WO2021182209A1 - Capteur coaxial piézoélectrique - Google Patents

Capteur coaxial piézoélectrique Download PDF

Info

Publication number
WO2021182209A1
WO2021182209A1 PCT/JP2021/008068 JP2021008068W WO2021182209A1 WO 2021182209 A1 WO2021182209 A1 WO 2021182209A1 JP 2021008068 W JP2021008068 W JP 2021008068W WO 2021182209 A1 WO2021182209 A1 WO 2021182209A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
sensor
pair
adhesive layer
exterior
Prior art date
Application number
PCT/JP2021/008068
Other languages
English (en)
Japanese (ja)
Inventor
雄気 田中
知幸 篠原
Original Assignee
株式会社フジクラ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社フジクラ filed Critical 株式会社フジクラ
Publication of WO2021182209A1 publication Critical patent/WO2021182209A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/60—Piezoelectric or electrostrictive devices having a coaxial cable structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Definitions

  • the present invention relates to a piezoelectric coaxial sensor.
  • a piezoelectric coaxial sensor in which a piezoelectric element is arranged between a central conductor and an outer conductor of a coaxial cable is known.
  • the piezoelectric coaxial sensor detects the force by detecting the voltage of the piezoelectric element generated when a force is applied from the outer peripheral surface of the sensor via the center conductor and the outer conductor. Utilizing this property, the deformation of the object to be measured provided with the piezoelectric coaxial sensor, the force applied to the object to be measured, the vibration, and the like are detected.
  • a polymer piezoelectric material is generally used as the piezoelectric element of such a piezoelectric coaxial sensor.
  • Patent Document 1 describes such a piezoelectric coaxial sensor.
  • This piezoelectric coaxial sensor is composed of a central conductor, a polymer piezoelectric layer that covers the outer peripheral surface of the central conductor, an outer conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer, and a jacket layer that covers the outer peripheral surface of the outer conductor. It is composed of a certain insulating layer. This jacket layer is formed by extrusion molding.
  • the piezoelectric coaxial sensor may be arranged in a narrow gap in the object to be measured, and there is a request to reduce the thickness of the piezoelectric coaxial sensor which is the outer diameter in a predetermined radial direction of the piezoelectric coaxial sensor.
  • the jacket layer By forming the jacket layer with the resin film in this way, the outer diameter of the piezoelectric coaxial sensor can be reduced and the thickness of the piezoelectric coaxial sensor can be reduced as compared with the case where the jacket layer is formed by extrusion molding.
  • the adhesive that adheres the resin film tends to have low resistance to chemicals such as organic solvents, and the resin film may peel off.
  • an object of the present invention is to provide a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness.
  • the piezoelectric coaxial sensor of the present invention includes a linear center conductor, a polymer piezoelectric layer covering the outer peripheral surface of the central conductor, and an outer conductor surrounding the outer peripheral surface of the polymer piezoelectric layer.
  • a sensor body including a sensor unit having a tape-like film, and at least one jacket layer having a tape-like film wound around the outer peripheral surface of the sensor unit and adhered to a member in contact with the adhesive layer by an adhesive layer.
  • a pair of exterior sheets and at least one of the pair of exterior sheets have an adhesive layer on one main surface side, and the pair of exterior sheets have the sensor main body with the one main surface side facing each other. It is characterized in that at least a part of the sensor body is sandwiched and bonded by the adhesive layer of the exterior sheet to surround the outer peripheral surface of at least a part of the sensor body.
  • the outer diameter of the sensor body can be made smaller than when the jacket layer is formed by extrusion molding.
  • the thickness of the piezoelectric coaxial sensor in the thickness direction of the pair of exterior sheets is approximately the sum of the thickness of the pair of exterior sheets and the outer diameter of the sensor body.
  • the sheet can be thinner than the members typically formed by extrusion. Therefore, according to such a piezoelectric coaxial sensor, the thickness of the piezoelectric coaxial sensor in the thickness direction of at least a pair of exterior sheets can be made smaller than the outer diameter of the sensor body in which the jacket layer is formed by extrusion molding.
  • the outer peripheral surface of at least a part of the sensor body is surrounded by a pair of exterior sheets. Therefore, according to such a piezoelectric coaxial sensor, an organic solvent or the like is applied to the adhesive layer for adhering the film in the jacket layer of the sensor body, as compared with the case where the outer peripheral surface of at least a part of the sensor body is not surrounded by the member. Contact with chemicals can be suppressed, and peeling of the film in the jacket layer can be suppressed. Therefore, the piezoelectric coaxial sensor of the present invention can improve chemical resistance while reducing the thickness.
  • the pair of exterior sheets extends to the side opposite to the other end side of the sensor body with respect to one end of the sensor body, and viewed along the direction in which the pair of exterior sheets are bonded together.
  • the pair of exterior sheets at least a part of a pair of regions sandwiching the sensor body in a direction perpendicular to the longitudinal direction of the sensor body and the other end of the sensor body with reference to the one end of the sensor body. At least a part of the area on the opposite side may be continuously bonded to each other.
  • the flexibility of one of the exterior sheets may be lower than the flexibility of the other exterior sheet.
  • one exterior sheet can be easily flattened and one exterior sheet can be easily attached to the object to be measured, as compared with the case where the flexibility of the pair of exterior sheets is substantially the same.
  • each of the pair of exterior sheets may have the adhesive layer on the main surface side of the one.
