WO2021238714A1 - 顶置缓冲器二重搬入检测系统及方法 - Google Patents

顶置缓冲器二重搬入检测系统及方法 Download PDF

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Publication number
WO2021238714A1
WO2021238714A1 PCT/CN2021/094246 CN2021094246W WO2021238714A1 WO 2021238714 A1 WO2021238714 A1 WO 2021238714A1 CN 2021094246 W CN2021094246 W CN 2021094246W WO 2021238714 A1 WO2021238714 A1 WO 2021238714A1
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Prior art keywords
sensing unit
overhead
overhead buffer
range
buffer
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PCT/CN2021/094246
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English (en)
French (fr)
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秦源章
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长鑫存储技术有限公司
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Priority to US17/423,642 priority Critical patent/US20220344188A1/en
Publication of WO2021238714A1 publication Critical patent/WO2021238714A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/16—Applications of indicating, registering, or weighing devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C15/00—Safety gear
    • B66C15/06—Arrangements or use of warning devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C15/00—Safety gear
    • B66C15/06—Arrangements or use of warning devices
    • B66C15/065—Arrangements or use of warning devices electrical
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00—Prospecting or detecting by optical means
    • G01V8/10—Detecting, e.g. by using light barriers
    • G01V8/20—Detecting, e.g. by using light barriers using multiple transmitters or receivers
    • G01V8/26—Detecting, e.g. by using light barriers using multiple transmitters or receivers using mechanical scanning systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Definitions

  • This application relates to a double-loading detection system and method for overhead buffers.
  • the automatic material handling system in semiconductor integrated circuits includes an overhead hoist transport (OHT) that runs along a track set under the ceiling and an overhead buffer (Overhead Buffer) installed under the ceiling. ,OHB), where the overhead buffer is a storage shed for storing Front Opening Unified Pod (FOUP), and the overhead crane is used to transport the Front Opening Unified Pod to Destination site.
  • OHT overhead hoist transport
  • Overhead Buffer overhead buffer
  • FOUP Front Opening Unified Pod
  • the present application provides a double-loading detection system and method for overhead buffers, which can realize accurate double-loading detection.
  • the first aspect of the present application provides a double loading detection system for overhead buffers, including:
  • the first sensing unit is used to scan and generate detection data in a horizontal range
  • a driving device arranged on the crown block, connected with the first sensing unit, and configured to move the first sensing unit in a vertical range;
  • the control unit is respectively connected with the driving device and the first sensing unit;
  • the crane control system is respectively connected with the crane and the control unit, and is used to send a detection instruction and a driving instruction to the control unit when the crane moves to the corresponding overhead buffer position, and the control
  • the unit controls the driving device to move the first sensing unit in a vertical range according to the driving instruction, and controls the first sensing unit to scan and generate the overhead buffer during the movement according to the detection instruction
  • the detection data of each horizontal range in the overhead buffer is sent to the crane control system, and the crane control system is based on the detection data of each horizontal range in the overhead buffer. Determine whether there is an obstacle in the overhead buffer.
  • a second aspect of the present application provides a double-load detection method for overhead buffers, including:
  • the first sensing unit is triggered, and the driving device is controlled to move the first sensing unit in a vertical range, so that the first sensing unit scans and generates detections of each horizontal range in the overhead buffer during the movement.
  • Data the driving device is arranged on the crown block, and the first sensing unit is connected to the driving device;
  • Figure 1 is a front view of an existing double-loading detection system for overhead buffers
  • FIG. 2 is a schematic structural diagram of the detection process in the system of FIG. 1 when there is a traditional front-mounted wafer transfer box in the overhead buffer;
  • FIG. 3 is a schematic structural diagram of the detection process when there is a foreign object in the overhead buffer in the system of FIG. 1;
  • FIG. 3 is a schematic structural diagram of the detection process when there is a foreign object in the overhead buffer in the system of FIG. 1;
  • FIG. 4 is a schematic structural diagram of the detection process in the system of FIG. 1 when there is a transparent front-mounted wafer transfer box in the overhead buffer;
  • FIG. 5 is a working principle diagram of the first sensing unit in the dual-input detection system for the overhead buffer of this application;
  • Figure 6 is a top view of the dual-input detection system for the overhead buffer of the present application.
  • FIG. 7 is a schematic structural diagram of the detection process of the dual-input detection system for the overhead buffer of this application.
  • FIG. 8 is a schematic diagram of the driving device of the dual-input detection system for the overhead buffer of this application.
