer wall of the dust removing tank body 1, and the spiral flow guide plate 13 is arranged in the inner cavity of the dust removing tank body 1, the air entering the air blowing port 12 spirally rises along the spiral flow guide plate 13 fixed on the inner side wall of the dust removing tank body 1 in a spirally winding manner, so that the impurity particles 15 such as oxides deposited at the bottom of the dust removing tank body 1 can be effectively blown away by the spirally rising air flow and then discharged together with the air through the discharge port 6. Further, an exhaust pump 14 is provided at the exhaust port 6 for accelerating the discharge of the impurity particles 15 accompanying the gas.
In this embodiment, the width of the spiral drainage plate 13 is 5-6 cm.
Specifically, the operation process of the single crystal furnace dust removal and filtration system of the embodiment is as follows:
when the single crystal furnace 2 starts to work, the vacuum pump 5 is started, the first valve 10 is opened and the second valve 11 is closed, the vacuum pump 5 performs vacuum pumping operation on the dust removing tank main body 1, impurity gas in the single crystal furnace 2 enters the dust removing tank main body 1 in a negative pressure state, the impurity particles 15 such as oxides in the impurity gas are filtered through the filtering unit 3, and then the rest gas is discharged from the first branch pipe 42; after the single crystal furnace 2 finishes working, firstly, the first valve 10 is kept open and the second valve 11 is kept closed, the vacuum pump 5 ventilates the dust removing tank main body 1 through the first branch pipe 42, the introduced gas purges the impurity particles 15 deposited on the filter unit 3, the impurity particles 15 are purged to the bottom of the dust removing tank main body 1 from the filter unit 3, after the filter unit 3 is purged, the first valve 10 is closed and the second valve 11 is opened, the vacuum pump 5 ventilates the dust removing tank main body 1 from the second branch pipe 43 and the air blowing port 12, at the moment, the gas entering the air blowing port 12 spirally rises along the spiral flow guide plate 13 fixed on the inner side wall of the dust removing tank main body 1, the impurity particles 15 such as oxides deposited at the bottom of the dust removing tank main body 1 can be effectively blown away through the spirally rising air flow, and then are discharged together with the air flow through the discharge port 6. During this process, the exhaust pump 14 is turned on to accelerate the discharge of the impurity particles 15 accompanying the gas flow. In addition, due to the arrangement of the explosion relief valve 8 and the one-way check valve 9, in the inflation process of the vacuum pump 5, the impurity gas in the dust removing tank body 1 can be prevented from reversely flowing back to the crystal pulling furnace 2, and the explosion caused by the overlarge pressure in the dust removing tank body 1 can also be prevented.
In conclusion, the single crystal furnace dust removal and filtration system can vacuumize the dust removal tank body when the single crystal furnace operates for crystal pulling and blow air to the dust removal tank body when the single crystal furnace finishes crystal pulling so as to sweep impurity particles such as oxides deposited at the bottoms of the filtration unit and the dust removal tank body, and the impurity particles such as the oxides can be conveniently and smoothly discharged, so that a good dust removal effect is ensured; an explosion relief valve and a one-way check valve are arranged on a connecting pipeline between the dust removal tank body and the crystal pulling furnace, so that impurity particles such as oxides and the like are prevented from flowing back to the crystal pulling furnace to influence the crystal pulling effect; in addition, be provided with the heliciform drainage plate in the inner chamber of dust catcher main part, and the lower extreme setting of heliciform drainage plate is in the downside of blowing the mouth, can blow away the sedimentary impurity particles such as oxide in dust catcher main part bottom through the air current that spiral shell screwing in rose effectively, is convenient for make impurity particles such as oxide discharge together with gaseous.
Example two
On the basis of the above embodiment, the present embodiment provides another single crystal furnace dust removal filter system. Referring to fig. 7, fig. 7 is a schematic structural diagram of another single crystal furnace dust removal filter system according to an embodiment of the invention. The single crystal furnace dust removal and filtration system of this embodiment includes vacuum pump subassembly and two parallelly connected dust removal tank main parts 1, and wherein, every dust removal tank main part 1 and the single crystal furnace intercommunication of difference, the inside of every dust removal tank main part 1 is provided with the filter unit, and every dust removal tank main part 1 is used for removing dust and filtering solitary single crystal furnace. The vacuum pump assembly of the present embodiment includes an evacuation line 4 and a vacuum pump 5 disposed on the evacuation line 4, and the evacuation line 4 communicates with both the canister bodies 1 at the same time. Similarly, the vacuum pump assembly of the present embodiment is used for evacuating the inner cavity of the dust-removing tank body 1 when the single crystal furnace is pulling and blowing air into the inner cavity of the dust-removing tank body 1 when the single crystal furnace is finishing pulling, unlike the embodiment in which the vacuum pump assembly of the present embodiment simultaneously controls two dust-removing tank bodies 1 to simultaneously remove dust and filter the two single crystal furnaces. Further, the lower end of each canister body 1 is provided with a discharge port 6, and in the present embodiment, the discharge ports 6 of the two canister bodies 1 are connected together by a pipe to form one outlet, so that the gas discharged from the two canister bodies 1 is finally discharged from the one outlet.
