WO2022158174A1 - Purge device and transport system - Google Patents

Purge device and transport system Download PDF

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Publication number
WO2022158174A1
WO2022158174A1 PCT/JP2021/046106 JP2021046106W WO2022158174A1 WO 2022158174 A1 WO2022158174 A1 WO 2022158174A1 JP 2021046106 W JP2021046106 W JP 2021046106W WO 2022158174 A1 WO2022158174 A1 WO 2022158174A1
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WO
WIPO (PCT)
Prior art keywords
purge
shelf
container
nozzle
transport
Prior art date
Application number
PCT/JP2021/046106
Other languages
French (fr)
Japanese (ja)
Inventor
靖久 伊藤
Original Assignee
村田機械株式会社
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Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2022158174A1 publication Critical patent/WO2022158174A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • One aspect of the present invention relates to a purge device and a transport system.
  • a purge device that introduces a purge gas (so-called purging process) into the interior of a storage container in which stored objects such as semiconductor wafers or glass substrates are stored in order to maintain cleanliness, as described in Patent Document 1. It has been known. In the purge device of Patent Document 1, a good purge process can be performed in the process of supplying the purge gas.
  • a guide section is provided to guide the containment vessel so that the injection port is positioned within a predetermined range with respect to the purge nozzle.
  • the containment vessel stops during guidance due to unintended factors, and the injection port is not guided within the predetermined range. If the injection port is not guided within the predetermined range, the purge nozzle and the injection port of the containment vessel may not be connected or the connection state may be poor, making it impossible to perform a good purge process.
  • an object of one aspect of the present invention is to provide a purge device and a transport system that can perform good purge processing.
  • a purge device is a purge device that supplies purge gas to the interior of a containment vessel by aligning an inlet of the containment vessel with a purge nozzle. and a member disposed on the mounting portion, which is arranged on the mounting portion and contacts the storage container prior to the purge nozzle when the storage container is mounted on the mounting portion. and a guide section for guiding the storage container so that the injection port is positioned within a predetermined range with respect to the purge nozzle;
  • vibrations can be applied to the containment vessel placed on the placement section, so that the containment vessel that has been stopped during guidance by the guide section due to an unintended factor can be restarted.
  • This more reliably guides the inlet of the containment vessel to be positioned within a predetermined range with respect to the purge nozzle. As a result, good purge processing can be performed.
  • the vibrating device may be provided on the surface of the mounting portion opposite to the mounting surface of the containment vessel.
  • a purge device further includes a detection unit that detects whether the connection between the purge nozzle and the injection port is good or bad, and a purge control unit that operates the vibrating device according to the detection result of the detection unit.
  • the purge device is arranged on the mounting section and further includes an adsorption section that adsorbs the containment vessel, and the detection section detects the connection state based on the adsorption state of the containment vessel in the adsorption section. You may With this configuration, it is possible to easily determine whether the connection state between the purge nozzle and the inlet is good or bad.
  • the purge control section may output an error signal when the detection section detects that the connection state is poor. In this configuration, based on the error signal, it is possible to notify the operator that the connection state is defective, and to execute various processes based on the error signal.
  • a transport system includes the above-described purge device, a transport device capable of transferring a storage container to and from the placement unit, and a transport control unit for controlling the transport device, wherein the transport control When the unit acquires the error signal, the unit may prohibit the transfer of the storage container to the mounting unit provided with the purge nozzle in which the error has been detected. With this configuration, it is possible to prevent the storage container from being placed on the placement portion provided with the defective purge nozzle.
  • good purge processing can be performed.
  • FIG. 1 is a perspective view showing a transport system and storage racks according to one embodiment.
  • 2 is a top perspective view of the second shelf module;
  • FIG. 3 is a bottom perspective view of the second shelf module;
  • FIG. 4 is a block diagram showing the functional configuration of the transport system and the storage shelf.
  • FIG. 5 is a flow chart showing the flow up to the start of the purge process for the container that has been transported to the second shelf plate of the second shelf module by the transport vehicle.
  • FIG. 6 is a flow chart showing the flow until the container being purged on the second shelf plate of the second shelf module is carried out by the transport vehicle.
  • a storage shelf (purge device) 1 shown in FIG. 1 is arranged, for example, along a track 5 of a transport vehicle (transport device) 3 that constitutes a transport system 100 in a semiconductor manufacturing factory or the like.
  • the transport system 100 mainly includes a storage shelf 1 , a transport vehicle 3 , a track 5 , and a transport controller (transport control unit) 9 .
  • the storage shelf 1 temporarily stores a container (storage container) F such as a FOUP or a reticle pod.
  • the storage shelf 1 comprises a suspension frame 10, a first shelf module 30 and a second shelf module 40.
  • the hanging frame 10 is a member for hanging the first shelf module 30 from the ceiling.
  • the suspension frames 10 are arranged at regular intervals along the extending direction (X direction) of the track 5 .
  • the suspension frame 10 has a shelf support portion 13, a pair of suspension portions 11, 11, and a connection portion 14.
  • the shelf support portion 13 extends along the lateral direction (Y direction) of the first shelf module 30 or the second shelf module 40 and supports the first shelf module 30 or the second shelf module 40 from below.
  • the pair of hanging portions 11, 11 extend in the hanging direction (Z direction) from each of both ends of the shelf support portion 13 to the fixed portion 12 fixed to the ceiling.
  • the connecting portion 14 has both ends connected to the pair of hanging portions 11 and 11 and extends parallel to the shelf supporting portion 13 (in the Y direction).
  • An additional unit 20 is fixed to the suspension frame 10 .
  • the additional unit 20 is a unit fixed to the suspending portion 11 of the suspending frame 10 .
  • the additional unit 20 has an additional shelf support portion 23 , an additional suspension portion 21 , an additional connection portion 24 , and a fall prevention fence 29 .
  • the additional shelf support part 23 extends along the lateral direction (Y direction) of the first shelf module 30 or the second shelf module 40 and supports the first shelf module 30 or the second shelf module 40 from below.
  • the additional hanging portion 21 extends in the hanging direction (Z direction) from one end of the additional shelf support portion 23 to the fixed portion 22 fixed to the ceiling.
  • the additional connecting portion 24 has one end connected to the additional hanging portion 21 and the other end connected to the hanging portion 11, and extends parallel to the additional shelf support portion 23 (in the Y direction).
  • the fall prevention fence 29 is a plate-like member that spans between the adjacent hanging portions 11 or between the adjacent additional hanging portions 21 .
  • the first shelf module 30 and the second shelf module 40 are members on which the containers F are placed.
  • the first shelf module 30 and the second shelf module 40 are spanned between adjacent shelf support portions 13 or adjacent additional shelf support portions 23 .
  • the first shelf module 30 is a unit that does not have a purge function, that is, a unit that does not have a function of supplying gas to the containers F placed thereon. Examples of such gases include nitrogen gas, dry air, and the like.
  • the second shelf module 40 is a unit that has a purge function, that is, a unit that has a function (purge facility) to supply gas to the containers F placed thereon.
  • the first shelf module 30 has a first shelf frame 31 and a first shelf plate 33.
  • the first shelf frame 31 spans over the shelf support portions 13 or the additional shelf support portions 23 that are adjacent in the X direction.
  • the first shelf frame 31 is a plate-like member having a substantially rectangular shape when viewed from above in the Z direction.
  • the first shelf frame 31 is fixed to the shelf support portion 13 or the additional shelf support portion 23 by screws or the like inserted through the shelf support portion 13 or the additional shelf support portion 23 from below.
  • the first shelf board 33 is supported on the upper surface of the first shelf frame 31 via an elastic body (not shown).
  • the first shelf board 33 is a plate-like member having a substantially rectangular shape when viewed from above in the Z direction.
  • elastic materials include rubber materials, silicone gel materials, urethane gels, and metal springs.
  • the first shelf plate 33 may be attached directly to the upper surface of the first shelf frame 31 without using an elastic body.
  • the first shelf board 33 has a mounting surface 33a on which the container F is mounted, and a pin 35 is provided on the mounting surface 33a.
  • the pin 35 protrudes upward from the mounting surface 33 a of the first shelf plate 33 .
  • the pin 35 is arranged at a position corresponding to a positioning hole (not shown) provided in the bottom of the container F. As shown in FIG.
  • the second shelf module 40 shown in FIGS. 2-4 has a second shelf frame 41 , a second shelf plate (mounting portion) 43 and a purge device 50 .
  • the second shelf frame 41 spans over the additional shelf support portions 23 (see FIG. 1) adjacent in the X direction.
  • the second shelf frame 41 is a plate-like member having a substantially rectangular shape when viewed from above in the Z direction.
  • the second shelf board 43 is supported on the upper surface of the second shelf frame 41 via elastic bodies 47 .
  • the second shelf board 43 is a plate-like member having a substantially rectangular shape when viewed from above in the Z direction.
  • Examples of materials for the elastic body 47 include rubber material, silicone gel material, urethane gel, and metal springs.
  • the second shelf board 43 may be attached directly to the upper surface of the second shelf frame 41 without using an elastic body.
  • the second shelf board 43 has a mounting surface 43a on which the container F is mounted, and pins (guide portions) 45A, 45B, and 45C are provided on the mounting surface 43a.
  • the pins 45A, 45B, and 45C contact the container F prior to the purge nozzle 51 when the container F is placed on the second shelf plate 43 so that the injection port Fa is positioned within a predetermined range with respect to the purge nozzle 51.
  • Guide container F. The pins 45A, 45B, 45C protrude upward from the mounting surface 43a of the second shelf board 43. As shown in FIG.
  • the pins 45A, 45B, 45C are arranged at positions corresponding to positioning holes (not shown) provided in the bottom of the container F. As shown in FIG.
  • the purge equipment 50 includes a purge nozzle 51, a first pipe 52, a filter section 53, a second pipe 54, an MFC (Mass Flow Controller) 55, a third pipe 56, a load sensor 59, and an arrival sensor 89. , an adsorption unit 80 , a vibrating device 87 , and a purge controller (detection unit/purge control unit) 90 .
  • the purge nozzle 51 is a nozzle that supplies gas to the inside of the container F. As shown in FIG. The purge nozzle 51 protrudes upward from the mounting surface 43 a of the second shelf plate 43 , and is connected to the inlet Fa provided on the bottom surface of the container F when the container F is mounted on the purge nozzle 51 .
