CN202323121U - Vacuum dust removing and filtering system for single crystal furnace - Google Patents
Vacuum dust removing and filtering system for single crystal furnace Download PDFInfo
- Publication number
- CN202323121U CN202323121U CN2011204384708U CN201120438470U CN202323121U CN 202323121 U CN202323121 U CN 202323121U CN 2011204384708 U CN2011204384708 U CN 2011204384708U CN 201120438470 U CN201120438470 U CN 201120438470U CN 202323121 U CN202323121 U CN 202323121U
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- filtering
- tank body
- single crystal
- filtering tank
- vacuum
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Abstract
The utility model discloses a vacuum dust removing and filtering system for a single crystal furnace, comprising a charge relief valve, a filtering tank cover, a filtering tank body, honeycomb-shaped superfine fibre paper, an inner aluminum alloy barrel, an air inlet and an air outlet, wherein the filtering tank body can be provided with the open type filtering tank cover; the filtering tank cover is provided with the charge relief valve; the filtering tank body is internally provided with the inner aluminum alloy barrel; the honeycomb-shaped superfine fibre paper is fixed on the inner aluminum alloy barrel; the air outlet is arranged under the filtering tank body; and the air inlet is arranged at the side of the filtering tank body. According to the utility model, the honeycomb-shaped superfine fibre paper is used as filtering medium so that smaller impurities can be filtered; meanwhile, due to the adoption of a honeycomb-shaped structure, the air filtering area is greatly increased, and the air filtering efficiency is increased. The vacuum dust removing and filtering system has very important significance in filtering more smaller impurities, reducing the using amount of vacuum pump oil, prolonging the service life of a vacuum pump and improving the vacuum degree in the single crystal furnace.
Description
Technical field
The utility model relates to the photovoltaic field, is specifically related to the filtering a kind of device of single crystal growing furnace vacuum cleaning.
Background technology
During single crystal growing, vacuum is had relatively high expectations, every single crystal growing furnace is furnished with all independently that vacuum pump vacuumizes.When vacuumizing, constantly charge into high-purity argon gas, as protection gas, prevent that silicon and oxygen under the high temperature, carbon etc. from reacting.But, still contain the oxygen of trace in the high-purity argon gas, the not good air leaking that causes of the sealing effectiveness of monocrystalline body of heater self, and the used quartz crucible of single crystal growing, graphite system etc. all can become to give birth to or discharge impurity such as silicon-dioxide, silit.These impurity are extracted out by vacuum pump with argon gas, to keep vacuum in the single crystal growing furnace.And behind these impurity entering vacuum pumps, in the work-ing life that can reduce vacuum pump greatly, vacuum pump oil is also wanted frequent change, and is with high costs.The vacuum cleaning filtering system of using at present is that the individual layer stainless steel filtering net filters, can only the bigger impurity of filtering particle, can't filter for fine impurities; And filtration area is little, and easy blocking has increased the load of vacuum pump.
Summary of the invention
The purpose of the utility model is in order to overcome the deficiency of prior art; A kind of filtering system of single crystal growing furnace vacuum cleaning that is used for is provided; Can realize filtering more littler impurity, reduce the consumption of vacuum pump oil, prolong the work-ing life of vacuum pump; Improve vacuum tightness in the single crystal growing furnace, improve the rate that manufactures a finished product.
The technical scheme that the utility model adopts is: a kind of filtering system of single crystal growing furnace vacuum cleaning that is used for; Comprise safe inflation valve, filter cover, filter tank body, cellular ultra-fine fibre paper, duraluminum inner core, inlet mouth and air outlet; Said filtration tank body is provided with openable and filters cover; Hay tank covers and is provided with safe inflation valve, filters in the tank body and is provided with the duraluminum inner core, and said cellular ultra-fine fibre paper is fixed on the duraluminum inner core; Be provided with the air outlet below the filtration tank body, the side of filtering tank body is provided with inlet mouth.