  • FIG. 9 is a flow chart of the double-loading detection method of the top-mounted buffer of the present application.
  • first and second are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with “first” and “second” may explicitly or implicitly include at least one of the features. In the description of the present application, "a plurality of” means at least two, such as two, three, etc., unless specifically defined otherwise.
  • the terms “installed”, “connected”, “connected”, “fixed” and other terms should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , Or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two components or the interaction relationship between two components, unless otherwise specified The limit.
  • installed can be a fixed connection or a detachable connection , Or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two components or the interaction relationship between two components, unless otherwise specified The limit.
  • the existing crane 1 is usually equipped with a photoelectric sensor.
  • the crane 1 passes through the traveling part 11. Walk on the track and move to the designated position of the overhead buffer 4, and then use a photoelectric sensor (usually a single-beam photoelectric sensor) to check whether there is a front-mounted wafer transfer box 2 on the overhead buffer 4 Confirm that, specifically, the photoelectric sensor will send a light beam to the double-in/out detection reflector 3 under the overhead buffer 4, and determine whether there is an object on the overhead buffer 1 by whether the light beam is reflected back by the reflector 3, among which, Double loading refers to continuing to store new objects on the overhead buffer 4 for existing objects.
  • a photoelectric sensor usually a single-beam photoelectric sensor
  • Figures 6 and 7 show an overhead buffer double loading detection system in an embodiment of the present application, which includes: crane 1, first sensing unit 5, driving device, control unit (not shown), and crane In the control system (not shown), the first sensing unit 5 is used to scan and generate the detection data of the horizontal range 511.
  • the first sensing unit 5 uses a sensor that can realize horizontal scanning, which has a
  • the detectable horizontal detection area 51 is usually a flat fan-shaped area.
  • the actual horizontal range 511 required to be detected can be set according to the actual monitoring range required (the shape setting can be set by parameters) Modification), as an example, the first sensing unit 5 can be an obstacle scanning sensor; the driving device is arranged on the crown block 1, connected to the first sensing unit 5, and is used to measure the vertical range of the first sensing unit 5 52 mobile; control unit, respectively connected with the driving device and the first sensing unit 5; the crown block control system is connected with the crown block 1 and the control unit respectively, used when the crown block 1 moves to the corresponding overhead buffer 4 position Send a detection instruction and a drive instruction to the control unit, the control unit controls the drive device to move the first sensing unit 5 in the vertical range 52 according to the drive instruction, and controls the first sensing unit 5 to scan and generate the top during the movement according to the detection instruction.
  • Set the detection data of each horizontal range in the buffer 4 and send the detection data of each horizontal range in the overhead buffer 4 to the crane control system, and the crane control system according to the detection data of each horizontal range in the
  • the dual loading detection system for overhead buffers of the present application uses a first sensing unit that can scan to generate detection data in a horizontal range, and combines a driving device to drive the first sensing unit to move in a vertical range, so that the first sensing During the movement, the unit scans and generates the detection data of each horizontal range in the overhead buffer, and detects according to the two dimensions of the horizontal and vertical directions, and obtains the detection result of the three-dimensional space range, and accurately judges the presence or absence of obstacles.
  • the applied system is suitable for the detection of various items including traditional front-mounted wafer transfer box 2, small obstacle objects 2a, FOSE type wafer transfer box 2b, etc., with high detection accuracy, avoiding missed inspections and false detections .
  • the driving device adopts a screw mechanism, which usually includes a screw 6, a slider 7 arranged on the screw 6, and a motor 8 connected to the screw 6;
  • the first sensing unit 5 is arranged on the sliding block 7 of the screw mechanism.
  • the first sensing unit 5 can be fixedly arranged on the sliding block 7 of the screw mechanism through but not limited to a connecting plate (not shown);
  • the control unit drives the motor 8 of the screw mechanism to realize that the slider 7 drives the first sensing unit 5 to move in the vertical range, as shown in FIG. 8, specifically, when the motor 8 is driven by the control unit to rotate forward , The forward rotation of the lead screw 6 drives the slider 7 upward while the first sensing unit 5 is also upward.
  • the motor 8 is driven by the control unit to reverse, the reverse rotation of the lead screw 6 drives the slider 7 downward and the first sensing unit 5 is also down.
  • the vertical range 52 can be defined by a pair of sensing units.
