WO2016129170A1 - Purge device, purge stocker, and purge abnormality detection method - Google Patents

Purge device, purge stocker, and purge abnormality detection method Download PDF

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Publication number
WO2016129170A1
WO2016129170A1 PCT/JP2015/084020 JP2015084020W WO2016129170A1 WO 2016129170 A1 WO2016129170 A1 WO 2016129170A1 JP 2015084020 W JP2015084020 W JP 2015084020W WO 2016129170 A1 WO2016129170 A1 WO 2016129170A1
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WIPO (PCT)
Prior art keywords
purge
flow rate
control device
flow
container
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PCT/JP2015/084020
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French (fr)
Japanese (ja)
Inventor
真司 大西
直樹 藤井
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村田機械株式会社
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Publication of WO2016129170A1 publication Critical patent/WO2016129170A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Definitions

  • the present invention relates to a purge device, a purge stocker, and a purge abnormality detection method.
  • Containers such as FOUP, SMIF Pod, and reticle Pod that contain wafers or reticles are filled with a purge gas such as clean dry air or nitrogen gas by a purging device during storage to suppress contamination or oxidation of the contents.
  • a purge gas such as clean dry air or nitrogen gas by a purging device during storage to suppress contamination or oxidation of the contents.
  • This purge device is known to be provided in a purge stocker for storing containers.
  • a purge abnormality occurs, such as insufficient supply of purge gas by the purge device, contamination of the contents occurs. Therefore, a technique for measuring the flow rate of the purge gas supplied to the container and detecting the purge abnormality has been proposed.
  • Patent Document 1 the flow rate of the purge gas supplied to the inside of the container is measured by a sensor to determine whether or not good purge is being performed.
  • Patent Document 1 in the method of using a dedicated flow rate measurement unit for determining whether the purge is good or bad, the number of parts constituting the unit such as a sensor is increased, the configuration is complicated, and the apparatus cost is increased. There is a problem of rising. Further, in the configuration in which the sensor of the flow rate measurement unit is arranged for each shelf in the purge stocker, there is a problem that an arrangement space for the sensor or the like is required and the stocker becomes large.
  • the present invention has been made in view of the above-described circumstances, a purge apparatus, a purge stocker, and a purge abnormality capable of easily and reliably detecting a purge abnormality and suppressing an increase in apparatus cost.
  • An object is to provide a detection method.
  • the purge device of the present invention includes a flow rate control device that controls the flow rate of purge gas in a pipe connected to the vessel, and a determination unit that determines whether the vessel is purged based on an output signal of the flow rate control device.
  • the flow control device also includes a flow control valve that adjusts the flow rate of the purge gas in the pipe, and a flow meter that measures the flow rate of the purge gas in the flow control valve, and detects the state of the flow control valve or the flow meter as an output signal. A signal indicating the result may be output. Further, the flow control device may output an applied voltage to the flow control valve as an output signal, and the determination unit may determine that the purge is defective when the applied voltage is lower than a predetermined value.
  • the determination unit may determine whether the purge is good or bad by comparing the detection result of the flow meter with a predetermined value when the opening degree of the flow control valve is set to a predetermined value. Further, the flow control device may output an output signal in response to an output command from the determination unit.
  • the purge stocker of the present invention includes the purge device described above and a shelf that holds containers purged by the purge device.
  • the determination unit determines whether the container is purged based on the output signal of the flow rate control device that controls the flow rate of the purge gas, an increase in the number of sensors used to detect purge abnormality is increased. Can be suppressed. In addition, since an increase in the number of sensors used for detecting an abnormality in purge can be suppressed, an increase in apparatus cost can be suppressed.
  • the flow rate control device includes a flow rate control valve that adjusts the flow rate of the purge gas in the pipe, and a flow meter that measures the flow rate of the purge gas in the flow rate control valve, and detects the state of the flow rate control valve or the flow meter as an output signal. In the case of outputting a signal indicating the result, it is possible to perform the pass / fail determination of the purge based on the state of the flow control valve or the detection result of the flow meter.
  • the flow control device outputs the applied voltage to the flow control valve as an output signal, and the determination unit determines that the purge is defective when the applied voltage is lower than a predetermined value. Is compared with a predetermined value to determine whether or not the purge is defective, so that the quality determination can be performed easily and with high accuracy.
  • the determination unit compares the detection result of the flow meter with the predetermined value to determine whether the purge is good or not. Since the pass / fail determination is performed by comparing the flow rate with respect to the predetermined value, the pass / fail determination can be performed easily and with high accuracy. Further, when the flow control device outputs an output signal in response to an output command from the determination unit, it is possible to determine whether the purge is good or not at an arbitrary timing.
  • the purge stocker of the present invention it is possible to suppress an increase in apparatus cost due to the installation of the purge apparatus, and it is possible to prevent an increase in the size of the stocker because an increase in the arrangement space of the sensor is suppressed.
  • whether the purge is good or bad is determined based on the output signal of the flow rate control device that controls the flow rate of the purge gas, so that the purge abnormality can be detected easily and reliably. Can do.
  • FIG. 1A is a diagram illustrating an example of a purge stocker 1 according to the present embodiment
  • FIG. 1B is a diagram illustrating an example of a container F and a purge device 4.
  • the purge stocker 1 is an automatic warehouse that stores a container F that stores articles such as wafers or reticles used for manufacturing semiconductor elements.
  • the container F is, for example, FOUP, SMIF Pod, reticle Pod, or the like.
  • a purge stocker 1 includes a housing 2, a plurality of storage shelves 3, a plurality of purge devices 4, a stacker crane 5 as a transfer device, a control device 6, an input unit 7, and a display unit. 8 is provided.
  • the housing 2 has an internal space 2a that can be isolated from the outside.
  • the housing 2 includes an entry / exit port (not shown) through which the container F is delivered between the outside of the housing 2 and the internal space 2a.
  • the plurality of storage shelves 3, the plurality of purge devices 4, and the stacker crane 5 are arranged in the internal space 2 a of the housing 2.
  • the control device 6 controls the purge device 4 and the stacker crane 5.
  • the control apparatus which controls the purge apparatus 4 and the control apparatus which controls the stacker crane 5 may be provided separately.
  • the stacker crane 5 can transport the container F in each of the X direction, the Y direction, and the Z direction. For example, the stacker crane 5 can be moved between the storage port 3 and the storage shelf 3 or from the storage shelf 3 to another storage shelf 3.
  • the container F can be conveyed.
  • the stacker crane 5 includes, for example, a traveling carriage 10, a support pillar 11, a support base 12, and a transfer device 13.
  • the traveling carriage 10 has a plurality of wheels 14 and moves in a horizontal direction (X direction) along a rail 15 provided on the bottom surface of the housing 2.
  • the support pillar 11 is provided extending in the vertical direction (Z direction) from the upper surface of the traveling carriage 10.
  • the support base 12 is supported by the support pillar 11 and is slidable in the Z direction along the support pillar 11.
  • the transfer device 13 includes, for example, an extendable arm portion and a placement portion on which the container F can be placed on the upper surface.
  • the container F is transported by holding the flange F (see FIG. 1 (b)) provided at the upper part of the container F and suspending and transporting the container F, for example. It may be one that grips and conveys the side surface of F.
  • FIG. 1 (b) the flange F
  • the storage shelves 3 are arranged in a plurality of stages in the height direction (Z direction), and arranged in a plurality of rows in the horizontal direction (X direction).
  • a container F can be placed on each of the plurality of storage shelves 3.
  • pins 20 are provided on the upper surface of the storage shelf 3 and are used for positioning the container F.
  • FIG. 1B shows an example of the FOUP, and the container F includes a box-shaped main body portion 21 having an opening 21a and a lid portion 22 that closes the opening 21a. Articles such as wafers are accommodated in the internal Fa of the container F through the openings 21a.
  • the main body 21 includes a positioning recess 23 on the bottom surface side.
  • the recess 23 is, for example, a groove that extends radially from the center of the bottom surface of the main body 21.
  • a pin (not shown) provided in the mounting table of the transfer device 13 enters the concave portion 23 to perform positioning when the container F is transported.
  • the storage shelf 3 has a notch (not shown) through which the mounting table of the transfer device 13 can pass in the vertical direction.
  • the transfer device 13 transfers the container F onto the upper surface of the storage shelf 3 by moving the mounting table from the upper side to the lower side of the storage shelf 3 through the notch. At that time, the container F is positioned with respect to the storage shelf 3 by inserting the pin 20 of the storage shelf 3 into the recess 23.
  • the main body 21 includes a gas introduction port 24, a check valve 25, an exhaust port 26, and a check valve 27 on the bottom surface side.
  • the introduction port 24 and the exhaust port 26 communicate with the inside Fa and the outside of the main body portion 21, respectively.
  • the check valves 25 and 27 are provided at the introduction port 24 and the exhaust port 26, respectively.
  • the purge device 4 includes a supply nozzle 30, an exhaust nozzle 31, a flow rate control device 32, and a determination unit 33.
  • the supply nozzle 30 and the exhaust nozzle 31 are provided on the upper surface of the storage shelf 3.
  • the supply nozzle 30 and the exhaust nozzle 31 are arranged so as to be connected to the introduction port 24 and the exhaust port 26, respectively, when the container F is placed on the storage shelf 3.
  • the inlet 24 of the container F is connected to the pipe 34 via the supply nozzle 30 and further connected to the purge gas source 40 via the flow rate control device 32.
  • the exhaust nozzle 31 is connected to a purge gas exhaust path (purge gas exhaust 41) via a pipe 35.
  • the purge gas source 40 supplies a gas inert to the stored article, such as nitrogen gas, as the purge gas.
  • the purge gas is selected according to the article accommodated in the container F. For example, a gas that suppresses oxidation of the article, suppresses molecular contamination, etc., or a gas that reduces moisture in the container F is used.
  • nitrogen gas or clean dry air (CDA) is used as the purge gas.
  • the purge gas source 40 may be a part of the purge stocker 1 or a device outside the purge stocker 1. For example, equipment in a factory where the purge stocker 1 is disposed may be used. .
  • the purge gas from the purge gas source 40 is supplied to the internal Fa from the inlet 24 of the container F via the flow rate control device 32 and the pipe 34 and is filled into the internal Fa of the container F. Further, the gas in the internal Fa is discharged from the exhaust port 26 to the outside of the container F, and is exhausted to the outside by the purge gas exhaust 41 through the pipe 35.
  • the purge gas exhaust 41 may be provided with a device for sucking gas by a pump or the like.
  • the flow control device 32 is a mass flow controller, for example, and controls the flow rate of the purge gas supplied from the purge gas source 40 to the supply nozzle 30 by controlling the flow rate of the purge gas in the pipe 34.
  • the flow control device 32 is communicably connected to the control device 6, and the control device 6 supplies a flow rate setting value to the flow control device 32.
  • the flow rate control device 32 controls the purge gas flow rate to approach the set value.
  • FIG. 2 is a diagram illustrating an example of the flow rate control device 32.
  • the flow control device 32 includes connection portions 50 and 51, a pipe line 52, a flow meter 53, a flow control valve 54, and a control circuit 55.
  • the connection parts 50 and 51 are fluid joints, for example.
  • the connection part 50 is connected to the purge gas source 40 via the pipe 36, and the connection part 51 is connected to the supply nozzle 30 via the pipe 34.
  • the inside of the pipe line 52 is a flow path that connects the connection part 50 and the connection part 51.
  • the pipeline 52 branches into a flow rate measurement unit 56 and a bypass unit 57.
  • the flow rate measurement unit 56 is a capillary tube or the like, and merges with the bypass unit 57 via the position of the flow meter 53.
  • the bypass unit 57 is provided with a laminar flow element 58, and the purge gas that has been formed into a laminar flow by the laminar flow element 58 flows into the flow rate measurement unit 56.
  • the flow rate ratio (diversion ratio) between the flow rate in the flow rate measurement unit 56 and the flow rate in the bypass unit 57 is determined in advance. By detecting the flow rate in the flow rate measurement unit 56 and using the above flow rate ratio, The flow rate can be measured.
  • the flow control valve 54 is provided on the downstream side of the bypass portion 57 in the pipe line 52.
  • the flow rate control valve 54 adjusts the flow rate of the purge gas that flows to the connection portion 50 via the pipe line 52.
