WO2023024329A1 - 用于真空磁控溅射镀膜机的工件转移装置 - Google Patents

用于真空磁控溅射镀膜机的工件转移装置 Download PDF

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Publication number
WO2023024329A1
WO2023024329A1 PCT/CN2021/137099 CN2021137099W WO2023024329A1 WO 2023024329 A1 WO2023024329 A1 WO 2023024329A1 CN 2021137099 W CN2021137099 W CN 2021137099W WO 2023024329 A1 WO2023024329 A1 WO 2023024329A1
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Prior art keywords
frame
transfer device
magnetron sputtering
installation
workpiece transfer
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PCT/CN2021/137099
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English (en)
French (fr)
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祝海生
黄乐
孙桂红
梁红
黄国兴
唐红波
左莉
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湘潭宏大真空技术股份有限公司
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Publication of WO2023024329A1 publication Critical patent/WO2023024329A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Definitions

  • the invention relates to the field of magnetron coating, in particular to a workpiece transfer device for a vacuum magnetron sputtering coating machine.
  • the main purpose of the present invention is to provide a workpiece transfer device for a vacuum magnetron sputtering coating machine, aiming to solve the above technical problems.
  • a workpiece transfer device for a vacuum magnetron sputtering coating machine proposed by the present invention includes an installation frame, and a placement cavity is provided in the installation frame, and at least one installation roller is arranged in the placement cavity.
  • the installation drum is hollow, and the outer and inner surfaces of the installation drum are used to fix the workpiece.
  • the workpiece transfer device for the vacuum magnetron sputtering coating machine also includes a plurality of universal wheels. The direction wheels are all arranged on the bottom of the installation frame.
  • the installation frame includes a bottom plate, an outer frame and a top plate, the bottom plate and the top plate are oppositely arranged, and the two ends of the outer frame are respectively connected around the outer edges of the bottom plate and the top plate to enclose into the placement cavity.
  • the outer frame is a rectangular frame, and the outer frame includes a first frame body, a second frame body, a third frame body, and a fourth frame body connected end to end, and the first frame body and the The third frame body is arranged oppositely, and the second frame body and the fourth frame body are arranged oppositely.
  • both the first frame body and the third frame body are embedded with aluminum-plastic panels to close the first frame body and the third frame body.
  • the second frame body and the fourth frame body are provided with at least two sliding doors, and the bottom and top of the second frame body and the fourth frame body are provided with sliding doors.
  • Rail, the upper and lower ends of the sliding door are slidingly connected with the slide rail.
  • the sliding door is a transparent glass door.
  • a moving track is provided on the bottom plate, and the installation roller is slidably arranged on the moving track, and the moving track is used for docking connection with an external conveyor belt.
  • the shape of the installation roller is a regular prism.
  • the installation roller includes a first installation disk, a second installation disk and a plurality of installation cylinders, the first installation disk and the second installation disk are arranged at intervals along the vertical direction, and a plurality of the installation cylinders Both ends of the cylinder are respectively connected to the facing wall surfaces of the first mounting plate and the second mounting plate, the outer surface of the mounting cylinder is used for mounting workpieces, and the mounting cylinder can rotate about its own axis.
  • the workpiece transfer device for a vacuum magnetron sputtering coating machine further includes a rotating shaft equal to the number of the mounting cylinders, and the two ends of the rotating shaft are respectively connected to the first mounting plate The wall facing the second mounting plate is connected, and the rotating shafts are inserted one by one at the shaft center of the mounting cylinder, and the rotating shafts can rotate around their own axes.
  • the workpiece transfer device includes a mounting frame, a placement cavity is provided in the mounting frame, at least one mounting roller is arranged in the placement cavity, the mounting roller is hollow, and the outer surface of the mounting roller and The inner surfaces are all used to fix the workpiece
  • the workpiece transfer device for the vacuum magnetron sputtering coating machine also includes a plurality of universal wheels, and a plurality of universal wheels are arranged at the bottom of the installation frame, so in When the workpiece is transferred after coating or when the workpiece is sent to the coating chamber, the workpiece can be fixed on the installation roller, and then the installation roller is set in the placement chamber, so that the installation frame can be moved by the universal wheel to facilitate the transfer of the workpiece , thereby improving efficiency.