  • the adhesive layers of the pair of exterior sheets can be brought into contact with the outer peripheral surface of the sensor body. Therefore, according to such a piezoelectric coaxial sensor, a portion of the sensor body surrounded by the pair of exterior sheets moves with respect to the pair of exterior sheets, as compared with the case where only one exterior sheet has an adhesive layer. Can be suppressed. Therefore, in such a piezoelectric coaxial sensor, for example, when the exterior sheet is attached to the object to be measured, deformation of the object to be measured, force applied to the object to be measured, vibration, etc. are appropriately transmitted from the exterior sheet to the sensor body. However, these forces, vibrations, etc. can be detected appropriately.
  • At least one of the pair of exterior sheets may have a conductor layer.
  • the conductor layer acts as a shield layer, and the influence of an external electromagnetic field or the like reaches the central conductor or the outer conductor as compared with the case where the pair of exterior sheets do not have the conductor layer. Can be suppressed. Therefore, such a piezoelectric coaxial sensor can suppress the superposition of noise on the central conductor and the outer conductor due to an external electromagnetic field or the like, and can further reduce the deformation of the object to be measured, the force applied to the object to be measured, the vibration, and the like. Can be detected properly.
  • one of the exterior sheets has a base material layer having the adhesive layer provided on one surface, an adhesive layer provided on the other surface of the base material layer, and the base material layer side of the adhesive layer. It may have a release sheet that covers the surface opposite to the surface.
  • the adhesive layer of the exterior sheet may be made of a silicone-based adhesive.
  • a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness.
  • FIG. 3 is a cross-sectional view taken along the line III-III of FIG.
  • FIG. 3 is an enlarged view showing a portion including a sensor main body in FIG.
  • FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG.
  • FIG. 6 shows the piezoelectric coaxial sensor which concerns on the modification of this invention from the same viewpoint as FIG.
  • FIG. 1 is a diagram schematically showing a piezoelectric coaxial sensor according to the present embodiment
  • FIG. 2 is a diagram showing a structure of the piezoelectric coaxial sensor shown in FIG.
  • the piezoelectric coaxial sensor 1 of the present embodiment includes a linear sensor main body 10 and a pair of flexible exterior sheets 20 and 30.
  • FIG. 1 also shows a connector 50 to which the piezoelectric coaxial sensor 1 is connected and a cable 60 connected to the connector 50.
  • the pair of exterior sheets 20 and 30 are bonded together
  • FIG. 1 is a view showing the piezoelectric coaxial sensor 1 along the direction in which the pair of exterior sheets 20 and 30 are bonded together. ..
  • the sensor main body 10 of the present embodiment includes a central conductor 11, a polymer piezoelectric layer 12, a first outer conductor 13, a first jacket layer 14, and a second outer conductor 15.
  • a second jacket layer 16 is provided.
  • the central conductor 11 is a linear conductor composed of stranded wires of a plurality of conductive wires.
  • the central conductor 11 is not particularly limited as long as it is a conductor, and examples thereof include a conductor made of copper, aluminum, a tin-plated annealed copper alloy, or the like. Note that FIG. 2 shows an example in which the central conductor 11 is composed of stranded wires of a plurality of conductive wires as described above, but the central conductor 11 is a linear conductor composed of a single conductive wire. Is also good.
  • the polymer piezoelectric layer 12 is a layer that covers the outer peripheral surface of the central conductor 11. In the present embodiment, the polymer piezoelectric layer 12 is in contact with the outer peripheral surface of the central conductor 11.
  • the polymer piezoelectric layer 12 is made of a polymer exhibiting piezoelectricity, and examples of such a polymer include polyvinylidene fluoride (PVDF), polylactic acid, polyurea, and the like.
  • PVDF polyvinylidene fluoride
  • the outer shape of the cross section of the polymer piezoelectric layer 12 is formed into a substantially circular shape by extrusion molding or the like.
  • the polymer piezoelectric layer 12 may be formed by winding a tape-shaped film made of the polymer piezoelectric material around the center conductor 11. In this case, the film may be wound in a spiral winding or in a vertical winding.
  • the first outer conductor 13 is a conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer 12. In the present embodiment, the first outer conductor 13 is in contact with the outer peripheral surface of the polymer piezoelectric layer 12.
  • the first outer conductor 13 has a configuration in which a plurality of conducting wires are spirally wound in the same direction.
  • Such a first outer conductor 13 is not particularly limited as long as it is made of a conductor, but is made of, for example, a conductor similar to that of the central conductor 11.
  • FIG. 2 shows an example in which a plurality of conductors are spirally wound as the first outer conductor 13, the first outer conductor 13 may be a net wire in which a plurality of conductors are woven.
  • the sensor unit S is composed of the central conductor 11 having the above configuration, the polymer piezoelectric layer 12, and the first outer conductor 13. As described above, the polymer piezoelectric layer 12 is in contact with the outer peripheral surface of the central conductor 11, and the first outer conductor 13 is in contact with the outer peripheral surface of the polymer piezoelectric layer 12. Therefore, in the sensor unit S, when the external force applied to the piezoelectric coaxial sensor 1 is transmitted to the piezoelectric body layer 12 and a voltage due to the induced charge is generated in the polymer piezoelectric layer 12, the center conductor 11 and the first one. A voltage is generated between the outer conductor 13 and the outer conductor 13 based on this voltage generated in the polymer piezoelectric layer 12. Therefore, by attracting the voltage between the central conductor 11 and the first outer conductor 13 to the outside of the piezoelectric coaxial sensor 1 and measuring the voltage, it is possible to measure the force applied to the piezoelectric coaxial sensor 1.
  • FIG. 3 is a cross-sectional view taken along the line III-III of FIG. 1, and FIG. 4 is an enlarged view of a portion including the sensor main body 10 in FIG.
  • the first jacket layer 14 is a layer that covers the outer peripheral surface of the first outer conductor 13. Therefore, the first jacket layer 14 covers the outer peripheral surface of the sensor portion S.
