WO2021095341A1 - 保管装置 - Google Patents

保管装置 Download PDF

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Publication number
WO2021095341A1
WO2021095341A1 PCT/JP2020/034269 JP2020034269W WO2021095341A1 WO 2021095341 A1 WO2021095341 A1 WO 2021095341A1 JP 2020034269 W JP2020034269 W JP 2020034269W WO 2021095341 A1 WO2021095341 A1 WO 2021095341A1
Authority
WO
WIPO (PCT)
Prior art keywords
mounting
pair
support
portions
extending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/034269
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
興会 徐
真司 大西
稲田　研
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Priority to JP2021555915A priority Critical patent/JP7375827B2/ja
Priority to CN202080067250.0A priority patent/CN114521184B/zh
Priority to US17/774,909 priority patent/US12159801B2/en
Priority to EP20887385.1A priority patent/EP4059869A4/en
Priority to KR1020227019126A priority patent/KR102725222B1/ko
Priority to IL292063A priority patent/IL292063B2/en
Publication of WO2021095341A1 publication Critical patent/WO2021095341A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/14—Stack holders or separators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D21/00—Nestable, stackable or joinable containers; Containers of variable capacity
    • B65D21/08—Containers of variable capacity
    • B65D21/086—Collapsible or telescopic containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/20—External fittings
    • B65D25/24—External fittings for spacing bases of containers from supporting surfaces, e.g. legs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
    • B65D81/2076—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere in an at least partially rigid container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/20—Undercarriages with or without wheels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408—Docking arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Definitions

  • This disclosure relates to a storage device.
  • the storage shelf described in Patent Document 1 includes a pair of struts in which a concave groove portion is formed, and a mounting portion fixed to the struts on which an object to be stored is placed.
  • the mounting portion includes a mounting main body portion that supports the stored object and a pair of mounting plate portions that are fixed to the columns. Each of the pair of mounting plate portions is inserted and fixed in the concave groove portion of the column. That is, in the storage shelf described in Patent Document 1, the mounting portion is positioned with respect to a pair of columns by the concave groove portion.
  • an object of the present disclosure is to provide a storage device capable of easily adjusting the flatness of the mounting portion on which the article is placed.
  • the storage device is a pair of support portions extending in the vertical direction and arranged apart from each other in the first direction, and a pair of support portions facing each first direction.
  • a pair of mounting portions are provided on the side surface, each of which is mounted via a fixing member having a shaft portion, and a mounting portion that is supported by the pair of mounting portions and on which an article is mounted.
  • Each of the holes has a hole through which the shaft is inserted, and the area of the hole is such that the pair of mounting parts can rotate along the side surface of the pair of support parts in the axial direction of the shaft. It is larger than the cross-sectional area orthogonal to.
  • the mounting part is supported by a pair of mounting parts.
  • the pair of attachments are attached to the pair of supports via a fixing member that is inserted into the hole. Since the area of the hole portion is larger than the cross-sectional area orthogonal to the axial direction of the shaft portion, each of the pair of mounting portions can rotate along the side surface of the support portion. By rotating the pair of mounting portions in this way, the flatness of the mounting portions supported by the pair of mounting portions can be corrected. Therefore, according to this storage device, the flatness of the mounting portion on which the article is placed can be easily adjusted.
  • Each of the pair of mounting portions is a surface along the first direction and the vertical direction of the pair of support portions, and is in contact with the front surface, which is the surface in the direction in which the mounting portion is located with respect to the support portion. It may have a tangent. According to this, each of the pair of mounting portions can rotate stably with the contact portion as a fulcrum. Therefore, according to this storage device, the flatness of the mounting portion can be easily adjusted in a more stable state.
  • a plurality of holes are provided in each of the pair of mounting portions, and the width of each pair of the mounting portions in the plurality of holes along the rotation direction increases as the distance from the contact portion increases. It may be formed to be large. According to this, the width of the pair of mounting portions in the hole portion along the rotation direction increases as the distance from the abutting portion increases. Therefore, even when a plurality of holes are provided, the abutting portion can be provided.
  • Each of the pair of mounting portions can be rotated as a fulcrum. Further, since the width of the pair of mounting portions in the hole along the rotation direction becomes smaller as it is closer to the abutting portion, the position of the fixing member in the hole is less likely to shift, and the pair of mounting portions is suitable. It can be installed stably at the position.
  • the storage devices include a pair of support portions extending in the vertical direction and arranged in the first direction, a pair of attachment portions attached to each of the pair of support portions, and one.
  • a mounting portion that is supported by a pair of mounting portions and on which an article is placed is provided, and each of the pair of mounting portions is connected to a support mounting surface that is mounted on the pair of support portions and a support mounting surface.
