JP2016127228A - Purge stocker and operation method of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a purge stocker which enables an operator to easily determine whether a container or a purge device causes abnormality when the abnormality occurs in a purge and thereby enables improvement of the operating efficiency.SOLUTION: A purge stocker 1 includes: purge devices 4, 4a for supplying a purge gas to a container F; a detection device 36 for detecting a state of a purge in the container F; and an inspection part 4b for inspecting the purge of the container F when the detection device 36 detects abnormality of the purge.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a purge stocker.

  The purge stocker includes a purge device that stores a container for storing various articles and supplies a purge gas to the container. Containers stored in this purge stocker include FOUP, SMIF Pod, reticle Pod, etc. that accommodate wafers, reticles, etc., and when storing, a purge gas such as clean dry air or nitrogen gas is filled in the container by a purge device, Containment contamination and oxidation are suppressed. In the purge stocker, for example, if there is a purge abnormality such as insufficient supply of purge gas, contamination of the contents will occur, so a technique to detect the purge abnormality by measuring the flow rate of the purge gas supplied to the container is proposed (For example, refer to Patent Document 1).

Japanese Patent No. 4670808

  As shown in Patent Document 1, even if a purge abnormality is detected in the purge stocker, it is not determined whether the purge abnormality is caused by the container or the purge device. Therefore, when a purge abnormality is detected, it is necessary to stop the operation of the purge stocker and inspect the container and the purge device. In this case, even if the purge abnormality is caused by the container, if the operation of the purge stocker is stopped, the operation efficiency of the purge stocker may be reduced, which may affect the production line or the like.

  The present invention has been made in view of the above circumstances, and when a purge abnormality occurs, it can be easily determined whether the abnormality is caused by the container or the purge device, thereby improving the operation efficiency. It is an object of the present invention to provide a purge stocker that can be improved and a method for operating the purge stocker.

  A purge stocker of the present invention includes a purge device that supplies purge gas into a container, a detection device that detects a purge state in the container, and an inspection unit that confirms the purge of the container when the detection device detects a purge abnormality And comprising.

  In addition, the apparatus includes a transport device that transports the container and a plurality of purge devices, and the inspection unit detects a purge abnormality when the detection device detects a purge abnormality, and is separate from the purge device when the purge abnormality is detected. And the transfer device may transfer the container to another purge device. In addition, a plurality of shelves that hold the containers may be provided, and the purge device may be provided on each of the plurality of shelves. The detection unit may be arranged away from the movable range of the transport device.

  Further, the purge stocker of the present invention includes a purge device that supplies purge gas into a container, a transport device that transports the container, a detection device that detects a purge state in the container, and a detection device that detects a purge abnormality And a reference container that is transported by the transport device and connected to the purge device instead of the container.

  Further, the reference container may have the same structure as the container. Further, a transport container for transporting the container may be provided, and the transport device may perform an operation of reconnecting the container to the purge device when the detection device detects a purge abnormality. Further, the detection device may detect the purge state by monitoring the purge gas discharged from the container. Further, the detection device may detect a purge state in the container based on at least one of a flow rate per unit time, an oxygen concentration, and a moisture concentration with respect to the purge gas discharged from the container.

  Further, the present invention is a method for operating a purge stocker including a purge device for supplying purge gas into a container, and is provided in the purge stocker when a purge state in the container is detected and a purge abnormality is detected. Confirming purging of the container by the inspection unit, or connecting a reference container provided in the purge stocker to the purge device instead of the container.

  According to the present invention, when the detection device detects a purge abnormality, the inspection unit confirms the purge of the container. Therefore, it can be easily determined whether the purge abnormality is caused by the container or the purge device. it can. Accordingly, it is possible to avoid the operation stop of the purge stocker, and the operation efficiency of the purge stocker can be improved.

  In addition, the apparatus includes a transport device that transports the container and a plurality of purge devices, and the inspection unit detects a purge abnormality when the detection device detects a purge abnormality, and is separate from the purge device when the purge abnormality is detected. In the case where the transport device transports the container to another purge device, any one of a plurality of purge devices provided in the purge stocker can be used as the inspection unit. Containers can be easily transported to some other purge device. In addition, in the case where a plurality of shelves holding containers are provided and purge devices are provided on each of the plurality of shelves, when the containers are stored in the plurality of shelves, the purging device of each shelf performs the purging in parallel. In addition, purge devices with different shelves can be used as the inspection unit. Further, in the case where the detection unit is arranged away from the movable range of the transport device, the container can be connected to the detection unit by an operator or the like without stopping the transport device.

