CN207143368U - A kind of monocrystalline furnace side exhaust apparatus - Google Patents
A kind of monocrystalline furnace side exhaust apparatus Download PDFInfo
- Publication number
- CN207143368U CN207143368U CN201721106030.6U CN201721106030U CN207143368U CN 207143368 U CN207143368 U CN 207143368U CN 201721106030 U CN201721106030 U CN 201721106030U CN 207143368 U CN207143368 U CN 207143368U
- Authority
- CN
- China
- Prior art keywords
- gear
- filtering tank
- filtering
- inner cylinder
- exhaust apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Silicon Compounds (AREA)
Abstract
The utility model provides a kind of monocrystalline furnace side exhaust apparatus, including：Filtering tank, vavuum pump and collecting tank, the vavuum pump is arranged on the outlet of filtering tank, the collecting tank is arranged on below filtering tank, and filtering tank communicates, and the filtering tank includes filtering cover, inner cylinder, filter screen, hairbrush and transmission mechanism, the filtering cover is arranged on filtering tank, the inner cylinder is circumferentially distributed in the filtering tank, and the filter screen is fixed on inner cylinder, and the hairbrush is arranged in inner cylinder, gas outlet is provided with below filtering tank body, the side for filtering tank body is provided with air inlet.A kind of monocrystalline furnace side exhauster structure described in the utility model is simple, and all impurity is filtered, it is necessary to when clearing up after air inlet pipe gas enters filter, it can be cleared up automatically by hairbrush, the utilization ratio of single crystal growing furnace is substantially increased, while silicon monoxide can also collect, remarkable in economical benefits.
Description
Technical field
The utility model belongs to monocrystalline silicon production field, more particularly, to a kind of monocrystalline furnace side exhaust apparatus.
Background technology
During single crystal growing furnace production run, certain vacuum is must assure that in furnace interior, just can guarantee that the life of monocrystalline silicon
It is long, while argon gas must be passed through and protected, so it is necessary that continuously being vacuumized, due to more in single crystal growing furnace
Crystal silicon raw material has part splashing, is taken out people's vacuum system, and it once enters vavuum pump, can influence the normal operation of vavuum pump, very
To the damage for causing vavuum pump, must just filtration, purification be carried out to the gas for entering vavuum pump, although traditional filter can rise
To filtration, but maintenance inconvenience is cleared up, the dismounting cleaning of particularly interior filtering blank is very inconvenient.
The content of the invention
In view of this, the utility model is directed to a kind of monocrystalline furnace side exhaust apparatus, can realize that filtering is more smaller
Impurity, reduce the dosage of pumping fluid, extend the service life of vavuum pump, improve vacuum in single crystal growing furnace, raising is produced into
Product rate.
To reach above-mentioned purpose, what the technical solution of the utility model was realized in：
A kind of monocrystalline furnace side exhaust apparatus, including：Filtering tank, vavuum pump and collecting tank, the vavuum pump are arranged on filtering
The outlet of tank, the collecting tank is arranged on below filtering tank, and filtering tank communicates,
The filtering tank includes filtering cover, inner cylinder, filter screen, hairbrush and transmission mechanism, and the filtering cover was arranged on
On filter tank, the inner cylinder is circumferentially distributed in the filtering tank, and the filter screen is fixed on inner cylinder, and the hairbrush is arranged on inner cylinder
In, filter and be provided with gas outlet below tank body, the side for filtering tank body is provided with air inlet.
Further, the transmission mechanism includes gear ring, first gear and second gear, and the gear ring is fixed on the mistake
Filter tank covers, and the first gear and second gear are rotatably connected on the filtering tank and covered, and the second gear is around the
One gear is set, and the first gear engages with second gear, and the second gear engages with gear ring, and the hairbrush is arranged on the
On two gears.
Further, filtering tank is covered provided with safety inflated valve.
Further, the filtering tank uses magnet fluid sealing with filtering cover.
Further, the filter screen is cellular fibers paper.
Further, the inner cylinder is made up of aluminium alloy.
Relative to prior art, monocrystalline furnace side described in the utility model exhaust apparatus has the advantage that：
A kind of monocrystalline furnace side exhauster structure described in the utility model is simple, and air inlet pipe gas enters institute after filter
Some impurity is filtered, it is necessary to when clearing up, and can be cleared up automatically by hairbrush, saves substantial amounts of maintenance time and gap, is shortened
Single crystal growing furnace needs the time that blowing out waits due to cleaning vacuum filter, substantially increases the utilization ratio of single crystal growing furnace, simultaneously
Silicon monoxide can also collect, remarkable in economical benefits.