  • the first pipe 52 is a pipe member that connects the purge nozzle 51 and the filter portion 53 .
  • the filter portion 53 is a member that houses a filter that removes foreign matter contained in the gas passing through the filter portion 53, and removes foreign matter contained in the gas that is supplied from the gas supply source through the first main pipe 60A. remove.
  • the filter part 53 is fixed to the second shelf frame 41 by an appropriate member.
  • the second pipe 54 is a pipe member that connects between the filter portion 53 and the MFC 55 .
  • the MFC 55 is a device that measures the flow rate of the gas supplied from the first main pipe 60A and controls the flow rate. MFC 55 is controlled by purge controller 90 .
  • the MFC 55 is provided on each of the plurality of second shelf boards 43 .
  • the MFC 55 is connected via a wiring 71 to a first main wiring 70A that is connected to the purge controller 90 .
  • the MFC 55 is fixed to the lower surface of the second shelf frame 41 by an appropriate method.
  • the third pipe 56 is a pipe member that connects between the MFC 55 and the first main pipe 60A.
  • the load sensor 59 detects whether or not the container F is placed on the second shelf board 43 .
  • the load sensor 59 is provided on the mounting surface 43 a of the second shelf board 43 .
  • the presence sensor 59 is connected to the first main wiring 70A connected to the purge controller 90 via the wiring 71 . A detection result of the presence sensor 59 is acquired by the purge controller 90 .
  • the arrival sensor 89 detects that the container F has been transported to the second shelf board 43 . More specifically, a plurality of arrival sensors 89 are provided corresponding to each of the plurality of purge nozzles 51 . An arrival sensor 89 is fixed to the track 5, for example. Note that only one arrival sensor 89 out of the plurality of arrival sensors 89 is shown in FIG. The arrival sensor 89 detects that the container F starts to be placed on the second shelf plate 43 provided with the corresponding purge nozzle 51 . A detection result of the container F by the arrival sensor 89 is acquired by the purge controller 90 .
  • the adsorption section 80 has a suction port 81, an electromagnetic valve 82, a pressure gauge 83, and a pipe 84.
  • the suction port 81 is provided around the purge nozzle 51 . It is a portion that absorbs the bottom surface of the container F to stabilize the placement of the container F on the second shelf plate 43 and to ensure the connection between the purge nozzle 51 and the container F.
  • the suction port 81 is composed of a plurality of holes formed in an elastic member such as a rubber member.
  • the suction port 81 is connected to the second main pipe 60B connected to the negative pressure source 7 via an electromagnetic valve 82, a pressure gauge 83 and a pipe 84.
  • the electromagnetic valve 82 switches whether negative pressure (suction) is generated at the suction port 81 .
  • Electromagnetic valve 82 is controlled by purge controller 90 .
  • the electromagnetic valve 82 is connected to the first main wiring 70A connected to the purge controller 90 via the wiring 71 .
  • the electromagnetic valve 82 is attached to the rear surface 43b of the second shelf plate 43 opposite to the mounting surface 43a.
  • the pressure gauge 83 measures the pressure generated at the suction port 81.
  • the pressure generated at the suction port 81 changes depending on how the container F is placed on the second shelf plate 43 , that is, the degree of contact of the container F with the suction port 81 . That is, when the container F is firmly sucked by the suction port 81 (when the connection state between the purge nozzle 51 and the injection port Fa is good), the value measured by the pressure gauge 83 is relatively high. When the container F is not firmly sucked by the pressure gauge 81 (when the connection state between the purge nozzle 51 and the injection port Fa is poor), the value measured by the pressure gauge 83 is relatively low.
  • the pressure gauge 83 is connected to the first main wiring 70A connected to the purge controller 90 via the wiring 71 . A pressure value measured by the pressure gauge 83 is acquired by the purge controller 90 . The pressure gauge 83 is attached to the back surface 43 b of the second shelf plate 43 .
  • the vibrating device 87 vibrates the container F placed on the second shelf plate 43 .
  • An example of the vibrating device 87 is a vibrating motor such as a vibrator.
  • the vibrating device 87 is provided on the rear surface 43 b of the second shelf 43 and applies vibration to the container F via the second shelf 43 .
  • the vibrating device 87 is connected to the first main wiring 70A connected to the purge controller 90 via the wiring 71 .
  • Vibration device 87 is controlled by purge controller 90 . That is, the vibrating operation of the vibrating device 87 is controlled by the purge controller 90 .
  • the first main pipe 60A described above is connected to the gas source of the purge gas supplied to the purge equipment 50.
  • the first main pipe 60A is connected to each of the plurality of MFCs 55 via third pipes 56 .
  • the second main pipe 60B is connected to a negative pressure source 7 that generates negative pressure in each of the plurality of suction ports 81. As shown in FIG.
  • the second main pipe 60B is connected to each of the plurality of suction ports 81 via pipes 84 .
  • the first main wiring 70A connects the purge controller 90 and the plurality of purge facilities 50 .
  • the first main wiring 70A is connected to each of the plurality of purge equipment 50 via wiring 71 .
  • the purge controller 90 executes various controls in the purge equipment 50 .
  • the purge controller 90 may be fixed to a part of any of the storage racks 1, or may be provided at a location away from the storage racks 1 via a relay device or the like.
  • Purge controller 90 controls electromagnetic valve 82 , multiple MFCs 55 and vibrating device 87 .
  • the purge controller 90 acquires the pressure value of the pressure gauge 83 , the detection result of the presence sensor 59 and the detection result of the arrival sensor 89 .
  • the purge controller 90 controls the MFC 55 based on the detection results of the presence sensor 59 and the arrival sensor 89 .
  • the purge controller 90 detects whether the connection state between the purge nozzle 51 and the inlet Fa is good or bad based on the pressure value in the pressure gauge 83, and controls the vibrating device 87 based on the good or bad detection result.
  • the purge controller 90 controls the MFC 55 to supply gas to the container F when the connection state is determined to be good, and outputs an error signal when the connection state is determined to be unsatisfactory. Output. Details of the control of the purge controller 90 will be described later.
  • the transport controller 9 transmits a transport command to the transport vehicle 3 traveling on the track 5 .
  • the transfer command includes the first shelf board 33 of the first shelf module 30 or the second shelf board 43 of the second shelf module 40 corresponding to the placement section corresponding to the destination processing apparatus and the buffer.
  • the purge controller 90 and the transport controller 9 are connected by the second main wiring 70B.
  • the transport controller 9 of the present embodiment prohibits outputting a transport command whose destination is the second shelf board 43 that caused the output of the error signal.
  • the purge controller 90 detects arrival of the transport vehicle 3 by the arrival sensor 89 (step S1).
  • the transport vehicle 3 starts lowering the container F (step S2) and seats it on the second shelf board 43 (step S3).
  • the container F contacts the pins 45A, 45B, and 45C before being seated on the second shelf plate 43, and the container F moves toward the pins 45A and 45C. It is seated on the second shelf plate 43 while being guided by 45B and 45C (the injection port Fa of the container F and the purge nozzle 51 are connected).
  • the purge controller 90 controls the electromagnetic valve 82 based on the detection result of the load sensor 59 to start sucking the container F (step S4).
  • the purge controller 90 controls the electromagnetic valve 82 to suck the container F from when the arrival sensor 89 detects the arrival of the transport vehicle 3 until the container F is seated on the second shelf plate 43. may start.
  • the purge controller 90 detects whether the connection between the purge nozzle 51 and the inlet Fa is good or bad (step S5). More specifically, the purge controller 90 detects the connection state based on the adsorption state of the container F at the suction port 81 of the adsorption section 80 .
  • the purge controller 90 of the present embodiment determines that the connection state between the purge nozzle 51 and the injection port Fa is good if the obtained pressure value of the pressure gauge 83 is equal to or greater than the first threshold value.
  • the purge controller 90 determines that the connection between the purge nozzle 51 and the inlet Fa is good (S5: YES)
  • the purge controller 90 determines that the connection state between the purge nozzle 51 and the injection port Fa is not good (S5: NO). It controls the vibrating device 87 to operate it (step S11). After that, the purge controller 90 detects the connection state based on the suction state of the container F at the suction port 81 of the suction section 80 (step S12). Here, if the acquired pressure value of the pressure gauge 83 is equal to or greater than the first threshold value, the purge controller 90 determines that the connection state between the purge nozzle 51 and the inlet Fa is good.
  • the purge controller 90 determines that the connection state between the purge nozzle 51 and the injection port Fa is good (S12: YES), it controls the vibrating device 87 to stop the operation of the vibrating device 87 (step S13). Next, the purge controller 90 controls the MFC 55 to supply gas to the container F (step S6).
  • step S12 determines in step S12 that the connection state between the purge nozzle 51 and the inlet Fa is bad (S12: NO)
  • the vibration device 87 continues to apply vibration (step S14: NO). ). If the purge controller 90 continues to determine that the connection state between the purge nozzle 51 and the injection port Fa is bad (timeout) even if the vibration state by the vibrating device 87 continues for a predetermined time or longer (step S14: YES), the purge controller 90 The vibrating device 87 is controlled to stop the operation of the vibrating device 87 (step S15). Next, the purge controller 90 outputs an error signal (step S16). The transport controller 9 that has acquired the error signal notifies the operator of the error, or prohibits outputting a transport command with the second shelf board 43 that caused the output of the error signal as the destination. .
  • the purge controller 90 controls the MFC 55 to stop purging the container F.
  • the purge process may be stopped until arrival of the transport vehicle 3 is detected by the arrival sensor 89 .
  • the purge controller 90 controls the electromagnetic valve 82 to stop the suction of the container F (step S32).
  • the purge controller 90 detects whether the acquired pressure value of the pressure gauge 83 is equal to or less than the second threshold (step S33).
  • the purge controller 90 determines that the acquired pressure value of the pressure gauge 83 is equal to or less than the second threshold value (S33: YES)
  • the purge controller 90 transmits that effect to the transport controller 9, and causes the transport vehicle 3 to grip the container F ( Step S34), and raise the container F (step S35).
  • the container F is prevented from being lifted by the transport vehicle 3 while being sucked by the suction port 81, thereby preventing damage to the container F and the like.
  • the transport vehicle 3 departs for the destination indicated by the transport command from the transport controller 9 (step S36).
