WO2022123952A1 - 通信装置、通信装置の制御方法及び通信システム - Google Patents
通信装置、通信装置の制御方法及び通信システム Download PDFInfo
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- WO2022123952A1 WO2022123952A1 PCT/JP2021/040053 JP2021040053W WO2022123952A1 WO 2022123952 A1 WO2022123952 A1 WO 2022123952A1 JP 2021040053 W JP2021040053 W JP 2021040053W WO 2022123952 A1 WO2022123952 A1 WO 2022123952A1
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- 238000004891 communication Methods 0.000 title claims abstract description 612
- 238000000034 method Methods 0.000 title claims description 80
- 238000012546 transfer Methods 0.000 claims description 109
- 239000004065 semiconductor Substances 0.000 description 47
- 238000004519 manufacturing process Methods 0.000 description 40
- 238000010586 diagram Methods 0.000 description 22
- 230000005540 biological transmission Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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Definitions
- the present invention relates to a communication device, a control method for the communication device, and a communication system.
- a semiconductor manufacturing system including a ceiling-traveling transport trolley for transporting a FOUP (Front Opening Unified Pod) in which a semiconductor wafer is stored and a semiconductor manufacturing apparatus for processing a semiconductor wafer is known (for example).
- FOUP Front Opening Unified Pod
- Patent Document 1 A semiconductor manufacturing system including a ceiling-traveling transport trolley for transporting a FOUP (Front Opening Unified Pod) in which a semiconductor wafer is stored and a semiconductor manufacturing apparatus for processing a semiconductor wafer is known (for example).
- the E84 communication sequence of SEMI (Semiconducor Equipment and Materials International) is applied to the communication between the transport trolley and the communication device connected to the mounting port of the semiconductor manufacturing equipment.
- SEMI semiconductor Equipment and Materials International
- the E84 communication sequence consists of three steps: pre-transfer procedure, transfer procedure, and post-transfer procedure.
- pre-transfer procedure a control signal indicating that the FOUP transfer is to be started is exchanged between the transport carriage and the communication device.
- transfer procedure a control signal for executing the transfer of the FOUP is exchanged between the transport trolley and the communication device, and the transfer of the FOUP is actually performed.
- post-transfer procedure a control signal indicating that the FOUP transfer has been completed is exchanged between the transport trolley and the communication device.
- the pre-transfer procedure, the transfer procedure, and the post-transfer procedure are performed with the transport carriage stopped at a position directly above the mounting port.
- each of the plurality of transport trolleys it is necessary for each of the plurality of transport trolleys to simultaneously perform an E84 communication sequence with each communication device of the plurality of mounting ports to which the FOUP should be transferred by wireless communication.
- the power allocated to each communication device of each mounting port is limited, and the communication device needs to operate with low power consumption. Therefore, in order to avoid interference of wireless communication and perform wireless communication that operates with low power consumption, the communication range is short distance (for example, within 3 to 5 m) as a method of wireless communication between the carrier and the communication device. ) Is adopted for short-range wireless communication.
- the radio wave output strength is suppressed, so in the pre-transfer procedure and the post-transfer procedure, the position away from the position directly above the mounting port is set. There arises a problem that the received radio wave strength between the traveling carrier and the communication device is lowered.
- the present invention has been made in view of such problems, and an object thereof is a communication device capable of stabilizing wireless communication between a carrier and a communication device, a control method of the communication device, and a communication system. Is to provide.
- the communication device is a transfer device in which the transported object is transferred between the carrier for transporting the transported object and the carrier.
- a communication device that relays communication between a communication device connected to and a wide area wireless communication unit that transmits and receives information by wide area wireless communication to and from the carrier via a wide area wireless communication base station.
- the short-range wireless communication unit that transmits / receives information to / from the communication device by short-range wireless communication having a narrower communication range than the wide-area wireless communication, and the information received by the wide-area wireless communication unit are used for wide-area wireless communication.
- the wide area radio communication unit may use the wide area radio communication base station (for example, a radio access point). Since information is transmitted and received by wide area wireless communication between the carrier and the carrier, it is possible to avoid a decrease in the received radio wave strength between the carrier and the communication device, and the wireless communication between the carrier and the communication device can be avoided. Communication can be stabilized. Further, since the short-range wireless communication unit transmits / receives information to / from the communication device by short-range wireless communication, the communication device can be operated with low power consumption.
- the wide area radio communication base station for example, a radio access point
- the carrier is traveling in a direction approaching the transfer device before transferring the object to be transferred to the transfer device, or the transfer device and the transfer device.
- the wide area wireless communication unit communicates via the wide area wireless communication base station.
- the information from the carrier is received by the wide area wireless communication, and the control unit converts the information received by the wide area wireless communication unit from the information for wide area wireless communication to the information for short range wireless communication.
- the short-range wireless communication unit transmits the information converted by the control unit by the short-range wireless communication to the communication device, and (ii) the carrier carriage moves the transfer.
- the transfer device is traveling in a direction approaching the transfer device before transferring the transferred object to and from the loading device, or after transferring the transported object to and from the transfer device.
- the short-range wireless communication unit receives information from the communication device by the short-range wireless communication.
- the control unit converts the information received by the short-range wireless communication unit from the information for short-range wireless communication into the information for wide-area wireless communication and outputs it to the wide-area wireless communication unit, and outputs the information to the wide-area wireless communication.
