JP5111071B2

JP5111071B2 - Piezoelectric sensor

Info

Publication number: JP5111071B2
Application number: JP2007301400A
Authority: JP
Inventors: 隆一須藤; 信宏森山; 智幸小川
Original assignee: Kureha Corp
Current assignee: Kureha Corp
Priority date: 2007-09-05
Filing date: 2007-11-21
Publication date: 2012-12-26
Anticipated expiration: 2027-11-21
Also published as: JP2009080090A

Description

本発明は、圧電センサに関する。特に、圧電体として高分子圧電フィルムを用い、圧電体の一辺が数センチメートル程度の比較的大きな形状のものや、複数の圧電体を実装したものに好適で、高信頼、高効率な特性を実現できる圧電センサに関する。 The present invention relates to a piezoelectric sensor. In particular, it uses polymer piezoelectric film as a piezoelectric body and is suitable for a relatively large shape with one side of a few centimeters or a plurality of piezoelectric bodies mounted, and has high reliability and high efficiency. The present invention relates to a piezoelectric sensor that can be realized.

ポリフッ化ビニリデン（ＰＶＤＦ）等の高分子圧電材料は、セラミック材料を用いた圧電体より、電圧出力係数が大きく、フィルム状にでき柔軟性に富み加工しやすいので、近年、音響センサや圧力センサをはじめとして広く用いられるようになっている（例えば、特許文献１）。また、最近では、車両等の大型物に装着される用途を中心に、従来のセンサに比べて大型のものや、圧力センサを多数実装して一体化し、圧力分布を計測できるようにしたものが要求されるようになっている。
特開平７−１６０２６５号公報（図１、図２、段落００１２及び００１３） Polymer piezoelectric materials such as polyvinylidene fluoride (PVDF) have a larger voltage output coefficient than piezoelectric materials using ceramic materials, and can be made into a film that is flexible and easy to process. It has come to be widely used at the beginning (for example, Patent Document 1). Also, recently, mainly for applications that are mounted on large objects such as vehicles, there are those that are larger than conventional sensors and those that have many pressure sensors mounted and integrated so that pressure distribution can be measured. It has come to be required.
JP-A-7-160265 (FIGS. 1, 2, paragraphs 0012 and 0013)

図９に、このような圧電体センサの従来の例を図示する。図９（ａ）は、圧電体センサの断面図である。図９（ｂ）は図９（ａ）のＡ−Ａ’破断面を上から見た図である。尚、図９（ａ）は、図９（ｂ）のｂ−ｂ’破断面を示している。図９（ｂ）のように、複数の高分子圧電体５１_１〜５１_３が実装され、各々の部分に加えられる応力を各々検出するようになっている。図９（ａ）のように、フィルム状の高分子圧電体５１がシグナル電極５２とグランド電極５３によってサンドイッチ状に挟まれた構造であり、高分子圧電体５１とシグナル電極５２、グランド電極５３は、各々接着層５６，５７を用いて貼り合わされている。外力Ｔにより高分子圧電体５１で発生した電圧は電極配線ライン５９を介して外部に出力されるように構成されている。 FIG. 9 shows a conventional example of such a piezoelectric sensor. FIG. 9A is a cross-sectional view of the piezoelectric sensor. FIG.9 (b) is the figure which looked at the AA 'fracture surface of Fig.9 (a) from the top. FIG. 9A shows a bb ′ fracture surface of FIG. 9B. As shown in FIG. 9B, a plurality of polymer piezoelectric bodies 51 _{1 to} 51 ₃ are mounted to detect the stress applied to each portion. As shown in FIG. 9A, a film-shaped polymer piezoelectric body 51 is sandwiched between a signal electrode 52 and a ground electrode 53. The polymer piezoelectric body 51, the signal electrode 52, and the ground electrode 53 are Are bonded using adhesive layers 56 and 57, respectively. The voltage generated in the polymer piezoelectric body 51 by the external force T is configured to be output to the outside through the electrode wiring line 59.

従来、接着層５６，５７としては、製作の容易性より両面接着テープが用いられることが多かった。この時、図９（ａ）のように、圧電体と基材５４，５５の接着部分と、圧電体装着部分以外の基材５４と基材５５の接着部分の接着層の厚さはほぼ同一のものが用いられ、圧電体の縁端部分で空気層を含む未接着部分５８が残る。このような未接着部分５８は製造後、経時変化により拡大することがあった。特に、現在の高分子圧電体素子５１はフッ素系の高分子が多く、接着剤の種類も限定され、接着強度も比較的得られにくかったため、未接着部分５８が残ることが多く問題となっていた。また、圧電センサの用途によっては圧電センサを曲げて使用することもあり、未接着部分５８が圧電体部分の剥離の原因となり信頼性低下の一因となっていた。更に、両面テープなどに用いられる粘着剤は経年変化により弾性率が変化するため圧電センサの圧力感度の経年変化にも影響がある。このことも圧電センサの信頼性低下の要因の一つでもあった。 Conventionally, as the adhesive layers 56 and 57, a double-sided adhesive tape is often used because of ease of manufacture. At this time, as shown in FIG. 9A, the thickness of the adhesive layer between the piezoelectric material and the base materials 54 and 55 and the adhesive layer between the base material 54 and the base material 55 other than the piezoelectric material mounting portion are substantially the same. And an unbonded portion 58 including an air layer remains at the edge portion of the piezoelectric body. Such an unbonded portion 58 may expand due to a change with time after manufacture. In particular, the present polymer piezoelectric element 51 has many fluorine-based polymers, the types of adhesives are limited, and the adhesive strength is relatively difficult to obtain. It was. Also, depending on the application of the piezoelectric sensor, the piezoelectric sensor may be bent and used, and the unbonded portion 58 causes peeling of the piezoelectric body portion, which causes a decrease in reliability. Furthermore, since the elastic modulus of the pressure-sensitive adhesive used for the double-sided tape changes with time, it also affects the change with time of the pressure sensitivity of the piezoelectric sensor. This was also one of the causes of the decrease in the reliability of the piezoelectric sensor.

更に、図９（ｃ）に示すように、高分子圧電体５１の出力電圧Ｖ_ｐｚは外部負荷Ｒ_Ｌに対して、接着層５６，５７で形成される静電容量Ｃ_ｓ１，Ｃ_ｓ２が直列に接続され、更に、高分子圧電体５１が挿入された以外の部分（例えば、図の６０の部分）は電極配線ライン等とグランド電極が近づき、電気的には、外部負荷Ｒ_Ｌに静電容量Ｃ_ｐが並列に接続された形になる。このような場合、浮遊静電容量Ｃ_ｓ１，Ｃ_ｓ２、及びＣ_ｐのため圧電体で発生した電圧は分圧されるので接着層の厚さが出力効率に影響する。図９（ａ）の従来の接着層を用いた場合では、Ｃ_ｓ１，Ｃ_ｓ２、及びＣ_ｐを形成する誘電体としての接着層の厚さが同程度となる。この場合、接着層の厚さを薄くするとＣ_ｓ１，Ｃ_ｓ２の値が大きくなり、その部分の電圧低下への影響は小さくできるが、同時にＣ_ｐの値も大きくなる。又、接着層の厚さを厚くすると、Ｃ_ｐの値は小さくできるがＣ_ｓ１，Ｃ_ｓ２の値が小さくなる。即ち、Ｃ_ｐとＣ_ｓ１，Ｃ_ｓ２は出力電圧低下に関しては互いに相反する関係にあり検知出力を効率よく外部に出力できないという問題があった。 Further, as shown in FIG. 9C, the output voltage V _pz of the polymer piezoelectric body 51 is composed of the capacitances C _s1 and C _s2 formed in the adhesive layers 56 and 57 in series with the external load _RL . Further, the portion other than the polymer piezoelectric body 51 inserted (for example, the portion 60 in the figure) is close to the electrode wiring line and the ground electrode, and is electrically electrostatically connected to the external load _RL. The capacitor C _p is connected in parallel. In such a case, the voltage generated in the piezoelectric body is divided because of the stray capacitances C _s1 , C _s2 , and C _p , so the thickness of the adhesive layer affects the output efficiency. In the case of using the conventional adhesive layer of FIG. 9A, the thickness of the adhesive layer as a dielectric forming C _s1 , C _s2 , and C _p is approximately the same. In this case, the value of the thickness thinning the C _s1, C _s2 of the adhesive layer is increased, it can be reduced the influence of the voltage drop in that portion, the greater the value of the time C _p. Further, when the thickness of the adhesive layer is increased, the value of C _p can be decreased, but the values of C _s1 and C _s2 are decreased. That is, C _p and C _s1 and C _s2 are in a mutually contradictory relationship with respect to the output voltage drop, and there is a problem that the detection output cannot be efficiently output to the outside.

従って、本発明は、上記従来の圧電センサの問題点を解決するもので、基材の貼り合わせ時の空気の混入を防止して高信頼な特性を実現し、配線ライン等の浮遊静電容量の影響を抑えて高感度な特性を実現することを目的とする。 Accordingly, the present invention solves the problems of the above-described conventional piezoelectric sensor, prevents air from being mixed when the substrates are bonded together, achieves a highly reliable characteristic, and has a floating capacitance such as a wiring line. The purpose is to realize a highly sensitive characteristic while suppressing the influence of the above.

上記目的を達成するため、本発明の第１の態様としての圧電センサ、例えば、図１、図２、図１０、及び図１１に示すように、
加圧されることにより電位を生じる、第１の面ａ１と第１の面ａ１に対して表裏の関係にある第２の面ａ２を有する圧電体１と；
圧電体１の第１の面ａ１と対向するシグナル電極４をその一方の面ｇ１に有し、シグナル電極４を有する面ｇ１が圧電体１の第１の面ａ１に貼接されるように配設された第１の基材５と、圧電体１の第２の面ａ２と対向する第１のグランド電極７をその一方の面ｄ１に有し、第１のグランド電極７を有する面ｄ１が圧電体１の第２の面ａ２に貼接されるように配設された第２の基材８と、一方の面ｂ１が第１の基材５のシグナル電極４を有する面ｇ１に貼接し、他方の面ｂ２が第２の基材８の第１のグランド電極７を有する面ｄ１に貼接され、圧電体１が配設された部分以外（例えば、ｈ）に配設されたスペーサ部材６（６’）とを備える。 In order to achieve the above object, a piezoelectric sensor as a first aspect of the present invention, for example, as shown in FIG. 1, FIG. 2, FIG. 10, and FIG.
A piezoelectric body 1 having a first surface a1 and a second surface a2 in a front-back relationship with respect to the first surface a1, which generates a potential when pressed;
The signal electrode 4 facing the first surface a1 of the piezoelectric body 1 is provided on one surface g1, and the surface g1 having the signal electrode 4 is disposed so as to be adhered to the first surface a1 of the piezoelectric body 1. The first base 5 provided and the first ground electrode 7 facing the second surface a2 of the piezoelectric body 1 are provided on one surface d1, and the surface d1 having the first ground electrode 7 is provided. The second substrate 8 disposed so as to be bonded to the second surface a2 of the piezoelectric body 1 and one surface b1 are bonded to the surface g1 of the first substrate 5 having the signal electrode 4. The other surface b2 is bonded to the surface d1 of the second substrate 8 having the first ground electrode 7, and the spacer member is disposed at a portion other than the portion where the piezoelectric body 1 is disposed (for example, h). 6 (6 ′).