  Further, according to the present invention, when the detection device detects a purge abnormality, the purge device is transported by the transport device and connected to the purge device instead of the container so that the purge abnormality is detected in the container or the purge device. Which can be attributed to can be easily determined.

  Further, when the reference container has the same structure as the container, the comparison between the purge state of the container and the purge state of the reference container can be accurately performed. Further, when the conveyance device detects an abnormality of the purge by the detection device, when the operation of reconnecting the container to the purge device is performed, the cause of the abnormality of the purge is a problem when arranging the container The purge abnormality can be easily eliminated. Further, when the detection device detects the purge state by monitoring the purge gas discharged from the container, the purge state for the container can be detected easily and reliably. In addition, if the detection device detects the purge state in the container based on at least one of the flow rate per unit time, the oxygen concentration, and the moisture concentration of the purge gas discharged from the container, the purge state is quantified. Can be detected.

It is a figure which shows an example of the purge stocker which concerns on 1st Embodiment. (A) is a block diagram showing an example of the purge device, (B) is a block diagram showing another example of the purge device. It is a flowchart which shows operation | movement of the purge stocker which concerns on 1st Embodiment. It is a figure which shows an example of the purge stocker concerning 2nd Embodiment. It is a flowchart which shows operation | movement of the purge stocker which concerns on 2nd Embodiment. (A) is a figure which shows the modification of operation | movement of a purge stocker, (B) is a flowchart which shows the modification of operation | movement. It is a figure which shows an example of the purge stocker concerning 3rd Embodiment. It is a block diagram which shows an example of a test | inspection part. It is a figure which shows the modification of a purge stocker.

  Hereinafter, embodiments will be described with reference to the drawings. In the following drawings, directions in the drawings will be described using an XYZ coordinate system. In this XYZ coordinate system, the vertical direction is the Z direction, and the horizontal direction is the X direction and the Y direction.

[First Embodiment]
First, the first embodiment will be described. FIG. 1A is a diagram illustrating an example of the purge stocker 1 according to the present embodiment, and FIG. 1B is a diagram illustrating an example of the container F and the purge device 4. The purge stocker 1 is an automatic warehouse that stores, for example, a wafer F used for manufacturing a semiconductor element and a container F that stores articles such as a reticle. The container F is, for example, FOUP, SMIF Pod, reticle Pod, or the like. As shown in FIG. 1A, the purge stocker 1 includes a housing 2, a plurality of storage shelves 3, a plurality of purge devices 4, a stacker crane (conveyance device) 5, and a control device 6. The housing 2 has an internal space 2a that can be isolated from the outside. The housing 2 includes an entry / exit port (not shown) through which the container F is delivered between the outside of the housing 2 and the internal space 2a. The plurality of storage shelves 3, the plurality of purge devices 4, and the stacker crane 5 are arranged in the internal space 2 a of the housing 2. The control device 6 may be disposed either inside or outside the housing 2. The control device 6 controls the purge device 4 and the stacker crane 5.

  The stacker crane 5 can transport the container F in each of the X direction, the Y direction, and the Z direction. For example, the stacker crane 5 can move between the storage port 3 and the storage shelf 3 or from the storage shelf 3 to another storage shelf 3. The container F can be conveyed. The stacker crane 5 includes, for example, a traveling carriage 10, a support pillar 11, a support base 12, and a transfer device 13. The traveling carriage 10 has a plurality of wheels 14 and moves in a horizontal direction (X direction) along a rail 15 provided on the bottom surface of the housing 2.

  The support pillar 11 is provided so as to extend in the vertical direction (Z direction) from the upper surface of the traveling carriage 10. The support base 12 is supported by the support pillar 11 and is slidable in the Z direction along the support pillar 11. The transfer device 13 includes, for example, an extendable arm portion and a placement portion on which the container F can be placed on the upper surface. In addition, the stacker crane 5 holds the flange F (see FIG. 1B) provided on the upper portion of the container F, for example, and hangs and conveys the container F instead of the container F. Alternatively, the container F may be gripped and transported. In addition, although one stacker crane 5 is illustrated in FIG. 1, two or more stacker cranes 5 may be disposed in the housing 2.