  • the first jacket layer 14 is composed of an inner first jacket layer 14a and an outer first jacket layer 14b.
  • the inner first jacket layer 14a is made of a tape-shaped film 14at made of resin, and the film 14at is spirally wound on the outer peripheral surface of the first outer conductor 13. No adhesive layer is provided on any surface of the film 14at, and the inner first jacket layer 14a is non-adhesive to the first outer conductor 13.
  • the material of the film 14at is not particularly limited, and examples thereof include insulating resins such as polyethylene terephthalate, polyethylene naphthalate, polyimide, polyvinyl chloride, polypropylene, polyether ether ketone, polyetherimide, and polyphenylene sulfide. can.
  • An adhesive layer may be provided on one surface of the film 14at, but the inner first jacket layer 14a and the first outer conductor 13 can be easily peeled off when the first outer conductor 13 is squeezed out. From this point of view, it is preferable that no adhesive layer is provided on any surface of the film 14at as described above.
  • the outer first jacket layer 14b is the outermost jacket layer of the first jacket layer 14, and is provided on one surface of the tape-shaped film 14bt made of resin and the film 14bt. It consists of a layer 14ba.
  • the adhesive layer 14ba faces the inner first jacket layer 14a side and is spirally wound on the outer peripheral surface of the inner first jacket layer 14a. Therefore, the adhesive layer 14ba is in contact with the inner first jacket layer 14a, and the film 14bt is adhered to the inner first jacket layer 14a by the adhesive layer 14ba.
  • the film 14bt of the outer first jacket layer 14b is wound in the same direction as the film 14at of the inner first jacket layer 14a, but the film 14bt of the outer first jacket layer 14b and the inner th.
  • the film 14at of the jacket layer 14a may be wound in the opposite direction. Further, at least one of the film 14at and the film 14bt may be wound in a vertical winding.
  • the material of the film 14bt is not particularly limited, and examples thereof include the same material as the film 14at.
  • the adhesive used for the adhesive layer 14ba is not particularly limited, and examples thereof include an acrylic adhesive, a polyester adhesive, a polyamide adhesive, and an ethylene vinyl acetate copolymer (EVA) adhesive.
  • EVA ethylene vinyl acetate copolymer
  • the first jacket layer 14 may be composed of the other of the inner first jacket layer 14a and the outer first jacket layer 14b.
  • the first jacket layer 14 is non-adhesive as described above. It is preferably composed of an inner first jacket layer 14a and an outer first jacket layer 14b having an adhesive layer 14ba.
  • the second outer conductor 15 is a conductor that surrounds the outer peripheral surface of the first jacket layer 14.
  • the second outer conductor 15 has a configuration in which a plurality of conducting wires are spirally wound in the same direction.
  • Such a second outer conductor 15 is not particularly limited as long as it is made of a conductor, but is made of, for example, the same conductor as the first outer conductor 13.
  • FIG. 2 shows an example in which a plurality of conductors are spirally wound as the second outer conductor 15, the second outer conductor 15 may be a net wire in which a plurality of conductors are woven.
  • the second jacket layer 16 is a layer that covers the outer peripheral surface of the second outer conductor 15. As shown in FIG. 4, in the present embodiment, the second jacket layer 16 has an inner second jacket layer 16a and an outer second jacket layer 16b.
  • the inner second jacket layer 16a is made of a tape-shaped film 16at made of resin, and the film 16at is spirally wound on the outer peripheral surface of the second outer conductor 15. No adhesive layer is provided on any surface of the film 16at, and the inner second jacket layer 16a is non-adhesive to the second outer conductor 15.
  • the material of the film 16at is not particularly limited, and examples thereof include the same material as the film 14at.
  • An adhesive layer may be provided on one surface of the film 16at, but the inner second jacket layer 16a and the second outer conductor 15 can be easily peeled off when the second outer conductor 15 is squeezed out. From this point of view, it is preferable that no adhesive layer is provided on any surface of the film 16at as described above.
  • the outer second jacket layer 16b is the outermost jacket layer of the second jacket layer 16 and is located on the outermost outermost side of the sensor body 10.
  • the outer second jacket layer 16b is composed of a tape-shaped film 16bt made of resin and an adhesive layer 16ba provided on one surface of the film 16bt.
  • the adhesive layer 16ba faces the inner second jacket layer 16a side and is spirally wound on the outer peripheral surface of the inner second jacket layer 16a. Therefore, the adhesive layer 16ba is in contact with the inner second jacket layer 16a, and the film 16bt is adhered to the inner second jacket layer 16a by the adhesive layer 16ba.
  • the film 16bt of the outer second jacket layer 16b is wound in the same direction as the film 16at of the inner second jacket layer 16a, but the film 16bt of the outer second jacket layer 16b and the inner second jacket layer 16b. 2
  • the film 16at of the jacket layer 16a may be wound in the opposite direction. Further, at least one of the film 16at and the film 16bt may be wound in a vertical winding.
  • the material of the film 16bt is not particularly limited, and examples thereof include the same material as the film 16at.
  • the adhesive used for the adhesive layer 16ba is not particularly limited, and examples thereof include an adhesive similar to the adhesive used for the adhesive layer 14ba.
  • the inner second jacket layer 16a may be omitted, and the second jacket layer 16 may be composed of the outer second jacket layer 16b.
  • the second jacket layer 16 is non-adhesive as described above. It is preferably composed of an inner second jacket layer 16a and an outer second jacket layer 16b having an adhesive layer 16ba.
  • the main body 10 includes an outer second jacket layer 16b.
  • the outer second jacket layer 16b has a tape-shaped film 16bt that is wound so as to surround the outer peripheral surface of the sensor portion S and is adhered to a member in contact with the adhesive layer 16ba by the adhesive layer 16ba. Therefore, it can be understood that the sensor main body 10 includes at least one jacket layer having a tape-shaped film that is wound around the outer peripheral surface of the sensor portion S and adhered to the member in contact with the adhesive layer by the adhesive layer. ..
