JP6468358B2 - Purge stocker and purge gas supply method in purge stocker - Google Patents

Description

  The present invention relates to a purge device, a purge stocker, and a purge gas supply method.

  Containers such as FOUP, SMIF Pod, and reticle Pod that contain wafers and reticles are filled with a purge gas such as clean dry air or nitrogen gas by a purging device during storage to suppress contamination and oxidation of the contents. ing. This purge device is known to be provided in a purge stocker for storing containers. When a purge abnormality occurs, such as insufficient supply of purge gas by the purge device, contamination of the contents occurs. Therefore, a technique for measuring the flow rate of the purge gas supplied to the container and detecting the purge abnormality has been proposed. (For example, refer to Patent Document 1). In Patent Document 1, the flow rate and pressure of the purge gas supplied to the inside of the container placed on the placement unit are measured by a sensor to determine whether a good purge is being performed. In such a purge device, the flow rate of the purge gas to each container is adjusted by arranging a solenoid valve and a flow rate control device for each mounting portion.

Japanese Patent No. 4670808

  However, in the configuration in which the electromagnetic valve and the flow rate control device are arranged for each placement unit, a space for arranging these devices is required, so each purge device becomes large. In recent years, there has been a demand for downsizing of the purge stocker while securing the number of containers that can be accommodated in the purge stocker. For this purpose, it is required to downsize the purge device provided in each placement unit.

  In view of the circumstances as described above, an object of the present invention is to provide a purge device, a purge stocker, and a purge gas supply method that can be simplified in size and compact.

  The purge apparatus according to the present invention is formed such that a plurality of grouped placement units on which containers are placed and a flow path for supplying purge gas to the containers are opened by placing the containers on the placement unit. And a flow rate control device that adjusts the flow rate of purge gas supplied into the group based on the number of containers in the group.

  Each of the placement units may include a detection unit that detects whether or not the container is placed. Further, the nozzle has a lid portion that closes the flow path by the pressure of the purge gas in a state where the container is not placed on the placement portion, and the lid portion has a weight of the container when the container is placed on the placement portion. May open the flow path. Further, when a new container is placed in the group, the flow rate control device may decrease the purge gas flow rate once and then gradually increase it to a predetermined flow rate. Moreover, it is good also considering the some mounting part located in a line with the horizontal direction or the vertical direction as a group.

A purge stocker according to the present invention includes a plurality of grouped placement units arranged in a horizontal direction on which containers are placed, and a flow path for supplying purge gas to the vessels by placing the vessels on the placement units A plurality of purge devices each including a nozzle formed to open and a flow rate control device that adjusts the flow rate of purge gas supplied into the group based on the number of containers in the group, along a plurality of mounting portions And a transfer device that transfers the container to the placement unit, the flow rate control device is arranged collectively on the end side of the travel range of the transfer device, and each of the placement units is a container When a new container is placed in the group, the flow rate control device gradually decreases the flow rate of the purge gas and then gradually detects the detection unit. Container acquired by detection result of It increased to a predetermined flow rate based on the number.

  Further, the purge device is capable of traveling along a plurality of placement portions of the purge device, and includes a transport device that transfers the container to the placement portion, and the flow rate control device of the purge device is an end of the travel range of the transport device. You may arrange | position collectively on the side.

A purge gas supply method according to the present invention is a method for supplying purge gas to a container placed on a plurality of placement units grouped in the horizontal direction, and the vessel is placed on the placement unit. Opening the flow path for supplying the purge gas to the container, and traveling along the plurality of placement units, and collecting them on the end side of the traveling range of the transfer device that transfers the container to the placement unit Adjusting the flow rate of the purge gas supplied into the group based on the number of containers in the group by each of the plurality of flow rate control devices arranged in a group, and each of the placement units has the container placed thereon The flow rate control device, when a new container is placed in the group, the flow rate of the purge gas is once reduced and then gradually detected by the detection unit. Number of containers acquired by It increased to a predetermined flow rate based.

  According to the purge apparatus of the present invention, the purge gas flows in the flow path of the placement portion on which the container is placed in the group, but the purge gas does not flow in the flow passage of the placement portion on which the container is not placed. . Therefore, the flow rate of the purge gas supplied to each container is adjusted by adjusting the flow rate of the purge gas based on the number of containers in the group. Thereby, it is not necessary to provide a solenoid valve or a flow rate control device for each placement unit, and the overall configuration is simplified, thereby saving space and making the purge device compact.

