WO2023013549A1 - キサンテン化合物、樹脂組成物、硬化物、硬化物の製造方法、有機el表示装置および表示装置 - Google Patents
キサンテン化合物、樹脂組成物、硬化物、硬化物の製造方法、有機el表示装置および表示装置 Download PDFInfo
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- WO2023013549A1 WO2023013549A1 PCT/JP2022/029310 JP2022029310W WO2023013549A1 WO 2023013549 A1 WO2023013549 A1 WO 2023013549A1 JP 2022029310 W JP2022029310 W JP 2022029310W WO 2023013549 A1 WO2023013549 A1 WO 2023013549A1
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- -1 Xanthene compound Chemical class 0.000 title claims abstract description 270
- QDLAGTHXVHQKRE-UHFFFAOYSA-N lichenxanthone Natural products COC1=CC(O)=C2C(=O)C3=C(C)C=C(OC)C=C3OC2=C1 QDLAGTHXVHQKRE-UHFFFAOYSA-N 0.000 title claims abstract description 146
- 239000011342 resin composition Substances 0.000 title claims description 124
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 140
- 229920005989 resin Polymers 0.000 claims description 89
- 239000011347 resin Substances 0.000 claims description 89
- 125000004432 carbon atom Chemical group C* 0.000 claims description 82
- 125000001424 substituent group Chemical group 0.000 claims description 81
- 125000003118 aryl group Chemical group 0.000 claims description 76
- 238000000034 method Methods 0.000 claims description 50
- 238000010521 absorption reaction Methods 0.000 claims description 45
- 239000000758 substrate Substances 0.000 claims description 38
- 239000002243 precursor Substances 0.000 claims description 36
- 229920001721 polyimide Polymers 0.000 claims description 33
- 239000004642 Polyimide Substances 0.000 claims description 32
- 239000003086 colorant Substances 0.000 claims description 30
- 150000002891 organic anions Chemical class 0.000 claims description 30
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 29
- 150000002500 ions Chemical class 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 26
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 22
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 20
- 125000000217 alkyl group Chemical group 0.000 claims description 18
- 229920002577 polybenzoxazole Polymers 0.000 claims description 16
- 125000001931 aliphatic group Chemical group 0.000 claims description 15
- 230000007935 neutral effect Effects 0.000 claims description 14
- 239000004962 Polyamide-imide Substances 0.000 claims description 12
- 125000005843 halogen group Chemical group 0.000 claims description 12
- 229920002312 polyamide-imide Polymers 0.000 claims description 12
- 125000003545 alkoxy group Chemical group 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 9
- 229920001577 copolymer Polymers 0.000 claims description 7
- 125000002091 cationic group Chemical group 0.000 claims description 6
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 6
- 238000010292 electrical insulation Methods 0.000 claims description 6
- 125000001246 bromo group Chemical group Br* 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 4
- 150000003732 xanthenes Chemical class 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 116
- 239000000975 dye Substances 0.000 description 112
- 239000000047 product Substances 0.000 description 86
- 239000010410 layer Substances 0.000 description 65
- 230000015572 biosynthetic process Effects 0.000 description 46
- 238000003786 synthesis reaction Methods 0.000 description 46
- 238000006243 chemical reaction Methods 0.000 description 44
- 239000002904 solvent Substances 0.000 description 38
- 238000010438 heat treatment Methods 0.000 description 31
- 239000000126 substance Substances 0.000 description 31
- 238000004895 liquid chromatography mass spectrometry Methods 0.000 description 30
- 239000000243 solution Substances 0.000 description 30
- 230000035945 sensitivity Effects 0.000 description 28
- 239000000980 acid dye Substances 0.000 description 27
- 239000000049 pigment Substances 0.000 description 26
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 24
- 239000002253 acid Substances 0.000 description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- 125000004433 nitrogen atom Chemical group N* 0.000 description 21
- 239000000981 basic dye Substances 0.000 description 20
- 238000000576 coating method Methods 0.000 description 20
- 239000003999 initiator Substances 0.000 description 20
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 19
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 18
- 239000011248 coating agent Substances 0.000 description 18
- 238000001723 curing Methods 0.000 description 18
- 238000001914 filtration Methods 0.000 description 18
- 230000001965 increasing effect Effects 0.000 description 18
- 238000004458 analytical method Methods 0.000 description 16
- 150000002430 hydrocarbons Chemical group 0.000 description 16
- 150000002892 organic cations Chemical class 0.000 description 16
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 15
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 15
- 239000000203 mixture Substances 0.000 description 15
- 239000002244 precipitate Substances 0.000 description 14
- 239000002966 varnish Substances 0.000 description 14
- GJCOSYZMQJWQCA-UHFFFAOYSA-N 9H-xanthene Chemical compound C1=CC=C2CC3=CC=CC=C3OC2=C1 GJCOSYZMQJWQCA-UHFFFAOYSA-N 0.000 description 13
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 13
- 230000002378 acidificating effect Effects 0.000 description 13
- 239000003431 cross linking reagent Substances 0.000 description 13
- SJEYSFABYSGQBG-UHFFFAOYSA-M Patent blue Chemical compound [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C(=CC(=CC=1)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](CC)CC)C=C1 SJEYSFABYSGQBG-UHFFFAOYSA-M 0.000 description 12
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 12
- 125000000962 organic group Chemical group 0.000 description 12
- 239000012860 organic pigment Substances 0.000 description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 10
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 10
- 238000003860 storage Methods 0.000 description 10
- 238000000411 transmission spectrum Methods 0.000 description 10
- 238000002834 transmittance Methods 0.000 description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 9
- 230000008859 change Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 9
- 239000004094 surface-active agent Substances 0.000 description 9
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 8
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 8
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 8
- 150000004056 anthraquinones Chemical class 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 230000007774 longterm Effects 0.000 description 8
- 125000001434 methanylylidene group Chemical group [H]C#[*] 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 150000002923 oximes Chemical class 0.000 description 8
- 229920005575 poly(amic acid) Polymers 0.000 description 8
- 150000003628 tricarboxylic acids Chemical class 0.000 description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 7
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 7
- 238000002835 absorbance Methods 0.000 description 7
- 239000002585 base Substances 0.000 description 7
- 239000003795 chemical substances by application Substances 0.000 description 7
- 238000011161 development Methods 0.000 description 7
- 150000002148 esters Chemical class 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 150000001450 anions Chemical class 0.000 description 6
- DMBHHRLKUKUOEG-UHFFFAOYSA-N diphenylamine Chemical compound C=1C=CC=CC=1NC1=CC=CC=C1 DMBHHRLKUKUOEG-UHFFFAOYSA-N 0.000 description 6
- 239000002270 dispersing agent Substances 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 229940116333 ethyl lactate Drugs 0.000 description 6
- 238000005562 fading Methods 0.000 description 6
- 239000010954 inorganic particle Substances 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical group [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 5
- 238000010943 off-gassing Methods 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 229910000027 potassium carbonate Inorganic materials 0.000 description 5
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 5
- 150000003839 salts Chemical class 0.000 description 5
- 125000000542 sulfonic acid group Chemical group 0.000 description 5
- IMPPGHMHELILKG-UHFFFAOYSA-N 4-ethoxyaniline Chemical compound CCOC1=CC=C(N)C=C1 IMPPGHMHELILKG-UHFFFAOYSA-N 0.000 description 4
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 125000000129 anionic group Chemical group 0.000 description 4
- 150000001768 cations Chemical class 0.000 description 4
- 239000006103 coloring component Substances 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 230000018044 dehydration Effects 0.000 description 4
- 238000006297 dehydration reaction Methods 0.000 description 4
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 4
- 239000000982 direct dye Substances 0.000 description 4
- 238000005401 electroluminescence Methods 0.000 description 4
- 230000002708 enhancing effect Effects 0.000 description 4
- 125000005842 heteroatom Chemical group 0.000 description 4
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000015654 memory Effects 0.000 description 4
- 125000004430 oxygen atom Chemical group O* 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 4
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 4
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 4
- 125000001834 xanthenyl group Chemical group C1=CC=CC=2OC3=CC=CC=C3C(C12)* 0.000 description 4
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 3
- VSIIHWOJPSSIDI-UHFFFAOYSA-N 1-ethoxy-4-iodobenzene Chemical compound CCOC1=CC=C(I)C=C1 VSIIHWOJPSSIDI-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 3
- BCHZICNRHXRCHY-UHFFFAOYSA-N 2h-oxazine Chemical compound N1OC=CC=C1 BCHZICNRHXRCHY-UHFFFAOYSA-N 0.000 description 3
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 3
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 3
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical class CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 3
- 229910006069 SO3H Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 150000001449 anionic compounds Chemical class 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 150000001721 carbon Chemical group 0.000 description 3
- 239000006229 carbon black Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 125000006159 dianhydride group Chemical group 0.000 description 3
- 239000012954 diazonium Substances 0.000 description 3
- 239000000986 disperse dye Substances 0.000 description 3
- 239000012153 distilled water Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- RMBPEFMHABBEKP-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2C3=C[CH]C=CC3=CC2=C1 RMBPEFMHABBEKP-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- KWIUHFFTVRNATP-UHFFFAOYSA-N glycine betaine Chemical compound C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 239000001023 inorganic pigment Substances 0.000 description 3
- 238000005342 ion exchange Methods 0.000 description 3
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 3
- 150000002576 ketones Chemical class 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 3
- 229920001778 nylon Polymers 0.000 description 3
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 238000010526 radical polymerization reaction Methods 0.000 description 3
- 150000003254 radicals Chemical class 0.000 description 3
- 239000000985 reactive dye Substances 0.000 description 3
- 238000006798 ring closing metathesis reaction Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- KVCGISUBCHHTDD-UHFFFAOYSA-M sodium;4-methylbenzenesulfonate Chemical compound [Na+].CC1=CC=C(S([O-])(=O)=O)C=C1 KVCGISUBCHHTDD-UHFFFAOYSA-M 0.000 description 3
- 241000894007 species Species 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 3
- 238000012800 visualization Methods 0.000 description 3
- VJYGFSGAAOVTLC-UHFFFAOYSA-N 1,1-dioxospiro[2,1$l^{6}-benzoxathiole-3,9'-xanthene]-3',6'-diol Chemical class O1S(=O)(=O)C2=CC=CC=C2C21C1=CC=C(O)C=C1OC1=CC(O)=CC=C21 VJYGFSGAAOVTLC-UHFFFAOYSA-N 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 2
- UFFBMTHBGFGIHF-UHFFFAOYSA-N 2,6-dimethylaniline Chemical compound CC1=CC=CC(C)=C1N UFFBMTHBGFGIHF-UHFFFAOYSA-N 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 2
- PTTPXKJBFFKCEK-UHFFFAOYSA-N 2-Methyl-4-heptanone Chemical compound CC(C)CC(=O)CC(C)C PTTPXKJBFFKCEK-UHFFFAOYSA-N 0.000 description 2
- WMYINDVYGQKYMI-UHFFFAOYSA-N 2-[2,2-bis(hydroxymethyl)butoxymethyl]-2-ethylpropane-1,3-diol Chemical compound CCC(CO)(CO)COCC(CC)(CO)CO WMYINDVYGQKYMI-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- PTJWCLYPVFJWMP-UHFFFAOYSA-N 2-[[3-hydroxy-2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)COCC(CO)(CO)CO PTJWCLYPVFJWMP-UHFFFAOYSA-N 0.000 description 2
- MHOFGBJTSNWTDT-UHFFFAOYSA-M 2-[n-ethyl-4-[(6-methoxy-3-methyl-1,3-benzothiazol-3-ium-2-yl)diazenyl]anilino]ethanol;methyl sulfate Chemical compound COS([O-])(=O)=O.C1=CC(N(CCO)CC)=CC=C1N=NC1=[N+](C)C2=CC=C(OC)C=C2S1 MHOFGBJTSNWTDT-UHFFFAOYSA-M 0.000 description 2
- MSTZGVRUOMBULC-UHFFFAOYSA-N 2-amino-4-[2-(3-amino-4-hydroxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phenol Chemical compound C1=C(O)C(N)=CC(C(C=2C=C(N)C(O)=CC=2)(C(F)(F)F)C(F)(F)F)=C1 MSTZGVRUOMBULC-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- GWHLJVMSZRKEAQ-UHFFFAOYSA-N 3-(2,3-dicarboxyphenyl)phthalic acid Chemical compound OC(=O)C1=CC=CC(C=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O GWHLJVMSZRKEAQ-UHFFFAOYSA-N 0.000 description 2
- TYKLCAKICHXQNE-UHFFFAOYSA-N 3-[(2,3-dicarboxyphenyl)methyl]phthalic acid Chemical compound OC(=O)C1=CC=CC(CC=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O TYKLCAKICHXQNE-UHFFFAOYSA-N 0.000 description 2
- UCFMKTNJZCYBBJ-UHFFFAOYSA-N 3-[1-(2,3-dicarboxyphenyl)ethyl]phthalic acid Chemical compound C=1C=CC(C(O)=O)=C(C(O)=O)C=1C(C)C1=CC=CC(C(O)=O)=C1C(O)=O UCFMKTNJZCYBBJ-UHFFFAOYSA-N 0.000 description 2
- LVYXPOCADCXMLP-UHFFFAOYSA-N 3-butoxy-n,n-dimethylpropanamide Chemical compound CCCCOCCC(=O)N(C)C LVYXPOCADCXMLP-UHFFFAOYSA-N 0.000 description 2
- LBVMWHCOFMFPEG-UHFFFAOYSA-N 3-methoxy-n,n-dimethylpropanamide Chemical compound COCCC(=O)N(C)C LBVMWHCOFMFPEG-UHFFFAOYSA-N 0.000 description 2
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 2
- VWIIJDNADIEEDB-UHFFFAOYSA-N 3-methyl-1,3-oxazolidin-2-one Chemical class CN1CCOC1=O VWIIJDNADIEEDB-UHFFFAOYSA-N 0.000 description 2
- IHZXTIBMKNSJCJ-UHFFFAOYSA-N 3-{[(4-{[4-(dimethylamino)phenyl](4-{ethyl[(3-sulfophenyl)methyl]amino}phenyl)methylidene}cyclohexa-2,5-dien-1-ylidene)(ethyl)azaniumyl]methyl}benzene-1-sulfonate Chemical compound C=1C=C(C(=C2C=CC(C=C2)=[N+](C)C)C=2C=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S(O)(=O)=O)=C1 IHZXTIBMKNSJCJ-UHFFFAOYSA-N 0.000 description 2
- IJJNNSUCZDJDLP-UHFFFAOYSA-N 4-[1-(3,4-dicarboxyphenyl)ethyl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1C(C)C1=CC=C(C(O)=O)C(C(O)=O)=C1 IJJNNSUCZDJDLP-UHFFFAOYSA-N 0.000 description 2
- APXJLYIVOFARRM-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(C(O)=O)C(C(O)=O)=C1 APXJLYIVOFARRM-UHFFFAOYSA-N 0.000 description 2
- JCRRFJIVUPSNTA-UHFFFAOYSA-N 4-[4-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC(C=C1)=CC=C1OC1=CC=C(N)C=C1 JCRRFJIVUPSNTA-UHFFFAOYSA-N 0.000 description 2
- OLIGPHACAFRDEN-UHFFFAOYSA-N 4-naphthoquinonediazidesulfonyl group Chemical group [N-]=[N+]=C1C=C(C2=C(C=CC=C2)C1=O)S(=O)=O OLIGPHACAFRDEN-UHFFFAOYSA-N 0.000 description 2
- FVCSARBUZVPSQF-UHFFFAOYSA-N 5-(2,4-dioxooxolan-3-yl)-7-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C(C(OC2=O)=O)C2C(C)=CC1C1C(=O)COC1=O FVCSARBUZVPSQF-UHFFFAOYSA-N 0.000 description 2
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 description 2
- KHLBYJOGKPIERQ-UHFFFAOYSA-N 5-naphthoquinonediazidesulfonyl group Chemical group [N-]=[N+]=C1C=CC2=C(C=CC=C2S(=O)=O)C1=O KHLBYJOGKPIERQ-UHFFFAOYSA-N 0.000 description 2
- OZJPLYNZGCXSJM-UHFFFAOYSA-N 5-valerolactone Chemical compound O=C1CCCCO1 OZJPLYNZGCXSJM-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- QOSSAOTZNIDXMA-UHFFFAOYSA-N Dicylcohexylcarbodiimide Chemical compound C1CCCCC1N=C=NC1CCCCC1 QOSSAOTZNIDXMA-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 125000004849 alkoxymethyl group Chemical group 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 125000003277 amino group Chemical group 0.000 description 2
- 125000004104 aryloxy group Chemical group 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- QMKYBPDZANOJGF-UHFFFAOYSA-N benzene-1,3,5-tricarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=CC(C(O)=O)=C1 QMKYBPDZANOJGF-UHFFFAOYSA-N 0.000 description 2
- 239000001045 blue dye Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- XSIFPSYPOVKYCO-UHFFFAOYSA-N butyl benzoate Chemical compound CCCCOC(=O)C1=CC=CC=C1 XSIFPSYPOVKYCO-UHFFFAOYSA-N 0.000 description 2
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000002738 chelating agent Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 125000004427 diamine group Chemical group 0.000 description 2
- 150000001989 diazonium salts Chemical class 0.000 description 2
- 150000005690 diesters Chemical class 0.000 description 2
- URSLCTBXQMKCFE-UHFFFAOYSA-N dihydrogenborate Chemical compound OB(O)[O-] URSLCTBXQMKCFE-UHFFFAOYSA-N 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- 229960002050 hydrofluoric acid Drugs 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 150000007976 iminium ions Chemical class 0.000 description 2
- 238000004255 ion exchange chromatography Methods 0.000 description 2
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropyl acetate Chemical compound CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- GXMIHVHJTLPVKL-UHFFFAOYSA-N n,n,2-trimethylpropanamide Chemical compound CC(C)C(=O)N(C)C GXMIHVHJTLPVKL-UHFFFAOYSA-N 0.000 description 2
- OBKARQMATMRWQZ-UHFFFAOYSA-N naphthalene-1,2,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=CC2=C(C(O)=O)C(C(=O)O)=CC=C21 OBKARQMATMRWQZ-UHFFFAOYSA-N 0.000 description 2
- DOBFTMLCEYUAQC-UHFFFAOYSA-N naphthalene-2,3,6,7-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=C2C=C(C(O)=O)C(C(=O)O)=CC2=C1 DOBFTMLCEYUAQC-UHFFFAOYSA-N 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- RNVCVTLRINQCPJ-UHFFFAOYSA-N o-toluidine Chemical compound CC1=CC=CC=C1N RNVCVTLRINQCPJ-UHFFFAOYSA-N 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 125000003566 oxetanyl group Chemical group 0.000 description 2
- RZXMPPFPUUCRFN-UHFFFAOYSA-N p-toluidine Chemical compound CC1=CC=C(N)C=C1 RZXMPPFPUUCRFN-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 2
- 150000004714 phosphonium salts Chemical class 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 239000003504 photosensitizing agent Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- JRDBISOHUUQXHE-UHFFFAOYSA-N pyridine-2,3,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)N=C1C(O)=O JRDBISOHUUQXHE-UHFFFAOYSA-N 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 125000004151 quinonyl group Chemical group 0.000 description 2
- 239000001044 red dye Substances 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 2
- 125000001273 sulfonato group Chemical group [O-]S(*)(=O)=O 0.000 description 2
- YEOUFHBJWTZWCZ-UHFFFAOYSA-M sulforhodamine G Chemical compound [Na+].C=12C=C(C)C(NCC)=CC2=[O+]C=2C=C(NCC)C(C)=CC=2C=1C1=CC=C(S([O-])(=O)=O)C=C1S([O-])(=O)=O YEOUFHBJWTZWCZ-UHFFFAOYSA-M 0.000 description 2
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- URAYPUMNDPQOKB-UHFFFAOYSA-N triacetin Chemical compound CC(=O)OCC(OC(C)=O)COC(C)=O URAYPUMNDPQOKB-UHFFFAOYSA-N 0.000 description 2
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 2
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- 238000001291 vacuum drying Methods 0.000 description 2
- 239000001043 yellow dye Substances 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- GGAUUQHSCNMCAU-ZXZARUISSA-N (2s,3r)-butane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C[C@H](C(O)=O)[C@H](C(O)=O)CC(O)=O GGAUUQHSCNMCAU-ZXZARUISSA-N 0.000 description 1
- MCTQNEBFZMBRSQ-UHFFFAOYSA-N (3-amino-4-phenyldiazenylphenyl)azanium;chloride Chemical compound Cl.NC1=CC(N)=CC=C1N=NC1=CC=CC=C1 MCTQNEBFZMBRSQ-UHFFFAOYSA-N 0.000 description 1
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 description 1
- OWSKJORLRSWYGK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) propanoate Chemical compound CCC(=O)OCCC(C)(C)OC OWSKJORLRSWYGK-UHFFFAOYSA-N 0.000 description 1
- LTQBNYCMVZQRSD-UHFFFAOYSA-N (4-ethenylphenyl)-trimethoxysilane Chemical compound CO[Si](OC)(OC)C1=CC=C(C=C)C=C1 LTQBNYCMVZQRSD-UHFFFAOYSA-N 0.000 description 1
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 description 1
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 1
- BWKAYBPLDRWMCJ-UHFFFAOYSA-N 1,1-diethoxy-n,n-dimethylmethanamine Chemical compound CCOC(N(C)C)OCC BWKAYBPLDRWMCJ-UHFFFAOYSA-N 0.000 description 1
- ZOMLUNRKXJYKPD-UHFFFAOYSA-N 1,3,3-trimethyl-2-[2-(2-methylindol-3-ylidene)ethylidene]indole;hydrochloride Chemical compound [Cl-].C1=CC=C2C(C)(C)C(/C=C/C=3C4=CC=CC=C4NC=3C)=[N+](C)C2=C1 ZOMLUNRKXJYKPD-UHFFFAOYSA-N 0.000 description 1
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- QOSTVEDABRQTSU-UHFFFAOYSA-N 1,4-bis(methylamino)anthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C(NC)=CC=C2NC QOSTVEDABRQTSU-UHFFFAOYSA-N 0.000 description 1
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- WDQFELCEOPFLCZ-UHFFFAOYSA-N 1-(2-hydroxyethyl)pyrrolidin-2-one Chemical compound OCCN1CCCC1=O WDQFELCEOPFLCZ-UHFFFAOYSA-N 0.000 description 1
- HNAGHMKIPMKKBB-UHFFFAOYSA-N 1-benzylpyrrolidine-3-carboxamide Chemical compound C1C(C(=O)N)CCN1CC1=CC=CC=C1 HNAGHMKIPMKKBB-UHFFFAOYSA-N 0.000 description 1