  • One of the exterior sheets 20 of the present embodiment has flexibility, and as shown in FIGS. 3 and 4, is composed of a base material layer 21, an adhesive layer 22, an adhesive layer 23, and a release sheet 24. ..
  • the base material layer 21 is a flexible sheet-like member.
  • the base material layer 21 is not particularly limited, and examples thereof include a film made of a resin, and the film may have a multi-layer structure or a single-layer structure.
  • the material of the film is not particularly limited, and examples thereof include the same material as the film 14at of the sensor body 10.
  • the adhesive layer 22 is provided on one surface of the base material layer 21.
  • Examples of the material constituting the adhesive layer 22 include an adhesive and an adhesive.
  • the pressure-sensitive adhesive and the adhesive are not particularly limited, but are preferably resistant to chemicals such as organic solvents.
  • acrylic-based, silicone-based, urethane-based and other adhesives and adhesives can be mentioned, and it is particularly preferable that the adhesive is composed of a silicone-based adhesive.
  • the adhesive layer 23 is provided on the other surface of the base material layer 21.
  • the pressure-sensitive adhesive used for the pressure-sensitive adhesive layer 23 is not particularly limited, and examples thereof include pressure-sensitive adhesives similar to the pressure-sensitive adhesives exemplified in the pressure-sensitive adhesive layer 22.
  • the release sheet 24 is a flexible sheet-like member that covers the surface of the adhesive layer 23 opposite to the base material layer 21 side.
  • the release sheet 24 has a release base layer 24a and a release agent layer 24b provided on the surface of the release base layer 24a on the adhesive layer 23 side.
  • the release base material layer 24a include a film made of resin, a laminate in which both sides or one side of paper is coated with resin.
  • the material of the resin constituting the film or the resin covering the paper is not particularly limited, and examples thereof include the same materials as the above-mentioned film 14at.
  • the release agent layer 24b is a layer containing a release agent.
  • the release agent contained in the release agent layer 24b is not particularly limited, and examples thereof include a fluorine-based release agent and a silicone-based release agent.
  • the release sheet 24 may be composed of only the release agent layer 24b.
  • the other exterior sheet 30 of the present embodiment has flexibility and is composed of a base material layer 31 and an adhesive layer 32 as shown in FIGS. 3 and 4.
  • the thickness of the exterior sheet 30 is thinner than that of the exterior sheet 20, and the flexibility of the exterior sheet 30 is higher than that of the exterior sheet 20.
  • the thickness of the exterior sheet 30 is not particularly limited, and may be the same as the exterior sheet 20 or thicker than the exterior sheet 20.
  • the flexibility of the exterior sheet 30 is not particularly limited and may be the same as that of the exterior sheet 20 or lower than that of the exterior sheet 20.
  • the base material layer 31 is a flexible sheet-like member.
  • the base material layer 31 is not particularly limited, and examples thereof include a film made of a resin, and this film may have a multi-layer structure or a single-layer structure.
  • the material of the film is not particularly limited, and examples thereof include the same material as the film 14at of the sensor body 10.
  • the adhesive layer 32 is provided on one surface of the base material layer 31.
  • Examples of the material constituting the adhesive layer 32 include an adhesive and an adhesive.
  • the pressure-sensitive adhesive and the adhesive are not particularly limited, but are preferably resistant to chemicals such as organic solvents.
  • acrylic-based, silicone-based, urethane-based and other adhesives and adhesives can be mentioned, and it is particularly preferable that the adhesive is composed of a silicone-based adhesive.
  • each of the pair of exterior sheets 20 and 30 having such a configuration is formed in a band shape having a width larger than the outer diameter of the sensor main body 10 and extending along the longitudinal direction of the sensor main body 10.
  • the pair of exterior sheets 20 and 30 have a main surface 20S side on the adhesive layer 22 side of the exterior sheet 20 and a main surface 30S side on the adhesive layer 32 side of the exterior sheet 30.
  • the sensor main body 10 is sandwiched between them facing each other, and they are bonded by adhesive layers 22 and 32. At this time, a part of the outer peripheral surface of the sensor body 10 is in contact with the adhesive layer 22, and the other part of the outer peripheral surface of the sensor body 10 is in contact with the adhesive layer 32.
  • the exterior sheet 20 having the adhesive layer 23 and the release sheet 24 having low flexibility is substantially flattened, and the highly flexible exterior sheet 30 is one of the exterior sheets 30.
  • the portion is curved so as to be along a part of the outer peripheral surface of the sensor body 10.
  • the pair of exterior sheets 20 and 30 surround the outer peripheral surface of the outer second jacket layer 16b, which is the outer peripheral surface of the sensor body 10.
  • a gap between the pair of exterior sheets 20 and 30 and the sensor body 10 is surrounded by one main surface 20S of the exterior sheet 20, one main surface 30S of the exterior sheet 30, and the outer peripheral surface of the sensor body 10. GP is formed.
  • the sensor main body 10 has one end 10E and the other end accommodated in the internal space of the connector 50, and the pair of exterior sheets 20 and 30 have one end similarly to the sensor main body 10. It has 20E, 30E and the other end housed in the internal space of the connector 50.
  • the other end of the sensor body 10 is electrically connected to the cable 60 via a circuit (not shown) accommodated in the internal space of the connector 50.
  • the cable 60 is not particularly limited, and examples thereof include a coaxial cable including a central conductor connected to the central conductor 11 of the sensor body 10 and an outer conductor connected to the first outer conductor 13 of the sensor body 10. ..
  • FIG. 5 is an enlarged view showing a portion including one end 10E of the sensor main body 10 in FIG. 1.
  • FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG. Note that in FIG. 6, the description of the internal structure of the sensor body 10 is omitted.