ここで、「電極を有する面」とは、図２（ａ）のｄ１のように、グランド電極７が第２の基材８に対して部分的に設けられている場合は、グランド電極７の部分及びグランド電極７が設けられていない面であって電極側の第２の基材８の面の双方を言う。
「貼接」とは、二つの部材が互いに貼り合わされていることをいい、その基材間に接着用の部材（接着材、接着剤）が挟まれている場合、二つの前記基材の何れかがそれ自身で接着性を有する場合、その面を接して当該部材が固定されている場合、も互いの関係は貼接されていると言う。
「対向する」とは、二つの面が略平行に置かれ、その面と垂直の方向から見たとき、これら二つの面（又は面上）の二つの形状が重なり合う状態を言う。尚、ここで、「重なり合う」とは、二つの形状のうち、一つの形状が他の形状より大きい場合を含む。また、一方が複数の形状からなる場合に他方の形状の一つが複数の形状をカバーする場合を含む。 Here, the “surface having an electrode” means that when the ground electrode 7 is partially provided with respect to the second substrate 8 as shown by d1 in FIG. It refers to both the surface where the portion and the ground electrode 7 are not provided and the surface of the second substrate 8 on the electrode side.
“Adhesion” means that two members are bonded to each other, and when an adhesive member (adhesive, adhesive) is sandwiched between the substrates, If the member itself has adhesiveness, it is said that the relationship is also adhered when the member is fixed in contact with the surface.
The term “opposite” refers to a state in which two surfaces are placed substantially in parallel and two shapes of these two surfaces (or on the surface) overlap when viewed from a direction perpendicular to the surfaces. Here, “overlapping” includes the case where one of two shapes is larger than the other. Moreover, when one side consists of a some shape, the case where one of the other shapes covers a some shape is included.

このように構成すると、スペーサ部材６を別個に設けているので、その厚みを各々最適なものに選ぶことができ、例えば、図２のように、圧電体１と第１及び第２の基材５，８を貼接する接着材２，３の厚さを薄く、スペーサ部材６の厚さを厚くすることができるので、図９（ｃ）のＣ_ｓ１、Ｃ_ｓ２を大きく、Ｃ_ｐを小さくすることができ、圧電体１で発生した電圧を効率良く外部に出力することができる。また、図２（ａ）、（ｂ）に示すように、図９（ｂ）のような未接着部分５８が生じないので高信頼な圧電センサを実現できる。 If comprised in this way, since the spacer member 6 is provided separately, the thickness can each be chosen as an optimal thing, for example, as shown in FIG. 2, the piezoelectric material 1 and the 1st and 2nd base material Since the thicknesses of the adhesives 2 and 3 for attaching 5 and 8 can be reduced and the thickness of the spacer member 6 can be increased, C _s1 and C _s2 in FIG. 9C are increased and C _p is decreased. Therefore, the voltage generated in the piezoelectric body 1 can be efficiently output to the outside. Further, as shown in FIGS. 2A and 2B, the non-bonded portion 58 as shown in FIG. 9B does not occur, so that a highly reliable piezoelectric sensor can be realized.

更に、前記目的を達成するため、本発明の第２の態様としての圧電センサは、本発明の第１の態様において、例えば、図１０及び図１１に示すように、圧電体１の第１の面１ａと第１の基材５のシグナル電極４を有する面ｇ１を貼接し、更に、スペーサ部材６’の一方の面ｂ１と第１の基材５のシグナル電極４を有する面ｇ１を貼接する、第１の接着材２’’と、圧電体１の第２の面ａ２と第２の基材８のグランド電極７を有する面ｄ１を貼接し、更に、スペーサ部材６’の他方の面ｂ２と第２の基材８のグランド電極７を有する面ｄ１を貼接する第２の接着材３とを備え、スペーサ部材６’には、圧電体１を収納する収納窓ｈが形成されている。 Furthermore, in order to achieve the above object, the piezoelectric sensor according to the second aspect of the present invention is the first aspect of the present invention. For example, as shown in FIGS. The surface g1 having the signal electrode 4 of the first base material 5 and the surface g1 of the first base material 5 are adhered, and further, the one surface b1 of the spacer member 6 ′ and the surface g1 of the first base material 5 having the signal electrode 4 are adhered. The first adhesive material 2 ″, the second surface a2 of the piezoelectric body 1 and the surface d1 of the second base material 8 having the ground electrode 7 are adhered, and the other surface b2 of the spacer member 6 ′ is further bonded. And a second adhesive 3 for adhering the surface d1 having the ground electrode 7 of the second base material 8, and a housing window h for housing the piezoelectric body 1 is formed in the spacer member 6 '.

ここで、「接着材」は、その接着性により二つの部材を固定する定形な部材を言う。尚、本明細書では、「接着剤」は複数の部材を固定するための不定形の物質を言う。接着剤を一定の形状に成形したものは「接着材」である。尚、接着性の無い部材であっても表面に接着剤が塗布され他の部材と貼接されるものも本明細書では接着材である。 Here, the “adhesive” refers to a fixed member that fixes two members by their adhesiveness. In the present specification, “adhesive” refers to an indeterminate material for fixing a plurality of members. A product obtained by molding an adhesive into a certain shape is an “adhesive”. In addition, even in the case of a non-adhesive member, an adhesive is applied to the surface and adhered to another member as an adhesive in this specification.

このように構成すると、圧電体１及びスペーサ部材６’が第１及び第２の接着材２，３で第１及び第２の基材５，８と貼接されるため、スペーサ部材６’として接着材以外の任意の絶縁体を使用することが出来る上、第１の接着材２’’、第２の接着材３’’の材質を、圧電体１、スペーサ部材６’、基材５，８に適した材質を使用することができるため材質の選択の余地が広がる。 If comprised in this way, since the piezoelectric material 1 and spacer member 6 'are bonded with the 1st and 2nd base materials 5 and 8 with the 1st and 2nd adhesive materials 2 and 3, as spacer member 6'. Arbitrary insulators other than the adhesive can be used, and the materials of the first adhesive 2 ″ and the second adhesive 3 ″ are the piezoelectric body 1, the spacer member 6 ′, the base material 5, and the like. Since the material suitable for 8 can be used, the room for selection of a material spreads.

また、前記第２の態様において、本発明の第３の態様としての圧電センサは、例えば、図１０及び図１１に示すように、スペーサ部材６’の一方の面ｂ１、及び圧電体１の第１の面ａ１の全体が、前記第１の接着材２’’を介して、第１の基材５のシグナル電極４を有する面ｇ１と貼接し、スペーサ部材６’の他方の面ｂ２、及び圧電体１の第２の面ａ２の全体が、第２の接着材３’’を介して、第２の基材８のグランド電極を有する面ｄ１と貼接されている。 In the second aspect, the piezoelectric sensor according to the third aspect of the present invention includes, for example, one surface b1 of the spacer member 6 ′ and the first of the piezoelectric body 1, as shown in FIGS. The entire surface a1 of the first member is bonded to the surface g1 of the first base member 5 having the signal electrode 4 through the first adhesive 2 '', and the other surface b2 of the spacer member 6 ', and The entire second surface a2 of the piezoelectric body 1 is bonded to the surface d1 having the ground electrode of the second base material 8 through the second adhesive 3 ''.

このように構成すると、スペーサ部材６’及び圧電体１がその全面に渡って、一体の接着材２’’、３’’で固定されるため、圧電体１の温度等による収縮の影響を減少することが出来、高信頼な圧電センサを実現することができる。 With this configuration, the spacer member 6 ′ and the piezoelectric body 1 are fixed over the entire surface with the integral adhesives 2 ″ and 3 ″, thereby reducing the influence of contraction due to the temperature of the piezoelectric body 1 and the like. Therefore, a highly reliable piezoelectric sensor can be realized.

前記目的を達成するため、本発明の第４の態様としての圧電センサは、本発明の第３の態様において、例えば、図１３（図１２）に示すように、第１の接着材２’’（図１０参照）が、圧電体１の第１の面ａ１と第１の基材５のシグナル電極４を有する面ｇ１を貼接する第１Ａの接着材２’と、スペーサ部材６’の収納窓（ｈ_１、ｈ_２、ｈ_ｎ）に重なる収納窓（ｈ_１ａ、ｈ_２ａ、ｈ_ｎａ）を有する第１Ａの接着材２’とは別体の第１Ｂの接着材２’’’を含んで構成される。尚、図１３（図１２）には、第２の接着材３’’（図１０参照）として、第２の接着材３’’が第２Ａの接着材３’と第２Ｂの接着材３’’’を含む形態が示されているが、本態様ではこれに限定されない。 In order to achieve the above object, a piezoelectric sensor according to a fourth aspect of the present invention is the same as that of the third aspect of the present invention, for example, as shown in FIG. (Refer to FIG. 10) is a first A adhesive material 2 ′ for bonding the first surface a1 of the piezoelectric body 1 and the surface g1 of the first substrate 5 having the signal electrode 4, and a storage window for the spacer member 6 ′. _Including 1B adhesive 2 ′ ″ separate from 1A adhesive 2 ′ having storage windows (h _1a , h _2a , h _na ) overlapping (h ₁ , h ₂ , h _n ) Composed. In FIG. 13 (FIG. 12), as the second adhesive material 3 ″ (see FIG. 10), the second adhesive material 3 ″ is composed of the second A adhesive material 3 ′ and the second B adhesive material 3 ′. Although a form including '' is shown, the present embodiment is not limited to this.

このように構成すると、スペーサ部材６’として接着材以外の任意の絶縁体を使用することが出来る上、接着材２’’’も任意の材質を使用することが出来るため材質の選択の余地が広がる。また、圧電体１の上下面ａ１に貼接される接着材２’を上記接着材２’’’と別個に選択することが出来るため、設計の自由度が向上する。 If comprised in this way, since arbitrary insulators other than an adhesive material can be used as spacer member 6 ', since adhesive material 2' '' can also use arbitrary materials, there is room for selection of a material. spread. In addition, since the adhesive 2 ′ adhered to the upper and lower surfaces a <b> 1 of the piezoelectric body 1 can be selected separately from the adhesive 2 ′ ″, the degree of freedom in design is improved.