  • the force required to change the angle of the mounting mounting surface with respect to the extending mounting surface is smaller than the force required to deform the mounting portion.
  • the mounting part is supported by a pair of mounting parts.
  • a pair of attachments are attached to the support via a support attachment surface.
  • the mounting mounting surface extends from the upper end portion of the extending surface along the bottom surface of the mounting portion.
  • the force required to change the angle of the mounting mounting surface with respect to the extending surface is smaller than the force required to deform the mounting portion. For this reason, for example, when the pair of mounting mounting surfaces are not parallel to each other before mounting the mounting portion (that is, when there is a gap between the pair of mounting mounting surfaces), the mounting portion can be used. Before the mounting portion is deformed due to the displacement due to the mounting, the pair of mounting mounting surfaces change the angle in the direction of reducing the displacement. As a result, the flatness of the mounting portion is kept small. Therefore, according to this storage device, the flatness of the mounting portion on which the article is placed can be easily adjusted.
  • the mounting mounting surface may extend from a part of the total length of the upper end of the extending surface along the bottom surface of the mounting portion. According to this, the force required to change the angle of the mounting mounting surface with respect to the extending surface is applied by a simple configuration in which the mounting mounting surface is provided only on a part of the upper end of the extending surface. It can be less than the force required to deform the part.
  • Each of the pair of mounting portions may be composed of a member thinner than the mounting portion. According to this, the force required to change the angle of the mounting mounting surface with respect to the extending surface is applied by a simple configuration in which the thickness of each of the pair of mounting portions is made thinner than that of the mounting portion. It can be less than the force required to deform the part.
  • the article is a container capable of supplying gas to the inside through a supply hole provided at the bottom, and the mounting portion may have a gas supply unit for supplying gas into the container through the supply hole. .. According to this, by adjusting the flatness of the mounting portion, the close contact between the supply hole of the container and the gas supply portion is maintained, so that the gas can be appropriately supplied into the container.
  • FIG. 1 is a perspective view of the storage device of one embodiment.
  • FIG. 2 is a side view of the storage device of one embodiment.
  • FIG. 3 is a perspective view of the mounting portion of the storage device shown in FIG.
  • FIG. 4 is an enlarged side view of a part of the storage device shown in FIG.
  • each axial direction in the Cartesian coordinate system of the three-dimensional space is referred to as an X direction, a Y direction, and a Z direction.
  • the X direction and the Y direction are directions along the horizontal plane, and the Z direction is the vertical direction (vertical direction).
  • the storage device 1 of one embodiment stores a container 5 which is an example of an article.
  • the container 5 is, for example, a box-shaped housing (for example, FOUP (Front Opening Unified Pod)) in which one or a plurality of semiconductor wafers and the like are housed.
  • the container 5 holds the semiconductor wafer inside and protects the semiconductor wafer.
  • the bottom 5a of the container 5 is provided with a supply hole 5b that communicates the inside of the container 5 with the outside of the container 5.
  • Purge gas for example, nitrogen gas
  • the storage device 1 includes a pair of columns 10 extending in the Z direction (an example of a support portion), a pair of brackets 30 attached to the pair of columns 10 (an example of an attachment portion), and a pair of brackets. It is provided with a shelf plate 20 (an example of a mounting portion) supported by a 30 and on which a container 5 is mounted, and a plurality of bolts 40 (an example of a fixing member) for fixing each bracket 30 to each support column 10.
  • the shelf board 20 is located on one side in the X direction with respect to the pair of columns 10.
  • one side in the X direction (that is, the side on which the shelf board 20 is arranged with respect to the pair of columns 10) is defined as the front, and the other side in the X direction is defined as the rear.
  • the inside of the pair of columns 10 is simply referred to as the inside, and the outside of the pair of columns 10 is simply defined as the outside.
  • each support column 10 is an L-shaped member when viewed from above. Specifically, each support column 10 has a front surface 10a which is a surface facing the front side (a surface along the Y direction and the Z direction) and a side surface 10b which is a surface intersecting the front surface 10a (a surface facing the outside). Have.
  • the front surface 10a is a surface in the direction in which the shelf board 20 described later is located with respect to the support column 10. As shown in FIG. 1, in the present embodiment, the side surface 10b of each support column 10 extends rearward from the outer end portion of the front surface 10a in the Y direction.
  • An insertion hole 12 through which the bolt 40 is inserted is provided on the side surface 10b of each support column 10.
  • the insertion hole 12 penetrates in the Y direction.
  • the insertion holes 12 are provided according to the number and positions of the holes 34 described later.
  • a bolt 40 inserted into the hole 34 is inserted into the insertion hole 12 and fixed by a nut (not shown).
  • the shelf board 20 is a member that supports the container 5. That is, the container 5 is placed on the shelf board 20.
