WO2022130565A1 - 超音波処理方法及び超音波処理装置 - Google Patents

超音波処理方法及び超音波処理装置 Download PDF

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Publication number
WO2022130565A1
WO2022130565A1 PCT/JP2020/047147 JP2020047147W WO2022130565A1 WO 2022130565 A1 WO2022130565 A1 WO 2022130565A1 JP 2020047147 W JP2020047147 W JP 2020047147W WO 2022130565 A1 WO2022130565 A1 WO 2022130565A1
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WIPO (PCT)
Prior art keywords
reflected
vibrating body
ultrasonic
treatment
processed
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Ceased
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PCT/JP2020/047147
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English (en)
French (fr)
Japanese (ja)
Inventor
英里 干場
博充 伊達
慎司 徳丸
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Nippon Steel Corp
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Nippon Steel Corp
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Priority to JP2022569423A priority Critical patent/JP7295490B2/ja
Priority to PCT/JP2020/047147 priority patent/WO2022130565A1/ja
Publication of WO2022130565A1 publication Critical patent/WO2022130565A1/ja
Anticipated expiration legal-status Critical
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts

Definitions

  • the present invention relates to an ultrasonic processing method and an ultrasonic processing apparatus.
  • the vibrator is as shown in Patent Document 1 below.
  • the ultrasonic wave is applied while moving the ultrasonic wave, and the ultrasonic wave reflecting member is provided to the processing tank as in Patent Document 2 below.
  • an object of the present invention is to perform surface treatment on an aggregate composed of a plurality of objects to be treated. It is an object of the present invention to provide an ultrasonic processing apparatus and an ultrasonic processing method capable of more reliably propagating ultrasonic waves to the surface and further making the surface treatment uniform.
  • a reflective member for reflecting ultrasonic waves is provided inside an aggregate composed of a plurality of objects to be processed, and the number of such reflective members and the number thereof.
  • the idea was to bring the object to be contacted into contact with the object while maintaining an appropriate gap.
  • the present inventors have found a condition for bringing the reflective member and the object to be contacted into contact with each other while maintaining an appropriate gap.
  • the gist of the present invention completed based on such findings is as follows.
  • a treatment tank having a long axis having substantially the same cross-sectional shape and provided with an ultrasonic application mechanism is filled with a treatment liquid, and a plurality of objects to be treated extending in the longitudinal direction are contained in the treatment liquid.
  • An ultrasonic treatment method in which surface treatment is performed while applying ultrasonic waves to the object to be treated in a soaked state, and each of the objects to be treated is combined with one or a plurality of other objects to be treated.
  • One or a plurality of hollow reflected vibrating bodies extending in the longitudinal direction while being immersed in the treatment liquid are arranged in the treatment tank so as to be in contact with each other at at least two locations.
  • Each of the above is arranged so as to be in contact with the other object to be processed at at least two points, and the maximum value of the outer diameter in the cross section perpendicular to the longitudinal direction of the object to be processed is Ds, and the reflected vibrating body is of the reflected vibrating body.
  • the maximum value of the outer diameter in the cross section perpendicular to the longitudinal direction is Dr
  • the outer diameter ratio Dr / Ds is 0.2 to 6.0
  • the intrinsic acoustic impedance Zr of the reflected vibrating body is 1 ⁇ .
  • the treated liquid is filled with a liquid having a dissolved gas amount of 80% or more of the saturated dissolved gas amount and a hollow portion of the reflected vibrating body having a dissolved gas amount of less than 50% of the saturated dissolved gas amount.
  • the ultrasonic treatment method according to (1) (5) The ultrasonic treatment method according to (1), wherein the hollow portion of the reflected vibrating body is filled with the treatment liquid.
  • the ratio of lengths Lr / Ls is 0. .
  • the ultrasonic treatment method according to any one of (1) to (6) which satisfies the relationship of 7 ⁇ Lr / Ls ⁇ 3.0.
  • the ultrasonic treatment method according to any one of (1) to (7) wherein a flange portion is provided on the outer surface of the reflected vibrating body.
  • Df the size of the cross section of the reflected vibrating body in the portion where the flange portion is provided
  • Df the ratio Df / Dr of the size of the cross section is 1.1 ⁇ Df / Dr ⁇ 3.0.
  • the ultrasonic treatment method according to (8) which satisfies the above relationship.
  • the flange portion is provided so as to be in contact with the object to be processed at least one place within a range of a length of 5 m of the object to be processed along the longitudinal direction of the object to be processed.
  • a treatment tank having a long axis having substantially the same cross-sectional shape and containing a plurality of objects to be processed extending in the longitudinal direction and a treatment liquid for immersing the object to be processed, and the treatment.
  • An ultrasonic processing apparatus comprising an ultrasonic application mechanism for applying ultrasonic waves to a liquid, wherein each of the objects to be processed is one or a plurality of other objects to be processed at at least two places.
  • One or a plurality of hollow reflected vibrators extending in the longitudinal direction are arranged in the treatment tank so as to be in contact with each other and immersed in the treatment liquid, and each of the reflected vibrators is at least 2.
  • Ds is the maximum value of the outer diameter in a cross section perpendicular to the longitudinal direction of the object to be processed, which is arranged so as to be in contact with another object to be processed.
  • Dr the maximum value of the outer diameter in the above
  • Dr / Ds the outer diameter ratio Dr / Ds is 0.2 to 6.0
  • the intrinsic acoustic impedance Zi of the reflected vibrating body is 1 ⁇ 10 7 to 2 ⁇ 10.
  • An ultrasonic processing apparatus having a weight of 8 kg ⁇ m ⁇ 2 ⁇ sec -1 and having a hollow portion of the reflected vibrating body filled with a liquid or gas having an intrinsic acoustic impedance Zr different from that of the intrinsic acoustic impedance Zi.