  • a second sensing unit 91 is provided on the driving device, and the second sensing unit 91 is connected to the control unit for When the first sensing unit 5 moves to the upper limit of the vertical range 52, the first sensing signal is output;
  • a third sensing unit 92 is provided on the driving device, and the third sensing unit 92 is connected to the control unit for the first
  • the sensing unit 5 outputs the second sensing signal when it moves to the lower limit of the vertical range 52; the control unit is used to control the first sensing unit 5 to be only detected by the second sensing signal according to the first sensing signal and the second sensing signal.
  • the unit 91 and the third sensing unit 92 move within the vertical range defined by the third sensing unit 92.
  • the moving direction can be from bottom to top or from bottom to top. There is no restriction here, as long as each vertical range can be detected during the movement.
  • the detection data of the corresponding horizontal range 511 within the range is sufficient.
  • both the second sensing unit 91 and the third sensing unit 92 can use laser sensors.
  • a U-shaped sensor can be used. Accordingly, only the first sensing unit 5 or the slider 7 is required.
  • the blocking piece 9 that can pass through the U-shaped sensor during the movement can be set at the corresponding position.
  • the second sensing unit 91 sends a first sensing signal to the control unit, and the control unit judges that the first sensing unit 5 has reached the upper limit of movement of the vertical range 52 through the received first sensing signal.
  • the control unit receives the second sensing signal, it is determined that the first sensing unit 5 has reached the lower limit of the movement of the vertical range 52.
  • control unit may control the first sensing unit 5 to start scanning from the lower limit position of the vertical range (where the third sensing unit 92 is located) according to the first sensing signal and the second sensing signal, and when it moves to the vertical The scan ends at the upper limit position of the range (where the second sensing unit 91 is located), and then returns to the lower limit position to wait for the next detection.
  • it can also start scanning from the upper limit position of the vertical range (where the second sensing unit 91 is located), and end scanning when moving to the lower limit position of the vertical range (where the third sensing unit 92 is located), Then return to the upper limit position and wait for the next detection.
  • control unit can also be designed as a non-returning cyclic scanning detection method, that is, if the previous one is a moving scan from top to bottom, then the next Supreme mobile scanning, this alternate scanning method can effectively shorten the movement period of the first sensing unit 5. It is worth noting that when this scanning method is used, after the previous scan is completed, the crane moves to the next There will be no scanning during the period between the overhead buffers, and the next scan will only start when the overhead crane moves to the next overhead buffer to avoid the overhead crane from scanning during the traveling process and leading to detection. The result is not accurate.
  • the vertical range 52 includes at least the lower edge 41 of the obstacle on the overhead buffer 4 to the area where the upper edge 121 of the transfer part 12 of the crane 1 is located, usually a front-mounted wafer transfer box 2 or FOSE type
  • the bottom of the wafer transfer box 2b and the upper surface of the base of the overhead buffer 4 are on the same level.
  • the transfer part 12 carries the crystals.
  • the circular transfer box is first extended and then placed on the base of the overhead buffer 4. In order to give the transfer part 12 and the wafer transfer box enough movement range, the vertical range is set to the obstacle on the overhead buffer 4.
  • the horizontal range 511 includes at least the area of the obstacle on the top buffer 4, for example, the horizontal area from the leftmost side to the rightmost side of the obstacle, the scanned horizontal range 511 information can be obtained through the corresponding software
  • the setting is made, specifically, the distinction is realized by setting the position coordinates (X/Y).
  • the detection method of a stereo scanning space limited by the above-mentioned vertical range 52 and horizontal range 511 has higher detection accuracy than traditional photoelectric sensor detection.
  • the present application also provides a double-load detection method for the top-mounted buffer, which can be implemented by, but not limited to, the above-mentioned double-input detection system for the top-mounted buffer.
  • Moving-in inspection methods include:
  • S2 Trigger the detection of obstacles in the three-dimensional space. Specifically, trigger the first sensing unit 5, and control the driving device to move the first sensing unit 5 in a vertical range, so that the first sensing unit 5 scans and generates the top during the movement.
  • the driving device is arranged on the crown block 1, and the first sensing unit 5 is connected with the driving device;
  • S3 Determine whether there is an obstacle in the top buffer 4 according to the detection data of each horizontal range in the top buffer 4.