  The storage shelves 3 are arranged in a plurality of stages in the height direction (Z direction) and arranged in a plurality of rows in the horizontal direction (X direction). A container F can be placed on each of the plurality of storage shelves 3. Depending on the storage status of the containers F, the containers F may not be placed on some of the storage shelves 3. In FIG. 1, the placement space for the container F in the storage shelf 3 on which the container F is not placed is indicated by a dotted line (reference numeral B).

  As shown in FIG. 1B, pins 20 are provided on the upper surface of the storage shelf 3. The pin 20 is used for positioning the container F with respect to the storage shelf 3. FIG. 1B shows an example of the FOUP, and the container F includes a box-shaped main body portion 21 having an opening 21a and a lid portion 22 that closes the opening 21a. Articles such as wafers are accommodated in the internal Fa of the container F through the openings 21a. The main body 21 includes a positioning recess 23 on the bottom surface side. The recess 23 is, for example, a groove that extends radially from the center of the bottom surface of the main body 21. A pin (not shown) provided in the mounting table of the transfer device 13 enters the concave portion 23 to perform positioning when the container F is transported. The storage shelf 3 has a notch (not shown) through which the mounting table of the transfer device 13 can pass in the vertical direction. The transfer device 13 transfers the container F onto the upper surface of the storage shelf 3 by moving the mounting table from the upper side to the lower side of the storage shelf 3 through the notch. At that time, the container F is positioned with respect to the storage shelf 3 by inserting the pin 20 of the storage shelf 3 into the recess 23. The main body 21 includes a gas introduction port 24, a check valve 25, an exhaust port 26, and a check valve 27 on the bottom surface side. The introduction port 24 and the exhaust port 26 communicate with the inside Fa and the outside of the main body portion 21, respectively. The check valves 25 and 27 are provided at the introduction port 24 and the exhaust port 26, respectively.

  The purge device 4 includes a purge nozzle 30, an exhaust nozzle 31, a flow rate control device 32, and an exhaust side sensor 33. The purge nozzle 30 and the exhaust nozzle 31 are provided on the upper surface of the storage shelf 3. The purge nozzle 30 and the exhaust nozzle 31 are arranged so as to be connected to the introduction port 24 and the exhaust port 26, respectively, when the container F is placed on the storage shelf 3. The purge nozzle 30 is connected to a purge gas supply source (purge gas source 40 shown in FIG. 2) via a pipe 34 and a flow rate control device 32. The exhaust nozzle 31 is connected to the purge gas exhaust path (purge gas exhaust 41 shown in FIG. 2) via the pipe 35 and the exhaust side sensor 33.

  FIG. 2A is a block diagram illustrating an example of the configuration of the purge device 4. As shown in FIG. 2A, when purging the container F, the purge gas from the purge gas source 40 is supplied to the internal Fa from the inlet 24 of the container F via the flow rate control device 32 and the pipe 34, The inside Fa of F is filled. Further, the gas in the internal Fa is discharged from the exhaust port 26 to the outside of the container F, and is exhausted to the outside by the purge gas exhaust 41 through the pipe 35. The purge gas exhaust 41 may be provided with a device for sucking gas by a pump or the like.

  The flow rate control device 32 is, for example, a mass flow controller, and controls the flow rate of the purge gas flowing from the purge gas source 40 to the purge nozzle 30. Note that the flow rate control device 32 may be a needle valve, for example, instead of the mass flow controller, or may be one in which the operator controls the flow rate by operating the needle valve.

  The exhaust side sensor (detection device) 33 monitors the gas flowing through the pipe 35 and detects the purge state in the container F. The exhaust side sensor 33 is a flow meter, for example, and measures the flow rate per unit time of the gas flowing through the pipe 35. However, the exhaust side sensor 33 is not limited to a flow meter, and may be a sensor that detects the composition of gas flowing through the pipe 35, such as a sensor that detects at least one of oxygen concentration and moisture concentration. Further, the exhaust side sensor 33 may be a sensor that detects both the flow rate and the component of the gas.

  The purge gas source 40 supplies a gas inert to the stored article, such as nitrogen gas, as the purge gas. The purge gas is selected according to the article contained in the container F. For example, a gas that suppresses oxidation of the article, suppresses molecular contamination, etc., a gas that reduces the moisture in the container F, or the like is used. The purge gas may be clean dry air (CDA) in addition to nitrogen gas. The purge gas source 40 may be a part of the purge stocker 1 or may be an apparatus outside the purge stocker 1, for example, a facility of a factory where the purge stocker 1 is provided.