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- VLCPISYURGTGLP-UHFFFAOYSA-N 1-iodo-3-methylbenzene Chemical compound CC1=CC=CC(I)=C1 VLCPISYURGTGLP-UHFFFAOYSA-N 0.000 description 1
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 1
- QAMCXJOYXRSXDU-UHFFFAOYSA-N 2,4-dimethoxy-n-[2-(1,3,3-trimethylindol-1-ium-2-yl)ethenyl]aniline;chloride Chemical compound [Cl-].COC1=CC(OC)=CC=C1NC=CC1=[N+](C)C2=CC=CC=C2C1(C)C QAMCXJOYXRSXDU-UHFFFAOYSA-N 0.000 description 1
- UONVFNLDGRWLKF-UHFFFAOYSA-N 2,5-diaminobenzoic acid Chemical compound NC1=CC=C(N)C(C(O)=O)=C1 UONVFNLDGRWLKF-UHFFFAOYSA-N 0.000 description 1
- KUMMBDBTERQYCG-UHFFFAOYSA-N 2,6-bis(hydroxymethyl)-4-methylphenol Chemical compound CC1=CC(CO)=C(O)C(CO)=C1 KUMMBDBTERQYCG-UHFFFAOYSA-N 0.000 description 1
- WMDZKDKPYCNCDZ-UHFFFAOYSA-N 2-(2-butoxypropoxy)propan-1-ol Chemical compound CCCCOC(C)COC(C)CO WMDZKDKPYCNCDZ-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- BJINVQNEBGOMCR-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethyl acetate Chemical compound COCCOCCOC(C)=O BJINVQNEBGOMCR-UHFFFAOYSA-N 0.000 description 1
- DJCYDDALXPHSHR-UHFFFAOYSA-N 2-(2-propoxyethoxy)ethanol Chemical compound CCCOCCOCCO DJCYDDALXPHSHR-UHFFFAOYSA-N 0.000 description 1
- XYVAYAJYLWYJJN-UHFFFAOYSA-N 2-(2-propoxypropoxy)propan-1-ol Chemical compound CCCOC(C)COC(C)CO XYVAYAJYLWYJJN-UHFFFAOYSA-N 0.000 description 1
- PUBNJSZGANKUGX-UHFFFAOYSA-N 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=C(C)C=C1 PUBNJSZGANKUGX-UHFFFAOYSA-N 0.000 description 1
- GOLSFPMYASLXJC-UHFFFAOYSA-N 2-(dimethylamino)ethyl acetate Chemical compound CN(C)CCOC(C)=O GOLSFPMYASLXJC-UHFFFAOYSA-N 0.000 description 1
- FWLHAQYOFMQTHQ-UHFFFAOYSA-N 2-N-[8-[[8-(4-aminoanilino)-10-phenylphenazin-10-ium-2-yl]amino]-10-phenylphenazin-10-ium-2-yl]-8-N,10-diphenylphenazin-10-ium-2,8-diamine hydroxy-oxido-dioxochromium Chemical compound O[Cr]([O-])(=O)=O.O[Cr]([O-])(=O)=O.O[Cr]([O-])(=O)=O.Nc1ccc(Nc2ccc3nc4ccc(Nc5ccc6nc7ccc(Nc8ccc9nc%10ccc(Nc%11ccccc%11)cc%10[n+](-c%10ccccc%10)c9c8)cc7[n+](-c7ccccc7)c6c5)cc4[n+](-c4ccccc4)c3c2)cc1 FWLHAQYOFMQTHQ-UHFFFAOYSA-N 0.000 description 1
- NXMFPYRNSNUSNW-UHFFFAOYSA-N 2-[(2-hydroxy-4,6-dimethylphenyl)-(4-hydroxyphenyl)methyl]-3,5-dimethylphenol Chemical compound OC1=CC(C)=CC(C)=C1C(C=1C(=CC(C)=CC=1C)O)C1=CC=C(O)C=C1 NXMFPYRNSNUSNW-UHFFFAOYSA-N 0.000 description 1
- NGNBDVOYPDDBFK-UHFFFAOYSA-N 2-[2,4-di(pentan-2-yl)phenoxy]acetyl chloride Chemical compound CCCC(C)C1=CC=C(OCC(Cl)=O)C(C(C)CCC)=C1 NGNBDVOYPDDBFK-UHFFFAOYSA-N 0.000 description 1
- FOLUJWPWRXHMLF-UHFFFAOYSA-N 2-[2-(2-carboxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]benzoic acid Chemical compound OC(=O)C1=CC=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=CC=C1C(O)=O FOLUJWPWRXHMLF-UHFFFAOYSA-N 0.000 description 1
- WFSMVVDJSNMRAR-UHFFFAOYSA-N 2-[2-(2-ethoxyethoxy)ethoxy]ethanol Chemical compound CCOCCOCCOCCO WFSMVVDJSNMRAR-UHFFFAOYSA-N 0.000 description 1
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 description 1
- BXVXPASMKWYBFD-UHFFFAOYSA-N 2-[[2-hydroxy-3-(hydroxymethyl)-5-methylphenyl]methyl]-6-(hydroxymethyl)-4-methylphenol Chemical compound CC1=CC(CO)=C(O)C(CC=2C(=C(CO)C=C(C)C=2)O)=C1 BXVXPASMKWYBFD-UHFFFAOYSA-N 0.000 description 1
- QCBIZOJTQQOZOV-UHFFFAOYSA-N 2-[bis(4-hydroxyphenyl)methyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C(=CC=CC=1)O)C1=CC=C(O)C=C1 QCBIZOJTQQOZOV-UHFFFAOYSA-N 0.000 description 1
- IPMAGDHPWCPGAY-UHFFFAOYSA-N 2-amino-5-[4-amino-5-hydroxy-2-(trifluoromethyl)phenyl]-4-(trifluoromethyl)phenol Chemical compound C1=C(O)C(N)=CC(C(F)(F)F)=C1C1=CC(O)=C(N)C=C1C(F)(F)F IPMAGDHPWCPGAY-UHFFFAOYSA-N 0.000 description 1
- QLIBJPGWWSHWBF-UHFFFAOYSA-N 2-aminoethyl methacrylate Chemical compound CC(=C)C(=O)OCCN QLIBJPGWWSHWBF-UHFFFAOYSA-N 0.000 description 1
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- AFIAIUIEAKCWCD-UHFFFAOYSA-N 2-cyclohexyl-4-[(5-cyclohexyl-4-hydroxy-2-methylphenyl)-(2-hydroxyphenyl)methyl]-5-methylphenol Chemical compound CC1=CC(O)=C(C2CCCCC2)C=C1C(C=1C(=CC(O)=C(C2CCCCC2)C=1)C)C1=CC=CC=C1O AFIAIUIEAKCWCD-UHFFFAOYSA-N 0.000 description 1
- ZRNFYZSSGGSGKL-UHFFFAOYSA-N 2-cyclohexyl-4-[(5-cyclohexyl-4-hydroxy-2-methylphenyl)-(4-hydroxy-3-methoxyphenyl)methyl]-5-methylphenol Chemical compound C1=C(O)C(OC)=CC(C(C=2C(=CC(O)=C(C3CCCCC3)C=2)C)C=2C(=CC(O)=C(C3CCCCC3)C=2)C)=C1 ZRNFYZSSGGSGKL-UHFFFAOYSA-N 0.000 description 1
- TUBNHXBTFDDYPI-UHFFFAOYSA-N 2-cyclohexyl-4-[(5-cyclohexyl-4-hydroxy-2-methylphenyl)-(4-hydroxyphenyl)methyl]-5-methylphenol Chemical compound CC1=CC(O)=C(C2CCCCC2)C=C1C(C=1C(=CC(O)=C(C2CCCCC2)C=1)C)C1=CC=C(O)C=C1 TUBNHXBTFDDYPI-UHFFFAOYSA-N 0.000 description 1
- BFSVOASYOCHEOV-UHFFFAOYSA-N 2-diethylaminoethanol Chemical compound CCN(CC)CCO BFSVOASYOCHEOV-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 1
- DCBJXJOKADGNAA-UHFFFAOYSA-N 2-methyl-1-[6-(2-methyl-2-morpholin-4-ylpropanoyl)-9-octylcarbazol-3-yl]-2-morpholin-4-ylpropan-1-one Chemical compound C=1C=C2N(CCCCCCCC)C3=CC=C(C(=O)C(C)(C)N4CCOCC4)C=C3C2=CC=1C(=O)C(C)(C)N1CCOCC1 DCBJXJOKADGNAA-UHFFFAOYSA-N 0.000 description 1
- QWGRWMMWNDWRQN-UHFFFAOYSA-N 2-methylpropane-1,3-diol Chemical compound OCC(C)CO QWGRWMMWNDWRQN-UHFFFAOYSA-N 0.000 description 1
- CFBYEGUGFPZCNF-UHFFFAOYSA-N 2-nitroanisole Chemical compound COC1=CC=CC=C1[N+]([O-])=O CFBYEGUGFPZCNF-UHFFFAOYSA-N 0.000 description 1
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- NUIURNJTPRWVAP-UHFFFAOYSA-N 3,3'-Dimethylbenzidine Chemical group C1=C(N)C(C)=CC(C=2C=C(C)C(N)=CC=2)=C1 NUIURNJTPRWVAP-UHFFFAOYSA-N 0.000 description 1
- HEMGYNNCNNODNX-UHFFFAOYSA-N 3,4-diaminobenzoic acid Chemical compound NC1=CC=C(C(O)=O)C=C1N HEMGYNNCNNODNX-UHFFFAOYSA-N 0.000 description 1
- UENRXLSRMCSUSN-UHFFFAOYSA-N 3,5-diaminobenzoic acid Chemical compound NC1=CC(N)=CC(C(O)=O)=C1 UENRXLSRMCSUSN-UHFFFAOYSA-N 0.000 description 1
- OLQWMCSSZKNOLQ-UHFFFAOYSA-N 3-(2,5-dioxooxolan-3-yl)oxolane-2,5-dione Chemical compound O=C1OC(=O)CC1C1C(=O)OC(=O)C1 OLQWMCSSZKNOLQ-UHFFFAOYSA-N 0.000 description 1
- NBAUUNCGSMAPFM-UHFFFAOYSA-N 3-(3,4-dicarboxyphenyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C1=CC=CC(C(O)=O)=C1C(O)=O NBAUUNCGSMAPFM-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 1
- FGWQCROGAHMWSU-UHFFFAOYSA-N 3-[(4-aminophenyl)methyl]aniline Chemical compound C1=CC(N)=CC=C1CC1=CC=CC(N)=C1 FGWQCROGAHMWSU-UHFFFAOYSA-N 0.000 description 1
- DFSUKONUQMHUKQ-UHFFFAOYSA-N 3-[2-(2,3-dicarboxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phthalic acid Chemical compound OC(=O)C1=CC=CC(C(C=2C(=C(C(O)=O)C=CC=2)C(O)=O)(C(F)(F)F)C(F)(F)F)=C1C(O)=O DFSUKONUQMHUKQ-UHFFFAOYSA-N 0.000 description 1
- PAHZZOIHRHCHTH-UHFFFAOYSA-N 3-[2-(2,3-dicarboxyphenyl)propan-2-yl]phthalic acid Chemical compound C=1C=CC(C(O)=O)=C(C(O)=O)C=1C(C)(C)C1=CC=CC(C(O)=O)=C1C(O)=O PAHZZOIHRHCHTH-UHFFFAOYSA-N 0.000 description 1
- GPXCORHXFPYJEH-UHFFFAOYSA-N 3-[[3-aminopropyl(dimethyl)silyl]oxy-dimethylsilyl]propan-1-amine Chemical compound NCCC[Si](C)(C)O[Si](C)(C)CCCN GPXCORHXFPYJEH-UHFFFAOYSA-N 0.000 description 1
- CWLKGDAVCFYWJK-UHFFFAOYSA-N 3-aminophenol Chemical compound NC1=CC=CC(O)=C1 CWLKGDAVCFYWJK-UHFFFAOYSA-N 0.000 description 1
- 229940018563 3-aminophenol Drugs 0.000 description 1
- KTFJPMPXSYUEIP-UHFFFAOYSA-N 3-benzoylphthalic acid Chemical compound OC(=O)C1=CC=CC(C(=O)C=2C=CC=CC=2)=C1C(O)=O KTFJPMPXSYUEIP-UHFFFAOYSA-N 0.000 description 1
- NTKBNCABAMQDIG-UHFFFAOYSA-N 3-butoxypropan-1-ol Chemical compound CCCCOCCCO NTKBNCABAMQDIG-UHFFFAOYSA-N 0.000 description 1
- LMIOYAVXLAOXJI-UHFFFAOYSA-N 3-ethyl-3-[[4-[(3-ethyloxetan-3-yl)methoxymethyl]phenyl]methoxymethyl]oxetane Chemical compound C=1C=C(COCC2(CC)COC2)C=CC=1COCC1(CC)COC1 LMIOYAVXLAOXJI-UHFFFAOYSA-N 0.000 description 1
- WHNPOQXWAMXPTA-UHFFFAOYSA-N 3-methylbut-2-enamide Chemical compound CC(C)=CC(N)=O WHNPOQXWAMXPTA-UHFFFAOYSA-N 0.000 description 1
- NXTNASSYJUXJDV-UHFFFAOYSA-N 3-nitrobenzoyl chloride Chemical compound [O-][N+](=O)C1=CC=CC(C(Cl)=O)=C1 NXTNASSYJUXJDV-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- HSSYVKMJJLDTKZ-UHFFFAOYSA-N 3-phenylphthalic acid Chemical compound OC(=O)C1=CC=CC(C=2C=CC=CC=2)=C1C(O)=O HSSYVKMJJLDTKZ-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- ACZGCWSMSTYWDQ-UHFFFAOYSA-N 3h-1-benzofuran-2-one Chemical compound C1=CC=C2OC(=O)CC2=C1 ACZGCWSMSTYWDQ-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- FYYYKXFEKMGYLZ-UHFFFAOYSA-N 4-(1,3-dioxo-2-benzofuran-5-yl)-2-benzofuran-1,3-dione Chemical compound C=1C=C2C(=O)OC(=O)C2=CC=1C1=CC=CC2=C1C(=O)OC2=O FYYYKXFEKMGYLZ-UHFFFAOYSA-N 0.000 description 1
- UITKHKNFVCYWNG-UHFFFAOYSA-N 4-(3,4-dicarboxybenzoyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 UITKHKNFVCYWNG-UHFFFAOYSA-N 0.000 description 1
- AIVVXPSKEVWKMY-UHFFFAOYSA-N 4-(3,4-dicarboxyphenoxy)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1OC1=CC=C(C(O)=O)C(C(O)=O)=C1 AIVVXPSKEVWKMY-UHFFFAOYSA-N 0.000 description 1
- LFBALUPVVFCEPA-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)C(C(O)=O)=C1 LFBALUPVVFCEPA-UHFFFAOYSA-N 0.000 description 1
- JTWYIRAWVVAUBZ-UHFFFAOYSA-N 4-(4-amino-2,3-dimethylphenyl)-2,3-dimethylaniline Chemical group C1=C(N)C(C)=C(C)C(C=2C(=C(C)C(N)=CC=2)C)=C1 JTWYIRAWVVAUBZ-UHFFFAOYSA-N 0.000 description 1
- GPQSJXRIHLUAKX-UHFFFAOYSA-N 4-(4-amino-2-ethylphenyl)-3-ethylaniline Chemical group CCC1=CC(N)=CC=C1C1=CC=C(N)C=C1CC GPQSJXRIHLUAKX-UHFFFAOYSA-N 0.000 description 1
- QYIMZXITLDTULQ-UHFFFAOYSA-N 4-(4-amino-2-methylphenyl)-3-methylaniline Chemical group CC1=CC(N)=CC=C1C1=CC=C(N)C=C1C QYIMZXITLDTULQ-UHFFFAOYSA-N 0.000 description 1
- OUOAFMZIPXCUBR-UHFFFAOYSA-N 4-(4-amino-3,4-dimethylcyclohexa-2,5-dien-1-ylidene)-1,2-dimethylcyclohexa-2,5-dien-1-amine Chemical group C1=CC(N)(C)C(C)=CC1=C1C=C(C)C(C)(N)C=C1 OUOAFMZIPXCUBR-UHFFFAOYSA-N 0.000 description 1
- VLZIZQRHZJOXDM-UHFFFAOYSA-N 4-(4-amino-3-ethylphenyl)-2-ethylaniline Chemical group C1=C(N)C(CC)=CC(C=2C=C(CC)C(N)=CC=2)=C1 VLZIZQRHZJOXDM-UHFFFAOYSA-N 0.000 description 1
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 1
- CLAQXRONBVEWMK-UHFFFAOYSA-N 4-[(2-hydroxyphenyl)-(4-hydroxy-2,3,5-trimethylphenyl)methyl]-2,3,6-trimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C(=CC=CC=2)O)C=2C(=C(C)C(O)=C(C)C=2)C)=C1C CLAQXRONBVEWMK-UHFFFAOYSA-N 0.000 description 1
- IWXCYYWDGDDPAC-UHFFFAOYSA-N 4-[(3,4-dicarboxyphenyl)methyl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1CC1=CC=C(C(O)=O)C(C(O)=O)=C1 IWXCYYWDGDDPAC-UHFFFAOYSA-N 0.000 description 1
- DORMJQUUEFPGLB-UHFFFAOYSA-N 4-[(4-aminophenyl)-(4-hydroxy-2,6-dimethylphenyl)methyl]-3,5-dimethylphenol Chemical compound CC1=CC(O)=CC(C)=C1C(C=1C(=CC(O)=CC=1C)C)C1=CC=C(N)C=C1 DORMJQUUEFPGLB-UHFFFAOYSA-N 0.000 description 1
- WGICWPDQOJVHAM-UHFFFAOYSA-N 4-[(4-aminophenyl)-(4-hydroxyphenyl)methyl]phenol Chemical compound C1=CC(N)=CC=C1C(C=1C=CC(O)=CC=1)C1=CC=C(O)C=C1 WGICWPDQOJVHAM-UHFFFAOYSA-N 0.000 description 1
- SRKIZOFXPUNFBI-UHFFFAOYSA-N 4-[(4-hydroxy-3,5-dimethylphenyl)-(4-hydroxy-3-methoxyphenyl)methyl]-2,6-dimethylphenol Chemical compound C1=C(O)C(OC)=CC(C(C=2C=C(C)C(O)=C(C)C=2)C=2C=C(C)C(O)=C(C)C=2)=C1 SRKIZOFXPUNFBI-UHFFFAOYSA-N 0.000 description 1
- OHKTUDSKDILFJC-UHFFFAOYSA-N 4-[(4-hydroxy-3,5-dimethylphenyl)-(4-hydroxyphenyl)methyl]-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=CC(O)=CC=2)C=2C=C(C)C(O)=C(C)C=2)=C1 OHKTUDSKDILFJC-UHFFFAOYSA-N 0.000 description 1
- LCJZSIQEJPHPMR-UHFFFAOYSA-N 4-[(4-hydroxy-3-methylphenyl)-(2-hydroxyphenyl)methyl]-2-methylphenol Chemical compound C1=C(O)C(C)=CC(C(C=2C=C(C)C(O)=CC=2)C=2C(=CC=CC=2)O)=C1 LCJZSIQEJPHPMR-UHFFFAOYSA-N 0.000 description 1
- OXJMWJCOJFLNJE-UHFFFAOYSA-N 4-[(4-hydroxy-3-methylphenyl)-(4-hydroxyphenyl)methyl]-2-methylphenol Chemical compound C1=C(O)C(C)=CC(C(C=2C=CC(O)=CC=2)C=2C=C(C)C(O)=CC=2)=C1 OXJMWJCOJFLNJE-UHFFFAOYSA-N 0.000 description 1
- VQASPKJDXHBALG-UHFFFAOYSA-N 4-[(4-hydroxyphenyl)-(4-hydroxy-2,3,5-trimethylphenyl)methyl]-2,3,6-trimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=CC(O)=CC=2)C=2C(=C(C)C(O)=C(C)C=2)C)=C1C VQASPKJDXHBALG-UHFFFAOYSA-N 0.000 description 1
- GEYAGBVEAJGCFB-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)propan-2-yl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1C(C)(C)C1=CC=C(C(O)=O)C(C(O)=O)=C1 GEYAGBVEAJGCFB-UHFFFAOYSA-N 0.000 description 1
- LDFYRFKAYFZVNH-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenoxy]phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC(C=C1)=CC=C1OC(C=C1)=CC=C1OC1=CC=C(N)C=C1 LDFYRFKAYFZVNH-UHFFFAOYSA-N 0.000 description 1
- HYDATEKARGDBKU-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenyl]phenoxy]aniline Chemical group C1=CC(N)=CC=C1OC1=CC=C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)C=C1 HYDATEKARGDBKU-UHFFFAOYSA-N 0.000 description 1
- NVKGJHAQGWCWDI-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical group FC(F)(F)C1=CC(N)=CC=C1C1=CC=C(N)C=C1C(F)(F)F NVKGJHAQGWCWDI-UHFFFAOYSA-N 0.000 description 1
- KIFDSGGWDIVQGN-UHFFFAOYSA-N 4-[9-(4-aminophenyl)fluoren-9-yl]aniline Chemical compound C1=CC(N)=CC=C1C1(C=2C=CC(N)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 KIFDSGGWDIVQGN-UHFFFAOYSA-N 0.000 description 1
- DIPSNXHWDKBKKB-UHFFFAOYSA-N 4-[bis(4-aminophenyl)methyl]phenol Chemical compound C1=CC(N)=CC=C1C(C=1C=CC(O)=CC=1)C1=CC=C(N)C=C1 DIPSNXHWDKBKKB-UHFFFAOYSA-N 0.000 description 1
- GNAJJNNIQUTVBL-UHFFFAOYSA-N 4-[bis(4-hydroxy-2,3,5-trimethylphenyl)methyl]benzene-1,2-diol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=C(O)C(O)=CC=2)C=2C(=C(C)C(O)=C(C)C=2)C)=C1C GNAJJNNIQUTVBL-UHFFFAOYSA-N 0.000 description 1
- UWFUILMHBCVIMK-UHFFFAOYSA-N 4-[bis(4-hydroxy-3,5-dimethylphenyl)methyl]benzene-1,2-diol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=C(O)C(O)=CC=2)C=2C=C(C)C(O)=C(C)C=2)=C1 UWFUILMHBCVIMK-UHFFFAOYSA-N 0.000 description 1
- WQDVZSOCBOWISR-UHFFFAOYSA-N 4-[bis(4-hydroxy-3-methylphenyl)methyl]benzene-1,2-diol Chemical compound C1=C(O)C(C)=CC(C(C=2C=C(C)C(O)=CC=2)C=2C=C(O)C(O)=CC=2)=C1 WQDVZSOCBOWISR-UHFFFAOYSA-N 0.000 description 1
- XKDBWDVWKVZQIQ-UHFFFAOYSA-N 4-[bis(4-hydroxyphenyl)methyl]-2-ethoxyphenol Chemical compound C1=C(O)C(OCC)=CC(C(C=2C=CC(O)=CC=2)C=2C=CC(O)=CC=2)=C1 XKDBWDVWKVZQIQ-UHFFFAOYSA-N 0.000 description 1
- TYHOGIGLTWTDIM-UHFFFAOYSA-N 4-[bis(4-hydroxyphenyl)methyl]-2-methoxyphenol Chemical compound C1=C(O)C(OC)=CC(C(C=2C=CC(O)=CC=2)C=2C=CC(O)=CC=2)=C1 TYHOGIGLTWTDIM-UHFFFAOYSA-N 0.000 description 1
- WFCQTAXSWSWIHS-UHFFFAOYSA-N 4-[bis(4-hydroxyphenyl)methyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C=CC(O)=CC=1)C1=CC=C(O)C=C1 WFCQTAXSWSWIHS-UHFFFAOYSA-N 0.000 description 1
- JSBBGWWJLQNXNQ-UHFFFAOYSA-N 4-phenylbenzene-1,2,3-tricarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC=C1C1=CC=CC=C1 JSBBGWWJLQNXNQ-UHFFFAOYSA-N 0.000 description 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 1
- ZPHGXIBRKMXWEA-UHFFFAOYSA-N 6-[(2-hydroxyphenyl)-(6-hydroxy-1,2,4-trimethylcyclohexa-2,4-dien-1-yl)methyl]-3,5,6-trimethylcyclohexa-2,4-dien-1-ol Chemical compound CC1=CC(C)=CC(O)C1(C)C(C1(C)C(=CC(C)=CC1O)C)C1=CC=CC=C1O ZPHGXIBRKMXWEA-UHFFFAOYSA-N 0.000 description 1
- CQPFMGBJSMSXLP-ZAGWXBKKSA-M Acid orange 7 Chemical compound OC1=C(C2=CC=CC=C2C=C1)/N=N/C1=CC=C(C=C1)S(=O)(=O)[O-].[Na+] CQPFMGBJSMSXLP-ZAGWXBKKSA-M 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N Benzoic acid Natural products OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- MCZVRBLCRZWFJH-UHFFFAOYSA-N Bismark brown Y Chemical compound Cl.Cl.NC1=CC(N)=CC=C1N=NC1=CC=CC(N=NC=2C(=CC(N)=CC=2)N)=C1 MCZVRBLCRZWFJH-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- VIZORQUEIQEFRT-UHFFFAOYSA-N Diethyl adipate Chemical compound CCOC(=O)CCCCC(=O)OCC VIZORQUEIQEFRT-UHFFFAOYSA-N 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- XXRCUYVCPSWGCC-UHFFFAOYSA-N Ethyl pyruvate Chemical compound CCOC(=O)C(C)=O XXRCUYVCPSWGCC-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- RZSYLLSAWYUBPE-UHFFFAOYSA-L Fast green FCF Chemical compound [Na+].[Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=2C(=CC(O)=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 RZSYLLSAWYUBPE-UHFFFAOYSA-L 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- WRQNANDWMGAFTP-UHFFFAOYSA-N Methylacetoacetic acid Chemical compound COC(=O)CC(C)=O WRQNANDWMGAFTP-UHFFFAOYSA-N 0.000 description 1
- LKJPYSCBVHEWIU-UHFFFAOYSA-N N-[4-cyano-3-(trifluoromethyl)phenyl]-3-[(4-fluorophenyl)sulfonyl]-2-hydroxy-2-methylpropanamide Chemical compound C=1C=C(C#N)C(C(F)(F)F)=CC=1NC(=O)C(O)(C)CS(=O)(=O)C1=CC=C(F)C=C1 LKJPYSCBVHEWIU-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- AFBPFSWMIHJQDM-UHFFFAOYSA-N N-methyl-N-phenylamine Natural products CNC1=CC=CC=C1 AFBPFSWMIHJQDM-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- DIQMPQMYFZXDAX-UHFFFAOYSA-N Pentyl formate Chemical compound CCCCCOC=O DIQMPQMYFZXDAX-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229910004530 SIMS 5 Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- FHNINJWBTRXEBC-UHFFFAOYSA-N Sudan III Chemical compound OC1=CC=C2C=CC=CC2=C1N=NC(C=C1)=CC=C1N=NC1=CC=CC=C1 FHNINJWBTRXEBC-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- GRPFBMKYXAYEJM-UHFFFAOYSA-M [4-[(2-chlorophenyl)-[4-(dimethylamino)phenyl]methylidene]cyclohexa-2,5-dien-1-ylidene]-dimethylazanium;chloride Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C(=CC=CC=1)Cl)=C1C=CC(=[N+](C)C)C=C1 GRPFBMKYXAYEJM-UHFFFAOYSA-M 0.000 description 1
- CNYGFPPAGUCRIC-UHFFFAOYSA-L [4-[[4-(dimethylamino)phenyl]-phenylmethylidene]cyclohexa-2,5-dien-1-ylidene]-dimethylazanium;2-hydroxy-2-oxoacetate;oxalic acid Chemical compound OC(=O)C(O)=O.OC(=O)C([O-])=O.OC(=O)C([O-])=O.C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1.C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 CNYGFPPAGUCRIC-UHFFFAOYSA-L 0.000 description 1
- GUCYFKSBFREPBC-UHFFFAOYSA-N [phenyl-(2,4,6-trimethylbenzoyl)phosphoryl]-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C(=O)C1=C(C)C=C(C)C=C1C GUCYFKSBFREPBC-UHFFFAOYSA-N 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 125000003282 alkyl amino group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000002862 amidating effect Effects 0.000 description 1
- 150000004984 aromatic diamines Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- VUEDNLCYHKSELL-UHFFFAOYSA-N arsonium Chemical compound [AsH4+] VUEDNLCYHKSELL-UHFFFAOYSA-N 0.000 description 1
- YCOXTKKNXUZSKD-UHFFFAOYSA-N as-o-xylenol Natural products CC1=CC=C(O)C=C1C YCOXTKKNXUZSKD-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- WXLFIFHRGFOVCD-UHFFFAOYSA-L azophloxine Chemical compound [Na+].[Na+].OC1=C2C(NC(=O)C)=CC(S([O-])(=O)=O)=CC2=CC(S([O-])(=O)=O)=C1N=NC1=CC=CC=C1 WXLFIFHRGFOVCD-UHFFFAOYSA-L 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- HFACYLZERDEVSX-UHFFFAOYSA-N benzidine Chemical compound C1=CC(N)=CC=C1C1=CC=C(N)C=C1 HFACYLZERDEVSX-UHFFFAOYSA-N 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- PEHLCCGXTLWMRW-UHFFFAOYSA-N bis-lactone Chemical group C1CC2OC(=O)C3C1OC(=O)C32 PEHLCCGXTLWMRW-UHFFFAOYSA-N 0.000 description 1
- 239000002981 blocking agent Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000001055 blue pigment Substances 0.000 description 1
- 238000010504 bond cleavage reaction Methods 0.000 description 1
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 description 1
- NNBFNNNWANBMTI-UHFFFAOYSA-M brilliant green Chemical compound OS([O-])(=O)=O.C1=CC(N(CC)CC)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](CC)CC)C=C1 NNBFNNNWANBMTI-UHFFFAOYSA-M 0.000 description 1
- OQURIZZWAUBUEY-UHFFFAOYSA-N butanoic acid butyl butanoate Chemical compound C(CCC)OC(CCC)=O.C(CCC)(=O)O OQURIZZWAUBUEY-UHFFFAOYSA-N 0.000 description 1
- OBNCKNCVKJNDBV-UHFFFAOYSA-N butanoic acid ethyl ester Natural products CCCC(=O)OCC OBNCKNCVKJNDBV-UHFFFAOYSA-N 0.000 description 1
- 239000001191 butyl (2R)-2-hydroxypropanoate Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- BTMVHUNTONAYDX-UHFFFAOYSA-N butyl propionate Chemical compound CCCCOC(=O)CC BTMVHUNTONAYDX-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 150000001793 charged compounds Chemical class 0.000 description 1
- IWWWBRIIGAXLCJ-BGABXYSRSA-N chembl1185241 Chemical compound C1=2C=C(C)C(NCC)=CC=2OC2=C\C(=N/CC)C(C)=CC2=C1C1=CC=CC=C1C(=O)OCC IWWWBRIIGAXLCJ-BGABXYSRSA-N 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000011246 composite particle Substances 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- ZXJXZNDDNMQXFV-UHFFFAOYSA-M crystal violet Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1[C+](C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 ZXJXZNDDNMQXFV-UHFFFAOYSA-M 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- HHNHBFLGXIUXCM-GFCCVEGCSA-N cyclohexylbenzene Chemical compound [CH]1CCCC[C@@H]1C1=CC=CC=C1 HHNHBFLGXIUXCM-GFCCVEGCSA-N 0.000 description 1
- WVIIMZNLDWSIRH-UHFFFAOYSA-N cyclohexylcyclohexane Chemical group C1CCCCC1C1CCCCC1 WVIIMZNLDWSIRH-UHFFFAOYSA-N 0.000 description 1
- PESYEWKSBIWTAK-UHFFFAOYSA-N cyclopenta-1,3-diene;titanium(2+) Chemical compound [Ti+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 PESYEWKSBIWTAK-UHFFFAOYSA-N 0.000 description 1
- WOSVXXBNNCUXMT-UHFFFAOYSA-N cyclopentane-1,2,3,4-tetracarboxylic acid Chemical group OC(=O)C1CC(C(O)=O)C(C(O)=O)C1C(O)=O WOSVXXBNNCUXMT-UHFFFAOYSA-N 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- 150000004985 diamines Chemical class 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- FPVGTPBMTFTMRT-UHFFFAOYSA-L disodium;2-amino-5-[(4-sulfonatophenyl)diazenyl]benzenesulfonate Chemical compound [Na+].[Na+].C1=C(S([O-])(=O)=O)C(N)=CC=C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 FPVGTPBMTFTMRT-UHFFFAOYSA-L 0.000 description 1
- FPAYXBWMYIMERV-UHFFFAOYSA-L disodium;5-methyl-2-[[4-(4-methyl-2-sulfonatoanilino)-9,10-dioxoanthracen-1-yl]amino]benzenesulfonate Chemical compound [Na+].[Na+].[O-]S(=O)(=O)C1=CC(C)=CC=C1NC(C=1C(=O)C2=CC=CC=C2C(=O)C=11)=CC=C1NC1=CC=C(C)C=C1S([O-])(=O)=O FPAYXBWMYIMERV-UHFFFAOYSA-L 0.000 description 1
- 238000011978 dissolution method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000012374 esterification agent Substances 0.000 description 1
- 238000005886 esterification reaction Methods 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- CKSRFHWWBKRUKA-UHFFFAOYSA-N ethyl 2-ethoxyacetate Chemical compound CCOCC(=O)OCC CKSRFHWWBKRUKA-UHFFFAOYSA-N 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- ZANNOFHADGWOLI-UHFFFAOYSA-N ethyl 2-hydroxyacetate Chemical compound CCOC(=O)CO ZANNOFHADGWOLI-UHFFFAOYSA-N 0.000 description 1
- FJAKCEHATXBFJT-UHFFFAOYSA-N ethyl 2-oxobutanoate Chemical compound CCOC(=O)C(=O)CC FJAKCEHATXBFJT-UHFFFAOYSA-N 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229940117360 ethyl pyruvate Drugs 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 235000019240 fast green FCF Nutrition 0.000 description 1
- 235000019233 fast yellow AB Nutrition 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000001087 glyceryl triacetate Substances 0.000 description 1
- 235000013773 glyceryl triacetate Nutrition 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000001046 green dye Substances 0.000 description 1
- 239000001056 green pigment Substances 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- JYGXADMDTFJGBT-VWUMJDOOSA-N hydrocortisone Chemical compound O=C1CC[C@]2(C)[C@H]3[C@@H](O)C[C@](C)([C@@](CC4)(O)C(=O)CO)[C@@H]4[C@@H]3CCC2=C1 JYGXADMDTFJGBT-VWUMJDOOSA-N 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 150000003949 imides Chemical group 0.000 description 1
- 125000001841 imino group Chemical group [H]N=* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- KHLVKKOJDHCJMG-QDBORUFSSA-L indigo carmine Chemical compound [Na+].[Na+].N/1C2=CC=C(S([O-])(=O)=O)C=C2C(=O)C\1=C1/NC2=CC=C(S(=O)(=O)[O-])C=C2C1=O KHLVKKOJDHCJMG-QDBORUFSSA-L 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 125000001041 indolyl group Chemical group 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229910001412 inorganic anion Inorganic materials 0.000 description 1
- 229910001410 inorganic ion Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- SNHMUERNLJLMHN-UHFFFAOYSA-N iodobenzene Chemical compound IC1=CC=CC=C1 SNHMUERNLJLMHN-UHFFFAOYSA-N 0.000 description 1
- INQOMBQAUSQDDS-UHFFFAOYSA-N iodomethane Chemical compound IC INQOMBQAUSQDDS-UHFFFAOYSA-N 0.000 description 1
- MGFYSGNNHQQTJW-UHFFFAOYSA-N iodonium Chemical compound [IH2+] MGFYSGNNHQQTJW-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- MLFHJEHSLIIPHL-UHFFFAOYSA-N isoamyl acetate Chemical compound CC(C)CCOC(C)=O MLFHJEHSLIIPHL-UHFFFAOYSA-N 0.000 description 1
- 229940035429 isobutyl alcohol Drugs 0.000 description 1
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 description 1
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 description 1
- 229940018564 m-phenylenediamine Drugs 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- UKVIEHSSVKSQBA-UHFFFAOYSA-N methane;palladium Chemical compound C.[Pd] UKVIEHSSVKSQBA-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- YSGBMDFJWFIEDF-UHFFFAOYSA-N methyl 2-hydroxy-3-methylbutanoate Chemical compound COC(=O)C(O)C(C)C YSGBMDFJWFIEDF-UHFFFAOYSA-N 0.000 description 1
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- CWKLZLBVOJRSOM-UHFFFAOYSA-N methyl pyruvate Chemical compound COC(=O)C(C)=O CWKLZLBVOJRSOM-UHFFFAOYSA-N 0.000 description 1
- GRVDJDISBSALJP-UHFFFAOYSA-N methyloxidanyl Chemical group [O]C GRVDJDISBSALJP-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- VGGNVBNNVSIGKG-UHFFFAOYSA-N n,n,2-trimethylaziridine-1-carboxamide Chemical compound CC1CN1C(=O)N(C)C VGGNVBNNVSIGKG-UHFFFAOYSA-N 0.000 description 1
- PKALEBFTSZCHGU-UHFFFAOYSA-M n,n-diethyl-4-[2-(1,3,3-trimethylindol-1-ium-2-yl)ethenyl]aniline;chloride Chemical compound [Cl-].C1=CC(N(CC)CC)=CC=C1\C=C\C1=[N+](C)C2=CC=CC=C2C1(C)C PKALEBFTSZCHGU-UHFFFAOYSA-M 0.000 description 1
- MBHINSULENHCMF-UHFFFAOYSA-N n,n-dimethylpropanamide Chemical compound CCC(=O)N(C)C MBHINSULENHCMF-UHFFFAOYSA-N 0.000 description 1
- ZTBANYZVKCGOKD-UHFFFAOYSA-M n-(2-chloroethyl)-n-methyl-4-[2-(1,3,3-trimethylindol-1-ium-2-yl)ethenyl]aniline;chloride Chemical compound [Cl-].C1=CC(N(CCCl)C)=CC=C1C=CC1=[N+](C)C2=CC=CC=C2C1(C)C ZTBANYZVKCGOKD-UHFFFAOYSA-M 0.000 description 1
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 1
- YUOMCRCBTBNCCS-JUKUECOXSA-N n-[(2s)-1-[[(5s)-5-[(4-aminophenyl)sulfonyl-(2-methylpropyl)amino]-6-hydroxyhexyl]amino]-1-oxo-3,3-diphenylpropan-2-yl]-6-methylpyridine-3-carboxamide Chemical compound N([C@H](C(=O)NCCCC[C@@H](CO)N(CC(C)C)S(=O)(=O)C=1C=CC(N)=CC=1)C(C=1C=CC=CC=1)C=1C=CC=CC=1)C(=O)C1=CC=C(C)N=C1 YUOMCRCBTBNCCS-JUKUECOXSA-N 0.000 description 1
- YNDRMAAWTXUJPV-UHFFFAOYSA-N n-cyclohexyl-2-methylidenecyclohexan-1-amine Chemical group C=C1CCCCC1NC1CCCCC1 YNDRMAAWTXUJPV-UHFFFAOYSA-N 0.000 description 1
- PZYDAVFRVJXFHS-UHFFFAOYSA-N n-cyclohexyl-2-pyrrolidone Chemical compound O=C1CCCN1C1CCCCC1 PZYDAVFRVJXFHS-UHFFFAOYSA-N 0.000 description 1
- QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical compound [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 description 1
- KQSABULTKYLFEV-UHFFFAOYSA-N naphthalene-1,5-diamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1N KQSABULTKYLFEV-UHFFFAOYSA-N 0.000 description 1
- VCFXAYFIMPGWMJ-UHFFFAOYSA-N naphthalene-1,5-dione;sulfuryl dichloride;diazide Chemical compound [N-]=[N+]=[N-].[N-]=[N+]=[N-].ClS(Cl)(=O)=O.O=C1C=CC=C2C(=O)C=CC=C21 VCFXAYFIMPGWMJ-UHFFFAOYSA-N 0.000 description 1
- GOGZBMRXLADNEV-UHFFFAOYSA-N naphthalene-2,6-diamine Chemical compound C1=C(N)C=CC2=CC(N)=CC=C21 GOGZBMRXLADNEV-UHFFFAOYSA-N 0.000 description 1
- CTIQLGJVGNGFEW-UHFFFAOYSA-L naphthol yellow S Chemical compound [Na+].[Na+].C1=C(S([O-])(=O)=O)C=C2C([O-])=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 CTIQLGJVGNGFEW-UHFFFAOYSA-L 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000001048 orange dye Substances 0.000 description 1
- 239000001053 orange pigment Substances 0.000 description 1
- 125000002971 oxazolyl group Chemical group 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 150000002941 palladium compounds Chemical class 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 125000001484 phenothiazinyl group Chemical group C1(=CC=CC=2SC3=CC=CC=C3NC12)* 0.000 description 1
- 125000001644 phenoxazinyl group Chemical group C1(=CC=CC=2OC3=CC=CC=C3NC12)* 0.000 description 1
- 229960005323 phenoxyethanol Drugs 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 125000005506 phthalide group Chemical group 0.000 description 1
- CLYVDMAATCIVBF-UHFFFAOYSA-N pigment red 224 Chemical compound C=12C3=CC=C(C(OC4=O)=O)C2=C4C=CC=1C1=CC=C2C(=O)OC(=O)C4=CC=C3C1=C42 CLYVDMAATCIVBF-UHFFFAOYSA-N 0.000 description 1
- 229940099800 pigment red 48 Drugs 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000003880 polar aprotic solvent Substances 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- ILPVOWZUBFRIAX-UHFFFAOYSA-N propyl 2-oxopropanoate Chemical compound CCCOC(=O)C(C)=O ILPVOWZUBFRIAX-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- HUAZGNHGCJGYNP-UHFFFAOYSA-N propyl butyrate Chemical compound CCCOC(=O)CCC HUAZGNHGCJGYNP-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- 235000012739 red 2G Nutrition 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- SPVXKVOXSXTJOY-UHFFFAOYSA-O selenonium Chemical compound [SeH3+] SPVXKVOXSXTJOY-UHFFFAOYSA-O 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- SHBDDIJUSNNBLQ-UHFFFAOYSA-M sodium;3-[[4-[(2-chlorophenyl)-[4-[ethyl-[(3-sulfonatophenyl)methyl]azaniumylidene]cyclohexa-2,5-dien-1-ylidene]methyl]-n-ethylanilino]methyl]benzenesulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=2C(=CC=CC=2)Cl)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 SHBDDIJUSNNBLQ-UHFFFAOYSA-M 0.000 description 1
- AXMCIYLNKNGNOT-UHFFFAOYSA-M sodium;3-[[4-[(4-dimethylazaniumylidenecyclohexa-2,5-dien-1-ylidene)-[4-[ethyl-[(3-sulfonatophenyl)methyl]amino]phenyl]methyl]-n-ethylanilino]methyl]benzenesulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](C)C)C=2C=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 AXMCIYLNKNGNOT-UHFFFAOYSA-M 0.000 description 1
- FTUYQIPAPWPHNC-UHFFFAOYSA-M sodium;4-[[4-[benzyl(ethyl)amino]phenyl]-[4-[benzyl(ethyl)azaniumylidene]cyclohexa-2,5-dien-1-ylidene]methyl]benzene-1,3-disulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](CC)CC=2C=CC=CC=2)C=2C(=CC(=CC=2)S([O-])(=O)=O)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC=C1 FTUYQIPAPWPHNC-UHFFFAOYSA-M 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 125000000446 sulfanediyl group Chemical group *S* 0.000 description 1
- HXJUTPCZVOIRIF-UHFFFAOYSA-N sulfolane Chemical compound O=S1(=O)CCCC1 HXJUTPCZVOIRIF-UHFFFAOYSA-N 0.000 description 1
- 229940124530 sulfonamide Drugs 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- QEMXHQIAXOOASZ-UHFFFAOYSA-N tetramethylammonium Chemical compound C[N+](C)(C)C QEMXHQIAXOOASZ-UHFFFAOYSA-N 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 229960002622 triacetin Drugs 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- NJMOHBDCGXJLNJ-UHFFFAOYSA-N trimellitic anhydride chloride Chemical compound ClC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 NJMOHBDCGXJLNJ-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D311/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings
- C07D311/02—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D311/78—Ring systems having three or more relevant rings
- C07D311/80—Dibenzopyrans; Hydrogenated dibenzopyrans
- C07D311/82—Xanthenes
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D311/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings
- C07D311/02—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D311/78—Ring systems having three or more relevant rings
- C07D311/80—Dibenzopyrans; Hydrogenated dibenzopyrans
- C07D311/82—Xanthenes
- C07D311/84—Xanthenes with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached in position 9
- C07D311/88—Nitrogen atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D405/00—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom
- C07D405/02—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing two hetero rings
- C07D405/10—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing two hetero rings linked by a carbon chain containing aromatic rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/17—Amines; Quaternary ammonium compounds
- C08K5/18—Amines; Quaternary ammonium compounds with aromatically bound amino groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
- C08L101/12—Compositions of unspecified macromolecular compounds characterised by physical features, e.g. anisotropy, viscosity or electrical conductivity
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B11/00—Diaryl- or thriarylmethane dyes
- C09B11/28—Pyronines ; Xanthon, thioxanthon, selenoxanthan, telluroxanthon dyes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/33—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
- G09F9/335—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes being organic light emitting diodes [OLED]
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/8791—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K59/8792—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. black layers
Definitions
- the present invention relates to a xanthene compound, a resin composition using the xanthene compound, and an organic EL display device using the resin composition.
- an organic EL display device has a drive circuit, a planarizing layer, a first electrode, an insulating layer, a light-emitting layer and a second electrode on a substrate, and a voltage is applied between the first electrode and the second electrode facing each other. can be applied to emit light.
- a photosensitive resin composition that can be patterned by ultraviolet irradiation is generally used as the flattening layer material and the insulating layer material.
- a photosensitive resin composition using a polyimide-based resin has high heat resistance of the resin and little gas component generated from the cured product, so that it is preferably used in terms of obtaining a highly reliable organic EL display device. ing.
- carbon black, organic/inorganic pigments, and dyes are added to the resin composition, as seen in black matrix materials for liquid crystal display devices and RGB paste materials.
- a method of adding a coloring agent such as
- Techniques for increasing the blackness of a cured product in a positive photosensitive resin composition include, for example, a method of adding a quinonediazide compound and a black pigment to an alkali-soluble resin composed of a novolak resin and/or a vinyl polymer (see Patent Document 1); A method of adding a photosensitizer and a black pigment to a soluble polyimide (see Patent Document 2), and a method of adding a photosensitizer and yellow, red, and blue dyes and/or pigments to an alkali-soluble resin composed of a polyimide and/or a polyimide precursor. (see Patent Document 3), and the like. Further, xanthene compounds, for example, are known as dyes having high heat resistance and a large molar extinction coefficient (see Patent Documents 4 and 5).
- conventional xanthene compounds have high heat resistance, they have a maximum absorption wavelength around 550 nm and do not have sufficient light shielding properties, especially in the long wavelength region of visible light.
- a 1 to A 4 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or an aryl group having 6 to 10 carbon atoms which may have an electron-donating substituent. However, at least three of A 1 to A 4 are aryl groups having 6 to 10 carbon atoms which may have the electron donating substituent, and carbon atoms which may have the electron donating substituent At least one of the aryl groups of numbers 6 to 10 has an electron-donating substituent, and R 1 to R 4 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxy group, —SO 3 H, —SO 3 ⁇ , —SO 3 NR 6 R 7 , —COOH, —COO ⁇ , —COOR 8 , —CONR 9 R 10 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms, R 5 represents a hydrogen atom; —SO 3 H, —SO 3 — ,
- R 6 to R 10 each independently represent a carbon atom Represents a monovalent hydrocarbon group of numbers 1 to 20.
- Z represents an anion compound
- n represents 0 or 1.
- the xanthene compound (b) represented by formula (1) has a charge as a whole shall be neutral to [2]
- [3] The xanthene compound (b) according to the above [1] or [2], wherein n is 0 in the formula (1).
- n 1 and Z is an aliphatic or aromatic sulfonate ion.
- a resin composition comprising the xanthene compound (b) according to any one of [1] to [4] above and an alkali-soluble resin (a).
- the alkali-soluble resin (a) is one or more selected from the group consisting of polyimides, polyimide precursors, polybenzoxazoles, polybenzoxazole precursors, polyamideimides, polyamideimide precursors and copolymers thereof.
- the resin composition according to . [12] A cured product obtained by curing the resin composition according to any one of [5] to [10] above.
- a 1 to A 4 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or an aryl group having 6 to 10 carbon atoms which may have an electron-donating substituent. However, at least three of A 1 to A 4 are aryl groups having 6 to 10 carbon atoms which may have the electron donating substituent, and carbon atoms which may have the electron donating substituent At least one of the aryl groups of numbers 6 to 10 has an electron-donating substituent, and R 1 to R 4 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxy group, —SO 3 H, —SO 3 ⁇ , —SO 3 NR 6 R 7 , —COOH, —COO ⁇ , —COOR 8 , —CONR 9 R 10 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms, R 5 represents a hydrogen atom; —SO 3 H, —SO 3 — ,
- R 6 to R 10 each independently represent a carbon atom represents a monovalent hydrocarbon group of numbers 1 to 20.
- the xanthene compound (b') represented by formula (2) shall be neutral or cationic in charge.
- the photomask used during exposure is a halftone photomask having a light-transmitting portion, a light-shielding portion, and a semi-light-transmitting portion, and the light-transmitting portion has a transmittance of 100%.
- An organic EL display device having a drive circuit, a planarizing layer, a first electrode, an insulating layer, a light-emitting layer, and a second electrode on a substrate, wherein the planarizing layer and/or the insulating layer are the above [ 12] or an organic EL display device having the cured product according to [13].
- the organic EL display device according to [16] wherein the insulating layer contains the cured product, and the insulating layer has an optical density of 0.5 to 1.5 in visible light per 1 ⁇ m of film thickness.
- a display device comprising at least metal wiring, the cured product of [12] or [13] above, and a plurality of light-emitting elements, wherein the light-emitting elements each have a pair of electrode terminals on one surface. and the pair of electrode terminals are connected to the plurality of metal wires extending in the cured product, and the plurality of metal wires are configured to maintain electrical insulation due to the cured product.
- Device comprising at least metal wiring, the cured product of [12] or [13] above, and a plurality of light-emitting elements, wherein the light-emitting elements each have a pair of electrode terminals on one surface. and the pair of electrode terminals are connected to the plurality of metal wires extending in the cured product, and the plurality of metal wires are configured to maintain electrical insulation due to the cured product.
- xanthene compound that has high heat resistance and is capable of blocking light up to the long wavelength region of visible light compared to conventional xanthene compounds.
- FIG. 1 is a cross-sectional view of an example of an organic EL display device;
- FIG. 1 is a cross-sectional view of an example of a display device;
- FIG. 1 is a cross-sectional view of an example of a display device;
- the xanthene compound (b) of the present invention is a compound represented by formula (1).
- a 1 to A 4 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or an aryl group having 6 to 10 carbon atoms which may have an electron-donating substituent. However, at least three of A 1 to A 4 are aryl groups having 6 to 10 carbon atoms which may have the electron donating substituent, and the number of carbon atoms which may have the electron donating substituent At least one of the 6-10 aryl groups has an electron-donating substituent.
- R 1 to R 4 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxy group, -SO 3 H, -SO 3 - , -SO 3 NR 6 R 7 , -COOH, -COO - , -COOR 8 , —CONR 9 R 10 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms.
- R5 represents a hydrogen atom, -SO3H , -SO3- , -SO3NR6R7 , -COOH , -COO- , -COOR8 , -CONR9R10 .
- R 6 to R 10 each independently represent a monovalent hydrocarbon group having 1 to 20 carbon atoms.
- Z represents an anion compound and n represents 0 or 1.
- the xanthene compound (b) represented by Formula (1) shall be neutral in charge as a whole.
- At least three of A 1 to A 4 are aryl groups having 6 to 10 carbon atoms which may have the electron donating substituent, At least one of the aryl groups having 6 to 10 carbon atoms which may have an electron-donating substituent has an electron-donating substituent, so that the maximum absorption wavelength at 350 to 800 nm compared to a xanthene compound that does not have an electron-donating substituent can be lengthened.
- Examples of the aryl group having 6 to 10 carbon atoms in the aryl group having 6 to 10 carbon atoms which may have an electron-donating substituent include, for example, a phenyl group and a naphthyl group.
- At least one of the at least three aryl groups having 6 to 10 carbon atoms which may have an electron-donating substituent has an electron-donating substituent.
- An electron-donating substituent is an atomic group that donates electrons to a substituted atomic group by an inductive effect or a resonance effect in the theory of organic electrons. Examples of electron-donating substituents include those having a negative Hammett rule substituent constant ⁇ p value.
- the substituent constant ⁇ p value of Hammett's rule can be cited from Kagaku Binran Basic Edition Revised 5th Edition (page II-380).
- Specific examples of electron donating substituents include alkyl groups ( ⁇ p value of methyl group: ⁇ 0.17), alkoxy groups ( ⁇ p value of methoxy group: ⁇ 0.27), aryloxy groups ( ⁇ ⁇ p value of OC 6 H 5 : ⁇ 0.32), hydroxyl group ( ⁇ p value of —OH: ⁇ 0.37), amino group ( ⁇ p value of —NH 2 : ⁇ 0.66), alkylamino group ( ⁇ p -value for -N(CH 3 ) 2 : -0.83), and so on.
- the Hammett's rule substituent constant ⁇ p value of the electron-donating substituent is preferably -0.20 or less, and - It is preferably 0.25 or less, more preferably -0.30 or less.
- the lower limit of the substituent constant ⁇ p value of Hammett's rule is not particularly limited, but is preferably -0.90 or more.
- a 1 to A 4 When three of A 1 to A 4 are aryl groups having 6 to 10 carbon atoms which may have an electron-donating substituent, two or more carbon atoms of 6 which may have an electron-donating substituent
- the aryl group of ⁇ 10 preferably has an electron donating substituent
- the aryl group of 6 to 10 carbon atoms which may have 3 electron donating substituents more preferably has an electron donating substituent.