- the unit may be configured to transmit the information converted by the control unit by the wide area wireless communication to the carrier via the wide area wireless communication base station.
- the transport trolley when the E84 communication sequence of SEMI is applied between the transport trolley and the communication device, the transport trolley is a transfer device in the pre-transfer procedure or the post-transfer procedure of the E84 communication sequence. It is possible to stabilize the wireless communication between the transport trolley and the communication device even while traveling at a position away from the position directly above.
- the communication device further includes an acquisition unit for acquiring communication status information indicating a communication status between a transport vehicle other than the transport vehicle and the communication device while the transport vehicle is traveling, and the wide area radio is provided.
- the communication unit may be configured to transmit the communication status information acquired by the acquisition unit to the transport carriage traveling by the wide area wireless communication via the wide area wireless communication base station.
- the traveling transport trolley is based on the communication status information indicating the communication status between the transport trolley other than the transport trolley and the communication device, for example, another transport trolley is the travel route of the transport trolley.
- another transport trolley is the travel route of the transport trolley.
- the communication device further includes an acquisition unit that acquires position information indicating the position of another transport trolley other than the transport trolley while the transport trolley is traveling, and the wide area wireless communication unit is the acquisition unit.
- the location information acquired by the above-mentioned method may be configured to be transmitted to the traveling carrier by the wide area wireless communication via the wide area wireless communication base station.
- the traveling transport trolley is based on the position information indicating the position of the other transport trolley other than the transport trolley, for example, another transport trolley has an E84 communication sequence on the travel route of the transport trolley.
- the travel route can be changed as appropriate when the transfer procedure is being executed.
- control method of the communication device is connected to a transfer device for transporting the transported object and a transfer device on which the transported object is transferred between the transport vehicle and the transport vehicle.
- a method of controlling a communication device that relays communication between the communication device and the communication device wherein (a) information from the carrier is received by wide area wireless communication via a wide area wireless communication base station, and ( b) By the step of converting the information received in (a) from the information for wide area wireless communication to the information for short range wireless communication, and (c) the short range wireless communication having a narrower communication range than the wide area wireless communication.
- the step of transmitting the information converted in the above (b) to the communication device (d) the step of receiving the information from the communication device by the short-range wireless communication, and (e) the step of receiving in the above (d).
- the information was converted in (e) by the step of converting the information for short-range wireless communication into information for wide-area wireless communication, and (f) via the wide-area wireless communication base station. Includes a step of transmitting information to the carrier.
- the transport trolley is traveling at a position away from the position directly above the transfer device, it is between the transport trolley and the transport trolley via a wide area wireless communication base station (for example, a wireless access point). Since information is transmitted and received by wide area wireless communication, it is possible to avoid a decrease in the received radio wave strength between the carrier and the communication device, and to stabilize the wireless communication between the carrier and the communication device. Can be done. Further, since information is transmitted / received to / from the communication device by short-range wireless communication, the communication device can be operated with low power consumption.
- a wide area wireless communication base station for example, a wireless access point
- the communication system is a communication device connected to a transfer device for transferring an object to be conveyed between the transfer vehicle for transporting the object to be conveyed and the transfer vehicle.
- a communication device for relaying communication between the carrier and the communication device the carrier provides information by wide area wireless communication with the communication device via a wide area wireless communication base station.
- the communication device has a second communication unit that transmits / receives information to / from the communication device by short-range wireless communication having a communication range narrower than that of the wide area wireless communication.
- the communication device includes a wide area wireless communication unit that transmits and receives information by wide area wireless communication to and from the first communication unit of the carrier via the wide area wireless communication base station, and the communication device.
- the short-range wireless communication unit that transmits / receives information to / from the second communication unit by the short-range wireless communication and the information received by the wide-area wireless communication unit are subjected to short-range wireless communication from the information for wide-area wireless communication. And output to the short-range wireless communication unit, and the information received by the short-range wireless communication unit is converted from the short-range wireless communication information to the wide-area wireless communication information. It has a control unit that outputs to a wide area wireless communication unit.
- the wide area wireless communication unit of the communication device is a wide area wireless communication base station (for example, a wireless access point). Since information is transmitted and received by wide area wireless communication to and from the first communication unit of the transport trolley, it is possible to avoid a decrease in the received radio wave strength between the transport trolley and the communication device, and the transport can be performed. Wireless communication between the trolley and the communication device can be stabilized. Further, since the short-range wireless communication unit of the communication device transmits / receives information to / from the second communication unit of the communication device by short-range wireless communication, the communication device can be operated with low power consumption.
- the present invention can be realized not only as a device, but also as a method using a processing means constituting the device as a step, as a program for causing a computer to execute those steps, or as a computer reading in which the program is recorded. It can also be realized as a possible recording medium such as a CD-ROM, or as information, data or a signal indicating the program.
- the programs, information, data and signals may be distributed via a communication network such as the Internet.
- wireless communication between the carrier and the communication device can be stabilized.
- FIG. 1 is a diagram showing an outline of a communication system according to an embodiment.
- FIG. 2 is a diagram showing an example of an E84 communication sequence when grasping a FOUP.
- FIG. 3 is a diagram showing an example of an E84 communication sequence when unloading FOUP.