  • the pair of exterior sheets 20 and 30 extend to the side opposite to the other end side connected to the connector 50 of the sensor body 10 with reference to one end 10E of the sensor body 10. There is.
  • the pair of exterior sheets 20 and 30 extend beyond one end 10E of the sensor body 10 in the longitudinal direction of the sensor body 10, and the pair of exterior sheets 20 and 30 have one end 20E and 30E extending from one end 10E.
  • the pair of exterior sheets 20 and 30 have regions 20a and 30a on the opposite side of the sensor main body 10 with respect to one end 10E. Further, the outer edges of the pair of exterior sheets 20 and 30 are substantially the same at least in the portion of the pair of exterior sheets 20 and 30 that is not housed in the connector 50. Further, in this portion, the sticking portion 40 to which the pair of exterior sheets 20 and 30 are bonded extends along the entire outer edge of the pair of exterior sheets 20 and 30. Then, when the pair of exterior sheets 20 and 30 are viewed along the direction in which they are attached, the attached portion 40 surrounds the sensor main body 10.
  • the pair of regions 20b, 30b, 20c, 30c sandwiching the sensor body 10 in the direction perpendicular to the longitudinal direction of the sensor body 10 A part and a part of the regions 20a and 30a on the opposite side of the other end side of the sensor body 10 from one end 10E of the sensor body 10 are continuously bonded.
  • the edge 40E on the sensor main body 10 side of the sticking portion 40 is indicated by a two-dot chain line.
  • the pasting portion 40 is hatched, and the boundary between the areas 20a and 30a and the areas 20b and 30b and the boundary between the areas 20a and 30a and the areas 20c and 30c are shown by broken lines. ..
  • the outer peripheral surface of the sensor body 10 and the sensor are located in the portion of the piezoelectric coaxial sensor 1 that is not accommodated in the internal space of the connector 50.
  • One end 10E of the main body 10 is surrounded by a pair of exterior sheets 20 and 30, and the portion is sealed. Therefore, the gap GP formed between the pair of exterior sheets 20 and 30 and the sensor main body 10 does not communicate with the outside from one end of the piezoelectric coaxial sensor 1.
  • the release sheet 24 of the exterior sheet 20 is peeled from the adhesive layer 23, and the adhesive layer 23 exposed to the outside is attached to the object to be measured, whereby the piezoelectric coaxial sensor 1 Is attached to the object to be measured.
  • the piezoelectric coaxial sensor 1 of the present embodiment covers the linear center conductor 11, the polymer piezoelectric layer 12 that covers the outer peripheral surface of the central conductor 11, and the outer peripheral surface of the polymer piezoelectric layer 12.
  • At least one jacket layer having a sensor portion S having a first outer conductor 13 that surrounds the sensor portion S, and a tape-shaped film that is wound so as to surround the outer peripheral surface of the sensor portion S and adhered to a member in contact with the adhesive layer by an adhesive layer.
  • a sensor main body 10 including the above and a pair of exterior sheets 20 and 30 are provided. Each of the pair of exterior sheets 20 and 30 has adhesive layers 22 and 32 on one of the main surfaces 20S and 30S.
  • the pair of exterior sheets 20 and 30 have one main surface 20S and 30S facing each other and sandwich at least a part of the sensor body 10, and are bonded by the adhesive layers 22 and 32 of the exterior sheets 20 and 30 to form the sensor body. It surrounds the outer peripheral surface of at least a part of 10.
  • the outer diameter of the sensor body 10 can be made smaller than that in the case where the jacket layer is formed by extrusion molding.
  • the thickness of the piezoelectric coaxial sensor 1 in the thickness direction of the pair of exterior sheets 20 and 30 is approximately the sum of the thickness of the pair of exterior sheets 20 and 30 and the outer diameter of the sensor body 10.
  • the sheet can be thinner than the members typically formed by extrusion. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the thickness of the piezoelectric coaxial sensor 1 in the thickness direction of at least a pair of exterior sheets 20 and 30 is set to the outside of the sensor body in which the jacket layer is formed by extrusion molding. Can be smaller than the diameter.
  • the outer peripheral surface of at least a part of the sensor main body 10 is surrounded by the pair of exterior sheets 20 and 30. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the adhesive layer for adhering the film in the jacket layer of the sensor body 10 is compared with the case where the outer peripheral surface of at least a part of the sensor body 10 is not surrounded by the member. It is possible to suppress contact with chemicals such as organic solvents.
  • the first jacket layer 14 is composed of the inner first jacket layer 14a and the outer first jacket layer 14b
  • the second jacket layer 16 is the inner second jacket layer 16a and the outer second jacket layer 16.
  • the piezoelectric coaxial sensor 1 of the present embodiment can improve chemical resistance while reducing the thickness.
  • the pair of exterior sheets 20 and 30 are opposite to the other end side of the sensor body 10 with respect to one end 10E of the sensor body 10. It extends to the side. Further, when viewed along the direction in which the pair of exterior sheets 20 and 30 are bonded together, a pair of the pair of exterior sheets 20 and 30 sandwiching the sensor body 10 in a direction perpendicular to the longitudinal direction of the sensor body 10. A part of the regions 20b, 30b, 20c, 30c and a part of the regions 20a, 30a on the opposite side of the other end side of the sensor body 10 with reference to one end 10E of the sensor body 10 are continuously bonded. ..
  • the flexibility of the exterior sheet 20 is lower than the flexibility of the exterior sheet 30. Therefore, as compared with the case where the flexibility of the pair of exterior sheets 20 and 30 is substantially the same, the exterior sheet 20 can be easily flattened and the exterior sheet 30 can be easily attached to the object to be measured.
  • each of the pair of exterior sheets 20 and 30 has adhesive layers 22 and 32 on one of the main surfaces 20S and 30S. Therefore, the adhesive layers 22 and 32 of the pair of exterior sheets 20 and 30 can be brought into contact with the outer peripheral surface of the sensor body 10. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the portion of the sensor body 10 surrounded by the pair of exterior sheets 20 and 30 is the pair, as compared with the case where only one exterior sheet has an adhesive layer. It is possible to suppress the movement of the exterior sheets 20 and 30 of the above.
