WO2021182209A1 - Piezoelectric coaxial sensor - Google Patents

Piezoelectric coaxial sensor Download PDF

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Publication number
WO2021182209A1
WO2021182209A1 PCT/JP2021/008068 JP2021008068W WO2021182209A1 WO 2021182209 A1 WO2021182209 A1 WO 2021182209A1 JP 2021008068 W JP2021008068 W JP 2021008068W WO 2021182209 A1 WO2021182209 A1 WO 2021182209A1
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Prior art keywords
layer
sensor
pair
adhesive layer
exterior
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PCT/JP2021/008068
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French (fr)
Japanese (ja)
Inventor
雄気 田中
知幸 篠原
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株式会社フジクラ
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Publication of WO2021182209A1 publication Critical patent/WO2021182209A1/en

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/60—Piezoelectric or electrostrictive devices having a coaxial cable structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Definitions

  • the present invention relates to a piezoelectric coaxial sensor.
  • a piezoelectric coaxial sensor in which a piezoelectric element is arranged between a central conductor and an outer conductor of a coaxial cable is known.
  • the piezoelectric coaxial sensor detects the force by detecting the voltage of the piezoelectric element generated when a force is applied from the outer peripheral surface of the sensor via the center conductor and the outer conductor. Utilizing this property, the deformation of the object to be measured provided with the piezoelectric coaxial sensor, the force applied to the object to be measured, the vibration, and the like are detected.
  • a polymer piezoelectric material is generally used as the piezoelectric element of such a piezoelectric coaxial sensor.
  • Patent Document 1 describes such a piezoelectric coaxial sensor.
  • This piezoelectric coaxial sensor is composed of a central conductor, a polymer piezoelectric layer that covers the outer peripheral surface of the central conductor, an outer conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer, and a jacket layer that covers the outer peripheral surface of the outer conductor. It is composed of a certain insulating layer. This jacket layer is formed by extrusion molding.
  • the piezoelectric coaxial sensor may be arranged in a narrow gap in the object to be measured, and there is a request to reduce the thickness of the piezoelectric coaxial sensor which is the outer diameter in a predetermined radial direction of the piezoelectric coaxial sensor.
  • the jacket layer By forming the jacket layer with the resin film in this way, the outer diameter of the piezoelectric coaxial sensor can be reduced and the thickness of the piezoelectric coaxial sensor can be reduced as compared with the case where the jacket layer is formed by extrusion molding.
  • the adhesive that adheres the resin film tends to have low resistance to chemicals such as organic solvents, and the resin film may peel off.
  • an object of the present invention is to provide a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness.
  • the piezoelectric coaxial sensor of the present invention includes a linear center conductor, a polymer piezoelectric layer covering the outer peripheral surface of the central conductor, and an outer conductor surrounding the outer peripheral surface of the polymer piezoelectric layer.
  • a sensor body including a sensor unit having a tape-like film, and at least one jacket layer having a tape-like film wound around the outer peripheral surface of the sensor unit and adhered to a member in contact with the adhesive layer by an adhesive layer.
  • a pair of exterior sheets and at least one of the pair of exterior sheets have an adhesive layer on one main surface side, and the pair of exterior sheets have the sensor main body with the one main surface side facing each other. It is characterized in that at least a part of the sensor body is sandwiched and bonded by the adhesive layer of the exterior sheet to surround the outer peripheral surface of at least a part of the sensor body.
  • the outer diameter of the sensor body can be made smaller than when the jacket layer is formed by extrusion molding.
  • the thickness of the piezoelectric coaxial sensor in the thickness direction of the pair of exterior sheets is approximately the sum of the thickness of the pair of exterior sheets and the outer diameter of the sensor body.
  • the sheet can be thinner than the members typically formed by extrusion. Therefore, according to such a piezoelectric coaxial sensor, the thickness of the piezoelectric coaxial sensor in the thickness direction of at least a pair of exterior sheets can be made smaller than the outer diameter of the sensor body in which the jacket layer is formed by extrusion molding.
  • the outer peripheral surface of at least a part of the sensor body is surrounded by a pair of exterior sheets. Therefore, according to such a piezoelectric coaxial sensor, an organic solvent or the like is applied to the adhesive layer for adhering the film in the jacket layer of the sensor body, as compared with the case where the outer peripheral surface of at least a part of the sensor body is not surrounded by the member. Contact with chemicals can be suppressed, and peeling of the film in the jacket layer can be suppressed. Therefore, the piezoelectric coaxial sensor of the present invention can improve chemical resistance while reducing the thickness.
  • the pair of exterior sheets extends to the side opposite to the other end side of the sensor body with respect to one end of the sensor body, and viewed along the direction in which the pair of exterior sheets are bonded together.
  • the pair of exterior sheets at least a part of a pair of regions sandwiching the sensor body in a direction perpendicular to the longitudinal direction of the sensor body and the other end of the sensor body with reference to the one end of the sensor body. At least a part of the area on the opposite side may be continuously bonded to each other.
  • the flexibility of one of the exterior sheets may be lower than the flexibility of the other exterior sheet.
  • one exterior sheet can be easily flattened and one exterior sheet can be easily attached to the object to be measured, as compared with the case where the flexibility of the pair of exterior sheets is substantially the same.
  • each of the pair of exterior sheets may have the adhesive layer on the main surface side of the one.
  • the adhesive layers of the pair of exterior sheets can be brought into contact with the outer peripheral surface of the sensor body. Therefore, according to such a piezoelectric coaxial sensor, a portion of the sensor body surrounded by the pair of exterior sheets moves with respect to the pair of exterior sheets, as compared with the case where only one exterior sheet has an adhesive layer. Can be suppressed. Therefore, in such a piezoelectric coaxial sensor, for example, when the exterior sheet is attached to the object to be measured, deformation of the object to be measured, force applied to the object to be measured, vibration, etc. are appropriately transmitted from the exterior sheet to the sensor body. However, these forces, vibrations, etc. can be detected appropriately.
  • At least one of the pair of exterior sheets may have a conductor layer.
  • the conductor layer acts as a shield layer, and the influence of an external electromagnetic field or the like reaches the central conductor or the outer conductor as compared with the case where the pair of exterior sheets do not have the conductor layer. Can be suppressed. Therefore, such a piezoelectric coaxial sensor can suppress the superposition of noise on the central conductor and the outer conductor due to an external electromagnetic field or the like, and can further reduce the deformation of the object to be measured, the force applied to the object to be measured, the vibration, and the like. Can be detected properly.
  • one of the exterior sheets has a base material layer having the adhesive layer provided on one surface, an adhesive layer provided on the other surface of the base material layer, and the base material layer side of the adhesive layer. It may have a release sheet that covers the surface opposite to the surface.
  • the adhesive layer of the exterior sheet may be made of a silicone-based adhesive.
  • a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness.
  • FIG. 3 is a cross-sectional view taken along the line III-III of FIG.
  • FIG. 3 is an enlarged view showing a portion including a sensor main body in FIG.
  • FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG.
  • FIG. 6 shows the piezoelectric coaxial sensor which concerns on the modification of this invention from the same viewpoint as FIG.
  • FIG. 1 is a diagram schematically showing a piezoelectric coaxial sensor according to the present embodiment
  • FIG. 2 is a diagram showing a structure of the piezoelectric coaxial sensor shown in FIG.
  • the piezoelectric coaxial sensor 1 of the present embodiment includes a linear sensor main body 10 and a pair of flexible exterior sheets 20 and 30.
  • FIG. 1 also shows a connector 50 to which the piezoelectric coaxial sensor 1 is connected and a cable 60 connected to the connector 50.
  • the pair of exterior sheets 20 and 30 are bonded together
  • FIG. 1 is a view showing the piezoelectric coaxial sensor 1 along the direction in which the pair of exterior sheets 20 and 30 are bonded together. ..
  • the sensor main body 10 of the present embodiment includes a central conductor 11, a polymer piezoelectric layer 12, a first outer conductor 13, a first jacket layer 14, and a second outer conductor 15.
  • a second jacket layer 16 is provided.
  • the central conductor 11 is a linear conductor composed of stranded wires of a plurality of conductive wires.
  • the central conductor 11 is not particularly limited as long as it is a conductor, and examples thereof include a conductor made of copper, aluminum, a tin-plated annealed copper alloy, or the like. Note that FIG. 2 shows an example in which the central conductor 11 is composed of stranded wires of a plurality of conductive wires as described above, but the central conductor 11 is a linear conductor composed of a single conductive wire. Is also good.
  • the polymer piezoelectric layer 12 is a layer that covers the outer peripheral surface of the central conductor 11. In the present embodiment, the polymer piezoelectric layer 12 is in contact with the outer peripheral surface of the central conductor 11.
  • the polymer piezoelectric layer 12 is made of a polymer exhibiting piezoelectricity, and examples of such a polymer include polyvinylidene fluoride (PVDF), polylactic acid, polyurea, and the like.
  • PVDF polyvinylidene fluoride
  • the outer shape of the cross section of the polymer piezoelectric layer 12 is formed into a substantially circular shape by extrusion molding or the like.
  • the polymer piezoelectric layer 12 may be formed by winding a tape-shaped film made of the polymer piezoelectric material around the center conductor 11. In this case, the film may be wound in a spiral winding or in a vertical winding.
  • the first outer conductor 13 is a conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer 12. In the present embodiment, the first outer conductor 13 is in contact with the outer peripheral surface of the polymer piezoelectric layer 12.
  • the first outer conductor 13 has a configuration in which a plurality of conducting wires are spirally wound in the same direction.
  • Such a first outer conductor 13 is not particularly limited as long as it is made of a conductor, but is made of, for example, a conductor similar to that of the central conductor 11.
  • FIG. 2 shows an example in which a plurality of conductors are spirally wound as the first outer conductor 13, the first outer conductor 13 may be a net wire in which a plurality of conductors are woven.
  • the sensor unit S is composed of the central conductor 11 having the above configuration, the polymer piezoelectric layer 12, and the first outer conductor 13. As described above, the polymer piezoelectric layer 12 is in contact with the outer peripheral surface of the central conductor 11, and the first outer conductor 13 is in contact with the outer peripheral surface of the polymer piezoelectric layer 12. Therefore, in the sensor unit S, when the external force applied to the piezoelectric coaxial sensor 1 is transmitted to the piezoelectric body layer 12 and a voltage due to the induced charge is generated in the polymer piezoelectric layer 12, the center conductor 11 and the first one. A voltage is generated between the outer conductor 13 and the outer conductor 13 based on this voltage generated in the polymer piezoelectric layer 12. Therefore, by attracting the voltage between the central conductor 11 and the first outer conductor 13 to the outside of the piezoelectric coaxial sensor 1 and measuring the voltage, it is possible to measure the force applied to the piezoelectric coaxial sensor 1.
  • FIG. 3 is a cross-sectional view taken along the line III-III of FIG. 1, and FIG. 4 is an enlarged view of a portion including the sensor main body 10 in FIG.
  • the first jacket layer 14 is a layer that covers the outer peripheral surface of the first outer conductor 13. Therefore, the first jacket layer 14 covers the outer peripheral surface of the sensor portion S.
  • the first jacket layer 14 is composed of an inner first jacket layer 14a and an outer first jacket layer 14b.
  • the inner first jacket layer 14a is made of a tape-shaped film 14at made of resin, and the film 14at is spirally wound on the outer peripheral surface of the first outer conductor 13. No adhesive layer is provided on any surface of the film 14at, and the inner first jacket layer 14a is non-adhesive to the first outer conductor 13.
  • the material of the film 14at is not particularly limited, and examples thereof include insulating resins such as polyethylene terephthalate, polyethylene naphthalate, polyimide, polyvinyl chloride, polypropylene, polyether ether ketone, polyetherimide, and polyphenylene sulfide. can.
  • An adhesive layer may be provided on one surface of the film 14at, but the inner first jacket layer 14a and the first outer conductor 13 can be easily peeled off when the first outer conductor 13 is squeezed out. From this point of view, it is preferable that no adhesive layer is provided on any surface of the film 14at as described above.
  • the outer first jacket layer 14b is the outermost jacket layer of the first jacket layer 14, and is provided on one surface of the tape-shaped film 14bt made of resin and the film 14bt. It consists of a layer 14ba.
  • the adhesive layer 14ba faces the inner first jacket layer 14a side and is spirally wound on the outer peripheral surface of the inner first jacket layer 14a. Therefore, the adhesive layer 14ba is in contact with the inner first jacket layer 14a, and the film 14bt is adhered to the inner first jacket layer 14a by the adhesive layer 14ba.
  • the film 14bt of the outer first jacket layer 14b is wound in the same direction as the film 14at of the inner first jacket layer 14a, but the film 14bt of the outer first jacket layer 14b and the inner th.
  • the film 14at of the jacket layer 14a may be wound in the opposite direction. Further, at least one of the film 14at and the film 14bt may be wound in a vertical winding.
  • the material of the film 14bt is not particularly limited, and examples thereof include the same material as the film 14at.
  • the adhesive used for the adhesive layer 14ba is not particularly limited, and examples thereof include an acrylic adhesive, a polyester adhesive, a polyamide adhesive, and an ethylene vinyl acetate copolymer (EVA) adhesive.
  • EVA ethylene vinyl acetate copolymer
  • the first jacket layer 14 may be composed of the other of the inner first jacket layer 14a and the outer first jacket layer 14b.
  • the first jacket layer 14 is non-adhesive as described above. It is preferably composed of an inner first jacket layer 14a and an outer first jacket layer 14b having an adhesive layer 14ba.
  • the second outer conductor 15 is a conductor that surrounds the outer peripheral surface of the first jacket layer 14.
  • the second outer conductor 15 has a configuration in which a plurality of conducting wires are spirally wound in the same direction.
  • Such a second outer conductor 15 is not particularly limited as long as it is made of a conductor, but is made of, for example, the same conductor as the first outer conductor 13.
  • FIG. 2 shows an example in which a plurality of conductors are spirally wound as the second outer conductor 15, the second outer conductor 15 may be a net wire in which a plurality of conductors are woven.
  • the second jacket layer 16 is a layer that covers the outer peripheral surface of the second outer conductor 15. As shown in FIG. 4, in the present embodiment, the second jacket layer 16 has an inner second jacket layer 16a and an outer second jacket layer 16b.
  • the inner second jacket layer 16a is made of a tape-shaped film 16at made of resin, and the film 16at is spirally wound on the outer peripheral surface of the second outer conductor 15. No adhesive layer is provided on any surface of the film 16at, and the inner second jacket layer 16a is non-adhesive to the second outer conductor 15.
  • the material of the film 16at is not particularly limited, and examples thereof include the same material as the film 14at.
  • An adhesive layer may be provided on one surface of the film 16at, but the inner second jacket layer 16a and the second outer conductor 15 can be easily peeled off when the second outer conductor 15 is squeezed out. From this point of view, it is preferable that no adhesive layer is provided on any surface of the film 16at as described above.
  • the outer second jacket layer 16b is the outermost jacket layer of the second jacket layer 16 and is located on the outermost outermost side of the sensor body 10.
  • the outer second jacket layer 16b is composed of a tape-shaped film 16bt made of resin and an adhesive layer 16ba provided on one surface of the film 16bt.
  • the adhesive layer 16ba faces the inner second jacket layer 16a side and is spirally wound on the outer peripheral surface of the inner second jacket layer 16a. Therefore, the adhesive layer 16ba is in contact with the inner second jacket layer 16a, and the film 16bt is adhered to the inner second jacket layer 16a by the adhesive layer 16ba.
  • the film 16bt of the outer second jacket layer 16b is wound in the same direction as the film 16at of the inner second jacket layer 16a, but the film 16bt of the outer second jacket layer 16b and the inner second jacket layer 16b. 2
  • the film 16at of the jacket layer 16a may be wound in the opposite direction. Further, at least one of the film 16at and the film 16bt may be wound in a vertical winding.
  • the material of the film 16bt is not particularly limited, and examples thereof include the same material as the film 16at.
  • the adhesive used for the adhesive layer 16ba is not particularly limited, and examples thereof include an adhesive similar to the adhesive used for the adhesive layer 14ba.
  • the inner second jacket layer 16a may be omitted, and the second jacket layer 16 may be composed of the outer second jacket layer 16b.
  • the second jacket layer 16 is non-adhesive as described above. It is preferably composed of an inner second jacket layer 16a and an outer second jacket layer 16b having an adhesive layer 16ba.
  • the main body 10 includes an outer second jacket layer 16b.
  • the outer second jacket layer 16b has a tape-shaped film 16bt that is wound so as to surround the outer peripheral surface of the sensor portion S and is adhered to a member in contact with the adhesive layer 16ba by the adhesive layer 16ba. Therefore, it can be understood that the sensor main body 10 includes at least one jacket layer having a tape-shaped film that is wound around the outer peripheral surface of the sensor portion S and adhered to the member in contact with the adhesive layer by the adhesive layer. ..