- FIG. 4 is a block diagram showing a functional configuration of the communication system according to the embodiment.
- FIG. 5 is a diagram showing an example of information for wide area wireless communication.
- FIG. 6 is a diagram showing an example of information for short-range wireless communication.
- FIG. 7 is a schematic diagram for explaining the operation of the communication system according to the embodiment in the procedure before transfer.
- FIG. 8 is a sequence diagram showing a flow of operation of the communication system according to the embodiment in the procedure before transfer.
- FIG. 1 is a diagram showing an outline of a communication system according to an embodiment.
- FIG. 2 is a diagram showing an example of an E84 communication sequence when grasping a FOUP.
- FIG. 3 is a diagram showing an example
- FIG. 9 is a schematic diagram for explaining the operation of the communication system according to the embodiment in the transfer procedure.
- FIG. 10 is a sequence diagram showing a flow of operation of the communication system according to the embodiment in the transfer procedure.
- FIG. 11 is a schematic diagram for explaining the operation of the communication system according to the embodiment in the post-transfer procedure.
- FIG. 1 is a diagram showing an outline of a communication system 2 according to an embodiment.
- FIG. 2 is a diagram showing an example of an E84 communication sequence when grasping the FOUP14.
- FIG. 3 is a diagram showing an example of an E84 communication sequence when unloading FOUP14.
- the communication system 2 is, for example, a system built in a semiconductor manufacturing factory.
- the communication system 2 includes a carrier 4, a semiconductor manufacturing device 6, a communication device 8, a wireless access point 10, and a communication device 12.
- the transport carriage 4 is a ceiling-traveling transport carriage for transporting FOUP 14 (an example of an object to be transported) in which a semiconductor wafer is stored, and is a so-called OHT (Overhead Hoist Transfer).
- the transport carriage 4 runs unmanned along a rail 16 installed on the ceiling of a semiconductor manufacturing factory. Although a plurality of (for example, several hundred) transport trolleys 4 are arranged in the semiconductor manufacturing factory, only one transport trolley 4 is shown in FIG. 1 for convenience of explanation.
- a gripping portion 18 for gripping the FOUP 14 is mounted so as to be able to move up and down.
- the transport trolley 4 is stopped at a position directly above the mounting port 22.
- the grip portion 18 descends from the transport carriage 4 to the vicinity of the mounting port 22. Further, when the transfer of the FOUP 14 is completed, the grip portion 18 rises from the vicinity of the mounting port 22 to the transport trolley 4, and is stored inside the transport trolley 4.
- the semiconductor manufacturing apparatus 6 is an apparatus for processing or temporarily placing a semiconductor wafer stored in the FOUP 14, and is installed directly under the rail 16.
- the semiconductor manufacturing device 6 has a carry-in port 20 for carrying in and out the FOUP 14, and a mounting port 22 (an example of the transfer device) arranged in the vicinity of the carry-in port 20.
- the mounting port 22 is a load port for mounting the FOUP 14.
- the mounting port 22 transfers the FOUP 14 to and from the grip portion 18 of the transport trolley 4, and transfers the FOUP 14 to and from the semiconductor manufacturing equipment 6 through the carry-in port 20.
- FIG. 1 Although a plurality of (for example, several thousand) semiconductor manufacturing devices 6 are installed in the semiconductor manufacturing factory, only one semiconductor manufacturing device 6 is shown in FIG. 1 for convenience of explanation. Further, in the present embodiment, the case where the semiconductor manufacturing apparatus 6 has one mounting port 22 has been described, but the present invention is not limited to this, and a plurality of mounting ports 22 may be provided.
- the communication device 8 is a device server for mediating communication between the transport carriage 4 and the mounting port 22 of the semiconductor manufacturing device 6.
- the communication device 8 is arranged on the top surface of the semiconductor manufacturing apparatus 6, and is connected to the mounting port 22 of the semiconductor manufacturing apparatus 6 via a parallel cable 24. As a result, the communication device 8 can communicate with the mounting port 22 of the semiconductor manufacturing apparatus 6.
- SEMI's E84 communication sequence is applied to the communication between the communication device 8 and the carrier trolley 4. Although the same number of communication devices 8 as the mounting ports 22 are installed in the semiconductor manufacturing factory, only one communication device 8 is shown in FIG. 1 for convenience of explanation.
- the wireless access point 10 is an access point in a wireless LAN (Local Area Network).
- the wireless access point 10 mediates wide area wireless communication between the carrier 4 and the communication device 12. That is, the transport carriage 4 and the communication device 12 are stations in the wireless LAN.
- the wide area wireless communication is wireless communication by wireless LAN, and the communication range is, for example, about 20 to 30 m square centered on the wireless access point 10.
- the wireless access point 10 is an example of a wide area wireless communication base station.
- the communication device 12 is a relay device for relaying communication between the transport carriage 4 and the communication device 8.
- the communication device 12 is arranged above the rail 16, for example.
- the communication device 12 transmits / receives information to / from the transport trolley 4 via the wireless access point 10 by wide area wireless communication. Further, the communication device 12 transmits / receives information to / from the communication device 8 by short-range wireless communication.