Brief description of the drawings
Form a part of accompanying drawing of the present utility model to be used for providing further understanding to of the present utility model, this practicality is new
The schematic description and description of type is used to explain the utility model, does not form to improper restriction of the present utility model.
In accompanying drawing：
Fig. 1 is the structural representation described in the utility model embodiment.
Fig. 2 is transmission mechanism schematic diagram described in the utility model embodiment.
Description of reference numerals：
1- air inlets；2- filters cover；3- hairbrush；4- inner cylinders；5- vavuum pumps；6- collecting tanks；7- gear rings；The teeth of 8- first
Wheel；9- second gears.
Embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the utility model can
To be mutually combined.
In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " on ", " under ",
The orientation or position relationship of the instruction such as "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outer " are
Based on orientation shown in the drawings or position relationship, it is for only for ease of description the utility model and simplifies description, rather than instruction
Or imply that signified device or element must have specific orientation, with specific azimuth configuration and operation, therefore be not understood that
For to limitation of the present utility model.In addition, term " first ", " second " etc. are only used for describing purpose, and it is not intended that instruction
Or imply relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, " first ", " second " etc. are defined
Feature can express or implicitly include one or more this feature.In description of the present utility model, unless separately
It is described, " multiple " are meant that two or more.
, it is necessary to which explanation, unless otherwise clearly defined and limited, term " are pacified in description of the present utility model
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integratedly
Connection；Can be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, on being understood by concrete condition
State concrete meaning of the term in the utility model.
Describe the utility model in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
A kind of monocrystalline furnace side exhaust apparatus, including：Filtering tank, vavuum pump 5 and collecting tank 6, the vavuum pump 5 were arranged on
The outlet of filter tank, the collecting tank 6 is arranged on below filtering tank, and filtering tank communicates, and the filtering tank includes filtering cover
2nd, inner cylinder 4, filter screen, hairbrush 3 and transmission mechanism, the filtering cover 2 are arranged on filtering tank, and filtering cover 2 is provided with safety
Charge valve, the filtering tank use magnet fluid sealing with filtering cover 2, and the inner cylinder is circumferentially distributed in the filtering tank, institute
State filter screen to be fixed on inner cylinder, the filter screen is cellular fibers paper, and the hairbrush 2 is arranged in inner cylinder 4, filtered under tank body
Face is provided with gas outlet, and the side for filtering tank body is provided with air inlet 1.The transmission mechanism includes gear ring 7, first gear 8 and second
Gear 9, the gear ring are fixed on the filtering cover 2, and the first gear 8 and second gear 9 are rotatably connected on described
Filter on cover 2, the second gear 9 is set around first gear 8, and the first gear 8 engages with second gear 9, described
Second gear 9 is engaged with gear ring 7, and the hairbrush 3 is arranged in second gear 9.The inner cylinder 4 is made up of aluminium alloy, described interior
Cylinder 4 is provided with 6-8.
A kind of monocrystalline furnace side exhaust apparatus described in the utility model can filter in exhaust to gas, while mistake
Filter screen can be cleaned while filter, when cleaning filter screen, only by motor first gear 8 need to be driven to rotate, with regard to the second tooth can be driven
The band electric brush of wheel 9 is rotated, and the filter screen on inner cylinder 4 is cleaned, substantially increases the utilization ratio of single crystal growing furnace.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
Within the spirit and principle of utility model, any modification, equivalent substitution and improvements made etc., the utility model should be included in
Protection domain within.
Claims (7)
- A kind of 1. monocrystalline furnace side exhaust apparatus, it is characterised in that including：Filtering tank, vavuum pump (5) and collecting tank (6), it is described true Empty pump (5) is arranged on the outlet of filtering tank, and the collecting tank (6) is arranged on below filtering tank, and filtering tank communicates,The filtering tank includes filtering cover (2), inner cylinder (4), filter screen, hairbrush (3) and transmission mechanism, the filtering cover (2) It is arranged on filtering tank, the inner cylinder is circumferentially distributed in the filtering tank, and the filter screen is fixed on inner cylinder, the hairbrush (3) it is arranged in inner cylinder (4), filters and be provided with gas outlet below tank body, the side for filtering tank body is provided with air inlet (1).