  The exhaust side sensor 33 monitors the gas flow rate by measuring the flow rate of the gas flowing through the pipe 35 at the time of purging at a predetermined timing, for example. The exhaust side sensor 33 outputs the measurement result (measured value) to the control device 6 by wire or wireless. The control device 6 performs signal processing on the measurement result of the exhaust side sensor 33 by the determination unit 37 to determine the purge state. The measured value of the exhaust side sensor 33 is, for example, approximately 0 at the start of the supply of the purge gas, increases as the supply of the purge gas proceeds, and saturates when the internal Fa of the container F is filled with the purge gas. For example, when the purge gas is supplied to the container F at a predetermined supply amount and the purge gas leakage from the container F is a predetermined value, the measured value of the exhaust side sensor 33 becomes substantially constant when the purge is appropriately performed. .

  The purge gas leakage from the container F mainly occurs from the gap between the lid portion 22 and the main body portion 21, but when the main body portion 21 or the lid portion 22 is damaged or the lid 22 is removed. Purge gas leakage increases. As the purge gas leaks more, the measured value of the exhaust side sensor 33 becomes lower than the predetermined value. Even when the purge gas source 40 or the flow rate control device 32 malfunctions or the pipes 34 and 35 are clogged, the measured value of the exhaust side sensor 33 becomes lower than a predetermined value.

  For example, the determination unit 37 determines the purge state by comparing the output signal of the exhaust side sensor 33 with a preset threshold value. The determination unit 37 determines that the purge state is normal when the measured value is equal to or greater than the threshold value, and determines that the purge state is abnormal when the saturated measured value is less than the threshold value. Note that the determination unit 37 may determine until the measurement value is saturated. Further, the determination unit 37 is not limited to being provided in the control device 6, and may be provided separately from the control device 6, for example. In this case, the exhaust side sensor (detection device) 33 may include a determination unit 37.

  When the exhaust side sensor 33 detects the component of the exhaust gas in the container F, the determination unit 37 determines the purge state by comparing the detection result of the exhaust side sensor 33 with a preset threshold value. For example, the exhaust side sensor 33 measures the oxygen concentration and moisture concentration (humidity) contained in the exhaust gas, and the determination unit 37 determines that the purge is normal when the measured value such as the oxygen concentration is less than a threshold value. When the measured value such as the oxygen concentration is equal to or greater than the threshold, it is determined that the purge is abnormal.

  The above-described purge device 4 functions as the inspection unit 45 (see FIG. 1) for confirming the purge because the exhaust side sensor 33 confirms the purge with respect to the container F. Further, as shown in FIG. 1, the purge device 4 is provided for each storage shelf 3, but may not be provided for some of the storage shelves 3. For example, the purge device 4 may be provided in one of a plurality of storage shelves 3 (one-stage storage shelf group) arranged in the X direction, or may be provided in two or more. Further, the purge device 4 may be provided in one of a plurality of storage shelves 3 (a group of storage shelves) arranged in the Z direction, or may be provided in two or more. In the case of the storage shelf 3 without the purge device 4, the stacker crane 5 places the container F on the storage shelf 3 having the purge device 4, and the purge device 4 sets the container F purged by the purge device 4. It may be placed on a storage shelf 3 that is not present. Further, the purge device 4 may be provided in addition to the storage shelf 3.

  FIG. 2B is a block diagram illustrating another example of the purge apparatus. Note that the same components as those in the purge device 4 shown in FIG. 2A are denoted by the same reference numerals, and description thereof is omitted or simplified. As shown in FIG. 2B, the purge device 400 has a pressure gauge (detection device) 38 connected to the downstream side of the flow rate control device 32 in the pipe 34. The pressure gauge 38 monitors the pressure of the purge gas flowing through the pipe 34 via the flow rate control device 32 and detects the purge state in the container F. The pressure gauge 38 outputs the measurement result (measured value) to the control device 6 by wire or wirelessly. The determination unit 37 of the control device 6 performs signal processing on the measurement result of the pressure gauge 38 to determine the purge state. The measured value of the pressure gauge 38 becomes a substantially constant value when the purge gas is properly supplied, but becomes larger or smaller than a predetermined range when an abnormality occurs in the container F or the purge device 400. Thereby, the abnormality of the purge with respect to the container F can be confirmed.

  As shown in FIGS. 2A and 2B, the detection device is not limited to using either the exhaust side sensor 33 or the pressure gauge 38, and both may be used simultaneously. In this case, the determination unit 37 of the control device 6 may determine that the purge is abnormal when one of the two measured values exceeds the threshold value or falls outside the predetermined range.