  • ultrasonic waves are more reliably propagated to the plurality of objects to be treated to perform surface treatment. It is possible to achieve further uniformity.
  • FIGS. 1A and 1B are explanatory views schematically showing an example of the overall configuration of the ultrasonic processing apparatus according to the present embodiment.
  • the size of each member in the figure is appropriately emphasized for ease of explanation, and does not indicate the actual size or the ratio between the members.
  • ultrasonic waves are used in combination with a treatment liquid for performing a predetermined treatment on a plurality of objects to be treated, and the surface of the object to be treated (a portion in contact with the treatment liquid). It is a device that performs a predetermined process on the device.
  • the ultrasonic processing apparatus 1 performs various treatments such as cleaning on various metal bodies represented by steel materials and various non-metal bodies represented by plastic resin members and the like. It can be used when applying. For example, various metal bodies extending in a predetermined longitudinal direction such as steel pipes, shaped steels, steel bars, steel wires, etc. are used as objects to be treated, and by using the ultrasonic processing apparatus 1 according to the present embodiment, these metal bodies are used.
  • pickling treatment, degreasing treatment, and further cleaning treatment can be performed. Further, the ultrasonic treatment apparatus 1 according to the present embodiment can also be used when performing a water washing treatment after a pickling treatment.
  • the pickling treatment is a treatment for removing the oxide scale formed on the surface of the metal body by heat treatment or thermal processing using an acidic solution
  • the degreasing treatment is a treatment for removing an organic solvent and a surfactant.
  • This is a treatment for removing oils such as lubricants and processing oils used for processing and the like by using an aqueous solution containing the above or an alkaline degreasing liquid.
  • These pickling treatments and degreasing treatments are pretreatments that are carried out prior to applying a surface finishing treatment (metal coating treatment, chemical conversion treatment, coating treatment, etc.) to a metal body.
  • Such pickling treatment may dissolve a part of the ground metal.
  • the pickling treatment is also used for dissolving the metal body by etching to improve the surface finish quality.
  • a degreasing treatment may be provided before the pickling treatment, and the degreasing performance in the degreasing treatment may affect the removal of scale in the subsequent pickling treatment.
  • the degreasing treatment is also used to improve the wettability, which is an oil content control index as the finish quality of the final product.
  • the ultrasonic processing apparatus 1 includes used pipes, pipes that require regular or irregular stain removal, and the like, in addition to the cleaning process in the production line as described above. It can also be used for cleaning and the like.
  • the ultrasonic treatment apparatus 1 used in the ultrasonic treatment method according to the present embodiment can be applied to various surface treatments of an object to be treated such as a long body extending along a predetermined longitudinal direction. It is also possible to use a long body having a surface-treated film (for example, various oxide films and plating films, a coating film after surface treatment finishing treatment, etc.) formed on the surface as an object to be treated. Further, in the ultrasonic treatment apparatus 1 according to the present embodiment, in addition to the various films intentionally formed as described above, for example, unintended surface deposits such as oxide scale and oil are adhered in the form of a film. It is also possible to use a long body as the object to be treated.
  • a surface-treated film for example, various oxide films and plating films, a coating film after surface treatment finishing treatment, etc.
  • a treatment tank in which a treatment liquid is held exists and a plurality of long bodies are immersed as an aggregate inside the treatment tank.
  • the aggregate of the plurality of long bodies is immersed in the processing tank in which the processing liquid is held by a drive mechanism (not shown) capable of moving up and down such as a crane.
  • the aggregate of a plurality of long bodies may be immersed in a treatment tank in a state of being bundled by a wire, a net or the like (not shown).
  • the ultrasonic processing apparatus 1 includes a processing tank 10 in which an aggregate of a plurality of long bodies, which is an example of the object S to be processed, is housed, and an ultrasonic wave applying mechanism 20. And have.
  • the cross-sectional shape perpendicular to the long axis direction (y-axis direction) of the treatment tank 10 is substantially the same cross-sectional shape. As shown schematically in FIG.
  • each object to be treated S is a tubular body such as a steel pipe extending along the y-axis direction or a long object such as steel bar, and is one or a plurality of other objects. It is arranged so as to be in contact with the processed object S at at least two places. Further, in the ultrasonic processing apparatus 1 according to the present embodiment, as schematically shown in FIG. 1B, one or a plurality of reflections extending in the longitudinal direction so as to come into contact with the object S to be processed at at least two points. A vibrating body 30 is provided.
  • the reflected vibrating body 30 may be inside the aggregate of the object to be processed S as long as it is in contact with the object to be processed S at at least two places, or the reflected vibrating body 30 may be inside the aggregate of the object to be processed S. 30 may be exposed from the aggregate S of the object to be processed, that is, outside the aggregate S. Further, when there are a plurality of reflected vibrating bodies 30, a part of the reflected vibrating bodies 30 may be inside the aggregate and a part of the reflected vibrating bodies 30 may be outside the aggregate.
  • the number of objects S to be processed may be one.
  • the number of objects S to be treated is preferably 2 or more.
  • the upper limit of the number of objects S to be processed is naturally determined by the dimensions of the processing tank 10 and the dimensions of the object S to be processed.
  • the upper limit of the number of objects S to be processed may be 1000 or 100.
  • FIG. 1A six ultrasonic wave application mechanisms 20 are provided on each surface of the inner wall surface substantially parallel to the inner wall surface of the processing tank 10 in the y-axis direction, and the inner wall surface is substantially parallel to the x-axis direction.
  • the wall surface is provided with two ultrasonic wave application mechanisms 20 on each surface.
  • the number and installation state of the ultrasonic wave applying mechanisms 20 are not limited to the example shown in FIG. 1A.