  • One of the exterior sheets 20 of the present embodiment has flexibility, and as shown in FIGS. 3 and 4, is composed of a base material layer 21, an adhesive layer 22, an adhesive layer 23, and a release sheet 24. ..
  • the base material layer 21 is a flexible sheet-like member.
  • the base material layer 21 is not particularly limited, and examples thereof include a film made of a resin, and the film may have a multi-layer structure or a single-layer structure.
  • the material of the film is not particularly limited, and examples thereof include the same material as the film 14at of the sensor body 10.
  • the adhesive layer 22 is provided on one surface of the base material layer 21.
  • Examples of the material constituting the adhesive layer 22 include an adhesive and an adhesive.
  • the pressure-sensitive adhesive and the adhesive are not particularly limited, but are preferably resistant to chemicals such as organic solvents.
  • acrylic-based, silicone-based, urethane-based and other adhesives and adhesives can be mentioned, and it is particularly preferable that the adhesive is composed of a silicone-based adhesive.
  • the adhesive layer 23 is provided on the other surface of the base material layer 21.
  • the pressure-sensitive adhesive used for the pressure-sensitive adhesive layer 23 is not particularly limited, and examples thereof include pressure-sensitive adhesives similar to the pressure-sensitive adhesives exemplified in the pressure-sensitive adhesive layer 22.
  • the release sheet 24 is a flexible sheet-like member that covers the surface of the adhesive layer 23 opposite to the base material layer 21 side.
  • the release sheet 24 has a release base layer 24a and a release agent layer 24b provided on the surface of the release base layer 24a on the adhesive layer 23 side.
  • the release base material layer 24a include a film made of resin, a laminate in which both sides or one side of paper is coated with resin.
  • the material of the resin constituting the film or the resin covering the paper is not particularly limited, and examples thereof include the same materials as the above-mentioned film 14at.
  • the release agent layer 24b is a layer containing a release agent.
  • the release agent contained in the release agent layer 24b is not particularly limited, and examples thereof include a fluorine-based release agent and a silicone-based release agent.
  • the release sheet 24 may be composed of only the release agent layer 24b.
  • the other exterior sheet 30 of the present embodiment has flexibility and is composed of a base material layer 31 and an adhesive layer 32 as shown in FIGS. 3 and 4.
  • the thickness of the exterior sheet 30 is thinner than that of the exterior sheet 20, and the flexibility of the exterior sheet 30 is higher than that of the exterior sheet 20.
  • the thickness of the exterior sheet 30 is not particularly limited, and may be the same as the exterior sheet 20 or thicker than the exterior sheet 20.
  • the flexibility of the exterior sheet 30 is not particularly limited and may be the same as that of the exterior sheet 20 or lower than that of the exterior sheet 20.
  • the base material layer 31 is a flexible sheet-like member.
  • the base material layer 31 is not particularly limited, and examples thereof include a film made of a resin, and this film may have a multi-layer structure or a single-layer structure.
  • the material of the film is not particularly limited, and examples thereof include the same material as the film 14at of the sensor body 10.
  • the adhesive layer 32 is provided on one surface of the base material layer 31.
  • Examples of the material constituting the adhesive layer 32 include an adhesive and an adhesive.
  • the pressure-sensitive adhesive and the adhesive are not particularly limited, but are preferably resistant to chemicals such as organic solvents.
  • acrylic-based, silicone-based, urethane-based and other adhesives and adhesives can be mentioned, and it is particularly preferable that the adhesive is composed of a silicone-based adhesive.
  • each of the pair of exterior sheets 20 and 30 having such a configuration is formed in a band shape having a width larger than the outer diameter of the sensor main body 10 and extending along the longitudinal direction of the sensor main body 10.
  • the pair of exterior sheets 20 and 30 have a main surface 20S side on the adhesive layer 22 side of the exterior sheet 20 and a main surface 30S side on the adhesive layer 32 side of the exterior sheet 30.
  • the sensor main body 10 is sandwiched between them facing each other, and they are bonded by adhesive layers 22 and 32. At this time, a part of the outer peripheral surface of the sensor body 10 is in contact with the adhesive layer 22, and the other part of the outer peripheral surface of the sensor body 10 is in contact with the adhesive layer 32.
  • the exterior sheet 20 having the adhesive layer 23 and the release sheet 24 having low flexibility is substantially flattened, and the highly flexible exterior sheet 30 is one of the exterior sheets 30.
  • the portion is curved so as to be along a part of the outer peripheral surface of the sensor body 10.
  • the pair of exterior sheets 20 and 30 surround the outer peripheral surface of the outer second jacket layer 16b, which is the outer peripheral surface of the sensor body 10.
  • a gap between the pair of exterior sheets 20 and 30 and the sensor body 10 is surrounded by one main surface 20S of the exterior sheet 20, one main surface 30S of the exterior sheet 30, and the outer peripheral surface of the sensor body 10. GP is formed.
  • the sensor main body 10 has one end 10E and the other end accommodated in the internal space of the connector 50, and the pair of exterior sheets 20 and 30 have one end similarly to the sensor main body 10. It has 20E, 30E and the other end housed in the internal space of the connector 50.
  • the other end of the sensor body 10 is electrically connected to the cable 60 via a circuit (not shown) accommodated in the internal space of the connector 50.
  • the cable 60 is not particularly limited, and examples thereof include a coaxial cable including a central conductor connected to the central conductor 11 of the sensor body 10 and an outer conductor connected to the first outer conductor 13 of the sensor body 10. ..
  • FIG. 5 is an enlarged view showing a portion including one end 10E of the sensor main body 10 in FIG. 1.
  • FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG. Note that in FIG. 6, the description of the internal structure of the sensor body 10 is omitted.
  • the pair of exterior sheets 20 and 30 extend to the side opposite to the other end side connected to the connector 50 of the sensor body 10 with reference to one end 10E of the sensor body 10. There is.
  • the pair of exterior sheets 20 and 30 extend beyond one end 10E of the sensor body 10 in the longitudinal direction of the sensor body 10, and the pair of exterior sheets 20 and 30 have one end 20E and 30E extending from one end 10E.
  • the pair of exterior sheets 20 and 30 have regions 20a and 30a on the opposite side of the sensor main body 10 with respect to one end 10E. Further, the outer edges of the pair of exterior sheets 20 and 30 are substantially the same at least in the portion of the pair of exterior sheets 20 and 30 that is not housed in the connector 50. Further, in this portion, the sticking portion 40 to which the pair of exterior sheets 20 and 30 are bonded extends along the entire outer edge of the pair of exterior sheets 20 and 30. Then, when the pair of exterior sheets 20 and 30 are viewed along the direction in which they are attached, the attached portion 40 surrounds the sensor main body 10.
  • the pair of regions 20b, 30b, 20c, 30c sandwiching the sensor body 10 in the direction perpendicular to the longitudinal direction of the sensor body 10 A part and a part of the regions 20a and 30a on the opposite side of the other end side of the sensor body 10 from one end 10E of the sensor body 10 are continuously bonded.
  • the edge 40E on the sensor main body 10 side of the sticking portion 40 is indicated by a two-dot chain line.
  • the pasting portion 40 is hatched, and the boundary between the areas 20a and 30a and the areas 20b and 30b and the boundary between the areas 20a and 30a and the areas 20c and 30c are shown by broken lines. ..
  • the outer peripheral surface of the sensor body 10 and the sensor are located in the portion of the piezoelectric coaxial sensor 1 that is not accommodated in the internal space of the connector 50.
  • One end 10E of the main body 10 is surrounded by a pair of exterior sheets 20 and 30, and the portion is sealed. Therefore, the gap GP formed between the pair of exterior sheets 20 and 30 and the sensor main body 10 does not communicate with the outside from one end of the piezoelectric coaxial sensor 1.
  • the release sheet 24 of the exterior sheet 20 is peeled from the adhesive layer 23, and the adhesive layer 23 exposed to the outside is attached to the object to be measured, whereby the piezoelectric coaxial sensor 1 Is attached to the object to be measured.
  • the piezoelectric coaxial sensor 1 of the present embodiment covers the linear center conductor 11, the polymer piezoelectric layer 12 that covers the outer peripheral surface of the central conductor 11, and the outer peripheral surface of the polymer piezoelectric layer 12.
  • At least one jacket layer having a sensor portion S having a first outer conductor 13 that surrounds the sensor portion S, and a tape-shaped film that is wound so as to surround the outer peripheral surface of the sensor portion S and adhered to a member in contact with the adhesive layer by an adhesive layer.
  • a sensor main body 10 including the above and a pair of exterior sheets 20 and 30 are provided. Each of the pair of exterior sheets 20 and 30 has adhesive layers 22 and 32 on one of the main surfaces 20S and 30S.
  • the pair of exterior sheets 20 and 30 have one main surface 20S and 30S facing each other and sandwich at least a part of the sensor body 10, and are bonded by the adhesive layers 22 and 32 of the exterior sheets 20 and 30 to form the sensor body. It surrounds the outer peripheral surface of at least a part of 10.
  • the outer diameter of the sensor body 10 can be made smaller than that in the case where the jacket layer is formed by extrusion molding.
  • the thickness of the piezoelectric coaxial sensor 1 in the thickness direction of the pair of exterior sheets 20 and 30 is approximately the sum of the thickness of the pair of exterior sheets 20 and 30 and the outer diameter of the sensor body 10.
  • the sheet can be thinner than the members typically formed by extrusion. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the thickness of the piezoelectric coaxial sensor 1 in the thickness direction of at least a pair of exterior sheets 20 and 30 is set to the outside of the sensor body in which the jacket layer is formed by extrusion molding. Can be smaller than the diameter.
  • the outer peripheral surface of at least a part of the sensor main body 10 is surrounded by the pair of exterior sheets 20 and 30. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the adhesive layer for adhering the film in the jacket layer of the sensor body 10 is compared with the case where the outer peripheral surface of at least a part of the sensor body 10 is not surrounded by the member. It is possible to suppress contact with chemicals such as organic solvents.
  • the first jacket layer 14 is composed of the inner first jacket layer 14a and the outer first jacket layer 14b
  • the second jacket layer 16 is the inner second jacket layer 16a and the outer second jacket layer 16.
  • the piezoelectric coaxial sensor 1 of the present embodiment can improve chemical resistance while reducing the thickness.
  • the pair of exterior sheets 20 and 30 are opposite to the other end side of the sensor body 10 with respect to one end 10E of the sensor body 10. It extends to the side. Further, when viewed along the direction in which the pair of exterior sheets 20 and 30 are bonded together, a pair of the pair of exterior sheets 20 and 30 sandwiching the sensor body 10 in a direction perpendicular to the longitudinal direction of the sensor body 10. A part of the regions 20b, 30b, 20c, 30c and a part of the regions 20a, 30a on the opposite side of the other end side of the sensor body 10 with reference to one end 10E of the sensor body 10 are continuously bonded. ..
  • the flexibility of the exterior sheet 20 is lower than the flexibility of the exterior sheet 30. Therefore, as compared with the case where the flexibility of the pair of exterior sheets 20 and 30 is substantially the same, the exterior sheet 20 can be easily flattened and the exterior sheet 30 can be easily attached to the object to be measured.
  • each of the pair of exterior sheets 20 and 30 has adhesive layers 22 and 32 on one of the main surfaces 20S and 30S. Therefore, the adhesive layers 22 and 32 of the pair of exterior sheets 20 and 30 can be brought into contact with the outer peripheral surface of the sensor body 10. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the portion of the sensor body 10 surrounded by the pair of exterior sheets 20 and 30 is the pair, as compared with the case where only one exterior sheet has an adhesive layer. It is possible to suppress the movement of the exterior sheets 20 and 30 of the above.
  • the piezoelectric coaxial sensor 1 of the present embodiment for example, when the exterior sheet 20 is attached to the object to be measured, deformation of the object to be measured, force applied to the object to be measured, vibration, and the like are transmitted from the exterior sheet 20 to the sensor body. It can be appropriately transmitted to No. 10, and these forces, vibrations, and the like can be appropriately detected.
  • the exterior sheet 20 includes a base material layer 21 having an adhesive layer 22 provided on one surface and an adhesive layer 23 provided on the other surface of the base material layer 21. It has a release sheet 24 that covers the surface of the adhesive layer 23 opposite to the base material layer 21 side. Therefore, the exterior sheet 20 can be easily attached to the object to be measured as compared with the case where the exterior sheet 20 does not have the adhesive layer 23 and the release sheet 24.
  • the exterior sheet 20 composed of the base material layer 21, the adhesive layer 22, the adhesive layer 23, and the release sheet 24, and the exterior sheet 30 composed of the base material layer 31 and the adhesive layer 32 have been described as an example. ..
  • the pair of exterior sheets 20 and 30 has an adhesive layer on one main surface side, and the pair of exterior sheets 20 and 30 can be bonded to each other by this adhesive layer.
  • the exterior sheet 20 does not have to have the adhesive layer 23 and the release sheet 24.
  • the exterior sheet 20 preferably has an adhesive layer 23 and a release sheet 24.
  • the adhesive layer 23 and the release sheet 24 may not be provided on the entire outer sheet 20 in the in-plane direction.
  • the adhesive layer 23 and the release sheet 24 may be provided at least on the end side opposite to the end housed in the connector 50.
  • one of the pair of exterior sheets 20 and 30 may have almost no flexibility.
  • the pair of exterior sheets 20 and 30 can be bonded together as in the above embodiment. Can be done.
  • one of the pair of exterior sheets 20 and 30 does not have to have an adhesive layer.
  • the pair of exterior sheets 20 and 30 can be bonded together by the adhesive layer 32 of the exterior sheet 30.
  • the pair of exterior sheets 20 may have the conductor layer 25, and the exterior sheet 30 may have the conductor layer 35.
  • FIG. 7 is a diagram showing the piezoelectric coaxial sensor 1 according to the modified example of the present invention from the same viewpoint as in FIG.
  • the exterior sheet 20 has a conductor layer 25 between the base material layer 21 and the adhesive layer 22.
  • the conductor layer 25 is not particularly limited as long as it is a conductor, and examples thereof include a metal foil and a metal vapor-deposited film deposited on the surface of the base material layer 21 on the adhesive layer 22 side. Examples of such a metal include copper, aluminum and the like.
  • the exterior sheet 30 has a conductor layer 35 between the base material layer 31 and the adhesive layer 32.
  • the conductor layer 35 is not particularly limited as long as it is a conductor, and examples thereof include the same conductor layer 25 as the conductor layer 25.
  • the conductor layers 25 and 35 act as a shield layer, and the external surface is compared with the case where the conductor layers 25 and 35 are not provided. It is possible to suppress the influence of the electromagnetic field and the like from reaching the central conductor 11 and the first outer conductor 13 of the sensor body 10.
  • the piezoelectric coaxial sensor 1 of this modified example can suppress noise from being superimposed on the central conductor 11 and the first external conductor 13 due to an external electromagnetic field or the like, and is added to the deformation of the object to be measured and the object to be measured. Force, vibration, etc. can be detected more appropriately.
  • the base material layers 21 and 31 may be the conductor layers 25 and 35, and in this case, for example, the base material layers 21 and 31 are metal foils. Further, from the viewpoint of suppressing the influence of an external electromagnetic field or the like from reaching the central conductor 11 or the first outer conductor 13 of the sensor body 10, one of the pair of exterior sheets 20 and 30 has a conductor layer. It suffices that one of the exterior sheets 20 and 30 does not have a conductor layer.
  • a pair of exterior sheets 20 and 30 that surround the entire portion of the sensor body 10 that is not housed in the internal space of the connector 50 will be described as an example.
  • the pair of exterior sheets 20 and 30 may surround at least a part of the sensor main body 10.
  • the pair of exterior sheets 20 and 30 do not have to surround the portion of the sensor body 10 on the connector 50 side.
  • the pair of exterior sheets 20 and 30 do not have to extend from one end 10E of the sensor body 10 to the side opposite to the other end side of the sensor body 10 in the longitudinal direction of the sensor body 10.
  • the portion including one end 10E of the sensor main body 10 is not surrounded by the pair of exterior sheets 20 and 30, it is preferable that the portion is surrounded by, for example, resin or the like.
  • the sensor main body 10 including the central conductor 11, the polymer piezoelectric layer 12, the first outer conductor 13, the first jacket layer 14, the second outer conductor 15, and the second jacket layer 16 is taken as an example.
  • the sensor body 10 has a linear center conductor, a polymer piezoelectric layer that covers the outer peripheral surface of the central conductor, and a sensor portion that has an outer conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer, and an outer circumference of the sensor portion. It may include at least one jacket layer having a tape-like film that is wound around a surface and adhered to a member in contact with the adhesive layer by an adhesive layer.
  • the sensor body 10 does not have to have the first jacket layer 14 and the second outer conductor 15, and in this case, the outer peripheral surface of the sensor portion S is covered with the second jacket layer 16.
  • a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness is provided, and is expected to be used in fields such as measurement of equipment.