- a 1 to A 4 When four of A 1 to A 4 are aryl groups having 6 to 10 carbon atoms which may have an electron-donating substituent, two or more carbon atoms of 6 which may have an electron-donating substituent
- the aryl group of ⁇ 10 preferably has an electron-donating substituent, and the aryl group having 6 to 10 carbon atoms which may have 3 or more electron-donating substituents may have an electron-donating substituent. More preferably, the aryl group having 6 to 10 carbon atoms which may have four electron-donating substituents has an electron-donating substituent.
- the preferred substitution position of the electron-donating substituent is preferably the para-position or ortho-position, more preferably the para-position, with respect to the carbon atom bonded to the xanthene compound (b) via the nitrogen atom. preferable.
- the aryl group having 6 to 10 carbon atoms which may have an electron-donating substituent may have substituents other than the electron-donating substituents described above.
- substituents other than electron-donating substituents include aryl groups, halogen atoms, and monovalent groups represented by —COORa, —OCORa, —SO 3 ⁇ , and —SO 2 Ra. can be done.
- the compound represented by formula (1) is neutral in charge as a whole, when the aryl group having 6 to 10 carbon atoms has —SO 3 — , the number of —SO 3 — substitutions is one. and R 1 to R 5 have neutral groups.
- Ra represents an alkyl group.
- the substituents other than the electron-donating substituents preferably have 20 or less carbon atoms, preferably 10 or less.
- Ra preferably has 20 or less carbon atoms, more preferably 10 or less carbon atoms.
- the sum of Hammett's rule substituent constant ⁇ p values bonded to the aryl group having 6 to 10 carbon atoms which may have an electron-donating substituent is preferably ⁇ 0.20 or less.
- a 1 and A 2 and/or A 3 and A 4 may be combined to form a ring.
- These rings may form a ring by a single bond or a bond via any atom of nitrogen, oxygen or sulfur.
- a 5-membered ring or a 6-membered ring is preferable.
- the ring to be formed include, for example, a carbazole ring in which two aryl groups having 6 to 10 carbon atoms which may have an electron-donating substituent are bonded via a single bond, and a carbazole ring having an electron-donating substituent. may contain an indole ring in which an aryl group having 6 to 10 carbon atoms and an alkyl group having 1 to 10 carbon atoms are bonded through a single bond.
- R 1 to R 4 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxy group, —SO 3 H, —SO 3 — , —SO 3 NR 6 R 7 , —COOH, —COO — , —COOR 8 , —CONR 9 R 10 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms; R 6 to R 10 each independently represent a hydrocarbon group having 1 to 20 carbon atoms.
- the hydrocarbon group having 1 to 20 carbon atoms can include an alkyl group, a cycloalkyl group, an aryl group, and the like.
- R5 represents a hydrogen atom, -SO3H , -SO3- , -SO3NR6R7 , -COOH , -COO- , -COOR8 , -CONR9R10 ;
- R 6 to R 10 each independently represent a monovalent hydrocarbon group having 1 to 20 carbon atoms.
- R 5 is preferably a hydrogen atom, -SO 3 H, -SO 3 - , -SO 3 NR 6 R 7 , -COOR 8 , -CONR 9 R 10 , -SO 3 H , —SO 3 ⁇ , —SO 3 NR 6 R 7 and —CONR 9 R 10 are more preferred.
- R 5 is —SO 3 NR 6 R 7
- R 6 or R 7 is preferably an aryl group
- R 6 and R 7 are preferably aryl groups. More preferred.
- R 5 is —CONR 9 R 10
- R 9 or R 10 is preferably an aryl group, more preferably R 9 and R 10 are aryl groups. .
- Z represents an anion compound.
- n is 1 when the compound represented by formula (1) has an anionic compound represented by Z;
- the anion compound may be either an inorganic anion or an organic anion.
- inorganic ions include halide ions such as chlorine and bromine
- organic ions include aliphatic or aromatic sulfonate ions, aliphatic or aromatic carboxylate ions, and others.
- Each R in the ionic formula is a monovalent hydrocarbon group having 1 to 20 carbon atoms which may independently have a substituent and may have a heteroatom in the carbon chain.
- substituents for R include alkyl groups having 1 to 10 carbon atoms, aryl groups having 1 to 10 carbon atoms, halogen atoms, hydroxyl groups, alkoxy groups and aryloxy groups.
- Heteroatoms include nitrogen atoms, oxygen atoms, halogen atoms and the like.
- n is 1 and Z is preferably an aliphatic or aromatic sulfonate ion or an aliphatic or aromatic carboxylate ion, more preferably Z is an aliphatic or aromatic sulfonate ion.
- a monovalent alkyl group having 1 to 20 carbon atoms is preferable, and in addition to a methyl group, an ethyl group, a propyl group, a butyl group, a group in which some of the hydrogen atoms of these alkyl groups are substituted with halogen atoms. etc.
- the aromatic group is preferably a monovalent aryl group having 1 to 20 carbon atoms, such as a phenyl group, tolyl group, ethylphenyl group, propylphenyl group, butylphenyl group and dodecylphenyl group.
- the molecular weight of Z is preferably 1,000 or less, preferably 700 or less, and more preferably 300 or less, from the viewpoint of improving sensitivity by increasing the ratio of coloring components per molecule and decreasing the amount of ionic dye added.
- the lower limit of the molecular weight of Z is not particularly limited, it is preferably 1 or more, more preferably 100 or more.
- n 0 or 1;
- the compound represented by Formula (1) shall be charge neutral as a whole.
- neutral in charge means that the number of positive charges and the number of negative charges of the compound represented by formula (1) are the same. Since the compound represented by formula (1) is neutral in charge as a whole, when R 1 to R 5 contain anions, only one of R 1 to R 5 is —SO 3 — or —COO - becomes.
- R 1 to R 5 in the xanthene compound (b) When only one of R 1 to R 5 in the xanthene compound (b) is —SO 3 — or —COO — or when the aryl group having 6 to 10 carbon atoms has —SO 3 — , Since a counter anion is present in the substituent, the compound represented by formula (1) as a whole is neutral in charge even if it does not have Z, and n is 0. On the other hand, when none of R 1 to R 5 in the xanthene compound (b) contains an anion or when the aryl group having 6 to 10 carbon atoms does not have —SO 3 — , the compound represented by formula (1) is neutral in charge as a whole, n becomes 1. When n is 1, the compound represented by formula (1) has Z.
- n is preferably 0 from the viewpoint of preventing halide ions from entering the cured product of the resin composition containing the xanthene compound (b).
- n is preferably 1 from the viewpoint of improving the sensitivity of a resin composition containing an alkali-soluble resin (a) and a photosensitive compound (c), which will be described later.
- the xanthene compound (b) preferably has a maximum absorption wavelength in the range of 580 nm or more and 700 nm or less in the range of 350 to 800 nm.
- a xanthene compound in which a nitrogen atom is substituted with an alkyl group gives a red spectrum having a maximum absorption wavelength of about 550 nm at 350 to 800 nm, but the xanthene compound (b) represented by the formula (1)
- At least three of A 1 to A 4 are aryl groups having 6 to 10 carbon atoms which may have an electron donating substituent, and the number of carbon atoms which may have an electron donating substituent
- At least one of the 6 to 10 aryl groups has an electron-donating substituent, thereby lengthening the maximum absorption wavelength and obtaining a blue spectrum.
- the xanthene compound (b) more preferably has a maximum absorption wavelength in the range of 590 nm or more and 700 nm or less, and more preferably in
- the resin composition contains a xanthene compound (b) having a maximum absorption wavelength in any of the wavelength range of 580 nm or more and 700 nm or less, and a xanthene compound (b) having a maximum absorption wavelength in the range of 490 nm or more and less than 580 nm at 350 to 800 nm, which will be described later.
- the xanthene compound (b) of the present invention can be produced according to known methods for producing xanthene compounds, and is not particularly limited.
- a dichlorinated sulfonefluorescein and a corresponding aromatic amine compound are heated and stirred in a solvent, and after cooling to room temperature, the reaction solution is poured into an aqueous hydrochloric acid solution and stirred. Next, the precipitate is collected by filtration, washed with water or hot water, and dried to obtain a xanthene compound in which two of the nitrogen atoms are substituted with the same aryl group.
- the corresponding half of the aromatic amine compound is added dropwise little by little into a solvent containing a sulfonefluorescein dichloride, and after the reaction , can be obtained by dropping the remaining aromatic amine compound.
- the xanthene compound in which two of the nitrogen atoms are substituted with aryl groups and the corresponding aromatic halogen compound are heated and stirred in a solvent containing a copper catalyst and a base, and the reaction solution is filtered to remove insoluble matter. After that, it is poured into an aqueous solution of hydrochloric acid and stirred. Next, the precipitate is collected by filtration, washed with water or hot water, and dried to obtain a xanthene compound in which 3 or 4 of the nitrogen atoms are substituted with aryl groups.
- a xanthene compound in which 3 of the nitrogen atoms are substituted with aryl groups the same reaction is performed using a different aromatic halogen compound or aliphatic halogen compound, so that 4 of the nitrogen atoms are substituted with aryl groups.
- a xanthene compound or a xanthene compound in which three of the nitrogen atoms are substituted with an aryl group and one with an alkyl group can be obtained.
- the resin composition of the present invention contains the xanthene compound (b) of the present invention and an alkali-soluble resin (a).
- Alkali solubility means that a solution obtained by dissolving a resin in ⁇ -butyrolactone is coated on a silicon wafer and prebaked at 120° C. for 4 minutes to form a prebaked film having a film thickness of 10 ⁇ m ⁇ 0.5 ⁇ m. It refers to a dissolution rate of 50 nm/min or more, which is obtained from the decrease in film thickness when the film is immersed in a 2.38% by mass tetramethylammonium hydroxide aqueous solution at ⁇ 1° C. for 1 minute and then rinsed with pure water.
- the alkali-soluble resin (a) is alkali-soluble, it has hydroxyl groups and/or acidic groups in the structural units of the resin and/or at the ends of its main chain.
- the acidic group can have, for example, a carboxy group, a phenolic hydroxyl group, a sulfonic acid group, and the like.
- Alkali-soluble resin (a) contains polyimide, polyimide precursor, polybenzoxazole precursor, polyamideimide, polyamideimide precursor, polyamide, polymer of radically polymerizable monomer having an acidic group, phenol resin, and the like. can be, but is not limited to.
- the resin composition may contain two or more of these resins.
- the alkali-soluble resin (a) has high development adhesion, excellent heat resistance, and low outgassing at high temperatures, so that the cured product has high long-term reliability when used in an organic EL display device.
- a polyimide precursor or a polybenzoxazole precursor is more preferable from the viewpoint of further improving the sensitivity.
- polyimide precursor refers to a resin converted to polyimide by heat treatment or chemical treatment.
- polyimide precursors may include polyamic acid, polyamic acid ester, and the like.
- a polybenzoxazole precursor refers to a resin that is converted to polybenzoxazole by heat treatment or chemical treatment, and may contain, for example, polyhydroxyamide.
- the polyimide precursor and polybenzoxazole precursor described above have a structural unit represented by the following formula (3), and the polyimide has a structural unit represented by the following formula (4). Two or more of these may be contained, or a resin obtained by copolymerizing the structural unit represented by formula (3) and the structural unit represented by formula (4) may be contained.
- X represents an organic group having 4 to 40 carbon atoms and 2 to 8 valences
- Y represents an organic group having 6 to 40 carbon atoms and 2 to 11 valences
- R 11 and R 13 each independently represent a hydroxyl group or a sulfonic acid group
- R 12 and R 14 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms.
- t, u and w represent an integer of 0-3, and v represents an integer of 0-6. However, t+u+v+w>0.
- E represents an organic group having 4 to 40 carbon atoms and 4 to 10 valences
- G represents an organic group having 6 to 40 carbon atoms and 2 to 8 valences
- R 15 and R 16 each independently represent a carboxy group, a sulfonic acid group or a hydroxyl group
- x and y each independently represent an integer of 0 to 6; However, x+y>0.
- the polyimide, polyimide precursor, polybenzoxazole precursor, or copolymer thereof preferably has 5 to 100,000 structural units represented by formula (3) or formula (4). Moreover, in addition to the structural unit represented by Formula (3) or Formula (4), it may have other structural units. In this case, it is preferable that the structural units represented by formula (3) or (4) account for 50 mol % or more of all structural units.
- X(R 11 ) t (COOR 12 ) u represents an acid residue.
- X is a divalent to octavalent organic group having 4 to 40 carbon atoms, preferably a divalent to octavalent organic group containing an aromatic ring or a cycloaliphatic group.
- Acid residues include residues of dicarboxylic acids such as terephthalic acid, isophthalic acid, diphenyletherdicarboxylic acid, bis(carboxyphenyl)hexafluoropropane, biphenyldicarboxylic acid, benzophenonedicarboxylic acid, triphenyldicarboxylic acid, trimellitic acid, Residues of tricarboxylic acids such as trimesic acid, diphenyl ether tricarboxylic acid, biphenyltricarboxylic acid, pyromellitic acid, 3,3′,4,4′-biphenyltetracarboxylic acid, 2,3,3′,4′-biphenyltetracarboxylic acid acid, 2,2',3,3'-biphenyltetracarboxylic acid, 3,3',4,4'-benzophenonetetracarboxylic acid, 2,2',3,3'-benzophenonetetrac
- R20 represents an oxygen atom, C( CF3 ) 2 or C( CH3 ) 2 .
- R21 and R22 each independently represent a hydrogen atom or a hydroxyl group.
- one or two carboxy groups correspond to (COOR 12 ) in formula (3).
- E(R 15 ) x represents a residue of an acid dianhydride.
- E is an organic group having 4 to 40 carbon atoms and a tetravalent to 10 valent group, preferably an organic group containing an aromatic ring or a cycloaliphatic group.
- acid dianhydride residues include pyromellitic dianhydride, 3,3′,4,4′-biphenyltetracarboxylic dianhydride, 2,3,3′,4′- biphenyltetracarboxylic dianhydride, 2,2',3,3'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-benzophenonetetracarboxylic dianhydride, 2,2',3 ,3′-benzophenonetetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis(2,3-dicarboxyphenyl)propane dianhydride, 1,1-bis(3,4-dicarboxyphenyl)ethane dianhydride, 1,1-bis(2,3-dicarboxyphenyl)ethane dianhydride, bis(3,4-dicarboxyphenyl)methan
- R20 represents an oxygen atom, C( CF3 ) 2 or C( CH3 ) 2 .
- R21 and R22 each independently represent a hydrogen atom or a hydroxyl group.
- Y(R 13 ) v (COOR 14 ) w in formula (3) above and G(R 16 ) y in formula (4) above represent diamine residues.
- Y is an organic group having 6 to 40 carbon atoms and 2 to 11 valences, preferably a 2 to 11 valences organic group containing an aromatic ring or a cycloaliphatic group.
- G is a divalent to octavalent organic group having 6 to 40 carbon atoms, preferably a divalent to octavalent organic group containing an aromatic ring or a cycloaliphatic group.
- diamine residues include 3,4′-diaminodiphenyl ether, 4,4′-diaminodiphenyl ether, 3,4′-diaminodiphenylmethane, 4,4′-diaminodiphenylmethane, 1,4-bis( 4-aminophenoxy)benzene, benzidine, m-phenylenediamine, p-phenylenediamine, 1,5-naphthalenediamine, 2,6-naphthalenediamine, bis(4-aminophenoxy)biphenyl, bis ⁇ 4-(4-amino phenoxy)phenyl ⁇ ether, 1,4-bis(4-aminophenoxy)benzene, 2,2'-dimethyl-4,4'-diaminobiphenyl, 2,2'-diethyl-4,4'-diaminobiphenyl, 3 ,3′-dimethyl-4,4′-diaminobiphenyl, 3,3
- R20 represents an oxygen atom, C( CF3 ) 2 or C( CH3 ) 2 .
- R 21 to R 24 each independently represent a hydrogen atom or a hydroxyl group.
- the terminal of the alkali-soluble resin (a) may be capped with a known monoamine, acid anhydride, acid chloride, monocarboxylic acid, or active ester compound having an acidic group.
- the alkali-soluble resin (a) may be synthesized by a known method.
- Examples of methods for producing polyamic acid which is a polyimide precursor, include a method of reacting a tetracarboxylic dianhydride and a diamine compound in a solvent at low temperatures.
- a diester is obtained with a tetracarboxylic dianhydride and an alcohol, and then a condensing agent
- a method of reacting in a solvent with an amine in the presence of For example, a diester is obtained from a tetracarboxylic dianhydride and an alcohol, and then the remaining dicarboxylic acid is acid-chloridated and reacted with an amine in a solvent.
- the esterification agent is not particularly limited, and a known method can be applied. However, N,N-dimethylformamide dialkyl acetal is preferable because the obtained resin can be easily purified.
- a method for producing polyhydroxyamide, which is a polybenzoxazole precursor includes, for example, a method of subjecting a bisaminophenol compound and dicarboxylic acid to a condensation reaction in a solvent. Specifically, for example, a method of reacting a dehydration condensing agent such as dicyclohexylcarbodiimide (DCC) with an acid, and then adding a bisaminophenol compound thereto.
- DCC dicyclohexylcarbodiimide
- a method of dropping a solution of a dicarboxylic acid dichloride into a solution of a bisaminophenol compound to which a tertiary amine such as pyridine is added can be used.
- Methods for producing polyimide include, for example, a method of dehydrating and ring-closing the polyamic acid or polyamic acid ester obtained by the above method in a solvent.
- Methods for dehydration and ring closure include chemical treatment with an acid or base, heat treatment, and the like.
- Methods for producing polybenzoxazole include, for example, a method of dehydrating and ring-closing the polyhydroxyamide obtained by the above method in a solvent.
- Methods for dehydration and ring closure include chemical treatment with an acid or base, heat treatment, and the like.
- Polyamideimide precursors include tricarboxylic acids, corresponding tricarboxylic acid anhydrides, and polymers of tricarboxylic acid anhydride halides and diamine compounds, preferably polymers of trimellitic anhydride chloride and aromatic diamine compounds.
- Examples of the method for producing a polyamideimide precursor include a method of reacting a tricarboxylic acid, a corresponding tricarboxylic acid anhydride, a tricarboxylic acid anhydride halide, etc. with a diamine compound in a solvent at a low temperature.
- Examples of methods for producing polyamideimide include a method of reacting trimellitic anhydride and an aromatic diisocyanate in a solvent, and a method of dehydrating and ring-closing the polyamideimide precursor obtained by the above method in a solvent.
- Methods for dehydration and ring closure include chemical treatment with an acid or base, heat treatment, and the like.
- the polymerization solvent is not particularly limited, and includes alkylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether and propylene glycol monomethyl ether, alkyl acetates such as propyl acetate, butyl acetate, and isobutyl acetate, methyl isobutyl ketone, methyl propyl ketone, and the like.
- ketones alcohols such as butyl alcohol and isobutyl alcohol, ethyl lactate, butyl lactate, dipropylene glycol dimethyl ether, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol diethyl ether, 3-methoxybutyl acetate, ethylene glycol monoethyl ether acetate, gamma-butyrolactone, N-methyl-2-pyrrolidone, diacetone alcohol, N-cyclohexyl-2-pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, dimethylsulfoxide, propylene glycol monomethyl ether acetate, N,N- dimethylisobutyamide, 3-methoxy-N,N-dimethylpropionamide, 3-butoxy-N,N-dimethylpropionamide, 1,3-dimethyl-2-imidazolidinone, N,N-dimethylpropy
- the content of the alkali-soluble resin (a) is preferably 40% by mass to 90% by mass based on 100% by mass of the solid content of the resin composition.
- the resin composition of the present invention may further contain a photosensitive compound (c).
- the content of the photosensitive compound (c) is 0 with respect to 100 parts by mass of the alkali-soluble resin (a) from the viewpoint of increasing sensitivity. It is preferably 1 part by mass or more, more preferably 1 part by mass or more, and even more preferably 10 parts by mass or more.
- the content is preferably 100 parts by mass or less.
- the photosensitive compound (c) may contain a photoacid generator (c1), a photopolymerization initiator (c2), and the like.
- the photoacid generator (c1) is a compound that generates an acid upon exposure to light
- the photopolymerization initiator (c2) is a compound that undergoes bond cleavage and/or reaction upon exposure to generate radicals.
- the photoacid generator (c1) By containing the photoacid generator (c1), an acid is generated in the light-irradiated area and the solubility of the light-irradiated area in an alkaline aqueous solution increases, so that a positive relief pattern in which the light-irradiated area dissolves can be obtained. can. Further, by containing the photoacid generator (c1) and an epoxy compound or a thermal cross-linking agent described later, the acid generated in the light-irradiated portion accelerates the cross-linking reaction of the epoxy compound or the thermal cross-linking agent, and the light-irradiated portion becomes insoluble. A negative relief pattern can be obtained.
- the photosensitive compound (c) is a photoacid that can obtain a positive relief pattern. It preferably contains a generator (c1).
- the photoacid generator (c1) can contain, for example, a quinonediazide compound, a sulfonium salt, a phosphonium salt, a diazonium salt, an iodonium salt, and the like.
- the resin composition of the present invention preferably contains two or more kinds of photoacid generators (c1). When two or more kinds of photoacid generators (c1) are contained, a photosensitive resin composition with higher sensitivity can be obtained. From the viewpoint of long-term reliability when the cured product of the present invention is used as a flattening layer and/or an insulating layer of an organic EL display device, the photoacid generator (c1) preferably contains a quinone diazide compound.
- Examples of the quinonediazide compound include those in which the sulfonic acid of quinonediazide is bonded to a polyhydroxy compound via an ester bond, the sulfonic acid of quinonediazide to a polyamino compound in a sulfonamide bond, and the sulfonic acid of quinonediazide to a polyhydroxypolyamino compound in an ester bond and/or a sulfone bond.
- An amide bond or the like can be contained.
- both a 5-naphthoquinonediazidesulfonyl group and a 4-naphthoquinonediazidesulfonyl group are preferably used. It may contain a naphthoquinone diazide sulfonyl ester compound having a 4-naphthoquinone diazide sulfonyl group and a 5-naphthoquinone diazide sulfonyl group in the same molecule, or a 4-naphthoquinone diazide sulfonyl ester compound and a 5-naphthoquinone diazide sulfonyl ester compound.
- a 4-naphthoquinonediazide sulfonyl ester compound has absorption in the i-line region of a mercury lamp and is suitable for i-line exposure.
- a 5-naphthoquinonediazide sulfonyl ester compound has absorption extending to the g-line region of a mercury lamp and is suitable for g-line exposure.
- the quinonediazide compound can be synthesized from a compound having a phenolic hydroxyl group and a quinonediazide sulfonic acid compound by any esterification reaction. By using these quinonediazide compounds, the resolution, sensitivity and film retention rate are further improved.
- sulfonium salts are preferred because they moderately stabilize the acid component generated by exposure.
- phosphonium salts are preferred.
- diazonium salts are preferred.
- iodonium salts are preferred.
- a sensitizer and the like can be contained as necessary.
- the content of the photoacid generator (c1) is 0 with respect to 100 parts by mass of the alkali-soluble resin (a) from the viewpoint of increasing sensitivity. It is preferably 1 part by mass or more, more preferably 10 parts by mass or more, and even more preferably 25 parts by mass or more.
- the content is preferably 100 parts by mass or less.
- Examples of the photopolymerization initiator (c2) include benzyl ketal photopolymerization initiators, ⁇ -hydroxyketone photopolymerization initiators, ⁇ -aminoketone photopolymerization initiators, acylphosphine oxide photopolymerization initiators, and oxime esters.
- photoinitiator, acridine photoinitiator, titanocene photoinitiator, benzophenone photoinitiator, acetophenone photoinitiator, aromatic ketoester photoinitiator, benzoic acid ester photoinitiator agents and the like can be contained.
- the resin composition of the present invention may contain two or more photopolymerization initiators (c2).
- the photopolymerization initiator (c2) more preferably contains an ⁇ -aminoketone photopolymerization initiator, an acylphosphine oxide photopolymerization initiator, or an oxime ester photopolymerization initiator.
- ⁇ -aminoketone-based photopolymerization initiators examples include 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-(4 -morpholinophenyl)-butan-1-one, 2-dimethylamino-2-(4-methylbenzyl)-1-(4-morpholinophenyl)-butan-1-one, 3,6-bis(2-methyl- 2-morpholinopropionyl)-9-octyl-9H-carbazole and the like.
- acylphosphine oxide photopolymerization initiators include 2,4,6-trimethylbenzoyl-diphenylphosphine oxide, bis(2,4,6-trimethylbenzoyl)-phenylphosphine oxide, and bis(2,6-dimethoxybenzoyl). )-(2,4,4-trimethylpentyl)phosphine oxide and the like.
- oxime ester photopolymerization initiators include 1-phenylpropane-1,2-dione-2-(O-ethoxycarbonyl)oxime, 1-phenylbutane-1,2-dione-2-(O-methoxy carbonyl)oxime, 1,3-diphenylpropane-1,2,3-trione-2-(O-ethoxycarbonyl)oxime, 1-[4-(phenylthio)phenyl]octane-1,2-dione-2-( O-benzoyl)oxime, 1-[4-[4-(carboxyphenyl)thio]phenyl]propane-1,2-dione-2-(O-acetyl)oxime, 1-[9-ethyl-6-(2 -methylbenzoyl)-9H-carbazol-3-yl]ethanone-1-(O-acetyl)oxime, 1-[9-ethyl-6-[2-methyl-4-[1-(2,2-di
- the content of the photopolymerization initiator (c2) is, from the viewpoint of increasing sensitivity, the total of the alkali-soluble resin (a) and the radically polymerizable compound described later. It is preferably 0.1 parts by mass or more, more preferably 1 part by mass or more, and even more preferably 10 parts by mass or more, relative to 100 parts by mass. On the other hand, from the viewpoint of further improving the resolution and reducing the taper angle, it is preferably 50 parts by mass or less.