  • Fig. 1 is a schematic structural view of a workpiece transfer device for a vacuum magnetron sputtering coating machine according to an embodiment of the present invention
  • Fig. 2 is a structural schematic diagram of a roller installation according to an embodiment of the present invention.
  • the invention provides a workpiece transfer device used in a vacuum magnetron sputtering coating machine.
  • the workpiece transfer device for vacuum magnetron sputtering coating machine provided by the embodiment of the present invention includes a mounting frame 10, a placement cavity 11 is provided in the mounting frame 10, and at least An installation drum 20, the installation drum 20 is hollow, the outer surface and the inner surface of the installation drum 20 are used to fix the workpiece, and the workpiece transfer device for the vacuum magnetron sputtering coating machine also includes a plurality of million A plurality of universal wheels 30 are provided at the bottom of the installation frame 10 .
  • the workpiece transfer device includes an installation frame 10, and the installation frame 10 has a placement cavity 11, and at least one installation roller 20 is arranged in the placement cavity 11, and the installation roller 20 is hollow.
  • the outer surface and the inner surface of the cylinder 20 are all used to fix the workpiece, and the workpiece transfer device for the vacuum magnetron sputtering coating machine also includes a plurality of universal wheels 30, and a plurality of universal wheels 30 are arranged on the The bottom of the installation frame 10, so when the workpiece is transferred after coating or when the workpiece is sent to the coating chamber, the workpiece can be fixed on the installation drum 20, and then the installation drum 20 is set in the placement chamber 11, so that it can be passed through ten thousand
  • the mounting frame 10 is driven by the steering wheel 30 to move, which facilitates the transfer of workpieces and improves the efficiency.
  • the installation frame 10 includes a bottom plate 12, an outer frame 13 and a top plate 14, the bottom plate 12 and the top plate 14 are arranged oppositely, and the two ends of the outer frame 13 surround the bottom plate 12 and the top plate 14 respectively.
  • the outer edges are connected to enclose the placement cavity 11 .
  • at least one installation roller 20 can be placed in the placement cavity 11, and the enclosed placement cavity 11 can effectively block the interference of external dust , thereby improving product quality.
  • the outer frame 13 includes a first frame body 131, a second frame body 132, a third frame body 133 and a fourth frame body 134 connected end to end, the first frame body 131 and the third frame body 133 are set opposite to each other, and the second frame body 132 and the fourth frame body 134 are set opposite to each other.
  • Both the first frame body 131 and the third frame body 133 are embedded with aluminum-plastic panels to close the first frame body 131 and the third frame body 133, and the bottom plate 12 can also be made of aluminum-plastic panels. closed.
  • At least two sliding doors 40 are provided on the second frame body 132 and the fourth frame body 134, and the bottom and top of the second frame body 132 and the fourth frame body 134 are provided with A slide rail 50 , the upper and lower ends of the sliding door 40 are slidably connected with the slide rail 50 .
  • the placement cavity 11 can be exposed through the sliding of the sliding door 40, so that the installation drum 20 can be easily placed in the placement cavity 11, and the placement cavity 11 can be closed again by the sliding door 40 for The transfer of workpieces, wherein the sliding door 40 is a transparent glass door, by setting the glass door, the staff can better check the status of the workpiece and the installation roller 20 .
  • the base plate 12 is provided with a moving track, and the installation roller 20 is slidably arranged on the moving track, and the moving track is used for docking connection with the external conveyor belt.
  • the installation frame 10 can be docked with the output port of the vacuum magnetron coating machine, so that the coated workpiece in the vacuum magnetron coating machine can be directly transported to the moving track and flow into the placement chamber 11 .
  • the shape of the installation drum 20 is a regular prism.
  • the installation drum 20 is a regular hexagonal prism, so the workpieces can be installed on the six sides of the installation drum, so that the number of workpieces installed on the installation drum 20 can be increased. Further improve the coating efficiency of the workpiece.
  • the installation drum includes a first installation disk 60 , a second installation disk 70 and a plurality of installation cylinders 80 , the first installation disk 60 and the second installation cylinder
  • the discs 70 are arranged at intervals along the up and down direction, and the two ends of the plurality of installation cylinders 80 are respectively connected to the facing walls of the first installation disc 60 and the second installation disc 70 , and the outer surfaces of the installation cylinders 80
  • the surface is used to mount the workpiece, said mounting cylinder 80 being able to rotate about its own axis.