In this embodiment, the two parallel-connected dust-removing tank bodies 1 are subjected to air pumping and discharging operation by the same vacuum pump 5, and specifically, the air pumping process and the air charging process are the same as those described in the first embodiment, and are not described again here. The two dust removal tank bodies 1 connected in parallel are subjected to gas pumping and discharging operation by the same vacuum pump 5, so that the two dust removal tank bodies 1 can simultaneously perform dust removal operation, and the work efficiency is improved.
It should be noted that, in other embodiments, the single crystal furnace dust removal filter system may further include other numbers of dust removal tank bodies according to actual needs, and will not be described in detail herein.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (10)
1. The single crystal furnace dedusting and filtering system is characterized by comprising a dedusting tank main body (1) and a vacuum pump assembly, wherein the dedusting tank main body (1) is communicated with a single crystal furnace (2),
a filtering unit (3) is arranged in the dust removing tank main body (1) to filter gas discharged by the single crystal furnace (2); the lower end of the dust removing tank main body (1) is provided with a discharge port (6) for discharging impurity particles (15);
the vacuum pump assembly includes:
the vacuum pump comprises a vacuum pumping pipeline (4) and a vacuum pump (5) arranged on the vacuum pumping pipeline (4);
the vacuum pumping pipeline (4) is communicated with the dust removal tank body (1), and the vacuum pump assembly is used for vacuumizing the inner cavity of the dust removal tank body (1) when the single crystal furnace (2) is used for pulling crystals and blowing air to the inner cavity of the dust removal tank body (1) when the single crystal furnace (2) finishes pulling the crystals.
2. The single crystal furnace dedusting and filtering system according to claim 1, wherein the dedusting tank main body (1) is communicated with the single crystal furnace (2) through a connecting pipeline (7), and an explosion venting valve (8) is arranged on the connecting pipeline (7).
3. The single crystal furnace dedusting and filtering system according to claim 2, wherein the filtering unit (3) is arranged at the upper part of the inner cavity of the dedusting tank main body (1), and the opening direction of the connecting pipeline (7) and the dedusting tank main body (1) is towards the filtering unit (3).
4. The single crystal furnace dedusting and filtering system according to claim 2, wherein a one-way check valve (9) is further arranged on the connecting pipeline (7) and is used for preventing gas in the dedusting tank main body (1) from entering the single crystal furnace (2).
5. The single crystal furnace dust removal and filtration system according to claim 1, wherein the vacuum line (4) comprises a main line (41) and a first branch line (42) and a second branch line (43) which are communicated with the main line (41), wherein the vacuum pump (5) is arranged on the main line (41).
6. The single crystal furnace dust removal and filtration system according to claim 5, wherein the first branch pipe (42) is connected to the upper end side wall of the dust removal tank main body (1), and a first valve (10) is arranged on the first branch pipe (42); the second branch pipe (43) is connected to the side wall of the lower end of the dedusting tank main body (1), and a second valve (11) is arranged on the second branch pipe (43).
7. The single crystal furnace dedusting and filtering system according to claim 6, wherein a gas blowing opening (12) is formed in the side wall of the lower end of the dedusting tank main body (1), and the second branch pipe (43) is connected with the gas blowing opening (12) along the direction tangential to the outer wall of the dedusting tank main body (1).
8. The single crystal furnace dedusting and filtering system according to claim 7, wherein the inner cavity of the dedusting tank main body (1) is provided with a spiral flow guide plate (13), the spiral flow guide plate (13) is fixed on the inner side wall of the dedusting tank main body (1) in a spiral winding manner, and the lower end of the spiral flow guide plate (13) is arranged at the lower side of the air blowing port (12).
9. The single crystal furnace dust removal and filtration system according to claim 1, wherein the filtration unit (3) comprises a plurality of panel type filtration screens (31) arranged vertically in parallel, and the panel type filtration screens (31) are all fixed to the inner side wall of the dust removal tank main body (1).
