CN220802475U - Impurity removal system for compressed air pipeline of clean room - Google Patents
Impurity removal system for compressed air pipeline of clean room Download PDFInfo
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- CN220802475U CN220802475U CN202322491825.5U CN202322491825U CN220802475U CN 220802475 U CN220802475 U CN 220802475U CN 202322491825 U CN202322491825 U CN 202322491825U CN 220802475 U CN220802475 U CN 220802475U
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- 239000012535 impurity Substances 0.000 title claims abstract description 47
- 238000009423 ventilation Methods 0.000 claims abstract description 19
- 239000000428 dust Substances 0.000 claims abstract description 16
- 238000001514 detection method Methods 0.000 claims description 65
- 230000006835 compression Effects 0.000 claims description 5
- 238000007906 compression Methods 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 10
- 238000001914 filtration Methods 0.000 description 11
- 230000003749 cleanliness Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model provides a system for removing impurities of a compressed air pipeline in a clean room, which belongs to the technical field of air pipeline impurity removal and comprises a main pipeline, a bypass pipeline and a differential pressure detector; the main body pipeline is sequentially provided with a plurality of first filters, and the dust removal precision of the first filters is sequentially improved along the ventilation direction of the main body pipeline; the bypass pipeline is connected with the main pipeline in parallel; the air inlet end of the bypass pipeline is communicated with the air inlet end of the main pipeline, and the air outlet end of the bypass pipeline is communicated with the air outlet end of the main pipeline; the bypass pipeline is sequentially provided with a plurality of second filters, and the dust removal precision of the second filters is sequentially improved along the ventilation direction of the bypass pipeline; the two ends of the differential pressure detector are respectively connected with the air inlet end of the main pipeline and the air outlet end of the main pipeline. The impurity removal system for the compressed air pipeline of the clean room has good impurity removal effect, can effectively prolong the service life of process equipment and ensures the impurity removal efficiency.
Description
Technical Field
The utility model belongs to the technical field of air pipeline impurity removal, and particularly relates to an impurity removal system for a compressed air pipeline of a clean room.
Background
The process equipment in the clean room has higher requirements on the oil content and the dust content of the compressed air, and when the air compressor is used for supplying the compressed air into the clean room, the conventional treatment of the compressed air only through the air compression station cannot always meet the use requirements of the process equipment in the clean room, so that the compressed air needs to be subjected to secondary treatment in the clean room to ensure the quality of the compressed air at the tail end of the process equipment.
In the prior art, a set of precise filter is usually arranged on a pipeline for introducing compressed air into a clean room so as to achieve a dust removal effect; but cannot detect the quality of the gas after impurity removal, and is easy to cause the blockage of a precision filter, thereby influencing the service life of process equipment and reducing the yield of process production.
Disclosure of utility model
The utility model aims to provide a impurity removal system for a compressed air pipeline of a clean room, and aims to solve the technical problems that the existing dust removal system cannot detect the quality of gas after impurity removal, the service life of process equipment is easy to influence and the impurity removal capability is poor.
In order to achieve the above purpose, the utility model adopts the following technical scheme: there is provided a system for removing impurities for a compressed air pipeline of a clean room, comprising:
The main body pipeline is provided with an air inlet end which is communicated with an air outlet end of the air compression station, and the air outlet end is used for being introduced into a clean room; the main pipeline is sequentially provided with a plurality of first filters, and the dust removal precision of the first filters is sequentially improved along the ventilation direction of the main pipeline;
The bypass pipeline is connected with the main pipeline in parallel; the air inlet end of the bypass pipeline is communicated with the air inlet end of the main pipeline, and the air outlet end of the bypass pipeline is communicated with the air outlet end of the main pipeline; the bypass pipeline is sequentially provided with a plurality of second filters, and the dust removal precision of the second filters is sequentially improved along the ventilation direction of the bypass pipeline; and
And two ends of the differential pressure detector are respectively connected with the air inlet end of the main body pipeline and the air outlet end of the main body pipeline.
In one possible implementation, the plurality of first filters disposed along the ventilation direction of the main body duct includes a first coarse filter and a first fine filter;
The plurality of second filters disposed along the ventilation direction of the bypass duct includes a second coarse filter and a second fine filter.
In some embodiments, a first oil removal filter is disposed between the first coarse filter and the first fine filter; a second oil removal filter is arranged between the second coarse filter and the second precise filter.
The air inlet end and the air outlet end of the main pipeline are respectively provided with a first control valve, and the air inlet end and the air outlet end of the bypass pipeline are respectively provided with a second control valve.
In one possible implementation manner, the air outlet end of each stage of the first filter is provided with a first detection pipeline, and each first detection pipeline is provided with a first detection port.