  • step S4 when there is an obstacle, skip to step S4; when there is no obstacle, skip to step S6;
  • the crane control system synthesizes the shape and size of the obstacle detected by each horizontal plane in the vertical direction to determine the obstacle Types of objects, such as wafer transfer boxes or other objects that affect the delivery of goods on cranes, and give corresponding alarm reminders according to different types of obstacles;
  • step S5. Wait for the operator to check and release the alarm on site, and then return to step S1;
  • Crane 1 leaves and returns to step S1 to execute the next delivery after obtaining the next wafer transfer box.
  • the detection area includes the horizontal range that the first sensing unit 5 can scan and the vertical range that the first sensing unit 5 needs to move.
  • the detection range of the horizontal range 511 includes at least the top The horizontal range where the obstacle on the buffer 4 is located, and the vertical range 52 includes at least the area from the lower edge of the obstacle on the overhead buffer 4 to the upper edge of the transfer part 12 of the crown block 1, and the trigger conditions include The crane 1 moves to the corresponding overhead buffer 4.
  • step S2 after the first sensing unit 5 is triggered, the first sensing unit 5 starts scanning from the position of the lower edge of the obstacle on the overhead buffer 4.
  • the driving device Scanning ends when it moves to the position of the upper edge of the transfer part 12 of the crane 1.

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Abstract

一种顶置缓冲器二重搬入检测系统及检测方法，其包括：天车（1）；第一感测单元（5），用于扫描生成水平范围（511）的检测数据；驱动装置，用于对第一感测单元（5）进行竖直范围（52）移动；控制单元，以及天车控制系统，用于在天车（1）移动到对应的顶置缓冲器（4）位置时向控制单元发送检测指令以及驱动指令，控制单元根据驱动指令控制驱动装置对第一感测单元（5）进行竖直范围（52）移动，以及根据检测指令控制第一感测单元（5）在移动过程中扫描生成顶置缓冲器（4）内各水平范围（511）的检测数据，根据顶置缓冲器（4）内各水平范围的检测数据判断顶置缓冲器（4）内是否有存在障碍物。

Description

顶置缓冲器二重搬入检测系统及方法
相关申请交叉引用
本申请要求2020年05月29日递交的、标题为“顶置缓冲器二重搬入检测系统及方法”、申请号为2020104743583的中国申请，其公开内容通过引用全部结合在本申请中。
技术领域