  • the purge controller 90 determines that the acquired pressure value of the pressure gauge 83 is greater than the second threshold value (S33: NO), it continues monitoring the pressure value of the pressure gauge 83 (step S41: NO).
  • the purge controller 90 determines (timeout) that the pressure value of the pressure gauge 83 does not become equal to or less than the second threshold even after the elapse of the predetermined time (S41: YES), it outputs an error signal (step S42).
  • the transport controller 9 that has acquired the error signal notifies the operator of the error, or prohibits outputting a transport command starting from the second shelf board 43 that caused the output of the error signal. .
  • the time can be shortened compared to the method of improving the connection state between the purge nozzle 51 and the injection port Fa by redoing the placement operation of the container F by the transfer unit such as the transport vehicle 3 . Therefore, it is possible to suppress a decrease in processing capacity.
  • the vibrating device 87 is provided on the rear surface 43b of the second shelf plate 43 opposite to the mounting surface 43a of the container F, so that the pins 45A, 45B, 45C It is possible to effectively restart the container F stopped in the middle of guiding.
  • the vibrating device 87 when the connection state between the purge nozzle 51 and the injection port Fa is defective, the vibrating device 87 can be operated. It is possible to reduce the occurrence of troubles in the purge process caused by not being positioned within the predetermined range.
  • connection state between the purge nozzle 51 and the injection port Fa is detected based on the suction state of the container F at the suction port 81. Therefore, the connection state between the purge nozzle 51 and the injection port Fa is detected. Good or bad can be judged easily.
  • the purge controller 90 when the purge controller 90 detects that the connection state between the purge nozzle 51 and the injection port Fa is bad, an error signal is output. This can be notified to the operator, and various processes can be executed based on the error signal.
  • the transport controller 9 acquires an error signal from the purge controller 90, the container F is prohibited from being transferred to the second shelf plate 43 provided with the purge nozzle 51 in which the error has been detected. Therefore, it is possible to prevent the container F from being placed on the second shelf plate 43 provided with the defective purge nozzle 51 .
  • the connection state between the purge nozzle 51 and the injection port Fa is determined by the pressure value generated at the suction port 81.
  • the plurality of sensors arranged on the second shelf plate 43 may be determined based on the detection result of or the image of a camera or the like.
  • the purge controller 90 controls the purge nozzle based on the flow velocity value acquired by the detector. The quality of the connection state between 51 and injection port Fa may be determined.
  • a nozzle around which a bellows is arranged or a nozzle whose mounting portion is made of metal may be provided.
  • the vibrating device 87 is fixed to the back surface 43b of the second shelf plate 43 . It may be provided on the mounting surface 43 a of the shelf board 43 or may be provided on a part of the suspension frame 10 .
  • the transport vehicle 3 traveling on the track 5 provided on the ceiling has been described as an example of the transport apparatus. good.
  • SYMBOLS 1 Storage shelf (purge device), 3... Transport vehicle, 5... Track, 7... Negative pressure source, 9... Transport controller (transport control section), 43... Second shelf plate (placement part), 43a... Placement Surface 43b... Back side 45A, 45B, 45C... Pin (guide part) 50... Purge equipment 51... Purge nozzle 59... Inventory sensor 80... Adsorption part 81... Suction port 82... Electromagnetic valve 83... Pressure gauge 87 Vibration device 89 Arrival sensor 90 Purge controller (detector/purge control unit) 100 Conveying system.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning In General (AREA)

Abstract

A second shelf module (40) supplies a purge gas to the inside of a container (F) via an injection port (Fa) of the container (F) being aligned with a purge nozzle (51). The second shelf module (40) includes: a second shelf board (43) which is a shelf board on which the container (F) is placed, and which is provided with the purge nozzle (51); pins (45A, 45B, 45C), which are members disposed on the second shelf board (43), contact the container (F) prior to the purge nozzle (51) when the container (F) is placed on the second shelf board (43), and guide the container (F) such that the injection port (Fa) is positioned within a predetermined range with respect to the purge nozzle (51); and a vibration device (87) which vibrates the container (F) placed on the second shelf board (43).

Description

パージ装置及び搬送システムPurge device and transport system
　本発明の一側面は、パージ装置及び搬送システムに関する。 One aspect of the present invention relates to a purge device and a transport system.
　例えば、特許文献１に記載されているような、半導体ウェハ又はガラス基板等の被格納物が格納される格納容器の内部に、清浄度を保つためにパージガスを導入（いわゆるパージ処理）するパージ装置が知られている。特許文献１のパージ装置では、パージガスを供給する工程の中で、良好なパージ処理を行うことができる。 For example, a purge device that introduces a purge gas (so-called purging process) into the interior of a storage container in which stored objects such as semiconductor wafers or glass substrates are stored in order to maintain cleanliness, as described in Patent Document 1. It has been known. In the purge device of Patent Document 1, a good purge process can be performed in the process of supplying the purge gas.
再公表２０１５／１１８７８２号公報Republished publication 2015/118782
　パージノズルに格納容器の注入口が位置合わせされた状態で、格納容器の内部にパージガスを供給するパージ装置では、注入口がパージノズルに対する所定範囲内に位置するように格納容器を案内するガイド部が設けられているが、格納容器が意図しない要因によって案内途中で留まり、注入口が上記所定範囲内にまで案内されない場合がある。注入口が上記所定範囲内に案内されないと、パージノズルと格納容器の注入口とが接続されなかったり、接続状態が不良となったりして、良好なパージ処理が実行できない場合がある。 In a purge device that supplies purge gas to the interior of the containment vessel with the injection port of the containment vessel aligned with the purge nozzle, a guide section is provided to guide the containment vessel so that the injection port is positioned within a predetermined range with respect to the purge nozzle. However, there are cases where the containment vessel stops during guidance due to unintended factors, and the injection port is not guided within the predetermined range. If the injection port is not guided within the predetermined range, the purge nozzle and the injection port of the containment vessel may not be connected or the connection state may be poor, making it impossible to perform a good purge process.
　そこで、本発明の一側面の目的は、良好なパージ処理を実行することができるパージ装置及び搬送システムを提供することにある。 Therefore, an object of one aspect of the present invention is to provide a purge device and a transport system that can perform good purge processing.
　本発明の一側面に係るパージ装置は、パージノズルに格納容器の注入口が位置合わせされることによって、格納容器の内部にパージガスを供給するパージ装置であって、格納容器が載置される載置部であって、パージノズルが設けられている載置部と、載置部に配置される部材であって、載置部に格納容器が載置されるときにパージノズルに先行して格納容器に接触し、注入口がパージノズルに対する所定範囲内に位置するように格納容器を案内するガイド部と、載置部に載置された格納容器に振動を加える加振装置と、を備える。 A purge device according to one aspect of the present invention is a purge device that supplies purge gas to the interior of a containment vessel by aligning an inlet of the containment vessel with a purge nozzle. and a member disposed on the mounting portion, which is arranged on the mounting portion and contacts the storage container prior to the purge nozzle when the storage container is mounted on the mounting portion. and a guide section for guiding the storage container so that the injection port is positioned within a predetermined range with respect to the purge nozzle;
　この構成のパージ装置では、載置部に載置される格納容器に振動を加えることができるので、意図しない要因によってガイド部の案内途中で停止した格納容器を再始動させることができる。これにより、格納容器の注入口がパージノズルに対する所定範囲内に位置するようにより確実に案内される。この結果、良好なパージ処理を実行することができる。 In the purge device with this configuration, vibrations can be applied to the containment vessel placed on the placement section, so that the containment vessel that has been stopped during guidance by the guide section due to an unintended factor can be restarted. This more reliably guides the inlet of the containment vessel to be positioned within a predetermined range with respect to the purge nozzle. As a result, good purge processing can be performed.
　本発明の一側面に係るパージ装置では、加振装置は、載置部における格納容器の載置面とは反対側の面に設けられていてもよい。この構成では、ガイド部の案内途中で停止した格納容器を効果的に再始動させることができる。 In the purge device according to one aspect of the present invention, the vibrating device may be provided on the surface of the mounting portion opposite to the mounting surface of the containment vessel. With this configuration, it is possible to effectively restart the containment vessel that has stopped while being guided by the guide portion.
　本発明の一側面に係るパージ装置は、パージノズルと注入口との接続状態の良否を検出する検出部と、検出部の検出結果に応じて加振装置を作動させるパージ制御部と、を更に備えてもよい。この構成では、パージノズルと注入口との接続状態が不良である場合に、加振装置を作動させることができるので、格納容器の注入口がパージノズルに対する所定範囲内に位置しないことを起因とするパージ処理の不具合の発生を低減することができる。 A purge device according to one aspect of the present invention further includes a detection unit that detects whether the connection between the purge nozzle and the injection port is good or bad, and a purge control unit that operates the vibrating device according to the detection result of the detection unit. may With this configuration, if the connection between the purge nozzle and the injection port is poor, the vibrating device can be activated. Occurrence of processing defects can be reduced.
　本発明の一側面に係るパージ装置は、載置部に配置されると共に、格納容器を吸着する吸着部を更に備え、検出部は、吸着部における格納容器の吸着状態に基づいて接続状態を検出してもよい。この構成では、パージノズルと注入口との接続状態の良否を簡易に判定することができる。 The purge device according to one aspect of the present invention is arranged on the mounting section and further includes an adsorption section that adsorbs the containment vessel, and the detection section detects the connection state based on the adsorption state of the containment vessel in the adsorption section. You may With this configuration, it is possible to easily determine whether the connection state between the purge nozzle and the inlet is good or bad.
　本発明の一側面に係るパージ装置では、パージ制御部は、検出部によって接続状態が不良であることが検出された場合、エラー信号を出力してもよい。この構成では、当該エラー信号に基づいて、接続状態が不良であることを作業者に報知したり、当該エラー信号に基づいて各種処理を実行することができる。 In the purge device according to one aspect of the present invention, the purge control section may output an error signal when the detection section detects that the connection state is poor. In this configuration, based on the error signal, it is possible to notify the operator that the connection state is defective, and to execute various processes based on the error signal.