In some embodiments, the air outlet end of each first detection pipeline is further provided with a first air return pipeline, and the air outlet end of the first air return pipeline is communicated with the air inlet end of the main pipeline or the air inlet end of the first filter of the previous stage; when the detection result of the first detection port is higher than a preset value, the first air return pipeline is used for returning the air in the first detection pipeline to the first filter at the previous stage.
The air outlet end of each first detection pipeline is provided with a third control valve, and each first air return pipeline is provided with a fourth control valve.
In one possible implementation manner, the air outlet end of the bypass pipeline is provided with a second detection pipeline, and a second detection port is arranged on the second detection pipeline.
In some embodiments, the air outlet end of the second detection pipeline is further provided with a second air return pipeline, and the air outlet end of the second air return pipeline is communicated with the air inlet end of the bypass pipeline; and when the detection result of the second detection port is higher than a preset value, the second air return pipeline is used for returning the air in the second detection pipeline to the air inlet end of the bypass pipeline.
The second detection pipeline is provided with a second control valve, and the second return pipeline is provided with a third control valve.
Compared with the prior art, the scheme disclosed by the embodiment of the application has the advantages that ventilation can be performed through the main pipeline, and the gas in the main pipeline is filtered step by arranging the multi-stage first filter, so that the cleanliness of the compressed gas in the main pipeline is improved step by step, the impurity removal effect is improved, and the influence of excessive impurity removal of the first filter on the service life of the first filter is avoided; when parts on the main pipeline need to be replaced, short-time filtration and ventilation can be performed through the bypass pipeline so as to ensure impurity removal efficiency; the differential pressure between the air inlet end and the air outlet end of the main pipeline can be monitored in real time by the differential pressure detector, so that the impurity removal effect is ensured.
The impurity removing system for the compressed air pipeline of the clean room has good impurity removing effect, can effectively prolong the service life of process equipment and ensures the impurity removing efficiency.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments or the description of the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a system for removing impurities in a compressed air pipeline of a clean room according to an embodiment of the present utility model.
In the figure:
1. A main body pipe; 11. a first coarse filter; 12. a first precision filter; 13. a first oil removal filter; 14. a first control valve;
2. a bypass pipe; 21. a second coarse filter; 22. a second precision filter; 23. a second oil removal filter; 24. a second control valve;
3. A differential pressure detector;
4. A first detection conduit; 41. a third control valve; 42. a first detection port;
5. a first return air duct; 51. a fourth control valve;
6. a second detection conduit; 61. a fifth control valve; 62. a second detection port;
7. a second return air duct; 71. and a sixth control valve.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
It will be understood that when an element is referred to as being "disposed on" another element, it can be directly on the other element or be indirectly on the other element. It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a number" is two or more, unless explicitly defined otherwise.
Referring to fig. 1, a description will now be made of a system for removing impurities for a compressed air pipe of a clean room according to the present utility model. The impurity removal system for the compressed air pipeline of the clean room comprises a main pipeline 1, a bypass pipeline 2 and a differential pressure detector 3; the air inlet end of the main pipeline 1 is communicated with the air outlet end of the air compression station, and the air outlet end is used for being introduced into a clean room; the main body pipeline 1 is sequentially provided with a plurality of first filters, and the dust removal precision of the first filters is sequentially improved along the ventilation direction of the main body pipeline 1; the bypass pipeline 2 is arranged in parallel with the main pipeline 1; the air inlet end of the bypass pipeline 2 is communicated with the air inlet end of the main pipeline 1, and the air outlet end is communicated with the air outlet end of the main pipeline 1; the bypass pipeline 2 is sequentially provided with a plurality of second filters, and the dust removal precision of the second filters is sequentially improved along the ventilation direction of the bypass pipeline 2; the two ends of the differential pressure detector 3 are respectively connected with the air inlet end of the main pipeline 1 and the air outlet end of the main pipeline 1.
In the normal ventilation process, the main pipeline 1 is used for filtering the gas of the air compression station through the first filter and then conveying the filtered gas into the clean room; when the parts on the main pipeline 1 need to be replaced, compressed gas can be conveyed to the clean room through the bypass pipeline 2 and the second filter, so that ventilation is ensured.
It should be understood that in the prior art, a group of filters with higher filtering precision are adopted for direct filtration, so that the high-precision filter is easy to be blocked after a certain time of filtration; however, according to the application, impurities are subjected to multistage filter classification filtration, impurities with larger sizes are removed firstly, and impurities with smaller sizes are removed through a filter with higher precision, so that blockage is not easy to occur, and ventilation efficiency and impurity removal effect can be ensured.