  • the number of ultrasonic wave application mechanisms 20 may be appropriately set according to the shape, size, and the like of the processing tank 10.
  • the ultrasonic application mechanism 20 is installed so as to be symmetrical as much as possible, or the ultrasonic wave application mechanism 20 is arranged in a staggered manner. It is possible.
  • FIG. 1B illustrates the case where only one reflected vibrating body 30 is provided, the number of reflected vibrating bodies 30 used is not particularly limited.
  • the reflected vibrating body 30 may be appropriately set according to the number of objects S to be processed, and two or more reflected vibrating bodies 30 may be used.
  • the treatment tank 10 has a long axis (y-axis in the case of FIG. 1A) having substantially the same cross-sectional shape, and the treatment liquid 3 used for performing a predetermined treatment on the object S to be treated, and The object S itself to be processed and the reflected vibrating body 30 are accommodated. As a result, the object S to be treated contained in the treatment tank 10 is immersed in the treatment liquid 3.
  • the type of the treatment liquid 3 held in the treatment tank 10 is not particularly limited, and various treatment liquids can be used depending on the treatment to be performed on the object S to be treated.
  • Examples of such a treatment liquid 3 include pure water, distilled water, an aqueous solution containing various compounds, various organic solvents, and the like, and these treatment liquids include various substances removed from the object S to be treated and the like. Impurities may be present in various forms. Further, the treatment liquid 3 may or may not be degassed in order to increase the propagation efficiency of ultrasonic waves. Further, fine bubbles having a bubble diameter of 100 ⁇ m or less may be present in the treatment liquid 3. The presence of fine bubbles in the treatment liquid 3 makes it possible to further improve the treatment efficiency as well as increase the shock wave of ultrasonic waves.
  • the temperature of the treatment liquid 3 depends on the specific treatment content to be carried out using the treatment liquid 3, but is preferably about 20 ° C. to 85 ° C., for example.
  • the fact that the liquid is degassed means that the amount of dissolved gas in the liquid of interest is less than 50% of the amount of saturated dissolved gas determined by the temperature of the liquid, and the liquid is not degassed. Means that the amount of dissolved gas in the liquid of interest is 80% or more of the amount of saturated dissolved gas.
  • the material used to form the treatment tank 10 according to the present embodiment is not particularly limited, and may be various metal materials such as iron, steel, stainless steel plate, etc., and fiber reinforced plastic (FRP). ), Polypropylene (PP) and the like, and various bricks such as acid-resistant bricks and the like. That is, as the processing tank 10 constituting the ultrasonic processing apparatus 1 according to the present embodiment, it is possible to newly prepare a processing tank made of the above-mentioned material, and it is already installed in various production lines and the like. It is also possible to use the processing tank of.
  • FRP fiber reinforced plastic
  • PP Polypropylene
  • the size of the treatment tank 10 is not particularly limited, and even if it is a large treatment tank having various shapes such as a liquid level depth of about 1 to 2 m ⁇ a total length of about 3 to 25 m, the present embodiment It can be used as the processing tank 10 of the ultrasonic processing apparatus 1 according to the above.
  • the ultrasonic wave application mechanism 20 is provided in the processing tank 10, and applies ultrasonic waves having a predetermined frequency to the processing liquid 3, the object S to be processed, and the reflected vibrating body 30 housed in the processing tank 10.
  • the ultrasonic application mechanism 20 is not particularly limited, and various known ultrasonic oscillators such as an ultrasonic oscillator connected to an ultrasonic oscillator can be used. Further, in FIGS. 1A and 1B, the case where the ultrasonic wave application mechanism 20 is provided on the wall surface of the processing tank 10 is shown, but the installation position of the ultrasonic wave application mechanism 20 in the processing tank 10 is also particularly limited.
  • one or a plurality of ultrasonic transducers may be appropriately installed on the wall surface or the bottom surface of the processing tank 10. If the conditions are such that the ultrasonic waves are uniformly propagated to the entire processing tank 10, the balance of the oscillation load of each ultrasonic vibrator becomes uniform, so that the number of ultrasonic vibrators is plural. Even so, there is no interference between the generated ultrasonic waves.
  • FIGS. 2A and 2B are explanatory views schematically showing an example of the configuration of the ultrasonic wave applying mechanism 20 according to the present embodiment.
  • the ultrasonic wave applying mechanism 20 may be composed of, for example, an ultrasonic oscillator 201 and an ultrasonic oscillator 203.
  • the ultrasonic oscillator 201 is a device that supplies electric power to the ultrasonic oscillator 203 with a desired output.
  • the ultrasonic oscillator 203 converts the power output from the ultrasonic oscillator 201 into vibration, and oscillates an ultrasonic wave having a desired frequency from the oscillation surface.
  • the ultrasonic wave applying mechanism 20 may be composed of, for example, an ultrasonic oscillator 201 and a throw-in type oscillator 211.
  • the throw-in type oscillator 211 has a plurality of ultrasonic oscillators 203 arranged inside the housing 205 and then ultrasonic waves so as to cover the oscillation surface of each ultrasonic oscillator 203.
  • the housing 205 is sealed with a member made of a predetermined material that allows the housing 205 to pass through. In this case, the member provided so as to cover the oscillation surface of each ultrasonic oscillator 203 becomes the oscillation surface of the throw-in oscillator 211.
  • the interval and the number of the ultrasonic oscillator 203 and the size of the oscillation surface are determined in consideration of the output stability of the ultrasonic wave and the oscillation efficiency.
  • the frequency of the ultrasonic wave output from the ultrasonic wave applying mechanism 20 is preferably, for example, 20 kHz to 200 kHz.
  • the frequency of the ultrasonic wave output from the ultrasonic wave applying mechanism 20 is more preferably 20 kHz or more, still more preferably 25 kHz or more.