Abstract

A piezoelectric coaxial sensor (1) comprises: a sensor body (10) including a sensor unit (S) having a linear central conductor (11), a polymer piezoelectric layer (12) that covers the outer peripheral surface of the central conductor (11), and a first outer conductor (13) surrounding the outer peripheral surface of the polymer piezoelectric layer (12), and at least one jacket layer having a tape-shaped film that is wound so as to surround the outer peripheral surface of the sensor unit (S) and is adhesively bonded by an adhesive layer to a member in contact with the adhesive layer; and a pair of exterior sheets (20, 30), wherein at least one of the pair of exterior sheets (20, 30) has an adhesive layer (22, 32) on one main surface (20S, 30S) side, and in the pair of exterior sheets (20, 30), the main surface (20S, 30S) sides face each other, sandwich at least a part of the sensor body (10), are bonded thereto by the adhesive layers (22, 32), and surround the outer peripheral surface of at least a part of the sensor body (10).

Description

圧電同軸センサPiezoelectric coaxial sensor
　本発明は、圧電同軸センサに関する。 The present invention relates to a piezoelectric coaxial sensor.
　同軸ケーブルの中心導体と外部導体との間に圧電素子が配置された圧電同軸センサが知られている。圧電同軸センサは、当該センサの外周面から力が加わる場合に生じる圧電素子の電圧を中心導体と外部導体とを介して検知することで、当該力を検出する。この性質を利用して、圧電同軸センサが設けられる被測定物の変形や被測定物に加わる力、振動等を検出する。このような圧電同軸センサの圧電素子には、一般的に高分子圧電体が用いられる。 A piezoelectric coaxial sensor in which a piezoelectric element is arranged between a central conductor and an outer conductor of a coaxial cable is known. The piezoelectric coaxial sensor detects the force by detecting the voltage of the piezoelectric element generated when a force is applied from the outer peripheral surface of the sensor via the center conductor and the outer conductor. Utilizing this property, the deformation of the object to be measured provided with the piezoelectric coaxial sensor, the force applied to the object to be measured, the vibration, and the like are detected. A polymer piezoelectric material is generally used as the piezoelectric element of such a piezoelectric coaxial sensor.
　下記特許文献１には、このような圧電同軸センサが記載されている。この圧電同軸センサは、中心導体と、中心導体の外周面を被覆する高分子圧電体層と、高分子圧電体層の外周面を囲う外部導体と、外部導体の外周面を被覆するジャケット層である絶縁層と、から構成される。このジャケット層は、押出成形で形成される。 Patent Document 1 below describes such a piezoelectric coaxial sensor. This piezoelectric coaxial sensor is composed of a central conductor, a polymer piezoelectric layer that covers the outer peripheral surface of the central conductor, an outer conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer, and a jacket layer that covers the outer peripheral surface of the outer conductor. It is composed of a certain insulating layer. This jacket layer is formed by extrusion molding.
特開２０１７－１８３５７０号公報Japanese Unexamined Patent Publication No. 2017-183570
　上記特許文献１に記載の圧電同軸センサのようにジャケット層が押出成形で成形される場合、ジャケット層を薄くしにくく、圧電同軸センサの外径が大きくなる傾向にある。例えば、被測定物における狭い隙間内等に圧電同軸センサを配置させる場合があり、圧電同軸センサにおける所定の径方向の外径である圧電同軸センサの厚さを薄くしたいとの要請がある。この要請に対しては、例えば、樹脂フィルムを外部導体の外周面上に巻き付け接着により当該樹脂フィルムを固定することでジャケット層を形成することが考えられる。ジャケット層をこのように樹脂フィルムで形成することで、ジャケット層が押出成形によって形成される場合と比べて、圧電同軸センサの外径を小さくでき、圧電同軸センサの厚さを薄くできる。しかし、樹脂フィルムを接着させる接着剤は、有機溶剤等の薬品に対する耐性が低い傾向にあり、樹脂フィルムが剥がれる虞がある。 When the jacket layer is formed by extrusion molding like the piezoelectric coaxial sensor described in Patent Document 1, it is difficult to make the jacket layer thin, and the outer diameter of the piezoelectric coaxial sensor tends to be large. For example, the piezoelectric coaxial sensor may be arranged in a narrow gap in the object to be measured, and there is a request to reduce the thickness of the piezoelectric coaxial sensor which is the outer diameter in a predetermined radial direction of the piezoelectric coaxial sensor. In response to this request, for example, it is conceivable to form a jacket layer by winding a resin film on the outer peripheral surface of the outer conductor and fixing the resin film by adhesion. By forming the jacket layer with the resin film in this way, the outer diameter of the piezoelectric coaxial sensor can be reduced and the thickness of the piezoelectric coaxial sensor can be reduced as compared with the case where the jacket layer is formed by extrusion molding. However, the adhesive that adheres the resin film tends to have low resistance to chemicals such as organic solvents, and the resin film may peel off.
　そこで、本発明は、厚さを薄くしつつ耐薬品性を向上し得る圧電同軸センサを提供することを目的とする。 Therefore, an object of the present invention is to provide a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness.
　上記目的の達成のため、本発明の圧電同軸センサは、線状の中心導体、前記中心導体の外周面を被覆する高分子圧電体層、及び前記高分子圧電体層の外周面を囲う外部導体を有するセンサ部と、前記センサ部の外周面を囲うように巻かれて接着層により当該接着層の接する部材に接着されるテープ状のフィルムを有する少なくとも１つのジャケット層とを含むセンサ本体と、一対の外装シートと、を備え、前記一対の外装シートの少なくとも一方は、一方の主面側に接着層を有し、前記一対の外装シートは、前記一方の主面側が互いに向かい合って前記センサ本体の少なくとも一部を挟み込むとともに、当該外装シートの前記接着層によって貼り合わされ、前記センサ本体の少なくとも一部における外周面を囲うことを特徴とするものである。 In order to achieve the above object, the piezoelectric coaxial sensor of the present invention includes a linear center conductor, a polymer piezoelectric layer covering the outer peripheral surface of the central conductor, and an outer conductor surrounding the outer peripheral surface of the polymer piezoelectric layer. A sensor body including a sensor unit having a tape-like film, and at least one jacket layer having a tape-like film wound around the outer peripheral surface of the sensor unit and adhered to a member in contact with the adhesive layer by an adhesive layer. A pair of exterior sheets and at least one of the pair of exterior sheets have an adhesive layer on one main surface side, and the pair of exterior sheets have the sensor main body with the one main surface side facing each other. It is characterized in that at least a part of the sensor body is sandwiched and bonded by the adhesive layer of the exterior sheet to surround the outer peripheral surface of at least a part of the sensor body.
　このような圧電同軸センサでは、ジャケット層が押出成形によって形成される場合と比べて、センサ本体の外径を小さくし得る。また、一対の外装シートの厚さ方向における圧電同軸センサの厚さは、概ね一対の外装シートの厚さとセンサ本体の外径とを足し合わせた値である。シートは、一般的に押出成形によって形成される部材よりも薄くできる。このため、このような圧電同軸センサによれば、少なくとも一対の外装シートの厚さ方向における圧電同軸センサの厚さを、ジャケット層が押出成形によって形成されたセンサ本体の外径より小さくし得る。また、このような圧電同軸センサでは、上記のように、センサ本体の少なくとも一部における外周面は、一対の外装シートによって囲われる。このため、このような圧電同軸センサによれば、センサ本体の少なくとも一部における外周面が部材によって囲われない場合と比べて、センサ本体のジャケット層におけるフィルムを接着する接着層に有機溶剤等の薬品が接触することを抑制し得、ジャケット層におけるフィルムの剥がれを抑制し得る。したがって、本発明の圧電同軸センサは、厚さを薄くしつつ耐薬品性を向上し得る。 In such a piezoelectric coaxial sensor, the outer diameter of the sensor body can be made smaller than when the jacket layer is formed by extrusion molding. The thickness of the piezoelectric coaxial sensor in the thickness direction of the pair of exterior sheets is approximately the sum of the thickness of the pair of exterior sheets and the outer diameter of the sensor body. The sheet can be thinner than the members typically formed by extrusion. Therefore, according to such a piezoelectric coaxial sensor, the thickness of the piezoelectric coaxial sensor in the thickness direction of at least a pair of exterior sheets can be made smaller than the outer diameter of the sensor body in which the jacket layer is formed by extrusion molding. Further, in such a piezoelectric coaxial sensor, as described above, the outer peripheral surface of at least a part of the sensor body is surrounded by a pair of exterior sheets. Therefore, according to such a piezoelectric coaxial sensor, an organic solvent or the like is applied to the adhesive layer for adhering the film in the jacket layer of the sensor body, as compared with the case where the outer peripheral surface of at least a part of the sensor body is not surrounded by the member. Contact with chemicals can be suppressed, and peeling of the film in the jacket layer can be suppressed. Therefore, the piezoelectric coaxial sensor of the present invention can improve chemical resistance while reducing the thickness.
　また、前記一対の外装シートは、前記センサ本体の一端を基準とする前記センサ本体の他端側と反対側まで延在し、前記一対の外装シートが貼り合わされる方向に沿って見る場合に、前記一対の外装シートのうち、前記センサ本体の長手方向と垂直な方向に当該センサ本体を挟む一対の領域の少なくとも一部と、前記センサ本体の前記一端を基準とする前記センサ本体の前記他端側と反対側の領域の少なくとも一部とが連続して貼り合わされることとしてもよい。 Further, when the pair of exterior sheets extends to the side opposite to the other end side of the sensor body with respect to one end of the sensor body, and viewed along the direction in which the pair of exterior sheets are bonded together. Of the pair of exterior sheets, at least a part of a pair of regions sandwiching the sensor body in a direction perpendicular to the longitudinal direction of the sensor body and the other end of the sensor body with reference to the one end of the sensor body. At least a part of the area on the opposite side may be continuously bonded to each other.
　このような構成にすることで、センサ本体と一対の外装シートとの間に隙間が形成されていたとしても、この隙間が圧電同軸センサの一端から外部に連通することを抑制できる。このため、この隙間に薬品が入り込むことを抑制し得る。また、圧電同軸センサの一端にジャケット層におけるフィルムを接着する接着層が露出していたとしても、この接着層に薬品が接触することを抑制し得る。このため、このような圧電同軸センサによれば、ジャケット層におけるフィルムの剥がれをより抑制し得る。 With such a configuration, even if a gap is formed between the sensor body and the pair of exterior sheets, it is possible to prevent the gap from communicating with the outside from one end of the piezoelectric coaxial sensor. Therefore, it is possible to prevent chemicals from entering this gap. Further, even if the adhesive layer for adhering the film in the jacket layer is exposed at one end of the piezoelectric coaxial sensor, it is possible to prevent chemicals from coming into contact with the adhesive layer. Therefore, according to such a piezoelectric coaxial sensor, peeling of the film in the jacket layer can be further suppressed.
　また、一方の前記外装シートの可撓性は、他方の前記外装シートの可撓性より低いこととしてもよい。 Further, the flexibility of one of the exterior sheets may be lower than the flexibility of the other exterior sheet.
　このような構成にすることで、一対の外装シートの可撓性が概ね同じ場合と比べて、一方の外装シートを平らにし易く、一方の外装シートを被測定物に取り付け易くし得る。 With such a configuration, one exterior sheet can be easily flattened and one exterior sheet can be easily attached to the object to be measured, as compared with the case where the flexibility of the pair of exterior sheets is substantially the same.
　また、前記一対の外装シートのそれぞれは、前記一方の主面側に前記接着層を有することとしてもよい。 Further, each of the pair of exterior sheets may have the adhesive layer on the main surface side of the one.
　このような構成にすることで、一対の外装シートのそれぞれの接着層とセンサ本体の外周面とを接触させることができる。このため、このような圧電同軸センサによれば、一方の外装シートのみが接着層を有する場合と比べて、センサ本体における一対の外装シートによって囲われている部位が一対の外装シートに対して移動することを抑制し得る。このため、このような圧電同軸センサは、例えば、外装シートが被測定物に取り付けられることで、被測定物の変形や被測定物に加わる力、振動等を外装シートからセンサ本体に適切に伝達し得、これら力や振動等を適切に検出し得る。 With such a configuration, the adhesive layers of the pair of exterior sheets can be brought into contact with the outer peripheral surface of the sensor body. Therefore, according to such a piezoelectric coaxial sensor, a portion of the sensor body surrounded by the pair of exterior sheets moves with respect to the pair of exterior sheets, as compared with the case where only one exterior sheet has an adhesive layer. Can be suppressed. Therefore, in such a piezoelectric coaxial sensor, for example, when the exterior sheet is attached to the object to be measured, deformation of the object to be measured, force applied to the object to be measured, vibration, etc. are appropriately transmitted from the exterior sheet to the sensor body. However, these forces, vibrations, etc. can be detected appropriately.
　また、前記一対の外装シートの少なくとも一方は、導電体層を有することとしてもよい。 Further, at least one of the pair of exterior sheets may have a conductor layer.
　このような構成にすることで、導電体層がシールド層として作用し、一対の外装シートが導電体層を有さない場合と比べて、外部の電磁場等の影響が中心導体や外部導体に届くことを抑制することができる。このため、このような圧電同軸センサは、外部の電磁場等により、中心導体や外部導体にノイズが重畳することを抑制し得、被測定物の変形や被測定物に加わる力、振動等をより適切に検出し得る。 With such a configuration, the conductor layer acts as a shield layer, and the influence of an external electromagnetic field or the like reaches the central conductor or the outer conductor as compared with the case where the pair of exterior sheets do not have the conductor layer. Can be suppressed. Therefore, such a piezoelectric coaxial sensor can suppress the superposition of noise on the central conductor and the outer conductor due to an external electromagnetic field or the like, and can further reduce the deformation of the object to be measured, the force applied to the object to be measured, the vibration, and the like. Can be detected properly.
　また、一方の前記外装シートは、一方の面上に前記接着層が設けられる基材層と、前記基材層の他方の面上に設けられる粘着層と、前記粘着層の前記基材層側と反対側の面を被覆する剥離シートとを有することとしてもよい。 Further, one of the exterior sheets has a base material layer having the adhesive layer provided on one surface, an adhesive layer provided on the other surface of the base material layer, and the base material layer side of the adhesive layer. It may have a release sheet that covers the surface opposite to the surface.