前記目的を達成するため、本発明の第５の態様としての圧電センサは、例えば、図１０、図１１に示すように、本発明の第２の態様において第２の接着材３’’を導電性としたものである。又、図１２、図１３に示すように、本発明の第３の態様において第２の接着材３’を導電性としたものである。 In order to achieve the above object, a piezoelectric sensor according to a fifth aspect of the present invention conducts the second adhesive 3 '' in the second aspect of the present invention as shown in FIGS. It is a thing. In addition, as shown in FIGS. 12 and 13, in the third aspect of the present invention, the second adhesive 3 'is made conductive.

このように構成すると、図９（ｃ）で説明したＣ_ｓ２が無限大になったことと等価となり、Ｃ_ｓ２（更には、Ｃ_ｐに起因する）圧電体１の出力の損失を低下することができる。尚、ここではグランド電極７側に貼接される接着材３’、３’’について説明したがシグナル電極４側の接着材２’を導電性とすると、Ｃ_ｓ１を無限大とすることができ、同様の効果が得られる。但し、図１０のようにシグナル電極４側の接着材２’’が複数のシグナル電極４をカバーする場合は各電極を電気的に短絡することがあるので、このような構成は除外されることは明らかである。 With this configuration, it is equivalent to C _s2 described in FIG. 9 (c) becomes infinite, C _{s2 (further,} due to the C _p) lowering the losses in the output of the piezoelectric body 1 Can do. Here, the adhesives 3 ′ and 3 ″ adhered to the ground electrode 7 side have been described. However, if the adhesive 2 ′ on the signal electrode 4 side is conductive, C _s1 can be made infinite. A similar effect can be obtained. However, when the adhesive material 2 '' on the signal electrode 4 side covers a plurality of signal electrodes 4 as shown in FIG. 10, each electrode may be electrically short-circuited. Is clear.

前記目的を達成するため、本発明の第６の態様としての圧電センサは、本発明の第１の態様において、例えば、図１に示すように、圧電体１の第１の面ａ１と第１の基材５のシグナル電極４を有する面ｇ１を貼接する第１の接着材２とを備え、圧電体１の第２の面ａ２と第２の基材８のグランド電極７を有する面ｄ１を貼接する第２の接着材３と、スペーサ部材６は、それ自身が接着性を有すると共に、圧電体１を収納する収納窓ｈが形成されている。 In order to achieve the above object, a piezoelectric sensor according to a sixth aspect of the present invention is the same as that of the first aspect of the present invention, for example, as shown in FIG. A first adhesive 2 that adheres to the surface g1 of the base material 5 having the signal electrode 4 and a surface d1 of the piezoelectric body 1 having the ground electrode 7 and the second surface a2 of the second base material 8. The second adhesive material 3 and the spacer member 6 to be adhered have an adhesive property, and a storage window h for storing the piezoelectric body 1 is formed.

このように構成すると、圧電体１が実装される部分以外の部分に大きな隙間が無いようにすることが出来、図９（ａ）のような未接着部分５８が生じないので、高信頼な圧電センサ１００を実現することができる。また、スペーサ部材６自身が接着材なので、スペーサ部材６と第１及び第２の基材５，８の貼接用に接着部材又は接着剤を必要とせず構造が簡単になる。 With this configuration, there is no large gap in the portion other than the portion where the piezoelectric body 1 is mounted, and the unbonded portion 58 as shown in FIG. The sensor 100 can be realized. Further, since the spacer member 6 itself is an adhesive, the structure is simplified without requiring an adhesive member or an adhesive for attaching the spacer member 6 to the first and second substrates 5 and 8.

前記目的を達成するため、本発明の第７の態様としての圧電センサは、本発明の第６の態様において、例えば、図２（ａ）に示すように、第１の接着材２が圧電体１の第１の面ａ１と同一の形状及び同一の面積であり、又は、第２の接着材３が圧電体１の第２の面ａ２と同一の形状及び同一の面積であり、圧電体１と共に、第１の接着材２、又は、第２の接着材３が収納窓ｈに収納されるように構成されるものである。 In order to achieve the above object, the piezoelectric sensor according to the seventh aspect of the present invention is the same as that of the sixth aspect of the present invention, for example, as shown in FIG. The first surface a1 has the same shape and the same area, or the second adhesive 3 has the same shape and the same area as the second surface a2 of the piezoelectric body 1, and the piezoelectric body 1 In addition, the first adhesive 2 or the second adhesive 3 is configured to be stored in the storage window h.

ここで、「同一の形状」、「同一の面積」とは、２つの形状が合同であることを言うが、厳密に合同でなく、互いに重なった関係である場合を含む。ここで、圧電体１の形状・大きさは、第１の接着材２又は第２の接着材３と略同じであり、各々の面の全部が互いに重なるようになっており、それらが合わされてスペーサ部材６の収納窓ｈの中に収納される。尚、収納されるのは第１又は第２の接着材２，３のいずれかであってもよいし、その両方であってもよい。従って、収納窓ｈの形状、面積、及び位置は、圧電体の形状、面積、位置に合わせて設ける。 Here, “the same shape” and “the same area” mean that the two shapes are congruent, but include the case where they are not strictly congruent and are in a mutually overlapping relationship. Here, the shape and size of the piezoelectric body 1 are substantially the same as those of the first adhesive material 2 or the second adhesive material 3, and all the surfaces are overlapped with each other. It is stored in the storage window h of the spacer member 6. In addition, either the 1st or 2nd adhesives 2 and 3 may be accommodated, or both may be accommodated. Therefore, the shape, area, and position of the storage window h are provided in accordance with the shape, area, and position of the piezoelectric body.

このように構成すると、図２（ａ）に示すように、図２（ｂ）のｃ１とｃ２の間の境界部分のような第１の接着材２と第２の接着材３によって生じる段差がなくなるので、未接着部分の形成を防止でき、高信頼な圧電センサを実現することができる。 If comprised in this way, as shown to Fig.2 (a), the level | step difference produced by the 1st adhesive material 2 and the 2nd adhesive material 3 like the boundary part between c1 and c2 of FIG.2 (b) will be shown. Therefore, the formation of an unbonded portion can be prevented, and a highly reliable piezoelectric sensor can be realized.

上記目的を達成するため、本発明の第８の態様としての圧電センサは、本発明の第６又は第７の態様において、例えば、図５に示すように、第１の接着材２、又は第２の接着材３が導電性であるものである。 In order to achieve the above object, the piezoelectric sensor according to the eighth aspect of the present invention is the same as that in the sixth or seventh aspect of the present invention, for example, as shown in FIG. 2 adhesive 3 is conductive.

このように構成すると、図９（ｃ）で説明したＣ_ｓ１、又はＣ_ｓ２の値が無限大になったことと等価となり、Ｃ_ｓ１、Ｃ_ｓ２（更には、Ｃ_ｐ）に起因する圧電体１の出力の損失を低下することができる。 Such a configuration is equivalent to the value of C _s1 or C _s2 described in FIG. 9C becoming infinite, and the piezoelectric body due to C _s1 and C _s2 (and C _p ). The loss of the output of 1 can be reduced.

上記目的を達成するため、本発明の第９の態様としての圧電センサは、例えば、図１０に示すように、本発明の第２乃至第５の態様において、第１の接着材２’’、第２の接着材３’’、又はスペーサ部材６’が、組み立て環境において非タック性を有する。又、本発明の第６乃至第８の態様において、例えば、図５に示すように、第１の接着材２’、第２の接着材３’、又はスペース部材６が、組み立て環境において非タック性を有する。 In order to achieve the above object, the piezoelectric sensor according to the ninth aspect of the present invention is, for example, as shown in FIG. 10, in the second to fifth aspects of the present invention, the first adhesive 2 '', The second adhesive 3 ″ or the spacer member 6 ′ has non-tackiness in the assembly environment. In the sixth to eighth aspects of the present invention, for example, as shown in FIG. 5, the first adhesive 2 ′, the second adhesive 3 ′, or the space member 6 is not tacked in the assembly environment. Have sex.

ここで、「非タック性」とは、全く接着性が無いか、他の部材に貼り付かない程度にその接着度が低いことを言う。 Here, “non-tackiness” means that there is no adhesion at all or the degree of adhesion is so low that it does not stick to other members.

このように構成すると、位置決め時に前記接着材が他の部材に貼り付くことがないので、圧電体１や接着材２（２’，２’’），３（３’，３’’），スペース部材６（６’）、基材５，８等の部材の位置決めを容易に実行することができる。 If comprised in this way, since the said adhesive material will not stick to another member at the time of positioning, the piezoelectric material 1, the adhesive materials 2 (2 ', 2' '), 3 (3', 3 ''), space Positioning of members such as the member 6 (6 ′) and the base materials 5 and 8 can be easily performed.

上記目的を達成するため、本発明の第１０の態様としての圧電センサは、本発明の第２乃至第９の態様において、例えば、図６に示すように、スペース部材６の収納窓ｈに収納される部材（圧電体１，第１の接着材２，第２の接着材３等）の厚さの合計が、スペース部材６の厚さより厚い。
ここで、厚さとは、各部材の貼り合わせ後の厚さであり、例えば、接着剤の硬化等による体積変化後の厚さである。 In order to achieve the above object, a piezoelectric sensor according to a tenth aspect of the present invention is housed in the housing window h of the space member 6 in the second to ninth aspects of the present invention, for example, as shown in FIG. The total thickness of the members (piezoelectric body 1, first adhesive 2, second adhesive 3, etc.) is greater than the thickness of the space member 6.
Here, the thickness is a thickness after bonding of the respective members, for example, a thickness after a volume change due to curing of the adhesive or the like.

このように構成すると、図６のように、部材が収納された部分ｈの上方ｉに高さｊの凸部を形成することができる。このようなものに図のような外力Ｔを加えた場合、応力が凸部ｉに集中して感度の高い圧電センサを実現できる。また、図１の１_１〜１_ｎのように圧電センサを多素子化した場合に各圧電体１_１〜１_ｎ素子部分に加わる力を分離して計測することができ場所的な応力分布を計測するのに好適となる。 If comprised in this way, the convex part of height j can be formed in the upper part i of the part h in which the member was accommodated like FIG. When an external force T as shown in the figure is applied to such an object, stress is concentrated on the convex part i, and a highly sensitive piezoelectric sensor can be realized. In addition, when the piezoelectric sensor is multi-elemented as shown in 1 ₁ to 1 _n in FIG. 1, the force applied to each piezoelectric body 1 ₁ to 1 _n element portion can be measured separately, and the local stress distribution can be measured. It is suitable for measurement.

上記目的を達成するため、本発明の第１１の態様としての圧電センサは、本発明の第１乃至第１０の態様において、例えば、図３又は図４に示すように、更に、第１の基材５’が、圧電体１の第１の面ａ１と対向する面ｇ１の裏面ｇ２に第２のグランド電極１０を有する。 In order to achieve the above object, a piezoelectric sensor according to an eleventh aspect of the present invention is the same as that in the first to tenth aspects of the present invention, as shown in FIG. 3 or FIG. The material 5 ′ has the second ground electrode 10 on the back surface g 2 of the surface g 1 facing the first surface a 1 of the piezoelectric body 1.

このように構成すると、圧電体１、シグナル電極４が二つのグランド電極７、１０で挟まれた構造となるので、電磁遮蔽効果が生じ外部雑音の影響を受けにくい特性を得ることができる。 With this configuration, since the piezoelectric body 1 and the signal electrode 4 are sandwiched between the two ground electrodes 7 and 10, an electromagnetic shielding effect is generated and characteristics that are not easily affected by external noise can be obtained.

上記目的を達成するため、本発明の第１２の態様としての圧電センサは、本発明の第１乃至第１１の態様において、例えば、図７、及び図８に示すように、シグナル電極４、グランド電極７、又は、それらの配線ライン１３に保護膜１１を設けたものである。
ここで保護膜１１は、第１の基材５’、及び第２の基材８の全面に設けてもよいし、部分的に設けてもよい。 In order to achieve the above object, the piezoelectric sensor according to the twelfth aspect of the present invention is the same as that of the first to eleventh aspects of the present invention, for example, as shown in FIGS. The protective film 11 is provided on the electrodes 7 or their wiring lines 13.
Here, the protective film 11 may be provided on the entire surface of the first base material 5 ′ and the second base material 8, or may be provided partially.

圧電体１の出力インピーダンスは非常に高いので、その電極間に湿気が入ると電極間の絶縁抵抗が低下し、圧電体１に抵抗が並列に接続された形となり圧電体の出力が低下する。従って、第１２の態様のように構成すると、圧電センサ５００の側面ｋ’（図８参照）から侵入する湿気を防ぐことができ、絶縁抵抗の低下による感度低下を軽減出来る。又、シグナル電極４の配線ライン１３_１〜１３_ｎ間の絶縁抵抗の低下を防止することができ、各圧電体１_１〜１_ｎの出力の他の配線ライン１３_１〜１３_ｎへの漏洩を防ぐことができる。更に、シグナル配線ライン１３などの微細な配線が圧電体の高温環境での長期使用により伸縮変形し、配線ラインが断線することを防止することができ、高信頼な圧電センサを実現することができる。 Since the output impedance of the piezoelectric body 1 is very high, when moisture enters between the electrodes, the insulation resistance between the electrodes decreases, and the resistance is connected to the piezoelectric body 1 in parallel, and the output of the piezoelectric body decreases. Accordingly, when configured as in the twelfth aspect, moisture entering from the side surface k ′ (see FIG. 8) of the piezoelectric sensor 500 can be prevented, and a decrease in sensitivity due to a decrease in insulation resistance can be reduced. In addition, it is possible to prevent the insulation resistance between the wiring lines 13 _{1 to} 13 _{n of} the signal electrode 4 from being lowered, and to prevent leakage of the outputs of the piezoelectric bodies 1 ₁ to 1 _n to the other wiring lines 13 _{1 to} 13 _n . Can be prevented. In addition, it is possible to prevent a fine wiring such as the signal wiring line 13 from expanding and contracting due to long-term use of the piezoelectric body in a high temperature environment, and disconnecting the wiring line, thereby realizing a highly reliable piezoelectric sensor. .

以下、図面を参照して、本発明の実施の形態について説明する。尚、各図において、互いに同一又は相当する部分には同一符号を付し，重複した説明は省略する。また、「５’」のように「ダッシュ」を付したものは、５の構成と大部分の構成は共通するが一部相違するものを含む意である。また、下付き数字は、同一の構成のものが複数ある場合個々を区別するものであるが、特に区別する必要が無いときは下付き文字を付けない場合がある。 Embodiments of the present invention will be described below with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals, and redundant description is omitted. In addition, “dash” such as “5 ′” means that the configuration of 5 is similar to the configuration of 5 but is partially different. In addition, subscript numbers are used to distinguish individual numbers when there are a plurality of components having the same configuration, but subscripts may not be added unless there is a particular need for distinction.

[第１の実施の形態]
まず、図１及び図２を参照して、本発明の実施の形態としての圧電センサ１００について説明する。図１は圧電センサ１００の組み立て構造図。図２は圧電センサ１００の長手方向に直交する面での断面図である。圧電センサ１００は、第１の面ａ１と第２の面ａ２を有する高分子圧電体としての板状の圧電体１と、圧電体１の第１の面ａ１に接して配置される板状の接着材２、第２の面ａ２に接して配置される板状の接着材３、シグナル電極４が圧電体１の第１の面ａ１に対向するようにその一方の面ｇ１に配設された第１の基材５、グランド電極７がその一方の面ｄ１に配設された第２の基材８、圧電体１（又は、更に第１及び第２の接着材２，３も含む）の配置される部分を除いて第１の基材５と第２の基材８の間の空間を充填するスペーサ部材６から成る。スペーサ部材６は熱可塑性を有することが望ましい。このようにして、圧電体１、第１の基材５、及び第２の基材８は、上下から適当な圧力をかけられ、第１の接着材２、第２の接着材３、及びスペーサ部材６により貼り合わされる。尚、圧電体１の検知電圧はシグナル電極４とグランド電極７の両端から出力される。 [First embodiment]
First, with reference to FIG.1 and FIG.2, the piezoelectric sensor 100 as embodiment of this invention is demonstrated. FIG. 1 is an assembly structure diagram of the piezoelectric sensor 100. FIG. 2 is a cross-sectional view taken along a plane orthogonal to the longitudinal direction of the piezoelectric sensor 100. The piezoelectric sensor 100 includes a plate-like piezoelectric body 1 as a polymer piezoelectric body having a first surface a1 and a second surface a2, and a plate-shaped piezoelectric member 1 disposed in contact with the first surface a1 of the piezoelectric body 1. The adhesive 2, the plate-like adhesive 3 disposed in contact with the second surface a 2, and the signal electrode 4 are disposed on one surface g 1 so as to face the first surface a 1 of the piezoelectric body 1. The first base material 5, the second base material 8 in which the ground electrode 7 is disposed on one surface d 1, and the piezoelectric body 1 (or further including the first and second adhesives 2 and 3). It consists of the spacer member 6 which fills the space between the 1st base material 5 and the 2nd base material 8 except the part arrange | positioned. The spacer member 6 desirably has thermoplasticity. In this way, the piezoelectric body 1, the first base material 5, and the second base material 8 are applied with appropriate pressure from above and below, and the first adhesive material 2, the second adhesive material 3, and the spacer The members 6 are bonded together. The detection voltage of the piezoelectric body 1 is output from both ends of the signal electrode 4 and the ground electrode 7.

図１の圧電体１_１〜１_ｎのように圧電体を複数個実装して多素子化する場合は、検出したい外力の位置に対応した位置に応じて圧電体１_１〜１_ｎを配置する。シグナル電極４_１〜４_ｎは圧電体１の配置に対応して設けられる。各々のシグナル電極４_１〜４_ｎに配線ラインとして１３_１〜１３_ｎを設け、グランド電極７に電極引き出し用の配線ライン１４を設ける。 If you multiple element by being a plurality mounting the piezoelectric material as the piezoelectric 1 ₁ to 1 _n in Figure 1, placing a piezoelectric 1 ₁ to 1 _n according to corresponding to the position of desired to detect external force position . The signal electrodes 4 ₁ to 4 _n are provided corresponding to the arrangement of the piezoelectric body 1. Each of the signal electrodes 4 ₁ to 4 _n is provided with 13 _{1 to} 13 _n as wiring lines, and the ground electrode 7 is provided with a wiring line 14 for drawing out electrodes.

図２（ａ）は、圧電センサ１００が貼り合わされた後の図１の長手方向に直交する面を断面とする断面図である。図のように圧電体１の第１の面ａ１側にシグナル電極４が配置され、圧電体１とシグナル電極４の間に接着材２が挟み込まれている。シグナル電極４と第１の接着材２の形状・大きさは好ましくは第１の面ａ１と略同じであり、第１の面ａ１の直下に配置されている。圧電体１の第２の面ａ２側には、グランド電極７が配置され、それらの間には第２の接着材３が挟み込まれている。第２の接着材の形状・大きさは第２の面ａ２と略同じであり、第２の面の直上に配置される。グランド電極７はグランド電位を一定に保つために出来るだけ大きな面積である方がよい。従って、典型的には、グランド電極７は第２の面を出来るだけ広くカバーするようにした方がよく、第２の基材８の面の殆ど全部を占めるようにしてもよい。スペーサ部材６は第１の基材５と第２の基材８（圧電体１の直上以外の部分ではグランドの電極７を含む）の間に充填するように配置される。第１の接着材２、第２の接着材３、スペーサ部材６は可塑性を有し、加圧・加熱等の貼りあわせ工程により、それぞれ変形するので、図２（ａ）に示すように互いに多少の段差や隙間に入りこみ空気層や未接着部分が無くなるようになる。
尚、本実施の形態では、シグナル電極４と第１の接着材２の形状が略同じ場合について説明したが、その大きさは互いに異なっていてもよい。 FIG. 2A is a cross-sectional view with a cross section taken along a plane orthogonal to the longitudinal direction of FIG. 1 after the piezoelectric sensor 100 is bonded. As shown in the figure, the signal electrode 4 is disposed on the first surface a 1 side of the piezoelectric body 1, and the adhesive 2 is sandwiched between the piezoelectric body 1 and the signal electrode 4. The shape and size of the signal electrode 4 and the first adhesive material 2 are preferably substantially the same as those of the first surface a1, and are disposed immediately below the first surface a1. A ground electrode 7 is arranged on the second surface a2 side of the piezoelectric body 1, and a second adhesive 3 is sandwiched between them. The shape and size of the second adhesive material are substantially the same as those of the second surface a2, and are disposed immediately above the second surface. The ground electrode 7 should have an area as large as possible in order to keep the ground potential constant. Therefore, typically, the ground electrode 7 should cover the second surface as much as possible, and may occupy almost the entire surface of the second substrate 8. The spacer member 6 is disposed so as to be filled between the first base material 5 and the second base material 8 (including the ground electrode 7 in a portion other than directly above the piezoelectric body 1). The first adhesive 2, the second adhesive 3, and the spacer member 6 have plasticity and are deformed by a bonding process such as pressurization and heating, respectively. Therefore, as shown in FIG. The air layer and the non-bonded part are eliminated.
In the present embodiment, the case where the shape of the signal electrode 4 and the first adhesive material 2 is substantially the same has been described, but the sizes thereof may be different from each other.