  • the shelf board 20 is attached to a pair of columns 10 via a pair of brackets 30.
  • the shelf board 20 has a plate shape, for example.
  • the bottom portion 5a of the container 5 is supported by the top surface 20a of the shelf plate 20.
  • a pair of brackets 30 are attached to the bottom surface 20b of the shelf board 20.
  • the shelf board 20 has a recess 20c recessed from the front end to the rear in the central portion in the Y direction, and is formed in a substantially U shape in the top view.
  • the recess 20c forms an opening region S that penetrates in the Z direction and opens to the front side.
  • a plurality of shelf boards 20 may be provided for a pair of columns 10.
  • a plurality of shelves 20 may be provided between the pair of columns 10 in the Z direction.
  • the installation interval of the shelf boards 20 adjacent to each other in the Z direction is set to be larger than the height of the container 5 (the length in the Z direction).
  • the depth (length in the X direction) and width (length in the Y direction) of the opening region S are appropriately set according to the structure of the container 5, the structure of the device for taking out the container 5, and the like. Further, the opening region S (that is, the recess 20c) does not necessarily have to be provided.
  • the shelf board 20 further has a gas supply unit 21.
  • the gas supply unit 21 communicates with a gas pipe (not shown) and a gas cylinder (not shown) to ventilate the purge gas.
  • the gas supply unit 21 is, for example, a nozzle having a columnar shape protruding from the upper surface 20a of the shelf board 20.
  • the gas pipe is a pipe that connects the gas supply unit 21 and the gas cylinder.
  • the container 5 is purged by supplying the purge gas to the inside of the container 5 through the supply hole 5b of the container 5, the gas supply unit 21, and the gas pipe.
  • the gas supply unit 21 is appropriately provided according to the number, size, and shape of the supply holes 5b of the container 5.
  • each bracket 30 is members that support the shelf board 20.
  • Each bracket 30 is attached to the side surface 10b of each support column 10.
  • each bracket 30 extends with a support mounting portion 31 facing the side surface 10b of each support column 10 and an extending portion 32 connected to the support mounting portion 31. It has a contact portion 33 connected to the existing portion 32 and a mounting mounting portion 35 connected to the upper end portion 32b of the extending portion 32.
  • the support mounting portion 31, the extending portion 32, the contact portion 33, and the mounting mounting portion 35 each have a plate shape, for example.
  • the support mounting portion 31 is mounted on the side surface 10b of each support column 10 via a bolt 40.
  • the support mounting portion 31 extends in the X direction and the Z direction.
  • the length and shape of the support mounting portion 31 in the X direction and the Z direction are appropriately set according to the size of the side surface 10b of each support column 10.
  • the support mounting portion 31 is provided on the outer side surface 10b of each column 10 (that is, the surface facing the opposite side in the Y direction).
  • the support mounting portion 31 has a support mounting surface 31a which is an outer surface.
  • the support mounting surface 31a is a surface that is mounted on the side surface 10b of each support column 10 and is along the side surface 10b.
  • the support mounting portion 31 is provided with a hole portion 34. Details of the hole 34 will be described later.
  • the extending portion 32 is connected to the front end portion of the support mounting portion 31, and extends along the side surface 10b of each supporting column 10 in the direction in which the shelf plate 20 is located (front side) with respect to each supporting column 10. To do.
  • the extending portion 32 is appropriately set according to the size and shape of the container 5 housed below.
  • the extending portion 32 extends from the front surface 10a of the support column 10 to a position behind the front end portion of the shelf board 20. That is, when viewed from the Y direction, the front end of the shelf board 20 projects forward from the front end of the extending portion 32.
  • the extending portion 32 extends to the position of the gas supply portion 21 provided on the most front side in the X direction.
  • the extending portion 32 has an extending surface 32a which is an outer surface.
  • the extending surface 32a is a surface extending along the side surface 10b of each support column 10 and is connected to the support mounting surface 31a.
  • the support mounting surface 31a and the extending surface 32a are continuous and form the same plane.
  • the extending portion 32 (extending surface 32a) has an upper end portion 32b along the X direction. Further, the extending portion 32 has a lower end portion 32c that moves upward toward the front side.
  • the extending portion 32 has a shape in which the length in the Z direction (that is, the distance between the upper end portion 32b and the lower end portion 32c) decreases toward the front side.
  • the contact portion 33 has a hook shape, for example.
  • the contact portion 33 is connected to, for example, a portion on the rear side of the lower end portion 32c (a portion in the vicinity of each support column 10).
  • the contact portion 33 is a portion extending downward from the lower end portion 32c, the first extending portion 33a, and the lower end portion of the first extending portion 33a toward the inside along the bottom surface 20b of the shelf board 20. It has a second extending portion 33b that extends.
