WO2022188428A1 - 掩膜板组件及蒸镀设备 - Google Patents

掩膜板组件及蒸镀设备 Download PDF

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Publication number
WO2022188428A1
WO2022188428A1 PCT/CN2021/126943 CN2021126943W WO2022188428A1 WO 2022188428 A1 WO2022188428 A1 WO 2022188428A1 CN 2021126943 W CN2021126943 W CN 2021126943W WO 2022188428 A1 WO2022188428 A1 WO 2022188428A1
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WO
WIPO (PCT)
Prior art keywords
main body
mask
support bar
support
outermost
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PCT/CN2021/126943
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English (en)
French (fr)
Inventor
邓江涛
徐鹏
Original Assignee
京东方科技集团股份有限公司
成都京东方光电科技有限公司
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Application filed by 京东方科技集团股份有限公司, 成都京东方光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US17/914,951 priority Critical patent/US20230295791A1/en
Publication of WO2022188428A1 publication Critical patent/WO2022188428A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Definitions

  • the present application relates to the technical field of display product fabrication, and in particular, to a mask assembly and an evaporation device.
  • an organic light-emitting diode (English: Organic Light-Emitting Diode; OLED for short) display is a display with an autonomous light-emitting function.
  • OLED displays are widely used in the display industry for their advantages of thin thickness, light weight, active light-emitting, fast response, wide viewing angle, rich colors, high brightness, low power consumption, and high and low temperature resistance.
  • the OLED material can be evaporated on the base substrate by means of evaporation using an evaporation machine and a mask assembly, so as to form an organic light-emitting pattern on the base substrate to obtain an array substrate.
  • the current mask assembly usually includes: a metal frame 10', a fine metal mask 20' (English: Fine Metal Mask; abbreviation: FMM) and a blocking metal mask 30' (English: Full Mask sheet).
  • the shielding metal mask plate is used as a shielding tool for the display screen, and the required shape screen is obtained by evaporation after shielding.
  • the fine metal mask is used for evaporating light-emitting layer materials to form pixel patterns on the backplane; the fine metal mask includes a plurality of fine metal mask strips 21'.
  • Figure 1 is a schematic diagram of the structure of a shielding metal mask commonly used in mobile phone products
  • Figure 2 is a schematic diagram of the corresponding relationship between the fine metal mask and the shielding metal mask of mobile phone products.
  • FIG. 3 is a schematic diagram of the structure of a shielding metal mask commonly used in wearable products;
  • FIG. 4 is a schematic diagram of the corresponding relationship between the fine metal mask and the shielding metal mask of the wearable product.
  • the width of mobile phone products is relatively large (more than 5.1 inches), and usually a row of openings 311' on the metal mask plate 30' corresponding to a fine metal mask strip 21' is arranged.
  • a fine metal mask strip 21' corresponds to at least two rows on the mask metal mask 30'. Opening 311'. Because the position of the support strip on the metal mask plate needs to be set by the width of the fine metal mask strip, so as to avoid affecting the welding process of the fine metal mask plate and cause the risk of color mixing. At the same time, most of the wearable products have circular openings.
  • the shielding metal mask has local wrinkles at the four corners of the template after the net is completed. Both the actual and simulated netting results can be reflected.
  • the flatness test results of the opening M', the opening N', the opening O', and the opening P' on the four corners of the shielding metal mask 30' in FIG. 3 are shown in FIG.
  • the folds, and the local folds have reached nearly 140 ⁇ m, the maximum appears in the circle m' of opening M', circle n' of opening N', circle o' of opening O', and circle of opening P' marked in Fig. 3 Within p' (both are the positions closest to the top corner of the template).
  • Figure 6 shows the simulation result of masking the metal mask. It can also be seen that local wrinkles are generated near the top corner of the template.
  • the fine metal mask may be damaged, resulting in edge color mixing.
  • the present application provides a mask plate assembly and an evaporation device.
  • the probability of the first mask plate being wrinkled can be effectively reduced, and the generation of edge color mixing can be effectively avoided.
  • a mask assembly including: a frame, a first mask and a second mask stacked on the frame, the first mask on a side of the second mask away from the frame;
  • the first mask plate includes a plurality of mask strips arranged along the first direction, a gap is set between two adjacent mask strips, and each mask strip is provided with an array of mask strips. Multiple pixel openings;
  • the second mask includes a main body and a support bar arranged along the outer periphery of the main body, a first end of the support bar is connected to the main body, and a second end arranged opposite to the first end is connected to the frame connection, the main body is provided with a plurality of openings arranged in an array for defining the shape of the display area, the size of the openings is smaller than the size of the mask strip, the support strip includes a plurality of strips along the first A first support bar in the direction of the The support bars are arranged at intervals along the first direction;
  • the widths of the first end of the outermost first support bar and the first end of the outermost second support bar are gradually increased from the direction away from the main body to the direction close to the main body, and
  • the first support bars are disposed corresponding to the gaps.
  • the first end of the first support bar located at the outermost side and the connection between the two opposite sides of the first end of the second support bar located at the outermost side and the main body are both. Rounded corners set.
  • the two opposite sides of the first end of the first support bar located at the outermost side and the first end of the second support bar located at the outermost side can be from far away from the main body to close to each other.
  • the direction of the main body extends obliquely outwards;
  • Two opposite sides of the first end of the first support bar located at the outermost side and the first end of the second support bar located at the outermost side may be linear or arc-shaped.
  • the widths of the first ends of at least part of the remaining first support bars are gradually increased from the direction away from the main body to the direction close to the main body; and/or,
  • the widths of the first ends of at least part of the remaining second support bars are gradually increased from the direction away from the main body to the direction close to the main body.
  • connection between the two opposite sides of the first end of the first support bar and the main body are rounded; and/or,
  • At least part of the connection between the two opposite sides of the first end of the second support bar and the main body are rounded.
  • the width of the second end of the first support bar is less than or equal to the width of the gap.
  • the width of the second end of the first support bar is the minimum width of the first support bar, and the minimum width of the first support bar is 1.8 mm ⁇ 2.0 mm.
