WO2022252571A1 - 上下料设备 - Google Patents

上下料设备 Download PDF

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Publication number
WO2022252571A1
WO2022252571A1 PCT/CN2021/139488 CN2021139488W WO2022252571A1 WO 2022252571 A1 WO2022252571 A1 WO 2022252571A1 CN 2021139488 W CN2021139488 W CN 2021139488W WO 2022252571 A1 WO2022252571 A1 WO 2022252571A1
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WO
WIPO (PCT)
Prior art keywords
loading
jaw
limiting
chute
drive
Prior art date
Application number
PCT/CN2021/139488
Other languages
English (en)
French (fr)
Inventor
孙有为
朱培侠
滕顺意
Original Assignee
歌尔股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 歌尔股份有限公司 filed Critical 歌尔股份有限公司
Publication of WO2022252571A1 publication Critical patent/WO2022252571A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/08—Gripping heads and other end effectors having finger members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677

Definitions

  • the invention relates to the technical field of processing and manufacturing, in particular to a loading and unloading device.
  • the loading and unloading of the wafer (wafer) material box is generally carried out manually, and the whole box of wafer to be processed is placed in the position of the process equipment silo. When placing it, it is necessary to manually ensure that the position of the material box is accurate. After completion, the material box is manually removed and transferred to the process equipment of the next process. Since the loading and unloading process is manual loading and unloading, too much manual participation will increase the pollution risk of the product, and the degree of automation is low, which has the defects of low production efficiency and high manual labor intensity.
  • the main purpose of the present invention is to propose a loading and unloading equipment, aiming to solve the problems of increasing the risk of product pollution and low production efficiency by manual loading and unloading in the existing semiconductor process.
  • the present invention proposes a loading and unloading equipment, the loading and unloading equipment includes:
  • the lifting device includes a material loading platform and a lifting driving part, the loading platform is used to carry materials, and the lifting driving part is used to drive the loading platform up and down;
  • the first positioning device includes a first driving mechanism and two gripper mechanisms arranged at intervals along the first direction, each of the gripper mechanisms can be slidably arranged on the loading table, and one of the two gripper mechanisms A material placement space for placing the material is formed between them, and the first drive mechanism is used to drive the two jaw mechanisms to move toward or away from the loading table;
  • the second positioning device includes a limit plate, a limit mechanism and a second drive mechanism, the limit plate and the limit mechanism are arranged at intervals on both sides of the material placement space along the second direction, and the first direction perpendicular to the second direction, the limiting plate is installed on the loading platform, the limiting mechanism is slidably arranged on the loading platform, and the second driving mechanism is used to drive the The limiting mechanism is close to or away from the limiting plate.
  • the jaw mechanism includes a first jaw and a second jaw, and the first jaw and the second jaw are arranged at intervals along the first direction on the same side of the material placement space;
  • the edge of the loading table is provided with a first chute for the first jaw to slide, and the first jaw extends out of the loading surface of the loading table through the first chute;
  • the second jaw is located on the side of the first jaw facing the material storage space, and the loading platform is provided with a second chute for the second jaw to slide, and the second jaw can Extend the material loading surface of the material loading table through the second chute or retract into the second chute.
  • the first drive mechanism includes two first drive assemblies, and the two first drive assemblies are arranged in one-to-one correspondence with the two jaw mechanisms;
  • the first drive assembly includes a first drive member and A first driving plate connected to the first driving member, the first driving member is installed on the bottom surface of the loading platform; in each of the jaw mechanisms, the first jaw and the second clamp The jaws are all installed on the corresponding first driving plate; the first driving member is used to drive the first driving plate to drive the first jaw and the second jaw relative to the loading material
  • the table moves synchronously towards or away from the material placement space.
  • the first jaw includes a first clamping plate, the lower end of the first clamping plate is mounted on the first driving plate, the first clamping plate vertically passes through the first chute, and the The upper end of the first splint protrudes from the loading surface of the loading platform.
  • the first jaw further includes a first roller, and a first installation groove is opened near the upper end of the first clamping plate, and the first roller is rotatably installed in the first installation groove,
  • the rotating shaft of the first roller is arranged vertically, and the rim of the first roller protrudes from the side of the first clamping plate facing the material placement space and is used to abut against the material.
  • the second clamping jaw includes a second splint and a mounting base, the mounting base is mounted on the first driving plate, and the lower end of the second clamping plate is hinged to the mounting base through a rotating shaft, so as to
  • the second splint can rotate relative to the mounting seat between an abutment position and an avoidance position, and when the second splint is in the abutment position, it vertically passes through the second chute and protrudes out of the On the material loading surface of the loading table, when the second splint is in the avoidance position, it is horizontally arranged and retracted into the second chute.
  • the mounting seat includes a seat body and two mounting ears, the seat body is installed on the first drive plate, and the two mounting ears are arranged on the seat body at intervals along the second direction.
  • the two ends of the rotating shaft are respectively inserted in the two mounting ears and hinged with the corresponding mounting ears, a groove is formed between the seat body and the two mounting ears, and the The lower end of the first splint extends into the groove, and a cavity communicating with the groove is formed in the seat;
  • the second jaw also includes a locking mechanism accommodated in the cavity, so The locking mechanism is used to cooperate with the first splint to lock the first splint when the first splint is at the abutting position or the avoiding position.
  • the locking mechanism includes an elastic member and a floating block, the lower end of the elastic member is connected to the bottom cavity wall of the cavity, and the upper end of the elastic member is connected to the floating block; the first splint
  • the lower end of the abutting block is provided with an abutting block extending into the groove, the abutting block is located below the rotating shaft, and the bottom of the abutting block has a first abutting surface and a second abutting surface, so The first abutting surface and the second abutting surface are connected in an arc transition, and the distance between the first abutting surface and the rotating shaft is smaller than the distance between the second abutting surface and the rotating shaft.
  • the second clamping jaw further includes a second roller, and a second installation groove is opened near the upper end of the second clamping plate, and the second roller is rotatably installed in the second installation groove,
  • the rotating shaft of the second roller is arranged vertically, and the rim of the second roller protrudes from the side of the second clamping plate facing the material placement space and is used to abut against the material.
  • the number of the first jaws is at least two, at least two of the first jaws are arranged at intervals along the second direction, and the number of the first chute is The number of the first jaws is consistent and one-to-one correspondence; the number of the second jaws is at least two, at least two of the second jaws are arranged at intervals along the second direction, and the second The number of the chute is consistent with the number of the second clamping jaws and corresponds one to one.
  • the limit mechanism includes a first limit claw and a second limit claw, and the first limit claw and the second limit claw are arranged at intervals in the material placement space along the second direction the same side of the loading platform; the edge of the loading platform is provided with a first limit chute for the first limit claw to slide, and the first limit claw passes through the first limit chute to protrude from the The material loading surface of the loading platform; the second limiting claw is located on the side of the first limiting claw facing the material storage space, and the loading platform is provided with a slide for the second limiting claw to slide.
  • the second limiting chute, the second limiting claw passes through the second limiting chute and protrudes from the material loading surface of the loading table.
  • the second drive mechanism includes a second drive member and a second drive plate connected to the second drive member, the second drive member is installed on the bottom surface of the loading table; the first limiter Both the position claw and the second limit claw are installed on the second drive plate; the second drive member is used to drive the second drive plate to drive the first limit claw and the first limit claw The two limiting claws move synchronously toward or away from the limiting plate relative to the loading table.
  • the number of the first limiting claws is two, and the two first limiting claws are arranged at intervals along the first direction, and the number of the first limiting slide grooves is the same as that of the first limiting claws.
  • the number of the positioning claws is consistent and one-to-one correspondence;
  • the number of the second limiting claws is two, and the two second limiting claws are arranged at intervals along the second direction, and the second limiting chute
  • the number is consistent with the number of the second limiting claws and corresponds one by one; the distance between the two second limiting claws is smaller than the distance between the two first limiting claws.
  • the robot places the material in the material storage space of the loading table, and the first driving mechanism drives the two jaw mechanisms to move towards each other, so that the two jaw mechanisms are respectively connected to the two sides of the material.
  • the side abuts and moves the material to a suitable position in the first direction to position the material in the first direction.
  • the second driving mechanism drives the limiting mechanism close to the limiting plate, and then pushes the material until it abuts against the limiting plate, so as to position the material in the second direction, thereby accurately positioning the material and completing the automatic feeding process.
  • the lifting drive part in the lifting device can also drive the loading table up and down, so as to switch materials of different heights and align them with the feeding port of the processing equipment, so as to realize the continuous feeding process.
  • the first driving mechanism respectively drives the two jaw mechanisms to move back to each other, so that the two jaw mechanisms loosen the material, while the second driving mechanism drives the limit mechanism away from the limit plate, and the limit mechanism will The material is loosened, which is convenient for the robot to take the material away and complete the automatic unloading process.
  • the loading and unloading equipment of the present invention can realize accurate positioning of materials and automatic loading and unloading process, correct robot loading deviation, and have a high degree of automation. It can not only avoid manual participation, reduce the pollution risk of products, but also improve production efficiency and reduce labor intensity.