  • the frequency of the ultrasonic wave exceeds 200 kHz, the straightness of the ultrasonic wave when processing the object S to be processed becomes too strong, and the uniformity of the processing may decrease.
  • the frequency of the ultrasonic wave output from the ultrasonic wave applying mechanism 20 is more preferably 150 kHz or less, still more preferably 100 kHz or less.
  • the frequency of the ultrasonic wave to be applied it is preferable to select an appropriate value within the above range for the frequency of the ultrasonic wave to be applied according to the type of the object S to be processed and the like, and depending on the type of the object S to be processed, the frequency of two or more types of ultrasonic waves is superposed. Sound waves may be applied.
  • the ultrasonic wave application mechanism 20 may have a frequency sweep function capable of applying ultrasonic waves while sweeping the frequency within a predetermined range around the frequency of a certain selected ultrasonic wave. Such a frequency sweep function makes it possible to realize the following further effects.
  • the reflected vibrating body 30 is immersed in the treatment liquid 3 and is inside an aggregate of a plurality of objects S to be treated or immersed in the treatment liquid 3. It is provided outside.
  • the inside of the aggregate of the object S to be processed does not mean only a state in which all of the reflected vibrating body 30 is surrounded by the aggregate of the object S to be processed, but at least one of the reflected vibrating bodies 30. It also includes a state in which the portion is in contact with at least two objects S to be processed and is surrounded by the objects S to be processed.
  • the reflected vibrating body 30 may be buried inside an aggregate of a plurality of objects S to be processed. Further, the reflected vibrating body 30 may be located outside the aggregate of the object to be processed S as long as it is in contact with another object to be processed S at at least two places.
  • the reflected vibrating body 30 is a hollow member stretched along the longitudinal direction, and in the example shown in FIG. 1B, the reflected vibrating body 30 is stretched along the y-axis direction.
  • the reflected vibrating body 30 is formed by using a material capable of reflecting the applied ultrasonic waves.
  • FIGS. 3 to 7 are schematic views for explaining the reflected vibrating body 30 according to the present embodiment.
  • the ultrasonic waves which are longitudinal waves
  • the ultrasonic waves are reflected on the surface of the reflected vibrating body 30. Therefore, by using the reflected vibrating body 30 according to the present embodiment, the ultrasonic waves that have reached the inside of the aggregate of the plurality of objects S to be processed are reflected, and the ultrasonic waves are applied to more objects S to be processed. It becomes possible to do.
  • the ultrasonic processing apparatus 1 according to the present embodiment it is possible to more reliably propagate ultrasonic waves to a plurality of objects S to be processed to further make the surface treatment more uniform.
  • the reflected vibrating body 30 when the ultrasonic wave which is a longitudinal wave reaches the surface of the reflected vibrating body 30, the reflected vibrating body 30 generates a transverse wave as schematically shown in FIG.
  • the frequency of the ultrasonic wave applied in the ultrasonic processing apparatus 1 according to the present embodiment belongs to, for example, the kHz band, but the frequency of the transverse wave generated by the reflected vibrating body 30 is the ultrasonic wave. It is lower than the frequency of, for example, about several tens to several hundreds of Hz.
  • the generated transverse wave propagates in the reflected vibrating body 30, and the transverse wave propagates to the object S to be processed through the contact portion of the object S to be processed.
  • the transverse wave propagating in the object to be processed S propagates to the other object to be processed S via the contact portion with the other object to be processed S. Due to such propagation of transverse waves, the ultrasonic processing apparatus 1 according to the present embodiment can vibrate the object S to be processed by the transverse waves in addition to the ultrasonic cavitation. As a result, in the ultrasonic processing apparatus 1 according to the present embodiment, various surface treatments can be more reliably applied to the object S to be processed.
  • the reflected vibrating body 30 has an intrinsic acoustic impedance Zr of 1 ⁇ 10 7 kg ⁇ m -2 ⁇ sec -1 to 2 ⁇ 10 8 kg. -Formed from a material that is m -2 ⁇ sec -1 .
  • the reflected vibrating body 30 can reliably reflect ultrasonic waves.
  • the reflected vibrating body 30 is formed of the material having the intrinsic acoustic impedance Zr as described above, the hollow portion of the reflected vibrating body 30 is different from the intrinsic acoustic impedance Zr as described below. It will be filled with a liquid or gas having an acoustic impedance of Zi.
  • Materials having an inherent acoustic impedance of 1 ⁇ 10 7 kg ⁇ m -2 ⁇ sec -1 to 2 ⁇ 10 8 kg ⁇ m -2 ⁇ sec -1 include, for example, various metals or metal oxides, and non-oxidized materials.
  • Various ceramics including physical ceramics can be mentioned.
  • steel (inherent acoustic impedance [unit: kg ⁇ m -2 ⁇ sec -1 ]: 4.70 ⁇ 107 hereinafter, the numerical values in parentheses are similarly intrinsic acoustic impedance.
  • a material used for forming the reflected vibrating body 30 is appropriately used depending on the liquid property of the processing liquid 3 held in the processing tank 10 and the strength required for the reflected vibrating body 30. It may be selected, but it is preferable to use various metals or metal oxides having the above-mentioned intrinsic acoustic impedance.
  • the cross-sectional shape of the reflected vibrating body 30 may be a circular shape or an elliptical shape as illustrated in FIG. It may be a polygonal shape. However, the closer it is to the circular shape, the less anisotropy occurs in the traveling direction of the reflected wave, and the easier it is to make contact with the object S to be processed. Therefore, the cross-sectional shape of the reflected vibrating body 30 is circular. The shape is preferable.