図２（ｂ）は、第１の接着材２及び第２の接着材３の面積が圧電体１の第１の面ａ１又は第２の面ａ２より大きい場合の圧電センサ１００’の例について図示したものである。第１、第２の接着材２，３の面積を圧電体１の第１及び第２の面ａ１，ａ２の面積より大きくし、複数の圧電体１の固定を一つの接着材で行えば、部品点数の低減につながる。また、この時、第１又は第２接着材２，３を第１又は第２の基材５，８の全面に配置しても良い。この場合、図２（ａ）の場合と異なり、スペーサ部材６の収納窓ｈには第１及び第２の接着材２，３は収納されない。スペーサ部材６が第１の基材５と固定される部分は、図２（ｂ）のｃ１のように、直接貼接される部分と、ｃ２のように第１の接着材を介する部分がある。この場合、ｃ１とｃ２の間に段差が生じるが、スペーサ部材６の可塑性により空隙は生じない。尚、スペーサ部材６には、第１の接着材２及び／又は第２の接着材３を収納できる窪みを設けてもよい。このようにすれば、上記空隙を減らすことが出来る。 FIG. 2B illustrates an example of the piezoelectric sensor 100 ′ in the case where the areas of the first adhesive material 2 and the second adhesive material 3 are larger than the first surface a1 or the second surface a2 of the piezoelectric body 1. It is a thing. If the areas of the first and second adhesives 2 and 3 are made larger than the areas of the first and second surfaces a1 and a2 of the piezoelectric body 1 and the plurality of piezoelectric bodies 1 are fixed with one adhesive, This leads to a reduction in the number of parts. At this time, the first or second adhesive 2 or 3 may be disposed on the entire surface of the first or second substrate 5 or 8. In this case, unlike the case of FIG. 2A, the first and second adhesives 2 and 3 are not stored in the storage window h of the spacer member 6. The part where the spacer member 6 is fixed to the first base material 5 includes a part that is directly attached as shown by c1 in FIG. 2B and a part through the first adhesive as shown by c2. . In this case, a step is generated between c 1 and c 2, but no gap is generated due to the plasticity of the spacer member 6. Note that the spacer member 6 may be provided with a recess capable of accommodating the first adhesive 2 and / or the second adhesive 3. In this way, the said space | gap can be reduced.

圧電体１は、フッ化ビニリデン系高分子、シアン化ビニリデン系共重合体等、特に限定されず、既知の高分子圧電体を用いることができる。高分子圧電体は、セラミック材料を用いた圧電体より、電圧出力係数が大きいので与えられた応力に対して生じる電位が大きく、また、柔軟性に富み加工し易い。更に軽量であり、薄く成形することが出来る。中でも、フッ化ビニリデン系高分子の一種であるポリフッ化ビニリデンＰＶＤＦ一軸延伸フィルムやフッ化ビニリデン−３フッ化エチレン共重合体は好適に用いられる。圧電体の厚さは用途により異なるが典型的には４０μｍ〜２５０μｍ、好ましくは８０〜１２０μｍであり、その一辺の長さは数ｍｍから数十ｃｍの間で選択できる。尚、圧電体１として高分子圧電体以外の例えばセラミック圧電体を同様に使用できることは勿論である。 The piezoelectric body 1 is not particularly limited, such as a vinylidene fluoride polymer and a vinylidene cyanide copolymer, and a known polymer piezoelectric material can be used. A polymer piezoelectric body has a larger voltage output coefficient than a piezoelectric body using a ceramic material, so that a large potential is generated with respect to a given stress, and it is rich in flexibility and easy to process. Furthermore, it is lightweight and can be molded thinly. Among these, a polyvinylidene fluoride PVDF uniaxially stretched film or a vinylidene fluoride-trifluoroethylene copolymer, which is a kind of vinylidene fluoride polymer, is preferably used. The thickness of the piezoelectric body varies depending on the application, but is typically 40 μm to 250 μm, preferably 80 to 120 μm, and the length of one side can be selected from several mm to several tens of cm. Needless to say, for example, a ceramic piezoelectric material other than the polymer piezoelectric material can be used as the piezoelectric material 1.

第１の基材５及び第２の基材８に各々形成されている、シグナル電極４及びグランド電極７は、導電ペースト印刷、エッチング等の公知の方法を用いて形成する。第１の基材５、第２の基材８は絶縁性のフィルムが用いられ、その材料として、ポリエチレンテレフタレート（ＰＥＴ）、ポリエチレンナフタレート（ＰＥＮ）、銅箔付きポリイミド（ＰＩ）等を用いることが出来る。対環境性などの面から防湿ＰＥＴなども用いることが出来る。銅箔付きポリイミドでは、主にエッチングにより電極を形成する。基材５、基材８に用いるフィルムの厚さは、５μｍ〜５００μｍ、好ましくは１０μｍ〜３００μｍ、さらに好ましくは３０μｍ〜２００μｍである。 The signal electrode 4 and the ground electrode 7 respectively formed on the first base material 5 and the second base material 8 are formed using a known method such as conductive paste printing or etching. Insulating films are used for the first substrate 5 and the second substrate 8, and polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide with copper foil (PI), or the like is used as the material. I can do it. Moisture-proof PET or the like can also be used from the standpoint of environmental resistance. In polyimide with copper foil, an electrode is formed mainly by etching. The thickness of the film used for the base material 5 and the base material 8 is 5 μm to 500 μm, preferably 10 μm to 300 μm, and more preferably 30 μm to 200 μm.

第１及び第２の接着材２，３は、第１の基材５、第２の基材８の圧電体実装位置にスクリーン印刷により基材表面に選択的に塗布する方法や、熱可塑性接着剤を圧電体に塗布して形成することもできる。また、熱可塑性熱接着フィルムなどを予め圧電体の面に合う寸法に型抜きしておき、第１及び第２の接着材として使用することもできる。典型的には第１及び第２の接着材の厚さは、数十μｍである。尚、第１の接着材２と第２の接着材３の厚さを異ならせる実施の形態もある。 The first and second adhesives 2 and 3 can be applied selectively to the surface of the substrate by screen printing on the piezoelectric substrate mounting positions of the first substrate 5 and the second substrate 8, or thermoplastic bonding It can also be formed by applying an agent to the piezoelectric body. In addition, a thermoplastic thermo-adhesive film or the like can be previously punched to a size that fits the surface of the piezoelectric body and used as the first and second adhesives. Typically, the thickness of the first and second adhesive materials is several tens of μm. There is also an embodiment in which the thicknesses of the first adhesive 2 and the second adhesive 3 are made different.

スペーサ部材６として、それ自体が接着材である部材、又は絶縁体を用いる。接着材の場合、絶縁性の熱可塑性熱接着フィルムや熱硬化性熱接着フィルムを用いる。また、熱可塑性接着剤をスクリーン印刷等の方法を用いて、圧電体が装着される部分を除いて選択的に塗布することにより接着性のあるスペーサ部材６を形成することもできる。また、接着材としてフィルム状のものを用いる場合は、上記圧電体装着部分について型抜き等の加工をし、型抜き後熱圧着することが出来る。スペーサ部材としてそれ自体に接着性のない材料を用いるときは基材５，８との接着のため別途接着剤が必要となる場合がある。 As the spacer member 6, a member that itself is an adhesive or an insulator is used. In the case of an adhesive, an insulating thermoplastic thermal adhesive film or a thermosetting thermal adhesive film is used. Alternatively, the adhesive spacer member 6 can be formed by selectively applying a thermoplastic adhesive using a method such as screen printing except for a portion where the piezoelectric body is mounted. Moreover, when using a film-like thing as an adhesive material, processing, such as die cutting, can be carried out about the said piezoelectric material mounting part, and thermocompression bonding can be carried out after die cutting. When a material that does not adhere to itself is used as the spacer member, a separate adhesive may be required for adhesion to the base materials 5 and 8.

上記部材の位置合わせを行い、熱プレスや熱ラミネータ等で同時に熱圧着することにより、従来の両面接着テープを使って何層かの積層を一層ずつ貼り合わせする作業に比べて組み立て工程を簡素化することができる。この場合、第１〜第２の接着材、更に、接着性のあるスペーサ部材として、最終熱プレス等の前の位置合わせ時の環境（例えば、温度）で他の部材に粘着性を有さない非タック性接着材を用いると、意図しない貼り合わせを防止でき、部材の位置あわせが容易に実行でき、組み立ての工程を短時間に確実に行うことができる。その結果、組立・製造過程での電極のずれや気泡の混入、空隙の形成によるはがれなどの不具合を軽減することができる。このような接着材として、第１，第２の接着材２，３用としてポリエステル系ホットメルト樹脂接着剤、熱可塑性熱接着フィルム（ポリアミド系、ポリオレフィン系、ポリウレタン系、ＥＶＡ系、ポリエステル系）、熱硬化性熱接着フィルム（エポキシ系）等が、接着性のあるスペーサ部材６用として上記と同材料の熱接着フィルムが使用できる。 By aligning the above components and simultaneously thermocompression bonding with a hot press or thermal laminator, etc., the assembly process is simplified compared to the conventional process of laminating several layers one by one using a double-sided adhesive tape. can do. In this case, the first and second adhesive materials and the adhesive spacer member are not sticky to other members in the environment (for example, temperature) at the time of previous alignment such as final hot press. When a non-tack adhesive is used, unintended bonding can be prevented, member alignment can be easily performed, and the assembly process can be performed reliably in a short time. As a result, it is possible to reduce problems such as electrode displacement, bubble mixing, and peeling due to the formation of voids during the assembly / manufacturing process. As such an adhesive, for the first and second adhesives 2 and 3, a polyester hot melt resin adhesive, a thermoplastic thermal adhesive film (polyamide, polyolefin, polyurethane, EVA, polyester), A thermosetting adhesive film made of the same material as described above can be used for the spacer member 6 having an adhesive property, such as a thermosetting adhesive film (epoxy type).

以上、非タック性接着材を用いる実施の形態について説明してきたが、勿論これに限定されるものではなく通常の接着材（或いは、接着剤）を用いてもよい。 As described above, the embodiment using the non-tack adhesive has been described, but it is needless to say that the embodiment is not limited to this, and a normal adhesive (or adhesive) may be used.