  • Fig. 1 is a three-dimensional schematic view of a loading and unloading device according to an embodiment of the present invention
  • Fig. 2 is a partially enlarged schematic diagram of a loading and unloading device according to an embodiment of the present invention
  • Fig. 3 is a three-dimensional schematic diagram of a loading and unloading device according to an embodiment of the present invention at another viewing angle;
  • Fig. 4 is a three-dimensional perspective view of an embodiment of the present invention when loading and unloading equipment positions a 12-inch material box;
  • Fig. 5 is a three-dimensional perspective view of an 8-inch material box when the loading and unloading equipment is positioned according to an embodiment of the present invention
  • Fig. 6 is a schematic perspective view of the second jaw in the loading and unloading device according to an embodiment of the present invention.
  • Fig. 7 is a three-dimensional schematic diagram of the second splint in the abutting position in the loading and unloading device according to an embodiment of the present invention.
  • Fig. 8 is a three-dimensional schematic view of the second splint in the avoidance position in the loading and unloading device according to an embodiment of the present invention.
  • the directional indication is only used to explain the position in a certain posture (as shown in the accompanying drawing). If the specific posture changes, the directional indication will also change accordingly.
  • the invention provides a loading and unloading device.
  • the loading and unloading equipment 100 of this embodiment includes a lifting device 30, a first positioning device 10 and a second positioning device 20, wherein the lifting device 30 includes a loading table 31 and a lifting drive member 32, The loading platform 31 is used to carry materials, and the lifting drive member 32 is used to drive the loading platform 31 to lift; the first positioning device 10 includes a first driving mechanism 11 and two jaw mechanisms 12 arranged at intervals along the first direction.
  • the jaw mechanism 12 is slidably arranged on the material loading table 31, and a material placement space 40 for placing materials is formed between the two jaw mechanisms 12, and the first driving mechanism 11 is used to drive the two jaw mechanisms 12 to load materials
  • the table 31 moves toward or away from each other;
  • the second positioning device 20 includes a limiting plate 21, a limiting mechanism 22 and a second driving mechanism 23, and the limiting plate 21 and the limiting mechanism 22 are arranged at intervals in the material placement space 40 along the second direction
  • the limit plate 21 is installed on the loading platform 31
  • the limiting mechanism 22 is slidably arranged on the loading platform 31, and the second driving mechanism 23 is used to drive the limiting mechanism 22 close to or away from the limiting plate 21.
  • the first direction in this embodiment is the left-right direction shown in FIG. 1
  • the second direction is the front-back direction shown in FIG. 1
  • the two jaw mechanisms 12 of the first positioning device 10 are respectively located on the left and right sides of the material placement space 40
  • the limit mechanism 22 and the limit plate 21 of the second positioning device 20 are respectively located on the front and rear sides of the material placement space 40 .
  • the loading and unloading equipment 100 of this embodiment can be applied in the semiconductor process to complete the loading and unloading process of the wafer box 200. It can be understood that the wafer box 200 is equipped with a plurality of wafer racks 300, and the plurality of wafer racks 300 are stacked up and down.
  • the material of this embodiment is described by taking the wafer box 200 as an example, and the wafer box 200 is referred to as the box 200 hereinafter.
  • the lifting drive member 32 of this embodiment can adopt the lifting electric cylinder in the prior art.
  • the robot places the material box 200 in the material storage space 40 of the loading table 31, and the first drive mechanism 11 drives the two jaw mechanisms 12 to move toward each other, that is, the first drive mechanism 11 drives the left clamp
  • the claw mechanism 12 moves to the right relative to the material loading platform 31, and simultaneously drives the right jaw mechanism 12 to move to the left relative to the material loading platform 31, so that the two jaw mechanisms 12 respectively abut against the left and right sides of the material box 200 and make the
  • the material box 200 is moved left and right to a suitable position, so as to position the material box 200 in the left and right direction.
  • the second drive mechanism 23 drives the limit mechanism 22 close to the limit plate 21, that is, drives the limit mechanism 22 to move backward, and then pushes the material box 200 to move backward until it abuts against the limit plate 21, so that the limit mechanism 22 and the limiting plate 21 abut against the front and rear sides of the material box 200 respectively, so as to position the material box 200 in the front and rear directions, and then accurately position the material box 200 from the front, rear, left, and right directions to complete the automatic feeding process .
  • the lifting drive member 32 in the lifting device 30 can also drive the loading platform 31 up and down, so as to switch the wafer rack 300 of different heights to align with the feeding port of the processing equipment, and realize the continuous feeding process.
  • the first drive mechanism 11 respectively drives the two jaw mechanisms 12 to move in opposite directions, that is, the first drive mechanism 11 drives the left jaw mechanism 12 to move to the left relative to the loading table 31,
  • the jaw mechanism 12 on the right side is driven to move to the right relative to the loading table 31, so that the two jaw mechanisms 12 release the material box 200
  • the second drive mechanism 23 drives the limiting mechanism 22 away from the limiting plate 21, That is, the limit mechanism 22 is driven to move forward, and the limit mechanism 22 releases the material box 200 to facilitate the robot to take the material box 200 away to complete the automatic unloading process.
  • the loading and unloading equipment 100 of this embodiment can realize the accurate positioning of the material box 200 and the automatic loading and unloading process, correct the deviation of the feeding of the robot, and have a high degree of automation. It can not only avoid manual participation, reduce the risk of product pollution, but also improve production efficiency and reduce Artificial labor intensity.
  • the gripper mechanism 12 of this embodiment includes a first gripper 121 and a second gripper 122, and the first gripper 121 and the second gripper 122 are arranged at intervals along the first direction on the same side of the material placement space 40; 31 is provided with a first chute 311 for the first jaw 121 to slide, and the first jaw 121 passes through the first chute 311 to extend out of the loading surface of the loading table 31; the second jaw 122 is located on the first The jaws 121 face the side of the material placement space 40, and the loading platform 31 is provided with a second chute 312 for the second jaw 122 to slide, and the second jaw 122 can pass through the second chute 312 and extend out of the loading platform. 31 of the loading surface or retracted in the second chute 312.
  • each jaw mechanism 12 includes a first jaw 121 and a second jaw 122, and the first jaw 121 and the second jaw 122 in the same jaw mechanism 12 are spaced along the left-right direction They are arranged on the same side of the material placement space 40 , and the second jaw 122 is closer to the material placement space 40 . It can be understood that in the left jaw mechanism 12, the first jaw 121 and the second jaw 122 are located on the left side of the material placement space 40, and in the right jaw mechanism 12, the first jaw 121 and the second jaw The claws 122 are all located on the right side of the material placement space 40 .
  • the two first jaws 121 are arranged opposite to each other, the two second jaws 122 are arranged opposite to each other, and the distance between the two first jaws 121 is greater than the distance between the two second jaws 122 the distance between.
  • the position of the loading table 31 corresponding to the first jaw 121 is provided with a first chute 311, which facilitates the sliding of the first jaw 121, and the position of the loading table 31 corresponding to the second jaw 122 is provided with a second chute 312, which is convenient for the second jaw 122.
  • the two jaws 122 slide.
  • the extension directions of the first sliding groove 311 and the second sliding groove 312 are both left and right directions.
  • the material box 200 has two sizes of 8 inches and 12 inches.
  • the 8-inch material box 200 is placed in the material storage space 40, and the first driving mechanism 11 drives two second clips.
  • the jaws 122 move toward each other.
  • the second jaw 122 passes through the second chute 312 and stretches out from the loading surface of the loading platform 31.
  • the loading surface of the loading platform 31 is the top of the loading platform 31. surface, so that when the first drive mechanism 11 drives the two second jaws 122 to move toward each other, the two second jaws 122 can respectively abut against the left and right sides of the material box 200 and move the material box in the left and right direction. 200 positioning.
  • the 12-inch material box 200 When the material to be processed is a 12-inch material box 200, the 12-inch material box 200 is placed in the material storage space 40. In order to prevent the second jaw 122 from interfering with the material box 200, at this time, the second jaw 122 retracts to the first In the second chute 312, the first drive mechanism 11 drives the two first jaws 121 to move toward each other, and the two first jaws 121 can abut against the left and right sides of the material box 200 respectively and move the material box 200 in the left and right direction. position. By setting the first jaw 121 and the second jaw 122, the loading and unloading device 100 of this embodiment can be applied to two kinds of material boxes 200 with different sizes, and the compatibility is good.
  • the first drive mechanism 11 includes two first drive assemblies, and the two first drive assemblies are arranged in one-to-one correspondence with the two jaw mechanisms 12;
  • the first drive assembly includes a first drive member 111 and a first The first driving plate 112 connected to the driving member 111, the first driving member 111 is installed on the bottom surface of the material loading table 31; in each jaw mechanism 12, the first jaw 121 and the second jaw 122 are installed on the corresponding first On the drive plate 112 ; the first drive member 111 is used to drive the first drive plate 112 to drive the first jaw 121 and the second jaw 122 to move synchronously toward or away from the material placement space 40 relative to the loading table 31 .
  • the first driving member 111 may adopt a cylinder in the prior art, and the first driving member 111 is referred to as a first cylinder hereinafter.
  • Each jaw mechanism 12 is correspondingly provided with a first drive assembly, and each first drive assembly includes a first cylinder and a first drive plate 112 .
  • the two first air cylinders respectively drive the corresponding first driving plate 112 to move, and then respectively drive the two jaw mechanisms 12 to move toward or away from each other.
  • the first jaw 121 and the second jaw 122 are installed on the first driving plate 112, and the structure is compact.
  • the first jaw 121 and the second jaw 122 of each jaw mechanism 12 move synchronously toward or away from the material placement space 40 relative to the loading table 31, so as to pass The two first jaws 121 opposite to each other position or loosen the magazine 200 with a larger size, or the second jaws 122 opposite to each other position or loosen the magazine 200 with a smaller size.