　本発明の一側面に係る搬送システムでは、上記のパージ装置と、載置部との間で格納容器を移載可能な搬送装置と、搬送装置を制御する搬送制御部と、を備え、搬送制御部は、エラー信号を取得した場合、エラーが検出されたパージノズルが設けられた載置部への格納容器の移載を禁止してもよい。この構成では、不具合のあるパージノズルが設けられた載置部へ格納容器が載置されることを防止できる。 A transport system according to one aspect of the present invention includes the above-described purge device, a transport device capable of transferring a storage container to and from the placement unit, and a transport control unit for controlling the transport device, wherein the transport control When the unit acquires the error signal, the unit may prohibit the transfer of the storage container to the mounting unit provided with the purge nozzle in which the error has been detected. With this configuration, it is possible to prevent the storage container from being placed on the placement portion provided with the defective purge nozzle.
　本発明の一側面によれば、良好なパージ処理を実行することができる。 According to one aspect of the present invention, good purge processing can be performed.
図１は、一実施形態に係る搬送システム及び保管棚を示す斜視図である。FIG. 1 is a perspective view showing a transport system and storage racks according to one embodiment. 図２は、第二棚モジュールを上方から見た斜視図である。2 is a top perspective view of the second shelf module; FIG. 図３は、第二棚モジュールを下方から見た斜視図である。FIG. 3 is a bottom perspective view of the second shelf module; 図４は、搬送システム及び保管棚の機能構成を示すブロック図である。FIG. 4 is a block diagram showing the functional configuration of the transport system and the storage shelf. 図５は、搬送車によって第二棚モジュールの第二棚板にまで搬送されてきた容器に対してパージ処理が開始されるまでの流れを示すフローチャートである。FIG. 5 is a flow chart showing the flow up to the start of the purge process for the container that has been transported to the second shelf plate of the second shelf module by the transport vehicle. 図６は、第二棚モジュールの第二棚板においてパージ処理中の容器が搬送車によって搬出されるまでの流れを示すフローチャートである。FIG. 6 is a flow chart showing the flow until the container being purged on the second shelf plate of the second shelf module is carried out by the transport vehicle.
　以下、図面を参照して、本発明の一側面の好適な一実施形態について詳細に説明する。なお、図面の説明において、同一要素には同一符号を付し、重複する説明を省略する。「Ｘ方向」、「Ｙ方向」及び「Ｚ方向」の語は、図示する方向に基づいており便宜的なものである。なお、図２においては第二主配管６０Ｂの記載を省略し、図３においては、第二主配管６０Ｂ、電磁バルブ８２、圧力計８３及び配管８４の記載を省略している。 A preferred embodiment of one aspect of the present invention will be described in detail below with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and overlapping descriptions are omitted. The terms "X-direction," "Y-direction," and "Z-direction" are for convenience, based on the directions shown. 2, illustration of the second main pipe 60B is omitted, and illustration of the second main pipe 60B, the electromagnetic valve 82, the pressure gauge 83, and the pipe 84 is omitted in FIG.
　図１に示す保管棚（パージ装置）１は、例えば、半導体製造工場等における搬送システム１００を構成する搬送車（搬送装置）３の軌道５に沿って配置される。搬送システム１００は、保管棚１と、搬送車３と、軌道５と、搬送コントローラ（搬送制御部）９と、を主に含んで構成される。保管棚１は、ＦＯＵＰ又はレチクルポッド等の容器（格納容器）Ｆを一時的に保管する。保管棚１は、吊りフレーム１０と、第一棚モジュール３０と、第二棚モジュール４０と、を備えている。図１に示されるように、吊りフレーム１０は、第一棚モジュール３０を天井から吊り下げる部材である。吊りフレーム１０は、軌道５の延在方向（Ｘ方向）に沿って、等間隔で配列されている。 A storage shelf (purge device) 1 shown in FIG. 1 is arranged, for example, along a track 5 of a transport vehicle (transport device) 3 that constitutes a transport system 100 in a semiconductor manufacturing factory or the like. The transport system 100 mainly includes a storage shelf 1 , a transport vehicle 3 , a track 5 , and a transport controller (transport control unit) 9 . The storage shelf 1 temporarily stores a container (storage container) F such as a FOUP or a reticle pod. The storage shelf 1 comprises a suspension frame 10, a first shelf module 30 and a second shelf module 40. - 特許庁As shown in FIG. 1, the hanging frame 10 is a member for hanging the first shelf module 30 from the ceiling. The suspension frames 10 are arranged at regular intervals along the extending direction (X direction) of the track 5 .
　吊りフレーム１０は、棚支持部１３と、一対の吊部１１，１１と、接続部１４と、を有する。棚支持部１３は、第一棚モジュール３０又は第二棚モジュール４０の短手方向（Ｙ方向）に沿って延在し、下方から第一棚モジュール３０又は第二棚モジュール４０を支持する。一対の吊部１１，１１は、棚支持部１３の両端のそれぞれから天井に固定される固定部１２にまで吊り下げ方向（Ｚ方向）に延在する。接続部１４は、その両端が一対の吊部１１，１１に接続され、棚支持部１３に平行（Ｙ方向）に延在する。 The suspension frame 10 has a shelf support portion 13, a pair of suspension portions 11, 11, and a connection portion 14. The shelf support portion 13 extends along the lateral direction (Y direction) of the first shelf module 30 or the second shelf module 40 and supports the first shelf module 30 or the second shelf module 40 from below. The pair of hanging portions 11, 11 extend in the hanging direction (Z direction) from each of both ends of the shelf support portion 13 to the fixed portion 12 fixed to the ceiling. The connecting portion 14 has both ends connected to the pair of hanging portions 11 and 11 and extends parallel to the shelf supporting portion 13 (in the Y direction).
　吊りフレーム１０には、追加ユニット２０が固定されている。追加ユニット２０は、吊りフレーム１０の吊部１１に固定されるユニットである。追加ユニット２０は、追加棚支持部２３と、追加吊部２１と、追加接続部２４と、落下防止柵２９と、を有する。追加棚支持部２３は、第一棚モジュール３０又は第二棚モジュール４０の短手方向（Ｙ方向）に沿って延在し、下方から第一棚モジュール３０又は第二棚モジュール４０を支持する。追加吊部２１は、追加棚支持部２３の一端から天井に固定される固定部２２にまで吊り下げ方向（Ｚ方向）に延在する。追加接続部２４は、一端が追加吊部２１に接続され、他端が吊部１１に接続されており、追加棚支持部２３に平行（Ｙ方向）に延在する。落下防止柵２９は、隣り合う吊部１１同士、又は隣り合う追加吊部２１同士に掛け渡される平板状の部材である。 An additional unit 20 is fixed to the suspension frame 10 . The additional unit 20 is a unit fixed to the suspending portion 11 of the suspending frame 10 . The additional unit 20 has an additional shelf support portion 23 , an additional suspension portion 21 , an additional connection portion 24 , and a fall prevention fence 29 . The additional shelf support part 23 extends along the lateral direction (Y direction) of the first shelf module 30 or the second shelf module 40 and supports the first shelf module 30 or the second shelf module 40 from below. The additional hanging portion 21 extends in the hanging direction (Z direction) from one end of the additional shelf support portion 23 to the fixed portion 22 fixed to the ceiling. The additional connecting portion 24 has one end connected to the additional hanging portion 21 and the other end connected to the hanging portion 11, and extends parallel to the additional shelf support portion 23 (in the Y direction). The fall prevention fence 29 is a plate-like member that spans between the adjacent hanging portions 11 or between the adjacent additional hanging portions 21 .
　第一棚モジュール３０及び第二棚モジュール４０は、容器Ｆが載置される部材である。第一棚モジュール３０及び第二棚モジュール４０は、隣り合う棚支持部１３同士、又は隣り合う追加棚支持部２３同士に掛け渡されている。 The first shelf module 30 and the second shelf module 40 are members on which the containers F are placed. The first shelf module 30 and the second shelf module 40 are spanned between adjacent shelf support portions 13 or adjacent additional shelf support portions 23 .
　第一棚モジュール３０は、パージ機能を有さないユニット、すなわち、載置される容器Ｆにガスを供給する機能を有さないユニットである。当該ガスの例には、窒素ガス、乾燥空気等が含まれる。第二棚モジュール４０は、パージ機能を有するユニット、すなわち、載置される容器Ｆにガスを供給する機能（パージ設備）を有するユニットである。 The first shelf module 30 is a unit that does not have a purge function, that is, a unit that does not have a function of supplying gas to the containers F placed thereon. Examples of such gases include nitrogen gas, dry air, and the like. The second shelf module 40 is a unit that has a purge function, that is, a unit that has a function (purge facility) to supply gas to the containers F placed thereon.
　第一棚モジュール３０は、第一棚フレーム３１と、第一棚板３３と、を有している。第一棚フレーム３１は、Ｘ方向において隣り合う棚支持部１３又は追加棚支持部２３に掛け渡される。第一棚フレーム３１は、Ｚ方向から見た平面視において、略矩形形状を呈する板状の部材である。第一棚フレーム３１は、棚支持部１３又は追加棚支持部２３に下方から挿通されるネジ等によって棚支持部１３又は追加棚支持部２３に固定されている。 The first shelf module 30 has a first shelf frame 31 and a first shelf plate 33. The first shelf frame 31 spans over the shelf support portions 13 or the additional shelf support portions 23 that are adjacent in the X direction. The first shelf frame 31 is a plate-like member having a substantially rectangular shape when viewed from above in the Z direction. The first shelf frame 31 is fixed to the shelf support portion 13 or the additional shelf support portion 23 by screws or the like inserted through the shelf support portion 13 or the additional shelf support portion 23 from below.
　第一棚板３３は、第一棚フレーム３１の上面に、弾性体（図示せず）を介して支持されている。第一棚板３３は、Ｚ方向から見た平面視において、略矩形形状を呈する板状の部材である。弾性体の材料の例には、ゴム材、シリコーンゲル材、ウレタンゲル及び金属バネが含まれる。なお、弾性体を介することなく、第一棚板３３を第一棚フレーム３１の上面に直接取り付けるようにしてもよい。第一棚板３３は、容器Ｆが載置される載置面３３ａを有し、載置面３３ａには、ピン３５が設けられている。ピン３５は、第一棚板３３の載置面３３ａから上方に突出している。ピン３５は、容器Ｆの底部に設けられた位置決め穴（図示せず）に対応する位置に配置されている。 The first shelf board 33 is supported on the upper surface of the first shelf frame 31 via an elastic body (not shown). The first shelf board 33 is a plate-like member having a substantially rectangular shape when viewed from above in the Z direction. Examples of elastic materials include rubber materials, silicone gel materials, urethane gels, and metal springs. Alternatively, the first shelf plate 33 may be attached directly to the upper surface of the first shelf frame 31 without using an elastic body. The first shelf board 33 has a mounting surface 33a on which the container F is mounted, and a pin 35 is provided on the mounting surface 33a. The pin 35 protrudes upward from the mounting surface 33 a of the first shelf plate 33 . The pin 35 is arranged at a position corresponding to a positioning hole (not shown) provided in the bottom of the container F. As shown in FIG.