　このような構成にすることで、一方の外装シートが粘着層と剥離シートとを有さない場合と比べて、一方の外装シートを被測定物に取り付け易くし得る。 With such a configuration, it is possible to make it easier to attach one of the exterior sheets to the object to be measured, as compared with the case where one of the exterior sheets does not have the adhesive layer and the release sheet.
　また、前記外装シートの前記接着層は、シリコーン系粘着剤から成ることとしてもよい。 Further, the adhesive layer of the exterior sheet may be made of a silicone-based adhesive.
　このような構成にすることで、有機溶剤等の薬品が外装シートの接着層に接触したとしても、一対の外装シートが剥がれることを抑制できる。 With such a configuration, even if a chemical such as an organic solvent comes into contact with the adhesive layer of the exterior sheet, it is possible to prevent the pair of exterior sheets from peeling off.
　以上のように、本発明によれば、厚さを薄くしつつ耐薬品性を向上し得る圧電同軸センサが提供される。 As described above, according to the present invention, there is provided a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness.
本発明の実施形態に係る圧電同軸センサを概略的に示す図である。It is a figure which shows schematicly the piezoelectric coaxial sensor which concerns on embodiment of this invention. 図１に示す圧電同軸センサの構造を示す図である。It is a figure which shows the structure of the piezoelectric coaxial sensor shown in FIG. 図１のIII－III線における断面図である。FIG. 3 is a cross-sectional view taken along the line III-III of FIG. 図３におけるセンサ本体を含む部位を拡大して示す図である。FIG. 3 is an enlarged view showing a portion including a sensor main body in FIG. 図１におけるセンサ本体の一端を含む部位を拡大して示す図である。It is a figure which enlarges and shows the part including one end of the sensor main body in FIG. 図６は、図５のVI－VI線における断面図である。FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG. 本発明の変形例に係る圧電同軸センサを図４と同様の視点で示す図である。It is a figure which shows the piezoelectric coaxial sensor which concerns on the modification of this invention from the same viewpoint as FIG.
　以下、本発明に係る圧電同軸センサを実施するための形態が添付図面とともに例示される。以下に例示する実施形態は、本発明の理解を容易にするためのものであり、本発明を限定して解釈するためのものではない。本発明は、その趣旨を逸脱することなく、以下の実施形態から変更、改良することができる。また、本明細書では、理解を容易にするために、各部材の寸法が誇張して示されている場合がある。 Hereinafter, a mode for carrying out the piezoelectric coaxial sensor according to the present invention will be illustrated together with the attached drawings. The embodiments illustrated below are for facilitating the understanding of the present invention, and are not for limiting the interpretation of the present invention. The present invention can be modified or improved from the following embodiments without departing from the spirit of the present invention. Further, in the present specification, the dimensions of each member may be exaggerated for ease of understanding.
　図１は、本実施形態に係る圧電同軸センサを概略的に示す図であり、図２は図１に示す圧電同軸センサの構造を示す図である。図１、図２に示すように、本実施形態の圧電同軸センサ１は、線状のセンサ本体１０と、可撓性を有する一対の外装シート２０，３０と、を備える。なお、図１には、圧電同軸センサ１が接続されるコネクタ５０、及びコネクタ５０に接続されるケーブル６０も記載されている。また、詳細については後述するが、一対の外装シート２０，３０は貼り合わされており、図１は、一対の外装シート２０，３０が貼り合わされる方向に沿って圧電同軸センサ１を見る図である。 FIG. 1 is a diagram schematically showing a piezoelectric coaxial sensor according to the present embodiment, and FIG. 2 is a diagram showing a structure of the piezoelectric coaxial sensor shown in FIG. As shown in FIGS. 1 and 2, the piezoelectric coaxial sensor 1 of the present embodiment includes a linear sensor main body 10 and a pair of flexible exterior sheets 20 and 30. Note that FIG. 1 also shows a connector 50 to which the piezoelectric coaxial sensor 1 is connected and a cable 60 connected to the connector 50. Further, as will be described in detail later, the pair of exterior sheets 20 and 30 are bonded together, and FIG. 1 is a view showing the piezoelectric coaxial sensor 1 along the direction in which the pair of exterior sheets 20 and 30 are bonded together. ..
　まず、センサ本体１０について説明する。 First, the sensor body 10 will be described.
　図２に示すように、本実施形態のセンサ本体１０は、中心導体１１と、高分子圧電体層１２と、第１外部導体１３と、第１ジャケット層１４と、第２外部導体１５と、第２ジャケット層１６と、を備える。 As shown in FIG. 2, the sensor main body 10 of the present embodiment includes a central conductor 11, a polymer piezoelectric layer 12, a first outer conductor 13, a first jacket layer 14, and a second outer conductor 15. A second jacket layer 16 is provided.
　中心導体１１は、複数の導電性線材の撚り線から成る線状の導体である。この中心導体１１としては、導体であれば特に制限されないが、例えば、銅、アルミニウム、錫めっき軟銅合金等から成る導体が挙げられる。なお、図２では、中心導体１１が上述のように複数の導電性線材の撚り線から成る例が示されているが、中心導体１１は、導電性の単線から成る線状の導体であっても良い。 The central conductor 11 is a linear conductor composed of stranded wires of a plurality of conductive wires. The central conductor 11 is not particularly limited as long as it is a conductor, and examples thereof include a conductor made of copper, aluminum, a tin-plated annealed copper alloy, or the like. Note that FIG. 2 shows an example in which the central conductor 11 is composed of stranded wires of a plurality of conductive wires as described above, but the central conductor 11 is a linear conductor composed of a single conductive wire. Is also good.
　高分子圧電体層１２は、中心導体１１の外周面を被覆する層である。本実施形態では、高分子圧電体層１２は、中心導体１１の外周面に接している。高分子圧電体層１２は、圧電性を示す高分子から成り、このような高分子としては、例えば、ポリフッ化ビニリデン（ＰＶＤＦ）、ポリ乳酸、ポリ尿素、等を挙げることができる。高分子圧電体層１２は、押し出し成形等により、断面の外形が略円形状に形成されている。なお、高分子圧電体層１２は、高分子圧電体から成るテープ状のフィルムが中心導体１１に巻かれることで構成されてもよい。この場合、当該フィルムは、螺旋巻きで巻かれても縦添え巻きで巻かれてもよい。 The polymer piezoelectric layer 12 is a layer that covers the outer peripheral surface of the central conductor 11. In the present embodiment, the polymer piezoelectric layer 12 is in contact with the outer peripheral surface of the central conductor 11. The polymer piezoelectric layer 12 is made of a polymer exhibiting piezoelectricity, and examples of such a polymer include polyvinylidene fluoride (PVDF), polylactic acid, polyurea, and the like. The outer shape of the cross section of the polymer piezoelectric layer 12 is formed into a substantially circular shape by extrusion molding or the like. The polymer piezoelectric layer 12 may be formed by winding a tape-shaped film made of the polymer piezoelectric material around the center conductor 11. In this case, the film may be wound in a spiral winding or in a vertical winding.
　第１外部導体１３は、高分子圧電体層１２の外周面を囲う導体である。本実施形態では、第１外部導体１３は、高分子圧電体層１２の外周面に接している。第１外部導体１３は、複数の導線が同一方向に螺旋状に巻かれた構成とされる。このような第１外部導体１３は、導体から成れば特に制限されないが、例えば、中心導体１１と同様の導体から成る。なお、図２では、第１外部導体１３として複数の導線が螺旋状に巻かれた例が示されるが、第１外部導体１３は、複数の導線が編まれた網線であってもよい。 The first outer conductor 13 is a conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer 12. In the present embodiment, the first outer conductor 13 is in contact with the outer peripheral surface of the polymer piezoelectric layer 12. The first outer conductor 13 has a configuration in which a plurality of conducting wires are spirally wound in the same direction. Such a first outer conductor 13 is not particularly limited as long as it is made of a conductor, but is made of, for example, a conductor similar to that of the central conductor 11. Although FIG. 2 shows an example in which a plurality of conductors are spirally wound as the first outer conductor 13, the first outer conductor 13 may be a net wire in which a plurality of conductors are woven.
　以上の構成による中心導体１１と、高分子圧電体層１２と、第１外部導体１３とにより、センサ部Ｓが構成されている。なお、上記のように、高分子圧電体層１２は中心導体１１の外周面に接し、第１外部導体１３は高分子圧電体層１２の外周面に接している。このため、センサ部Ｓでは、圧電同軸センサ１に加わる外力が高分子圧電体層１２に伝達され当該高分子圧電体層１２に誘導電荷に起因する電圧が生じる場合に、中心導体１１と第１外部導体１３との間には高分子圧電体層１２に生じるこの電圧に基づいて電圧が生じる。このため、中心導体１１と第１外部導体１３との間の電圧を該圧電同軸センサ１の外側に誘引し計測することで、該圧電同軸センサ１に加わる力を計測することが可能となる。 The sensor unit S is composed of the central conductor 11 having the above configuration, the polymer piezoelectric layer 12, and the first outer conductor 13. As described above, the polymer piezoelectric layer 12 is in contact with the outer peripheral surface of the central conductor 11, and the first outer conductor 13 is in contact with the outer peripheral surface of the polymer piezoelectric layer 12. Therefore, in the sensor unit S, when the external force applied to the piezoelectric coaxial sensor 1 is transmitted to the piezoelectric body layer 12 and a voltage due to the induced charge is generated in the polymer piezoelectric layer 12, the center conductor 11 and the first one. A voltage is generated between the outer conductor 13 and the outer conductor 13 based on this voltage generated in the polymer piezoelectric layer 12. Therefore, by attracting the voltage between the central conductor 11 and the first outer conductor 13 to the outside of the piezoelectric coaxial sensor 1 and measuring the voltage, it is possible to measure the force applied to the piezoelectric coaxial sensor 1.
　図３は、図１のIII－III線における断面図であり、図４は、図３におけるセンサ本体１０を含む部位を拡大して示す図である。なお、図３では、センサ本体１０の内部構造の記載は省略されている。第１ジャケット層１４は、第１外部導体１３の外周面を被覆する層である。従って、第１ジャケット層１４は、センサ部Ｓの外周面を被覆する。図２、図４に示すように、本実施形態では、第１ジャケット層１４は、内側第１ジャケット層１４ａと外側第１ジャケット層１４ｂとから成る。 FIG. 3 is a cross-sectional view taken along the line III-III of FIG. 1, and FIG. 4 is an enlarged view of a portion including the sensor main body 10 in FIG. In FIG. 3, the description of the internal structure of the sensor body 10 is omitted. The first jacket layer 14 is a layer that covers the outer peripheral surface of the first outer conductor 13. Therefore, the first jacket layer 14 covers the outer peripheral surface of the sensor portion S. As shown in FIGS. 2 and 4, in the present embodiment, the first jacket layer 14 is composed of an inner first jacket layer 14a and an outer first jacket layer 14b.
　内側第１ジャケット層１４ａは、樹脂から成るテープ状のフィルム１４ａｔから成り、フィルム１４ａｔは、第１外部導体１３の外周面上に螺旋状に巻かれている。フィルム１４ａｔのいずれの面にも接着層が設けられておらず、内側第１ジャケット層１４ａは、第１外部導体１３に非接着である。フィルム１４ａｔの材料としては、特に制限されないが、例えば、ポリエチレンテレフタレート、ポリエチレンナフタレート、ポリイミド、ポリ塩化ビニル、ポリプロピレン、ポリエーテルエーテルケトン、ポリエーテルイミド、ポリフェニレンサルファイド等の絶縁性の樹脂を挙げることができる。なお、フィルム１４ａｔの一方の面上に接着層が設けられてもよいが、第１外部導体１３を口出しする際に、内側第１ジャケット層１４ａと第１外部導体１３とが容易に剥離可能となる観点から、上記のようにフィルム１４ａｔのいずれの面にも、接着層が設けられないことが好ましい。 The inner first jacket layer 14a is made of a tape-shaped film 14at made of resin, and the film 14at is spirally wound on the outer peripheral surface of the first outer conductor 13. No adhesive layer is provided on any surface of the film 14at, and the inner first jacket layer 14a is non-adhesive to the first outer conductor 13. The material of the film 14at is not particularly limited, and examples thereof include insulating resins such as polyethylene terephthalate, polyethylene naphthalate, polyimide, polyvinyl chloride, polypropylene, polyether ether ketone, polyetherimide, and polyphenylene sulfide. can. An adhesive layer may be provided on one surface of the film 14at, but the inner first jacket layer 14a and the first outer conductor 13 can be easily peeled off when the first outer conductor 13 is squeezed out. From this point of view, it is preferable that no adhesive layer is provided on any surface of the film 14at as described above.
　外側第１ジャケット層１４ｂは、図４に示すように、第１ジャケット層１４の最も外側のジャケット層であり、樹脂から成るテープ状のフィルム１４ｂｔと、フィルム１４ｂｔの一方の面上に設けられる接着層１４ｂａとから成る。フィルム１４ｂｔは、接着層１４ｂａが内側第１ジャケット層１４ａ側を向き、内側第１ジャケット層１４ａの外周面上に螺旋状に巻かれている。従って、接着層１４ｂａは、内側第１ジャケット層１４ａに接しており、接着層１４ｂａによりフィルム１４ｂｔが内側第１ジャケット層１４ａに接着されている。なお、図２の例では、外側第１ジャケット層１４ｂのフィルム１４ｂｔは、内側第１ジャケット層１４ａのフィルム１４ａｔと同一方向に巻かれているが、外側第１ジャケット層１４ｂのフィルム１４ｂｔと内側第１ジャケット層１４ａのフィルム１４ａｔとが逆方向に巻かれてもよい。また、フィルム１４ａｔ及びフィルム１４ｂｔの少なくとも一方が縦添え巻きに巻かれてもよい。フィルム１４ｂｔの材料としては、特に制限されないが、例えば、フィルム１４ａｔと同様の材料を挙げることができる。接着層１４ｂａに用いられる接着剤としては、特に限定されないが、アクリル系接着剤、ポリエステル系接着剤、ポリアミド系接着剤、エチレン酢酸ビニル共重合体（ＥＶＡ）系接着剤等を挙げることができる。接着層１４ｂａが設けられなくてもよいが、圧電同軸センサ１が繰り返し屈曲される場合におけるフィルム１４ｂｔが解けること抑制する観点から、上記のように接着層１４ｂａが設けられることが好ましい。 As shown in FIG. 4, the outer first jacket layer 14b is the outermost jacket layer of the first jacket layer 14, and is provided on one surface of the tape-shaped film 14bt made of resin and the film 14bt. It consists of a layer 14ba. In the film 14bt, the adhesive layer 14ba faces the inner first jacket layer 14a side and is spirally wound on the outer peripheral surface of the inner first jacket layer 14a. Therefore, the adhesive layer 14ba is in contact with the inner first jacket layer 14a, and the film 14bt is adhered to the inner first jacket layer 14a by the adhesive layer 14ba. In the example of FIG. 2, the film 14bt of the outer first jacket layer 14b is wound in the same direction as the film 14at of the inner first jacket layer 14a, but the film 14bt of the outer first jacket layer 14b and the inner th. The film 14at of the jacket layer 14a may be wound in the opposite direction. Further, at least one of the film 14at and the film 14bt may be wound in a vertical winding. The material of the film 14bt is not particularly limited, and examples thereof include the same material as the film 14at. The adhesive used for the adhesive layer 14ba is not particularly limited, and examples thereof include an acrylic adhesive, a polyester adhesive, a polyamide adhesive, and an ethylene vinyl acetate copolymer (EVA) adhesive. Although the adhesive layer 14ba may not be provided, it is preferable to provide the adhesive layer 14ba as described above from the viewpoint of suppressing the film 14bt from being unraveled when the piezoelectric coaxial sensor 1 is repeatedly bent.