  • the first jaw 121 of this embodiment includes a first clamping plate 1211, the lower end of the first clamping plate 1211 is installed on the first drive plate 112, and the first clamping plate 1211 vertically passes through the first slide slot 311 , and the upper end of the first clamping plate 1211 protrudes from the loading surface of the loading platform 31 .
  • the first clamping jaw 121 also includes a first roller 1212, the first clamping plate 1211 is provided with a first installation groove 12111 near its upper end, the first roller 1212 is rotatably installed in the first installation groove 12111, the first The rotating shaft of the roller 1212 is arranged vertically, and the rim of the first roller 1212 protrudes from the side of the first clamping plate 1211 facing the material placement space 40 and is used to contact the material.
  • the first roller 1212 is placed horizontally, and the rim of the first roller 1212 in the first jaw 121 on the right side protrudes from the left side of the first clamping plate 1211 and is used to abut against the magazine 200, and is located on the left side.
  • the rim of the first roller 1212 in the first clamping jaw 121 protrudes from the right side of the first clamping plate 1211 and is used to abut against the magazine 200 .
  • the first clamping plate 1211 can abut or disengage from the left or right side of the material box 200, so as to push the material box 200 to the ready position or loosen accordingly. 200 cartridges.
  • the rim of the first roller 1212 can abut against the material box 200, and roll along with the movement of the limit mechanism 22, reducing the material box 200.
  • the frictional force between the first splint 1211 and the side wall of the material box 200 during movement is beneficial to the movement of the material box 200 .
  • the second jaw 122 includes a second splint 1221 and a mounting base 1222, the mounting base 1222 is installed on the first drive plate 112, and the lower end of the second clamping plate 1221 is hinged to the mounting base 1222 through a rotating shaft 1223, so as to The second clamping plate 1221 can rotate between the abutting position and the avoiding position relative to the mounting seat 1222.
  • the second clamping plate 1221 When the second clamping plate 1221 is in the abutting position, it passes through the second chute 312 vertically and extends out of the loading surface of the loading platform 31 , when the second clamping plate 1221 is in the avoidance position, it is set horizontally and retracted into the second slide groove 312 .
  • the material to be processed is an 8-inch material box 200
  • the 8-inch material box 200 is placed in the material storage space 40.
  • the second clamping plate 1221 rotates to In the abutting position, the second splint 1221 digitally passes through the second chute 312 and extends out of the loading surface of the loading table 31, and the two first cylinders respectively drive the corresponding drive plate to move, and then respectively drive the two second splints 1221 move towards each other, the second splint 1221 abuts against the left and right sides of the material box 200 respectively and positions the material box 200 in the left and right direction.
  • the 12-inch material box 200 is placed in the material storage space 40.
  • the connecting position is rotated to the avoidance position relative to the mounting seat 1222, thereby switching the second splint 1221 placed vertically to be placed horizontally.
  • the connecting position is rotated to the avoidance position relative to the mounting seat 1222, thereby switching the second splint 1221 placed vertically to be placed horizontally.
  • the mounting seat 1222 includes a seat body 12221 and two mounting ears 12222 , the seat body 12221 is installed on the first driving board 112 , and the two mounting ears 12222 are arranged at intervals along the second direction.
  • the two ends of the rotating shaft 1223 are respectively inserted in the two mounting ears 12222 and hinged with the corresponding mounting ears 12222, a groove 12223 is formed between the seat body 12221 and the two mounting ears 12222, the first The lower end of the splint 1211 extends into the groove 12223, and a cavity 12224 communicating with the groove 12223 is formed in the seat body 12221; the second jaw 122 also includes a locking mechanism 1224 accommodated in the cavity 12224, and the locking mechanism 1224 It is used to cooperate with the first clamping plate 1211 to lock the first clamping plate 1211 when the first clamping plate 1211 is in the abutting position or the avoiding position.
  • the two mounting lugs 12222 of the mounting seat 1222 are arranged at intervals on both sides of the seat body 12221 along the front and rear directions, the rotating shaft 1223 of the second splint 1221 is placed horizontally, and the front and rear ends of the rotating shaft 1223 are respectively inserted in two
  • the mounting ear 12222 is hinged with the corresponding mounting ear 12222 so that the second splint 1221 can rotate relative to the mounting seat 1222 .
  • the locking mechanism 1224 is accommodated in the cavity 12224 of the seat body 12221, and can be locked with the first clamping plate 1211 when the first clamping plate 1211 is rotated relative to the mounting seat 1222 to the abutting position or avoidance position, preventing the first clamping plate 1211 from When being pulled, it will rotate automatically to ensure the normal use of the first splint 1211.
  • the locking mechanism 1224 includes an elastic member 12241 and a floating block 12242.
  • the lower end of the elastic member 12241 is connected to the bottom cavity wall of the cavity 12224, and the upper end of the elastic member 12241 is connected to the floating block 12242;
  • the abutment block 1225 in the groove 12223, the abutment block 1225 is located below the rotating shaft 1223, the bottom of the abutment block 1225 has a first abutment surface 12251 and a second abutment surface 12252, the first abutment surface 12251 and the second abutment surface
  • the abutting surface 12252 is connected by a circular arc transition, and the distance between the first abutting surface 12251 and the rotating shaft 1223 is smaller than the distance between the second abutting surface 12252 and the rotating shaft 1223.
  • the floating block 12242 When the first clamping plate 1211 is in the avoiding position, the floating block 12242 abuts against the first abutting surface 12251 , and when the first clamping plate 1211 is in the abutting position, the floating block 12242 abuts against the second abutting surface 12252 .
  • the elastic member 12241 of this embodiment can adopt a spring in the prior art, the lower end of the spring is connected to the bottom cavity wall of the cavity 12224 , and the upper end of the elastic member 12241 is connected to the floating block 12242 .
  • the bottom of the abutment block 1225 connected to the lower end of the first splint 1211 forms a first abutment surface 12251 and a second abutment surface 12252, wherein the first abutment surface 12251 and the second abutment surface 12252 are both flat, and the first The abutting surface 12251 and the second abutting surface 12252 are connected through a circular arc surface 12253, and the distance between the first abutting surface 12251 and the rotating shaft 1223 is relatively small, while the second abutting surface 12252 and the rotating shaft The distance between 1223 is relatively large, and the distance from the arc surface 12253 to the center of the rotating shaft 1223 can gradually expand from the first abutting
  • the floating block 12242 sinks after being pressed, and the spring is pressed
  • the floating block 12242 is pressed against the second abutting surface 12252 to lock the second clamping plate 1221 so that the second jaw 122 can maintain a self-locking state when it is in the abutting position.
  • the second clamping jaw 122 of this embodiment also includes a second roller 1226.
  • the second clamping plate 1221 is provided with a second installation groove 12211 near its upper end.
  • the second roller 1226 is rotatably installed in the second installation groove 12211.
  • the rotating shaft of the second roller 1226 is arranged vertically, and the rim of the second roller 1226 protrudes from the side of the second clamping plate 1221 facing the material placement space 40 and is used to contact the material.
  • the second roller 1226 is placed horizontally, and the rim of the second roller 1226 in the second jaw 122 on the right side protrudes from the left side of the second clamping plate 1221 and is used to abut the magazine 200, and is located on the left side.
  • the rim of the second roller 1226 in the second clamping jaw 122 in the second position protrudes from the right side of the second clamping plate 1221 and is used to abut against the cartridge 200 .
  • the second clamping plate 1221 can abut or disengage from the left or right side of the material box 200, so as to push the material box 200 to the ready position or loosen accordingly. 200 cartridges.
  • the rim of the second roller 1226 can abut against the material box 200, and roll along with the movement of the limit mechanism 22, reducing the material box 200.
  • the frictional force between the second splint 1221 and the side wall of the material box 200 during movement is beneficial to the movement of the material box 200 .
  • the number of first jaws 121 is at least two, at least two first jaws 121 are arranged at intervals along the second direction, and the first slide
  • the number of grooves 311 is consistent with the number of first jaws 121 and corresponds one by one
  • the number of second jaws 122 is at least two, at least two second jaws 122 are arranged at intervals along the second direction, and the second chute 312
  • the number of is consistent with the number of the second jaws 122 and corresponds one to one.
  • the number of first jaws 121 is two, and the two first jaws 121 are arranged at intervals along the front-to-back direction, and the number of first sliding slots 311 is also two, for the two first jaws 121 slide in the first chute 311 in one-to-one correspondence;
  • the number of second jaws 122 is two, and the two second jaws 122 are arranged at intervals along the front and rear directions, and the number of second chute 312 is also two, For the two second jaws 122 to slide in the second sliding slot 312 in a one-to-one correspondence.
  • each jaw mechanism 12 the two first jaws 121 and the two second jaws 122 are installed on the first drive plate 112, the structure is compact, and the design of parts is reduced, and the jaws are simplified.
  • the number of the first jaw 121 and the second jaw 122 are three, four or other numbers, and the number of the first jaw 121 and the second jaw 122
  • the quantity can be flexibly set according to the actual situation, and the present embodiment does not limit the quantity of the first jaw 121 and the second jaw 122 .
  • the limit mechanism 22 of this embodiment includes a first limit claw 221 and a second limit claw 222, and the first limit claw 221 and the second limit claw 222 are arranged at intervals on the same side of the material placement space 40 along the second direction.