本申请涉及顶置缓冲器二重搬入检测系统及方法。
背景技术
半导体集成电路中物料自动搬运系统(AMHS,Automated Material Handling System)包括沿着设置在天花板下方的轨道行走的天车(Overhead Hoist Transport,OHT)以及安装于天花板下方的顶置缓冲器(Over Head Buffer,OHB)，其中，顶置缓冲器为一种存储棚位，用于存放前置式晶圆传送盒(Front Opening Unified Pod,FOUP)，天车用于将前置式晶圆传送盒搬送至目的地站点。
发明内容
本申请提供一种顶置缓冲器二重搬入检测系统及方法，可以实现二重搬入的精确检测。
根据多个实施例，本申请第一方面提供一种顶置缓冲器二重搬入检测系统，包括：
天车；
第一感测单元，用于扫描生成水平范围的检测数据；
驱动装置，设置在所述天车上，与所述第一感测单元连接，用于对所述第一感测单元进行竖直范围移动；
控制单元，分别与所述驱动装置以及所述第一感测单元连接；以及
天车控制系统，分别与所述天车以及所述控制单元连接，用于在所述天车移动到对应的顶置缓冲器位置时向所述控制单元发送检测指令以及驱动指令，所述控制单元根据所述驱动指令控制所述驱动装置对所述第一感测单元进行竖直范围移动，以及根据所述检测指令控制所述第一感测单元在移动过程中扫描生成所述顶置缓冲器内各水平范围的检测数据，并将所述顶置缓冲器内各水平范围的检测数据发送给所述天车控制系统，所述天车控制系统根据所述顶置缓冲器内各水平范围的检测数据判断所述顶置缓冲器内是否有存在障碍物。
根据多个实施例，本申请第二方面提供一种顶置缓冲器二重搬入检测方法，包括：
控制天车移动到对应的顶置缓冲器位置；
触发第一感测单元，控制驱动装置对所述第一感测单元进行竖直范围移动，使所述第一感测单元在移动过程中扫描生成所述顶置缓冲器内各水平范围的检测数据，所述驱动装置设置在所述天车上，所述第一感测单元与所述驱动装置连接；以及
根据所述顶置缓冲器内各水平范围的检测数据判断所述顶置缓冲器内是否存在障碍物。
本申请的一个或多个实施例的细节在下面的附图和描述中提出。本申请的其它特征和优点将从说明书、附图以及权利要求书变得明显。
附图说明
为了更清楚地说明本申请实施例或传统技术中的技术方案，下面将对实施例或传统技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为现有的顶置缓冲器二重搬入检测系统的主视图；
图2为图1系统中当顶置缓冲器中存在传统前置式晶圆传送盒时的检测过程的结构示意图；
图3为图1系统中当顶置缓冲器中存在异物时的检测过程的结构示意图；
图4为图1系统中当顶置缓冲器中存在透明的前置式晶圆传送盒时的检测过程的结构示意图；
图5为本申请的顶置缓冲器二重输入检测系统中的第一感测单元的工作原理图；
图6为本申请的顶置缓冲器二重输入检测系统的俯视图；
图7为本申请的顶置缓冲器二重输入检测系统的检测过程的结构示意图；
图8为本申请的顶置缓冲器二重输入检测系统的驱动装置示意图；
图9为本申请的顶置缓冲器二重搬入检测方法的流程图。
标号说明：1.天车；11.走行部；12.移载部；2.前置式晶圆传送盒；2a.物 体；2b.FOSE类型的晶圆传送盒；3.反射板；4.顶置缓冲器；5.第一感测单元；51.可检测区域；511.水平范围；52.竖直范围；6.丝杠；7.滑块；8.马达；9.阻断片；91.第二感测单元；92.第三感测单元。
具体实施方式
现有技术中，当天车移动到相应的顶置缓冲器位置以进行前置式晶圆传送盒的存放时，需要先对顶置缓冲器内是否存在物体进行检测，该检测过程称之为二重输入检测。当前通过光电传感器进行二重输入检测，而当前的检查方式存在漏检测和误检测的可能，精确度不高。
为使本申请的上述目的、特征和优点能够更加明显易懂，下面结合附图对本申请的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本申请。但是本申请能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本申请内涵的情况下做类似改进，因此本申请不受下面公开的具体实施例的限制。
在本申请的描述中，需要理解的是，术语“竖直”、“水平”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本申请的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
在本申请中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系，除非另有明确的限定。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请中的具体含义。