　なお、内側第１ジャケット層１４ａ及び外側第１ジャケット層１４ｂの一方が省略され、第１ジャケット層１４が内側第１ジャケット層１４ａ及び外側第１ジャケット層１４ｂの他方から構成されてもよい。ただし、第１ジャケット層１４と第１外部導体１３とが容易に剥離可能としつつ、第１ジャケット層１４が解けることを抑制する観点から、第１ジャケット層１４は、上記のように非接着の内側第１ジャケット層１４ａと、接着層１４ｂａを有する外側第１ジャケット層１４ｂとから構成されることが好ましい。 One of the inner first jacket layer 14a and the outer first jacket layer 14b may be omitted, and the first jacket layer 14 may be composed of the other of the inner first jacket layer 14a and the outer first jacket layer 14b. However, from the viewpoint of preventing the first jacket layer 14 from being unraveled while allowing the first jacket layer 14 and the first outer conductor 13 to be easily peeled off, the first jacket layer 14 is non-adhesive as described above. It is preferably composed of an inner first jacket layer 14a and an outer first jacket layer 14b having an adhesive layer 14ba.
　第２外部導体１５は、第１ジャケット層１４の外周面を囲う導体である。第２外部導体１５は、複数の導線が同一方向に螺旋状に巻かれた構成とされる。このような第２外部導体１５は、導体から成れば特に制限されないが、例えば、第１外部導体１３と同様の導体から成る。なお、図２では、第２外部導体１５として複数の導線が螺旋状の巻かれた例が示されるが、第２外部導体１５は、複数の導線が編まれた網線であってもよい。 The second outer conductor 15 is a conductor that surrounds the outer peripheral surface of the first jacket layer 14. The second outer conductor 15 has a configuration in which a plurality of conducting wires are spirally wound in the same direction. Such a second outer conductor 15 is not particularly limited as long as it is made of a conductor, but is made of, for example, the same conductor as the first outer conductor 13. Although FIG. 2 shows an example in which a plurality of conductors are spirally wound as the second outer conductor 15, the second outer conductor 15 may be a net wire in which a plurality of conductors are woven.
　第２ジャケット層１６は、第２外部導体１５の外周面を被覆する層である。図４に示すように、本実施形態では、第２ジャケット層１６は、内側第２ジャケット層１６ａ及び外側第２ジャケット層１６ｂを有する。 The second jacket layer 16 is a layer that covers the outer peripheral surface of the second outer conductor 15. As shown in FIG. 4, in the present embodiment, the second jacket layer 16 has an inner second jacket layer 16a and an outer second jacket layer 16b.
　内側第２ジャケット層１６ａは、樹脂から成るテープ状のフィルム１６ａｔから成り、フィルム１６ａｔは、第２外部導体１５の外周面上に螺旋状に巻かれている。フィルム１６ａｔのいずれの面にも接着層が設けられておらず、内側第２ジャケット層１６ａは、第２外部導体１５に非接着である。フィルム１６ａｔの材料としては、特に制限されないが、例えば、フィルム１４ａｔと同様の材料を挙げることができる。なお、フィルム１６ａｔの一方の面上に接着層が設けられてもよいが、第２外部導体１５を口出しする際に、内側第２ジャケット層１６ａと第２外部導体１５とが容易に剥離可能となる観点から、上記のようにフィルム１６ａｔのいずれの面にも、接着層が設けられないことが好ましい。 The inner second jacket layer 16a is made of a tape-shaped film 16at made of resin, and the film 16at is spirally wound on the outer peripheral surface of the second outer conductor 15. No adhesive layer is provided on any surface of the film 16at, and the inner second jacket layer 16a is non-adhesive to the second outer conductor 15. The material of the film 16at is not particularly limited, and examples thereof include the same material as the film 14at. An adhesive layer may be provided on one surface of the film 16at, but the inner second jacket layer 16a and the second outer conductor 15 can be easily peeled off when the second outer conductor 15 is squeezed out. From this point of view, it is preferable that no adhesive layer is provided on any surface of the film 16at as described above.
　図２、図４に示すように、外側第２ジャケット層１６ｂは、第２ジャケット層１６の最も外側のジャケット層であり、センサ本体１０の最も外周側に位置している。外側第２ジャケット層１６ｂは、樹脂から成るテープ状のフィルム１６ｂｔと、フィルム１６ｂｔの一方の面上に設けられる接着層１６ｂａとから成る。フィルム１６ｂｔは、接着層１６ｂａが内側第２ジャケット層１６ａ側を向き、内側第２ジャケット層１６ａの外周面上に螺旋状に巻かれている。従って、接着層１６ｂａは、内側第２ジャケット層１６ａに接しており、接着層１６ｂａによりフィルム１６ｂｔが内側第２ジャケット層１６ａに接着されている。なお、図２の例では、外側第２ジャケット層１６ｂのフィルム１６ｂｔは、内側第２ジャケット層１６ａのフィルム１６ａｔと同一方向に巻かれているが、外側第２ジャケット層１６ｂのフィルム１６ｂｔと内側第２ジャケット層１６ａのフィルム１６ａｔとが逆方向に巻かれてもよい。また、フィルム１６ａｔ及びフィルム１６ｂｔの少なくとも一方が縦添え巻きに巻かれてもよい。フィルム１６ｂｔの材料としては、特に制限されないが、例えば、フィルム１６ａｔと同様の材料を挙げることができる。接着層１６ｂａに用いられる接着剤としては、特に制限されないが、例えば、接着層１４ｂａに用いられる接着剤と同様の接着剤を挙げることができる。 As shown in FIGS. 2 and 4, the outer second jacket layer 16b is the outermost jacket layer of the second jacket layer 16 and is located on the outermost outermost side of the sensor body 10. The outer second jacket layer 16b is composed of a tape-shaped film 16bt made of resin and an adhesive layer 16ba provided on one surface of the film 16bt. In the film 16bt, the adhesive layer 16ba faces the inner second jacket layer 16a side and is spirally wound on the outer peripheral surface of the inner second jacket layer 16a. Therefore, the adhesive layer 16ba is in contact with the inner second jacket layer 16a, and the film 16bt is adhered to the inner second jacket layer 16a by the adhesive layer 16ba. In the example of FIG. 2, the film 16bt of the outer second jacket layer 16b is wound in the same direction as the film 16at of the inner second jacket layer 16a, but the film 16bt of the outer second jacket layer 16b and the inner second jacket layer 16b. 2 The film 16at of the jacket layer 16a may be wound in the opposite direction. Further, at least one of the film 16at and the film 16bt may be wound in a vertical winding. The material of the film 16bt is not particularly limited, and examples thereof include the same material as the film 16at. The adhesive used for the adhesive layer 16ba is not particularly limited, and examples thereof include an adhesive similar to the adhesive used for the adhesive layer 14ba.
　なお、内側第２ジャケット層１６ａが省略され、第２ジャケット層１６が外側第２ジャケット層１６ｂから構成されてもよい。ただし、第２ジャケット層１６と第２外部導体１５とが容易に剥離可能としつつ、第２ジャケット層１６が解けることを抑制する観点から、第２ジャケット層１６は、上記のように非接着の内側第２ジャケット層１６ａと、接着層１６ｂａを有する外側第２ジャケット層１６ｂとから構成されることが好ましい。 The inner second jacket layer 16a may be omitted, and the second jacket layer 16 may be composed of the outer second jacket layer 16b. However, from the viewpoint of preventing the second jacket layer 16 from being unraveled while allowing the second jacket layer 16 and the second outer conductor 15 to be easily peeled off, the second jacket layer 16 is non-adhesive as described above. It is preferably composed of an inner second jacket layer 16a and an outer second jacket layer 16b having an adhesive layer 16ba.
　また、上記のように、第１ジャケット層１４が内側第１ジャケット層１４ａのみから構成されたとしても、或いは、第１ジャケット層１４が外側第１ジャケット層１４ｂのみから構成されたとしても、センサ本体１０は、外側第２ジャケット層１６ｂを含む。この外側第２ジャケット層１６ｂは、センサ部Ｓの外周面を囲うように巻かれて接着層１６ｂａにより当該接着層１６ｂａの接する部材に接着されるテープ状のフィルム１６ｂｔを有する。このため、センサ本体１０は、センサ部Ｓの外周面を囲うように巻かれて接着層により当該接着層の接する部材に接着されるテープ状のフィルムを有する少なくとも１つのジャケット層を含むと理解できる。 Further, as described above, even if the first jacket layer 14 is composed of only the inner first jacket layer 14a, or the first jacket layer 14 is composed of only the outer first jacket layer 14b, the sensor is used. The main body 10 includes an outer second jacket layer 16b. The outer second jacket layer 16b has a tape-shaped film 16bt that is wound so as to surround the outer peripheral surface of the sensor portion S and is adhered to a member in contact with the adhesive layer 16ba by the adhesive layer 16ba. Therefore, it can be understood that the sensor main body 10 includes at least one jacket layer having a tape-shaped film that is wound around the outer peripheral surface of the sensor portion S and adhered to the member in contact with the adhesive layer by the adhesive layer. ..
　次に、一対の外装シート２０，３０について説明する。 Next, the pair of exterior sheets 20 and 30 will be described.
　本実施形態の一方の外装シート２０は、可撓性を有し、図３、図４に示すように、基材層２１と、接着層２２と、粘着層２３と、剥離シート２４とから成る。 One of the exterior sheets 20 of the present embodiment has flexibility, and as shown in FIGS. 3 and 4, is composed of a base material layer 21, an adhesive layer 22, an adhesive layer 23, and a release sheet 24. ..
　基材層２１は、可撓性を有するシート状の部材である。基材層２１としては、特に制限されないが、例えば、樹脂から成るフィルムを挙げることができ、このフィルムは多層構造であってもよく、単層構造であってもよい。また、フィルムの材料としては、特に制限されないが、例えば、センサ本体１０のフィルム１４ａｔと同様の材料が挙げられる。 The base material layer 21 is a flexible sheet-like member. The base material layer 21 is not particularly limited, and examples thereof include a film made of a resin, and the film may have a multi-layer structure or a single-layer structure. The material of the film is not particularly limited, and examples thereof include the same material as the film 14at of the sensor body 10.
　接着層２２は、基材層２１の一方の面上に設けられる。接着層２２を構成する材料としては、例えば、粘着剤、接着剤等を挙げることができる。粘着剤、接着剤としては、特に制限されないが、有機溶剤等の薬品に対する耐性を有することが好ましい。例えば、アクリル系、シリコーン系、ウレタン系等の粘着剤、接着剤を挙げることができ、シリコーン系粘着剤から成ることが特に好ましい。 The adhesive layer 22 is provided on one surface of the base material layer 21. Examples of the material constituting the adhesive layer 22 include an adhesive and an adhesive. The pressure-sensitive adhesive and the adhesive are not particularly limited, but are preferably resistant to chemicals such as organic solvents. For example, acrylic-based, silicone-based, urethane-based and other adhesives and adhesives can be mentioned, and it is particularly preferable that the adhesive is composed of a silicone-based adhesive.
　粘着層２３は、基材層２１の他方の面上に設けられる。粘着層２３に用いられる粘着剤としては、特に制限されないが、例えば、接着層２２において例示した粘着剤と同様の粘着剤を挙げることができる。 The adhesive layer 23 is provided on the other surface of the base material layer 21. The pressure-sensitive adhesive used for the pressure-sensitive adhesive layer 23 is not particularly limited, and examples thereof include pressure-sensitive adhesives similar to the pressure-sensitive adhesives exemplified in the pressure-sensitive adhesive layer 22.
　剥離シート２４は、粘着層２３の基材層２１側と反対側の面を被覆し、可撓性を有するシート状の部材である。本実施形態では、剥離シート２４は、剥離基材層２４ａと、剥離基材層２４ａにおける粘着層２３側の面上に設けられる剥離剤層２４ｂとを有する。剥離基材層２４ａとしては、例えば、樹脂から成るフィルム、紙の両面または一方の面が樹脂で被覆された積層体等が挙げられる。フィルムを構成する樹脂や紙を被覆する樹脂の材料としては、特に制限されないが、例えば、前述のフィルム１４ａｔと同様の材料を挙げることができる。剥離剤層２４ｂは、剥離剤を含む層である。剥離剤層２４ｂに含まれる剥離剤としては、特に制限されないが、例えば、フッ素系剥離剤、シリコーン系剥離剤等が挙げられる。なお、剥離シート２４は、剥離剤層２４ｂのみから構成されてもよい。 The release sheet 24 is a flexible sheet-like member that covers the surface of the adhesive layer 23 opposite to the base material layer 21 side. In the present embodiment, the release sheet 24 has a release base layer 24a and a release agent layer 24b provided on the surface of the release base layer 24a on the adhesive layer 23 side. Examples of the release base material layer 24a include a film made of resin, a laminate in which both sides or one side of paper is coated with resin. The material of the resin constituting the film or the resin covering the paper is not particularly limited, and examples thereof include the same materials as the above-mentioned film 14at. The release agent layer 24b is a layer containing a release agent. The release agent contained in the release agent layer 24b is not particularly limited, and examples thereof include a fluorine-based release agent and a silicone-based release agent. The release sheet 24 may be composed of only the release agent layer 24b.
　本実施形態の他方の外装シート３０は、可撓性を有し、図３、図４に示すように、基材層３１と、接着層３２とから成る。外装シート３０の厚さは外装シート２０より薄く、外装シート３０の可撓性は外装シート２０の可撓性より高い。なお、外装シート３０の厚さは、特に制限されるものではなく、外装シート２０と同じであってもよく、外装シート２０より厚くてもよい。また、外装シート３０の可撓性は、特に制限されるものではなく、外装シート２０と同じであってもよく、外装シート２０より低くてもよい。 The other exterior sheet 30 of the present embodiment has flexibility and is composed of a base material layer 31 and an adhesive layer 32 as shown in FIGS. 3 and 4. The thickness of the exterior sheet 30 is thinner than that of the exterior sheet 20, and the flexibility of the exterior sheet 30 is higher than that of the exterior sheet 20. The thickness of the exterior sheet 30 is not particularly limited, and may be the same as the exterior sheet 20 or thicker than the exterior sheet 20. The flexibility of the exterior sheet 30 is not particularly limited and may be the same as that of the exterior sheet 20 or lower than that of the exterior sheet 20.
　基材層３１は、可撓性を有するシート状の部材である。基材層３１としては、特に制限されないが、例えば、樹脂から成るフィルムを挙げることができ、このフィルムは多層構造であってもよく、単層構造であってもよい。また、フィルムの材料としては、特に制限されないが、例えば、センサ本体１０のフィルム１４ａｔと同様の材料が挙げられる。 The base material layer 31 is a flexible sheet-like member. The base material layer 31 is not particularly limited, and examples thereof include a film made of a resin, and this film may have a multi-layer structure or a single-layer structure. The material of the film is not particularly limited, and examples thereof include the same material as the film 14at of the sensor body 10.
　接着層３２は、基材層３１の一方の面上に設けられる。接着層３２を構成する材料としては、例えば、粘着剤、接着剤等を挙げることができる。粘着剤、接着剤としては、特に制限されないが、有機溶剤等の薬品に対する耐性を有することが好ましい。例えば、アクリル系、シリコーン系、ウレタン系等の粘着剤、接着剤を挙げることができ、シリコーン系粘着剤から成ることが特に好ましい。 The adhesive layer 32 is provided on one surface of the base material layer 31. Examples of the material constituting the adhesive layer 32 include an adhesive and an adhesive. The pressure-sensitive adhesive and the adhesive are not particularly limited, but are preferably resistant to chemicals such as organic solvents. For example, acrylic-based, silicone-based, urethane-based and other adhesives and adhesives can be mentioned, and it is particularly preferable that the adhesive is composed of a silicone-based adhesive.