- A kind of 2. monocrystalline furnace side exhaust apparatus according to claim 1, it is characterised in that：The transmission mechanism includes gear ring (7), first gear (8) and second gear (9), the gear ring are fixed on the filtering cover (2), the first gear (8) It is rotatably connected on the filtering cover (2) with second gear (9), the second gear (9) sets around first gear (8) Put, the first gear (8) is engaged with second gear (9), and the second gear (9) is engaged with gear ring (7), the hairbrush (3) It is arranged in second gear (9).
- A kind of 3. monocrystalline furnace side exhaust apparatus according to claim 1, it is characterised in that：Filter cover (2) and be provided with peace Full charge valve.
- A kind of 4. monocrystalline furnace side exhaust apparatus according to claim 1, it is characterised in that：The filtering tank and filtering cover (2) magnet fluid sealing is used.
- A kind of 5. monocrystalline furnace side exhaust apparatus according to claim 1, it is characterised in that：The filter screen is cellular fibers Paper.
- A kind of 6. monocrystalline furnace side exhaust apparatus according to claim 3, it is characterised in that：The inner cylinder (4) is by aluminium alloy It is made.
- A kind of 7. monocrystalline furnace side exhaust apparatus according to claim 4, it is characterised in that：The inner cylinder (4) is provided with 6-8 It is individual.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721106030.6U CN207143368U (en) | 2017-08-30 | 2017-08-30 | A kind of monocrystalline furnace side exhaust apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721106030.6U CN207143368U (en) | 2017-08-30 | 2017-08-30 | A kind of monocrystalline furnace side exhaust apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207143368U true CN207143368U (en) | 2018-03-27 |
Family
ID=61670725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721106030.6U Expired - Fee Related CN207143368U (en) | 2017-08-30 | 2017-08-30 | A kind of monocrystalline furnace side exhaust apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207143368U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109440192A (en) * | 2018-12-27 | 2019-03-08 | 内蒙古中环光伏材料有限公司 | A kind of single crystal fire grate gas port self-purifying device |
-
2017
- 2017-08-30 CN CN201721106030.6U patent/CN207143368U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109440192A (en) * | 2018-12-27 | 2019-03-08 | 内蒙古中环光伏材料有限公司 | A kind of single crystal fire grate gas port self-purifying device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207143368U (en) | A kind of monocrystalline furnace side exhaust apparatus | |
| CN203724855U (en) | Filtering machine with dirt collection function | |
| CN104481892A (en) | Sewage pump unit structure | |
| CN103088432A (en) | System for single crystal furnace vacuum dedusting filtration | |
| CN207886788U (en) | Sludge filtration device | |
| CN206934871U (en) | Activated charcoal strainer purifier is used in a kind of stream processing | |
| CN108910989A (en) | Portable water purification glass | |
| CN210206054U (en) | Circulating propolis filter equipment | |
| CN201023029Y (en) | External pressure pipe type hollow fiber filtering device | |
| CN209957524U (en) | Slag-water separator | |
| CN210974131U (en) | A sewage treatment complete sets for sewage purification | |
| CN207126385U (en) | A kind of high temperature resistant hollow fiber film assembly | |
| CN202061278U (en) | Air purifier | |
| CN206526550U (en) | Chinese medicine preparation filter plant | |
| CN202323121U (en) | Vacuum dust removing and filtering system for single crystal furnace | |
| CN205908463U (en) | Vacuum pump with filtering capability | |
| CN216395543U (en) | Internal impurity filtering device of oil transfer pump | |
| CN217808977U (en) | Sewage purification treatment device of municipal sewage pipe network | |
| CN209815809U (en) | Dustproof purifier | |
| CN204662647U (en) | Sewage draw-out device between battery car | |
| CN214218341U (en) | Urban rainwater collecting device for filtering sediment or impurities doped in rainwater | |
| CN217247033U (en) | Plant material extraction filtering tank for cosmetic production | |
| CN220257315U (en) | Sewage water inflow primary filter device | |
| CN209348424U (en) | A kind of separation of solid and liquid uses filter | |
| CN215250072U (en) | Water body circulation treatment device for industrial high-yield cultivation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180327 Termination date: 20200830 |