需要说明的是，当元件被称为“固定于”或“设置于”另一个元件，它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的，并不表示是唯一的实施方式。
参阅图1、2所示，现有的天车1上通常设有光电传感器，当天车1需要将前置式晶圆传送盒2放置到顶置缓冲器4上时，天车1通过走行部11在轨道上行走移动到指定的顶置缓冲器4位置，然后先通过光电传感器(sensor，通常为一个单束光电传感器)对顶置缓冲器4上是否已有前置式晶圆传送盒2进行确认，具体地，光电传感器会发送光束到顶置缓冲器4下方的二重搬入检出用反射板3，通过光束是否被反射板3反射回来以判断顶置缓冲器1上是否存在物体，其中，二重搬入指的是对已存在物体的顶置缓冲器4上继续存放新的物体。
如图3、4所示，在某些情况下，当顶置缓冲器4上存在较小物体2a无法遮挡光电传感器发出的光束时，容易造成漏检测，即存在检测范围小的问题；在另一些情况下，当顶置缓冲器4上的前置式晶圆传送盒为FOSE类型的晶圆传送盒2b时，由于FOSE类型的晶圆传送盒2b本身是透明的，因此光电 传感器发出的光束可以穿透过去并通过反射板4反射反射光，致使反馈得到错误的检测结果，即也会引起误检测。
图6、7示出了本申请一实施例中的顶置缓冲器二重搬入检测系统，包括：天车1、第一感测单元5、驱动装置、控制单元(未示出)以及天车控制系统(未示出)，第一感测单元5用于扫描生成水平范围511的检测数据，如图5所示，第一感测单元5采用的是可以实现水平扫描的传感器，其具有一个可检测到的水平检测区域51，通常为一个平面的扇形区域，在该可检测区域内，可以根据实际所需要监控的范围设定实际所需检测的水平范围511(形状设定可以通过参数进行修改)，作为示例，第一感测单元5可以选用障碍物扫描传感器；驱动装置设置在天车1上，与第一感测单元5连接，用于对第一感测单元5进行竖直范围52移动；控制单元，分别与驱动装置以及第一感测单元5连接；天车控制系统分别与天车1以及控制单元连接，用于在天车1移动到对应的顶置缓冲器4位置时向控制单元发送检测指令以及驱动指令，控制单元根据驱动指令控制驱动装置对第一感测单元5进行竖直范围52移动，以及根据检测指令控制第一感测单元5在移动过程中扫描生成顶置缓冲器4内各水平范围的检测数据，并将顶置缓冲器4内各水平范围的检测数据发送给天车控制系统，天车控制系统根据顶置缓冲器4内各水平范围的检测数据判断顶置缓冲器4内是否有存在障碍物。
本申请的顶置缓冲器二重搬入检测系统通过使用可以扫描生成水平范围的检测数据的第一感测单元，结合一个驱动装置带动第一感测单元进行竖直范围移动，使得第一感测单元在移动过程中扫描生成顶置缓冲器内各水平范围的检测数据，根据水平方向和竖直方向两个维度检测，得到立体空间范围的检测结果，精准判断出障碍物的存在与否，本申请的系统适用于对包括传 统前置式晶圆传送盒2、较小障碍物物体2a、FOSE类型的晶圆传送盒2b等各类物品的检测，检测精度高，避免了漏检以及误检。
在其中一个实施例中，如图7、8所示，驱动装置采用丝杠机构，丝杠机构通常包括丝杠6、设置在丝杠6上的滑块7、连接丝杠6的马达8；第一感测单元5设置在丝杠机构的滑块7上，具体地，第一感测单元5可以通过但不仅限于连接板(未示出)固定设置于丝杠机构的滑块7上；控制单元通过对丝杠机构的马达8进行驱动以实现滑块7带动第一感测单元5进行竖直范围移动，如图8所示，具体地，当马达8在控制单元的驱动下正转，丝杠6正转带动滑块7向上同时第一感测单元5也向上，当马达8在控制单元的驱动下反转，丝杠6反转带动滑块7向下同时第一感测单元5也向下。
在其中一个实施例中，竖直范围52的限定可以通过一对感测单元来完成，作为示例，在驱动装置上设置第二感测单元91，第二感测单元91连接控制单元，用于在第一感测单元5移动到竖直范围52的上限时输出第一感测信号；在驱动装置上设置第三感测单元92，第三感测单元92连接控制单元，用于在第一感测单元5移动到竖直范围52的下限时输出第二感测信号；控制单元用于根据第一感测信号以及第二感测信号控制第一感测单元5仅在由第二感测单元91和第三感测单元92所限定出的竖直范围内移动，移动方向可以是从下往上或者从下往上，在此不做限制，只要能够在移动过程中检测到各竖直范围内相应水平范围511的检测数据即可。
作为示例，第二感测单元91和第三感测单元92均可以采用激光传感器，本示例中，例如可以采用U型传感器，相应地，只需要在第一感测单元5或者滑块7的相应位置上设置可在移动过程中穿过U型传感器的阻断片9即可，当第一感测单元5或者滑块7上的阻断片9在移动过程中到达第二感测单元 91的U型传感器中时，第二感测单元91发出第一感测信号到控制单元，控制单元通过接收到的第一感测信号判断第一感测单元5到达竖直范围52的移动上限，同样地，当控制单元接收到第二感测信号时判断第一感测单元5到达竖直范围52的移动下限。