- the short-range wireless communication is, for example, wireless communication by BLE (Bluetooth (registered trademark) Low Energy), and the communication range is narrower than the communication range of wide area wireless communication, for example, about 5 m centered on the communication device 12. It is on all sides. Short-range wireless communication is also referred to as "near field communication".
- the E84 communication sequence is used when the FOUP 14 mounted on the mounting port 22 is grabbed by the transport trolley 4 and when the FOUP 14 is unloaded from the transport trolley 4 to the mounting port 22.
- Control signals (information) are exchanged between the transport carriage 4 and the communication device 8.
- the E84 communication sequence when the FOUP 14 is transferred between the transport carriage 4 and the mounting port 22, a plurality of processes are not performed so that the process does not proceed to the next step unless a specific control signal (for example, L_RET) is turned off.
- An interlock sequence consisting of processes is adopted.
- the E84 communication sequence for grabbing the FOUP 14 consists of three steps: a pre-transfer procedure, a transfer procedure, and a post-transfer procedure. Further, as shown in FIG. 3, the E84 communication sequence when unloading the FOUP 14 consists of three steps of a pre-transfer procedure, a transfer procedure, and a post-transfer procedure, as in FIG. 2.
- a control signal indicating that the transfer of the FOUP 14 will be started is exchanged between the transport carriage 4 and the communication device 8.
- a control signal for executing the transfer of the FOUP 14 is exchanged between the transport carriage 4 and the communication device 8, and the FOUP 14 is actually transferred.
- a control signal indicating that the transfer of the FOUP 14 has been completed is exchanged between the transport carriage 4 and the communication device 8.
- the pre-transfer procedure is executed while the transport trolley 4 is traveling in a direction approaching the position directly above the mounting port 22 on which the FOUP 14 should be transferred.
- the transfer procedure is executed in a state where the transport trolley 4 arrives at a position directly above the mounting port 22 on which the FOUP 14 should be transferred, and then stops at that position.
- the post-transfer procedure is performed while the transport carriage 4 is traveling in a direction away from the position directly above the mounting port 22 on which the FOUP 14 is transferred.
- FIG. 4 is a block diagram showing a functional configuration of the communication system 2 according to the embodiment.
- FIG. 5 is a diagram showing an example of information for wide area wireless communication.
- FIG. 6 is a diagram showing an example of information for short-range wireless communication.
- the wireless network 26 is, for example, a wireless LAN compliant with the IEEE802.11 series, and is constructed of a 2.4 GHz band or a 5 GHz band WiFi (registered trademark).
- the transport carriage 4 has a wide area wireless communication unit 28 (an example of a first communication unit), an antenna 30, a short-range wireless communication unit 32, an antenna 34, and a control unit 36.
- the wide area wireless communication unit 28 transmits / receives information to / from the communication device 12 via the wireless access point 10 by wide area wireless communication.
- the antenna 30 is an antenna for wide area wireless communication and is connected to the wide area wireless communication unit 28.
- the short-range wireless communication unit 32 transmits / receives information to / from the communication device 8 by short-range wireless communication.
- the antenna 34 is an antenna for short-range wireless communication, and is connected to the short-range wireless communication unit 32.
- the control unit 36 executes various processes by controlling the wide area wireless communication unit 28 and the short-range wireless communication unit 32. Specifically, the control unit 36 is located at a short distance from the communication device 8 by the short-range wireless communication unit 32 immediately before the transport trolley 4 arrives at a position directly above the mounting port 22 on which the FOUP 14 should be transferred. Control to perform wireless communication. Further, when the position of the mounting port 22 on which the FOUP 14 is to be transferred and the self-propelled position of the transport trolley 4 are within a certain range, the control unit 36 is connected to the communication device 8 by the short-range wireless communication unit 32. It may be controlled to perform short-range wireless communication between them without going through the communication device 12. In this case, the power consumption of the communication device 12 can be reduced.
- the control unit 36 is realized by, for example, a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.
- the mounting port 22 of the semiconductor manufacturing apparatus 6 has a communication unit 38 and a control unit 40.
- the communication unit 38 transmits / receives information to / from the communication device 8 via the parallel cable 24 (see FIG. 1).
- the control unit 40 executes various processes by controlling the communication unit 38. Specifically, the control unit 40 executes an interlock process for transferring the FOUP 14 (see FIG. 1) to and from the transport carriage 4. Further, the control unit 40 executes a process for transferring the FOUP 14 to and from the semiconductor manufacturing apparatus 6 through the carry-in / outlet 20 (see FIG. 1).
- the control unit 40 is realized by, for example, a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.
- the communication device 8 has a communication unit 42 (an example of a second communication unit) and a control unit 44.
- the communication unit 42 transmits / receives information to / from the mounting port 22 via the parallel cable 24. Further, the communication unit 42 transmits / receives information to / from each of the transport carriage 4 and the communication device 12 by short-range wireless communication.
- the control unit 44 executes various processes by controlling the communication unit 42.
- the control unit 44 is realized by, for example, a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.
- the communication device 12 has a wide area wireless communication unit 46, an antenna 48, a short-range wireless communication unit 50, an antenna 52, a control unit 54, and an acquisition unit 56.
- the wide area wireless communication unit 46 transmits / receives information to / from the carrier 4 via the wireless access point 10 by wide area wireless communication.
- the antenna 48 is an antenna for wide area wireless communication and is connected to the wide area wireless communication unit 46.