  • the side where the first support bar is set on the main body is the first side, and the side where the second support bar is set is the second side;
  • the distance D from the inner edge of the frame to the first side of the main body is greater than 5mm and less than the size of the opening along the first direction, and the length of the first support bar is greater than the distance D by more than 5mm :
  • the distance K from the inner edge of the frame to the second side of the main body is greater than 5mm and less than the size of the opening along the second direction, and the length of the second support bar is longer than the distance K by more than 5mm .
  • a distance between two adjacent second support bars is greater than a size of the opening along the first direction.
  • an evaporation apparatus including the above-mentioned mask assembly.
  • the first support bar and the The width of the second support bar is to improve the support for the main body, so as to better balance the pulling force on the main body in the meshing process, thereby effectively reducing the probability of wrinkles on the first mask plate and effectively avoiding the occurrence of edge color mixing.
  • Figure 1 is a schematic diagram of the structure of a shielding metal mask commonly used in mobile phone products.
  • FIG. 2 is a schematic diagram of the corresponding relationship between the fine metal mask and the shielding metal mask of the mobile phone product.
  • FIG. 3 is a schematic structural diagram of a shielding metal mask commonly used in wearable products.
  • FIG. 4 is a schematic diagram of the corresponding relationship between the fine metal mask and the shielding metal mask of the wearable product.
  • Fig. 5 is a flatness test result of the opening M', the opening N', the opening O', and the opening P' of the shielding metal mask in Fig. 1 .
  • Fig. 6 is the simulation result of meshing of shielding metal masks commonly used in wearable products.
  • FIG. 7 is a schematic structural diagram of the mask assembly of Embodiment 1 of the present application.
  • FIG. 8 is a schematic structural diagram of a first mask of the mask assembly of Embodiment 1 of the present application.
  • FIG. 9 is a schematic structural diagram of a second mask of the mask assembly of Embodiment 1 of the present application.
  • FIG. 10 is a partial enlarged view of part A in FIG. 9 .
  • FIG. 11 is a schematic structural diagram of the second mask plate and the frame of the mask plate assembly according to Embodiment 1 of the present application.
  • FIG. 12 is a partial enlarged view of part B in FIG. 11 .
  • FIG. 13 is a flatness test result of the opening M, the opening N, the opening O, and the opening P of the shielding metal mask in FIG. 11 .
  • FIG. 14 is a schematic structural diagram of a second mask plate and a frame of the mask plate assembly according to Embodiment 2 of the present application.
  • FIG. 15 is a partial enlarged view of part C in FIG. 14 .
  • 16 is a schematic structural diagram of a first mask plate and a frame of another embodiment of the mask plate assembly of Example 2 of the present application.
  • FIG. 17 is a partial enlarged view of part E in FIG. 16 .
  • FIG. 18 is a schematic structural diagram of a first mask plate and a frame of another embodiment of the mask plate assembly of Example 2 of the present application.
  • FIG. 19 is a partial enlarged view of part F in FIG. 18 .
  • FIG. 20 is a schematic structural diagram of the second mask plate and the frame of the mask plate assembly according to Embodiment 3 of the present application.
  • FIG. 21 is a partial enlarged view of part G in FIG. 20 .
  • this embodiment provides a mask assembly 1 . It includes: a frame 10, a first mask plate 20 and a second mask plate 30 stacked on the frame 10, the first mask plate 20 is located on the second mask plate 30 away from the frame 10 side.
  • the first mask plate 20 includes a plurality of mask strips 21 arranged along the first direction, a gap 22 is provided between two adjacent mask strips 21 , and each mask strip 21 is provided with a gap 22 . There are a plurality of pixel openings 311 arranged in an array. That is, the first mask 20 is a fine metal mask.
  • the second mask 30 includes a main body 31 and a support bar arranged along the outer periphery of the main body 31 , the first end of the support bar is connected to the main body 31 , and the first end of the support bar is the The part of the support bar that does not overlap the orthographic projection of the frame 10 is connected to the frame 10 at the second end disposed opposite to the first end. And the main body 31 and the support bar are integrally formed.
  • the main body 31 is provided with a plurality of openings 311 arranged in an array for defining the shape of the display area, and the size of the openings 311 is smaller than that of the mask strip 21 .
  • the support bars include a plurality of first support bars 32 along the first direction I, and a plurality of second support bars 33 arranged along a second direction J perpendicular to the first direction I.
  • the first support bars 32 are arranged at intervals along the second direction J, and the plurality of second support bars 33 are arranged at intervals along the first direction I. That is, the second mask 30 is a shielding metal mask.
  • the side of the main body 31 where the first support bar 32 is arranged is referred to as the first side 312
  • the side where the second support bar 33 is arranged is referred to as the second side 313 .
  • the widths of the first end 321 of the first support bar 32 located at the outermost side and the first end 331 of the second support bar 33 located at the outermost side are from far from the main body 31 to close to the main body 31 .
  • the direction is gradually increased, and the first support bar 32 is disposed corresponding to the gap 22 .
  • the outermost first support bar 32 and the outermost second support bar 33 are the first support bar 32 and the second support at the top corners of the main body 31 of the second mask 30 Article 33.
  • the apex position of the main body 31 of the second mask plate 30 is likely to be wrinkled during the web-stretching process.
  • the widths of the first end 321 of the first support bar 32 and the first end 331 of the second support bar 33 are gradually increased from the direction away from the main body 31 to the direction close to the main body 31 ( The closer to the main body 31 , the wider the width of the first support bar 32 and the second support bar 33 ), that is, the width gradually widens from the direction away from the main body 31 to the direction close to the main body 31 located in the second mask.
  • the width of the first support bar 32 and the second support bar 33 at the top corner of the main body 31 of the board 30 can improve the support for the main body 31, so as to better balance the support for the main body 31 in the meshing process. Therefore, the probability of the first mask plate 20 being wrinkled can be effectively reduced, and the occurrence of edge color mixing can be effectively avoided.