　次に、図２～図４に示される第二棚モジュール４０について説明する。第二棚モジュール４０は、第二棚フレーム４１と、第二棚板（載置部）４３と、パージ設備５０と、を有している。第二棚フレーム４１は、Ｘ方向において隣り合う追加棚支持部２３（図１参照）に掛け渡される。第二棚フレーム４１は、Ｚ方向から見た平面視において、略矩形形状を呈する板状の部材である。 Next, the second shelf module 40 shown in FIGS. 2-4 will be described. The second shelf module 40 has a second shelf frame 41 , a second shelf plate (mounting portion) 43 and a purge device 50 . The second shelf frame 41 spans over the additional shelf support portions 23 (see FIG. 1) adjacent in the X direction. The second shelf frame 41 is a plate-like member having a substantially rectangular shape when viewed from above in the Z direction.
　第二棚板４３は、第二棚フレーム４１の上面に、弾性体４７を介して支持されている。第二棚板４３は、Ｚ方向から見た平面視において、略矩形形状を呈する板状の部材である。弾性体４７の材料の例には、ゴム材、シリコーンゲル材、ウレタンゲル及び金属バネが含まれる。なお、弾性体を介することなく、第二棚板４３を第二棚フレーム４１の上面に直接取り付けるようにしてもよい。第二棚板４３は、容器Ｆが載置される載置面４３ａを有し、載置面４３ａには、ピン（ガイド部）４５Ａ，４５Ｂ，４５Ｃが設けられている。 The second shelf board 43 is supported on the upper surface of the second shelf frame 41 via elastic bodies 47 . The second shelf board 43 is a plate-like member having a substantially rectangular shape when viewed from above in the Z direction. Examples of materials for the elastic body 47 include rubber material, silicone gel material, urethane gel, and metal springs. Alternatively, the second shelf board 43 may be attached directly to the upper surface of the second shelf frame 41 without using an elastic body. The second shelf board 43 has a mounting surface 43a on which the container F is mounted, and pins (guide portions) 45A, 45B, and 45C are provided on the mounting surface 43a.
　ピン４５Ａ，４５Ｂ，４５Ｃは、第二棚板４３に容器Ｆが載置されるときにパージノズル５１に先行して容器Ｆに接触し、注入口Ｆａがパージノズル５１に対する所定範囲内に位置するように容器Ｆを案内する。ピン４５Ａ，４５Ｂ，４５Ｃは、第二棚板４３の載置面４３ａから上方に突出している。ピン４５Ａ，４５Ｂ，４５Ｃは、容器Ｆの底部に設けられた位置決め穴（図示せず）に対応する位置に配置されている。 The pins 45A, 45B, and 45C contact the container F prior to the purge nozzle 51 when the container F is placed on the second shelf plate 43 so that the injection port Fa is positioned within a predetermined range with respect to the purge nozzle 51. Guide container F. The pins 45A, 45B, 45C protrude upward from the mounting surface 43a of the second shelf board 43. As shown in FIG. The pins 45A, 45B, 45C are arranged at positions corresponding to positioning holes (not shown) provided in the bottom of the container F. As shown in FIG.
　パージ設備５０は、パージノズル５１と、第一配管５２と、フィルタ部５３と、第二配管５４と、ＭＦＣ（Mass　Flow　Controller）５５と、第三配管５６と、在荷センサ５９と、到着センサ８９と、吸着部８０と、加振装置８７と、パージコントローラ（検出部・パージ制御部）９０と、を有している。パージノズル５１は、容器Ｆの内部にガスを供給するノズルである。パージノズル５１は、第二棚板４３の載置面４３ａから上方に突出しており、容器Ｆがパージノズル５１に載置されることによって容器Ｆの底面に設けられた注入口Ｆａに接続される。 The purge equipment 50 includes a purge nozzle 51, a first pipe 52, a filter section 53, a second pipe 54, an MFC (Mass Flow Controller) 55, a third pipe 56, a load sensor 59, and an arrival sensor 89. , an adsorption unit 80 , a vibrating device 87 , and a purge controller (detection unit/purge control unit) 90 . The purge nozzle 51 is a nozzle that supplies gas to the inside of the container F. As shown in FIG. The purge nozzle 51 protrudes upward from the mounting surface 43 a of the second shelf plate 43 , and is connected to the inlet Fa provided on the bottom surface of the container F when the container F is mounted on the purge nozzle 51 .
　第一配管５２は、パージノズル５１とフィルタ部５３とを接続する管部材である。フィルタ部５３は、フィルタ部５３を通過するガスに含まれる異物を取り除くフィルタが収容された部材であって、ガスの供給源から第一主配管６０Ａを介して供給されるガスに含まれる異物を取り除く。フィルタ部５３は、第二棚フレーム４１に適宜の部材によって固定されている。第二配管５４は、フィルタ部５３とＭＦＣ５５との間を接続する管部材である。 The first pipe 52 is a pipe member that connects the purge nozzle 51 and the filter portion 53 . The filter portion 53 is a member that houses a filter that removes foreign matter contained in the gas passing through the filter portion 53, and removes foreign matter contained in the gas that is supplied from the gas supply source through the first main pipe 60A. remove. The filter part 53 is fixed to the second shelf frame 41 by an appropriate member. The second pipe 54 is a pipe member that connects between the filter portion 53 and the MFC 55 .
　ＭＦＣ５５は、第一主配管６０Ａから供給されるガスの流量を計測すると共に流量の制御を行う機器である。ＭＦＣ５５は、パージコントローラ９０によって制御される。ＭＦＣ５５は、複数の第二棚板４３のそれぞれに設けられている。ＭＦＣ５５は、配線７１を介してパージコントローラ９０に接続される第一主配線７０Ａに接続されている。ＭＦＣ５５は、第二棚フレーム４１の下面に適宜の方法にて固定されている。第三配管５６は、ＭＦＣ５５と第一主配管６０Ａとの間を接続する管部材である。 The MFC 55 is a device that measures the flow rate of the gas supplied from the first main pipe 60A and controls the flow rate. MFC 55 is controlled by purge controller 90 . The MFC 55 is provided on each of the plurality of second shelf boards 43 . The MFC 55 is connected via a wiring 71 to a first main wiring 70A that is connected to the purge controller 90 . The MFC 55 is fixed to the lower surface of the second shelf frame 41 by an appropriate method. The third pipe 56 is a pipe member that connects between the MFC 55 and the first main pipe 60A.
　在荷センサ５９は、第二棚板４３に容器Ｆが載置されたか否かを検出する。在荷センサ５９は、第二棚板４３の載置面４３ａに設けられている。在荷センサ５９は、配線７１を介してパージコントローラ９０に接続される第一主配線７０Ａに接続されている。在荷センサ５９の検知結果は、パージコントローラ９０によって取得される。 The load sensor 59 detects whether or not the container F is placed on the second shelf board 43 . The load sensor 59 is provided on the mounting surface 43 a of the second shelf board 43 . The presence sensor 59 is connected to the first main wiring 70A connected to the purge controller 90 via the wiring 71 . A detection result of the presence sensor 59 is acquired by the purge controller 90 .
　到着センサ８９は、第二棚板４３に容器Ｆが搬送されてきたことを検知する。より詳細には、到着センサ８９は、複数のパージノズル５１のそれぞれに対応して複数設けられている。到着センサ８９は、例えば、軌道５に固定されている。なお、図１では、複数の到着センサ８９のうち、一つの到着センサ８９しか記載されていない。到着センサ８９は、対応するパージノズル５１が設けられた第二棚板４３に容器Ｆの載置が開始されることを検知する。到着センサ８９による容器Ｆの検知結果は、パージコントローラ９０によって取得される。 The arrival sensor 89 detects that the container F has been transported to the second shelf board 43 . More specifically, a plurality of arrival sensors 89 are provided corresponding to each of the plurality of purge nozzles 51 . An arrival sensor 89 is fixed to the track 5, for example. Note that only one arrival sensor 89 out of the plurality of arrival sensors 89 is shown in FIG. The arrival sensor 89 detects that the container F starts to be placed on the second shelf plate 43 provided with the corresponding purge nozzle 51 . A detection result of the container F by the arrival sensor 89 is acquired by the purge controller 90 .
　図１、図２及び図４に示されるように、吸着部８０は、吸引口８１と、電磁バルブ８２と、圧力計８３と、配管８４と、を有している。吸引口８１は、パージノズル５１の周囲に設けられ。容器Ｆの底面を吸着して、容器Ｆの第二棚板４３に対する載置の安定化を図ると共に、パージノズル５１と容器Ｆとの接続をより確実にする部位である。吸引口８１は、ゴム部材等の弾性を有する部材に形成された複数の孔によって構成されている。 As shown in FIGS. 1, 2 and 4, the adsorption section 80 has a suction port 81, an electromagnetic valve 82, a pressure gauge 83, and a pipe 84. The suction port 81 is provided around the purge nozzle 51 . It is a portion that absorbs the bottom surface of the container F to stabilize the placement of the container F on the second shelf plate 43 and to ensure the connection between the purge nozzle 51 and the container F. As shown in FIG. The suction port 81 is composed of a plurality of holes formed in an elastic member such as a rubber member.
　吸引口８１は、電磁バルブ８２、圧力計８３及び配管８４を介して、負圧源７に接続される第二主配管６０Ｂに接続されている。電磁バルブ８２は、吸引口８１における負圧（吸引）の発生の有無を切り替える。電磁バルブ８２は、パージコントローラ９０によって制御される。電磁バルブ８２は、配線７１を介してパージコントローラ９０に接続される第一主配線７０Ａに接続されている。電磁バルブ８２は、第二棚板４３の載置面４３ａとは反対側の裏面４３ｂに取り付けられている。 The suction port 81 is connected to the second main pipe 60B connected to the negative pressure source 7 via an electromagnetic valve 82, a pressure gauge 83 and a pipe 84. The electromagnetic valve 82 switches whether negative pressure (suction) is generated at the suction port 81 . Electromagnetic valve 82 is controlled by purge controller 90 . The electromagnetic valve 82 is connected to the first main wiring 70A connected to the purge controller 90 via the wiring 71 . The electromagnetic valve 82 is attached to the rear surface 43b of the second shelf plate 43 opposite to the mounting surface 43a.