As preferably, said duraluminum inner core is provided with lancet.
It is that cellular ultra-fine fibre paper filters that the utility model recycle system has changed original individual layer stainless steel filtering net; Can realize filtering more littler impurity, reduce the consumption of vacuum pump oil, prolong the work-ing life of vacuum pump; Improve vacuum tightness in the single crystal growing furnace; Improve the rate that manufactures a finished product, reduce production cost, for the user seeks more benefits.
The inlet mouth of the utility model device connects the venting port of single crystal growing furnace, and the gas that contains impurity filters through cellular ultra-fine fibre paper, is discharged by the air outlet and gets into vacuum pump; Cellular ultra-fine fibre paper is fixed on the duraluminum inner core, filters cover and can open, and is convenient to cellular ultra-fine fibre paper is taken out cleaning; During taking-up, carry two lancets on the duraluminum inner core, can be with it taking-up; In the time of hay tank need being opened, pass through safe inflation valve earlier toward a jar interior inflation, when by the time jar internal gas pressure is consistent with barometric point; Can open the filtration cover, need vacuumize when using, must tighten safe inflation valve.
Beneficial effect: the utility model adopts cellular ultra-fine fibre paper as filtration medium, can filter more tiny impurity, and cellular structure increases its gas passing area greatly simultaneously, has improved and has crossed gas efficient.For filtering more littler impurity, reduce the consumption of vacuum pump oil, prolong the work-ing life of vacuum pump, improve vacuum tightness in the single crystal growing furnace, have crucial meaning.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is described further:
As shown in Figure 1: a kind of filtering system of single crystal growing furnace vacuum cleaning that is used for; Comprise safe inflation valve 1, filter cover 2, filter tank body 3, cellular ultra-fine fibre paper 4, duraluminum inner core 5, inlet mouth 6 and air outlet 7; Said filtration tank body 3 is provided with openable and filters cover 2; Filter cover 2 and be provided with safe inflation valve 1, filter in the tank body 3 and be provided with duraluminum inner core 5, said cellular ultra-fine fibre paper 4 is fixed on the duraluminum inner core 5; Be provided with air outlet 7 below the filtration tank body 3, the side of filtering tank body 3 is provided with inlet mouth 6.Said duraluminum inner core 5 is provided with lancet 8.
Claims (2)
1. one kind is used for the filtering system of single crystal growing furnace vacuum cleaning; It is characterized in that: comprise safe inflation valve, filter cover, filter tank body, cellular ultra-fine fibre paper, duraluminum inner core, inlet mouth and air outlet; Said filtration tank body is provided with openable and filters cover; Hay tank covers and is provided with safe inflation valve, filters in the tank body and is provided with the duraluminum inner core, and said cellular ultra-fine fibre paper is fixed on the duraluminum inner core; Be provided with the air outlet below the filtration tank body, the side of filtering tank body is provided with inlet mouth.
2. a kind of filtering system of single crystal growing furnace vacuum cleaning that is used for according to claim 1, it is characterized in that: said duraluminum inner core is provided with lancet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204384708U CN202323121U (en) | 2011-11-08 | 2011-11-08 | Vacuum dust removing and filtering system for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204384708U CN202323121U (en) | 2011-11-08 | 2011-11-08 | Vacuum dust removing and filtering system for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202323121U true CN202323121U (en) | 2012-07-11 |
Family
ID=46435108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204384708U Expired - Fee Related CN202323121U (en) | 2011-11-08 | 2011-11-08 | Vacuum dust removing and filtering system for single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202323121U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102824798A (en) * | 2012-08-10 | 2012-12-19 | 上虞晶信机电科技有限公司 | Filter for vacuum system of single crystal furnace |
-
2011
- 2011-11-08 CN CN2011204384708U patent/CN202323121U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102824798A (en) * | 2012-08-10 | 2012-12-19 | 上虞晶信机电科技有限公司 | Filter for vacuum system of single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20131108 |