  • the flow control valve 54 is an electromagnetic valve or the like, and the opening degree (flow path cross-sectional area) changes according to the applied voltage. For example, when the applied voltage is minimum (eg, 0), the flow rate control valve 54 is in a closed state (eg, fully closed) with the minimum opening, and the opening increases as the applied voltage increases.
  • the flow meter 53 measures the flow rate in the pipe line 52 by detecting the flow rate in the flow rate measurement unit 56.
  • the flow meter 53 is, for example, a thermal flow meter (thermal flow meter), and includes resistors 60 and 61 provided in the flow rate measurement unit 56, a bridge circuit 62, and an amplifier 63.
  • the resistors 60 and 61 are self-heating resistors, and the resistor 60 is provided on the upstream side of the resistor 61.
  • the resistors 60 and 61 are connected to the bridge circuit 62, respectively.
  • the bridge circuit 62 detects a difference in resistance value due to a temperature difference between the resistors 60 and 61.
  • the bridge circuit 62 is connected to the amplifier 63 and outputs a signal indicating a difference between the resistance values of the resistors 60 and 61, that is, a signal corresponding to the flow rate in the flow rate measuring unit 56 to the amplifier 63.
  • the amplifier 63 amplifies the signal output from the bridge circuit 62.
  • the flow meter 53 converts the flow rate in the flow rate measurement unit 56 in accordance with the flow rate ratio between the flow rate measurement unit 56 and the bypass unit 57, and generates a flow rate signal indicating the flow rate (for example, liter per minute) in the pipeline 52. Generate.
  • the flow meter 53 outputs a flow signal to the control circuit 55.
  • the control circuit 55 controls the flow rate in the pipe line 52 by controlling the voltage applied to the flow rate control valve 54 to control the opening degree of the flow rate control valve 54.
  • the control circuit 55 feedback-controls the flow rate control valve 54 so that the flow rate in the pipe line 52 approaches the set value using the detected value of the flow rate by the flow meter 53.
  • the control circuit 55 increases the applied voltage to the flow rate control valve 54 so that the flow rate increases when the detected value is smaller than the set value of the flow rate, and the flow rate when the detected value is larger than the set value of the flow rate.
  • the voltage applied to the flow rate control valve 54 is decreased so that the value decreases.
  • the conversion unit that converts the flow rate in the flow rate measurement unit 56 into the flow rate in the pipe line 52 may be provided in the control circuit 55 or may be a part of the flow meter 53.
  • the flow meter 53 is, for example, a Coriolis flow meter or a nozzle flow meter.
  • the flow control device 32 covers the power consumed by the flow meter 53, the control circuit 55, the flow control valve 54, and the like by the power from the power source 65.
  • the flow control device 32 includes a power supply circuit that adjusts the current value or voltage value of the power supplied from the power supply 65, and power is supplied from this power supply circuit to each part of the flow control device 32.
  • the control circuit 55 controls the flow rate control valve 54 by adjusting the voltage of power supplied from the power supply circuit to the flow rate control valve 54, for example.
  • the power supply circuit described above may be provided in the control circuit 55 or may be provided separately from the control circuit 55.
  • the flow rate control device 32 receives a flow rate setting signal that defines a flow rate setting value from the control device 6 and controls the flow rate to approach the set value.
  • the flow rate control device 32 receives various operation commands from the control device 6 and performs various operations.
  • the operation command includes, for example, a command for controlling on / off of the flow control device 32, a command for specifying the state (eg, opening) of the flow control valve 54, a command for requesting output of various output signals from the flow control device 32, and the like. It is.
  • the output signal of the flow rate control device 32 is, for example, a flow rate signal indicating a detected value of the flow rate in the pipe line 52, a status signal indicating the state (eg, applied voltage, opening degree) of the flow rate control valve 54, or the like.
  • a flow rate signal indicating a detected value of the flow rate in the pipe line 52
  • a status signal indicating the state (eg, applied voltage, opening degree) of the flow rate control valve 54, or the like.
  • the flow control device 32 receives an operation command for outputting a signal
  • the flow control device 32 outputs an output signal to the control device 6 as a response to the operation command.
  • the input unit 7 and the display unit 8 are connected to the control device 6.
  • the input unit 7 is, for example, an operation panel, a touch panel, a keyboard, a mouse, a trackball, or the like.
  • the input unit 7 detects an input from the operator and supplies the input information to the control device 6.
  • the operator can set and change the flow rate of the purge gas by operating the input unit 7.
  • the display unit 8 is a liquid crystal display, for example, and displays an image supplied from the control device 6.
  • the control device 6 causes the display unit 8 to display an operation status of the purge stocker 1, various settings, an image showing the purge status, and the like.
  • the determination unit 33 determines whether or not the container F is purged based on the output signal of the flow rate control device 32.
  • the control device 6 causes the display unit 8 to display the determination result of the determination unit 33.
  • the display unit 8 functions as a notification unit 66 that notifies the determination result of the determination unit 33.
  • the notification unit 66 may not be the display unit 8, and may notify the determination result by, for example, a change in color or blinking of light emitted from a light source such as an LED, or notify the determination result by sound or the like. May be. Further, the determination unit 33 may leave a determination result such as when and which purge device 4 has a purge failure in the log, and in this case, the notification unit 66 may not be provided.
  • the determination unit 33 determines whether the purge is good or not based on, for example, a status signal or a flow signal output from the flow controller 32.
  • the flow control device 32 outputs a signal indicating the applied voltage to the flow control valve 54 as the status signal, and the determination unit 33 determines pass / fail by comparing the applied voltage with a predetermined value (threshold value).
  • the control device 6 sends a command requesting the output of the applied voltage of the flow control valve 54 to the flow control device 32, and the flow control device 32 sends a signal indicating the applied voltage as a response to this command.
  • the determination unit 33 may be formed separately from the control device 6 instead of being formed in the control device 6.
  • FIG. 3A shows an example when the purge is normal.
  • the time t0 is a time before the container F scheduled to be connected to the purge device 4 (hereinafter referred to as a container scheduled to be connected) is transported to the stacker crane 5, and the purge device 4 enters a standby state at the time t0. ing.
  • the flow control valve is in a closed state with an applied voltage of 0.
  • Time t1 is the time when the purge device 4 starts supplying the purge gas.
  • the time t1 is, for example, a time at which the container F scheduled to be connected starts to be transported from the loading / unloading port.
  • the control device 6 sends a command for starting transport to the stacker crane 5 and sends an operation command (command) for starting supply of purge gas to the purge device 4.
  • the flow control device 32 controls the flow rate of the purge gas so that the applied voltage of the flow rate control valve 54 becomes V ⁇ b> 1 and the purge gas with the set flow rate is supplied to the supply nozzle 30.
  • Time t2 is the time when the container F is connected to the purge device 4.
  • the flow rate decreases due to pressure loss when purge gas flows from the supply nozzle 30 into the interior Fa of the container F, so the flow rate control device 32 increases the applied voltage to the flow rate control valve 54 to V2.
  • the internal pressure of the container F increases as the purge gas is charged, and the flow rate control device 32 applies the voltage applied to the flow rate control valve 54 so as to compensate for the decrease in the flow rate due to the increase in the internal pressure of the container F.
  • the time t3 is a time when the purge gas is filled in the container F, and after time t3, the applied voltage is stabilized at V3 as the amount of purge gas flowing into and out of the container F balances.
  • FIG. 3B shows an example in which the purge is abnormal due to poor connection between the container F and the purge device 4.
  • the applied voltage becomes a value less than V2 (eg, V1) due to leakage of the purge gas from the supply nozzle 30 to the outside of the container F.
  • FIG. 3C shows an example in which clogging or the like occurs in the piping 34 between the flow control device 32 and the supply nozzle 30 and the purge is abnormal.
  • the applied voltage becomes V4 higher than V3, for example.
  • the pipe 36 between the flow control device 32 and the purge gas source 40 is clogged because the amount of flow into the flow control device 32 is insufficient.
  • FIG. 3D shows an example in which clogging or the like has occurred in the pipe 35 on the exhaust side of the container F and the purge is abnormal.
  • the purge gas is not easily discharged from the container F after the time t3.
  • the internal pressure of the container F rises and the applied voltage rises.
  • the determination unit 33 determines whether or not the purge is normal (purge quality determination) based on the change in the applied voltage as described above. For example, the determination unit 33 determines that the purge is abnormal (bad) when the applied voltage is less than a predetermined value after time t2. For example, the predetermined value is set to a voltage larger than V1 and smaller than V2. In this case, the determination unit 33 can determine whether the purge is a normal purge (see FIG. 3A) or an abnormal purge (see FIG. 3B). In this way, the determination unit 33 can determine an abnormality in the supply of pargas to the container F.
  • the time at which the determination unit 33 performs the determination is determined, for example, by adding a margin to the time from the start of the conveyance of the container F to the completion. For example, when the time required for transporting the container F is 30 seconds and the margin is 30 seconds, the determination unit 33 performs pass / fail determination using the applied voltage one minute after the start of transport.
  • the determination unit 33 may determine that the purge is abnormal (bad) when the applied voltage after time t3 exceeds a predetermined value with respect to the threshold value exceeding V3. In this case, the determination unit 33 can determine whether the purge is a normal purge or an abnormal purge shown in FIG. 3C or 3D.
  • the determination unit 33 may perform purge determination (abnormality detection) using two or more types of predetermined values. For example, the determination unit 33 compares the predetermined value larger than V1 and smaller than V2 with the applied voltage after time t2 to detect the purge abnormality as shown in FIG. 3B, and is larger than V3. And the applied voltage after time t3 may be compared to detect a purge abnormality as shown in FIGS. 3C and 3D.
  • the determination unit 33 can also perform pass / fail determination by comparing the detection result of the flow meter 53 with a predetermined value.
  • the control device 6 sends a command requesting to fix the opening degree of the flow control valve 54 to a predetermined value to the flow control device 32. Further, the control device 6 sends a command for requesting the output of the detection value of the flow rate by the flow meter 53 to the flow control device 32, and the flow control device 32 outputs a flow rate signal indicating the detection value of the flow rate as a response to this command. Output to the control device 6.
  • FIG. 4A shows an example when the purge is normal (corresponding to FIG. 3A).
  • the flow rate is, for example, 0 in the standby state at time t0, and becomes Q3 when the supply of purge gas by the flow rate control device 32 is started at time t1.
  • the flow rate decreases to Q2 due to pressure loss.
  • the flow rate decreases due to an increase in the internal pressure of the container F due to the filling of the purge gas.
  • the flow rate is stabilized at Q1 after time t3 when the purge gas is filled.
  • FIG. 4B is an example of the case where the purge is abnormal due to poor connection between the container F and the purge device 4 (corresponding to FIG. 3B).
  • the flow rate becomes a value larger than Q2 (eg, Q3) even after time t2 (when the container F and the purge device 4 are connected) due to leakage of the purge gas.
  • FIG. 4C is an example of a case where clogging or the like has occurred in the piping 34 between the flow control device 32 and the supply nozzle 30 and the purge is abnormal (corresponding to FIG. 3C). .
  • the purge gas since the purge gas hardly flows due to clogging from time t1, the value becomes lower than Q3 (eg, 0).
  • FIG. 4D shows an example in which clogging or the like occurs in the exhaust pipe 35 of the container F and the purge is abnormal (corresponding to FIG. 3D).
  • the purge is normal (see FIG. 4A), but the purge gas is not easily discharged from the container F after time t3. As a result, the flow rate is reduced.
  • the determination unit 33 determines whether or not the purge is normal (purge quality determination) based on the change in the detected value of the flow rate as described above. For example, the determination unit 33 determines that the purge is abnormal (bad) when the detected value of the flow rate exceeds a predetermined value after time t2. For example, the predetermined value is set to a flow rate that is larger than Q1 and smaller than Q2. In this case, the determination unit 33 can determine whether the purge is a normal purge (see FIG. 4A) or an abnormal purge (see FIG. 4B).
  • the determination unit 33 may determine that the purge is abnormal (bad) when the flow after time t3 is smaller than the predetermined value with respect to the predetermined value smaller than Q1. In this case, the determination unit 33 can determine whether the purge is a normal purge or an abnormal purge shown in FIG. 4C or 4D.
  • the predetermined value may be one kind or two or more kinds as in the case where the applied voltage is used.
  • parameters used for pass / fail judgment may be affected by pressure fluctuations upstream of the flow rate control device 32.
  • the supply pressure to the flow rate control device 32 varies depending on the operation status (number of operating units) of the other purge devices 4, and as a result, the applied voltage changes.
  • a plurality of types of predetermined values corresponding to the operating status of the purge device 4 may be prepared in advance, and the predetermined values may be switched according to the operating status when the pass / fail determination is performed.
  • a pressure adjustment valve may be provided on the upstream side of the flow control valve 54 to suppress pressure fluctuation on the upstream side of the flow control valve 54.
  • FIG. 5A is a flowchart showing an example of the purge abnormality detection method according to the present embodiment.
  • the control device 6 causes the purge device 4 to start supplying purge gas.
  • the flow control device 32 controls the flow rate of the purge gas.
  • step S ⁇ b> 3 first, the control device 6 sends a command requesting an output signal to the flow rate control device 32.
  • the determination unit 33 acquires the output signal of the flow control device 32.
  • the determination unit 33 determines the quality of the purge based on the output signal by the method described with reference to FIG. 3 or FIG.
  • reports the result of a quality determination, for example by displaying a determination result.
  • FIG. 5B is a flowchart showing a modification of the purge abnormality detection method.
  • the process of step S10 is a process following steps S1 to S3 shown in FIG.
  • the determination unit 33 determines whether or not the purge is normal (good / bad determination), for example, as in step S4 of FIG.
  • the notification unit 66 notifies the determination result in step S5. If the determination unit 33 determines that the purge is normal (step S10; Yes), the notification unit 66 ends the series of processes without reporting the determination result.
  • the notification unit 66 may notify the determination result only when it is determined that the purge is not normal (abnormal or defective).
  • FIG. 6 is a flowchart showing another modified example of the purge abnormality detection method
  • FIG. 7 is a diagram showing the operation of the purge stocker 1 corresponding to FIG.
  • the flowchart of FIG. 6 will be described with reference to FIG. 7 as appropriate.
  • the symbol Fx indicates the container F when it is determined that the purge is abnormal.
  • the process of step S20 is a process following steps S1 to S3 shown in FIG.
  • the determination unit 33 determines whether the purge is normal, for example, similarly to step S4 in FIG.
  • the control device 6 ends the series of processes.
  • step S20 When the determination unit 33 determines that the purge is not normal (step S20; No), the control device 6 reconnects the container F to the purge device 4 by the stacker crane 5 in step S21. As shown in FIG. 7, the stacker crane 5 lifts the container Fx from the storage shelf 3 and places it on the storage shelf 3 again. Next, in step S ⁇ b> 22, the control device 6 purges the container Fx by the purge device 4 after the container Fx and the purge device 4 are reconnected. Next, in step S23, the determination unit 33 determines whether the purge in step S22 is normal, for example, similarly to step S4 in FIG. When the determination unit 33 determines that the purge is normal (step S23; Yes), the control device 6 ends the series of processes.
  • step S24 determines in step S24 whether the retry (the processing of steps S21 to S23) has been completed up to a specified number of times. .
  • the control device 6 performs the processing of steps S21 to S23 again.
  • the control device 6 causes the notification unit 66 to notify the result of the pass / fail determination in step S5 and ends the series of processes.
  • the purge device 4 is provided for each storage shelf 3 as shown in FIG. 1, but may not be provided for some storage shelves 3.
  • the purge device 4 may be provided in one or a plurality of storage shelves 3 (one-stage storage shelf group) arranged in the X direction or the Z direction.
  • the stacker crane 5 places the container F on the storage shelf 3 having the purge device 4, and the purge device 4 sets the container F purged by the purge device 4. It may be placed on a storage shelf 3 that is not present. Further, the purge device 4 may be provided in addition to the storage shelf 3.
  • the container F does not need to have a check valve in at least one of the introduction port 24 and the exhaust port 26.
  • a filter may be provided in the introduction port 24 instead of the check valve 25.
  • the container F and the purge device 4 are connected, the flow rate changes due to the pressure loss in the filter, and the applied voltage of the flow control valve 54 corresponding to the flow rate change or the flow rate detection by the flow meter 53 is detected.
  • a pass / fail judgment can be made using a value or the like.
  • the flow control device 32 may be one in which the flow control valve 54 is fully opened when the applied voltage is minimum, and the opening degree of the flow control valve 54 decreases as the applied voltage increases. In this case, the predetermined value used for the pass / fail determination is changed according to the change of the applied voltage. Further, the flow control device 32 may be one that outputs various output signals from the control circuit 55, or may be one that can be output from a component different from the control circuit 55. For example, the flow controller 32 may be one in which the flow meter 53 outputs a flow signal.

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Abstract

[Problem] To provide a purge device with which the increase of the number of sensors to be used for the purpose of detecting purge abnormality can be suppressed. [Solution] Provided is a purge device (4) that is equipped with: a flow rate control device 32 that controls the flow rate of a purge gas in piping 34 connected to a container F; and a determining unit 33 that determines whether purging with respect to the container F is acceptable or not on the basis of an output signal of the flow rate control device 32.

Description

パージ装置、パージストッカ、及びパージ異常検出方法Purge apparatus, purge stocker, and purge abnormality detection method
　本発明は、パージ装置、パージストッカ、及びパージ異常検出方法に関する。 The present invention relates to a purge device, a purge stocker, and a purge abnormality detection method.
　ウェハまたはレチクルなどを収容するＦＯＵＰ、ＳＭＩＦ　Ｐｏｄ、レチクルＰｏｄなどの容器は、保管に際してパージ装置により容器内に清浄乾燥空気または窒素ガスなどのパージガスを充填し、収容物の汚染または酸化などを抑制している。このパージ装置は、容器を保管するためのパージストッカに備えられることが知られている。パージ装置によるパージガスの供給が不足するなどパージの異常が発生すると、収容物の汚染等が生じるため、容器へ供給されるパージガスの流量を測定し、パージの異常を検出する技術が提案されている（例えば、特許文献１参照）。特許文献１では、容器内部に供給されるパージガスの流量をセンサにより測定し、良好なパージが行われているかを判定している。 Containers such as FOUP, SMIF Pod, and reticle Pod that contain wafers or reticles are filled with a purge gas such as clean dry air or nitrogen gas by a purging device during storage to suppress contamination or oxidation of the contents. ing. This purge device is known to be provided in a purge stocker for storing containers. When a purge abnormality occurs, such as insufficient supply of purge gas by the purge device, contamination of the contents occurs. Therefore, a technique for measuring the flow rate of the purge gas supplied to the container and detecting the purge abnormality has been proposed. (For example, refer to Patent Document 1). In Patent Document 1, the flow rate of the purge gas supplied to the inside of the container is measured by a sensor to determine whether or not good purge is being performed.
特許第４６７０８０８号明細書Japanese Patent No. 4670808
　特許文献１に示すように、パージの良否判定のために、専用の流量測定ユニットを用いる手法では、センサ等のユニットを構成する部品数が多くなり、構成が複雑になるばかりか、装置コストが上昇するといった問題がある。また、パージストッカにおいて棚ごとに流量測定ユニットのセンサを配置する構成では、センサ等の配置スペースが必要となり、ストッカが大型化するといった問題がある。 As shown in Patent Document 1, in the method of using a dedicated flow rate measurement unit for determining whether the purge is good or bad, the number of parts constituting the unit such as a sensor is increased, the configuration is complicated, and the apparatus cost is increased. There is a problem of rising. Further, in the configuration in which the sensor of the flow rate measurement unit is arranged for each shelf in the purge stocker, there is a problem that an arrangement space for the sensor or the like is required and the stocker becomes large.
　本発明は、上述の事情に鑑みなされたものであり、パージの異常を容易かつ確実に検出することができ、かつ装置コストの上昇を抑止することが可能なパージ装置、パージストッカ、及びパージ異常検出方法を提供することを目的とする。 The present invention has been made in view of the above-described circumstances, a purge apparatus, a purge stocker, and a purge abnormality capable of easily and reliably detecting a purge abnormality and suppressing an increase in apparatus cost. An object is to provide a detection method.
　本発明のパージ装置は、容器に接続される配管におけるパージガスの流量を制御する流量制御装置と、流量制御装置の出力信号に基づいて、容器に対するパージの良否判定を行う判定部と、を備える。 The purge device of the present invention includes a flow rate control device that controls the flow rate of purge gas in a pipe connected to the vessel, and a determination unit that determines whether the vessel is purged based on an output signal of the flow rate control device.
　また、判定部の判定結果を報知する報知部を備えてもよい。また、流量制御装置は、配管におけるパージガスの流量を調整する流量制御バルブと、流量制御バルブにおけるパージガスの流量を測定する流量計と、を備え、出力信号として流量制御バルブの状態または流量計の検出結果を示す信号を出力してもよい。また、流量制御装置は、流量制御バルブへの印加電圧を出力信号として出力し、判定部は、印加電圧が所定値より低い場合にパージが不良であると判定してもよい。また、判定部は、流量制御バルブの開度が所定値に設定されている際に、流量計の検出結果を所定値と比較してパージの良否判定を行ってもよい。また、流量制御装置は、判定部からの出力指令に応じて出力信号を出力してもよい。 Moreover, you may provide the alerting | reporting part which alert | reports the determination result of a determination part. The flow control device also includes a flow control valve that adjusts the flow rate of the purge gas in the pipe, and a flow meter that measures the flow rate of the purge gas in the flow control valve, and detects the state of the flow control valve or the flow meter as an output signal. A signal indicating the result may be output. Further, the flow control device may output an applied voltage to the flow control valve as an output signal, and the determination unit may determine that the purge is defective when the applied voltage is lower than a predetermined value. The determination unit may determine whether the purge is good or bad by comparing the detection result of the flow meter with a predetermined value when the opening degree of the flow control valve is set to a predetermined value. Further, the flow control device may output an output signal in response to an output command from the determination unit.
　また、本発明のパージストッカは、上記したパージ装置と、このパージ装置によりパージされた容器を保持する棚と、を備える。 The purge stocker of the present invention includes the purge device described above and a shelf that holds containers purged by the purge device.
　また、本発明のパージ異常検出方法は、容器に接続される配管におけるパージガスの流量を流量制御装置により制御するステップと、流量制御装置の出力信号に基づいて、容器に対するパージの良否判定を行うステップと、を含む。 In the purge abnormality detection method of the present invention, the step of controlling the flow rate of the purge gas in the pipe connected to the vessel by the flow rate control device, and the step of judging pass / fail of the purge based on the output signal of the flow rate control device And including.
　本発明のパージ装置によれば、パージガスの流量を制御する流量制御装置の出力信号に基づいて、判定部が容器に対するパージの良否判定を行うので、パージの異常の検出に用いられるセンサの増加を抑えることができる。また、パージの異常検出に用いられるセンサの増加を抑えることができるので、装置コストが上昇するのを抑制できる。 According to the purge device of the present invention, since the determination unit determines whether the container is purged based on the output signal of the flow rate control device that controls the flow rate of the purge gas, an increase in the number of sensors used to detect purge abnormality is increased. Can be suppressed. In addition, since an increase in the number of sensors used for detecting an abnormality in purge can be suppressed, an increase in apparatus cost can be suppressed.
　また、判定部の判定結果を報知する報知部を備えるものでは、パージの判定結果をオペレータ等が容易に判断することができる。また、流量制御装置が、配管におけるパージガスの流量を調整する流量制御バルブと、流量制御バルブにおけるパージガスの流量を測定する流量計と、を備え、出力信号として流量制御バルブの状態または流量計の検出結果を示す信号を出力するものでは、流量制御バルブの状態または流量計の検出結果に基づいてパージの良否判定を行うことができるので、良否判定を精度よく行うことができる。また、流量制御装置が、流量制御バルブへの印加電圧を出力信号として出力し、判定部が、印加電圧が所定値より低い場合にパージが不良であると判定するものでは、流量制御バルブの状態を示す印加電圧を所定値と比較してパージが不良であるか否かを判定するので、良否判定を容易かつ高精度に行うことができる。また、判定部は、流量制御バルブの開度が所定値に設定されている際に、流量計の検出結果を所定値と比較してパージの良否判定を行うものでは、流量制御バルブの開度に対する流量を所定値と比較することにより良否判定を行うので、良否判定を容易かつ高精度に行うことができる。また、流量制御装置が、判定部からの出力指令に応じて出力信号を出力するものでは、任意のタイミングでパージの良否判定を行うことができる。 In addition, in the case of including a notification unit that notifies the determination result of the determination unit, an operator or the like can easily determine the purge determination result. Further, the flow rate control device includes a flow rate control valve that adjusts the flow rate of the purge gas in the pipe, and a flow meter that measures the flow rate of the purge gas in the flow rate control valve, and detects the state of the flow rate control valve or the flow meter as an output signal. In the case of outputting a signal indicating the result, it is possible to perform the pass / fail determination of the purge based on the state of the flow control valve or the detection result of the flow meter. The flow control device outputs the applied voltage to the flow control valve as an output signal, and the determination unit determines that the purge is defective when the applied voltage is lower than a predetermined value. Is compared with a predetermined value to determine whether or not the purge is defective, so that the quality determination can be performed easily and with high accuracy. In addition, when the opening of the flow control valve is set to a predetermined value, the determination unit compares the detection result of the flow meter with the predetermined value to determine whether the purge is good or not. Since the pass / fail determination is performed by comparing the flow rate with respect to the predetermined value, the pass / fail determination can be performed easily and with high accuracy. Further, when the flow control device outputs an output signal in response to an output command from the determination unit, it is possible to determine whether the purge is good or not at an arbitrary timing.
　また、本発明パージストッカによれば、パージ装置の設置により装置コストが高くなることを抑制でき、かつ、センサの配置スペースの増加を抑えるので、ストッカが大型化するのを防止できる。 Further, according to the purge stocker of the present invention, it is possible to suppress an increase in apparatus cost due to the installation of the purge apparatus, and it is possible to prevent an increase in the size of the stocker because an increase in the arrangement space of the sensor is suppressed.
　また、本発明のパージ異常検出方法によれば、パージガスの流量を制御する流量制御装置の出力信号に基づいて、容器に対するパージの良否判定を行うので、容易かつ確実にパージの異常を検出することができる。 In addition, according to the purge abnormality detection method of the present invention, whether the purge is good or bad is determined based on the output signal of the flow rate control device that controls the flow rate of the purge gas, so that the purge abnormality can be detected easily and reliably. Can do.
本実施形態に係るパージ装置を備えるパージストッカの一例を示す図である。It is a figure which shows an example of a purge stocker provided with the purge apparatus which concerns on this embodiment. 流量制御装置の一例を示す図である。It is a figure which shows an example of a flow control apparatus. パージが行われる際の印加電圧の時間変化の一例を示す図である。It is a figure which shows an example of the time change of the applied voltage at the time of purging. パージが行われる際の流量の検出値の時間変化の一例を示す図である。It is a figure which shows an example of the time change of the detected value of the flow volume at the time of purging. 本実施形態に係るパージ異常検出方法の一例を示すフローチャートである。It is a flowchart which shows an example of the purge abnormality detection method which concerns on this embodiment. 異常判定方法の変形例を示すフローチャートである。It is a flowchart which shows the modification of an abnormality determination method. 図６に対応するパージストッカの動作を示す図である。It is a figure which shows the operation | movement of the purge stocker corresponding to FIG.
　以下、実施形態について図面を参照しながら説明する。また、図面においては実施形態を説明するため、一部分を大きくまたは強調して記載するなど適宜縮尺を変更して表現している。以下の各図において、ＸＹＺ座標系を用いて図中の方向を説明する。このＸＹＺ座標系においては、鉛直方向をＺ方向とし、水平方向をＸ方向、Ｙ方向とする。Ｘ方向、Ｙ方向及びＺ方向のそれぞれは、図中の矢印の方向が＋方向であり、矢印の方向とは反対の方向が－方向であるものとして説明する。 Hereinafter, embodiments will be described with reference to the drawings. Further, in the drawings, in order to describe the embodiment, the scale is appropriately changed and expressed by partially enlarging or emphasizing the description. In the following drawings, directions in the drawings will be described using an XYZ coordinate system. In this XYZ coordinate system, the vertical direction is the Z direction, and the horizontal direction is the X direction and the Y direction. In each of the X direction, the Y direction, and the Z direction, the direction of the arrow in the figure is the + direction, and the direction opposite to the arrow direction is the − direction.
　図１（Ａ）は、本実施形態に係るパージストッカ１の一例を示す図、図１（Ｂ）は容器Ｆおよびパージ装置４の一例を示す図である。パージストッカ１は、例えば、半導体素子の製造に用いられるウェハまたはレチクルなどの物品を収容する容器Ｆを保管する自動倉庫である。容器Ｆは、例えば、ＦＯＵＰ、ＳＭＩＦ　Ｐｏｄ、レチクルＰｏｄなどである。 FIG. 1A is a diagram illustrating an example of a purge stocker 1 according to the present embodiment, and FIG. 1B is a diagram illustrating an example of a container F and a purge device 4. The purge stocker 1 is an automatic warehouse that stores a container F that stores articles such as wafers or reticles used for manufacturing semiconductor elements. The container F is, for example, FOUP, SMIF Pod, reticle Pod, or the like.
　図１（Ａ）に示すように、パージストッカ１は、筐体２、複数の保管棚３、複数のパージ装置４、搬送装置としてのスタッカクレーン５、制御装置６、入力部７、及び表示部８を備える。筐体２は、外部に対して隔離可能な内部空間２ａを有する。筐体２は、筐体２の外部と内部空間２ａとで容器Ｆが受け渡される入出庫ポート（図示せず）を備えている。複数の保管棚３、複数のパージ装置４、及びスタッカクレーン５は、筐体２の内部空間２ａに配置されている。制御装置６は、パージ装置４およびスタッカクレーン５を制御する。なお、パージ装置４を制御する制御装置と、スタッカクレーン５を制御する制御装置とが別に設けられていてもよい。 As shown in FIG. 1A, a purge stocker 1 includes a housing 2, a plurality of storage shelves 3, a plurality of purge devices 4, a stacker crane 5 as a transfer device, a control device 6, an input unit 7, and a display unit. 8 is provided. The housing 2 has an internal space 2a that can be isolated from the outside. The housing 2 includes an entry / exit port (not shown) through which the container F is delivered between the outside of the housing 2 and the internal space 2a. The plurality of storage shelves 3, the plurality of purge devices 4, and the stacker crane 5 are arranged in the internal space 2 a of the housing 2. The control device 6 controls the purge device 4 and the stacker crane 5. In addition, the control apparatus which controls the purge apparatus 4 and the control apparatus which controls the stacker crane 5 may be provided separately.
　スタッカクレーン５は、Ｘ方向、Ｙ方向、及びＺ方向の各方向に容器Ｆを搬送可能であり、例えば、入出庫ポートと保管棚３との間、または保管棚３から他の保管棚３に容器Ｆを搬送可能である。スタッカクレーン５は、例えば、走行台車１０、支持柱１１、支持台１２、及び移載装置１３を備える。走行台車１０は、複数の車輪１４を有し、筐体２の底面に設けられたレール１５に沿って水平方向（Ｘ方向）に移動する。 The stacker crane 5 can transport the container F in each of the X direction, the Y direction, and the Z direction. For example, the stacker crane 5 can be moved between the storage port 3 and the storage shelf 3 or from the storage shelf 3 to another storage shelf 3. The container F can be conveyed. The stacker crane 5 includes, for example, a traveling carriage 10, a support pillar 11, a support base 12, and a transfer device 13. The traveling carriage 10 has a plurality of wheels 14 and moves in a horizontal direction (X direction) along a rail 15 provided on the bottom surface of the housing 2.
　支持柱１１は、走行台車１０の上面から鉛直方向（Ｚ方向）に延びて設けられる。支持台１２は、支持柱１１に支持され、支持柱１１に沿ってＺ方向にスライド可能に設けられる。移載装置１３は、例えば、伸縮可能なアーム部と、上面に容器Ｆを載置可能な載置部と、を備える。なお、容器Ｆの搬送は、スタッカクレーン５に代えて、例えば容器Ｆの上部に備えるフランジ部２８（図１（ｂ）参照）を把持して、容器Ｆを吊り下げて搬送するもの、または容器Ｆの側面を把持して搬送するものでもよい。また、図１には１台のスタッカクレーン５を図示したが、筐体２内に配置されるスタッカクレーン５は２台以上であってもよい。 The support pillar 11 is provided extending in the vertical direction (Z direction) from the upper surface of the traveling carriage 10. The support base 12 is supported by the support pillar 11 and is slidable in the Z direction along the support pillar 11. The transfer device 13 includes, for example, an extendable arm portion and a placement portion on which the container F can be placed on the upper surface. In addition, instead of the stacker crane 5, the container F is transported by holding the flange F (see FIG. 1 (b)) provided at the upper part of the container F and suspending and transporting the container F, for example. It may be one that grips and conveys the side surface of F. In addition, although one stacker crane 5 is illustrated in FIG. 1, two or more stacker cranes 5 may be disposed in the housing 2.
　保管棚３は、高さ方向（Ｚ方向）に複数段並んで配置され、水平方向（Ｘ方向）に複数列並んで配置されている。複数の保管棚３には、それぞれ、容器Ｆを載置可能である。図１（Ｂ）に示すように、保管棚３の上面にはピン２０が設けられ、容器Ｆの位置決めに利用される。容器Ｆは、図１（Ｂ）ではＦＯＵＰの一例を示しており、開口２１ａを有する箱状の本体部２１と、開口２１ａを塞ぐ蓋部２２とを備える。ウェハなどの物品は、開口２１ａを介して容器Ｆの内部Ｆａに収容される。本体部２１は、その底面側に、位置決め用の凹部２３を備える。凹部２３は、例えば、本体部２１の底面の中心から放射状に延びる溝である。この凹部２３には、移載装置１３の載置台に備える不図示のピンが入り込み、容器Ｆを搬送する際の位置決めを行っている。 The storage shelves 3 are arranged in a plurality of stages in the height direction (Z direction), and arranged in a plurality of rows in the horizontal direction (X direction). A container F can be placed on each of the plurality of storage shelves 3. As shown in FIG. 1B, pins 20 are provided on the upper surface of the storage shelf 3 and are used for positioning the container F. FIG. 1B shows an example of the FOUP, and the container F includes a box-shaped main body portion 21 having an opening 21a and a lid portion 22 that closes the opening 21a. Articles such as wafers are accommodated in the internal Fa of the container F through the openings 21a. The main body 21 includes a positioning recess 23 on the bottom surface side. The recess 23 is, for example, a groove that extends radially from the center of the bottom surface of the main body 21. A pin (not shown) provided in the mounting table of the transfer device 13 enters the concave portion 23 to perform positioning when the container F is transported.
　保管棚３は、移載装置１３の載置台が鉛直方向に通行可能な切り欠き（図示せず）を有する。移載装置１３は、載置台を保管棚３の上方から下方に、切り欠き部を通って移動することにより、保管棚３の上面に容器Ｆを移載する。その際、容器Ｆは、凹部２３に保管棚３のピン２０が挿入されることで、保管棚３に対して位置決めされる。本体部２１は、底面側に、ガスの導入口２４、逆止弁２５、排気口２６、及び逆止弁２７を備える。導入口２４および排気口２６は、それぞれ、本体部２１の内部Ｆａと外部と連通する。逆止弁２５、２７は、それぞれ導入口２４、排気口２６に設けられる。 The storage shelf 3 has a notch (not shown) through which the mounting table of the transfer device 13 can pass in the vertical direction. The transfer device 13 transfers the container F onto the upper surface of the storage shelf 3 by moving the mounting table from the upper side to the lower side of the storage shelf 3 through the notch. At that time, the container F is positioned with respect to the storage shelf 3 by inserting the pin 20 of the storage shelf 3 into the recess 23. The main body 21 includes a gas introduction port 24, a check valve 25, an exhaust port 26, and a check valve 27 on the bottom surface side. The introduction port 24 and the exhaust port 26 communicate with the inside Fa and the outside of the main body portion 21, respectively. The check valves 25 and 27 are provided at the introduction port 24 and the exhaust port 26, respectively.
　パージ装置４は、供給ノズル３０、排気ノズル３１、流量制御装置３２、及び判定部３３を備える。供給ノズル３０及び排気ノズル３１は、保管棚３の上面に設けられる。供給ノズル３０及び排気ノズル３１は、保管棚３に容器Ｆを載置した際に、それぞれ導入口２４、排気口２６と接続するように配置される。容器Ｆの導入口２４は、保管棚３に容器Ｆを載置した際に、供給ノズル３０を介して配管３４に接続され、さらに流量制御装置３２を介してパージガス源４０と接続される。排気ノズル３１は、配管３５を介してパージガスの排気経路（パージガス排気４１）に接続される。 The purge device 4 includes a supply nozzle 30, an exhaust nozzle 31, a flow rate control device 32, and a determination unit 33. The supply nozzle 30 and the exhaust nozzle 31 are provided on the upper surface of the storage shelf 3. The supply nozzle 30 and the exhaust nozzle 31 are arranged so as to be connected to the introduction port 24 and the exhaust port 26, respectively, when the container F is placed on the storage shelf 3. When the container F is placed on the storage shelf 3, the inlet 24 of the container F is connected to the pipe 34 via the supply nozzle 30 and further connected to the purge gas source 40 via the flow rate control device 32. The exhaust nozzle 31 is connected to a purge gas exhaust path (purge gas exhaust 41) via a pipe 35.
　パージガス源４０は、例えば窒素ガスなど、収納した物品に対して不活性なガスをパージガスとして供給する。パージガスは、容器Ｆに収容される物品に応じて選択され、例えば、物品に対する酸化抑制、分子汚染等を抑制するガス、または容器Ｆ内の水分を減少させるガスなどが用いられる。パージガスは、窒素ガスまたは清浄乾燥空気（ＣＤＡ）などが用いられる。パージガス源４０は、パージストッカ１の一部であってもよいし、パージストッカ１の外部の装置であってもよく、例えば、パージストッカ１が配置される工場内の設備が利用されてもよい。 The purge gas source 40 supplies a gas inert to the stored article, such as nitrogen gas, as the purge gas. The purge gas is selected according to the article accommodated in the container F. For example, a gas that suppresses oxidation of the article, suppresses molecular contamination, etc., or a gas that reduces moisture in the container F is used. As the purge gas, nitrogen gas or clean dry air (CDA) is used. The purge gas source 40 may be a part of the purge stocker 1 or a device outside the purge stocker 1. For example, equipment in a factory where the purge stocker 1 is disposed may be used. .
　容器Ｆをパージする際、パージガス源４０からのパージガスは、流量制御装置３２および配管３４を介して、容器Ｆの導入口２４から内部Ｆａに供給され、容器Ｆの内部Ｆａに充填される。また、内部Ｆａのガスは、排気口２６から容器Ｆの外部に排出され、配管３５を介してパージガス排気４１により外部に排気される。なお、パージガス排気４１は、ポンプなどによりガスを吸引する装置が設けられてよい。 When purging the container F, the purge gas from the purge gas source 40 is supplied to the internal Fa from the inlet 24 of the container F via the flow rate control device 32 and the pipe 34 and is filled into the internal Fa of the container F. Further, the gas in the internal Fa is discharged from the exhaust port 26 to the outside of the container F, and is exhausted to the outside by the purge gas exhaust 41 through the pipe 35. The purge gas exhaust 41 may be provided with a device for sucking gas by a pump or the like.
　流量制御装置３２は、例えばマスフローコントローラであり、配管３４におけるパージガスの流量を制御することにより、パージガス源４０から供給ノズル３０へ供給されるパージガスの流量を制御する。流量制御装置３２は、制御装置６と通信可能に接続され、制御装置６は、流量制御装置３２に流量の設定値を供給する。流量制御装置３２は、パージガスの流量を設定値に近づけるように制御する。 The flow control device 32 is a mass flow controller, for example, and controls the flow rate of the purge gas supplied from the purge gas source 40 to the supply nozzle 30 by controlling the flow rate of the purge gas in the pipe 34. The flow control device 32 is communicably connected to the control device 6, and the control device 6 supplies a flow rate setting value to the flow control device 32. The flow rate control device 32 controls the purge gas flow rate to approach the set value.
　図２は、流量制御装置３２の一例を示す図である。流量制御装置３２は、接続部５０、５１、管路５２、流量計５３、流量制御バルブ５４、及び制御回路５５を備える。接続部５０、５１は、例えば流体継ぎ手である。接続部５０は、配管３６を介してパージガス源４０と接続され、接続部５１は配管３４を介して供給ノズル３０と接続される。 FIG. 2 is a diagram illustrating an example of the flow rate control device 32. The flow control device 32 includes connection portions 50 and 51, a pipe line 52, a flow meter 53, a flow control valve 54, and a control circuit 55. The connection parts 50 and 51 are fluid joints, for example. The connection part 50 is connected to the purge gas source 40 via the pipe 36, and the connection part 51 is connected to the supply nozzle 30 via the pipe 34.
　管路５２は、その内部が、接続部５０と接続部５１とを結ぶ流路になっている。管路５２は、流量測定部５６とバイパス部５７とに分岐している。流量測定部５６は、キャピラリ管などであり、流量計５３の位置を経由してバイパス部５７と合流している。バイパス部５７は、層流素子５８が設けられ、流量測定部５６には、層流素子５８により層流状になったパージガスが流れる。流量測定部５６における流量とバイパス部５７における流量との流量比（分流比）は予め定められており、流量測定部５６における流量を検出し、上記の流量比を用いることで、管路５２における流量を測定することができる。 The inside of the pipe line 52 is a flow path that connects the connection part 50 and the connection part 51. The pipeline 52 branches into a flow rate measurement unit 56 and a bypass unit 57. The flow rate measurement unit 56 is a capillary tube or the like, and merges with the bypass unit 57 via the position of the flow meter 53. The bypass unit 57 is provided with a laminar flow element 58, and the purge gas that has been formed into a laminar flow by the laminar flow element 58 flows into the flow rate measurement unit 56. The flow rate ratio (diversion ratio) between the flow rate in the flow rate measurement unit 56 and the flow rate in the bypass unit 57 is determined in advance. By detecting the flow rate in the flow rate measurement unit 56 and using the above flow rate ratio, The flow rate can be measured.
　流量制御バルブ５４は、管路５２においてバイパス部５７の下流側に設けられている。流量制御バルブ５４は、管路５２を介して接続部５０へ流れるパージガスの流量を調整する。流量制御バルブ５４は、電磁弁などであり、印加電圧に応じて開度（流路断面積）が変化する。流量制御バルブ５４は、例えば、印加電圧が最小（例、０）である場合に開度が最小の閉状態（例、全閉）となり、印加電圧が増すにつれて開度が大きくなる。流量計５３は、流量測定部５６における流量を検出することにより、管路５２における流量を測定する。流量計５３は、例えば熱式流量計（サーマル式流量計）であり、流量測定部５６に設けられる抵抗６０、６１と、ブリッジ回路６２と、アンプ６３とを備える。 The flow control valve 54 is provided on the downstream side of the bypass portion 57 in the pipe line 52. The flow rate control valve 54 adjusts the flow rate of the purge gas that flows to the connection portion 50 via the pipe line 52. The flow control valve 54 is an electromagnetic valve or the like, and the opening degree (flow path cross-sectional area) changes according to the applied voltage. For example, when the applied voltage is minimum (eg, 0), the flow rate control valve 54 is in a closed state (eg, fully closed) with the minimum opening, and the opening increases as the applied voltage increases. The flow meter 53 measures the flow rate in the pipe line 52 by detecting the flow rate in the flow rate measurement unit 56. The flow meter 53 is, for example, a thermal flow meter (thermal flow meter), and includes resistors 60 and 61 provided in the flow rate measurement unit 56, a bridge circuit 62, and an amplifier 63.
　抵抗６０、６１は自己発熱型抵抗体であり、抵抗６０は、抵抗６１の上流側に設けられている。抵抗６０、６１は、それぞれ、ブリッジ回路６２と接続されている。抵抗６０、６１に電力を供給した状態で流量測定部５６にパージガスが流れると、抵抗６０から熱が奪われることにより、抵抗６０、６１に温度差が生じる。ブリッジ回路６２は、抵抗６０、６１の温度差による抵抗値の差を検出する。ブリッジ回路６２は、アンプ６３と接続されており、抵抗６０、６１の抵抗値の差を示す信号、すなわち流量測定部５６における流量に応じた信号をアンプ６３に出力する。アンプ６３は、ブリッジ回路６２から出力された信号を増幅する。流量計５３は、例えば、流量測定部５６における流量を流量測定部５６とバイパス部５７との流量比に応じて変換して、管路５２における流量（例、リットル毎分）を示す流量信号を生成する。流量計５３は、流量信号を制御回路５５に出力する。 The resistors 60 and 61 are self-heating resistors, and the resistor 60 is provided on the upstream side of the resistor 61. The resistors 60 and 61 are connected to the bridge circuit 62, respectively. When purge gas flows through the flow rate measurement unit 56 with power supplied to the resistors 60 and 61, heat is removed from the resistor 60, thereby causing a temperature difference between the resistors 60 and 61. The bridge circuit 62 detects a difference in resistance value due to a temperature difference between the resistors 60 and 61. The bridge circuit 62 is connected to the amplifier 63 and outputs a signal indicating a difference between the resistance values of the resistors 60 and 61, that is, a signal corresponding to the flow rate in the flow rate measuring unit 56 to the amplifier 63. The amplifier 63 amplifies the signal output from the bridge circuit 62. For example, the flow meter 53 converts the flow rate in the flow rate measurement unit 56 in accordance with the flow rate ratio between the flow rate measurement unit 56 and the bypass unit 57, and generates a flow rate signal indicating the flow rate (for example, liter per minute) in the pipeline 52. Generate. The flow meter 53 outputs a flow signal to the control circuit 55.
　制御回路５５は、流量制御バルブ５４への印加電圧を制御することにより、流量制御バルブ５４の開度を制御して、管路５２における流量を制御する。制御回路５５は、流量計５３による流量の検出値を用いて、管路５２における流量が設定値に近づくように流量制御バルブ５４をフィードバック制御する。例えば、制御回路５５は、流量の設定値よりも検出値が小さい場合、流量が増加するように流量制御バルブ５４への印加電圧を増加させ、流量の設定値よりも検出値が大きい場合、流量が減少するように流量制御バルブ５４への印加電圧を減少させる。なお、流量測定部５６における流量を、管路５２における流量に換算する換算部は制御回路５５に設けられてもよいし、流量計５３の一部であってもよい。また、流量計５３は、例えばコリオリ式流量計、またはノズル式流量計である。 The control circuit 55 controls the flow rate in the pipe line 52 by controlling the voltage applied to the flow rate control valve 54 to control the opening degree of the flow rate control valve 54. The control circuit 55 feedback-controls the flow rate control valve 54 so that the flow rate in the pipe line 52 approaches the set value using the detected value of the flow rate by the flow meter 53. For example, the control circuit 55 increases the applied voltage to the flow rate control valve 54 so that the flow rate increases when the detected value is smaller than the set value of the flow rate, and the flow rate when the detected value is larger than the set value of the flow rate. The voltage applied to the flow rate control valve 54 is decreased so that the value decreases. The conversion unit that converts the flow rate in the flow rate measurement unit 56 into the flow rate in the pipe line 52 may be provided in the control circuit 55 or may be a part of the flow meter 53. The flow meter 53 is, for example, a Coriolis flow meter or a nozzle flow meter.
　流量制御装置３２は、電源６５からの電力によって、流量計５３、制御回路５５、流量制御バルブ５４などで消費される電力がまかなわれる。例えば、流量制御装置３２は、電源６５から供給される電力の電流値あるいは電圧値を調整する電源回路を含み、この電源回路から流量制御装置３２の各部へ電力が供給される。制御回路５５は、例えば、電源回路から流量制御バルブ５４へ供給される電力の電圧を調整することによって、流量制御バルブ５４を制御する。なお、上記の電源回路は、制御回路５５に設けられてもよいし、制御回路５５と別に設けられてもよい。 The flow control device 32 covers the power consumed by the flow meter 53, the control circuit 55, the flow control valve 54, and the like by the power from the power source 65. For example, the flow control device 32 includes a power supply circuit that adjusts the current value or voltage value of the power supplied from the power supply 65, and power is supplied from this power supply circuit to each part of the flow control device 32. The control circuit 55 controls the flow rate control valve 54 by adjusting the voltage of power supplied from the power supply circuit to the flow rate control valve 54, for example. Note that the power supply circuit described above may be provided in the control circuit 55 or may be provided separately from the control circuit 55.