  • connection with the main body 31 is through two opposite sides of the first support bar 32 located at the outermost side and the first end 331 of the second support bar 33 located at the outermost side. All corners are rounded, so that the widths of the first support bar 32 located at the outermost side and the first end 331 of the second support bar 33 located at the outermost side are from far away from the main body 31 to close to the
  • the direction of the main body 31 is gradually increased and smoothly transitioned, which facilitates the fabrication of the process.
  • the radius r of the arc forming the fillet of the first end 331 of the outermost first support bar 32 is less than or equal to the distance D from the inner edge of the frame 10 to the first side 312 of the main body 31 . That is to say, the rounded corners of the first ends 331 of the outermost first support bars 32 are only formed at the positions where the outermost first support bars 32 do not overlap with the orthographic projection of the frame 10 .
  • the radius of the arc forming the rounded corner of the first end 331 of the second support bar 33 at the outermost position is less than or equal to the distance K from the inner edge of the frame 10 to the second side edge 313 of the main body 31. That is, the rounded corners of the first ends 331 of the outermost second support bars 33 are only formed at the positions where the outermost second support bars 33 do not overlap with the orthographic projection of the frame 10 .
  • the first end 321 of the first support bar 32 located at the outermost side and the first end 331 of the second support bar 33 located at the outermost side are oppositely arranged. Both sides can extend obliquely outward from the direction away from the main body 31 to the direction close to the main body 31 , so that the first support bar 32 located at the outermost side and the second support bar 32 located at the outermost side can also be realized.
  • the widths of the first ends 331 of the support bars 33 gradually increase from the direction away from the main body 31 to the direction close to the main body 31 , so as to improve the support for the main body 31 .
  • the opposite sides of the first end 321 of the first support bar 32 located at the outermost side and the first end 331 of the second support bar 33 located at the outermost side may be straight lines or arcs. shape.
  • one of the two opposite sides of the first end 321 of the first support bar 32 located at the outermost side and the first end 331 of the second support bar 33 located at the outermost side is The rounded corners are set, and the other side is a different combination of oblique extension settings.
  • the second end 322 of the first support bar 32 does not overlap with the mask bar 21 .
  • the second end 322 of the first support bar 32 is the part of the support bar that overlaps with the orthographic projection of the frame 10 , that is, the end connected to the frame 10 , and the second end 322 of the first support bar 32 is partially fixed by
  • the connection with the frame 10 is realized on the frame 10 , or all of them are fixed on the frame 10 to realize the connection with the frame 10 .
  • the second ends 322 of the first support bars 32 do not overlap with the mask bars 21 , that is, the second ends 322 of the first support bars 32 are located between two adjacent mask bars 21 , so as to ensure that the mask strip 21 can be kept flat when the mask strip 21 is welded on the frame 10 .
  • the width of the second end 322 of the first support bar 32 is smaller than or equal to the width of the gap 22 .
  • the second ends 322 of the first support bars 32 do not overlap with the mask bars 21 , that is, the second ends 322 of the first support bars 32 are located between two adjacent mask bars 21 , so as to ensure that the mask strip 21 can be kept flat when the mask strip 21 is welded on the frame 10 .
  • the minimum width of the first support bar 32 is equal to the width of the gap 22 , so that the first support bar 32 can provide the support force with the maximum width.
  • the width of the second end 322 of the first support bar 32 is the minimum width of the first support bar 32 , and the minimum width of the first support bar 32 is 1.8 mm ⁇ 2.0 mm.
  • the distance D from the inner edge of the frame 10 to the first side of the main body 31 is greater than 5 mm and smaller than the size of the opening 311 along the first direction I, and the length of the first support bar 32 is greater than the distance D More than 5mm long.
  • the distance K from the inner edge of the frame 10 to the second side of the main body 31 is greater than 5 mm and smaller than the size of the opening 311 along the second direction J, and the length of the second support bar 33 is longer than the distance K More than 5mm long.
  • the distance between the second support bars 33 along the first direction I is greater than the size of the opening 311 on the main body 31 along the first direction I to avoid affecting the shape of the opening 311 . That is, the distance between two adjacent second support bars 33 of the second support bars 33 is greater than the size of the opening 311 along the first direction I.
  • the flatness test results of the opening M, the opening N, the opening O, and the opening P of the second mask plate 30 of the mask plate assembly 1 of the present embodiment are shown in FIG. 12 .
  • the Z value of the opening M fluctuates
  • the Z value fluctuation of opening N is 30.96 ⁇ m
  • the Z value fluctuation of opening O is 30.27 ⁇ m
  • the Z value fluctuation of opening P is 27.49 ⁇ m, all of which are close to the wrinkle level of the normal shielding metal mask.
  • This embodiment also provides an evaporation device.
  • the vapor deposition apparatus includes the mask assembly 1 described above.
  • the overall structure of the mask assembly of this embodiment is basically the same as that of Embodiment 1.
  • the structure of the mask assembly of this embodiment is based on the structure of Embodiment 1.
  • the widths of the other first ends 321 of the first support bars 32 also gradually increase from the direction away from the main body 31 to the direction close to the main body 31 . That is, not only the first support bars 32 located at the outermost side, but also the widths of the first ends 321 of the other first support bars 32 gradually increase from the direction away from the main body 31 to the direction close to the main body 31 , That is, the widths of the first ends 321 of all the first support bars 32 gradually increase from the direction away from the main body 31 to the direction close to the main body 31 . In order to further improve the support strength of the first support bar 32 to the main body 31 .
  • the first ends 321 of the remaining first support bars 32 are all rounded, so that the widths of the first ends 321 of the remaining first support bars 32 are also kept away from the main body. 31 to the direction close to the main body 31 with a gradually increasing smooth transition, which facilitates the fabrication of the process.
  • the radius r of the rounded arc forming the connection between the two opposite sides 3211 of the first end 321 of the remaining first support bars 32 and the main body 31 is less than or equal to the radius r of the inner edge of the frame 10 to the The distance D of the first side of the main body 31 is described. That is to say, the rounded corners of the first ends 331 of the first support bars 32 are formed only at positions where the orthographic projections of the first support bars 32 and the frame 10 do not overlap.