- the resin composition of the present invention may contain a colorant (d) other than the xanthene compound (b).
- a colorant (d) other than the xanthene compound (b).
- the coloring agent (d) By containing the coloring agent (d), the light having a wavelength absorbed by the coloring agent (d) is blocked from the light transmitted through the resin composition film or the light reflected from the resin composition film. can be given.
- a light-shielding property when the cured product of the present invention described later is used as a planarizing layer and / or an insulating layer of an organic EL display device, deterioration, malfunction, leakage current, etc. due to light penetration into the TFT are prevented. be able to. Furthermore, reflection of external light from wiring and TFTs can be suppressed, and the contrast between light-emitting areas and non-light-emitting areas can be improved.
- a dye (d1) and/or a pigment (d2) is preferably used as the colorant (d).
- At least one colorant (d) is preferably contained, for example, one dye or organic pigment, two or more dyes or pigments, one or more dyes and one It is preferable to contain the above pigments.
- the dye (d1) is preferable as the coloring agent (d) in the present invention.
- the dye (d1) may be an ionic dye (d10) that forms an ion pair between organic ions (hereinafter sometimes referred to as an ionic dye (d10) ) is preferred.
- the pigment (d2) is preferable from the viewpoint of being able to suppress discoloration of the colorant in the heat treatment step of the resin composition of the present invention, which will be described later.
- the resin composition of the present invention preferably contains a colorant (d-2) having a maximum absorption wavelength in the range of 490 nm or more and less than 580 nm at 350 to 800 nm, specifically 350 to 800 nm.
- a dye (d1-2) having a maximum absorption wavelength in any of the range of 490 nm or more and less than 580 nm, and / or a pigment having a maximum absorption wavelength in any of the range of 490 nm or more and less than 580 nm in 350 to 800 nm ( d2-2) is preferably contained.
- they may be simply referred to as (d-2) component, (d1-2) component and (d2-2) component, respectively.
- the component (d1-2) is a dye that is soluble in an organic solvent that dissolves the alkali-soluble resin (a) and is compatible with the resin from the viewpoint of storage stability, curing, and fading during light irradiation. It is preferable to contain a dye having high heat resistance and light resistance. Since the component (d1-2) has a maximum absorption wavelength in the range of 490 nm or more and less than 580 nm in the range of 350 to 800 nm, it can contain, for example, a red dye or a violet dye. As types of dyes, for example, oil-soluble dyes, disperse dyes, reactive dyes, acid dyes, direct dyes, and the like can be contained.
- the skeleton structure of the dye includes, but is not limited to, anthraquinone, azo, phthalocyanine, methine, oxazine, quinoline, triarylmethane, xanthene, and the like.
- anthraquinone-based, azo-based, methine-based, triarylmethane-based, and xanthene-based solvents are preferred from the viewpoint of solubility in organic solvents and heat resistance.
- a xanthene compound is more preferable from the viewpoint of workability when the xanthene compound (b) of the present invention is made into a resin composition.
- Each of these dyes may be used alone or as a metal-containing complex salt.
- the component (d-2) is preferably a pigment with high heat resistance and light resistance from the viewpoint of fading during curing and light irradiation.
- organic pigments are represented by Color Index (CI) numbers.
- red pigments include Pigment Red 48:1, 122, 168, 177, 202, 206, 207, 209, 224, 242, 254 and the like.
- violet pigments include Pigment Violet 19, 23, 29, 32, 33, 36, 37, 38, and the like.
- pigments other than these can also be contained.
- the content of component (d-2) is preferably 0.1 to 300 parts by mass, more preferably 0.2 to 200 parts by mass, particularly 1 to 200 parts by mass, relative to 100 parts by mass of the alkali-soluble resin (a). part is preferred.
- the content of component (d-2) is preferably 0.1 to 300 parts by mass, more preferably 0.2 to 200 parts by mass, particularly 1 to 200 parts by mass, relative to 100 parts by mass of the alkali-soluble resin (a). part is preferred.
- the content of the component (d-2) is preferably 0.1 to 300 parts by mass, more preferably 0.2 to 200 parts by mass, particularly 1 to 200 parts by mass, relative to 100 parts by mass of the alkali-soluble resin (a). part is preferred.
- the organic pigment used as the (d2-2) component may contain those subjected to surface treatment such as rosin treatment, acidic group treatment, or basic group treatment, if necessary.
- it can be contained together with a dispersant in some cases.
- the dispersant can contain, for example, cationic, anionic, nonionic, amphoteric, silicone, and fluorine surfactants.
- the colorant (d) may contain a colorant (d-1) having a maximum absorption wavelength in any of the range of 400 nm or more and less than 490 nm in the range of 350 to 800 nm.
- a pigment (d2-1) having a maximum absorption wavelength may be contained.
- they may be simply referred to as (d-1) component, (d1-1) component, and (d2-1) component, respectively.
- the dye (d1-1) used as the component (d-1) is soluble in an organic solvent that dissolves the alkali-soluble resin (a) from the viewpoint of storage stability, curing, and fading during light irradiation.
- a dye compatible with the resin and a dye having high heat resistance and light resistance are preferable.
- the component (d1-1) has a maximum absorption in any of the wavelength range of 400 nm or more and less than 490 nm, examples thereof include yellow dyes and orange dyes.
- dye types include oil-soluble dyes, disperse dyes, reactive dyes, acid dyes, and direct dyes.
- the skeleton structure of the dye includes, but is not limited to, anthraquinone, azo, phthalocyanine, methine, oxazine, quinoline, triarylmethane, xanthene, and the like.
- anthraquinone-based, azo-based, methine-based, triarylmethane-based, and xanthene-based solvents are preferred from the viewpoint of solubility in organic solvents and heat resistance.
- Each of these dyes may be used alone or as a metal-containing complex salt.
- the pigment (d2-1) used as the component (d-1) is preferably a pigment with high heat resistance and light resistance from the viewpoint of fading during curing and light irradiation.
- organic pigments are represented by Color Index (CI) numbers.
- yellow pigments include Pigment Yellow 83, 117, 129, 138, 139, 150, 180 and the like.
- orange pigments include Pigment Orange 38, 43, 64, 71, 72 and the like.
- pigments other than these can also be contained.
- the content of component (d-1) is preferably 0.1 to 300 parts by mass, more preferably 0.2 to 200 parts by mass, particularly 1 to 200 parts by mass, relative to 100 parts by mass of the alkali-soluble resin (a). part is preferred.
- the content of component (d-1) is preferably 0.1 to 300 parts by mass, more preferably 0.2 to 200 parts by mass, particularly 1 to 200 parts by mass, relative to 100 parts by mass of the alkali-soluble resin (a). part is preferred.
- the organic pigment used as component (d2-1) may be subjected to surface treatment such as rosin treatment, acidic group treatment, or basic group treatment, if necessary. It can also optionally be used with a dispersant.
- dispersants include cationic, anionic, nonionic, amphoteric, silicone and fluorosurfactants.
- the colorant (d) may contain a colorant (d-3) having a maximum absorption wavelength in any of the range of 580 nm or more and 800 nm or less in the range of 350 to 800 nm.
- a pigment (d2-3) having a maximum absorption wavelength may be included.
- they may be simply referred to as the (d-3) component, the (d1-3) component, and the (d2-3) component, respectively.
- the dye (d1-3) used as component (d-3) is soluble in an organic solvent that dissolves the alkali-soluble resin (a) from the viewpoint of storage stability, curing, and fading during light irradiation.
- a dye compatible with the resin and a dye having high heat resistance and light resistance are preferable.
- the (d1-3) component has a maximum absorption wavelength in the range of 580 nm to 800 nm in the range of 350 to 800 nm, and thus includes blue dyes and green dyes.
- Types of dyes include, for example, oil-soluble dyes, disperse dyes, reactive dyes, acid dyes, and direct dyes.
- the skeleton structure of the dye includes, but is not limited to, anthraquinone, azo, phthalocyanine, methine, oxazine, quinoline, triarylmethane, and the like.
- anthraquinone-based, azo-based, methine-based, and triarylmethane-based solvents are preferred from the viewpoint of solubility in organic solvents and heat resistance.
- Each of these dyes may be used alone or as a metal-containing complex salt.
- the pigment (d2-3) used as component (d-3) is preferably a pigment with high heat resistance and light resistance from the viewpoint of fading during curing and light irradiation.
- organic pigments are represented by Color Index (CI) numbers.
- blue pigments include Pigment Blue 15 (15:3, 15:4, 15:6, etc.), 21, 22, 60, 64, and the like.
- green pigments include Pigment Green 7, 10, 36, 47, 58 and the like.
- pigments other than these can also be contained.
- the content of component (d-3) is preferably 0.1 to 300 parts by mass, more preferably 0.2 to 200 parts by mass, particularly 1 to 200 parts by mass, relative to 100 parts by mass of the alkali-soluble resin (a). part is preferred.
- the content of component (d-3) is preferably 0.1 to 300 parts by mass, more preferably 0.2 to 200 parts by mass, particularly 1 to 200 parts by mass, relative to 100 parts by mass of the alkali-soluble resin (a). part is preferred.
- the organic pigment used as component (d2-3) may be subjected to surface treatment such as rosin treatment, acidic group treatment, or basic group treatment, if necessary. It can also optionally be used with a dispersant.
- dispersants include cationic, anionic, nonionic, amphoteric, silicone and fluorosurfactants.
- the xanthene compound (b), the component (d-2), the component (d-1) and/or the thermochromic compound described later and optionally the component (d-3) are used in combination, It is possible to lower the visible light transmittance of the cured product and make it black.
- the optical density per 1 ⁇ m film thickness of the cured product obtained by curing the resin composition containing the xanthene compound (b) of the present invention (hereinafter sometimes referred to as OD value) is preferably OD value of 0.5 or more, more preferably 0.7 or more.
- the cured product can improve the light-shielding property, so in a display device such as an organic EL display device or a liquid crystal display device, visualization of electrode wiring and external light reflection can be further reduced, Contrast in image display can be improved.
- the OD value is preferably 1.5 or less from the viewpoint of being able to improve the sensitivity during exposure when a resin composition containing a photosensitive compound, which will be described later, is formed.
- the resin composition of the present invention comprises a xanthene compound (b1) (hereinafter sometimes referred to as xanthene compound (b1)) in which n is 1 and Z is an organic anion in formula (1), and an ion pair between organic ions. and the organic anion is preferably one.
- the ionic dye that forms an ion pair between organic ions represents an ionic dye consisting of individual organic anions and organic cations, and in the formula (1), such as a xanthene compound in which n is 0, A compound having an anion site and a cation site as a whole and being neutral in charge as a whole is not counted as an organic anion.
- the fact that the organic anion is one type means that the organic anion in the xanthene compound (b1) and the organic anion constituting the ionic dye (d10) are the same.
- the resin composition of the present invention contains the xanthene compound (b1) and the ionic dye (d10) and the respective organic anion moieties are different, the resin composition contains two or more organic anion species.
- the presence of a plurality of organic anions and organic cations in the resin composition causes an increase in foreign matter during frozen storage due to ion exchange between the ionic dyes, resulting in deterioration of storage stability.
- the resin composition of the present invention contains only one type of organic anion species, storage stability during frozen storage is improved. This is because the organic anion species for the xanthene compound (b1) and the ionic dye (d10) were limited, and ion exchange between the ionic dyes in the resin composition was suppressed even if the organic cation moieties were different. Presumed.
- the ionic dye (d10) that forms an ion pair between organic ions in the present invention is a salt-forming compound composed of an organic anion portion of an acid dye and an organic cation portion of a non-dye, an organic cation portion of a basic dye and a non-dye or a salt-forming compound consisting of an organic anion portion of an acid dye and an organic cation portion of a basic dye.
- a salt-forming compound consisting of an organic cation portion of a basic dye and an organic anion portion of a non-dye can be produced by using a basic dye as a raw material and exchanging the counter anion with a non-dye organic anion by a known method.
- a salt-forming compound comprising an acid dye organic anion portion and a non-dye organic cation portion can be produced by using an acid dye as a raw material and exchanging the counter cation with a non-dye organic cation by a known method.
- a salt-forming compound composed of an organic anion portion of an acid dye and an organic cation portion of a basic dye can be produced by using an acid dye and a basic dye as raw materials and exchanging their counter ions by a known method.
- the acid dye that is the raw material for the ionic dye (d10) is a compound that has an acidic substituent such as a sulfo group or a carboxy group in the dye molecule, or an anionic water-soluble dye that is a salt thereof.
- Acid dyes include those that have an acidic substituent such as a sulfo group or a carboxy group and are classified as direct dyes.
- an acid dye for example, C.I. I. Acid Yellow 1, 17, 18, 23, 25, 36, 38, 42, 44, 54, 59, 72, 78, 151; C.I. I. Acid Orange 7, 10, 12, 19, 20, 22, 28, 30, 52, 56, 74, 127; C.I. I. acid red 1, 3, 4, 6, 8, 11, 12, 14, 18, 26, 27, 33, 37, 53, 57, 88, 106, 108, 111, 114, 131, 137, 138, 151, 154, 158, 159, 173, 184, 186, 215, 257, 266, 296, 337; I. Acid Brown 2, 4, 13, 248; C.I. I. Acid Violet 11, 56, 58; C.I. I.
- azo acid dyes such as Acid Blue 92, 102, 113, 117; C.I. I. Quinoline acid dyes such as Acid Yellow 2, 3, 5; C.I. I. Xanthene acid dyes such as Acid Red 50, 51, 52, 87, 91, 92, 93, 94, 289; C.I. I. Acid Red 82, 92; C.I. I. Acid Violet 41, 42, 43; C.I. I. Acid Blue 14, 23, 25, 27, 40, 45, 78, 80, 127: 1, 129, 145, 167, 230; C.I. I. Anthraquinone acid dyes such as Acid Green 25, 27; C.I. I. Acid Violet 49; C.I. I.
- the acid dye preferably contains a xanthene-based acid dye in terms of high heat resistance.
- Xanthene-based acid dyes include C.I. I. It is more preferable to contain a rhodamine-based acid dye such as Acid Red 50, 52, 289.
- Each R in the ionic formula may independently have a substituent and is a hydrocarbon group having 1 to 20 carbon atoms which may have a heteroatom in the carbon chain.
- the molecular weight of the non-dye organic cation moiety is preferably 1000 or less, preferably 700 or less, and 300 or less. is more preferred.
- the lower limit of the molecular weight of the non-dye organic cation moiety is not particularly limited, it is preferably 1 or more, more preferably 100 or more.
- the basic dye used as a raw material for the ionic dye (d10) is a compound having a basic group such as an amino group or an imino group in the molecule, or a salt thereof, and is a dye that becomes a cation in an aqueous solution. .
- basic dyes for example, C.I. I. Basic Red 17, 22, 23, 25, 29, 30, 38, 39, 46, 46: 1, 82; I. Basic Orange 2, 24, 25; C.I. I. Basic Violet 18; C.I. I. Basic Yellow 15, 24, 25, 32, 36, 41, 73, 80; C.I. I. Basic Brown 1; C.I. I. azo basic dyes such as Basic Blue 41, 54, 64, 66, 67, 129; C.I. I. Basic Red 1, 2; C.I. I. Xanthene-based basic dyes such as Basic Violet 10, 11; C.I. I. Basic Yellow 11, 13, 21, 23, 28; C.I. I. Basic Orange 21; C.I. I. Basic Red 13, 14; C.I. I.
- Basic methine dyes such as Basic Violet 16, 39; C.I. I. anthraquinone-based basic dyes such as Basic Blue 22, 35, 45, 47; C.I. I. Basic Violet 1, 2, 3, 4, 13, 14, 23; C.I. I. Basic Blue 1, 5, 7, 8, 11, 15, 18, 21, 24, 26; C.I. I. Examples include triarylmethane-based basic dyes such as Basic Green 1 and 4, and xanthene-based basic dyes having the structures shown below.
- R 25 , R 27 and R 29 to R 31 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or an aryl group having 6 to 10 carbon atoms which may have a substituent; 28 each independently represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms;
- the basic dye preferably contains xanthene-based basic dyes and triarylmethane-based basic dyes in terms of increasing the blackness of the cured film, and xanthene-based acidic dyes in terms of high heat resistance. It is preferable to contain a dye.
- non-dye organic anion moieties that are raw materials for the ionic dye (d10) include aliphatic or aromatic sulfonate ions, aliphatic or aromatic carboxylate ions, and sulfonimide anions [(RSO 2 ) 2 N ] ⁇ , borate anion (BR 4 ) ⁇ and the like.
- the anion compound is an aliphatic or aromatic sulfonate ion, an aliphatic or aromatic Group carboxylate ions are preferred.
- each R in the ionic formula may independently have a substituent and is a hydrocarbon group having 1 to 20 carbon atoms which may have a heteroatom in the carbon chain.
- the molecular weight of the non-dye organic anion moiety is preferably 1000 or less, preferably 700 or less, and 300 or less. is more preferred.
- the lower limit of the molecular weight of the non-dye anion portion is not particularly limited, it is preferably 1 or more, more preferably 100 or more.
- the organic anion portion and/or the organic cation portion of the ionic dye (d10) preferably has a xanthene skeleton.
- the organic anions having a xanthene skeleton include the xanthene-based acid dyes described above, and examples of the organic cations having a xanthene skeleton include the xanthene-based basic dyes described above.
- the ionic dye (d10) preferably has an acidic group from the viewpoint of increasing alkali solubility during development and improving sensitivity.
- the acidic group can have, for example, a carboxy group, a phenolic hydroxyl group, a sulfonic acid group, a sulfonate group, etc., and a sulfonic acid group and a sulfonate group are particularly preferred.
- the ionic dye (d10) is a coloring having a maximum absorption wavelength in any of the range of 490 nm or more and less than 580 nm at 350 to 800 nm from the viewpoint of improving the light shielding property of visible light. It preferably contains agent (d10-2).
- a salt-forming compound by ion exchange of an acid dye or a basic dye can be produced by a known method. For example, when an aqueous solution of an acid dye and an aqueous solution of a basic dye are separately prepared and mixed slowly while stirring, a salt-forming compound consisting of an organic anion portion of the acid dye and an organic cation portion of the basic dye is formed as a precipitate. Generate. By collecting this by filtration, the salt-forming compound can be obtained. The obtained salt-forming compound is preferably dried at about 60 to 70°C.
- the total content of the ionic dye (d10) contained in the resin composition of the present invention is preferably 0.1 parts by mass or more and 300 parts by mass or less with respect to 100 parts by mass of the alkali-soluble resin (a). 2 parts by mass or more and 200 parts by mass or less is preferable, and 1 part by mass or more and 200 parts by mass or less is particularly preferable.
- the content of the ionic dye (b) is 0.1 parts by mass or more, light of the corresponding wavelength can be absorbed. Also, by making it 300 parts by mass or less, it is possible to absorb the light of the corresponding wavelength while maintaining the adhesive strength between the photosensitive colored resin film and the substrate and the heat resistance and mechanical properties of the film after heat treatment.
- the resin composition of the present invention may contain a thermochromic compound.
- the thermochromic compound is a thermochromic compound that develops color by heat treatment and has maximum absorption at 350 nm or more and 700 nm or less, more preferably a thermochromic compound that develops color by heat treatment and has maximum absorption at 350 nm or more and 500 nm or less. is a compound.
- the thermochromic compound is preferably a compound that develops color at a temperature higher than 120°C, more preferably a thermochromic compound that develops color at a temperature higher than 180°C.
- the higher the color-developing temperature of the thermochromic compound the better the heat resistance under high-temperature conditions, and the less the color fades due to long-term irradiation with ultraviolet light and visible light, and the better the light resistance.
- thermochromogenic compound may be a general heat-sensitive dye or pressure-sensitive dye, or may be another compound.
- thermochromic compounds include those that develop color by changing their chemical structure and charge state due to the action of acidic groups coexisting in the system during heat treatment, or those that undergo a thermal oxidation reaction due to the presence of oxygen in the air. It can contain a substance that causes coloration and the like.
- the thermochromic compound of the present invention differs from the colorant (d) because it does not have a maximum absorption in any of the ranges of 350 nm or more and 700 nm or less before heat treatment.
- thermochromic compound having a triarylmethane skeleton is said to develop color when the hydrogen of the methine group is eliminated by heat treatment and one aryl group becomes a quinone structure.
- the colorant (d) having a triarylmethane skeleton has a quinone structure even before heat treatment, and thus differs from the thermochromic compound of the present invention.
- the skeleton structure of the thermochromic compound includes a triarylmethane skeleton, a diarylmethane skeleton, a fluorane skeleton, a bislactone skeleton, a phthalide skeleton, a xanthene skeleton, a rhodamine lactam skeleton, a fluorene skeleton, a phenothiazine skeleton, a phenoxazine skeleton, and a spiropyran skeleton.
- a triarylmethane skeleton is preferable because of its high thermal coloring temperature and excellent heat resistance.
- triarylmethane skeleton examples include 2,4′,4′′-methylidynetrisphenol, 4,4′,4′′-methylidynetrisphenol, 4,4′-[(4-hydroxyphenyl) methylene]bis(benzenamine), 4,4'-[(4-aminophenyl)methylene]bisphenol, 4,4'-[(4-aminophenyl)methylene]bis[3,5-dimethylphenol], 4, 4′-[(2-hydroxyphenyl)methylene]bis[2,3,6-trimethylphenol], 4-[bis(4-hydroxyphenyl)methyl]-2-methoxyphenol, 4,4′-[(2 -hydroxyphenyl)methylene]bis[2-methylphenol], 4,4′-[(4-hydroxyphenyl)methylene]bis[2-methylphenol], 4-[bis(4-hydroxyphenyl)methyl]-2 -ethoxyphenol, 4,4'-[(4-hydroxyphenyl)methylene]bis[2,6-dimethylphenol],
- the hydroxyl group-containing compound having a triarylmethane skeleton may be used as a quinonediazide compound by ester-bonding the sulfonic acid of naphthoquinonediazide to the compound.
- the content when the thermochromic compound is contained, the content is preferably 5 to 80 parts by mass, particularly preferably 10 to 60 parts by mass, based on 100 parts by mass of the alkali-soluble resin (a).
- the content of the thermochromic compound is 5 parts by mass or more, the transmittance of the cured product in the ultraviolet-visible region can be reduced. Moreover, if it is 80 parts by mass or less, the heat resistance and strength of the cured product can be maintained, and the water absorption can be reduced.
- the resin composition of the present invention may contain a radically polymerizable compound.
- the resin composition contains a photopolymerization initiator (c2)
- it is essential to contain a radically polymerizable compound.
- a radically polymerizable compound is a compound having a plurality of ethylenically unsaturated double bonds in its molecule.
- radical polymerization of the radically polymerizable compound proceeds by radicals generated from the photopolymerization initiator (c2) described above, and the light-irradiated portion becomes insoluble, whereby a negative pattern can be obtained.
- the photocuring of the light-irradiated portion is accelerated, and the sensitivity can be further improved.
- the crosslink density after thermosetting is improved, the hardness of the cured product can be improved.
- a compound having a (meth)acrylic group which facilitates the progress of radical polymerization, is preferable.
- Compounds having two or more (meth)acrylic groups in the molecule are more preferable from the viewpoint of improving the sensitivity at the time of exposure and improving the hardness of the cured product.
- the double bond equivalent of the radically polymerizable compound is preferably 80 to 400 g/mol from the viewpoint of improving the sensitivity during exposure and improving the hardness of the cured product.
- radically polymerizable compounds include trimethylolpropane tri(meth)acrylate, ditrimethylolpropane tri(meth)acrylate, ditrimethylolpropane tetra(meth)acrylate, pentaerythritol tri(meth)acrylate, and pentaerythritol tetra(meth)acrylate.
- acrylates dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, tripentaerythritol hepta(meth)acrylate, tripentaerythritol octa(meth)acrylate, 2,2-bis[4-(3-( meth)acryloxy-2-hydroxypropoxy)phenyl]propane, 1,3,5-tris((meth)acryloxyethyl)isocyanuric acid, 1,3-bis((meth)acryloxyethyl)isocyanuric acid, 9,9 -bis[4-(2-(meth)acryloxyethoxy)phenyl]fluorene, 9,9-bis[4-(3-(meth)acryloxypropoxy)phenyl]fluorene, 9,9-bis(4-( It can contain meth)acryloxyphenyl)fluorene or their acid modified products, ethylene oxide modified products, prop
- the content of the radically polymerizable compound is preferably 15% by mass or more based on the total 100% by mass of the alkali-soluble resin (a) and the radically polymerizable compound, and 30% by mass. % or more by mass is more preferable.
- it is preferably 65% by mass or less, and 50% by mass or less in the total 100% by mass of the alkali-soluble resin (a) and the radically polymerizable compound. is more preferred.
- the resin composition of the present invention may contain a thermal cross-linking agent.
- a thermal cross-linking agent refers to a compound having at least two thermally reactive functional groups such as an alkoxymethyl group, a methylol group, an epoxy group, and an oxetanyl group in the molecule.
- cross-linking occurs between the thermal cross-linking agent and the alkali-soluble resin (a) or between the thermal cross-linking agents to improve the heat resistance, chemical resistance and bending resistance of the cured product after thermal curing.