  • the ultrasonic wave propagates through the processing liquid 3 which is a medium. Therefore, in order to ensure that the ultrasonic waves reach the surrounding object S to be processed, it is important that a gap exists around the reflected vibrating body 30.
  • the transverse wave as shown in FIG. 3 to the object to be processed S at least a part of the reflected vibrating body 30 and at least a part of the object to be processed S must be in contact with each other. is important.
  • the size of the cross section of the object to be processed S is used as a reference. It was possible to find a condition in which the size of the cross section of the reflected vibrating body 30 is satisfactory. Hereinafter, such conditions will be described.
  • the maximum value of the diameter is the maximum when the cross-sectional shape is circular as shown in the upper left of FIG. 4, and the maximum of the major axis is when the cross-sectional shape is elliptical as shown in the upper right of FIG.
  • the size of the longest diagonal line is defined as the maximum value Dr of the outer diameter of the reflected vibrating body 30.
  • the maximum value of the outer diameter is set to Ds in the same manner as in the reflected vibrating body 30.
  • the maximum value of the outer diameter of the portion excluding the flange portion 33 is set to Dr.
  • the outer diameter ratio Dr / Ds of the reflected vibrating body 30 satisfies the relationship of 0.2 ⁇ Dr / Ds ⁇ 6.0.
  • the reflected vibrating body 30 can realize a contact state while creating a gap with the object S to be processed.
  • the outer diameter ratio Dr / Ds of the reflected vibrating body 30 is preferably 0.5 or more, and more preferably 1.0 or more.
  • the outer diameter ratio Dr / Ds of the reflected vibrating body 30 exceeds 6.0, the reflected vibrating body 30 becomes relatively large, and it is not possible to secure a space for processing a plurality of objects S to be processed. In some cases, or even if the contact state with the object S to be processed can be maintained, there may be a case where the ultrasonic wave cannot propagate because it is behind the reflected vibrating body 30.
  • the outer diameter ratio Dr / Ds of the reflected vibrating body 30 is preferably 5.0 or less, more preferably 4.5 or less.
  • the thickness (thickness) of the reflected vibrating body 30 is represented by tr
  • the intrinsic acoustic impedance of the reflected vibrating body 30 is represented by Zr
  • the substance (encapsulated) in the reflected vibrating body 30 is represented.
  • the intrinsic acoustic impedance of the liquid or gas existing inside the reflected vibrating body regardless of the presence or absence is expressed as Zi.
  • the thickness t [mm] of the reflected vibrating body 30 is set to 0.2 ⁇ t ⁇ 3. It is preferably in the range of 0.
  • the thickness tr of the reflected vibrating body 30 is within the range of 3.0 mm ⁇ t ⁇ 20.0 mm.
  • the fact that the ratio Zi / Zr of the intrinsic acoustic impedance is 1 ⁇ 10 -3 or less means that the intrinsic acoustic impedance Zi of the material inside the hollow of the reflected vibrating body 30 and the intrinsic acoustic impedance Zr of the reflected vibrating body 30. This means that the difference between the two is large and the ultrasonic waves are easily reflected at the interface between the reflected vibrating body 30 and the material inside the hollow of the reflected vibrating body 30.
  • the substance capable of realizing the ratio Zi / Zr of the intrinsic acoustic impedance is, for example, various gases (for example, air, oxygen, etc.). Nitrogen, carbon dioxide, inert gas such as helium and argon, etc.).
  • the intrinsic acoustic impedance of air is 4.29 ⁇ 10 2 kg ⁇ m -2 ⁇ sec -1 .
  • the thickness tr of the reflected vibrating body 30 by setting the thickness tr of the reflected vibrating body 30 to 0.2 mm to 3.0 mm, the time for ultrasonic waves to pass through the reflected vibrating body 30 can be shortened, and further, the reflected vibrating body 30 after passing can be shortened. It is possible to more efficiently reflect the ultrasonic waves that have reached the inner surface of the above by the closed gas filled in the hollow inside of the reflected vibrating body 30.
  • the thickness tr of the reflected vibrating body 30 is thinner than 0.2 mm, the strength when the reflected vibrating body 30 is provided inside the aggregate of a plurality of objects to be processed is weak, and the reflected vibrating body 30 is deformed as the reflected vibrating body 30. It may not be able to fulfill its role.
  • the thickness tr of the reflected vibrating body 30 is more preferably 0.3 mm or more.
  • the ultrasonic waves are absorbed, scattered, or reflected in the reflected vibrating body 30 before reaching the interface inside the hollow of the reflecting vibrating body 30. Reflection occurs on the surface of the vibrating body 30, and as a result, ultrasonic waves cannot be attenuated or efficiently reflected.
  • the thickness t of the reflected vibrating body 30 is more preferably 2.0 mm or less.
  • the fact that the ratio Zi / Zr of the intrinsic acoustic impedance is more than 1 ⁇ 10 -3 means that the intrinsic acoustic impedance Zi of the material inside the hollow of the reflected vibrating body 30 and the intrinsic acoustic impedance Zr of the reflected vibrating body 30 When the difference is small and the ultrasonic waves propagate inside the hollow of the reflected vibrating body 30, it means that the ultrasonic waves are easily transmitted.
  • the intrinsic acoustic impedance Zr of the reflected vibrating body 30 is within the above range, as a substance capable of realizing the ratio Zi / Zr of the intrinsic acoustic impedance, for example, silicone rubber (inherent acoustic impedance: 1.0).
  • silicone rubber inherent acoustic impedance: 1.0.
  • ⁇ 10 In addition to various solids such as resins such as 6 kg ⁇ m -2 ⁇ sec -1 ), various liquids such as pure water, distilled water, aqueous solutions containing various compounds, and various organic solvents can be mentioned.