Compared with the prior art, the impurity removal system for the compressed air pipeline of the clean room can ventilate through the main pipeline 1, and the gas in the main pipeline 1 is filtered step by step through arranging the multi-stage first filter, so that the cleanliness of the compressed gas in the main pipeline 1 is improved step by step, the impurity removal effect is improved, and the influence of excessive impurity removal of the first filter on the service life of the first filter is avoided; when parts on the main pipeline 1 need to be replaced, the bypass pipeline 2 can be used for filtering and ventilating for a short time so as to ensure impurity removal efficiency; the differential pressure between the air inlet end and the air outlet end of the main pipeline 1 can be monitored in real time by arranging the differential pressure detector 3, so that the impurity removal effect is ensured; the impurity removal system for the compressed air pipeline of the clean room has good impurity removal effect, can effectively prolong the service life of process equipment and ensures the impurity removal efficiency.
Referring to fig. 1, in some possible embodiments, the plurality of first filters disposed along the ventilation direction of the main body duct 1 includes a first coarse filter 11 and a first fine filter 12; the plurality of second filters provided along the ventilation direction of the bypass duct 2 includes a second coarse filter 21 and a second fine filter 22.
Specifically, the first coarse filter 11 and the second coarse filter 21 are used for removing dust impurities of a larger size, and the first fine filter 12 and the second fine filter 22 are used for removing dust impurities of a smaller size; thereby realizing hierarchical filtering.
Preferably, the dust removal accuracy of the first coarse filter 11 and the second coarse filter 21 is 0.1 μm, and the dust removal accuracy of the first fine filter 12 and the second fine filter 22 is 0.03 μm.
Referring to fig. 1, in some embodiments, a first oil removal filter 13 is disposed between the first coarse filter 11 and the first fine filter 12; a second oil removal filter 23 is provided between the second coarse filter 21 and the second fine filter 22.
By providing the first oil removal filter 13 and the second oil removal filter 23, oil contamination and impurities of the gas in the main pipeline 1 and the bypass pipeline 2 are removed respectively, and the impurity removal effect is improved.
Preferably, the oil removal accuracy of the first oil removal filter 13 and the second oil removal filter 23 is 0.003mg/m 3.
Referring to fig. 1, an exemplary embodiment of the present invention includes a main pipe 1 having a first control valve 14 at an inlet end and an outlet end, and a bypass pipe 2 having a second control valve 24 at an inlet end and an outlet end.
The first control valve 14 and the second control valve 24 are arranged to control the on-off of the gas on the main pipeline 1 and the bypass pipeline 2 respectively, so that the switching of the gas channel between the main pipeline 1 and the bypass pipeline 2 is conveniently realized.
Referring to fig. 1, in some possible embodiments, the air outlet end of each stage of the first filter is provided with a first detection pipe 4, and each first detection pipe 4 is provided with a first detection port 42.
By providing the first detecting pipe 4 so as to output the gas filtered by the first filter of each stage from the first detecting port 42, the filtering effect is detected, and the impurity removing effect is ensured.
Referring to fig. 1, in some embodiments, the air outlet end of each first detection pipeline 4 is further provided with a first air return pipeline 5, and the air outlet end of the first air return pipeline 5 is communicated with the air inlet end of the main pipeline 1 or the air inlet end of the first filter of the previous stage; when the detection result of the first detection port 42 is higher than the preset value, the first air return pipe 5 is used for returning the air in the first detection pipe 4 to the first filter at the previous stage.
By providing the first air return duct 5 so that the gas is filtered again when the detection result of the first detection port 42 is failed, the impurity removal effect is ensured, and the first filter of the subsequent stage is protected from being blocked by impurities of a larger size.
The first detection pipeline 4 is also arranged at the air outlet end of the first oil outlet filter, and the first detection pipeline 4 is also provided with a detection port; further, the air outlet end of the first detection pipeline 4 is also provided with an air return pipeline, and the air outlet end of the air return pipeline is communicated with the air inlet end of the first filter at the previous stage; when the detection result of the detection port is higher than a preset value, the air return pipeline is used for returning the air in the detection pipeline to the first filter at the previous stage so as to perform secondary filtration.
Referring to fig. 1, for example, the air outlet end of each first detecting pipe 4 is provided with a third control valve 41, and each first air return pipe 5 is provided with a fourth control valve 51.
The third control valve 41 and the fourth control valve 51 are arranged to control the on-off of the gas on the first detection pipeline 4 and the first air return pipeline 5 respectively.
Referring to fig. 1, in some possible embodiments, the outlet end of the bypass pipe 2 is provided with a second detection pipe 6, and the second detection pipe 6 is provided with a second detection port 62.
By providing the second detection pipe 6 so as to output the gas filtered by the second filter from the second detection port 62, the filtering effect is detected, and the impurity removal effect is ensured.
Referring to fig. 1, in some embodiments, the air outlet end of the second detection pipeline 6 is further provided with a second air return pipeline 7, and the air outlet end of the second air return pipeline 7 is communicated with the air inlet end of the bypass pipeline 2; when the detection result of the second detection port 62 is higher than the preset value, the second air return pipe 7 is used for returning the air in the second detection pipe 6 to the air inlet end of the bypass pipe 2.