- the short-range wireless communication unit 50 transmits / receives information to / from the communication device 8 by short-range wireless communication.
- the antenna 52 is an antenna for short-range wireless communication, and is connected to the short-range wireless communication unit 50.
- the communication device 12 has only one set of the short-range wireless communication unit 50 and the antenna 52, but is not limited to this, and for example, the communication device 12 is close to a plurality of communication devices 8 at the same time.
- a plurality of sets of short range wireless communication units 50 and antennas 52 may be provided.
- the control unit 54 executes various processes by controlling the wide area wireless communication unit 46 and the short-range wireless communication unit 50. Specifically, the control unit 54 converts the information received by the wide area wireless communication unit 46 from the information for wide area wireless communication into the information for short range wireless communication and outputs it to the short range wireless communication unit 50. Further, the control unit 54 converts the information received by the short-range wireless communication unit 50 from the information for short-range wireless communication into the information for wide-area wireless communication and outputs it to the wide-area wireless communication unit 46.
- the control unit 54 is realized by, for example, a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.
- the information for wide area wireless communication is, for example, a data frame 58 as shown in FIG. 5A.
- the data frame 58 shown in FIG. 5A includes fields of Frame Control, Duration, MAC Adsress 1 to 3, Seq Control, MAC Adsress 4, Data, and CRC.
- the Data field shown in FIG. 5A includes the IP header, UDP header, and communication data fields shown in FIG. 5B.
- the short-range wireless communication frequency band, the short-range wireless communication channel, the short-range wireless connection destination device ID, and the short-range wireless connection shown in FIG. 5 (c) are included. Each field of original ID and short-range wireless communication data is included.
- the field of the short-range wireless communication data shown in FIG. 5 (c) includes the transmission direction, INPUT DATA and OUTPUT DATA fields shown in FIG. 5 (d).
- the information for short-range wireless communication is, for example, a data frame 60 as shown in FIG.
- the data frame 60 shown in FIG. 6 includes fields of a short-range wireless connection destination device ID, a short-range wireless connection source ID, a transmission direction, and INPUT DATA and OUTPUT DATA.
- the control unit 54 receives the data frame 58 of the wide area wireless communication unit 46 from the data frame 58 in FIG. 5 (c) and ( The data frame 60 shown in FIG. 6 is generated by extracting each field of the short-range wireless connection destination device ID, the short-range wireless connection source ID, the transmission direction, the INPUT DATA and the OUTPUT DATA shown in d). In this way, the control unit 54 converts the data frame 58, which is information for wide area wireless communication, into the data frame 60, which is information for short-range wireless communication.
- the control unit 54 controls the short-range wireless connection destination device ID and the short-range of the data frame 60 received by the short-range wireless communication unit 50.
- the data frame 58 shown in FIG. 5A is generated.
- the control unit 54 converts the data frame 60, which is information for short-range wireless communication, into the data frame 58, which is information for wide-area wireless communication.
- the acquisition unit 56 acquires communication status information indicating the communication status between the transport trolley (not shown) other than the transport trolley 4 and the communication device 8. Further, while the transport trolley 4 is traveling, the position information indicating the position of the transport trolley other than the transport trolley 4 is acquired.
- the acquisition unit 56 may acquire communication status information and location information from the wide area wireless communication unit 46 or the short-range wireless communication unit 50, or may acquire communication status information and location information from a higher-level controller (not shown) that controls the communication system 2. You may acquire the position information.
- FIG. 7 is a schematic diagram for explaining the operation of the communication system 2 according to the embodiment in the procedure before transfer.
- FIG. 8 is a sequence diagram showing a flow of operation of the communication system 2 according to the embodiment in the procedure before transfer.
- semiconductor manufacturing devices 6a, 6b, 6c, 6d, 6e, 6f (6a to 6f) are installed side by side in this order in a semiconductor manufacturing factory will be considered.
- the semiconductor manufacturing devices 6a to 6f have mounting ports 22a, 22b, 22c, 22d, 22e, and 22f (22a to 22f), respectively.
- Communication devices 8a, 8b, 8c, 8d, 8e, 8f (8a to 8f) are connected to the mounting ports 22a to 22f, respectively.
- the transport carriage 4 transfers the FOUP 14 (see FIG. 1) to and from the mounting port 22d of the semiconductor manufacturing apparatus 6d
- the pre-transfer procedure is performed while the transport carriage 4 is traveling in a direction approaching a position directly above the mounting port 22d to which the FOUP 14 should be transferred.
- information indicating that the transfer of the FOUP 14 will be started is exchanged between the transport carriage 4 and the communication device 8d.
- the communication device 12 can transmit and receive information to and from each of the communication devices 8a to 8f, for example, by short-range wireless communication.
- the communication device 12 is a semiconductor manufacturing device by wide area wireless communication from the position directly above the semiconductor manufacturing device 6d on the semiconductor manufacturing device 6a side (left side in FIG. 7) and the position directly above the semiconductor manufacturing device 6d. Information can be transmitted and received to and from the carrier 4 traveling on the 6f side (right side in FIG. 7).
- the wide area wireless communication unit 28 of the transport trolley 4 transmits information (information for wide area wireless communication) to the communication device 12 by wide area wireless communication (S101).