  • the piezoelectric coaxial sensor 1 of the present embodiment for example, when the exterior sheet 20 is attached to the object to be measured, deformation of the object to be measured, force applied to the object to be measured, vibration, and the like are transmitted from the exterior sheet 20 to the sensor body. It can be appropriately transmitted to No. 10, and these forces, vibrations, and the like can be appropriately detected.
  • the exterior sheet 20 includes a base material layer 21 having an adhesive layer 22 provided on one surface and an adhesive layer 23 provided on the other surface of the base material layer 21. It has a release sheet 24 that covers the surface of the adhesive layer 23 opposite to the base material layer 21 side. Therefore, the exterior sheet 20 can be easily attached to the object to be measured as compared with the case where the exterior sheet 20 does not have the adhesive layer 23 and the release sheet 24.
  • the exterior sheet 20 composed of the base material layer 21, the adhesive layer 22, the adhesive layer 23, and the release sheet 24, and the exterior sheet 30 composed of the base material layer 31 and the adhesive layer 32 have been described as an example. ..
  • the pair of exterior sheets 20 and 30 has an adhesive layer on one main surface side, and the pair of exterior sheets 20 and 30 can be bonded to each other by this adhesive layer.
  • the exterior sheet 20 does not have to have the adhesive layer 23 and the release sheet 24.
  • the exterior sheet 20 preferably has an adhesive layer 23 and a release sheet 24.
  • the adhesive layer 23 and the release sheet 24 may not be provided on the entire outer sheet 20 in the in-plane direction.
  • the adhesive layer 23 and the release sheet 24 may be provided at least on the end side opposite to the end housed in the connector 50.
  • one of the pair of exterior sheets 20 and 30 may have almost no flexibility.
  • the pair of exterior sheets 20 and 30 can be bonded together as in the above embodiment. Can be done.
  • one of the pair of exterior sheets 20 and 30 does not have to have an adhesive layer.
  • the pair of exterior sheets 20 and 30 can be bonded together by the adhesive layer 32 of the exterior sheet 30.
  • the pair of exterior sheets 20 may have the conductor layer 25, and the exterior sheet 30 may have the conductor layer 35.
  • FIG. 7 is a diagram showing the piezoelectric coaxial sensor 1 according to the modified example of the present invention from the same viewpoint as in FIG.
  • the exterior sheet 20 has a conductor layer 25 between the base material layer 21 and the adhesive layer 22.
  • the conductor layer 25 is not particularly limited as long as it is a conductor, and examples thereof include a metal foil and a metal vapor-deposited film deposited on the surface of the base material layer 21 on the adhesive layer 22 side. Examples of such a metal include copper, aluminum and the like.
  • the exterior sheet 30 has a conductor layer 35 between the base material layer 31 and the adhesive layer 32.
  • the conductor layer 35 is not particularly limited as long as it is a conductor, and examples thereof include the same conductor layer 25 as the conductor layer 25.
  • the conductor layers 25 and 35 act as a shield layer, and the external surface is compared with the case where the conductor layers 25 and 35 are not provided. It is possible to suppress the influence of the electromagnetic field and the like from reaching the central conductor 11 and the first outer conductor 13 of the sensor body 10.
  • the piezoelectric coaxial sensor 1 of this modified example can suppress noise from being superimposed on the central conductor 11 and the first external conductor 13 due to an external electromagnetic field or the like, and is added to the deformation of the object to be measured and the object to be measured. Force, vibration, etc. can be detected more appropriately.
  • the base material layers 21 and 31 may be the conductor layers 25 and 35, and in this case, for example, the base material layers 21 and 31 are metal foils. Further, from the viewpoint of suppressing the influence of an external electromagnetic field or the like from reaching the central conductor 11 or the first outer conductor 13 of the sensor body 10, one of the pair of exterior sheets 20 and 30 has a conductor layer. It suffices that one of the exterior sheets 20 and 30 does not have a conductor layer.
  • a pair of exterior sheets 20 and 30 that surround the entire portion of the sensor body 10 that is not housed in the internal space of the connector 50 will be described as an example.
  • the pair of exterior sheets 20 and 30 may surround at least a part of the sensor main body 10.
  • the pair of exterior sheets 20 and 30 do not have to surround the portion of the sensor body 10 on the connector 50 side.
  • the pair of exterior sheets 20 and 30 do not have to extend from one end 10E of the sensor body 10 to the side opposite to the other end side of the sensor body 10 in the longitudinal direction of the sensor body 10.
  • the portion including one end 10E of the sensor main body 10 is not surrounded by the pair of exterior sheets 20 and 30, it is preferable that the portion is surrounded by, for example, resin or the like.
  • the sensor main body 10 including the central conductor 11, the polymer piezoelectric layer 12, the first outer conductor 13, the first jacket layer 14, the second outer conductor 15, and the second jacket layer 16 is taken as an example.
  • the sensor body 10 has a linear center conductor, a polymer piezoelectric layer that covers the outer peripheral surface of the central conductor, and a sensor portion that has an outer conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer, and an outer circumference of the sensor portion. It may include at least one jacket layer having a tape-like film that is wound around a surface and adhered to a member in contact with the adhesive layer by an adhesive layer.
  • the sensor body 10 does not have to have the first jacket layer 14 and the second outer conductor 15, and in this case, the outer peripheral surface of the sensor portion S is covered with the second jacket layer 16.
  • a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness is provided, and is expected to be used in fields such as measurement of equipment.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