  • the first extending portion 33a and the second extending portion 33b are formed in a substantially L shape when viewed from the X direction. At least a part of the second extending portion 33b projects to the rear side, that is, toward the front surface 10a of each support column 10. As shown in FIG.
  • the tip portion 33c on the front surface 10a side of each support column 10 in the second extending portion 33b hits the front surface 10a of each support column 10 in a state where each bracket 30 is attached to each support column 10. It is formed to touch.
  • the first extending portion 33a may be omitted. That is, the second extending portion 33b may be directly connected to the lower end portion 32c of the extending portion 32.
  • the hole portion 34 penetrates the support mounting portion 31 in the Y direction.
  • the support mounting portion 31 is mounted on the side surface 10b of each support column 10 via a bolt 40 inserted through the hole portion 34.
  • the bolt 40 inserted through the hole 34 is inserted into the insertion hole 12 provided on the side surface 10b of each support column 10.
  • the bolt 40 inserted into the insertion hole 12 is fixed to each support column 10 by a nut (not shown) inside.
  • the bolt 40 has a shaft shape.
  • the bolts 40 are provided according to the number and positions of the holes 34.
  • the bolt 40 has a head portion 40a that is close to or in contact with the support mounting surface 31a of the support mounting portion 31, and a shaft portion 40b that is inserted into the hole portion 34 and the insertion hole 12.
  • the head portion 40a and the shaft portion 40b exhibit, for example, a columnar shape.
  • the head 40a has a cross-sectional area orthogonal to the axial direction (Y direction) of the shaft portion 40b and a cross-sectional area larger than the area of the hole portion 34.
  • the area of the hole 34 refers to the area of the hole 34 as seen from the Y direction.
  • each hole 34 is, for example, circular when viewed from the Y direction.
  • the area of the hole portion 34 is larger than the cross-sectional area of the shaft portion 40b of the bolt 40 orthogonal to the Y direction so that the pair of brackets 30 can rotate along the side surface 10b of each support column 10. That is, the diameter of the hole portion 34 is larger than the diameter of the shaft portion 40b. Therefore, the support mounting portion 31 is attached to the side surface 10b of each support column 10 by bolts 40, and the support mounting portion 31 is released (or loosened) by the bolts 40 and nuts on the side surface 10b of each support column 10.
  • each bracket 30 can rotate about the tip end portion 33c of the contact portion 33 along the rotation direction R.
  • the degree of fixation of the support mounting portion 31 to the side surface 10b of each support column 10 can be adjusted by adjusting the degree of tightening of the nut.
  • the rotation direction R is the circumferential direction of a circle centered on the tip 33c of the contact portion 33 in a plane along the side surface 10b of each support column 10. That is, the contact position between the tip end portion 33c of the contact portion 33 and the front surface 10a of each support column 10 when viewed from the Y direction constitutes the rotation center position P of each bracket 30. Therefore, the rotation center position P and the rotation direction R of each bracket 30 can be adjusted by appropriately designing the length of the first extending portion 33a in the Z direction and setting the contact position.
  • each hole portion 34 the width w along the rotation direction R is formed so as to increase as the distance from the tip portion 33c of the contact portion 33 increases.
  • the above configuration is realized by forming the hole portion 34 in a circular shape and appropriately designing the diameter of the hole portion 34. That is, the diameter of each hole portion 34 is designed to increase as the distance d from the rotation center position P to the hole portion 34 increases.
  • the mounting mounting portion 35 is, for example, along the third extending portion 35a, which is a portion extending upward from the upper end portion 32b of the extending portion 32, and the bottom surface 20b of the shelf board 20 from the third extending portion 35a.
  • the fourth extending portion 35b is joined so as to support at least a part of the bottom surface 20b of the shelf board 20 from below.
  • the shelf board 20 and the mounting mounting portion 35 are joined by, for example, pins and nuts.
  • the third extending portion 35a may be omitted. That is, the fourth extending portion 35b may be directly connected to the upper end portion 32b of the extending portion 32.
  • the mounting mounting portion 35 is provided on a part of the entire length of the upper end portion 32b of the extending portion 32. Further, the mounting mounting portion 35 is provided at a plurality of (two in the present embodiment) upper end portions 32b of the extending portion 32 separated from each other.
  • the mounting mounting portion 35 located on the front side in the X direction is referred to as the first mounting mounting portion 35A, and the mounting mounting portion 35 is located on the rear side in the X direction.
  • the portion 35 be the second mounting mounting portion 35B.
  • the length of the first mounting portion 35A in the X direction is made longer than the length of the second mounting mounting portion 35B in the X direction, so that the moment bias in the extending portion 32 is increased. It is suppressed.