　このような構成の一対の外装シート２０，３０のそれぞれは、図１に示すように、センサ本体１０の外径よりも幅が大きくセンサ本体１０の長手方向に沿って延在する帯状に形成される。また、図３、図４に示すように、一対の外装シート２０，３０は、外装シート２０の接着層２２側の主面２０Ｓ側と外装シート３０の接着層３２側の主面３０Ｓ側とが互いに向かい合って、センサ本体１０を挟み込むとともに、接着層２２，３２によって貼り合わされている。この際、センサ本体１０の外周面の一部は接着層２２に接触し、センサ本体１０の外周面の他の一部は接着層３２に接触している。また、一対の外装シート２０，３０のうち可撓性が低く粘着層２３及び剥離シート２４を有する外装シート２０が概ね平らにされ、可撓性の高い外装シート３０は、当該外装シート３０の一部がセンサ本体１０の外周面の一部に沿うように湾曲されている。そして、一対の外装シート２０，３０は、センサ本体１０の外周面である外側第２ジャケット層１６ｂの外周面を囲っている。なお、一対の外装シート２０，３０とセンサ本体１０との間には、外装シート２０の一方の主面２０Ｓ、外装シート３０の一方の主面３０Ｓ、及びセンサ本体１０の外周面によって囲まれる隙間ＧＰが形成されている。 As shown in FIG. 1, each of the pair of exterior sheets 20 and 30 having such a configuration is formed in a band shape having a width larger than the outer diameter of the sensor main body 10 and extending along the longitudinal direction of the sensor main body 10. NS. Further, as shown in FIGS. 3 and 4, the pair of exterior sheets 20 and 30 have a main surface 20S side on the adhesive layer 22 side of the exterior sheet 20 and a main surface 30S side on the adhesive layer 32 side of the exterior sheet 30. The sensor main body 10 is sandwiched between them facing each other, and they are bonded by adhesive layers 22 and 32. At this time, a part of the outer peripheral surface of the sensor body 10 is in contact with the adhesive layer 22, and the other part of the outer peripheral surface of the sensor body 10 is in contact with the adhesive layer 32. Further, of the pair of exterior sheets 20 and 30, the exterior sheet 20 having the adhesive layer 23 and the release sheet 24 having low flexibility is substantially flattened, and the highly flexible exterior sheet 30 is one of the exterior sheets 30. The portion is curved so as to be along a part of the outer peripheral surface of the sensor body 10. The pair of exterior sheets 20 and 30 surround the outer peripheral surface of the outer second jacket layer 16b, which is the outer peripheral surface of the sensor body 10. A gap between the pair of exterior sheets 20 and 30 and the sensor body 10 is surrounded by one main surface 20S of the exterior sheet 20, one main surface 30S of the exterior sheet 30, and the outer peripheral surface of the sensor body 10. GP is formed.
　また、図１に示すように、センサ本体１０は、一端１０Ｅとコネクタ５０の内部空間に収容される他端とを有し、一対の外装シート２０，３０は、センサ本体１０と同様に、一端２０Ｅ，３０Ｅとコネクタ５０の内部空間に収容される他端とを有する。センサ本体１０の他端は、このコネクタ５０の内部空間に収容される図示しない回路を介して、ケーブル６０に電気的に接続される。このケーブル６０としては、特に制限されないが、例えば、センサ本体１０の中心導体１１と接続される中心導体とセンサ本体１０の第１外部導体１３と接続される外部導体とを備える同軸ケーブルが挙げられる。 Further, as shown in FIG. 1, the sensor main body 10 has one end 10E and the other end accommodated in the internal space of the connector 50, and the pair of exterior sheets 20 and 30 have one end similarly to the sensor main body 10. It has 20E, 30E and the other end housed in the internal space of the connector 50. The other end of the sensor body 10 is electrically connected to the cable 60 via a circuit (not shown) accommodated in the internal space of the connector 50. The cable 60 is not particularly limited, and examples thereof include a coaxial cable including a central conductor connected to the central conductor 11 of the sensor body 10 and an outer conductor connected to the first outer conductor 13 of the sensor body 10. ..
　図５は、図１におけるセンサ本体１０の一端１０Ｅを含む部位を拡大して示す図である。また、図６は、図５のVI－VI線における断面図である。なお、図６では、センサ本体１０の内部構造の記載は省略されている。図５、図６に示すように、一対の外装シート２０，３０は、センサ本体１０の一端１０Ｅを基準とするセンサ本体１０のコネクタ５０に接続される他端側と反対側まで延在している。換言すれば、一対の外装シート２０，３０は、センサ本体１０の長手方向においてセンサ本体１０の一端１０Ｅを超えて延在し、一対の外装シート２０，３０の一端２０Ｅ，３０Ｅは、一端１０Ｅを基準とするセンサ本体１０の他端側と反対側に位置する。このため、一対の外装シート２０，３０は、この一端１０Ｅを基準とするセンサ本体１０の他端側と反対側の領域２０ａ，３０ａを有する。また、一対の外装シート２０，３０のうち少なくともコネクタ５０に収容されていない部位では、一対の外装シート２０，３０の外縁は概ね一致している。また、この部位では、一対の外装シート２０，３０が貼り合わされている貼付部４０は、一対の外装シート２０，３０の外縁の全体に沿って延在している。そして、一対の外装シート２０，３０が貼り合わされる方向に沿って見る場合に、この貼付部４０はセンサ本体１０を囲っている。このため、この方向に沿って見る場合に、一対の外装シート２０，３０のうち、センサ本体１０の長手方向と垂直な方向に当該センサ本体１０を挟む一対の領域２０ｂ，３０ｂ，２０ｃ，３０ｃの一部と、センサ本体１０の一端１０Ｅよりセンサ本体１０の他端側と反対側の領域２０ａ，３０ａの一部とが連続して貼り合わされている。なお、図１、図５において、貼付部４０のセンサ本体１０側の縁４０Ｅは、二点鎖線で示されている。また、図５において、貼付部４０にはハッチングが施され、領域２０ａ，３０ａと領域２０ｂ，３０ｂとの境界、及び領域２０ａ，３０ａと領域２０ｃ，３０ｃとの境界は、破線で示されている。 FIG. 5 is an enlarged view showing a portion including one end 10E of the sensor main body 10 in FIG. 1. Further, FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG. Note that in FIG. 6, the description of the internal structure of the sensor body 10 is omitted. As shown in FIGS. 5 and 6, the pair of exterior sheets 20 and 30 extend to the side opposite to the other end side connected to the connector 50 of the sensor body 10 with reference to one end 10E of the sensor body 10. There is. In other words, the pair of exterior sheets 20 and 30 extend beyond one end 10E of the sensor body 10 in the longitudinal direction of the sensor body 10, and the pair of exterior sheets 20 and 30 have one end 20E and 30E extending from one end 10E. It is located on the side opposite to the other end side of the reference sensor body 10. Therefore, the pair of exterior sheets 20 and 30 have regions 20a and 30a on the opposite side of the sensor main body 10 with respect to one end 10E. Further, the outer edges of the pair of exterior sheets 20 and 30 are substantially the same at least in the portion of the pair of exterior sheets 20 and 30 that is not housed in the connector 50. Further, in this portion, the sticking portion 40 to which the pair of exterior sheets 20 and 30 are bonded extends along the entire outer edge of the pair of exterior sheets 20 and 30. Then, when the pair of exterior sheets 20 and 30 are viewed along the direction in which they are attached, the attached portion 40 surrounds the sensor main body 10. Therefore, when viewed along this direction, of the pair of exterior sheets 20 and 30, the pair of regions 20b, 30b, 20c, 30c sandwiching the sensor body 10 in the direction perpendicular to the longitudinal direction of the sensor body 10 A part and a part of the regions 20a and 30a on the opposite side of the other end side of the sensor body 10 from one end 10E of the sensor body 10 are continuously bonded. In addition, in FIGS. 1 and 5, the edge 40E on the sensor main body 10 side of the sticking portion 40 is indicated by a two-dot chain line. Further, in FIG. 5, the pasting portion 40 is hatched, and the boundary between the areas 20a and 30a and the areas 20b and 30b and the boundary between the areas 20a and 30a and the areas 20c and 30c are shown by broken lines. ..
　このように一対の外装シート２０，３０がセンサ本体１０を挟み込んで貼り合わされることで、圧電同軸センサ１におけるコネクタ５０の内部空間に収容されていない部位では、センサ本体１０の外周面、及びセンサ本体１０の一端１０Ｅが一対の外装シート２０，３０によって囲われて、当該部位が密閉されている。このため、一対の外装シート２０，３０とセンサ本体１０との間に形成される隙間ＧＰは、圧電同軸センサ１の一端から外部に連通していない。 By sandwiching and adhering the pair of exterior sheets 20 and 30 to each other in this way, the outer peripheral surface of the sensor body 10 and the sensor are located in the portion of the piezoelectric coaxial sensor 1 that is not accommodated in the internal space of the connector 50. One end 10E of the main body 10 is surrounded by a pair of exterior sheets 20 and 30, and the portion is sealed. Therefore, the gap GP formed between the pair of exterior sheets 20 and 30 and the sensor main body 10 does not communicate with the outside from one end of the piezoelectric coaxial sensor 1.
　本実施形態の圧電同軸センサ１では、例えば、外装シート２０の剥離シート２４を粘着層２３から剥離し、外部に露出される粘着層２３が被測定物に貼り付けられることで、圧電同軸センサ１が被測定物に取り付けられる。 In the piezoelectric coaxial sensor 1 of the present embodiment, for example, the release sheet 24 of the exterior sheet 20 is peeled from the adhesive layer 23, and the adhesive layer 23 exposed to the outside is attached to the object to be measured, whereby the piezoelectric coaxial sensor 1 Is attached to the object to be measured.
　以上説明したように、本実施形態の圧電同軸センサ１は、線状の中心導体１１、中心導体１１の外周面を被覆する高分子圧電体層１２、及び高分子圧電体層１２の外周面を囲う第１外部導体１３を有するセンサ部Ｓと、センサ部Ｓの外周面を囲うように巻かれて接着層により当該接着層の接する部材に接着されるテープ状のフィルムを有する少なくとも１つのジャケット層とを含むセンサ本体１０と、一対の外装シート２０，３０と、を備える。一対の外装シート２０，３０のそれぞれは、一方の主面２０Ｓ，３０Ｓ側に接着層２２，３２を有する。この一対の外装シート２０，３０は、一方の主面２０Ｓ，３０Ｓ側が互いに向かい合ってセンサ本体１０の少なくとも一部を挟み込むとともに、当該外装シート２０，３０の接着層２２，３２によって貼り合わされ、センサ本体１０の少なくとも一部における外周面を囲っている。 As described above, the piezoelectric coaxial sensor 1 of the present embodiment covers the linear center conductor 11, the polymer piezoelectric layer 12 that covers the outer peripheral surface of the central conductor 11, and the outer peripheral surface of the polymer piezoelectric layer 12. At least one jacket layer having a sensor portion S having a first outer conductor 13 that surrounds the sensor portion S, and a tape-shaped film that is wound so as to surround the outer peripheral surface of the sensor portion S and adhered to a member in contact with the adhesive layer by an adhesive layer. A sensor main body 10 including the above and a pair of exterior sheets 20 and 30 are provided. Each of the pair of exterior sheets 20 and 30 has adhesive layers 22 and 32 on one of the main surfaces 20S and 30S. The pair of exterior sheets 20 and 30 have one main surface 20S and 30S facing each other and sandwich at least a part of the sensor body 10, and are bonded by the adhesive layers 22 and 32 of the exterior sheets 20 and 30 to form the sensor body. It surrounds the outer peripheral surface of at least a part of 10.
　本実施形態の圧電同軸センサ１では、ジャケット層が押出成形によって形成される場合と比べて、センサ本体１０の外径を小さくし得る。また、一対の外装シート２０，３０の厚さ方向における圧電同軸センサ１の厚さは、概ね一対の外装シート２０，３０の厚さとセンサ本体１０の外径とを足し合わせた値である。シートは、一般的に押出成形によって形成される部材よりも薄くできる。このため、本実施形態の圧電同軸センサ１によれば、少なくとも一対の外装シート２０，３０の厚さ方向における圧電同軸センサ１の厚さを、ジャケット層が押出成形によって形成されたセンサ本体の外径より小さくし得る。また、本実施形態の圧電同軸センサ１では、上記のように、センサ本体１０の少なくとも一部における外周面は、一対の外装シート２０，３０によって囲われる。このため、本実施形態の圧電同軸センサ１によれば、センサ本体１０の少なくとも一部における外周面が部材によって囲われない場合と比べて、センサ本体１０のジャケット層におけるフィルムを接着する接着層に有機溶剤等の薬品が接触することを抑制し得る。例えば、図２，図４に示すように、第１ジャケット層１４が内側第１ジャケット層１４ａ及び外側第１ジャケット層１４ｂから構成され、第２ジャケット層１６が内側第２ジャケット層１６ａ及び外側第２ジャケット層１６ｂから構成される場合、接着層１４ｂａ，１６ｂａに薬品が接触することを抑制し得る。このため、外側第１ジャケット層１４ｂにおけるフィルム１４ｂｔや外側第２ジャケット層１６ｂにおけるフィルム１６ｂｔの剥がれを抑制し得る。したがって、本実施形態の圧電同軸センサ１は、厚さを薄くしつつ耐薬品性を向上し得る。 In the piezoelectric coaxial sensor 1 of the present embodiment, the outer diameter of the sensor body 10 can be made smaller than that in the case where the jacket layer is formed by extrusion molding. The thickness of the piezoelectric coaxial sensor 1 in the thickness direction of the pair of exterior sheets 20 and 30 is approximately the sum of the thickness of the pair of exterior sheets 20 and 30 and the outer diameter of the sensor body 10. The sheet can be thinner than the members typically formed by extrusion. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the thickness of the piezoelectric coaxial sensor 1 in the thickness direction of at least a pair of exterior sheets 20 and 30 is set to the outside of the sensor body in which the jacket layer is formed by extrusion molding. Can be smaller than the diameter. Further, in the piezoelectric coaxial sensor 1 of the present embodiment, as described above, the outer peripheral surface of at least a part of the sensor main body 10 is surrounded by the pair of exterior sheets 20 and 30. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the adhesive layer for adhering the film in the jacket layer of the sensor body 10 is compared with the case where the outer peripheral surface of at least a part of the sensor body 10 is not surrounded by the member. It is possible to suppress contact with chemicals such as organic solvents. For example, as shown in FIGS. 2 and 4, the first jacket layer 14 is composed of the inner first jacket layer 14a and the outer first jacket layer 14b, and the second jacket layer 16 is the inner second jacket layer 16a and the outer second jacket layer 16. When composed of two jacket layers 16b, it is possible to prevent chemicals from coming into contact with the adhesive layers 14ba and 16ba. Therefore, peeling of the film 14bt in the outer first jacket layer 14b and the film 16bt in the outer second jacket layer 16b can be suppressed. Therefore, the piezoelectric coaxial sensor 1 of the present embodiment can improve chemical resistance while reducing the thickness.