Capteur coaxial piézoélectrique (1) comprenant : un corps (10) de capteur comprenant une unité capteur (S) ayant un conducteur central linéaire (11), une couche piézoélectrique polymère (12) qui recouvre la surface périphérique extérieure du conducteur central (11), et un premier conducteur extérieur (13) entourant la surface périphérique extérieure de la couche piézoélectrique polymère (12), et au moins une couche de chemise ayant un film en forme de bande qui est enroulée de manière à entourer la surface périphérique extérieure de l'unité capteur (S) et est collée de manière adhésive par une couche adhésive à un élément en contact avec la couche adhésive ; et une paire de feuilles extérieures (20, 30), au moins une feuille de la paire de feuilles extérieures (20, 30) comportant une couche adhésive (22, 32) sur un côté surface principale (20S, 30S), et dans la paire de feuilles extérieures (20, 30), les côtés surface principale (20S, 30S) se font face, prennent en sandwich au moins une partie du corps (10) de capteur, sont liés à celle-ci par les couches adhésives (22, 32), et entourent la surface périphérique extérieure d'au moins une partie du corps (10) de capteur.
PCT/JP2021/008068 2020-03-09 2021-03-03 Capteur coaxial piézoélectrique WO2021182209A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020040228 2020-03-09
JP2020-040228 2020-03-09