By providing the second air return duct 7 so that the gas is filtered again when the detection result of the second detection port 62 is failed, the impurity removal effect is ensured, and the second filter of the subsequent stage is protected from being blocked by impurities of a larger size.
Referring to fig. 1, an exemplary embodiment of the present invention includes a fifth control valve 61 at the air outlet end of the second detection pipe 6, and a sixth control valve 71 disposed on the second air return pipe 7.
The fifth control valve 61 and the sixth control valve 71 are arranged to control the on-off of the gas on the second detection pipeline 6 and the second return pipeline 7 respectively.
Preferably, the first control valve 14, the second control valve 24, the third control valve 41, the fourth control valve 51, the fifth control valve 61 and the sixth control valve 71 used in the present application are ball valves for controlling the on-off of gas in a pipeline.
Therefore, the dust removal system adopted in the application can timely acquire the quality of the filtered compressed air, monitor the blocking condition of the filter in real time, effectively reduce the running cost and ensure the quality of the compressed air.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (10)
1. A edulcoration system for clean room compressed air pipeline, characterized by, include:
The main body pipeline is provided with an air inlet end which is communicated with an air outlet end of the air compression station, and the air outlet end is used for being introduced into a clean room; the main pipeline is sequentially provided with a plurality of first filters, and the dust removal precision of the first filters is sequentially improved along the ventilation direction of the main pipeline;
The bypass pipeline is connected with the main pipeline in parallel; the air inlet end of the bypass pipeline is communicated with the air inlet end of the main pipeline, and the air outlet end of the bypass pipeline is communicated with the air outlet end of the main pipeline; the bypass pipeline is sequentially provided with a plurality of second filters, and the dust removal precision of the second filters is sequentially improved along the ventilation direction of the bypass pipeline; and
And two ends of the differential pressure detector are respectively connected with the air inlet end of the main body pipeline and the air outlet end of the main body pipeline.
2. The system of claim 1, wherein the plurality of first filters disposed along the ventilation direction of the main body duct comprises a first coarse filter and a first fine filter;
The plurality of second filters disposed along the ventilation direction of the bypass duct includes a second coarse filter and a second fine filter.
3. The system for clean room compressed air piping according to claim 2, wherein a first oil removal filter is provided between the first coarse filter and the first fine filter; a second oil removal filter is arranged between the second coarse filter and the second precise filter.
4. A system for cleaning a compressed air line in a clean room as claimed in any one of claims 1 to 3, wherein the inlet and outlet ends of the main pipe are provided with a first control valve, and the inlet and outlet ends of the bypass pipe are provided with a second control valve.
5. The system of claim 1, wherein the outlet end of each stage of the first filter is provided with a first detection pipeline, and each first detection pipeline is provided with a first detection port.
6. The system according to claim 5, wherein the air outlet end of each of the first detection pipes is further provided with a first air return pipe, and the air outlet end of the first air return pipe is communicated with the air inlet end of the main pipe or the air inlet end of the first filter of the previous stage; when the detection result of the first detection port is higher than a preset value, the first air return pipeline is used for returning the air in the first detection pipeline to the first filter at the previous stage.
7. The system of claim 6, wherein a third control valve is disposed at an air outlet end of each of the first detecting pipes, and a fourth control valve is disposed on each of the first return pipes.
8. The system of claim 1, wherein the outlet end of the bypass duct is provided with a second detection duct, and the second detection duct is provided with a second detection port.
9. The system for removing impurities from a compressed air pipeline in a clean room according to claim 8, wherein the air outlet end of the second detection pipeline is further provided with a second air return pipeline, and the air outlet end of the second air return pipeline is communicated with the air inlet end of the bypass pipeline; and when the detection result of the second detection port is higher than a preset value, the second air return pipeline is used for returning the air in the second detection pipeline to the air inlet end of the bypass pipeline.
10. The system of claim 9, wherein the second detection conduit has a fifth control valve at the outlet end and a sixth control valve at the second return conduit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322491825.5U CN220802475U (en) | 2023-09-14 | 2023-09-14 | Impurity removal system for compressed air pipeline of clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322491825.5U CN220802475U (en) | 2023-09-14 | 2023-09-14 | Impurity removal system for compressed air pipeline of clean room |
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| Publication Number | Publication Date |
|---|---|
| CN220802475U true CN220802475U (en) | 2024-04-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322491825.5U Active CN220802475U (en) | 2023-09-14 | 2023-09-14 | Impurity removal system for compressed air pipeline of clean room |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220802475U (en) |
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2023
- 2023-09-14 CN CN202322491825.5U patent/CN220802475U/en active Active
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