  • the two opposite sides 3211 of the first end 321 of the remaining first support bars 32 may be separated from The main body 31 extends obliquely outward from the direction close to the main body 31 , so that the widths of the first ends 321 of the remaining first support bars 32 can be changed from far away from the main body 31 to close to the main body 31 .
  • the direction is gradually increased to improve the support for the main body 31 .
  • Both sides of the first end 321 of the first support bar 32 may be straight.
  • the two side edges 3211 of the first end 321 of the first support bar 32 may also be arc-shaped.
  • One end of the arc may be located at the highest position S where the first support bar 32 intersects the orthographic projection of the frame 10 (in FIG. 18 and FIG. position), the other end of the arc is tangent to the first side edge 312 of the main body 31 , and the tangent point can be located at the farthest midpoint of the distance between the two adjacent first support bars 32 T (in Figures 18 and 19, the other end of the arc is located at the midpoint T).
  • One end of the arc is located at the intersecting position S of the first support bar 32 and the orthographic projection of the frame 10 , and the other end is located at the midpoint T of the distance between two adjacent first support bars 32 .
  • the arc is the longest arc
  • the calculation formula of the arc is:
  • R is the radius of the arc
  • D is the distance between the first side edge of the main body 31 and the inner periphery of the frame 10
  • H is the distance between two adjacent first support bars the distance.
  • the widths of the first ends 321 of the rest of the first support bars 32 may also gradually increase from the direction away from the main body 31 to the direction close to the main body 31 .
  • the increase in width is achieved by setting the first ends 321 of some of the remaining first support bars 32 with rounded corners.
  • the increasing width is achieved by extending two opposite sides of the first end 321 of the remaining first support bars 32 diagonally outward from the direction away from the main body 31 to the direction close to the main body 31 . .
  • the overall structure of the mask assembly 1 of this embodiment is basically the same as that of the second embodiment.
  • the difference is that on the basis of the structure of the second embodiment, the rest of the
  • the width of the first end 331 of the second support bar 33 also increases gradually from the direction away from the main body 31 to the direction close to the main body 31 . That is, not only the second support bars 33 located at the outermost side, but also the widths of the first ends 331 of the other second support bars 33 gradually increase from the direction away from the main body 31 to the direction close to the main body 31 , That is, the widths of the first ends 331 of all the second support bars 33 gradually increase from the direction away from the main body 31 to the direction close to the main body 31 . In order to further improve the support strength of the second support bar 33 to the main body 31 .