- the wireless access point 10 transfers the information from the transport trolley 4 to the communication device 12 by wide area wireless communication (S102).
- the wide area wireless communication unit 46 of the communication device 12 receives the information transferred from the wireless access point 10 by wide area wireless communication (S103).
- the control unit 54 of the communication device 12 converts the information received by the wide area wireless communication unit 46 from the information for wide area wireless communication to the information for short range wireless communication (S104), and outputs the information to the short range wireless communication unit 50. ..
- the short-range wireless communication unit 50 of the communication device 12 transmits information (information for short-range wireless communication) converted by the control unit 54 to the communication device 8d by short-range wireless communication (S105).
- the communication unit 42 of the communication device 8d receives the information transmitted from the communication device 12 by short-range wireless communication (S106).
- the communication device 8d transmits information to the transport carriage 4
- the communication unit 42 of the communication device 8d transmits information (information for short-range wireless communication) to the communication device 12 by short-range wireless communication (S107).
- the short-range wireless communication unit 50 of the communication device 12 receives the information transmitted from the communication device 8d by short-range wireless communication (S108).
- the control unit 54 of the communication device 12 converts the information received by the short-range wireless communication unit 50 from the information for short-range wireless communication to the information for wide-area wireless communication (S109), and outputs the information to the wide-range wireless communication unit 46. ..
- the wide area wireless communication unit 46 of the communication device 12 transmits the information (information for wide area wireless communication) converted by the control unit 54 to the transport trolley 4 by wide area wireless communication (S110).
- the wireless access point 10 transfers the information transmitted from the communication device 12 in step S110 to the transport trolley 4 by wide area wireless communication (S111).
- the wide area wireless communication unit 28 of the transport trolley 4 receives the information transferred from the wireless access point 10 by wide area wireless communication (S112).
- FIG. 9 is a schematic diagram for explaining the operation of the communication system 2 according to the embodiment in the transfer procedure.
- FIG. 10 is a sequence diagram showing a flow of operation of the communication system 2 according to the embodiment in the transfer procedure.
- the transfer procedure is performed with the transport carriage 4 stopped at a position directly above the mounting port 22d to which the FOUP 14 should be transferred.
- information for executing the transfer of the FOUP 14 is exchanged between the transport trolley 4 and the communication device 8d, and the FOUP 14 is actually transferred.
- the short-range wireless communication unit 32 of the transport trolley 4 transmits information (information for short-range wireless communication) to the communication device 8d by short-range wireless communication (S201).
- the communication unit 42 of the communication device 8d receives the information transmitted from the carrier 4 by short-range wireless communication (S202).
- the communication unit 42 of the communication device 8d transmits information (information for short-range wireless communication) to the carrier 4 by short-range wireless communication (S203).
- the short-range wireless communication unit 32 of the transport trolley 4 receives the information transmitted from the communication device 8d by short-range wireless communication (S204).
- FIG. 11 is a schematic diagram for explaining the operation of the communication system 2 according to the embodiment in the post-transfer procedure.
- the post-transfer procedure is executed while the transport carriage 4 is traveling in a direction away from the position directly above the mounting port 22d on which the FOUP 14 is transferred.
- the post-relocation procedure as in FIG. 8 described above, information indicating that the transfer of the FOUP 14 has been completed between the transport trolley 4 and the communication device 8d via the wireless access point 10 and the communication device 12 is provided. To be given and received.
- the acquisition unit 56 acquires communication status information indicating the communication status between the communication devices 8a to 8f and the transport carriage other than the transport carriage 4 while the transport carriage 4 is traveling.
- the wide area wireless communication unit 46 receives the communication status information and / or the position information acquired by the acquisition unit 56 in response to a request from the traveling carriage 4, by wide area wireless communication via the wireless access point 10. It is transmitted to the transport trolley 4 that is running.
- the traveling transport trolley 4 detours the traveling route so as to bypass the position directly above the mounting port 22d based on the communication status information and / or the position information. It can be changed as appropriate.
- the transport vehicle 4 is traveling at a position away from the position directly above the mounting port 22, and the communication device 12 is used.
- the wide area wireless communication unit 46 transmits / receives information to / from the carrier 4 via the wireless access point 10 by wide area wireless communication. As a result, it is possible to avoid a decrease in the received radio wave strength between the transport trolley 4 and the communication device 8, and it is possible to stabilize the wireless communication between the transport trolley 4 and the communication device 8.
- the short-range wireless communication unit 50 of the communication device 12 transmits / receives information to / from the communication device 8 by short-range wireless communication
- the communication device 8 can be operated with low power consumption.
- the communication device 8 can be operated by the power supply (24V, 100mA) supplied via the PI / O (Programmed Input / Output) installed in the semiconductor manufacturing apparatus 6.
- the present invention is not limited to the above-described embodiment.
- the present invention also includes a form obtained by subjecting a person skilled in the art to a modification of the above embodiment, and another form realized by arbitrarily combining the components of the above embodiment.
- WiFi registered trademark
- the present invention is not limited to this, and for example, Private LTE (Long Term Evolution) or the 5th generation mobile communication system is locally used. Local 5G or the like may be adopted.
- the wide area wireless communication unit 28 and the antenna 30 of the carrier trolley 4, the wide area wireless communication unit 46 and the antenna 48 of the communication device 12, and the communication unit 42 of the communication device 8 are each wide area radio. Comply with the communication standard of communication.