  • the mounting mounting portion 35 (first mounting mounting portion 35A and second mounting mounting portion 35B) is connected to the upper end portion 32b of the extending portion 32, and the bottom surface 20b of the shelf board 20 is supported from below. It has a mounting mounting surface 35c that extends along 20b.
  • the mounting mounting surface 35c is, for example, the upper surface of the fourth extending portion 35b.
  • the mounting mounting surface 35c is, for example, substantially parallel to the second extending portion 33b of the contact portion 33. At least a part of the mounting mounting surface 35c is joined to the bottom surface 20b of the shelf board 20.
  • the mounting mounting portion 35 (mounting mounting surface 35c) is provided, for example, at a position close to the gas supply portion 21 provided on the shelf plate 20 in the X direction.
  • the gas supply unit 21 may be deformed due to the load of the container 5 placed on the shelf board 20 or the impact at the time of placing the container 5.
  • the mounting mounting portion 35 can take charge of the force applied to the shelf plate 20.
  • the force applied to the shelf plate 20 when the container 5 is placed can be dispersed to the extending portion 32, the support mounting portion 31, and each support column 10 via the mounting mounting portion 35.
  • the force applied to the portion of the shelf board 20 to which the mounting mounting portion 35 is not mounted can be suppressed in the X direction, and the amount of deformation of the shelf board 20 can be reduced.
  • the force required to change the angle of the mounting mounting surface 35c with respect to the extending surface 32a is smaller than the force required to deform the shelf board 20. That is, the strengths of the shelf board 20 and the pair of brackets 30 are adjusted so that the above relationship is established. That is, at least one of the pair of brackets 30 is deformed first before the shelf board 20 mounted on the pair of brackets 30 bends or bends. For example, the fourth extending portion 35b of the mounting mounting portion 35 is downward with respect to the third extending portion 35a from the force required to bend a part of the shelf board 20 downward to increase the flatness. The force required to bend is less.
  • changing the angle of the mounting mounting surface 35c with respect to the extending surface 32a includes changing the angle of the fourth extending portion 35b with respect to the third extending portion 35a.
  • the entire fourth extending portion 35b is bent with respect to the third extending portion 35a, or a part of the fourth extending portion 35b is the first.
  • the angle of the 4th extending portion 35b with respect to the 3rd extending portion 35a changes.
  • the third extending portion 35a may be bent in the Z direction.
  • each bracket 30 may be made of a member thinner than the shelf board 20. It is not necessary that the overall strength of each bracket 30 is uniformly weakened, and at least the mounting mounting portion 35 may be made of a member having a strength weaker than that of the shelf board 20.
  • the shelf The plate 20 may not be supported by the mounting mounting portion 35 in a well-balanced manner, and the load (force received from the mounting mounting portion 35 or the container 5) may be concentrated on a part of the shelf plate 20 to deform the shelf plate 20. is there.
  • the mounting mounting portion 35 extends from a part of the upper end portion 32b of the extending portion 32, and is formed so as to be weaker in strength than the shelf board 20.
  • the mounting mounting portion 35 is deformed before the shelf plate 20.
  • the flatness of the shelf board 20 can be kept small. For example, even if a machining error occurs in the mounting mounting portion 35 or each bracket 30, the mounting mounting portion 35 converges the machining error before the shelf plate 20 is deformed due to the machining error. Transforms first. Therefore, the influence of the processing error of the mounting mounting portion 35 or the bracket 30 on the flatness of the shelf plate 20 is reduced. As described above, since the mounting mounting portion 35 is deformed before the shelf board 20, the shelf board 20 is suppressed from being deformed by the force acting on the shelf board 20 from the mounting mounting portion 35 or the container 5. Flatness becomes smaller.
  • the pair of brackets 30 are connected to the side surfaces 10b of the pair of columns 10 via bolts 40.
  • the bolt 40 is inserted into each hole 34 provided in the support mounting portion 31 of each bracket 30 and is inserted into each insertion hole 12 of each support column 10, and is fixed by tightening a nut (not shown).
  • the support mounting portion 31 is fixed so as to be sandwiched between the head portion 40a of the bolt 40 and the side surface 10b of each support column 10. At this time, the rotation angle ⁇ of each bracket 30 with respect to each support column 10 is adjusted.
  • the rotation angle ⁇ is the angle of the mounting mounting surface 35c (second extending portion 33b) with respect to the front surface 10a of each support column 10 in the rotation direction R.
  • the rotation angle ⁇ is adjusted so that, for example, the mounting mounting surface 35c is horizontal to the ground plane (not shown) of the pair of columns 10 (so that the parallelism is reduced).
  • the shelf board 20 is installed on the mounting mounting surface 35c.
  • the horizontal displacement from the pair of brackets 30 is suppressed.