  • the first ends 331 of the other second support bars 33 are rounded, so as to realize the first ends of the other second support bars 33
  • the width of 331 also gradually increases smoothly from the direction away from the main body 31 to the direction close to the main body 31 , which facilitates the fabrication of the process.
  • the radius r of the rounded arc forming the connection between the two opposite sides 3311 of the first end 331 of the remaining second support bars 33 and the main body 31 is less than or equal to the radius r of the inner edge of the frame 10 to the The distance K of the second side edge 313 of the main body 31 is described. That is to say, the rounded corners of the first ends 331 of the second support bars 33 are only formed at positions where the outermost second support bars 33 and the orthographic projection of the frame 10 do not overlap.
  • the two opposite sides of the first end 331 of the remaining second support bars 33 may be separated from the main body 31 to the direction close to the main body 31 and extend outward obliquely, so that the widths of the first ends 331 of the remaining second support bars 33 can be gradually increased from the direction away from the main body 31 to the direction close to the main body 31 Incrementally to improve support for body 31 .
  • the two sides of the first end 331 of the second support bar 33 may be linear or arcuate.
  • the widths of the first ends 331 of the rest of the second support bars 33 may gradually increase from the direction away from the main body 31 to the direction close to the main body 31 .
  • the increase in width is achieved by setting the first ends 321 of some of the remaining first support bars 32 with rounded corners.
  • the width of some of the two opposite sides of the first end 331 of the second support bar 33 may be extended outward obliquely from the direction away from the main body 31 to the direction close to the main body 31 . Increment.

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Abstract

本申请提供一种掩膜板组件及蒸镀设备，以有效减少第一掩膜板产生褶皱的机率，有效避免边缘混色的产生。该掩膜板组件包括：框架、层叠设置于框架上的第一掩膜板和第二掩膜板；第一掩膜板包括多条沿第一方向设置的掩膜条，相邻的两个掩膜条之间设有间隙；第二掩膜板包括主体以及支撑条，支撑条包括多条沿第一方向的第一支撑条、以及多条沿第二方向设置的第二支撑条；其中，位于最外侧的第一支撑条的第一端以及位于最外侧的第二支撑条的第一端的宽度均由远离主体至靠近主体的方向逐渐递增，且第一支撑条对应于间隙设置。该蒸镀设备包括该掩膜板组件。

Description

掩膜板组件及蒸镀设备 技术领域
本申请涉及显示产品制作技术领域，尤其涉及一种掩膜板组件及蒸镀设备。
背景技术
现有技术中，有机发光二极管(英文：Organic Light-Emitting Diode；简称：OLED)显示器是一种具有自主发光功能的显示器。OLED显示器以其厚度薄、重量轻、主动发光、响应速度快、视角广、色彩丰富、高亮度、低功耗以及耐高低温等优点广泛应用于显示行业。在OLED显示器的制造过程中，可以采用蒸镀机配合掩膜组件通过蒸镀的方式将OLED材料蒸镀在衬底基板上，以在衬底基板上形成有机发光图形得到阵列基板。
目前的掩膜组件通常包括：金属框架10’、精细金属掩膜板20’(英文：Fine Metal Mask；简称：FMM)和遮挡金属掩膜板30’(英文：Full Mask sheet)。遮挡金属掩膜板作为显示屏幕遮挡工具，蒸镀方式通过其遮挡后蒸镀得到所需求的形状屏幕。精细金属掩膜板用于蒸镀发光层材料，在背板上形成像素图形；精细金属掩膜板包括多条精细金属掩膜条21’。
图1是手机类产品常用的遮挡金属掩膜板结构示意图；图2是手机类产品的精细金属掩膜板与遮挡金属掩膜板的对应关系示意图。图3是穿戴类产品常用的遮挡金属掩膜板结构示意图；图4是穿戴类产品的精细金属掩膜板与遮挡金属掩膜板的对应关系示意图。
由图1至图4所示，手类机产品宽度较大(5.1寸以上)，通常一条精细金属掩膜板条21’所对应遮挡金属掩膜板30’上的排布一列开口311’。而穿戴类产品如手表、手环等，由于直径或者宽度较小(1.2寸、1.39寸)，通常一条精细金属掩膜板条21’至少对应遮挡金属掩膜板30’上的排布两列开口311’。由于遮挡金属掩膜板上的支撑条的位置需要精细金属掩膜板条的宽度进行设置，以避免影响精细金属掩膜板的焊接工艺，造成混色风险，同时，穿戴类产品大多是圆形开口，按照现有遮挡金属掩膜板设计思路，遮挡金属掩膜板在张网完成后在模板的四角出现了局部褶皱。实际张网结果及模拟张网结果都能体现。在图3中的遮挡金属掩膜板30’的四角上的开口M’、开口N’、开口O’、以及开口P’的平整度测试结果如图5所示，该四个开口均产生局部褶皱，且局部褶皱已经达到了将近140μm，最大值出现在图3中标示的开口M’的圆圈m’、开口N’的圆圈n’、 开口O’的圆圈o’、以及开口P’的圆圈p’内(均为最靠近模板的顶角的位置)。图6是遮挡金属掩膜板的模拟张网结果，同样可以看到在靠近模板的顶角的位置产生局部褶皱。
