CN103088432A - System for single crystal furnace vacuum dedusting filtration - Google Patents
System for single crystal furnace vacuum dedusting filtration Download PDFInfo
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- CN103088432A CN103088432A CN 201110350001 CN201110350001A CN103088432A CN 103088432 A CN103088432 A CN 103088432A CN 201110350001 CN201110350001 CN 201110350001 CN 201110350001 A CN201110350001 A CN 201110350001A CN 103088432 A CN103088432 A CN 103088432A
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- tank body
- filtering tank
- aluminium alloy
- single crystal
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Abstract
The invention discloses a system for single crystal furnace vacuum dedusting filtration, which comprises a safety inflation valve, a filtering tank cover, a filtering tank body, a honeycomb ultrafine fiber paper, an aluminium alloy inner cylinder, an air inlet and an air outlet; the open-type filtering tank cover is disposed on the filtering tank body; the safety inflation valve is disposed on the filtering tank cover; the aluminium alloy inner cylinder is disposed in the filtering tank body; the honeycomb ultrafine fiber paper is fixed on the aluminium alloy inner cylinder; the air outlet is disposed below the filtering tank body; the air inlet is disposed on the side surface of the filtering tank body. According to the invention, the honeycomb ultrafine fiber paper is used as a filtering medium to filter finer impurities, and the honeycomb structure can greatly increase the air passing area, and improve air passing efficiency. The invention has very important significance on the filtration of more and smaller impurities, the reduction of the vacuum pump oil using amount, the prolongation of the vacuum pump service life, and the improvement of the vacuum degree in the single crystal furnace.
Description
Technical field
The present invention relates to the photovoltaic field, be specifically related to a kind of device that the single crystal growing furnace vacuum cleaning is filtered.
Background technology
During single crystal growing, vacuum is had relatively high expectations, every single crystal growing furnace is furnished with all independently that vacuum pump vacuumizes.When vacuumizing, constantly be filled with high-purity argon gas, as protection gas, prevent that silicon and oxygen under high temperature, carbon etc. from reacting.But, still contain the oxygen of trace in high-purity argon gas, the not good air leaking that causes of the sealing effectiveness of monocrystalline body of heater self, and single crystal growing quartz crucible used, graphite system etc. all can become to give birth to or discharge the impurity such as silicon-dioxide, silicon carbide.These impurity are extracted out by vacuum pump with argon gas, to keep vacuum in single crystal growing furnace.And after these impurity entered vacuum pump, in the work-ing life that can greatly reduce vacuum pump, vacuum pump oil also will frequently be changed, and was with high costs.The vacuum cleaning filtering system of using at present is that the individual layer stainless steel filtering net filters, can only the larger impurity of filtering particle, can't filter for fine impurities; And filtration area is little, easily stops up, and has increased the load of vacuum pump.
Summary of the invention
The objective of the invention is in order to overcome the deficiencies in the prior art, a kind of system for single crystal growing furnace vacuum cleaning filtration is provided, can realize filtering more less impurity, reduce the consumption of vacuum pump oil, extend the work-ing life of vacuum pump, improve vacuum tightness in single crystal growing furnace, improve the rate that manufactures a finished product.
The technical solution used in the present invention is: a kind of system for single crystal growing furnace vacuum cleaning filtration, comprise the safety inflated valve, filter cover, filter tank body, cellular ultra-fine fibre paper, aluminium alloy inner barrel, inlet mouth and air outlet, described filtration tank body is provided with openable and filters cover, hay tank covers and is provided with the safety inflated valve, filter in tank body and be provided with aluminium alloy inner barrel, described cellular ultra-fine fibre paper is fixed on aluminium alloy inner barrel, be provided with the air outlet below the filtration tank body, the side of filtering tank body is provided with inlet mouth.
As preferably, described aluminium alloy inner barrel is provided with lancet.
It is that cellular ultra-fine fibre paper filters that the recycle system of the present invention has changed original individual layer stainless steel filtering net, can realize filtering more less impurity, reduce the consumption of vacuum pump oil, extend the work-ing life of vacuum pump, improve vacuum tightness in single crystal growing furnace, improve the rate that manufactures a finished product, reduce production cost, for the user seeks more interests.
the inlet mouth of apparatus of the present invention, connect the venting port of single crystal growing furnace, the gas that contains impurity filters through cellular ultra-fine fibre paper, discharged by the air outlet and enter vacuum pump, cellular ultra-fine fibre paper is fixed on aluminium alloy inner barrel, filtering cover can open, be convenient to cellular ultra-fine fibre paper is taken out cleaning, during taking-up, carry two lancets on aluminium alloy inner barrel, can be with it taking-up, in the time of need to opening hay tank, first inflate in tank by the safety inflated valve, until when the tank internal gas pressure is consistent with barometric point, can open the filtration cover, need to vacuumize when using, must tighten the safety inflated valve.