  Moreover, if each of the placement units has a detection unit that detects whether or not a container is placed, the number of containers in the group can be detected more reliably. Further, the nozzle has a lid portion that closes the flow path by the pressure of the purge gas when the container is not placed on the placement portion, and the lid portion flows according to the weight of the container when the container is placed on the placement portion. In the case of opening the path, the flow path can be reliably opened and closed by the lid portion. In addition, when a new container is placed in the group, the flow rate control device decreases the purge gas flow rate once and then gradually increases it to a predetermined flow rate. Supply of the purge gas can be suppressed, and vibration of the contents in the container can be prevented. In addition, in the case where a plurality of placement units arranged in the horizontal direction or the vertical direction are grouped, a flow rate control device may be provided for each of the plurality of placement units arranged in the horizontal direction or the vertical direction. Can be achieved.

  According to the purge stocker according to the present invention, since a plurality of purge devices capable of saving space are provided, the depth dimension of each mounting portion can be reduced, and a compact purge stocker can be obtained.

  In addition, the apparatus can travel along a plurality of placement portions of the purge device, and includes a transport device that transfers the container to the placement portion, and the flow rate control device of the purge device is an end portion of the travel range of the transport device. Since the flow control device is collectively arranged in a part of the purge stocker, the operator can easily install and maintain the flow control device while reducing the size of the purge stocker. be able to.

  According to the purge gas supply method of the present invention, when a container is placed on the placement section, the purge gas flows in the flow path of the placement section on which the container is placed, but the placement section on which the container is not placed. In this flow path, purge gas does not flow. Therefore, by adjusting the flow rate of the purge gas based on the number of containers in the group, the flow rate of the purge gas supplied to each container can be adjusted appropriately. Accordingly, it is not necessary to provide a solenoid valve or a flow rate control device for each mounting portion, and control of each solenoid valve or each flow rate control device is unnecessary, and control in supplying purge gas can be facilitated.

It is a figure which shows an example of the purge stocker concerning this embodiment. It is a figure which shows an example of the purge apparatus which concerns on this embodiment. It is a figure which shows the state in which the container was mounted in the mounting part. It is a perspective view which shows an example of the cover part used for a nozzle. It is a figure which shows an example of the supply nozzle provided with the cover part shown in FIG. It is a perspective view which shows the cover part of the nozzle which concerns on a modification. It is a figure which shows an example of the supply nozzle provided with the cover part shown in FIG. It is a figure which shows an example of arrangement | positioning of a flow control apparatus. It is a flowchart which shows an example of the supply method of the purge gas which concerns on this embodiment. It is a figure which shows the purge stocker which concerns on a modification. It is a figure which shows arrangement | positioning of the flow control apparatus which concerns on a modification.

  Hereinafter, embodiments will be described with reference to the drawings. Further, in the drawings, in order to describe the embodiment, the scale is appropriately changed and expressed by partially enlarging or emphasizing. In the following drawings, directions in the drawings will be described using an XYZ coordinate system. In this XYZ coordinate system, the vertical direction is the Z direction, and the horizontal direction is the X direction and the Y direction. In each of the X direction, the Y direction, and the Z direction, the direction of the arrow in the figure is the + direction, and the direction opposite to the arrow direction is the − direction.

  FIG. 1 is a diagram illustrating an example of a purge stocker 1 according to the present embodiment. The purge stocker 1 is an automatic warehouse that stores, for example, a wafer F used for manufacturing a semiconductor element and a container F that stores articles such as a reticle. The container F is, for example, FOUP, SMIF Pod, reticle Pod, or the like.

  As shown in FIG. 1, the purge stocker 1 includes a stocker housing 2 that forms an outline, a plurality of shelf-like placement units 3 installed in the stocker housing 2, a plurality of purge devices 4, and a container A stacker crane 5 as a transport device for F and a control device 6 are provided. In addition, the mounting part 3 may be called a storage shelf, for example. The stocker housing 2 has an internal space 2a that can be isolated from the outside. The stocker housing 2 includes a loading / unloading port (not shown) through which the container F is delivered between the outside of the stocker housing 2 and the internal space 2a. The plurality of placement units 3, the plurality of purge devices 4, and the stacker crane 5 are disposed in the internal space 2 a of the stocker housing 2. The plurality of placement units 3 may be arranged on both sides (+ Y side and −Y side) of the travel range (X direction) of the stacker crane 5. The control device 6 controls the purge device 4 and the stacker crane 5. In addition, the control apparatus which controls the purge apparatus 4 and the control apparatus which controls the stacker crane 5 may be provided separately.