当遮挡金属掩膜板产生的褶皱较大时，可能会顶伤精细金属掩膜板，造成边缘混色。
发明内容
本申请提供一种掩膜板组件及蒸镀设备，通过设置掩膜板组件的具体结构，能够有效减少第一掩膜板产生褶皱的机率，有效避免边缘混色的产生。
根据本申请实施例的第一方面，提供一种掩膜板组件，其包括：框架、层叠设置于所述框架上的第一掩膜板和第二掩膜板，所述第一掩膜板位于所述第二掩膜板远离所述框架的一侧；
所述第一掩膜板包括多条沿第一方向设置的掩膜条，相邻的两个所述掩膜条之间设有间隙，每一所述掩膜条上设有呈阵列排列的多个像素开口；
所述第二掩膜板包括主体以及沿主体的外周缘设置的支撑条，所述支撑条的第一端与所述主体连接，相对于所述第一端设置的第二端与所述框架连接，所述主体上设置有呈阵列排列的多个用于限定显示区域的形状的开口，所述开口的尺寸小于所述掩膜条的尺寸，所述支撑条包括多条沿所述第一方向的第一支撑条、以及多条沿垂直于所述第一方向的第二方向设置的第二支撑条，多条所述第一支撑条沿第二方向间隔设置，多条所述第二支撑条沿第一方向间隔设置；
其中，位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的宽度均由远离所述主体至靠近所述主体的方向逐渐递增，且所述第一支撑条对应于所述间隙设置。
可选的，位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的相对设置的两个侧边与所述主体的连接处均为圆角设置。
可选的，位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的相对设置的两个侧边均可以由远离所述主体至靠近所述主体的方向向外斜向延伸；
位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的相对设置的两个侧边可以是直线形或者弧形。
可选的，至少部分其余所述第一支撑条的第一端的宽度均由远离所述主体至靠近所述主体的方向逐渐递增；和/或，
至少部分其余所述第二支撑条的第一端的宽度均由远离所述主体至靠近所述主体的方向逐渐递增。
可选的，至少部分其余所述第一支撑条的第一端的相对设置的两个侧边与所述主体的连接处均为圆角设置；和/或，
至少部分其余所述第二支撑条的第一端的相对设置的两个侧边与所述主体的连接处均为圆角设置。
可选的，所述第一支撑条的第二端的宽度小于或等于所述间隙的宽度。
可选的，所述第一支撑条的第二端的宽度为所述第一支撑条的最小宽度，所述第一支撑条的最小宽度为1.8mm～2.0mm。
可选的，所述主体的设置第一支撑条的侧边为第一侧边，设置所述第二支撑条的侧边为第二侧边；
所述框架的内边缘到所述主体的第一侧边的距离D大于5mm且小于所述开口沿所述第一方向的尺寸，所述第一支撑条的长度比所述距离D长5mm以上：
所述框架的内边缘到所述主体的第二侧边的距离K大于5mm且小于所述开口沿所述第二方向的尺寸，所述第二支撑条的长度比所述距离K长5mm以上。
可选的，相邻的两个所述第二支撑条之间的间距大于所述开口沿所述第一方向的尺寸。
根据本申请实施例的第二方面，提供一种蒸镀设备，包括上述的掩膜板组件。
本申请的掩膜板组件及蒸镀设备，通过设置位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的宽度均由远离所述主体至靠近所述主体的方向逐渐递增，即，由远离所述主体至靠近所述主体的方向逐渐加宽位于第二掩膜板的主体的顶角位置的所述第一支撑条以及所述第二支撑条的宽度，以提高对主体的支撑，从而能够更好的平衡在张网工艺中对主体的拉力，从而能够有效减少第一掩膜板产生褶皱的机率，有效避免边缘混色的产生。
附图说明
图1是手机类产品常用的遮挡金属掩膜板结构示意图。
图2是手机类产品的精细金属掩膜板与遮挡金属掩膜板的对应关系示意图。
图3是穿戴类产品常用的遮挡金属掩膜板结构示意图。
图4是穿戴类产品的精细金属掩膜板与遮挡金属掩膜板的对应关系示意图。
图5是图1中的遮挡金属掩膜板的开口M’、开口N’、开口O’、以及开口P’的平整度测试结果。
图6是穿戴类产品常用的遮挡金属掩膜板的模拟张网结果。
图7是本申请的实施例1的掩膜板组件的结构示意图。
图8是本申请的实施例1的掩膜板组件的第一掩膜板的结构示意图。
图9是本申请的实施例1的掩膜板组件的第二掩膜板的结构示意图。
图10是图9中A部分的局部放大图。
图11是本申请的实施例1的掩膜板组件的第二掩膜板和框架的结构示意图。
图12是图11中B部分的局部放大图。
图13是图11中的遮挡金属掩膜板的开口M、开口N、开口O、以及开口P的平整度测试结果。
图14是本申请的实施例2的掩膜板组件的第二掩膜板和框架的结构示意图。
图15是图14中C部分的局部放大图。
图16是本申请的实施例2的掩膜板组件的另一实施方式的第一掩膜板和框架的结构示意图。
图17是图16中E部分的局部放大图。
图18是本申请的实施例2的掩膜板组件的又一实施方式的第一掩膜板和框架的结构示意图。
图19是图18中F部分的局部放大图。
图20是本申请的实施例3的掩膜板组件的第二掩膜板和框架的结构示意图。
图21是图20中G部分的局部放大图。
具体实施方式
这里将详细地对示例性实施例进行说明，其示例表示在附图中。下面的描述涉及附图时，除非另有表示，不同附图中的相同数字表示相同或相似的要素。以下示例性实施例中所描述的实施方式并不代表与本申请相一致的所有实施方式。相反，它们仅是与如所附权利要求书中所详述的、本申请的一些方面相一致的装置的例子。
在本申请使用的术语是仅仅出于描述特定实施例的目的，而非旨在限制本申请。除非另作定义，本申请使用的技术术语或者科学术语应当为本申请所属领域内具有一般技能的人士所理解的通常意义。本申请说明书以及权利要求书中使用的“一个”或者“一”等类似词语也不表示数量限制，而是表示存在至少一个。“包括”或者“包含”等类似词语意指出现在“包括”或者“包含”前面的元件或者物件涵盖出现在“包括”或者“包含”后面列举的元件或者物件及其等同，并不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接，而且可以包括电性的连接，不管是直接的还是间接的。“多个”包括两个，相当于至少两个。在本申请说明书和所附权利要求书中所使用的单数形式的“一种”、“”和“该”也旨在包括多数形式，除非上下文清楚地表示其他含义。还应当理解，本文中使用的术语“和/或”是指并包含一个或多个相关联的列出项目的任何或所有可能组合。
实施例1
请结合图7至图13予以理解，本实施案例提供一种掩膜板组件1。其包括：框架10、层叠设置于所述框架10上的第一掩膜板20和第二掩膜板30，所述第一掩膜板20位于所述第二掩膜板30远离所述框架10的一侧。
所述第一掩膜板20包括多条沿第一方向设置的掩膜条21，相邻的两个所述掩膜条21之间设有间隙22，每一所述掩膜条21上设有呈阵列排列的多个像素开口311。即，所述第一掩膜板20为精细金属掩膜板。
所述第二掩膜板30包括主体31以及沿主体31的外周缘设置的支撑条，所述支撑条的第一端与所述主体31连接，且所述支撑条的第一端为所述支撑条与所述框架10的正投影不重合的部分，相对于所述第一端设置的第二端与所述框架10连接。且所述主体31与所述支撑条一体成型。
