WO2022210470A1 - 接合体の製造方法 - Google Patents
接合体の製造方法 Download PDFInfo
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- WO2022210470A1 WO2022210470A1 PCT/JP2022/014812 JP2022014812W WO2022210470A1 WO 2022210470 A1 WO2022210470 A1 WO 2022210470A1 JP 2022014812 W JP2022014812 W JP 2022014812W WO 2022210470 A1 WO2022210470 A1 WO 2022210470A1
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 52
- 239000010703 silicon Substances 0.000 claims abstract description 52
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims abstract description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 21
- 238000005498 polishing Methods 0.000 claims abstract description 14
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 238000000227 grinding Methods 0.000 claims abstract description 8
- 239000011261 inert gas Substances 0.000 claims abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 56
- 239000002131 composite material Substances 0.000 claims description 38
- 230000005484 gravity Effects 0.000 claims description 9
- 239000002245 particle Substances 0.000 description 13
- 239000012530 fluid Substances 0.000 description 9
- 238000005219 brazing Methods 0.000 description 8
- 238000000465 moulding Methods 0.000 description 7
- 229910010293 ceramic material Inorganic materials 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 239000011148 porous material Substances 0.000 description 6
- 239000008187 granular material Substances 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011863 silicon-based powder Substances 0.000 description 4
- 238000003991 Rietveld refinement Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000013001 point bending Methods 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000009694 cold isostatic pressing Methods 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000113 methacrylic resin Substances 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000010680 novolac-type phenolic resin Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920006287 phenoxy resin Polymers 0.000 description 1
- 239000013034 phenoxy resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011134 resol-type phenolic resin Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
工程(b):外面側に位置し酸化珪素を主成分として含む第2外層部、および第2外層部に囲繞される炭化珪素および珪素を含む第2内部を有する第2複合体を得る工程。
工程(c):第1内部が第2内部に当接する第1当接面、および第2内部が第1内部に当接する第2当接面の少なくとも一方を、研削または研磨する工程。
工程(d):第1当接面と第2当接面とを当接させ、真空雰囲気中または不活性ガス雰囲気中で熱処理する工程。
まず、第1複合体および第2複合体をそれぞれ作製した。拡散接合する前に、第1複合体の第1当接面および第2複合体の第2当接面とは、予め表1に示す状態の面になるようにした。第1当接面と第2当接面とを当接させ、真空雰囲気中で熱処理温度を1350℃として拡散接合して試料を得た。
まず、本実施形態の接合体からなる試料を準備した。各試料に含まれる炭化珪素および珪素の各含有量は、予め表2に示す値になるように調整した。各試料の第1内部および第2内部に含まれる各成分は、X線回折装置で同定し、炭化珪素および珪素の各含有量は、リートベルト法で求めた。炭化珪素および珪素以外の成分の含有量は、蛍光X線分析装置で求めた結果、その含有量の合計は0.1質量%以下であった。各試料について、動的弾性率および熱伝導率を測定した。
まず、本実施形態の接合体からなる試料を準備した。各試料に含まれる炭化珪素の含有量は81質量%、珪素の含有量は19質量%になるように調整した。ここで、第1内部および第2内部を得るために、成形する際に用いる圧力を成形圧として表3に示した。各試料の第1当接面および第2当接面を含む断面を研磨して得られる鏡面を実施例1で示した方法と同じ方法で空隙の有無を観察した結果、いずれの試料も空隙がないことを確認した。
1 第1複合体
11 第1外層部
12 第1内部
13 第1凹部
14 第1内層部
15 第1当接面
2 第2複合体
21 第2外層部
22 第2内部
23 第2凹部
24 第2内層部
25 第2当接面
Claims (8)
- 外面側に位置し酸化珪素を主成分として含む第1外層部、および該第1外層部に囲繞される炭化珪素および珪素を含む第1内部を有する第1複合体を得る工程と、
外面側に位置し酸化珪素を主成分として含む第2外層部、および該第2外層部に囲繞される炭化珪素および珪素を含む第2内部を有する第2複合体を得る工程と、
前記第1内部が前記第2内部に当接する第1当接面、および前記第2内部が前記第1内部に当接する第2当接面の少なくとも一方を、研削または研磨する工程と、
前記第1当接面と前記第2当接面とを当接させ、真空雰囲気中または不活性ガス雰囲気中で熱処理する工程と、
を含む、接合体の製造方法。 - 前記第1当接面が、深さ方向に向かって第1凹部または第1貫通孔を備える、請求項1に記載の接合体の製造方法。
- 前記第1複合体が、前記第1凹部の内壁面および内底面の少なくとも一方、または前記第1貫通孔の内壁面に、酸化珪素を主成分として含む第1内層部を備える、請求項2に記載の接合体の製造方法。
- 前記第2当接面が、深さ方向に向かって第2凹部または第2貫通孔を備える、請求項1~3のいずれかに記載の接合体の製造方法。
- 前記第2複合体が、前記第2凹部の内壁面および内底面の少なくとも一方、または前記第2貫通孔の内壁面に、酸化珪素を主成分として含む第2内層部を備える、請求項4に記載の接合体の製造方法。
- 前記第1内部および前記第2内部の少なくとも一方における炭化珪素の含有量が、70質量%以上92質量%以下である、請求項1~5のいずれかに記載の接合体の製造方法。
- 前記第1内部および前記第2内部の少なくとも一方において、珪素の重心間距離の平均値と珪素の円相当径の平均値との差が、8μm以上20μm以下である、請求項1~6のいずれかに記載の接合体の製造方法。
- 前記第1内部および前記第2内部の少なくとも一方の閉気孔率が、0.1%以下である、請求項1~7のいずれかに記載の接合体の製造方法。
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Citations (5)
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JPH0274572A (ja) * | 1988-09-09 | 1990-03-14 | Ngk Insulators Ltd | 炭化珪素焼結体の接合方法 |
JPH02107580A (ja) * | 1988-09-27 | 1990-04-19 | Norton Co | 炭化ケイ素部品の接合方法及び複合炭化ケイ素構造体 |
JP2007153700A (ja) * | 2005-12-07 | 2007-06-21 | Toshiba Ceramics Co Ltd | 炭化ケイ素多孔質セラミックスの接合方法および接合部材 |
JP2009078943A (ja) * | 2007-09-26 | 2009-04-16 | Covalent Materials Corp | 炭化ケイ素セラミックス材の接合方法 |
JP2019055897A (ja) * | 2017-09-21 | 2019-04-11 | 日本特殊陶業株式会社 | 炭化珪素部材の製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH0274572A (ja) * | 1988-09-09 | 1990-03-14 | Ngk Insulators Ltd | 炭化珪素焼結体の接合方法 |
JPH02107580A (ja) * | 1988-09-27 | 1990-04-19 | Norton Co | 炭化ケイ素部品の接合方法及び複合炭化ケイ素構造体 |
JP2007153700A (ja) * | 2005-12-07 | 2007-06-21 | Toshiba Ceramics Co Ltd | 炭化ケイ素多孔質セラミックスの接合方法および接合部材 |
JP2009078943A (ja) * | 2007-09-26 | 2009-04-16 | Covalent Materials Corp | 炭化ケイ素セラミックス材の接合方法 |
JP4954838B2 (ja) | 2007-09-26 | 2012-06-20 | コバレントマテリアル株式会社 | 炭化ケイ素セラミックス材の接合方法 |
JP2019055897A (ja) * | 2017-09-21 | 2019-04-11 | 日本特殊陶業株式会社 | 炭化珪素部材の製造方法 |
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