- the transport trolley 4 is used to exchange information for executing the transfer of the FOUP 4 between the transport trolley 4 and the communication device 8 regarding the operation of the communication system 2 in the transfer procedure.
- the short-range wireless communication unit 32 is provided with information (information for short-range wireless communication) to and from the communication device 8 by short-range wireless communication, but the communication system 2 in the pre-transfer procedure and the post-transfer procedure.
- a communication method similar to the operation of may be applied. That is, in the operation of the communication system 2 in the transfer procedure, the carrier 4 exchanges information with the communication device 12 via the wireless access point 10 by wide area wireless communication, and the communication device 12 communicates with the communication device 8. Short-range wireless communication is performed between them.
- the transport trolley 4 does not need to be provided with the short-range wireless communication unit 32, interlock communication with the communication device 8 is possible by wide area wireless communication, and the manufacturing cost of the transport trolley 4 and the manufacturing cost of the transport trolley 4 are increased. It is possible to reduce the complexity of the design.
- each component may be configured by dedicated hardware or may be realized by executing a software program suitable for each component.
- Each component may be realized by a program execution unit such as a CPU or a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.
- the communication system according to the present invention can be applied to, for example, a semiconductor manufacturing system for transporting a FOUP by a transport carriage traveling along a rail installed on a ceiling.
- Communication system 4 Transport trolleys 6, 6a, 6b, 6c, 6d, 6e, 6f Semiconductor manufacturing equipment 8, 8a, 8b, 8c, 8d, 8e, 8f Communication device 10 Wireless access point 12 Communication device 14 FOUP 16 Rail 18 Grip 20 Carry-in / exit 22, 22a, 22b, 22c, 22d, 22e, 22f Mounting port 24 Parallel cable 26 Wireless network 28,46 Wide area wireless communication section 30, 34, 48, 52 Antenna 32, 50 Short range Wireless communication unit 36, 40, 44, 54 Control unit 38, 42 Communication unit 56 Acquisition unit 58, 60 Data frame
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Abstract
Description
[1.通信システムの概要]
まず、図1~図3を参照しながら、実施の形態に係る通信システム2の概要について説明する。図1は、実施の形態に係る通信システム2の概要を示す図である。図2は、FOUP14を荷掴みする際におけるE84通信シーケンスの一例を示す図である。図3は、FOUP14を荷降ろしする際におけるE84通信シーケンスの一例を示す図である。
図4~図6を参照しながら、実施の形態に係る通信システム2の機能構成について説明する。図4は、実施の形態に係る通信システム2の機能構成を示すブロック図である。図5は、広域無線通信用の情報の一例を示す図である。図6は、近距離無線通信用の情報の一例を示す図である。
[3-1.移載前手順における通信システムの動作]
図7及び図8を参照しながら、移載前手順における通信システム2の動作について説明する。図7は、移載前手順における、実施の形態に係る通信システム2の動作を説明するための概略図である。図8は、移載前手順における、実施の形態に係る通信システム2の動作の流れを示すシーケンス図である。
図9及び図10を参照しながら、移載手順における通信システム2の動作について説明する。図9は、移載手順における、実施の形態に係る通信システム2の動作を説明するための概略図である。図10は、移載手順における、実施の形態に係る通信システム2の動作の流れを示すシーケンス図である。