所述主体31上设置有呈阵列排列的多个用于限定显示区域的形状的开口311，所述开口311的尺寸小于所述掩膜条21的尺寸。所述支撑条包括多条沿所述第一方向I的第一支撑条32、以及多条沿垂直于所述第一方向I的第二方向J设置的第二支撑条33，多条所述第一支撑条32沿第二方向J间隔设置，多条所述第二支撑条33沿第一方向I间隔设置。即，所述第二掩膜板30为遮挡金属掩膜板。所述主体31的设置第一支撑条32的侧边记为第一侧边312，设置第二支撑条33的侧边记为第二侧边313。
其中，位于最外侧的所述第一支撑条32的第一端321以及位于最外侧的所述第二支撑条33的第一端331的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增，且所述第一支撑条32对应于所述间隙22设置。
首先，位于最外侧的所述第一支撑条32以及位于最外侧的所述第二支撑条33为位于第二掩膜板30的主体31的顶角位置的第一支撑条32和第二支撑条33。如前所述，第二掩膜板30的主体31的顶角位置在张网工艺中容易产生褶皱。
通过设置该位置的所述第一支撑条32的第一端321以及所述第二支撑条33的第一端331的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增(越靠近主体31，所述第一支撑条32以及所述第二支撑条33的宽度越宽)，即，由远离所述主体31至靠近所述主体31的方向逐渐加宽位于第二掩膜板30的主体31的顶角位置的所述第一支撑条32以及所述第二支撑条33的宽度，以提高对主体31的支撑，从而能够更好的平衡在张网工艺中对主体31的拉力，从而能够有效减少第一掩膜板20产生褶皱的机率，有效避免边缘混色的产生。
在本实施例中，通过位于最外侧的所述第一支撑条32以及位于最外侧的所述第二支撑条33的第一端331的相对设置的两个侧边与所述主体31的连接处均为圆角设置，以实现位于最外侧的所述第一支撑条32以及位于最外侧的所述第二支撑条33的第一端331的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增的平滑过渡，并方便工艺的制作。
形成位于最外侧的所述第一支撑条32的第一端331的圆角的圆弧的半径r小于或等于框架10的内边缘到所述主体31的第一侧边312的距离D。也就是说，位于最外侧的所述第一支撑条32的第一端331的圆角仅形成于最外侧的所述第一支撑条32与框架10的正投影不重叠的位置。
形成位于最外侧的所述第二支撑条33的第一端331的圆角的圆弧的半径小于或等于 框架10的内边缘到所述主体31的第二侧边313的距离K。也就是说，位于最外侧的所述第二支撑条33的第一端331的圆角仅形成于最外侧的所述第二支撑条33与框架10的正投影不重叠的位置。
但不限于此，在另一种实施方式中，位于最外侧的所述第一支撑条32的第一端321以及位于最外侧的所述第二支撑条33的第一端331的相对设置的两个侧边均可以由远离所述主体31至靠近所述主体31的方向向外斜向延伸，从而也能实现位于最外侧的所述第一支撑条32以及位于最外侧的所述第二支撑条33的第一端331的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增，以提高对主体31的支撑。位于最外侧的所述第一支撑条32的第一端321以及位于最外侧的所述第二支撑条33的第一端331的相对设置的两个侧边可以是直线形，也可以是弧形。也可以是，位于最外侧的所述第一支撑条32的第一端321以及位于最外侧的所述第二支撑条33的第一端331的相对设置的两个侧边中的一个边是圆角设置，另一个边是斜向延伸设置等不同的组合形式。
在本实施例中，所述第一支撑条32的第二端322与所述掩膜条21不重叠。所述第一支撑条32的第二端322为所述支撑条与所述框架10的正投影重合的部分，即与框架10连接的一端，第一支撑条32的第二端322通过部分固定于所述框架10上实现与框架10连接，或者全部，固定于所述框架10上实现与框架10连接。所述第一支撑条32的第二端322与所述掩膜条21不重叠，即，所述第一支撑条32的第二端322位于相邻的两个所述掩膜条21之间，以保证在所述掩膜条21焊接在框架10上时能够保持平整。
较佳的，所述第一支撑条32的第二端322的宽度小于或等于所述间隙22的宽度。所述第一支撑条32的第二端322与所述掩膜条21不重叠，即，所述第一支撑条32的第二端322位于相邻的两个所述掩膜条21之间，以保证在所述掩膜条21焊接在框架10上时能够保持平整。
在本实施例中，所述第一支撑条32的最小宽度等于所述间隙22的宽度，以使第一支撑条32以最大限度的宽度提供支撑力。所述第一支撑条32的第二端322的宽度为所述第一支撑条32的最小宽度，所述第一支撑条32的最小宽度为1.8mm～2.0mm。
所述框架10的内边缘到所述主体31的第一侧边的距离D大于5mm且小于所述开口311沿第一方向I的尺寸，所述第一支撑条32的长度比所述距离D长5mm以上。
所述框架10的内边缘到所述主体31的第二侧边的距离K大于5mm且小于所述开口311沿第二方向J的尺寸，所述第二支撑条33的长度比所述距离K长5mm以上。
所述第二支撑条33沿第一方向I相互之间的间隔距离大于所述主体31上的开口311沿所述第一方向I的尺寸，以避免对开口311的形状造成影响。即，所述第二支撑条33相邻的两个所述第二支撑条33之间的间距大于所述开口311沿所述第一方向I的尺寸。
本实施例的掩膜板组件1的第二掩膜板30的开口M、开口N、开口O、以及开口P的平整度测试结果如图12所示，可以看出，开口M的Z值波动为26.85μm，开口N的Z值波动为30.96μm，开口O的Z值波动为30.27μm，开口P的Z值波动27.49μm，均接近正常遮挡金属掩膜板的褶皱水平。
本实施例还提供一种蒸镀设备。该蒸镀设备包括上述的掩膜板组件1。
实施例2
如图14至图19所示，本实施例的掩膜板组件的整体结构基本和实施例1中的结构相同，本实施例的掩膜板组件的结构在实施例1的结构的基础上，其余所述第一支撑条32的第一端321的宽度也均由远离所述主体31至靠近所述主体31的方向逐渐递增。即，不仅位于最外侧的所述第一支撑条32，其余的所述第一支撑条32的第一端321的宽度也均由远离所述主体31至靠近所述主体31的方向逐渐递增，即，全部的所述第一支撑条32的第一端321的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增。以进一步提高第一支撑条32对主体31的支撑强度。
在本实施例中，通过其余所述第一支撑条32的第一端321均为圆角设置，以实现其余所述第一支撑条32的第一端321的宽度也均由远离所述主体31至靠近所述主体31的方向逐渐递增的平滑过渡，并方便工艺的制作。
形成其余所述第一支撑条32的第一端321的相对设置的两个侧边3211与所述主体31的连接处的圆角的圆弧的半径r小于或等于框架10的内边缘到所述主体31的第一侧边的距离D。也就是说，所述第一支撑条32的第一端331的圆角仅形成于所述第一支撑条32与框架10的正投影不重叠的位置。
同样，与实施例1中相同，如图16和图17所示，在另一实施方式中，其余所述第一支撑条32的第一端321的相对设置的两个侧边3211可以由远离所述主体31至靠近所述主体31的方向向外斜向延伸，从而也能实现其余所述第一支撑条32的第一端321的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增，以提高对主体31的支撑。所述第一支撑条32的第一端321的两侧边可以是直线形。