  • the shelf board 20 and the pair of brackets 30 the above-described configuration and function can be obtained.
  • the container 5 is transferred from the front side to the storage device 1, the operation of each part of the storage device 1 will be described.
  • the container 5 is placed on the upper surface 20a of the shelf board 20 toward the rear (direction from the shelf board 20 to the front surface 10a of each support column 10).
  • the supply hole 5b of the container 5 and the gas supply unit 21 are engaged with each other. Since the mounting mounting portion 35 is provided at a position close to the gas supply portion 21 in the X direction, the loading by the container 5 is received by the mounting mounting surface 35c of the mounting mounting portion 35 via the shelf plate 20.
  • the load of the container 5 can be applied to the extending portion 32, the support mounting portion 31, and each support column 10 via the mounting mounting portion 35, so that the shelf to which the mounting mounting portion 35 is not mounted in the X direction.
  • the force applied to the portion of the plate 20 can be suppressed, and the amount of deformation of the shelf plate 20 can be reduced.
  • an impact may be applied to the shelf board 20 and the pair of brackets 30.
  • the shelf board 20 and An impact may be applied to the pair of brackets 30.
  • a load is applied to the shelf board 20 and the pair of brackets 30.
  • the flatness of the shelf board 20 may increase.
  • the rotation angles ⁇ of the pair of brackets 30 may be different from each other.
  • the flatness of the shelf plate 20 can be adjusted by rotating the support mounting portion 31 of each bracket 30 with the tip portion 33c (rotation center position P) of the contact portion 33 as a fulcrum.
  • each bracket 30 By loosening each nut (not shown) in each bolt 40, the fixing of each bracket 30 to each support column 10 is released (or loosened). Since the area of the hole portion 34 is larger than the cross-sectional area of the shaft portion 40b of the bolt 40 orthogonal to the Y direction to the extent that each bracket 30 can rotate, the support mounting portion 31 has the shape of the plurality of hole portions 34. It can be moved together. For example, when it is desired to adjust the mounting mounting surface 35c so as to be located below the state before the adjustment, the position of each hole 34 viewed from the Y direction (from the Y direction) with the tip 33c of the contact portion 33 as the center. The seen center position) may be rotated so as to be shifted forward in the rotation direction R.
  • each hole 34 viewed from the Y direction is rotated around the tip 33c of the contact portion 33. It may be rotated so as to be displaced rearward in the direction R.
  • the flatness of the shelf board 20 can be adjusted to be small. .. Further, by adjusting the position of the mounting mounting surface 35c, that is, the rotation angle on at least one of the pair of brackets 30, the shelf plate 20 is parallel to the ground plane of the storage device 1 (parallel). It can be adjusted (to reduce the degree).
  • the shelf board 20 is supported by a pair of brackets 30.
  • the pair of brackets 30 are attached to the pair of columns 10 via bolts 40 that are inserted into the holes 34. Since the area of the hole 34 is larger than the cross-sectional area of the bolt 40 (shaft 40b) orthogonal to the axial direction (Y direction), each bracket 30 rotates along the side surface 10b of each support column 10. Can be done. That is, the diameter of the hole portion 34 is formed to be larger than the size corresponding to the diameter of the shaft portion 40b (that is, the size substantially matching the diameter of the shaft portion 40b).
  • the position of the hole 34 can be moved along the XZ plane while the shaft 40b is inserted into the hole 34, and each bracket 30 is rotated as the hole 34 moves. Can be done.
  • the flatness of the shelf board 20 supported by the pair of brackets 30 can be corrected. Therefore, according to the storage device 1, the flatness of the shelf board 20 on which the container 5 (article) is placed can be easily adjusted.
  • each bracket 30 has an abutting portion 33 that abuts on the front surface 10a of each strut 10, each bracket 30 can rotate stably with the abutting portion 33 as a fulcrum. Thereby, the flatness of the shelf board 20 can be easily adjusted in a more stable state. Further, by providing the contact portion 33, the rotation center position P of each bracket 30 can be adjusted flexibly and easily.
  • the contact portion 33 since the width w of the hole portion 34 along the rotation direction R increases as the distance d from the contact portion 33 increases, even when a plurality of hole portions 34 are provided, the contact portion 33 The rotation angle ⁇ can be adjusted by rotating each bracket 30 with the tip portion 33c of the above as a fulcrum. Further, since the width w of the hole portion 34 along the rotation direction R becomes smaller as it is closer to the contact portion 33, the position of the bolt 40 in the hole portion 34 is less likely to shift. Therefore, a pair of brackets 30 is suitable. It can be installed stably in any position.