  • the entire outer circumference of the mounting cylinder 80 is used for mounting workpieces, more workpieces can be carried in a circulation process, thereby improving the circulation efficiency of the workpieces.
  • the workpiece transfer device for a vacuum magnetron sputtering coating machine also includes a rotating shaft 100 equal to the number of the mounting cylinder 80, and the two ends of the rotating shaft 100 are connected to the first mounting plate 60 respectively.
  • the wall facing the second mounting plate 70 is connected, and the rotating shafts 100 are inserted one by one at the shaft center of the mounting cylinder 80, and the rotating shafts 100 can rotate around their own axes, so that
  • the workpiece can be installed on the outer peripheral wall of the installation cylinder 80 in a rotating manner, and the second installation disk 70 can also be driven to rotate on its own axis by setting the driver 90, so that the staff can
  • the workpiece can be easily disassembled and assembled through the rotation of the second mounting plate 70 and the mounting cylinder 80, which improves the efficiency.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

一种用于真空磁控溅射镀膜机的工件转移装置，用于真空磁控溅射镀膜机的工件转移装置包括安装框（10），所述安装框（10）内具有放置腔（11），所述放置腔（11）内设置有至少一个安装滚筒（20），所述安装滚筒（20）呈中空，所述安装滚筒（20）的外表面和内表面均用于固定工件，所述用于真空磁控溅射镀膜机的工件转移装置还包括多个万向轮（30），多个所述万向轮（30）均设置在所述安装框的底部。该用于真空磁控溅射镀膜机能够十分方便工件的转运，进而提升效率。

Description

用于真空磁控溅射镀膜机的工件转移装置 技术领域
本发明涉及磁控镀膜领域，尤其涉及一种用于真空磁控溅射镀膜机的工件转移装置。
背景技术
在真空磁控镀膜工艺中，针对较为大型的工件，一般是在工件清洗后，采用人工搬运的方式直接送入真空室，或者是先通过人工搬运的方式送入工件架，再由工件架通过传动辊送入真空室。该方式使得工件镀膜的工艺线生产效率低，工人劳动强度大，人力资源投资也高，同时，该方式的输送过程中，工件容易被污染，降低工件在前序清洗机中的清洗结果，从而影响产品质量。
发明内容
本发明的主要目的是提供一种用于真空磁控溅射镀膜机的工件转移装置，旨在解决上述技术问题。
为实现上述目的，本发明提出的一种用于真空磁控溅射镀膜机的工件转移装置包括安装框，所述安装框内具有放置腔，所述放置腔内设置有至少一个安装滚筒，所述安装滚筒呈中空，所述安装滚筒的外表面和内表面均用于固定工件，所述用于真空磁控溅射镀膜机的工件转移装置还包括多个万向轮，多个所述万向轮均设置在所述安装框的底部。
在一实施例中，所述安装框包括底板、外框以及顶板，所述底板和所述顶板相对设置，所述外框的两端分别环绕所述底板和所述顶板的外缘连接以围成所述放置腔。
在一实施例中，所述外框为矩形框，所述外框包括首尾连接的第一框体、第二框体、第三框体以及第四框体，所述第一框体和所述第三框体相对设置，所述第二框体和所述第四框体相对设置。
在一实施例中，所述第一框体和所述第三框体均嵌设有铝塑板以封闭所述第一框体和所述第三框体。
在一实施例中，所述第二框体和所述第四框体上均设有至少两个推拉门，所述第二框体和所述第四框体的底部和顶部均设有滑轨，所述推拉门的上下两端均与所述滑轨滑动连接。
在一实施例中，所述推拉门为透明玻璃门。