  By the way, the cause of the abnormality of the purge is caused by at least one of the purge device 4 and the container F. The determination unit 37 determines that the purge is abnormal when the purge device 4 is insufficiently supplied with purge gas or when the purge gas leaks from the container F frequently. When the purge stocker 1 according to the present embodiment detects a purge abnormality, the purge device 4 different from the purge device 4 when the abnormality is detected is used as an inspection unit 45, and the inspection unit 45 confirms the purge of the container F. (inspect. Therefore, the cause of the purge abnormality can be investigated without performing on-site inspection, and the stop time of the purge stocker required for on-site inspection can be reduced.

  FIG. 3 is a flowchart illustrating an example of an operation method of the purge stocker 1 according to the present embodiment. In this flowchart, an inspection process for inspecting the purge of the container F will be described with reference to FIG. In FIG. 1, reference numeral 4 a indicates a purge device that performs a purge when an abnormality is detected, and reference numeral Fx indicates a container that is purged when an abnormality is detected. Reference numeral 4b denotes a purge device 4b that is different from the purge device 4a. The purge device 4b is, for example, a purge device arranged next to the purge device 4a in the horizontal direction (X direction). The purge stocker 1 uses the purge device 4b as the inspection unit 45.

  As shown in FIG. 3, in step S11, the stacker crane 5 conveys the container Fx carried into the loading / unloading port to the storage shelf 3 provided with the purge device 4, and connects the container Fx to the purge device 4a. Next, in step S12, the purge device 4a supplies a purge gas to the container Fx via the flow rate control device 32 to purge the container Fx. Next, in step S13, the exhaust side sensor 33 detects the purge state by outputting the measured value to the control device 6 at a predetermined timing.

  Next, in step S14, the determination unit 37 of the control device 6 determines whether the purge is normal or abnormal by comparing the measured value of the exhaust side sensor 33 with a threshold value. When the determination unit 37 determines that there is no purge abnormality (step S14; No), the purge with respect to the container Fx is continued by the purge device 4a as it is. When the determination unit 37 determines that the purge is abnormal (step S14; Yes), in step S15, the control device 6 drives the stacker crane 5 to move the container Fx from the storage shelf 3 in the + X direction. The container Fx is transported to the adjacent storage shelf 3 and connected to the purge device 4b as the inspection unit 45. Next, in step S16, the purge device 4b supplies a purge gas to the container Fx, and purges the container Fx.

  Next, in step S17, the exhaust side sensor 33 of the purge device 4b detects the purge state by outputting the measured value to the control device 6 at a predetermined timing. Next, in step S18, the determination unit 37 determines whether the purge is normal or abnormal by comparing the measured value of the exhaust side sensor 33 with a threshold value. When the determination unit 37 determines that the purge is abnormal (step S18; Yes), the process proceeds to step S19, and the control device 6 determines that there is an abnormality cause in the container F. In this case, the control device 6 may determine that the previously used purge device 4a has no cause of abnormality.

  If the determination unit 37 determines that the purge is normal (step S18; No), the process proceeds to step S20, and the control device 6 determines that the previously used purge device 4a has a cause of abnormality. In this case, the control device 6 may determine that the container F has no cause of abnormality. When the process of step S19 or step S20 ends, a series of processes ends. After step S20, the container Fx has been properly purged, and may be stored in the storage shelf 3 having the purge device 4b as it is, or transferred to a storage shelf 3 separate from the purge device 4a. Also good. Further, after step S <b> 19, the container Fx has a purge abnormality, and therefore, the container Fx may be transported to the loading / unloading port by the stacker crane 5 and taken out from the purge stocker 1.

  Further, the determination in step S19 and the determination in step S20 may be performed by an operator, for example, and the purge stocker 1 may not be performed. Further, the control device 6 displays the presence / absence of an abnormality cause in the purge device 4a and the presence / absence of an abnormality cause in the container F on a display device (not shown) provided in the purge stocker 1 to notify the operator. Also good. In addition, after step S20, an operator may perform an on-site inspection for the purge device 4a.

  The purge device 4b is arbitrarily selected from the purge devices 4 to which the container F is not connected. When a purge device close to the purge device 4a is selected as the inspection unit 45, the transport time by the stacker crane 5 can be shortened. The purge device 4b may be a purge device provided in the storage shelf 3 at a stage different from the purge device 4a. For example, when the pipe (supply path) from the purge gas source is branched and connected to two or more purge apparatuses, a purge apparatus having a supply path different from the purge apparatus 4a may be selected as the inspection unit 45. . Further, as the inspection unit 45, a purge device provided other than the storage shelf 3 may be used.

