TWI849255B - 保管裝置 - Google Patents

保管裝置 Download PDF

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Publication number
TWI849255B
TWI849255B TW109139108A TW109139108A TWI849255B TW I849255 B TWI849255 B TW I849255B TW 109139108 A TW109139108 A TW 109139108A TW 109139108 A TW109139108 A TW 109139108A TW I849255 B TWI849255 B TW I849255B
Authority
TW
Taiwan
Prior art keywords
pair
mounting
parts
aforementioned
loading
Prior art date
Application number
TW109139108A
Other languages
English (en)
Chinese (zh)
Other versions
TW202126558A (zh
Inventor
徐興会
司
稲田研
Original Assignee
日商村田機械股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商村田機械股份有限公司 filed Critical 日商村田機械股份有限公司
Publication of TW202126558A publication Critical patent/TW202126558A/zh
Application granted granted Critical
Publication of TWI849255B publication Critical patent/TWI849255B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/14—Stack holders or separators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D21/00—Nestable, stackable or joinable containers; Containers of variable capacity
    • B65D21/08—Containers of variable capacity
    • B65D21/086—Collapsible or telescopic containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/20—External fittings
    • B65D25/24—External fittings for spacing bases of containers from supporting surfaces, e.g. legs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
    • B65D81/2076—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere in an at least partially rigid container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/20—Undercarriages with or without wheels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408—Docking arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Valve Device For Special Equipments (AREA)
  • Vehicle Body Suspensions (AREA)
TW109139108A 2019-11-12 2020-11-10 保管裝置 TWI849255B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-204470 2019-11-12
JP2019204470 2019-11-12

Publications (2)

Publication Number Publication Date
TW202126558A TW202126558A (zh) 2021-07-16
TWI849255B true TWI849255B (zh) 2024-07-21

Family

ID=75912250

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109139108A TWI849255B (zh) 2019-11-12 2020-11-10 保管裝置

Country Status (8)

Country Link
US (1) US12159801B2 (https=)
EP (1) EP4059869A4 (https=)
JP (1) JP7375827B2 (https=)
KR (1) KR102725222B1 (https=)
CN (1) CN114521184B (https=)
IL (1) IL292063B2 (https=)
TW (1) TWI849255B (https=)
WO (1) WO2021095341A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7740211B2 (ja) * 2022-11-24 2025-09-17 株式会社ダイフク 物品収納棚

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016219537A (ja) * 2015-05-18 2016-12-22 村田機械株式会社 パージ装置及びパージストッカ
TW201713584A (zh) * 2015-09-02 2017-04-16 大福股份有限公司 保管棚
TW201726519A (zh) * 2016-01-06 2017-08-01 大福股份有限公司 物品收納架、及、具有物品收納架的物品收納設備
WO2018066208A1 (ja) * 2016-10-04 2018-04-12 村田機械株式会社 保管棚
US20190002200A1 (en) * 2017-06-30 2019-01-03 Daifuku Co., Ltd. Article Support Rack
JP2019112160A (ja) * 2017-12-21 2019-07-11 株式会社ダイフク 物品収納設備

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5381738A (en) * 1993-07-19 1995-01-17 Meyer; Klaus Adjustable work table assembly
US5592886A (en) * 1994-01-31 1997-01-14 Amco Corporation Adjustable wall-mounted system for shelves
US5775655A (en) * 1996-09-23 1998-07-07 Schmeets; Harold H. Colllapsible and adjustable support means for attachment to a building structure
JPH10181810A (ja) * 1996-12-19 1998-07-07 Daifuku Co Ltd 自動倉庫
JP4519473B2 (ja) 2004-01-28 2010-08-04 株式会社岡村製作所 棚支持用ブラケット装置
US9433114B2 (en) * 2014-03-28 2016-08-30 International Business Machines Corporation Service shelf for electronic cabinet
US9888603B1 (en) * 2016-02-29 2018-02-06 EMC IP Holding Co. LLC Slider arm assembly for cable carrier
JP6693356B2 (ja) * 2016-09-09 2020-05-13 株式会社ダイフク 物品搬送装置
JP6855979B2 (ja) 2017-08-24 2021-04-07 株式会社ダイフク 保管棚
US10470565B1 (en) * 2019-06-11 2019-11-12 Rom Acquisition Corporation Foldable shelving construction
US11457735B1 (en) * 2021-08-04 2022-10-04 Lucio D'Isep Storage system
US11641942B1 (en) * 2022-02-08 2023-05-09 Ken Rockley Pty Ltd. Storage rack system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016219537A (ja) * 2015-05-18 2016-12-22 村田機械株式会社 パージ装置及びパージストッカ
TW201713584A (zh) * 2015-09-02 2017-04-16 大福股份有限公司 保管棚
TW201726519A (zh) * 2016-01-06 2017-08-01 大福股份有限公司 物品收納架、及、具有物品收納架的物品收納設備
WO2018066208A1 (ja) * 2016-10-04 2018-04-12 村田機械株式会社 保管棚
US20190002200A1 (en) * 2017-06-30 2019-01-03 Daifuku Co., Ltd. Article Support Rack
JP2019112160A (ja) * 2017-12-21 2019-07-11 株式会社ダイフク 物品収納設備

Also Published As

Publication number Publication date
EP4059869A1 (en) 2022-09-21
JP7375827B2 (ja) 2023-11-08
IL292063B2 (en) 2026-01-01
CN114521184B (zh) 2024-06-25
US12159801B2 (en) 2024-12-03
EP4059869A4 (en) 2023-11-22
JPWO2021095341A1 (https=) 2021-05-20
CN114521184A (zh) 2022-05-20
KR102725222B1 (ko) 2024-10-31
IL292063A (en) 2022-06-01
IL292063B1 (en) 2025-09-01
KR20220097964A (ko) 2022-07-08
WO2021095341A1 (ja) 2021-05-20
TW202126558A (zh) 2021-07-16
US20220415689A1 (en) 2022-12-29

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