  The stacker crane 5 can transport the container F in each of the X direction, the Y direction, and the Z direction. For example, the stacker crane 5 can be placed between the loading / unloading port and the placement unit 3 or from the placement unit 3 to another placement. The container F can be transported to the part 3. The stacker crane 5 includes, for example, a traveling carriage 10, a support pillar 11, a support base 12, and a transfer device 13. The traveling carriage 10 has a plurality of wheels 14 and moves in a horizontal direction (X direction) along a rail 15 provided on the floor surface.

  The support pillar 11 is provided so as to extend in the vertical direction (Z direction) from the upper surface of the traveling carriage 10. The support base 12 is supported by the support pillar 11 and is slidable in the Z direction along the support pillar 11. The transfer device 13 includes, for example, an extendable arm portion and a hand portion on which the container F can be placed. Note that the upper end of the support pillar 11 may be guided by a rail or the like laid on the ceiling or the like of the stocker casing 2. Further, as the container F transport device, instead of the stacker crane 5 for placing and transporting the container F as described above, for example, by gripping the flange portion 28 (see FIG. 2) provided on the upper portion of the container F, What suspends and conveys container F, and what conveys the side surface of container F may be used. In addition, although one stacker crane 5 is illustrated in FIG. 1, two or more stacker cranes 5 may be disposed in the stocker casing 2.

  The placement units 3 are arranged in a plurality of stages in the vertical direction (Z direction) and arranged in a plurality of rows in the horizontal direction (X direction). A container F can be placed on each of the plurality of placement units 3. The plurality of placement units 3 are grouped. In the present embodiment, a plurality of placement units 3 arranged in the horizontal direction are set in one group G.

  FIG. 2 is a diagram illustrating an example of the container F and the purge device 4. FIG. 3 is a view showing a part of the purge stocker 1 and shows a state where it is placed on the placement unit 3. As shown in FIG. 2, a pin 20 is provided on the upper surface of the mounting portion 3 and is used for positioning the container F. FIG. 2 shows an example of the FOUP, and the container F includes a box-shaped main body portion 21 having an opening 21a and a lid portion 22 that closes the opening 21a. Articles such as wafers are accommodated in the internal Fa of the container F through the openings 21a. The main body 21 includes a positioning recess 23 on the bottom surface side. The recess 23 is, for example, a groove that extends radially from the center of the bottom surface of the main body 21. A pin (not shown) provided in the hand portion of the transfer device 13 enters the concave portion 23 to perform positioning when the container F is conveyed.

  Further, as shown in FIG. 3, a placement sensor 29 is provided on the upper surface of each placement unit 3. The placement sensor 29 detects whether or not the container F is placed on the placement unit 3. The placement sensor 29 shown in FIG. 3 has a switch 29a protruding upward. The switch 29 a is pressed when the container F is placed on the placement unit 3. An optical sensor is provided inside the placement sensor 29. This optical sensor receives light emitted from a light source by a light receiving unit and converts it into an electrical signal. The electrical signal converted by the light receiving unit is transmitted to the control device 6. In the placement sensor 29, the light from the light source is blocked by pressing the switch 29a. In the control device 6, it is determined that the container F is placed for each placement unit 3 based on the electrical signal transmitted from the placement sensor 29. The placement sensor 29 is not limited to the above configuration, and a contact type or non-contact type sensor capable of detecting that the container F is placed can be used.

  The mounting part 3 has a notch part (see FIG. 8 and the like) through which the hand part of the transfer device 13 can pass in the vertical direction. The transfer device 13 transfers the container F onto the upper surface of the placement unit 3 by moving the hand unit from the upper side to the lower side of the placement unit 3 through the notch. In that case, the container F is positioned with respect to the mounting part 3 by inserting the pin 20 of the mounting part 3 in the recessed part 23. The main body 21 includes a purge gas introduction port 24, a check valve 25, an exhaust port 26, and a check valve 27 on the bottom surface side. The introduction port 24 and the exhaust port 26 communicate with the inside Fa and the outside of the main body portion 21, respectively. The check valves 25 and 27 are provided at the introduction port 24 and the exhaust port 26, respectively.

  The purge device 4 includes a supply nozzle (nozzle) 30, an exhaust nozzle 31, and a flow rate control device 32. 2 and 3 conceptually show the supply nozzle 30 and the exhaust nozzle 31. The supply nozzle 30 and the exhaust nozzle 31 are provided on the upper surface of the placement unit 3. The supply nozzle 30 and the exhaust nozzle 31 are disposed so as to be connected to the introduction port 24 and the exhaust port 26, respectively, when the container F is placed on the placement unit 3. When the container F is placed on the placement unit 3, the inlet 24 of the container F is connected to the pipe 34 via the supply nozzle 30 and further connected to the purge gas source 40 via the flow rate control device 32. The exhaust nozzle 31 is connected to a purge gas exhaust path (purge gas exhaust 41) via a pipe 35. Note that the purge device 4 may not include the exhaust nozzle 31 and the pipe 35. In this case, the purge gas exhausted from the exhaust port 26 of the container F is exhausted into the internal space 2 a of the purge stocker 1.

  As shown in FIG. 3, the supply nozzle 30 closes the flow path of the purge gas in a state where the container F is not placed on the placement unit 3, and the container when the container F is placed on the placement unit 3. The flow path is opened by the weight of F. FIG. 3 shows a state in which the container F is placed on the upper and lower placement portions 3 to form a purge gas flow path, and the container F is not placed on the middle placement portion. The purge gas flow path is shown in a closed state. The detailed configuration of the supply nozzle 30 will be described later.

  As shown in FIG. 2, the purge gas source 40 supplies a gas inert to the stored article, such as nitrogen gas, as the purge gas. The purge gas is selected according to the article contained in the container F. For example, a gas that suppresses oxidation of the article, suppresses molecular contamination, etc., a gas that reduces the moisture in the container F, or the like is used. As the purge gas, nitrogen gas, clean dry air (CDA), or the like is used. The purge gas source 40 may be a part of the purge stocker 1 or a device outside the purge stocker 1. For example, equipment in a factory where the purge stocker 1 is disposed may be used. . When the purge gas source 40 is separate from the purge stocker 1, the purge gas from the purge gas source 40 is temporarily received by the pressure adjustment device on the purge stocker 1 side, and the purge gas is supplied from the pressure adjustment device to each flow rate control device 32. You may make it supply.

  When purging the container F, the purge gas from the purge gas source 40 is supplied to the internal Fa from the introduction port 24 of the container F via the flow rate control device 32 and the pipe 34 and is filled in the internal Fa of the container F. The pipe 34 is branched in the middle of the flow path, and supplies the purge gas to the supply nozzle 30 in the group G. In addition, the gas in the interior Fa of the container F is discharged from the exhaust port 26 to the outside of the container F, and is exhausted to the outside by the purge gas exhaust 41 through the pipe 35. The purge gas exhaust 41 may be provided with a device for sucking gas by a pump or the like.

  The flow rate control device 32 is, for example, a mass flow controller, and controls the flow rate of the purge gas supplied from the purge gas source 40 to the supply nozzle 30 by controlling the flow rate of the purge gas in the pipe 34. The flow rate control device 32 is provided so as to be able to communicate with the control device 6. The flow rate control device 32 receives a flow rate setting signal that defines a flow rate setting value from the control device 6 and controls the purge gas flow rate to approach the set value. This set value is set based on the number of containers F in the group G. The control device 6 determines the number of containers F in the group G based on the signal from the placement sensor 29 described above, and outputs a flow rate setting signal corresponding to the number to the flow rate control device 32.

  The control device 6 determines the number of containers F in the group G based on the information of the containers F transferred by the stacker crane 5 instead of the signal from the placement sensor 29, for example, and the flow rate control device 32. May be output. In this case, since the placement sensor 29 is not required for the placement portion 3, the manufacturing cost can be reduced. The flow control device 32 receives information on the number of containers F in the group G instead of receiving a flow setting signal from the control device 6, and the number of containers F in the control circuit or the like inside the flow control device 32. The set value may be calculated based on the above.

  The flow control device 32 adjusts the flow rate of the purge gas supplied into the group G based on the number of containers F in the group G. For example, the flow rate of the purge gas can be set to a value proportional to the number of containers F, but is not limited thereto. The flow rate control device 32 is connected to the supply nozzles 30 of the plurality of placement units 3 arranged in the group G. In the group G, the purge gas flows through the flow path of the placement unit 3 where the container F is placed, but the purge gas does not flow through the flow path of the placement unit 3 where the container F is not placed. Therefore, the flow rate control device 32 can adjust the flow rate of the purge gas supplied to each container F by adjusting the flow rate of the purge gas based on the number of containers F in the group G.

  The flow control device 32 receives various operation commands (commands) from the control device 6 and performs various operations. For example, when receiving an operation command for requesting output of various signals, the flow control device 32 outputs an output signal to the control device 6 as a response to the operation command.

  An input unit 7 and a display unit 8 are connected to the control device 6. The input unit 7 is, for example, an operation panel, a touch panel, a keyboard, a mouse, a trackball, or the like. The input unit 7 detects an input from the operator and supplies the input information to the control device 6. For example, the operator can set and change the flow rate of the purge gas by operating the input unit 7. The display unit 8 is a liquid crystal display, for example, and displays an image supplied from the control device 6. For example, the control device 6 causes the display unit 8 to display an operation status of the purge stocker 1, various settings, an image showing the purge status, and the like.

  As shown in FIG. 2, in the purge device 4, a pressure detector 37 may be connected to the downstream side of the flow rate control device 32 in the pipe 34. The pressure detection unit 37 monitors the pressure of the purge gas flowing through the pipe 34 via the flow rate control device 32 and detects the purge state in the container F. The pressure detection unit 37 outputs the measurement result (measurement value) to the control device 6 by wire or wireless. For example, the control device 6 may determine the purge state by comparing the measurement result of the pressure detection unit 37 with a predetermined value (threshold value). The measured value of the pressure detection unit 37 becomes a substantially constant value when the purge gas is properly supplied, but becomes larger or smaller than a predetermined range when an abnormality occurs in the container F or the purge device 4. Thereby, the abnormality of the purge with respect to the container F can be confirmed. Note that the pressure detection unit 37 may be connected to the pipe 35 on the exhaust side, or may be disposed in both the pipes 34 and 35.

  When the container F is connected to the purge device 4, there is a possibility that poor connection between the inlet 24 of the container F and the supply nozzle 30 may occur due to a positional shift between the container F and the purge device 4. In this case, the purge gas leaks from the gap between the inlet 24 and the supply nozzle 30, so that the purge gas supplied to the internal Fa of the container F becomes insufficient and a purge failure occurs. In addition, when the pipes 34 and 35 are clogged, or when a large amount of purge gas leaks from the gap between the lid portion 22 and the main body portion 21 of the container F, a purge failure occurs. The control device 6 may leave a determination result such as when and which purge device 4 has a purge failure in the log as a result of determining whether the container F is purged or not, and the determination result is displayed on the display unit. 8 may be displayed, or may be notified by other notifying means.

  FIG. 4 is a perspective view showing an example of a lid used for the supply nozzle 30. As shown in FIG. 4, the lid portion 50 includes a large-diameter first tubular portion 51, a small-diameter second tubular portion 52, a spacer portion 53 formed on the upper surface side of the second tubular portion, Have The second tubular portion 52 is provided at a substantially central portion on the upper side of the first tubular portion 51. The 1st cylindrical part 51 and the 2nd cylindrical part 52 are integrated via the step part 51a. A lower portion of the first cylindrical portion 51 is opened. As for the 2nd cylindrical part 52, the upper surface side is obstruct | occluded by the ceiling part 52a. A lower portion of the second cylindrical portion 52 is connected to and opened to the step portion 51a. A plurality of spacers 53 are provided on the ceiling 52a along the peripheral edge of the ceiling 52a. The spacer portion 53 is arranged with a plurality of gaps 53a in the circumferential direction of the ceiling portion 52a. The upper surface of the spacer portion 53 is used as a portion that comes into contact with the bottom of the container F.

  The supply nozzle 30 having the lid 50 described above closes the purge gas flow path when the container F is not placed on the placement portion 3. The lid 50 opens the flow path depending on the weight of the container F when the container F is placed on the placement unit 3. FIG. 5 is a diagram illustrating an example of the supply nozzle 30 including the lid 50 illustrated in FIG. As shown in FIGS. 5A and 5B, the lid part 50 is accommodated in the flow path forming part 55 arranged in the placement part 3. The flow path forming part 55 is formed in a cylindrical shape, and an annular member 56 is attached to the upper part.

  The flow path forming unit 55 is connected to the end of the pipe 34 and supplied with purge gas. The flow path forming portion 55 constitutes a purge gas flow path. The annular member 56 is formed with a through hole 56a in a substantially central portion, and a square ring 57 is provided on the upper surface side so as to surround the through hole 56a. The square ring 57 is formed using an elastic member such as rubber. The square ring 57 is an annular member having a rectangular cross section. The upper surface of the square ring 57 is in contact with the bottom of the container F.

  The lid portion 50 is disposed in a state where the first tubular portion 51 is disposed in the flow path forming portion 55 and the second tubular portion 52 protrudes upward from the through hole 56a. A gap through which purge gas can flow is formed between the second cylindrical portion 52 and the through hole 56a. As shown in FIG. 5A, in a state where the container F is not placed on the placement portion 3, the lid portion 50 is pressed upward by the pressure of the purge gas supplied from the pipe 34, and the step of the lid portion 50 is performed. The part 51 a is pressed against the lower surface of the annular member 56. As a result, the through hole 56a is closed. As described above, the lid 50 closes the flow path by the pressure of the purge gas in a state where the container F is not placed on the placement unit 3. An elastic member such as a coil spring may be disposed to press the lid 50 upward.