　圧力計８３は、吸引口８１に生じる圧力を計測する。吸引口８１に生じる圧力は、第二棚板４３に対する容器Ｆの載置のされ方、すなわち、吸引口８１に対する容器Ｆの接触度合によって変化する。すなわち、吸引口８１によって容器Ｆがしっかりと吸着されているとき（パージノズル５１と注入口Ｆａとの接続状態が良好なとき）、圧力計８３によって計測される値は相対的に高くなり、吸引口８１によって容器Ｆがしっかりと吸着されていないとき（パージノズル５１と注入口Ｆａとの接続状態が不良のとき）、圧力計８３によって計測される値は相対的に低くなる。圧力計８３は、配線７１を介してパージコントローラ９０に接続される第一主配線７０Ａに接続されている。圧力計８３によって計測された圧力値は、パージコントローラ９０によって取得される。圧力計８３は、第二棚板４３の裏面４３ｂに取り付けられている。 The pressure gauge 83 measures the pressure generated at the suction port 81. The pressure generated at the suction port 81 changes depending on how the container F is placed on the second shelf plate 43 , that is, the degree of contact of the container F with the suction port 81 . That is, when the container F is firmly sucked by the suction port 81 (when the connection state between the purge nozzle 51 and the injection port Fa is good), the value measured by the pressure gauge 83 is relatively high. When the container F is not firmly sucked by the pressure gauge 81 (when the connection state between the purge nozzle 51 and the injection port Fa is poor), the value measured by the pressure gauge 83 is relatively low. The pressure gauge 83 is connected to the first main wiring 70A connected to the purge controller 90 via the wiring 71 . A pressure value measured by the pressure gauge 83 is acquired by the purge controller 90 . The pressure gauge 83 is attached to the back surface 43 b of the second shelf plate 43 .
　加振装置８７は、第二棚板４３に載置された容器Ｆに振動を加える。加振装置８７の例は、バイブレータ等の振動モータである。加振装置８７は、第二棚板４３における裏面４３ｂに設けられており、第二棚板４３を介して容器Ｆに振動を加える。加振装置８７は、配線７１を介してパージコントローラ９０に接続される第一主配線７０Ａに接続されている。加振装置８７は、パージコントローラ９０によって制御される。すなわち、加振装置８７における加振動作は、パージコントローラ９０によって制御される。 The vibrating device 87 vibrates the container F placed on the second shelf plate 43 . An example of the vibrating device 87 is a vibrating motor such as a vibrator. The vibrating device 87 is provided on the rear surface 43 b of the second shelf 43 and applies vibration to the container F via the second shelf 43 . The vibrating device 87 is connected to the first main wiring 70A connected to the purge controller 90 via the wiring 71 . Vibration device 87 is controlled by purge controller 90 . That is, the vibrating operation of the vibrating device 87 is controlled by the purge controller 90 .
　上述した第一主配管６０Ａは、パージ設備５０に供給するパージガスのガス源に接続されている。第一主配管６０Ａは、複数のＭＦＣ５５のそれぞれに第三配管５６を介して接続されている。第二主配管６０Ｂは、複数の吸引口８１のそれぞれに負圧を発生させる負圧源７に接続されている。第二主配管６０Ｂは、複数の吸引口８１のそれぞれに配管８４を介して接続されている。第一主配線７０Ａは、パージコントローラ９０と複数のパージ設備５０とを接続する。第一主配線７０Ａは、複数のパージ設備５０のそれぞれに配線７１を介して接続されている。 The first main pipe 60A described above is connected to the gas source of the purge gas supplied to the purge equipment 50. The first main pipe 60A is connected to each of the plurality of MFCs 55 via third pipes 56 . The second main pipe 60B is connected to a negative pressure source 7 that generates negative pressure in each of the plurality of suction ports 81. As shown in FIG. The second main pipe 60B is connected to each of the plurality of suction ports 81 via pipes 84 . The first main wiring 70A connects the purge controller 90 and the plurality of purge facilities 50 . The first main wiring 70A is connected to each of the plurality of purge equipment 50 via wiring 71 .
　パージコントローラ９０は、パージ設備５０における各種制御を実行する。パージコントローラ９０は、例えば、何れかの保管棚１の一部に固定されていてもよいし、中継装置等を介して保管棚１から離れた場所に設けられてもよい。パージコントローラ９０は、電磁バルブ８２、複数のＭＦＣ５５及び加振装置８７を制御する。パージコントローラ９０は、圧力計８３における圧力値、在荷センサ５９における検知結果及び到着センサ８９における検知結果を取得する。パージコントローラ９０は、在荷センサ５９及び到着センサ８９の検知結果に基づいてＭＦＣ５５を制御する。 The purge controller 90 executes various controls in the purge equipment 50 . For example, the purge controller 90 may be fixed to a part of any of the storage racks 1, or may be provided at a location away from the storage racks 1 via a relay device or the like. Purge controller 90 controls electromagnetic valve 82 , multiple MFCs 55 and vibrating device 87 . The purge controller 90 acquires the pressure value of the pressure gauge 83 , the detection result of the presence sensor 59 and the detection result of the arrival sensor 89 . The purge controller 90 controls the MFC 55 based on the detection results of the presence sensor 59 and the arrival sensor 89 .
　また、パージコントローラ９０は、圧力計８３における圧力値に基づいてパージノズル５１と注入口Ｆａとの接続状態の良否を検出し、当該良否の検出結果に基づいて加振装置８７を制御する。本実施形態では、パージコントローラ９０は、上記接続状態が良と判定されたときは、ＭＦＣ５５を制御して容器Ｆにガスを供給し、上記接続状態が不良と判定されたときは、エラー信号を出力する。なお、パージコントローラ９０の制御の詳細については、後段にて詳述する。 Further, the purge controller 90 detects whether the connection state between the purge nozzle 51 and the inlet Fa is good or bad based on the pressure value in the pressure gauge 83, and controls the vibrating device 87 based on the good or bad detection result. In this embodiment, the purge controller 90 controls the MFC 55 to supply gas to the container F when the connection state is determined to be good, and outputs an error signal when the connection state is determined to be unsatisfactory. Output. Details of the control of the purge controller 90 will be described later.
　搬送コントローラ９は、軌道５を走行する搬送車３に搬送指令を送信する。搬送指令には、移動先の処理装置に対応する載置部、バッファに対応する第一棚モジュール３０の第一棚板３３又は第二棚モジュール４０の第二棚板４３が含まれる。パージコントローラ９０と搬送コントローラ９とは、第二主配線７０Ｂによって接続されている。本実施形態の搬送コントローラ９は、パージコントローラ９０からエラー信号を取得すると、当該エラー信号を出力する原因となった第二棚板４３を目的地とする搬送指令を出力することを禁止する。 The transport controller 9 transmits a transport command to the transport vehicle 3 traveling on the track 5 . The transfer command includes the first shelf board 33 of the first shelf module 30 or the second shelf board 43 of the second shelf module 40 corresponding to the placement section corresponding to the destination processing apparatus and the buffer. The purge controller 90 and the transport controller 9 are connected by the second main wiring 70B. When receiving an error signal from the purge controller 90, the transport controller 9 of the present embodiment prohibits outputting a transport command whose destination is the second shelf board 43 that caused the output of the error signal.
　次に、搬送車３によって第二棚モジュール４０の第二棚板４３にまで搬送されてきた容器Ｆに対してパージ処理が開始されるまでの流れを、主に図５を参照しながら説明する。 Next, the flow up to the start of the purge process for the container F transported to the second shelf plate 43 of the second shelf module 40 by the transport vehicle 3 will be described mainly with reference to FIG. .
　パージコントローラ９０は、到着センサ８９によって搬送車３の到着を検知する（ステップＳ１）。搬送車３は、搬送指令によって指定された第二棚板４３に到着すると、容器Ｆの下降を開始させ（ステップＳ２）、第二棚板４３に着座させる（ステップＳ３）。本実施形態の第二棚板４３においては、容器Ｆが下降されていくと、第二棚板４３に着座する前に容器Ｆがピン４５Ａ，４５Ｂ，４５Ｃに接触し、容器Ｆはピン４５Ａ，４５Ｂ，４５Ｃに案内されながら第二棚板４３に着座（容器Ｆの注入口Ｆａとパージノズル５１とが接続）する。 The purge controller 90 detects arrival of the transport vehicle 3 by the arrival sensor 89 (step S1). When the transport vehicle 3 reaches the second shelf board 43 specified by the transport command, the transport vehicle 3 starts lowering the container F (step S2) and seats it on the second shelf board 43 (step S3). In the second shelf plate 43 of the present embodiment, when the container F is lowered, the container F contacts the pins 45A, 45B, and 45C before being seated on the second shelf plate 43, and the container F moves toward the pins 45A and 45C. It is seated on the second shelf plate 43 while being guided by 45B and 45C (the injection port Fa of the container F and the purge nozzle 51 are connected).