図11を参照しながら、移載後手順における通信システム2の動作について説明する。図11は、移載後手順における、実施の形態に係る通信システム2の動作を説明するための概略図である。
上述したように、取得部56は、搬送台車4の走行中に、当該搬送台車4以外の他の搬送台車と通信デバイス8a~8fとの通信状況を示す通信状況情報を取得する。広域無線通信部46は、走行中の当該搬送台車4からの要求に応じて、この取得部56により取得された通信状況情報及び/又は位置情報を、無線アクセスポイント10を介して広域無線通信により走行中の当該搬送台車4に送信する。
本実施の形態に係る通信システム2では、例えばE84通信シーケンスの移載前手順又は移載後手順において、搬送台車4が載置ポート22の直上の位置から離れた位置を走行中、通信装置12の広域無線通信部46は、無線アクセスポイント10を介して、搬送台車4との間で広域無線通信により情報を送受信する。これにより、搬送台車4と通信デバイス8との間における受信電波強度が低下するのを回避することができ、搬送台車4と通信デバイス8との間の無線通信を安定化させることができる。
以上、本発明の通信装置について、上記実施の形態に基づいて説明したが、本発明は、上記実施の形態に限定されるものではない。上記実施の形態に対して当業者が思い付く変形を施して得られる形態、及び、上記実施の形態における構成要素を任意に組み合わせて実現される別の形態も本発明に含まれる。
4 搬送台車
6,6a,6b,6c,6d,6e,6f 半導体製造装置
8,8a,8b,8c,8d,8e,8f 通信デバイス
10 無線アクセスポイント
12 通信装置
14 FOUP
16 レール
18 把持部
20 搬入出口
22,22a,22b,22c,22d,22e,22f 載置ポート
24 パラレルケーブル
26 無線ネットワーク
28,46 広域無線通信部
30,34,48,52 アンテナ
32,50 近距離無線通信部
36,40,44,54 制御部
38,42 通信部
56 取得部
58,60 データフレーム
Claims (6)
- 被搬送物を搬送するための搬送台車と、前記搬送台車との間で前記被搬送物が移載される移載装置に接続された通信デバイスと、の間における通信を中継する通信装置であって、
広域無線通信基地局を介して、前記搬送台車との間で広域無線通信により情報を送受信する広域無線通信部と、
前記通信デバイスとの間で、前記広域無線通信よりも狭い通信範囲の近距離無線通信により情報を送受信する近距離無線通信部と、
前記広域無線通信部が受信した情報を、広域無線通信用の情報から近距離無線通信用の情報に変換して前記近距離無線通信部に出力し、且つ、前記近距離無線通信部が受信した情報を、近距離無線通信用の情報から広域無線通信用の情報に変換して前記広域無線通信部に出力する制御部と、を備える
通信装置。 - (i)前記搬送台車が、前記移載装置との間で前記被搬送物を移載する前に前記移載装置に近付く方向に走行中、又は、前記移載装置との間で前記被搬送物を移載した後に前記移載装置から離れる方向に走行中に、前記通信デバイスに対して情報を送信する場合には、
前記広域無線通信部は、前記広域無線通信基地局を介して、前記広域無線通信により前記搬送台車からの情報を受信し、
前記制御部は、前記広域無線通信部が受信した情報を、広域無線通信用の情報から近距離無線通信用の情報に変換して前記近距離無線通信部に出力し、
前記近距離無線通信部は、前記近距離無線通信により前記制御部で変換された情報を前記通信デバイスに送信し、
(ii)前記搬送台車が、前記移載装置との間で前記被搬送物を移載する前に前記移載装置に近付く方向に走行中、又は、前記移載装置との間で前記被搬送物を移載した後に前記移載装置から離れる方向に走行中の際に、前記通信デバイスが前記搬送台車に対して情報を送信する場合には、
前記近距離無線通信部は、前記近距離無線通信により前記通信デバイスからの情報を受信し、
前記制御部は、前記近距離無線通信部が受信した情報を、近距離無線通信用の情報から広域無線通信用の情報に変換して前記広域無線通信部に出力し、
前記広域無線通信部は、前記広域無線通信基地局を介して、前記広域無線通信により前記制御部で変換された情報を前記搬送台車に送信する
請求項1に記載の通信装置。 - 前記通信装置は、さらに、前記搬送台車の走行中に、当該搬送台車以外の他の搬送台車と前記通信デバイスとの通信状況を示す通信状況情報を取得する取得部を備え、
前記広域無線通信部は、前記取得部により取得された通信状況情報を、前記広域無線通信基地局を介して前記広域無線通信により走行中の当該搬送台車に送信する
請求項2に記載の通信装置。 - 前記通信装置は、さらに、前記搬送台車の走行中に、当該搬送台車以外の他の搬送台車の位置を示す位置情報を取得する取得部を備え、
前記広域無線通信部は、前記取得部により取得された位置情報を、前記広域無線通信基地局を介して前記広域無線通信により走行中の当該搬送台車に送信する
請求項2に記載の通信装置。 - 被搬送物を搬送するための搬送台車と、前記搬送台車との間で前記被搬送物が移載される移載装置に接続された通信デバイスと、の間における通信を中継する通信装置の制御方法であって、
(a)広域無線通信基地局を介して、広域無線通信により前記搬送台車からの情報を受信するステップと、
(b)前記(a)で受信した情報を、広域無線通信用の情報から近距離無線通信用の情報に変換するステップと、
(c)前記広域無線通信よりも狭い通信範囲の近距離無線通信により、前記(b)で変換された情報を前記通信デバイスに送信するステップと、
(d)前記近距離無線通信により前記通信デバイスからの情報を受信するステップと、
(e)前記(d)で受信した情報を、近距離無線通信用の情報から広域無線通信用の情報に変換するステップと、
(f)前記広域無線通信基地局を介して、前記広域無線通信により前記(e)で変換された情報を前記搬送台車に送信するステップと、を含む
通信装置の制御方法。 - 被搬送物を搬送するための搬送台車と、
前記搬送台車との間で前記被搬送物が移載される移載装置に接続された通信デバイスと、
前記搬送台車と前記通信デバイスとの間における通信を中継する通信装置と、を備え、
前記搬送台車は、広域無線通信基地局を介して、前記通信装置との間で広域無線通信により情報を送受信する第1の通信部を有し、
前記通信デバイスは、前記通信装置との間で、前記広域無線通信よりも狭い通信範囲の近距離無線通信により情報を送受信する第2の通信部を有し、
前記通信装置は、
前記広域無線通信基地局を介して、前記搬送台車の前記第1の通信部との間で前記広域無線通信により情報を送受信する広域無線通信部と、
前記通信デバイスの前記第2の通信部との間で前記近距離無線通信により情報を送受信する近距離無線通信部と、
前記広域無線通信部が受信した情報を、広域無線通信用の情報から近距離無線通信用の情報に変換して前記近距離無線通信部に出力し、且つ、前記近距離無線通信部が受信した情報を、近距離無線通信用の情報から広域無線通信用の情報に変換して前記広域無線通信部に出力する制御部と、を有する
通信システム。
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