- Preferred examples of compounds having at least two alkoxymethyl groups or methylol groups include DML-PC, DML-PEP, DML-OC, DML-OEP, DML-34X, DML-PTBP, DML-PCHP, DML-OCHP, DML-PFP, DML-PSBP, DML-POP, DML-MBOC, DML-MBPC, DML-MTrisPC, DML-BisOC-Z, DML-BisOCHP-Z, DML-BPC, DML-BisOC-P, DMO-PC, DMOM-PTBP, DMOM-MBPC, TriML-P, TriML-35XL, TML-HQ, TML-BP, TML-pp-BPF, TML-BPE, TML-BPA, TML-BPAF, TML-BPAP, TMOM-BP, TMOM-BPE, TMOM-BPA, TMOM-BPAF, TMOM-BPAP, HML-TPPHBA, H
- Preferred examples of compounds having at least two epoxy groups include “Epolite” (registered trademark) 40E, “Epolite” 100E, “Epolite” 200E, “Epolite” 400E, “Epolite” 70P, “Epolite” 200P, “Epolite” “400P,” Epolite” 1500NP, “Epolite” 80MF, “Epolite” 4000, “Epolite” 3002 (manufactured by Kyoeisha Chemical Co., Ltd.), “Denacol” (registered trademark) EX-212L, “Denacol” EX-214L , “Denacol” EX-216L, “Denacol” EX-850L (manufactured by Nagase ChemteX Corporation), GAN, GOT (manufactured by Nippon Kayaku Co., Ltd.), “Epicort” (registered trademark) 828, "Epikote” 1002,
- Compounds having at least two oxetanyl groups include, for example, Ethanacol EHO, Ethanacol OXBP, Ethanacol OXTP, Ethanacol OXMA (manufactured by Ube Industries, Ltd.), oxetaneated phenol novolak, and the like.
- the thermal cross-linking agent may be contained in combination of two or more.
- the content is preferably 1% by mass or more and 30% by mass or less in 100% by mass of the total amount of the resin composition excluding the solvent. If the content of the thermal cross-linking agent is 1% by mass or more, the chemical resistance and bending resistance of the cured product can be further enhanced. Further, if the content of the thermal crosslinking agent is 30% by mass or less, the amount of outgassing from the cured product can be further reduced, the long-term reliability of the organic EL display device can be further improved, and the storage stability of the resin composition can be improved. Also excellent.
- the resin composition of the present invention may contain a solvent. By containing a solvent, a varnish state can be obtained, and coatability can be improved.
- Solvents include polar aprotic solvents such as ⁇ -butyrolactone, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol mono Ethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether , propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, trip
- the content of the solvent is not particularly limited, but is preferably 100 to 3000 parts by mass, more preferably 150 to 2000 parts by mass, based on 100 parts by mass of the total resin composition excluding the solvent.
- the proportion of the solvent having a boiling point of 180° C. or higher in 100% by mass of the total amount of the solvent is preferably 20% by mass or less, more preferably 10% by mass or less.
- Adhesion improvers include vinyltrimethoxysilane, vinyltriethoxysilane, epoxycyclohexylethyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, p-styryltrimethoxysilane, Silane coupling agents such as 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, N-phenyl-3-aminopropyltrimethoxysilane, titanium chelating agents, aluminum chelating agents, aromatic amine compounds and alkoxy group-containing A compound obtained by reacting a silicon compound can be contained.
- the content of the adhesion improver is preferably 0.01 to 10% by mass in 100% by mass of the total amount of the resin composition excluding the solvent.
- the resin composition of the present invention may contain a surfactant.
- a surfactant By containing the surfactant, the wettability with the substrate can be improved.
- surfactants include SH series, SD series, and ST series from Dow Corning Toray Co., Ltd., BYK series from BYK Chemie Japan Co., Ltd., KP series from Shin-Etsu Chemical Co., Ltd., and NOF Corporation.
- Disform series of DIC Corporation "Megafac (registered trademark)” series of DIC Corporation, Florard series of Sumitomo 3M Limited, “Surflon (registered trademark)” series of Asahi Glass Co., Ltd., “Asahi Guard (registered trademark)” series of Asahi Glass Co., Ltd. )” series, Omnova Solution's Polyfox series, etc., Kyoeisha Chemical Co., Ltd.'s Polyflow series, Kusumoto Kasei Co., Ltd.'s "Disparon (registered trademark)” series, etc.
- it may contain a methacrylic surfactant or the like.
- the content is preferably 0.001 to 1% by mass in 100% by mass of the total amount of the resin composition excluding the solvent.
- the resin composition of the present invention may contain inorganic particles.
- Preferred specific examples of inorganic particles can include silicon oxide, titanium oxide, barium titanate, alumina, talc, and the like.
- the primary particle diameter of the inorganic particles is preferably 100 nm or less, more preferably 60 nm or less.
- the content of the inorganic particles is preferably 5 to 90% by mass in 100% by mass of the total amount of the resin composition excluding the solvent.
- the total mass of all chlorine atoms and all bromine atoms contained in the resin composition is preferably 150 ppm or less, and 100 ppm or less, relative to the total mass of the solid content of the resin composition. More preferably, it is 2 ppm or less, which is the detection limit of combustion ion chromatography.
- the total mass of the solid content of the resin composition refers to the mass obtained by subtracting the mass of the solvent from the total mass of the resin composition.
- the lower limit of the total mass of all chlorine atoms and all bromine atoms is 0 ppm, and below the detection limit of combustion ion chromatography is regarded as 0 ppm.
- a method for producing the resin composition of the present invention will be described.
- a xanthene compound (b), an alkali-soluble resin (a), and, if necessary, a photosensitive compound (c), a colorant (d), a thermochromic compound, a radically polymerizable compound, a thermal cross-linking agent, a solvent, and an adhesion improver for example, a xanthene compound (b), an alkali-soluble resin (a), and, if necessary, a photosensitive compound (c), a colorant (d), a thermochromic compound, a radically polymerizable compound, a thermal cross-linking agent, a solvent, and an adhesion improver.
- the resin composition of the present invention can be obtained by dissolving the agent, surfactant, inorganic particles, and the like.
- Dissolution methods include stirring and heating.
- the heating temperature is preferably set within a range that does not impair the performance of the resin composition, and is usually room temperature to 80°C.
- the order of dissolving each component is not particularly limited, and for example, a method of dissolving compounds in order of low solubility can be mentioned.
- ingredients that tend to generate bubbles during stirring and dissolution such as surfactants and some adhesion improvers, by adding them at the end after dissolving the other ingredients, the other ingredients will not be dissolved due to the generation of bubbles. can be prevented.
- the obtained resin composition is preferably filtered using a filtration filter to remove dust and particles.
- filter pore sizes include, but are not limited to, 0.5 ⁇ m, 0.2 ⁇ m, 0.1 ⁇ m, 0.07 ⁇ m, 0.05 ⁇ m, and 0.02 ⁇ m.
- Materials for the filter include polypropylene (PP), polyethylene (PE), nylon (NY), polytetrafluoroethylene (PTFE), and the like. Among them, polyethylene and nylon are preferred.
- the method for producing a cured product of the present invention comprises, on a substrate, the steps of forming a resin film made of a resin composition containing a photosensitive compound (c) among the resin compositions of the present invention, and exposing the resin film. 3.
- a method for producing a cured product, comprising the steps of developing an exposed resin film and heat-treating the developed resin film.
- the resin film can be obtained by coating a resin composition containing a photosensitive compound (c) among the resin compositions of the present invention to obtain a coating film of the resin composition, and drying the coated film. .
- Examples of methods for applying the resin composition of the present invention include spin coating, slit coating, dip coating, spray coating, and printing.
- the slit coating method is preferable because it can be applied with a small amount of coating liquid and is advantageous for cost reduction.
- the amount of the coating liquid required for the slit coating method is, for example, about 1/5 to 1/10 of that for the spin coating method.
- Examples of slit nozzles used for coating include "Linear Coater” manufactured by Dainippon Screen Mfg. Co., Ltd., "Spinless” manufactured by Tokyo Ohka Kogyo Co., Ltd., “TS Coater” manufactured by Toray Engineering Co., Ltd., and Chugai Ro Kogyo Co., Ltd.
- the coating speed is generally in the range of 10 mm/sec to 400 mm/sec.
- the film thickness of the coating film varies depending on the solid content concentration and viscosity of the resin composition, but it is usually applied so that the film thickness after drying is 0.1 to 10 ⁇ m, preferably 0.3 to 5 ⁇ m.
- the base material to be coated with the resin composition may be pretreated with the adhesion improver described above.
- a pretreatment method for example, 0.5 to 20% by mass of an adhesion improver is added to a solvent such as isopropanol, ethanol, methanol, water, tetrahydrofuran, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, ethyl lactate, and diethyl adipate.
- a solvent such as isopropanol, ethanol, methanol, water, tetrahydrofuran, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, ethyl lactate, and diethyl adipate.
- a method of treating the base material surface using the dissolved solution can be mentioned. Methods for treating the substrate surface include spin coating, slit die coating, bar coating, dip coating, spray coating, vapor treatment, and the like.
- drying treatment under reduced pressure is performed as necessary.
- the speed of drying under reduced pressure depends on the volume of the vacuum chamber, the capacity of the vacuum pump, the diameter of the pipe between the chamber and the pump, and the like. is preferably set to A general vacuum drying time is often about 30 seconds to 100 seconds, and the ultimate pressure in the vacuum chamber at the end of the vacuum drying is usually 100 Pa or less with the coated substrate present. By setting the ultimate pressure to 100 Pa or less, the surface of the coating film can be kept in a dry state with reduced stickiness, thereby suppressing surface contamination and particle generation during subsequent substrate transport.
- the heating time is preferably from 1 minute to several hours.
- the heating temperature varies depending on the type and purpose of the coating film, but is preferably 80° C. or higher, more preferably 90° C. or higher, from the viewpoint of accelerating solvent drying during prebaking.
- the temperature is preferably 150° C. or lower, more preferably 140° C. or lower, from the viewpoint of reducing the progress of curing during prebaking.
- a resin film containing a photosensitive compound (c) can form a pattern.
- a desired pattern can be formed by exposing the resin film to actinic rays through a photomask having a desired pattern, followed by development.
- the photomask used for exposure is preferably a halftone photomask having a light-transmitting portion, a light-shielding portion, and a semi-light-transmitting portion.
- a pattern having a step shape can be formed after development.
- the portion formed from the light shielding portion corresponds to the thick film portion
- the portion formed from the light shielding portion corresponds to the thick film portion.
- the portion formed from the tone exposure portion corresponds to the thin film portion.
- the transmittance of the semi-light-transmitting portion is preferably 5% or more, more preferably 10% or more.
- the transmittance of the semi-transparent portion is within the above range, the step between the thick film portion and the thin film portion can be clearly formed.
- the transmittance of the translucent portion is preferably 30% or less, preferably 25% or less, more preferably 20% or less, and most preferably 15% or less.
- the film thickness of the thin film portion can be formed thick, even when forming a black cured product having a low optical density in visible light per 1 ⁇ m of film thickness. , the optical density of the entire film can be increased.
- Actinic rays used for exposure include ultraviolet rays, visible rays, electron beams, and X-rays.
- the exposed portion dissolves in the developer.
- the exposed areas are cured and rendered insoluble in the developer.
- Developers include tetramethylammonium hydroxide, diethanolamine, diethylaminoethanol, sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, triethylamine, diethylamine, methylamine, dimethylamine, dimethylaminoethyl acetate, dimethylaminoethanol, dimethyl
- alkaline compounds such as aminoethyl methacrylate, cyclohexylamine, ethylenediamine and hexamethylenediamine are preferred.
- Polar solvents such as N-methyl-2-pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, dimethylsulfoxide, ⁇ -butyrolactone and dimethylacrylamide, and alcohols such as methanol, ethanol and isopropanol are added to these alkaline aqueous solutions.
- esters such as ethyl lactate and propylene glycol monomethyl ether acetate; and ketones such as cyclopentanone, cyclohexanone, isobutyl ketone and methyl isobutyl ketone.
- developing methods include methods such as spray, paddle, immersion, and ultrasonic waves.
- the pattern formed by development is preferably rinsed with distilled water.
- Alcohols such as ethanol and isopropyl alcohol, and esters such as ethyl lactate and propylene glycol monomethyl ether acetate may be added to distilled water for rinsing.
- the heat treatment temperature is preferably 180° C. or higher, more preferably 200° C. or higher, even more preferably 230° C. or higher, and particularly preferably 250° C. or higher, from the viewpoint of further reducing the amount of outgassing generated from the cured product.
- the temperature is preferably 500° C. or lower, more preferably 450° C. or lower. Within this temperature range, the temperature may be raised stepwise or may be raised continuously. From the viewpoint of further reducing the amount of outgas, the heat treatment time is preferably 30 minutes or longer.
- the time is preferably 3 hours or less.
- a first aspect of the cured product of the present invention is a cured product obtained by curing the resin composition of the present invention.
- the resin composition of the present invention contains a polyimide precursor, a polybenzoxazole precursor, a copolymer thereof, or a copolymer of them and a polyimide, an imide ring or an oxazole ring is formed by heat treatment. Therefore, heat resistance and chemical resistance can be further improved.
- the xanthene compound (b), (d-2) component, (d-1) component and/or thermochromic compound and optionally (d-3) component are used in combination to obtain visible light.
- the heat treatment temperature is preferably 180° C. or higher, more preferably 200° C. or higher, even more preferably 230° C. or higher, and particularly preferably 250° C. or higher, from the viewpoint of further reducing the amount of outgassing generated from the cured product.
- the temperature is preferably 500° C. or lower, more preferably 450° C. or lower.
- the temperature may be raised stepwise or may be raised continuously.
- the heat treatment time is preferably 30 minutes or longer.
- the time is preferably 3 hours or less. For example, there is a method of performing heat treatment at 150° C. and 250° C. for 30 minutes each, and a method of performing heat treatment while linearly increasing the temperature from room temperature to 300° C. over 2 hours.
- a second aspect of the cured product of the present invention is a cured product containing a xanthene compound (b′) represented by formula (2) (hereinafter sometimes referred to as a cured product of the second aspect). be.
- a 1 to A 4 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or an aryl group having 6 to 10 carbon atoms which may have an electron-donating substituent. However, at least three of A 1 to A 4 are aryl groups having 6 to 10 carbon atoms which may have the electron donating substituent, and the number of carbon atoms which may have the electron donating substituent At least one of the 6-10 aryl groups has an electron-donating substituent.
- R 1 to R 4 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxy group, -SO 3 H, -SO 3 - , -SO 3 NR 6 R 7 , -COOH, -COO - , -COOR 8 , —CONR 9 R 10 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms.
- R5 represents a hydrogen atom, -SO3H , -SO3- , -SO3NR6R7 , -COOH , -COO- , -COOR8 , -CONR9R10 ;
- R 6 to R 10 each independently represent a monovalent hydrocarbon group having 1 to 20 carbon atoms.
- the xanthene compound (b') represented by Formula (2) shall be neutral or cationic in charge.
- the cured product of the second aspect preferably further contains a coloring agent (d) other than the formula (2), and at 350 to 800 nm, any of the range of 490 nm or more and less than 580 nm More preferably, it contains a coloring agent (d-2) having a maximum absorption wavelength.
- xanthene compound (b') represented by formula (2) are the same as those of the xanthene compound (b) represented by formula (1).
- the resin composition and cured product containing the xanthene compound (b) of the present invention can be used for surface protective layers and interlayer insulating layers of semiconductor elements, insulating layers of organic electroluminescence (hereinafter referred to as EL) elements, and organic EL elements.
- EL organic electroluminescence
- CMOS complementary metal-oxide-semiconductor
- PFRAM Polymer Ferroelectric RAM
- OUM Phase Change RAM
- a display device including a first electrode formed on a substrate and a second electrode provided opposite to the first electrode for example, a display device using an LCD, ECD, ELD, or an organic electroluminescence device (Organic electroluminescence device) It can also be used as an insulating layer.
- An organic EL display device, a semiconductor device, and a semiconductor electronic component will be described below as examples.
- An organic EL display device of the present invention is an organic EL display device having a driving circuit, a planarizing layer, a first electrode, an insulating layer, a light-emitting layer and a second electrode on a substrate, wherein the planarizing layer and/or the insulating layer A layer has the cured product of the present invention.
- the substrate is a part of the organic EL display device.
- the insulating layer contains the cured product of the present invention, and that the insulating layer has an optical density of 0.5 to 1.5 in visible light per 1 ⁇ m of film thickness.
- the cured product can improve the light-shielding property, so in a display device such as an organic EL display device or a liquid crystal display device, visualization of electrode wiring and external light reflection can be further reduced. , the contrast in image display can be improved. Further, when the OD value is 1.5 or less, the sensitivity at the time of exposure when a resin composition containing a photosensitive compound is formed can be improved.
- the thickness of the insulating layer is preferably 1.0 to 5.0 ⁇ m, more preferably 1.5 ⁇ m or more, and still more preferably 2.0 ⁇ m or more.
- a substrate made of glass, various plastics, or the like is provided with TFTs and wirings located on the sides of the TFTs and connected to the TFTs, and unevenness is covered thereon.
- a planarization layer is thus provided, and a display element is provided on the planarization layer.
- the display element and the wiring are connected through a contact hole formed in the planarization layer.
- the substrate having the above-described drive circuit includes a resin film in the organic EL display device.
- a cured product obtained by curing the resin composition of the present invention is used as an insulating layer or a flattening layer of such a flexible display device, it is particularly preferably used because of its excellent bending resistance.
- Polyimide is particularly preferred as the resin film from the viewpoint of improving adhesion to the cured product obtained by curing the resin composition of the present invention.
- the organic EL display device of the present invention preferably further comprises a color filter having a black matrix in order to enhance the effect of reducing external light reflection.
- the black matrix preferably contains a resin such as epoxy resin, acrylic resin, urethane resin, polyester resin, polyimide resin, polyolefin resin, or siloxane resin.
- the black matrix contains a coloring agent.
- a coloring agent for example, a black organic pigment, a mixed color organic pigment, a black inorganic pigment, or the like can be contained.
- black organic pigments that can be used include carbon black, perylene black, aniline black, and benzofuranone pigments.
- Mixed-color organic pigments may contain, for example, pseudo-black pigments obtained by mixing two or more pigments such as red, blue, green, purple, yellow, magenta and/or cyan.
- Black inorganic pigments include, for example, graphite; fine particles of metals such as titanium, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, and silver; metal oxides; metal composite oxides; metal sulfides; substances; metal oxynitrides; metal carbides and the like.
- metals such as titanium, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, and silver
- metal oxides such as titanium, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, and silver
- metal oxides such as titanium composite oxides
- metal sulfides such as sodium shieldide
- substances metal oxynitrides
- metal carbides and the like are preferred.
- the OD value of the black matrix is preferably 1.5 or more, more preferably 2.5 or more, and even more preferably 4.5 or more.
- FIG. 1 A cross-sectional view of an example of a TFT substrate is shown in FIG.
- Bottom gate type or top gate type TFTs (thin film transistors) 1 are provided in a matrix on a substrate 6 , and a TFT insulating layer 3 is formed to cover the TFTs 1 .
- a wiring 2 connected to the TFT 1 is provided on the TFT insulating layer 3 .
- a flattening layer 4 is provided on the TFT insulating layer 3 so as to bury the wiring 2 therein.
- a contact hole 7 reaching the wiring 2 is provided in the planarization layer 4 .
- An ITO (transparent electrode) 5 is formed on the planarization layer 4 while being connected to the wiring 2 through the contact hole 7 .
- the ITO 5 becomes an electrode of a display element (for example, an organic EL element).
- An insulating layer 8 is formed so as to cover the periphery of the ITO 5 .
- the organic EL element may be of a top emission type in which light is emitted from the side opposite to the substrate 6, or may be of a bottom emission type in which light is extracted from the substrate 6 side. In this manner, an active matrix type organic EL display device is obtained in which the TFTs 1 for driving the organic EL elements are connected to the respective organic EL elements.
- the TFT insulating layer 3, the planarizing layer 4 and/or the insulating layer 8 are formed by, as described above, the steps of forming a resin film made of the resin composition of the present invention, exposing the resin film, and developing the exposed resin film. and a step of heat-treating the developed resin film.
- An organic EL display device can be obtained by a manufacturing method including these steps.
- the display device of the present invention is a display device comprising at least metal wiring, the cured product of the present invention, and a plurality of light-emitting elements, wherein the light-emitting element has a pair of electrode terminals on one surface thereof, and the pair of The electrode terminals of (1) are connected to the plurality of metal wirings extending in the cured product, and the plurality of metal wirings are configured to maintain electrical insulation due to the cured product.
- the display device of the present invention refers to a display device other than an organic EL display device.
- a display device 11 has a plurality of light emitting elements 12 arranged on a counter substrate 15 and a cured product 13 arranged on the light emitting elements 12 .
- the term "on the light emitting element” means not only the surface of the light emitting element but also the support substrate and the upper side of the light emitting element.
- the embodiment shown in FIG. 2 exemplifies a configuration in which a plurality of cured products 13 are further laminated on the cured product 13 arranged so as to be in contact with at least a part of the light emitting element 12, and a total of three layers are laminated.
- the cured product 13 may be a single layer.
- the light emitting element 12 has a pair of electrode terminals 16 on the surface opposite to the surface in contact with the counter substrate 15 , and each electrode terminal 16 is connected to a metal wiring 14 extending through the cured product 13 .
- the cured product 13 also functions as an insulating layer. It's becoming A structure in which the metal wiring maintains electrical insulation means that a portion of the metal wiring that requires electrical insulation is covered with a cured product obtained by curing a resin composition containing an alkali-soluble resin (a). means.
- the state in which the insulating layer has electrical insulation means the state in which the volume resistivity of the insulating layer is 10 12 ⁇ cm or more.
- the light emitting element 12 is electrically connected to a driving element 18 attached to a light emitting element driving substrate 17 provided at a position facing the counter substrate 15 through metal wirings 14 and 14c. Light emission can be controlled.
- the light emitting element driving substrate 17 is electrically connected to the metal wiring 14 via solder bumps 20, for example.
- a barrier metal 19 may be provided in order to prevent diffusion of metal such as the metal wiring 14 .
- the cured product 13 is black and has an OD value of 0.5 to 1.5 in visible light per 1 ⁇ m of thickness of the insulating layer.
- the cured product can improve the light-shielding property, so in a display device such as an organic EL display device or a liquid crystal display device, visualization of electrode wiring and external light reflection can be further reduced. , the contrast in image display can be improved. Further, when the OD value is 1.5 or less, the sensitivity at the time of exposure when a resin composition containing a photosensitive compound is formed can be improved.
- the transmission spectrum of the prebaked film B is converted into absorbance and subtracted from the transmission spectrum of the prebaked film A to obtain the transmission spectrum derived from the xanthene compound (b). It was judged to be "A” when it was present, “B” when it was at 580 nm or more and less than 600 nm, and "C” when it was at less than 580 nm.
- the transmission spectra of the prebaked film and the cured product at a wavelength of 300 nm to 800 nm are measured in the same manner as in (1), and from the transmission spectra of the prebaked film A and the cured film A, the corresponding transmission spectra of the prebaked film B and the cured film B are obtained.
- the transmission spectra of the prebaked film and the cured film derived from the xanthene compound (b) were obtained by converting to absorbance and then subtracting the absorbance.
- the absorbance at the maximum absorption wavelength is calculated from the transmission spectra of the prebaked film and the cured film derived from the obtained xanthene compound (b), and the absorbance change rate (absorbance of the cured product derived from the xanthene compound (b) / derived from the xanthene compound (b) of the pre-baked film) (%) was calculated.
- the rate of change in absorbance was 90% or more, it was judged as "A"; when it was less than 90% and 75% or more, it was judged as "B";
- TMAH tetramethylammonium aqueous solution
- the resulting pattern was observed with an FPD microscope MX61 (manufactured by Olympus Corporation) at a magnification of 20 times to measure the aperture diameter of the holes.
- the minimum exposure dose at which the contact hole diameter reached 10 ⁇ m was determined and defined as the sensitivity. If the sensitivity was less than 120 mJ/ cm2 , it was judged as "A”; if it was 120 mJ/ cm2 or more and less than 150 mJ/ cm2 , it was judged as "B"; bottom.
- the measurement area was about 201 cm 2 inside a circle with a radius of 8 cm from the center of the wafer, and the number of foreign substances (defect density) per 1 cm 2 of the coating film was obtained.
- TOF-SIMS analysis was performed.
- the TOF-SIMS device and measurement conditions used for analysis are as follows.
- Apparatus ION-TOF "TOF.SIMS5" Primary ion: Bi 3 ++ Acceleration voltage of primary ions: 30 kV Primary ion current: 0.1 pA Etching ion: Ar gas cluster ion Etching ion acceleration voltage: 5.0 kV Measurement range: 200 ⁇ m ⁇ 200 ⁇ m.
- Synthesis Example 1 Synthesis of hydroxyl group-containing diamine compound ( ⁇ ) 18.3 g (0.05 mol) of 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane (hereinafter referred to as BAHF) was added to 100 mL of acetone, It was dissolved in 17.4 g (0.3 mol) of propylene oxide and cooled to -15°C. A solution prepared by dissolving 20.4 g (0.11 mol) of 3-nitrobenzoyl chloride in 100 mL of acetone was added dropwise thereto. After completion of the dropwise addition, the mixture was allowed to react at -15°C for 4 hours, and then returned to room temperature. The precipitated white solid was filtered off and vacuum dried at 50°C.
- BAHF 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane
- Synthesis Example 2 Synthesis of quinonediazide compound (c-1) 21.22 g (0.05 mol) of TrisP-PA (trade name, manufactured by Honshu Chemical Industry Co., Ltd.) and 5-naphthoquinonediazide sulfonyl chloride 26 were mixed under a stream of dry nitrogen. .87 g (0.10 mol) was dissolved in 450 g of 1,4-dioxane and brought to room temperature. 15.18 g of triethylamine mixed with 50 g of 1,4-dioxane was added dropwise thereto so that the inside of the system did not reach 35° C. or higher. After dropping, the mixture was stirred at 30°C for 2 hours.
- TrisP-PA trade name, manufactured by Honshu Chemical Industry Co., Ltd.