  • the edge of the loading table 31 is provided with a first limiting chute 313 for the sliding of the first limiting claw 221, and the first limiting claw 221 passes through the first limiting chute 313 and stretches out the loading of the loading platform 31 surface;
  • the second limit claw 222 is located on the side of the first limit claw 221 towards the material placement space 40, and the loading table 31 is provided with a second limit chute 314 for the second limit claw 222 to slide, and the second limit
  • the position pawl 222 protrudes from the material loading surface of the material loading platform 31 through the second limiting chute 314 .
  • the limit mechanism 22 includes a first limit claw 221 and a second limit claw 222, and the first limit claw 221 and the second limit claw 222 are arranged at intervals along the front and rear directions It is located at the front side of the material placement space 40 , and the second limiting claw 222 is closer to the material placement space 40 .
  • the position corresponding to the first limiting claw 221 of the loading platform 31 is provided with a first limiting chute 313 to facilitate the sliding of the first limiting claw 221. Since the first limiting claw 221 can be arranged on the edge of the loading platform 31, Therefore, a first limiting slide 313 can be provided on the edge of the loading table 31 .
  • the loading table 31 is provided with a second limiting chute 314 at a position corresponding to the second limiting claw 222 to facilitate the sliding of the second limiting claw 222 .
  • the extension directions of the first limiting sliding groove 313 and the second limiting sliding groove 314 are both front and rear directions.
  • the 8-inch material box 200 When the material to be processed is an 8-inch material box 200, the 8-inch material box 200 is placed in the material storage space 40, and the first driving mechanism 11 drives two jaw mechanisms 12 to position the material box 200 in the left-right direction, while the second The driving mechanism 23 can drive the second limiting claw 222 close to the limiting plate 21, so that the material box 200 can be positioned in the front and rear direction through the cooperation of the second limiting claw 222 and the limiting plate 21, and the material box 200 can be accurately positioned to realize Automatic alignment of the magazine 200.
  • the 12-inch material box 200 When the material to be processed is a 12-inch material box 200, the 12-inch material box 200 is placed in the material storage space 40, and the first driving mechanism 11 drives two jaw mechanisms 12 to position the material box 200 in the left-right direction, while the second The driving mechanism 23 can drive the first stop claw 221 close to the stop plate 21, so that the material box 200 can be positioned in the front and rear direction through the cooperation of the first stop claw 221 and the limit plate 21, and the material box 200 can be accurately positioned to realize
  • the automatic alignment of the material box 200 further enables the loading and unloading device 100 of this embodiment to be applicable to two types of material boxes 200 with different sizes, and the compatibility is good.
  • the second driving mechanism 23 includes a second driving member 231 and a second driving plate 232 connected to the second driving member 231, and the second driving member 231 is installed on the bottom surface of the loading platform 31; 221 and the second stop claw 222 are installed on the second drive plate 232; the second drive member 231 is used to drive the second drive plate 232, to drive the first limit claw 221 and the second limit claw 222 relative loading
  • the table 31 moves synchronously towards or away from the limit plate 21 .
  • the second driving member 231 may adopt an air cylinder in the prior art, and the second driving member 231 is referred to as a second air cylinder hereinafter.
  • the claw mechanism the first claw 221 and the second claw 222 are installed on the second drive plate 232, and the structure is compact.
  • the first stop claw 221 and the second stop claw 222 of the stop mechanism 22 move synchronously toward or away from the limit plate 21 relative to the loading table 31, that is, , the first limit claw 221 and the second limit claw 222 of the limit mechanism 22 move backward synchronously, so as to position or loosen the material box 200 with a larger size through the cooperation of the first limit claw 221 and the limit plate 21,
  • the magazine 200 with a smaller size can be positioned or released by cooperating with the second limiting pawl 222 and the limiting plate 21 .
  • the side wall of the material box 200 can be supported on the loading table 31, and the bottom wall of the material box 200 can be suspended in the air.