  On the other hand, as shown in FIG. 5B, when the container F is placed on the placement unit 3, the lid 50 moves downward due to the weight of the container F, and the bottom surface of the container F contacts the square ring 57. To do. Thereby, the region surrounded by the square ring 57 is sealed. Further, in the lid portion 50, the spacer portion 53 is pushed by the bottom portion of the container F and moves downward, and the step portion 51 a is separated from the lower surface of the annular member 56. For this reason, a gap is formed between the stepped portion 51 a and the lower surface of the annular member 56. As a result, the purge gas in the flow path forming portion 55 passes from the gap between the step portion 51a and the annular member 56 to the region surrounded by the square ring 57 via the gap between the second cylindrical portion 52 and the through hole 56a. It enters and communicates with the inlet 24 of the container F through the gap 53 a of the spacer portion 53. Thus, the lid 50 opens the purge gas flow path by the weight of the container F when the container F is placed on the placement unit 3. The purge gas supplied from the pipe 34 is supplied into the container F from the introduction port 24 through this flow path.

  When the container F placed on the placement part 3 moves upward, the lid part 50 moves upward by the pressure of the purge gas from the pipe 34, and the step part 51 a comes into contact with the lower surface of the annular member 56. Thus, the purge gas flow path is closed.

  The supply nozzle 30 is not limited to using the lid 50 having the above-described configuration, and other lids may be used. FIG. 6 is a perspective view showing an example of a lid 50A according to a modification. As shown in FIG. 6, the lid portion 50 </ b> A includes a large-diameter attachment portion 61, a small-diameter container support portion 62, an annular deformation portion 63, and a flange portion 64. The attaching part 61 is formed in a cylindrical shape and attached to a flow path forming part 65 described later. The container support part 62 is formed in a cylindrical shape, and is formed on a deformation part 63 extending inward from the upper part of the attachment part 61. The upper end of the container support 62 is used as a part that contacts the bottom surface of the container F. The flange portion 64 is formed in an annular shape so as to protrude inwardly inside the container support portion 62. The lid portion 50A is integrally formed using an elastic member such as rubber, and at least the deformable portion 63 is formed to be deformable.

  7A and 7B are diagrams illustrating an example of the supply nozzle 30 including the lid 50A. As shown in FIG. 7A, the lid portion 50A is in a state where the protruding portion 61a formed inside the lower end of the mounting portion 61 enters the annular groove portion 65d formed on the upper outer periphery of the flow path forming portion 65. It is attached to the flow path forming part 65. The flow path forming portion 65 has a pipe 34 connected to the inside thereof, and a disk-shaped blocking portion 65b provided on the upper portion of the column portion 65c rising from the substantially center of the bottom portion. The closing portion 65b is formed to have an outer diameter that can be disposed in the container support portion 62 of the lid portion 50A. In a state in which the lid portion 50A is attached to the flow path forming portion 65, the upper surface of the collar portion 64 of the lid portion 50A is in contact with the lower surface of the closing portion 65b.

  As shown in FIG. 7A, in a state where the container F is not placed on the placement unit 3, the lid portion 50 </ b> A is pressed upward by the pressure of the purge gas supplied from the pipe 34, and the upper surface of the flange portion 64. Is pressed against the lower surface of the blocking portion 65b. Further, the protrusion 61a of the attachment portion 61 enters the annular groove 65d, whereby the purge gas flow path to the container F is closed. As described above, the lid 50A closes the flow path with the pressure of the purge gas in a state where the container F is not placed on the placement unit 3. An elastic member such as a coil spring may be disposed to press the lid 50A upward.

  On the other hand, as shown in FIG. 7B, when the container F is placed on the placement part 3, the container support part 62 comes into contact with the bottom part of the container F and is pressed downward by the weight of the container F. Thereby, the deformation | transformation part 63 deform | transforms in the state which the container support part 62 moved below. Thereby, the upper surface of the collar part 64 leaves | separates from the lower surface of the obstruction | occlusion part 65b. As a result, the purge gas in the flow path forming portion 65 forms a flow path that reaches the introduction port 24 through the container support portion 62 from the gap between the flange portion 64 and the closing portion 65b. The lower surface of the deforming portion 63 is in contact with the upper end of the inner wall 65a of the flow path forming portion 65 to prevent the purge gas from leaking outside. As described above, the lid 50A opens the flow path according to the weight of the container F when the container F is placed on the placement unit 3. The purge gas supplied from the pipe 34 flows along the opened flow path and is supplied into the container F from the introduction port 24.