- Synthesis Example 3 Synthesis of alkali-soluble resin (a-1) 3,3′,4,4′-diphenyl ether tetracarboxylic dianhydride (hereinafter referred to as ODPA) 31.0 g (0.10 mol) under dry nitrogen stream was dissolved in 500 g of 1-methyl-2-pyrrolidone (hereinafter sometimes referred to as NMP). 45.35 g (0.075 mol) of the hydroxyl group-containing diamine compound ( ⁇ ) obtained in Synthesis Example 1 and 1,3-bis(3-aminopropyl)tetramethyldisiloxane (hereinafter referred to as SiDA)1.
- ODPA 3,3′,4,4′-diphenyl ether tetracarboxylic dianhydride
- NMP 1-methyl-2-pyrrolidone
- SiDA 1,3-bis(3-aminopropyl)tetramethyldisiloxane
- Synthesis Example 4 Synthesis of xanthene compound (b-1)
- 20.26 g (0.05 mol) of the compound represented by ( ⁇ ) 120 g of ethylene glycol and 20.58 g of 4-ethoxyaniline ( 0.15 mol) was heated and stirred at 120° C. for 18 hours. After completion of the reaction, the reaction solution was allowed to cool to room temperature, and then added dropwise to 450 g of 17.5% by mass hydrochloric acid at 0 to 10° C. and stirred for 1 hour.
- a xanthene compound (b-1) in which three of the nitrogen atoms were substituted with aryl groups.
- the resulting compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- Synthesis Example 5 Synthesis of xanthene compound (b-2) 18.46 g (0.05 mol) of a compound represented by ( ⁇ ) in the following reaction formula [2], 120 g of sulfolane, 13.63 g of zinc chloride and 4-ethoxyaniline 20.58 g (0.15 mol) of the mixture was heated and stirred at 170° C. for 8 hours. After completion of the reaction, the reaction solution was allowed to cool to room temperature, and then added dropwise to 450 g of 17.5% by mass hydrochloric acid at 0 to 10° C. and stirred for 1 hour.
- a xanthene compound (b-2) in which four nitrogen atoms were substituted with aryl groups.
- the obtained compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- Synthesis Example 6 Synthesis of xanthene compound (b-3)
- 8.10 g (0.01 mol) of the xanthene compound (b-2) obtained in Synthesis Example 5 2.54 g (0.01 mol) of diphenylamine, 0.015 mol
- 10.11 g (0.1 mol) of triethylamine and 150 g of 1,2-dichloroethane, 1.69 g (0.011 mol) of phosphorus oxychloride was added dropwise at room temperature, and the mixture was stirred at 85° C. for 3 hours. It was heated and stirred.
- reaction solution was allowed to cool to room temperature, poured into 300 g of pure water, and extracted with 100 g of chloroform. After the organic layer was washed with 150 g of 4 mol/L hydrochloric acid and 150 g of pure water, the solvent was distilled off to obtain xanthene compound (b-3) in which xanthene compound (b-2) was amidated.
- xanthene compound (b-3) was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- Synthesis Example 7 Synthesis of xanthene compound (b-4)
- compound (b-2-1) obtained in the same manner as in Synthesis Example 5 22.83 g (0.04 mol), 1- A mixture of 150 g of methyl-2-pyrrolidone, 1.3 g of copper powder, 8.3 g of potassium carbonate and 17.43 g (0.08 mol) of 3-iodotoluene was heated and stirred at 150° C. for 12 hours. After completion of the reaction, the reaction solution was filtered to remove insoluble matter, and the reaction solution was added dropwise to 450 g of 17.5% mass hydrochloric acid at 0 to 10° C. and stirred for 1 hour.
- a xanthene compound in which four nitrogen atoms were substituted with aryl groups In a mixture of 7.51 g (0.01 mol) of the xanthene compound obtained, 2.54 g (0.015 mol) of diphenylamine, 10.11 g (0.1 mol) of triethylamine and 150 g of 1,2-dichloroethane at room temperature 1.69 g (0.011 mol) of phosphorus oxychloride was added dropwise, and the mixture was heated and stirred at 85° C. for 3 hours.
- reaction solution was allowed to cool to room temperature, poured into 300 g of pure water, and extracted with 100 g of chloroform. After the organic layer was washed with 150 g of 4 mol/L hydrochloric acid and 150 g of pure water, the solvent was distilled off to obtain an amidated xanthene compound (b-4).
- the resulting compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- Synthesis Example 8 Synthesis of xanthene compound (b-5)
- compound (b-4) obtained in the same manner as in Synthesis Example 7 was N,N-
- the solution was dissolved in 150 g of dimethylformamide (DMF), 2.91 g (0.015 mol) of sodium p-toluenesulfonate was added, and the mixture was heated and stirred at 40° C. for 3 hours. After allowing the reaction solution to cool to room temperature, the reaction solution is poured into 1000 g of pure water, the precipitated crystals are collected by filtration, washed with water, and dried at 60° C. for 24 hours to obtain the counter ion of (b-4).
- a xanthene compound (b-5) was obtained by exchanging the .
- the obtained compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- Synthesis Example 9 Synthesis of xanthene compound (b-6) A xanthene compound (b-6) was obtained by exchanging the counter ion of (b-4) in the same manner as in Synthesis Example 8 except that The resulting compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- Synthesis Example 10 Synthesis of xanthene compound (b-7)
- the obtained compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- Synthesis example 11 Synthesis of xanthene compound (b-8) A xanthene compound (b-8) was obtained by exchanging the counter ion of (b-4) in the same manner as in Synthesis Example 5 except that the xanthene compound (b-8) was obtained. The obtained compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound. LC-MS (ESI, posi): m/z 903 [M+H] + LC-MS (ESI, nega): m/z 149 [M] -
- Synthesis Example 12 Synthesis of xanthene compound (b-9) In the following reaction formula [11], 2.91 g (0.015 mol) of sodium p-toluenesulfonate was replaced with 5.13 g (0.015 mol) of sodium tetraphenylborate. A xanthene compound (b-9) was obtained in the same manner as in Synthesis Example 8 except that the counter ion of (b-4) was exchanged. The obtained compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound. LC-MS (ESI, posi): m/z 903 [M+H] + LC-MS (ESI, nega): m/z 319 [M] -
- Synthesis Example 13 Synthesis of xanthene compound (b-10)
- a xanthene compound (b-10) was obtained by exchanging the counter ion of (b-4) in the same manner as in Synthesis Example 8, except that the counter ion was changed to (b-10).
- the obtained compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- Synthesis Example 11 Synthesis of xanthene compound (b-11) In the following reaction formula [13], 20.58 g (0.15 mol) of 4-ethoxyaniline was replaced with 16.07 g (0.15 mol) of p-toluidine. In the same manner as in Synthesis Example 5, a xanthene compound (b-11-1) having four nitrogen atoms substituted with aryl groups was obtained. Next, the same procedure as in Synthesis Example 6 except that the obtained xanthene compound (b-2) was 8.10 g (0.01 mol) and the xanthene compound (b-11-1) was 6.90 g (0.01 mol).
- a xanthene compound (b-11) obtained by amidating the xanthene compound (b-11-1) was obtained.
- the resulting compound was subjected to LC-MS analysis using LC-MS2020 (manufactured by Shimadzu Corporation) and confirmed to be the target compound.
- the names of the compounds used in Examples and Comparative Examples are shown below.
- the colorant (d) is synthesized using a known method, and a UV-visible spectrophotometer MultiSpec-1500 (manufactured by Shimadzu Corporation) is used to measure the transmission spectrum at a wavelength of 300 nm to 800 nm in a GBL solution.
- the maximum absorption wavelength was calculated by The maximum absorption wavelength of compound (d10-2-1) was 534 nm, and the maximum absorption wavelength of compound (d10-2-2) was 536 nm.
- e-1 4,4',4''-methylidine trisphenol (thermochromogenic compound)
- GBL ⁇ -butyrolactone
- EL Ethyl lactate
- PGME Propylene glycol monomethyl ether
- Example 1 7.0 g of polyimide precursor (a-1) and 0.5 g of xanthene compound (b-1) were added to 20 g of GBL to obtain varnish A1 of a resin composition containing xanthene compound (b). Further, 7.0 g of polyimide precursor (a-1) was added to 20 g of GBL to obtain varnish B1 of a resin composition containing no xanthene compound (b). Using the obtained varnishes A1 and B1, the maximum absorption wavelength of 350 to 800 nm and the heat resistance of the dye were evaluated as described above.
- Example 12 Polyimide precursor (a-1) 10.0 g, xanthene compound (b) 2.0 g, photosensitive compound (c-1) 2.0 g, (d10-2-2) 1.0 g, (e-1) 2 0 g of the solution was dissolved in 10 g of GBL, 20 g of EL and 70 g of PGME, and filtered through a 0.2 ⁇ m polytetrafluoroethylene filter to obtain varnish AA of a positive photosensitive resin composition. Using the obtained varnish, the sensitivity, OD value, and change in OD value were evaluated as described above.
- Example 26 Using the cured film of the resin composition AE obtained in Example 16, the xanthene compound (b') in the cured film was analyzed by TOF-SIMS as in the previous term. As a result of the analysis, a molecular ion of m/z 902 ( 902 C 62 H 52 N 3 O 4 ) was confirmed. From this result, it was confirmed that the cured film of the resin composition AE contained the cation moiety of the xanthene compound (b-5).
- Tables 1 to 4 show the composition and evaluation results of each example and comparative example.
- TFT thin film transistor
- Wiring 3 TFT insulating layer 4: Flattening layer 5: ITO (transparent electrode) 6: Substrate 7: Contact hole 8: Insulating layer 11: Display device 12: Light emitting element 13: Cured material 14, 14c: Metal wiring 15: Counter substrate 16: Electrode terminal 17: Light emitting element driving substrate 18: Driving element 19: Barrier Metal 20: solder bumps
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Abstract
Description
[1]式(1)で表されるキサンテン化合物(b)。
[2]前記電子供与性置換基のハメット則の置換基定数σp値が、-0.20以下である上記[1]に記載のキサンテン化合物(b)。
[3]前記式(1)において、nが0である上記[1]または[2]に記載のキサンテン化合物(b)。
[4]前記式(1)において、nが1であり、Zが脂肪族または芳香族のスルホナートイオンである上記[1]または[2]に記載のキサンテン化合物(b)。
[5]上記[1]~[4]のいずれかに記載のキサンテン化合物(b)とアルカリ可溶性樹脂(a)を含む樹脂組成物。
[6]さらに感光性化合物(c)を含む上記[5]に記載の樹脂組成物。
[7]前記感光性化合物(c)がキノンジアジド化合物を含む上記[6]に記載の樹脂組成物。
[8]さらに、350~800nmにおいて、490nm以上580nm未満の範囲のいずれかに最大吸収波長を有する着色剤(d-2)を含有する上記[5]~[7]のいずれかに記載の樹脂組成物。
[9]前記式(1)においてnが1かつZが有機アニオンであるキサンテン化合物(b1)、および有機イオン同士のイオン対を形成しているイオン性染料(d10)を含み、前記有機アニオンが1種類である上記[5]~[7]のいずれかに記載の樹脂組成物。
[10]前記アルカリ可溶性樹脂(a)が、ポリイミド、ポリイミド前駆体、ポリベンゾオキサゾール、ポリベンゾオキサゾール前駆体、ポリアミドイミド、ポリアミドイミド前駆体およびそれら共重合体からなる群より選択される1種類以上を含む上記[5]~[9]のいずれかに記載の樹脂組成物。
[11]前記樹脂組成物中に含まれる全塩素原子と全臭素原子の総質量が、樹脂組成物の固形分の総質量に対して、150ppm以下である上記[5]~[10]のいずれかに記載の樹脂組成物。
[12]上記[5]~[10]のいずれかに記載の樹脂組成物を硬化した硬化物。
[13]式(2)で表されるキサンテン化合物(b’)を含有する硬化物。
[14]基板上に、上記[6]~[11]のいずれかに記載の樹脂組成物からなる樹脂膜を形成する工程、該樹脂膜を露光する工程、露光した樹脂膜を現像する工程および現像した樹脂膜を加熱処理する工程を含む硬化物の製造方法。
[15]前記樹脂膜を露光する工程において、露光時に用いるフォトマスクが、透光部、遮光部および半透光部を有するハーフトーンフォトマスクであり、透光部の透過率を100%とした時の半透光部の透過率が5%~30%である上記[14]に記載の硬化物の製造方法。
[16]基板上に、駆動回路、平坦化層、第1電極、絶縁層、発光層、および第2電極を有する有機EL表示装置であって、該平坦化層および/または絶縁層が上記[12]または[13]に記載の硬化物を有する有機EL表示装置。
[17]前記絶縁層が前記硬化物を有し、前記絶縁層の膜厚1μm当たりの可視光における光学濃度が0.5~1.5である上記[16]に記載の有機EL表示装置。
[18]さらにブラックマトリクスを有するカラーフィルタを具備する上記[16]または[17]に記載の有機EL表示装置。
[19]少なくとも金属配線、上記[12]または[13]に記載の硬化物、および複数の発光素子を有する表示装置であって、前記発光素子はいずれか一方の面に一対の電極端子を具備し、前記一対の電極端子は前記硬化物中に延在する複数本の前記金属配線と接続し、複数本の前記金属配線は、前記硬化物により電気的絶縁性を保持する構成である、表示装置。
本発明のキサンテン化合物(b)は、式(1)で表される化合物である。
本発明の樹脂組成物は、本発明のキサンテン化合物(b)とアルカリ可溶性樹脂(a)を含む。アルカリ可溶性とは、樹脂をγ-ブチロラクトンに溶解した溶液をシリコンウエハ上に塗布し、120℃で4分間プリベークを行って膜厚10μm±0.5μmのプリベーク膜を形成し、該プリベーク膜を23±1℃の2.38質量%テトラメチルアンモニウムヒドロキシド水溶液に1分間浸漬した後、純水でリンス処理したときの膜厚減少から求められる溶解速度が50nm/分以上であることをいう。
上記式(3)中、X(R11)t(COOR12)uは酸の残基を表す。Xは炭素数4~40かつ2~8価の有機基であり、なかでも芳香族環または環状脂肪族基を含有する2~8価の有機基が好ましい。
上記酸の残基のうち、トリカルボン酸またはテトラカルボン酸の残基の場合は、1つまたは2つのカルボキシ基が式(3)における(COOR12)に相当する。
ポリイミドの製造方法としては、例えば、前述の方法で得られたポリアミド酸またはポリアミド酸エステルを溶剤中で脱水閉環する方法などが挙げられる。脱水閉環の方法としては、酸や塩基などによる化学処理、加熱処理などが挙げられる。
ポリアミドイミド前駆体としては、トリカルボン酸、対応するトリカルボン酸無水物、トリカルボン酸無水物ハライドとジアミン化合物との重合体が挙げられ、無水トリメリット酸クロライドと芳香族ジアミン化合物との重合体が好ましい。ポリアミドイミド前駆体の製造方法としては、例えば、低温中でトリカルボン酸、対応するトリカルボン酸無水物、トリカルボン酸無水物ハライドなどとジアミン化合物を溶剤中で反応させる方法などが挙げられる。
本発明の樹脂組成物は、さらに感光性化合物(c)を含んでもよい。
本発明の樹脂組成物は、キサンテン化合物(b)以外の着色剤(d)を含有してもよい。着色剤(d)を含有させることで、樹脂組成物の膜を透過する光、または樹脂組成物の膜から反射する光から、着色剤(d)が吸収する波長の光を遮光する、遮光性を付与することができる。遮光性を付与することで、後述する本発明の硬化物を有機EL表示装置の平坦化層および/または絶縁層としたときにTFTへの光の侵入による劣化や誤作動、リーク電流などを防ぐことができる。さらに、配線やTFTからの外光反射の抑制や、発光エリアと非発光エリアのコントラストを向上させることができる。
本発明の樹脂組成物は、式(1)においてnが1かつZが有機アニオンであるキサンテン化合物(b1)(以下、キサンテン化合物(b1)と呼ぶ場合がある)、および有機イオン同士のイオン対を形成するイオン性染料(d10)を含み、前記有機アニオンが1種類であることが好ましい。ただし、有機イオン同士のイオン対を形成するイオン性染料とは、個々の有機アニオン、有機カチオンからなるイオン性染料を表し、式(1)においてnが0であるキサンテン化合物のように、単体にてアニオン部位とカチオン部位を有し、全体として電荷的に中性となる化合物は有機アニオンとしては数えない。また、ここで有機アニオンが1種類であるとは、キサンテン化合物(b1)中の有機アニオンとイオン性染料(d10)を構成する有機アニオンとが同一であることを意味する。本発明の樹脂組成物が、キサンテン化合物(b1)およびイオン性染料(d10)を含み、それぞれの有機アニオン部同士が異なる場合、樹脂組成物に含まれる有機アニオン種は2種以上となる。この場合、樹脂組成物中に有機アニオン、有機カチオンが複数種存在することで、イオン性染料同士のイオン交換により冷凍保管中に異物が増加し、保存安定性が悪化する問題が発生する。一方、キサンテン化合物(b1)およびイオン性染料(d10)を含む場合、本発明の樹脂組成物中に含まれる有機アニオン種が1種類であることにより、冷凍保管時の保存安定性が向上する。これはキサンテン化合物(b1)およびイオン染料(d10)に対する有機アニオン種が限定されたことにより、有機カチオン部同士が異なっていても樹脂組成物中においてイオン性染料同士のイオン交換が抑制されたからと推定される。
中でも、塩基性染料は、硬化膜の黒色度を高くできる点で、キサンテン系塩基性染料、トリアリールメタン系塩基性染料を含有することが好ましく、耐熱性の高さの点で、キサンテン系酸性染料を含有することが好ましい。
本発明の樹脂組成物は、熱発色性化合物を含有してもよい。熱発色性化合物は加熱処理により発色し、350nm以上、700nm以下に最大吸収を有する熱発色性化合物であり、より好ましくは加熱処理により発色し、350nm以上、500nm以下に最大吸収を有する熱発色性化合物である。
本発明の樹脂組成物は、ラジカル重合性化合物を含有してもよい。特に、上記樹脂組成物が光重合開始剤(c2)を含有する場合は、ラジカル重合性化合物を含有することが必須である。ラジカル重合性化合物とは、分子中に複数のエチレン性不飽和二重結合を有する化合物をいう。露光時、前述の光重合開始剤(c2)から発生するラジカルによって、ラジカル重合性化合物のラジカル重合が進行し、光照射部が不溶化することにより、ネガ型のパターンを得ることができる。さらにラジカル重合性化合物を含有することにより、光照射部の光硬化が促進されて、感度をより向上させることができる。加えて、熱硬化後の架橋密度が向上することから、硬化物の硬度を向上させることができる。
本発明の樹脂組成物は、熱架橋剤を含有してもよい。熱架橋剤とは、アルコキシメチル基、メチロール基、エポキシ基、オキセタニル基などの熱反応性の官能基を分子内に少なくとも2つ有する化合物を指す。熱架橋剤を含有することにより、熱架橋剤とアルカリ可溶性樹脂(a)との間、または熱架橋剤同士で架橋し、熱硬化後の硬化物の耐熱性、耐薬品性および折り曲げ耐性を向上させることができる。
熱架橋剤は2種類以上を組み合わせて含有してもよい。
本発明の樹脂組成物は、溶剤を含有してもよい。溶剤を含有することにより、ワニスの状態にすることができ、塗布性を向上させることができる。
本発明の樹脂組成物は、密着改良剤を含有してもよい。密着改良剤としては、ビニルトリメトキシシラン、ビニルトリエトキシシラン、エポキシシクロヘキシルエチルトリメトキシシラン、3-グリシドキシプロピルトリメトキシシラン、3-グリシドキシプロピルトリエトキシシラン、p-スチリルトリメトキシシラン、3-アミノプロピルトリメトキシシラン、3-アミノプロピルトリエトキシシラン、N-フェニル-3-アミノプロピルトリメトキシシランなどのシランカップリング剤、チタンキレート剤、アルミキレート剤、芳香族アミン化合物とアルコキシ基含有ケイ素化合物を反応させて得られる化合物などを含有することができる。これらを2種以上含有してもよい。これらの密着改良剤を含有することにより、樹脂膜を現像する場合などに、シリコンウエハ、酸化インジウムスズ(ITO)、SiO2、窒化ケイ素などの下地基材との現像密着性を高めることができる。また、洗浄などに用いられる酸素プラズマ、UVオゾン処理に対する耐性を高めることができる。密着改良剤の含有量は、溶剤を除く樹脂組成物全量100質量%中に、0.01~10質量%が好ましい。