　パージコントローラ９０は、在荷センサ５９における検知結果に基づいて電磁バルブ８２を制御し、容器Ｆの吸引を開始する（ステップＳ４）。なお、パージコントローラ９０は、到着センサ８９によって搬送車３の到着が検知されてから容器Ｆが第二棚板４３に着座されるまでの間に、電磁バルブ８２を制御し、容器Ｆの吸引を開始してもよい。次に、パージコントローラ９０は、パージノズル５１と注入口Ｆａとの接続状態の良否を検出する（ステップＳ５）。より詳細には、パージコントローラ９０は、吸着部８０の吸引口８１における容器Ｆの吸着状態に基づいて接続状態を検出する。本実施形態のパージコントローラ９０は、取得した圧力計８３の圧力値が第一閾値以上であれば、パージノズル５１と注入口Ｆａとの接続状態が良好であると判定する。パージコントローラ９０は、パージノズル５１と注入口Ｆａとの接続状態が良好であると判定すると（Ｓ５：ＹＥＳ）、ＭＦＣ５５を制御して容器Ｆにガスを供給する（ステップＳ６）。すなわち、パージコントローラ９０は、パージ処理を開始する。 The purge controller 90 controls the electromagnetic valve 82 based on the detection result of the load sensor 59 to start sucking the container F (step S4). The purge controller 90 controls the electromagnetic valve 82 to suck the container F from when the arrival sensor 89 detects the arrival of the transport vehicle 3 until the container F is seated on the second shelf plate 43. may start. Next, the purge controller 90 detects whether the connection between the purge nozzle 51 and the inlet Fa is good or bad (step S5). More specifically, the purge controller 90 detects the connection state based on the adsorption state of the container F at the suction port 81 of the adsorption section 80 . The purge controller 90 of the present embodiment determines that the connection state between the purge nozzle 51 and the injection port Fa is good if the obtained pressure value of the pressure gauge 83 is equal to or greater than the first threshold value. When the purge controller 90 determines that the connection between the purge nozzle 51 and the inlet Fa is good (S5: YES), it controls the MFC 55 to supply gas to the container F (step S6). That is, the purge controller 90 starts purge processing.
　パージコントローラ９０は、パージノズル５１と注入口Ｆａとの接続状態が良好でないと判定すると（Ｓ５：ＮＯ）、加振装置８７を制御して加振装置８７を作動させる（ステップＳ１１）。その後、パージコントローラ９０は、吸着部８０の吸引口８１における容器Ｆの吸着状態に基づいて接続状態を検出する（ステップＳ１２）。ここで、パージコントローラ９０は、取得した圧力計８３の圧力値が第一閾値以上であれば、パージノズル５１と注入口Ｆａとの接続状態が良好であると判定する。パージコントローラ９０は、パージノズル５１と注入口Ｆａとの接続状態が良好であると判定すると（Ｓ１２：ＹＥＳ）、加振装置８７を制御して加振装置８７の作動を停止させる（ステップＳ１３）。次に、パージコントローラ９０は、ＭＦＣ５５を制御して容器Ｆにガスを供給する（ステップＳ６）。 When the purge controller 90 determines that the connection state between the purge nozzle 51 and the injection port Fa is not good (S5: NO), it controls the vibrating device 87 to operate it (step S11). After that, the purge controller 90 detects the connection state based on the suction state of the container F at the suction port 81 of the suction section 80 (step S12). Here, if the acquired pressure value of the pressure gauge 83 is equal to or greater than the first threshold value, the purge controller 90 determines that the connection state between the purge nozzle 51 and the inlet Fa is good. When the purge controller 90 determines that the connection state between the purge nozzle 51 and the injection port Fa is good (S12: YES), it controls the vibrating device 87 to stop the operation of the vibrating device 87 (step S13). Next, the purge controller 90 controls the MFC 55 to supply gas to the container F (step S6).
　一方、パージコントローラ９０は、ステップＳ１２においてパージノズル５１と注入口Ｆａとの接続状態が不良であると判定すると（Ｓ１２：ＮＯ）、加振装置８７によって振動を加える状態を継続させる（ステップＳ１４：ＮＯ）。パージコントローラ９０は、加振装置８７による振動状態を所定時間以上続けても、パージノズル５１と注入口Ｆａとの接続状態が不良であると判定され続ける（タイムアウト）と（ステップＳ１４：ＹＥＳ）、加振装置８７を制御して加振装置８７の作動を停止させる（ステップＳ１５）。次に、パージコントローラ９０は、エラー信号を出力する（ステップＳ１６）。エラー信号を取得した搬送コントローラ９は、作業者にエラーを報知したり、当該エラー信号を出力する原因となった第二棚板４３を目的地とする搬送指令を出力することを禁止したりする。 On the other hand, when the purge controller 90 determines in step S12 that the connection state between the purge nozzle 51 and the inlet Fa is bad (S12: NO), the vibration device 87 continues to apply vibration (step S14: NO). ). If the purge controller 90 continues to determine that the connection state between the purge nozzle 51 and the injection port Fa is bad (timeout) even if the vibration state by the vibrating device 87 continues for a predetermined time or longer (step S14: YES), the purge controller 90 The vibrating device 87 is controlled to stop the operation of the vibrating device 87 (step S15). Next, the purge controller 90 outputs an error signal (step S16). The transport controller 9 that has acquired the error signal notifies the operator of the error, or prohibits outputting a transport command with the second shelf board 43 that caused the output of the error signal as the destination. .
　次に、第二棚モジュール４０の第二棚板４３においてパージ処理中の容器が搬送車３によって搬出されるまでの流れを、主に図６を参照しながら説明する。 Next, mainly referring to FIG. 6, the flow until the container being purged on the second shelf plate 43 of the second shelf module 40 is carried out by the transport vehicle 3 will be described.
　パージコントローラ９０は、到着センサ８９によって搬送車３の到着が検知された場合（ステップＳ３１）、ＭＦＣ５５を制御して、容器Ｆに対するパージ処理を停止する。なお、到着センサ８９によって搬送車３の到着が検知されるまでの間に、当該パージ処理は停止されていてもよい。パージコントローラ９０は、電磁バルブ８２を制御し、容器Ｆの吸引を停止する（ステップＳ３２）。次に、パージコントローラ９０は、取得した圧力計８３の圧力値が第二閾値以下であるか否かを検出する（ステップＳ３３）。 When the arrival sensor 89 detects the arrival of the transport vehicle 3 (step S31), the purge controller 90 controls the MFC 55 to stop purging the container F. The purge process may be stopped until arrival of the transport vehicle 3 is detected by the arrival sensor 89 . The purge controller 90 controls the electromagnetic valve 82 to stop the suction of the container F (step S32). Next, the purge controller 90 detects whether the acquired pressure value of the pressure gauge 83 is equal to or less than the second threshold (step S33).
　パージコントローラ９０は、取得した圧力計８３の圧力値が第二閾値以下であると判定すると（Ｓ３３：ＹＥＳ）、その旨を搬送コントローラ９に送信し、搬送車３に容器Ｆを把持させて（ステップＳ３４）、容器Ｆを上昇させる（ステップＳ３５）。これにより、容器Ｆが吸引口８１に吸着された状態で、搬送車３によって容器Ｆが持ち上げられることがなくなるので、容器Ｆ等の破損を防止できる。容器Ｆの上昇が完了した搬送車３は、搬送コントローラ９の搬送指令の目的地に向かって出発する（ステップＳ３６）。 When the purge controller 90 determines that the acquired pressure value of the pressure gauge 83 is equal to or less than the second threshold value (S33: YES), the purge controller 90 transmits that effect to the transport controller 9, and causes the transport vehicle 3 to grip the container F ( Step S34), and raise the container F (step S35). As a result, the container F is prevented from being lifted by the transport vehicle 3 while being sucked by the suction port 81, thereby preventing damage to the container F and the like. After completing the lifting of the container F, the transport vehicle 3 departs for the destination indicated by the transport command from the transport controller 9 (step S36).
　一方、パージコントローラ９０は、取得した圧力計８３の圧力値が第二閾値より大きいと判定すると（Ｓ３３：ＮＯ）、圧力計８３の圧力値の監視を継続する（ステップＳ４１：ＮＯ）。パージコントローラ９０は、圧力計８３の圧力値が所定時間の経過後も、第二閾値以下にならないと判定（タイムアウト）すると（Ｓ４１：ＹＥＳ）、エラー信号を出力する（ステップＳ４２）。エラー信号を取得した搬送コントローラ９は、作業者にエラーを報知したり、当該エラー信号を出力する原因となった第二棚板４３を出発地とする搬送指令を出力することを禁止したりする。 On the other hand, when the purge controller 90 determines that the acquired pressure value of the pressure gauge 83 is greater than the second threshold value (S33: NO), it continues monitoring the pressure value of the pressure gauge 83 (step S41: NO). When the purge controller 90 determines (timeout) that the pressure value of the pressure gauge 83 does not become equal to or less than the second threshold even after the elapse of the predetermined time (S41: YES), it outputs an error signal (step S42). The transport controller 9 that has acquired the error signal notifies the operator of the error, or prohibits outputting a transport command starting from the second shelf board 43 that caused the output of the error signal. .
　上記実施形態の搬送システム１００又は第二棚モジュール４０における作用効果について説明する。上記実施形態の第二棚モジュール４０では、第二棚板４３に載置される容器Ｆに振動を加えることができるので、意図しない要因によってピン４５Ａ，４５Ｂ，４５Ｃの案内途中で停止した容器Ｆを再始動させることができる。これにより、容器Ｆの注入口Ｆａがパージノズル５１に対する所定範囲内に位置するようにより確実に案内される。この結果、良好なパージ処理を実行することができる。また、この構成では、搬送車３等の移載部によって容器Ｆの載置動作をやり直すことによってパージノズル５１と注入口Ｆａとの接続状態を良好にする方法と比べて時間を短縮することができるので、処理能力の低下を抑制できる。 The effects of the transport system 100 or the second shelf module 40 of the above embodiment will be described. In the second shelf module 40 of the above-described embodiment, vibrations can be applied to the containers F placed on the second shelf plate 43. Therefore, the containers F stopped during guidance by the pins 45A, 45B, and 45C due to unintended factors can be restarted. As a result, the injection port Fa of the container F is more reliably guided to be positioned within a predetermined range with respect to the purge nozzle 51 . As a result, good purge processing can be performed. In addition, in this configuration, the time can be shortened compared to the method of improving the connection state between the purge nozzle 51 and the injection port Fa by redoing the placement operation of the container F by the transfer unit such as the transport vehicle 3 . Therefore, it is possible to suppress a decrease in processing capacity.
　上記実施形態の第二棚モジュール４０では、加振装置８７は、第二棚板４３における容器Ｆの載置面４３ａとは反対側の裏面４３ｂに設けられているので、ピン４５Ａ，４５Ｂ，４５Ｃの案内途中で停止した容器Ｆを効果的に再始動させることができる。 In the second shelf module 40 of the above embodiment, the vibrating device 87 is provided on the rear surface 43b of the second shelf plate 43 opposite to the mounting surface 43a of the container F, so that the pins 45A, 45B, 45C It is possible to effectively restart the container F stopped in the middle of guiding.