  When the container F placed on the placement portion 3 moves upward, the lid portion 50A returns to its original form by the pressure of the purge gas from the pipe 34 and its own elastic force, and the flange portion 64 is closed. By returning to 65b, the purge gas flow path is closed.

  FIG. 8 is a diagram illustrating an example of the arrangement of the flow rate control device 32. As shown in FIG. 8, one flow rate control device 32 is provided for each group G of the placement unit 3. In the purge stocker 1, for example, the flow rate control device 32 is collectively arranged on the end 5 </ b> E side of the travel range of the stacker crane 5. As shown in FIG. 8, when the placement units 3 are arranged in two rows with the stacker crane 5 interposed therebetween and a group G is set for each row, the flow rate control device 32 is provided for each row. Note that one flow rate control device 32 may be arranged with the two rows of placement units 3 sandwiching the stacker crane 5 as one group G.

  As described above, the flow control device 32 is collectively arranged on the end portion 5E side of the traveling range of the stacker crane 5, so that it is not necessary to arrange the flow control device 32 in the back of the placement portion 3. Further, since a solenoid valve for each placement unit 3 is not required, the depth of the placement unit can be reduced, and the purge stocker 1 can be reduced in size. Further, since the flow rate control device 32 is arranged in a part of the purge stocker, the operator can easily install and maintain the flow rate control device 32.

  FIG. 9 is a flowchart showing an example of a purge gas supply method according to this embodiment. As described above, when the container F is placed on the placement portion 3 by the stacker crane 5, the supply nozzle 30 opens the purge gas flow path (step S1). Thereby, supply of the purge gas by the purge device 4 to the container F placed on the placement unit 3 is started.

  Further, when the container F is placed on the placement unit 3, a signal indicating that the container F has been placed is transmitted from the placement sensor 29 to the control device 6. The control device 6 acquires the number of containers F of the group G based on this signal (step S2). The control device 6 may obtain the number of containers F in the group G from the control device of the purge stocker 1 or the like. The control device 6 sets the flow rate of the purge gas based on the number of containers F in the group G, and transmits the set value to the flow rate control device 32. The flow rate control device 32 controls the flow rate of the purge gas based on the set value from the control device 6 (step S3).

  Next, the control device 6 determines whether a new container F is placed in the group G (step S4). The placement of the new container F may be based on a signal from the placement sensor 29 or may be information sent from the control device of the purge stocker 1 or the like. When a new container F is placed (Yes in step S4), the control device 6 instructs the flow rate control device 32 to once decrease the purge gas flow rate and gradually increase it to a predetermined flow rate (step). S5). Thereby, it is suppressed that the flow rate of the purge gas suddenly increases, and the contents in the container F are prevented from vibrating. Note that whether or not to perform such steps S4 and S5 is arbitrary.

  Next, the control device 6 determines whether the purge is good or not based on the detection signal from the pressure detection unit 37 (step S6). The control device 6 displays the determination result on the display unit 8 (step S5), and ends the series of processes. Note that whether the purge is good or bad in step S6 is determined that a purge failure has occurred in any of the containers F in the group G when the pressure detection unit 37 is arranged in the supply-side pipe 34 branched into a plurality of branches. judge. Moreover, when the pressure detection part 37 is arrange | positioned for the piping 35 of the exhaust side for every mounting part 3 (refer FIG. 2), it is possible to determine which container F is a purge defect.

  As described above, according to the present embodiment, in the group G, the purge gas flows in the flow path of the placement section 3 on which the container F is placed, but the flow path of the placement section 3 in which the container F is not placed. No purge gas flows. Therefore, by adjusting the flow rate of the purge gas based on the number of containers F in the group G, the flow rate of the purge gas supplied to each container F is adjusted. Accordingly, it is not necessary to provide a solenoid valve or a flow rate control device 32 for each placement unit 3, and control of each solenoid valve or each flow rate control device 32 becomes unnecessary, and the control device 6 facilitates control in supplying purge gas. be able to.

  In the above-described embodiment, the group G is set for each of the placement units 3 arranged in the horizontal direction for the plurality of placement units 3 in the purge stocker 1. However, the present invention is not limited to this. FIG. 10 is a diagram illustrating an example of a purge stocker 1A according to a modification. As shown in the example on the left side of FIG. 10, a plurality of placement units 3 arranged in a line in the vertical direction may be set as one group G. Further, as shown in the example in the upper right of FIG. 10, a plurality of placement units 3 arranged in two or more rows in the horizontal direction and the vertical direction may be set as one group G. Further, the present invention is not limited to the example illustrated in FIG. 10, and the placement unit 3 of the group G can be arbitrarily set as long as it includes a plurality of placement units 3. For example, a plurality of placement units 3 arranged apart from each other may be set as one group G.