次に、本実施の形態における具体的な圧電センサの製造方法の一例を図１を参照して説明する。まず、第１の基材５のシグナル電極４側の面を上にして固定し、シグナル電極４_１〜４_ｎの上に第１の接着材２_１〜２_ｎを置く。更にその上に圧電体１_１〜１_ｎ、更にその上に第２の接着材３_１〜３_ｎを置く。次に、スペーサ部材６の収納窓ｈが圧電体１及び第１、第２の接着材２、３を収納するように第３の接着材６を第１の基材５の上に置く。次に、第２の基材８をそのグランド電極７を下にして第３の接着材６及び第２の接着材３の上に置く。最後に、第２の基材８の上面から適当な圧力を加えると共に、全体に熱を加え、所定の時間この状態に置いて各部材を貼り合わせ固定する。尚、スペーサ部材６として接着性のない部材を用いる場合は、必要に応じて、その表面に接着剤を塗布する。 Next, an example of a specific method for manufacturing a piezoelectric sensor according to the present embodiment will be described with reference to FIG. First, the surface of the first substrate 5 on the signal electrode 4 side is fixed and the first adhesive materials 2 ₁ to 2 _n are placed on the signal electrodes 4 ₁ to 4 _n . Furthermore piezoelectric ₁ 1 to 1 _n thereon, further placing a second adhesive ₃ 1 to 3 _n thereon. Next, the third adhesive 6 is placed on the first substrate 5 so that the storage window h of the spacer member 6 stores the piezoelectric body 1 and the first and second adhesives 2 and 3. Next, the second substrate 8 is placed on the third adhesive 6 and the second adhesive 3 with the ground electrode 7 facing down. Finally, an appropriate pressure is applied from the upper surface of the second base material 8 and heat is applied to the entire surface, and each member is bonded and fixed in this state for a predetermined time. In addition, when using a member without adhesiveness as the spacer member 6, an adhesive agent is apply | coated to the surface as needed.

尚、第１又は第２の接着材２、３として図２（ｂ）のようにその一辺の長さが圧電体１の第１又は第２の面ａ１、ａ２の対応する一辺の長さより大きい場合は、上記収納窓ｈには第１、第２の接着材２、３は収納されない。また、接着材としてスクリーン印刷による場合は、前述した接着材を置く代わりに接着剤を印刷により所定に範囲に塗布する。 Note that the length of one side of the first or second adhesive 2 or 3 is larger than the length of the corresponding one side of the first or second surface a1 or a2 of the piezoelectric body 1 as shown in FIG. In this case, the first and second adhesives 2 and 3 are not stored in the storage window h. When screen printing is used as the adhesive, an adhesive is applied to a predetermined range by printing instead of placing the above-described adhesive.

また、第１及び第２の接着材２，３は、予め圧電体１の第１及び第２の面ａ１，ａ２に貼付固定して置き、その後、第１の基材５上のシグナル電極４上に置いても良い。 Further, the first and second adhesives 2 and 3 are previously stuck and fixed on the first and second surfaces a1 and a2 of the piezoelectric body 1, and then the signal electrode 4 on the first substrate 5 is placed. May be placed on top.

[第２の実施の形態]
図３、及び図４に、第２の実施の形態における圧電センサ２００を示す。図３は、組み立て構造図であり、図４は、圧電センサ２００の断面図である。図３、図４は第１の基材５’がその裏面にグランド面１０を有する構成である点、保護膜材９が設けられている点を除いて図１と同じである。 [Second Embodiment]
3 and 4 show a piezoelectric sensor 200 according to the second embodiment. FIG. 3 is an assembly structure diagram, and FIG. 4 is a cross-sectional view of the piezoelectric sensor 200. FIGS. 3 and 4 are the same as FIG. 1 except that the first base material 5 ′ has a ground surface 10 on the back surface and a protective film material 9 is provided.

図４に示すように、第１の基材５’には、シグナル電極４が配設された面ｇ１の裏面ｇ２に第２のグランド電極１０が更に配設されている。本実施の形態は圧電体を比較的大きな面積のグランド電極７，１０で挟むことにより外部からの雑音が混入しないようにしたものである。即ち、図１、図２で説明した第１の実施の形態の圧電センサでは、圧電体１がグランド電極で囲まれておらず、電気的には開放型回路になっている。この場合、外部から雑音が混入し、シグナル電極４とグランド電極７の間に雑音が誘起されることがある。本実施の形態は圧電体１、及びシグナル電極４を二つのグランド電極７，１０で挟んだ構造となっている。尚、第１及び第２のグランド電極の電位は圧電センサ２００内で、又は外部で電気的に短絡して同電位とする。ここで、第１の基材５’と第２の基材８の間の側面ｋが導電体で完全に覆われていないが、第１と第２のグランド電極間の距離ｔが狭ければ外部からの雑音は圧電体付近には殆ど侵入しない。実験的には、両方のグランド電極の外縁と圧電体１の外縁の距離ｓがｔの５倍以上あれば実用上雑音は問題とならない。 As shown in FIG. 4, a second ground electrode 10 is further disposed on the back surface g2 of the surface g1 on which the signal electrode 4 is disposed on the first base material 5 '. In this embodiment, a piezoelectric body is sandwiched between ground electrodes 7 and 10 having a relatively large area so that external noise is not mixed. That is, in the piezoelectric sensor according to the first embodiment described with reference to FIGS. 1 and 2, the piezoelectric body 1 is not surrounded by the ground electrode and is electrically an open circuit. In this case, noise may be mixed from the outside, and noise may be induced between the signal electrode 4 and the ground electrode 7. In this embodiment, the piezoelectric body 1 and the signal electrode 4 are sandwiched between two ground electrodes 7 and 10. Note that the potentials of the first and second ground electrodes are electrically short-circuited in the piezoelectric sensor 200 or externally to have the same potential. Here, the side surface k between the first base material 5 ′ and the second base material 8 is not completely covered with the conductor, but if the distance t between the first and second ground electrodes is small. Noise from the outside hardly penetrates near the piezoelectric body. Experimentally, if the distance s between the outer edge of both ground electrodes and the outer edge of the piezoelectric body 1 is 5 times or more than t, noise does not cause a problem in practice.

本実施の形態では、第１の実施の形態の図１、図２と異なり、保護膜材９が基材５’の面ｇ２に貼接されている。保護膜材９は、グランド電極１０の外的環境要因（傷、湿気など）からの保護を目的とするもので、接着層１５を介して基材５’に貼り合わされる。保護膜材９の材料として、具体的には、ポリエステル基材又はポリプロピレン基材付き粘着フィルム、ポリエステル基材付き熱接着フィルムなどが好適である。尚、保護膜材９は、必要に応じて配設されるもので本実施の形態に限定されず、後述するものを含む圧電センサ１００，２００，３００，４００，５００，６００，７００に適用可能である。 In the present embodiment, unlike FIGS. 1 and 2 of the first embodiment, the protective film material 9 is adhered to the surface g2 of the base material 5 '. The protective film material 9 is for the purpose of protecting the ground electrode 10 from external environmental factors (such as scratches and moisture), and is bonded to the base material 5 ′ via the adhesive layer 15. Specifically, as the material of the protective film material 9, a polyester base or a pressure-sensitive adhesive film with a polypropylene base, a thermal adhesive film with a polyester base, and the like are suitable. The protective film material 9 is disposed as necessary and is not limited to the present embodiment, and can be applied to the piezoelectric sensors 100, 200, 300, 400, 500, 600, and 700 including those described later. It is.

本実施の形態の製造方法は図１に説明したものと保護膜材９の貼接工程を除いて略同じである。保護膜材９の接着工程については、はじめに第２の基材５’と保護膜材９を貼り合わせてから、更に、最初に固定した保護膜材９の上の第２の基材５の上にのせ、更にその上に全部の部材をのせて各部材の位置決めが終わった後に同時に熱プレス等の工程を加えてもよいし、保護膜材９をその他の部材の組立て終了後に貼り合わせてもよい。 The manufacturing method of the present embodiment is substantially the same as that described in FIG. 1 except for the step of attaching the protective film material 9. Regarding the bonding process of the protective film material 9, first, the second base material 5 ′ and the protective film material 9 are bonded together, and then the second base material 5 on the protective film material 9 fixed first. In addition, a process such as hot pressing may be added simultaneously after all the members are placed on the substrate and positioning of each member is completed, or the protective film material 9 may be bonded after the assembly of other members is completed. Good.

[第３の実施の形態]
図５は、第３の実施の形態の圧電センサ３００の組み立て構造図を示したものである。本実施の形態は、第１及び第２の接着材２’３’が導電性の接着材を用いている点を除いて図１と同じである。第１及び第２の接着材２’３’として、例えば、スクリーン印刷で形成する異方性導電接着剤や異方導電性接着フィルム、等方性導電接着剤や等方導電性接着フィルム接着材を用いることができる。尚、導電性接着材の適用は第１の接着材と第２の接着材の一方であっても双方でもよい。 [Third embodiment]
FIG. 5 is an assembly structure diagram of the piezoelectric sensor 300 according to the third embodiment. This embodiment is the same as FIG. 1 except that the first and second adhesives 2′3 ′ use conductive adhesives. As the first and second adhesives 2'3 ', for example, anisotropic conductive adhesives or anisotropic conductive adhesive films formed by screen printing, isotropic conductive adhesives or isotropic conductive adhesive film adhesives Can be used. Note that the conductive adhesive may be applied to one or both of the first adhesive and the second adhesive.

このように導電性接着材を用いることで、電極と圧電体との間は電気的に静電容量を介せずに接続されるので、図９（ｃ）で説明したような静電容量Ｃ_ｓがない（Ｃ_ｓが短絡された状態、又は、静電容量が無限大となったのと等価）ので、圧電体で発生した電圧が損失なく外部に出力される。また、このようにＣ_ｓが問題とならないと、Ｃ_ｐの値を大きくすることが出来、圧電センサの厚さを薄くすることができる。また、図３、図４のような二つのグランド電極を用いる構造でグランド電極の面積を大きくすることが出来、外部雑音の影響を抑圧することができる。 Since the conductive adhesive is used in this way, the electrode and the piezoelectric body are electrically connected without passing through the electrostatic capacitance, and thus the electrostatic capacitance C described with reference to FIG. 9C. _Since there is no _s (a state where C _s is short-circuited or equivalent to an infinite capacitance), the voltage generated in the piezoelectric body is output to the outside without loss. Moreover, in this way C _s is not a problem, it is possible to increase the value of C _p, it is possible to reduce the thickness of the piezoelectric sensor. Further, the structure using two ground electrodes as shown in FIGS. 3 and 4 can increase the area of the ground electrode and suppress the influence of external noise.