[Second Embodiment]
Next, a second embodiment will be described with reference to the drawings. In the present embodiment, the same components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted. FIG. 4 is a diagram showing the configuration and operation of the purge stocker 100 according to the present embodiment. As shown in FIG. 4, the purge stocker 100 includes a reference container FR. When a purge abnormality is detected, the reference container FR is used for a purge test of the purge device 4 that has performed the purge. The reference container FR has the same structure as the container F (see FIG. 1B). When the reference container FR has the same structure as the container F, the conditions for comparing the purge result for the container F with the purge result for the reference container FR can be made uniform. However, the reference container FR may have a different structure from the container F, for example, a container without the lid portion 22. Two or more reference containers FR may be arranged. Further, as the reference container FR, a container F appropriately purged in another storage shelf 3 may be used.

  The reference container FR is placed on one of the plurality of storage shelves 3 inside the housing 2. For example, the storage shelf 3r on which the reference container FR is placed is set at a position that is easily accessible during regular maintenance of the purge stocker 100. The storage shelf 3r is set to the storage shelf 3 on the end side in the + X direction and the + Z direction, or the storage shelf 3 on the end side in the + X direction and the -Z direction. The reference container FR may be stored in a location other than the storage shelf 3 in the storage shelf 3 other than the storage shelf 3 r or in the internal Fa of the housing 2, or may be stored outside the housing 2. The reference container FR can be transported by the stacker crane 5 by arranging the reference container FR in the interior Fa of the housing 2 such as the storage shelf 3r.

  In the present embodiment, the purge stocker 100 performs purge confirmation (inspection) by purging the reference container FR with the purge device 4 when an abnormality is detected. When the determination unit 37 (see FIG. 2) of the purge device 4 detects a purge abnormality, the control device 6 conveys the container Fx from the storage shelf 3a by the stacker crane 5 and detects the purge abnormality. 4 is connected to the reference container FR. The control device 6 detects the purge state with respect to the reference container FR and confirms whether the purge is appropriately performed. If the control device 6 detects a purge abnormality with respect to the reference container FR, it can determine that the cause of the purge abnormality is on the purge device 4a side, and if it does not detect a purge abnormality with respect to the reference container FR, it causes a purge abnormality cause. Can be determined to be on the container Fx side.

  Next, an operation method of the purge stocker 100 according to the present embodiment will be described. FIG. 5 is a flowchart showing the operation of the purge stocker according to the present embodiment. The flowchart will be described with reference to FIG. In FIG. 5, the processes in steps S <b> 11 to S <b> 14 are the same as the processes described with reference to FIG. 3.

  When the determination unit 37 determines that the purge is abnormal (step S14; Yes), in step S21, the stacker crane 5 transports the container Fx from the storage shelf 3a to another storage shelf 3, and purges the container Fx. It operates so as to be detached from the device 4a. Next, in step S22, the stacker crane 5 conveys the reference container FR from the storage shelf 3r to the storage shelf 3a, and connects the reference container FR to the purge device 4a. Next, in step S23, the purge device 4a purges the reference container FR. Next, in step S24, the flow rate of the exhaust gas is measured by the exhaust side sensor 33, and the purge state with respect to the reference container FR is detected and output to the control device 6. Next, in step S25, the determination unit 37 of the control device 6 compares the measured value of the exhaust side sensor 33 with a threshold value to determine whether the purge is normal or abnormal.

  When the determination unit 37 determines that the purge is abnormal (step S25; Yes), the process proceeds to step S26, and the control device 6 determines that there is an abnormality cause in the purge device 4a. In this case, the control device 6 may determine that there is no cause of abnormality in the previous container Fx. If the determination unit 37 determines that the purge is normal (step S25; No), the process proceeds to step S27, and the control device 6 determines that there is no cause of abnormality in the purge device 4a. In this case, the control device 6 may determine that there is an abnormality cause in the container Fx.

  When the process of step S26 or step S27 is finished, a series of processes are finished. The determination in step S26 or step S27 may be performed by an operator, for example. Further, the control device 6 may notify the operator of, for example, the presence or absence of an abnormality cause in the purge device 4a and the presence or absence of the abnormality cause in the container F by displaying them on a display device or the like.