  • the ratio Zi / Zr of the intrinsic acoustic impedance as described above is more than 1 ⁇ 10 -3 and the treatment liquid 3 is a liquid that has not been degassed, the hollow portion of the reflected vibrating body 30 is formed. It may be sealed with the degassed liquid filled. By enclosing the degassed liquid in this way, it is possible to further improve the propagation efficiency of ultrasonic waves and further improve the treatment performance of surface treatment. Further, when the ratio Zi / Zr of the intrinsic acoustic impedance as described above is more than 1 ⁇ 10 -3 , the hollow portion of the treatment liquid 3 may be filled with the treatment liquid 3 itself.
  • the partition wall or the like for sealing the treatment liquid 3 near both ends of the reflected vibrating body 30, but the partition wall or the like may not be provided.
  • the hollow portion of the reflected vibrating body 30 is filled with a substance different from the treatment liquid 3, regardless of the magnitude of the specific acoustic impedance ratio Zi / Zr, these substances are located near both ends of the reflected vibrating body 30.
  • the thickness tr of the reflected vibrating body 30 is set to 3.0 mm to 20.0 mm, so that the ultrasonic waves reach the surface of the reflected vibrating body 30. Is less likely to pass through the reflected vibrating body 30, and can be more efficiently reflected on the surface of the reflected vibrating body 30.
  • the thickness tr of the reflected vibrating body 30 is thinner than 3.0 mm, ultrasonic waves pass through the reflected vibrating body 30 and the reflectance on the surface is lowered, and as a result, the object to be processed is subjected to. The propagation of ultrasonic waves is reduced.
  • the thickness tr of the reflected vibrating body 30 is more preferably 5.0 mm or more.
  • the thickness tr of the reflected vibrating body 30 becomes thicker than 20.0 mm, the relationship between the reflection and the transmission due to the wavelength of the ultrasonic frequency becomes remarkable, and it is difficult to control the reflection on the surface of the reflected vibrating body 30. Will be.
  • the thickness tr of the reflected vibrating body 30 is more preferably 20.0 mm or less.
  • the length in the longitudinal direction of the object S to be processed (for example, the length in the y-axis direction shown in FIG. 5) is represented by Ls, and the length in the longitudinal direction of the reflected vibrating body 30 (for example, the y-axis shown in FIG. 5).
  • the length in the direction) is expressed as Lr.
  • the length ratio Lr / Ls is smaller than 0.7, there may be a wide portion that is not in contact with the object S to be treated, and the effect of reflection may not be obtained.
  • the length ratio Lr / Ls is more preferably 0.7 or more, still more preferably 0.8 or more, and even more preferably 0.9 or more.
  • the length ratio Lr / Ls is larger than 3.0, the reflection efficiency increases in a place where there is no object S to be processed, which may lead to a failure of the oscillator.
  • the ratio Lr / Ls of the lengths of the reflected vibrating body 30 and the object S to be processed in the longitudinal direction is more preferably 2.0 or less, still more preferably 1.5 or less.
  • the reflected vibrating body 30 according to the present embodiment is shown as one member having no seam, but the reflected vibrating body 30 according to the present embodiment has a plurality of members. It may have a connected connection structure.
  • the method of connecting and integrating a plurality of members is not particularly limited, and the plurality of members may be connected by welding or the like, or a plurality of members may be connected by using various connecting members such as nuts and bolts. Members may be connected.
  • the reflected vibrating body 30 is hollow, partition walls or the like may be provided near both ends of the reflected vibrating body 30. In particular, in order to fill the inside of the reflected vibrating body 30 with a substance having an intrinsic acoustic impedance different from that of the processing liquid 3, partition walls and the like near both ends of the reflected vibrating body 30 are indispensable.
  • the end portion of the reflected vibrating body 30 may not be sealed, and the hollow portion of the reflected vibrating body 30 immersed in the treatment liquid 3 may be filled with the treatment liquid 3.
  • the hollow portion of the reflected vibrating body 30 may be in a sealed state and may not be filled with the treatment liquid 3.
  • the hollow portion of the sealed reflected vibrating body 30 is filled with a gas (for example, air, an inert gas, etc.) or a liquid. Since the reflected vibrating body 30 has such a closed hollow structure, it is possible to more reliably reflect the ultrasonic waves that have reached the reflected vibrating body 30.
  • the hollow portion of the reflected vibrating body 30 in the sealed state is -100 kPa to -10 kPa from the atmospheric pressure. It is more preferable that the pressure is reduced to some extent. Since the hollow portion of the reflected vibrating body 30 in the sealed state is in the depressurized state as described above, it is possible to more reliably reflect the ultrasonic waves that have reached the reflected vibrating body 30.
  • the reflected vibrating body 30 according to the present embodiment is provided with a flange portion 33 on the outer surface as schematically shown in FIG.
  • a flange portion 33 By providing such a flange portion 33, it is possible to more efficiently propagate the transverse wave generated by the reflected vibrating body 30 by the ultrasonic wave to the object S to be processed.
  • the flange portion 33 is provided on the reflected vibrating body 30, the above-mentioned maximum value Dr of the outer diameter is the maximum value of the outer diameter of the portion other than the flange portion 33.
  • the flange portion 33 is integrated with the reflected vibrating body 30.
  • the means for integrating the flange portion 33 into the reflected vibrating body 30 is not particularly limited.
  • the flange portion 33 may be integrated with the reflected vibrating body 30 by welding, or the flange portion 33 may be integrated with the reflecting vibrating body 30 by various connecting members such as bolts and nuts.
  • the flange portion 33 may be formed so as to protrude from the reflected vibrating body 30 by overhanging molding, or the flange portion 33 may be formed by performing machined molding on the reflected vibrating body 30.
  • the size of the cross section (cross section orthogonal to the y-axis direction) of the reflected vibrating body 30 of the portion where the flange portion 33 is provided is expressed as Df, and the flange portion is represented by Df.