  • the force required to change the angle of the mounting mounting surface 35c with respect to the extending surface 32a is smaller than the force required to deform the shelf board 20. Therefore, for example, when the pair of mounting mounting surfaces 35c are not parallel to each other before mounting the shelf board 20 (that is, when there is a gap between the pair of mounting mounting surfaces 35c), the shelf boards Before the shelf board 20 is deformed due to the deviation due to the attachment of 20, the pair of mounting mounting surfaces 35c changes the angle in the direction of reducing the deviation. As a result, the flatness of the shelf board 20 is kept small.
  • the mounting mounting surface 35c extends from a part of the total length of the upper end portion 32b of the extending portion 32 (in the present embodiment, two separated regions) along the bottom surface 20b of the shelf board 20.
  • each bracket 30 is made of a member thinner than the shelf board 20. With a simple configuration such that the thickness of each bracket 30 is thinner than that of the shelf board 20, the force required to change the angle of the mounting mounting surface 35c with respect to the extending surface 32a is required to deform the shelf board 20. It can be made smaller than the force.
  • the flatness of the shelf plate 20 is adjusted so that the supply hole 5b of the container 5 and the gas supply unit 21 are connected to each other. Since the adhesion is maintained, the gas can be appropriately supplied into the container 5. Further, in particular, since the mounting mounting surface 35c is provided at a position close to the gas supply section 21 in the X direction, the mounting mounting section 35 can take charge of the force applied to the shelf plate 20 (gas supply section 21). it can. The force applied to the shelf plate 20 when the container 5 is placed is distributed to the extending portion 32, the support mounting portion 31, and each support column 10 via the mounting mounting portion 35. As a result, the force applied to the portion of the shelf board 20 to which the mounting mounting portion 35 is not mounted can be suppressed in the X direction, and the amount of deformation of the shelf board 20 can be reduced.
  • the present disclosure is not limited to the present embodiment described above.
  • the material and shape of each configuration not only the above-mentioned material and shape but also various materials and shapes can be adopted.
  • the pair of brackets 30 may be attached to one support member having two side surfaces 10b facing each other in the Y direction instead of the pair of struts 10.
  • the support mounting surface may be the inner surface of the support mounting portion 31.
  • each strut may have, for example, a configuration in which the side surface of each strut extends rearward from the inner end portion of the front surface of each strut in the Y direction. That is, the side surfaces of the respective columns may be configured to face inward and face each other.
  • the outer surface of the support mounting portion 31 is in contact with the side surface of each column.
  • the extending surface (that is, the surface continuous with the support mounting surface) is the inner surface of the extending portion 32.
  • the extending portion 32 may extend to the front end of the shelf board 20. Further, the extending surface 32a does not have to be a surface extending in the X direction and the Z direction. In this case, the extending portion 32 is, for example, a portion extending at least in the X direction, and one surface of the extending portion 32 at this time may be the extending surface 32a.
  • the extending surface 32a may include an outer surface of the third extending portion 35a.
  • Each bracket 30 does not have to have the contact portion 33.
  • the pair of brackets 30 cannot be rotated in the rotation direction R about the tip portion 33c of the contact portion 33, but the hole portion 34 is relatively moved with respect to the shaft portion 40b of the bolt 40. By doing so, the rotation angle of the pair of brackets 30 can be adjusted.
  • each bracket 30 only one hole 34 may be provided. Further, one bolt 40 inserted into one of the plurality of hole portions 34 may function as a central axis of rotation of each bracket 30. In this case, the one hole portion 34 has a size that allows the shaft portion 40b of the bolt 40 to be inserted, that is, has substantially the same diameter as the shaft portion 40b.
  • each hole 34 is not limited to a circular shape.
  • each hole 34 may be formed in an arch shape extending widely along the rotation direction R.
  • the shapes of the plurality of hole portions 34 may all be the same, or may be different for each hole portion 34.
  • the plurality of hole portions 34 do not necessarily have to be formed so that the width w along the rotation direction R becomes larger as the width w is farther from the abutting portion 33.
  • the mounting mounting portion 35 is provided on a part of the upper end portion 32b of the extending portion 32, but the mounting mounting portion 35 is provided over the entire upper end portion 32b of the extending portion 32. May be done. Further, the strength of the bracket 30 may be equal to or higher than the strength of the shelf board 20.
  • the mounting mounting portion 35 (mounting mounting surface 35c) may be provided on all of the upper end portions 32b of the extending portion 32 (extending surface 32a) (that is, over the entire upper end portion 32b).
  • the storage device 1 has a configuration in which the area of the hole 34 is larger than the cross-sectional area orthogonal to the Y direction of the bolt 40 (that is, a configuration in which each bracket 30 is rotatable along the rotation direction R), and It suffices to have at least one of the configurations in which the force required to change the angle of the mounting mounting surface 35c with respect to the extending surface 32a is smaller than the force required to deform the shelf board 20.