　また、流量制御装置３２は、流量の設定値を定めた流量設定信号を制御装置６から受けて、流量を設定値に近づけるように制御する。また、流量制御装置３２は、制御装置６から動作指令を受けて、各種の動作を行う。動作指令は、例えば、流量制御装置３２のオンオフを制御するコマンド、流量制御バルブ５４の状態（例、開度）を指定するコマンド、流量制御装置３２から各種の出力信号の出力を要求するコマンドなどである。流量制御装置３２の出力信号は、例えば、管路５２における流量の検出値を示す流量信号、流量制御バルブ５４の状態（例、印加電圧、開度）を示すステータス信号などである。流量制御装置３２は、例えば、信号の出力を求める動作指令を受けた場合、動作指令に対する応答として出力信号を制御装置６へ出力する。 Further, the flow rate control device 32 receives a flow rate setting signal that defines a flow rate setting value from the control device 6 and controls the flow rate to approach the set value. The flow rate control device 32 receives various operation commands from the control device 6 and performs various operations. The operation command includes, for example, a command for controlling on / off of the flow control device 32, a command for specifying the state (eg, opening) of the flow control valve 54, a command for requesting output of various output signals from the flow control device 32, and the like. It is. The output signal of the flow rate control device 32 is, for example, a flow rate signal indicating a detected value of the flow rate in the pipe line 52, a status signal indicating the state (eg, applied voltage, opening degree) of the flow rate control valve 54, or the like. For example, when the flow control device 32 receives an operation command for outputting a signal, the flow control device 32 outputs an output signal to the control device 6 as a response to the operation command.
　制御装置６には、入力部７および表示部８が接続されている。入力部７は、例えば、操作パネル、タッチパネル、キーボード、マウス、トラックボールなどである。入力部７は、オペレータからの入力を検出し、入力された情報を制御装置６に供給する。例えば、オペレータは、入力部７を操作することによりパージガスの流量などを設定、変更することができる。表示部８は、例えば液晶ディスプレイなどであり、制御装置６から供給される画像を表示する。例えば、制御装置６は、パージストッカ１の動作状況、各種設定、パージの状態を示す画像などを表示部８に表示させる。 The input unit 7 and the display unit 8 are connected to the control device 6. The input unit 7 is, for example, an operation panel, a touch panel, a keyboard, a mouse, a trackball, or the like. The input unit 7 detects an input from the operator and supplies the input information to the control device 6. For example, the operator can set and change the flow rate of the purge gas by operating the input unit 7. The display unit 8 is a liquid crystal display, for example, and displays an image supplied from the control device 6. For example, the control device 6 causes the display unit 8 to display an operation status of the purge stocker 1, various settings, an image showing the purge status, and the like.
　容器Ｆがパージ装置４に接続される際に、容器Ｆとパージ装置４との位置ずれなどにより、容器Ｆの導入口２４と供給ノズル３０との接続不良が発生する可能性がある。この場合、導入口２４と供給ノズル３０との隙間からパージガスが漏れることにより、容器Ｆの内部Ｆａに供給されるパージガスが不足し、パージ不良が発生する。また、配管３４、３５の詰まりなどが発生した場合、または容器Ｆの蓋部２２と本体部２１との隙間などからパージガスが漏れる場合にも、パージ不良が発生する。本実施形態においては、流量制御装置３２の機能を使って、パージの良否判定を行う。 When the container F is connected to the purge device 4, there is a possibility that a connection failure between the inlet 24 of the container F and the supply nozzle 30 may occur due to a positional shift between the container F and the purge device 4. In this case, the purge gas leaks from the gap between the inlet 24 and the supply nozzle 30, so that the purge gas supplied to the internal Fa of the container F becomes insufficient and a purge failure occurs. Further, when the pipings 34 and 35 are clogged, or when purge gas leaks from the gap between the lid portion 22 and the main body portion 21 of the container F, a purge failure also occurs. In the present embodiment, whether the purge is good or bad is determined using the function of the flow control device 32.
　判定部３３は、流量制御装置３２の出力信号に基づいて、容器Ｆに対するパージの良否判定を行う。制御装置６は、判定部３３の判定結果を表示部８に表示させる。表示部８は、判定部３３の判定結果を報知する報知部６６として機能する。なお、報知部６６は、表示部８でなくてもよく、例えば、ＬＥＤなどの光源の発する光の色の変化または点滅により判定結果を報知してもよいし、音などにより判定結果を報知してもよい。また、判定部３３は、例えば、いつ、どのパージ装置４でパージの不良があったか等の判定結果をログに残すものでもよく、この場合に報知部６６は設けられなくてもよい。 The determination unit 33 determines whether or not the container F is purged based on the output signal of the flow rate control device 32. The control device 6 causes the display unit 8 to display the determination result of the determination unit 33. The display unit 8 functions as a notification unit 66 that notifies the determination result of the determination unit 33. The notification unit 66 may not be the display unit 8, and may notify the determination result by, for example, a change in color or blinking of light emitted from a light source such as an LED, or notify the determination result by sound or the like. May be. Further, the determination unit 33 may leave a determination result such as when and which purge device 4 has a purge failure in the log, and in this case, the notification unit 66 may not be provided.
　判定部３３は、例えば流量制御装置３２が出力するステータス信号または流量信号に基づいて、パージの良否判定を行う。例えば、流量制御装置３２は、ステータス信号として、流量制御バルブ５４に対する印加電圧を示す信号を出力し、判定部３３は、この印加電圧と所定値（閾値）との比較により、良否判定を行う。この場合、制御装置６は、流量制御バルブ５４の印加電圧の出力を要求するコマンドを流量制御装置３２に送り、流量制御装置３２は、このコマンドへの応答として印加電圧を示す信号を制御装置６に出力する。なお、判定部３３は、制御装置６に形成されることに代えて、制御装置６とは別に形成されてもよい。 The determination unit 33 determines whether the purge is good or not based on, for example, a status signal or a flow signal output from the flow controller 32. For example, the flow control device 32 outputs a signal indicating the applied voltage to the flow control valve 54 as the status signal, and the determination unit 33 determines pass / fail by comparing the applied voltage with a predetermined value (threshold value). In this case, the control device 6 sends a command requesting the output of the applied voltage of the flow control valve 54 to the flow control device 32, and the flow control device 32 sends a signal indicating the applied voltage as a response to this command. Output to. The determination unit 33 may be formed separately from the control device 6 instead of being formed in the control device 6.
　図３（Ａ）～（Ｄ）は、パージが行われる際の印加電圧の時間変化の一例を示す図である。なお、図３（Ａ）～（Ｄ）では、流量制御装置３２よりも上流側（パージガス源４０側）における供給圧力の変動などを無視して、概念的に示している。図３（Ａ）は、パージが正常である場合の例である。時刻ｔ０は、パージ装置４に接続される予定の容器Ｆ（以下、接続予定の容器という）がスタッカクレーン５に搬送される前の時刻であり、パージ装置４は、時刻ｔ０において待機状態になっている。例えば、時刻ｔ０において、流量制御バルブは、印加電圧が０であり閉状態になっている。 3 (A) to 3 (D) are diagrams showing an example of a change in applied voltage over time when purging is performed. 3A to 3D conceptually show the fluctuation of the supply pressure on the upstream side (purge gas source 40 side) with respect to the flow rate control device 32 and the like. FIG. 3A shows an example when the purge is normal. The time t0 is a time before the container F scheduled to be connected to the purge device 4 (hereinafter referred to as a container scheduled to be connected) is transported to the stacker crane 5, and the purge device 4 enters a standby state at the time t0. ing. For example, at time t0, the flow control valve is in a closed state with an applied voltage of 0.
　時刻ｔ１は、パージ装置４がパージガスの供給を開始する時刻である。時刻ｔ１は、例えば、接続予定の容器Ｆが入出庫ポートなどから搬送開始される時刻である。例えば、時刻ｔ１において、制御装置６は、スタッカクレーン５に搬送を開始させる指令を送るとともに、パージ装置４にパージガスの供給を開始させる動作指令（コマンド）を送る。時刻ｔ１において、流量制御装置３２は、流量制御バルブ５４の印加電圧がＶ１になり、設定値の流量のパージガスが供給ノズル３０に供給されるように、パージガスの流量を制御する。 Time t1 is the time when the purge device 4 starts supplying the purge gas. The time t1 is, for example, a time at which the container F scheduled to be connected starts to be transported from the loading / unloading port. For example, at time t <b> 1, the control device 6 sends a command for starting transport to the stacker crane 5 and sends an operation command (command) for starting supply of purge gas to the purge device 4. At time t <b> 1, the flow control device 32 controls the flow rate of the purge gas so that the applied voltage of the flow rate control valve 54 becomes V <b> 1 and the purge gas with the set flow rate is supplied to the supply nozzle 30.
　時刻ｔ２は、パージ装置４に容器Ｆが接続された時刻である。時刻ｔ２において、供給ノズル３０から容器Ｆの内部Ｆａにパージガスが流入する際の圧力損失により流量が減少するので、流量制御装置３２は、流量制御バルブ５４への印加電圧をＶ２に増加させ、流量制御バルブ５４の開度を大きくして対応する。また、時刻ｔ２以降において、容器Ｆの内圧がパージガスの充填に伴って上昇し、流量制御装置３２は、容器Ｆの内圧の上昇による流量の減少を補うように、流量制御バルブ５４への印加電圧を次第に増加させる。時刻ｔ３は、容器Ｆにおいてパージガスが充満する時刻であり、時刻ｔ３以降において、容器Ｆに対するパージガスの流入量と排出量とが釣り合うことにより、印加電圧はＶ３で安定する。 Time t2 is the time when the container F is connected to the purge device 4. At time t2, the flow rate decreases due to pressure loss when purge gas flows from the supply nozzle 30 into the interior Fa of the container F, so the flow rate control device 32 increases the applied voltage to the flow rate control valve 54 to V2. Responding by increasing the opening of the control valve 54. Further, after time t2, the internal pressure of the container F increases as the purge gas is charged, and the flow rate control device 32 applies the voltage applied to the flow rate control valve 54 so as to compensate for the decrease in the flow rate due to the increase in the internal pressure of the container F. Gradually increase. The time t3 is a time when the purge gas is filled in the container F, and after time t3, the applied voltage is stabilized at V3 as the amount of purge gas flowing into and out of the container F balances.
　図３（Ｂ）は、容器Ｆとパージ装置４との接続不良により、パージが異常である場合の例である。この場合、容器Ｆとパージ装置４とが接続される時刻ｔ２以降において、供給ノズル３０から容器Ｆの外部へのパージガスの漏れにより、印加電圧はＶ２未満の値（例、Ｖ１）になる。 FIG. 3B shows an example in which the purge is abnormal due to poor connection between the container F and the purge device 4. In this case, after time t2 when the container F and the purge device 4 are connected, the applied voltage becomes a value less than V2 (eg, V1) due to leakage of the purge gas from the supply nozzle 30 to the outside of the container F.
　図３（Ｃ）は、流量制御装置３２と供給ノズル３０との間の配管３４などで詰まりなどが発生しており、パージが異常である場合の例である。この場合、流量制御装置３２がパージガスの供給を開始する時刻ｔ１から、パージガスが流れにくいため、印加電圧は、例えば、Ｖ３よりも高いＶ４になる。また、流量制御装置３２とパージガス源４０との間の配管３６に詰まりを生じている場合にも、流量制御装置３２への流入量が不足するため、同様になる。 FIG. 3C shows an example in which clogging or the like occurs in the piping 34 between the flow control device 32 and the supply nozzle 30 and the purge is abnormal. In this case, since the purge gas hardly flows from the time t1 when the flow rate control device 32 starts to supply the purge gas, the applied voltage becomes V4 higher than V3, for example. The same applies to the case where the pipe 36 between the flow control device 32 and the purge gas source 40 is clogged because the amount of flow into the flow control device 32 is insufficient.
　図３（Ｄ）は、容器Ｆの排気側の配管３５などで詰まりなどが発生しており、パージが異常である場合の例である。この場合、容器Ｆにパージガスが充満するまでの時刻ｔ３までについては、パージが正常（図３（Ａ）参照）の場合と同様であるが、時刻ｔ３以降において、容器Ｆからパージガスが排出されにくいことによって、容器Ｆの内圧が上昇し、印加電圧が上昇する。 FIG. 3D shows an example in which clogging or the like has occurred in the pipe 35 on the exhaust side of the container F and the purge is abnormal. In this case, up to time t3 until the container F is filled with the purge gas is the same as when the purge is normal (see FIG. 3A), but the purge gas is not easily discharged from the container F after the time t3. As a result, the internal pressure of the container F rises and the applied voltage rises.