  In addition, when the purge device 4 is provided in the storage shelf 3r in which the reference container FR is disposed, the purge device 4 purges the reference container FR periodically or irregularly according to an operator's command. It is possible to check whether there is a purge abnormality. Further, the first embodiment and the second embodiment may be combined. For example, the reference container FR is purged by the purge device 4a, and the container F is purged by the purge device 4b. An abnormality of the purge device 4a may be determined.

[Modification]
Next, a modified example will be described. When there is no abnormality in both the container F and the purge device 4, there is a possibility that an abnormality in the purge may occur due to, for example, a positional deviation or a posture when the container F is connected to the purge device 4. In this modification, when a purge abnormality is detected, the purge is first retried. When a purge abnormality is also detected in the retry, the method of the first embodiment or the second embodiment described above is used. Perform an inspection.

  FIG. 6A is a diagram showing a modified example of the operation of the purge stocker 1 (100). In this modification, the control device 6 causes the stacker crane 5 to reconnect the container Fx to the purge device 4a when an abnormality is detected when the purge is performed on the container Fx by the purge device 4a. For example, the stacker crane 5 lifts the container Fx from the storage shelf 3 and places it on the storage shelf 3 again. After the container Fx and the purge device 4a are connected again, the control device 6 purges the container Fx and confirms the purge state.

  FIG. 6B is a flowchart showing a modified example of the operation. As shown in FIG. 6B, when it is determined in step S14 that the purge is abnormal (step S14; Yes), in step S31, the stacker crane 5 lifts the container Fx from the storage shelf 3, It arrange | positions again in this storage shelf 3a, and connects the purge apparatus 4a and the container Fx again. Next, in step S32, the purge device 4a purges the container Fx. Next, in step S <b> 33, the exhaust gas sensor 33 measures the flow rate of the exhaust gas, detects the purge state for the container Fx, and outputs it to the control device 6. Next, in step S34, the determination unit 37 compares the measured value of the exhaust side sensor 33 with a threshold value, and determines whether the purge for the container Fx is normal or abnormal.

  When the determination unit 37 determines that the purge is abnormal (step S34; Yes), the process proceeds to step S15 illustrated in FIG. 3 or step S21 illustrated in FIG. The processing after step S15 or the processing after step S21 is as described above. If the determination unit 37 determines that there is no purge abnormality (step S34; No), the process proceeds to the end. If the determination unit 37 determines that the purge is abnormal (step S34; Yes), the process returns to step S31, the connection (retry) between the container Fx and the purge device 4a is performed one or more times, and a predetermined number of retries are performed. However, when it is determined that the purge is abnormal, the process may proceed to step S15 or step S21.

[Third Embodiment]
Next, a third embodiment will be described. In the present embodiment, the same components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted. 7A and 7B show the configuration of the purge stocker 200 according to the third embodiment, where FIG. 7A is a perspective view and FIG. 7B is a top view. As shown in FIG. 7, the purge stocker 200 includes a stocker body 46 and an inspection unit 450. The stocker body 46 has, for example, the same configuration as the purge stocker 1 shown in FIG. Inside the stocker body 46, a movable range 5a of the stacker crane 5 (see FIG. 1) is set. The inspection unit 450 is disposed in the stocker body 46 and away from the movable range 5a. The area A in which the inspection unit 450 is disposed is a space isolated from the movable range 5a of the stacker crane 5, and is an area where a person can enter the stocker body 46 without the interlock being operated, for example.

  The inspection unit 45 includes an inspection table 450a on which the container F can be placed. When a purge abnormality is detected, the stacker crane 5 transports the container F when the abnormality is detected to the loading / unloading port. The container F is transported from the loading / unloading port onto the inspection table 450a by an operator or another transport device, and inspected on the inspection table 450a.

  FIG. 8 is a block diagram illustrating an example of the inspection unit 450. When the container F is placed on the inspection table 450a, the introduction port 24 (see FIG. 1B) of the container F is connected to the purge gas source 40 via the pipe 34 and the flow rate control device 32. Note that the pipe 34 and the flow rate control device 32 may not be installed in the inspection unit 450 in advance, and may be connected to the inspection unit 450 when the container F is inspected. The purge gas source 40 may be provided separately from the purge gas source that supplies the purge gas to the stocker body 46. Further, the exhaust port 26 (see FIG. 1B) of the container F is connected to the purge gas exhaust 41 via a pipe 35 and an external sensor (detection device) 47. The pipe 35 and the external sensor 47 may not be installed in the inspection unit 450 in advance, and may be connected to the inspection unit 450 when the container F is inspected.