在一实施例中，所述底板上设置有移动轨道，所述安装滚筒滑动设置在所述移动轨道上，所述移动轨道用于与外部传送带对接连接。
在一实施例中，所述安装滚筒的形状为正棱柱。
在一实施例中，所述安装滚筒包括第一安装盘、第二安装盘以及多个安装筒，所述第一安装盘和所述第二安装盘沿上下方向间隔设置，多个所述安装筒的两端分别与所述第一安装盘和所述第二安装盘的相面对的壁面连接，所述安装筒的外表面用于安装工件，所述安装筒能够饶其自身轴线旋转。
在一实施例中，所述用于真空磁控溅射镀膜机的工件转移装置还包括与所述安装筒的数量相等的旋转轴，所述旋转轴的两端分别与所述第一安装盘和所述第二安装盘相面对的壁面连接，所述旋转轴一一对应地插装在所述安装筒的轴心处，所述旋转轴能够绕其自身轴线旋转。
本发明的技术方案中，工件转移装置包括安装框，所述安装框内具有放置腔，所述放置腔内设置有至少一个安装滚筒，所述安装滚筒呈中空，所述安装滚筒的外表面和内表面均用于固定工件，所述用于真空磁控溅射镀膜机的工件转移装置还包括多个万向轮，多个所述万向轮均设置在所述安装框的底部，因此在工件镀膜后的转运或将工件送至镀膜腔时，均可将工件固定在安装滚筒上，再将安装滚筒设于放置腔内，从而可通过万向轮带动安装框进行移动，方便工件的转运，进而提升效率。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图示出的结构获得其他的 附图。
图1为本发明实施例的用于真空磁控溅射镀膜机的工件转移装置的结构示意图；
图2为本发明实施例的安装滚筒的结构示意图。
附图标号说明：10、安装框；11、放置腔；12、底板；13、外框；131、第一框体；132、第二框体；133、第三框体；134、第四框体；14、顶板；20、安装滚筒；30、万向轮；40、推拉门；50、滑轨；60、第一安装盘；70、第二安装盘；80、安装筒；90、驱动件；100、旋转轴。
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
需要说明，本发明实施例中所有方向性指示(诸如上、下、左、右、前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
另外，在本发明中如涉及“第一”、“第二”等的描述仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本发明的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
并且，本发明各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本发明要求的保护范围之内。
本发明提供一种用于真空磁控溅射镀膜机的工件转移装置。
如图1所示，本发明实施例提供的用于真空磁控溅射镀膜机的工件转移装置包括安装框10，所述安装框10内具有放置腔11，所述放置腔11内设置有至少一个安装滚筒20，所述安装滚筒20呈中空，所述安装滚筒20的外表面和内表面均用于固定工件，所述用于真空磁控溅射镀膜机的工件转移装置还包括多个万向轮30，多个所述万向轮30均设置在所述安装框10的底部。
在本实施例中，工件转移装置包括安装框10，所述安装框10内具有放置腔11，所述放置腔11内设置有至少一个安装滚筒20，所述安装滚筒20呈中空，所述安装滚筒20的外表面和内表面均用于固定工件，所述用于真空磁控溅射镀膜机的工件转移装置还包括多个万向轮30，多个所述万向轮30均设置在所述安装框10的底部，因此在工件镀膜后的转运或将工件送至镀膜腔时，均可将工件固定在安装滚筒20上，再将安装滚筒20设于放置腔11内，从而可通过万向轮30带动安装框10进行移动，方便工件的转运，进而提升效率。
其中，所述安装框10包括底板12、外框13以及顶板14，所述底板12和所述顶板14相对设置，所述外框13的两端分别环绕所述底板12和所述顶板14的外缘连接以围成所述放置腔11。在本实施例中，通过将底板12、外框13和顶板14围成放置腔11，使得放置腔11内可以放置至少一个安装滚筒20，且围成的放置腔11可以有效阻挡外界灰尘的干扰，从而提升产品质量。
进一步地，所述外框13包括首尾连接的第一框体131、第二框体132、第三框体133以及第四框体134，所述第一框体131和所述第三框体133相对设置，所述第二框体132和所述第四框体134相对设置。所述第一框体131和所述第三框体133均嵌设有铝塑板以封闭所述第一框体131和所述第三框体133，并且底板12也可以通过铝塑板进行封闭。
另外，所述第二框体132和所述第四框体134上均设有至少两个推拉门40，所述第二框体132和所述第四框体134的底部和顶部均设有滑轨50，所述推拉门40的上下两端均与所述滑轨50滑动连接。在本实施例中，可以通过推拉门40的滑动，而露出放置腔11，使得安装滚筒20易于放置于放置腔11中，并且在放置后可以通过推拉门40再次将放置腔11进行封闭以进行工件的转运，其中，所述推拉门40为透明玻璃门，通过设置玻璃门可以使得工作人员可以更好地对工件状态和安装滚筒20进行查看。