作为示例，控制单元可以根据第一感测信号以及第二感测信号控制第一感测单元5从竖直范围的下限位置(第三感测单元92所在位置)启动扫描，当移动到竖直范围的上限位置(第二感测单元91所在位置)时结束扫描，然后归位至下限位置等待下一次检测。作为变化例，也可以是从竖直范围的上限位置(第二感测单元91所在位置)启动扫描，当移动到竖直范围的下限位置(第三感测单元92所在位置)时结束扫描，然后归位至上限位置等待下一次检测，当然，还可以将控制单元设计成不归位的循环扫描检测方式，即，前一次如果为由上至下的移动扫描，那么下一次就采用由下至上的移动扫描，这种交替的扫描方式，可以有效缩短第一感测单元5的移动周期,值得注意的是,采用该种扫描方式时,前一次扫描结束后一直到天车移动到下一顶置缓冲器之间的这段时间内不会扫描，只有待天车移动到下一顶置缓冲器的时候才开始下一次扫描,以避免天车在走行的过程中也一直进行扫描导致检测结果不准确。
作为示例，竖直范围52至少包括顶置缓冲器4上的障碍物的下边缘41到天车1移载部12的上边缘121所在区域范围，通常前置式晶圆传送盒2或者FOSE型晶圆传送盒2b底部与顶置缓冲器4底座的上表面是在同一水平面上的，天车1将晶圆传送盒放在顶置缓冲器的底座上时，是移载部12带着晶圆传送盒先伸出来然后放到顶置缓冲器4的底座上，为了给移载部12和晶圆传送盒足够的动作区间，因此竖直范围设定为顶置缓冲器4上的障碍物的下 边缘(或者顶置缓冲器4的底座的上表面)到天车1移载部12的上边缘所在区域范围，也即晶圆传送盒底部到移载部12上边缘这部分区域范围，值得注意的是，当顶置缓冲器上不存在障碍物时，待检测的竖直范围52中所指的障碍物的下边缘41位置实际也就是顶置缓冲器4的底座的上表面位置，因此，可以理解，所谓竖直范围52中的障碍物的下边缘41其实是一个虚拟的位置表示，仅为了体现空间内可能存在障碍物的最低点，而不是必然指代某一具体障碍物的下边缘；水平范围511至少包括顶置缓冲器4上的障碍物所在的区域范围，例如，障碍物的最左侧面至最右侧所在的水平区域范围，扫描的水平范围511信息可以通过相应软件进行设定，具体地，通过对位置坐标(X/Y)进行设定以实现区分。由上述竖直范围52和水平范围511所限制出的一个立体扫描空间的检测方式较传统的光电传感器检测具有更高的检测精度。
如图9所示，本申请还提供了一种顶置缓冲器二重搬入检测方法，可以通过但不限于通过上述顶置缓冲器二重输入检测系统来实现，所述顶置缓冲器二重搬入检测方法包括：
S1、控制天车1移动到对应的顶置缓冲器4位置；
S2、触发立体空间障碍物检测，具体地，触发第一感测单元5，控制驱动装置对第一感测单元5进行竖直范围移动，使第一感测单元5在移动过程中扫描生成顶置缓冲器4内各水平范围的检测数据，驱动装置设置在天车1上，第一感测单元5与驱动装置连接；
S3、根据顶置缓冲器4内各水平范围的检测数据判断顶置缓冲器4内是否存在障碍物。
作为示例，当存在障碍物时，跳转到步骤S4；当不存在障碍物时，跳转到步骤S6；
S4、根据顶置缓冲器内各水平范围的检测数据判断障碍物的种类，具体地，天车控制系统对每个水平面所检测到的障碍物形状及大小进行竖直方向的合成，从而判断障碍物的种类，例如晶圆传送盒或者其他影响天车放货的物体，并根据障碍物的不同种类进行相应的报警提醒；
S5、等待操作人员现场查看解除报警，然后返回步骤S1；
S6、天车1放货；
S7、天车1离开，获取下一个晶圆传送盒后返回步骤S1执行下一次放货。
在其中一个示例中，在控制天车1移动到对应的顶置缓冲器4位置之前还包括如下步骤：
S0、设定检测区域以及触发条件，检测区域包括第一感测单元5可扫描的水平范围以及第一感测单元5所需移动的竖直范围，其中，水平范围511的检测范围至少包括顶置缓冲器4上的障碍物所在的水平范围，竖直范围52至少包括顶置缓冲器4上的障碍物的下边缘到天车1移载部12的上边缘所在的区域范围，触发条件包括天车1移动到对应的顶置缓冲器4。
在其中一个实施例中，步骤S2中，触发第一感测单元5后，第一感测单元5从顶置缓冲器4上的障碍物的下边缘位置启动扫描，当在驱动装置的控制下移动到天车1移载部12的上边缘位置时结束扫描。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本申请的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对申请专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干 变形和改进，这些都属于本申请的保护范围。因此，本申请专利的保护范围应以所附权利要求为准。