　判定部３３は、上述のような印加電圧の変化により、パージが正常であるか否かの判定（パージの良否判定）を行う。例えば、判定部３３は、時刻ｔ２以降において、印加電圧が所定値未満である場合に、パージが異常（不良）であると判定する。この所定値は、例えば、Ｖ１より大きくＶ２よりも小さい電圧に設定される。この場合、判定部３３は、正常なパージ（図３（Ａ）参照）であるか、異常なパージ（図３（Ｂ）参照）であるかを判定することができる。このように、判定部３３は、容器Ｆに対するパーガスの供給の異常を判定することができる。 The determination unit 33 determines whether or not the purge is normal (purge quality determination) based on the change in the applied voltage as described above. For example, the determination unit 33 determines that the purge is abnormal (bad) when the applied voltage is less than a predetermined value after time t2. For example, the predetermined value is set to a voltage larger than V1 and smaller than V2. In this case, the determination unit 33 can determine whether the purge is a normal purge (see FIG. 3A) or an abnormal purge (see FIG. 3B). In this way, the determination unit 33 can determine an abnormality in the supply of pargas to the container F.
　判定部３３が判定を行う時刻は、例えば、容器Ｆの搬送が開始してから完了するまでの時間にマージンを加味して定められる。例えば、容器Ｆの搬送に要する時間が３０秒、マージンが３０秒である場合、判定部３３は、搬送が開始されてから１分後の印加電圧を用いて、良否判定を行う。なお、判定部３３は、Ｖ３を超える閾値に対して、時刻ｔ３以降の印加電圧が所定値を超える場合に、パージが異常（不良）であると判定してもよい。この場合に、判定部３３は、正常なパージであるか、図３（Ｃ）又は図３（Ｄ）の異常なパージであるかを判定することができる。 The time at which the determination unit 33 performs the determination is determined, for example, by adding a margin to the time from the start of the conveyance of the container F to the completion. For example, when the time required for transporting the container F is 30 seconds and the margin is 30 seconds, the determination unit 33 performs pass / fail determination using the applied voltage one minute after the start of transport. The determination unit 33 may determine that the purge is abnormal (bad) when the applied voltage after time t3 exceeds a predetermined value with respect to the threshold value exceeding V3. In this case, the determination unit 33 can determine whether the purge is a normal purge or an abnormal purge shown in FIG. 3C or 3D.
　なお、判定部３３は、２種類以上の所定値を用いてパージの判定（異常検出）を行ってもよい。例えば、判定部３３は、Ｖ１より大きくＶ２より小さい所定値と、時刻ｔ２以降の印加電圧とを比較して図３（Ｂ）のようなパージの異常を検出し、かつＶ３よりも大きい所定値と、時刻ｔ３以降の印加電圧とを比較して図３（Ｃ）、図３（Ｄ）のようなパージの異常を検出してもよい。 Note that the determination unit 33 may perform purge determination (abnormality detection) using two or more types of predetermined values. For example, the determination unit 33 compares the predetermined value larger than V1 and smaller than V2 with the applied voltage after time t2 to detect the purge abnormality as shown in FIG. 3B, and is larger than V3. And the applied voltage after time t3 may be compared to detect a purge abnormality as shown in FIGS. 3C and 3D.
　また、判定部３３は、流量計５３の検出結果と所定値とを比較して、良否判定を行うこともできる。この場合、制御装置６は、流量制御バルブ５４の開度を所定値に固定することを要求するコマンドを流量制御装置３２に送る。また、制御装置６は、流量計５３による流量の検出値の出力を要求するコマンドを流量制御装置３２に送り、流量制御装置３２は、このコマンドへの応答として流量の検出値を示す流量信号を制御装置６に出力する。 Moreover, the determination unit 33 can also perform pass / fail determination by comparing the detection result of the flow meter 53 with a predetermined value. In this case, the control device 6 sends a command requesting to fix the opening degree of the flow control valve 54 to a predetermined value to the flow control device 32. Further, the control device 6 sends a command for requesting the output of the detection value of the flow rate by the flow meter 53 to the flow control device 32, and the flow control device 32 outputs a flow rate signal indicating the detection value of the flow rate as a response to this command. Output to the control device 6.
　図４（Ａ）～（Ｄ）は、パージが行われる際の流量の検出値の時間変化の一例を示す図である。なお、図４（Ａ）～（Ｄ）では、流量制御装置３２よりも上流側（パージガス源４０側）における供給圧力の変動などを無視して、概念的に示した。図４（Ａ）は、パージが正常である場合（図３（Ａ）に対応）の例である。流量は、時刻ｔ０の待機状態において例えば０であり、時刻ｔ１に流量制御装置３２によるパージガスの供給が開始されるとＱ３になる。また、流量は、時刻ｔ２において、容器Ｆが供給ノズル３０に接続されると圧力損失によりＱ２に減少する。また、時刻ｔ２以降において、パージガスの充填による容器Ｆの内圧の上昇により、流量は減少する。また、流量は、パージガスが充満する時刻ｔ３以降において、Ｑ１に安定する。 4 (A) to 4 (D) are diagrams illustrating an example of a change over time in the detected value of the flow rate when purging is performed. 4A to 4D are conceptually shown ignoring fluctuations in supply pressure on the upstream side (purge gas source 40 side) from the flow rate control device 32. FIG. 4A shows an example when the purge is normal (corresponding to FIG. 3A). The flow rate is, for example, 0 in the standby state at time t0, and becomes Q3 when the supply of purge gas by the flow rate control device 32 is started at time t1. Further, when the container F is connected to the supply nozzle 30 at time t2, the flow rate decreases to Q2 due to pressure loss. Further, after time t2, the flow rate decreases due to an increase in the internal pressure of the container F due to the filling of the purge gas. The flow rate is stabilized at Q1 after time t3 when the purge gas is filled.
　図４（Ｂ）は、容器Ｆとパージ装置４との接続不良により、パージが異常である場合（図３（Ｂ）に対応）の例である。この場合、流量は、時刻ｔ２（容器Ｆとパージ装置４との接続時）以降においても、パージガスの漏れによりＱ２よりも多い値（例、Ｑ３）になる。 FIG. 4B is an example of the case where the purge is abnormal due to poor connection between the container F and the purge device 4 (corresponding to FIG. 3B). In this case, the flow rate becomes a value larger than Q2 (eg, Q3) even after time t2 (when the container F and the purge device 4 are connected) due to leakage of the purge gas.
　図４（Ｃ）は、流量制御装置３２と供給ノズル３０との間の配管３４などで詰まりなどが発生しており、パージが異常である場合（図３（Ｃ）に対応）の例である。この場合、時刻ｔ１から、パージガスが詰まりにより流れにくいため、Ｑ３よりも低い値（例、０）になる。 FIG. 4C is an example of a case where clogging or the like has occurred in the piping 34 between the flow control device 32 and the supply nozzle 30 and the purge is abnormal (corresponding to FIG. 3C). . In this case, since the purge gas hardly flows due to clogging from time t1, the value becomes lower than Q3 (eg, 0).
　図４（Ｄ）は、容器Ｆの排気側の配管３５などで詰まりなどが発生しており、パージが異常である場合（図３（Ｄ）に対応）の例である。この場合、容器Ｆにパージガスが充満するまでの時刻ｔ３までについては、パージが正常（図４（Ａ）参照）の場合と同様であるが、時刻ｔ３以降において、容器Ｆからパージガスが排出されにくいことによって、流量が減少する。 FIG. 4D shows an example in which clogging or the like occurs in the exhaust pipe 35 of the container F and the purge is abnormal (corresponding to FIG. 3D). In this case, until time t3 until the purge gas is filled in the container F, the purge is normal (see FIG. 4A), but the purge gas is not easily discharged from the container F after time t3. As a result, the flow rate is reduced.
　判定部３３は、上述のような流量の検出値の変化により、パージが正常であるか否かの判定（パージの良否判定）を行う。例えば、判定部３３は、時刻ｔ２以降において、流量の検出値が所定値を超える場合に、パージが異常（不良）であると判定する。この所定値は、例えば、Ｑ１より大きくＱ２よりも小さい流量に設定される。この場合、判定部３３は、正常なパージ（図４（Ａ）参照）であるか、異常なパージ（図４（Ｂ）参照）であるかを判定することができる。 The determination unit 33 determines whether or not the purge is normal (purge quality determination) based on the change in the detected value of the flow rate as described above. For example, the determination unit 33 determines that the purge is abnormal (bad) when the detected value of the flow rate exceeds a predetermined value after time t2. For example, the predetermined value is set to a flow rate that is larger than Q1 and smaller than Q2. In this case, the determination unit 33 can determine whether the purge is a normal purge (see FIG. 4A) or an abnormal purge (see FIG. 4B).
　なお、判定部３３は、Ｑ１よりも小さい所定値に対して、時刻ｔ３以降の流量が所定値よりも小さい場合に、パージが異常（不良）であると判定してもよい。この場合に、判定部３３は、正常なパージであるか、図４（Ｃ）又は図４（Ｄ）の異常なパージであるかを判定することができる。なお、所定値は、印加電圧を用いる場合と同様に、１種類であってもよいし、２種類以上であってもよい。 Note that the determination unit 33 may determine that the purge is abnormal (bad) when the flow after time t3 is smaller than the predetermined value with respect to the predetermined value smaller than Q1. In this case, the determination unit 33 can determine whether the purge is a normal purge or an abnormal purge shown in FIG. 4C or 4D. The predetermined value may be one kind or two or more kinds as in the case where the applied voltage is used.
　なお、良否判定に用いるパラメータ（例、印加電圧、流量の検出値）は、流量制御装置３２よりも上流側の圧力変動の影響を受ける場合がある。例えば、複数のパージ装置４でパージガスの供給系統が共通である場合、他のパージ装置４の動作状況（稼働台数）によって流量制御装置３２への供給圧力が変動し、その結果、印加電圧が変化することがある。この場合、例えば、パージ装置４の稼働状況に応じた複数種類の所定値を予め用意しておき、良否判定を行う際の稼働状況に応じて所定値を切り替えてもよい。また、流量制御バルブ５４の上流側に、圧力調整バルブを設けておき、流量制御バルブ５４よりも上流側における圧力変動を抑制してもよい。 It should be noted that parameters used for pass / fail judgment (eg, applied voltage, detected flow rate value) may be affected by pressure fluctuations upstream of the flow rate control device 32. For example, when the purge gas supply system is shared by a plurality of purge devices 4, the supply pressure to the flow rate control device 32 varies depending on the operation status (number of operating units) of the other purge devices 4, and as a result, the applied voltage changes. There are things to do. In this case, for example, a plurality of types of predetermined values corresponding to the operating status of the purge device 4 may be prepared in advance, and the predetermined values may be switched according to the operating status when the pass / fail determination is performed. Further, a pressure adjustment valve may be provided on the upstream side of the flow control valve 54 to suppress pressure fluctuation on the upstream side of the flow control valve 54.
　図５（Ａ）は、本実施形態に係るパージ異常検出方法の一例を示すフローチャートである。図５（Ａ）に示すように、ステップＳ１において、制御装置６は、パージ装置４にパージガスの供給を開始させる。次に、ステップＳ２において、流量制御装置３２は、パージガスの流量を制御する。次に、ステップＳ３において、先ず、制御装置６は、出力信号を要求するコマンドを流量制御装置３２に送る。流量制御装置３２が出力信号を制御装置６に出力することにより、判定部３３は、流量制御装置３２の出力信号を取得する。次に、ステップＳ４において、判定部３３は、図３あるいは図４で説明した手法により、出力信号に基づいてパージの良否判定を行う。次に、ステップＳ５において、報知部６６は、例えば判定結果を表示することにより、良否判定の結果を報知する。 FIG. 5A is a flowchart showing an example of the purge abnormality detection method according to the present embodiment. As shown in FIG. 5A, in step S1, the control device 6 causes the purge device 4 to start supplying purge gas. Next, in step S2, the flow control device 32 controls the flow rate of the purge gas. Next, in step S <b> 3, first, the control device 6 sends a command requesting an output signal to the flow rate control device 32. When the flow control device 32 outputs an output signal to the control device 6, the determination unit 33 acquires the output signal of the flow control device 32. Next, in step S4, the determination unit 33 determines the quality of the purge based on the output signal by the method described with reference to FIG. 3 or FIG. Next, in step S5, the alerting | reporting part 66 alert | reports the result of a quality determination, for example by displaying a determination result.