　また、本実施形態の圧電同軸センサ１では、図５、図６に示すように、一対の外装シート２０，３０は、センサ本体１０の一端１０Ｅを基準とするセンサ本体１０の他端側と反対側まで延在する。また、一対の外装シート２０，３０が貼り合わされる方向に沿って見る場合に、一対の外装シート２０，３０のうち、センサ本体１０の長手方向と垂直な方向に当該センサ本体１０を挟む一対の領域２０ｂ，３０ｂ，２０ｃ，３０ｃの一部と、センサ本体１０の一端１０Ｅを基準とするセンサ本体１０の他端側と反対側の領域２０ａ，３０ａの一部とが連続して貼り合わされている。このため、センサ本体１０と一対の外装シート２０，３０との間に隙間ＧＰが形成されていたとしても、この隙間ＧＰが圧電同軸センサ１の一端から外部に連通することを抑制できる。このため、この隙間ＧＰに薬品が入り込むことを抑制し得る。また、センサ本体１０の一端１０Ｅに外側第１ジャケット層１４ｂにおける接着層１４ｂａや外側第２ジャケット層１６ｂにおける接着層１６ｂａが露出していたとしても、この接着層１４ｂａ，１６ｂａに薬品が接触することを抑制し得る。このため、本実施形態の圧電同軸センサ１によれば、外側第１ジャケット層１４ｂにおけるフィルム１４ｂｔや外側第２ジャケット層１６ｂにおけるフィルム１６ｂｔの剥がれをより抑制し得る。なお、一対の外装シート２０，３０における上記の一対の領域２０ｂ，３０ｂ，２０ｃ，３０ｃの全体が貼り合わされてもよく、一対の外装シート２０，３０における上記の領域２０ａ，３０ａの全体が貼り合わされてもよい。 Further, in the piezoelectric coaxial sensor 1 of the present embodiment, as shown in FIGS. 5 and 6, the pair of exterior sheets 20 and 30 are opposite to the other end side of the sensor body 10 with respect to one end 10E of the sensor body 10. It extends to the side. Further, when viewed along the direction in which the pair of exterior sheets 20 and 30 are bonded together, a pair of the pair of exterior sheets 20 and 30 sandwiching the sensor body 10 in a direction perpendicular to the longitudinal direction of the sensor body 10. A part of the regions 20b, 30b, 20c, 30c and a part of the regions 20a, 30a on the opposite side of the other end side of the sensor body 10 with reference to one end 10E of the sensor body 10 are continuously bonded. .. Therefore, even if a gap GP is formed between the sensor body 10 and the pair of exterior sheets 20 and 30, it is possible to prevent the gap GP from communicating with the outside from one end of the piezoelectric coaxial sensor 1. Therefore, it is possible to prevent chemicals from entering the gap GP. Further, even if the adhesive layer 14ba in the outer first jacket layer 14b and the adhesive layer 16ba in the outer second jacket layer 16b are exposed on one end 10E of the sensor body 10, the chemicals come into contact with the adhesive layers 14ba and 16ba. Can be suppressed. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, peeling of the film 14bt in the outer first jacket layer 14b and the film 16bt in the outer second jacket layer 16b can be further suppressed. The entire pair of exterior sheets 20 and 30 may be bonded together, and the entire pair of exterior sheets 20 and 30 may be bonded together. You may.
　また、本実施形態の圧電同軸センサ１では、外装シート２０の可撓性は、外装シート３０の可撓性より低い。このため、一対の外装シート２０，３０の可撓性が概ね同じ場合と比べて、外装シート２０を平らにし易く、外装シート３０を被測定物に取り付け易くし得る。 Further, in the piezoelectric coaxial sensor 1 of the present embodiment, the flexibility of the exterior sheet 20 is lower than the flexibility of the exterior sheet 30. Therefore, as compared with the case where the flexibility of the pair of exterior sheets 20 and 30 is substantially the same, the exterior sheet 20 can be easily flattened and the exterior sheet 30 can be easily attached to the object to be measured.
　また、本実施形態の圧電同軸センサ１では、一対の外装シート２０，３０のそれぞれは、一方の主面２０Ｓ，３０Ｓ側に接着層２２，３２を有する。このため、一対の外装シート２０，３０のそれぞれの接着層２２，３２とセンサ本体１０の外周面とを接触させることができる。このため、本実施形態の圧電同軸センサ１によれば、一方の外装シートのみが接着層を有する場合と比べて、センサ本体１０における一対の外装シート２０，３０によって囲われている部位が当該一対の外装シート２０，３０に対して移動することを抑制し得る。このため、本実施形態の圧電同軸センサ１は、例えば、外装シート２０が被測定物に取り付けられることで、被測定物の変形や被測定物に加わる力、振動等を外装シート２０からセンサ本体１０に適切に伝達し得、これら力や振動等を適切に検出し得る。 Further, in the piezoelectric coaxial sensor 1 of the present embodiment, each of the pair of exterior sheets 20 and 30 has adhesive layers 22 and 32 on one of the main surfaces 20S and 30S. Therefore, the adhesive layers 22 and 32 of the pair of exterior sheets 20 and 30 can be brought into contact with the outer peripheral surface of the sensor body 10. Therefore, according to the piezoelectric coaxial sensor 1 of the present embodiment, the portion of the sensor body 10 surrounded by the pair of exterior sheets 20 and 30 is the pair, as compared with the case where only one exterior sheet has an adhesive layer. It is possible to suppress the movement of the exterior sheets 20 and 30 of the above. Therefore, in the piezoelectric coaxial sensor 1 of the present embodiment, for example, when the exterior sheet 20 is attached to the object to be measured, deformation of the object to be measured, force applied to the object to be measured, vibration, and the like are transmitted from the exterior sheet 20 to the sensor body. It can be appropriately transmitted to No. 10, and these forces, vibrations, and the like can be appropriately detected.
　また、本実施形態の圧電同軸センサ１では、外装シート２０は、一方の面上に接着層２２が設けられる基材層２１と、基材層２１の他方の面上に設けられる粘着層２３と、粘着層２３の基材層２１側と反対側の面を被覆する剥離シート２４とを有する。このため、外装シート２０が粘着層２３と剥離シート２４とを有さない場合と比べて、外装シート２０を被測定物に取り付け易くし得る。 Further, in the piezoelectric coaxial sensor 1 of the present embodiment, the exterior sheet 20 includes a base material layer 21 having an adhesive layer 22 provided on one surface and an adhesive layer 23 provided on the other surface of the base material layer 21. It has a release sheet 24 that covers the surface of the adhesive layer 23 opposite to the base material layer 21 side. Therefore, the exterior sheet 20 can be easily attached to the object to be measured as compared with the case where the exterior sheet 20 does not have the adhesive layer 23 and the release sheet 24.
　以上、本発明について、上記実施形態を例に説明したが、本発明はこれらに限定されるものではない。 Although the present invention has been described above by taking the above-described embodiment as an example, the present invention is not limited thereto.
　例えば、上記実施形態では、基材層２１、接着層２２、粘着層２３、及び剥離シート２４から成る外装シート２０と、基材層３１及び接着層３２から成る外装シート３０とを例に説明した。しかし、一対の外装シート２０，３０の少なくとも一方が一方の主面側に接着層を有し、この接着層によって一対の外装シート２０，３０を貼り合わすことができればよい。例えば、外装シート２０は、粘着層２３及び剥離シート２４を有していなくてもよい。しかし、被測定物への取り付け性の観点では、外装シート２０は、粘着層２３及び剥離シート２４を有していることが好ましい。なお、粘着層２３及び剥離シート２４は、外装シート２０の面内方向の全体に設けられていなくてもよい。例えば、上記実施形態では、粘着層２３及び剥離シート２４は、コネクタ５０に収容される端部と反対の端部側に少なくとも設けられていればよい。 For example, in the above embodiment, the exterior sheet 20 composed of the base material layer 21, the adhesive layer 22, the adhesive layer 23, and the release sheet 24, and the exterior sheet 30 composed of the base material layer 31 and the adhesive layer 32 have been described as an example. .. However, it is sufficient that at least one of the pair of exterior sheets 20 and 30 has an adhesive layer on one main surface side, and the pair of exterior sheets 20 and 30 can be bonded to each other by this adhesive layer. For example, the exterior sheet 20 does not have to have the adhesive layer 23 and the release sheet 24. However, from the viewpoint of attachability to the object to be measured, the exterior sheet 20 preferably has an adhesive layer 23 and a release sheet 24. The adhesive layer 23 and the release sheet 24 may not be provided on the entire outer sheet 20 in the in-plane direction. For example, in the above embodiment, the adhesive layer 23 and the release sheet 24 may be provided at least on the end side opposite to the end housed in the connector 50.
　また、一対の外装シート２０，３０のうち一方は可撓性を殆ど有していなくてもよい。例えば、外装シート２０が可撓性を殆ど有していなくても、外装シート３０が可撓性を有していれば、上記実施形態のように、一対の外装シート２０，３０を貼り合わすことができる。 Further, one of the pair of exterior sheets 20 and 30 may have almost no flexibility. For example, even if the exterior sheet 20 has almost no flexibility, if the exterior sheet 30 has flexibility, the pair of exterior sheets 20 and 30 can be bonded together as in the above embodiment. Can be done.
　また、一対の外装シート２０，３０のうち一方は接着層を有していなくてもよい。例えば、外装シート２０が接着層２２を有していなくても、外装シート３０の接着層３２によって一対の外装シート２０，３０を貼り合わすことができる。 Further, one of the pair of exterior sheets 20 and 30 does not have to have an adhesive layer. For example, even if the exterior sheet 20 does not have the adhesive layer 22, the pair of exterior sheets 20 and 30 can be bonded together by the adhesive layer 32 of the exterior sheet 30.
　また、例えば、図７に示すように、一対の外装シート２０は、導電体層２５を有していてもよく、外装シート３０は、導電体層３５を有していてもよい。なお、図７は、本発明の変形例に係る圧電同軸センサ１を図４と同様の視点で示す図である。図７に示すように、本変形例では、外装シート２０は、基材層２１と接着層２２との間に導電体層２５を有する。この導電体層２５としては、導体であれば特に制限されないが、例えば、金属箔、基材層２１の接着層２２側の面上に蒸着される金属蒸着膜等を挙げることができる。このような金属としては、例えば、銅、アルミニウム等が挙げられる。また、外装シート３０は、基材層３１と接着層３２との間に導電体層３５を有する。この導電体層３５としては、導体であれば特に制限されないが、例えば、導電体層２５と同様のものを挙げることができる。このように、外装シート２０，３０が導電体層２５，３５を有することで、導電体層２５，３５がシールド層として作用し、導電体層２５，３５を有さない場合と比べて、外部の電磁場等の影響がセンサ本体１０の中心導体１１や第１外部導体１３に届くことを抑制することができる。このため、本変形例の圧電同軸センサ１は、外部の電磁場等により、中心導体１１や第１外部導体１３にノイズが重畳することを抑制し得、被測定物の変形や被測定物に加わる力、振動等をより適切に検出し得る。なお、基材層２１，３１が導電体層２５，３５とされてもよく、この場合、例えば、基材層２１，３１が金属箔とされる。また、外部の電磁場等の影響がセンサ本体１０の中心導体１１や第１外部導体１３に届くことを抑制する観点では、一対の外装シート２０，３０のうち一方が導電体層を有していればよく、外装シート２０，３０の一方が導電体層を有していなくてもよい。 Further, for example, as shown in FIG. 7, the pair of exterior sheets 20 may have the conductor layer 25, and the exterior sheet 30 may have the conductor layer 35. Note that FIG. 7 is a diagram showing the piezoelectric coaxial sensor 1 according to the modified example of the present invention from the same viewpoint as in FIG. As shown in FIG. 7, in this modification, the exterior sheet 20 has a conductor layer 25 between the base material layer 21 and the adhesive layer 22. The conductor layer 25 is not particularly limited as long as it is a conductor, and examples thereof include a metal foil and a metal vapor-deposited film deposited on the surface of the base material layer 21 on the adhesive layer 22 side. Examples of such a metal include copper, aluminum and the like. Further, the exterior sheet 30 has a conductor layer 35 between the base material layer 31 and the adhesive layer 32. The conductor layer 35 is not particularly limited as long as it is a conductor, and examples thereof include the same conductor layer 25 as the conductor layer 25. As described above, since the exterior sheets 20 and 30 have the conductor layers 25 and 35, the conductor layers 25 and 35 act as a shield layer, and the external surface is compared with the case where the conductor layers 25 and 35 are not provided. It is possible to suppress the influence of the electromagnetic field and the like from reaching the central conductor 11 and the first outer conductor 13 of the sensor body 10. Therefore, the piezoelectric coaxial sensor 1 of this modified example can suppress noise from being superimposed on the central conductor 11 and the first external conductor 13 due to an external electromagnetic field or the like, and is added to the deformation of the object to be measured and the object to be measured. Force, vibration, etc. can be detected more appropriately. The base material layers 21 and 31 may be the conductor layers 25 and 35, and in this case, for example, the base material layers 21 and 31 are metal foils. Further, from the viewpoint of suppressing the influence of an external electromagnetic field or the like from reaching the central conductor 11 or the first outer conductor 13 of the sensor body 10, one of the pair of exterior sheets 20 and 30 has a conductor layer. It suffices that one of the exterior sheets 20 and 30 does not have a conductor layer.
　また、上記実施形態では、センサ本体１０うちコネクタ５０の内部空間に収容されていない部位の全体を囲う一対の外装シート２０，３０を例に説明した。しかし、一対の外装シート２０，３０は、センサ本体１０の少なくとも一部を囲っていればよい。例えば、一対の外装シート２０，３０は、センサ本体１０うちコネクタ５０側の部位を囲っていなくてもよい。また、一対の外装シート２０，３０は、センサ本体１０の長手方向においてセンサ本体１０の一端１０Ｅよりセンサ本体１０の他方の端側と反対側まで延在していなくてもよい。この場合、センサ本体１０の一端１０Ｅを含む部位は、一対の外装シート２０，３０によって囲まれないため、例えば、樹脂等によって囲まれることが好ましい。 Further, in the above embodiment, a pair of exterior sheets 20 and 30 that surround the entire portion of the sensor body 10 that is not housed in the internal space of the connector 50 will be described as an example. However, the pair of exterior sheets 20 and 30 may surround at least a part of the sensor main body 10. For example, the pair of exterior sheets 20 and 30 do not have to surround the portion of the sensor body 10 on the connector 50 side. Further, the pair of exterior sheets 20 and 30 do not have to extend from one end 10E of the sensor body 10 to the side opposite to the other end side of the sensor body 10 in the longitudinal direction of the sensor body 10. In this case, since the portion including one end 10E of the sensor main body 10 is not surrounded by the pair of exterior sheets 20 and 30, it is preferable that the portion is surrounded by, for example, resin or the like.
　また、上記実施形態では、中心導体１１、高分子圧電体層１２、第１外部導体１３、第１ジャケット層１４、第２外部導体１５、及び第２ジャケット層１６を備えるセンサ本体１０を例に説明した。しかし、センサ本体１０は、線状の中心導体、中心導体の外周面を被覆する高分子圧電体層、及び高分子圧電体層の外周面を囲う外部導体を有するセンサ部と、センサ部の外周面を囲うように巻かれて接着層により当該接着層の接する部材に接着されるテープ状のフィルムを有する少なくとも１つのジャケット層とを含んでいればよい。例えば、センサ本体１０は、第１ジャケット層１４及び第２外部導体１５を有していなくてもよく、この場合、センサ部Ｓの外周面は、第２ジャケット層１６によって被覆される。 Further, in the above embodiment, the sensor main body 10 including the central conductor 11, the polymer piezoelectric layer 12, the first outer conductor 13, the first jacket layer 14, the second outer conductor 15, and the second jacket layer 16 is taken as an example. explained. However, the sensor body 10 has a linear center conductor, a polymer piezoelectric layer that covers the outer peripheral surface of the central conductor, and a sensor portion that has an outer conductor that surrounds the outer peripheral surface of the polymer piezoelectric layer, and an outer circumference of the sensor portion. It may include at least one jacket layer having a tape-like film that is wound around a surface and adhered to a member in contact with the adhesive layer by an adhesive layer. For example, the sensor body 10 does not have to have the first jacket layer 14 and the second outer conductor 15, and in this case, the outer peripheral surface of the sensor portion S is covered with the second jacket layer 16.
　以上説明したように、本発明によれば、厚さを薄くしつつ耐薬品性を向上し得る圧電同軸センサが提供され、機器の測定等の分野で利用することが期待される。