[第４の実施の形態]
図６は、第４の実施の形態の圧電センサ４００の断面図を示したものである。本実施の形態は、図１、図３、図５のスペーサ部材６の厚さが、スペーサ部材６の収納窓ｈに収納されるもの（図６では、シグナル電極４、第１の接着材２、圧電体１、及び第２の接着材３）の厚さの合計より薄くなるように設定したものである。このような寸法関係から、図６に示すように熱圧着組み立て後、第２の基材８の圧電体１収納側と反対の面に圧電体の厚さに対応して高さｊの凸部ｉが生じる。 [Fourth embodiment]
FIG. 6 shows a cross-sectional view of the piezoelectric sensor 400 of the fourth embodiment. In this embodiment, the thickness of the spacer member 6 in FIGS. 1, 3 and 5 is accommodated in the accommodation window h of the spacer member 6 (in FIG. 6, the signal electrode 4 and the first adhesive material 2). The piezoelectric body 1 and the second adhesive 3) are set to be thinner than the total thickness. From such a dimensional relationship, as shown in FIG. 6, after the thermocompression assembly, a convex portion having a height j corresponding to the thickness of the piezoelectric body is formed on the surface opposite to the piezoelectric body 1 housing side of the second substrate 8. i occurs.

このような凸部ｉがあると、例えば、図６のように上からＴなる外力が加えられた時、圧電センサ４００の全体に分散される圧力を圧電体１が実装された部分の直上の凸部ｉに集中させることが出来、高い検知出力を得る事が出来る。また、例えば図１の圧電体１_１〜１_ｎのように、複数の圧電体が実装されて圧力分布を計測するようにした場合、圧電体が実装された各々の位置での応力が他の部分と明確に分離され正確な計測が出来る。 When there is such a convex portion i, for example, when an external force T is applied from above as shown in FIG. 6, the pressure distributed over the entire piezoelectric sensor 400 is directly above the portion where the piezoelectric body 1 is mounted. It is possible to concentrate on the convex part i and to obtain a high detection output. Further, for example, when a plurality of piezoelectric bodies are mounted and the pressure distribution is measured as in the piezoelectric bodies 1 ₁ to 1 _{n in} FIG. 1, the stress at each position where the piezoelectric bodies are mounted is different from the other stresses. It is clearly separated from the part and can be measured accurately.

尚、図６に示すような凸部ｉを圧電センサの片面のみ（図６では上部のみ）に形成するには、第１の基材５側に平坦な平面を持つものにセットし上から全面に等圧の力を加えて熱圧着作業を行えばよい。 In order to form the convex part i as shown in FIG. 6 only on one side of the piezoelectric sensor (only the upper part in FIG. 6), it is set on the first substrate 5 having a flat surface and the entire surface from above. A thermocompression bonding operation may be performed by applying an equal pressure force to the.

[第５の実施の形態]
図７、図８は、第５の実施の形態の圧電センサ５００の組み立て構造図、及び断面図である。本実施の形態は、図８に示すようにシグナル電極の配線ライン１３上に保護膜１１を設けたものである。尚、図８では、保護膜１１は、シグナル電極４の部分を除いて設けられているが、電極上に設けることも出来る。この保護膜１１は、圧電センサ５００が高温多湿下での長期使用などの使用環境下で圧電センサ５００の側面ｋ’（図８参照）から湿気が侵入してシグナル電極４とグランド電極７間の絶縁抵抗が低下すること軽減し、絶縁抵抗の低下による感度低下や短絡等の不具合を防止するものである。これにより、圧電センサ５００の耐環境性を向上することができる。尚、ここでは、シグナル電極４側の一部の面に保護膜１１を設ける構成を示したが、第１の基材５’のシグナル電極４が配設された面の全面に形成することも可能であり、また、必要に応じてグランド電極７側にも設けることが出来ることは当然である。 [Fifth embodiment]
7 and 8 are an assembly structure diagram and a cross-sectional view of the piezoelectric sensor 500 according to the fifth embodiment. In the present embodiment, as shown in FIG. 8, a protective film 11 is provided on a wiring line 13 of a signal electrode. In FIG. 8, the protective film 11 is provided except for the signal electrode 4, but it can also be provided on the electrode. The protective film 11 is formed between the signal electrode 4 and the ground electrode 7 when moisture enters from the side surface k ′ (see FIG. 8) of the piezoelectric sensor 500 under a usage environment such as a long-term use of the piezoelectric sensor 500 under high temperature and high humidity. This reduces the decrease in insulation resistance, and prevents problems such as a decrease in sensitivity and a short circuit due to a decrease in insulation resistance. Thereby, the environmental resistance of the piezoelectric sensor 500 can be improved. Here, the configuration in which the protective film 11 is provided on a part of the surface on the signal electrode 4 side is shown, but the protective film 11 may be formed on the entire surface of the first substrate 5 ′ where the signal electrode 4 is disposed. Of course, it can be provided on the ground electrode 7 side as required.

図７は、本実施の形態の圧電センサの組立て構造及び製造方法を示したもので、第１の基材５’に絶縁性が高く、第１の基材５’および第３の接着材６と親和性の高い材料をスクリーン印刷やラミネートなどで形成して第１の基材５’上に貼付する工程を加えればよい。保護膜１１の材料としては、例えば、ポリエステル系防湿塗料、ポリウレタン系防湿塗料など、使用する基材と接着性の良い材料を選択する。 FIG. 7 shows the assembly structure and manufacturing method of the piezoelectric sensor of the present embodiment. The first base material 5 ′ has high insulation, and the first base material 5 ′ and the third adhesive 6 A step of forming a material having high affinity with the first base material 5 ′ by screen printing or laminating may be added. As a material of the protective film 11, for example, a material having good adhesion to the substrate to be used, such as a polyester moisture-proof paint and a polyurethane moisture-proof paint, is selected.

以上説明した複数の実施の形態は、個々で説明した構成の範囲に限定されるわけではなく、各々の実施の形態を適宜組み合わせてもよい。 The plurality of embodiments described above are not limited to the scope of the configuration described individually, and the embodiments may be appropriately combined.

[第６の実施の形態]
図１０、図１１は、第６の実施の形態の圧電センサ６００の組み立て構造図、及び断面図である。本実施の形態は、図１０に示すようにスペーサ部材６’として接着性のない絶縁体を用い、第１の接着材２’’、及び第２の接着材３’’をスペーサ部材６’の両面に貼接すると共に、各々、第１の基材５、第２の基材８の全面に貼付するようにしたものである。尚、スペーサ部材６’には圧電体１が収納される収納窓ｈを有している。図１１に示すように、圧電体１、スペーサ部材６、及び基材５，８が、第１の接着材２’’、第２の接着材３’’で貼り合わされている。尚、本実施の形態では第２に接着材３’’に導電性の材質を使用することができるが、第１の接着材２’’については複数の圧電体１_１〜１_ｎが短絡するため導電性材質のものを使用しない。 [Sixth embodiment]
10 and 11 are an assembly structure diagram and a sectional view of the piezoelectric sensor 600 according to the sixth embodiment. In this embodiment, as shown in FIG. 10, a non-adhesive insulator is used as the spacer member 6 ′, and the first adhesive material 2 ″ and the second adhesive material 3 ″ are used as the spacer member 6 ′. In addition to being adhered to both surfaces, the first substrate 5 and the second substrate 8 are respectively adhered to the entire surface. The spacer member 6 ′ has a storage window h in which the piezoelectric body 1 is stored. As shown in FIG. 11, the piezoelectric body 1, the spacer member 6, and the base materials 5 and 8 are bonded together with a first adhesive material 2 ″ and a second adhesive material 3 ″. In the present embodiment, secondly, a conductive material can be used for the adhesive 3 ″, but the plurality of piezoelectric bodies 1 ₁ to 1 _n are short-circuited with respect to the first adhesive 2 ″. Therefore, do not use conductive materials.

このように、スペーサ部材６として適当な絶縁体を用いることが出来るので、機械的、電気的な特性を考慮して適切な材質の選択ができるようになる。更に、第１及び第２の接着材２’’，３’’の材質の選択の幅を広げることが出来る。また、圧電体１は温度による変形が大きく熱接着を行った場合に大きく収縮することがあり、このような場合、例えば図５のように圧電体１を導電性接着材着２’，３’で挟んだ場合、二つの接着材２’，３’の間の圧電体１の収縮によって生じた空隙部分で短絡が生じることが考えられるが、本実施の形態の圧電センサ６００ではこのような問題がない。更に、圧電体１の収縮によって電極１３を損傷させることも無い。 As described above, since an appropriate insulator can be used as the spacer member 6, an appropriate material can be selected in consideration of mechanical and electrical characteristics. Furthermore, the selection range of the material of the first and second adhesive materials 2 ″ and 3 ″ can be widened. In addition, the piezoelectric body 1 is greatly deformed by temperature and may be greatly shrunk when thermal bonding is performed. In such a case, for example, as shown in FIG. 5, the piezoelectric body 1 is attached to the conductive adhesive 2 ′, 3 ′. When sandwiched between two adhesive materials 2 ′ and 3 ′, it is conceivable that a short circuit occurs in a gap portion caused by the contraction of the piezoelectric body 1, but the piezoelectric sensor 600 of the present embodiment has such a problem. There is no. Further, the electrode 13 is not damaged by the contraction of the piezoelectric body 1.