本発明の樹脂組成物は、界面活性剤を含有してもよい。界面活性剤を含有することにより、基板との濡れ性を向上させることができる。界面活性剤としては、例えば、東レ・ダウコーニング(株)のSHシリーズ、SDシリーズ、STシリーズ、ビックケミー・ジャパン(株)のBYKシリーズ、信越化学工業(株)のKPシリーズ、日油(株)のディスフォームシリーズ、DIC(株)の“メガファック(登録商標)”シリーズ、住友スリーエム(株)のフロラードシリーズ、旭硝子(株)の“サーフロン(登録商標)”シリーズ、“アサヒガード(登録商標)”シリーズ、オムノヴァ・ソルーション社のポリフォックスシリーズなどのフッ素系界面活性剤、共栄社化学(株)のポリフローシリーズ、楠本化成(株)の“ディスパロン(登録商標)”シリーズなどのアクリル系および/またはメタクリル系の界面活性剤などを含有することができる。
本発明の樹脂組成物は、無機粒子を含有してもよい。無機粒子の好ましい具体例としては、例えば、酸化珪素、酸化チタン、チタン酸バリウム、アルミナ、タルクなどを含有することができる。無機粒子の一次粒子径は100nm以下が好ましく、60nm以下がより好ましい。
本発明の樹脂組成物は、樹脂組成物中に含まれる全塩素原子と全臭素原子の総質量が、樹脂組成物の固形分の総質量に対して、150ppm以下であることが好ましく、100ppm以下であることがより好ましく、燃焼イオンクロマトグラフィーの検出下限である2ppm以下であることがさらに好ましい。ここで、樹脂組成物の固形分の総質量とは、樹脂組成物の全質量から溶剤の質量を除いた質量を指す。全塩素原子と全臭素原子の総質量の下限は0ppmであり、燃焼イオンクロマトグラフィーの検出下限以下を0ppmとみなす。
次に、本発明の樹脂組成物を製造する方法について説明する。例えば、キサンテン化合物(b)、アルカリ可溶性樹脂(a)と、必要により、感光性化合物(c)、着色剤(d)、熱発色性化合物、ラジカル重合性化合物、熱架橋剤、溶剤、密着改良剤、界面活性剤、無機粒子などを溶解させることにより、本発明の樹脂組成物を得ることができる。
本発明の硬化物の製造方法は、基板上に、本発明の樹脂組成物のうち、感光性化合物(c)を含む樹脂組成物からなる樹脂膜を形成する工程、該樹脂膜を露光する工程、露光した樹脂膜を現像する工程および現像した樹脂膜を加熱処理する工程を含む硬化物の製造方法である。
減圧乾燥速度は、真空チャンバー容積、真空ポンプ能力やチャンバーとポンプ間の配管径等にもよるが、例えば、塗布基板のない状態で、真空チャンバー内が60秒経過後40Paまで減圧される条件等に設定することが好ましい。一般的な減圧乾燥時間は、30秒から100秒程度であることが多く、減圧乾燥終了時の真空チャンバー内到達圧力は、塗布基板のある状態で通常100Pa以下である。到達圧を100Pa以下にすることにより塗布膜表面のべた付きを低減した乾燥状態にすることができ、これにより、続く基板搬送における表面汚染やパーティクルの発生を抑制することができる。
感光性化合物(c)を含有する樹脂膜は、パターンを形成することができる。例えば、樹脂膜に、所望のパターンを有するフォトマスクを通して化学線を照射することにより露光し、現像することにより、所望のパターンを形成することができる。
露光後、ポジ型の場合は露光部を、ネガ型の場合は非露光部を、現像液により除去することによって所望のパターンを形成する。現像液としては、テトラメチルアンモニウムヒドロキシド、ジエタノールアミン、ジエチルアミノエタノール、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸カリウム、トリエチルアミン、ジエチルアミン、メチルアミン、ジメチルアミン、酢酸ジメチルアミノエチル、ジメチルアミノエタノール、ジメチルアミノエチルメタクリレート、シクロヘキシルアミン、エチレンジアミン、ヘキサメチレンジアミンなどのアルカリ性を示す化合物の水溶液が好ましい。これらのアルカリ水溶液に、N-メチル-2-ピロリドン、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド、ジメチルスルホキシド、γ-ブチロラクトン、ジメチルアクリルアミドなどの極性溶媒、メタノール、エタノール、イソプロパノールなどのアルコール類、乳酸エチル、プロピレングリコールモノメチルエーテルアセテートなどのエステル類、シクロペンタノン、シクロヘキサノン、イソブチルケトン、メチルイソブチルケトンなどのケトン類などを1種以上添加してもよい。現像方式としては、スプレー、パドル、浸漬、超音波等の方式が挙げられる。
現像後、現像した樹脂膜を加熱処理することによって、硬化物を得る。
加熱処理温度は、硬化物から発生するアウトガス量をより低減させる観点から、180℃以上が好ましく、200℃以上がより好ましく、230℃以上がさらに好ましく、250℃以上が特に好ましい。一方、硬化物の膜靭性を向上させる観点から、500℃以下が好ましく、450℃以下がより好ましい。この温度範囲において、段階的に昇温してもよいし、連続的に昇温してもよい。加熱処理時間は、アウトガス量をより低減させる観点から、30分間以上が好ましい。また、硬化物の膜靭性を向上させる観点から3時間以下が好ましい。例えば、150℃、250℃で各30分間ずつ加熱処理する方法や、室温から300℃まで2時間かけて直線的に昇温しながら加熱処理する方法などが挙げられる。
本発明の硬化物の第一の態様は、本発明の樹脂組成物を硬化した硬化物である。本発明の樹脂組成物を加熱処理することにより、耐熱性の低い成分を除去できるため、耐熱性および耐薬品性をより向上させることができる。特に、本発明の樹脂組成物が、ポリイミド前駆体、ポリベンゾオキサゾール前駆体、それらの共重合体またはそれらとポリイミドとの共重合体を含む場合は、加熱処理によりイミド環、オキサゾール環を形成するため、耐熱性および耐薬品性をより向上させることができる。
本発明のキサンテン化合物(b)を含む樹脂組成物および硬化物は、半導体素子の表面保護層や層間絶縁層、有機エレクトロルミネッセンス(Electroluminescence:以下ELと記す)素子の絶縁層、有機EL素子を用いた表示装置の駆動用薄膜トランジスタ(Thin Film Transistor:以下TFTと記す)基板の平坦化層、回路基板の配線保護絶縁層、固体撮像素子のオンチップマイクロレンズや各種表示装置・固体撮像素子用平坦化層に好適に用いられる。例えば、耐熱性の低いMRAM、次世代メモリとして有望なポリマーメモリ(Polymer Ferroelectric RAM:PFRAM)や相変化メモリ(Phase Change RAM:PCRAM、Ovonics Unified Memory:OUM)などの表面保護層や層間絶縁層として好適である。また、基板上に形成された第一電極と、前記第一電極に対向して設けられた第二電極とを含む表示装置、例えば、LCD、ECD、ELD、有機電界発光素子を用いた表示装置(有機電界発光装置)などの絶縁層にも用いることができる。以下、有機EL表示装置および半導体装置、半導体電子部品を例に説明する。
本発明の有機EL表示装置は、基板上に、駆動回路、平坦化層、第1電極、絶縁層、発光層および第2電極を有する有機EL表示装置であって、平坦化層および/または絶縁層が本発明の硬化物を有する。なお、基板は、有機EL表示装置の一部である。
本発明の表示装置は、少なくとも金属配線、本発明の硬化物、および複数の発光素子を有する表示装置であって、前記発光素子はいずれか一方の面に一対の電極端子を具備し、前記一対の電極端子は前記硬化物中に延在する複数本の前記金属配線と接続し、複数本の前記金属配線は、前記硬化物により電気的絶縁性を保持する構成である。本発明の表示装置とは、有機EL表示装置以外の表示装置を指す。
図2において、表示装置11は、対向基板15上に複数の発光素子12を配し、発光素子12上に硬化物13を配する。発光素子上とは、発光素子の表面のみならず、支持基板や発光素子の上側にあればよい。図2に示す態様では、発光素子12の少なくとも一部と接するように配した硬化物13の上にさらに複数の硬化物13を積層し合計して3層積層する構成を例示しているが、硬化物13は単層であってもよい。発光素子12は対向基板15と接する面とは反対の面に一対の電極端子16を具備し、それぞれの電極端子16が硬化物13中に延在する金属配線14と接続されている。なお、硬化物13中に延在する複数本の金属配線14は、硬化物13により覆われていれば、硬化物13は、絶縁層としても機能するため、電気的絶縁性を保持する構成となっている。金属配線が電気的絶縁性を保持する構成となっているとは、アルカリ可溶性樹脂(a)を含む樹脂組成物を硬化した硬化物によって金属配線の電気的絶縁性が必要な部分が覆われること意味する。また、本発明において絶縁層が、電気的絶縁性がある状態とは、絶縁層の体積抵抗率が1012Ω・cm以上である状態を意味する。さらに発光素子12が、対向基板15に対して対向した位置に設けられた発光素子駆動基板17に付加された駆動素子18と、金属配線14や14cを通じて電気的に接続されて、発光素子12の発光を制御させることができる。また、発光素子駆動基板17は、例えばはんだバンプ20を介して金属配線14と電気的に接続されている。さらに金属配線14などの金属の拡散を防止するため、バリアメタル19を配してもよい。
各実施例および比較例により得られたキサンテン化合物(b)を含む樹脂組成物のワニスAおよびキサンテン化合物(b)を含まない樹脂組成物のワニスBを、5センチ角のガラス基板上に加熱処理(キュア)後の膜厚が1.5μmとなるようにスピンコートで塗布し、120℃で120秒間プリベークし、対応するプリベーク膜Aとプリベーク膜Bを得た。得られたプリベーク膜Aとプリベーク膜Bについて、紫外可視分光光度計MultiSpec-1500(島津製作所(株)製)を用いて、波長300nm~800nmの透過スペクトルを測定した。次にプリベーク膜Aの透過スペクトルからプリベーク膜Bの透過スペクトルを吸光度に変換してから差し引くことで、キサンテン化合物(b)由来の透過スペクトルを求め、350~800nmにおいて、最大吸収波長を600nm以上に有する場合は「A」、580nm以上600nm未満に有する場合は「B」、580nm未満に有する場合は「C」と判定した。
(1)と同様にして得られたプリベーク膜Aとプリベーク膜Bをそれぞれ2つにカットし、1つ目は何も処理せず、2つ目をイナートオーブンCLH-21CD-S(光洋サーモシステム(株)製)を用いて230℃にて大気雰囲気下で1時間加熱処理して、対応する硬化物Aと硬化物Bを作製した。その後、(1)と同様にしてプリベーク膜と硬化物の波長300nm~800nmの透過スペクトルを測定し、プリベーク膜Aおよび硬化膜Aの透過スペクトルから対応するプリベーク膜Bおよび硬化膜Bの透過スペクトルを吸光度に変換してから差し引くことで、キサンテン化合物(b)由来のプリベーク膜および硬化膜の透過スペクトルを求めた。得られたキサンテン化合物(b)由来のプリベーク膜および硬化膜の透過スペクトルから最大吸収波長における吸光度を算出し、吸光度変化率(キサンテン化合物(b)由来の硬化物の吸光度/キサンテン化合物(b)由来のプリベーク膜の吸光度)(%)を計算した。吸光度変化率が90%以上であった場合は「A」、90%未満75%以上であった場合は「B」、75%未満であった場合は「C」と判定した。
各実施例および比較例により得られたワニスを、塗布現像装置ACT-8(東京エレクトロン(株)製)を用いて、8インチシリコンウェハー上にスピンコート法により塗布し、120℃で2分間ベークをして膜厚4.0μmのプリベーク膜を作製した。なお、膜厚は、触針式プロファイラー(P-15;ケ-エルエ-・テンコ-ル社製)を用いて測定した。その後、露光機i線ステッパーNSR-2005i9C(ニコン社製)を用いて、10μmのホールのパターンを有するマスクを介して、露光量50~300mJ/cm2の範囲で5mJ/cm2毎に露光した。露光後、前記ACT-8の現像装置を用いて、2.38質量%のテトラメチルアンモニウム水溶液(以下TMAH、多摩化学工業(株)製)を現像液として、非露光部の膜減り量が0.5μmになるまで現像した後、蒸留水でリンスを行い、振り切り乾燥し、パターンを得た。
5センチ角のガラス基板上に各実施例および比較例により得られたワニスを加熱処理(キュア)後の膜厚が2.0μmとなるようにスピンコートで塗布し、120℃で120秒間プリベークし、プリベーク膜を作製した。その後、光洋サーモシステム(株)製高温クリーンオーブンINH-9CD-Sを用いて、大気雰囲気下230℃で60分間キュアし、硬化膜を作製した。なお、硬化膜の膜厚は、触針式プロファイラー(P-15;ケ-エルエ-・テンコ-ル社製)を用いて測定した。このようにして得られた硬化膜について、光学濃度計(361T;X-Rite社製)を用いて、OD値を測定した。得られたOD値を硬化膜の膜厚で割り返すことで、1μm当たりOD値とした(1μm当たりのOD値=OD値/硬化膜の膜厚)。1μm当たりのOD値が0.70以上であった場合は「A」、0.70未満0.50以上であった場合は「B」、0.50未満であった場合は「C」と判定した。
(4)で得られた硬化膜を、光洋サーモシステム(株)製高温クリーンオーブンINH-9CD-Sを再度用いて、大気雰囲気下230℃で60分間キュアし、2回キュアを行った硬化膜を作製した。(4)と同様にして硬化膜の膜厚およびOD値を測定し、得られたOD値を硬化膜の膜厚で割り返すことで、繰り返しキュア後の1μm当たりOD値を算出した。繰り返しキュアによるOD値の変化量が0.05未満であった場合は「A」、0.10未満0.05以上であった場合は「B」、0.10以上であった場合は「C」と判定した。ただし、OD値の変化量が0.10未満であっても、(4)のOD値が0.50未満であった場合は「C」と判定した。
東京エレクトロン(株)製塗布・現像装置“CLEAN TRACK ACT-12”を用いて、ろ過後-18℃の冷凍庫で60日間静置保存した各ワニスを12インチSiウエハ上に塗布し、100℃で3分間、ホットプレートで乾燥させ、膜厚1000nmの感光性樹脂膜を得た。得られた感光性樹脂膜について、(株)トプコン製ウエハ表面検査装置“WM-10”にて0.27μm以上の大きさの異物数を計測した。計測面積はウエハの中心から半径8cmの円の内側の約201cm2とし、塗膜1cm2あたりの異物数(欠陥密度)を求めた。基板1枚あたりの欠陥密度が1.00個/cm2未満であった場合は「A」、1.00個/cm2以上3.00個/cm2未満であった場合は「B」、3.00個/cm2以上であった場合は「C」と判定した。
得られた硬化膜に対して、膜表面をエッチングイオンでクリーニングしてからTOF-SIMS分析を行った。分析に用いたTOF-SIMS装置と測定条件は以下の通りである。
一次イオン:Bi3 ++
一次イオンの加速電圧:30kV
一次イオン電流:0.1pA
エッチングイオン:Arガスクラスターイオン
エッチングイオン加速電圧:5.0kV
測定範囲:200μm×200μm。
2,2-ビス(3-アミノ-4-ヒドロキシフェニル)ヘキサフルオロプロパン(以降BAHFと呼ぶ)18.3g(0.05モル)をアセトン100mL、プロピレンオキシド17.4g(0.3モル)に溶解させ、-15℃に冷却した。ここに3-ニトロベンゾイルクロリド20.4g(0.11モル)をアセトン100mLに溶解させた溶液を滴下した。滴下終了後、-15℃で4時間反応させ、その後室温に戻した。析出した白色固体をろ別し、50℃で真空乾燥した。
乾燥窒素気流下、TrisP-PA(商品名、本州化学工業(株)製)21.22g(0.05モル)と5-ナフトキノンジアジドスルホニル酸クロリド26.87g(0.10モル)を1,4-ジオキサン450gに溶解させ、室温にした。ここに、1,4-ジオキサン50gと混合したトリエチルアミン15.18gを、系内が35℃以上にならないように滴下した。滴下後30℃で2時間撹拌した。トリエチルアミン塩を濾過し、ろ液を水に投入した。その後、析出した沈殿をろ過で集めた。この沈殿を真空乾燥機で乾燥させ、下記式で表されるキノンジアジド化合物(c-1)を得た。
乾燥窒素気流下、3,3’,4,4’-ジフェニルエーテルテトラカルボン酸二無水物(以降ODPAと呼ぶ)31.0g(0.10モル)を1-メチル-2-ピロリドン(以下、NMPという場合がある)500gに溶解させた。ここに合成例1で得られたヒドロキシル基含有ジアミン化合物(α)45.35g(0.075モル)と1,3-ビス(3-アミノプロピル)テトラメチルジシロキサン(以降SiDAと呼ぶ)1.24g(0.005モル)をNMP50gとともに加えて、40℃で2時間反応させた。次に末端封止剤として3-アミノフェノール(以降MAPと呼ぶ)4.36g(0.04モル)をNMP5gとともに加え、50℃で2時間反応させた。その後、N,N-ジメチルホルムアミドジエチルアセタール32.39g(0.22モル)をNMP50gで希釈した溶液を投入した。投入後、50℃で3時間撹拌した。撹拌終了後、溶液を室温まで冷却した後、溶液を水3Lに投入して白色沈殿を得た。この沈殿を濾過で集めて、水で3回洗浄した後、80℃の真空乾燥機で24時間乾燥し、アルカリ可溶性樹脂であるポリイミド前駆体(a-1)を得た。
下記反応式[1]において、(β)で表される化合物20.26g(0.05モル)、エチレングリコール120gおよび4-エトキシアニリン20.58g(0.15モル)の混合物を120℃で18時間加熱撹拌をした。反応終了後、反応溶液を室温まで放冷した後、反応溶液を0~10℃の17.5質量%塩酸450gに滴下して1時間撹拌をした。その後、析出物をろ取して、80℃の純水で洗浄し、60℃で24時間乾燥させ、窒素原子上の2つがアリール基で置換されたキサンテン化合物(b-1-1)を得た。
LC-MS(ESI、posi):m/z 727[M+H]+
下記反応式[2]において(γ)で表される化合物18.46g(0.05モル)、スルホラン120g、塩化亜鉛13.63gおよび4-エトキシアニリン20.58g(0.15モル)の混合物を170℃で8時間加熱撹拌をした。反応終了後、反応溶液を室温まで放冷した後、反応溶液を0~10℃の17.5%質量塩酸450gに滴下して1時間撹拌をした。続いて、析出物をろ取し、5質量%炭酸ナトリウム水溶液500gに加え、1時間撹拌をし、ろ取後に純水で洗浄し、60℃で24時間乾燥させ、窒素原子上の2つがアリール基で置換されたキサンテン化合物(b-2-1)を得た。
LC-MS(ESI、posi):m/z 811[M+H]+
下記反応式[3]において、合成例5で得られたキサンテン化合物(b-2)8.10g(0.01モル)、ジフェニルアミン2.54g(0.015モル)、トリエチルアミン10.11g(0.1モル)および1,2-ジクロロエタン150gの混合物中に、室温でオキシ塩化リン1.69g(0.011モル)を滴下し、85℃で3時間加熱撹拌をした。反応終了後、反応溶液を室温まで放冷した後、反応溶液を純水300gに入れ、クロロホルム100gで抽出した。有機層を4mol/Lの塩酸150g、純水150gで洗浄したのち、溶剤を留去し、キサンテン化合物(b-2)がアミド化されたキサンテン化合物(b-3)を得た。得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 963[M+H]+
下記反応式[5]において、合成例5と同様にして得られた化合物(b-2-1)22.83g(0.04モル)、1-メチル-2-ピロリドン150g、銅粉末1.3g、炭酸カリウム8.3gおよび3-ヨードトルエン17.43g(0.08モル)の混合物を150℃で12時間加熱撹拌をした。反応終了後、反応溶液をろ過して不溶解物を除き、反応溶液を0~10℃の17.5%質量塩酸450gに滴下して1時間撹拌をした。その後、析出物をろ取して、60℃で24時間乾燥することにより、窒素原子上の4つがアリール基で置換されたキサンテン化合物を得た。得られたキサンテン化合物7.51g(0.01モル)、ジフェニルアミン2.54g(0.015モル)、トリエチルアミン10.11g(0.1モル)および1,2-ジクロロエタン150gの混合物中に、室温でオキシ塩化リン1.69g(0.011モル)を滴下し、85℃で3時間加熱撹拌をした。反応終了後、反応溶液を室温まで放冷した後、反応溶液を純水300gに入れ、クロロホルム100gで抽出した。有機層を4mol/Lの塩酸150g、純水150gで洗浄したのち、溶剤を留去し、アミド化されたキサンテン化合物(b-4)を得た。得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 903[M+H]+
下記反応式[6]において、合成例7と同様にして得られた化合物(b-4)9.39g(0.01モル)をN,N-ジメチルホルムアミド(DMF)150g中に溶解させ、パラトルエンスルホン酸ナトリウム2.91g(0.015モル)を加え、40℃で3時間加熱撹拌した。反応溶液を室温まで放冷した後、反応溶液を純水1000gに注ぎ、析出した結晶をろ取して、水洗浄後、60℃で24時間乾燥させることにより、(b-4)のカウンターイオンを交換させたキサンテン化合物(b-5)を得た。得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 903[M+H]+
LC-MS(ESI、nega):m/z 171[M]-
下記反応式[7]において、パラトルエンスルホン酸ナトリウム2.91g(0.015モル)をラウリルベンゼンスルホン酸ナトリウム5.23g(0.015モル)とした以外は合成例8と同様にして(b-4)のカウンターイオンを交換させたキサンテン化合物(b-6)を得た。
得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 903[M+H]+
LC-MS(ESI、nega):m/z 325[M]-
下記反応式[8]において、ジフェニルアミン2.54g(0.015モル)をピペリジン1.28g(0.015モル)とした以外は合成例7と同様にしてアミド化されたキサンテン化合物(b-7)を得た。
得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 819[M+H]+
下記反応式[10]において、パラトルエンスルホン酸ナトリウム2.91g(0.015モル)をトリフルオロメタンスルホン酸ナトリウム2.58g(0.015モル)とした以外は合成例5と同様にして(b-4)のカウンターイオンを交換させたキサンテン化合物(b-8)を得た。
得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 903[M+H]+
LC-MS(ESI、nega):m/z 149[M]-
下記反応式[11]において、パラトルエンスルホン酸ナトリウム2.91g(0.015モル)をテトラフェニルほう酸ナトリウム5.13g(0.015モル)とした以外は合成例8と同様にして(b-4)のカウンターイオンを交換させたキサンテン化合物(b-9)を得た。
得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 903[M+H]+
LC-MS(ESI、nega):m/z 319[M]-
下記反応式[12]において、パラトルエンスルホン酸ナトリウム2.91g(0.015モル)をビス(トリフルオロメタンスルホニル)イミドカリウム4.78g(0.015モル)とした以外は合成例8と同様にして(b-4)のカウンターイオンを交換させたキサンテン化合物(b-10)を得た。
得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 903[M+H]+
LC-MS(ESI、nega):m/z 280[M]-
下記反応式[13]において、4-エトキシアニリン20.58g(0.15モル)をp-トルイジン16.07g(0.15モル)とした以外は合成例5と同様にして窒素原子上の4つがアリール基で置換されたキサンテン化合物(b-11-1)を得た。次に、キサンテン化合物(b-2)8.10g(0.01モル)を得られたキサンテン化合物(b-11-1)6.90g(0.01モル)とした以外は合成例6と同様にしてキサンテン化合物(b-11-1)がアミド化されたキサンテン化合物(b-11)を得た。
得られた化合物は、LC-MS2020(島津製作所(株)製)を用いてLC-MS分析を行い、目的の化合物であることを確認した。
LC-MS(ESI、posi):m/z 842[M+H]+
下記反応式[4]において(β)で表される化合物20.26g(0.05モル)、2-プロパノール120gおよび2,6-ジメチルアニリン7.3g(0.06モル)の混合物を80℃で15時間加熱撹拌をした。反応終了後、反応溶液を室温まで放冷した後、反応溶液を17.5質量%塩酸450gに滴下して室温で1時間、撹拌をした。その後、析出物をろ取して、80℃の純水で洗浄し、60℃で24時間、乾燥することにより、窒素原子上の1つがアリール基で置換されたキサンテン化合物を得た。
LC-MS(ESI、posi):m/z 589[M+H]+
下記反応式[9]において、4-エトキシアニリン20.58g(0.15モル)をアニリンg(0.015モル)とした以外は合成例5と同様にして窒素原子上の2つが電子供与性置換基を有さないアリール基で置換されたキサンテン化合物を得た。
LC-MS(ESI、posi):m/z 635[M+H]+
e-1:4,4’,4’’-メチリジントリスフェノール(熱発色性化合物)
GBL:γ-ブチロラクトン
EL:乳酸エチル
PGME:プロピレングリコールモノメチルエーテル
ポリイミド前駆体(a-1)7.0g、キサンテン化合物(b-1)0.5gをGBL20gに加えてキサンテン化合物(b)を含む樹脂組成物のワニスA1を得た。また、ポリイミド前駆体(a-1)7.0gをGBL20gに加えてキサンテン化合物(b)を含まない樹脂組成物のワニスB1を得た。得られたワニスA1およびB1を用いて前記のように350~800nmの最大吸収波長、染料の耐熱性評価行った。
アルカリ可溶性樹脂(a)、キサンテン化合物(b)、溶剤を表1に記載の通り変更した以外は実施例1と同様にしてキサンテン化合物(b)を含む樹脂組成物のワニスA、キサンテン化合物(b)を含まない樹脂組成物のワニスBを得た。得られたワニスAおよびBを用いて前記のように350~800nmの最大吸収波長、染料の耐熱性評価を行った。
ポリイミド前駆体(a-1)10.0g、キサンテン化合物(b)2.0g、感光性化合物(c-1)2.0g、(d10-2-2)1.0g、(e-1)2.0gをGBL10g、EL20g、PGME70gに溶解した後、0.2μmのポリテトラフルオロエチレン製のフィルターでろ過し、ポジ型感光性樹脂組成物のワニスAAを得た。得られたワニスを用いて前記のように感度、OD値、OD値の変化量の評価を行った。
アルカリ可溶性樹脂(a)、キサンテン化合物(b)、感光性化合物(c)、着色材(d)、その他添加剤、溶剤を表2に記載の通り変更した以外は実施例12と同様にしてポジ型感光性樹脂組成物のワニスを得た。得られたワニスを用いて前記のように感度、OD値、OD値の変化量の評価を行った。
表2に記載のポジ型感光性樹脂組成物のワニスを用いて、前記のように冷凍保存安定性の評価を行った。
実施例16で得られた樹脂組成物AEの硬化膜を用いて、前期のようにTOF-SIMSによる硬化膜中のキサンテン化合物(b’)の分析を行った。分析の結果、m/z902(902C62H52N3O4)の分子イオンが確認された。本結果より、樹脂組成物AEの硬化膜は、キサンテン化合物(b-5)のカチオン部が含まれることを確認した。
2:配線
3:TFT絶縁層
4:平坦化層
5:ITO(透明電極)
6:基板
7:コンタクトホール
8:絶縁層
11:表示装置
12:発光素子
13:硬化物
14、14c:金属配線
15:対向基板
16:電極端子
17:発光素子駆動基板
18:駆動素子
19:バリアメタル
20:はんだバンプ
Claims (19)
- 式(1)で表されるキサンテン化合物(b)。
- 前記電子供与性置換基のハメット則の置換基定数σp値が、-0.20以下である請求項1に記載のキサンテン化合物(b)。
- 前記式(1)において、nが0である請求項1または2に記載のキサンテン化合物(b)。
- 前記式(1)において、nが1であり、Zが脂肪族または芳香族のスルホナートイオンである請求項1または2に記載のキサンテン化合物(b)。
- 請求項1に記載のキサンテン化合物(b)とアルカリ可溶性樹脂(a)を含む樹脂組成物。
- さらに感光性化合物(c)を含む請求項5に記載の樹脂組成物。
- 前記感光性化合物(c)がキノンジアジド化合物を含む請求項6に記載の樹脂組成物。
- さらに、350~800nmにおいて、490nm以上580nm未満の範囲のいずれかに最大吸収波長を有する着色剤(d-2)を含有する請求項5に記載の樹脂組成物。
- 前記式(1)においてnが1かつZが有機アニオンであるキサンテン化合物(b1)、および有機イオン同士のイオン対を形成しているイオン性染料(d10)を含み、前記有機アニオンが1種類である請求項5に記載の樹脂組成物。
- 前記アルカリ可溶性樹脂(a)が、ポリイミド、ポリイミド前駆体、ポリベンゾオキサゾール、ポリベンゾオキサゾール前駆体、ポリアミドイミド、ポリアミドイミド前駆体およびそれら共重合体からなる群より選択される1種類以上を含む請求項5に記載の樹脂組成物。
- 前記樹脂組成物中に含まれる全塩素原子と全臭素原子の総質量が、樹脂組成物の固形分の総質量に対して、150ppm以下である請求項5に記載の樹脂組成物。
- 請求項5に記載の樹脂組成物を硬化した硬化物。
- 式(2)で表されるキサンテン化合物(b’)を含有する硬化物。
- 基板上に、請求項6に記載の樹脂組成物からなる樹脂膜を形成する工程、該樹脂膜を露光する工程、露光した樹脂膜を現像する工程および現像した樹脂膜を加熱処理する工程を含む硬化物の製造方法。
- 前記樹脂膜を露光する工程において、露光時に用いるフォトマスクが、透光部、遮光部および半透光部を有するハーフトーンフォトマスクであり、透光部の透過率を100%とした時の半透光部の透過率が5%~30%である請求項14に記載の硬化物の製造方法。
- 基板上に、駆動回路、平坦化層、第1電極、絶縁層、発光層、および第2電極を有する有機EL表示装置であって、該平坦化層および/または絶縁層が請求項12または13に記載の硬化物を有する有機EL表示装置。
- 前記絶縁層が前記硬化物を有し、前記絶縁層の膜厚1μm当たりの可視光における光学濃度が0.5~1.5である請求項16に記載の有機EL表示装置。
- さらにブラックマトリクスを有するカラーフィルタを具備する請求項16に記載の有機EL表示装置。
- 少なくとも金属配線、請求項12または13に記載の硬化物、および複数の発光素子を有する表示装置であって、前記発光素子はいずれか一方の面に一対の電極端子を具備し、前記一対の電極端子は前記硬化物中に延在する複数本の前記金属配線と接続し、複数本の前記金属配線は、前記硬化物により電気的絶縁性を保持する構成である、表示装置。
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JP6009246B2 (ja) | 2012-07-02 | 2016-10-19 | 中外化成株式会社 | キサンテン色素およびその製造方法 |
CN107430335B (zh) | 2015-04-01 | 2021-04-02 | 东丽株式会社 | 感光性着色树脂组合物 |
JP2020111627A (ja) | 2019-01-08 | 2020-07-27 | 日本化薬株式会社 | 着色樹脂組成物 |
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