10. The single crystal furnace dust removal and filtration system according to any one of claims 1 to 9, wherein an exhaust pump (14) is provided at the discharge port (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911367050.2A CN111111333A (en) | 2019-12-26 | 2019-12-26 | Single crystal growing furnace dust removal filtration system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911367050.2A CN111111333A (en) | 2019-12-26 | 2019-12-26 | Single crystal growing furnace dust removal filtration system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111111333A true CN111111333A (en) | 2020-05-08 |
Family
ID=70503169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911367050.2A Pending CN111111333A (en) | 2019-12-26 | 2019-12-26 | Single crystal growing furnace dust removal filtration system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111111333A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112619306A (en) * | 2020-12-18 | 2021-04-09 | 徐州晶睿半导体装备科技有限公司 | Dust removal and filtration system of single crystal furnace, control method of dust removal and filtration system and single crystal furnace assembly |
| CN112682175A (en) * | 2020-12-22 | 2021-04-20 | 中国船舶重工集团公司第七0三研究所 | Air inlet filtering system and filtering method for irreversible dust-removing gas turbine |
| CN114457408A (en) * | 2020-12-08 | 2022-05-10 | 江苏神汇新材料科技有限公司 | Preparation method of gettering tank for cleaning impurity bottom materials in single crystal furnace |
| WO2023279523A1 (en) * | 2021-07-09 | 2023-01-12 | 长鑫存储技术有限公司 | Vacuum system, low-pressure vacuum process apparatus, and stop member |
| WO2023179648A1 (en) * | 2022-03-23 | 2023-09-28 | 高景太阳能股份有限公司 | Control system and method for energy-saving and continuous maintenance of vacuum pump |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202156774U (en) * | 2011-07-14 | 2012-03-07 | 北京艾福莱机电设备有限公司 | Vacuum powder conveying equipment |
| CN209243246U (en) * | 2018-12-18 | 2019-08-13 | 河北晶龙阳光设备有限公司 | A kind of vacuum system of single-crystal furnace |
-
2019
- 2019-12-26 CN CN201911367050.2A patent/CN111111333A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202156774U (en) * | 2011-07-14 | 2012-03-07 | 北京艾福莱机电设备有限公司 | Vacuum powder conveying equipment |
| CN209243246U (en) * | 2018-12-18 | 2019-08-13 | 河北晶龙阳光设备有限公司 | A kind of vacuum system of single-crystal furnace |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114457408A (en) * | 2020-12-08 | 2022-05-10 | 江苏神汇新材料科技有限公司 | Preparation method of gettering tank for cleaning impurity bottom materials in single crystal furnace |
| CN112619306A (en) * | 2020-12-18 | 2021-04-09 | 徐州晶睿半导体装备科技有限公司 | Dust removal and filtration system of single crystal furnace, control method of dust removal and filtration system and single crystal furnace assembly |
| CN112682175A (en) * | 2020-12-22 | 2021-04-20 | 中国船舶重工集团公司第七0三研究所 | Air inlet filtering system and filtering method for irreversible dust-removing gas turbine |
| WO2023279523A1 (en) * | 2021-07-09 | 2023-01-12 | 长鑫存储技术有限公司 | Vacuum system, low-pressure vacuum process apparatus, and stop member |
| WO2023179648A1 (en) * | 2022-03-23 | 2023-09-28 | 高景太阳能股份有限公司 | Control system and method for energy-saving and continuous maintenance of vacuum pump |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111111333A (en) | Single crystal growing furnace dust removal filtration system | |
| CN112619306A (en) | Dust removal and filtration system of single crystal furnace, control method of dust removal and filtration system and single crystal furnace assembly | |
| CN112774336B (en) | Dust remover of crusher | |
| CN201263934Y (en) | Pulse adverse current bag-type dust remover | |
| CN110282437A (en) | Material absorbing structure and urea machine with it | |
| CN216572239U (en) | Dust filtration equipment for marble processing | |
| CN214319600U (en) | Filtering component and vacuum device | |
| CN210699218U (en) | Cement jar exhaust dust pelletizing system | |
| CN214120819U (en) | Tail gas tar condenser for sintering furnace | |
| CN211159107U (en) | Environment-friendly dust removing equipment for mechanical automatic processing workshop | |
| CN208429618U (en) | Two-stage separating and filtering and pulse backblowing cloth bag clean bulk cargo recovery operation station | |
| CN214715124U (en) | Ash conveying filter device | |
| CN213818544U (en) | Improved electrical control cabinet | |
| CN217511484U (en) | Impurity and dust removal device and wind-powered coal preparation equipment | |
| CN110787550A (en) | Bag type dust collector capable of simultaneously removing dust and ash | |
| CN219971271U (en) | Pneumatic suction tank dust collector | |
| CN210448413U (en) | Pulse type bag dust collector | |
| CN218345504U (en) | Vacuum quenching device convenient for slag removal | |
| CN219399495U (en) | Dust removing box | |
| CN213348237U (en) | Dry and wet dust remover | |
| CN216004449U (en) | Pneumatic feeding device for powder bin | |
| CN219984130U (en) | Self-cleaning filter for tank truck | |
| CN217646070U (en) | Special dust collecting equipment in oil field | |
| CN215804878U (en) | Air filter and engineering vehicle | |
| CN211637227U (en) | Fresh alumina feeding and impurity removing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20211008 Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant after: Xi'an yisiwei Material Technology Co.,Ltd. Applicant after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: Room 1323, block a, city gate, No.1 Jinye Road, high tech Zone, Xi'an, Shaanxi 710065 Applicant before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200508 |
|
| RJ01 | Rejection of invention patent application after publication |