　図５（Ｂ）は、パージ異常検出方法の変形例を示すフローチャートである。図５（Ｂ）において、ステップＳ１０の処理は、図５（Ａ）に示したステップＳ１～Ｓ３に続く処理である。ステップＳ１０において、判定部３３は、例えば図５（Ａ）のステップＳ４と同様に、パージが正常であるか否かを判定する（良否判定する）。パージが正常でないと判定部３３が判定した場合（ステップＳ１０；Ｎｏ）、ステップＳ５において、報知部６６は、判定結果を報知する。また、パージが正常であると判定部３３が判定した場合（ステップＳ１０；Ｙｅｓ）、報知部６６が判定結果を報知することなく、一連の処理を終了する。このように、報知部６６は、パージが正常でない（異常、不良）であると判定された場合のみ、判定結果を報知してもよい。 FIG. 5B is a flowchart showing a modification of the purge abnormality detection method. In FIG. 5B, the process of step S10 is a process following steps S1 to S3 shown in FIG. In step S10, the determination unit 33 determines whether or not the purge is normal (good / bad determination), for example, as in step S4 of FIG. When the determination unit 33 determines that the purge is not normal (step S10; No), the notification unit 66 notifies the determination result in step S5. If the determination unit 33 determines that the purge is normal (step S10; Yes), the notification unit 66 ends the series of processes without reporting the determination result. Thus, the notification unit 66 may notify the determination result only when it is determined that the purge is not normal (abnormal or defective).
　図６は、パージ異常検出方法の他の変形例を示すフローチャートであり、図７は、図６に対応するパージストッカ１の動作を示す図である。図７を適宜参照しながら、図６のフローチャートを説明する。なお、図７において、符号Ｆｘは、パージが異常であると判定された際の容器Ｆを示す。図６において、ステップＳ２０の処理は、図５（Ａ）に示したステップＳ１～Ｓ３に続く処理である。ステップＳ２０において、判定部３３は、例えば図５（Ａ）のステップＳ４と同様に、パージが正常であるか否かを判定する。制御装置６は、パージが正常であると判定部３３が判定した場合（ステップＳ２０；Ｙｅｓ）、一連の処理を終了する。 FIG. 6 is a flowchart showing another modified example of the purge abnormality detection method, and FIG. 7 is a diagram showing the operation of the purge stocker 1 corresponding to FIG. The flowchart of FIG. 6 will be described with reference to FIG. 7 as appropriate. In FIG. 7, the symbol Fx indicates the container F when it is determined that the purge is abnormal. In FIG. 6, the process of step S20 is a process following steps S1 to S3 shown in FIG. In step S20, the determination unit 33 determines whether the purge is normal, for example, similarly to step S4 in FIG. When the determination unit 33 determines that the purge is normal (step S20; Yes), the control device 6 ends the series of processes.
　制御装置６は、パージが正常でないと判定部３３が判定した場合（ステップＳ２０；Ｎｏ）、ステップＳ２１において、スタッカクレーン５により容器Ｆをパージ装置４に再接続する。図７に示すように、スタッカクレーン５は、容器Ｆｘを保管棚３から持ち上げ、この保管棚３に再度載置する。次に、ステップＳ２２において、制御装置６は、容器Ｆｘとパージ装置４が再接続された後に、パージ装置４により容器Ｆｘに対してパージを行う。次に、ステップＳ２３において、判定部３３は、例えば図５（Ａ）のステップＳ４と同様に、ステップＳ２２のパージが正常であるか否かを判定する。制御装置６は、パージが正常であると判定部３３が判定した場合（ステップＳ２３；Ｙｅｓ）、一連の処理を終了する。 When the determination unit 33 determines that the purge is not normal (step S20; No), the control device 6 reconnects the container F to the purge device 4 by the stacker crane 5 in step S21. As shown in FIG. 7, the stacker crane 5 lifts the container Fx from the storage shelf 3 and places it on the storage shelf 3 again. Next, in step S <b> 22, the control device 6 purges the container Fx by the purge device 4 after the container Fx and the purge device 4 are reconnected. Next, in step S23, the determination unit 33 determines whether the purge in step S22 is normal, for example, similarly to step S4 in FIG. When the determination unit 33 determines that the purge is normal (step S23; Yes), the control device 6 ends the series of processes.
　制御装置６は、パージが正常でないと判定部３３が判定した場合（ステップＳ２３；Ｎｏ）、ステップＳ２４において、リトライ（ステップＳ２１～Ｓ２３の処理）が規定の回数まで終了したか否かを判断する。制御装置６は、リトライが規定の回数まで終了していないと判断した場合（ステップＳ２４；Ｎｏ）、ステップＳ２１～ステップＳ２３の処理を再度行う。また、制御装置６は、リトライが規定の回数まで終了したと判定した場合（ステップＳ２４；Ｙｅｓ）、ステップＳ５において報知部６６に良否判定の結果を報知させ、一連の処理を終了する。 When the determination unit 33 determines that the purge is not normal (step S23; No), the control device 6 determines in step S24 whether the retry (the processing of steps S21 to S23) has been completed up to a specified number of times. . When it is determined that the retry has not been completed up to the specified number of times (step S24; No), the control device 6 performs the processing of steps S21 to S23 again. Further, when it is determined that the retry has been completed up to the specified number of times (step S24; Yes), the control device 6 causes the notification unit 66 to notify the result of the pass / fail determination in step S5 and ends the series of processes.
　なお、パージ装置４は、図１に示すように、保管棚３ごとに設けられるが、一部の保管棚３に設けられなくてもよい。例えば、パージ装置４は、Ｘ方向またはＺ方向に並ぶ複数の保管棚３（１段の保管棚群）のうち、１つに設けられてもよいし、２つ以上に設けられてもよい。パージ装置４がない保管棚３の場合、スタッカクレーン５は、パージ装置４を持つ保管棚３に容器Ｆを載置し、このパージ装置４によってパージが施された容器Ｆを、パージ装置４がない保管棚３に載置してもよい。また、パージ装置４は、保管棚３以外に設けられてもよい。 The purge device 4 is provided for each storage shelf 3 as shown in FIG. 1, but may not be provided for some storage shelves 3. For example, the purge device 4 may be provided in one or a plurality of storage shelves 3 (one-stage storage shelf group) arranged in the X direction or the Z direction. In the case of the storage shelf 3 without the purge device 4, the stacker crane 5 places the container F on the storage shelf 3 having the purge device 4, and the purge device 4 sets the container F purged by the purge device 4. It may be placed on a storage shelf 3 that is not present. Further, the purge device 4 may be provided in addition to the storage shelf 3.
　なお、容器Ｆは、導入口２４と排気口２６の少なくとも一方に逆止弁を有していなくてもよい。例えば、導入口２４に、逆止弁２５の代わりにフィルタが設けられていてもよい。この場合、容器Ｆとパージ装置４とが接続された際にフィルタでの圧力損失により、流量が変化し、この流量変化に応じた流量制御バルブ５４の印加電圧、あるいは流量計５３による流量の検出値などを用いて、良否判定を行うことができる。 In addition, the container F does not need to have a check valve in at least one of the introduction port 24 and the exhaust port 26. For example, a filter may be provided in the introduction port 24 instead of the check valve 25. In this case, when the container F and the purge device 4 are connected, the flow rate changes due to the pressure loss in the filter, and the applied voltage of the flow control valve 54 corresponding to the flow rate change or the flow rate detection by the flow meter 53 is detected. A pass / fail judgment can be made using a value or the like.
　なお、流量制御装置３２は、印加電圧が最小の場合に流量制御バルブ５４が全開状態となり、印加電圧が増加するにつれて流量制御バルブ５４の開度が減少するものでもよい。この場合、良否判定に用いられる所定値を、印加電圧の変化に応じて変更する。また、流量制御装置３２は、各種の出力信号を制御回路５５が出力するものでもよいし、制御回路５５と別の構成要素から出力可能なものでもよい。例えば、流量制御装置３２は、流量信号を流量計５３が出力するものでもよい。 The flow control device 32 may be one in which the flow control valve 54 is fully opened when the applied voltage is minimum, and the opening degree of the flow control valve 54 decreases as the applied voltage increases. In this case, the predetermined value used for the pass / fail determination is changed according to the change of the applied voltage. Further, the flow control device 32 may be one that outputs various output signals from the control circuit 55, or may be one that can be output from a component different from the control circuit 55. For example, the flow controller 32 may be one in which the flow meter 53 outputs a flow signal.
　以上、本発明の実施形態について説明したが、本発明の技術範囲は、上記した実施形態あるいは変形例に限定されない。また、上記した実施形態あるいは変形例で説明した要件は、適宜組み合わせることができる。 The embodiment of the present invention has been described above, but the technical scope of the present invention is not limited to the above-described embodiment or modification. In addition, the requirements described in the above-described embodiment or modification can be combined as appropriate.
１・・・パージストッカ、３・・・保管棚、４・・・パージ装置、６・・・制御装置、
３２・・・流量制御装置、３３・・・判定部、３４・・・配管、５４・・・流量制御バルブ、６６・・・報知部、Ｆ・・・容器

  DESCRIPTION OF SYMBOLS 1 ... Purge stocker, 3 ... Storage shelf, 4 ... Purge apparatus, 6 ... Control apparatus,
32 ... Flow control device, 33 ... Determination unit, 34 ... Piping, 54 ... Flow control valve, 66 ... Notification unit, F ... Container

Claims (8)

  1. 　容器に接続される配管におけるパージガスの流量を制御する流量制御装置と、
    　前記流量制御装置の出力信号に基づいて、前記容器に対するパージの良否判定を行う判定部と、を備えるパージ装置。     A flow rate control device for controlling the flow rate of the purge gas in the pipe connected to the vessel;
    And a determination unit that determines whether or not the container is purged based on an output signal of the flow rate control device.
  2. 　前記判定部の判定結果を報知する報知部を備える、請求項１に記載のパージ装置。 The purge apparatus according to claim 1, further comprising a notification unit that notifies a determination result of the determination unit.
  3. 　前記流量制御装置は、前記配管におけるパージガスの流量を調整する流量制御バルブと、前記流量制御バルブにおけるパージガスの流量を測定する流量計と、を備え、前記出力信号として前記流量制御バルブの状態または前記流量計の検出結果を示す信号を出力する、請求項１または請求項２に記載のパージ装置。 The flow rate control device includes a flow rate control valve that adjusts the flow rate of the purge gas in the pipe, and a flow meter that measures the flow rate of the purge gas in the flow rate control valve, and the state of the flow rate control valve or the The purge apparatus according to claim 1, wherein the purge apparatus outputs a signal indicating a detection result of the flow meter.
  4. 　前記流量制御装置は、前記流量制御バルブへの前記印加電圧を前記出力信号として出力し、
    　前記判定部は、前記印加電圧が所定値より低い場合にパージが不良であると判定する、請求項３に記載のパージ装置。     The flow control device outputs the applied voltage to the flow control valve as the output signal,
    The purge device according to claim 3, wherein the determination unit determines that the purge is defective when the applied voltage is lower than a predetermined value.
  5. 　前記判定部は、前記流量制御バルブの開度が所定値に設定されている際に、前記流量計の検出結果を所定値と比較してパージの良否判定を行う、請求項３または請求項４に記載のパージ装置。 The determination unit compares the detection result of the flow meter with a predetermined value when the opening degree of the flow control valve is set to a predetermined value, and determines whether the purge is good or bad. The purging device according to 1.
  6. 　前記流量制御装置は、前記判定部からの出力指令に応じて前記出力信号を出力する、請求項１～請求項５のいずれか一項に記載のパージ装置。 The purge apparatus according to any one of claims 1 to 5, wherein the flow control device outputs the output signal in response to an output command from the determination unit.
  7. 　請求項１～請求項６のいずれか一項に記載のパージ装置と、
    　前記パージ装置によりパージされた前記容器を保持する棚と、を備えるパージストッカ。     The purging device according to any one of claims 1 to 6,
    And a shelf for holding the container purged by the purge device.
  8. 　容器に接続される配管におけるパージガスの流量を流量制御装置により制御するステップと、
    　前記流量制御装置の出力信号に基づいて、前記容器に対するパージの良否判定を行うステップと、を含むパージ異常検出方法。     A step of controlling the flow rate of the purge gas in the pipe connected to the container with a flow rate control device;
    And a step of determining whether the container is purged or not based on an output signal of the flow rate control device.
PCT/JP2015/084020 2015-02-12 2015-12-03 Purge device, purge stocker, and purge abnormality detection method WO2016129170A1 (en)

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