  • each bracket does not necessarily have to be attached to the side surface of each support column 10.
  • each bracket may be attached to each support column 10 by providing a face portion facing the front surface 10a of each support column 10 and joining the face portion and the front surface 10a.
  • the insertion hole 12 may be formed with a groove portion to be screwed with the shaft portion 40b of the bolt 40.
  • the nut may be omitted.
  • the bolt 40 releases (looses) the fixing of the support mounting portion 31 to each strut 10 by adjusting the length of the portion of the shaft portion 40b that protrudes outward from the side surface 10b of each strut 10. be able to.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Valve Device For Special Equipments (AREA)
  • Vehicle Body Suspensions (AREA)
PCT/JP2020/034269 2019-11-12 2020-09-10 保管装置 Ceased WO2021095341A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2021555915A JP7375827B2 (ja) 2019-11-12 2020-09-10 保管装置
CN202080067250.0A CN114521184B (zh) 2019-11-12 2020-09-10 保管装置
US17/774,909 US12159801B2 (en) 2019-11-12 2020-09-10 Storage device
EP20887385.1A EP4059869A4 (en) 2019-11-12 2020-09-10 STORAGE DEVICE
KR1020227019126A KR102725222B1 (ko) 2019-11-12 2020-09-10 보관 장치
IL292063A IL292063B2 (en) 2019-11-12 2020-09-10 Storage device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-204470 2019-11-12
JP2019204470 2019-11-12

Publications (1)

Publication Number Publication Date
WO2021095341A1 true WO2021095341A1 (ja) 2021-05-20

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PCT/JP2020/034269 Ceased WO2021095341A1 (ja) 2019-11-12 2020-09-10 保管装置

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US (1) US12159801B2 (https=)
EP (1) EP4059869A4 (https=)
JP (1) JP7375827B2 (https=)
KR (1) KR102725222B1 (https=)
CN (1) CN114521184B (https=)
IL (1) IL292063B2 (https=)
TW (1) TWI849255B (https=)
WO (1) WO2021095341A1 (https=)

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JP7740211B2 (ja) * 2022-11-24 2025-09-17 株式会社ダイフク 物品収納棚

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JP2016219537A (ja) * 2015-05-18 2016-12-22 村田機械株式会社 パージ装置及びパージストッカ
JP2017048017A (ja) * 2015-09-02 2017-03-09 株式会社ダイフク 保管棚
JP2019011179A (ja) * 2017-06-30 2019-01-24 株式会社ダイフク 物品支持棚
JP2019038647A (ja) 2017-08-24 2019-03-14 株式会社ダイフク 保管棚
JP2019112160A (ja) * 2017-12-21 2019-07-11 株式会社ダイフク 物品収納設備

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JPH10181810A (ja) * 1996-12-19 1998-07-07 Daifuku Co Ltd 自動倉庫
JP4519473B2 (ja) 2004-01-28 2010-08-04 株式会社岡村製作所 棚支持用ブラケット装置
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JP6551240B2 (ja) * 2016-01-06 2019-07-31 株式会社ダイフク 物品収納棚、及び、それを備えた物品収納設備
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JP6693356B2 (ja) * 2016-09-09 2020-05-13 株式会社ダイフク 物品搬送装置
WO2018066208A1 (ja) * 2016-10-04 2018-04-12 村田機械株式会社 保管棚
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JP2016219537A (ja) * 2015-05-18 2016-12-22 村田機械株式会社 パージ装置及びパージストッカ
JP2017048017A (ja) * 2015-09-02 2017-03-09 株式会社ダイフク 保管棚
JP2019011179A (ja) * 2017-06-30 2019-01-24 株式会社ダイフク 物品支持棚
JP2019038647A (ja) 2017-08-24 2019-03-14 株式会社ダイフク 保管棚
JP2019112160A (ja) * 2017-12-21 2019-07-11 株式会社ダイフク 物品収納設備

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See also references of EP4059869A4

Also Published As

Publication number Publication date
EP4059869A1 (en) 2022-09-21
JP7375827B2 (ja) 2023-11-08
IL292063B2 (en) 2026-01-01
CN114521184B (zh) 2024-06-25
US12159801B2 (en) 2024-12-03
EP4059869A4 (en) 2023-11-22
TWI849255B (zh) 2024-07-21
JPWO2021095341A1 (https=) 2021-05-20
CN114521184A (zh) 2022-05-20
KR102725222B1 (ko) 2024-10-31
IL292063A (en) 2022-06-01
IL292063B1 (en) 2025-09-01
KR20220097964A (ko) 2022-07-08
TW202126558A (zh) 2021-07-16
US20220415689A1 (en) 2022-12-29

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