  • the maximum value of the outer diameter of the reflected vibrating body 30 in the portion where 33 is not provided is represented by Dr.
  • the ratio Df / Dr of the size of the cross section satisfies the relationship of 1.1 ⁇ Df / Dr ⁇ 3.0.
  • the cross-sectional size ratio Df / Dr is more preferably 1.2 or more or 1.4 or more, and 2.0 or less or 1.6 or less.
  • the thickness of the flange portion 33 (thickness tf of the flange portion 33 in the y-axis direction shown in FIG. 5) shall be the same as the thickness tr of the reflected vibrating body 30 or larger than the thickness tr of the reflected vibrating body 30. Is preferable. This makes it possible to more reliably propagate the transverse wave generated by the reflected vibrating body 30 to the object S to be processed while suppressing the attenuation of the intensity.
  • the thickness tf of the flange portion 33 is more preferably 2 to 10 times the thickness tr of the reflected vibrating body 30.
  • FIG. 6 shows a case where three flange portions 33 are provided for the reflected vibrating body 30, but the number of flange portions 33 provided for one reflecting vibrating body 30 is not particularly limited. It may be one or two, or four or more. Further, the separation distance between the adjacent flange portions 33 (separation distance p in FIG. 6) is not particularly limited, and may be appropriately set according to the length of the reflected vibrating body 30 in the y-axis direction. For example, it is preferably about 0.1 m to 5.0 m.
  • the flange portion 33 is preferably formed using a material having a lateral elastic modulus G in the range of 15 to 250 GPa.
  • the lateral elastic modulus (also referred to as shear elastic modulus) G can be regarded as an index showing the difficulty of deformation.
  • the propagation state of the transverse wave generated by the reflected vibrating body 30 by ultrasonic waves depends on the transverse elastic modulus, and the more easily the material is deformed, the more the transverse wave is attenuated.
  • the transverse wave propagates in a direction orthogonal to the traveling direction of the ultrasonic wave (sparse and dense wave) to cause a vertical displacement, and the vibration of the transverse wave propagates in the solid of the reflected vibrating body 30.
  • the transverse elastic modulus G of the material forming the flange portion 33 is preferably a large value.
  • the transverse elastic modulus G of the material forming the flange portion 33 is preferably in the range of 15 to 250 GPa.
  • the lateral elastic modulus G of the material forming the flange portion 33 is more preferably 30 to 100 GPa.
  • Examples of the material having the transverse elastic coefficient G as described above include iron (60 GPa), stainless steel (74 GPa), titanium alloy (41 GPa), brass (37 GPa), quartz (31 GPa), magnesium alloy (17 GPa), and tungsten. Carbide (219 GPa) and the like can be mentioned.
  • the flange portion 33 is preferably formed of the same material as the reflected vibrating body 30, and more preferably integrally molded with the reflecting vibrating body 30 by overhanging or cutting.
  • the flange portion 33 of the reflected vibrating body 30 as described above is provided so as to be in contact with the object to be processed S at at least one place at intervals of 5 m or less along the longitudinal direction of the object to be processed S.
  • the reflected vibrating body 30 so as to satisfy the above-mentioned positional relationship, when surface treatment is performed on an aggregate composed of a plurality of objects to be processed S, the plurality of objects to be treated are further subjected to surface treatment. It is possible to reliably propagate ultrasonic waves.
  • the flange portions 33 are provided so as to come into contact with the object to be processed S at two or more places at intervals of 5 m or less along the longitudinal direction of the object to be processed S.
  • the contact intervals are 0.1 m or more. If the contact interval of the flange portion 33 is smaller than 0.1 m, the reflected ultrasonic waves may repeat multiple reflections only in the closed space, resulting in attenuation at the flange portion 33.
  • the ultrasonic processing apparatus 1 used in the ultrasonic processing method according to the present embodiment has been described in detail above.
  • the ultrasonic wave processing method according to the present embodiment is realized by using the ultrasonic wave processing device 1 as described above.
  • a treatment tank having a long axis having substantially the same cross-sectional shape and provided with an ultrasonic wave application mechanism is filled with a treatment liquid and treated.
  • the surface treatment is applied to the objects to be treated while applying ultrasonic waves.
  • each of the objects to be treated is arranged so as to be in contact with one or a plurality of other objects to be treated at least at two points, and is immersed in the treatment liquid in the treatment tank.
  • One or a plurality of hollow reflective vibrating bodies extending in the direction are arranged, and each of the reflected vibrating bodies is arranged so as to be in contact with another object to be processed at at least two points.
  • the outer diameter ratio Dr / Ds is 0.2 to 6.0
  • the intrinsic acoustic impedance Zr of the reflected vibrating body is 1 ⁇ 10 7 to 2 ⁇ 10 8 kg ⁇ m ⁇ 2 ⁇ sec -1 , and the hollow portion of the reflected vibrating body. Is filled with a liquid or gas having an intrinsic acoustic impedance Zi different from that of the intrinsic acoustic impedance Zr.
  • the preferable conditions in the ultrasonic wave processing method according to the present embodiment are as described in the description of the ultrasonic wave processing device according to the present embodiment, and detailed description thereof will be omitted below.
  • the ultrasonic treatment method according to this embodiment has been briefly described above.
  • the ultrasonic processing method and the ultrasonic processing apparatus according to the present invention will be specifically described with reference to Examples and Comparative Examples.
  • the examples shown below are merely examples of the ultrasonic processing method and the ultrasonic processing apparatus according to the present invention, and the ultrasonic processing method and the ultrasonic processing apparatus according to the present invention are limited to the examples shown below. It's not something.