  • the second driving member 231 drives the During the synchronous movement of the first stop claw 221 and the second stop claw 222 to the right, the second stop claw 222 closer to the material placement space 40 can be moved from the bottom wall of the material box 200 to the material loading table 31. Passing the suspended position will not interfere with the magazine 200 , while the first limiting pawl 221 can abut against the side wall of the magazine 200 and push the magazine 200 .
  • the number of the first limiting claws 221 is two, and the two first limiting claws 221 are arranged at intervals along the first direction. Consistent and one-to-one correspondence; the number of the second limiting claw 222 is two, and the two second limiting claws 222 are arranged at intervals along the second direction. The numbers are consistent and one-to-one correspondence; the distance between the two second limiting claws 222 is smaller than the distance between the two first limiting claws 221 .
  • the number of the first limiting claws 221 is set to two, and the two first limiting claws 221 are arranged at intervals along the left and right directions, and the first limiting chute 313
  • the number is also two, so that the two first limiting claws 221 slide in the first limiting chute 313 in a one-to-one correspondence
  • the number of the second limiting claws 222 is two, and the two second limiting claws 222 are arranged at intervals along the left and right directions
  • the number of the second limiting chute 314 is also two, so that the two second limiting pawls 222 slide in the second limiting chute 314 in a one-to-one correspondence.
  • the distance between the two second stop claws 222 is less than the distance between the two first stop claws 221.
  • the second cylinder drives the second When the plate 232 is driven, the two first stop claws 221 and the two second stop claws 222 move backward synchronously, and the two first stop claws 221 abut against the left and right side walls of the magazine 200 respectively Push the material box 200 to move backward;
  • the material box 200 is a 12-inch material box 200
  • the second cylinder drives the second drive plate 232, the two first limit claws 221 and the two second limit claws 222 Synchronously move backward, and push the material box 200 to move backward after the two second limit claws 222 abut against the left and right side walls of the material box 200 respectively, and the structure design is reasonable.
  • two first limit claws 221 and two second limit claws 222 are installed on the second drive plate 232, the structure is compact, and the design of parts is reduced, and
  • a third jaw can be added to each jaw mechanism 12, and the limit In the mechanism 22, a third limiting jaw is added, wherein the third jaw can be installed on the first driving plate 112, the third limiting jaw can be installed on the second driving plate 232, and the third jaw can be located on the same side Between the first clamping jaw 121 and the second clamping jaw 122, and the structure of the third clamping jaw is similar to that of the second clamping jaw 122, it can rotate between the avoidance position and the abutment position, and the third limiting jaw can be located at the first Between a limit claw 221 and the second limit claw 222, the third clamp jaw and the third limit claw are suitable for the positioning of the material box 200 with a size between 8 inches and 12 inches; The jaws are located on the side of the second jaw 122 disposed on the same side facing the material placement space 40, and the

Abstract

本发明公开一种上下料设备，包括：升降装置，包括载料台和升降驱动件，载料台用于承载物料，升降驱动件用于驱动载料台升降；第一定位装置，包括第一驱动机构和两个沿第一方向间隔布置的夹爪机构，各夹爪机构可滑动设置于载料台上，且两个夹爪机构之间形成用于放置物料的置料空间，第一驱动机构用于驱动两个夹爪机构相对载料台相向或相背运动；第二定位装置，包括限位板、限位机构和第二驱动机构，限位板和限位机构沿第二方向间隔布置于置料空间两侧，第一方向与第二方向相互垂直，限位板安装在载料台上，限位机构可滑动设置于载料台上，第二驱动机构用于驱动限位机构靠近或远离限位板。本发明能避免人工参与，降低产品的污染风险，提高生产效率。

Description

上下料设备 技术领域
本发明涉及加工制造技术领域，特别涉及一种上下料设备。
背景技术
在半导体工艺制程中，一般通过人工方式进行wafer(晶圆)料盒的上下料，将待加工的整盒wafer放入工艺设备料仓位置，放置时需人工保证料盒放置位置准确，待加工完成后再由人工将料盒取下转移至下一工序的工艺设备。由于该上下料过程都采用人工上下料的方式，过多的人工参与会增加产品的污染风险，且自动化程度低，存在生产效率低和人工劳动强度大的缺陷。
发明内容
本发明的主要目的是提出一种上下料设备，旨在解决现有半导体工艺制程采用人工上下料的方式增加产品污染风险及生产效率低等问题。
为实现上述目的，本发明提出一种上下料设备，所述上下料设备包括：
升降装置，包括载料台和升降驱动件，所述载料台用于承载物料，所述升降驱动件用于驱动所述载料台升降；
第一定位装置，包括第一驱动机构和两个沿第一方向间隔布置的夹爪机构，各所述夹爪机构可滑动设置于所述载料台上，且两个所述夹爪机构之间形成用于放置所述物料的置料空间，所述第一驱动机构用于驱动两个所述夹爪机构相对所述载料台相向或相背运动；
第二定位装置，包括限位板、限位机构和第二驱动机构，所述限位板和所述限位机构沿第二方向间隔布置于所述置料空间两侧，所述第一方向与所述第二方向相互垂直，所述限位板安装在所述载料台上，所述限位机构可滑动设置于所述载料台上，所述第二驱动机构用于驱动所述限位机构靠近或远离所述限位板。
优选地，所述夹爪机构包括第一夹爪和第二夹爪，所述第一夹爪和所述 第二夹爪沿所述第一方向间隔布置于所述置料空间的同一侧；所述载料台的边缘开设有供所述第一夹爪滑动的第一滑槽，所述第一夹爪穿过所述第一滑槽伸出所述载料台的载料面；所述第二夹爪位于所述第一夹爪朝向所述置料空间的一侧，所述载料台开设有供所述第二夹爪滑动的第二滑槽，所述第二夹爪能穿过所述第二滑槽伸出所述载料台的载料面或缩回所述第二滑槽内。
优选地，所述第一驱动机构包括两个第一驱动组件，两个所述第一驱动组件与两个所述夹爪机构一一对应布置；所述第一驱动组件包括第一驱动件和与所述第一驱动件连接的第一驱动板，所述第一驱动件安装在所述载料台的底面；各所述夹爪机构中，所述第一夹爪和所述第二夹爪均安装在对应的所述第一驱动板上；所述第一驱动件用于驱动所述第一驱动板，以带动所述第一夹爪和所述第二夹爪相对所述载料台向靠近或远离所述置料空间的方向同步运动。