但不限于此，如图18和19所示，在又一实施方式中，所述第一支撑条32的第一端 321的两个侧边3211也可以是弧形。所述弧形的一端最高可以位于所述第一支撑条32与所述框架10的正投影相交的位置S(在图18和图19中，所述弧形的一端位于低于最高位置S的位置)，所述弧形的另一端与所述主体31的第一侧边312相切，且切点最远可以位于相邻的两个所述第一支撑条32之间的间距的中点T(在图18和图19中，所述弧形的另一端位于中点T的位置)。
所述弧形的一端位于所述第一支撑条32与所述框架10的正投影相交的位置S，另一端位于相邻的两个所述第一支撑条32之间的间距的中点T时，该弧形为最长弧形，该弧形的计算公式为：
R＝D/2+H2/8D
其中，R为所述弧形的半径，D为所述主体31的第一侧边与所述框架10的内周缘之间的距离，H为相邻的两个所述第一支撑条之间的距离。
在其他实施例中，也可以是部分的其余的所述第一支撑条32的第一端321的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增。通过部分其余所述第一支撑条32的第一端321均为圆角设置，来实现宽度的递增。或者，通过部分其余所述第一支撑条32的第一端321的相对设置的两个侧边由远离所述主体31至靠近所述主体31的方向向外斜向延伸，来实现宽度的递增。
实施例3
如图20和图21所示，本实施例的掩膜板组件1的整体结构基本和实施例2中的结构相同，其不同的之处在于，在实施例2的结构的基础上，其余所述第二支撑条33的第一端331的宽度也均由远离所述主体31至靠近所述主体31的方向逐渐递增。即，不仅位于最外侧的所述第二支撑条33，其余的所述第二支撑条33的第一端331的宽度也均由远离所述主体31至靠近所述主体31的方向逐渐递增，即，全部的所述第二支撑条33的第一端331的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增。以进一步提高第二支撑条33对主体31的支撑强度。
在本实施例中，请复参阅图19和图20所示，其余所述第二支撑条33的第一端331均为圆角设置，以实现其余所述第二支撑条33的第一端331的宽度也均由远离所述主体31至靠近所述主体31的方向逐渐递增的平滑过渡，并方便工艺的制作。
形成其余所述第二支撑条33的第一端331的相对设置的两个侧边3311与所述主体31的连接处的圆角的圆弧的半径r小于或等于框架10的内边缘到所述主体31的第二侧 边313的距离K。也就是说，所述第二支撑条33的第一端331的圆角仅形成于最外侧的所述第二支撑条33与框架10的正投影不重叠的位置。
同样，与实施例1中相同，在另一实施方式中，在另一实施方式中，其余所述第二支撑条33的第一端331的相对设置的两个侧边可以由远离所述主体31至靠近所述主体31的方向向外斜向延伸，从而也能实现其余所述第二支撑条33的第一端331的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增，以提高对主体31的支撑。所述第二支撑条33的第一端331的两侧边可以是直线形，也可以是弧形。
在其他实施例中，也可以是部分的其余的所述第二支撑条33的第一端331的宽度均由远离所述主体31至靠近所述主体31的方向逐渐递增。通过部分其余所述第一支撑条32的第一端321均为圆角设置，来实现宽度的递增。或者，通过部分其余所述第二支撑条33的第一端331的相对设置的两个侧边，由远离所述主体31至靠近所述主体31的方向向外斜向延伸，来实现宽度的递增。
以上仅为本申请的较佳实施例而已，并不用以限制本申请，凡在本申请的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本申请保护的范围之内。

Claims (10)

  1. 一种掩膜板组件，其特征在于，其包括：框架、层叠设置于所述框架上的第一掩膜板和第二掩膜板，所述第一掩膜板位于所述第二掩膜板远离所述框架的一侧；
    所述第一掩膜板包括多条沿第一方向设置的掩膜条，相邻的两个所述掩膜条之间设有间隙，每一所述掩膜条上设有呈阵列排列的多个像素开口；
    所述第二掩膜板包括主体以及沿主体的外周缘设置的支撑条，所述支撑条的第一端与所述主体连接，相对于所述第一端设置的第二端与所述框架连接，所述主体上设置有呈阵列排列的多个用于限定显示区域的形状的开口，所述开口的尺寸小于所述掩膜条的尺寸，所述支撑条包括多条沿所述第一方向的第一支撑条、以及多条沿垂直于所述第一方向的第二方向设置的第二支撑条，多条所述第一支撑条沿第二方向间隔设置，多条所述第二支撑条沿第一方向间隔设置；
    其中，位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的宽度均由远离所述主体至靠近所述主体的方向逐渐递增，且所述第一支撑条对应于所述间隙设置。
  2. 如权利要求1所述的掩膜板组件，其特征在于，位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的相对设置的两个侧边与所述主体的连接处均为圆角设置。
  3. 如权利要求1所述的掩膜板组件，其特征在于，位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的相对设置的两个侧边均由远离所述主体至靠近所述主体的方向向外斜向延伸；
    位于最外侧的所述第一支撑条的第一端以及位于最外侧的所述第二支撑条的第一端的相对设置的两个侧边为直线形或者弧形。
  4. 如权利要求1所述的掩膜板组件，其特征在于，
    至少部分其余所述第一支撑条的第一端的宽度均由远离所述主体至靠近所述主体的方向逐渐递增；和/或，
    至少部分其余所述第二支撑条的第一端的宽度均由远离所述主体至靠近所述主体的方向逐渐递增。
  5. 如权利要求4所述的掩膜板组件，其特征在于，至少部分其余所述第一支撑条的第一端的相对设置的两个侧边与所述主体的连接处均为圆角设置；和/或，
    至少部分其余所述第二支撑条的第一端的相对设置的两个侧边与所述主体的连接处均为圆角设置。
  6. 如权利要求1-5中任意一项所述的掩膜板组件，其特征在于，所述第一支撑条的第二端的宽度小于或等于所述间隙的宽度。
  7. 如权利要求1-5中任意一项所述的掩膜板组件，其特征在于，所述第一支撑条的第二端的宽度为所述第一支撑条的最小宽度，所述第一支撑条的最小宽度为1.8mm～2.0mm。
  8. 如权利要求1-5中任意一项所述的掩膜板组件，其特征在于，所述主体的设置第一支撑条的侧边为第一侧边，设置所述第二支撑条的侧边为第二侧边；
    所述框架的内边缘到所述主体的第一侧边的距离D大于5mm且小于所述开口沿所述第一方向的尺寸，所述第一支撑条的长度比所述距离D长5mm以上：
    所述框架的内边缘到所述主体的第二侧边的距离K大于5mm且小于所述开口沿所述第二方向的尺寸，所述第二支撑条的长度比所述距离K长5mm以上。
  9. 如权利要求1-5中任意一项所述的掩膜板组件，其特征在于，相邻的两个所述第二支撑条之间的间距大于所述开口沿所述第一方向的尺寸。
  10. 一种蒸镀设备，其特征在于，包括权利要求1-9任一项所述的掩膜板组件。
PCT/CN2021/126943 2021-03-11 2021-10-28 掩膜板组件及蒸镀设备 WO2022188428A1 (zh)

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