　上記実施形態の第二棚モジュール４０では、パージノズル５１と注入口Ｆａとの接続状態が不良である場合に、加振装置８７を作動させることができるので、容器Ｆの注入口Ｆａがパージノズル５１に対する所定範囲内に位置しないことを起因とするパージ処理の不具合の発生を低減することができる。 In the second shelf module 40 of the above embodiment, when the connection state between the purge nozzle 51 and the injection port Fa is defective, the vibrating device 87 can be operated. It is possible to reduce the occurrence of troubles in the purge process caused by not being positioned within the predetermined range.
　上記実施形態の第二棚モジュール４０では、吸引口８１における容器Ｆの吸着状態に基づいてパージノズル５１と注入口Ｆａとの接続状態が検出されるので、パージノズル５１と注入口Ｆａとの接続状態の良否を簡易に判定することができる。 In the second shelf module 40 of the above embodiment, the connection state between the purge nozzle 51 and the injection port Fa is detected based on the suction state of the container F at the suction port 81. Therefore, the connection state between the purge nozzle 51 and the injection port Fa is detected. Good or bad can be judged easily.
　上記実施形態の第二棚モジュール４０では、パージコントローラ９０によってパージノズル５１と注入口Ｆａとの接続状態が不良であることが検出された場合、エラー信号を出力するので、上記接続状態が不良であることを作業者に報知したり、当該エラー信号に基づいて各種処理を実行することができる。 In the second shelf module 40 of the above embodiment, when the purge controller 90 detects that the connection state between the purge nozzle 51 and the injection port Fa is bad, an error signal is output. This can be notified to the operator, and various processes can be executed based on the error signal.
　上記実施形態の搬送システム１００では、搬送コントローラ９がパージコントローラ９０からエラー信号を取得した場合、エラーが検出されたパージノズル５１が設けられた第二棚板４３への容器Ｆの移載を禁止するので、不具合のあるパージノズル５１が設けられた第二棚板４３へ容器Ｆが載置されることを防止できる。 In the transport system 100 of the above-described embodiment, when the transport controller 9 acquires an error signal from the purge controller 90, the container F is prohibited from being transferred to the second shelf plate 43 provided with the purge nozzle 51 in which the error has been detected. Therefore, it is possible to prevent the container F from being placed on the second shelf plate 43 provided with the defective purge nozzle 51 .
　以上、一実施形態について説明したが、本発明の一側面は、上記実施形態に限られない。発明の趣旨を逸脱しない範囲で種々の変更が可能である。 Although one embodiment has been described above, one aspect of the present invention is not limited to the above embodiment. Various modifications are possible without departing from the gist of the invention.
　上記実施形態では、第二棚板４３に二つのパージノズル５１が設けられる例（すなわち、二つの載置部が設けられる例）を挙げて説明したが、一つの載置部が設けられてもよいし、三つ以上の載置部が設けられてもよい。 In the above embodiment, an example in which two purge nozzles 51 are provided on the second shelf plate 43 (that is, an example in which two mounting portions are provided) has been described, but one mounting portion may be provided. However, three or more mounting portions may be provided.
　上記実施形態及び変形例では、パージノズル５１と注入口Ｆａとの接続状態が吸引口８１に生じる圧力値によって判定される例を挙げて説明したが、第二棚板４３に配置された複数のセンサの検知結果又はカメラ等の画像に基づいて判定してもよい。また、第二棚板４３に容器Ｆからガスを排出する排出ポートと排出ポートにおける流速の検知部とが設けられる構成では、パージコントローラ９０は、当該検知部によって取得される流速値に基づいてパージノズル５１と注入口Ｆａとの接続状態の良否を判定してもよい。この場合、吸引口８１が周囲に配置されたパージノズル５１に代えて、周囲にベローズが配置されたノズル又は載置部が金属で形成されたノズルが設けられてもよい。 In the above-described embodiment and modification, the connection state between the purge nozzle 51 and the injection port Fa is determined by the pressure value generated at the suction port 81. However, the plurality of sensors arranged on the second shelf plate 43 may be determined based on the detection result of or the image of a camera or the like. In addition, in a configuration in which the second shelf plate 43 is provided with a discharge port for discharging gas from the container F and a flow velocity detector at the discharge port, the purge controller 90 controls the purge nozzle based on the flow velocity value acquired by the detector. The quality of the connection state between 51 and injection port Fa may be determined. In this case, instead of the purge nozzle 51 around which the suction port 81 is arranged, a nozzle around which a bellows is arranged or a nozzle whose mounting portion is made of metal may be provided.
　上記実施形態及び変形例では、加振装置８７が第二棚板４３の裏面４３ｂに固定される例を挙げて説明したが、例えば、容器Ｆを載置する際に邪魔とならないような第二棚板４３の載置面４３ａに設けられてもよいし、吊りフレーム１０の一部に設けられてもよい。 In the above-described embodiment and modified example, an example in which the vibrating device 87 is fixed to the back surface 43b of the second shelf plate 43 has been described. It may be provided on the mounting surface 43 a of the shelf board 43 or may be provided on a part of the suspension frame 10 .
　上記実施形態及び変形例では、天井から吊り下げられる構成の保管棚１に本発明の一側面を適用する例を挙げて説明したが、例えば、パージストッカ等に装備される、地面に設置される保管棚等に本発明の一側面を適用してもよい。 In the above embodiments and modifications, an example of applying one aspect of the present invention to the storage shelf 1 configured to be suspended from the ceiling has been described. One aspect of the present invention may be applied to a storage shelf or the like.
　上記実施形態及び変形例では、搬送装置の一例として天井に設けられた軌道５を走行する搬送車３を例に挙げて説明したが、地上を走行するスタッカクレーンのような搬送車であってもよい。 In the above-described embodiment and modified example, the transport vehicle 3 traveling on the track 5 provided on the ceiling has been described as an example of the transport apparatus. good.
　１…保管棚（パージ装置）、３…搬送車、５…軌道、７…負圧源、９…搬送コントローラ（搬送制御部）、４３…第二棚板（載置部）、４３ａ…載置面、４３ｂ…裏面、４５Ａ，４５Ｂ，４５Ｃ…ピン（ガイド部）、５０…パージ設備、５１…パージノズル、５９…在荷センサ、８０…吸着部、８１…吸引口、８２…電磁バルブ、８３…圧力計、８７…加振装置、８９…到着センサ、９０…パージコントローラ（検出部・パージ制御部）、１００…搬送システム。 DESCRIPTION OF SYMBOLS 1... Storage shelf (purge device), 3... Transport vehicle, 5... Track, 7... Negative pressure source, 9... Transport controller (transport control section), 43... Second shelf plate (placement part), 43a... Placement Surface 43b... Back side 45A, 45B, 45C... Pin (guide part) 50... Purge equipment 51... Purge nozzle 59... Inventory sensor 80... Adsorption part 81... Suction port 82... Electromagnetic valve 83... Pressure gauge 87 Vibration device 89 Arrival sensor 90 Purge controller (detector/purge control unit) 100 Conveying system.

Claims (6)

  1. 　パージノズルに格納容器の注入口が位置合わせされることによって、前記格納容器の内部にパージガスを供給するパージ装置であって、
    　前記格納容器が載置される載置部であって、前記パージノズルが設けられている前記載置部と、
    　前記載置部に配置される部材であって、前記載置部に前記格納容器が載置されるときに前記パージノズルに先行して前記格納容器に接触し、前記注入口が前記パージノズルに対する所定範囲内に位置するように前記格納容器を案内するガイド部と、
    　前記載置部に載置された前記格納容器に振動を加える加振装置と、を備える、パージ装置。     A purge device for supplying a purge gas to the interior of the containment vessel by aligning an inlet of the containment vessel with a purge nozzle,
    a mounting section on which the storage container is mounted, the mounting section being provided with the purge nozzle;
    A member arranged on the mounting portion, which contacts the storage container prior to the purge nozzle when the storage container is mounted on the mounting portion, and the injection port is positioned within a predetermined range with respect to the purge nozzle. a guide portion for guiding the containment vessel to be positioned within;
    and a vibrating device that applies vibration to the storage container mounted on the mounting section.
  2. 　前記加振装置は、前記載置部における前記格納容器の載置面とは反対側の面に設けられている、請求項１記載のパージ装置。 The purge device according to claim 1, wherein the vibrating device is provided on the surface of the mounting portion opposite to the mounting surface of the containment vessel.
  3. 　前記パージノズルと前記注入口との接続状態の良否を検出する検出部と、
    　前記検出部の検出結果に応じて前記加振装置を作動させるパージ制御部と、を更に備える、請求項１又は２記載のパージ装置。     a detection unit that detects whether the connection between the purge nozzle and the inlet is good or bad;
    3. The purge device according to claim 1, further comprising a purge control section that operates said vibrating device according to the detection result of said detection section.
  4. 　前記載置部に配置されると共に、前記格納容器を吸着する吸着部を更に備え、
    　前記検出部は、前記吸着部における前記格納容器の吸着状態に基づいて前記接続状態を検出する、請求項３記載のパージ装置。     Further comprising an adsorption unit arranged on the placement unit and adsorbing the containment vessel,
    4. The purge device according to claim 3, wherein said detection unit detects said connection state based on a suction state of said containment vessel in said suction unit.
  5. 　前記パージ制御部は、前記検出部によって前記接続状態が不良であることが検出された場合、エラー信号を出力する、請求項３又は４記載のパージ装置。 5. The purge device according to claim 3 or 4, wherein said purge control section outputs an error signal when said detection section detects that said connection state is unsatisfactory.
  6. 　請求項５記載のパージ装置と、
    　前記載置部との間で前記格納容器を移載可能な搬送装置と、
    　前記搬送装置を制御する搬送制御部と、を備え、
    　前記搬送制御部は、前記エラー信号を取得した場合、前記エラーが検出された前記パージノズルが設けられた前記載置部への前記格納容器の移載を禁止する、搬送システム。     a purge device according to claim 5;
    a transport device capable of transferring the storage container to and from the placement unit;
    A transport control unit that controls the transport device,
    The transport system, wherein the transport control unit, when acquiring the error signal, prohibits the transfer of the storage container to the mounting unit provided with the purge nozzle in which the error has been detected.
PCT/JP2021/046106 2021-01-21 2021-12-14 Purge device and transport system WO2022158174A1 (en)

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