优选地，所述第一夹爪包括第一夹板，所述第一夹板的下端安装在所述第一驱动板上，所述第一夹板竖向穿过所述第一滑槽，且所述第一夹板的上端伸出所述载料台的载料面。
优选地，所述第一夹爪还包括第一滚轮，所述第一夹板靠近其上端的位置开设有第一安装槽，所述第一滚轮可转动地安装于所述第一安装槽内，所述第一滚轮的转轴竖向设置，且所述第一滚轮的轮缘伸出所述第一夹板面向置料空间的一侧并用于抵接所述物料。
优选地，所述第二夹爪包括第二夹板和安装座，所述安装座安装在所述第一驱动板上，所述第二夹板的下端通过一转动轴铰接于所述安装座，以使所述第二夹板能相对所述安装座在抵接位置与避让位置之间转动，所述第二夹板处于所述抵接位置时竖向穿过所述第二滑槽并伸出所述载料台的载料面，所述第二夹板处于所述避让位置时水平设置并缩回所述第二滑槽内。
优选地，所述安装座包括座体和两个安装耳，所述座体安装在所述第一驱动板上，两个所述安装耳沿所述第二方向间隔设置于所述座体的两侧，所述转动轴的两端分别插设于两个所述安装耳内并与对应的所述安装耳铰接，所述座体及两个所述安装耳之间形成凹槽，所述第一夹板的下端伸入所述凹槽内，所述座体内形成有与所述凹槽连通的空腔；所述第二夹爪还包括收容于所述空腔内的锁紧机构，所述锁紧机构用于与所述第一夹板配合，以在所 述第一夹板处于所述抵接位置或所述避让位置时将所述第一夹板锁紧。
优选地，所述锁紧机构包括弹性件和浮动块，所述弹性件的下端与所述空腔的底腔壁连接，所述弹性件的上端连接有所述浮动块；所述第一夹板的下端设置有伸入所述凹槽内的抵接块，所述抵接块位于所述转动轴的下方，所述抵接块的底部具有第一抵接面和第二抵接面，所述第一抵接面与所述第二抵接面圆弧过渡连接，且所述第一抵接面与所述转动轴之间的距离小于所述第二抵接面与所述转动轴之间的距离，所述第一夹板处于所述避让位置时所述浮动块与所述第一抵接面抵紧，所述第一夹板处于所述抵接位置时所述浮动块与所述第二抵接面抵紧。
优选地，所述第二夹爪还包括第二滚轮，所述第二夹板靠近其上端的位置开设有第二安装槽，所述第二滚轮可转动地安装于所述第二安装槽内，所述第二滚轮的转轴竖向设置，且所述第二滚轮的轮缘伸出所述第二夹板面向置料空间的一侧并用于抵接所述物料。
优选地，各所述夹爪机构中，所述第一夹爪的数量为至少两个，至少两个所述第一夹爪沿所述第二方向间隔布置，所述第一滑槽的数量与所述第一夹爪的数量一致且一一对应；所述第二夹爪的数量为至少两个，至少两个所述第二夹爪沿所述第二方向间隔布置，所述第二滑槽的数量与所述第二夹爪的数量一致且一一对应。
优选地，所述限位机构包括第一限位爪和第二限位爪，所述第一限位爪和所述第二限位爪沿所述第二方向间隔布置于所述置料空间的同一侧；所述载料台的边缘开设有供所述第一限位爪滑动的第一限位滑槽，所述第一限位爪穿过所述第一限位滑槽伸出所述载料台的载料面；所述第二限位爪位于所述第一限位爪朝向所述置料空间的一侧，所述载料台开设有供所述第二限位爪滑动的第二限位滑槽，所述第二限位爪穿过所述第二限位滑槽伸出所述载料台的载料面。
优选地，所述第二驱动机构包括第二驱动件和与所述第二驱动件连接的第二驱动板，所述第二驱动件安装在所述载料台的底面；所述第一限位爪和所述第二限位爪均安装在所述第二驱动板上；所述第二驱动件用于驱动所述第二驱动板，以带动所述第一限位爪和所述第二限位爪相对所述载料台向靠近或远离所述限位板的方向同步运动。
优选地，所述第一限位爪的数量为两个，两个所述第一限位爪沿所述第一方向间隔布置，所述第一限位滑槽的数量与所述第一限位爪的数量一致且一一对应；所述第二限位爪的数量为两个，两个所述第二限位爪沿所述第二方向间隔布置，所述第二限位滑槽的数量与所述第二限位爪的数量一致且一一对应；两个所述第二限位爪之间的距离小于两个所述第一限位爪之间的距离。
本发明的技术方案中，在工作过程中，机器人将物料放置在载料台的置料空间内，第一驱动机构驱动两个夹爪机构相向运动，使得两个夹爪机构分别与物料的两侧抵接并使物料沿第一方向移动至合适的位置，以在第一方向上将物料定位。而第二驱动机构驱动限位机构靠近限位板，进而推动物料直至与限位板抵接，以在第二方向上将物料定位，从而将物料准确地定位，完成自动上料过程。并且，升降装置中的升降驱动件还可驱动载料台上下升降，以切换不同高度的物料对准加工设备上料口，实现连续上料过程。待加工完成后，第一驱动机构分别驱动两个夹爪机构相背运动，使得两个夹爪机构将物料松开，而第二驱动机构则驱动限位机构远离限位板，限位机构将物料松开，方便机器人将物料取走，完成自动下料过程。本发明上下料设备可实现物料的准确定位以及自动上下料过程，校正机器人上料偏差，自动化程度高，既能避免人工参与，降低产品的污染风险，又能提高生产效率，降低人工劳动强度。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图示出的结构获得其他的附图。
图1为本发明一实施例上下料设备在一视角的立体示意图；
图2为本发明一实施例上下料设备的局部放大示意图；
图3为本发明一实施例上下料设备在另一视角的立体示意图；
图4为本发明一实施例上下料设备定位12寸料盒时的立体立体图；
图5为本发明一实施例上下料设备定位8寸料盒时的立体立体图；
图6为本发明一实施例上下料设备中第二夹爪的立体示意图；
图7为本发明一实施例上下料设备中第二夹板处于抵接位置时的立体示意图；
图8为本发明一实施例上下料设备中第二夹板处于避让位置时的立体示意图。
附图标号说明：
100 上下料设备 12251 第一抵接面
10 第一定位装置 12252 第二抵接面
11 第一驱动机构 12253 圆弧面
111 第一驱动件 1226 第二滚轮
112 第一驱动板 20 第二定位装置
12 夹爪机构 21 限位板
121 第一夹爪 22 限位机构
1211 第一夹板 221 第一限位爪
12111 第一安装槽 222 第二限位爪
1212 第一滚轮 23 第二驱动机构
122 第二夹爪 231 第二驱动件
1221 第二夹板 232 第二驱动板
12211 第二安装槽 30 升降装置
1222 安装座 31 载料台
12221 座体 32 升降驱动件
12222 安装耳 311 第一滑槽
12223 凹槽 312 第二滑槽
12224 空腔 313 第一限位滑槽
1223 转动轴 314 第二限位滑槽
1224 锁紧机构 40 置料空间
12241 弹性件 200 料盒
12242 浮动块 300 wafer架
1225 抵接块    
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
需要说明，若本发明实施例中有涉及方向性指示(诸如上、下、左、右、前、后……)，则该方向性指示仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
另外，若本发明实施例中有涉及“第一”、“第二”等的描述，则该“第一”、“第二”等的描述仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外，各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本发明要求的保护范围之内。
本发明提出一种上下料设备。
如图1至图5所示，本实施例的上下料设备100包括升降装置30、第一定位装置10和第二定位装置20，其中，升降装置30包括载料台31和升降驱动件32，载料台31用于承载物料，升降驱动件32用于驱动载料台31升降；第一定位装置10包括第一驱动机构11和两个沿第一方向间隔布置的夹爪机构12，各夹爪机构12可滑动设置于载料台31上，且两个夹爪机构12之间形成用于放置物料的置料空间40，第一驱动机构11用于驱动两个夹爪机构12相对载料台31相向或相背运动；第二定位装置20包括限位板21、限位机构 22和第二驱动机构23，限位板21和限位机构22沿第二方向间隔布置于置料空间40两侧，第一方向与第二方向相互垂直，限位板21安装在载料台31上，限位机构22可滑动设置于载料台31上，第二驱动机构23用于驱动限位机构22靠近或远离限位板21。
具体地，本实施例的第一方向为图1所示的左右方向，第二方向为图1所示的前后方向。第一定位装置10的两个夹爪机构12分别位于置料空间40的左右两侧，第二定位装置20的限位机构22和限位板21分别位于置料空间40的前后两侧。本实施例上下料设备100可应用于半导体工艺制程中，完成对wafer料盒200上下料过程，可以理解地，wafer料盒200内装有多个wafer架300，多个wafer架300上下层叠设置，本实施例物料以wafer料盒200为例进行说明，以下将wafer料盒200简称为料盒200。本实施例的升降驱动件32可采用现有技术中的升降电缸。
在工作过程中，机器人将料盒200放置在载料台31的置料空间40内，第一驱动机构11驱动两个夹爪机构12相向运动，即，第一驱动机构11驱动左侧的夹爪机构12相对载料台31向右运动，同时驱动右侧的夹爪机构12相对载料台31向左运动，使得两个夹爪机构12分别与料盒200的左右两侧抵接并使料盒200左右移动至合适的位置，以在左右方向上将料盒200定位。而第二驱动机构23驱动限位机构22靠近限位板21，即，驱动限位机构22向后运动，进而推动料盒200向后运动直至与限位板21抵接，进而使得限位机构22和限位板21分别与料盒200的前后两侧抵接，以在前后方向上将料盒200定位，进而从前后左右多方位的方向将料盒200准确地定位，完成自动上料过程。并且，本实施例中，升降装置30中的升降驱动件32还可驱动载料台31上下升降，以切换不同高度的wafer架300对准加工设备上料口，实现连续上料过程。可以理解地，待加工完成后，第一驱动机构11分别驱动两个夹爪机构12相背运动，即，第一驱动机构11驱动左侧的夹爪机构12相对载料台31向左运动，同时驱动右侧的夹爪机构12相对载料台31向右运动，使得两个夹爪机构12将料盒200松开，而第二驱动机构23则驱动限位机构22远离限位板21，即，驱动限位机构22向前运动，限位机构22将料盒200松开，方便机器人将料盒200取走，完成自动下料过程。
本实施例上下料设备100可实现料盒200的准确定位以及自动上下料过 程，校正机器人上料偏差，自动化程度高，既能避免人工参与，降低产品的污染风险，又能提高生产效率，降低人工劳动强度。
本实施例的夹爪机构12包括第一夹爪121和第二夹爪122，第一夹爪121和第二夹爪122沿第一方向间隔布置于置料空间40的同一侧；载料台31的边缘开设有供第一夹爪121滑动的第一滑槽311，第一夹爪121穿过第一滑槽311伸出载料台31的载料面；第二夹爪122位于第一夹爪121朝向置料空间40的一侧，载料台31开设有供第二夹爪122滑动的第二滑槽312，第二夹爪122能穿过第二滑槽312伸出载料台31的载料面或缩回第二滑槽312内。
如图1至图5所示，各夹爪机构12包括第一夹爪121和第二夹爪122，且同一夹爪机构12中的第一夹爪121和第二夹爪122沿左右方向间隔布置于置料空间40的同一侧，且第二夹爪122更靠近置料空间40。可以理解地，左侧夹爪机构12中，第一夹爪121和第二夹爪122均位于置料空间40的左侧，右侧夹爪机构12中，第一夹爪121和第二夹爪122均位于置料空间40的右侧。两个夹爪机构12中，两个第一夹爪121左右相对设置，两个第二夹爪122左右相对设置，且两个第一夹爪121之间的距离大于两个第二夹爪122之间的距离。载料台31对应第一夹爪121的位置开设有第一滑槽311，方便第一夹爪121滑动，载料台31对应第二夹爪122的位置开设有第二滑槽312，方便第二夹爪122滑动。为了方便第一夹爪121和第二夹爪122的左右滑动，第一滑槽311和第二滑槽312的延伸方向均为左右方向。