  • Example 8A and 8B are explanatory views showing an implementation state of ultrasonic treatment in Experimental Example 1, which imitates washing (rinsing) of a steel pipe.
  • the treatment tank 10 had an outer wall made of SUS, a width of 1.0 ⁇ a length of 15.0 ⁇ 0.6 m , and a capacity of 9.0 m3.
  • verification was performed by immersing the object to be treated S (steel pipe or brass pipe) to which the oxide scale remained inside and outside the pipe after pickling for a predetermined time.
  • As the cleaning liquid that functions as the treatment liquid 3 undegassed water at a temperature of 20 ° C.
  • the ultrasonic oscillator of the ultrasonic application mechanism 20 had an output of 1200 W, and 10 SUS throw-in oscillators as shown in FIG. 2B were used as the ultrasonic oscillators.
  • the frequency of the ultrasonic wave was 35 kHz.
  • a cushioning member (not shown) was installed on the wall surface of the treatment tank 10 so that the object S to be treated would not be damaged.
  • the reflected vibrating body 30 installed so as to be in contact with the object S to be processed was compared by changing the size, shape, length, closed structure, and contact conditions.
  • the material (including the flange) used as the reflected vibrating body 30 is stainless steel (natural acoustic impedance Zr: 4.57 ⁇ 10 7 kg ⁇ m -2 / sec -1 ) duralumin material (natural acoustic impedance Zr: 1).
  • stainless steel transverse elastic modulus G: 74 GPa
  • quartz G: 31 GPa
  • tungsten carbide G: 219 GPa
  • brass G: 37 GPa
  • polystyrene G: 1. 4 GPa
  • degassed water means degassed water.
  • the partition wall near both ends of the reflected vibrating body 30. It means that the inside of the reflected vibrating body 30 is filled with the treatment liquid 3 (that is, undegassed water).
  • one point for example, position 1 in the side view shown in FIG. 8A
  • the ultrasonic intensity (mV) was measured at one point (position 2 in FIG. 8B) in the processing tank, and the relative ultrasonic intensity (measurement result of Comparative Example 1, that is, the reflected vibrating body 30 was not installed).
  • Relative strength when the measured ultrasonic strength was 1 when only the steel pipe was installed) was calculated, and the propagating property into the object S to be treated and the tank was compared.
  • evaluation A and evaluation B mean that the water washing performance was very good
  • evaluation C meant that the water washing performance was good
  • evaluation D had some difficulty in water washing performance.
  • the evaluation E and the evaluation F mean that the washing performance was poor.
  • Those with evaluations A to D were regarded as acceptable. The obtained results are summarized in Table 1 below.
  • the cross-sectional ratio between the comparative example 1 in which the reflected vibrating body 30 according to the present invention was not held in the processing tank 10 and the object to be processed S is less than 0.2, or 6.
  • Comparative Examples 2 and 3 in which the reflected vibrating body 30 exceeding 0 was provided a region where the water washing performance was poor or the water washing was insufficient occurred.
  • This result is in agreement with the measurement result that the relative ultrasonic intensity and the vibration acceleration are almost the same as the values of Comparative Example 1, and the reflection efficiency of the ultrasonic waves of the reflected vibrating body 30 of Comparative Examples 2 and 3 does not increase. , It turned out that the effect of the reflected vibrating body could not be exhibited.
  • Comparative Example 4 in which the reflected vibrating body 30 is brought into contact with only one steel pipe, the vibration acceleration propagates to the contacting steel pipe, but the relative ultrasonic intensity is almost the same as that of Comparative Example 1. ing. This indicates that the effect of the reflected vibrating body 30 cannot be exhibited because the number of contact points of the reflected vibrating body 30 is small. Further, in Comparative Example 5 using the reflected vibrating body made of polyethylene, it was found that the vibration acceleration did not propagate well to the steel pipe and the effect of the reflected vibrating body could not be exhibited.
  • Examples 1 to 36 in which the reflected vibrating body according to the present invention was provided and the shape, the cross-sectional ratio to the object S to be treated, and the length ratio were changed had good washing performance.
  • Examples 5 to 13 having a closed structure excellent washing performance was confirmed.
  • Examples 20 to 35 provided with the flange excellent washing performance was confirmed. A correlation was obtained between these washing performances and the ultrasonic intensity and vibration acceleration.
  • Ultrasonic processing device 3 Processing liquid 10 Processing tank 20 Ultrasonic application mechanism 30 Reflecting vibrator 33 Flange part 201 Ultrasonic oscillator 203 Ultrasonic oscillator 205 Housing 211 Throw-in type oscillator S Processed object

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning By Liquid Or Steam (AREA)
PCT/JP2020/047147 2020-12-17 2020-12-17 超音波処理方法及び超音波処理装置 Ceased WO2022130565A1 (ja)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4624934Y1 (https=) * 1964-04-04 1971-08-27
JPH03222419A (ja) * 1990-01-29 1991-10-01 Kokusai Denki Erutetsuku:Kk 超音波洗浄装置
WO2011067955A1 (ja) * 2009-12-03 2011-06-09 新日本製鐵株式会社 鋼板の酸洗方法及び酸洗装置
WO2018169050A1 (ja) * 2017-03-16 2018-09-20 新日鐵住金株式会社 超音波洗浄装置及び超音波洗浄方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4624934Y1 (https=) * 1964-04-04 1971-08-27
JPH03222419A (ja) * 1990-01-29 1991-10-01 Kokusai Denki Erutetsuku:Kk 超音波洗浄装置
WO2011067955A1 (ja) * 2009-12-03 2011-06-09 新日本製鐵株式会社 鋼板の酸洗方法及び酸洗装置
WO2018169050A1 (ja) * 2017-03-16 2018-09-20 新日鐵住金株式会社 超音波洗浄装置及び超音波洗浄方法

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