  As described above, according to the present invention, a piezoelectric coaxial sensor capable of improving chemical resistance while reducing the thickness is provided, and is expected to be used in fields such as measurement of equipment.

Claims (7)

  1. 　線状の中心導体、前記中心導体の外周面を被覆する高分子圧電体層、及び前記高分子圧電体層の外周面を囲う外部導体を有するセンサ部と、前記センサ部の外周面を囲うように巻かれて接着層により当該接着層の接する部材に接着されるテープ状のフィルムを有する少なくとも１つのジャケット層とを含むセンサ本体と、
    　一対の外装シートと、
    を備え、
    　前記一対の外装シートの少なくとも一方は、一方の主面側に接着層を有し、
    　前記一対の外装シートは、前記一方の主面側が互いに向かい合って前記センサ本体の少なくとも一部を挟み込むとともに、当該外装シートの前記接着層によって貼り合わされ、前記センサ本体の少なくとも一部における外周面を囲う
    ことを特徴とする圧電同軸センサ。     A sensor unit having a linear central conductor, a polymer piezoelectric layer covering the outer peripheral surface of the center conductor, and an outer conductor surrounding the outer peripheral surface of the polymer piezoelectric layer, and an outer peripheral surface of the sensor unit. A sensor body including at least one jacket layer having a tape-like film that is wound around and adhered to a member in contact with the adhesive layer by an adhesive layer.
    A pair of exterior seats and
    With
    At least one of the pair of exterior sheets has an adhesive layer on one main surface side.
    The pair of exterior sheets have one main surface side facing each other to sandwich at least a part of the sensor body, and are bonded by the adhesive layer of the exterior sheet to surround the outer peripheral surface of at least a part of the sensor body. A piezoelectric coaxial sensor characterized by this.
  2. 　前記一対の外装シートは、前記センサ本体の一端を基準とする前記センサ本体の他端側と反対側まで延在し、
    　前記一対の外装シートが貼り合わされる方向に沿って見る場合に、前記一対の外装シートのうち、前記センサ本体の長手方向と垂直な方向に当該センサ本体を挟む一対の領域の少なくとも一部と、前記センサ本体の前記一端を基準とする前記センサ本体の前記他端側と反対側の領域の少なくとも一部とが連続して貼り合わされる
    ことを特徴とする請求項１に記載の圧電同軸センサ。     The pair of exterior sheets extend to the side opposite to the other end side of the sensor body with respect to one end of the sensor body.
    When viewed along the direction in which the pair of exterior sheets are bonded together, at least a part of the pair of exterior sheets that sandwich the sensor body in a direction perpendicular to the longitudinal direction of the sensor body. The piezoelectric coaxial sensor according to claim 1, wherein at least a part of a region opposite to the other end side of the sensor body is continuously bonded to the one end of the sensor body as a reference.
  3. 　一方の前記外装シートの可撓性は、他方の前記外装シートの可撓性より低い
    ことを特徴とする請求項１または２に記載の圧電同軸センサ。     The piezoelectric coaxial sensor according to claim 1 or 2, wherein the flexibility of one of the exterior sheets is lower than the flexibility of the other exterior sheet.
  4. 　前記一対の外装シートのそれぞれは、前記一方の主面側に前記接着層を有する
    ことを特徴とする請求項１から３のいずれか１項に記載の圧電同軸センサ。     The piezoelectric coaxial sensor according to any one of claims 1 to 3, wherein each of the pair of exterior sheets has the adhesive layer on one of the main surface sides.
  5. 　前記一対の外装シートの少なくとも一方は、導電体層を有する
    ことを特徴とする請求項１から４のいずれか１項に記載の圧電同軸センサ。     The piezoelectric coaxial sensor according to any one of claims 1 to 4, wherein at least one of the pair of exterior sheets has a conductor layer.
  6. 　一方の前記外装シートは、一方の面上に前記接着層が設けられる基材層と、前記基材層の他方の面上に設けられる粘着層と、前記粘着層の前記基材層側と反対側の面を被覆する剥離シートとを有する
    ことを特徴とする請求項１から５のいずれか１項に記載の圧電同軸センサ。     One of the exterior sheets has a base material layer having the adhesive layer provided on one surface, an adhesive layer provided on the other surface of the base material layer, and the adhesive layer opposite to the base material layer side. The piezoelectric coaxial sensor according to any one of claims 1 to 5, further comprising a release sheet that covers a side surface.
  7. 　前記外装シートの前記接着層は、シリコーン系粘着剤から成る
    ことを特徴とする請求項１から６のいずれか１項に記載の圧電同軸センサ。

          The piezoelectric coaxial sensor according to any one of claims 1 to 6, wherein the adhesive layer of the exterior sheet is made of a silicone-based pressure-sensitive adhesive.
PCT/JP2021/008068 2020-03-09 2021-03-03 Piezoelectric coaxial sensor WO2021182209A1 (en)

Applications Claiming Priority (2)

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JP2020-040228 2020-03-09
JP2020040228 2020-03-09

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004119240A (en) * 2002-09-27 2004-04-15 Totoku Electric Co Ltd Flexible high-frequency coaxial cable
JP2007273478A (en) * 1994-09-13 2007-10-18 W L Gore & Assoc Inc Jacket material for protection of electrical conductor
JP2009004225A (en) * 2007-06-21 2009-01-08 Nitto Denko Corp Manufacturing method of binding coaxial cable with connector
JP2015069264A (en) * 2013-09-27 2015-04-13 株式会社村田製作所 Pressing force detection sensor and touch input device
JP2018182009A (en) * 2017-04-10 2018-11-15 三井化学株式会社 Piezoelectric substrate, force sensor, and actuator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273478A (en) * 1994-09-13 2007-10-18 W L Gore & Assoc Inc Jacket material for protection of electrical conductor
JP2004119240A (en) * 2002-09-27 2004-04-15 Totoku Electric Co Ltd Flexible high-frequency coaxial cable
JP2009004225A (en) * 2007-06-21 2009-01-08 Nitto Denko Corp Manufacturing method of binding coaxial cable with connector
JP2015069264A (en) * 2013-09-27 2015-04-13 株式会社村田製作所 Pressing force detection sensor and touch input device
JP2018182009A (en) * 2017-04-10 2018-11-15 三井化学株式会社 Piezoelectric substrate, force sensor, and actuator

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