一般料盒200有8寸和12寸两种尺寸，待加工物料为8寸料盒200时，将8寸料盒200置于置料空间40内，第一驱动机构11驱动两个第二夹爪122相向运动，此时，第二夹爪122穿过第二滑槽312伸出载料台31的载料面，可以理解地，载料台31的载料面为载料台31的顶面，以在第一驱动机构11驱动两个第二夹爪122相向运动的过程中，两个第二夹爪122能分别与料盒200的左右两侧抵接并在左右方向上将料盒200定位。待加工物料为12寸料盒200时，将12寸料盒200置于置料空间40内，为了避免第二夹爪122对料盒200造成干涉，此时，第二夹爪122缩回第二滑槽312内，第一驱动机构11驱动两个第一夹爪121相向运动，两个第一夹爪121能分别与料盒200的左右两侧抵接并在左右方向上将料盒200定位。通过设置第一夹爪121和第二夹爪122，使得本实施例上下料设备100能适用于两种尺寸不同的料盒 200，兼容性好。
本实施例中，第一驱动机构11包括两个第一驱动组件，两个第一驱动组件与两个夹爪机构12一一对应布置；第一驱动组件包括第一驱动件111和与第一驱动件111连接的第一驱动板112，第一驱动件111安装在载料台31的底面；各夹爪机构12中，第一夹爪121和第二夹爪122均安装在对应的第一驱动板112上；第一驱动件111用于驱动第一驱动板112，以带动第一夹爪121和第二夹爪122相对载料台31向靠近或远离置料空间40的方向同步运动。
具体地，第一驱动件111可采用现有技术中的气缸，以下将第一驱动件111称为第一气缸。各夹爪机构12对应设置有第一驱动组件，各第一驱动组件包括第一气缸和第一驱动板112。工作时，两个第一气缸分别驱动对应的第一驱动板112运动，进而分别带动两个夹爪机构12相向或相背运动。各夹爪机构12中，第一夹爪121和第二夹爪122均安装在第一驱动板112上，结构紧凑。在第一气缸驱动第一驱动板112时，各夹爪机构12的第一夹爪121和第二夹爪122则相对载料台31向靠近或远离置料空间40的方向同步运动，以通过两个左右相对设置的第一夹爪121将尺寸较大的料盒200定位或放松，或者通过两个左右相对设置的第二夹爪122将尺寸较小的料盒200定位或放松。
如图1至图5所示，本实施例的第一夹爪121包括第一夹板1211，第一夹板1211的下端安装在第一驱动板112上，第一夹板1211竖向穿过第一滑槽311，且第一夹板1211的上端伸出载料台31的载料面。进一步地，第一夹爪121还包括第一滚轮1212，第一夹板1211靠近其上端的位置开设有第一安装槽12111，第一滚轮1212可转动地安装于第一安装槽12111内，第一滚轮1212的转轴竖向设置，且第一滚轮1212的轮缘伸出第一夹板1211面向置料空间40的一侧并用于抵接物料。可以理解地，第一滚轮1212水平放置，位于右侧位置的第一夹爪121中第一滚轮1212的轮缘伸出第一夹板1211的左侧面并用于抵接料盒200，位于左侧位置的第一夹爪121中第一滚轮1212的轮缘伸出第一夹板1211的右侧面并用于抵接料盒200。
在第一气缸驱动第一驱动板112左右运动的过程中，第一夹板1211可与料盒200的左侧或右侧抵接或脱离抵接，以对应将料盒200推至准备位置或放松料盒200。而料盒200在被限位机构22推动料盒200运动的过程中，第 一滚轮1212的轮缘可与料盒200抵接，并随着限位机构22的运动而滚动，减少料盒200运动时第一夹板1211与料盒200侧壁之间的摩擦力，利于料盒200的运动。
本实施例中，第二夹爪122包括第二夹板1221和安装座1222，安装座1222安装在第一驱动板112上，第二夹板1221的下端通过一转动轴1223铰接于安装座1222，以使第二夹板1221能相对安装座1222在抵接位置与避让位置之间转动，第二夹板1221处于抵接位置时竖向穿过第二滑槽312并伸出载料台31的载料面，第二夹板1221处于避让位置时水平设置并缩回第二滑槽312内。
如图1至图3、图5所示，待加工物料为8寸料盒200时，将8寸料盒200置于置料空间40内，此时，第二夹板1221相对安装座1222转动至抵接位置，第二夹板1221数显穿过第二滑槽312并伸出载料台31的载料面，两个第一气缸分别驱动对应的驱动板运动，进而分别带动两个第二夹板1221相向运动，第二夹板1221分别与料盒200的左右两侧抵接并在左右方向上将料盒200定位。如图1至图4所示，待加工物料为12寸料盒200时，将12寸料盒200置于置料空间40内，此时，第二夹板1221则被扳动，使其从抵接位置相对安装座1222转动至避让位置，从而将竖向放置的第二夹板1221切换为水平放置，第二夹板1221水平放置时则缩回第二滑槽312内，避免对12寸料盒200造成干涉，灵活方便。
进一步地，如图6至图8所示，安装座1222包括座体12221和两个安装耳12222，座体12221安装在第一驱动板112上，两个安装耳12222沿第二方向间隔设置于座体12221的两侧，转动轴1223的两端分别插设于两个安装耳12222内并与对应的安装耳12222铰接，座体12221及两个安装耳12222之间形成凹槽12223，第一夹板1211的下端伸入凹槽12223内，座体12221内形成有与凹槽12223连通的空腔12224；第二夹爪122还包括收容于空腔12224内的锁紧机构1224，锁紧机构1224用于与第一夹板1211配合，以在第一夹板1211处于抵接位置或避让位置时将第一夹板1211锁紧。
具体地，安装座1222的两个安装耳12222沿前后方向间隔设置于座体12221的两侧，第二夹板1221的转动轴1223水平放置，且转动轴1223的前后两端分别插设于两个安装耳12222内并与对应的安装耳12222铰接，以使 第二夹板1221能相对安装座1222转动。锁紧机构1224收容于座体12221的空腔12224内，在第一夹板1211相对安装座1222转动至抵接位置或避让位置时都能与第一夹板1211锁紧，防止第一夹板1211在没被扳动的情况下自行转动，保证第一夹板1211的正常使用。
锁紧机构1224包括弹性件12241和浮动块12242，弹性件12241的下端与空腔12224的底腔壁连接，弹性件12241的上端连接有浮动块12242；第一夹板1211的下端设置有伸入凹槽12223内的抵接块1225，抵接块1225位于转动轴1223的下方，抵接块1225的底部具有第一抵接面12251和第二抵接面12252，第一抵接面12251与第二抵接面12252圆弧过渡连接，且第一抵接面12251与转动轴1223之间的距离小于第二抵接面12252与转动轴1223之间的距离，第一夹板1211处于避让位置时浮动块12242与第一抵接面12251抵紧，第一夹板1211处于抵接位置时浮动块12242与第二抵接面12252抵紧。
本实施例的弹性件12241可采用现有技术中的弹簧，弹簧的下端与空腔12224的底腔壁连接，弹性件12241的上端连接有浮动块12242。连接于第一夹板1211下端的抵接块1225的底部形成第一抵接面12251和第二抵接面12252，其中，第一抵接面12251和第二抵接面12252均呈平面，第一抵接面12251与第二抵接面12252之间通过一圆弧面12253过渡连接，且第一抵接面12251与转动轴1223之间的距离较小，而第二抵接面12252与转动轴1223之间的距离较大，圆弧面12253到转动轴1223中心的距离可由第一抵接面12251至第二抵接面12252的方向逐渐扩大。如图8所示，当第二夹板1221由抵接位置转动至避让位置时，第二夹板1221则由竖向放置切换为水平放置，此时，浮动块12242在弹簧的作用下上浮并与第一抵接面12251抵紧，从而将第二夹板1221锁紧，使得第二夹爪122处于避让位置时能保持自锁。如图7所示，当第二夹板1221由避让位置转动至抵接位置，第二夹板1221则由水平放置切换为竖向放置，此时，浮动块12242受压后下沉，弹簧受压并顶住浮动块12242抵紧第二抵接面12252，从而将第二夹板1221锁紧，使得第二夹爪122处于抵接位置时能保持自锁状态。
本实施例的第二夹爪122还包括第二滚轮1226，第二夹板1221靠近其上端的位置开设有第二安装槽12211，第二滚轮1226可转动地安装于第二安装槽12211内，第二滚轮1226的转轴竖向设置，且第二滚轮1226的轮缘伸出 第二夹板1221面向置料空间40的一侧并用于抵接物料。可以理解地，第二滚轮1226水平放置，位于右侧位置的第二夹爪122中第二滚轮1226的轮缘伸出第二夹板1221的左侧面并用于抵接料盒200，位于左侧位置的第二夹爪122中第二滚轮1226的轮缘伸出第二夹板1221的右侧面并用于抵接料盒200。
在第一气缸驱动第一驱动板112左右运动的过程中，第二夹板1221可与料盒200的左侧或右侧抵接或脱离抵接，以对应将料盒200推至准备位置或放松料盒200。而料盒200在被限位机构22推动料盒200运动的过程中，第二滚轮1226的轮缘可与料盒200抵接，并随着限位机构22的运动而滚动，减少料盒200运动时第二夹板1221与料盒200侧壁之间的摩擦力，利于料盒200的运动。
如图1至图5所示，本实施例的各夹爪机构12中，第一夹爪121的数量为至少两个，至少两个第一夹爪121沿第二方向间隔布置，第一滑槽311的数量与第一夹爪121的数量一致且一一对应；第二夹爪122的数量为至少两个，至少两个第二夹爪122沿第二方向间隔布置，第二滑槽312的数量与第二夹爪122的数量一致且一一对应。在一实施例中，第一夹爪121的数量为两个，两个第一夹爪121沿前后方向间隔布置，第一滑槽311的数量也为两个，以供两个第一夹爪121一一对应地在第一滑槽311内滑动；第二夹爪122的数量为两个，两个第二夹爪122沿前后方向间隔布置，第二滑槽312的数量也为两个，以供两个第二夹爪122一一对应地在第二滑槽312内的滑动。
可以理解地，各夹爪机构12中，两个第一夹爪121和两个第二夹爪122均安装在第一驱动板112上，结构紧凑，且减少了零部件设计，简化了夹爪机构12的结构，并且，通过设置两个第一夹爪121及两个第二夹爪122，可以增加第一夹爪121或第二夹爪122与料盒200的抵接面积，方便快速推动料盒200，以将料盒200定位至准确位置。在其他实施例中，各夹爪机构12中，第一夹爪121及第二夹爪122的数量均为三个、四个或其他个数，第一夹爪121及第二夹爪122的数量可根据实际情况灵活设置，本实施例对第一夹爪121及第二夹爪122的数量不作限定。
本实施例的限位机构22包括第一限位爪221和第二限位爪222，第一限位爪221和第二限位爪222沿第二方向间隔布置于置料空间40的同一侧；载料台31的边缘开设有供第一限位爪221滑动的第一限位滑槽313，第一限位 爪221穿过第一限位滑槽313伸出载料台31的载料面；第二限位爪222位于第一限位爪221朝向置料空间40的一侧，载料台31开设有供第二限位爪222滑动的第二限位滑槽314，第二限位爪222穿过第二限位滑槽314伸出载料台31的载料面。
如图1、图3至图5所示，限位机构22包括第一限位爪221和第二限位爪222，且第一限位爪221和第二限位爪222沿前后方向间隔布置于置料空间40的前侧，且第二限位爪222更靠近置料空间40。载料台31的对应第一限位爪221的位置开设有第一限位滑槽313，方便第一限位爪221滑动，由于第一限位爪221可设置在载料台31的边缘，从而可在载料台31的边缘开设第一限位滑槽313。载料台31对应第二限位爪222的位置开设有第二限位滑槽314，方便第二限位爪222滑动。为了方便第一限位爪221和第二限位爪222的前后滑动，第一限位滑槽313和第二限位滑槽314的延伸方向均为前后方向。