[第７の実施の形態]
図１２、図１３は、第７の実施の形態の圧電センサ７００の組み立て構造図、及び断面図である。本実施の形態は、図１３に示すように圧電体１と第１の基材５を第１Ａの接着材２’で貼接し、圧電体１と第２の基材８を第２Ａの接着材３’で貼接し、スペーサ部材６’と第１の基材５を第１Ｂの接着材２’’’で貼接し、スペーサ部材６’と第２の基材８を第２Ｂの接着材３’’’で貼接したものである。図１２に示すように、第１Ｂ及び第２Ｂの接着材２’’’，３’’’は、スペーサ６’の収納窓ｈに重なるように窓（ｈ_１ａ〜ｈ_ｎａ）、（ｈ_１ｂ〜ｈ_ｎｂ）が設けられている。本実施の形態は図１０で示した第６の実施の形態の第１の接着材２’’、第２の接着材３’’が、各々、２つの接着材２’、２’’’、及び、接着材３’、３’’’で構成されていると見なすことが出来る。また、図１２に示すようにスペーサ部材６’として、接着性の無い材質である絶縁体の一方の面ｂ１及び他方の面ｂ２に接着材２’’’及び接着材３’’’が貼接された三層構造体であり、その三層構造体のスペーサ部材６を貫通する収納窓ｈ（例えば、ｈ_１ｂ、ｈ_１、ｈ_１ａ）を有するともみなせる。収納窓ｈには圧電体１及び第１及び第２の接着材２’，３’が収納される。 [Seventh embodiment]
12 and 13 are an assembly structure diagram and a sectional view of the piezoelectric sensor 700 according to the seventh embodiment. In the present embodiment, as shown in FIG. 13, the piezoelectric body 1 and the first base material 5 are bonded to each other with a 1A adhesive 2 ′, and the piezoelectric body 1 and the second base 8 are bonded to a 2A adhesive. 3 ′, the spacer member 6 ′ and the first substrate 5 are bonded with the 1B adhesive 2 ′ ″, and the spacer member 6 ′ and the second substrate 8 are bonded to the 2B adhesive 3 ′. ” As shown in FIG. 12, the 1B and 2B adhesives 2 ′ ″ and 3 ′ ″ are arranged so as to overlap the storage window h of the spacer 6 ′ with windows (h _{1a to} h _na ), (h _1b to h _nb ). In the present embodiment, the first adhesive material 2 ″ and the second adhesive material 3 ″ of the sixth embodiment shown in FIG. 10 have two adhesive materials 2 ′, 2 ′ ″, And it can be considered that it is comprised by adhesive material 3 ', 3'''. Further, as shown in FIG. 12, as the spacer member 6 ′, the adhesive material 2 ′ ″ and the adhesive material 3 ′ ″ are attached to the one surface b1 and the other surface b2 of the insulator which is a non-adhesive material. It can also be regarded as having a storage window h (for example, h _1b , h ₁ , h _1a ) that penetrates the spacer member 6 of the three-layer structure. The storage window h stores the piezoelectric body 1 and the first and second adhesives 2 ′ and 3 ′.

このように構成すると、スペーサ部材６として接着材以外の任意の絶縁体を使用することが出来る上、接着材２’’’、接着材３’’’も任意の材質を使用することがことが出来、その材質の選択の余地が広がる。また、圧電体１の上下面ａ１，ａ２に貼接される接着材２’，３’を上記接着材２’’’，３’’’と別個に選択することが出来るため、設計の自由度が広がり、例えば、導電性の接着材を用いることも可能となる。尚、異方性導電接着剤などを印刷方法などで電極を形成するときは、短絡を回避する為、あらかじめ圧電体１の端面から縁面を設けた形で電極形成することが望ましい。 If comprised in this way, arbitrary insulators other than an adhesive material can be used as the spacer member 6, and also adhesive material 2 '' 'and adhesive material 3' '' can use arbitrary materials. Yes, there is room for selection of the material. Further, since the adhesives 2 ′ and 3 ′ to be bonded to the upper and lower surfaces a1 and a2 of the piezoelectric body 1 can be selected separately from the adhesives 2 ′ ″ and 3 ′ ″, the degree of freedom in design. For example, a conductive adhesive can be used. When forming an electrode with an anisotropic conductive adhesive or the like by a printing method or the like, it is desirable to form the electrode with an edge surface provided in advance from the end surface of the piezoelectric body 1 in order to avoid a short circuit.

本発明の第１の実施の形態にかかる圧電センサの組立て構造図Assembly structure diagram of piezoelectric sensor according to first embodiment of the present invention 本発明の第１の実施の形態にかかる圧電センサの断面図Sectional drawing of the piezoelectric sensor concerning the 1st Embodiment of this invention 本発明の第２の実施の形態にかかる圧電センサの組立て構造図Assembly structure diagram of piezoelectric sensor according to second embodiment of the present invention 本発明の第２の実施の形態にかかる圧電センサの断面図Sectional drawing of the piezoelectric sensor concerning the 2nd Embodiment of this invention 本発明の第３の実施の形態にかかる圧電センサの組立て構造図Assembly structure diagram of piezoelectric sensor according to third embodiment of the present invention 本発明の第４の実施の形態にかかる圧電センサの断面図Sectional drawing of the piezoelectric sensor concerning the 4th Embodiment of this invention 本発明の第５の実施の形態にかかる圧電センサの組立て構造図Assembly structure diagram of piezoelectric sensor according to fifth embodiment of the present invention 本発明の第５の実施の形態にかかる圧電センサの断面図Sectional drawing of the piezoelectric sensor concerning the 5th Embodiment of this invention 従来の高分子圧電体を用いた圧電センサの構造図Structure diagram of a conventional piezoelectric sensor using a polymer piezoelectric material 本発明の第６の実施の形態にかかる圧電センサの組立て構造図Assembly structure diagram of piezoelectric sensor according to sixth embodiment of the present invention 本発明の第６の実施の形態にかかる圧電センサの断面図Sectional drawing of the piezoelectric sensor concerning the 6th Embodiment of this invention 本発明の第７の実施の形態にかかる圧電センサの組立て構造図Assembly structure diagram of piezoelectric sensor according to seventh embodiment of the present invention 本発明の第７の実施の形態にかかる圧電センサの断面図Sectional drawing of the piezoelectric sensor concerning the 7th Embodiment of this invention

Explanation of symbols

１圧電体
２２’２’’２’’’ 第１の接着材
３３’３’’３’’’ 第２の接着材
４シグナル電極
５５’ 第１の基材
６６’スペーサ部材
７第１のグランド電極
８第２の基材
９保護膜材
１０第２のグランド電極
１１保護膜
１３配線ライン（シグナル）
１４配線ライン（グランド）
１５接着層
５１高分子圧電体（従来技術）
５２シグナル電極（従来技術）
５３グランド電極（従来技術）
５４，５５基材（従来技術）
５６，５７接着層（従来技術）
５８未接着部分（従来技術）
５９電極配線ライン（従来技術）
１００，１００’，２００，３００，４００，５００，６００，７００圧電センサ
ｈ収納窓
ｉ凸部（第２の基材）
ｋ，ｋ’ 側面（圧電センサ） DESCRIPTION OF SYMBOLS 1 Piezoelectric body 2 2'2''2 '''1st adhesive material 3 3'3''3''' 2nd adhesive material 4 Signal electrode 5 5 '1st base material 6 6' Spacer member 7 First ground electrode 8 Second substrate 9 Protective film material 10 Second ground electrode 11 Protective film 13 Wiring line (signal)
14 Wiring line (Ground)
15 Adhesive layer
51 Polymer Piezoelectric Material (Conventional Technology)
52 Signal electrode (prior art)
53 Ground electrode (conventional technology)
54,55 Base material (prior art)
56,57 Adhesive layer (prior art)
58 Unbonded part (conventional technology)
59 Electrode wiring line (prior art)
100, 100 ', 200, 300, 400, 500, 600, 700 Piezoelectric sensor h Storage window i Convex part (second base material)
k, k 'side surface (piezoelectric sensor)

Claims

A piezoelectric body having a first surface and a second surface in a front-back relationship with the first surface, which generates a potential when pressed;
A signal electrode facing the first surface of the piezoelectric body is provided on one surface, and the surface having the signal electrode is disposed so as to be adhered to the first surface of the piezoelectric body. 1 substrate;
A first ground electrode facing the second surface of the piezoelectric body is provided on one surface thereof, and the surface having the first ground electrode is adhered to the second surface of the piezoelectric body. A second substrate disposed on;
One surface is bonded to the surface of the first substrate having the signal electrode, the other surface is bonded to the surface of the second substrate having the first ground electrode, and the piezoelectric body is arranged. comprising a; set has been a spacer member disposed in other portions
The spacer member has plasticity.
Piezoelectric sensor.

The spacer member has thermoplasticity.
The piezoelectric sensor according to claim 1.

The spacer member is itself an adhesive,
The piezoelectric sensor according to claim 1 or 2.

The first surface of the piezoelectric body and the surface having the signal electrode of the first base material are adhered, and further, the one surface of the spacer member and the signal electrode of the first base material are provided. A first adhesive for adhering the surfaces;
The second surface of the piezoelectric body and the surface having the ground electrode of the second base material are adhered, and the other surface of the spacer member and the ground electrode of the second base material are further provided. A second adhesive for adhering the surface; and
Wherein the spacer member is housed window for accommodating the forming the piezoelectric body,
The first adhesive or the second adhesive has plasticity.
The piezoelectric sensor according to claim 1 or 2 .

The one surface of the spacer member and the entire first surface of the piezoelectric body are bonded to the surface having the signal electrode of the first base material via the first adhesive,
The entire other surface of the spacer member and the second surface of the piezoelectric body are bonded to the surface having the ground electrode of the second base material via the second adhesive.
The piezoelectric sensor according to claim 4 .

The first adhesive material overlaps the first A adhesive material that adheres the first surface of the piezoelectric body and the surface of the first base material having the signal electrode, and the storage window of the spacer member. The first 1A adhesive having a storage window includes a separate 1B adhesive.
The piezoelectric sensor according to claim 5 .

The second adhesive is electrically conductive;
The piezoelectric sensor according to claim 4 or 5 .

The first A adhesive is conductive;
The piezoelectric sensor according to claim 6 .

The first adhesive, the second adhesive, or the spacer member has non-tackiness in an assembly environment.
The piezoelectric sensor according to claims 4 to 8.

The total thickness of the members stored in the storage window of the spacer member is thicker than the thickness of the spacer member;
The piezoelectric sensor according to claims 4 to 9.

The first base material has a second ground electrode on the back surface of the surface facing the first surface of the piezoelectric body.
The piezoelectric sensor according to claims 1 to 10.

Provided a protective film on the signal electrode, the ground electrode, or their wiring line,
The piezoelectric sensor according to claims 1 to 11.

A first adhesive for adhering the first surface of the piezoelectric body and the surface of the first substrate having the signal electrode;
A second adhesive for adhering the second surface of the piezoelectric body and the surface of the second substrate having the ground electrode;
The spacer member itself has adhesiveness, and a storage window for storing the piezoelectric body is formed.
The piezoelectric sensor according to claim 1 or 2 .

The first adhesive material has the same shape and the same area as the first surface of the piezoelectric body;
Alternatively, the second adhesive material has the same shape and the same area as the second surface of the piezoelectric body,
Together with the piezoelectric body, the first adhesive or the second adhesive is stored in the storage window.
The piezoelectric sensor according to claim 13 .

The first adhesive or the second adhesive is conductive;
The piezoelectric sensor according to claim 13 or 14 .

The first adhesive, the second adhesive, or the spacer member has non-tackiness in an assembly environment.
The piezoelectric sensor according to claim 13 to claim 15.

The total thickness of the members stored in the storage window is thicker than the spacer member;
The piezoelectric sensor according to claim 13 to claim 16.

The first base material has a second ground electrode on the back surface of the surface facing the first surface of the piezoelectric body.
The piezoelectric sensor according to claim 13 to claim 17.

Provided a protective film on the signal electrode, the ground electrode, or their wiring line,
The piezoelectric sensor according to claim 13 to claim 18.