  As the external sensor 47, for example, the same sensor as the exhaust side sensor 33 shown in FIG. The determination unit 48 determines the purge state by, for example, comparing the measured value of the external sensor 47 with a threshold value, and outputs the determination result to the control device 6. The determination unit 48 may be provided in the external sensor 47. Thus, the operator can carry out the inspection by carrying the container F outside the movable range 5a of the stacker crane 5. At this time, it is not necessary to stop the operation of the stacker crane 5, and the operation of the purge stocker 200 can be continued. In addition, by adopting the same configuration as the purging device 4 provided in the storage shelf 3 (see FIG. 1) as the inspection unit 450, the purge of the container Fx is confirmed by reproducing almost the same situation as the purge in the storage shelf 3. it can.

  9A and 9B show a purge stocker 300 according to a modification, where FIG. 9A is a perspective view and FIG. 9B is a top view. As shown in FIG. 9, in the purge stocker 300, the inspection unit 451 is provided in a state of protruding to the outside of the stocker body 46. Therefore, in the stocker body 46, the movable range 5b of the stacker crane 5 can be set to a range wider than the movable range 5a of the third embodiment described above. The inspection unit 451 may be provided in contact with the stocker main body 46 or may be disposed away from the stocker main body 46.

  The configuration of the inspection unit 451 is the same as that of the inspection unit 450 shown in FIG. Further, the inspection unit 451 may be disposed in the vicinity of a loading / unloading port (not shown) for loading / unloading the container F in the stocker body 46. Thereby, the container Fx conveyed to the loading / unloading port can be easily conveyed to the inspection unit 451. The container F may be transported to the inspection unit 451 by either an operator or another transport device.

  As mentioned above, although embodiment of this invention was described, the technical scope of this invention is not limited to above-described embodiment or modification. In addition, the requirements described in the above-described embodiment or modification can be combined as appropriate. For example, the purge device 4 of the storage shelf 3 is used as the inspection unit 45 as in the purge stocker 1 of the first embodiment, and the stocker body 46 is inspected as in the purge stockers 200 and 300 of the third embodiment. Parts 450 and 451 may be provided.

1, 100, 200, 300 ... purge stocker 3 ... storage shelf 4, 400 ... purge device 5 ... stacker crane (conveying device)
5a ... movable range 6 ... control device 33 ... exhaust side sensor (detection device)
38 ... Pressure gauge (detection device)
45, 450, 451 ... inspection part F, Fx ... container FR ... reference container

Claims (10)

A purge device for supplying purge gas into the container;
A detection device for detecting a purge state in the container;
A purge stocker comprising: an inspection unit configured to confirm purge of the container when the detection device detects a purge abnormality. A transport device for transporting the container, and a plurality of the purge devices,
When the detection device detects a purge abnormality, the inspection unit uses the purge device different from the purge device when the purge abnormality is detected,
The purge stocker according to claim 1, wherein the transport device transports the container to another purge device. A plurality of shelves for holding the containers;
The purge stocker according to claim 2, wherein the purge device is provided in each of the plurality of shelves.   The purge stocker according to claim 2 or 3, wherein the inspection unit is arranged apart from a movable range of the transport device. A purge device for supplying purge gas into the container;
A transport device for transporting the container;
A detection device for detecting a purge state in the container;
A purge stocker comprising: a reference container that is transported by the transport device and connected to the purge device instead of the container when the detection device detects a purge abnormality.   The purge stocker according to claim 4, wherein the reference container has the same structure as the container. A transport container for transporting the container;
The purge stocker according to claim 1, wherein the transport device performs an operation of reconnecting the container to the purge device when the detection device detects a purge abnormality.   The purge stocker according to any one of claims 1 to 7, wherein the detection device detects a purge state by monitoring a purge gas discharged from the container.   The detection device according to claim 8, wherein the detection device detects a purge state in the container based on at least one of a flow rate per unit time, an oxygen concentration, and a moisture concentration with respect to the purge gas discharged from the container. Purge stocker. An operation method of a purge stocker including a purge device for supplying a purge gas into a container,
Detecting a state of purge in the vessel;
When a purge abnormality is detected, the purging of the container is confirmed by an inspection unit provided in the purge stocker, or a reference container provided in the purge stocker is connected to the purge device instead of the container; Of purge stocker including

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