  Further, in the example illustrated in FIG. 8, the configuration in which the flow rate control device 32 is collectively arranged on the end 5E side of the travel range of the stacker crane 5 is described as an example, but the configuration is not limited thereto. For example, as shown in the lower left of FIG. 10, the flow rate control devices 32 may be arranged below the placement units 3 arranged in a line in the vertical direction, and although not shown, they are arranged in a line in the vertical direction. A flow rate control device 32 may be disposed above the placement unit 3.

  FIG. 11 is a diagram illustrating an example of a purge stocker 1B according to a modification. As shown in FIG. 11, the flow rate control device 32 may be disposed on the back surface Fb side of the container F held by the placement unit 3 in the purge stocker 1B. Here, the back surface Fb side of the container F refers to the side opposite to the side accessed by the transfer device 13 of the stacker crane 5. In FIG. 11, it is the side where the wall part of the stocker housing | casing 2 is arrange | positioned. In this case, the flow rate control device 32 is disposed, for example, in a space between the placement portion 3 and the wall portion on the back surface Fb side of the container F. Moreover, when arrange | positioning the flow volume control apparatus 32 at the back surface Fb side of the container F, you may arrange | position between two adjacent mounting parts 3, for example.

  As mentioned above, although embodiment of this invention was described, the technical scope of this invention is not limited to above-described embodiment or modification. In addition, the requirements described in the above-described embodiment or modification can be combined as appropriate. For example, in the purge stocker 1 shown in FIG. 1, all the placement units 3 are set so as to be in one of the groups G and are connected to the purge device 4. The purge device 4 may be provided separately from the inside of G. Further, a part of the placement units 3 need not be connected to the purge device 4 outside the group G. In the case of the placement unit 3 that is not connected to the purge device 4, the stacker crane 5 places the container F on the placement unit 3 that is connected to the purge device 4, and the purged container F is placed in the purge device 4. You may transfer to the mounting part 3 which is not connected. In addition, as long as it is permitted by law, the contents of Japanese Patent Application No. 2015-153757, which is a Japanese patent application, and all the references cited in the above-described embodiments, etc. are incorporated as part of the description of the text.

  F ... Container G ... Group 1, 1A, 1B ... Purge stocker 2 ... Stocker housing 2a ... Internal space 3 ... Placement part 3a ... Through hole 3b ... Square ring 4 ... Purge device 5 ... Stacker crane (conveyance device) 5E ... Traveling end 6 ... Control device 24 ... Introduction port 29 ... Placement sensor (detection unit) 29a ... Switch 30 ... Supply nozzle (nozzle) 32 ... Flow control device 34 ... Piping 50, 50A ... Lid

Claims (3)

A plurality of placement units arranged in a horizontal direction and in which containers are placed; and
A nozzle formed so as to open a flow path for supplying purge gas to the container by placing the container on the placement unit;
A plurality of purge devices comprising a flow rate control device that adjusts the flow rate of the purge gas supplied into the group based on the number of the containers in the group;
It is possible to travel along the plurality of placement units, and includes a transfer device that transfers the container to the placement unit,
The flow rate control device is collectively arranged on the end side of the travel range of the transport device ,
Each of the placement units has a detection unit for detecting whether or not the container is placed,
When a new container is placed in the group, the flow rate control device reduces the flow rate of the purge gas once and then gradually increases the number of containers acquired by the detection result of the detection unit. Purge stocker to increase to a predetermined flow rate based on . The nozzle has a lid portion that closes the flow path by the pressure of the purge gas in a state where the container is not placed on the placement portion,
2. The purge stocker according to claim 1 , wherein when the container is placed on the placement part, the lid part opens the flow path depending on the weight of the container. A method of supplying purge gas to a container placed on a plurality of placement units grouped in a horizontal direction,
Opening a flow path for supplying purge gas to the container by placing the container on the mounting portion;
Each of the plurality of flow rate control devices that can travel along the plurality of placement units and are collectively arranged on the end side of the traveling range of the transfer device that transfers the container to the placement unit. , and adjusting the flow rate of the purge gas supplied into the groups based on the number of the container in the group, only contains,
Each of the placement units has a detection unit for detecting whether or not the container is placed,
When a new container is placed in the group, the flow rate control device reduces the flow rate of the purge gas once and then gradually increases the number of containers acquired by the detection result of the detection unit. A method for supplying purge gas in a purge stocker, wherein the purge gas is increased to a predetermined flow rate .

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