Claims (12)

  1. 一种顶置缓冲器二重搬入检测系统，包括：
    天车；
    第一感测单元，用于扫描生成水平范围的检测数据；
    驱动装置，设置在所述天车上，与所述第一感测单元连接，用于对所述第一感测单元进行竖直范围移动；
    控制单元，分别与所述驱动装置以及所述第一感测单元连接；以及
    天车控制系统，分别与所述天车以及所述控制单元连接，用于在所述天车移动到对应的顶置缓冲器位置时向所述控制单元发送检测指令以及驱动指令，所述控制单元根据所述驱动指令控制所述驱动装置对所述第一感测单元进行竖直范围移动，以及根据所述检测指令控制所述第一感测单元在移动过程中扫描生成所述顶置缓冲器内各水平范围的检测数据，并将所述顶置缓冲器内各水平范围的检测数据发送给所述天车控制系统，所述天车控制系统根据所述顶置缓冲器内各水平范围的检测数据判断所述顶置缓冲器内是否有存在障碍物。
  2. 根据权利要求1所述的顶置缓冲器二重搬入检测系统，其中：
    所述驱动装置为丝杠机构；
    所述第一感测单元设置在所述丝杠机构的滑块上；并且
    所述控制单元通过对所述丝杠机构的马达进行驱动以实现所述滑块带动所述第一感测单元进行所述竖直范围移动。
  3. 根据权利要求2所述的顶置缓冲器二重搬入检测系统，还包括：
    第二感测单元，连接所述控制单元，用于在所述第一感测单元移动到所述竖直范围的上限时输出第一感测信号；
    第三感测单元，连接所述控制单元，用于在所述第一感测单元移动到所述竖直范围的下限时输出第二感测信号；并且
    所述控制单元还用于根据所述第一感测信号以及所述第二感测信号控制所述第一感测单元从所述竖直范围的下限位置启动扫描，当移动到所述竖直范围的上限位置时结束扫描。
  4. 根据权利要求3所述的顶置缓冲器二重搬入检测系统，其中：
    所述第二感测单元以及所述第三感测单元分别为激光传感器。
  5. 根据权利要求1所述的顶置缓冲器二重搬入检测系统，其中：
    所述竖直范围至少包括所述顶置缓冲器上的障碍物的下边缘到所述天车的移载部的上边缘所在区域范围。
  6. 根据权利要求1或5所述的顶置缓冲器二重搬入检测系统，其中：
    所述水平范围至少包括所述顶置缓冲器上的障碍物所在的区域范围。
  7. 根据权利要求4所述的顶置缓冲器二重搬入检测系统，其中所述激光传感器为U型传感器；
    在所述第一感测单元或者所述滑块的相应位置上设置可在移动过程中穿过所述U型传感器的阻断片。
  8. 一种顶置缓冲器二重搬入检测方法，应用于权利要求1所述的检测系统，所述方法包括：
    控制所述天车移动到对应的所述顶置缓冲器位置；
    触发所述第一感测单元，控制所述驱动装置对所述第一感测单元进行竖直范围移动，使所述第一感测单元在移动过程中扫描生成所述顶置缓冲器内各水平范围的检测数据，所述驱动装置设置在所述天车上，所述第一感测单元与所述驱动装置连接；以及
    根据所述顶置缓冲器内各水平范围的检测数据判断所述顶置缓冲器内是否存在障碍物。
  9. 根据权利要求8所述的顶置缓冲器二重搬入检测方法，其中：所述天车移动到对应的所述顶置缓冲器位置之前还包括：
    设定所述第一感测单元的水平范围的检测范围以及所述第一感测单元移动的竖直范围；
    所述水平范围至少包括所述顶置缓冲器上的障碍物所在的区域范围；
    所述竖直范围至少包括所述顶置缓冲器上的障碍物的下边缘到所述天车的移载部的上边缘所在的区域范围。
  10. 根据权利要求9所述的顶置缓冲器二重搬入检测方法，其中：
    触发所述第一感测单元后，所述第一感测单元从所述顶置缓冲器上的障碍物的下边缘位置启动扫描，当在所述驱动装置的控制下移动到所述天车的移载部的上边缘位置时结束扫描。
  11. 根据权利要求9所述的顶置缓冲器二重搬入检测方法，其中，判断所述顶置缓冲器内存在障碍物之后还包括：
    根据所述顶置缓冲器内各水平范围的检测数据判断所述障碍物的种类，并根据所述障碍物的不同种类进行相应的报警提醒。
  12. 根据权利要求8所述的顶置缓冲器二重搬入检测方法，其中在所述控制所述天车移动到对应的所述顶置缓冲器位置之前，还包括：
    设定检测区域以及触发条件，所述检测区域包括所述第一感测单元可扫描的水平范围以及所述第一感测单元所需移动的竖直范围；
    其中，所述水平范围的检测范围至少包括所述顶置缓冲器上的障碍物所在的水平范围，所述竖直范围至少包括所述顶置缓冲器上的障碍物的下边缘 到所述天车的移载部的上边缘所在的区域范围，所述触发条件包括所述天车移动到对应的移载部顶置缓冲器。
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