所述底板12上设置有移动轨道，所述安装滚筒20滑动设置在所述移动轨 道上，所述移动轨道用于与外部传送带对接连接。在本实施例中，可以将安装框10与真空磁控镀膜机的输出口进行对接，使得在真空磁控镀膜机中镀膜完成后的工件可以直接输送至移动轨道上并流入放置腔11中。
在上述实施例中，所述安装滚筒20的形状为正棱柱，优选地，安装滚筒20为正六棱柱，因而安装筒的六个侧面均可安装工件，从而能够提升安装滚筒20的工件安装数量，进一步提升工件的镀膜效率。
进一步地，请参考图2，在一实施例中，所述安装滚筒包括第一安装盘60、第二安装盘70以及多个安装筒80，所述第一安装盘60和所述第二安装盘70沿上下方向间隔设置，多个所述安装筒80的两端分别与所述第一安装盘60和所述第二安装盘70的相面对的壁面连接，所述安装筒80的外表面用于安装工件，所述安装筒80能够饶其自身轴线旋转。在本实施例中，由于安装筒80的整个外圆周均用于安装工件，使得在一次流转过程中能够承载更多工件，进而提升工件的流转效率。
同时，所述用于真空磁控溅射镀膜机的工件转移装置还包括与所述安装筒80的数量相等的旋转轴100，所述旋转轴100的两端分别与所述第一安装盘60和所述第二安装盘70相面对的壁面连接，所述旋转轴100一一对应地插装在所述安装筒80的轴心处，所述旋转轴100能够绕其自身轴线旋转，使得在通过安装筒80安装工件时，可以通过旋转的方式在安装筒80的外周壁上对工件进行安装，并且还可以通过设置驱动件90驱动第二安装盘70饶其自身轴线旋转，使得工作人员可以通过第二安装盘70和安装筒80的旋转即可十分简便地对工件进行拆装，提升了效率。
以上所述仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是在本发明的构思下，利用本发明说明书及附图内容所作的等效结构变换，或直接/间接运用在其他相关的技术领域均包括在本发明的专利保护范围内。

Claims (10)

  1. 一种用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述用于真空磁控溅射镀膜机的工件转移装置包括安装框，所述安装框内具有放置腔，所述放置腔内设置有至少一个安装滚筒，所述安装滚筒呈中空，所述安装滚筒的外表面和内表面均用于固定工件，所述用于真空磁控溅射镀膜机的工件转移装置还包括多个万向轮，多个所述万向轮均设置在所述安装框的底部。
  2. 根据权利要求1所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述安装框包括底板、外框以及顶板，所述底板和所述顶板相对设置，所述外框的两端分别环绕所述底板和所述顶板的外缘连接以围成所述放置腔。
  3. 根据权利要求2所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述外框为矩形框，所述外框包括首尾连接的第一框体、第二框体、第三框体以及第四框体，所述第一框体和所述第三框体相对设置，所述第二框体和所述第四框体相对设置。
  4. 根据权利要求3所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述第一框体和所述第三框体均嵌设有铝塑板以封闭所述第一框体和所述第三框体。
  5. 根据权利要求3所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述第二框体和所述第四框体上均设有至少两个推拉门，所述第二框体和所述第四框体的底部和顶部均设有滑轨，所述推拉门的上下两端均与所述滑轨滑动连接。
  6. 根据权利要求5所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述推拉门为透明玻璃门。
  7. 根据权利要求2所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述底板上设置有移动轨道，所述安装滚筒滑动设置在所述移动轨道上，所述移动轨道用于与外部传送带对接连接。
  8. 根据权利要求1所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述安装滚筒的形状为正棱柱。
  9. 根据权利要求1-8中任一项所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述安装滚筒包括第一安装盘、第二安装盘以及多个安装筒，所述第一安装盘和所述第二安装盘沿上下方向间隔设置，多个所述安装筒的两端分别与所述第一安装盘和所述第二安装盘的相面对的壁面连接，所述安装筒的外表面用于安装工件，所述安装筒能够饶其自身轴线旋转。
  10. 根据权利要求9所述的用于真空磁控溅射镀膜机的工件转移装置，其特征在于，所述用于真空磁控溅射镀膜机的工件转移装置还包括与所述安装筒的数量相等的旋转轴，所述旋转轴的两端分别与所述第一安装盘和所述第二安装盘相面对的壁面连接，所述旋转轴一一对应地插装在所述安装筒的轴心处，所述旋转轴能够绕其自身轴线旋转。
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