WO2022219710A1 - 受光素子およびその製造方法 - Google Patents
受光素子およびその製造方法 Download PDFInfo
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- WO2022219710A1 WO2022219710A1 PCT/JP2021/015289 JP2021015289W WO2022219710A1 WO 2022219710 A1 WO2022219710 A1 WO 2022219710A1 JP 2021015289 W JP2021015289 W JP 2021015289W WO 2022219710 A1 WO2022219710 A1 WO 2022219710A1
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- 238000004519 manufacturing process Methods 0.000 title description 9
- 239000004065 semiconductor Substances 0.000 claims abstract description 73
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 150000001875 compounds Chemical class 0.000 claims abstract description 3
- 230000031700 light absorption Effects 0.000 claims description 32
- 238000009792 diffusion process Methods 0.000 claims description 14
- 230000004888 barrier function Effects 0.000 claims description 13
- 229910021480 group 4 element Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 description 16
- 230000003287 optical effect Effects 0.000 description 10
- 239000012535 impurity Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
- H01L31/1844—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- a mesa is composed of an i-InP layer 303 , a p-InGaAs absorption layer 304 , a p-InGaAsP diffusion barrier layer 305 and a p-InGaAs contact layer 306 , and this mesa is formed on the n-InP layer 302 .
- An n-electrode 307 is formed on the n-InP layer 302 around this mesa, and a p-electrode 308 is formed on the p-InGaAs contact layer 306 .
- the electrons in the electron-hole pairs generated in the light absorption layer 103 as described above diffuse in the direction of the p region 121 and the direction of the diffusion barrier layer 111 according to the impurity concentration gradient and the carrier density distribution. do.
- the diffusion barrier layer 111 since the diffusion barrier layer 111 has a larger bandgap than the light absorption layer 103 , it functions as a diffusion barrier against electrons, and the electrons generated in the light absorption layer 103 diffuse mainly toward the p region 121 .
- the capacitance C L and the resistance R in the light receiving element 100 are described below. If the p-region 121 has a sufficiently high concentration, the capacitance C L of the depletion layer formed in the i-region 122 is determined by the following equation (1).
- W dep is the width of the depletion layer in the lateral pin junction and the distance between the p region 121 and the n region 123 .
- ⁇ is the dielectric constant of the depletion layer (i region 122).
- the contact resistance Rc of the n-electrode 106 is given by the following equation (2), where S CL is the contact area with the contact layer 104 and ⁇ CL is the contact resistivity.
- Each of these layers can be formed by growing using, for example, a known epitaxial crystal growth technique (MO-CVD method, MBE method, etc.). Also, the doping concentration of impurities in each semiconductor layer is controlled using an in-situ doping technique during the epitaxial crystal growth process.
- MO-CVD method MO-CVD method
- MBE method MBE method
- the doping concentration of impurities in each semiconductor layer is controlled using an in-situ doping technique during the epitaxial crystal growth process.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
Claims (5)
- 基板の上に形成された半導体からなる半導体層と、
前記半導体層に形成され、前記基板の平面方向にpin接合を形成する、p型のp領域、i型のi領域、およびn型のn領域と、
前記半導体層の前記p領域の上に形成され、p型の半導体から構成された光吸収層と、
前記光吸収層の上に形成され、p型の半導体から構成されたコンタクト層と、
前記コンタクト層に電気的に接続して形成されたp電極と、
前記半導体層の前記n領域に電気的に接続して形成されたn電極と
を備える受光素子。 - 請求項1記載の受光素子において、
前記光吸収層と前記コンタクト層との間に形成され、前記光吸収層よりバンドギャップの大きい半導体から構成された拡散障壁層をさらに備えることを特徴とする受光素子。 - 請求項1または2記載の受光素子において、
前記半導体は、IV族元素から構成されていることを特徴とする受光素子。 - 請求項1または2記載の受光素子において、
前記半導体は、III-V族化合物半導体であることを特徴とする受光素子。 - 基板の上に半導体からなる半導体層を形成する第1工程と、
前記半導体層の上に、p型の半導体から構成された光吸収層およびp型の半導体から構成されたコンタクト層を形成する第2工程と、
前記光吸収層の下の前記半導体層にp型のp領域を形成する第3工程と、
前記p領域と共に前記基板の平面方向にpin接合を形成する、i型のi領域およびn型のn領域を前記半導体層に形成する第4工程と、
前記コンタクト層に電気的に接続するp電極および前記半導体層の前記n領域に電気的に接続する電極を形成する第5工程と
を備える受光素子の製造方法。
Priority Applications (3)
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US18/549,839 US20240154047A1 (en) | 2021-04-13 | 2021-04-13 | Light Receiving Element and Manufacturing Method Therefor |
JP2023514219A JPWO2022219710A1 (ja) | 2021-04-13 | 2021-04-13 | |
PCT/JP2021/015289 WO2022219710A1 (ja) | 2021-04-13 | 2021-04-13 | 受光素子およびその製造方法 |
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PCT/JP2021/015289 WO2022219710A1 (ja) | 2021-04-13 | 2021-04-13 | 受光素子およびその製造方法 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0513805A (ja) * | 1991-07-02 | 1993-01-22 | Sumitomo Electric Ind Ltd | 光電子集積回路 |
JP2002314117A (ja) * | 2001-04-09 | 2002-10-25 | Seiko Epson Corp | Pin構造のラテラル型半導体受光素子 |
JP2009531847A (ja) * | 2006-03-31 | 2009-09-03 | ユーシーエル ビジネス ピーエルシー | 光検出器 |
JP2015220290A (ja) * | 2014-05-15 | 2015-12-07 | 富士通株式会社 | Ge系半導体装置、その製造方法及び光インターコネクトシステム |
JP2018129483A (ja) * | 2017-02-10 | 2018-08-16 | 沖電気工業株式会社 | 受光素子 |
US20200144443A1 (en) * | 2018-11-07 | 2020-05-07 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for producing a photodiode and photodiode |
JP2020170819A (ja) * | 2019-04-05 | 2020-10-15 | 富士通株式会社 | 光半導体素子及び光伝送装置 |
-
2021
- 2021-04-13 JP JP2023514219A patent/JPWO2022219710A1/ja active Pending
- 2021-04-13 WO PCT/JP2021/015289 patent/WO2022219710A1/ja active Application Filing
- 2021-04-13 US US18/549,839 patent/US20240154047A1/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0513805A (ja) * | 1991-07-02 | 1993-01-22 | Sumitomo Electric Ind Ltd | 光電子集積回路 |
JP2002314117A (ja) * | 2001-04-09 | 2002-10-25 | Seiko Epson Corp | Pin構造のラテラル型半導体受光素子 |
JP2009531847A (ja) * | 2006-03-31 | 2009-09-03 | ユーシーエル ビジネス ピーエルシー | 光検出器 |
JP2015220290A (ja) * | 2014-05-15 | 2015-12-07 | 富士通株式会社 | Ge系半導体装置、その製造方法及び光インターコネクトシステム |
JP2018129483A (ja) * | 2017-02-10 | 2018-08-16 | 沖電気工業株式会社 | 受光素子 |
US20200144443A1 (en) * | 2018-11-07 | 2020-05-07 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for producing a photodiode and photodiode |
JP2020170819A (ja) * | 2019-04-05 | 2020-10-15 | 富士通株式会社 | 光半導体素子及び光伝送装置 |
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US20240154047A1 (en) | 2024-05-09 |
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