待加工物料为8寸料盒200时，将8寸料盒200置于置料空间40内，第一驱动机构11驱动两个夹爪机构12在左右方向上将料盒200定位，而第二驱动机构23可驱动第二限位爪222靠近限位板21，以通过第二限位爪222与限位板21的配合在前后方向上将料盒200定位，将料盒200准确定位，实现料盒200的自动找正。待加工物料为12寸料盒200时，将12寸料盒200置于置料空间40内，第一驱动机构11驱动两个夹爪机构12在左右方向上将料盒200定位，而第二驱动机构23可驱动第一限位爪221靠近限位板21，以通过第一限位爪221与限位板21的配合在前后方向上将料盒200定位，将料盒200准确定位，实现料盒200的自动找正，进而使得本实施例上下料设备100能适用于两种尺寸不同的料盒200，兼容性好。
本实施例中，第二驱动机构23包括第二驱动件231和与第二驱动件231连接的第二驱动板232，第二驱动件231安装在载料台31的底面；第一限位爪221和第二限位爪222均安装在第二驱动板232上；第二驱动件231用于驱动第二驱动板232，以带动第一限位爪221和第二限位爪222相对载料台31向靠近或远离限位板21的方向同步运动。
具体地，第二驱动件231可采用现有技术中的气缸，以下将第二驱动件231称为第二气缸。限位爪机构中，第一限位爪221和第二限位爪222均安装 在第二驱动板232上，结构紧凑。在第二气缸驱动第二驱动板232时，限位机构22的第一限位爪221和第二限位爪222则相对载料台31向靠近或远离限位板21的方向同步运动，即，限位机构22的第一限位爪221和第二限位爪222同步向后运动，以通过第一限位爪221与限位板21配合将尺寸较大的料盒200定位或放松，或者通过第二限位爪222与限位板21配合将尺寸较小的料盒200定位或放松。需要说明的是，料盒200的侧壁可支撑于载料台31上，而料盒200的底壁可悬空设置，当料盒200为12寸料盒200时，第二驱动件231驱动第一限位爪221和第二限位爪222同步向右运动的过程中，更为靠近置料空间40的第二限位爪222则可从料盒200底壁与载料台31之间的悬空位置通过，不会对料盒200造成干涉，而第一限位爪221则可与料盒200的侧壁抵接并推动料盒200。
本实施例中，第一限位爪221的数量为两个，两个第一限位爪221沿第一方向间隔布置，第一限位滑槽313的数量与第一限位爪221的数量一致且一一对应；第二限位爪222的数量为两个，两个第二限位爪222沿第二方向间隔布置，第二限位滑槽314的数量与第二限位爪222的数量一致且一一对应；两个第二限位爪222之间的距离小于两个第一限位爪221之间的距离。
由于料盒200具有左右两个侧壁，本实施例将第一限位爪221的数量设置为两个，两个第一限位爪221沿左右方向间隔布置，第一限位滑槽313的数量也为两个，以供两个第一限位爪221一一对应地在第一限位滑槽313内滑动；第二限位爪222的数量为两个，两个第二限位爪222沿左右方向间隔布置，第二限位滑槽314的数量也为两个，以供两个第二限位爪222一一对应地在第二限位滑槽314内的滑动。
本实施例中，两个第二限位爪222之间的距离小于两个第一限位爪221之间的距离，当料盒200为8寸料盒200时，在第二气缸驱动第二驱动板232时，两个第一限位爪221及两个第二限位爪222同步向后运动，并由两个第一限位爪221分别与料盒200的左右两个侧壁抵接后推动料盒200向后运动；当料盒200为12寸料盒200时，在第二气缸驱动第二驱动板232时，两个第一限位爪221及两个第二限位爪222同步向后运动，并由两个第二限位爪222分别与料盒200的左右两个侧壁抵接后推动料盒200向后运动，结构设计合理。并且，限位机构22中，两个第一限位爪221和两个第二限位爪222均安 装在第二驱动板232上，结构紧凑，且减少了零部件设计，简化了限位机构22的结构
需要说明的是，为了扩展上下料设备100的兼容性，使其能适用超过两种以上，比如三种尺寸的料盒200，可在各夹爪机构12中增设第三夹爪，在限位机构22中增设第三限位爪，其中，第三夹爪可安装在第一驱动板112上，第三限位爪可安装在第二驱动板232上，第三夹爪可位于同侧设置的第一夹爪121和第二夹爪122之间，且第三夹爪与第二夹爪122的结构类似，可在避让位置和抵接位置之间转动，第三限位爪可位于第一限位爪221和第二限位爪222之间，使第三夹爪及第三限位爪适用于尺寸介于8寸-12寸之间的料盒200定位；或者，可使第三夹爪位于同侧设置的第二夹爪122朝向置料空间40的一侧，且第三夹爪与第二夹爪122的结构类似，可在避让位置和抵接位置之间转动，第三限位爪位于第二限位爪222朝向置料空间40的一侧，使第三夹爪及第三限位爪适用于尺寸小于8寸的料盒200定位。
以上仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是在本发明的发明构思下，利用本发明说明书及附图内容所作的等效结构变换，或直接/间接运用在其他相关的技术领域均包括在本发明的专利保护范围内。

Claims (13)

  1. 一种上下料设备，其特征在于，所述上下料设备包括：
    升降装置，包括载料台和升降驱动件，所述载料台用于承载物料，所述升降驱动件用于驱动所述载料台升降；
    第一定位装置，包括第一驱动机构和两个沿第一方向间隔布置的夹爪机构，各所述夹爪机构可滑动设置于所述载料台上，且两个所述夹爪机构之间形成用于放置所述物料的置料空间，所述第一驱动机构用于驱动两个所述夹爪机构相对所述载料台相向或相背运动；
    第二定位装置，包括限位板、限位机构和第二驱动机构，所述限位板和所述限位机构沿第二方向间隔布置于所述置料空间两侧，所述第一方向与所述第二方向相互垂直，所述限位板安装在所述载料台上，所述限位机构可滑动设置于所述载料台上，所述第二驱动机构用于驱动所述限位机构靠近或远离所述限位板。
  2. 如权利要求1所述的上下料设备，其特征在于，所述夹爪机构包括第一夹爪和第二夹爪，所述第一夹爪和所述第二夹爪沿所述第一方向间隔布置于所述置料空间的同一侧；所述载料台的边缘开设有供所述第一夹爪滑动的第一滑槽，所述第一夹爪穿过所述第一滑槽伸出所述载料台的载料面；所述第二夹爪位于所述第一夹爪朝向所述置料空间的一侧，所述载料台开设有供所述第二夹爪滑动的第二滑槽，所述第二夹爪能穿过所述第二滑槽伸出所述载料台的载料面或缩回所述第二滑槽内。
  3. 如权利要求2所述的上下料设备，其特征在于，所述第一驱动机构包括两个第一驱动组件，两个所述第一驱动组件与两个所述夹爪机构一一对应布置；所述第一驱动组件包括第一驱动件和与所述第一驱动件连接的第一驱动板，所述第一驱动件安装在所述载料台的底面；各所述夹爪机构中，所述第一夹爪和所述第二夹爪均安装在对应的所述第一驱动板上；所述第一驱动件用于驱动所述第一驱动板，以带动所述第一夹爪和所述第二夹爪相对所述载料台向靠近或远离所述置料空间的方向同步运动。
  4. 如权利要求3所述的上下料设备，其特征在于，所述第一夹爪包括第一夹板，所述第一夹板的下端安装在所述第一驱动板上，所述第一夹板竖向穿过所述第一滑槽，且所述第一夹板的上端伸出所述载料台的载料面。
  5. 如权利要求4所述的上下料设备，其特征在于，所述第一夹爪还包括第一滚轮，所述第一夹板靠近其上端的位置开设有第一安装槽，所述第一滚轮可转动地安装于所述第一安装槽内，所述第一滚轮的转轴竖向设置，且所述第一滚轮的轮缘伸出所述第一夹板面向置料空间的一侧并用于抵接所述物料。
  6. 如权利要求3所述的上下料设备，其特征在于，所述第二夹爪包括第二夹板和安装座，所述安装座安装在所述第一驱动板上，所述第二夹板的下端通过一转动轴铰接于所述安装座，以使所述第二夹板能相对所述安装座在抵接位置与避让位置之间转动，所述第二夹板处于所述抵接位置时竖向穿过所述第二滑槽并伸出所述载料台的载料面，所述第二夹板处于所述避让位置时水平设置并缩回所述第二滑槽内。
  7. 如权利要求6所述的上下料设备，其特征在于，所述安装座包括座体和两个安装耳，所述座体安装在所述第一驱动板上，两个所述安装耳沿所述第二方向间隔设置于所述座体的两侧，所述转动轴的两端分别插设于两个所述安装耳内并与对应的所述安装耳铰接，所述座体及两个所述安装耳之间形成凹槽，所述第一夹板的下端伸入所述凹槽内，所述座体内形成有与所述凹槽连通的空腔；所述第二夹爪还包括收容于所述空腔内的锁紧机构，所述锁紧机构用于与所述第一夹板配合，以在所述第一夹板处于所述抵接位置或所述避让位置时将所述第一夹板锁紧。
  8. 如权利要求7所述的上下料设备，其特征在于，所述锁紧机构包括弹性件和浮动块，所述弹性件的下端与所述空腔的底腔壁连接，所述弹性件的上端连接有所述浮动块；所述第一夹板的下端设置有伸入所述凹槽内的抵接 块，所述抵接块位于所述转动轴的下方，所述抵接块的底部具有第一抵接面和第二抵接面，所述第一抵接面与所述第二抵接面圆弧过渡连接，且所述第一抵接面与所述转动轴之间的距离小于所述第二抵接面与所述转动轴之间的距离，所述第一夹板处于所述避让位置时所述浮动块与所述第一抵接面抵紧，所述第一夹板处于所述抵接位置时所述浮动块与所述第二抵接面抵紧。
  9. 如权利要求6所述的上下料设备，其特征在于，所述第二夹爪还包括第二滚轮，所述第二夹板靠近其上端的位置开设有第二安装槽，所述第二滚轮可转动地安装于所述第二安装槽内，所述第二滚轮的转轴竖向设置，且所述第二滚轮的轮缘伸出所述第二夹板面向置料空间的一侧并用于抵接所述物料。
  10. 如权利要求2-9中任一项所述的上下料设备，其特征在于，各所述夹爪机构中，所述第一夹爪的数量为至少两个，至少两个所述第一夹爪沿所述第二方向间隔布置，所述第一滑槽的数量与所述第一夹爪的数量一致且一一对应；所述第二夹爪的数量为至少两个，至少两个所述第二夹爪沿所述第二方向间隔布置，所述第二滑槽的数量与所述第二夹爪的数量一致且一一对应。
  11. 如权利要求1-9中任一项所述的上下料设备，其特征在于，所述限位机构包括第一限位爪和第二限位爪，所述第一限位爪和所述第二限位爪沿所述第二方向间隔布置于所述置料空间的同一侧；所述载料台的边缘开设有供所述第一限位爪滑动的第一限位滑槽，所述第一限位爪穿过所述第一限位滑槽伸出所述载料台的载料面；所述第二限位爪位于所述第一限位爪朝向所述置料空间的一侧，所述载料台开设有供所述第二限位爪滑动的第二限位滑槽，所述第二限位爪穿过所述第二限位滑槽伸出所述载料台的载料面。
  12. 如权利要求11所述的上下料设备，其特征在于，所述第二驱动机构包括第二驱动件和与所述第二驱动件连接的第二驱动板，所述第二驱动件安装在所述载料台的底面；所述第一限位爪和所述第二限位爪均安装在所述第二驱动板上；所述第二驱动件用于驱动所述第二驱动板，以带动所述第一限 位爪和所述第二限位爪相对所述载料台向靠近或远离所述限位板的方向同步运动。
  13. 如权利要求12所述的上下料设备，其特征在于，所述第一限位爪的数量为两个，两个所述第一限位爪沿所述第一方向间隔布置，所述第一限位滑槽的数量与所述第一限位爪的数量一致且一一对应；所述第二限位爪的数量为两个，两个所述第二限位爪沿所述第二方向间隔布置，所述第二限位滑槽的数量与所述第二限位爪的数量一致且一一对应；两个所述第二限位爪之间的距离小于两个所述第一限位爪之间的距离。
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