Beneficial effect: the present invention adopts cellular ultra-fine fibre paper as filtration medium, can filter more tiny impurity, and cellular structure, increase its gas passing area greatly simultaneously, has improved and has crossed gas efficient.For filtering more less impurity, reduce the consumption of vacuum pump oil, extend the work-ing life of vacuum pump, improve vacuum tightness in single crystal growing furnace, tool is of great significance.
Description of drawings
Fig. 1 is structural representation of the present invention.
Embodiment
The invention will be further described below in conjunction with the drawings and specific embodiments:
As shown in Figure 1: a kind of system for single crystal growing furnace vacuum cleaning filtration, comprise safety inflated valve 1, filter cover 2, filter tank body 3, cellular ultra-fine fibre paper 4, aluminium alloy inner barrel 5, inlet mouth 6 and air outlet 7, described filtration tank body 3 is provided with openable and filters cover 2, filter cover 2 and be provided with safety inflated valve 1, filter in tank body 3 and be provided with aluminium alloy inner barrel 5, described cellular ultra-fine fibre paper 4 is fixed on aluminium alloy inner barrel 5, be provided with air outlet 7 below filtration tank body 3, the side of filtering tank body 3 is provided with inlet mouth 6.Described aluminium alloy inner barrel 5 is provided with lancet 8.
Claims (2)
1. one kind is used for the system that the single crystal growing furnace vacuum cleaning is filtered, it is characterized in that: comprise the safety inflated valve, filter cover, filter tank body, cellular ultra-fine fibre paper, aluminium alloy inner barrel, inlet mouth and air outlet, described filtration tank body is provided with openable and filters cover, hay tank covers and is provided with the safety inflated valve, filter in tank body and be provided with aluminium alloy inner barrel, described cellular ultra-fine fibre paper is fixed on aluminium alloy inner barrel, be provided with the air outlet below the filtration tank body, the side of filtering tank body is provided with inlet mouth.
2. a kind of system of filtering for the single crystal growing furnace vacuum cleaning according to claim 1, it is characterized in that: described aluminium alloy inner barrel is provided with lancet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110350001 CN103088432A (en) | 2011-11-08 | 2011-11-08 | System for single crystal furnace vacuum dedusting filtration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110350001 CN103088432A (en) | 2011-11-08 | 2011-11-08 | System for single crystal furnace vacuum dedusting filtration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103088432A true CN103088432A (en) | 2013-05-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110350001 Pending CN103088432A (en) | 2011-11-08 | 2011-11-08 | System for single crystal furnace vacuum dedusting filtration |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103088432A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103615378A (en) * | 2013-11-07 | 2014-03-05 | 镇江大成新能源有限公司 | Filtering tank convenient for people to clean interior and application method of filtering tank |
| CN108524037A (en) * | 2018-05-08 | 2018-09-14 | 江南大学附属医院 | A kind of department of stomatology jet cleaning device |
| CN109097832A (en) * | 2018-09-25 | 2018-12-28 | 天通银厦新材料有限公司 | A kind of dedusting attemperator of sapphire finishing stove |
| WO2023179648A1 (en) * | 2022-03-23 | 2023-09-28 | 高景太阳能股份有限公司 | Control system and method for energy-saving and continuous maintenance of vacuum pump |
-
2011
- 2011-11-08 CN CN 201110350001 patent/CN103088432A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103615378A (en) * | 2013-11-07 | 2014-03-05 | 镇江大成新能源有限公司 | Filtering tank convenient for people to clean interior and application method of filtering tank |
| CN108524037A (en) * | 2018-05-08 | 2018-09-14 | 江南大学附属医院 | A kind of department of stomatology jet cleaning device |
| CN109097832A (en) * | 2018-09-25 | 2018-12-28 | 天通银厦新材料有限公司 | A kind of dedusting attemperator of sapphire finishing stove |
| WO2023179648A1 (en) * | 2022-03-23 | 2023-09-28 | 高景太阳能股份有限公司 | Control system and method for energy-saving and continuous maintenance of vacuum pump |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130508 |