Publications (1)

Publication Number Publication Date
WO2021182209A1 true WO2021182209A1 (fr) 2021-09-16

Family

ID=77671586

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2021/008068 WO2021182209A1 (fr) 2020-03-09 2021-03-03 Capteur coaxial piézoélectrique

Country Status (1)

Country Link
WO (1) WO2021182209A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004119240A (ja) * 2002-09-27 2004-04-15 Totoku Electric Co Ltd フレキシブル高周波同軸ケーブル
JP2007273478A (ja) * 1994-09-13 2007-10-18 W L Gore & Assoc Inc 電気導体の保護のためのジャケット材料
JP2009004225A (ja) * 2007-06-21 2009-01-08 Nitto Denko Corp コネクタ付結束同軸ケーブルの製造方法
JP2015069264A (ja) * 2013-09-27 2015-04-13 株式会社村田製作所 押圧検出センサ、タッチ式入力装置
JP2018182009A (ja) * 2017-04-10 2018-11-15 三井化学株式会社 圧電基材、力センサー、及びアクチュエータ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273478A (ja) * 1994-09-13 2007-10-18 W L Gore & Assoc Inc 電気導体の保護のためのジャケット材料
JP2004119240A (ja) * 2002-09-27 2004-04-15 Totoku Electric Co Ltd フレキシブル高周波同軸ケーブル
JP2009004225A (ja) * 2007-06-21 2009-01-08 Nitto Denko Corp コネクタ付結束同軸ケーブルの製造方法
JP2015069264A (ja) * 2013-09-27 2015-04-13 株式会社村田製作所 押圧検出センサ、タッチ式入力装置
JP2018182009A (ja) * 2017-04-10 2018-11-15 三井化学株式会社 圧電基材、力センサー、及びアクチュエータ

Similar Documents

Publication Publication Date Title
US8872032B2 (en) Bundled flexible flat circuit cable
JP6458199B2 (ja) トランスデューサ積層体
JP6801306B2 (ja) シールドフラットケーブル
JP2007059323A (ja) 差動信号伝送ケーブル
JP2009080090A (ja) 圧電センサ
KR101023242B1 (ko) 전자파 차폐 튜브
JP2007173056A (ja) ハーネスおよび電子機器
WO2021182209A1 (fr) Capteur coaxial piézoélectrique
WO2018168168A1 (fr) Unité de capteur
JP5468412B2 (ja) シールド線および該シールド線の形成方法
JP2000111422A (ja) ケーブル状圧力センサ
JP2006302692A (ja) 漏洩同軸ケーブル
JP7495977B2 (ja) 圧電同軸センサ
JP4488820B2 (ja) ケーブル状圧力センサ
JP2005174598A (ja) 高周波同軸ケーブル
JP3659043B2 (ja) ケーブル状圧力センサとその製造方法
JP3651300B2 (ja) ケーブル状圧力センサ
JP2009099349A (ja) フレキシブルフラットケーブル及びその製造方法
JPH10294022A (ja) 導電フィルム
JP7350155B2 (ja) 圧電同軸センサ及び圧電同軸センサの製造方法
JP2004111831A (ja) 空芯コイル
JP2013008793A (ja) シールドテープ、及び、それを用いたケーブル
JP2007179957A (ja) 同軸ケーブル
JPH10241925A (ja) ノイズフィルタテープ
KR102128431B1 (ko) 비접촉식 도전성 액체 누설 감지 필름 및 이를 포함하는 도전성 액체 누설 감지 장치

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21768643

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21768643

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP